JP2005193374A - コンプライアント支持構造体を有する微細加工超音波トランスデューサセル - Google Patents
コンプライアント支持構造体を有する微細加工超音波トランスデューサセル Download PDFInfo
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- JP2005193374A JP2005193374A JP2004380343A JP2004380343A JP2005193374A JP 2005193374 A JP2005193374 A JP 2005193374A JP 2004380343 A JP2004380343 A JP 2004380343A JP 2004380343 A JP2004380343 A JP 2004380343A JP 2005193374 A JP2005193374 A JP 2005193374A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
Abstract
【解決手段】 基材(4)上に構成された複数のcMUTセルを含む微細加工超音波トランスデューサアレイ。各cMUTセルは、基材上に形成されたコンプライアント支持構造体(22又は24)と、コンプライアント支持構造体によりキャビティ(20)上で支持された膜(8)と、膜によって支持された第1の電極(12)と、第1の電極と共にキャパシタを形成する第2の電極(10)とを含み、キャビティが第1及び第2の電極間に置かれる。コンプライアント支持構造体は、各cMUTセルの非膜外表面を支持基材から分離する。
【選択図】 図1
Description
u(t)≒(ε/d2)*Vbias*v(t) (1)
式中、dは電極間すなわちキャパシタのプレート間の距離、εはセルの実行誘電率である。cMUTセルの感度は、バイアス電圧が高く且つ両電極が互いに近接している場合に最大となることが分かっている。
4 基材
6 絶縁支持体
8 膜又はダイアフラム
10 基材4上の電極、下面電極、
12 膜8上の電極、上面電極
20 キャビティ
Claims (10)
- 基材内又は基材上に微細加工された機械的構造体を含むデバイスであって、前記機械的構造が、コンプライアント支持構造体(22又は24)と、該コンプライアント支持構造体によって支持された部材(8)とを含み、前記コンプライアント支持構造体が前記部材の運動中にサイズ又は形状が変化することを特徴とするデバイス。
- 前記部材が膜と、該膜によって支持された第1の電極(12)とを含み、前記第1の電極から一定距離に配置されて、該第1の電極との間に配置されるキャビティと共にキャパシタを形成する第2の電極(10)を更に含み、前記コンプライアント支持構造体が、前記膜の圧縮/膨張中にサイズ又は形状が変化することを特徴とする請求項1に記載のデバイス。
- 台座(32)を更に含み、前記第2の電極が前記台座によって支持されていることを特徴とする請求項2に記載のデバイス。
- 前記コンプライアント支持構造体が、第1の壁26と、内側周縁部分及び外側周縁部分を有し且つこれらの一方が前記第1の壁上に形成されたリング状構造体(28)と、前記内側周縁部分と外側周縁部分の他方上に形成され且つ前記膜に接続された第2の壁(30)とを含むことを特徴とする請求項2に記載のデバイス。
- 前記リング状構造体の表面上に形成された第3の電極(10b)を更に含むことを特徴とする請求項4に記載のデバイス。
- 前記コンプライアント支持構造体が、
第1の壁(32)と、
内側周縁部分と外側周縁部分とを有し、前記第1のリング状構造体の前記内側周縁部分及び外側周縁部分の一方が前記第1の壁上に形成された第1のリング状構造体(34)と、
前記第1のリング状構造体の内側周縁部分及び外側周縁部分の他方の上に形成された第2の壁(36)と、
前記第1のリング状構造体の上方にあって、内側周縁部分と外側周縁部分とを有し、前記第2のリング状構造体の内側周縁部分及び外側周縁部分の一方が前記第2の壁上に形成された第2のリング状構造体(38)と、
前記第2のリング状構造体の内側周縁部分及び外側周縁部分の他方の上に形成され、且つ前記膜に接続されている第3の壁(40)と、
を含むことを特徴とする請求項2に記載のデバイス。 - コンプライアント支持構造体(22又は24)と、
前記コンプライアント支持構造体により第1のキャビティ(20)上で支持される第1の膜(8)と、
前記第1の膜によって支持される第1の電極(12)と、
前記第1の電極と共にキャパシタを形成し、前記第1の電極との間に前記第1のキャビティが配置された第2の電極(10)と、
前記コンプライアント支持構造体により第2のキャビティ(20)上で支持される第2の膜(8)と、
前記第2の膜によって支持され、且つ前記第1の電極に電気的に接続された第3の電極(12)と、
前記第2の電極に電気的に接続され、且つ前記第3の電極と共にキャパシタを形成するように配置された第4の電極(10)と、
を含み、
前記第2のキャビティが前記第3の電極と第4の電極との間に配置され、前記コンプライアント支持構造体の一部分が、前記第1のキャビティと第2のキャビティとの間に配置されていることを特徴とするcMUTセルアレイ。 - 前記コンプライアント支持構造体の断面が片持ち梁に似ていることを特徴とする請求項7に記載のcMUTセルアレイ。
- 前記コンプライアント支持構造体の断面が二重片持ち梁に似ていることを特徴とする請求項7に記載のcMUTセルアレイ。
- 基材(4)と、
複数のコンプライアント支持構造体(22又は24)と、
前記コンプライアント支持構造体によりキャビティ上で支持される膜(8)と、
前記膜によって支持される第1の電極(12)と、
前記第1の電極と共にキャパシタンスを形成する第2の電極(10)と、
を含み、
前記キャビティが前記第1の電極と第2の電極との間に配置され、前記コンプライアント支持構造体の各々が前記膜の収縮/膨張中にサイズ又は形状が変化することを特徴とするcMUTセル。
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US10/748,920 US7030536B2 (en) | 2003-12-29 | 2003-12-29 | Micromachined ultrasonic transducer cells having compliant support structure |
US10/748,920 | 2003-12-29 |
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JP2005193374A true JP2005193374A (ja) | 2005-07-21 |
JP2005193374A5 JP2005193374A5 (ja) | 2008-02-14 |
JP4869593B2 JP4869593B2 (ja) | 2012-02-08 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007527285A (ja) * | 2004-02-27 | 2007-09-27 | ジョージア テック リサーチ コーポレイション | 多要素電極cmut素子及び製作方法 |
WO2009039640A1 (en) * | 2007-09-28 | 2009-04-02 | University Of Toronto | A system, apparatus and method for applying mechanical force to a material |
KR20120066503A (ko) * | 2010-12-14 | 2012-06-22 | 삼성전자주식회사 | 초음파 변환기의 셀, 채널 및 이를 포함하는 초음파 변환기 |
Families Citing this family (111)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7030536B2 (en) * | 2003-12-29 | 2006-04-18 | General Electric Company | Micromachined ultrasonic transducer cells having compliant support structure |
US7285897B2 (en) * | 2003-12-31 | 2007-10-23 | General Electric Company | Curved micromachined ultrasonic transducer arrays and related methods of manufacture |
US20050177045A1 (en) * | 2004-02-06 | 2005-08-11 | Georgia Tech Research Corporation | cMUT devices and fabrication methods |
EP1761998A4 (en) * | 2004-02-27 | 2011-05-11 | Georgia Tech Res Inst | CMUT DEVICES AND METHODS OF MAKING THE SAME |
US7646133B2 (en) * | 2004-02-27 | 2010-01-12 | Georgia Tech Research Corporation | Asymmetric membrane cMUT devices and fabrication methods |
US8309428B2 (en) * | 2004-09-15 | 2012-11-13 | Sonetics Ultrasound, Inc. | Capacitive micromachined ultrasonic transducer |
US8658453B2 (en) * | 2004-09-15 | 2014-02-25 | Sonetics Ultrasound, Inc. | Capacitive micromachined ultrasonic transducer |
US7888709B2 (en) * | 2004-09-15 | 2011-02-15 | Sonetics Ultrasound, Inc. | Capacitive micromachined ultrasonic transducer and manufacturing method |
US7489593B2 (en) * | 2004-11-30 | 2009-02-10 | Vermon | Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor |
US7037746B1 (en) * | 2004-12-27 | 2006-05-02 | General Electric Company | Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane |
US8105941B2 (en) * | 2005-05-18 | 2012-01-31 | Kolo Technologies, Inc. | Through-wafer interconnection |
EP1882127A2 (en) * | 2005-05-18 | 2008-01-30 | Kolo Technologies, Inc. | Micro-electro-mechanical transducers |
US7589456B2 (en) * | 2005-06-14 | 2009-09-15 | Siemens Medical Solutions Usa, Inc. | Digital capacitive membrane transducer |
CN101558552B (zh) * | 2005-06-17 | 2017-05-31 | 科隆科技公司 | 具有绝缘延伸部的微机电换能器 |
US20070038088A1 (en) * | 2005-08-04 | 2007-02-15 | Rich Collin A | Medical imaging user interface and control scheme |
US8764664B2 (en) | 2005-11-28 | 2014-07-01 | Vizyontech Imaging, Inc. | Methods and apparatus for conformable medical data acquisition pad and configurable imaging system |
WO2007115283A2 (en) * | 2006-04-04 | 2007-10-11 | Kolo Technologies, Inc. | Modulation in micromachined ultrasonic transducers |
US7745973B2 (en) * | 2006-05-03 | 2010-06-29 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion |
JP4979283B2 (ja) * | 2006-06-29 | 2012-07-18 | 株式会社日立製作所 | 半導体装置の製造方法および半導体装置 |
WO2008038454A1 (fr) * | 2006-09-28 | 2008-04-03 | Hitachi, Ltd. | Sonde à ultrasons et dispositif d'imagerie à ultrasons |
JP4271253B2 (ja) * | 2006-10-11 | 2009-06-03 | オリンパスメディカルシステムズ株式会社 | 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡 |
CN101772383B (zh) * | 2007-07-31 | 2011-11-02 | 皇家飞利浦电子股份有限公司 | 具有高k电介质的cmut |
US8792658B2 (en) * | 2007-08-30 | 2014-07-29 | General Monitors, Inc. | Techniques for protection of acoustic devices |
US7605466B2 (en) | 2007-10-15 | 2009-10-20 | General Electric Company | Sealed wafer packaging of microelectromechanical systems |
US7915696B2 (en) * | 2007-10-24 | 2011-03-29 | General Electric Company | Electrical connection through a substrate to a microelectromechanical device |
EP2218094A1 (en) * | 2007-12-03 | 2010-08-18 | Kolo Technologies, Inc. | Through-wafer interconnections in electrostatic transducer and array |
US8363514B2 (en) * | 2007-12-03 | 2013-01-29 | Kolo Technologies, Inc. | Variable operating voltage in micromachined ultrasonic transducer |
EP2217151A1 (en) * | 2007-12-03 | 2010-08-18 | Kolo Technologies, Inc. | Ultrasound scanner built with capacitive micromachined ultrasonic transducers (cmuts) |
JP5337813B2 (ja) * | 2007-12-03 | 2013-11-06 | コロ テクノロジーズ インコーポレイテッド | デュアルモード動作マイクロマシン超音波トランスデューサ |
US8767514B2 (en) * | 2007-12-03 | 2014-07-01 | Kolo Technologies, Inc. | Telemetric sensing using micromachined ultrasonic transducer |
CN101874343B (zh) * | 2007-12-03 | 2014-09-10 | 科隆科技公司 | 静电换能器阵列的封装和连接 |
US8345513B2 (en) * | 2007-12-03 | 2013-01-01 | Kolo Technologies, Inc. | Stacked transducing devices |
US8850893B2 (en) | 2007-12-05 | 2014-10-07 | Valtion Teknillinen Tutkimuskeskus | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
FI20075879A0 (fi) * | 2007-12-05 | 2007-12-05 | Valtion Teknillinen | Laite paineen, äänenpaineen vaihtelun, magneettikentän, kiihtyvyyden, tärinän ja kaasun koostumuksen mittaamiseksi |
US20090190254A1 (en) * | 2008-01-29 | 2009-07-30 | Seagate Technology Llc | Micromachined mover |
EP2254476A4 (en) * | 2008-02-29 | 2013-10-30 | Stc Unm | ULTRASONIC THERAPEUTIC-ON-CHIP TRANSDUCER WITH INTEGRATED ULTRASONIC IMAGING SYSTEM, AND METHODS OF MAKING AND USING THE TRANSDUCER |
JP5376982B2 (ja) * | 2008-06-30 | 2013-12-25 | キヤノン株式会社 | 機械電気変換素子と機械電気変換装置および機械電気変換装置の作製方法 |
US8828520B2 (en) * | 2008-07-01 | 2014-09-09 | Alcatel Lucent | Micro-posts having improved uniformity and a method of manufacture thereof |
US9310339B2 (en) * | 2008-07-30 | 2016-04-12 | The Boeing Company | Hybrid inspection system and method employing both air-coupled and liquid-coupled transducers |
US8315125B2 (en) * | 2009-03-18 | 2012-11-20 | Sonetics Ultrasound, Inc. | System and method for biasing CMUT elements |
CN101898743A (zh) * | 2009-05-27 | 2010-12-01 | 漆斌 | 微加工超声换能器 |
US8451693B2 (en) * | 2009-08-25 | 2013-05-28 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducer having compliant post structure |
US8531919B2 (en) * | 2009-09-21 | 2013-09-10 | The Hong Kong Polytechnic University | Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance |
IT1397115B1 (it) * | 2009-11-27 | 2012-12-28 | St Microelectronics Rousset | Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche. |
US9079494B2 (en) | 2010-07-01 | 2015-07-14 | Mill Mountain Capital, LLC | Systems, devices and methods for vehicles |
US8359932B2 (en) * | 2010-07-19 | 2013-01-29 | Goodrich Corporation | Systems and methods for mounting landing gear strain sensors |
EP2420470B1 (en) * | 2010-08-18 | 2015-10-14 | Nxp B.V. | MEMS Microphone |
US8409102B2 (en) | 2010-08-31 | 2013-04-02 | General Electric Company | Multi-focus ultrasound system and method |
US9148712B2 (en) | 2010-12-10 | 2015-09-29 | Infineon Technologies Ag | Micromechanical digital loudspeaker |
US20130331705A1 (en) * | 2011-03-22 | 2013-12-12 | Koninklijke Philips Electronics N.V. | Ultrasonic cmut with suppressed acoustic coupling to the substrate |
US8622752B2 (en) * | 2011-04-13 | 2014-01-07 | Teradyne, Inc. | Probe-card interposer constructed using hexagonal modules |
KR101761819B1 (ko) * | 2011-08-24 | 2017-07-26 | 삼성전자주식회사 | 초음파 변환기 및 그 제조 방법 |
DE102011084537B4 (de) * | 2011-10-14 | 2017-05-04 | Robert Bosch Gmbh | Ultraschallsensorarray |
WO2013090282A1 (en) * | 2011-12-12 | 2013-06-20 | Clay Skelton | Systems, devices and methods for vehicles |
US10194017B2 (en) * | 2011-12-12 | 2019-01-29 | Mill Mountain Capital, LLC | Systems, devices and methods for vehicles |
WO2014123922A1 (en) | 2013-02-05 | 2014-08-14 | Butterfly Network, Inc. | Cmos ultrasonic transducers and related apparatus and methods |
WO2014151525A2 (en) | 2013-03-15 | 2014-09-25 | Butterfly Network, Inc. | Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same |
KR20160003650A (ko) | 2013-03-15 | 2016-01-11 | 버터플라이 네트워크, 인크. | 모놀리식 초음파 이미징 디바이스, 시스템 및 방법 |
US9667889B2 (en) | 2013-04-03 | 2017-05-30 | Butterfly Network, Inc. | Portable electronic devices with integrated imaging capabilities |
TWI682817B (zh) | 2013-07-23 | 2020-01-21 | 美商蝴蝶網路公司 | 可互連的超音波換能器探頭以及相關的方法和設備 |
JP2015080011A (ja) * | 2013-10-15 | 2015-04-23 | セイコーエプソン株式会社 | 振動子、発振器、電子機器及び移動体 |
KR102163729B1 (ko) * | 2013-11-20 | 2020-10-08 | 삼성전자주식회사 | 전기 음향 변환기 |
AU2015247501B2 (en) | 2014-04-18 | 2018-11-29 | Butterfly Network, Inc. | Ultrasonic imaging compression methods and apparatus |
WO2015161157A1 (en) | 2014-04-18 | 2015-10-22 | Butterfly Network, Inc. | Architecture of single substrate ultrasonic imaging devices, related apparatuses, and methods |
AU2015247484B2 (en) | 2014-04-18 | 2020-05-14 | Butterfly Network, Inc. | Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods |
US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
US9482592B2 (en) * | 2014-09-24 | 2016-11-01 | General Monitors, Inc. | Directional ultrasonic gas leak detector |
US10695034B2 (en) | 2015-05-15 | 2020-06-30 | Butterfly Network, Inc. | Autonomous ultrasound probe and related apparatus and methods |
US11147531B2 (en) | 2015-08-12 | 2021-10-19 | Sonetics Ultrasound, Inc. | Method and system for measuring blood pressure using ultrasound by emitting push pulse to a blood vessel |
US9987661B2 (en) | 2015-12-02 | 2018-06-05 | Butterfly Network, Inc. | Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods |
US10445547B2 (en) | 2016-05-04 | 2019-10-15 | Invensense, Inc. | Device mountable packaging of ultrasonic transducers |
US10315222B2 (en) | 2016-05-04 | 2019-06-11 | Invensense, Inc. | Two-dimensional array of CMOS control elements |
US10325915B2 (en) | 2016-05-04 | 2019-06-18 | Invensense, Inc. | Two-dimensional array of CMOS control elements |
US10670716B2 (en) | 2016-05-04 | 2020-06-02 | Invensense, Inc. | Operating a two-dimensional array of ultrasonic transducers |
US10656255B2 (en) | 2016-05-04 | 2020-05-19 | Invensense, Inc. | Piezoelectric micromachined ultrasonic transducer (PMUT) |
US10706835B2 (en) | 2016-05-10 | 2020-07-07 | Invensense, Inc. | Transmit beamforming of a two-dimensional array of ultrasonic transducers |
US10441975B2 (en) | 2016-05-10 | 2019-10-15 | Invensense, Inc. | Supplemental sensor modes and systems for ultrasonic transducers |
US10452887B2 (en) | 2016-05-10 | 2019-10-22 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers |
US11673165B2 (en) | 2016-05-10 | 2023-06-13 | Invensense, Inc. | Ultrasonic transducer operable in a surface acoustic wave (SAW) mode |
US10408797B2 (en) | 2016-05-10 | 2019-09-10 | Invensense, Inc. | Sensing device with a temperature sensor |
US10539539B2 (en) | 2016-05-10 | 2020-01-21 | Invensense, Inc. | Operation of an ultrasonic sensor |
US10632500B2 (en) * | 2016-05-10 | 2020-04-28 | Invensense, Inc. | Ultrasonic transducer with a non-uniform membrane |
US10562070B2 (en) | 2016-05-10 | 2020-02-18 | Invensense, Inc. | Receive operation of an ultrasonic sensor |
US10600403B2 (en) | 2016-05-10 | 2020-03-24 | Invensense, Inc. | Transmit operation of an ultrasonic sensor |
US11047979B2 (en) | 2016-07-27 | 2021-06-29 | Sound Technology Inc. | Ultrasound transducer array |
US10196261B2 (en) | 2017-03-08 | 2019-02-05 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
DE102017206766A1 (de) | 2017-04-21 | 2018-10-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mems-wandler zum interagieren mit einem volumenstrom eines fluids und verfahren zum herstellen desselben |
US10891461B2 (en) | 2017-05-22 | 2021-01-12 | Invensense, Inc. | Live fingerprint detection utilizing an integrated ultrasound and infrared sensor |
US10474862B2 (en) | 2017-06-01 | 2019-11-12 | Invensense, Inc. | Image generation in an electronic device using ultrasonic transducers |
US10512936B2 (en) | 2017-06-21 | 2019-12-24 | Butterfly Network, Inc. | Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections |
US10643052B2 (en) | 2017-06-28 | 2020-05-05 | Invensense, Inc. | Image generation in an electronic device using ultrasonic transducers |
US10936841B2 (en) | 2017-12-01 | 2021-03-02 | Invensense, Inc. | Darkfield tracking |
US10997388B2 (en) | 2017-12-01 | 2021-05-04 | Invensense, Inc. | Darkfield contamination detection |
US10984209B2 (en) | 2017-12-01 | 2021-04-20 | Invensense, Inc. | Darkfield modeling |
US11151355B2 (en) | 2018-01-24 | 2021-10-19 | Invensense, Inc. | Generation of an estimated fingerprint |
US10755067B2 (en) | 2018-03-22 | 2020-08-25 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers |
US10936843B2 (en) | 2018-12-28 | 2021-03-02 | Invensense, Inc. | Segmented image acquisition |
JP7224190B2 (ja) | 2019-01-15 | 2023-02-17 | 株式会社日立製作所 | 超音波トランスデューサ、その製造方法および超音波撮像装置 |
WO2020263875A1 (en) | 2019-06-24 | 2020-12-30 | Invensense, Inc. | Fake finger detection using ridge features |
US11216681B2 (en) | 2019-06-25 | 2022-01-04 | Invensense, Inc. | Fake finger detection based on transient features |
US11176345B2 (en) | 2019-07-17 | 2021-11-16 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
US11216632B2 (en) | 2019-07-17 | 2022-01-04 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
US11232549B2 (en) | 2019-08-23 | 2022-01-25 | Invensense, Inc. | Adapting a quality threshold for a fingerprint image |
US11392789B2 (en) | 2019-10-21 | 2022-07-19 | Invensense, Inc. | Fingerprint authentication using a synthetic enrollment image |
CN115461231A (zh) * | 2019-10-25 | 2022-12-09 | 京东方科技集团股份有限公司 | 电容式微机械超声换能单元及其制备方法、面板、装置 |
US11522469B2 (en) * | 2019-12-06 | 2022-12-06 | Alliance For Sustainable Energy, Llc | Electric machines as motors and power generators |
EP4100176A1 (en) | 2020-03-09 | 2022-12-14 | InvenSense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
US11243300B2 (en) | 2020-03-10 | 2022-02-08 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor |
US11328165B2 (en) | 2020-04-24 | 2022-05-10 | Invensense, Inc. | Pressure-based activation of fingerprint spoof detection |
FR3114255B1 (fr) * | 2020-09-18 | 2023-05-05 | Moduleus | Transducteur CMUT |
DE102022201921A1 (de) | 2022-02-24 | 2023-08-24 | Robert Bosch Gesellschaft mit beschränkter Haftung | Messarray, Verfahren zum Ansteuern eines Messarrays, Verfahren zum Auswerten eines Messarrays und Verfahren zum Betreiben eines Messarrays |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09500247A (ja) * | 1993-07-14 | 1997-01-07 | ザ ユニバシティ オブ ブリティッシュ コロンビア | 高圧低インピーダンス静電トランスデューサ |
US6025951A (en) * | 1996-11-27 | 2000-02-15 | National Optics Institute | Light modulating microdevice and method |
US6329738B1 (en) * | 1999-03-30 | 2001-12-11 | Massachusetts Institute Of Technology | Precision electrostatic actuation and positioning |
WO2001097562A2 (en) * | 2000-06-15 | 2001-12-20 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
WO2001097559A2 (en) * | 2000-06-15 | 2001-12-20 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers. |
WO2002005413A2 (en) * | 2000-07-11 | 2002-01-17 | Honeywell International Inc. | Mems actuator with lower power consumption and lower cost simplified fabrication |
WO2002015636A2 (en) * | 2000-08-11 | 2002-02-21 | Knowles Electronics, Llc | Miniature broadband transducer |
JP2003005102A (ja) * | 2001-04-19 | 2003-01-08 | Nikon Corp | 薄膜弾性構造体及びその製造方法並びにこれを用いたミラーデバイス及び光スイッチ |
WO2003031321A2 (en) * | 2001-07-24 | 2003-04-17 | Rockwell Scientific Licensing, Llc | Hybrid mems fabrication method and new optical mems device |
Family Cites Families (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US559622A (en) * | 1896-05-05 | Check sales or order book | ||
GB2076970A (en) * | 1980-05-19 | 1981-12-09 | Jackson Brothers London Ltd | Displacement transducers |
US5146435A (en) | 1989-12-04 | 1992-09-08 | The Charles Stark Draper Laboratory, Inc. | Acoustic transducer |
US6140143A (en) | 1992-02-10 | 2000-10-31 | Lucas Novasensor Inc. | Method of producing a buried boss diaphragm structure in silicon |
WO1994030030A1 (en) | 1993-06-04 | 1994-12-22 | The Regents Of The University Of California | Microfabricated acoustic source and receiver |
US5596222A (en) | 1994-08-12 | 1997-01-21 | The Charles Stark Draper Laboratory, Inc. | Wafer of transducer chips |
US5452268A (en) | 1994-08-12 | 1995-09-19 | The Charles Stark Draper Laboratory, Inc. | Acoustic transducer with improved low frequency response |
US5527741A (en) | 1994-10-11 | 1996-06-18 | Martin Marietta Corporation | Fabrication and structures of circuit modules with flexible interconnect layers |
US5894452A (en) | 1994-10-21 | 1999-04-13 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated ultrasonic immersion transducer |
US5619476A (en) | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
US5600610A (en) * | 1995-01-31 | 1997-02-04 | Gas Research Institute | Electrostatic transducer and method for manufacturing same |
US5828394A (en) | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
AU4801297A (en) | 1996-10-07 | 1998-05-05 | Lucas Novasensor | Silicon at least 5 micron high acute cavity with channel by oxidizing fusion bonding and stop etching |
DE19643893A1 (de) | 1996-10-30 | 1998-05-07 | Siemens Ag | Ultraschallwandler in Oberflächen-Mikromechanik |
US6071819A (en) * | 1997-01-24 | 2000-06-06 | California Institute Of Technology | Flexible skin incorporating mems technology |
US6384952B1 (en) * | 1997-03-27 | 2002-05-07 | Mems Optical Inc. | Vertical comb drive actuated deformable mirror device and method |
US5982709A (en) | 1998-03-31 | 1999-11-09 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic transducers and method of microfabrication |
US6109113A (en) * | 1998-06-11 | 2000-08-29 | Delco Electronics Corp. | Silicon micromachined capacitive pressure sensor and method of manufacture |
GB9815992D0 (en) | 1998-07-23 | 1998-09-23 | Secr Defence | Improvements in and relating to microchemical devices |
US6295247B1 (en) | 1998-10-02 | 2001-09-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined rayleigh, lamb, and bulk wave capacitive ultrasonic transducers |
US6346459B1 (en) | 1999-02-05 | 2002-02-12 | Silicon Wafer Technologies, Inc. | Process for lift off and transfer of semiconductor devices onto an alien substrate |
US6292435B1 (en) | 1999-05-11 | 2001-09-18 | Agilent Technologies, Inc. | Circuit and method for exciting a micro-machined transducer to have low second order harmonic transmit energy |
US6381197B1 (en) | 1999-05-11 | 2002-04-30 | Bernard J Savord | Aperture control and apodization in a micro-machined ultrasonic transducer |
US6271620B1 (en) | 1999-05-20 | 2001-08-07 | Sen Corporation | Acoustic transducer and method of making the same |
US6239482B1 (en) | 1999-06-21 | 2001-05-29 | General Electric Company | Integrated circuit package including window frame |
US6246158B1 (en) | 1999-06-24 | 2001-06-12 | Sensant Corporation | Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same |
US6262946B1 (en) | 1999-09-29 | 2001-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling |
US6430109B1 (en) | 1999-09-30 | 2002-08-06 | The Board Of Trustees Of The Leland Stanford Junior University | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections |
US6242282B1 (en) | 1999-10-04 | 2001-06-05 | General Electric Company | Circuit chip package and fabrication method |
US6359367B1 (en) | 1999-12-06 | 2002-03-19 | Acuson Corporation | Micromachined ultrasonic spiral arrays for medical diagnostic imaging |
US6493288B2 (en) | 1999-12-17 | 2002-12-10 | The Board Of Trustees Of The Leland Stanford Junior University | Wide frequency band micromachined capacitive microphone/hydrophone and method |
US6474786B2 (en) | 2000-02-24 | 2002-11-05 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined two-dimensional array droplet ejectors |
US6639339B1 (en) * | 2000-05-11 | 2003-10-28 | The Charles Stark Draper Laboratory, Inc. | Capacitive ultrasound transducer |
US6735008B2 (en) * | 2000-07-31 | 2004-05-11 | Corning Incorporated | MEMS mirror and method of fabrication |
US6862254B2 (en) | 2000-10-19 | 2005-03-01 | Sensant Corporation | Microfabricated ultrasonic transducer with suppressed substrate modes |
US6558330B1 (en) | 2000-12-06 | 2003-05-06 | Acuson Corporation | Stacked and filled capacitive microelectromechanical ultrasonic transducer for medical diagnostic ultrasound systems |
US6795374B2 (en) | 2001-09-07 | 2004-09-21 | Siemens Medical Solutions Usa, Inc. | Bias control of electrostatic transducers |
US6836029B2 (en) * | 2001-11-28 | 2004-12-28 | International Business Machines Corporation | Micro-electromechanical switch having a conductive compressible electrode |
US6659954B2 (en) | 2001-12-19 | 2003-12-09 | Koninklijke Philips Electronics Nv | Micromachined ultrasound transducer and method for fabricating same |
FR2837294A1 (fr) * | 2002-03-12 | 2003-09-19 | Koninkl Philips Electronics Nv | Dispositif pour accelerer l'interpretation d'un programme en langage interprete |
US6785039B2 (en) * | 2002-06-03 | 2004-08-31 | Pts Corporation | Optical routing elements |
US6676602B1 (en) | 2002-07-25 | 2004-01-13 | Siemens Medical Solutions Usa, Inc. | Two dimensional array switching for beamforming in a volume |
US6958255B2 (en) * | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
US6831394B2 (en) * | 2002-12-11 | 2004-12-14 | General Electric Company | Backing material for micromachined ultrasonic transducer devices |
US6865140B2 (en) * | 2003-03-06 | 2005-03-08 | General Electric Company | Mosaic arrays using micromachined ultrasound transducers |
US7030536B2 (en) * | 2003-12-29 | 2006-04-18 | General Electric Company | Micromachined ultrasonic transducer cells having compliant support structure |
US7037746B1 (en) * | 2004-12-27 | 2006-05-02 | General Electric Company | Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane |
-
2003
- 2003-12-29 US US10/748,920 patent/US7030536B2/en not_active Expired - Lifetime
-
2004
- 2004-12-28 JP JP2004380343A patent/JP4869593B2/ja not_active Expired - Fee Related
- 2004-12-29 DE DE102004063740A patent/DE102004063740A1/de active Granted
-
2006
- 2006-02-07 US US11/348,984 patent/US7408283B2/en not_active Expired - Lifetime
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09500247A (ja) * | 1993-07-14 | 1997-01-07 | ザ ユニバシティ オブ ブリティッシュ コロンビア | 高圧低インピーダンス静電トランスデューサ |
US6025951A (en) * | 1996-11-27 | 2000-02-15 | National Optics Institute | Light modulating microdevice and method |
US6329738B1 (en) * | 1999-03-30 | 2001-12-11 | Massachusetts Institute Of Technology | Precision electrostatic actuation and positioning |
WO2001097562A2 (en) * | 2000-06-15 | 2001-12-20 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
WO2001097559A2 (en) * | 2000-06-15 | 2001-12-20 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers. |
WO2002005413A2 (en) * | 2000-07-11 | 2002-01-17 | Honeywell International Inc. | Mems actuator with lower power consumption and lower cost simplified fabrication |
WO2002015636A2 (en) * | 2000-08-11 | 2002-02-21 | Knowles Electronics, Llc | Miniature broadband transducer |
JP2003005102A (ja) * | 2001-04-19 | 2003-01-08 | Nikon Corp | 薄膜弾性構造体及びその製造方法並びにこれを用いたミラーデバイス及び光スイッチ |
WO2003031321A2 (en) * | 2001-07-24 | 2003-04-17 | Rockwell Scientific Licensing, Llc | Hybrid mems fabrication method and new optical mems device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007527285A (ja) * | 2004-02-27 | 2007-09-27 | ジョージア テック リサーチ コーポレイション | 多要素電極cmut素子及び製作方法 |
WO2009039640A1 (en) * | 2007-09-28 | 2009-04-02 | University Of Toronto | A system, apparatus and method for applying mechanical force to a material |
KR20120066503A (ko) * | 2010-12-14 | 2012-06-22 | 삼성전자주식회사 | 초음파 변환기의 셀, 채널 및 이를 포함하는 초음파 변환기 |
KR101630759B1 (ko) | 2010-12-14 | 2016-06-16 | 삼성전자주식회사 | 초음파 변환기의 셀, 채널 및 이를 포함하는 초음파 변환기 |
Also Published As
Publication number | Publication date |
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US7408283B2 (en) | 2008-08-05 |
US7030536B2 (en) | 2006-04-18 |
JP4869593B2 (ja) | 2012-02-08 |
DE102004063740A1 (de) | 2005-07-28 |
US20050146240A1 (en) | 2005-07-07 |
US20060125348A1 (en) | 2006-06-15 |
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