CN108705396A - A kind of grinding device of solar cell crystalline silicon - Google Patents

A kind of grinding device of solar cell crystalline silicon Download PDF

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Publication number
CN108705396A
CN108705396A CN201810730464.6A CN201810730464A CN108705396A CN 108705396 A CN108705396 A CN 108705396A CN 201810730464 A CN201810730464 A CN 201810730464A CN 108705396 A CN108705396 A CN 108705396A
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CN
China
Prior art keywords
piston
far
shaft
mounting plate
pulley
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810730464.6A
Other languages
Chinese (zh)
Inventor
刘宏
王春定
龚志国
姚学森
刘柏林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Original Assignee
TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd filed Critical TIANCHANG BAISHENG SEMICONDUCOTR TECHNOLOGY Co Ltd
Priority to CN201810730464.6A priority Critical patent/CN108705396A/en
Publication of CN108705396A publication Critical patent/CN108705396A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/02Frames; Beds; Carriages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • B24B41/047Grinding heads for working on plane surfaces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

The invention discloses a kind of grinding devices of solar cell crystalline silicon,The first sliding groove is set in second mounting plate,The first pulley of driving third mounting plate sliding is equipped in the first sliding groove,Second sliding slot is equipped in third mounting plate,The second pulley of driving the second sliding block sliding is equipped in second sliding slot,7th piston and the 7th piston shaft are installed on the second sliding block,The side of 7th piston shaft is equipped with the 7th motor,7th piston shaft is equipped with the 8th piston and the 8th piston shaft,8th piston shaft side is equipped with cushion pad,Pedestal upper end is equipped with the first mounting plate,First mounting plate upper end is equipped with the 4th piston,4th piston is equipped with the 4th piston shaft and the 5th piston,The 4th mounting plate is installed on 5th piston,The second drive shaft is equipped in 4th mounting plate,Second wheel disc is installed in the second drive shaft,The circumferential direction of second wheel disc is equipped with the second polishing layer,4th mounting plate side is equipped with the 6th motor of the second drive shaft turns of driving.The present invention can effectively improve the grinding efficiency and quality of monocrystalline silicon piece.

Description

A kind of grinding device of solar cell crystalline silicon
Technical field
The present invention relates to beating for the technical field of monocrystalline silicon piece production equipment more particularly to a kind of solar cell crystalline silicon Mill apparatus.
Background technology
Monocrystalline silicon piece:The monocrystal of silicon is a kind of crystal with basic complete lattice structure.Different directions have Different property is a kind of good semiconducting material.It is used for producing the semiconductor devices, solar cell etc..It is more with high-purity Crystal silicon is drawn in single crystal growing furnace.In the production process of monocrystalline silicon piece, polishing is final step, and determines the essence of product The extremely pass factor of fineness and product quality, grinding device grinding efficiency in the prior art is low, and polishing is of poor quality, and polishes It is easy to that monocrystalline silicon piece is caused to damage in the process, so there is an urgent need for develop a kind of solar cell crystalline silicon of high efficiency high quality Grinding device solve the problems of the prior art.
Invention content
To solve technical problem present in background technology, the present invention proposes a kind of polishing dress of solar cell crystalline silicon It sets, there is excellent grinding efficiency and quality, avoid monocrystalline silicon piece bruting process and monocrystalline silicon piece is caused to damage.
A kind of grinding device of solar cell crystalline silicon proposed by the present invention, including pedestal, the upper end peace of the pedestal Equipped with the second mounting plate, it is equipped with the first sliding groove in second mounting plate, is equipped with first pulley in the first sliding groove, described the Third mounting plate is installed, the side of second mounting plate is equipped with the 4th motor, in the third mounting plate on one pulley Equipped with second sliding slot, it is equipped with second pulley in the second sliding slot, driving second pulley is installed on that plate of the third and is slided The 5th dynamic motor is equipped with the second sliding block, one end installation of second sliding block far from second pulley in the second pulley There are the 7th piston, the one end of the 7th piston far from the second sliding block to be equipped with the 7th piston shaft, the side of the 7th piston shaft Equipped with the 7th motor, side of the 7th piston shaft far from the 7th motor is equipped with the 8th piston, and the 8th piston is far from the The side of seven piston shafts is equipped with the 8th piston shaft, and side of the 8th piston shaft far from the 8th piston is equipped with the 9th piston, institute It states the 9th side of the piston far from the 8th piston shaft and is equipped with third limiting plate, the side of the third limiting plate far from the 9th piston Equipped with the 9th piston shaft, side of the 9th piston shaft far from third limiting plate is equipped with the tenth piston, and the tenth piston is remote Side from the 9th piston shaft is equipped with cushion pad by cushion pad mounting base, and the pedestal upper end is equipped with the first mounting plate, institute It states the first mounting plate upper end and is equipped with the 4th piston, the one end of the 4th piston far from the first mounting plate is equipped with the 4th piston shaft, The one end of 4th piston shaft far from the 4th piston is equipped with the 5th piston, the one end of the 5th piston far from the 4th piston shaft 4th mounting plate is installed, the second drive shaft is equipped in the 4th mounting plate, the second wheel is installed in second drive shaft The circumferential direction of disk, second wheel disc is equipped with the second polishing layer, and the 4th mounting plate side is equipped with driving the second driving shaft rotation The 6th dynamic motor.
Further, it is socketed with the 4th bullet between the third limiting plate and the tenth piston and in the periphery of the 9th piston shaft Spring.
Further, the side of second sliding block far from second pulley is equipped with the 6th piston, and the 6th piston is separate The side of second sliding block is equipped with the 6th piston shaft, and the 7th piston is mounted on the 6th side of the piston shaft far from the 6th piston.
Further, it is socketed with third bullet between the 6th piston and the 7th piston and in the periphery of the 6th piston shaft Spring.
Further, it is socketed with the second bullet between the 4th piston and the 5th piston and in the periphery of the 4th piston shaft Spring.
Further, first mounting plate upper end is equipped with the first limiting plate, and being equipped with third in first mounting plate slides Slot, the third sliding slot is interior to be equipped with third pulley, is equipped with the first sliding block on the third pulley, is installed on first sliding block There is first piston, first piston axis is installed on the first piston, is equipped with the 4th sliding slot in the first piston axis, described the It is equipped with the 4th pulley in four sliding slots, second piston is installed on the 4th pulley, the second piston is far from the 4th pulley Side is equipped with second piston axis, and the side of the second piston axis far from second piston is equipped with third piston, the third Side of the piston far from second piston axis is equipped with third piston shaft, side installation of the third piston shaft far from third piston There are the second limiting plate, the side of second limiting plate far from third piston shaft that the second motor is installed, second motor is remote Side from the second limiting plate is equipped with the first wheel disc mounting base, and the first wheel disc mounting base is equipped with by the first drive shaft First wheel disc, the periphery of first wheel disc are equipped with the first polishing layer, and the lower end of the pedestal is equipped with third motor, and described the First motor is installed on one piston shaft.
Further, it is socketed with the first bullet between the third piston and the second limiting plate and in the periphery of third piston shaft Spring.
Further, the lower end of the pedestal is equipped with idler wheel by rolling wheel support.
Compared with prior art, technical scheme of the present invention has the advantages that:
1, realize that the polishing to monocrystalline silicon piece, the 7th motor drive the 8th piston by the 6th motor driving the second wheel disc spins Axis stretching motion in the 8th piston so that cushion pad squeezes monocrystalline silicon piece and fixes, and is then driven by the 4th motor Dynamic first pulley is slided in the first sliding groove, is driven third mounting plate to be moved in vertical direction, is realized monocrystalline to be polished Silicon chip is transmitted to the position of the second wheel disc, realizes the polishing to monocrystalline silicon piece, which can effectively improve monocrystalline silicon The grinding efficiency and quality of piece, and can effectively avoid damaging monocrystalline silicon piece during polishing.
2, it by being socketed the 4th spring between third limiting plate and the tenth piston and in the periphery of the 9th piston shaft, realizes When cushion contact is to monocrystalline silicon piece, the 4th spring can effectively buffer pad contact monocrystalline silicon piece when impact force, Effective protection monocrystalline silicon piece does not receive damage, improves the efficiency and quality of monocrystalline silicon piece polishing.
3, coordinated by the way that the 6th piston and the 6th piston shaft are arranged between the second sliding block and the 7th piston, realized when single When crystal silicon chip is polished by the second wheel disc, the second wheel disc lives to the impact force of monocrystalline silicon piece vertical direction in the 6th piston and the 6th Under the buffering for filling in axis cooperation, the efficiency and quality when monocrystalline silicon piece polishing are effectively increased.
4, by being socketed third spring between the 6th piston and the 7th piston and in the periphery of the 6th piston shaft, work as monocrystalline When silicon chip is polished by the second wheel disc, the second wheel disc has the impact force of monocrystalline silicon piece vertical direction under the buffering of third spring Effect improves the efficiency and quality when monocrystalline silicon piece polishing.
5, it by being socketed second spring between the 4th piston and the 5th piston and in the periphery of the 4th piston shaft, realizes When the second sheave contact is to monocrystalline silicon piece, second spring can effective snubber contact when impact force, effectively increase second The efficiency and quality of wheel disc polishing monocrystalline silicon piece.
6, it drives third pulley that the first sliding block is moved in the horizontal direction by third motor, and is driven by first motor Dynamic 4th pulley is moved in vertical direction, and realizing the first wheel disc can vertically and horizontally move, and realize first Wheel disc can be adjusted according to the position of monocrystalline silicon piece, to improve the efficiency and quality polished monocrystalline silicon piece.
7, by being socketed the first spring between third piston and the second limiting plate and in the periphery of third piston shaft so that First wheel disc when touching monocrystalline silicon piece, can effective snubber contact when the impact force that generates, effectively increase the effect of polishing Rate and quality.
8, idler wheel is installed by rolling wheel support by the lower end in pedestal so that grinding device can move freely, and effectively carry The flexibility that high equipment uses.
Description of the drawings
Fig. 1 is a kind of front view of the grinding device for solar cell crystalline silicon that the embodiment of the present invention one proposes;
Fig. 2 is the close-up schematic view at A in Fig. 1;
Fig. 3 is the close-up schematic view at B in Fig. 1;
Fig. 4 is the close-up schematic view at C in Fig. 1.
Marked the names of the parts are as follows in figure:
1- pedestals, 2- rolling wheel supports, 3- idler wheels, the first limiting plates of 4-, the first mounting plates of 5-, the second mounting plates of 6-, 7- One sliding slot, 8- first pulleys, 9- third mounting plates, 10- second sliding slots, 11- second pulleys, 12- third sliding slots, 13- thirds are slided Wheel, the first sliding blocks of 14-, 15- first pistons, 16- first piston axis, the 4th sliding slots of 17-, the 4th pulleys of 18-, 19- second pistons, 20- second piston axis, 21- third pistons, the second limiting plates of 22-, the first springs of 23-, 24- third piston shafts, the second electricity of 25- Machine, 26- the first wheel disc mounting bases, the first drive shafts of 27-, the first wheel discs of 28-, the polishing layers of 29- first, the 4th pistons of 30-, 31- 4th piston shaft, 32- second springs, the 5th pistons of 33-, the 4th mounting plates of 34-, the 6th motors of 35-, the polishing layers of 36- second, The second drive shafts of 37-, the second wheel discs of 38-, 39- limiting slots, the second sliding blocks of 40-, the 6th pistons of 41-, the 6th piston shafts of 42-, 43- Third spring, the 7th pistons of 44-, the 7th piston shafts of 45-, the 7th motors of 46-, the 8th pistons of 47-, the 8th piston shafts of 48-, 49- 9th piston, the 4th springs of 50-, the 9th piston shafts of 51-, the tenth pistons of 52-, 53- cushion pad mounting bases, 54- cushion pads, 55- Third limiting plate, the 4th motors of 56-, the 5th motors of 57-, 58- third motors.
Specific implementation mode
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
Embodiment one
As shown in Figs 1-4, the present invention provides a kind of grinding device of solar cell crystalline silicon, including pedestal 1, pedestal 1 Upper end the second mounting plate 6 is installed, the first sliding groove 7 is equipped in the second mounting plate 6, first pulley 8 is equipped in the first sliding groove 7, Third mounting plate 9 is installed, the side of the second mounting plate 6 is equipped with the 4th motor 56, in third mounting plate 9 in first pulley 8 Equipped with second sliding slot 10, it is equipped with second pulley 11 in second sliding slot 10, driving second pulley 11 is installed on that plate 9 of third and is slided The 5th dynamic motor 57 is equipped with the second sliding block 40, one end peace of second sliding block 40 far from second pulley 11 in second pulley 11 Equipped with the 7th piston 44, the one end of the 7th piston 44 far from the second sliding block 40 is equipped with the 7th piston shaft 45, the 7th piston shaft 45 Side is equipped with the 7th motor 46, and the 7th side of the piston shaft 45 far from the 7th motor 46 is equipped with the 8th piston 47, the 8th piston 47 Side far from the 7th piston shaft 45 is equipped with the 8th piston shaft 48, and side of the 8th piston shaft 48 far from the 8th piston 47 is equipped with the Nine pistons 49, the 9th side of the piston 49 far from the 8th piston shaft 48 are equipped with third limiting plate 55, and third limiting plate 55 is far from the The side of nine pistons 49 is equipped with the 9th piston shaft 51, and the 9th side of the piston shaft 51 far from third limiting plate 55 is equipped with the tenth piston 52, the tenth side of the piston 52 far from the 9th piston shaft 51 is equipped with cushion pad 54,1 upper end of pedestal by cushion pad mounting base 53 Equipped with the first mounting plate 5,5 upper end of the first mounting plate is equipped with the 4th piston 30, the one end of the 4th piston 30 far from the first mounting plate 5 Equipped with the 4th piston shaft 31, the 4th one end of piston shaft 31 far from the 4th piston 30 is equipped with the 5th piston 33, and the 5th piston 33 is remote One end from the 4th piston shaft 31 is equipped with the 4th mounting plate 34, and the second drive shaft 37 is equipped in the 4th mounting plate 34, and second drives Second wheel disc 38 is installed, the circumferential direction of the second wheel disc 38 is equipped with the second polishing layer 36,34 side of the 4th mounting plate on moving axis 37 The 6th motor 35 equipped with driving the second drive shaft 37 rotation.The rotation of the second wheel disc 38 is driven to realize to monocrystalline by the 6th motor 35 The polishing of silicon chip, the 7th motor 46 drive the 8th piston shaft 48 stretching motion in the 8th piston 47 so that cushion pad 54 squeezes Monocrystalline silicon piece fixes, and then drives first pulley 8 to be slided in the first sliding groove 7 by the 4th motor 56, drives the Three mounting plates 9 are moved in vertical direction, are realized the position that monocrystalline silicon piece to be polished is transmitted to the second wheel disc 38, are realized Polishing to monocrystalline silicon piece, the grinding device can effectively improve the grinding efficiency and quality of monocrystalline silicon piece, and in the mistake of polishing It can effectively avoid damaging monocrystalline silicon piece in journey.
In the present embodiment, it is socketed between third limiting plate 55 and the tenth piston 52 and in the periphery of the 9th piston shaft 51 4th spring 50.By being socketed the 4th bullet between third limiting plate 55 and the tenth piston 52 and in the periphery of the 9th piston shaft 51 Spring 50 is realized when cushion pad 54 touches monocrystalline silicon piece, and the 4th spring 50 effectively can contact monocrystalline by buffer pad 54 Impact force when silicon chip, effective protection monocrystalline silicon piece do not receive damage, improve the efficiency and quality of monocrystalline silicon piece polishing.
In the present embodiment, the second side of the sliding block 40 far from second pulley 11 is equipped with the 6th piston 41, the 6th piston 41 Side far from the second sliding block 40 is equipped with the 6th piston shaft 42, and the 7th piston 44 is mounted on the 6th piston shaft 42 far from the 6th piston 41 side.It is real by the way that the 6th piston 41 and the cooperation of the 6th piston shaft 42 are arranged between the second sliding block 40 and the 7th piston 44 Show when monocrystalline silicon piece is polished by the second wheel disc 38, the second wheel disc 38 is to the impact force of monocrystalline silicon piece vertical direction, the 6th Under piston 41 and the buffering of the 6th piston shaft 42 cooperation, the efficiency and quality when monocrystalline silicon piece polishing are effectively increased.
In the present embodiment, it is socketed between the 6th piston 41 and the 7th piston 44 and in the periphery of the 6th piston shaft 42 Three springs 43.By being socketed third spring between the 6th piston 41 and the 7th piston 44 and in the periphery of the 6th piston shaft 42 43, when monocrystalline silicon piece is polished by the second wheel disc 38, the second wheel disc 38 is to the impact force of monocrystalline silicon piece vertical direction, in third bullet Under the buffering of spring 43, the efficiency and quality when monocrystalline silicon piece polishing are effectively increased.
In the present embodiment, it is socketed between the 4th piston 30 and the 5th piston 33 and in the periphery of the 4th piston shaft 31 Two springs 32.By being socketed second spring between the 4th piston 30 and the 5th piston 33 and in the periphery of the 4th piston shaft 31 32, realize when the second wheel disc 38 touches monocrystalline silicon piece, second spring 32 can effective snubber contact when impact force, have Effect improves the efficiency and quality of the second wheel disc 38 polishing monocrystalline silicon piece.
In the present embodiment, 5 upper end of the first mounting plate is equipped with the first limiting plate 4, and third sliding slot is equipped in the first mounting plate 5 12, third sliding slot 12 is interior to be equipped with third pulley 13, is equipped with the first sliding block 14 on third pulley 13, is equipped on the first sliding block 14 First piston 15 is equipped with first piston axis 16 on first piston 15, the 4th sliding slot 17 is equipped in first piston axis 16, and the 4th slides It is equipped with the 4th pulley 18 in slot 17, second piston 19 is installed on the 4th pulley 18, second piston 19 is far from the 4th pulley 18 Side is equipped with second piston axis 20, and side of the second piston axis 20 far from second piston 19 is equipped with third piston 21, third Side of the piston 21 far from second piston axis 20 is equipped with third piston shaft 24, third piston shaft 24 far from third piston 21 one Side is equipped with the second limiting plate 22, and the second side of the limiting plate 22 far from third piston shaft 21 is equipped with the second motor 25, and second Side of the motor 25 far from the second limiting plate 22 is equipped with the first wheel disc mounting base 26, and the first wheel disc mounting base 26 is driven by first Moving axis 27 is equipped with the first wheel disc 28, and the periphery of the first wheel disc 28 is equipped with the first polishing layer 29, and the lower end of pedestal 1 is equipped with third Motor 58 is equipped with first motor 59 on first piston axis 16.Third pulley 13 is driven by third motor 58 so that first slides Block 14 moves in the horizontal direction, and drives the 4th pulley 18 to be moved in vertical direction by first motor 59, realizes the first round Disk 28 can moved vertically and horizontally, and realizing the first wheel disc 28 can be adjusted according to the position of monocrystalline silicon piece, To improve the efficiency and quality polished monocrystalline silicon piece.
In the present embodiment, it is socketed between third piston 21 and the second limiting plate 22 and in the periphery of third piston shaft 24 First spring 23.By being socketed the first bullet between third piston 21 and the second limiting plate 22 and in the periphery of third piston shaft 24 Spring 23 so that the first wheel disc 28 when touching monocrystalline silicon piece, can effective snubber contact when the impact force that generates, effectively improve The efficiency and quality of polishing.
In the present embodiment, the lower end of pedestal 1 is equipped with idler wheel 3 by rolling wheel support 2.By logical in the lower end of pedestal 1 It crosses rolling wheel support 2 and idler wheel 3 is installed so that grinding device can move freely, and effectively increase the flexibility that equipment uses.
In the present invention, term " multiple " then refers to two or more, unless otherwise restricted clearly.Term " peace The terms such as dress ", " connected ", " connection ", " fixation " shall be understood in a broad sense, for example, " connection " may be a fixed connection, it can also It is to be detachably connected, or be integrally connected;" connected " can be directly connected, can also be indirectly connected through an intermediary.It is right For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention, the description of term " one embodiment ", " some embodiments ", " specific embodiment " etc. means to combine The embodiment or the particular features, structures, materials, or characteristics of example description are contained at least one embodiment of the present invention or show In example.In the present specification, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, The particular features, structures, materials, or characteristics of description can be in any one or more embodiments or example in an appropriate manner In conjunction with.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (8)

1. a kind of grinding device of solar cell crystalline silicon, including pedestal, which is characterized in that the upper end of the pedestal is equipped with Second mounting plate, second mounting plate is interior to be equipped with the first sliding groove, first pulley is equipped in the first sliding groove, described first slides Third mounting plate is installed, the side of second mounting plate is equipped with the 4th motor, is equipped in the third mounting plate on wheel Second sliding slot, the second sliding slot is interior to be equipped with second pulley, and driving second pulley sliding is equipped on that plate of the third 5th motor is equipped with the second sliding block in the second pulley, and the described one end of second sliding block far from second pulley is equipped with Seven pistons, the one end of the 7th piston far from the second sliding block are equipped with the 7th piston shaft, and the side of the 7th piston shaft is equipped with 7th motor, side of the 7th piston shaft far from the 7th motor are equipped with the 8th piston, and the 8th piston is lived far from the 7th The side for filling in axis is equipped with the 8th piston shaft, and side of the 8th piston shaft far from the 8th piston is equipped with the 9th piston, and described the Side of nine pistons far from the 8th piston shaft is equipped with third limiting plate, and the side of the third limiting plate far from the 9th piston is equipped with 9th piston shaft, side of the 9th piston shaft far from third limiting plate are equipped with the tenth piston, and the tenth piston is far from the The side of nine piston shafts is equipped with cushion pad by cushion pad mounting base, and the pedestal upper end is equipped with the first mounting plate, and described the One mounting plate upper end is equipped with the 4th piston, and the one end of the 4th piston far from the first mounting plate is equipped with the 4th piston shaft, described 4th one end of piston shaft far from the 4th piston is equipped with the 5th piston, one end installation of the 5th piston far from the 4th piston shaft There is the 4th mounting plate, the second drive shaft is equipped in the 4th mounting plate, the second wheel disc, institute are installed in second drive shaft The circumferential direction for stating the second wheel disc is equipped with the second polishing layer, and the 4th mounting plate side is equipped with the of the second drive shaft turns of driving Six motors.
2. the grinding device of solar cell crystalline silicon according to claim 1, which is characterized in that the third limiting plate And the tenth be socketed with the 4th spring between piston and in the periphery of the 9th piston shaft.
3. the grinding device of solar cell crystalline silicon according to claim 1, which is characterized in that second sliding block is remote Side from second pulley is equipped with the 6th piston, and side of the 6th piston far from the second sliding block is equipped with the 6th piston shaft, institute It states the 7th piston and is mounted on the 6th side of the piston shaft far from the 6th piston.
4. the grinding device of solar cell crystalline silicon according to claim 3, which is characterized in that the 6th piston and It is socketed with third spring between 7th piston and in the periphery of the 6th piston shaft.
5. the grinding device of solar cell crystalline silicon according to claim 1, which is characterized in that the 4th piston and It is socketed with second spring between 5th piston and in the periphery of the 4th piston shaft.
6. the grinding device of solar cell crystalline silicon according to claim 1, which is characterized in that first mounting plate Upper end is equipped with the first limiting plate, and third sliding slot is equipped in first mounting plate, third pulley, institute are equipped in the third sliding slot It states and the first sliding block is installed on third pulley, first piston is installed on first sliding block, is equipped on the first piston First piston axis, the first piston axis is interior to be equipped with the 4th sliding slot, the 4th pulley is equipped in the 4th sliding slot, the described 4th slides Second piston is installed, side of the second piston far from the 4th pulley is equipped with second piston axis, and described second lives on wheel Plug side of the axis far from second piston is equipped with third piston, and the side of the third piston far from second piston axis is equipped with the Three piston shafts, the side of the third piston shaft far from third piston are equipped with the second limiting plate, and second limiting plate is separate The side of third piston shaft is equipped with the second motor, and the side of second motor far from the second limiting plate is equipped with the first wheel disc Mounting base, the first wheel disc mounting base are equipped with the first wheel disc by the first drive shaft, and the periphery of first wheel disc is equipped with First polishing layer, the lower end of the pedestal is equipped with third motor, first motor is equipped on the first piston axis.
7. the grinding device of solar cell crystalline silicon according to claim 6, which is characterized in that the third piston and It is socketed with the first spring between second limiting plate and in the periphery of third piston shaft.
8. the grinding device of solar cell crystalline silicon according to claim 1, which is characterized in that the lower end of the pedestal Idler wheel is installed by rolling wheel support.
CN201810730464.6A 2018-07-05 2018-07-05 A kind of grinding device of solar cell crystalline silicon Pending CN108705396A (en)

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Application Number Priority Date Filing Date Title
CN201810730464.6A CN108705396A (en) 2018-07-05 2018-07-05 A kind of grinding device of solar cell crystalline silicon

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Application Number Priority Date Filing Date Title
CN201810730464.6A CN108705396A (en) 2018-07-05 2018-07-05 A kind of grinding device of solar cell crystalline silicon

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1312747A (en) * 1998-06-25 2001-09-12 尤诺瓦英国有限公司 Waffer edge polishing method and apparatus
JP2006198757A (en) * 2005-01-17 2006-08-03 M Tec Kk Workpiece edge polishing method and workpiece edge polishing device
CN203351635U (en) * 2013-07-05 2013-12-18 中国电子科技集团公司第四十八研究所 Silicon wafer pre-position device
CN105196166A (en) * 2015-10-08 2015-12-30 江苏宏联环保科技有限公司 Electroplating delivering trolley with polishing pretreatment function
CN105798729A (en) * 2016-06-02 2016-07-27 张清金 Improved columnar stone pier edge grinding device
CN105834849A (en) * 2016-05-20 2016-08-10 郑雪松 Efficient and convenient metal plate polishing device
CN106425766A (en) * 2016-11-28 2017-02-22 南安市威速电子科技有限公司 Grinding and polishing device for resin artware
CN107520703A (en) * 2017-09-26 2017-12-29 江苏苏福玻璃有限公司 A kind of double-sided glass burnishing device
CN107585556A (en) * 2017-08-23 2018-01-16 柳州福能机器人开发有限公司 Anti-oscillating Plastic Drum transportation robot
CN107649984A (en) * 2017-10-24 2018-02-02 唐文剑 A kind of novel furniture processing sanding apparatus
CN107962661A (en) * 2017-11-17 2018-04-27 嘉兴市博宏新型建材有限公司 A kind of thermal insulation material shaping casting sander
CN208744396U (en) * 2018-07-05 2019-04-16 天长市百盛半导体科技有限公司 A kind of grinding device of solar battery crystalline silicon

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1312747A (en) * 1998-06-25 2001-09-12 尤诺瓦英国有限公司 Waffer edge polishing method and apparatus
JP2006198757A (en) * 2005-01-17 2006-08-03 M Tec Kk Workpiece edge polishing method and workpiece edge polishing device
CN203351635U (en) * 2013-07-05 2013-12-18 中国电子科技集团公司第四十八研究所 Silicon wafer pre-position device
CN105196166A (en) * 2015-10-08 2015-12-30 江苏宏联环保科技有限公司 Electroplating delivering trolley with polishing pretreatment function
CN105834849A (en) * 2016-05-20 2016-08-10 郑雪松 Efficient and convenient metal plate polishing device
CN105798729A (en) * 2016-06-02 2016-07-27 张清金 Improved columnar stone pier edge grinding device
CN106425766A (en) * 2016-11-28 2017-02-22 南安市威速电子科技有限公司 Grinding and polishing device for resin artware
CN107585556A (en) * 2017-08-23 2018-01-16 柳州福能机器人开发有限公司 Anti-oscillating Plastic Drum transportation robot
CN107520703A (en) * 2017-09-26 2017-12-29 江苏苏福玻璃有限公司 A kind of double-sided glass burnishing device
CN107649984A (en) * 2017-10-24 2018-02-02 唐文剑 A kind of novel furniture processing sanding apparatus
CN107962661A (en) * 2017-11-17 2018-04-27 嘉兴市博宏新型建材有限公司 A kind of thermal insulation material shaping casting sander
CN208744396U (en) * 2018-07-05 2019-04-16 天长市百盛半导体科技有限公司 A kind of grinding device of solar battery crystalline silicon

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