JP4884707B2 - Control device for fluid transfer system - Google Patents

Description

The present invention relates to a control device of the fluid delivery system where the AC motor for driving the fluid delivery device such as a pump or a fan so as to control the supply inverter of the desired AC voltage provided to the fluid delivery system, in particular, the building relates to a control device of the fluid delivery system the alternating current motor for driving a pump comprising an air conditioning system so as to control the supply inverter of the desired AC voltage and the like.

  Hereinafter, a primary pump type air conditioning system such as a building will be described as a specific example of the fluid conveyance system.

  FIG. 4 shows a typical configuration example of this type of air conditioning system, where 1 is an air conditioner that processes an air conditioning load, 2 is a pump that supplies cold / hot water to the air conditioner 1, and 3 is a refrigeration that generates the cold / hot water. , 4 is a pump for supplying cooling water to the refrigerator 3, 5 is a cooling tower for generating the cooling water, 10 and 20 are an air conditioner 1, a pump 2, a refrigerator 3, a pump 4, a cooling tower 5, etc. It is a system controller that controls to a desired state. Further, 6 is a flow meter for measuring the load flow rate, 7 is a pressure gauge for measuring the water supply pressure, 8 is an outlet side temperature detector for measuring the outlet side temperature of the cooling water of the refrigerator 3, and 9 is for cooling the refrigerator 3. An inlet side temperature detector that measures the temperature of the inlet side of water, 12 is an inverter device that supplies a desired AC voltage to an AC motor that drives the pump 2, and 14 is a desired AC voltage that is supplied to the AC motor that drives the pump 4. This is an inverter device.

  FIG. 5 shows a circuit configuration diagram of a portion related to the system controller 10 in the air conditioning system shown in FIG. 4 controlling the pump 2 and the pump 4 to a desired state, and 11 is an operation state of the entire air conditioning system. It is a host controller that performs control. The inverter device 12 converts the detected value of the cold / hot water outlet side water amount, that is, the load water amount, and the detected value of the cold / hot water inlet side pressure, ie, the water supply pressure, of the air conditioner 1 input from the flow meter 6 and pressure gauge 7 to the host controller 11. Based on the frequency command or switching command issued from the controller 11 and the operation command from the controller 11, a desired AC voltage is supplied to an AC motor (hereinafter also simply referred to as a motor) 13 that drives the pump 2. The inverter device 14 receives a frequency command or a switching command issued from the upper controller 11 based on the detected value of the outlet temperature of the cooling water to the refrigerator 3 input to the upper controller 11 from the outlet temperature detector 8, that is, the detected value of the outlet temperature. And a motor 15 that drives the pump 4 based on the operation command from the controller 11 and a desired exchange. It supplies a voltage.

In the system controller 10, normally, a desired AC voltage is supplied to the motor 13 and the motor 15 based on the frequency command and the operation command issued from the host controller 11 to the inverter device 12 and the inverter device 14, respectively. However, if a failure occurs in the feedback control circuit during this normal operation, the feedback control centered on the host controller 11 is stopped to stop the pump operation, and then the maximum frequency from the host controller 11 is fixed. A frequency command for operation is output to the inverter device 12 or the inverter device 14, and the inverter device 12 or the inverter device 14 supplies an AC voltage having an amplitude corresponding to this frequency to the motor 13 or the motor 15 at the highest frequency. (For example, the following patents Document 1).
JP-A-11-117874, paragraph 0021.

  In the conventional system controller 10 shown in FIG. 5, noise components emitted from the components of the air conditioning system shown in FIG. 4 are easily superimposed on the signal lines from the host controller 11 to the inverter device 12 and the inverter device 14. As the noise component, noise accompanying switching of power semiconductor elements constituting the inverter device 12 and the inverter device 14 occupies a large weight.

  However, in order to prevent malfunction of the inverter device 12 and the inverter device 14 due to the noise component superimposed on the frequency command and switching command transmitted via the signal line, the attenuation is sufficiently large to remove the noise component. If a filter having characteristics is provided on each of the inverter devices, the response characteristics between the input and output of each of the inverter device 12 and the inverter device 14 may be impaired by the filter.

The objective of this invention is providing the control apparatus of the fluid conveyance system using the inverter apparatus which solved the said problem.

The present invention relates to a fluid conveyance device that conveys fluid in a system, an inverter device that supplies a desired AC voltage to an AC motor that drives the fluid conveyance device, a control command to the inverter device, and the fluid in the system In a fluid conveyance system including a host controller for controlling,
Each filter for removing a noise component included in a detection value from each detector that detects an operation state of each part of the fluid conveyance system, and an adjustment calculation based on the output value of each filter are performed. An adjustment calculation unit that outputs a frequency command value, a frequency setter that sets a desired frequency command value in advance, and a frequency command value that is normally given from the adjustment calculation unit to the inverter unit are sent to each filter. An abnormality detection unit that generates a switching command to be applied to the inverter unit by switching to a frequency command value set in the frequency setter when an abnormality is detected in any of the detectors from an output value; Provided in the inverter device, an operation command is given from the host controller to the inverter device, and the flow is performed in the inverter device. And performing an adjustment operation for the control of the transport apparatus.

  According to the inverter device of the present invention, the inverter device can be provided with a filter capable of removing noise components without impairing the response characteristics between the input and output of the inverter device, and the high-speed processing in the host controller of the inverter device. As a result, the system controller provided in the fluid conveyance system can be realized at low cost.

  FIG. 1 is a circuit configuration diagram showing an embodiment of the present invention. In this figure, components having the same functions as those of the conventional circuit shown in FIG.

  That is, FIG. 1 shows a circuit configuration diagram of a portion related to the system controller 20 in the air conditioning system shown in FIG. 4 controlling the pump 2 and the pump 4 to a desired state, and 21 is an operation state of the entire air conditioning system. The upper controller 22 controls the flow rate of the cold / hot water of the air conditioner 1 input from the detectors of the flow meter 6 and the pressure gauge 7 shown in FIG. An inverter device that supplies a desired AC voltage to the motor 13 that drives the pump 2 based on the detected value of the side pressure, that is, the water supply pressure, and the operation command issued from the controller 21, and 23 is the outlet side temperature detection shown in FIG. The detected value of the outlet side temperature of the cooling water to the refrigerator 3 input from the refrigerator 8, that is, the detected temperature of the outlet, and the operation command issued from the host controller 21 An inverter device for supplying a desired AC voltage to the motor 15 which drives the pump 4 based on.

  In the above embodiment, the primary pump type air conditioning system shown in FIG. 4 has been described as a specific example of the fluid transfer system. However, other types of air conditioning systems, cooling systems for heat source equipment such as plants, water supply facilities, etc. It can be applied to a variable water supply system such as a ventilation system or a ventilation system for ventilating a building.

  For example, FIG. 6 shows a cooling system for a production facility, which is a system that cools a production facility (for example, a heat load such as a generator) by passing cold water through a heat exchanger.

  In the figure, 81 is a heat exchanger that processes a heat load, 82 is a pump that supplies cold water to the heat exchanger 81, 83 is an inverter device that supplies a desired AC voltage to an AC motor that drives the pump 82, and 86 is a load. A flow meter 87 for measuring the flow rate is a pressure meter for measuring the water supply pressure.

  FIG. 7 shows a water supply facility, which is a system for controlling the discharge pressure of the pump to be a constant pressure in order to obtain the required pressure and flow rate at the end of the pipe.

  In the figure, 91 is a liquid tank serving as a water source, 92 is a pump that supplies water from the liquid tank 91 to each faucet, and 93 is an AC motor that drives the pump 92 so that the discharge pressure of the pump 92 is constant. An inverter device for supplying an alternating voltage, 96 is a flow meter for measuring the load flow rate, and 97 is a pressure gauge for measuring the water supply pressure.

  FIG. 8 shows a variable air volume air-conditioning system that adjusts the air volume according to the room temperature. 101 is a room to be air-conditioned having an air supply port 101a and a return air port 101b, 102 is a cooling coil 102a, and air supply An air conditioner composed of a fan 102b and the like, 103 is an inverter device that supplies a desired AC voltage to an AC motor that drives the air supply fan 102b, and 104 is requested by the chamber 101 based on a measured value of the indoor temperature detector 108. A variable air volume device (VAV) that opens and closes a motor damper (not shown) so as to match the air volume, 105 is a return air fan, 106 is an inverter device that supplies a desired AC voltage to an AC motor that drives the return air fan 105, 107 is an air conditioner outlet temperature detector, 108 is an indoor temperature detector, 109a is an outside air motor damper for taking in outside air, 109b Is an exhaust motor damper, and 109c is a return air motor damper.

  Hereinafter, the air flow of the system will be described.

  The temperature and humidity are adjusted by the cooling coil 102a in the air conditioner 102, and the cooled air is conveyed to the variable air volume device 104 through the air supply fan 102b, and the air whose air volume is adjusted by the variable air volume device 104 is supplied. The air is supplied into the room through the air vent 101a. The air supplied to the chamber 101 processes the heat load in the room, and the air that has finished the heat load is sucked from the return air port 101b and conveyed through the return air fan 105, and the motor dampers 109b and 109c are opened and closed. Controlled and distributed to exhaust air and return air. The return air is mixed with the outside air and is led to the cooling coil 102a in the air conditioner 102 again. The above circulation is repeated to control the room temperature to a predetermined value.

  In such an air conditioning system, based on the detected values of the air conditioner outlet temperature detector 107 and the indoor temperature detector 108, the required air volume of the room 101 is determined by PID calculation so that the indoor temperature becomes a predetermined value. Here, the inverter device 103 reduces the rotation speed of the air supply fan 102b until a damper (not shown) of the variable airflow device 104 is fully opened.

FIG. 9 shows an indoor ventilation system that controls the fan in accordance with the CO ₂ concentration or the CO concentration, and controls the indoor CO ₂ concentration or the CO concentration to be a predetermined value or less. It is a ventilation system.

In the figure, 111 is a room to be ventilated having an air supply port 111 a and a return air port 111 b, 112 is an air supply fan, 113 is an inverter that supplies a desired AC voltage to an AC motor that drives the air supply fan 112. Device, 114 is an exhaust fan, 115 is an inverter device that supplies a desired AC voltage to an AC motor that drives the exhaust fan 114, and 116 is a CO ₂ concentration detector that detects the concentration of CO ₂ in the air conveyance path. is there.

  FIG. 10 shows a chamber pressure control system that controls the fan in accordance with the room pressure, and controls the chamber pressures of the adjacent chambers to be the same so that there is no pressure difference between the adjacent chambers. System.

  In the figure, 121 is a chamber that is a pressure control target having an air supply port 121a and a return air port 121b, 122 is a chamber adjacent to the chamber 121 and having a door 122a communicating with the chamber 121, 123 is an air supply fan, 124 Is an inverter that supplies a desired AC voltage to an AC motor that drives the air supply fan 123, 125 has a wind speed detector and a motor damper (not shown), and the wind speed detected by the wind speed detector is a predetermined wind speed. A constant air volume device that adjusts the opening degree of the motor damper so that the motor damper becomes 126, 126 is a motor damper for controlling the room pressure, 127 is an exhaust fan, and 128 is an inverter that supplies a desired AC voltage to an AC motor that drives the exhaust fan 127 The apparatus, 129a is a pressure detector that detects the pressure in the chamber 121, and 129b is a pressure detector that detects the pressure in the chamber 122.

  FIG. 2 shows a circuit configuration of the first embodiment of the present invention, and is a detailed circuit configuration diagram of the inverter device 22 shown in FIG.

  That is, in FIG. 2, 22a is a filter for removing a noise component superimposed on the detected value of the load water amount, and 22b is the water amount for deriving a set value of the target pressure from the detected value of the load water amount from which the noise component has been removed. A conversion calculation unit for calculating a well-known quadratic function expression based on the above and obtaining the set value, 22c is a filter for removing a noise component superimposed on the detected value of the water supply pressure, and 22d is a filter for removing the set value and the noise component. Addition / subtraction calculation unit for obtaining a deviation from the detected value of the removed water supply pressure, 22e is an adjustment unit for outputting an adjustment calculation value so that the deviation becomes zero, and 22f is a switching command issued from an abnormality detection unit 22h described later. A switch that transmits the adjustment calculation value to the inverter unit 22g during normal operation, that is, the inverter unit 22g at this time sets the adjustment calculation value as a frequency indicator. And then, supplied to the motor 13 an alternating voltage with an amplitude corresponding to the frequency and the frequency based on the frequency command is generated.

  The abnormality detection unit 22h receives the detection value of the load water amount via the filter 22a and the detection value of the water supply pressure via the filter 22c, and any detection value is, for example, 5% of the rated detection value. When the following occurs, it is determined that the corresponding detector is in an abnormal state such as a failure, and a switching signal is issued. By this switching command, the switching unit 22f outputs the desired frequency setting value output from the frequency setting unit 22j to the inverter unit. The inverter unit 22g supplies an AC voltage having an amplitude corresponding to the frequency to the motor 13 at a frequency based on the frequency setting value.

  Here, depending on the air conditioning system, it is safer to stop the motor 13 when the detector is abnormal, and it is safer to operate the motor 13 at a predetermined rotational speed. In the present invention, since the frequency when the detector is abnormal can be set by the frequency setting unit 22j, it is possible to cope with both the case where the motor 13 is stopped and the case where the motor 13 is operated at an arbitrary rotational speed. is there.

  According to this inverter device 22, by adding a so-called water supply pressure control function to the conventional inverter device, the frequency command for performing a relatively high speed operation becomes the internal calculation value of the inverter device 22. It is possible to prevent the influence of the noise component emitted from each of the components of the air conditioning system shown in FIG. 6 and to remove the noise component for each detection value that operates at a relatively low speed. Filter 22a and filter 22c can be installed. Therefore, it is possible to reliably detect that an abnormality such as a failure has occurred in the detector, and to quickly switch the operating state of the inverter 22g with this detection. Can do. Further, in the host controller 21, functions such as the adjusting unit 22e that require high-speed processing can be deleted as compared with the conventional host controller 11, and as a result, the calculation amount of the controller can be reduced.

  In the production equipment cooling system shown in FIG. 6, the detected value of the load water amount from the flow meter 86 is input to the filter 22a of FIG. 2, and the noise component superimposed on the detected value of the load water amount is removed. The set value of the target pressure is calculated by the conversion calculation unit 22b. On the other hand, the detected value of the water supply pressure from the pressure gauge 87 is input to the filter 22c, and the noise component superimposed on the detected value of the water supply pressure is removed.

  Then, in the same manner as described above, the deviation between the set value and the detected value of the water supply pressure is obtained, the adjustment calculation is performed so that this deviation becomes zero, and the AC based on the frequency command and the amplitude corresponding to the frequency are exchanged. A voltage is generated and supplied to the motor 13.

  Here, the abnormality detection unit 22h receives the detection value of the load water amount via the filter 22a and the detection value of the target pressure via the filter 22c, and one of the detection values is, for example, 5% or less of each rated detection value. When it is, it is determined that the corresponding detector is in an abnormal state such as a failure, and a switching signal is issued. In response to this switching command, the switching unit 22f outputs the desired frequency setting value output from the frequency setting unit 22j to the inverter unit 22g. In the inverter unit 22g, an AC voltage having an amplitude corresponding to this frequency is supplied to the motor 13 at a frequency based on the frequency setting value.

  In addition, in the water supply facility shown in FIG. 7, the detected value of the load water amount from the flow meter 96 is input to the filter 22a of FIG. 2, and the noise component superimposed on the detected value of the load water amount is removed, and the conversion calculation unit 22b Thus, the set value of the target pressure is calculated. On the other hand, the detected value of the water supply pressure from the pressure gauge 97 is input to the filter 22c, and the noise component superimposed on the detected value of the water supply pressure is removed.

  Then, in the same manner as described above, the deviation between the set value and the detected value of the water supply pressure is obtained, the adjustment calculation is performed so that this deviation becomes zero, and the AC based on the frequency command and the amplitude corresponding to the frequency are exchanged. A voltage is generated and supplied to the motor 13.

  Here, the abnormality detection unit 22h receives the detection value of the load water amount via the filter 22a and the detection value of the target pressure via the filter 22c, and one of the detection values is, for example, 5% or less of each rated detection value. When it is, it is determined that the corresponding detector is in an abnormal state such as a failure, and a switching signal is issued. In response to this switching command, the switching unit 22f outputs the desired frequency setting value output from the frequency setting unit 22j to the inverter unit 22g. In the inverter unit 22g, an AC voltage having an amplitude corresponding to this frequency is supplied to the motor 13 at a frequency based on the frequency setting value.

  In the room pressure control system of FIG. 10, the detected value of the pressure detected by the pressure detector 129b is input to the filter 22a instead of the load water amount shown in FIG. Instead of the water supply pressure shown, a detected value of pressure detected by the pressure detector 129a is input, and the pressure in the chamber 121 and the chamber 122 is controlled to be the same. In the case of this room pressure control system, the conversion calculation unit 22b in FIG. 2 is not necessary.

  That is, the detected pressure value from the pressure sensor 129a of the chamber 121 is input to the filter 22c in FIG. 2, and the noise component superimposed on the detected pressure value is removed. On the other hand, the detected pressure value from the pressure sensor 129b of the chamber 122 is input to the filter 22a of FIG. 2, and the noise component superimposed on the detected pressure value is removed. Then, the addition / subtraction calculation unit 22d calculates the deviation between the output of the filter 22a and the output of the filter 22c, and the adjustment unit 22e performs adjustment calculation so that this deviation becomes zero, and the frequency based on the frequency command and the frequency An AC voltage having the amplitude is generated and supplied to the motor 13.

  Here, the abnormality detection unit 22h receives the pressure detection value via the filter 22a and the pressure detection value via the filter 22c, and one of the detection values is, for example, 5% or less of the rated detection value. When it is determined that the corresponding detector is in an abnormal state such as a failure, a switching signal is issued, and in response to this switching command, the switching unit 22f inputs the desired frequency setting value output from the frequency setting unit 22j to the inverter 22g. In the inverter unit 22g, an AC voltage having an amplitude corresponding to the frequency is supplied to the motor 13 at a frequency based on the frequency setting value.

  FIG. 3 shows a circuit configuration of the second embodiment of the present invention, and is a detailed circuit configuration diagram of the inverter device 23 shown in FIG.

  That is, in FIG. 3, 23a is a filter for removing a noise component superimposed on the detected value of the outlet temperature, 23b is a setter for sending the set value of the outlet temperature, and 23c is an outlet from which the set value and the noise component have been removed. Addition / subtraction operation unit for obtaining a deviation from the detected temperature value, 23d is an adjustment unit for outputting an adjustment operation value such that the deviation becomes zero, and 23e is a switching command from an abnormality detection unit 23g described later, In other words, the switch that normally transmits the adjustment calculation value to the inverter unit 23f, and the inverter unit 23f at this time uses the adjustment calculation value as a frequency command, and the frequency based on the frequency command and the alternating current of the amplitude corresponding to the frequency command. A voltage is generated and supplied to the motor 15.

  The abnormality detection unit 23g receives the detected value of the outlet temperature via the filter 23a, and when the detected value becomes, for example, 5% or less of the rated detection value, the corresponding detector enters an abnormal state such as a failure. In response to this switching command, the switching device 23e inputs a desired frequency setting value output from the frequency setting device 23h to the inverter unit 23f, and the inverter unit 23f outputs a frequency based on the frequency setting value. Thus, an AC voltage having an amplitude corresponding to this frequency is supplied to the motor 15.

  Here, depending on the air conditioning system, it is safer to stop the motor 15 when the detector is abnormal, and it is safer to operate the motor 15 at a predetermined rotational speed. In the present invention, since the frequency when the detector is abnormal can be set by the frequency setter 23h, it is possible to cope with both the case where the motor 15 is stopped and the case where the motor 15 is operated at an arbitrary rotational speed. is there.

  According to this inverter device 23, by adding a so-called outlet temperature constant control function to the conventional inverter device, a frequency command for performing a relatively high speed operation becomes an internal operation value of the inverter device 23. 4 is prevented from being affected by the noise component emitted from each of the components of the air conditioning system shown in FIG. 4, and is sufficient to remove the noise component for a detection value that operates at a relatively low speed. Therefore, it is possible to reliably detect that an abnormality such as a failure has occurred in the detector, and in accordance with this detection, the operating state of the inverter unit 23f can be quickly switched. Further, the host controller 21 can delete functions such as the adjustment unit 23d that requires high-speed processing as compared with the conventional host controller 11, and as a result, the calculation amount of the controller can be reduced.

  Furthermore, the wiring between the host controller 21 and the inverter devices 22 and 23 can be reduced, and the installation work can be simplified.

  In the production system cooling system shown in FIG. 6, the detected value of the flow meter 86 or the pressure gauge 87 is input to the filter 23a of FIG. 3, and the noise component superimposed on the detected value of the flow rate or pressure is removed. The adjusting unit 23d performs an adjustment operation so that a deviation between the set value and the detected value of the flow rate or pressure becomes zero, and generates a frequency based on the frequency command and an AC voltage having an amplitude corresponding to the frequency. 13 is supplied.

  Here, the abnormality detection unit 23g receives a detection value of the flow rate or pressure through the filter 23a, and when this detection value becomes, for example, 5% or less of the respective rated detection value, the corresponding detector is in trouble. It is determined that an abnormal state has occurred, and a switching signal is issued. In response to this switching command, a desired frequency setting value output from the frequency setting device 23h is input to the inverter 23f in the switching device 23e, and the frequency setting value is set to the inverter 23f. An alternating voltage having an amplitude corresponding to this frequency is supplied to the motor 13 at the base frequency.

  Further, in the variable air volume air conditioning system of FIG. 8, the detected value of the temperature from the indoor temperature detector 108 is input to the filter 23a of FIG. 3, and the noise component superimposed on the detected value of the indoor temperature is removed, and the adjusting unit 23d. Performs an adjustment calculation so that the deviation between the set value and the detected value of the room temperature becomes zero, generates a frequency based on the frequency command and an AC voltage having an amplitude corresponding to the frequency, and supplies it to the motor 13.

  Here, when the detected value of the room temperature through the filter 23a is input to the abnormality detecting unit 23g and this detected value becomes, for example, 5% or less of the respective rated detected value, the corresponding detector is abnormal such as a failure. It is determined that the state has been reached, and a switching signal is issued. In response to this switching command, the switching unit 23e inputs a desired frequency setting value output from the frequency setting unit 23h to the inverter unit 23f, and the inverter unit 23f is based on the frequency setting value. AC voltage having an amplitude corresponding to this frequency is supplied to the motor 13.

In the indoor ventilation system of FIG. 9, the detected value of the CO ₂ concentration is input to the filter 23a instead of the outlet temperature shown in FIG. 3, and the filter 23a is compared with the set value of the CO ₂ concentration set by the setting device 23b. A comparison is made.

That is, the detection value of CO ₂ concentration from the CO ₂ concentration detector 116 is a noise component is inputted superimposed on the detection value of the CO ₂ concentration in the filter 23a of FIG. 3 is removed, adjusted unit 23d the set value and CO _The adjustment calculation is performed so that the deviation from the detected value of the _two concentrations becomes zero, and an AC voltage having a frequency based on the frequency command and an amplitude corresponding to the frequency is generated and supplied to the motor 13.

Here, the abnormality detection unit 23g receives the detection value of the CO ₂ concentration through the filter 23a, and when this detection value becomes, for example, 5% or less of the respective rated detection value, the corresponding detector is in trouble. It is determined that an abnormal state has occurred, and a switching signal is issued. In response to this switching command, a desired frequency setting value output from the frequency setting device 23h is input to the inverter 23f in the switching device 23e, and the frequency setting value is set to the inverter 23f. An alternating voltage having an amplitude corresponding to this frequency is supplied to the motor 13 at the base frequency.

Circuit configuration diagram showing an embodiment of the present invention 1 is a circuit configuration diagram showing a first embodiment of the present invention. Circuit configuration diagram showing a second embodiment of the present invention. Air conditioning system configuration diagram Circuit configuration diagram showing a conventional example Production equipment cooling system configuration diagram Configuration diagram of water supply equipment Configuration diagram of variable air volume air conditioning system Configuration diagram of indoor ventilation system Configuration diagram of room pressure control system

DESCRIPTION OF SYMBOLS 1 ... Air conditioner, 2 ... Pump, 3 ... Refrigerator, 4 ... Pump, 5 ... Cooling tower, 10, 20 ... System controller, 11 ... High-order controller, 12, 14 ... Inverter device, 13, 15 ... Motor, 21 ... Upper controller, 22, 23... Inverter device.

Claims (1)

A fluid conveyance device that conveys fluid in the system, an inverter device that supplies a desired AC voltage to an AC motor that drives the fluid conveyance device, and a host controller that gives control commands to the inverter device and controls the fluid in the system In a fluid conveyance system comprising:
Each filter for removing a noise component included in a detection value from each detector that detects an operation state of each part of the fluid conveyance system, and an adjustment calculation based on the output value of each filter are performed. An adjustment calculation unit that outputs a frequency command value, a frequency setter that sets a desired frequency command value in advance, and a frequency command value that is normally given from the adjustment calculation unit to the inverter unit are sent to each filter. An abnormality detection unit that generates a switching command to be applied to the inverter unit by switching to a frequency command value set in the frequency setter when an abnormality is detected in any of the detectors from an output value; Provided in the inverter device, an operation command is given from the host controller to the inverter device, and the flow is performed in the inverter device. Control device for a fluid delivery system and performing an adjustment operation for the control of the transport apparatus.

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