JP4837492B2 - Al-SiC composite material joined body and manufacturing method thereof - Google Patents

Description

  The present invention relates to an Al-SiC composite material joined body and a method for producing the same, and more particularly, Al produced by impregnating molten Al with a preform bonded with a water glass binder containing SiC. The present invention relates to a SiC composite material joined body and a manufacturing method thereof.

In recent years, the dimensions of component parts required for precision machine parts for semiconductor manufacturing equipment and liquid crystal manufacturing equipment have increased year by year, and now it is a flat plate-like large part with a side of more than 2 m, and is lightweight and highly rigid. There is a need for technology for manufacturing parts.
For example, aluminum or steel materials have been used in many parts for liquid crystal manufacturing equipment. However, aluminum materials are too low in rigidity, and steel materials are heavy in mass. -Ceramic composite materials are gaining attention.

  Large metal-ceramic composite materials can be produced by the non-pressurized metal infiltration method (so-called Primex method) developed by Lanxide, Inc. of the United States. A large preform is required to produce the film. However, since the preform is molded by a hot press method in which a load is applied while applying heat to such an extent that the binder is cured, a large-scale apparatus is required to produce a large preform. For this reason, there existed a subject that it cannot respond to the enlargement of a component dimension with sufficient productivity.

Therefore, the present inventors produce a plurality of preforms, assemble them into a desired shape and enlarge them, and then manufacture a metal-ceramic composite material that allows the molten aluminum alloy to permeate in nitrogen without pressure. Proposed method.
JP 2001-123234 A

In the above-described method, since the surfaces of a plurality of preforms are simply brought into contact with each other and assembled, there is a problem in that a precise dimensional accuracy cannot be obtained due to the displacement of the preform during the penetration of molten aluminum. Furthermore, there is a problem in terms of reliability that cracks occur due to heating cycles due to defects due to poor penetration of molten metal in the bonding layer and differences in the ceramic content of the metal-ceramic composite material and the bonding layer. It was.

  The present inventors have intensively studied in order to solve the above-described problems, and have an object to provide a highly reliable Al—SiC composite material bonded body having no bonding layer defects and a method for manufacturing the same.

The object of the present invention described above can be solved by the following means.
(1) A step of preparing a preform for a plurality of Al—SiC composite materials, and a percentage by volume based on the volume percentage of SiC content of the preform, and a volume percentage of SiC content with the preform. A step of adjusting a water glass-based binder containing SiC having a difference of 5% or less, a step of applying the water glass-based binder to a bonding surface of the preform and bonding a plurality of preforms, A step of heat-treating a plurality of preforms bonded together, and a plurality of the heat-treated preforms are impregnated with non-pressurized molten Al in a nitrogen atmosphere to form a plurality of Al-SiC composite materials. An Al—SiC composite material joined body produced by a production method comprising: integrating and joining via a joining layer .

(2) A step of producing a preform for a plurality of Al-SiC composite materials , and a percentage by volume based on the volume percentage of SiC content of the preform, and a percentage by volume of SiC content with the preform. A step of adjusting a water glass-based binder containing SiC having a difference of 5% or less, a step of applying the water glass-based binder to a bonding surface of the preform and bonding a plurality of preforms, A step of heat-treating a plurality of preforms bonded together, and a plurality of the heat-treated preforms are impregnated with non-pressurized molten Al in a nitrogen atmosphere to form a plurality of Al-SiC composite materials. And a step of integrating and bonding via a bonding layer. A method for producing an Al-SiC composite material bonded body.

  According to the present invention, since there is no defect in the bonding layer, there is an effect that a highly reliable Al—SiC composite material bonded body can be provided.

FIG. 1 is a schematic cross-sectional view for explaining the Al—SiC composite material joined body of the present invention.
As shown in FIG. 1, the Al—SiC composite material assembly according to the present invention has a structure in which a plurality of (two in FIG. 1) Al—SiC composite materials 1 are integrated via a joining layer 2. Yes.
Here, although the bonding layer is illustrated in an enlarged manner, the actual thickness of the bonding layer is at most 10 mm.

In the present invention, an Al-SiC composite material assembly in which a plurality of Al-SiC composite materials are integrated via a bonding layer, the SiC content of the bonding layer and the SiC of the Al-SiC composite material The Al—SiC composite material joined body is characterized in that the difference between the content of the Al—SiC composite is within 5%.

Here, the reason why the difference between the SiC content of the bonding layer and the SiC content of the Al-SiC composite material is within 5% is that if this difference exceeds 5%, This is because the difference in thermal expansion from the Al—SiC composite material is increased, cracks are generated in the bonding layer due to the heating cycle, and the strength of the bonded body is lowered, which is not preferable.

Here, the difference between the SiC content rate of the bonding layer and the SiC content rate of the Al—SiC composite material is based on the SiC content rate of the Al—SiC composite material. When the content ratio of A is A volume% and the SiC content ratio of the bonding layer is B volume%, the absolute value of the difference between B and A is divided by A and multiplied by 100, and defined as%. .

As described above, in order to eliminate the difference in thermal expansion between the bonding layer and the Al—SiC composite material, the difference between the SiC content rate of the bonding layer and the SiC content rate of the Al—SiC composite material is different. Is preferably 0% (that is, the same with no difference).

Next, in the present invention, the reason for proposing an Al—SiC composite material is that it can be suitably used as a member for a semiconductor manufacturing apparatus because it is lightweight and has high rigidity as described above. In particular, since the Al—SiC composite material has a small thermal expansion coefficient and good thermal conductivity, the influence of the temperature rise on the geometric accuracy can be greatly reduced.
Here, it is preferable that SiC content rate as a ceramic reinforcement is 30-80 volume%. The reason is that if the content of SiC is less than 30% by volume, the strength of the preform is weakened, so there is a problem in shape retention. Conversely, if the content of SiC is more than 80% by volume, the composite material itself is produced. This is because it becomes difficult.

Next, in the present invention, a water glass-based binder containing SiC having a difference between the step of producing a plurality of Al-SiC composite preforms and the SiC content of the preform within 5% is provided. A step of adjusting, a step of applying the water glass binder to a bonding surface of the preform and bonding the plurality of preforms, a step of heat-treating the plurality of preforms bonded together, A step of impregnating a plurality of the heat-treated preforms with molten Al in a nitrogen atmosphere in a non-pressurized manner so that the plurality of Al-SiC composite materials are integrated with each other via a bonding layer. A method for producing a featured Al-SiC composite material joined body is proposed.

A known method can be applied as the step of producing the preform for the Al—SiC composite material of the present invention. That is, first, a SiC powder and / or fiber whose particle size is adjusted so as to obtain a predetermined filling state is mixed with a dispersant, a binder, and the like, and this mixture is cast into desired SiC by various methods such as casting and pressure molding. A molded body having a content is obtained.
Next, the preform for the Al—SiC composite material of the present invention is obtained by firing the obtained molded body at a temperature at which the binder cures and develops strength.

Next, a water glass binder containing SiC whose difference from the SiC content of the preform is within 5% is prepared. Here, the reason why the difference from the SiC content is within 5% is that, as described above, if the difference from the SiC content is larger than 5%, the difference between the bonding layer and the Al—SiC composite material. This is because the difference in thermal expansion becomes large, cracks are generated in the bonding layer due to the heating cycle, and the strength of the bonded body is lowered, which is not preferable. (Here, it is known that the SiC content of the preform is substantially equal to the SiC content of the composite material in which Al is infiltrated into the preform.)

Here, the reason for selecting the water glass binder as the binder is that the water glass is cured at a low temperature of 200 to 300 ° C. and exhibits a sufficient strength for handling even in a large shape.

In order to adjust the content of SiC in the water glass binder to a predetermined value, it is preferable to mix and use a plurality of SiC powders having different particle size distributions. For example, commercially available SiC powder (product number: # 180, average particle size 70 μm) or SiC powder (product number: # 800, average particle size 14 μm) manufactured by Shinano Electric Smelting Co., Ltd. can be used.

Next, in the present invention, the step of applying the water glass binder to the bonding surface of the preform and bonding the plurality of preforms together, and the step of heat-treating the plurality of preforms bonded together Has proposed.

Here, after the binder is applied to the bonding surface of the preform and the preforms are bonded to each other, the heat treatment is performed because the binder is cured by the heat treatment to increase the adhesive strength between the preforms. This is to solve the problem of not being able to obtain a precise dimensional accuracy due to the occurrence of deviation when the molten metal is impregnated.

Next, in the present invention, the plurality of heat-treated preforms are impregnated with molten Al in a nitrogen atmosphere in a non-pressurized manner, and the plurality of Al-SiC composite materials are integrated with each other via a bonding layer and bonded. The manufacturing method of the Al-SiC composite-material joined body characterized by including the process is proposed. Here, as a method of infiltrating Al with no pressure and integrating a plurality of Al—SiC composite materials through a bonding layer, a non-pressurized metal infiltration method (so-called Primex) developed by Rankide Co., Ltd. is used. Law).

Hereinafter, the present invention will be described in detail by way of examples and comparative examples.
(1) Preform production As a reinforcing material, a commercially available SiC powder (mixing mass ratio; product number # 180: product number # 700 = 70: 30) manufactured by Shinano Denki Smelting Co., Ltd. is used. Then, 10 parts by weight of commercially available powdered water glass (trade name: Sylbon 130) manufactured by Nissan Chemical Co., Ltd. was added to prepare a plurality of molded bodies molded into a shape of 500 × 100 × 10 mm.
The obtained molded body was heated to 700 ° C. in the atmosphere to produce a preform having a SiC content of 65% by volume.

(2) Adjustment of water glass binder As commercially available water glass, JIS No. 3 sodium silicate manufactured by Tosoh Sangyo Co., Ltd. was used. A predetermined amount of commercially available SiC powder (product number: # 180, average particle size 70 μm) and SiC powder (product number: # 800, average particle size 14 μm) manufactured by Shinano Denki Co., Ltd. were mixed and blended, A water glass binder having a SiC content as shown in Table 1 was prepared.

(3) Adhesion of preform and heat curing of binder The water glass binder shown in Table 1 is applied to the joining surface (end surface of 500 × 10 mm) of two preforms, and the preforms are adhered to each other. And heat-cured at 250 ° C.

(4) Production of Al-SiC composite material assembly Next, an Al alloy (JIS H 5202, AC8A) is placed in a furnace together with the preform, and heated to 800 ° C. in a nitrogen atmosphere to melt the Al alloy. Then, the preform was impregnated with an Al alloy. At that time, an Al-SiC composite material joined body in which the joining layer is impregnated with an Al alloy in the same manner as the preform, and a plurality of Al-SiC composite materials according to the present invention are integrated without shifting through the joining layer. Got.

(5) Heating cycle test The Al-SiC composite material joined body thus obtained was placed in an electric furnace, and a heating cycle test was performed 100 times between room temperature and 400 ° C. The results of visual observation of the state of the bonding layer after the heat cycle test are summarized in Table 1.

As shown in Table 1, in Examples 1 to 3, which are examples of the present invention, no crack was observed in the bonding layer even after 100 heating cycle tests.
On the other hand, in Comparative Example 1, many cracks occurred in the bonding layer after the heating cycle test. Moreover, in the comparative example 2, the fracture | rupture of the joining layer arose and Al-SiC composite material was parted.
In Comparative Example 3 in which no SiC powder was contained in the binder, cracks were already observed in the bonding layer before the heating test.

  As described above, according to the present invention, it was found that no crack occurred in the bonding layer even after the heating cycle test, and a highly reliable Al—SiC composite material bonded body was obtained.

It is typical sectional drawing for demonstrating the Al-SiC composite-material joined body of this invention.

Explanation of symbols

1; Al-SiC composite material 2; Bonding layer

Claims (2)

The difference between the step of producing a preform for a plurality of Al-SiC composite materials and the volume percentage of SiC content with the preform in percentage based on the volume percentage of SiC content of the preform A step of adjusting a water glass-based binder containing SiC that is 5% or less, a step of applying the water glass-based binder to a bonding surface of the preform, and bonding a plurality of preforms; A step of heat-treating the preforms bonded together, and a plurality of the heat-treated preforms are impregnated with molten Al in a nitrogen atmosphere in a non-pressurized state to bond a plurality of Al-SiC composite materials to each other. And an Al-SiC composite material joined body manufactured by a manufacturing method including the steps of integrating and joining. The difference between the step of preparing a preform for a plurality of Al-SiC composite materials and the volume percentage of SiC content with the preform in percentage based on the volume percentage of SiC content of the preform A step of adjusting a water glass-based binder containing SiC that is 5% or less, a step of applying the water glass-based binder to a bonding surface of the preform, and bonding a plurality of preforms; A step of heat-treating the preforms bonded together, and a plurality of the heat-treated preforms are impregnated with molten Al in a nitrogen atmosphere in a non-pressurized state to bond a plurality of Al-SiC composite materials to each other. And a step of integrating and bonding them through a manufacturing method of an Al-SiC composite material joined body.

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