JP4897224B2 - Method and apparatus for polishing workpiece edge - Google Patents

Description

  The present invention relates to a method and apparatus for polishing an edge of a workpiece, and in particular, a semiconductor wafer such as a silicon wafer as an example of a workpiece in a vertical direction, preferably in a vertical range of 60 to 90 degrees with respect to a horizontal plane. Preferably, it is held vertically and is driven to rotate by at least three rotating bodies. A buff is disposed at the lowermost part of the work, and free abrasive grains (slurry) are sprayed from below into the polishing part for buffing. And a buff pressing device that presses the buff from both sides in its thickness direction, thereby solving the problems of the conventional suction table system, complete removal of loose abrasive grains, The present invention relates to an epoch-making method and apparatus for polishing an edge of a workpiece that can achieve significant labor savings by realizing simultaneous buffing of both surfaces and end surfaces, and furthermore, complete removal of loose abrasive grains after completion of buffing.

  As shown in FIG. 17, a conventional polishing method and apparatus for an edge 1a of a workpiece 1 such as a semiconductor wafer is centered by moving the workpiece 1 from a standby position to a polishing position as indicated by an arrow A. A buff 4 fixed on the rotating shaft 3 of the spindle 2 by holding at a suction table (not shown) in a horizontal direction, that is, horizontally and fixed, and rotating at a low speed in the direction of the arrow B or C with a moderate pressure. 1 is pressed against the edge 1a to rotate the buff at a high speed as indicated by an arrow D, and free abrasive grains 6 (also referred to as slurry including diamond abrasive grains) are sprayed from the nozzle 5 onto the polishing portion 1b. In general, the front surface, back surface and end surface of the edge 1a of the work 1 are polished in three steps by moving the spindle 2 with respect to the work 1 as indicated by arrows G and H and in the vertical direction. there were.

  However, in such a conventional method and apparatus for polishing an edge of a workpiece, since the workpiece 1 is held in the lateral direction, loose abrasive grains 6 used for polishing are scattered around and the surrounding mechanical device or the like is used. When it is soiled or the loose abrasive particles adhere to the work 1, it will be carried around as it is, and it is difficult to completely remove it from the work 1, and various troubles will be caused in the subsequent processes of the work 1. There was a risk of bringing. For example, due to the harmfulness of the chemical characteristics, there is a drawback that the work 1 itself is damaged such as erosion or the mechanical device is corroded.

  Further, since the buff 4 is simply a stack of cloths and the like, when polishing the edge 1a of the workpiece 1, the first step is polishing the surface, second polishing to polish the front surface, back surface and end surface. It is necessary to spend 3 steps of polishing, such as polishing of the end face and polishing of the back face of the third step. Therefore, it takes a long polishing time, and it is difficult to save labor. The drive device also has a drawback of being complicated and expensive.

Furthermore, since the work 1 is always sucked by the suction table, the disadvantage that a certain amount of suction marks remain on the back surface of the work 1 cannot be avoided.
In FIG. 17, the workpiece 1 is illustrated as having both an orientation flat (OF) 1 f and a notch 1 d, but this is an illustration for reference, and both are actually shown. It is not formed on one piece of work 1.

  In addition, since this inventor and an applicant do not know the well-known patent document and well-known nonpatent literature regarding this invention, the description is abbreviate | omitted.

  The present invention has been made in order to eliminate the above-described drawbacks of the prior art, and the object of the present invention is to provide a drive device that holds a workpiece in a vertical direction and rotationally drives it, and the vicinity of the lowermost part of the edge of the workpiece. Provided with a buff configured to be able to approach or leave the edge, and a free abrasive spray nozzle for spraying free abrasive grains to the polishing portion of the work, and holding the work in the vertical direction. Driven by a drive device, the buff is brought into contact with the vicinity of the lowermost part of the work and free abrasive grains are sprayed toward the polishing part to buff the edges of the work so that the free abrasive grains are lowered from the lowermost part of the work. In this way, it is intended to prevent dripping but adhering to the workpiece of the free abrasive grains, and to disperse the free abrasive grains to the surrounding machinery. And prevent adhesion as much as possible It is to prevent the various adverse effects due to residual 渣遊 Hanaretogi grains.

  Another object is to hold a work in a vertical direction in the range of 60 degrees to 90 degrees with respect to a horizontal plane, to drive the rotation, a buff configured to approach or leave the edge, A free abrasive grain spray nozzle for spraying free abrasive grains to the polishing part, and the workpiece is held in the vertical direction in the range of 60 degrees to 90 degrees with respect to the horizontal plane and rotated by a driving device, and the workpiece edge A buff that rotates in the vicinity of the lowermost part of the workpiece was placed, the buff was brought into contact with the vicinity of the lowermost part of the work, and free abrasive grains were sprayed toward the polishing part to buff the edge of the work, thereby adhering to the work. Although the force to slide loose abrasive grains along the surface of the workpiece is not maintained at the maximum value, the workpiece is placed in the longitudinal direction within a range where the frictional force between the loose abrasive grains and the workpiece decreases rapidly and in a straight line. Is to hold and also The most efficient free abrasive grains is to allow the free Hanaretogi grain flows downwardly is very efficiently removed by its own weight by Les.

  Another object of the present invention is to provide a driving device that holds a workpiece in a vertical direction and rotationally drives the workpiece around a horizontal axis, a buff configured to approach or detach from the edge, and a polishing portion of the workpiece. A free abrasive spray nozzle that sprays free abrasive grains, holds the workpiece in a vertical direction, and is driven to rotate around a horizontal axis by a driving device, and a buff that rotates near the lowermost part of the edge of the work is disposed. Free abrasive grains between the free abrasive grains and the surface of the workpiece are brought into contact with the bottom of the workpiece and sprayed with free abrasive grains toward the polishing portion of the workpiece to buff the edges of the workpiece. The frictional force due to its own weight is set to 0, the dripping force due to its own weight is maximized, and the free abrasive grains are dripped and removed from the workpiece with the maximum efficiency. To work as residue Or Tsu is to prevent various harmful effects of free abrasive grains due to or adhering scattered around the machinery and equipment.

  Still another object is that the workpiece is held in the vertical direction and the outer peripheral portion of the workpiece is driven to rotate by at least three rotating bodies, and is disposed near the lowermost part of the edge of the workpiece. A buff configured to be able to approach or leave, and a free abrasive spray nozzle that sprays free abrasive grains to the polishing portion of the workpiece, and holds the workpiece in the vertical direction to provide at least three outer peripheral portions of the workpiece The buff is rotated by the rotating body of the workpiece, and a buff rotating in the vicinity of the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work. This eliminates the need for a suction table for rotationally driving the workpiece by spraying loose abrasive grains toward the workpiece and buffing the workpiece edge. And none cheat adsorption mark, also is to completely eliminate the risk of contamination of the workpiece by suction. In addition, it is possible to easily center the workpiece by moving at least three rotating bodies in the radial direction of the workpiece without using the suction table.

  Another object is to provide a driving device that holds the workpiece in the vertical direction and rotationally drives the outer periphery of the workpiece by at least three rotating bodies, and is disposed near the lowermost portion of the edge of the workpiece. A buff configured to be able to approach or leave, a free abrasive spray nozzle for spraying free abrasive grains to the polishing part of the work, and an edge disposed in contact with the edge of the work disposed in a process immediately after the polishing part. And a brush for removing loose abrasive particles adhering to the workpiece, holding the workpiece in the vertical direction, rotating the outer periphery of the workpiece by at least three rotating bodies, and rotating near the bottom of the workpiece edge. Is placed so as to be close to or disengageable from the workpiece, the buff is brought into contact with the vicinity of the lowermost part of the workpiece, and free abrasive grains are sprayed toward the polishing portion of the workpiece to buff the edge of the workpiece, In the process immediately after The brush is brought into contact with the edge of the workpiece and the free abrasive grains adhering to the edge are scraped off, so that the free abrasive particles adhering to the workpiece by buffing can be almost completely removed in the immediately following process. It is also possible to completely drop the free abrasive grains downward so that the free abrasive grains can be removed most cleanly from the workpiece.

  Another object is to provide a driving device that holds the workpiece in the vertical direction and rotationally drives the outer periphery of the workpiece by at least three rotating bodies, and is disposed near the lowermost portion of the edge of the workpiece. A buff configured to be able to approach or detach, a free abrasive spray nozzle for spraying free abrasive grains to the polishing part of the work, and arranged separately on both sides of the rotation center of the work, from above to below the work A water nozzle configured to spray water toward and remove free abrasive grains from the workpiece by the flow of the water, and hold the workpiece in the vertical direction to rotate the outer periphery of the workpiece at least three times A buff that is driven to rotate by the body and rotates near the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work and directed toward the polishing part of the work Free abrasive grains By buffing the edge of the workpiece and spraying water separately on both sides of the rotation center of the workpiece from the top to the bottom of the workpiece, and removing the free abrasive grains from the workpiece by the flow of water, While eliminating the generation of suction marks by the suction table that could not be avoided, the free abrasive grains adhering to the workpiece by buffing can flow down downward by the vertical water flow so that they can be removed very efficiently. That is.

  Another object is to provide a driving device that holds the workpiece in the vertical direction and rotationally drives the outer periphery of the workpiece by at least three rotating bodies, and is disposed near the lowermost portion of the edge of the workpiece. A buff configured to be able to approach or detach, a free abrasive spray nozzle for spraying free abrasive grains to the polishing part of the work, and arranged separately on both sides of the rotation center of the work, from above to below the work A water nozzle configured to spray water toward and remove free abrasive grains from the workpiece by the flow of the water, and a free abrasive configured to discharge the free abrasive grains disposed directly under the polishing portion A duct for grains, and a water duct arranged on both sides of the loose abrasive duct and configured to guide and discharge water to both sides of the loose abrasive duct respectively, Hold the outer periphery of the workpiece at least three times A buff that is driven to rotate by the body and rotates near the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work and directed toward the polishing part of the work While spraying loose abrasive grains and buffing the edges of the workpiece, water is sprayed from the water nozzles arranged separately on both sides of the rotation center of the workpiece from the upper side to the lower side of the workpiece, The free abrasive grains are removed from the workpiece by the flow of water, and the free abrasive grains are further supplied to the free abrasive duct directly under the polishing section, and the water is supplied to the water ducts disposed on both sides of the free abrasive duct. By separating and removing the free abrasive grains and water, the waste liquid with the highest concentration of free abrasive grains can be separated from the waste liquid with a thin concentration and almost water, and thereby the apparatus. Streamlining waste liquid treatment from Together, and to prevent environmental pollution as much as possible.

  Another object is to provide a driving device that holds the workpiece in the vertical direction and rotationally drives the outer periphery of the workpiece by at least three rotating bodies, and is disposed near the lowermost portion of the edge of the workpiece. A buff configured to be able to approach or detach, a free abrasive spray nozzle for spraying free abrasive grains to the polishing part of the work, and arranged separately on both sides of the rotation center of the work, from above to below the work A water nozzle configured to spray water toward and remove free abrasive grains from the workpiece by the flow of the water, and a free abrasive configured to discharge the free abrasive grains disposed directly under the polishing portion A duct for grains, a water duct arranged on both sides of the loose abrasive duct and configured to guide and discharge water to both sides of the loose abrasive duct, and further outside the water nozzle The air is sprayed from above to below. An air nozzle configured to form air curtains on both sides of the work and prevent the loose abrasive grains from scattering around the work, and hold the work in the vertical direction so that the outer periphery of the work is at least three pieces. Driven by a rotating body, a buff that rotates near the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work. While spraying loose abrasive grains and buffing the edges of the workpiece, water is sprayed from the water nozzles arranged separately on both sides of the rotation center of the workpiece from the top to the bottom of the workpiece, The free abrasive grains are removed from the workpiece by the flow of the water, and the free abrasive grains are further supplied to the free abrasive duct directly under the polishing section, and the water is supplied to the water ducts disposed on both sides of the free abrasive duct. Guide and remove free abrasive grains and water, respectively In addition, air is sprayed from the air nozzle further outward from the water nozzle toward the lower side to form air curtains on both sides of the work, thereby preventing the loose abrasive grains from scattering around the work. This prevents the adhering trace to the surface and separates and collects the free abrasive grains and water, prevents the free abrasive grains from scattering to the surrounding machinery and equipment by buffing, and minimizes contamination of the equipment. This is to improve the durability.

  Still another object is to a drive device that holds the workpiece in a vertical direction and rotationally drives the workpiece around a horizontal axis, a buff configured to be able to approach or leave the edge, and a polishing portion of the workpiece. It is equipped with a loose abrasive spray nozzle that sprays loose abrasive grains, the drive device is a suction table, the work is held in the vertical direction, the work is rotated by the suction table, and it rotates near the bottom of the edge of the work The buff to be moved is arranged so as to be close to or detachable from the workpiece, the buff is brought into contact with the vicinity of the lowermost portion of the workpiece, and free abrasive grains are sprayed toward the polishing portion of the workpiece to buff the edge of the workpiece. By holding the workpiece in the vertical direction while using the mechanism of the conventional suction table as it is, the free weight of the free abrasive grains with respect to the work surface of the free abrasive grains adhered to the workpiece by buffing The frictional force by a 0, as free abrasive grains are added dropwise most efficiently downward, it is to achieve the elimination of the most efficient free abrasive grains.

  Another object of the present invention is to bring a buff that can approach or leave the workpiece edge into contact with the edge, and spray free abrasive grains on the polishing portion of the workpiece to buff the workpiece edge. In the polishing method and apparatus, when the buff comes into contact with the workpiece edge, both sides of the edge and the end surface are simultaneously polished by pressing both sides of the buff in the thickness direction with a pressing member and sandwiching both surfaces of the workpiece with the buff. A buff pressing device configured to perform buffing is provided, and when the buff contacts the edge of the workpiece, both sides of the buff in the thickness direction are pressed by a pressing member and polished so that both surfaces of the workpiece are sandwiched by the buff. By simultaneously buffing both sides and end faces of the edge, it is possible to use the buff as if it were a general abrasive. As it is possible to perform buffing conventional 3 step in just one step Te, and significant reduction in polishing time, it is to achieve labor saving.

  Another object of the present invention is to bring a buff that can approach or leave the workpiece edge into contact with the edge, and spray free abrasive grains on the polishing portion of the workpiece to buff the workpiece edge. In the polishing method and apparatus, a work apparatus is provided in the vicinity of the lowermost part of the edge of the work, wherein the work is held in the vertical direction and the outer peripheral part of the work is rotationally driven by at least three rotating bodies. A buff configured to be able to approach or detach, a free abrasive spray nozzle for spraying free abrasive grains to the polishing part of the workpiece, and both sides of the buff in the thickness direction when the buff contacts the workpiece edge. A buff pressing device configured to buff both sides and end faces of the edge at the same time by polishing by pressing with a pressing member and sandwiching both sides of the workpiece with a buff, holding the workpiece in the vertical direction Is rotated by a driving device, and a buff that rotates near the lowermost part of the workpiece edge is arranged so that the buff is brought into contact with the lowermost part of the workpiece, and when the buff comes into contact with the edge of the workpiece, By buffing both sides and end surfaces of the edge simultaneously by pressing both sides in the thickness direction with a pressing member and polishing both sides of the work with a buff, the efficiency of dripping due to the free weight of the free abrasive grains is maximized, In addition, by eliminating the use of a suction table, there is no generation of suction marks, facilitating centering, and the conventional three-step buff polishing can be performed in just one step, greatly increasing the polishing time. To shorten the power and save labor.

In short, the method of the present invention (Claim 1 ) holds the workpiece in the vertical direction, rotationally drives the outer peripheral portion of the workpiece by at least three rotating bodies, and rotates the buff rotating near the lowermost portion of the edge of the workpiece. While placing the buff in proximity to or away from the workpiece and bringing the buff into contact with the vicinity of the lowermost part of the workpiece and buffing the edge of the workpiece by spraying loose abrasive grains toward the polishing portion of the workpiece, Water is sprayed separately on both sides of the center of rotation of the workpiece from above to below the workpiece, and the free abrasive grains are removed from the workpiece by the flow of the water.

In the method of the present invention (claim 2 ), the work is held in the vertical direction, the outer periphery of the work is rotationally driven by at least three rotating bodies, and the buff that rotates near the lowermost part of the edge of the work is While placing the buff in proximity to or away from the workpiece and bringing the buff into contact with the vicinity of the lowermost part of the workpiece and buffing the edge of the workpiece by spraying loose abrasive grains toward the polishing portion of the workpiece, Water is sprayed from water nozzles arranged separately on both sides of the rotation center of the workpiece from above to below the workpiece, and the free abrasive grains are removed from the workpiece by the flow of the water. The loose abrasive grains and the water are introduced by introducing the loose abrasive grains into the loose abrasive ducts directly below the polishing portion, and the water to water ducts disposed on both sides of the loose abrasive duct. It is characterized by separating and removing .

In the method of the present invention (claim 3 ), the work is held in the vertical direction, the outer periphery of the work is rotationally driven by at least three rotating bodies, and a buff that rotates near the lowermost part of the edge of the work is provided. While placing the buff in proximity to or away from the workpiece and bringing the buff into contact with the vicinity of the lowermost part of the workpiece and buffing the edge of the workpiece by spraying loose abrasive grains toward the polishing portion of the workpiece, Water is sprayed from water nozzles arranged separately on both sides of the rotation center of the workpiece from above to below the workpiece, and the free abrasive grains are removed from the workpiece by the flow of the water. The loose abrasive grains and the water are introduced by introducing the loose abrasive grains into the loose abrasive ducts directly below the polishing portion, and the water to water ducts disposed on both sides of the loose abrasive duct. Separate and remove the water nozzle. An air curtain is formed on both sides of the work by injecting air from the air nozzle arranged on the outside to the lower side to prevent the loose abrasive grains from being scattered around. Is.

The present invention method (Claim 4), the total of rotating the workpiece held in the vertical direction and rotationally driven by at least three of the rotating body an outer peripheral portion of the work by, the near the bottom edge of claims workpiece A blade with a blade shape is arranged to bring the buff into contact with the vicinity of the lowermost part of the workpiece, and when the buff contacts the edge of the workpiece, both sides in the thickness direction of the buff are pressed by pressing members. Then, the both surfaces and end surfaces of the edge are simultaneously buffed by polishing so that both surfaces of the workpiece are sandwiched by a buff in a shape like a general cutting tool .

Further, the device of the present invention (Claim 5 ) is provided in the vicinity of the lowermost part of the edge of the workpiece, and a driving device for holding the workpiece in the vertical direction and rotating the outer periphery of the workpiece by at least three rotating bodies. And arranged separately on both sides of the rotation center of the workpiece, a buff configured to be able to approach or leave the edge, a loose abrasive spray nozzle for spraying loose abrasive grains to the polishing portion of the workpiece, and And a water nozzle configured to spray water from above the workpiece downward and to remove the loose abrasive grains from the workpiece by the flow of the water. .

The apparatus of the present invention (Claim 6 ) is provided near the lowermost part of the edge of the workpiece, and a drive device for holding the workpiece in the vertical direction and rotating the outer periphery of the workpiece by at least three rotating bodies. And arranged separately on both sides of the rotation center of the workpiece, a buff configured to be able to approach or leave the edge, a loose abrasive spray nozzle for spraying loose abrasive grains to the polishing portion of the workpiece, and A water nozzle configured to jet water from above the workpiece downward and remove the loose abrasive grains from the workpiece by the flow of the water; and disposed immediately below the polishing portion; A loose abrasive duct configured to discharge loose abrasive grains, and the water disposed on both sides of the loose abrasive duct so as to be guided and discharged to both sides of the loose abrasive duct. A water duct configured, and The release abrasive grains are guided to the loose abrasive duct and the water is led to the water duct to separate and remove the free abrasive grains and the water.

Further, the device of the present invention (Claim 7 ) is provided in the vicinity of the lowermost part of the edge of the workpiece, and a driving device for holding the workpiece in the vertical direction and rotating the outer periphery of the workpiece by at least three rotating bodies. And arranged separately on both sides of the rotation center of the workpiece, a buff configured to be able to approach or leave the edge, a loose abrasive spray nozzle for spraying loose abrasive grains to the polishing portion of the workpiece, and A water nozzle configured to jet water from above the workpiece downward and remove the loose abrasive grains from the workpiece by the flow of the water; and disposed immediately below the polishing portion; A loose abrasive duct configured to discharge loose abrasive grains, and the water disposed on both sides of the loose abrasive duct so as to be guided and discharged to both sides of the loose abrasive duct. A configured water duct and the water nose An air nozzle arranged on the outer side of the nozzle and configured to inject air from above to below to form air curtains on both sides of the workpiece to prevent scattering of the loose abrasive grains. It is characterized by comprising.

Further, the apparatus of the present invention (Claim 8 ) makes a buff that can approach or leave the workpiece edge contact the edge, and sprays free abrasive grains on the polishing portion of the workpiece to buff the workpiece edge. In the polishing apparatus for the edge of the workpiece, the driving device that holds the workpiece in the vertical direction and rotationally drives the outer peripheral portion of the workpiece by at least three rotating bodies, and disposed near the lowermost portion of the edge of the workpiece, A buff having a general blade shape configured to be able to approach or detach from the edge, a free abrasive spray nozzle for spraying free abrasive grains to the polishing portion of the work, and the buff serving as the edge of the work When both sides of the edge of the buff are pressed against each other by a pressing member and both surfaces of the workpiece are polished in a shape like a general cutting tool with the buff, the both surfaces and end surfaces of the edge are made the same. And a buff pressing device configured to be buffed sometimes.

  The present invention, as described above, includes a drive device that holds and rotates a workpiece in a vertical direction, and a buff that is disposed near the lowermost portion of the edge of the workpiece and is configured to approach or leave the edge. A loose abrasive spray nozzle for spraying loose abrasive grains to the polishing part of the workpiece, holding the workpiece in the vertical direction and rotating it with a driving device to bring the buff into contact with the vicinity of the bottom of the workpiece and polishing Since the abrasive grains are sprayed toward the part and the edges of the workpiece are buffed, the loose abrasive grains will drop from the bottom of the workpiece but should not be scattered upward. As a result, it is possible to minimize the scattering and adhesion of loose abrasive grains to the workpiece, and to prevent the loose abrasive grains from spreading to and adhere to surrounding machinery as much as possible. There is an effect that can be prevented.

  Also, a drive device that holds and rotates the workpiece in a vertical direction in the range of 60 degrees to 90 degrees with respect to the horizontal plane, a buff configured to approach or leave the edge, and a polishing portion of the workpiece A free abrasive grain spray nozzle for spraying free abrasive grains, hold the work in a vertical direction in the range of 60 to 90 degrees with respect to the horizontal plane, and rotate by a driving device, near the bottom of the edge of the work Since a rotating buff is arranged to bring the buff into contact with the vicinity of the lowermost part of the work and free abrasive grains are sprayed toward the polishing part to buff the edges of the work. The workpiece can be held in the longitudinal direction within a range where the frictional force between the loose abrasive grains and the workpiece decreases rapidly and in a straight line while the force to slide the workpiece along the surface of the workpiece is maintained at a maximum value. And also this result There is an effect that also efficiently free abrasive grains is the free Hanaretogi grain flows downwardly is very efficiently removed by its own weight.

  In addition, a drive device that holds the workpiece in a vertical direction and rotationally drives the workpiece around a horizontal axis, a buff configured to be close to or disengageable from the edge, and free abrasive grains are sprayed to the polishing portion of the workpiece A loose abrasive spray nozzle that holds the workpiece in a vertical direction and is driven to rotate around a horizontal axis by a driving device, and a buff that rotates near the lowermost part of the edge of the workpiece is disposed to place the buff at the top of the workpiece. Since the free abrasive grains are sprayed toward the polishing portion of the workpiece and buffed to the edge of the workpiece, the workpiece is buffed by the weight of the free abrasive grains between the free abrasive grains and the surface of the workpiece. The frictional force can be reduced to 0, the dripping force due to the free weight of the free abrasive grains is maximized, and the free abrasive grains are dripped and removed from the work with maximum efficiency. As a result, the free abrasive grains are left as residues on the work. Left or around Effect capable of preventing various bad effects of the loose abrasive grains caused by or adhered to scatter 械 device such as can be obtained.

  Furthermore, a drive device that holds the workpiece in the vertical direction and drives the outer periphery of the workpiece to rotate by at least three rotating bodies, and is disposed near the bottom of the edge of the workpiece, approaching or leaving the edge A buff configured to be possible and a free abrasive spray nozzle for injecting free abrasive grains to the polishing portion of the workpiece, holding the workpiece in the vertical direction, and at least three rotating bodies around the outer periphery of the workpiece The buff rotating near the lowermost part of the workpiece edge is disposed so as to be able to approach or detach from the workpiece, and the buff is brought into contact with the lowermost part of the workpiece and directed toward the polishing portion of the workpiece. Since the free abrasive grains are sprayed to buff the edges of the workpiece, a suction table for rotating the workpiece can be dispensed with. There is an effect that can be completely eliminated the risk of contamination of the workpiece by none and to obtain, also adsorb. Further, there is an effect that the workpiece can be easily centered by moving at least three rotating bodies in the radial direction of the workpiece without using the suction table.

  In addition, the workpiece is held in the vertical direction and the outer periphery of the workpiece is driven to rotate by at least three rotating bodies. The configured buff, the free abrasive spray nozzle that sprays free abrasive grains to the polishing part of the workpiece, and the free abrasive that is disposed in the process immediately after the polishing part and contacts the edge of the work. A brush for removing particles, holding the workpiece in a vertical direction, rotating the outer periphery of the workpiece by at least three rotating bodies, and rotating a buff rotating near the lowermost part of the edge of the workpiece against the workpiece The buff is brought into contact with or near the lowermost part of the work, and the edge of the work is buffed by spraying loose abrasive grains toward the work's polishing part. In brush Since the free abrasive grains adhering to the edge are scraped off by contacting with the edge of the work, there is an effect that the free abrasive grains adhering to the work can be almost completely removed by buffing in the process immediately after that. As a result, there is an effect that the free abrasive grains can be completely dropped downward and the free abrasive grains can be removed most cleanly from the workpiece.

  In addition, the workpiece is held in the vertical direction and the outer periphery of the workpiece is driven to rotate by at least three rotating bodies. The buff that is configured, the loose abrasive spray nozzle that sprays loose abrasive grains to the polishing part of the workpiece, and the water is sprayed from the top to the bottom of the workpiece, arranged separately on both sides of the rotation center of the workpiece. And a water nozzle configured to remove loose abrasive grains from the workpiece by the flow of the water, holding the workpiece in the vertical direction, and rotating the outer periphery of the workpiece by at least three rotating bodies. The buff that rotates near the bottom of the workpiece edge is disposed so as to be close to or disengageable from the workpiece, the buff is brought into contact with the vicinity of the bottom of the workpiece, and loose abrasive grains are directed toward the polishing portion of the workpiece. Inject and work While buffing the wedge, spraying water on both sides of the rotation center of the workpiece from the top to the bottom of the workpiece, and removing the free abrasive grains from the workpiece by the flow of the water, While eliminating the generation of suction marks by the suction table that could not be avoided, the free abrasive grains adhering to the workpiece by buffing can be flowed down by the vertical water flow and removed extremely efficiently. is there.

  In addition, the workpiece is held in the vertical direction and the outer periphery of the workpiece is driven to rotate by at least three rotating bodies. The buff that is configured, the loose abrasive spray nozzle that sprays loose abrasive grains to the polishing part of the workpiece, and the water is sprayed from the top to the bottom of the workpiece, arranged separately on both sides of the rotation center of the workpiece. A water nozzle configured to remove free abrasive grains from the workpiece by the flow of water, a duct for free abrasive grains arranged immediately below the polishing portion and configured to discharge the free abrasive grains, And a water duct arranged on both sides of the loose abrasive duct and configured to guide and discharge water to both sides of the loose abrasive duct, respectively. Rotate the outer periphery of the A buff that is driven and rotated near the lowermost part of the edge of the work is arranged so as to be close to or disengageable from the work, and the buff is brought into contact with the vicinity of the lowermost part of the work and loose abrasive toward the polishing part of the work While spraying the grains and buffing the edges of the work, water is sprayed from the water nozzles arranged separately on both sides of the center of rotation of the work from the top to the bottom of the work. The free abrasive grains are removed from the workpiece by the above, and the free abrasive grains are further led to the free abrasive duct directly under the polishing section, and the water is led to the water ducts disposed on both sides of the free abrasive duct to release the free abrasive grains. Since the abrasive grains and water are separated and removed, there is an effect of separating the waste liquid having the highest concentration of free abrasive grains and the waste liquid having a thin concentration and almost water, and as a result, the waste liquid treatment from the apparatus. Can be streamlined and There is an effect that it is possible to prevent contamination as much as possible.

  In addition, the workpiece is held in the vertical direction and the outer periphery of the workpiece is driven to rotate by at least three rotating bodies. The buff that is configured, the loose abrasive spray nozzle that sprays loose abrasive grains to the polishing part of the workpiece, and the water is sprayed from the top to the bottom of the workpiece, arranged separately on both sides of the rotation center of the workpiece. A water nozzle configured to remove free abrasive grains from the workpiece by the flow of water, a duct for free abrasive grains arranged immediately below the polishing portion and configured to discharge the free abrasive grains, A water duct disposed on both sides of the loose abrasive duct and configured to guide and discharge water to both sides of the loose abrasive duct, and an air disposed further outside the water nozzle. Are sprayed from above to below both parts of the workpiece. And an air nozzle configured to prevent the loose abrasive grains from being scattered around, and the work is held in the vertical direction so that the outer periphery of the work is formed by at least three rotating bodies. A buff that is driven to rotate and rotates near the bottom of the workpiece edge is arranged so as to be close to or disengageable from the workpiece, and the buff is brought into contact with the vicinity of the bottom of the workpiece and released toward the polishing portion of the workpiece. While spraying abrasive grains to buff the edges of the workpiece, water is sprayed from the water nozzles arranged separately on both sides of the center of rotation of the workpiece from the top to the bottom of the workpiece. The free abrasive grains are removed from the workpiece by the flow, and the free abrasive grains are further guided to the free abrasive duct directly under the polishing section, and the water is guided to the water ducts disposed on both sides of the free abrasive duct. While separating and removing loose abrasive and water Air curtain is formed on both sides of the work by spraying air from the air nozzle further outward from the water nozzle to prevent the loose abrasive grains from scattering around the work. Adhesion traces and separation and recovery of loose abrasive grains and water can be achieved, while buffing can prevent loose abrasive grains from splashing around machinery and equipment, minimizing contamination of the equipment. The effect which can aim at the improvement of durability is acquired.

  Furthermore, a drive device that holds the workpiece in a vertical direction and rotationally drives the workpiece around a horizontal axis, a buff configured to be close to or disengageable from the edge, and loose abrasive grains to the polishing portion of the workpiece A free abrasive grain injection nozzle that injects, and the drive device is a suction table, the work is held in the vertical direction, the work is rotated by the suction table, and a buff that rotates near the bottom of the edge of the work The buff is brought into contact with or disengaged from the workpiece and the buff is brought into contact with the vicinity of the lowermost portion of the workpiece, and free abrasive grains are sprayed toward the polishing portion of the workpiece to buff the edge of the workpiece. Therefore, by using the conventional suction table mechanism as it is, by holding the workpiece in the vertical direction, the free abrasive grains are attached to the workpiece by buffing by the weight of the free abrasive grains with respect to the work surface. The friction force as 0, becomes the free abrasive grains are added dropwise most efficiently downward, there is an effect that it is possible to effect removal of most efficient free abrasive grains.

  Further, in a workpiece edge polishing method and apparatus in which a buff capable of approaching or detaching from a workpiece edge is brought into contact with the edge, and free abrasive grains are sprayed onto the polishing portion of the workpiece to buff the workpiece edge. When the buff comes into contact with the workpiece edge, both sides in the thickness direction of the buff are pressed by a pressing member and polished so that both surfaces of the workpiece are sandwiched by the buff so that both sides and the end surface of the edge are buffed simultaneously. When the buff comes into contact with the edge of the workpiece, the both sides of the edge are polished by pressing the both sides in the thickness direction of the buff with a pressing member and sandwiching both sides of the workpiece with the buff. And buffing the end faces at the same time has the effect that the buff can be used as if it were a general-purpose polishing tool. Will be able to perform the buffing of come in three steps, and significant reduction in grinding time, there is an effect that can be achieved labor saving.

  Further, in a workpiece edge polishing method and apparatus in which a buff capable of approaching or detaching from a workpiece edge is brought into contact with the edge, and free abrasive grains are sprayed onto the polishing portion of the workpiece to buff the workpiece edge. A driving device that holds the workpiece in the vertical direction and drives the outer periphery of the workpiece to rotate by at least three rotating bodies, and is arranged near the lowermost part of the edge of the workpiece so that the workpiece can approach or leave the edge. The configured buff, the loose abrasive spray nozzle for spraying loose abrasive grains to the polishing part of the workpiece, and the buff in the thickness direction are pressed by the pressing members when the buff contacts the workpiece edge. And a buff pressing device configured to buff both sides and end surfaces of the edge at the same time by polishing so that both surfaces of the workpiece are sandwiched between buffs, and a drive device that holds the workpiece in the vertical direction. Rotate the buff and place a buff that rotates near the bottom of the workpiece edge so that the buff contacts the bottom of the workpiece, and when the buff contacts the workpiece edge, the thickness direction of the buff Since both sides of the edge and the end face are simultaneously buffed by pressing both sides of the workpiece with a pressing member and polishing so that both sides of the work are sandwiched between buffs, the efficiency of dripping due to the free weight of the free abrasive grains can be maximized, Further, by eliminating the use of a suction table, it is possible to facilitate centering while eliminating the generation of suction marks, and it is possible to perform the conventional three-step buff polishing in only one step. This has the effect of significantly reducing time and achieving labor savings.

  Hereinafter, the present invention will be described based on embodiments shown in the drawings. The workpiece edge polishing apparatus 8 according to the first embodiment of the present invention includes, as shown in FIGS. 1 to 11, a drive device 9, a buff 10, a free abrasive spray nozzle 11, and a water nozzle 12. , A loose abrasive duct 13, a water duct 14, an air nozzle 15, a brush 16, and a buff pressing device 18.

  The drive device 9 is configured to rotate and drive the workpiece 1 (mainly a semiconductor wafer, particularly a silicon wafer made of silicon single crystal) in the vertical direction. At least three rotating bodies 20 (20A, 20B, 20C) are rotationally driven. In the case of the workpiece 1 with the notch 1d, three rotating bodies 20 are sufficient (the workpiece 1 with the orientation flat 1f requires at least five as shown in FIG. 12). This will be described later.)

Here, the “longitudinal direction” refers to the “lateral direction” typified by the horizontal holding state of the conventional workpiece 1, the best state is the vertical direction, and preferably the inclination angle with respect to the horizontal plane is 60 degrees to The vertical direction is in the range of 90 degrees.
Here, referring to FIG. 10 and FIG. 11, it is ideal that the inclination angle θ of the workpiece 1 with respect to the horizontal plane is 60 to 90 degrees. (Boundary conditions for limitation) will be described.

In FIG. 10, the mass of the particles 6 a of the loose abrasive grains 6 is m, the acceleration of gravity is g, and the component force due to the self-weight of the particles 6 a with respect to the surface 1 e of the workpiece 1, that is, friction with the surface 1 e of the workpiece 1. The force F is F = mg · cos θ, where F is the force that generates the force f, μ is the coefficient of friction between the particle 6a and the surface 1e of the workpiece 1, and f is the friction force along the surface. The force f is f = μF = μmg · cos θ.
On the other hand, the component force in the direction along the surface 1e of the workpiece 1, that is, the force FP for sliding the particles 6a along the surface of the workpiece 1 is FP = mg · sin θ.
The frictional force f changes in proportion to the cosine value (cos θ) of the tilt angle θ of the workpiece 1, and when the workpiece 1 is horizontal, that is, when the tilt angle θ is 0 degree, the cosine value is 1 and maximum, and the vertical case That is, when the inclination angle θ is 90 degrees, the cosine value is 0 and the minimum, so it is clear that the inclination angle θ is closer to 90 degrees, which is more advantageous.

However, when the inclination angle θ is 60 degrees, the cosine value (cos θ) is 0.5 and the sine value (sin θ) is 0.866, which is more than the force F that generates a frictional force on the surface of the workpiece 1. It can be seen that the force FP for sliding the particles 6a of the free abrasive grains 6 (or the particles of water 23) along 1e is 1.73 times (73%), which is a very advantageous inclination angle.
Further, the frictional force f of the particles 6a generated on the surface 1e of the work 1 becomes 0.5 μmg, which not only enters a very small stage, but also the cosine value up to 90 degrees beyond this inclination angle decreases rapidly, and the friction It can be seen that the value of the force f also decreases rapidly and is in a very advantageous range.
On the other hand, the sine value (sin θ) reaches a saturation state of 0.866 at an inclination angle θ of 60 degrees, and does not increase any further. Therefore, as shown in FIG. Although the change is quite large, it reaches a nearly saturated state at an inclination angle θ of 60 degrees, and thereafter does not change so much and maintains the maximum value.
This is because when the inclination angle θ is 60 degrees or more, the force FP for sliding the particles 6a is proportional to the sine value of the inclination angle θ, and FP = mg · sin θ, so that the force FP is almost close to the maximum value. It means reaching the state.

As is apparent from FIG. 11, when the inclination angle θ is less than 60 degrees, the force FP starts to decrease significantly, and rapidly decreases until the inclination angle θ becomes 0 at 0 degrees.
On the other hand, the frictional force f in the range where the inclination angle θ is less than 60 degrees increases as much as the difference from the case where the inclination angle θ is 60 degrees or more.
In other words, when the inclination angle θ is in the range of 60 degrees to 90 degrees, the force FP for sliding the particles 6a is kept at the maximum value, but the frictional force f is already very small at 60 degrees. In addition to the above, it means a range that rapidly decreases.
Therefore, the frictional force f due to the weight of the particles 6a of the free abrasive grains 6 on the surface 1e of the work 1 is abruptly reduced, and the force FP for sliding the particles 6a is maximally constant, and the force FP is maximized. The range in which the inclination angle θ is maintained and does not change so much is the range in which the inclination angle θ is 60 degrees to 90 degrees.
In other words, the friction force f between the surface 1e of the workpiece 1 and the particles 6a is generated while the force FP for sliding the particles 6a along the surface 1e of the workpiece 1 is kept at a maximum value. It means that the force F to be applied is in a rapidly decreasing range, that is, a preferable range.

  When the tilt angle θ is 61 degrees, the cosine value cos θ is 0.485, which is 3% decrease at 60 degrees, at 62 degrees it is also decreased by 6.2% at 0.469, and at 63 degrees it is 0.454 and is also 9.2%. Decline, 0.438 at 64 °, same 12.4% decrease at 65 °, 1543% decrease at 0.423 at 65 °, 18.7% decrease at 0.407 at 66 °, 0.391 at 67 ° It is also reduced by 21.8%, at 68 degrees it is 0.375 and is also reduced by 25.0%, at 69 degrees it is 0.358 and it is also reduced by 28.4%, and at 70 degrees it is 0.342 and it is also reduced by 31.6% Since it becomes smaller, the frictional force f also becomes smaller in proportion to this cosine value.

  Conversely, when the case where the inclination angle θ is less than 60 degrees is examined, the cosine value cos θ is 0.515 when the inclination angle θ is 59 degrees, an increase of 3% when the inclination angle is 60 degrees, and 0.530 when the inclination angle θ is 58 degrees. It is also increased by 6%, and at 57 ° it is 0.545, it is also increased by 9%, at 56 ° it is also increased by 12%, at 55 ° it is increased by 0.574, it is also increased by 15%, and at 54 ° it is also increased by 0.588. 17.6% increase, 53 ° is 0.602, 20.4% increase, 52 ° is 0.616, 23.2% increase, 51 ° is 0.629, 25.8% increase, 50 ° Then, 0.643 also increases by 28.6%, so the frictional force f increases in proportion to this cosine value.

  Next, considering the range of plus or minus 10 degrees with respect to the inclination angle θ of 60 degrees, the cosine value cos θ at 70 degrees, that is, the reduction rate with respect to the friction force f of 60 degrees is 31. Since the average reduction rate of the frictional force f per degree in this range is 3.16%, the reduction rate of the frictional force f at 50 degrees with respect to the case of 60 degrees is 28. Since this is 6%, the average reduction rate of the frictional force f per degree in this range is 2.86%, which is not as great as the difference, but it is clear that 60 degrees or more is more advantageous. .

  Also, in the range of plus or minus 20 degrees with the tilt angle θ as the boundary, the rate of decrease of the frictional force f at 80 degrees with respect to 60 degrees is 65.2%. The average rate of decrease in the range is 6.52%, whereas the rate of increase in the friction force f at 40 degrees is 60. 3%, so the average rate of increase per degree in this range is 53.2%. It is 5.32%, which is not as great as the difference, but it can be seen that 60 ° or more is more advantageous.

On the other hand, the force FP for sliding the particles 6a is proportional to the sine value sin θ of the inclination angle θ as described above. Therefore, the force FP is compared within a range of plus or minus 10 degrees around the inclination angle θ of 60 degrees. When the inclination angle is 70 degrees, the sine value is 0.939, so it is an increase of 8.4% (0.84% per degree) compared to the case of 60 degrees. At 50 degrees, the sine value is 0.766, so the reduction is 11.5% (1.15% per degree), and the force FP is significantly greater when the angle is less than 60 degrees compared to when the angle is 60 degrees or more. It can be seen that the number decreases.
Further, in the range of plus or minus 20 degrees centering on 60 degrees, the force FP is 13.7% (1 per degree because the sine value is 0.985 at an inclination angle of 80 degrees compared to the case of 60 degrees. .37%), while the sine value is 0.643 at a tilt angle of 40 degrees, this is a significant decrease of 25.8% (2.58% per degree).
As a result, when the inclination angle θ is in the range of 60 to 90 degrees, the force FP for sliding the particles 6a is maintained at a substantially maximum value, while the frictional force f decreases rapidly, which is very advantageous. When θ is less than 60 degrees, in addition to the friction force f increasing greatly compared to 60 degrees or more, the force FP for sliding the free abrasive grains 6 along the surface 1e of the workpiece 1 is drastically reduced. Even if the particles 6 a of the free abrasive grains 6 are caused to flow by the water 23, the possibility of adhering to the work 1 increases.

Accordingly, the frictional force f is drastically reduced, and the range in which the force FP for sliding the particles 6a of the loose abrasive grains 6 along the surface 1e of the work 1 is maintained at a substantially constant maximum value is 60. In this range, the loose abrasive grains 6 are easily slid off due to their own weight.
However, when the tilt angle θ is less than 60 degrees, the frictional force f increases when the cosine value of the tilt angle θ exceeds 0.5, and increases with no significant difference from the case where the tilt angle θ is 60 degrees or more. As a result, the force FP for sliding off the abruptly decreases, and these combine to synergistically reduce the possibility of sliding off due to the weight of the particles 6a of the free abrasive grains 6, and easily adhere to the surface 1e of the workpiece 1.

  The range in which the tilt angle θ exceeds 90 degrees is the same as when the workpiece 1 is tilted from the vertical direction to the reverse direction. It is a thing.

  From the above examination results, the inclination angle θ of the workpiece 1 with respect to the horizontal plane is preferably in the range of 60 degrees to 90 degrees, and if it is less than 60 degrees, it can be practically used in the vertical direction, but it is not very preferable.

The force FP that tries to slide the particles 6a of the loose abrasive grains 6 along the surface 1e of the workpiece 1 is equal to the frictional force f between the particles 6a and the surface 1e of the workpiece 1 that are trying to prevent this. Thus, that is, when FP = f, and therefore mg · sin θ = μmg · cos θ, and thus sin θ = μcos θ, the downward and upward forces acting on the particle 6a are balanced, and the sliding of the particle 6a stops.
Assuming that the friction coefficient μ is 0.3, the inclination angle θ that satisfies this condition is practically about 17 degrees (sin θ = 0.29, μ · cos θ = 0.3 × 0.96 = 0.29), an inclination angle exceeding this angle, that is, an inclination angle θ = 18 degrees or more, corresponds to the “longitudinal direction” in the present invention of the workpiece 1.

Referring next to the rotating body 20, three rotating body 20, for example, Teflon ( "Teflon" is registered trademark of Du Pont) of fabricated in synthetic resin, is disposed vertically 120 degree intervals Each of them is configured to be rotatable about a horizontal axis. Each has a centering mechanism (not shown), is configured to move in the radial direction of the workpiece 1 as indicated by arrows I and J, and contacts the outer peripheral portion 1c of the workpiece 1 to center the workpiece. Can be done.
A V-shaped groove 20a is formed on the outer peripheral portion 20c of the rotating body 20 so that the outer peripheral portion 1c of the work 1 can enter, and the work piece is caused by the frictional force between the rotating body 20 and the outer peripheral portion 1c of the work 1 by the groove. The rotating body 20 is fixed to the holder 7 by screws 27, and the holder is fixed to the rotating shaft 21 of the spindle 17. The spindle 17 is rotationally driven at a low speed by an electric motor (not shown), and each rotating body 20 is rotated in the direction of arrow K at a low speed.

  The buff 10 is configured to be capable of approaching or detaching as shown by arrows L and M with respect to the edge 1 a of the workpiece 1, and is a general buff in which a large number of soft cloths are stacked. The holder is fixed to the rotating shaft 22 of the spindle 47. The spindle 47 is driven to rotate at a high speed by an electric motor (not shown), and the buff 10 is configured to rotate at a high speed in the arrow N direction. The buff 10 is detachably attached to the holder 43 with a screw 37 and is configured to be easily exchanged.

  The loose abrasive spray nozzle 11 sprays loose abrasive grains 6 continuously to the polished portion 1b of the workpiece 1 as shown by the arrow P during polishing. Inclined. The loose abrasive grains 6 are liquid abrasives containing diamond abrasive grains and the like, and are a kind of chemical solution and are usually referred to as “slurry”.

  As shown in FIGS. 1 and 2, the water nozzle 12 injects water 23 as indicated by an arrow Q from above to below the workpiece 1, and removes the free abrasive grains 6 from the workpiece 1 by the flow of the water. In the embodiment shown in the drawing, the cross section is formed in a rectangular shape, and is made of, for example, a stainless steel plate or the like.

  As shown in FIGS. 1, 2 and 7, the loose abrasive duct 13 is configured to discharge only the used free abrasive 6 without mixing the water 23 as much as possible. It is disposed directly under the polishing portion 1b, and is formed in, for example, a square cross section. On the front and back wall surfaces, semicircular recesses 13a that match the shape of the buff 10 are formed, for example, stainless steel plate or chemical resistance. It is made of a very high titanium alloy.

  As shown in FIGS. 1, 2 and 7, the water duct 14 is configured to guide and discharge the used water 23 to both sides of the free abrasive duct 13, respectively. Are arranged adjacent to the duct 13 and are formed in a rectangular cross section, and inclined plates 14a are formed on both the left and right sides in the figure, respectively, so that a wide range of water 23 can be guided into the duct. Yes.

  As shown in FIGS. 1, 2 and 7, the air nozzle 15 injects air 24 from the upper side to the lower side as shown by an arrow R to form air curtains 25 on both sides of the work 1, and loose abrasive grains. It is comprised so that scattering to the circumference | surroundings of 6 may be prevented, and it is formed in the cross-sectional rectangle shape.

As shown in FIGS. 1, 2, and 6, the brush 16 is in contact with the edge 1 a of the workpiece 1 to remove loose abrasive grains 6 attached to the edge 1. The rotating brush is used as an example in the illustrated embodiment. The brush 16 is fixed to a rotary shaft 28, and the rotary shaft is rotationally driven by an electric motor (not shown). The brush 16 can move in the radial direction of the workpiece 1 as indicated by arrows S and T. And is configured to rotate in the direction of arrow U.
The brush 16 is not limited to a rotating brush, and may be a fixed brush.

  As shown in FIGS. 4, 8, and 9, the buff pressing device 18 presses both sides in the thickness direction of the buff by a pair of pressing members 29 when the buff 10 contacts the edge 1 a of the workpiece 1. By polishing so that both surfaces of the work 1 are sandwiched between buffs 10, both surfaces and end surfaces of the edge 1 a are simultaneously buffed. As shown in FIGS. 8 and 9, the pressing member 29 has arrows V, It is configured to be movable as indicated by W, and the buff 10 is sandwiched by moving as indicated by an arrow V.

  Next, another embodiment of the first embodiment of the present invention shown in FIGS. 12 and 13 will be described. The workpiece edge polishing apparatus 8 is intended for the workpiece 1 on which the orientation flat 1c is formed. The number of rotating bodies 20 (20A, 20B, 20C, 20D, 20E) of the driving device 9 that rotates and holds 1 in the vertical direction is five, for example, one of the rotating bodies 20B faces the orientation flat 1c. Even when the rotation cannot be performed, the other four rotating bodies 20A, 20C, 20D, and 20E can rotate the workpiece 1 without any trouble. The other configurations are shown in FIG. Since it is the same as that of an Example, the same code | symbol is attached | subjected to drawing and the description is abbreviate | omitted to the same part.

  Next, a workpiece edge polishing device 8 according to a second embodiment of the present invention shown in FIGS. 14 to 16 will be described. This is a workpiece 1 drive device 9 that is provided with a suction table 30 that rotates around a horizontal axis. The suction table 30 is configured to suck the back surface 1g of the workpiece 1 held in the vertical direction. Since other configurations are the same as those of the first embodiment, the same portions are denoted by the same reference numerals in the drawings, and the description thereof is omitted.

In the method of the present invention (Claim 1 ), the workpiece 1 is held in the vertical direction, and the outer peripheral portion 1c of the workpiece is rotationally driven by at least three rotating bodies 20 (20A, 20B, 20C). A buff 10 rotating in the vicinity of the lowermost part of 1a is arranged so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work 1 and loose abrasive grains 6 toward the polishing part 1b of the work. , And buffing the edge 1a of the work 1 while spraying water 23 on both sides of the rotation center of the work from the upper side to the lower side of the work 1, and the free abrasive grains 6 are formed by the water flow. This is a method of removing from the work 1.

In the method of the present invention (claim 2 ), the workpiece 1 is held in the vertical direction, and the outer peripheral portion 1c of the workpiece is rotationally driven by at least three rotary bodies 20 (20A, 20B, 20C). A buff 10 rotating in the vicinity of the lowermost part of 1a is arranged so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work 1 and loose abrasive grains 6 toward the polishing part 1b of the work. , And buffing the edge 1a of the work 1, while spraying water 23 from the water nozzles 12 arranged separately on both sides of the rotation center of the work from the upper side to the lower side of the work 1, The free abrasive grains 6 are removed from the work 1 by the flow of water, and the free abrasive grains 6 are disposed in the free abrasive duct 13 immediately below the polishing portion 1b, and the water 23 is disposed on both sides of the free abrasive duct. Led to each of the water ducts 14 and loosen In this method, the grains 6 and the water 23 are separated and removed.

In the method of the present invention (claim 3 ), the workpiece 1 is held in the vertical direction, and the outer peripheral portion 1c of the workpiece is rotationally driven by at least three rotating bodies 20 (20A, 20B, 20C). A buff 10 rotating in the vicinity of the lowermost part of 1a is arranged so as to be able to approach or leave the work, and the buff is brought into contact with the vicinity of the lowermost part of the work 1 and loose abrasive grains 6 toward the polishing part 1b of the work. , And buffing the edge 1a of the work 1, while spraying water 23 from the water nozzles 12 arranged separately on both sides of the rotation center of the work from the upper side to the lower side of the work 1, The free abrasive grains 6 are removed from the work 1 by the flow of water, and the free abrasive grains 6 are disposed in the free abrasive duct 13 immediately below the polishing portion 1b, and the water 23 is disposed on both sides of the free abrasive duct. Led to each of the water ducts 14 and loosen The particles 6 and the water 23 are separated and removed, and air 24 is sprayed from the air nozzle 15 disposed further outside the water nozzle 12 downward from above, and air curtains 25 are formed on both sides of the work 1. This is a method of forming and preventing scattering around the loose abrasive grains 6.

In the method of the present invention (Claim 4 ), a buff 10 that can approach or leave the edge 1a of the workpiece 1 is brought into contact with the edge, and free abrasive grains 6 are sprayed onto the polishing portion 1b of the workpiece, thereby causing the workpiece 1 to move. In the method of buffing the edge 1 of the workpiece 1, the workpiece 1 is held in the vertical direction, and the outer peripheral portion 1c of the workpiece is rotationally driven by at least three rotating bodies 20 (20A, 20B, 20C). A buff 10 having a general blade shape rotating around the lowermost part of the workpiece 1 is disposed so that the buff is brought into contact with the lowermost part of the work 1, and when the buff 10 contacts the edge 1 a of the work 1, the thickness of the buff This is a method in which both sides and end faces of the edge 1a are simultaneously buffed by pressing both sides in the vertical direction with a pressing member 29 and polishing both sides of the work 1 with the buff sandwiched in a shape like a general cutting tool .

  The present invention is configured as described above, and the operation thereof will be described below. First, the operation of the first embodiment of the present invention will be described with reference to FIGS. 5 to 7. In FIG. 5, when the work 1 having the notch 1d is set between the three rotating bodies 20A, 20B, and 20C, a centering mechanism is provided. , Each rotating body 20 moves in the direction of arrow I to center the workpiece 1.

When this centering is completed, the center of the workpiece 1 coincides with the center of rotation, and the eccentricity is eliminated. Each rotating body 20 starts to rotate in the direction of arrow K by an electric motor or the like, and the workpiece 1 is rotated by each rotating body 20A, 20B. , 20C and the outer peripheral portion 1c of the workpiece 1 are rotated at a low speed in the direction of arrow B by the frictional force between the groove 20a and the outer peripheral portion 1c of the workpiece 1.
As described above, the outer peripheral portion 1c of the work 1 is rotationally driven by the three rotating bodies 20A, 20B, and 20C irrespective of the suction table, thereby completely removing the suction marks by the suction table that could not be avoided in the past. It is possible to prevent the damage of the work 1 after the buffing is finished, and the damage can be reduced accordingly.

Here, as shown in FIG. 7, air 24 is injected from the air nozzle 15, and air curtains 25 are formed on both the left and right sides of the work 1 in the drawing, and the surroundings are blocked by the air curtain.
Then, as shown in FIGS. 6 and 7, water 23 is jetted from the water nozzle 12, and water flows are formed on both the front and back surfaces of the work 1, so that the work 1 is completely enclosed by the water 23. Thereby, all the things adhering to the workpiece 1 are ready to be washed down by the water 23.

  Then, as shown in FIGS. 5 to 7, the free abrasive grains 6 are sprayed from the free abrasive grain spray nozzle 11 toward the polishing portion 1 b of the work 1, and the free abrasive grains 6 are about to buff the work 1 from now on. It adheres to the polishing part 1b.

Here, as shown in FIGS. 8 and 9, the pressing member 29 of the buff pressing device 18 moves from both sides of the upper portion of the buff 10 in the direction of the arrow V and presses the buff 10 with an appropriate pressure. Then, the upper part of the buff 10 is formed in a clear U-shape.
Next, as shown in FIGS. 5 to 7, the buff 10 starts rotating at a considerably high speed by a buff drive mechanism (not shown) and rises as indicated by an arrow L, and a part of the upper part of the buff 10 is a workpiece 1. As a result, the edge enters the buff 10.
The upper part of the buff 10 is shaped to envelop the edge 1a of the work 1, that is, like a U-shaped blade, and the buff 10 contacts both the front and back surfaces and the end face of the work 1 at the same time. The polishing part 1b is buffed simultaneously.

In this case, the buffing of the three surfaces of the front surface, the end surface, and the back surface is conventionally required, but in the present invention, the buffing of these three surfaces can be performed in only one third of the steps.
At this time, the buff pressing device 18 controls the pressing force of the pressing member 29 against the buff 10 to adjust the polishing ability by the buff 10, and the buff polishing can be continued in an optimum state.

  On the other hand, as shown in FIGS. 6 and 7, the brush 16 starts to rotate in the direction of the arrow U via the rotation shaft 28 by a brush drive mechanism (not shown), and at the same time, moves as shown by the arrow S. The free abrasive grains 6 coming into contact with the edge 1a of the workpiece 1 and adhering to the edge 1a of the workpiece 1 are peeled off and continuously removed. As a result, almost no free abrasive grains 6 remain in the polishing portion 1b of the work 1 after passing through the brush 16, and this is washed away by the water 23. Therefore, the work 1 after the buffing is completed is free abrasive. It will be in the beautiful state where the grain 6 does not adhere at all.

  During the buffing, the water 23 is always sprayed and flowing down from the water nozzle 12 as indicated by the arrow Q, so that all the free abrasive grains 6 and the polishing pad to which the workpiece 1 is adhered are flowed down and mainly free abrasive. The grains 6 flow into the central loose abrasive duct 13 and are collected separately.

  In this case, in the illustrated embodiment, since the workpiece 1 is held in an ideal vertical direction in the longitudinal direction, the particles of the free abrasive grains 6 along the surface of the workpiece 1 if the viscous friction is ignored. The frictional force f in the direction of preventing the sliding of 6a is 0, the force FP sliding down by the weight of the particles 6a of the loose abrasive grains 6 is maximized, and flows down smoothly with the help of the water 23.

  Further, as shown in FIG. 10, as shown in FIG. 10, the inclination angle θ of the workpiece 1 with respect to the horizontal plane is maintained at 60 ° to 90 °. The force FP is considerably small, and the force FP for sliding the particles 6a of the loose abrasive grains 6 along the surface of the workpiece 1 is in a very large range, so that the loose abrasive grains 6 of the workpiece 1 are no different from the vertical case. Various deposits can be efficiently removed with the help of the water 23.

  Even if the tilt angle θ is less than 60 degrees, the particles 6a of the free abrasive grains 6 start to slide down by their own weight by holding the workpiece 1 in the vertical direction of at least about 18 degrees or more. As compared with the conventional horizontal holding, a considerably better deposit removing effect can be obtained.

  Next, the separation and collection of the free abrasive grains 6 and the water 23 will be described. As shown in FIG. 7, the free abrasive grains 6 flow into the free abrasive duct 13 from the polishing portion 1b immediately below the workpiece 1 as the largest amount. Collected. This is because the water 23 always flows down from above, so that it flows immediately under the buffing. Therefore, since the waste liquid collected in the free abrasive duct 13 is almost free abrasive 6, post-processing suitable for this can be concentrated.

  Further, the loose abrasive grains 6 that remain in the work 1 are removed by the brush 16 and are washed away by the flow of the water 23 from above, and flow into the water duct 14 together with the water 23 and are collected. The Since the remaining free abrasive grains 6 in the water 23 are very diluted, it is easy to treat the water 23 collected in the water duct 14 and a small amount of the free abrasive grains 6. It is easy to treat waste liquid.

  As described above, according to the first embodiment of the present invention, during the buff polishing, the work 1 is held in the vertical direction and the buff polishing is performed anyway. The deposits such as abrasive grains 6 on the work 1 can be removed cleanly. As a result, etching-like corrosion or erosion of the work 1 due to the remaining free abrasive grains 6 after the buffing polishing can be prevented, A workpiece 1 such as a semiconductor wafer having a very good finish can be obtained. Further, since no suction table is used, it is possible to completely eliminate suction marks. In addition, since waste liquid is separately collected, waste liquid treatment is easy.

When the buffing is finished, each mechanism is operated in the opposite direction, firstly the injection of the free abrasive grains 6 from the free abrasive spray nozzle 12 is stopped, and then the buff pressing device 18 is operated and the pressing member 18 is moved to the arrow W. The buff 10 is released by moving in the direction, and the buff 10 is moved in the direction of the arrow M by the drive mechanism and moved backward to stop its rotation.
After a while, the brush 16 moves in the direction of the arrow T, the rotation stops, the injection of the water 23 stops, and the driving device 9 of the work 1 stops the rotation of each rotating body 20A, 20B, 20C. The rotation of the work 1 is stopped.
Thereafter, the injection of the air 24 stops and the air curtain 24 disappears.
Accordingly, each of the rotating bodies 20A, 20B, and 20C moves in the direction of the arrow J and is separated from the outer peripheral portion 1c of the work 1, and the work 1 is taken out by a take-out mechanism (not shown), and buff polishing of one work 1 is performed. The process is complete.
Thereafter, the same operation is repeated, and the buffing of the workpiece 1 can be performed efficiently one after another.

  Next, the operation of another aspect of the first embodiment of the present invention shown in FIGS. 12 and 13 will be described. This is performed by holding the buffing of the work 1 having the orientation flat 1f in the vertical direction in the same manner, and the work is driven by the five rotating bodies 20A, 20B, 20C, 20D, and 20E of the driving device 9 of the work 1. 1 is rotated, and the edge 1a of the workpiece 1 is buffed in the same manner as in the first embodiment.

In this case, as shown in FIG. 12, for example, when the orientation flat 1f reaches the rotating body 20B, the rotating body 20B is in a play state, but the other four rotating bodies 20A, 20C, 20D, There is no problem because it is driven to rotate by 20E, and as shown in FIG. 13, when the orientation flat 1f reaches the rotating body 20C, the rotating body 20C enters a play state, but the other four rotating bodies. Since it is rotationally driven by 20A, 20B, 20D, and 20E, there is no problem and the workpiece 1 is continuously rotationally driven.
Since other operations are the same as those in the first embodiment, the same parts are denoted by the same reference numerals, and description of the operations is omitted.

Next, the operation of the second embodiment of the present invention shown in FIGS. 14 to 16 will be described. In this embodiment, since the drive device 9 for the workpiece 1 is a suction table 30 similar to the conventional one, the workpiece 1 is first held in the vertical direction, and in the illustrated embodiment, it is held in the vertical direction and evacuated by the suction table 30. The back surface 1g is sucked by means such as the above, and the work table 1 is rotated at a low speed by rotating the suction table 30 at a low speed.
As a result, the conventional suction mark is attached to the back surface 1g of the work 1, but the other functions are the same as those of the first embodiment, and the effect of the invention is exactly the same except that the suction mark cannot be removed. An effect can be obtained. Since these functions and effects are exactly the same as those of the first embodiment, the same portions are denoted by the same reference numerals in the drawings, and description of the functions is omitted.

1 to 13 relate to a first embodiment of the present invention.
FIG. 2 is a perspective view of a polishing apparatus for a workpiece edge. FIG. 2 is a partial longitudinal sectional front view of a polishing apparatus for a workpiece edge. FIG. 2 is a longitudinal sectional front view of a main part of a polishing apparatus for a workpiece edge. FIG. 3 is a longitudinal sectional view of a polishing apparatus for a workpiece edge as viewed from the side. FIG. 4 is a partial longitudinal sectional front view showing the operation of a polishing apparatus for a workpiece edge. FIG. 3 is a longitudinal sectional front view of a main part showing the operation of a polishing apparatus for a workpiece edge during buff polishing. FIG. 4 is a partial longitudinal sectional front view showing an operation of a polishing apparatus for a workpiece edge during buff polishing. FIG. 3 is a longitudinal sectional view of a polishing apparatus for a workpiece edge as viewed from the side of the workpiece being buffed. FIG. 3 is a side view of a longitudinal section of a main portion showing the operation of a workpiece edge polishing apparatus viewed from the side of a workpiece being buffed. These are explanatory drawings which show the mechanical relationship of the force by the dead weight which acts on the particle | grains of the loose abrasive grain of the state which hold | maintained the inclination angle with respect to the horizontal surface of the workpiece | work 1 in the vertical direction of 60 degree | times to 90 degree | times. FIG. 5 is a diagram showing a change in a cosine curve, a sine curve, a frictional force that prevents the particles of loose abrasive grains from sliding down, and a change in the force by which the particles slide down under their own weight. FIG. 13 shows another aspect of the first embodiment of the present invention, and FIG. 12 is a partial longitudinal sectional front view of a polishing apparatus for a workpiece edge during buff polishing. FIG. 3 is a longitudinal sectional front view of a main part showing the operation of a polishing apparatus for a workpiece edge during buff polishing. FIG. 16 relates to a second embodiment of the present invention, and FIG. 14 is a perspective view of a polishing apparatus for a workpiece edge. FIG. 4 is a right side view of a polishing apparatus for a workpiece edge. FIG. 3 is a right side view of a main part of a polishing apparatus for a workpiece edge during buffing. These are perspective views which show the effect | action of the polishing apparatus of the edge of the workpiece | work which concerns on a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Work 1a Edge 1b Polishing part 1c Peripheral part 1d Notch 1e Surface 1f Orientation flat 1g Back 6 Free abrasive grains 6a Particle 8 Workpiece edge polishing apparatus 9 Drive apparatus 10 Buff 12 Water nozzle 13 Free abrasive duct 14 For water Duct 15 Air nozzle 16 Brush 18 Buff pressing device 20 Rotating body 20A Rotating body 20B Rotating body 20C Rotating body 20D Rotating body 20E Rotating body 23 Water 24 Air 25 Air curtain 29 Pressing member 30 Adsorption table

Claims (8)

The work is held in the vertical direction and the outer periphery of the work is rotationally driven by at least three rotating bodies, and a buff that rotates near the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work. The buff is brought into contact with the vicinity of the lowermost part of the workpiece and free abrasive grains are sprayed toward the polishing portion of the workpiece to buff the edge of the workpiece, and the workpiece is directed downward from above the workpiece. A method for polishing a workpiece edge, wherein water is sprayed separately on both sides of the rotation center, and the loose abrasive grains are removed from the workpiece by the flow of the water. The work is held in the vertical direction and the outer periphery of the work is rotationally driven by at least three rotating bodies, and a buff that rotates near the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work. The buff is brought into contact with the vicinity of the lowermost part of the workpiece and free abrasive grains are sprayed toward the polishing portion of the workpiece to buff the edge of the workpiece, and the workpiece is directed downward from above the workpiece. Water is sprayed from water nozzles arranged separately on both sides of the center of rotation, and the free abrasive grains are removed from the workpiece by the flow of the water, and the free abrasive grains are directly below the polishing portion. An edge of a workpiece characterized in that the loose abrasive and the water are separated and removed by introducing the water into a duct for loose abrasive and led to the water duct disposed on both sides of the duct for loose abrasive, respectively. Polishing method. The work is held in the vertical direction and the outer periphery of the work is rotationally driven by at least three rotating bodies, and a buff that rotates near the lowermost part of the edge of the work is disposed so as to be able to approach or leave the work. The buff is brought into contact with the vicinity of the lowermost part of the workpiece and free abrasive grains are sprayed toward the polishing portion of the workpiece to buff the edge of the workpiece, and the workpiece is directed downward from above the workpiece. Water is sprayed from water nozzles arranged separately on both sides of the center of rotation, and the free abrasive grains are removed from the workpiece by the flow of the water, and the free abrasive grains are directly below the polishing portion. Into the free abrasive duct, the water is guided to the water ducts disposed on both sides of the free abrasive duct to separate and remove the free abrasive grains and the water, and the water nozzle further Nozzle for air arranged outside Luo air to be injected from above downward to form the air curtain on either side of the workpiece, polishing process of the workpiece edge, characterized in that to prevent splashing to the surroundings of the free abrasive grains. In a method of buffing an edge of the workpiece by bringing a buff that can approach or leave the workpiece edge into contact with the edge and spraying free abrasive grains onto the polishing portion of the workpiece, the workpiece is held in the vertical direction. The outer peripheral part of the workpiece is rotationally driven by at least three rotating bodies, and a buff of a general blade shape rotating near the lowermost part of the edge of the work is arranged to contact the buff near the lowermost part of the work In addition, when the buff contacts the edge of the workpiece, both sides of the buff in the thickness direction are pressed by a pressing member so that both sides of the workpiece are sandwiched between the buffs in a shape like a general cutting tool. A method for polishing an edge of a workpiece, comprising polishing both sides and end faces of the edge simultaneously by polishing. A driving device that holds the workpiece in the vertical direction and rotates the outer periphery of the workpiece by at least three rotating bodies, and is disposed near the lowermost part of the edge of the workpiece, and can approach or leave the edge. A buff configured as above, a free abrasive spray nozzle for spraying free abrasive grains to the polishing portion of the workpiece, and arranged separately on both sides of the center of rotation of the workpiece from above to below the workpiece. An apparatus for polishing an edge of a workpiece, comprising: a water nozzle configured to inject water and remove the free abrasive grains from the workpiece by the flow of the water. A driving device that holds the workpiece in the vertical direction and rotates the outer periphery of the workpiece by at least three rotating bodies, and is disposed near the lowermost part of the edge of the workpiece, and can approach or leave the edge. A buff configured as above, a free abrasive spray nozzle for spraying free abrasive grains to the polishing portion of the workpiece, and arranged separately on both sides of the center of rotation of the workpiece from above to below the workpiece. A water nozzle configured to inject water and remove the free abrasive grains from the workpiece by the flow of the water, and arranged to be disposed immediately below the polishing portion and configured to discharge the free abrasive grains. A free abrasive duct, and a water duct arranged on both sides of the free abrasive duct and configured to guide and discharge the water to both sides of the free abrasive duct, Free abrasive grains into the free abrasive duct Polishing apparatus of the workpiece edge, characterized by being configured the water to fractional removal respectively led by the free abrasive grains and the said water to the water duct. A drive device that holds a workpiece in a vertical direction and rotationally drives the outer peripheral portion of the workpiece by at least three rotating bodies, and is disposed near the lowermost part of the edge of the workpiece, approaching or separating from the edge A buff configured to be possible, a loose abrasive spray nozzle for spraying loose abrasive grains to the polishing portion of the workpiece, and a separate baffle disposed on both sides of the center of rotation of the workpiece. A water nozzle configured to eject water and remove the free abrasive grains from the workpiece by the flow of the water, and is configured to be disposed immediately below the polishing portion and discharge the free abrasive grains. The loose abrasive duct, the water duct disposed on both sides of the loose abrasive duct and configured to guide and discharge the water to both sides of the loose abrasive duct, and the water Air is disposed further outside the nozzle And an air nozzle configured to form an air curtain on both sides of the work and prevent the loose abrasive particles from scattering around the work. Polishing equipment. In a workpiece edge polishing apparatus, a buff capable of approaching or detaching from a workpiece edge is brought into contact with the edge, and free abrasive grains are sprayed onto the workpiece polishing portion to buff the workpiece edge. A drive device that holds the workpiece in the vertical direction and rotates the outer periphery of the workpiece with at least three rotating bodies, and is arranged near the lowermost part of the edge of the workpiece, and is configured to be able to approach or leave the edge. A buff having a general blade shape, a loose abrasive spray nozzle for spraying loose abrasive grains to the polishing portion of the workpiece, and a thickness direction of the buff when the buff contacts the edge of the workpiece. It consists of pressing the both surfaces of the workpiece by the pressing member on both sides so as to simultaneously buffing both sides and end faces of the edge by polishing so as to sandwich the form such as form-cutting tool in the buff Polishing apparatus of the workpiece edge, characterized in that a buff pressing device.

Images