JP4854313B2 - Control device in transfer device - Google Patents

Description

  The present invention relates to a control device for a transfer device that transfers a concavo-convex pattern formed on the surface of a mold to the surface of a molded product, and more particularly to a control device for a transfer device that sets molding conditions while displaying the screen.

  In recent years, a mold (template, stamper) is formed by forming a fine pattern on a quartz substrate or the like by an electron beam drawing method or the like, and the mold is applied to a resist film formed on the surface of the substrate to be molded as a predetermined pressure. Research and development has been conducted on nanoimprint technology for transferring a pattern formed on the mold by pressing (see Non-Patent Document 1).

  The fine transfer device based on the nanoimprint technology performs literally fine transfer of a molding material on a substrate, for example, by pressing a mold master to form the molding material into a desired shape. Roughly speaking, the mechanical operation is to relatively approach and separate the pair of substrates and the mold master, but there are various types of molding materials depending on the application, for example, There are glass for pickup lenses, resins for compact discs (CD) and digital versatile discs (DVD), and photo-curable resins for photomasks in semiconductors.

  In addition to these molding material problems, in fine transfer, in order to successfully perform the pressing operation and the drawing operation, various intervening parameters such as pressing force, pressing force switching position, time, substrate side and master side are required. The mold temperature, inert gas flow rate, molding chamber vacuum, etc. must be controlled. In molding by a fine transfer device, it is necessary to set molding conditions correctly in that the quality of these parameters directly affects the quality of the molded product. However, on the other hand, the number of data to be set is very large, and how to determine the numerical value of each data has a situation that requires skill in the field, so far as a control device for fine transfer The mainstream is based on a personal computer so that the skilled person can freely set various parameters.

Some glass molding machines perform position control based on a CNC control device that is frequently used in machine tools (see Patent Document 1 below).
Japanese Patent Application Laid-Open No. 07-172850 Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology

  By the way, in the case of a control device using a personal computer for the fine transfer device at present, the demand for the fine transfer device is increasing. The fact that an operator who understands commands unique to numerical control is necessary for setting and correcting various parameters is a bottleneck. Accordingly, there is a strong demand for enabling a general, unskilled operator to set molding conditions.

  The present invention has been made to solve these problems, and an object of the present invention is to provide a control device for a transfer device that can easily set molding conditions on a simple screen.

  In order to solve the above problem, the control device in the transfer device according to the present invention moves the master mold relatively opposite to a predetermined position with respect to the molding material on the substrate and moves the master mold on the molding material on the substrate. Servo motor drive means for operating the master mold or the molding material so as to reflect the fine shape formed in the mold and then separate the fine shape surface of the master mold from the molding material. A control device in the transfer device, the drive unit unit provided corresponding to the control target in the fine transfer device including the servo motor driving means, and provided corresponding to each control target in the fine transfer device An interface unit that receives a detection signal from a sensor directly or by A / D conversion, and a screen for setting and displaying a command value for each control target are displayed. Corresponding to a human interface unit having display means, at least a first data area for all data screens for storing setting values corresponding to all control items of each control object, and limited control items of each control object A data memory unit having a second data area for storing a setting value for a simple screen and a third data area for storing a setting value for actual operation, and at least each of the data corresponding to the setting data in the third data area A program memory unit having a memory area for storing a sequence program for generating a drive command for a controlled object and a molding condition setting support program for supporting a screen operation in the HMI unit, and a predetermined calculation based on the command of each program Main CPU, interface unit (i / F), human Ntafuiesu (HMI) unit, and a bus line that connects the data memory unit and program memory unit and the main CPU.

  It is preferable that the control device in the transfer device further includes a heater group as a control target. Further, it is preferable to further have a piezo hammer group as a control target.

  The control device in the transfer device preferably further includes a piezo actuator group as a control target. Moreover, it is preferable to further have a vacuum degree adjusting device as an object to be controlled.

  Moreover, it is preferable that the control device in the transfer device further has a UV light intensity adjusting device as a control target. Moreover, it is preferable to further have a flow rate adjusting valve group such as nitrogen gas as a control target.

  In the control device in the transfer device, the screen of the human interface (HMI) section is preferably a process monitoring screen such as a monitor in addition to the molding condition setting. The screen of the human interface (HMI) section is preferably a screen for production management in addition to the molding condition setting.

  In the control device in the transfer device, it is preferable that a plurality of simple screen data areas are provided.

  In the control device in the transfer device, the interface unit (i / F) is preferably capable of receiving molding data from the outside.

  In the control device in the transfer device, the third data area can be set as the first data area by switching the screen to the full screen after receiving the second (NIL: Nano Inprint Lisography) data. preferable.

  According to the present invention, the molding conditions can be easily set on the simple screen. Therefore, it is possible to perform a setting operation of molding conditions by a general, unskilled operator.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is a functional block diagram of a fine transfer device 1 and a control device 300 in the fine transfer device 1. The fine transfer device 1 moves the master mold relatively opposite to and close to a predetermined position with respect to the molding material on the substrate so that the molding material on the substrate has a fine shape formed on the micro-shaped surface of the master mold. The control object 100 including servo motor driving means (servo motor group) for operating the master mold or the molding material is provided so that the finely shaped surface of the master mold is separated from the molding material. . Further, the fine transfer device 1 includes a detection unit 110 having a sensor group provided corresponding to each of a plurality of control objects described later included in the control object 100.

  The control device 300 controls the operation of the fine transfer device 1. For example, in order to make the press operation and the pulling operation successful with respect to the operation of relatively moving the pair of substrates and the mold master of the fine transfer apparatus 1 relatively close to and away from each other, various intervening parameters such as press force Control the pressing force switching position, time, mold temperature on the substrate side and master side, inert gas flow rate, degree of vacuum in the molding chamber, and the like.

  The control device 300 directly or A / D converts detection signals from the drive unit 301 provided corresponding to the control target 100 in the fine transfer device 1 and each sensor of the detection unit 110 in the fine transfer device 1. A receiving interface (i / F) unit 302 and a human interface (HMI) unit 303 for setting and displaying a command value for each control object are provided.

  The control device 300 also includes a first data area 304-1 for all data screens, a second data area 304-2 for simple screens, and a third data area 304-3 for storing setting values for actual operation. A data memory (DM) unit 304 is provided.

  The control device 300 also supports a sequence program for generating a drive command to each control target 100 in correspondence with the setting data in the third data area 304-3 and a molding condition setting support for supporting screen operations in the HMI unit 303. A program memory (PGM) 305 having a memory area for storing programs is provided.

  In addition, the control device 300 includes a CPU 306 that performs a predetermined calculation based on instructions of each program stored in the program memory 305. The control device 300 also includes an interface (i / F) unit 302, a human interface (HMI) unit 303, a data memory unit 304, and a bus line 307 that connects the program memory unit 305 and the main CPU 306. Details of the control device 300 will be described later.

  FIG. 2 is a view showing the control object 100 of the fine transfer device 1 in detail. The control object 100 includes a servo motor group (X; Y; Z) 101 first. The servo motor group 101 has a fine shape formed on a fine shape surface of the master die on the molding material on the substrate by relatively facing and approaching the master die to a predetermined position with respect to the molding material on the substrate. After that, the master mold or the molding material is operated so that the finely shaped surface of the master mold is separated from the molding material. Here, the axes X and Y indicate the substrate table, and Z indicates the pressing direction of the master die. This substrate table is the same as the movable table 11 shown in FIG.

The control object 100 includes a heater group (on the mold; lower) 102, a piezo hammer group 103, a piezo actuator group 104, a vacuum degree adjusting device 105, a UV light intensity adjusting device 106, and a flow rate adjusting valve such as N ₂ gas. There is a group (a flow rate adjusting valve group such as nitrogen gas) 107. Specific examples of these controlled objects will be described with reference to FIGS.

Further, the detection unit 110 includes a servo motor group 101, a heater group 102, a piezo hammer group 103, a piezo actuator group 104, a vacuum degree adjustment device 105, a UV light intensity adjustment device 106, a flow rate of N ₂ gas, and the like. Various detectors such as a load cell and an encoder, which are sensor groups provided corresponding to the sensor group 107 for the regulating valve group, are provided.

  3 to 5 are diagrams showing the overall configuration of the fine transfer device 1. 3 is a left side view of the fine transfer device, FIG. 4 is a front view, and FIG. 5 is a plan view. 3 and 4, reference numeral 1 denotes a fine transfer device, and 3 denotes a main body frame. The body frame 3 is generally L-shaped when viewed from the side, and a rectangular lower frame 7 as a base frame is integrally attached to the lower side. At the four corners of the lower frame 7, tie bars 9 are erected in parallel with the vertical portion of the main body frame 3, and at the upper end of the tie bar 9, a rectangular upper frame 5 as a support frame for supporting the driving means. Is attached. A rectangular movable body 19 is loosely fitted to the tie bar 9 so as to be movable in the direction along the tie bar 9, that is, up and down, between the upper frame 5 and the lower frame 7.

  The upper part of the main body frame 3 protrudes forward so as to reach the position of approximately half (middle) in the front-rear direction on the left and right side surfaces of the upper frame 5 and the movable body 19, and a linear guide (guide means) extending vertically at the tip 21 is attached. Sliders 23 and 24 are attached to the left and right side surfaces of the upper frame 5 and the movable body 19 so as to engage with the linear guide 21 and to be accurately guided up and down with, for example, zero clearance.

  As understood from the above description, the main body frame 3 is provided with a frame support portion 3A for supporting the lower frame (base frame) 7 on one end side (lower end side), so that when viewed from the side, the body frame 3 is generally L. It presents a letter shape. And it is the structure which formed the recessed part in the upper end side (other end side) by providing the guide frame 3B provided with the said main body frame linear guide 21 ahead.

  As shown in FIG. 5, the upper frame 5 and the movable body 19 are disposed between the left and right guide frames 3 </ b> B in the main body frame 3, and are provided in the upper frame 5 and the movable body 19. The sliders 23 and 24 are symmetrical with respect to the centers of the upper frame 5 and the movable body 19 in the front-rear direction (left and right in FIGS. 3 and 5) and the left and right direction (the direction perpendicular to the paper surface in FIG. It is movably engaged with the linear guide 21 at a certain position. In FIG. 3, the linear guide 21 can be provided with linear guides corresponding to the sliders 23 and 24, respectively. However, considering the ease of processing and the processing accuracy of parallelism, it is desirable to provide the linear guide 21 in common for the sliders 23 and 24.

  Here, the upper frame 5 is fixed to the lower frame 7 and the main body frame 3 via the tie bar 9, but when the tie bar 9 is contracted due to a pressing force of a mold or a temperature change described later, the upper frame 5 The linear guide 21 and the slider 23 are provided in order to allow the movement and to prevent the positional deviation (lateral deviation) of the upper frame 5 in a plane perpendicular to the tie bar 9 caused by bending or expansion / contraction of the tie bar 9. This is for more reliably preventing positional displacement (lateral displacement) of the upper frame 5, and the upper frame 5 may be separated from the main body frame 3 and connected and fixed to the lower frame 7 by the tie bar 9.

  Since the movable body 19 is loosely fitted to the tie bar 9 as described above, the movement in the vertical direction is precisely guided by the linear guide 21 and the slider 24.

  The linear guide 21 and the sliders 23 and 24 are symmetrical with respect to the front, rear, left and right centers of the upper frame 5 and the movable body 19 in order to prevent positional displacement (lateral deviation) due to temperature changes of the upper frame 5 and the movable body 19 itself. It is preferable to arrange in a position.

  A fixed base 10 extending vertically upward is attached to the center of the upper surface of the lower frame 7. On the fixed base 10, as shown in FIG. 4, there is provided a movable table 11 that can be moved in the X and Y directions (front and rear, left and right directions) and that can be finely adjusted and positioned. On the movable table 11, a support base 15 for supporting the molded product 13 is provided. The movable table 11 is guided by a linear guide and a slider and is moved by a servo motor group 101 included in the control target 100 shown in FIGS. 1 and 2 and has a known configuration. avoid.

  For the molded product 13, for example, a molded layer (not shown) made of an ultraviolet curable resin or the like is applied to the upper surface of a substrate made of an appropriate material such as silicon, glass, or ceramic to a thickness of several tens nm to several μm. It is the structure provided with the thin film. In addition, since the said layer to be molded may use a resist made of a thermoplastic resin, the support base 15 is shown in FIG. 1 for facilitating molding by heating and softening the layer to be molded. Further, heating means (not shown) such as the heater group 102 included in the controlled object 100 may be incorporated.

  As shown in FIG. 4, at the center of the lower surface of the movable body 19 (the center of the facing surface facing the base frame), the swivel base 47 is connected to the movable body 19 via a load cell 46 constituting each sensor group of the detection unit 110. It is attached so that it can turn centering on the center of the lower surface, and can be fixed at a predetermined angular position. A mold support plate 43 is attached to the swivel base 47 via a gimbal mechanism 45, and the mold 41 is detachably attached to the mold support plate 43.

  The gimbal mechanism 45 has a spherical surface centering on the center of the mold surface (lower surface in FIG. 4) of the mold 41. Although not shown in detail, the spherical surface is supported by an air bearing, and the mold 41 is mounted on the mold surface. It is configured to be able to freely tilt about the center and to fix the posture of the die 41 in an immobile state by using a negative pressure in the air bearing.

  The mold 41 has a fine uneven pattern formed on the mold surface (lower surface in FIG. 4) using a lithography technique. In this embodiment, the mold 41 is made of transparent quartz glass that easily transmits ultraviolet rays.

  The mold support plate 43, the gimbal mechanism 45, the swivel base 47, and the load cell 46 all have a through hole 43A in the center, and the movable body 19 is connected to the movable body 19 from the ultraviolet light source 42 via the optical fiber 42A and the reflection mirror 42B. A through hole 42 </ b> C is provided to guide the ultraviolet light from the through hole to the back surface of the mold 41. That is, a light guide is provided. The intensity of the ultraviolet light generated by the ultraviolet light source 42 is adjusted by the UV light intensity adjusting device 106 included in the control target 100 shown in FIG.

  A servo motor 33 as an example of driving means for moving the movable body 19 is mounted and supported on the upper frame 5 as a support frame. The servo motor 33 is included in the servo motor group 101. The output shaft 35 of the servo motor 33 is connected to a hollow shaft 31 that is rotatably attached to the upper frame 5 by a bearing 29, and a ball screw nut 26 constituting the ball screw mechanism 25 is attached to the lower end of the hollow shaft 31. ing. The ball screw net 26 engages with a ball screw shaft 27 that is vertically attached and fixed to the center (center) of the front, rear, left, and right of the movable body 19 so as to move the movable body 19 up and down at a predetermined speed and torque. It has become. Reference numeral 33 </ b> A is a rotary encoder that detects the rotational position of the servomotor 33.

  As shown in FIG. 5, the upper frame 5 is provided with a plurality of balance cylinders 50 as examples of balancing means at symmetrical positions with the center of the movable body 19 as the center. The biston rods 52 of these balance cylinders 50 are respectively connected to the movable body 19 so as to cancel the downward load of the movable body 19 due to gravity.

  A ring-shaped upper cover 54 surrounding the mold support plate 43 and the like is attached to the lower surface of the movable body 19. On the other hand, on the lower frame 7 side, the lower end is movably engaged with the peripheral surface of the fixed base 10, and the upper end is formed so as to be able to abut on the lower end of the upper cover 54 so as to surround the movable table 11 and the like. A lower cover 56 is attached. The lower cover 56 is moved up and down by a plurality of cylinders 58 as an example of vertical movement actuators attached to the lower frame 7, and can be opened and closed around the mold support plate 43 and the movable table 11 by the upper cover 54. A molding chamber 60 is formed.

  Next, the operation of this transfer device will be described. The lower cover 56 is lowered by a cylinder 58 serving as a vertical movement actuator to open the molding chamber 60, the mold 41 is mounted on the mold support plate 43, and the mounting angle in the horizontal rotation direction around the center of the mold 41 (the direction of the mold) ) Is finely adjusted by the turntable 47. The mounting angle of the mold 41 is automatically adjusted not only when the mold is mounted but also every time according to the molded product 13 set on the support base 15 by a known positioning means using marks. Fine adjustment may be made.

  After the mold 41 is set as described above, the molded product 13 having a molding layer made of an ultraviolet curable resin applied on the upper surface is set on the support base 15.

  Next, the lower cover 56 is raised by the cylinder 58 to close the molding chamber 60, the movable body 19 is lowered with the torque of the servo motor 33 set to a relatively small value, and the die 41 is moved closer to the product 13. The mold 41 is pressed against the upper surface of the product 13 with a relatively small pressing force.

  At this time, the movable body 19 is lowered by the linear guides 21 and the sliders 24 arranged on both the left and right sides, and the position shift (lateral shift) in the direction orthogonal to the moving direction is suppressed to a lower level. It is pressed toward 13 predetermined positions. At this time, since the movable body 19 is offset by the balance cylinder 50 with the downward load due to gravity, the servo motor 33 can be operated with a smaller torque, and the torque and speed are controlled more accurately and lowered. To do.

  When the mold 41 is pressed against the molded product 13, if there is a deviation in the parallelism between the contact surfaces (contact surfaces) of the two, the mold 41 is supported by the gimbal mechanism 45 so as to be tiltable. The entire surface of the mold 41 is pressed with a uniform surface pressure following the upper surface of the mold. At this time, the gimbal mechanism 45 is tilted about the center of the mold surface by the spherical surface centered on the mold surface (lower surface in FIG. 2) of the mold 41, so that no lateral (horizontal) misalignment occurs. .

  The pressing force is detected by the load cell 46, fed back to the servo motor 33, and kept at a predetermined value. Also at this time, the load of the movable body 19 is canceled by the balance cylinder 50, and the torque of the servo motor 33 is a smaller value, so that the torque control is performed more accurately.

  When pressing with a relatively small pressing force is completed in this manner, the air bearing of the gimbal mechanism 45 is set to a negative pressure to fix the posture of the die 41 in a stationary state, and then the torque of the servo motor 33 is increased. Due to this torque increase, the mold 41 is strongly pressed against the molding layer made of an ultraviolet curable resin applied to the upper surface of the molded article 13, and the fine uneven pattern formed on the surface of the mold 41 is applied to the molded article 13. Transfer to the molding layer.

  Due to the strong pressing force of the die 41, the tie bar 9 extends slightly but displaces the upper frame 5 upward. The displacement of the upper frame 5 is absorbed by the linear guide 21 and the slider 23, and there is no problem that the upper part of the main body frame 3 is bent leftward in FIG. Therefore, a positional shift (lateral shift) in a direction orthogonal to the moving direction of the mold 41 due to the pressing of the mold 41 is suppressed.

  Further, since the upper frame 5 is supported by the linear guide 21 and the slider 23, even when there is a difference in the elongation of the plurality of tie bars 9, the positional deviation (lateral deviation) of the upper frame 5 can be kept small. The positional deviation (lateral deviation) of the mold 41 is kept small.

  The difference in elongation of the tie bar 9 is very small when the pressing force of the die 41 is relatively small, so that the guide means for the upper frame 5 by the linear guide 21 and the slider 23 may be omitted. .

  After the transfer, ultraviolet rays are irradiated from the ultraviolet light source 42 to the back surface of the mold 41 for a predetermined time through a light guide path including an optical fiber 42A and a reflection mirror 42B. Since the mold 41 is made of transparent quartz glass, the ultraviolet rays irradiated on the back surface of the mold 41 are transmitted through the mold 41 and irradiated onto the molding layer made of an ultraviolet curable resin applied to the upper surface of the molded article 13. The molding layer is cured.

  After the molding layer is cured in this way, the movable body 19 is lifted by the servo motor 33 while the posture of the mold 41 is fixed, and the mold 41 is separated from the molding product 13. Next, the lower cover 56 is lowered by the cylinder 58, the molding chamber 60 is opened, the molded product 13 is taken out, and a series of transfer operations is completed.

  6 to 8 show details of the gimbal mechanism 45. FIG.

  6 is a vertical sectional view in the vertical direction of the gimbal mechanism 45, FIG. 7 is a view taken along the arrow Z in FIG. 6, and FIG. 8 is a view taken along the line BB in FIG.

  In FIG. 6, a lower gimbal member 201 having a convex spherical surface portion and an upper gimbal member 203 having a concave spherical surface portion are arranged in contact with each other, each having a through hole at the center. A mold holder 205 is fixed to the lower surface of the lower gimbal member 201 via a heat insulating material 207. A mold 41 is attached to the lower surface of the same mold holder 205. In addition, a heater 209 is built therein. In addition to the heater 209, a cooling device (not shown) can be incorporated.

  The upper gimbal member 203 is formed with a suction conduit 211 that opens to the contact surface, and is connected to a vacuum drawing device (negative pressure generating means) 215 and a vacuum degree adjusting device 217 (with the vacuum degree adjusting device 105 shown in FIG. 2). The same). Details of the suction conduit 211 are illustrated in FIG. Further, the upper gimbal member 203 is provided with a levitation conduit 213, and the compressed air is passed through the line L 1 from the compressed air supply source adjacent to the convex spherical surface portion of the lower gimbal member 201. Injection is made to the inclined surface 219 (floating surface) of the formed overhanging portion.

  More specifically, as shown in FIG. 6, the inclined surface 219 is formed as an inclined surface inclined so that the upper side is separated from the axis of the lower gimbal member 201 or a tapered surface having a large diameter on the upper side. It is. The air ejection hole of the levitation conduit 213 is open to an inclined surface or a tapered surface formed in the upper gimbal member 203 so as to face the inclined surface 219.

  Reference numeral 218 denotes an adjustment liner that adjusts the distance between the inclined surface 219 and the facing surface of the lower gimbal member 201.

  Reference numeral 221 denotes a piezo hammer (included in the piezo hammer group shown in FIG. 2), and its frame 221F is attached at three locations around the lower inclined surface S of the upper gimbal member 205. As shown in the figure, the piezo hammer 221 has a large inertial body 227 on the rod of the air cylinder 223 and a small inertial body 225 with a hammer 231 attached to the tip, and a piezo (piezoelectric) element 229 between both inertial bodies. Are connected. Therefore, by applying a predetermined pulse voltage to the piezo element 229, the hard material embedded block in which the hammer 231 is instantaneously disposed on the inclined surface of the lower gimbal member 201 based on the inertia difference between the two inertia bodies. 233 is hit. As a result, when the inclined surface 219 of the lower gimbal member 201 is displaced in the axial direction by the hammer 231, the piezo element 229 and both inertial bodies are displaced by the air cylinder 223. With such a configuration, the piezo hammer 221 can move a large stroke even if it is a piezo element with relatively few layers.

  A rotation member 235 is fixed to the upper surface of the upper gimbal member 203, and an inner fixing member 239 is disposed on the inner peripheral side of the rotation side member 235 via a rotation bearing 237. Further, a plate 241 is attached and fixed to the upper surface of the inner fixing member 239. The plate 241 and the inner fixing member 239 are formed with a conduit 243 for introducing compressed air through a line L2. This compressed air causes the rotating member 235 to float statically as shown.

  As shown in FIG. 7, the rotating member 235 can be rotated clockwise and counterclockwise by a pair of piezo hammers 221A and 221B. The frames of the piezo hammers 221A and 221B are fixed to the plate 241.

  Instead of the piezo hammers 221, 221A, 221B, so-called piezo actuators (included in the piezo actuator group 104 shown in FIG. 2) in which piezoelectric elements are stacked can be used. In that case, unlike the piezo hammer, the position of the tip of the piezo actuator can be stored electrically and the posture of the gimbal mechanism can be reproduced.

  In FIG. 6, a load cell 46 is provided on the upper surface of the plate 241. Reference numeral 46A is a signal extraction terminal. Inside the movable body 19, as described in FIG. 4, a bundle of optical fibers 42 </ b> A is bundled from the ultraviolet ray generator 42 through the ultraviolet ray intensity adjustment device 255 (same as the UV light intensity adjustment device 106 shown in FIG. 2). The light is guided to the lens system 253, where it is formed in a uniform ultraviolet distribution and is applied to the reflection mirror 42B. The ultraviolet rays reflected by the mirror 42B are directed downward through a sealing glass material 251 through a through hole 43A formed concentrically with the central axis ax of the gimbal mechanism 45. In the case where an ultraviolet curable resin is used as a molding material, the mold holder 205 and the mold 41 are naturally formed of a material capable of transmitting ultraviolet light, such as quartz. In that case, the heater 209 (included in the heater group 102 shown in FIG. 2) is unnecessary.

  Reference numeral 261 denotes a screw portion formed on the inner periphery of the through hole of the lower gimbal member 201. Since the ultraviolet rays from above the through-hole 43A are not completely parallel, they have a certain extent. Accordingly, when ultraviolet rays going downward pass through the mold 41 while being reflected on the inner peripheral surface of the through-hole of the lower gimbal member 201 in particular, the distribution of the ultraviolet rays becomes non-uniform so that the screw of the screw portion 261 is avoided. The surface is prevented from reflecting downward. In that case, it is preferable to coat the screw surface with a material having low reflectance.

  The above-described through-hole 43A and lens system 253, UV generator 42, and the like are used when the resin as the molding material is UV-curable, but when UV-curable resin is not used, these through-hole 43A and lens system are used. 253, the ultraviolet ray generator 42 and the like may be omitted.

  The piezo hammer 221 and the piezo hammers 221A and 221B described above can be provided as options. That is, when it is not necessary to turn and rotate the gimbal mechanism 45, the rotating member 235, the inner fixing member 239, and the piezo hammers 221A and 221B can be omitted. Further, when the posture adjustment of the lower gimbal member 201 by the three piezo hammers 221 is not performed, the piezo hammers 221 can be omitted.

  Hereinafter, the operation when the piezo hammer 221 and the rotating member 235, the inner fixing member 239 and the piezo hammers 221A and 221B are not provided will be described.

  In this case, the molded product is typically formed with fine irregularities on the circumference like CD, DVD, etc., and if the center points coincide, the influence of the position in the rotational direction is affected. Molded articles that do not receive are preferred. The table 11 is positioned in the X and Y directions so that the center of the substrate disposed on the movable table 11 coincides with the central axis ax of the gimbal mechanism 45. When lowering the movable body 19, the suction force of the gimbal mechanism is maximized so that the lower gimbal member 201 is attracted to the upper gimbal member 203.

  In this state, when the mold 41 is lowered to a predetermined position just before contacting the resin on the substrate, the lowering speed is lowered and the suction force for vacuuming is weakened to mold the lower gimbal member 201 in a free state. Apply pressure slowly. That is, the mold holder 205 and the mold 41 attached and fixed to the lower gimbal member 201 press the resin on the substrate disposed on the upper surface of the table together with the lower gimbal member 201 while finally being parallel to the substrate. It is designed to imitate the correct attitude. In this case, since the convex and concave spherical centers of the gimbal mechanism 45 are arranged on the central axis ax of the gimbal mechanism so as to coincide with the lower end surface of the mold, no horizontal displacement occurs in this pressing process.

  When the lower gimbal member 201 is freed by weakening the vacuum suction force as described above, the lower gimbal member is opened from the air jet (not shown) opened in the concave spherical surface of the upper gimbal member 203. It is desirable that a small amount of air be ejected toward 201. With such a configuration, the frictional resistance between the upper gimbal member 203 and the lower gimbal member 201 becomes smaller, and the lower gimbal member 201 can be moved lightly and smoothly. Can be made parallel to the substrate, and the resin on the substrate can be more accurately pressed.

  Further, the plurality of suction pipes 211 shown in FIG. 8 are individually or grouped into a plurality of appropriate sets, so that an appropriate number of the plurality of annular grooves formed in the concave spherical surface portion of the upper gimbal member 203 is obtained. A suction force is selectively applied. For example, in the case of a suction force with a small degree of vacuum, for example, the suction force is applied to an odd-numbered annular groove or a small number of annular grooves, and in the case of a suction force with a large degree of vacuum, a suction is applied to many or all of the annular grooves. Apply force.

  In other words, the number of the annular grooves that act on the suction force is selected (each suction pipe 211 is individually or group-by-group connected to the vacuuming device by a valve or the like). Therefore, the suction force can be adjusted by evacuation.

  Note that the signal of the rotary encoder 33A coupled to the servo motor 33 is used to detect a predetermined position immediately before the mold 41 contacts the resin on the substrate. For example, the signal on the table 11 or the mold holder 205 is used. In addition, it is possible to detect by providing a member that performs electrical conduction / non-conduction.

  Further, when the piezo hammer 221 is attached as an option, the piezo hammer 221 is caused to function in the following cases, for example. That is, before supplying the resin onto the substrate, the gimbal mechanism 45 is lowered in the adsorbed state as described above, and the die 41 is pressed against the substrate and brought into contact therewith. At this time, if the contact state is not completely parallel and non-uniform, correction is performed by applying an appropriate number of voltage pulses to the three piezo hammers 221 in order to correct the non-uniform state with the suction force weakened. To do. In this way, after the gimbal mechanism is returned to the suction state when the uniform state is obtained by performing fine adjustment in advance, the molding operation is started. Further, when the mold is released from the resin after the molded product is formed, the release operation can be smoothly performed by pulling upward while vibrating the piezo hammer 221 at a high frequency. In this case, since the amplitude of vibration is much smaller than that of ultrasonic waves or the like, the resin molded during the mold release is not damaged.

  On the other hand, when a pair of piezo hammers 221A and 221B for turning and rotating the gimbal mechanism 45 is provided, the piezo hammer is caused to function in the following cases, for example. That is, the substrate has a rotational component that does not coincide with the X and Y directions on the table, and is a molded product that is affected by the position in the rotational direction even if the center points coincide. . In this case, if the rotational direction position, that is, the angle is measured in advance, a voltage pulse corresponding to the value is applied to the piezo hammers 221A and 221B, and the gimbal mechanism 45 is swung in a swung state.

  Next, a detailed configuration of the control device 300 will be described with reference to FIGS. 1 and 9 to 12. FIG. 9 is a detailed view of the human interface unit 303. FIG. 10 is a detailed view of the data memory. FIG. 11 is a diagram showing the relationship between the setting data area DM8 for actual operation in the data memory, the data areas DM1 and 2 for simple screens, and the data area DM6 for all data screens. FIG. 12 is a detailed view of the program memory 305.

  In order to successfully perform the pressing operation and the drawing operation with respect to the operation of relatively moving the pair of substrates of the fine transfer device 1 and the master of the mold relatively close to each other, Control of pressing force, switching position of pressing force, time, mold temperature on substrate side and master side, flow rate of inert gas, degree of vacuum in molding chamber, and the like. In particular, the control device 300 is a control device that can set parameters relating to molding conditions while displaying them on the screen.

The drive unit 301 of the control device 300 includes a control object 100 in the fine transfer device 1 including the servo motor group 101, specifically, a heater group (on the mold; down) 102, a piezo hammer group 103, a piezo actuator group 104, a degree of vacuum. The adjusting device 105, the UV light intensity adjusting device 106, and a flow rate adjusting valve group 107 (flow rate adjusting valve group such as nitrogen gas) 107 such as N ₂ gas are provided.

  The interface unit 302 receives a detection signal from each sensor of the detection unit 110 provided corresponding to each control target in the fine transfer apparatus 1 directly or A / D converted by the A / D converter 302-1. The data is sent to the main CPU 306 via the bus BS307. Further, the digital signal from the bus BS 307 is converted into an analog signal by the D / A converter 302-2, and then sent to each control target 100 of the fine transfer device 1 through various drive units of the drive unit group 301. Further, the interface unit (i / F) 302 can receive molding data from the outside. Molding data suitable for other fine transfer apparatuses can be obtained via the interface unit 302.

  As shown in FIG. 9, the human interface unit 303 includes a display device 303-2 that displays a screen 303-1 for setting and displaying command values for the control targets 101 to 107 of the control target 100. That is, the screen 303-1 of the human interface unit 303 is used as the molding condition setting screen 303-1A of the fine transfer device 1. Further, it may be used as the process monitoring screen 303-1B. Further, it may be used as a screen 303-1C for production management.

  In the HMI unit 303, various screens are prepared in the data memory DM1. In this case, as the data of various screens, data in the simple screen setting data area DM1 or DM2 (second data area 304-2) on the data memory DM side is transferred. Therefore, as will be described later, data on a simple screen can be used as full screen data.

  As shown in FIG. 10, the data memory unit 304 includes a simple screen (NIL1) data area DM1. This corresponds to the second data area 304-2 for a simple screen that stores setting values corresponding to the limited control items of each control target. In addition, a simple screen (NIL2) data area DM2 is also provided. Thus, a plurality of simple screen data areas are provided. The simple screen data can be prepared in advance, for example, by the manufacturer of the fine transfer device. Of course, an expert may set on the user side. Consideration is given so that the molded product becomes a good product when molding is performed using simple screen data prepared in advance on the fine transfer device meter side.

  The data memory unit 304 also includes a data area DM5 for GMP (glass molding) screen and a data area DM6 for all data screen (Free). This all data screen (Free) data area DM6 corresponds to the first data area 304-1 for all data screens for storing set values corresponding to all control items of each control target.

  In addition, an actual operation setting data area DM7 is also provided. This actual operation setting data area DM7 corresponds to a third data area 304-3 for storing actual operation setting values. The DM 7 corresponding to the third data area 304-3 accepts second (NIL: Nano Inprint Lisography) data and then switches the screen to the full screen, thereby enabling setting as the first data area 304-1. Simple screen data can be used as full screen data.

  FIG. 11 shows the setting data area DM8 for actual operation in the data memory. The relationship between the simple screen data areas DM1, 2 and the all data screen data area DM6 can be explained. The press setting items consist of 8 levels, and the 1st to 3rd levels where the flag bit is 0 are set and displayed on a simple screen. It is impossible to set up to the 4th to 8th stages where the flag bit is 1, and it is not displayed on the simplified screen. The lower four flag bits 0 starting from the lower level of the press setting item are set and displayed on the simplified screen. Of the eight stages of temperature setting items (upper mold), TU1 to TU3 are set and displayed on a simple screen although the flag bits are 0, 0 and 1. TU4 to TU8 whose flag bit is 1 cannot be set and is not displayed. The lower two flag bits 0 starting from the lower level of the temperature setting item are set and displayed on the simplified screen.

  The data memory unit 304 also includes a parameter group data area DM8, a sensor group detection data area DM9, and an output data area DM10. A recording / storing data area DM20 is also provided. This is used when molding data is transmitted / received to / from an external device via the interface unit 302. Thereby, the molding condition data when the molding result is good can be recorded in the recording storage data area (DM20). Further, molding data suitable for other fine transfer apparatuses can be obtained through an interface unit.

  Further, the data memory unit 304 has a flag data area (item limitation) DM30.

  The program memory 305 includes a sequence program and an HMI unit that generate drive commands to the control objects 101 to 107 in correspondence with at least the setting data in the third data area 304-3 corresponding to the actual operation setting data area DM7. A memory area for storing a molding condition setting support program for supporting the screen operation in 303 is provided.

  Specifically, as shown in FIG. 12, a system program PG0, an overall sequence program PG1, a molding condition setting operation support program PG2, other (1) PG3, and other (2) PG2 are provided.

  A virtual ladder circuit calculation unit may be connected to the entire sequence program PG1 as indicated by a broken line.

  Then, the main CPU 306 executes a predetermined calculation based on instructions of each program stored in the program memory 305, and via the bus line 307, an interface unit (i / F) 302, a human interface (HMI) unit 303, The data memory unit 304 and the program memory unit 305 are controlled.

  Hereinafter, a processing operation in the control device 300 when the operator wants to set a control target by, for example, displaying the NIL simple screen by operating the human interface unit 303 will be described. First, it is assumed that the control device 300 has executed the system program PG0 in the program memory 305 by the CPU 306 and has already performed processing for the operator to select the NIL simple screen display. When the operator selects the NIL simple screen display from this state, the CPU 306 executes the entire sequence program PG1 and the molding condition setting support program PG2, and after transitioning to the NIL simple screen display, the drive command to each control object 101-107. Are generated while supporting the screen operation of the operator by the support program. As described above, the sequence program PG1 generates a drive command to each of the control objects 101 to 107 in correspondence with the setting data in the actual operation setting data area DM7 (third data area 304-3) of the data memory 304. . In this case, since various screens are prepared in the data area DM1 for the simple screen (NIL1) and the data area DM2 for the simple screen (NIL2) in the data memory 304, these data are transferred to the HMI unit 303. .

  Further, in the HMI 303, in addition to the NIL simple screen display, a GMP (glass molding) screen display and an all data screen (Free) display are selected. These various screen data are also stored in the GMP (glass forming) screen data area DM5 and the all data screen (Free) data area DM6 in FIG. 10 as described above. When actually setting the control target from each screen display, the actual operation setting data area DM7, parameter group data area DM8, sensor group detection data area DM9, output data area DM10, recording / storing data area DM20, Each data is calculated or transmitted to the HMI 303 from the flag data area (item limitation) DM 30 in accordance with control by the CPU 306.

  FIG. 13 is a diagram showing a screen specification as a specific example of the human interface unit 303. On the upper part 310, the position is fixed, and the date, molding condition information, and error information are displayed. On the left part (the left part on the drawing and the right part toward the drawing), the direct key for screen display is displayed as the direct selection unit 311 with the position being fixed. A molding condition shortcut 312 for selecting whether or not to register as a molding condition shortcut is provided at the lower left (lower left in the drawing, and toward the lower right). In most of the rest, a molding condition setting area 313 is provided for displaying a screen selected by direct selection.

  The direct selection unit 311 has selection items of “list”, “press”, “temperature”, “waveform”, “memory”, “process monitoring”, “production management”, “option”, and “table”.

  The list screen of the human interface unit 303 displays minimum setting items necessary for molding conditions and executes a preset molding profile.

  The following three types of list screens are prepared. They are a simple setting screen (NIL: Nano Inprint Lisography), a GMP setting screen, and a Free setting screen. When “list” is selected, screen switching buttons “NIL”, “GMP”, and “Free” can be selected.

  Switching to each screen is performed by pressing the [NIL], [GMP], and [Free] buttons at the upper right of the molding condition setting area. To execute each profile, press the [Execute] button. This is to prevent the molding conditions from being switched if the button is accidentally pressed during molding.

  FIG. 14 shows the NIL list screen. 15 and 16 show a “list screen” for glass forming. It is based on the current process screen and displays the necessary settings. Since the setting of temperature and pressing force can be changed frequently, fix the setting device and switch the display of other settings on the screen.

  FIG. 17 shows an all data list screen. A list screen in which the molding profile can be arbitrarily set. Basically, setting temperature (heater) profile and pressure (press) profile.

  18 and 19 show a press condition setting screen. In particular, FIG. 18 shows a mold raising / lowering setting screen for a glass molding machine, and FIG.

  20 and 21 show press condition setting screens. Displayed by selecting [Press] for direct selection. In the press condition setting screen of FIG. 20, the mold lifting / lowering setting, press setting, UV irradiation setting, and ST operation setting are performed. For the mold opening and closing operation, two types of screens are prepared because the operation directions are different between the glass molding machine and the NIL apparatus. FIG. 21 shows a temperature condition setting screen.

  In the press control, a press operation is performed according to a setting profile by turning on a press signal with a sequence program. When the press signal is turned OFF, the press operation is stopped on the spot. The number of press stages is a standard 8 pressure, and there is a press signal and a press completion signal for each pressure, which are controlled in sequence.

  In the temperature control using the temperature condition setting screen, the press temperature control signal is turned ON by the sequence program, and the temperature control is performed according to the setting profile. When the temperature signal is turned OFF, the temperature is controlled to the standby temperature (TW). The standby temperature control is also performed when the standby temperature control signal is turned on.

  In press condition setting, temperature condition setting, waveform display, production management, and options, the molding condition setting area is a split specification, the upper part is various tool areas, and the lower part is a condition setting area.

22 and 23 show a nitrogen gas (N ₂ gas) setting screen and a waveform display screen. The control timing of the nitrogen gas by the nitrogen gas setting is the same as the temperature control. The nitrogen gas zones are eight zones of U01, U02, U03, Ui, L01, L02, L03, and Li.

  For each nitrogen gas zone, the presence or absence of nitrogen gas is set at the same timing as the temperature. Nitrogen gas is set numerically. When “0” is set, it is not used, and when it is “1” or more, the output to be used is output. An optional flow rate display and flow rate control are available. When using flow control, the set value becomes the output flow, and D / A is output to the flow controller. Zero / span adjustment of the flow controller and flow detector is set by parameters.

  Also, a purge time for nitrogen gas is set. Purge uses the T1 setting. Counting is started by a purge time start signal, and a purge time timeout signal is output after the time is up. Optionally displays the chamber internal pressure. The zero / span of the chamber internal pressure sensor is set by a parameter.

  The waveform display screen of FIG. 23 is displayed by selecting [Waveform] of direct selection. On the waveform display screen, set the waveform display and waveform storage conditions.

It is a functional block diagram of a fine transfer device and a control device in the fine transfer device. It is the figure which showed the control object of the fine transfer apparatus in detail. It is a left view of a fine transfer device. It is a front view of a fine transfer device. It is a top view of a fine transfer device. It is a vertical direction longitudinal cross-sectional view of a gimbal mechanism. FIG. 7 is a Z arrow view in FIG. 6. It is a BB line arrow line view of FIG. It is detail drawing of a human interface unit. It is a detailed view of a data memory. It is a detailed view of setting data area DM8 for actual operation in the data memory. It is a detailed view of a program memory. It is a figure which shows the screen specification used as the specific example of the human interface unit 303. FIG. It is a figure which shows a NIL list screen. It is a figure which shows the "list screen" for glass forming. It is a figure which shows the "list screen" for glass forming. It is a figure which shows the all data list screen. It is a figure which shows the type | mold raising / lowering setting screen for glass forming machines. It is a figure which shows the type | mold raising / lowering setting screen of a simple screen. It is a figure which shows a press condition setting screen. It is a figure which shows a temperature condition setting screen. Nitrogen gas (N ₂ gas) is a diagram showing a setting screen. It is a figure which shows a waveform display screen.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Fine transfer apparatus 100 ... Control object 110 ... Detection part 300 ... Control apparatus 301 ... Drive unit 302 ... Interface unit 303 ... Human interface unit 304 ... Data memory 305 ... Program memory 306 ... CPU

Claims (12)

The master die is relatively opposed to and close to a predetermined position with respect to the molding material on the substrate to reflect the fine shape formed in the master die on the molding material on the substrate, and then the master die A control device in a transfer apparatus provided with a servo motor driving means for operating the master die or the molding material so as to separate the finely shaped surface of the molding material from the molding die,
A drive unit provided corresponding to an object to be controlled in the fine transfer apparatus including the servo motor driving means;
An interface unit that receives a detection signal from a sensor provided corresponding to each control object in the fine transfer device directly or by A / D conversion;
A human interface unit having display means for displaying a screen for setting and displaying a command value for each control target;
At least a first data area for all data screens that store setting values corresponding to all control items of each control object and a simple screen that stores setting values corresponding to limited control items of each control object A data memory unit having a second data area and a third data area for storing setting values for actual operation;
A memory area for storing a sequence program for generating a drive command to each control object in correspondence with setting data in the third data area and a molding condition setting support program for supporting screen operation in the human interface unit; A program memory section;
A main CPU that performs a predetermined calculation based on the commands of the programs;
A bus line connecting the interface unit, human interface unit, data memory unit and program memory unit and the main CPU;
Control device.   The control apparatus for a transfer apparatus according to claim 1, wherein the control target further includes a heater group.   2. The control device according to claim 1, wherein the control target further includes a piezo hammer group.   2. The control apparatus for a transfer apparatus according to claim 1, wherein the control target further includes a piezo actuator group.   2. The control device for a transfer apparatus according to claim 1, wherein the object to be controlled further includes a vacuum degree adjusting device.   2. The control device for a transfer device according to claim 1, wherein the controlled object further includes a UV light intensity adjusting device.   2. The control apparatus for a transfer apparatus according to claim 1, wherein the control object further includes a flow rate adjusting valve group such as a nitrogen gas.   2. The control apparatus for a transfer apparatus according to claim 1, wherein the screen of the human interface unit is a process monitoring screen such as a monitor in addition to the molding condition setting.   2. The control device for a transfer device according to claim 1, wherein the screen of the human interface unit is a screen for production management in addition to the molding condition setting.   2. The control device for a transfer apparatus according to claim 1, wherein a plurality of simple screen data areas are provided.   2. The control device according to claim 1, wherein the interface unit is capable of receiving molding data from the outside. 2. The control device according to claim 1, wherein the third data area can be set as the first data area by switching the screen to the full screen after receiving the second data.

Images