JP4915093B2 - Manufacturing method of color filter - Google Patents

Description

  The present invention relates to a color filter manufacturing method applied to, for example, a liquid crystal display device, and relates to a color filter manufacturing method in which various members of a color filter are formed by halftone exposure using a gradation mask.

  For example, a reflow method or an ashing method is disclosed as a pattern forming method for reducing the number of lithography processes such as a liquid crystal display device (see, for example, Patent Document 1 and Patent Document 2). In addition, the above-mentioned patent document discloses a photomask (slit mask) having a minute slit below the resolution limit of exposure light and a photomask (gradation mask) having a gradation with respect to the exposure light. .

In the slit mask, a general light shielding film such as a chromium film that substantially shields exposure light is used, and a fine slit below the resolution limit of the exposure machine is disposed in the light shielding film (see, for example, Patent Document 3). Since the mask slit is not larger than the resolution limit, the mask slit itself does not form an image on the photosensitive resin layer, and the exposure light corresponding to the size is applied to the area including the surrounding non-opening area. To Penetrate. For this reason, the slit mask functions as if a translucent film exists in the area where the slit is formed and the area including the periphery of the area.
However, since this slit needs to be below the resolution limit, it is natural that the slit needs to be finished to a size smaller than the mask main body pattern, resulting in a large burden on mask manufacturing. It was. Furthermore, in order to make a wide area semi-transparent, it is necessary to arrange many slits, so that the pattern data capacity increases, and there arises a problem that the load on the pattern formation process and the pattern defect inspection process also increases. -There was a problem that the inspection time was increased and the mask manufacturing cost was increased.

  On the other hand, the gradation mask uses a light-shielding film that substantially shields exposure light and a translucent film that transmits exposure light at a desired transmittance, and a light-transmissive area that does not transmit light. And a semi-transparent region in which the amount of transmitted light is adjusted (see, for example, Patent Document 4). In order to produce this mask, a mask pattern is made using a dedicated mask blank in which a translucent film and a light shielding film are laminated on a transparent substrate. This gradation mask is advantageous in that it is not necessary to arrange fine slits unlike the slit mask.

In the gradation mask, the thickness of the photosensitive resin layer after development can be controlled in two steps by controlling the amount of transmitted light according to regions having different transmittances. For example, it is possible to simultaneously form columnar spacers and liquid crystal alignment function protrusions in a color filter for a liquid crystal display device by performing batch exposure using a gradation mask (see, for example, Patent Document 5).
The gradation mask described in Patent Document 5 has a transmittance of 5% or less at 300 nm and 45% or more at 380 nm, cuts a short wavelength range (about 300 nm to 350 nm) of exposure light, and a long wavelength range (350 nm to 350 nm). Only about 450 nm). However, when only the long wavelength region is used, the energy is lower than when the short wavelength region is used, so that there is a problem that the curing speed is slow and the exposure takes time.

Japanese Patent No. 3415602 JP 2000-66240 A JP 2002-196474 A JP 2002-189280 A JP-A-2005-84366

  The present invention has been made in view of the above problems, and it is a main object of the present invention to provide a method for manufacturing a color filter using a gradation mask, which is useful for forming different types of members in a color filter.

  In order to achieve the above object, the present invention provides a photosensitive resin layer forming step of forming a photosensitive resin layer made of a photosensitive resin on a substrate, and exposing the photosensitive resin layer using a gradation mask. Development of a color filter having a different member forming step of simultaneously forming two or more different members made of the photosensitive resin, wherein the gradation mask includes a transparent substrate, a light shielding film, , A semi-transparent film having a transmittance adjusting function stacked in random order, a light-shielding region in which the light-shielding film is provided on the transparent substrate, and a semi-transparent region in which only the semi-transparent film is provided on the transparent substrate And a transparent region in which neither the light-shielding film nor the semi-transparent film is provided on the transparent substrate, and the translucent film has a transmittance distribution of 7% or less within a wavelength range of 300 nm to 450 nm. It is characterized by being It provides a method for producing a color filter.

  According to the present invention, different members can be formed simultaneously by batch exposure using a gradation mask, and the manufacturing process of the color filter can be simplified. In addition, a gradation mask having a translucent film having a predetermined transmittance characteristic is used, and both the long wavelength region and the short wavelength region of the exposure light can be used effectively, and the exposure time can be shortened. . Furthermore, the translucent film has a transmittance distribution within a certain range at a wavelength of 300 nm to 450 nm. Therefore, the transmittance tends to be within a certain range over the entire exposure wavelength region. Since the light transmittance is adjusted to be approximately the same, it is easy to design the transmittance for controlling the height of the different members.

  In the said invention, it is preferable that the said semi-transparent film | membrane and the said light shielding film are chromium-type films | membranes. This is because the chromium-based film is excellent in mechanical strength and is stable without light-retarding, so that the gradation mask can be used stably for a long time.

  In the present invention, the transmissivity of the translucent film at a wavelength of 300 nm is preferably within a predetermined range. This is because if the translucent film has such transmittance characteristics, light in a short wavelength region can be used more reliably for the photoreaction of the photosensitive resin.

  In the present invention, different members having different heights and shapes can be simultaneously formed by batch exposure using a gradation mask, and the manufacturing process of the color filter can be simplified. Further, since the translucent film has a predetermined transmittance characteristic, the short wavelength region of the exposure light can also be used for the photoreaction of the photosensitive resin, and the exposure time can be shortened.

Hereinafter, the manufacturing method of the color filter of this invention is demonstrated in detail.
The method for producing a color filter of the present invention includes a photosensitive resin layer forming step of forming a photosensitive resin layer made of a photosensitive resin on a substrate, exposing the photosensitive resin layer using a gradation mask, and developing the photosensitive resin layer. And a different member forming step of simultaneously forming two or more different members made of the photosensitive resin, and the gradation mask has a transparent substrate, a light shielding film, and a transmittance adjusting function. A semi-transparent film is laminated in random order, a light-shielding region in which the light-shielding film is provided on the transparent substrate, a semi-transparent region in which only the semi-transparent film is provided on the transparent substrate, and the transparent substrate The light-shielding film and the translucent film are not provided, and the translucent film has a transmittance distribution of 7% or less within a wavelength range of 300 nm to 450 nm. Is.

A method for producing a color filter of the present invention will be described with reference to the drawings.
FIG. 1 shows an example of forming spacers and alignment control protrusions in a color filter according to the present invention. First, as shown in FIG. 1A, a colored layer 2 and a light shielding portion 3 are formed on a substrate 1, a transparent electrode layer 4 is formed on the colored layer 2, and a negative photosensitive resin is formed thereon. A photosensitive resin layer 5 is formed. Next, as shown in FIG. 1B, the photosensitive resin layer 5 is exposed through the gradation mask 21.

  In the gradation mask 21, the translucent film 23 and the light shielding film 24 are formed in a pattern on the transparent substrate 22, and the light shielding region 25 in which the light shielding film 24 is provided on the transparent substrate 22 and the transparent substrate 22. A semi-transparent region 26 in which only the semi-transparent film 23 is provided and a transmission region 27 in which neither the semi-transparent film 23 nor the light shielding film 24 is provided on the transparent substrate 22 are mixed. The translucent film 23 has a transmittance adjusting function, and a transmittance distribution within a wavelength range of 300 nm to 450 nm is in a predetermined range. The light shielding film 24 does not substantially transmit exposure light.

  In the gradation mask 21, the exposure light 28 is transmitted through the transparent substrate 22 in the transmission region 27, and the exposure light 28 is transmitted through the transparent substrate 22 and the semitransparent film 23 in the semitransparent region 26. Since exposure light having a normal wavelength is irradiated from the transmission region 27, a pattern substantially corresponding to the mask pattern shape is formed. On the other hand, the exposure light irradiated from the semi-transparent region 26 is transmitted with a predetermined transmittance according to the wavelength because the semi-transparent film 23 has a predetermined transmittance characteristic and the transmittance is adjusted. Therefore, in the exposure of the photosensitive resin layer through the transmissive region 27, the photoreaction (curing reaction) of the negative photosensitive resin at the spacer formation site is sufficiently performed, but the photosensitive resin layer through the translucent region 26 is performed. In this exposure, the photoreaction (curing reaction) of the negative photosensitive resin at the alignment control projection forming portion is insufficient depending on the transmittance characteristics of the translucent film. Then, when developed, in the spacer forming portion where the curing reaction is sufficiently performed in the photosensitive resin layer, the spacer 11 having a truncated cone shape, a columnar shape or the like in which the longitudinal cross-sectional shape in the height direction is trapezoidal or rectangular is formed. It is formed. On the other hand, in the protrusion formation site, the semicircular alignment control protrusion 12 having a low height is formed according to the degree of the curing reaction (according to the transmittance characteristics of the semitransparent film). That is, as the degree of the curing reaction is insufficient, a semicircular alignment control protrusion having a lower height and a smoother surface shape is formed.

  In such a color filter manufacturing method, the spacer and the alignment control protrusion can be formed simultaneously by one exposure, and it is possible to use the same material, reduce the amount of material applied, and reduce the amount of developer used. is there. Conventionally, exposure is performed a plurality of times to form two or more kinds of different members such as spacers and alignment control protrusions, whereas in the present invention, different members are formed by one exposure as described above. Can be formed simultaneously, so that it is not necessary to repeat exposure and development, the number of manufacturing steps can be reduced, the yield rate can be improved, and the process time can be shortened.

  FIG. 2 is a graph showing an example of a spectral spectrum of the translucent film in the present invention. As illustrated in FIG. 2, the translucent film has a transmittance distribution within a predetermined range within a wavelength range of 300 nm to 450 nm. That is, the transmissivity of the translucent film is substantially constant regardless of the wavelength. In a translucent region provided with a translucent film having such transmittance characteristics, not only the long wavelength region (about 350 nm to 450 nm) of exposure light but also the short wavelength region (about 300 nm to 350 nm) has a predetermined transmittance. Therefore, the short wavelength region is also used for the curing reaction of the photosensitive resin.

  Light in the short wavelength region has the advantages of high energy and fast reaction speed (curing rate or decomposition rate). As described above, light in the short wavelength region can be effectively used in addition to light in the long wavelength region. As a result, the amount of exposure light can be reduced, so that the exposure time can be shortened. Further, when a negative photosensitive resin is used, exposure in a short wavelength region tends to cure the photosensitive resin layer from the surface, so that diffusion of impurities from the inside of the photosensitive resin layer can be suppressed.

In general, the exposure apparatus has different emission spectra (wavelength range, peak wavelength, peak intensity ratio, peak half width, etc.) depending on the type. For this reason, it is necessary to design the transmittance of the gradation mask in accordance with the exposure apparatus to be used so that the exposure amount is appropriate for forming the target pattern.
In the translucent film in the present invention, the transmittance distribution at 300 nm to 450 nm is in a predetermined range, and the transmittance is within a certain range over the entire exposure wavelength range. Therefore, for example, when a high-pressure mercury lamp is used in the exposure apparatus, for example, in FIG. 2, the transmittance at 300 nm is 39%, the transmittance at 365 nm (I line) is 37%, and the transmittance at 436 nm (G line) is 35. %, And the transmittance is within a certain range (about 33% to 40%) in the entire wavelength range (250 nm to 600 nm). Therefore, as shown in FIG. 1, when a negative photosensitive resin is used, transmittance (%) at each wavelength of the translucent film: transmittance 100 (%) ≈average transmittance of the translucent region: transmission region Average transmissivity≈height of the dissimilar member in the translucent region: the height of the dissimilar member in the transmissive region. That is, by adjusting the transmittance at a certain wavelength, the transmittance can be adjusted within a predetermined range over the entire exposure wavelength range, and the height of the different member can be controlled. As described above, in the gradation mask including the translucent film having the predetermined transmittance characteristic, the transmittance design for each wavelength can be easily designed in the transmittance design for controlling the height of the different member.

  FIG. 3 is an example of forming a spacer and an overcoat layer in a color filter according to the present invention. First, as shown in FIG. 3A, the colored layer 2 and the light shielding portion 3 are formed on the substrate 1, and the photosensitive resin layer 5 made of a negative photosensitive resin is formed thereon. Next, as shown in FIG. 3B, the photosensitive resin layer 5 is exposed through the gradation mask 21. In the exposure of the photosensitive resin layer through the transmissive region 27, the photoreaction (curing reaction) of the negative photosensitive resin is sufficiently performed, but in the exposure of the photosensitive resin layer through the translucent region 26, the negative type is exposed. The photoreaction (curing reaction) of the photosensitive resin becomes insufficient depending on the transmittance characteristics of the translucent film. Then, when developed, in the spacer forming portion where the curing reaction is sufficiently performed in the photosensitive resin layer, the spacer 13 having a frustoconical shape or a columnar shape in which the longitudinal cross-sectional shape in the height direction is trapezoidal or rectangular is formed. It is formed. On the other hand, in the part exposed from the semi-transparent region 26, the overcoat layer 14 having a low height and a flat surface shape is formed according to the degree of the curing reaction (according to the transmittance characteristics of the semi-transparent film). The

In such a color filter manufacturing method, the spacer and the overcoat layer can be simultaneously formed by one exposure, and in the same manner as described above, the material is shared, the amount of the material applied is reduced, and the developer is used. It is possible to reduce the amount, further reduce the number of manufacturing steps, and shorten the process time. In addition, since a gradation mask including a translucent film having a predetermined transmittance characteristic is used, light in a short wavelength region can be effectively used, and the exposure time can be shortened.
Hereinafter, each process in the manufacturing method of the color filter of this invention is demonstrated.

1. Photosensitive resin layer formation process The photosensitive resin layer formation process in this invention is a process of forming the photosensitive resin layer which consists of photosensitive resin on a board | substrate.

  As the photosensitive resin used in the present invention, either a negative photosensitive resin or a positive photosensitive resin can be used. Since the two or more kinds of different members formed by the present invention are made of a photosensitive resin, the type of the photosensitive resin to be used is appropriately selected according to the different members to be formed. Among these, a negative photosensitive resin is preferably used. As described above, in the exposure using the gradation mask, there is a difference in the curing reaction of the negative photosensitive resin depending on the transmissive region and the translucent region, which is advantageous for forming different types of members having different heights and shapes. It becomes.

  The negative photosensitive resin is not particularly limited, and those generally used can be used. Also in this case, since the two or more kinds of different members are made of the photosensitive resin, the negative photosensitive resin to be used may be selected according to the member to be formed. For example, a chemically amplified photosensitive resin based on a crosslinked resin, specifically, a chemically amplified photosensitive resin in which a crosslinking agent is added to polyvinylphenol and an acid generator is further added. Also, for example, as an acrylic negative photosensitive resin, it has a photopolymerization initiator that generates at least a radical component when irradiated with ultraviolet rays, and has an acrylic group of C = C in the molecule. And a functional group (for example, a component having an acidic group in the case of development with an alkali solution) that can dissolve the unexposed portion by subsequent development can be used. Among the above-mentioned components having an acrylic group, examples of relatively low molecular weight polyfunctional acrylic molecules include dipentaerythritol hexaacrylate (DPHA), dipentaerythritol pentaacrylate (DPPA), and tetramethylpentatriacrylate (TMPTA). Can be mentioned. Moreover, as a high molecular weight polyfunctional acrylic molecule, the polymer etc. which introduce | transduced the acrylic group through the epoxy group to the one part carboxylic acid group part of a styrene-acrylic acid-benzylmethacrylate copolymer are mentioned. Furthermore, if necessary, additives such as conductive powders such as carbon black, copper-iron-manganese composite oxide, indium tin oxide (ITO), aluminum, silver, iron oxide, etc. are contained in the negative photosensitive resin. You may let them.

  Moreover, it does not specifically limit as positive type photosensitive resin, What is generally used can be used. As described above, since the two or more kinds of different members are made of a photosensitive resin, the positive photosensitive resin to be used may be selected according to the member to be formed. Specifically, a chemically amplified photosensitive resin using a novolac resin as a base resin can be used.

  As a coating method of the photosensitive resin, for example, spin coating method, casting method, dipping method, bar coating method, blade coating method, roll coating method, gravure coating method, flexographic printing method, spray coating method and the like can be used. .

  The thickness of the photosensitive resin layer after coating is appropriately adjusted according to the different member to be formed. For example, as shown in FIG. 1, the thickness of the photosensitive resin layer is adjusted so as to match the height (thickness) of the highest (thickest) member among two or more kinds of different members. In the example of FIG. 1, the thickness of the photosensitive resin layer is adjusted so as to match the height of the spacer.

  After application of the photosensitive resin, the photosensitive resin layer may be subjected to heat treatment (pre-baking).

  As a substrate used in the present invention, for example, a non-flexible transparent rigid material such as quartz glass, Pyrex (registered trademark) glass, synthetic quartz plate, or a flexible resin material such as a transparent resin film or an optical resin plate is used. A transparent flexible material can be used. Among these, Corning 1737 glass is a material having a small coefficient of thermal expansion, excellent dimensional stability and characteristics in high-temperature heat treatment, and is an alkali-free glass containing no alkali component in the active matrix. Suitable for color filters for liquid crystal display devices.

2. Different member forming step In the present invention, the different member forming step is a step in which the photosensitive resin layer is exposed using a gradation mask and developed to simultaneously form two or more different members made of a photosensitive resin. .
Hereinafter, a gradation mask and a method for forming different members will be described.

(1) Tone mask In the tone mask used in the present invention, a transparent substrate, a light shielding film, and a translucent film having a transmittance adjusting function are laminated in random order, and the light shielding film is provided on the transparent substrate. It has a light shielding region, a semitransparent region in which only the above-mentioned semitransparent film is provided on a transparent substrate, and a transmission region in which neither the light shielding film nor the semitransparent film is provided on the transparent substrate. The translucent film in the gradation mask has a transmittance distribution within a predetermined range within a wavelength range of 300 nm to 450 nm.
Hereinafter, each configuration of the gradation mask will be described.

(I) Translucent film The translucent film used for the gradation mask has a transmittance adjusting function, and a transmittance distribution within a wavelength range of 300 nm to 450 nm is within a predetermined range.

The translucent film has a transmittance distribution of 7% or less, preferably 5% or less, within a wavelength range of 300 nm to 450 nm. For example, when a high-pressure mercury lamp is used for the exposure apparatus, the end of the emission spectrum is approximately 300 nm, the wavelength of I-line is 365 nm, the wavelength of H-line is 405 nm, and the wavelength of G-line is 436 nm. If the transmittance distribution within the range of 300 nm to 450 nm including the above is within the above range, both the long wavelength range (about 350 nm to 450 nm) and the short wavelength range (about 300 nm to 350 nm) of the exposure light are translucent with almost constant transmittance. Since the film passes through the film, it is easy to design a transmittance for controlling the height of the different member for the above-described reason. Moreover, if the transmittance distribution within the range of 300 nm to 450 nm is in the above range, the short wavelength region can be used effectively.
The transmittance distribution was obtained by dividing the difference between the maximum transmittance (T _max ) and the minimum transmittance (T _min ) at 300 nm to 450 nm by the value obtained by doubling the average transmittance (T _av ) at 300 nm to 450 nm. It is a value obtained by multiplying the value by 100. (Transmissivity distribution = (T _max −T _min ) / (2T _av ) × 100)
As a method for measuring the transmittance, a method of measuring the transmittance of the semitransparent film using the transmittance of the transparent substrate used for the gradation mask as a reference (100%) can be employed. As the apparatus, an ultraviolet / visible spectrophotometer (for example, Hitachi U-4000) or an apparatus having a photodiode array as a detector (for example, Otsuka Electronics MCPD) can be used. The maximum transmittance and the minimum transmittance are the maximum value and the minimum value among the transmittances at 300 nm to 450 nm, and the average transmittance is a value obtained by averaging the transmittances at 300 nm to 450 nm.

Moreover, it is preferable that the transmittance | permeability distribution in wavelength 250nm -600nm of a semi-transparent film | membrane is 20% or less, More preferably, it is 10% or less. In general, in the color filter manufacturing process, the exposure wavelength range is often set as an exposure condition within a range of 250 nm to 600 nm. Therefore, if the transmittance distribution at 250 nm to 600 nm is within the above range, a wide wavelength range is effectively used. This is because it can be used, and the transmittance design for controlling the height of different members becomes easier.
The method for calculating the transmittance distribution is as described above.

  Further, the transmissivity of the translucent film at a wavelength of 300 nm varies depending on the thickness of the translucent film and the dissimilar member to be formed, but is preferably in the range of 10% to 70%. For example, when a high-pressure mercury lamp is used in the exposure apparatus, the end of the emission line spectrum is approximately 300 nm. Therefore, if the transmittance at a wavelength of 300 nm is in the above range, light in a short wavelength region is used for the photoreaction of the photosensitive resin. This is because it can be used more reliably.

The preferable range of the transmittance at 300 nm is different depending on the dissimilar member to be formed. For example, when the spacer and the alignment control protrusion are formed as the dissimilar member, it is within a range of 10% to 50%. More preferably, it is in the range of 20% to 40%. For example, when forming a spacer and an overcoat layer as a dissimilar member, it is preferably in the range of 10% to 40%, and more preferably in the range of 10% to 20%.
Furthermore, when forming a different member having a height difference of 3 μm or more, the transmittance at 300 nm is preferably in the range of 10% to 30%, more preferably in the range of 10% to 20%. is there. Further, when forming a different member having a height difference of 3 μm or less, the transmittance at 300 nm is preferably in the range of 30% to 70%, more preferably in the range of 30% to 50%. is there.
The method for measuring the transmittance is as described above.

  Furthermore, the average transmittance of the translucent film at a wavelength of 250 nm to 600 nm is preferably in the range of 10% to 60%. If the average transmittance is less than the above range, it may be difficult to produce a difference in transmittance between the semi-transparent region and the light shielding region. If the average transmittance exceeds the above range, the transmittance between the semi-transparent region and the transmissive region may be difficult. This is because it may be difficult to produce the difference.

The translucent film is not particularly limited as long as it satisfies the transmittance characteristics described above. For example, a film of a metal such as chromium, molybdenum silicide, tantalum, aluminum, silicon, nickel, or chromium, molybdenum silicide And films of nitrides and carbides of metals such as tantalum, aluminum, silicon and nickel.
For example, since metals, metal nitrides, and metal carbides have a relatively large absorption coefficient, the transmittance distribution is within a predetermined range at wavelengths of 300 nm to 400 nm, and often has the above-described transmittance characteristics. In contrast, a metal oxide has a relatively small absorption coefficient, and the absorption coefficient approaches almost zero as the wavelength becomes longer (ultraviolet / visible region). Therefore, the transmittance characteristic increases as the wavelength increases. Often shown. Accordingly, as described above, a metal, metal nitride, or metal carbide film is used as the translucent film. Note that the metal, metal nitride, or metal carbide film may contain a small amount of oxygen as long as the above-described transmittance characteristics are satisfied.

  From the advantage that the translucent film and the light-shielding film can be patterned by the same etching equipment and process, the translucent film is preferably a film made of the same material as the light-shielding film. As will be described later, since the light-shielding film is preferably a chromium-based film, the translucent film is also preferably a chromium-based film such as chromium or chromium nitride. In addition, these chromium-based films are excellent in mechanical strength, and are stable without light-retarding, so that a gradation mask that can withstand long-time use can be obtained.

  Among the above, the translucent film is preferably a metal film. This is because a metal has a higher absorption coefficient than a metal nitride, a metal carbide, or the like, and therefore, by using a metal film, a translucent film satisfying the above-described suitable transmittance characteristics can be obtained.

  In particular, among the above metal films, the translucent film is preferably a chromium film. As described above, this is because the semi-transparent film is preferably a film made of the same material as the light-shielding film, and the light-shielding film is preferably a chromium-based film in terms of patterning. The chromium film used for the translucent film may contain a small amount of oxygen or nitrogen, but the chromium content in the film is preferably 80% or more, and particularly preferably 95% or more. It is because it can be set as the semi-transparent film | membrane which satisfies the suitable transmittance | permeability characteristic mentioned above.

  Further, a molybdenum silicide film and a tantalum film are also preferably used as the semitransparent film. The tantalum film used for the semi-transparent film may contain a trace amount of oxygen or nitrogen in the same manner as the chromium film.

  The translucent film may be a single layer or may be composed of a plurality of layers. When the translucent film is composed of a plurality of layers, it is sufficient that at least one layer has the above-described transmittance characteristics. Further, the other layer may have the above-described transmittance characteristics, or may have a transmittance characteristic different from the above-described transmittance characteristics. Thereby, a multi-tone gradation mask can be obtained.

  The film thickness of the translucent film may be any film thickness that satisfies the above-described transmittance characteristics. For example, in the case of a chromium film, the film thickness may be about 5 nm to 20 nm. Since the transmissivity of the semitransparent film varies depending on the film thickness, the desired transmissivity can be obtained by controlling the film thickness. Further, when the translucent film contains oxygen, nitrogen, carbon or the like, the transmittance varies depending on the composition. Therefore, the desired transmittance can be realized by simultaneously controlling the film thickness and the composition.

  As a method for forming the translucent film, for example, a physical vapor deposition method (PVD) such as a sputtering method, an ion plating method, or a vacuum vapor deposition method is used.

(Ii) Light-shielding film The light-shielding film used for the gradation mask does not substantially transmit exposure light, and the average transmittance at the exposure wavelength is preferably 0.1% or less. As such a light shielding film, a light shielding film generally used for a photomask can be used. For example, a metal film such as chromium, molybdenum silicide, tantalum, aluminum, silicon, or chromium oxide, chromium nitride, chromium oxynitride And films of oxides and nitrides of metals such as silicon oxide and silicon oxynitride. Of these, chromium-based films such as chromium, chromium oxide, chromium nitride, and chromium oxynitride are preferably used. This is because such a chromium-based film has the most use record and is preferable in terms of cost and quality. This chromium-based film may be a single layer or may be a laminate of two or more layers.

  Further, the light shielding film may have a low reflection function. Since the low reflection function can prevent irregular reflection of exposure light, a clearer pattern can be formed. In order to add a low reflection function to the light shielding film, for example, a chromium compound such as chromium oxide for preventing reflection of exposure light may be contained on the surface of the light shielding film. In this case, the light shielding film may be formed by an inclined interface in which the content component gradually changes toward the surface.

  The thickness of the light shielding film is not particularly limited, and for example, in the case of a chromium film, it can be about 50 nm to 150 nm.

  As a method for forming the light shielding film, for example, a physical vapor deposition method (PVD) such as a sputtering method, an ion plating method, or a vacuum vapor deposition method is used.

(Iii) Transparent substrate As the transparent substrate used for the gradation mask, a substrate generally used for a photomask can be used. For example, optically polished low expansion glass such as borosilicate glass and aluminoborosilicate glass, quartz glass, synthetic quartz glass, Pyrex (registered trademark) glass, soda lime glass, white sapphire and other non-flexible transparent rigid materials Alternatively, a flexible transparent material having flexibility such as a transparent resin film and an optical resin film can be used. Among them, quartz glass is a material having a small coefficient of thermal expansion, and is excellent in dimensional stability and characteristics in high-temperature heat treatment.

(Iv) Light shielding region, translucent region, and transmission region The light shielding region in the gradation mask is a region where a light shielding film is provided on a transparent substrate. In the light shielding region, it is sufficient that at least the light shielding film is formed on the transparent substrate, and the light shielding film and the semitransparent film may be formed on the transparent substrate.

  Further, the semi-transparent region in the gradation mask is a region where only the semi-transparent film is provided on the transparent substrate. In the semi-transparent region, only the semi-transparent film is formed on the transparent substrate, and no light shielding film is formed. When the semi-transparent film is composed of a plurality of layers, the gradation mask may have a plurality of types of semi-transparent regions having different transmittance characteristics. In this case, a multi-tone gradation mask can be obtained.

  Further, the transmission region in the gradation mask is a region where neither the light shielding film nor the semi-transparent film is provided on the transparent substrate. That is, the transmissive region has only a transparent substrate.

  The shapes of the light shielding region, the translucent region, and the transmissive region are not particularly limited, and are appropriately adjusted according to the dissimilar member to be formed. For example, as shown in FIG. 4, when the gradation mask 21 has a circular translucent area 26 and a circular transmissive area 27 and the other area is a light-shielding area 25, the gradation mask 21 as shown in FIG. When the tone mask 21 has a linear translucent region 26 having a bent portion and a circular transmissive region 27 and the other region is a light-shielding region 25, the tone mask 21 is formed as shown in FIG. The shape of the light-shielding region, the semi-transparent region, and the transmission region may be various shapes, such as when the L-shaped light-shielding region 25 and the circular transmission region 27 are provided and the other region is the semi-transparent region 26. It can be.

The gradation mask is obtained by stacking a transparent substrate, a light shielding film, and a semitransparent film in any order. As a layer structure of the gradation mask illustrated in FIG. 4, a transparent substrate 22, a light shielding film 24, and a semi-transparent film 23 may be laminated in this order as shown in FIG. 7A. As shown, the transparent substrate 22, the semitransparent film 23, and the light shielding film 24 may be laminated in this order, and the semitransparent film 23, the transparent substrate 22, and the light shielding film 24 are laminated in this order as shown in FIG. May be. 7A to 7C are cross-sectional views taken along line AA in FIG. In this case, in the light shielding region 25, the light shielding film 24 and the semitransparent film 23 are provided on the transparent substrate 22, and in the semitransparent region 26, the semitransparent film 23 is provided on the transparent substrate 22, and the transmission region 27 is a transparent substrate. 22 only.
When such a gradation mask is used, for example, as shown in FIG. 8, spacers 11 and alignment control projections 12 having different heights and shapes can be formed simultaneously.

FIG. 9 is a cross-sectional view of the gray scale mask illustrated in FIG. 5 along the line BB. When such a gradation mask is used, for example, as shown in FIG. 10, spacers 11 and alignment control protrusions 12 having different heights and shapes can be formed simultaneously.
FIG. 11 is a cross-sectional view taken along the line CC of the gradation mask illustrated in FIG. When such a gradation mask is used, for example, as shown in FIG. 12, the spacer 13 and the overcoat layer 14 can be formed simultaneously.

(Iv) Low reflective layer In the present invention, a low reflective layer may be formed on the light shielding film. By providing the low reflection layer, halation can be prevented when the gradation mask is used.
Examples of the low reflection layer include films of chromium oxide, chromium nitride, chromium oxynitride, and the like. When the light shielding film is a chromium-based film, these films can be etched simultaneously with the etching of the light shielding film.

(V) Gradation mask The gradation mask used in the present invention is one in which the transmittance changes in three steps or more and is not limited to a two-gradation mask, and is patterned as described later. By repeating the above, it is possible to obtain a multi-tone mask of two or more tones.

  The size of the gradation mask is appropriately adjusted according to the dissimilar member to be formed, and can be, for example, about 300 mm × 400 mm to 1,600 mm × 1,800 mm.

(Vi) Manufacturing method of gradation mask As a manufacturing method of the gradation mask used in the present invention, a semi-transparent film and a light-shielding film are formed in a pattern on a transparent substrate, so that a light-shielding region, Although it will not specifically limit if it is a method which can arrange | position a transparent area | region and a permeation | transmission area | region, Two preferable aspects can be mentioned. Hereinafter, each aspect will be described.

(First aspect)
The gradation mask manufacturing method according to this aspect includes a mask blank preparation step of preparing a mask blank having a light shielding film formed on a transparent substrate, a first patterning step of patterning a part of the light shielding film, and a patterned light shielding. The method includes a translucent film forming process for forming a translucent film on the entire surface of the transparent substrate on which the film is formed, and a second patterning process for patterning the light shielding film and the translucent film.

FIG. 13 is a process diagram showing an example of a method of manufacturing a gradation mask according to this aspect.
In order to produce the gradation mask of this aspect, first, a mask blank 50 in which a light shielding film 24a is formed on the transparent substrate 22 is prepared (FIG. 13A, mask blank preparation step).
Next, a resist material is applied onto the light-shielding film 24a and baked for a predetermined time after the application, thereby forming a first resist film 51a (FIG. 13B). Next, the light shielding film is subjected to pattern exposure. At this time, the semi-transparent region 26 is exposed by removing the first resist film 51a so as to form a boundary where the semi-transparent region 26 and the light-shielding region 25 are in contact and a boundary where the semi-transparent region 26 and the transmissive region 27 are in contact. The light shielding region 25 and the transmission region 27 are exposed with an exposure amount at which the first resist film 51a remains. Subsequently, the first resist pattern 51b is formed by developing (FIG. 13C). Next, the light shielding film 24a exposed from the first resist pattern 51b is etched to form a light shielding film intermediate pattern 24b (FIG. 13D), and the remaining first resist pattern 51b is removed (FIG. 13D). FIG. 13 (e)). In the light-shielding film intermediate pattern 24b, a portion where the same portion as the translucent film is etched in a second patterning step described later remains without being etched. FIGS. 13B to 13E show the first patterning step.
Next, a semitransparent film 23a is formed on the entire surface of the transparent substrate 22 on which the light shielding film intermediate pattern 24b is formed (FIG. 13F, a semitransparent film forming process).
Next, a resist material is applied onto the translucent film 23a, and baked for a predetermined time after the application, thereby forming a second resist film 52a (FIG. 13G). Subsequently, pattern exposure of the light shielding film and the semitransparent film is performed. At this time, the transmissive region 27 has an exposure amount at which the second resist film 52a is removed so as to form a boundary where the light shielding region 25 and the transmissive region 27 are in contact and a boundary where the semitransparent region 26 and the transmissive region 27 are in contact. The light shielding region 25 and the translucent region 26 are exposed with an exposure amount at which the second resist film 52a remains. Next, the second resist pattern 52b is formed by developing (FIG. 13H). Next, the semitransparent film 23a exposed from the second resist pattern 52b is etched, and subsequently, the portion where the lower light shielding film intermediate pattern 24b is exposed is further etched, so that the semitransparent film pattern 23b and A light shielding film pattern 24c is formed (FIG. 13I). Next, the remaining second resist pattern 52b is removed (FIG. 13J), and a gradation mask can be obtained. FIGS. 13G to 13J show the second patterning process.

In this aspect, since only a part of the light shielding film is patterned in the first patterning step and the light shielding film and the semitransparent film are patterned in the second patterning step, the semitransparent film is formed as in the second aspect described later. Therefore, it is not necessary to selectively etch only the light shielding film formed on the substrate. For this reason, it has the advantage that the material used for a light shielding film and a semi-transparent film is not limited. For example, a similar material, specifically, a chromium-based film can be used for the light-shielding film and the translucent film. Further, since etching selectivity is not required, it is not necessary to use a plurality of etching techniques (a plurality of apparatuses, etchants, etc.), and the mask manufacturing cost can be reduced. Further, when the light shielding film and the semitransparent film are chromium-based films, the gradation mask can be manufactured by the same process as the conventional binary mask, and there is an advantage that a complicated process is not required.
Hereafter, each process in the manufacturing method of the gradation mask of this aspect is demonstrated.

(Mask blank preparation process)
The mask blank preparation step in this embodiment is a step of preparing a mask blank in which a light shielding film is formed on a transparent substrate.
A mask blank in which a chromium film is formed as a light shielding film on a transparent substrate is a commonly used mask blank and can be easily obtained.

(First patterning step)
The first patterning step in this aspect is a step of patterning a part of the light shielding film. The patterning method of the light shielding film is not particularly limited, and a lithography method is usually used. When the lithography method is used, a resist material is applied on the light shielding film of the mask blank and baked to form a first resist film.

  As a material for the first resist film, either a positive resist material or a negative resist material can be used. The positive resist material is not particularly limited, and examples thereof include a chemically amplified resist using a novolac resin as a base resin. The negative resist material is not particularly limited. For example, a chemically amplified resist based on a crosslinkable resin, specifically, a chemical amplification obtained by adding a crosslinking agent to polyvinylphenol and further adding an acid generator. Type resist and the like.

  In pattern exposure of the light-shielding film, pattern exposure is performed so that the exposure amount differs in each region so as to form a boundary where the semi-transparent region and the light-shielding region are in contact and a boundary where the semi-transparent region and the transmission region are in contact. At this time, the semi-transparent region is exposed with an exposure amount at which the first resist film is removed, and the light shielding region and the transmissive region are exposed with an exposure amount at which the first resist film remains.

For example, FIG. 13C shows an example in which the first resist film is formed using a positive resist material. In this case, the semi-transparent region 26 is exposed with an exposure amount at which the first resist film 51a is exposed. However, the first resist film 51 a is not exposed in the light shielding region 25 and the transmission region 27.
Although not shown, when a negative resist material is used for the first resist film, the semi-transparent region is not exposed, and the first resist film is exposed with an exposure amount that exposes the first resist film in the light shielding region and the transmission region.
Note that pattern exposure for collectively etching the same portion of the light shielding film and the semitransparent film is performed in the second patterning step.

  As a method of performing exposure with different exposure amounts depending on each region, there are a method of controlling the exposure amount of energy rays, a method of performing exposure with a constant exposure amount, and the like. The drawing method is not particularly limited, and an electron beam drawing method or a laser drawing method used for normal photomask drawing can be used. When the electron beam drawing method is used, the exposure amount can be easily converted. When the laser drawing method is used, since it takes time to convert the exposure amount, the exposure may be repeated without changing the exposure amount. In addition, with the increase in the size of display devices such as liquid crystal display devices and organic EL display devices, and the increase in the number of facets at the time of manufacture, the tone masks are also increasing in size. Laser drawing method is applied.

  Development after pattern exposure can be performed according to a general development method.

As a method for etching the light shielding film, for example, wet etching using a ceric ammonium nitrate aqueous solution or the like, or dry etching using a chlorine-based gas or the like can be applied. Among these, wet etching is preferable. Wet etching is advantageous in terms of cost and production efficiency. In addition, since the wet etching is dissolved by a chemical reaction, it is preferable from the viewpoint that the etching rate can be easily controlled by selecting an etchant.
When the light shielding film is a chromium film, a cerium nitrate wet etchant is preferably used.
Further, when the light shielding film has a low reflection function, it is possible to prevent exposure of a region that is not originally exposed due to scattering of exposure light for exposing the first resist film.

  The method for removing the first resist film is not particularly limited, and is usually performed by ashing by oxygen plasma treatment or cleaning with an organic alkaline solution.

  In this aspect, after the first patterning step, an inspection step for inspecting the light-shielding film pattern and a correction step for correcting defects as necessary may be performed. When the light shielding film is a chromium film, a general photomask inspection technique and correction technique can be applied. By performing the inspection process of the dimension of the light-shielding film pattern, the defect inspection of the light-shielding film pattern, and the correction process, it is possible to prevent a substrate having a defect from passing over to the next process, increase the yield of non-defective products, and contribute to reducing the mask cost. .

(Translucent film forming process)
The translucent film forming step in this embodiment is a step of forming a translucent film on the entire surface of the transparent substrate on which the patterned light-shielding film is formed. Note that the method for forming the translucent film is described in the section of the translucent film, and the description thereof is omitted here.

(Second patterning step)
The second patterning step in this aspect is a step of patterning the light shielding film and the semitransparent film. The patterning method of the light shielding film and the semitransparent film is not particularly limited, and a lithography method is usually used. When the lithography method is used, a resist material is applied on a transparent substrate on which a light shielding film and a semitransparent film are formed, and baking is performed to form a second resist film.
Note that the material of the second resist film is the same as the material of the first resist film described in the section of the first patterning step, and a description thereof is omitted here.

  In pattern exposure of the semi-transparent film and the light-shielding film, pattern exposure is performed so that the exposure amount varies depending on each region so as to form a boundary where the light-shielding region and the transmission region contact each other and a boundary where the semi-transparent region and the transmission region contact each other. . At this time, the transmissive region is exposed with an exposure amount at which the second resist film is removed, and the light shielding region and the semi-transparent region are exposed with an exposure amount at which the second resist film remains.

For example, FIG. 13 (h) shows an example in which the second resist film is formed using a positive resist material. In this case, the second resist film 52a is exposed with an exposure amount at which the second resist film 52a is exposed in the transmission region 27. The second resist film 52a is not exposed in the light shielding area 25 and the translucent area 26.
Although not shown, when a negative resist material is used for the second resist film, exposure is not performed in the transmissive region, but exposure is performed with an exposure amount at which the second resist film is exposed in the light shielding region and the translucent region.

Since the other points of pattern exposure and development are the same as those described in the section of the first patterning step, description thereof is omitted here.
In the present invention, when the translucent film is a chromium film, the film thickness is, for example, about 5 nm to 20 nm and is relatively thin. For this reason, the etching time of a semi-transparent film | membrane can be shortened. Further, since there is almost no difference between the etching rates of the semi-transparent film and the light-shielding film, there is an advantage that the semi-transparent film pattern has no edge fluctuation (the edge is sharp).

  In this step, the same portions of the light shielding film and the semitransparent film are etched together. In the transmissive region, the light shielding film and the semitransparent film are etched together, so that the positions of the end portions of the light shielding film pattern and the end portions of the semitransparent film pattern are substantially the same. The light-shielding film and the translucent film etching method are the same as the light-shielding film etching method described in the section of the first patterning step, and a description thereof is omitted here.

  The method for removing the second resist film is not particularly limited, and is usually performed by ashing by oxygen plasma treatment or cleaning with an organic alkaline solution.

  In this aspect, after the second patterning step, an inspection step for inspecting the light shielding pattern and the semi-transparent film pattern, and a correction step for correcting defects as necessary may be performed. By performing the inspection process of the light shielding pattern and semi-transparent film pattern dimension inspection, the defect inspection of the light shielding pattern and semi-transparent film pattern, and the correction process, the non-defective product rate is increased and the mask cost is reduced.

(Second aspect)
The gradation mask manufacturing method of this aspect includes a mask blank preparation step of preparing a mask blank in which a semitransparent film and a light shielding film are laminated in this order on a transparent substrate, and patterning a part of the semitransparent film and the light shielding film. A first patterning step and a second patterning step of patterning only the light-shielding film.

FIG. 14 is a process diagram showing an example of a method for manufacturing a gradation mask according to this aspect.
In order to produce the gradation mask of this aspect, first, a mask blank 50 in which a semi-transparent film 23a and a light shielding film 24a are laminated in this order on a transparent substrate 22 is prepared (FIG. 14A, mask blank preparation step). .
Next, a resist material is applied onto the light shielding film 24a and baked for a predetermined time after the application to form a first resist film 53a (FIG. 14B). Next, pattern exposure of the semitransparent film and the light shielding film is performed. At this time, the transmissive region 27 has an exposure amount at which the first resist film 53a is removed so as to form a boundary where the light shielding region 25 and the transmissive region 27 are in contact and a boundary where the semitransparent region 26 and the transmissive region 27 are in contact. The light shielding region 25 and the translucent region 26 are exposed with an exposure amount at which the first resist film 53a remains. Subsequently, development is performed to form a first resist pattern 53b (FIG. 14C). Next, the semitransparent film 23a and the light shielding film 24a exposed from the first resist pattern 53b are etched to form the semitransparent film pattern 23b and the light shielding film intermediate pattern 24b (FIG. 14 (d)) and remain. The first resist pattern 53b is removed (FIG. 14E). In the light shielding film intermediate pattern 24b, a portion where only the light shielding film is etched in a second patterning process described later remains without being etched. 14B to 14E show the first patterning process.
Next, a resist material is applied on the transparent substrate 22 on which the semitransparent film pattern 23b and the light-shielding film intermediate pattern 24b are formed, and baked for a predetermined time after the application, thereby forming a second resist film 54a (FIG. 14F). ). Subsequently, pattern exposure of the light shielding film is performed. At this time, the semi-transparent region 26 is exposed by removing the second resist film 54a so as to form a boundary where the semi-transparent region 26 and the light-shielding region 25 are in contact and a boundary where the semi-transparent region 26 and the transmissive region 27 are in contact. The light shielding region 25 and the transmission region 27 are exposed with an exposure amount at which the second resist film 54a remains. Next, a second resist pattern 54b is formed by developing (FIG. 14G). Next, the light shielding film intermediate pattern 24b exposed from the second resist pattern 54b is etched to form a light shielding film pattern 24c (FIG. 14H), and the remaining second resist pattern 54b is removed. (FIG. 14 (i)). In addition, FIG.14 (f)-(i) is a 2nd patterning process. In this way, a gradation mask can be obtained.

In this aspect, as in the first aspect, specifically, a semi-transparent film forming step is performed between the first patterning step and the second patterning step. There is no need to perform a translucent film forming step. For this reason, the risk (defect, dirt, etc.) at the time of film-forming of a translucent film | membrane can be reduced. Further, TAT (Turn Around Time) can be shortened.
Hereafter, each process in the manufacturing method of the gradation mask of this aspect is demonstrated.

(Mask blank preparation process)
The mask blank preparation step in this embodiment is a step of preparing a mask blank in which a translucent film and a light shielding film are laminated in this order on a transparent substrate. Note that the transparent substrate, the translucent film, and the light shielding film are as described above, and thus the description thereof is omitted here.

(First patterning step)
The first patterning step in this aspect is a step of patterning a part of the translucent film and the light shielding film. The patterning method of the semitransparent film and the light shielding film is not particularly limited, and a lithography method is usually used. When the lithography method is used, a resist material is applied on the light shielding film of the mask blank and baked to form a first resist film.

  In pattern exposure of the semi-transparent film and the light-shielding film, pattern exposure is performed so that the exposure amount varies depending on the region so as to form a boundary where the light-shielding region and the transmission region are in contact and a boundary where the semi-transparent region and the transmission region are in contact. At this time, the transmissive region is exposed with an exposure amount at which the first resist film is removed, and the light shielding region and the semi-transparent region are exposed with an exposure amount at which the first resist film remains.

For example, FIG. 14C shows an example in which the first resist film is formed using a positive resist material. In this case, in the transmission region 27, the first resist film 53a is exposed with an exposure amount that is exposed. The first resist film 53a is not exposed in the light shielding area 25 and the translucent area 26.
Although not shown, when a negative resist material is used for the first resist film, exposure is not performed in the transmissive region, but exposure is performed with the exposure amount at which the first resist film is exposed in the light shielding region and the semitransparent region.
Note that pattern exposure for etching only the light shielding film is performed in the second patterning step.

  The material of the first resist film, the other aspects of the pattern exposure of the semitransparent film and the light shielding film, development, the etching method of the semitransparent film and the light shielding film, the method of removing the first resist film, the semitransparent film pattern and the light shielding film Since the pattern inspection process and the semi-transparent film pattern and light-shielding film pattern correction process are the same as those in the first embodiment, description thereof is omitted here.

(Second patterning step)
The second patterning step in this aspect is a step of patterning only the light shielding film. The patterning method of the light shielding film is not particularly limited, and a lithography method is usually used. When the lithography method is used, a resist material is applied on the patterned translucent film and the light-shielding film and baked to form a second resist film.

  In pattern exposure of the light shielding film, pattern exposure is performed so that the exposure amount varies depending on the region so as to form a boundary where the semitransparent region and the light shielding region are in contact and a boundary where the semitransparent region and the transmission region are in contact. At this time, the semitransparent region is exposed with an exposure amount at which the second resist film is removed, and the light shielding region and the transmissive region are exposed with an exposure amount with which the second resist film remains.

For example, FIG. 14G shows an example in which the second resist film is formed using a positive resist material. In this case, the semi-transparent region 26 is exposed with an exposure amount at which the second resist film 54a is exposed. However, the second resist film 54 a is not exposed in the light shielding region 25 and the transmission region 27.
Further, although not shown, when a negative resist material is used for the second resist film, the semi-transparent region is not exposed, and the second resist film is exposed with an exposure amount that exposes the second resist film in the light shielding region and the transmission region.

  Note that the material of the second resist film, the pattern exposure of the light shielding film, and the development are the same as in the first embodiment, and thus description thereof is omitted here.

After the development, the light shielding film is etched. In this embodiment, for example, by utilizing the fact that the etching rate varies depending on the type of the chromium-based film, different chromium-based films are used for the translucent film and the light-shielding film, and the etching rate of the semi-transparent film is slower than the etching rate of the light-shielding film. can do. By making a difference in the etching rate of the semi-transparent film and the light-shielding film, the etching selectivity is improved, and when the upper light-shielding film is etched, the lower semi-transparent film is prevented from being etched together. it can. Specifically, a case where a chromium nitride film is used as the semitransparent film and a chromium film is used as the light shielding film is exemplified. Thus, by changing the etching rate of the semitransparent film and the light shielding film, the etching selectivity can be improved and the gradation can be made clearer.
Further, by using a film containing a different metal in the semitransparent film and the light shielding film, the etching rate of the semitransparent film can be made slower than the etching rate of the light shielding film.

  The light-shielding film etching method, the second resist film removing method, the light-shielding film pattern inspection process, and the light-shielding film pattern correction process are the same as those in the first aspect, and thus the description thereof is omitted here. .

(2) Method for forming different members In the present invention, two or more different members made of a photosensitive resin can be formed simultaneously. In addition, a dissimilar member means a member from which a function differs. For example, the spacer is a member for setting the thickness of the liquid crystal layer disposed between the color filter and the thin film transistor (TFT) substrate to a desired thickness. The alignment control protrusions control the alignment direction of the liquid crystal molecules in the liquid crystal layer in a plurality of directions by giving a pretilt angle to nearby liquid crystal molecules and distorting the lines of electric force in a desired direction. This is a possible member. The overcoat layer is a member for protecting the colored layer and flattening the colored layer surface. In the present invention, a plurality of members having different functions can be formed simultaneously.

  Examples of the different member formed according to the present invention include various members formed through an exposure process. As the dissimilar member that can be formed, any member that can be formed using a photosensitive resin may be used. Specifically, the spacer and the alignment control protrusion, the spacer and the overcoat layer, the spacer and the black matrix, and the alignment control. A protrusion, a black matrix, etc. can be mentioned.

  In this step, first, the photosensitive resin layer is exposed through a gradation mask. The exposure method is not particularly limited, and, for example, proximity exposure can be performed in which a gradation mask is arranged with a gap of about several tens of μm from the surface of the photosensitive resin to perform exposure. By this exposure, when a negative photosensitive resin is used as the photosensitive resin, a curing reaction occurs at the irradiated portion, and when a positive photosensitive resin is used, an acid generating reaction occurs at the irradiated portion.

After the exposure, development is performed. The photosensitive resin layer is partially removed by development. When a negative photosensitive resin is used as the photosensitive resin, a portion cured by exposure remains and other portions are selectively removed. While the curing reaction proceeds sufficiently at the part exposed from the transmission region, the curing reaction becomes insufficient at the part exposed from the translucent region, so that different types of members having different heights and shapes can be formed simultaneously. it can. In addition, when a positive photosensitive resin is used as the photosensitive resin, the portion decomposed by the exposure is selectively removed, and the other portions remain. The acid generation reaction proceeds sufficiently in the part exposed from the transmission region, whereas the acid generation reaction becomes insufficient in the part exposed from the translucent region, so that different types of members having different heights and shapes are formed simultaneously. be able to.
Development can be performed according to a general development method.

  Moreover, you may heat-process (post-bake) with respect to the formed dissimilar member after exposure and image development. This heat treatment can be appropriately set, for example, at a temperature of 100 to 250 ° C. and a treatment time of about 10 to 60 minutes.

3. Other Steps In the present invention, a colored layer forming step of forming a colored layer on the substrate can be performed. This colored layer forming step may be performed before the above-described photosensitive resin layer forming step, or may be performed after the different member forming step.
The colored layer is usually composed of a red pattern, a green pattern, and a blue pattern. The colored layer can be formed, for example, by a pigment dispersion method using a photosensitive resin composition containing a desired colorant. Furthermore, as a method for forming the colored layer, a general method such as a printing method, an electrodeposition method, a transfer method, or an ink jet method can be used.
The thickness of the colored layer can be set, for example, in the range of 0.5 to 3.0 μm.

In the present invention, a light shielding portion forming step of forming a light shielding portion (sometimes referred to as a black matrix) on the substrate can be performed. This light shielding part forming step may be performed before the above-described photosensitive resin layer forming step, or may be performed after the different member forming step. Usually, the light shielding part forming step is performed before the colored layer forming step.
The light shielding portion can be formed by forming a metal thin film such as chromium by sputtering, vacuum deposition, or the like and patterning the metal thin film. In this case, the thickness of the light-shielding part can be about 200 to 5000 mm.
The light shielding part is formed by forming a resin layer using a polyimide resin composition, an acrylic resin composition, an epoxy resin composition, or the like containing light shielding particles such as carbon fine particles, and patterning the resin layer. You can also Furthermore, the light shielding part can also be formed by forming a resin layer using a photosensitive resin composition containing light shielding particles such as carbon fine particles and metal oxide, and patterning the resin layer.

Furthermore, in this invention, the transparent electrode layer formation process which forms a transparent electrode layer on a board | substrate can be performed. This transparent electrode layer forming step may be performed before the above-described photosensitive resin layer forming step, or may be performed after the different member forming step. Usually, a transparent electrode layer formation process is performed after the said colored layer formation process.
Examples of the material for forming the transparent electrode layer include indium tin oxide (ITO), zinc oxide (ZnO), tin oxide (SnO), and alloys thereof.
As a film forming method of the transparent electrode layer, for example, a general film forming method such as a sputtering method, a vacuum evaporation method, a CVD method, or the like can be used.
The thickness of the transparent electrode layer can be, for example, about 200 to 5000 mm.

Moreover, in this invention, the process of forming the various members in a color filter can be performed before the photosensitive resin layer formation process or after a different member formation process.
For example, after the dissimilar member forming step, an alignment film forming step of forming an alignment film so as to cover two or more dissimilar members may be performed. The alignment film can be formed, for example, by applying an organic compound such as soluble polyimide, polyamic acid type polyimide, or modified polyimide by a general printing method or application method, and then baking. Such an alignment film does not require alignment treatment (rubbing).
The thickness of the alignment film can be about 500 to 1000 mm.

4). Applications Since the color filter manufacturing method of the present invention uses a gradation mask including a translucent film having a predetermined transmittance characteristic, the color filter for liquid crystal display devices is manufactured, particularly for large liquid crystal display devices. Suitable for manufacturing color filters.
The method for producing a color filter of the present invention can also be applied to the production of a substrate for a monochrome liquid crystal display device, for example, a substrate having a light blocking black matrix and a gap holding spacer.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

Hereinafter, the present invention will be specifically described using examples and comparative examples.
[Example 1]
(Production of gradation mask)
A commercially available photoresist (ip-3500, manufactured by Tokyo Ohka Kogyo Co., Ltd.) is placed on a conventional mask blank in which a chromium film (light-shielding film) is formed to a thickness of 100 nm on an optically polished 390 mm × 610 mm synthetic quartz substrate. After coating with a thickness of 600 nm and baking on a hot plate heated to 120 ° C. for 15 minutes, a desired light-shielding film intermediate pattern was drawn with a photomask laser drawing apparatus (LRS11000-TFT3 manufactured by Micronic Co., Ltd.).
Next, development was performed with a dedicated developer (NMD3 manufactured by Tokyo Ohka Kogyo Co., Ltd.) to obtain a resist pattern for a light shielding film.
Next, the resist pattern was used as an etching mask, the chromium film was etched, and the remaining resist pattern was stripped to obtain a desired light-shielding film intermediate pattern. A commercially available cerium nitrate wet etchant (MR-ES manufactured by The Inktec Co., Ltd.) was used for etching the chromium film. The etching time for the chromium film was 60 seconds.

Next, the substrate on which the light-shielding film intermediate pattern is formed is subjected to pattern dimension inspection, pattern defect inspection, pattern correction as necessary, and after being washed well, the chromium film (translucent film) is sputtered under the following conditions. To form a film.
<Film formation conditions>
・ Gas flow ratio Ar: N ₂ = 4: 1
・ Power: 1.3kW
・ Gas pressure: 3.5mTorr
The film thickness of the semitransparent film was 10 nm. A spectral spectrum of the semitransparent film is shown in FIG.
Next, a commercially available photoresist (ip-3500 manufactured by Tokyo Ohka Kogyo Co., Ltd.) was again applied on the semitransparent film at a thickness of 600 nm and baked on a hot plate heated to 120 ° C. for 15 minutes.
Subsequently, an image to be a translucent film pattern was drawn again with a laser drawing device (LRS11000-TFT3 manufactured by Micronic Co., Ltd.) and developed with a dedicated developer (NMD3 manufactured by Tokyo Ohka Kogyo Co., Ltd.) to obtain a resist pattern.
Next, using the resist pattern as a mask, the semitransparent film and the light shielding film were etched with a commercially available cerium nitrate wet etchant (MR-ES manufactured by The Inktec Co., Ltd.) to obtain a semitransparent film pattern and a light shielding film pattern. Etching was performed on the translucent film and the light shielding film.
Finally, the remaining resist was peeled off, and after undergoing inspection processes such as pattern dimension inspection and pattern defect inspection, pattern correction was performed as necessary to obtain a gradation mask.

(Production of color filter)
A glass substrate (Corning 1737 glass) having a size of 100 mm × 100 mm and a thickness of 0.7 mm was prepared as a substrate. After this substrate was washed according to a conventional method, a chromium thin film (thickness: 1000 mm) was formed on the entire surface of one side of the substrate by sputtering. A positive-type photosensitive resist (OFPR-800 manufactured by Tokyo Ohka Kogyo Co., Ltd.) was applied onto the chromium thin film, and exposed and developed through a predetermined mask to form a resist pattern. Next, using this resist pattern as a mask, the chromium thin film was etched to form a black matrix having a line width of 20 μm and a pitch of 100 μm.

Next, a negative photosensitive resin composition for a red pattern, a negative photosensitive resin composition for a green pattern, and a negative photosensitive resin composition for a blue pattern having the following compositions were prepared.

<Negative photosensitive resin composition for red pattern>
Red pigment (Ciba Specialty Chemicals chromophthal red A2B) 4.8 parts by weight Yellow pigment (BASF Pariotor Yellow D1819) 1.2 parts by weight Dispersant (Dispervic 161 manufactured by BYK Chemie) 3 1.0 part by weight / monomer (SR399 manufactured by Sartomer) 4.0 parts by weight Polymer I 5.0 parts by weight initiator (Irgacure 907 manufactured by Ciba Specialty Chemicals) 1.4 parts by weight initiator (2, 2′-bis (o-chlorophenyl) -4,5,4 ′, 5′-tetraphenyl-1,2′-biimidazole) 0.6 part by weight / solvent (propylene glycol monomethyl ether acetate) 80.0 parts by weight

<Negative photosensitive resin composition for green pattern>
Green pigment (Avisia Monastral Green 9Y-C) 4.2 parts by weight Yellow pigment (BASF Paliotor Yellow D1819) 1.8 parts by weight Dispersant (Bicchemy Disperbic 161) 3.0 Parts by weight / monomer (SR399, manufactured by Sartomer) 4.0 parts by weight, polymer I 5.0 parts by weight, initiator (Irgacure 907, manufactured by Ciba Specialty Chemicals) 1.4 parts by weight, initiator (2,2 ′ -Bis (o-chlorophenyl) -4,5,4 ', 5'-tetraphenyl-1,2'-biimidazole) 0.6 parts by weight / solvent (propylene glycol monomethyl ether acetate) 80.0 parts by weight

<Negative photosensitive resin composition for blue pattern>
Blue pigment (BASF Heliogen Blue L6700F) 6.0 parts by weight Pigment derivative (Abyssia Solsperse 5000) 0.6 parts by weight Dispersant (Bic Chemie Dispersic 161) 2.4 parts by weight Monomer (SR399, manufactured by Sartomer) 4.0 parts by weight, Polymer I, 5.0 parts by weight, initiator (Irgacure 907, manufactured by Ciba Specialty Chemicals) 1.4 parts by weight, initiator (2,2'-bis (o -Chlorophenyl) -4,5,4 ', 5'-tetraphenyl-1,2'-biimidazole) 0.6 parts by weight / solvent (propylene glycol monomethyl ether acetate) 80.0 parts by weight

  The polymer I is based on 100 mol% of a copolymer of benzyl methacrylate: styrene: acrylic acid: 2-hydroxyethyl methacrylate = 15.6: 37.0: 30.5: 16.9 (molar ratio). 2-methacryloyloxyethyl isocyanate was added at 16.9 mol%, and the weight average molecular weight was 42500.

  Next, a negative photosensitive resin composition for red pattern is applied by spin coating so as to cover the black matrix on the glass substrate, exposed and developed through a photomask for red pattern, and the red pattern is formed. Formed. The red pattern was rectangular (100 μm × 300 μm).

Then, the green pattern and the blue pattern were formed by the same operation using the negative photosensitive resin composition for the green pattern and the negative photosensitive resin composition for the blue pattern. As a result, a colored layer in which a red pattern, a green pattern, and a blue pattern were arranged was formed.
Next, a transparent electrode layer (thickness 1500 mm) made of indium tin oxide (ITO) was formed by sputtering so as to cover the black matrix and the colored layer.

Next, a negative photosensitive resin composition (Optomer NN850 manufactured by JSR) was applied on the transparent electrode layer by spin coating, dried under reduced pressure, and prebaked at 100 ° C. for 3 minutes. Then, it exposed on the following conditions through said gradation mask.
<Exposure conditions>
・ Exposure amount: 100 mJ / cm ² (I-line conversion)
・ Exposure gap: 150μm

  Next, development was performed using an aqueous potassium hydroxide solution, and then heat treatment was performed at 230 ° C. for 30 minutes to form spacers and alignment control protrusions simultaneously.

[Comparative Example 1]
(Production of gradation mask)
A gradation mask was produced in the same manner as in Example 1 except that a semitransparent film was formed as described below.
The substrate on which the light-shielding film intermediate pattern is formed is subjected to pattern dimension inspection, pattern defect inspection, pattern correction as necessary, and after being washed well, a high refractive index layer (refractive index: 2.5, thickness: 29 nm, TiO 2 ₂ layers) and low refractive index layers (refractive index: 1.5, thickness: 48 nm SiO ₂ film) alternately for a total of 15 layers (the first and 15th layers are high refractive index layers), by sputtering A film was formed. Thereby, the semi-transparent film | membrane which cuts the short wavelength range of wavelength 330nm or less was obtained.

(Production of color filter)
A color filter was produced in the same manner as in Example 1.

[Evaluation]
The cross-sectional shapes of the spacers and alignment control protrusions formed using the gradation masks of Example 1 and Comparative Example 1 were observed with a scanning electron microscope, and the dimensions were measured.

  By using the gradation mask of Example 1 for the exposure process, it was possible to form a pattern having an optimum shape and size for the spacer and the alignment control protrusion.

It is process drawing which shows an example of the manufacturing method of the color filter of this invention. It is a graph which shows an example of the spectrum of the semi-transparent film | membrane of the gradation mask used for this invention. It is process drawing which shows the other example of the manufacturing method of the color filter of this invention. It is a top view which shows an example of the gradation mask used for this invention. It is a top view which shows the other example of the gradation mask used for this invention. It is a top view which shows the other example of the gradation mask used for this invention. It is the sectional view on the AA line of FIG. It is a schematic sectional drawing which shows an example of the color filter manufactured by this invention. FIG. 6 is a sectional view taken along line B-B in FIG. 5. It is a schematic sectional drawing which shows the other example of the color filter manufactured by this invention. It is CC sectional view taken on the line of FIG. It is a schematic sectional drawing which shows the other example of the color filter manufactured by this invention. It is process drawing which shows an example of the manufacturing method of the gradation mask used for this invention. It is process drawing which shows the other example of the manufacturing method of the gradation mask used for this invention. 2 is a graph showing a spectral spectrum of a translucent film in Example 1. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Colored layer 3 ... Light-shielding part 4 ... Transparent electrode layer 5 ... Photosensitive resin layer 11 ... Spacer 12 ... Protrusion for orientation control 21 ... Gradation mask 22 ... Transparent substrate 23 ... Translucent film 24 ... Light-shielding film 25 ... Light shielding area 26 ... Translucent area 27 ... Transmission area

Claims (2)

A photosensitive resin layer forming step of forming a photosensitive resin layer made of a photosensitive resin on a substrate, and exposing the photosensitive resin layer using a gradation mask, developing the photosensitive resin layer, and developing the photosensitive resin layer 2 A method of manufacturing a color filter having a different member forming step of simultaneously forming different members of a species or more,
The gradation mask includes a transparent substrate, a light shielding film, and a translucent film having a transmittance adjusting function laminated in random order, a light shielding region in which the light shielding film is provided on the transparent substrate, and the transparent substrate. A translucent region in which only the translucent film is provided, and a transmissive region in which neither the light-shielding film nor the translucent film is provided on the transparent substrate,
The translucent film state, and are the transmittance distribution of 7% or less in the wavelength range of 300 nm to 450 nm,
Method of producing a color filter transmittance at a wavelength 300nm of the semi-transparent film, characterized in der Rukoto the range of 10% to 70%.   The method for producing a color filter according to claim 1, wherein the translucent film and the light shielding film are chromium-based films.

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