JP4853923B2 - Fluid temperature controller - Google Patents

Description

    The present invention relates to a fluid temperature control apparatus that is particularly suitable for application to temperature control of a chemical solution in a semiconductor manufacturing process. The present invention relates to a configuration of a fluid temperature control device including a heat transfer plate that is formed and a heat source that exchanges heat with a temperature-controlled fluid via the heat transfer plate.

    For example, in the semiconductor manufacturing field, fluid temperature control devices that use a thermoelectric module as a heat source to heat / cool a chemical solution are used for temperature management of the chemical solution (temperature-controlled fluid) in various manufacturing processes.

  Moreover, as one aspect of the fluid temperature control apparatus described above, a main body block having a flow path through which a chemical solution passes, a heat transfer plate installed on the surface of the main body block, and a thermoelectric module for heating / cooling the heat transfer plate And a structure for exchanging heat between the thermoelectric module and the chemical solution via the heat transfer plate is provided (for example, see Patent Document 1).

  5 and 6 are specific examples of the structure described above, and the temperature control unit U of the fluid temperature control apparatus A includes a main body block B in which a flow path (not shown) is formed. On one surface Bl in the block B, a heat transfer plate Pla and a heat transfer plate Plb are installed side by side, and on the other surface Br in the main body block B, a heat transfer plate Pra and a heat transfer plate Prb are provided. It is installed side by side.

  Thermoelectric modules Mla and Mlb as heat sources are respectively attached to the outer surfaces of the heat transfer plates Pla and Plb installed on one surface Bl of the main body block B. Further, outside these thermoelectric modules Mla and Mlb, these thermoelectric modules are mounted. A water cooling plate Cl for radiating / absorbing heat from the modules Mla and Mlb is attached.

  On the other hand, thermoelectric modules Mra and Mrb as heat sources are respectively attached to the outer surfaces of the heat transfer plates Pra and Prb installed on the other surface Br of the main body block B. Further, outside the thermoelectric modules Mra and Mrb, A water-cooled plate Cr that performs heat dissipation / heat absorption of these thermoelectric modules Mr and Mrb is attached.

  As shown in FIG. 6, the thermoelectric modules Mla and Mlb mounted on the outer surfaces of the heat transfer plates Pla and Plb arranged side by side are fed from a first power supply unit (switching regulator) El connected to the main power supply G (DC24V). The thermoelectric modules Mra and Mrb, which are driven by and mounted on the outer surfaces of the parallel heat transfer plates Pra and Prb, are fed from a second power supply unit (switching regulator) Er connected to the main power supply G (DC24V) Driven by.

  The chemical liquid flowing into the flow path (not shown) of the main body block B from the introduction pipe Bi shown in FIG. 5 is heated / cooled by driving the thermoelectric modules Mla and Mlb and the thermoelectric modules Mra and Mrb. , Plb, and the heat transfer plates Pra and Prb are in contact with each other, and the temperature is adjusted by heat exchange (heat transfer) with each of the heat transfer plates Pla, Plb, Pra and Prb, and then the discharge pipe Bo It is discharged to the outside through.

  Here, in the fluid temperature control apparatus A as described above, even if the control means (CPU or the like) that controls the operation (temperature increase / decrease) of each thermoelectric module Mla, Mlb, Mra, Mrb is runaway, Means for preventing overheating or overcooling of the adjusting unit U is taken.

  That is, as shown in FIG. 6, an overheating switch Sh is connected to the heat transfer plate Plb heated / cooled by one of the thermoelectric modules Mla and Mlb driven by the first power supply unit El. And the supercooling switch Sc are installed, and both the superheating switch Sh and the supercooling switch Sc are connected to the relay Rb.

  Of the thermoelectric module Mra and the thermoelectric module Mrb driven by the second power supply unit Er, the heat transfer plate Prb heated / cooled by one thermoelectric module Mrb is provided with an overheating switch Sh and an overcooling switch Sc. The overheating switch Sh and the overcooling switch Sc are both connected to the relay Rb.

  The power line connecting the main power supply G to the first power supply unit El and the second power supply unit Er is provided with a main relay Ra connected to the relay Rb through a signal line, and is installed on the heat transfer plate Plb. When any one of the overheat switch Sh, the overcool switch Sc, the overheat switch Sh and the overcool switch Sc installed on the heat transfer plate Prb is operated and the relay Rb is down, the relay Rb The main relay Ra is lowered by the signal, the power supply from the main power supply G to the first power supply unit El and the second power supply unit Er is cut off, and the operation of all the thermoelectric modules Mla, Mlb, Mra, Mrb is stopped. It becomes.

  According to the above configuration, the operation of the thermoelectric modules Mla, Mlb, Mra, Mrb is stopped based on the operation of the overheating switch Sh, so that overheating of the temperature control unit U is prevented in advance. Preventing serious inconveniences associated with overheating of the temperature control unit U, such as high temperature chemicals splashing from the seal part and causing damage to the surroundings due to expansion of the member due to temperature rise Can do.

  Further, according to the above configuration, the supercooling of the temperature control unit U is prevented based on the operation of the supercooling switch Sc, thereby causing a malfunction due to freezing of the chemical solution due to a decrease in temperature. Inconvenience associated with overcooling of the temperature control unit U can be prevented in advance.

  FIG. 7 and FIG. 8 show another specific example of the conventional fluid temperature control device, and the temperature control unit U ′ of the fluid temperature control device A ′ has a heat transfer plate Pla on one surface Bl ′ of the main body block B ′. ', Plb', Plc ', Pld' are arranged side by side, and heat transfer plates Pra ', Prb', Prc ', Prd' are arranged side by side on the other surface Br 'of the main body block B'.

  Thermoelectric modules Mla ′, Mlb ′, Mlc ′, Mld ′ are respectively attached to the outer surfaces of the heat transfer plates Pla ′, Plb ′, Plc ′, Pld ′ installed on one surface Bl ′ of the main body block B ′. A water cooling plate Cl ′ is attached outside the thermoelectric modules Mla ′, Mlb ′, Mlc ′, and Mld ′.

  On the other hand, thermoelectric modules Mra ′, Mrb ′, Mrc ′, and Mrd ′ are attached to the outer surfaces of the heat transfer plates Pra ′, Prb ′, Prc ′, and Prd ′ installed on one surface Br ′ of the main body block B ′, respectively. A water cooling plate Cr ′ is attached to the outside of these thermoelectric modules Mra ′, Mrb ′, Mrc ′, and Mrd ′.

  As shown in FIG. 8, adjacent thermoelectric modules Mla ′ and Mlb ′ are driven by power supply from the first power supply unit Elab ′, and adjacent thermoelectric modules Mlc ′ and Mld ′ are supplied from the second power supply unit Elcd ′. Driven by.

  On the other hand, the adjacent thermoelectric modules Mr ′ and Mrb ′ are driven by the power supply from the third power supply unit Erab ′, and the adjacent thermoelectric modules Mrc ′ and Mrd ′ are driven by the power supply from the fourth power supply unit Ercd ′. .

  Further, the heat transfer plate Plb ′ provided with the thermoelectric module Mlb ′ driven by the first power supply unit Elab ′ and the heat transfer plate Pld ′ provided with the thermoelectric module Mld ′ driven by the second power supply unit Elcd ′ are provided. The overheating switch Sh ′ and the overcooling switch Sc ′ are connected to the relay Rb ′.

  Meanwhile, the heat transfer plate Prb ′ provided with the thermoelectric module Mrb ′ driven by the third power supply unit Erab ′ and the heat transfer plate Prd ′ provided with the thermoelectric module Mrd ′ driven by the fourth power supply unit Ercd ′ are provided. The overheating switch Sh ′ and the overcooling switch Sc ′ are connected to the relay Rb ′.

  Further, the power line connecting the main power supply G ′ and the first power supply unit Elab ′, the second power supply unit Elcd ′, the third power supply unit Erab ′, and the fourth power supply unit Ercd ′ has the relay Rb ′ and the signal. A main relay Ra ′ connected by a wire is interposed.

Here, the fluid temperature control device A ′ is a device in which the body block in the temperature control unit U ′ is increased and the number of thermoelectric modules installed is increased in order to increase the processing capacity of the chemical solution, and the temperature control of the chemical solution is performed. The operation mode relating to the above and the operation mode for preventing overheating / overcooling of the temperature control unit U ′ are basically the same as those of the fluid temperature control apparatus A shown in FIGS.
JP 2003-338489 A

    By the way, in the temperature control unit U of the fluid temperature control apparatus A shown in FIGS. 5 and 6, as described above, the heat transfer plate Plb on which one thermoelectric module Mlb driven by the first power supply unit El is installed, An overheating switch Sh and an overcooling switch Sc are respectively installed on the heat transfer plate Prb on which one thermoelectric module Mrb driven by the second power supply unit Er is installed, and a total of four temperature switches are required. For this reason, there is a disadvantage in that the manufacturing cost is inadvertently increased.

  Further, in the temperature control unit U ′ of the fluid temperature control device A ′ shown in FIGS. 7 and 8, one of the thermoelectric modules is driven by the first power supply unit Elab ′ as the number of thermoelectric modules is increased. A superheat switch Sh 'and a supercooling are respectively connected to a heat transfer plate Plb' provided with the thermoelectric module Mlb 'and a heat transfer plate Pld' provided with one thermoelectric module Mld 'driven by the second power supply unit Elcd'. The switch Sc ′ is installed, and the heat transfer plate Prb ′ on which one thermoelectric module Mrb ′ driven by the third power supply unit Erab ′ is installed, and one thermoelectric module Mrd ′ driven by the fourth power supply unit Ercd ′. Overheating switch Sh 'and overcooling switch Sc' are installed respectively on the heat transfer plate Plb 'installed with a total of 8 temperature switches. Therefore, not only will the manufacturing cost be inadvertently increased, but the number of parts of the temperature switch will increase, complicating the processes involved in manufacturing the fluid temperature control device and lowering the operational reliability. There was an inconvenience.

  In view of the above circumstances, an object of the present invention is to provide a fluid temperature control device that can prevent the occurrence of problems due to overheating and the like while minimizing the number of installed temperature switches such as overheating switches. There is.

    In order to achieve the above object, a fluid temperature control apparatus according to claim 1 includes a main body block having a flow path through which a temperature-controlled fluid passes, a heat transfer plate installed on the surface of the main body block, and the heat transfer A fluid temperature control device comprising a heat source for exchanging heat with a temperature-controlled fluid passing through a flow path through a plate, one on each side of the main body block in a manner sandwiching the main body block A heat transfer plate installed, a plurality of heat sources equally installed on each heat transfer plate, and a power supply unit that drives a pair of heat sources across the main body block, and any of the main body blocks One of the heat transfer plates is provided with one overheating switch for stopping the driving of the heat source by the power supply unit when the heat transfer plate is at a predetermined temperature or higher.

  The fluid temperature control device according to the invention of claim 2 is the fluid temperature control device according to claim 1 of the present invention, wherein either one of the heat transfer plates sandwiching the body block has a predetermined temperature. In the following situation, one supercooling switch for stopping the driving of the heat source by the power supply unit is installed.

  A fluid temperature control apparatus according to a third aspect of the invention is the fluid temperature control apparatus according to the second aspect of the invention, in which one overheating switch and one overcooling switch are sandwiched between the body blocks. It is characterized by being installed on one of the heat transfer plates.

    According to the fluid temperature control apparatus related to the invention of claim 1, the heat source that forms a pair with the main body block interposed therebetween is driven by the common power supply unit, so that one of the heat sources is installed on one side of the main body block. The heat transfer plate and the other heat transfer plate can be regarded as having the same temperature, and a plurality of heat sources driven by different power supply units are installed on one heat transfer plate. The overheating of the entire device can be detected by one overheating switch installed on one of the heat transfer plates, so that the number of overheating switches installed can be minimized and the seriousness caused by overheating of the device It is possible to prevent such inconvenience.

  Moreover, according to the fluid temperature control apparatus relating to the invention of claim 2, by installing one supercooling switch on any one of the heat transfer plates sandwiching the main body block, the heat transfer also sandwiching the main body block. Together with one overheating switch installed on either one of the plates, the number of installation of overheating switches and overcooling switches is minimized, and inconveniences caused by overheating and overcooling of the device are obviated. It becomes possible to prevent.

  According to the fluid temperature control apparatus related to the invention of claim 3, since one overheating switch and one overcooling switch are installed on one of the heat transfer plates sandwiching the main body block, It is possible to prevent inconveniences caused by overheating and overcooling of the device while minimizing the number of heating switches and overcooling switches. By installing it on the heat transfer plate, it is possible to greatly improve the efficiency of assembly work and maintenance work during manufacture of the device.

Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments.
1 and 2 show a fluid temperature control device according to the present invention as a fluid temperature control device for adjusting the temperature of a chemical solution (temperature controlled fluid) used in a semiconductor manufacturing process over a predetermined range. An applied example is shown.

  As shown in FIG. 1, the temperature control unit 10 in the fluid temperature control apparatus 1 includes a main body block 11 having a flow path (not shown) through which chemical liquid flows in / out, and the main body block 11 has corrosion resistance to the chemical liquid. An introduction pipe 11i and a discharge pipe 11o communicating with a flow path (not shown) are attached to the front end of the resin material such as Teflon (registered trademark).

  One heat transfer plate 12A made of a metal material such as aluminum having good thermal conductivity is provided on one surface 11a of the main body block 11 so as to cover almost the entire area of the surface 11a. It is fixedly installed through the fastening means.

  Further, on the other surface 11b of the main body block 11, a single heat transfer plate 12B formed from a metal material such as aluminum having good thermal conductivity in a manner covering almost the entire surface 11b is, for example, It is fixedly installed through fastening means such as bolts.

  A thermoelectric module 13Aa and a thermoelectric module 13Ab as heat sources are respectively mounted side by side on the outer surface of the heat transfer plate 12A fixed to one surface 11a of the main body block 11. The thermoelectric module 13Aa and the thermoelectric module 13Ab On the outside, a water cooling plate 14A for radiating / absorbing heat of these thermoelectric modules 13Aa and 13Ab is attached.

  Here, the water cooling plate 14A is attached to the heat transfer plate 12A using, for example, a bolt with a spring interposed therebetween, so that the thermoelectric modules 13Aa and 13Ab are sandwiched between the heat transfer plate 12A and the water cooling plate 14A. And is thermally connected to the heat transfer plate 12A and the water cooling plate 14A via an insulating layer (not shown).

  On the other hand, a thermoelectric module 13Ba and a thermoelectric module 13Bb as heat sources are respectively mounted side by side on the outer surface of the heat transfer plate 12B fixed to the other surface 11b of the main body block 11, and the thermoelectric module 13Ba and the thermoelectric module are mounted. On the outside of 13Bb, a water-cooling plate 14B that performs heat dissipation / heat absorption of these thermoelectric modules 13Ba, 13Bb is attached.

  Here, the water cooling plate 14B is attached to the heat transfer plate 12B using, for example, a bolt with a spring interposed therebetween, so that the thermoelectric modules 13Ba and 13Bb are sandwiched between the heat transfer plate 12B and the water cooling plate 14B. And thermally connected to the heat transfer plate 12B and the water cooling plate 14B via an insulating layer (not shown).

  As shown in FIG. 2, one thermoelectric module 13Aa attached to one heat transfer plate 12A and one thermoelectric module 13Ba attached to the other heat transfer plate 12B, in other words, the body block 11 (see FIG. 1) The thermoelectric module 13 </ b> Aa and the thermoelectric module 13 </ b> Ba that are paired with the power source interposed therebetween are driven by power supply (DC24V) from the first power supply unit (switching regulator) 20 a connected to the main power supply 21 of AC200V.

  Further, another thermoelectric module 13Ab attached to one heat transfer plate 12A and another thermoelectric module 13Bb attached to the other heat transfer plate 12B, in other words, sandwich the main body block 11 (see FIG. 1). The thermoelectric module 13Ab and the thermoelectric module 13Bb that are paired with each other are driven by power supply (DC24V) from the second power supply unit (switching regulator) 20b connected to the main power supply 21 of AC200V.

  As shown in FIGS. 1 and 2, one overheating switch 15h is attached to the heat transfer plate 12A fixedly installed on one surface 11a of the main body block 11, and one overcooling switch is also provided. 15c is attached.

  Both the overheating switch 15h and the overcooling switch 15c are connected to a relay 23. The relay 23 is interposed in a power line that connects the main power source 21 to the first power source unit 20a and the second power source unit 20b. The main relay 22 is connected to each other through a signal line.

  Here, during the operation of the fluid temperature control apparatus 1 described above, the chemical liquid that has flowed into the flow path (not shown) of the main body block 11 from the introduction pipe 11i of the temperature control unit 10 shown in FIG. 1 is transferred to the thermoelectric modules 13Aa and 13Ab. Heat exchange with each of the heat transfer plates 12A and 12B by flowing in contact with the heat transfer plate 12A heated / cooled by driving and the heat transfer plate 12B heated / cooled by driving of the thermoelectric modules 13Ba and 13Bb After the temperature is adjusted by (heat transfer), it is discharged to the outside through the discharge pipe 11o.

  Incidentally, the temperature of the chemical solution is measured by a sensor (not shown), and the operation of each thermoelectric module 13Aa, 13Ab, 13Ba, 13Bb is performed by a control means (not shown) so that the temperature becomes a desired set temperature. Needless to say, the temperature drop / temperature is controlled.

  During the operation of the fluid temperature control apparatus 1 described above, the control means that controls the operation of each of the thermoelectric modules 13Aa, 13Ab, 13Ba, and 13Bb goes out of control, and the heat transfer plate 12A in the temperature control unit 10 exceeds a predetermined temperature. When heated, the overheating switch 15h attached to the heat transfer plate 12A operates to lower the relay 23 connected to the overheating switch 15h.

  When the relay 23 is down, the main relay 22 is down due to a signal from the relay 23, and the power supply from the main power source 21 to the first power source unit 20a and the second power source unit 20b is cut off. The operation of the thermoelectric modules 13Aa, 13Ab, 13Ba, 13Bb is stopped, and overheating in the temperature control unit 10 is prevented in advance.

  Thus, since the member expands due to the rise in temperature, a serious inconvenience associated with overheating of the temperature control unit 10, such as high temperature chemical liquid splashing from the seal portion and causing damage to the surroundings, can be prevented. can do.

  Moreover, in the fluid temperature control apparatus 1 of the said structure, the thermoelectric module 13Aa attached to one heat-transfer board 12A and the thermoelectric module 13Ba attached to the other heat-transfer board 12B share the 1st power supply part. The thermoelectric module 13Ab attached to one heat transfer plate 12A and the thermoelectric module 13Bb attached to the other heat transfer plate 12B are driven by the common second power supply unit 20b while being driven by 20a. In addition to the fact that the temperature in one heat transfer plate 12A and the temperature in the other heat transfer plate 12B can be imitated, one sheet of heat transfer fixedly installed on one surface 11a of the main body block 11 is used. A thermoelectric module 13Ab driven by the first power supply unit 20a and a thermoelectric module 1 driven by the second power supply unit 20b are provided on the hot plate 12A. By attaching Ab, overheating of the heat transfer plate 12A and the heat transfer plate 12B of the temperature control unit 10 can be detected by one overheating switch 15h installed on the heat transfer plate 12A. It is possible to prevent serious inconveniences caused by overheating of the apparatus while minimizing the number of overheating switches 15h.

  On the other hand, during the operation of the fluid temperature control apparatus 1 described above, the control means that controls the operation of each thermoelectric module 13Aa, 13Ab, 13Ba, 13Bb goes out of control, and the heat transfer plate 12A in the temperature control unit 10 has a predetermined temperature. When cooled below, the supercooling switch 15c attached to the heat transfer plate 12A operates, and the relay 23 connected to the supercooling switch 15c is brought down.

  When the relay 23 is down, the main relay 22 is down due to a signal from the relay 23, and the power supply from the main power source 21 to the first power source unit 20a and the second power source unit 20b is cut off. The operation of the thermoelectric modules 13Aa, 13Ab, 13Ba, and 13Bb is stopped, and overcooling in the temperature control unit 10 is prevented in advance.

  Thus, it is possible to prevent inconveniences associated with the overcooling of the temperature control unit 10 such as a malfunction caused by freezing of the chemical solution due to a decrease in temperature.

  Moreover, in the fluid temperature control apparatus 1 having the above-described configuration, the heat transfer plate 12A of the temperature control unit 10 is provided by the single supercooling switch 15c installed in the heat transfer plate 12A in the same manner as the overheating switch 15h described above. In addition, it is possible to detect the overcooling of the heat transfer plate 12B, and thus it is possible to prevent inconvenience caused by the overcooling of the apparatus while minimizing the number of installed supercooling switches 15c.

  Furthermore, in the fluid temperature control apparatus 1 having the above-described configuration, one side of the temperature control unit 10 is provided by attaching the overheating switch 15h and the overcooling switch 15c to one heat transfer plate 12A in the temperature control unit 10. All the temperature switches (overheating switch 15h, overcooling switch 15c) are located in the section, so that the efficiency of assembly work and maintenance work during the manufacture of the device can be greatly improved.

  In the fluid temperature control apparatus 1 described above, the overheating switch 15h and the overcooling switch 15c are installed on the heat transfer plate 12A to prevent overheating and overcooling of the temperature control unit 10 in advance. However, if only overheating of the device causing serious inconvenience as compared with supercooling is prevented, it is sufficient to install only the overheat switch 15h on one heat transfer plate 12A. In this case, It is also possible to install an overheating switch 15h on the other heat transfer plate 12B.

  In the fluid temperature control apparatus 1 described above, the overheating switch 15h and the overcooling switch 15c are installed on one heat transfer plate 12A, but the overheating switch 15h and the overcooling are installed on the other heat transfer plate 12B. It is also possible to install a switch 15c, and it is also possible to install a superheating switch 15h on one of the heat transfer plate 12A and the heat transfer plate 12B and a supercooling switch 15c on the other.

  3 and 4 show another embodiment of the fluid temperature control apparatus according to the present invention. The temperature control unit 10 ′ of the fluid temperature control apparatus 1 ′ has the fluid temperature control apparatus shown in FIGS. 1 and 2. In order to increase the treatment capacity of the chemical solution for the control device, the main body block is enlarged and the number of thermoelectric modules installed is increased.

  One heat transfer plate 12A ′ is fixedly installed on one surface 11a ′ of the main body block 11 ′ in the temperature control unit 10 ′ so as to cover almost the entire surface 11a ′. A single heat transfer plate 12B ′ is fixedly installed on the surface 11b ′ so as to cover almost the entire surface 11b ′.

  Thermoelectric modules 13Aa ', 13Ab', 13Ac ', 13Ad' as heat sources are mounted side by side on the outer surface of the heat transfer plate 12A '. These thermoelectric modules 13Aa', 13Ab ', 13Ac', 13Ad ' A water-cooled plate 14A ′ is attached to the outside.

  On the other hand, thermoelectric modules 13Ba ', 13Bb', 13Bc ', 13Bd' as heat sources are mounted side by side on the outer surface of the heat transfer plate 12B '. These thermoelectric modules 13Ba', 13Bb ', 13Bc', A water cooling plate 14B 'is attached to the outside of 13Bd'.

  As shown in FIG. 4, one thermoelectric module 13Aa 'attached to one heat transfer plate 12A' and one thermoelectric module 13Ba 'attached to the other heat transfer plate 12B', in other words, the body block 11 ' The thermoelectric module 13Aa ′ and the thermoelectric module 13Ba ′ that are paired with each other (see FIG. 3) are driven by power supply from the first power supply unit 20a ′ connected to the main power supply 21 ′.

  Similarly, the thermoelectric module 13Ab ′ and the thermoelectric module 13Bb ′ that are paired with the main body block 11 ′ (see FIG. 3) interposed therebetween are driven by power supply from the second power supply unit 20b ′ connected to the main power supply 21 ′. The thermoelectric module 13Ac 'and the thermoelectric module 13Bc' that form a pair with the main body block 11 '(see Fig. 3) sandwiched between them are driven by the power supply from the third power source 20c' connected to the main power source 21 ', and further the main body block A thermoelectric module 13Ad ′ and a thermoelectric module 13Bd ′ that are paired across 11 ′ (see FIG. 3) are driven by power supply from a fourth power supply unit 20d ′ connected to the main power supply 21 ′.

  As shown in FIG. 3 and FIG. 4, one overheating switch 15h 'is attached to the heat transfer plate 12A' fixedly installed on one surface 11a 'of the main body block 11'. The supercooling switch 15c 'is attached.

  These overheating switch 15h 'and overcooling switch 15c' are both connected to a relay 23 ', which includes a main power source 21', a first power source unit 20a ', a second power source unit 20b', A main relay 22 'interposed in a power line connecting the third power supply unit 20c' and the fourth power supply unit 20d 'is connected to each other through a signal line.

  The above-described configuration of the fluid temperature control apparatus 1 ′ is such that four thermoelectric modules 13Aa ′, 13Ab ′, 13Ac ′, and 13Ad ′ are attached to one heat transfer plate 12A ′ and four to the other heat transfer plate 12B ′. Thermoelectric modules 13Ba ', 13Bb', 13Bc ', 13Bd' are attached, and thermoelectric module 13Aa 'and thermoelectric module 13Ba', thermoelectric module 13Ab ', thermoelectric module 13Bb', and thermoelectric module 13Ac that are paired with body block 11 'interposed therebetween 'And the thermoelectric module 13Bc', and the thermoelectric module 13Ad 'and the thermoelectric module 13Bd' are driven by the first power supply unit 20a ', the second power supply unit 20b', the third power supply unit 20c ', and the fourth power supply unit 20d', respectively. The fluid temperature control device 1 shown in FIG. 1 and FIG. Therefore, in the constituent elements of the fluid temperature control device 1 ', the same reference numerals as those in FIGS. 1 and 2 are used for the same functions as those of the fluid temperature control device 1. Detailed description will be omitted.

  According to the fluid temperature control apparatus 1 'having the above-described configuration, as in the fluid temperature control apparatus 1 shown in FIGS. 1 and 2, the number of the overheating switches 15h' can be minimized and the apparatus can be overheated. It is possible to prevent serious inconveniences caused by the above-mentioned problem, and to prevent inconveniences caused by overcooling of the apparatus while minimizing the number of supercooling switches 15c '.

  Further, according to the fluid temperature control apparatus 1 'having the above-described configuration, the overheating switch 15h is connected to one heat transfer plate 12A' in the temperature control unit 10 ', similarly to the fluid temperature control apparatus 1 shown in FIGS. By attaching 'and the supercooling switch 15c', it is possible to greatly improve the efficiency of assembly work and maintenance work during the manufacture of the apparatus.

  Here, also in the fluid temperature adjusting device 1 ′ described above, as in the fluid temperature adjusting device 1 shown in FIGS. 1 and 2, if only overheating of the device is prevented, it is applied to one heat transfer plate 12A ′. Only the overheating switch 15h ′ may be installed, and it is also possible to install only the overheating switch 15h ′ on the other heat transfer plate 12B ′.

  Further, not only the superheat switch 15h ′ and the supercooling switch 15c ′ are provided on one heat transfer plate 12A ′, but also the superheat switch 15h ′ and the supercooling switch 15c ′ are provided on the other heat transfer plate 12B ′. Further, it is possible to install an overheating switch 15h 'on one of the heat transfer plate 12A' and the heat transfer plate 12B 'and an overcooling switch 15c' on the other.

  In each of the above-described embodiments, the temperature control unit in which two pairs (four units in total) or four pairs (eight units in total) of thermoelectric modules are installed with the main body block interposed therebetween is illustrated. Of course, the present invention can also be effectively applied to a temperature control unit including five pairs (total of ten) of thermoelectric modules. Regardless of the increase in the number of thermoelectric modules installed, Of course, the number of supercooling switches used can be minimized.

  Further, in each of the above-described embodiments, the example in which the fluid temperature control device of the present invention is applied to the temperature control of the chemical solution (temperature control fluid) used in the semiconductor manufacturing process has been described. It goes without saying that the fluid temperature control apparatus of the present invention can be effectively applied to various industrial fields that require temperature control of the fluid.

(a) And (b) is the top view and side view of a temperature control unit which show one Example of the fluid temperature control apparatus concerning this invention. FIG. 2 is an overall circuit diagram of the fluid temperature control apparatus shown in FIG. 1. (a) And (b) is the top view and side view of a temperature control unit which show the other Example of the fluid temperature control apparatus concerning this invention. FIG. 4 is an overall circuit diagram of the fluid temperature control apparatus shown in FIG. 3. (a) And (b) is the top view and side view of a temperature control unit which show the conventional fluid temperature control apparatus. FIG. 6 is an overall circuit diagram of the conventional fluid temperature control device shown in FIG. 5. The top view and side view of a temperature control unit which show the conventional fluid temperature control apparatus. FIG. 8 is an overall circuit diagram of the conventional fluid temperature control device shown in FIG. 7.

Explanation of symbols

1 ... Fluid temperature control device,
10 ... Temperature control unit,
11 ... body block,
12A, 12B ... heat transfer plate,
13Aa, 13Ab ... thermoelectric module (heat source),
13Ba, 13Bb ... thermoelectric module (heat source),
14A, 14B ... water-cooled plate,
15h ... Overheating switch,
15c ... Supercooling switch,
20a ... 1st power supply part (power supply part),
20b ... 2nd power supply part (power supply part),
21 ... Main power supply,
1 '... Fluid temperature control device,
10 '... temperature control unit,
11 '... body block,
12A ', 12B' ... heat transfer plate,
13Aa ′, 13Ab ′, 13Ac ′, 13Ad ′... Thermoelectric module,
13Ba ', 13Bb', 13Bc ', 13Bd' ... thermoelectric module,
14A ', 14B' ... water cooling plate,
15h '... Overheating switch,
15c '... supercooling switch,
20a '... 1st power supply part (power supply part),
20b '... second power supply unit (power supply unit),
20c '... the third power supply unit (power supply unit),
20d '... 4th power supply part (power supply part),
21 '... main power supply,

Claims (3)

Between the main body block having a flow path through which the temperature control fluid passes, the heat transfer plate installed on the surface of the main body block, and the temperature control fluid passing through the flow path via the heat transfer plate A fluid temperature control device comprising a heat source for performing heat exchange,
The heat transfer plate installed one by one on one side of the main body block in a manner sandwiching the main body block;
A plurality of the heat sources that are equally installed on each of the heat transfer plates;
A power supply unit that drives the heat sources that form a pair with the body block interposed therebetween,
One overheating switch for stopping the driving of the heat source by the power supply unit is installed on any one of the heat transfer plates sandwiching the main body block when the heat transfer plate reaches a predetermined temperature or higher. A fluid temperature control device characterized by comprising: One supercooling switch for stopping the driving of the heat source by the power supply unit is installed in any one of the heat transfer plates sandwiching the main body block when the heat transfer plate is at a predetermined temperature or lower. The fluid temperature control device according to claim 1, characterized in that: 3. The fluid temperature control according to claim 2, wherein the one overheating switch and the one overcooling switch are installed on any one of the heat transfer plates with the main body block interposed therebetween. apparatus.

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