JP4869593B2 - コンプライアント支持構造体を有する微細加工超音波トランスデューサセル - Google Patents

コンプライアント支持構造体を有する微細加工超音波トランスデューサセル Download PDF

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JP4869593B2
JP4869593B2 JP2004380343A JP2004380343A JP4869593B2 JP 4869593 B2 JP4869593 B2 JP 4869593B2 JP 2004380343 A JP2004380343 A JP 2004380343A JP 2004380343 A JP2004380343 A JP 2004380343A JP 4869593 B2 JP4869593 B2 JP 4869593B2
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electrode
membrane
wall
support structure
ring
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JP2005193374A5 (enExample
JP2005193374A (ja
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ロウェル・スコット・スミス
ダグラス・グレン・ワイルズ
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General Electric Co
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2004380343A 2003-12-29 2004-12-28 コンプライアント支持構造体を有する微細加工超音波トランスデューサセル Expired - Fee Related JP4869593B2 (ja)

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Application Number Priority Date Filing Date Title
US10/748,920 2003-12-29
US10/748,920 US7030536B2 (en) 2003-12-29 2003-12-29 Micromachined ultrasonic transducer cells having compliant support structure

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JP2005193374A JP2005193374A (ja) 2005-07-21
JP2005193374A5 JP2005193374A5 (enExample) 2008-02-14
JP4869593B2 true JP4869593B2 (ja) 2012-02-08

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US (2) US7030536B2 (enExample)
JP (1) JP4869593B2 (enExample)
DE (1) DE102004063740A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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US7408283B2 (en) 2008-08-05
US20060125348A1 (en) 2006-06-15
US7030536B2 (en) 2006-04-18
JP2005193374A (ja) 2005-07-21
US20050146240A1 (en) 2005-07-07

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