JP4835220B2 - Grinding method - Google Patents
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- JP4835220B2 JP4835220B2 JP2006081459A JP2006081459A JP4835220B2 JP 4835220 B2 JP4835220 B2 JP 4835220B2 JP 2006081459 A JP2006081459 A JP 2006081459A JP 2006081459 A JP2006081459 A JP 2006081459A JP 4835220 B2 JP4835220 B2 JP 4835220B2
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Description
本発明は、研削加工において、研削液を供給するのに適した噴射ノズルの改良、及びこの噴射ノズルを用いた研削加工法に関する。 The present invention relates to an improvement of an injection nozzle suitable for supplying a grinding liquid in grinding and a grinding method using the injection nozzle.
従来、研削加工においては、ワークとワークを研削する砥石車に研削液を注ぎながら加工している。図８に示すように、研削液の供給は同パイプ等を断面を円形のまま、あるいは扁平にさせて、又は、末広がりのノズルを用いて砥石車等に研削液がかかるように折り曲げ、配置している。従来のこのような研削液の供給方法では、多量の研削液を必要とし、また、研削液が飛散し易く、エネルギー効率や環境の観点から改善が要求されている。 Conventionally, in the grinding process, the workpiece is processed while pouring a grinding liquid into a grinding wheel for grinding the workpiece. As shown in FIG. 8, the supply of the grinding liquid is performed by bending the pipe or the like so that the grinding liquid is applied to the grinding wheel or the like with a circular or flat cross section or by using a nozzle that widens at the end. ing. Conventional grinding fluid supply methods require a large amount of grinding fluid, and the grinding fluid is likely to scatter, and improvements are required from the viewpoint of energy efficiency and environment.
一方、騒音低減、エネルギー効率の改善を図るものとして、エアーブロー用のエアーノズルでは、例えば、シルベント社製の幅方向が０．５ｍｍ〜２ｍｍ、高さ方向が０．５ｍｍ〜２ｍｍの少なくとも４個以上の微細孔が直線状又は円周状に配置された噴射孔列と、噴射孔列の全てと連通する拡張室と、拡張室と連通する供給口とを備えたフラットタイプの噴射ノズルが知られている。特許文献１、段落［００２３］後段、特許文献２、段落［００４３］中段等。また、かかる形状のものは特許文献３，４等のものが知られている。また、噴射孔の配置がフラットではなく円周状に配設したものもよく知られている。このものは、多数の微細孔からなる噴射孔よりエアーを層流にして噴出することにより、切粉を効率的に吹き飛ばし、騒音値を下げ、コンプレッサーエアー消費量を抑えることができる。また、切削加工に利用した例も知られている（非特許文献１）。
そこで、前述した切削液に代えて研削液に使用することが期待された。しかし、研削液への転用について一言述べられているに過ぎず、本格的な利用については開示されていない。また、切削液の場合は、循環する切削液への切粉の混入や塵埃の混入は少なく、また、フィルター等により濾過するので、微少孔である噴射孔を塞ぐことや、噴射孔の摩耗等の問題は少ない。 Therefore, it has been expected to use it as a grinding fluid instead of the above-described cutting fluid. However, only a word about diversion to grinding fluid is stated, and full-scale use is not disclosed. In the case of cutting fluid, there is little mixing of chips and dust into the circulating cutting fluid, and it is filtered by a filter, etc., so that the injection holes that are minute holes are blocked, the wear of the injection holes, etc. There are few problems.
しかしながら、研削液への適用は困難であった。即ち、研削液は砥石による研削のため、研削屑も非常に微少で、必ずしも濾過されずに循環する研削液に混じり、かかる微少孔の噴射孔を塞ぐという問題があった。さらに、研削加工の場合は、研削屑の他に、大量の微少の砥石屑が混入し、特にこの砥石屑は非常に硬く、小さいので、微少孔の噴射孔を塞ぐ場合の他、逆に噴射孔を削り、層流状態が崩れ、消費量が増大して、研削効率も下がり、エネルギーロスを発生してしまうという問題があった。 However, application to grinding fluid has been difficult. That is, since the grinding liquid is ground by a grindstone, there is a problem that grinding scraps are very small and are not necessarily filtered and mixed with the circulating grinding liquid, thereby blocking the injection holes of such fine holes. Furthermore, in the case of grinding, a large amount of fine grinding stone waste is mixed in addition to grinding waste, and especially this grinding stone waste is very hard and small. There was a problem that the holes were cut, the laminar flow state collapsed, the consumption increased, the grinding efficiency decreased, and energy loss occurred.
本発明の課題は、かかる問題点に鑑みて、研削液による噴射ノズルの微細な噴射孔列の摩耗を防止し、研削液の層流状態を確保し、研削効率がよく、省エネの噴射ノズルを提供することである。さらに、かかる噴射ノズルを用いた研削加工方法を提供することである。 In view of such problems, the problem of the present invention is to prevent wear of fine injection hole arrays of the injection nozzle by the grinding liquid, to ensure a laminar flow state of the grinding liquid, to have a high grinding efficiency, and to save energy. Is to provide. Furthermore, it is providing the grinding method using such an injection nozzle.
本発明においては、ワーク及び前記ワークを研削する砥石車に研磨スラリーを除きかつ濾過されずに混じる研削屑、砥石屑を含む研削液を注ぎながら前記ワークを前記砥石車で研削加工する研削加工方法において、幅方向が０．５ｍｍ〜２ｍｍ、高さ方向が０．５ｍｍ〜２ｍｍの少なくとも４個以上の微細孔が直線状又は円周状に配置された噴射孔列と、前記噴射孔列の全てと連通する拡張室と、前記拡張室と連通する供給口と、を備えた噴射ノズルであって、該噴射ノズルの材質は鉄系材質であり、少なくとも前記噴射孔の孔内面及び出入口が浸炭処理されている噴射ノズルを用いて、前記供給口より前記研削液を供給して、前記研削液を前記噴射孔より、噴出させ、前記ワーク及び前記砥石車に前記研削液を注ぎ研削加工を行う研削加工方法を提供することにより前述した課題を解決した。 In the present invention, a grinding method for grinding a workpiece with the grinding wheel while pouring a grinding fluid containing grinding scraps and grinding stones that are mixed without being removed from the polishing slurry into the workpiece and the grinding wheel for grinding the workpiece. , The injection hole array in which at least four or more fine holes having a width direction of 0.5 mm to 2 mm and a height direction of 0.5 mm to 2 mm are arranged linearly or circumferentially, and all the injection hole arrays An injection nozzle having an expansion chamber communicating with the expansion chamber and a supply port communicating with the expansion chamber, wherein the material of the injection nozzle is an iron-based material, and at least the hole inner surface and the inlet / outlet of the injection hole are carburized. using an injection nozzle that is, by supplying the grinding fluid from the supply port, from said injection hole of said grinding liquid, is ejected, the workpiece and the grinding of performing grinding pouring the grinding fluid to the grinding wheel processing And solve the problems described above by providing law.
即ち、列状に配置された微細孔からなる噴射孔列の近傍を浸炭処理することにより、砥石屑や研削屑の通過する噴射孔、入口、出口の表面硬さを高くする。これにより耐摩耗性が高くなる。表面の耐摩耗性を高くするためには、メッキ、溶射、イオンプレーティング等もあるが、かかる方法では、表面に膜を形成するため噴射孔の断面が小さくなり、形状も不安定である。また、噴射孔を二分割したりしないと、噴射孔内部まで、メッキやコーティングをするのは困難である。これに対して、浸炭処理とすれば、温度による変形程度であり、断面積の減少の少ない。また、二分割したりしなくても、真空浸炭方法を用いて、噴射孔内部まで浸炭処理することができる。なお、浸炭処理に当たっては、噴射ノズルを真空浸炭炉内にセットして、噴射ノズル内外全体を浸炭処理するのが量産に適し、また、容易に浸炭処理できる。 That is, by carburizing the vicinity of the injection hole array composed of the fine holes arranged in a row, the surface hardness of the injection holes, the inlet and the outlet through which the grinding stone waste and grinding waste pass is increased. This increases wear resistance. In order to increase the wear resistance of the surface, there are plating, thermal spraying, ion plating, and the like. However, in such a method, since a film is formed on the surface, the cross section of the injection hole becomes small and the shape is also unstable. Moreover, unless the injection hole is divided into two, it is difficult to plate or coat the inside of the injection hole. On the other hand, if carburizing is performed, the degree of deformation is due to temperature, and the reduction in the cross-sectional area is small. Moreover, even if it does not divide into two, it can carburize to the inside of an injection hole using a vacuum carburizing method. In the carburizing process, it is suitable for mass production that the injection nozzle is set in a vacuum carburizing furnace and the entire inside and outside of the injection nozzle are carburized, and can be easily carburized.
なお、幅方向や高さ方向を０．５ｍｍ〜２ｍｍとしたが、この値は、噴射孔断面からの噴出流が層流となり、噴射孔断面から噴出される研削液等がほぼ同じ断面積で比較的長い距離、例えば加工部まで、研削液等が線状に噴出するような微少孔を具体的に表現するための値である。好ましくは、幅１〜２ｍｍ、高さ０．５〜１ｍｍの矩形、直径０．８〜１．５ｍｍ程度の円形が好ましい。また、孔数は４〜２２個が好ましい。 Although the width direction and the height direction are 0.5 mm to 2 mm, this value is a laminar flow from the cross section of the injection hole, and the grinding fluid or the like discharged from the cross section of the injection hole has almost the same cross-sectional area. It is a value for concretely expressing a minute hole in which a grinding fluid or the like is ejected linearly up to a relatively long distance, for example, a processed portion. Preferably, a rectangle having a width of 1 to 2 mm, a height of 0.5 to 1 mm, and a circle having a diameter of about 0.8 to 1.5 mm are preferable. The number of holes is preferably 4-22.
また、請求項２に記載の発明においては、前記ノズル材質をステンレスとした。浸炭処理をするためには当然母材は鉄系であるが、研削液等がかかるので、防錆の観点からステンレスが好ましい。より具体的には、ＳＵＳ３１６、ＳＵＳ３０４を用いるのが一般的である。 In the invention according to claim 2, the nozzle material is stainless steel. Naturally, the base material is iron-based for carburizing, but since a grinding fluid or the like is applied, stainless steel is preferable from the viewpoint of rust prevention. More specifically, are you use the SUS316, SUS30 4 is common.
また、請求項３に記載の発明においては、前記噴射ノズルは直線状の一列の噴射孔を有するフラット型噴射ノズルとした。芯無し研削盤や、平面研削盤等の外周面がフラットの円筒タイプの研削砥石の幅方向に研削液等を噴射するのに適している。 According to a third aspect of the present invention, the injection nozzle is a flat type injection nozzle having a linear row of injection holes. It is suitable for injecting a grinding fluid or the like in the width direction of a cylindrical grinding wheel having a flat outer peripheral surface such as a centerless grinder or a surface grinder.
一方、先端が鋭角になっている研削盤や、砥石外周幅が狭い切断用（スライス）研削盤等では、研削液を集中させてあてたい。そこで、請求項４に記載の発明においては、前記噴射ノズルは円周状に配設された噴射孔を有する円周型噴射ノズルとした。 On the other hand, in a grinding machine having a sharp tip or a cutting (slicing) grinding machine with a narrow outer peripheral width of the grindstone, the grinding fluid should be concentrated. Therefore, in the invention according to claim 4, the injection nozzle is a circumferential type injection nozzle having injection holes arranged circumferentially.
さらに、研削液を噴射孔より、略層流状態で噴出させ、略層流状態をほぼ確保しながら研削加工部に供給し、研削加工を行うのが好ましい。 Further, it is preferable that the grinding liquid is ejected from the injection hole in a substantially laminar flow state, and is supplied to the grinding portion while ensuring a substantially laminar flow state to perform the grinding process.
即ち、略層流として研削液を供給可能で、少なくとも噴射孔の近傍を浸炭処理して硬度を上げた噴射ノズルを研削盤に使用してワーク及び砥石に略層流状態で研削液を供給しながら研削加工するので、研削液量を少なく、研削液が散逸することなく確実に必要な加工部へ研削液を供給できる。 In other words, the grinding fluid can be supplied as a substantially laminar flow, and the grinding fluid is supplied to the workpiece and the grindstone in a substantially laminar flow state by using an injection nozzle that has been carburized at least in the vicinity of the injection hole to increase the hardness. However, since the grinding process is performed, the amount of the grinding fluid is small, and the grinding fluid can be reliably supplied to the necessary processing portion without the grinding fluid being dissipated.
なお、研削屑や砥石屑等による噴射孔の目詰まり防止のため、請求項５に記載の発明においては、前記研削液は絶対濾過度２０〜３０μｍのフィルターを介して供給するようにした。 In addition, in order to prevent clogging of the injection hole due to grinding scraps, grinding stone scraps, or the like, in the invention according to claim 5, the grinding liquid is supplied through a filter having an absolute filtration degree of 20 to 30 μm.
本発明においては、微細孔が直線状又は円周状に配置された噴射孔列、拡張室、供給口を備えた噴射ノズルの少なくとも噴射孔の内面及び出入口を浸炭処理し、表面硬さを硬くして、耐摩耗性を高く、また、微細孔の変形、断面減少が少ないので、研磨スラリーを除きかつ濾過されずに混じる微細砥粒屑を含有する研削液等による噴射ノズルの微細な噴射孔の摩耗を防止し、好ましくは研削液等の層流状態を確保し、研削効率がよく、省エネの噴射ノズルを提供するものとなった。なお、研削液等に適しているが、空気、ミスト、その他の気体、液体等の流体の層流状噴出に適用できることはいうまでもない。かかる噴射ノズルを用いて、供給口より研削液を供給して、研磨スラリーを除きかつ濾過されずに混じる研削屑、砥石屑を含む研削液を噴射孔より噴出させ、ワーク及び前記砥石車に研削液を注ぎ研削し、研削液量を少なく、研削液が散逸することなく確実に必要な加工部へ研削液を供給できるので、研削液の消費量が少なく、研削液を処理、供給するクーラント設備への負担も軽くなり、メンテナンスが容易で、エネルギー効率が良く、さらには、加工面精度の向上がはかれる研削液を供給できるものとなった。 In the present invention, carburizing is performed on at least the inner surface and the inlet / outlet of the injection nozzle provided with the injection hole array, the expansion chamber, and the supply port in which the fine holes are arranged linearly or circumferentially, thereby increasing the surface hardness. In addition, since the wear resistance is high and the deformation and cross-section reduction of the fine holes are small, the fine injection holes of the injection nozzle by the grinding fluid containing fine abrasive grains mixed without being removed from the polishing slurry and filtered. Thus, a laminar flow state of the grinding fluid or the like is preferably secured, and a spraying nozzle with high grinding efficiency and energy saving is provided. Needless to say, although it is suitable for a grinding fluid or the like, it can be applied to laminar jets of fluids such as air, mist, other gases and liquids. Using such an injection nozzle, the grinding fluid is supplied from the supply port, and the grinding fluid containing grinding waste and grinding stone waste mixed without removing the polishing slurry and being filtered is ejected from the injection hole, and the workpiece and the grinding wheel are ground. Coolant equipment that processes and supplies grinding fluid with low consumption of grinding fluid, because it can be poured and ground to reduce grinding fluid volume and supply grinding fluid to the required processing parts without losing grinding fluid. As a result, it is possible to supply a grinding fluid that is easy to maintain, energy efficient, and can improve the accuracy of the machined surface.
また、請求項２に記載の発明においては、ノズル材質をステンレスとした場合には、防錆を確保できるので、研削液の他、腐食が大きな流体に用いることができる。研削液には防錆剤が含有されている場合が多いが、周辺への飛散や、外部環境による錆の発生原因から噴射ノズルの錆の発生を防ぐ。 In the second aspect of the present invention, when the nozzle material is stainless steel, rust prevention can be ensured, so that it can be used for a highly corrosive fluid in addition to the grinding liquid. The grinding fluid often contains a rust preventive, but it prevents the spray nozzle from rusting due to scattering to the surroundings and the cause of rusting by the external environment.
また、請求項３に記載の発明においては、噴射ノズルを直線状の一列の噴射孔を有するフラット型噴射ノズルとし、外周面がフラットの円筒タイプの研削砥石の幅方向に研削液等を均一に噴射できるので、加工部への研削液の確実な供給が可能であり、研削液の量を減少させ、さらには、加工状況の視認が容易になる。 According to a third aspect of the present invention, the injection nozzle is a flat type injection nozzle having a straight line of injection holes, and the grinding liquid or the like is uniformly distributed in the width direction of a cylindrical grinding wheel having a flat outer peripheral surface. Since it can be sprayed, it is possible to reliably supply the grinding liquid to the processing part, the amount of the grinding liquid is reduced, and furthermore, the visual recognition of the processing state becomes easy.
一方、請求項４に記載の発明においては、噴射ノズルは円周状に配設された噴射孔を有する円周型噴射ノズルとし、研削液を局所的な加工部へあてたので、同様に、研削液の確実な供給が可能であり、研削液の量を減少させ、さらには、加工状況の視認が容易になる。 On the other hand, in the invention described in claim 4, since the injection nozzle is a circumferential injection nozzle having a circumferentially arranged injection hole, and the grinding liquid is applied to the local processing portion, similarly, A reliable supply of the grinding fluid is possible, the amount of the grinding fluid is reduced, and furthermore, the processing status can be easily viewed.
また、請求項５に記載の発明において、研削液を絶対濾過度２０〜３０μｍのフィルターを介して供給するので、研削砥石屑による目詰まりの発生も少なく、噴射孔の摩耗も少なくなるという効果を奏する。 Further, in the invention according to claim 5, since the grinding fluid is supplied through a filter having an absolute filtration degree of 20 to 30 μm, there is little occurrence of clogging due to grinding stone chips, and wear of the injection holes is reduced. Play.
本発明の実施の形態について、図を参照して説明する。図１は本発明のフラット型噴射ノズルの斜視図、図２は図１のＡ−Ａ線矢印の噴射孔及び拡張室の断面図である。図１に示すように、噴射ノズル１０は、本体１の一端に幅方向が１ｍｍ、高さ方向が０．７ｍｍの矩形断面であって、長さが約３ｍｍの微細孔（噴射孔）２が直線状に２２個配置され噴射孔列を形成する。噴射孔２は二個を一組として、噴射孔から流出する流体間の干渉を防止するための鍔３が設けられている。噴射孔２の反対側に外ねじ４が設けられた供給口５が設けられている。供給口５と噴射孔２とは拡張室６により連通されている。なお、符号７は供給口５と拡張室６との間に設けられた絞りであるが、本発明では開放状態である。本体１のフラット部の幅は約６０ｍｍ、奥行き約２５ｍｍである。なお、このものは、シルベント（登録商標）社製のＳＬ−９７３のステンレスノズル（材質ＳＵＳ３１６相当）を改造したものである。 Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a flat type injection nozzle of the present invention, and FIG. 2 is a cross-sectional view of an injection hole and an expansion chamber indicated by arrows AA in FIG. As shown in FIG. 1, the injection nozzle 10 has a rectangular cross section with a width direction of 1 mm and a height direction of 0.7 mm at one end of the main body 1, and a fine hole (injection hole) 2 having a length of about 3 mm. Twenty-two linear holes are arranged to form an injection hole array. A pair of two injection holes 2 is provided with a flange 3 for preventing interference between fluids flowing out from the injection holes. A supply port 5 provided with an external screw 4 is provided on the opposite side of the injection hole 2. The supply port 5 and the injection hole 2 are communicated with each other by an expansion chamber 6. In addition, although the code | symbol 7 is the aperture | diaphragm provided between the supply port 5 and the expansion chamber 6, it is an open state in this invention. The width of the flat part of the main body 1 is about 60 mm and the depth is about 25 mm. This is a modified SL-973 stainless steel nozzle (material equivalent to SUS316) manufactured by Silvent (registered trademark).
即ち、本実施例においては、このＳＬ−９７３ステンレスノズルを真空浸炭室に投入し、浸炭処理をした。図２に示すように、噴射孔２の各表面、拡張室６，本体１の各表面が浸炭処理されている。図３は図２に対する測定部を示す図であり、図４は図３の噴射孔２と拡張室６との接続斜面１２の顕微鏡組織である。図４に示すように、表面が浸炭処理されている。 That is, in this example, this SL-973 stainless steel nozzle was put into a vacuum carburizing chamber and carburized. As shown in FIG. 2, each surface of the injection hole 2 and each surface of the expansion chamber 6 and the main body 1 are carburized. FIG. 3 is a diagram showing a measurement unit corresponding to FIG. 2, and FIG. 4 is a microscopic structure of a connecting slope 12 between the injection hole 2 and the expansion chamber 6 of FIG. As shown in FIG. 4, the surface is carburized.
より詳述すると、図５は図４に示す接続斜面１２，噴射孔２の孔内面１１の硬度分布測定結果であり、（ａ）は表、（ｂ）はグラフで表したものである。図５に示すように、本発明品の噴射孔２の孔内面１１の表面硬度は深さ０．１５ｍｍまで３５０〜４５０ＨＶ、接続斜面１２の表面硬度は深さ０．１ｍｍまで３５０ＨＶと高硬度を示している。これに対し浸炭処理しない比較品はそれぞれ１６０〜２５０ＨＶとなっており、本発明品は浸炭処理により、０．１ｍｍまでの表面硬度を高くされていることがわかる。さらに、浸炭処理を施すことも可能であるが、本発明において、研削液等の使用にあたっては充分な硬度である。 More specifically, FIG. 5 shows the hardness distribution measurement results of the connecting slope 12 and the hole inner surface 11 of the injection hole 2 shown in FIG. 4, where (a) is a table and (b) is a graph. As shown in FIG. 5, the surface hardness of the inner surface 11 of the injection hole 2 of the present invention is 350 to 450 HV up to a depth of 0.15 mm, and the surface hardness of the connecting slope 12 is 350 HV up to a depth of 0.1 mm. Show. On the other hand, the comparative products which are not carburized are 160 to 250 HV, respectively, and it can be seen that the surface hardness of the present invention is increased to 0.1 mm by carburizing. Furthermore, it is possible to perform a carburizing process, but in the present invention, the hardness is sufficient when a grinding fluid or the like is used.
次に、前述した実施品を、切削加工に使用した場合について図を参照して説明する。図６は本発明実施例を示す研削加工部を示す写真、図８は従来の扁平ノズルを用いた研削加工部を示す写真である。図８に示すように、従来のものでは、扁平ノズル２０から大量の研削液２１を加工部２２にかけるので、消費量が激しく加工部も視認しずらく、研削液２１も飛散している。 Next, the case where the above-described embodiment product is used for cutting will be described with reference to the drawings. FIG. 6 is a photograph showing a grinding part showing an embodiment of the present invention, and FIG. 8 is a photograph showing a grinding part using a conventional flat nozzle. As shown in FIG. 8, in the conventional product, a large amount of grinding fluid 21 is applied to the processing portion 22 from the flat nozzle 20, so that the consumption is intense and the processing portion is difficult to visually recognize, and the grinding fluid 21 is also scattered.
これに対し、本実施例においては、噴射ノズル１０の内外面が浸炭処理されているので、防錆効果も高く、特に微細孔からなる噴射孔２の孔内面１１も浸炭処理されているので、研削屑、研削砥石の砥粒屑等が含まれていても摩耗が少なく、長寿命であるので、ノズルとしての使用が可能となった。従って、図６に示すように、噴射ノズル１０の噴射孔２から層流状に研削液が噴出され、糸状に所定の加工部２２に供給が可能となった。また、研削液の量も少なく、加工部も視認し易く、研削液の飛散も少なくできる。従って、クーラントシステム等のメンテナンスも容易となり、研削加工精度も向上する研削加工方法となった。 On the other hand, in the present embodiment, since the inner and outer surfaces of the injection nozzle 10 are carburized, the rust prevention effect is also high, and since the hole inner surface 11 of the injection hole 2 made of fine holes is also carburized, Even if it contains grinding scraps, abrasive scraps of grinding wheels, etc., it has little wear and has a long life, so it can be used as a nozzle. Therefore, as shown in FIG. 6, the grinding liquid is ejected in a laminar flow form from the injection hole 2 of the injection nozzle 10, and can be supplied to the predetermined processing portion 22 in a thread form. Further, the amount of the grinding fluid is small, the processed part is easily visible, and the scattering of the grinding fluid can be reduced. Therefore, the maintenance of the coolant system and the like is facilitated, and the grinding method has improved the grinding accuracy.
図７は本発明の噴射ノズルの他の実施例を示す。図７に示すものは、噴射孔２を円周状に配置した円周型噴射ノズル１５である。前述したフラット型噴射ノズル１０とは、噴射孔の配置が異なるため、形状がことなるが、同機能を有しており、同様な部分については、前述したと同符号を付し説明を省略する。図７の円周型噴射ノズルは、加工部が狭いものに適する。 FIG. 7 shows another embodiment of the injection nozzle of the present invention. FIG. 7 shows a circumferential injection nozzle 15 in which the injection holes 2 are arranged in a circumferential shape. The shape differs from the flat type injection nozzle 10 described above due to the difference in the arrangement of the injection holes, but it has the same function, and the same parts are denoted by the same reference numerals as those described above, and description thereof is omitted. . The circumferential injection nozzle shown in FIG. 7 is suitable for a narrow processing portion.
１ 本体
２ 噴射孔（微細孔）
６ 拡張室
５ 供給口
１１ 噴射孔の孔内面
１０ （フラット型）噴射ノズル
１５ 噴射ノズル
２１ 研削液
２２ 加工部
1 Body 2 Injection hole (micro hole)
6 Expansion chamber 5 Supply port 11 Hole inner surface 10 of injection hole (Flat type) Injection nozzle 15 Injection nozzle 21 Grinding fluid 22 Processing part
Claims (5)
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| Application Number | Priority Date | Filing Date | Title |
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| JP2006081459A JP4835220B2 (en) | 2006-03-23 | 2006-03-23 | Grinding method |
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| JP2006081459A JP4835220B2 (en) | 2006-03-23 | 2006-03-23 | Grinding method |
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| JP2007253081A JP2007253081A (en) | 2007-10-04 |
| JP4835220B2 true JP4835220B2 (en) | 2011-12-14 |
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| JP2011067876A (en) * | 2009-09-24 | 2011-04-07 | Toshiba Corp | Machining device |
| KR101943258B1 (en) * | 2017-09-08 | 2019-01-30 | 시오 컴퍼니 리미티드 | Nozzle, nozzle fixing structure, and nozzle assembly |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60108368A (en) * | 1983-11-18 | 1985-06-13 | 東レ株式会社 | Nozzle for horning gun |
| JPH01205063A (en) * | 1988-02-10 | 1989-08-17 | Daido Steel Co Ltd | Wear-resistant stainless steel parts |
| JPH10166270A (en) * | 1996-12-10 | 1998-06-23 | Toshiba Mach Co Ltd | Precision abrasive grain fluidized processing and device therefor |
| JPH10296633A (en) * | 1997-04-30 | 1998-11-10 | Nissan Motor Co Ltd | Grinding fluid supply device for grinder |
| JP2000117606A (en) * | 1998-10-09 | 2000-04-25 | Asahi Glass Co Ltd | Grinding method for glass panel face surface for cathode ray tube |
| JP4457444B2 (en) * | 1999-11-12 | 2010-04-28 | 栗田工業株式会社 | Abrasive recovery method |
| JP2003334760A (en) * | 2002-05-15 | 2003-11-25 | Asahi Diamond Industrial Co Ltd | Nozzle |
| JP4397153B2 (en) * | 2002-08-30 | 2010-01-13 | 株式会社ニデック | Grinding water tank equipment |
| JP4774194B2 (en) * | 2003-03-18 | 2011-09-14 | 株式会社ブンリ | Filtration device |
| JP4458518B2 (en) * | 2004-01-29 | 2010-04-28 | 株式会社リコー | Method for producing cylindrical member, component for electrophotographic image forming apparatus using cylindrical member, and centerless grinding apparatus |
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