JP4884816B2 - Immersion processing equipment - Google Patents

Description

  The present invention relates to a work transfer device for a dipping tank in which a processing liquid such as a plating solution is stored to immerse a work.

  Conventionally, the workpiece conveying apparatus which carries in a workpiece | work into the immersion tank from the outside of an immersion tank, is immersed in the processing liquid of an immersion tank, and is carried out from the immersion tank to the exterior of an immersion tank after immersion treatment. There is a workpiece transfer device as shown in FIG. 41 (Patent Document 1). In the apparatus shown in FIG. 41, the roller-type transport mechanism 301 disposed outside the immersion tank 300 and the roller-type transport mechanism 302 disposed in the immersion tank 300 are aligned at the same height so that the workpiece transport of the immersion tank 300 is performed. A work inlet 306 is opened at a rear end wall 305 in the direction F, and a seal roller 310 is disposed at the work inlet 306. The work inlet 306 is formed at a position lower than the processing liquid level L. According to this apparatus, the workpiece W can be conveyed from the outside to the inside of the immersion bath 300 without changing the conveyance height of the workpiece W. Although not shown, the work outlet of the immersion tank 300 has the same structure as the inlet.

As another conventional example 2, there is a work reversal type work transfer device as shown in FIG. 42 (Patent Document 2). The apparatus shown in FIG. 42 includes a roller-type conveyance mechanism 401 arranged outside the immersion tank 400, and a roller-type conveyance arranged in the immersion tank 400 so as to be immersed in the processing liquid at a position lower than the roller-type conveyance mechanism 401. A mechanism 402 is provided, and a rotatable drum-shaped or disk-shaped transfer mechanism 411 having a work holding groove 410 is provided at the front and rear ends of the work conveyance direction F in the immersion tank 400. According to this apparatus, the workpiece W is conveyed to a position above the inlet portion of the immersion tank 400 by the conveyance mechanism 401 outside the immersion tank 400, and the front end portion of the workpiece W is held by the workpiece holding groove 410 of the transfer mechanism 411. The workpiece W is reversed by the rotation of the transfer mechanism 411 and is put on the transport mechanism 402 in the processing liquid. Further, at the workpiece outlet portion, the transfer mechanism 411 is rotated so that the workpiece W is transferred from the transfer mechanism 402 in the immersion tank 400 to the transfer mechanism 401 outside the immersion tank 400 while being reversed.
JP 58-81997 Japanese Patent Publication No. 2-24396

  In the apparatus of Conventional Example 1 shown in FIG. 41, when the plate-like workpiece W such as a circuit board is conveyed, the plate-like workpiece W is sandwiched by the seal roller 310 from above and below with a constant pressure, so that the substrate surface is not contacted. A substrate (for example, a glass display substrate or a wafer substrate) cannot be transported as a workpiece. Further, by sandwiching the upper and lower surfaces of the workpiece W, uneven plating tends to occur. That is, the speed at which the workpiece W is carried into the immersion tank 300 is 20 mm / sec at the fastest, and the work W is completely invaded into the immersion tank after the front end of the work W has entered the immersion tank 300. It is estimated that it takes 20 seconds or more. In addition, a seal mechanism such as a seal roller 310 is required, and maintenance is troublesome.

  In the apparatus of Conventional Example 2 in FIG. 42, since the workpiece W is transferred by being reversed by the rotary transfer mechanism 411, a wide reversing space is required to reverse the plate-like workpiece W such as a substrate. The immersion tank 400 becomes large and difficult to make compact. Further, since the workpiece W such as a substrate is transferred in the opposite direction, a circuit board (for example, a glass display substrate or a wafer substrate) that requires non-contact on the surface is used as the workpiece, as in the conventional example 1. It cannot be transported.

  An object of the present invention is a workpiece transfer device that does not require a sealing device at a workpiece entry / exit portion, and changes the workpiece transfer posture even for a workpiece that requires non-contact on the substrate surface, such as a circuit board. Quickly and without workpiece rubbing, the workpiece can be carried into the immersion bath or taken out of the immersion bath to prevent plating unevenness and provide a compact immersion bath workpiece transfer device. It is to be.

In order to solve the above-mentioned problem, the invention according to claim 1 is an immersion tank work transfer device for storing a treatment liquid and immersing the work, and is disposed in the immersion tank and the work in the treatment liquid. A low-level transport mechanism for transporting, and a high-level transport mechanism that is disposed at a position higher than the low-level transport mechanism on the outside of the immersion tank, extends to a position near the immersion tank or above the immersion tank, and transports a workpiece. A transfer mechanism that can be moved up and down to receive a workpiece from one of the low-level conveyance mechanism and the high-level conveyance mechanism by a substantially horizontal movement, move down and rise, and transfer the work to the other conveyance mechanism by a substantially horizontal movement; , and wherein the transfer mechanism is movable up and down and a plurality of horizontal transfer conveyance roller for conveying and placing the workpiece on the upper surface, a frame for supporting the conveyance roller mounting該移, the frame A pair of left and right cylinders to be supported, and the left and right cylinders have a contraction start timing or an extension start timing so that the transfer transport roller is tilted left and right when the workpiece is lowered or lifted. It is configured differently.

According to the said structure, it is not necessary to provide a sealing mechanism in the workpiece entrance / exit part of an immersion tank, and a maintenance becomes easy. In addition, since the workpiece can be transferred quickly and smoothly without changing the posture of the workpiece, that is, without inverting the workpiece and holding it from above and below, non-contact is required on the substrate surface. It is possible to easily cope with plate-like workpieces such as circuit boards, and the immersion bath itself can be kept compact. In particular, when applied to a plating tank, the occurrence of uneven plating can be prevented.
Further, by configuring the left and right cylinders to start contracting or extending, the conveying rollers are tilted to the left and right, thereby tilting the workpiece. It is possible to prevent the workpiece W from being lifted when the workpiece is immersed, thereby preventing the posture of the workpiece from collapsing. On the other hand, when it is lifted, the plating solution on the surface of the workpiece W can be poured off.

The invention according to claim 2 is a roller-type low-order conveyance device that stores the treatment liquid and immerses the workpiece in the immersion tank and is disposed in the immersion tank and conveys the workpiece in the treatment liquid. A high-level conveyance mechanism that is disposed at a position higher than the low-level conveyance mechanism on the outside of the immersion tank, extends to a position near the immersion tank or above the immersion tank, and conveys a workpiece; and the high-level conveyance A transfer mechanism for transferring a workpiece from the mechanism to the lower transfer mechanism, and the transfer mechanism is located between the transfer rollers of the lower transfer mechanism and can control the jet pressure of the upward liquid jet. comprising a plurality of nozzles to be generated in the each nozzle is elongate formed in the conveying width direction to span substantially the entire width of the conveying roller of the lower transport mechanism, receiving the workpiece from a higher conveying mechanism by the liquid jet Ri is configured to place the workpiece in the lower transport mechanism by lowering the jet pressure of the liquid jet.

  As in the above configuration, by supporting the workpiece with the upward liquid jet and controlling the jet pressure, it is possible to transfer from the high level transfer mechanism to the low level transfer mechanism. In addition, since the solid object does not contact the surface of the work during the work transfer, there is no possibility of damaging the surface of the work.

The invention according to claim 3 is a work transfer device of a dipping tank for storing a treatment liquid and immersing the work, and a low level conveyance mechanism that is arranged in the dipping tank and conveys the work in the treatment liquid; A high-level transport mechanism that is disposed outside the immersion tank at a position higher than the low-level transport mechanism, extends to a position near the immersion tank or a position above the immersion tank, and transports a workpiece,
A transfer mechanism that transfers a workpiece from the high-level transfer mechanism to the low-level transfer mechanism, and the transfer mechanism includes a pair of transfer transfer rollers arranged at a predetermined interval in the transfer width direction. A plurality of transfer roller pairs for transfer are arranged at a predetermined interval in the transfer direction, and transfer transfer of the transfer roller pair on the highest transfer mechanism side among the plurality of transfer roller pairs for transfer is performed. The rollers are arranged in a substantially vertical posture, and each transfer transport roller is set so that the upward opening angle between the transfer transport rollers gradually increases as going to the transfer transport roller pair on the lower transport mechanism side. It is tilted.

  According to the above configuration, the transfer mechanism itself does not need to be raised and lowered, and the drive mechanism for raising and lowering is also unnecessary, so that the structure is simplified and the cost can be reduced. Further, since both side ends of the workpiece are supported by the transfer conveyance roller, there is no possibility of damaging the surface of the workpiece.

The workpiece transfer apparatus according to claim 4, wherein the workpiece transfer apparatus is a dipping tank that stores the processing liquid and immerses the workpiece, and is disposed in the dipping tank and transfers the workpiece in the processing liquid. A high-level transport mechanism that is disposed outside the immersion tank at a position higher than the low-level transport mechanism, extends to a position near the immersion tank or above the immersion tank, and transports a workpiece; and the high-level transport mechanism A transfer mechanism for transferring the workpiece from the low-level transfer mechanism to the low-level transfer mechanism, and the transfer mechanism includes a plurality of transfer transfer rollers, and the transfer surface of the high-level transfer mechanism and the transfer of the low-level transfer mechanism A plurality of transfer surfaces having different heights from each other, and the plurality of transfer surfaces are sequentially lowered to a lower position in a stepwise manner from the high-level transfer mechanism side to the low-level transfer mechanism side. It is arranged so, before Each transfer surface is divided into a plurality of transfer conveyance rollers arranged on the high-level conveyance mechanism side into a plurality of short roller portions, and each roller portion of the transfer conveyance rollers adjacent in the conveyance direction is staggered. And are arranged so as to overlap in the transport direction .

According to the above configuration, the transfer mechanism itself does not need to be raised and lowered, and the drive mechanism for raising and lowering is also unnecessary, so that the structure is simplified and the cost can be reduced. Further, when transferring from the high-level transport mechanism to the transfer surface, the work can be reliably received on the transfer surface, and the work is not sandwiched between the transfer transport rollers.

According to a fifth aspect of the present invention, in the work conveying apparatus for an immersion tank according to any one of the first to fourth aspects, the conveying speed of the high-level conveying mechanism can be changed.

  According to the above configuration, when transferring the workpiece between the high-level conveyance mechanism and the transfer mechanism, the conveyance speed of the high-level conveyance mechanism can be matched with the conveyance speed of the transfer mechanism, thereby quickly accelerating the workpiece, And it can transfer, without deform | transforming on a conveyance surface or rubbing, and the quality of a workpiece | work can be maintained.

According to a sixth aspect of the present invention, in the work conveyance device for an immersion tank according to any one of the first , third, fourth, and fifth aspects, the conveyance speed of the transfer mechanism can be changed.

  According to the above configuration, when a workpiece is transferred between the high-level transfer mechanism and the transfer mechanism, the transfer speed of the transfer mechanism is adjusted to the transfer speed of the high-level transfer mechanism, and the workpiece is transferred between the low-level transfer mechanism and the transfer mechanism. When transferring, the transfer speed of the transfer mechanism can be adjusted to the transfer speed of the lower transfer mechanism, so that the workpiece can be transferred quickly and without being deformed or rubbed on the transfer surface. The quality of the workpiece can be maintained.

A seventh aspect of the present invention is the immersion tank work transfer device according to any one of the first , third, fourth, and fifth aspects, wherein the low level transfer mechanism, the high level transfer mechanism, and the transfer mechanism include a plurality of transfers. It consists of a roller and is configured to carry the work by placing it on the carrying surface.

  As in the above configuration, when the transport mechanism is equipped with a transport mechanism and a transfer mechanism that transports the work placed on the transport rollers, bending stress applied to the work when a thin plate-shaped work is transported, etc. Can be reduced. For example, even a thin substrate having a thickness of 1 mm or less can be transferred in a stable plane state without applying an excessive bending stress to the substrate itself, thereby maintaining the quality of the workpiece.

[First Embodiment]
FIGS. 1-16 shows an example of the immersion processing apparatus provided with the workpiece conveyance apparatus concerning this invention, and is the example applied to the plating processing apparatus.

(Outline of overall plating equipment)
FIG. 1 is a schematic side view of the entire plating apparatus, and the plating line is divided into two upper and lower stages due to space limitations on the paper surface, but the actual apparatus starts from the conveyance start end (upper left end) Ps. It is aligned on one line along the conveyance direction F until it reaches the conveyance end (lower right end) Pe. For convenience of explanation, the transport direction F side (the transport end Pe) side is referred to as “front side”, and the opposite side of the transport direction F (the transport start end Ps side) is referred to as “rear side” with reference to the transport direction F. The horizontal direction (conveying width direction) orthogonal to the conveying direction F will be described below as the left-right direction.

  On the plating processing line, a degreasing dipping bath 4 is disposed between the loading device 1 arranged at the conveyance start end Ps and the unloading device 2 arranged at the conveyance end Pe as a dipping tank in order from the conveyance start end Ps side. An immersion tank 5 for electroless Cu plating, an immersion tank 6 for electroless Co plating, and an immersion tank 7 for electroless Ni-B plating are arranged.

  Between the degreasing immersion tank 4 and the electroless Cu plating immersion tank 5, there are a warm water washing tank 11, a water washing tank 12, an acid activation tank 13, a water washing tank 14, a warm water washing tank 15, and a fast-forward relay tank 16 from the front. Between the immersion bath 5 for electroless Cu plating and the immersion bath 6 for electroless Co plating, a fast-feed water washing tank 21, a water washing tank 22, and a warm water washing tank 23 are arranged in order from the front, and the electroless Co plating is performed. Between the immersion tank 6 and the electroless Ni-B plating immersion tank 7, a water washing tank 25 and a warm water washing tank 26 are arranged in order from the front, and the electroless Ni-B plating immersion tank 7 and the unloading device 2 are arranged. Between them, a water washing tank 28, a hot water washing tank 29 and a hot air drying tank 30 are arranged.

  In each of the immersion tanks 4, 5, 6, and 7, roller-type low-level transport mechanisms 34, 35, 36, and 37 are arranged at positions lower than the liquid surface of the stored plating solution (processing solution), respectively. Each washing tank 12, 14, 22, 25, 28, each warm water washing tank 11, 15, 23, 26, 29, fast-forward washing tank 21, fast-forward relay tank 16, and hot air drying tank 30, the low-level transport mechanism 34, 35, 36, and 37, roller-type high-level transport mechanisms 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, and 64 are disposed, respectively. At the front and rear ends of each of the immersion tanks 4, 5, 6, and 7, a roller-type transfer that moves up and down between approximately the same raised position as the high-order transport mechanism 51 and the like and approximately the same lower position as the low-order transport mechanism 34 and the like. Loading mechanism 70, 71, 72, 73, 74, 75, 76, 77, It is freely arranged later.

  The conveying speed of the loading device 1 is set to 150 mm / sec. The conveyance speed of the low-order conveyance mechanism 34 in the degreasing immersion tank 4 behind it is set to 9 mm / sec. The transport speed of each of the high-level transport mechanisms 51, 52, 53, 54, and 55 in the hot water washing tank 11, the water washing tank 12, the acid activating tank 13, the water washing tank 14 and the hot water washing tank 15 behind that is set to 9 mm / sec. ing. The transport speed of the high-order transport mechanism 56 of the fast-forward relay tank 16 behind it is set to be switchable between 9 mm / sec and 150 mm / sec. The conveyance speed of the low-order conveyance mechanism 35 of the immersion tank 5 for electroless Cu plating behind it is set to 10 mm / sec. The conveyance speed of the high-level conveyance mechanism 57 in the fast-feed water washing tank 21 behind is set so as to be switchable between 150 mm / sec and 9 mm / sec. The conveyance speeds of the high-level conveyance mechanisms 58 and 59 in the water washing tank 22 and the warm water washing tank 23 behind the tank are set to 9 mm / sec. The conveyance speed of the low-order conveyance mechanism 36 in the immersion tank 6 for electroless Co plating behind it is set to 15 mm / sec. The conveyance speed of the high-level conveyance mechanisms 60 and 61 in the water washing tank 25 and the warm water washing tank 26 behind it is set to 9 mm / sec. The conveyance speed of the low-order conveyance mechanism 37 in the immersion tank 7 for electroless Ni-B plating behind it is set to 6.5 mm / sec. The conveyance speeds of the high-level conveyance mechanisms 62 and 63 in the water washing tank 28 and the warm water washing tank 29 behind it are set to 9 mm / sec.

  That is, the low-level transport mechanisms 34, 35, 36, and 37 disposed in the immersion tanks 4, 5, 6, and 7 are constant speed types of 9 mm / sec or 150 mm / sec. The passage time (immersion time) in 6 and 7 is 300 seconds in the degreasing immersion tank 4, 400 seconds in the electroless Cu plating immersion tank 5, 120 seconds in the electroless Co plating immersion tank 6, and no. The inside of the immersion bath 7 for electrolytic Ni-B plating is 270 seconds.

  Moreover, each conveyance mechanism 51, 52, 53, 54, 55 of each water washing tank 12, 14, 22, 25, 28, warm water washing tank 11, 15, 23, 26, 29, the acid activation tank 13, and the hot air drying tank 30 , 58, 59, 60, 61, 62, 63, 64 are also of a constant speed type, and the passing time in each tank is a water washing tank between the degreasing immersion tank 4 and the electroless Cu plating immersion tank 5. 22, 25, 28, and warm water washing tanks 23, 26, 29 are each 2 seconds. In addition, the conveyance time (passing time) in the fast-forwarding relay tank 16 and the fast-forward washing tank 21 is 6 seconds, respectively.

  The roller-type transfer mechanism 71 disposed at the front end outlet of the degreasing immersion tank 4 is also of a constant speed, but the other transfer mechanisms 70, 72, 73, 74, 75, 76, 77 Similarly to the high level transport mechanisms 56 and 57 of the relay tank 16 and the fast-forward water washing tank 21, the transport speed can be switched. Specifically, the transfer mechanisms 70, 72, 73, 74, 75, 76, 77 are switchable so that they can be synchronized with the transport speeds of the front and rear transport mechanisms.

  That is, the transfer mechanism 70 at the rear end inlet of the degreasing bath 4 can be switched between 150 mm / sec and 9 mm / sec, and the rear end inlet of the electroless Cu plating bath 5 is transferred. The mechanism 72 can be switched between 150 mm / sec and 10 mm / sec, and the transfer mechanism 73 at the front end outlet of the electroless Cu plating immersion bath 5 can be switched between 10 mm / sec and 15 mm / sec. The transfer mechanism 74 at the rear end inlet portion of the electroless Co plating immersion bath 6 can be switched between 9 mm / sec and 15 mm / sec, and the front end outlet portion of the electroless Co plating immersion bath 6. The transfer mechanism 75 can be switched between 15 mm / sec and 9 mm / sec, and the transfer mechanism 76 at the rear end inlet of the immersion bath 7 for electroless Ni—B plating is 9 mm / sec and 6.5 mm. The transfer mechanism 77 at the rear end exit of the immersion bath 7 for electroless Ni—B plating is 6.5 mm / s. Switching between ec and 9mm / sec is possible.

  Each flush tank 12, 14, 22, 25, 28, warm flush tank 11, 15, 23, 26, 29 and fast-feed flush tank 21 are positioned higher than the transport surface of the high-level transport mechanism 51 and the like in each tank. A shower nozzle 80 is provided, and the front end of the hot water washing tank 23 on the rear side of the electroless Co plating immersion tank 6 and the front end of the hot water washing tank 26 on the rear side of the electroless Ni-B plating immersion tank 7 are provided. Each part is provided with an air knife 81 for blowing off the processing liquid adhering to the surface of the work by wind pressure. Note that the air knife 81 is disposed at an upper position and a lower position on the workpiece transfer surface. The processing liquid sprayed from above the workpiece by the shower nozzle 80 or the like accumulates at the bottom of each tank through the gap between the conveyance rollers of the high-level conveyance mechanism 51 and is circulated again to the shower nozzle 80 by a pump.

(Basic structure of immersion tank)
4 is an enlarged cross-sectional view taken along the line IV-IV in FIG. 1, and is a vertical cross-sectional view of the immersion bath 5 for electroless Cu plating. In FIG. 4, the box-shaped immersion tank 5 is supported above the bottom wall portion of the outer tank 102 provided in the apparatus main body 101 via a plurality of support columns 103. The lower transfer mechanism 35 composed of a plurality of horizontal transfer rollers 105 is accommodated, and the rotation shaft 105a of each transfer roller 105 extends to the outside of the partition wall 110 formed outside the left side wall 107 of the dipping tank 5, and the gears. 111 and a chain 112 are linked to a constant speed motor 113. A plate-like workpiece W such as a circuit board is placed in a horizontal posture on the conveyance surface of the conveyance roller 105 and is conveyed horizontally in the plating solution.

  A reinforcing member 116 is provided on the bottom plate 115 of the immersion tank 5. The bottom wall portion of the outer tank 102 is inclined so that the right side opposite to the arrangement side of the gear 111 and the like is lowered, and the first side for storing the plating solution overflowed from the immersion tank 5 is stored on the right side. A liquid receiver 121 is provided. A filter 122 and a liquid discharge pump 123 are connected to the first liquid receiving portion 121, and the liquid discharge pump 123 discharges the liquid into the preliminary tank 124. The preliminary tank 124 returns the plating solution into the immersion tank 5 through the filter 125a, the liquid circulation pump 125, and the liquid discharge pipe 126.

  FIG. 6 is an enlarged vertical side view of the rear end inlet portion of the immersion bath 5 for electroless Cu plating as viewed from the left side (an enlarged VI-VI cross section in FIG. 3). It opens into the immersion tank 5 at a position higher than the transport surface of the mechanism 35, and the plating solution is discharged into the immersion tank 5 from the liquid discharge pipe 126 as described above. The conveyance roller 105 of the low-level conveyance mechanism 35 is supported by the lower end portion of the vertically long bearing member 128, and the bearing member 128 is inserted into the elongated hole 130 formed in the side wall 107 of the dipping tank 5 from above. Plugged in.

  FIG. 7 is a perspective view of the bearing member 128. Grooves 131 for fitting into the long holes 130 of the side wall 107 of the immersion bath 5 are formed on the front and rear surfaces and the lower end surface of the bearing member 128. A bearing hole 132 for supporting the rotating shaft 105a of the transport roller 105 is formed at the lower end.

  2 is an enlarged cross-sectional view taken along the line II-II of FIG. 1, and the work wall W can be passed through the end wall 5a of the rear end entrance portion of the electroless Cu plating immersion bath 5 with a work that allows the work W to pass in a horizontal mounting posture. 133 is formed.

(Configuration of transfer mechanism)
3 is an enlarged cross-sectional view taken along the line III-III of FIG. 1. In FIG. 3, a roller-type transfer mechanism 72 disposed at the rear end inlet of the electroless Cu plating immersion bath 5 A plurality of horizontal transport rollers 140 mounted on the upper surface and transported, a frame 142 that supports the transport roller 140, a pair of left and right cylinders 143 and 144 that support the frame 142 so as to be movable up and down, and the transport roller 140 In order to drive the motor, a gear train including a gear 145 and the like fixed to the rotation shaft 140a of each transport roller 140 and a transmission motor 146 are included. The right end of the frame 142 protrudes outside the apparatus main body 101 through a through hole 148 formed in the right side wall of the apparatus main body 101, and is supported by the right cylinder 144 fixed to the right side wall of the apparatus main body 101. The left end of the device passes through a through-hole 149 formed in the partition wall 110 in the apparatus body 101, protrudes into the space between the left side wall of the apparatus body 101 and the partition wall 110, and is supported by the left cylinder 143 fixed to the partition wall 110. Has been. The gear train of the gear 145 is disposed in a space part between the left side wall 107 and the partition wall 110 of the immersion tank 5, and below the space part than the bottom wall part of the outer tank 102. A second liquid receiving portion 151 protruding downward is formed. A liquid discharge pump 153 is connected to the bottom wall of the second liquid receiving portion 151 via a filter 152, and the liquid discharge pump 153 discharges the liquid to the preliminary tank 124. As shown in FIGS. 8 and 13, the gears 145 are in mesh with each other via intermediate gears 155, and are configured to rotate in the same direction, and a gear train of the gears 145 and the intermediate gears 155. Also serves as a liquid splash prevention wall that prevents the overflowed processing liquid from splashing from the opening of the outer tank 102.

  In FIG. 6, a plurality of long holes 160 that are long in the vertical direction are also formed at predetermined intervals in the front-rear direction on the side wall 107 of the immersion tank 5 in which the transfer mechanism 72 is disposed. The rotation shaft 140a of each conveyance roller 140 of the transfer mechanism 72 is inserted so as to be movable in the vertical direction. A free roller 161 is rotatably supported at the rear end of the apparatus main body 101.

  FIG. 16 is a side view showing the transfer mechanism 72 at the time of ascent, and a workpiece W conveyed forward on the conveyance roller 140 of the transfer mechanism 72 is predetermined at the front position of the transfer mechanism 72 at the time of ascent. A stopper 162 that is stopped at the forward movement position is provided.

  8 is a plan view (a plan view of FIG. 6) of the transfer mechanism 72 arranged at the rear end inlet of the electroless Cu plating immersion bath 5 of FIG. 1, and the frame 142 is formed in a rectangular shape that is long to the left and right. In addition, a pair of left and right roller support pieces 165 extending in the front-rear direction are fixed to the lower side, and the left and right end portions of the rotation shaft 140a of the transport roller 140 are rotatably supported by the roller support pieces 165. The material of each conveying roller 140 is a resin such as polypropylene, PEEK (polyetheretherketone) or PPS (polyphenylene sulfide), and the materials of the gears 145 and 155 are the same. The material of the frame 142 is polypropylene, a resin such as PEEK or PPS, or a corrosion-resistant metal such as stainless steel.

  FIG. 11 is a schematic side view showing a connection structure between the frame 142 of the transfer mechanism 72 and the left and right cylinders 143 (144). A pair of front and rear support brackets 168 are formed on the lower surfaces of the left and right ends of the frame 142. A support bar 169 extending in the front-rear direction is installed between the support brackets 168, and front and rear end portions of a bifurcated connecting member 170 connected to the rod portion of the cylinder 143 (144). Are pivotally connected.

  12 is an enlarged view of the connecting member 170 of the left cylinder 143 in FIG. 12, and FIG. 14 is an enlarged view of the connecting member 170 of the right cylinder 144 in FIG. In FIG. 13, a circular fitting 170a hole corresponding to the support bar 169 is formed at the upper end pivoting portion of the connecting member 170 of the left cylinder 143. As shown in FIG. A long hole 170b that is long in the left-right direction is formed in the upper end pivoting portion of the connecting member 170, and a support bar 169 is fitted in the long hole 170b so as to be relatively movable in the left-right direction. The reason why the connecting member 170 of the right cylinder 144 is fitted to the support bar 169 through the long hole 170b is that the transport roller 140 is tilted left and right when the transfer mechanism 72 is raised and lowered, as will be described later. It is for raising and lowering in the state.

  FIG. 15 is an enlarged view of the conveying roller 140 of the transfer mechanism 72, and a collar portion 140 b is formed at the left and right end portions to restrict the movement of the workpiece W in the left and right direction.

(Operation)
9A to 9E show, as an example of the transfer operation, the electroless Cu plating immersion tank 5 shown in FIG. The operation | movement in the case of transferring a workpiece | work by the transfer mechanism 72 to the low level conveyance mechanism 35 in the immersion tank 5 for Cu plating is shown in steps.

(1) In FIG. 9A, the workpiece W is placed on the transfer surface of the high-level transfer mechanism 56, and is moved forward (in the transfer F direction) at a high transfer speed (150 mm / sec) by the rotation of the transfer roller 105. On the other hand, the transfer mechanism 72 disposed at the rear end portion of the dipping bath 5 stands by in a state where it is raised to a rising position that is substantially the same height as the high level transfer mechanism 56 and the high level transfer mechanism. The transport roller 140 is driven at the same transport speed (150 mm / sec) as the transport speed of 56.

(2) In FIG. 9B in the next stage, the workpiece W is not displaced in the vertical direction from the transfer surface of the high-level transfer mechanism 56, but on the transfer surface of the transfer mechanism 72 by a substantially horizontal movement. Transfer is performed at the high transfer speed. At this time, since the transfer speed of the transfer mechanism 72 and the transfer speed of the high-order transfer mechanism 56 are the same, the workpiece W is smoothly transferred from the high-order transfer mechanism 56 without rubbing against any of the transfer rollers 105 and 140. It is transferred to the mechanism 72. When the workpiece W advances to a predetermined position on the transfer mechanism 72, the workpiece W is locked by the stopper 162, and the conveyance roller 140 of the transfer mechanism 72 stops rotating.

(3) In FIG. 9C of the next stage, the transfer mechanism 72 is lowered to the lowered position that is substantially the same height as the low level transport mechanism 35 in the immersion tank 5, and this time, the low level transport mechanism 35 The transport roller 140 is driven at the same transport speed as the transport speed (10 mm / sec), and the work W is sent horizontally onto the transport surface of the low-order transport mechanism 35. At this time, the transport speed of the transport roller 140 of the transfer mechanism 72 is switched to the same speed (10 mm / sec) as the transport speed of the low-order transport mechanism 35, and the workpiece W rubs against the transport rollers 105 and 140. Instead, it is smoothly transferred from the transfer surface of the transfer mechanism 72 to the transfer surface of the low-order transfer mechanism 35. When the workpiece W is completely transferred onto the transfer surface of the lower transfer mechanism 35, the transfer roller 140 of the transfer mechanism 72 stops rotating.

(4) In FIG. 9D of the next stage, after the workpiece W has been completely transferred to the lower transfer mechanism 35, the rotation of the transfer roller 140 of the transfer mechanism 72 stops, and the next stage As shown in FIG. 9E, the transfer mechanism 72 moves up to the ascending position, and the transport roller 140 of the transfer mechanism 72 is driven at the same transport speed as that of the high-order transport mechanism 56 to receive the next workpiece W. .

  The lifting / lowering operation of the transfer mechanism 72 and the control of driving and stopping of the transport rollers 140 and 105 are controlled by various sensors (not shown) arranged in the transfer mechanism 72, the high level transport mechanism 56 and the low level transport mechanism 35. Is done through.

  Examples of the various sensors include a sensor that detects that the workpiece W has been supplied onto the conveyance surface of the high-level conveyance mechanism 56, and a state in which the workpiece W has advanced to a predetermined position on the conveyance surface of the transfer mechanism 72 (stopper). 162, a sensor that detects a state in which the transfer mechanism 72 is moved up to a raised position (or a state in which the cylinder 143 and the like is extended), and a transfer mechanism 72 that is lowered to a lowered position. A sensor for detecting a state (or a state in which the cylinder 143 or the like is contracted), a sensor for detecting that the workpiece W is completely discharged from the transfer mechanism 72, and the like can be provided.

  That is, when the sensor detects that the tip of the workpiece W is placed on the high-level transfer mechanism 56 of the fast-forward relay tank 16, the transfer roller 105 of the high-level transfer mechanism 56 of the fast-forward relay tank 16 and the transfer roller of the transfer mechanism 72. 140 are driven at the same conveyance speed (150 mm / sec), and thereby the workpiece W is transferred from the conveyance surface of the high-level conveyance mechanism 56 onto the conveyance surface of the transfer mechanism 72 at the above conveyance speed (FIG. 9). (A)).

  Next, when the sensor detects that the workpiece W has advanced to a predetermined position on the transfer surface of the transfer mechanism 72, the transfer roller 140 of the transfer mechanism 72 stops and the cylinders 143 and 144 (FIG. 10) contract. Thus, the conveying roller 140 is lowered to the lowered position ((b) and (c) in FIG. 9).

  Next, when the sensors detect that the cylinders 143 and 144 are contracted and the transport roller 140 is lowered to the lowered position, the transport roller 140 of the transfer mechanism 72 has the same speed as the transport roller 105 of the low-order transport mechanism 35 ( 10 mm / sec) and the workpiece W is transferred onto the conveyance surface of the low-level conveyance mechanism 35 ((c) and (d) in FIG. 9).

  When the sensor detects that the workpiece W has been completely unloaded from the transfer mechanism 72, the transport roller 140 of the transfer mechanism 72 stops and the transport roller 140 is raised to the raised position (see FIG. 9). (D) (e)).

  FIGS. 10A, 10B, and 10C are diagrams showing the operation when the transfer mechanism 72 is moved up and down. When the transfer mechanism is lowered, the contraction start timing of the left and right cylinders 143 and 144 is shown. By shifting the (elongation start timing at the time of ascent), for example, the conveying roller 140 is inclined downwardly as shown in FIG. 10B, and thereby the workpiece W is inclined. Thereby, it can prevent that the workpiece | work W floats up when immersed in a plating solution.

  In addition, the operation | movement at the time of transferring the workpiece | work W to the high level conveyance mechanism 57 of the rapid feed water washing tank 21 of the front side in the front-end exit part of the immersion tank 5 for electroless Cu plating of FIG. The operation is basically the same as the operation at the rear end inlet portion, except that the order is reversed.

  Moreover, the transfer operation | work of the workpiece | work W in each front-end exit part and rear-end inlet part of the other immersion tanks 4, 6, and 7 of FIG. 1 is the same as that of the said immersion tank 5 for electroless Cu plating.

(Effect of embodiment)
(1) As described with reference to FIGS. 9A to 9E, the workpiece W sent in a horizontal posture is turned from one conveying mechanism 56 to the other without being reversed or sandwiched from above and below. Since the transfer mechanism 35 is transferred to the transfer mechanism 35 quickly and smoothly by a substantially horizontal movement, it can easily cope with a work such as a circuit board that requires non-contact on the substrate surface, and the immersion tank itself can be made compact. Can be maintained. In particular, when applied to a plating tank, the occurrence of uneven plating can be prevented.

(2) As described with reference to FIGS. 9A to 9E, when transferring a workpiece between the high-level transfer mechanism 56 and the transfer mechanism 72, the transfer speed of the transfer mechanism 72 is set to the high-level transfer mechanism. When the work W is transferred between the lower transfer mechanism 35 and the transfer mechanism 72 in accordance with the transfer speed of 56, the transfer speed of the transfer mechanism 72 is adjusted to the transfer speed of the lower transfer mechanism 35. It can be transferred quickly and without deformation or rubbing on the transport surface.

(3) As described in FIGS. 10A, 10B, and 10C, when the transfer mechanism 72 is lowered (or raised), the contraction start timing (rise) of the left and right cylinders 143 and 144 is increased. By shifting the sometimes expansion start timing), as shown in FIG. 10B, the conveyance roller 140 is tilted to the left and right, thereby tilting the workpiece W, thereby providing the following advantages. .

  That is, when the workpiece W is dipped in the plating solution, the workpiece W can be prevented from being lifted, thereby preventing the posture of the workpiece from collapsing. On the other hand, when the workpiece W is raised, the plating solution on the surface of the workpiece W is poured off. be able to.

(4) Since the transfer speed by the transfer roller 140 of the transfer mechanism 72 can be changed, a function as a speed conversion means is provided, so that the predetermined length of the immersion tank 5 in the transfer direction is reduced, while the predetermined process is performed. The conveyance speed in the immersion tank 5 can be slowed so that time can be maintained. Thus, by slowing the conveying speed in the dipping tank 5, the operation cycle of the transfer mechanism 72 (work acceptance → lift → work discharge → fall or work acceptance → fall → work discharge → rise) becomes long. Thus, by adjusting the time until the next workpiece W comes by the transfer mechanism 72, it is possible to cope with various transport speeds.

[Second Embodiment]
17 to 20 show a second embodiment of the present invention. FIG. 17 is a plan view of the transfer mechanism 72, FIG. 18 is a side view of the transfer mechanism 72, and FIG. FIG. 20 is a side view showing the lifting / lowering operation of the transfer mechanism 72. In FIG. 17, the transport roller 140 of the transfer mechanism 72 is configured as a free roller. As shown in FIG. 20, the transport roller 140 of the transfer mechanism 72 is moved to the lower transport mechanism 35 when the transfer mechanism 72 is lowered. It passes through between the conveying rollers 105 and stops at a lower position by a predetermined amount h1. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals.

  In FIG. 20, when the transfer mechanism 72 is lowered, the transfer rollers 140 of the transfer mechanism 72 pass downward between the transfer rollers 105 of the lower transfer mechanism 35 in the immersion tank 5 as described above. As a result, the workpiece W on the transfer mechanism 72 is automatically transferred onto the transfer surface of the lower transfer mechanism 25. After being transferred in this manner, the workpiece W is conveyed forward from the state of the solid line in FIG. 20 by driving the conveyance roller 105 of the low-level conveyance mechanism 35.

  On the other hand, as indicated by the phantom line, when the transfer mechanism 72 is lifted, the workpiece W is transferred from the high level transfer mechanism 56 onto the transfer surface of the transfer mechanism 72 only by driving the high level transfer mechanism 56 behind.

  According to this embodiment, the speed change motor for driving the transport roller 140 of the transfer mechanism 72 is not necessary, and the component cost can be reduced.

  However, this embodiment can be applied only to the transfer mechanism disposed at the rear end inlet portion of the immersion tank 5 or the like, and cannot be applied to the transfer mechanism disposed at the front end outlet portion.

[Third Embodiment]
21 and 22 show a third embodiment of the present invention. FIG. 21 is a plan view of the transfer mechanism 72. FIG. 22 is a sectional view taken along the line XXII-XXII of FIG. As the conveying roller 200, a roller having a vertical rotation shaft 200a and a V-shaped groove 200b in the outer periphery is used. The transport rollers 200 are arranged in two rows facing each other at a predetermined interval in the left-right direction, and the left and right ends of the workpiece W in a horizontal posture are held by the V-shaped grooves 200b of the transport rollers 200. It is configured to convey by rotation

  Gears 201 are provided at the upper ends of the rotation shafts 200a of the conveying rollers 200, and the gears 201 are engaged with each other via the intermediate transmission gear 202 so as to rotate in the same direction. It is linked to.

  According to the embodiment, both surfaces of the plate-like workpiece W such as a circuit board can be transferred in a non-contact state.

[Fourth Embodiment]
26 to 28 show a fourth embodiment of the present invention, which includes a liquid jet transfer mechanism 72. FIG. 26 is a longitudinal sectional view of the transfer mechanism 72, and FIG. FIG. 28 is a sectional view taken along the line XXVIII-XXVIII in FIG. 26, and the same components as those in the first embodiment are denoted by the same reference numerals.

  In FIG. 26, as the transfer mechanism 72, a plurality of upward nozzles 205 are arranged at intervals in the front-rear direction (conveyance direction) at the rear end portion (conveyance start end portion) of the low-order conveyance mechanism 35. While being connected to the hydraulic pump 207 via the liquid pipe 206, it is positioned between the transport rollers 105 of the low-level transport mechanism 35, and is configured to eject a liquid jet upward from between the transport rollers 105. The pump 207 can control the discharge hydraulic pressure, and the suction port is connected to the liquid tank or the immersion tank 5 (not shown).

  27 and 28, each nozzle 205 is formed to be elongated in the left-right direction (conveyance width direction) so as to extend over substantially the entire width of the conveyance roller 105 of the low-level conveyance mechanism 35, and the nozzle 205 a is also substantially the same as the low-level conveyance mechanism 35. It is formed in a slit shape so as to extend over the entire width, so that the liquid jet can be ejected in a range extending over substantially the entire width of the left and right width of the low-order transport mechanism 35.

(Operation)
(1) In FIG. 26, when the plate-like workpiece W is conveyed forward on the high-level conveyance mechanism 56 and reaches the front end portion of the high-level conveyance mechanism 56 or a position in the vicinity thereof, each hydraulic pump 207 is driven to A liquid jet is ejected upward from the upper end nozzle hole 205 a of the nozzle 205.

(2) When the workpiece W is transported further forward from the front end portion of the high level transport mechanism 56 and reaches a position above the rear end portion of the immersion tank 5, the work W is moved to the high level transport mechanism by the liquid jet from the nozzle 205. It is supported at substantially the same height as the 56 conveying surfaces.

(3) Next, by controlling the discharge pressure of the pump 207, the liquid jet from the nozzle 205 is stopped or the jet pressure is lowered, thereby lowering the work W by its own weight and immersing it in the immersion tank 5, It is placed on the low-level transport mechanism 35 that is always driven at a constant speed.

(4) Thereafter, the workpiece W is transported through the immersion tank 35 by the low-order transport mechanism 35.

  As described above, when the workpiece W is supported by the upward liquid jet and the jet pressure is controlled so that the workpiece W is transferred from the high-level conveyance mechanism 56 to the low-level conveyance mechanism 35, the arrangement space of the transfer mechanism 72 is reduced. Since it becomes compact and supports the workpiece W with the liquid jet, there is no possibility of damaging the surface of the workpiece W during transfer.

[Fifth Embodiment]
29 to 31 show a fifth embodiment of the present invention, which includes a transfer mechanism 72 in which a plurality of transfer conveyance roller pairs 211 are erected, and FIG. FIG. 30 is an enlarged sectional view taken along the line XXX-XXX of FIG. 29, FIG. 31 is a conceptual diagram showing the displacement of the supporting portion of the transfer roller pair for transfer (equivalent to enlarged sectional view taken along the line XXX-XXX in FIG. 29), The same parts as those in the first embodiment are denoted by the same reference numerals.

  In FIG. 29, a plurality of transfer transport rollers are provided at the rear end of the dipping bath 5 as a transfer mechanism 72 between the high-level transfer mechanism 56 and the low-level transfer mechanism 35 at substantially equal intervals in the front-rear direction. Pairs 211, 212, 213, 214 are arranged.

  In FIG. 30, each pair of transfer transport rollers 211, 212, 213, 214 includes a pair of transfer transport rollers 211a, 211b, 212a, 212b, 213a, which are arranged at predetermined intervals in the left-right direction. 213b, 214a, 214b. The transfer rollers 211a, 211b,... 214a, 214b for transfer are rotatably supported by a frame 215 provided on the side wall of the apparatus main body 101 and the bottom wall of the immersion tank 5, and can be elastically compressed on the surface. In addition to having a rubber layer, a driving motor 220 is connected to each of the upper end portions, and each driving motor 220 rotates in the directions of arrows Ya and Yb, respectively.

  In FIG. 31, the transfer rollers 211a and 211b arranged at the rearmost end are in a substantially vertical posture, and the left-right distance L1 is, for example, substantially the same as the left-right width of the workpiece W or a narrow crown. In addition, the left and right ends of the workpiece W can be clamped by the rubber layer on the surface. Therefore, the workpiece W conveyed from the high-level conveyance mechanism 56 is first moved at a workpiece clamping point P1 having a height H1 substantially the same as the conveyance surface of the high-level conveyance mechanism 56 by the transfer rollers 211a and 211b at the rearmost end. The both ends are clamped.

  The transfer rollers 212a, 212b, 213a, 213b, 214a, and 214b other than the transfer rollers 211a and 211b at the rearmost end have their upward opening angles θ2, θ3, and θ4 sequentially as they go forward. Inclined to fall outward so as to increase. Accordingly, the workpiece clamping points (points corresponding to the interval L1) P2, P3, and P4 by the transfer rollers 212a, 212b, 213a, 213b, 214a, and 214b are sequentially moved toward the low-level conveyance mechanism 35 side (front side). Displaced downward (H1 → H2 → H3 → H4), the workpiece holding point P4 of the transfer rollers 214a and 214b on the side of the lowest level conveyance mechanism 35 (front end side) is relative to the conveyance surface of the low level conveyance mechanism 35. , Has become a weak position high.

(Operation)
(1) In FIG. 31, transfer conveyance rollers 211 a, 211 b,... 214 a, 214 b are always rotating in the directions of arrows Ya and Yb, and are plate-shaped workpieces W conveyed forward by the high-level conveyance mechanism 56. First, the transfer rollers 211a and 211b at the rearmost end are nipped by the nipping point P1 at the height H1 and further conveyed forward.

(2) The front end of the plate-like work W is lowered by its own weight from the rearmost transfer rollers 211a and 211b to the next transfer rollers 212a and 212b in the front, It is clamped at a height H2 by the clamping point P2 of the transfer rollers 212a and 212b.

(3) In the same manner as described above, the holding height is changed from H2 → from the transfer rollers 212a and 212b to the next transfer rollers 213a and 213b and then to the transfer rollers 214a and 214b at the foremost end. The material is delivered while being sequentially lowered from H3 to H4, and is immersed in the plating solution during that time.

(4) Then, it is transferred from the transfer rollers 214a and 214b at the foremost end to the low-order transport mechanism 35 and transported at a constant speed.

  According to this embodiment, the transfer rollers 211a, 211b and the like for transfer do not move due to elevating or the like, so the arrangement space of the transfer mechanism 72 becomes compact. Further, since the front and back surfaces of the workpiece W are not supported, there is no possibility of damaging the front and back surfaces of the workpiece W.

[Sixth Embodiment]
FIGS. 32 to 34 show a sixth embodiment of the present invention, which includes a transfer mechanism 72 in which a plurality of transfer surfaces 223 and 224 having different heights are arranged stepwise, and FIG. 33 is a longitudinal sectional view showing the transfer mechanism 72, FIG. 33 is a longitudinal sectional view showing the drive mechanism of the transfer transport roller, and FIG. 34 is a plan view. The same components as those in the first embodiment are denoted by the same reference numerals. is doing.

  In FIG. 32, the transfer mechanism 72 includes a plurality of transfer transport rollers 220 and 221, and includes a first transfer surface 223 in the rear half (the portion on the high-order transport mechanism 56 side), and a first transfer surface 223. A second transfer surface 224 in a front half portion (a portion on the low-order transport mechanism 35 side) disposed lower than the transfer surface 223 is provided in a step shape.

  In FIG. 34, the plurality of transfer conveyance rollers 220 arranged in the second half of the first transfer surface 223 are divided into a plurality of short roller portions, and the transfer transfer rollers 220 adjacent to each other in the front and rear directions are separated. The roller portions are arranged in a staggered manner, and are arranged so as to overlap in the front-rear direction. On the other hand, the plurality of transfer conveyance rollers 221 arranged in the first half of the first transfer surface 223 has a long structure extending substantially in the left-right direction, and has a certain gap in the front-rear direction. Has been placed.

  The second transfer surface 224 has the same structure as that of the first transfer surface 223, and the rear half of the divided transfer transfer roller 220 and the first half of the long transfer transfer roller 221. It is composed of

  The transmission gear 225 is fixed to the shaft end portion of the transfer conveyance roller 221 in the first half of the first transfer surface 223, and the shaft end portion of the transfer transfer roller 220 in the second half portion is Every other transmission gear 225 is fixed.

  In FIG. 33, each transmission gear 225 on the first description surface 223 is linked to a common first drive shaft 230 via a worm 226, and the first drive shaft 230 is a pair of front and rear. It is supported by bearings 235 and 236.

Similarly to the first transfer surface 223, the second transfer surface 224 has a transmission gear 225 fixed to the shaft end of the transfer roller 221 in the first half as shown in FIG. Transmission gears 225 are fixed to every other shaft end portion of the divided transfer transfer roller 220, and each transmission gear 225 is shared by a worm 226 as shown in FIG. The second drive shaft 231 is linked to the second drive shaft 231, and the second drive shaft 231 is supported by a pair of front and rear bearings 23 and 237.
is doing.

  The first drive shaft 230 and the second drive shaft 231 are interlocked and connected via a chain transmission mechanism 232, and the front end portion of the second drive shaft 231 is connected to the low-level transport mechanism 35 via a chain transmission mechanism 233. The drive shaft 238 is interlocked and connected. That is, the transfer transport rollers 220 and 221 of the transfer mechanism 72 are driven together with the low-order transport mechanism 35.

  Further, a free roller 208 having a conveyance surface that is substantially the same height as the conveyance surface of the high-level conveyance mechanism 56 is disposed between the transfer mechanism 72 and the high-level conveyance mechanism 56.

(Operation)
In FIG. 32, the plate-like workpiece W conveyed forward on the high-level conveyance mechanism 56 is first transferred to the first transfer surface 223 of the transfer mechanism 72 via the free roller 208, and next. Are transferred to the lower second transfer surface 224, transferred from the second transfer surface 224 to the lower transfer mechanism 35, and transferred at a constant speed.

  32, at the time of delivery from the high-level transport mechanism 56 to the first transfer surface 223, the second half of the first transfer surface 223 is arranged such that the rollers overlap in the front-rear direction as shown in FIG. Since each transfer conveyance roller 220 is arranged, the workpiece W can be reliably received on the first transfer surface 223, and the workpiece W is not sandwiched between the transfer conveyance rollers 220. . The same applies to the transfer from the first transfer surface 223 to the second transfer surface 224.

  In the embodiment of FIG. 32, the transfer surface is configured in two steps, but it may be configured in three or more steps.

[Seventh Embodiment]
35 to 40 show a seventh embodiment of the present invention, which includes a transfer mechanism 72 that can swing up and down, FIG. 35 is a longitudinal sectional view of the transfer mechanism 72, and FIG. FIG. 37 is a sectional view of XXXVII-XXXVII in FIG. 36, FIG. 38 is a plan view, FIG. 39 is an enlarged view of a roller support portion, and FIG. 40 is a view in the direction of arrow XXXX in FIG. . The same parts as those in the first embodiment are denoted by the same reference numerals.

  In FIG. 35, as the transfer mechanism 72, a plurality of transfer transfer rollers 250 are arranged at a predetermined interval in the front-rear direction between the high-level transfer mechanism 56 and the low-level transfer mechanism 35. The front end is moved up and down by swinging up and down using the rear end as a pivot (swing) fulcrum.

  In FIG. 38, each transfer conveyance roller 250 is supported by a pair of left and right roller support plates 256 so as to be rotatable around a horizontal axis, and both support plates 256 are connected by front and rear reinforcing plates 272. A transmission gear 258 is fixed to the shaft end portion of each transfer conveyance roller 250, and the gears 258 mesh with each other via an idle gear 270 and rotate at the same time.

  In FIG. 37, a chain sprocket 258 is fixed to the shaft end of the transfer conveying roller 250 at the rearmost end, and the chain sprocket 258 is linked to the chain sprocket 260 of the upper drive motor 256 via a chain 259. It is connected.

  A frame 252 is installed between the side walls of the apparatus main body 101. A pair of support arms 253 extending downward are fixed to the frame 252 and a transfer mechanism swinging cylinder 254 is provided. A motor 256 is attached. A downward U-shaped connecting arm 257 is fixed to a lower end portion of the telescopic rod 254 a extending downward from the cylinder 254, and a downward U-shaped bracket 255 is attached to the lower left and right ends of the connecting arm 257. Are fixed, and the bracket 255 supports the front end portions of both roller support plates 251.

  In FIG. 36, the rear end portion of the roller support plate 251 is rotatably supported by the lower end portion of the support arm 253 via a horizontal hinge pin 270, and the front end portion of the roller support plate 251 is as described above. Further, the transfer arm 72 is supported by both brackets 255 of the connecting arm 257, and the transfer mechanism 72 swings up and down around the hinge pin 270 at the rear end by extension and contraction of the extension rod 254a.

  In FIG. 39, a connecting pin 274 is fixed to the bracket 255, and this connecting pin 274 engages with a long hole 273 provided in the roller support plate 251.

  In FIG. 40, the long hole 273 is formed to be long in the front-rear direction, so that the roller support plate 251 can move relative to the bracket 255 in the front-rear direction when the roller support plate 251 swings.

(Operation)
(1) In FIG. 35, the transfer mechanism 72 is maintained in a horizontal posture at substantially the same height as the high-order transport mechanism 56, and each transfer transport roller 250 has the same transport speed as the transport rollers of the high-order transport mechanism 56. In this state, the plate-like workpiece W from the high-level transport mechanism 56 is received.

(2) When the workpiece W is placed on the transfer mechanism 72, the rotation of the transfer transport roller 250 of the transfer mechanism 72 stops, and then, as shown by the phantom line in FIG. As the telescopic rod 254a extends, the transfer mechanism 72 swings downward around the rear end hinge pin 270 and lowers the front end.

(3) At the lowered position indicated by the phantom line in FIG. 36, the operation of the cylinder 254 is stopped, and then the transfer transport roller 250 of the transfer mechanism 72 is moved at the same speed as the transport speed of the low-order transport mechanism 35. It rotates and transfers the workpiece | work W from the transfer mechanism 72 to the low level conveyance mechanism 35, and conveys the inside of the immersion tank 5 at a constant speed.

  According to the embodiment, since the transfer mechanism 72 only swings up and down with the rear end portion as a rotation fulcrum, it is possible to save the space for placing the transfer mechanism.

[Other embodiments]
(1) The “substantially horizontal movement” described in claim 1 means that the movement is not limited to the horizontal movement as shown in the first to twenty-third embodiments. Is included. Further, the transfer mechanism 72 shown in FIG. 9 may be configured to receive the workpiece W in a posture inclined forward and downward.

(2) “Descent or rise” described in claim 1 is not limited to vertical movement. For example, the transfer mechanism 72 shown in FIG. 9 can be structured to move up and down while sliding back and forth and left and right.

(3) The “high-level transport mechanism” described in claims 1 and 4 to 7 does not have to be transported at a uniform height as in the above-described embodiments. For example, as shown in FIG. In addition, by interposing the slope portion 56 a in the middle of the high-level transport mechanism 56, the transport height can be changed. Further, the high-level transport mechanism does not necessarily include a drive mechanism. For example, as shown in FIG. 24, the high-level transport mechanism can be configured by only the free roller 56b.

(4) In the first, second, third, fifth, sixth and seventh embodiments, the transfer mechanism is configured to receive and deliver the workpiece W by the roller. It is not limited to the transfer mechanism provided with. For example, in the case of a rotatable element such as a roller, a timing belt can be used. For example, instead of supporting the roller by the roller support piece 165 as shown in FIGS. 18 and 19, the work W can be configured by a pair of left and right L-shaped suspension members 165 a as shown in FIG. 25. It is also possible to have a structure in which the left and right ends of the are held from below.

It is a whole side view of the plating apparatus provided with the conveying apparatus concerning this invention. It is the II-II cross-sectional enlarged view of FIG. It is the III-III cross-sectional enlarged view of FIG. It is the IV-IV cross-sectional enlarged view of FIG. FIG. 5 is an enlarged VV cross-sectional view of FIG. 3. FIG. 4 is an enlarged sectional view taken along line VI-VI in FIG. 3. It is a perspective view of the bearing member of FIG. It is a plane enlarged view of the transfer mechanism of the arrow VIII part of FIG. FIG. 9 is a work process diagram showing the work transfer operation by the transfer mechanism of FIG. 8 in stages. FIG. 9 is a schematic front view showing a lifting operation of the transfer mechanism of FIG. 8. FIG. 9 is a side view of a frame and a cylinder of the transfer mechanism of FIG. 8. It is a XII arrow line view of FIG. It is an enlarged view of the connection member of the cylinder of the left side of FIG. It is an enlarged view of the connection member of the cylinder of the right side of FIG. It is a front view of the conveyance roller of a transfer mechanism. It is a side view of the drive transmission part of a transfer mechanism. It is a top view which shows the transfer mechanism of 2nd Embodiment. It is a side view of the transfer mechanism of FIG. It is a XIX arrow line view of FIG. It is a side view of the same transfer mechanism as FIG. 18 which shows raising / lowering operation | movement. It is a top view which shows the transfer mechanism of 3rd Embodiment. It is the XXII-XXII arrow line view of FIG. It is a side view which shows other embodiment. It is a side view which shows other embodiment. The front view which shows the modification of a transfer mechanism. It is a longitudinal cross-sectional view which shows the transfer mechanism of 4th Embodiment. It is a top view of the transfer mechanism of FIG. It is XXVIII-XXVIII sectional drawing of FIG. It is a longitudinal cross-sectional view which shows the transfer mechanism of 5th Embodiment. FIG. 30 is a sectional view taken along the line XXX-XXX of the transfer mechanism in FIG. 29. It is a conceptual diagram which shows the displacement of the support location of the conveyance roller pair for transfer of the transfer mechanism of FIG. It is a longitudinal cross-sectional view which shows the transfer mechanism of 6th Embodiment. It is a longitudinal cross-sectional view which shows the drive mechanism of the transfer conveyance roller of FIG. It is a top view of the transfer mechanism of FIG. It is a longitudinal cross-sectional view which shows the transfer mechanism of 7th Embodiment. FIG. 36 is a longitudinal sectional view showing a drive unit of the transfer mechanism of FIG. 35. It is XXXVII-XXXVII sectional drawing of FIG. It is a top view of the transfer mechanism of FIG. It is an enlarged view of the roller support part of FIG. FIG. 40 is a view on arrow XXXX in FIG. 39. It is a vertical side view of the prior art example 1. It is a vertical side view of the prior art example 2.

Explanation of symbols

4, 5, 6, 7 Immersion tank 34, 35, 36, 37 Low level transport mechanism 51, 52, 53, ..., 62, 63, 64 High level transport mechanism 70, 71, 72, 73, 74, 75, 76, 77 Transfer mechanism 105 Transfer rollers for high and low transfer mechanisms 140 Transfer rollers for transfer mechanism 143, 144 Transfer mechanism lifting cylinder 200 Transfer mechanism transfer roller 205 Nozzle W Workpiece

Claims (7)

In the workpiece transfer device of the immersion tank that stores the treatment liquid and immerses the workpiece,
A low-level transport mechanism that is disposed in the immersion bath and transports the workpiece in a processing liquid;
A high-level transport mechanism that is disposed outside the immersion tank at a position higher than the low-level transport mechanism, extends to a position near the immersion tank or a position above the immersion tank, and transports a workpiece,
A transfer mechanism that can be moved up and down to receive a workpiece from one of the low-level conveyance mechanism and the high-level conveyance mechanism by a substantially horizontal movement, and descend or rise, and transfer the workpiece to the other conveyance mechanism by a substantially horizontal movement; With
The transfer mechanism includes a plurality of horizontal transfer transfer rollers for mounting and transferring a work on an upper surface, a frame for supporting the transfer transfer roller, and a pair of left and right supporting the frame so as to be movable up and down. The left and right cylinders are configured such that the contraction start timing or the extension start timing differs between the left and right so that the transfer transport roller is tilted left and right when the workpiece is lowered or raised. and wherein the are, the work conveying apparatus of the immersion bath. In the workpiece transfer device of the immersion tank that stores the treatment liquid and immerses the workpiece,
A roller-type low-level transport mechanism that is disposed in the immersion tank and transports the workpiece in a processing liquid;
A high-level transport mechanism that is disposed outside the immersion tank at a position higher than the low-level transport mechanism, extends to a position near the immersion tank or a position above the immersion tank, and transports a workpiece,
A transfer mechanism for transferring a workpiece from the high-level transfer mechanism to the low-level transfer mechanism,
The transfer mechanism includes a plurality of nozzles that are positioned between the conveyance rollers of the low-level conveyance mechanism and generate an upward liquid jet in a freely controllable manner, and each of the nozzles corresponds to the conveyance roller of the low-level conveyance mechanism. It is formed to be elongated in the conveyance width direction so as to extend over substantially the entire width, and is configured to receive the workpiece from the high-level conveyance mechanism by the liquid jet and to place the workpiece on the low-level conveyance mechanism by reducing the jet pressure of the liquid jet. A workpiece transfer device for an immersion bath, characterized in that. In the workpiece transfer device of the immersion tank that stores the treatment liquid and immerses the workpiece,
A low-level transport mechanism that is disposed in the immersion bath and transports the workpiece in a processing liquid;
A high-level transport mechanism that is disposed outside the immersion tank at a position higher than the low-level transport mechanism, extends to a position near the immersion tank or a position above the immersion tank, and transports a workpiece,
A transfer mechanism for transferring a workpiece from the high-level transfer mechanism to the low-level transfer mechanism,
The transfer mechanism is configured to arrange a plurality of transfer conveyance roller pairs each including a pair of transfer conveyance rollers arranged at a predetermined interval in the conveyance width direction at predetermined intervals in the conveyance direction,
Among the plurality of transfer transport roller pairs, the transfer transport roller pair of the transfer transport roller pair on the highest transport mechanism side is arranged in a substantially vertical posture, and the transfer transport roller pair on the low transport mechanism side is A workpiece transfer device for a dipping bath, wherein each transfer roller is inclined so that the upward opening angle between the transfer roller is sequentially increased as the transfer proceeds. In the workpiece transfer device of the immersion tank that stores the treatment liquid and immerses the workpiece,
A low-level transport mechanism that is disposed in the immersion bath and transports the workpiece in a processing liquid;
A high-level transport mechanism that is disposed outside the immersion tank at a position higher than the low-level transport mechanism, extends to a position near the immersion tank or a position above the immersion tank, and transports a workpiece,
A transfer mechanism for transferring a workpiece from the high-level transfer mechanism to the low-level transfer mechanism,
The transfer mechanism includes a plurality of transfer transfer rollers, and has a plurality of transfer surfaces having different heights between the transfer surface of the high-level transfer mechanism and the transfer surface of the low-level transfer mechanism. And
The plurality of transfer surfaces are arranged so as to be sequentially lowered to a lower position as they go from the high-level conveyance mechanism side to the low-level conveyance mechanism side, and each of the transfer surfaces is arranged on the high-level conveyance mechanism side. In addition, the plurality of transfer transport rollers are divided into a plurality of short roller portions, and the roller portions of the transfer transport rollers adjacent in the transport direction are arranged in a staggered manner and overlap in the transport direction. It is arranged like this, The workpiece conveyance apparatus of an immersion tank characterized by the above-mentioned . 5. The work transfer device for an immersion tank according to claim 1, wherein the transfer speed of the high-order transfer mechanism can be changed . The work conveyance device for an immersion tank according to any one of claims 1, 3, 4, and 5, wherein the transfer speed of the transfer mechanism is changeable. . 6. The work conveying apparatus for an immersion tank according to claim 1, wherein the low-level conveyance mechanism, the high-level conveyance mechanism, and the transfer mechanism are formed of a plurality of conveyance rollers and on a conveyance surface. A work conveying device for an immersion tank, characterized in that the work is placed and conveyed.

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