JP4861684B2 - 液滴イジェクタ及び液滴イジェクタ形成方法 - Google Patents
液滴イジェクタ及び液滴イジェクタ形成方法 Download PDFInfo
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- JP4861684B2 JP4861684B2 JP2005328877A JP2005328877A JP4861684B2 JP 4861684 B2 JP4861684 B2 JP 4861684B2 JP 2005328877 A JP2005328877 A JP 2005328877A JP 2005328877 A JP2005328877 A JP 2005328877A JP 4861684 B2 JP4861684 B2 JP 4861684B2
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- droplet ejector
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- temperature
- pixel forming
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- 239000010410 layer Substances 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 47
- 239000010408 film Substances 0.000 claims description 34
- 239000010409 thin film Substances 0.000 claims description 34
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- 239000002184 metal Substances 0.000 claims description 30
- 238000000059 patterning Methods 0.000 claims description 11
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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- 239000012212 insulator Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
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- 229910001338 liquidmetal Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
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- 230000003071 parasitic effect Effects 0.000 description 2
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- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 235000019219 chocolate Nutrition 0.000 description 1
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- 239000010949 copper Substances 0.000 description 1
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- 238000010292 electrical insulation Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14153—Structures including a sensor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
Claims (4)
- 複数の画素形成素子を含み、本液滴イジェクタの表面上にある画素形成素子ゾーンと、
電気抵抗を有し本液滴イジェクタ表面上の前記画素形成素子ゾーン内に配置された薄膜又は厚膜のヒータ素子であって、前記複数の画素形成素子のうち少なくとも1個を取り巻くヒータ素子と、
前記ヒータ素子に係る温度フィードバック制御に使用可能な少なくとも1個の薄膜又は厚膜の温度センサと、
を備える液滴イジェクタ。 - 請求項1記載の液滴イジェクタにおいて、前記温度センサが、その電気抵抗の温度係数が正である素材即ちPTC素材又は負である素材即ちNTC素材から形成された液滴イジェクタ。
- 複数の画素形成素子を含む画素形成素子ゾーンが形成される領域がその表面上に定められているジェットスタックを準備するステップと、
誘電体層を前記ジェットスタック表面上に少なくとも1層形成するステップと、
薄膜又は厚膜の金属層を前記誘電体層上に少なくとも1層形成するステップと、
電気的抵抗を有する薄膜又は厚膜のヒータ素子であって、前記複数の画素形成素子のうち少なくとも1個を取り巻くヒータ素子、前記複数の画素形成素子の各電極、及び、前記ヒータ素子に係る温度フィードバック制御に使用可能な少なくとも1個の薄膜又は厚膜の温度センサ素子を前記金属層内にパターニングするステップと、
電気的接続が行われる前記金属層上の領域が露呈するよう、前記金属層上に保護層を形成するステップと、
を有する液滴イジェクタ形成方法。 - 請求項3記載の方法において、前記金属層を形成する素材が、その電気抵抗の温度係数が正である素材即ちPTC素材又は負である素材即ちNTC素材である方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/990,110 | 2004-11-15 | ||
US10/990,110 US7445315B2 (en) | 2004-11-15 | 2004-11-15 | Thin film and thick film heater and control architecture for a liquid drop ejector |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006142823A JP2006142823A (ja) | 2006-06-08 |
JP4861684B2 true JP4861684B2 (ja) | 2012-01-25 |
Family
ID=36385814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005328877A Expired - Fee Related JP4861684B2 (ja) | 2004-11-15 | 2005-11-14 | 液滴イジェクタ及び液滴イジェクタ形成方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7445315B2 (ja) |
JP (1) | JP4861684B2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4448433B2 (ja) * | 2004-12-03 | 2010-04-07 | アルプス電気株式会社 | サーマルヘッドの製造方法 |
US7517043B2 (en) * | 2004-12-16 | 2009-04-14 | Xerox Corporation | Fluidic structures |
JP4957452B2 (ja) * | 2007-08-22 | 2012-06-20 | ブラザー工業株式会社 | 液体移送装置 |
DE102009041563A1 (de) * | 2009-09-15 | 2011-03-24 | Multivac Sepp Haggenmüller Gmbh & Co. Kg | Verpackungsmaschine mit mehreren Heizelementen |
WO2013019181A1 (en) * | 2011-07-29 | 2013-02-07 | Hewlett-Packard Development Company, L.P. | Heater controller and method thereof |
US20130270255A1 (en) * | 2012-04-17 | 2013-10-17 | Gerald Ho Kim | Silicon-Based Cooling Package With Preheating Capability For Compact Heat-Generating Devices |
JP6111886B2 (ja) * | 2013-06-19 | 2017-04-12 | セイコーエプソン株式会社 | 液体噴射装置 |
KR101848575B1 (ko) * | 2013-12-16 | 2018-04-12 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 복수의 유체 슬롯을 갖는 프린트헤드 |
JP2015184206A (ja) * | 2014-03-25 | 2015-10-22 | Koa株式会社 | 電流検出装置 |
US10009993B2 (en) * | 2014-04-18 | 2018-06-26 | Xerox Corporation | Circuit board reflow of components using on board copper traces as heating element |
JP6920848B2 (ja) | 2017-03-24 | 2021-08-18 | 東芝テック株式会社 | 液体吐出ヘッド及び液体吐出装置 |
JP2018161787A (ja) * | 2017-03-24 | 2018-10-18 | 東芝テック株式会社 | 液体吐出ヘッド及び液体吐出装置 |
JP7383933B2 (ja) * | 2019-08-21 | 2023-11-21 | 株式会社リコー | 加熱装置、乾燥装置、印刷装置 |
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US4815003A (en) | 1987-06-19 | 1989-03-21 | General Electric Company | Structured design method for high density standard cell and macrocell layout of VLSI chips |
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KR960013670B1 (ko) | 1992-08-18 | 1996-10-10 | 삼성전자 주식회사 | 레이저 프린터의 온도 제어회로 |
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JP3133949B2 (ja) | 1995-08-25 | 2001-02-13 | キヤノン株式会社 | カラーフィルタの製造方法及び製造装置 |
US5881451A (en) | 1996-06-21 | 1999-03-16 | Xerox Corporation | Sensing the temperature of a printhead in an ink jet printer |
JP3381761B2 (ja) * | 1997-05-07 | 2003-03-04 | セイコーエプソン株式会社 | インクジェット式記録ヘッド、グラッフィックデータの印刷方法、及びインク滴吐出能力回復方法 |
US6019814A (en) | 1997-11-25 | 2000-02-01 | Xerox Corporation | Method of manufacturing 3D parts using a sacrificial material |
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-
2004
- 2004-11-15 US US10/990,110 patent/US7445315B2/en active Active
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2005
- 2005-11-14 JP JP2005328877A patent/JP4861684B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2006142823A (ja) | 2006-06-08 |
US7445315B2 (en) | 2008-11-04 |
US20060103695A1 (en) | 2006-05-18 |
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