JP4831240B2 - Manufacturing method of sheet capacitor - Google Patents

Description

The present invention relates to a manufacturing method of the sheet con den service to be used in various electronic apparatuses.

  The conventional sheet capacitor uses a valve metal porous sheet body such as aluminum or tantalum as an anode element, a dielectric oxide film is formed on this surface, and a solid electrolyte layer such as a functional polymer or manganese dioxide is provided thereon, A cathode layer was provided on the outer surface, the whole was externally molded, and a terminal electrode composed of a lead plate electrically connected to the anode element and the cathode layer was provided so as to be positioned at both ends of the exterior.

  The conventional sheet capacitor has a problem in that the high frequency response is inferior because the lead plate electrically connected to the anode element and the cathode layer is routed so that the terminal electrode is located at both ends of the exterior.

The present invention is intended to solve the conventional problems, it is an object to provide a method for producing a sheet con den support the high frequency response is improved.

  In order to achieve the above object, the present invention has the following configuration.

The present invention relates to a valve metal porous sheet formed by making one surface porous, a dielectric oxide film provided on the porous surface of the valve metal porous sheet, and an upper surface of the dielectric oxide film. A solid electrolyte layer provided on the cathode, a cathode layer provided on the upper surface of the solid electrolyte layer, and a protective layer provided in the stacking direction of the valve metal porous sheet, the dielectric oxide film, the solid electrolyte layer, and the cathode layer. These valve metal porous sheet, dielectric oxide film, solid electrolyte layer, cathode layer, and protective layer are formed and then embedded in the mounting substrate.

  The extraction electrode may be provided on the surface opposite to the porous surface of the valve metal porous sheet.

  Also, the valve metal porous sheet body formed by making one surface porous, the dielectric oxide film provided on the porous surface of the valve metal porous sheet body, and the upper surface of the dielectric oxide film are provided. A solid electrolyte layer, a cathode layer provided on the top surface of the solid electrolyte layer, and a first lamination direction provided in the lamination direction of the valve metal porous sheet, the dielectric oxide film, the solid electrolyte layer, and the cathode layer A first protective electrode provided on the side of the side protective layer, the lower surface of the first lamination direction side protective layer, and on the opposite side of the porous surface of the valve metal porous sheet body; A second extraction electrode that is electrically connected to the first extraction electrode and is in contact with a side surface of the first stacking direction side protective layer, and covers an exposed portion of the first extraction electrode and the second extraction electrode. And a protective layer, and may be embedded in the mounting substrate.

  Further, the cathode layer, the first laminating direction side protective layer, the extraction electrode, and the second laminating direction side protective layer may be flush.

  Also, the valve metal porous sheet body formed by making one surface porous, the dielectric oxide film provided on the porous surface of the valve metal porous sheet body, and the upper surface of the dielectric oxide film are provided. A solid electrolyte layer, a cathode layer provided on the upper surface of the solid electrolyte layer, an extraction electrode provided on one side of the valve metal porous sheet, and the other side of the valve metal porous sheet, A first protective layer covering the surface opposite to the porous surface of the valve metal porous sheet body, and a surface of the first protective layer opposite to the surface in contact with the side surface of the valve metal porous sheet body A first extraction electrode provided on the surface and electrically connected to the cathode layer; a second extraction electrode covering the exposed surface of the extraction electrode; and a second protective layer covering the exposed surface of the cathode layer And may be embedded in the mounting board.

  The valve metal porous sheet body may be an aluminum foil obtained by etching one side.

  Further, the valve metal porous sheet body may be a sintered body of valve metal powder.

  The cathode electrode portion may be an unetched surface of an aluminum foil obtained by etching one surface.

  The extraction electrode may be a metal layer provided on an unetched surface of an aluminum foil having one surface etched.

  Moreover, you may utilize the single side | surface in which the dielectric oxide film of the sintered compact of valve metal powder is not formed for an extraction electrode.

  The solid electrolyte layer may use a functional polymer.

  Further, manganese dioxide may be used for the solid electrolyte layer.

  As described above, according to the present invention, since the extraction electrode of the sheet capacitor is the upper and lower surfaces, one surface and the side surface, other electronic circuits or electronic components can be directly mounted. This eliminates the need for improving the high frequency response and reducing the size.

1 is a perspective view of a sheet capacitor according to Embodiment 1 of the present invention. Sectional view Sectional drawing explaining the manufacturing method Sectional drawing explaining the manufacturing method Sectional drawing explaining the manufacturing method Sectional drawing explaining the manufacturing method Sectional drawing explaining the manufacturing method Sectional drawing explaining the manufacturing method Sectional drawing explaining the manufacturing method The perspective view of the sheet capacitor in Embodiment 2 of the present invention Sectional view The perspective view of the sheet capacitor in Embodiment 3 of the present invention Sectional view

(Embodiment 1)
Hereinafter, the sheet capacitor according to Embodiment 1 of the present invention will be described with reference to the drawings.

  1 is a perspective view of a sheet capacitor according to Embodiment 1 of the present invention, and FIG. 2 is a sectional view thereof.

  In the figure, reference numeral 1 denotes a valve metal porous sheet made of aluminum foil or the like whose one surface is made porous. 6 is an extraction electrode provided on the non-porous surface of the valve metal porous sheet body 1 as necessary. In the case of an aluminum foil, the extraction electrode 6 uses the non-porous surface as it is. Alternatively, it can be configured by forming another metal layer such as gold, copper or nickel on the non-porous surface, or in the case of a sintered body of valve metal powder, sintering without forming a dielectric oxide film. The surface of the body may be used as it is, or another metal layer such as gold, copper or nickel may be formed by a method such as sputtering or vapor deposition.

  On the other hand, a dielectric oxide film 3, a solid electrolyte layer 4, and a cathode electrode layer 5 are provided in this order on the porous surface of the valve metal porous sheet 1 in this order.

  The dielectric oxide film 3 is provided by anodizing the porous surface of the valve metal porous sheet body 1.

  The solid electrolyte layer 4 is formed by forming a solid electrolyte layer such as polypyrrole or polythiophene on the upper surface of the dielectric oxide film 3 by chemical polymerization or electrolytic polymerization, or by impregnating with a manganese nitrate solution and thermally decomposing it. You can get it.

  The cathode electrode layer 5 can be formed by attaching a metal foil such as copper on the upper surface of the solid electrolyte layer 4 or applying a conductive paste on the upper surface of the solid electrolyte layer 4.

  Reference numeral 7 denotes a protective layer, which is provided on the side surface of the valve metal porous sheet body 1, the dielectric oxide film 3, the solid electrolyte layer 4, the cathode electrode layer 5, and the extraction electrode 6 in the stacking direction with an epoxy resin or the like.

  The sheet capacitor configured as described above will be described below with reference to the drawings for a manufacturing method thereof.

  3 to 9 are cross-sectional views illustrating the method for manufacturing the sheet capacitor in the first embodiment of the present invention.

  First, as shown in FIG. 3, an aluminum foil whose one side is made porous by etching is prepared as a valve metal porous sheet body 1. This valve metal porous sheet body 1 can be easily made porous by masking one side and performing etching.

  Next, as shown in FIG. 4, a resist layer 2 made of a chemical resistant photoresist, a masking tape or the like is formed except for the porous surface of the valve metal porous sheet body 1.

  Next, the dielectric oxide film 3 is formed on the upper surface of the valve metal porous sheet 1 as shown in FIG.

  Next, the dielectric oxide film 3 formed is immersed in a solution containing polypyrrole, subsequently immersed in an oxidant solution, and thinly formed by chemical oxidation polymerization to form a polypyrrole layer on the upper surface of the dielectric oxide film 3. A solid electrolyte as shown in FIG. 6 is formed by immersing the polypyrrole layer in a solution containing polypyrrole and electrolytically polymerizing the polypyrrole layer on the + side and the electrode in the solution on the-side to form the polypyrrole layer. Layer 4 is formed.

  Next, as shown in FIG. 7, the cathode electrode layer 5 made of copper is attached and formed so as to be electrically connected to the solid electrolyte layer 4.

  Next, as shown in FIG. 8, the resist layer 2 on the surface opposite to the surface having the dielectric oxide film 3, the solid electrolyte layer 4 and the cathode electrode layer 5 of the porous valve metal sheet 1 is peeled or dissolved and removed. The valve metal porous sheet body 1 is exposed.

  Next, as shown in FIG. 9, an extraction electrode 6 made of copper is formed on the surface of the valve metal porous sheet 1 from which the resist layer 2 has been peeled or dissolved and removed. The extraction electrode 6 can be formed by sputtering, vapor deposition, or attaching a copper foil.

  Finally, as shown in FIG. 2, a protective sheet 7 is formed in the stacking direction of the valve metal porous sheet body 1, that is, on the side surface, thereby completing the sheet capacitor.

  In the sheet capacitor configured as described above, the electrodes to be taken out are the cathode electrode layer 5 and the take-out electrode 6, that is, the upper and lower surfaces of the sheet capacitor, so that if embedded in a mounting substrate having a conductive pattern, other electronic circuits or electronic components are directly And the like can be directly mounted, so that the conductive pattern of the lead is not required, and the high frequency response is improved and the size can be reduced.

  In the present embodiment, it is possible to use an aluminum foil of an aluminum electrolytic capacitor that has already been established as the valve metal porous sheet body 1 by etching one side, and mask one side of the aluminum foil. If the etching process is performed, the valve metal porous sheet body 1 having the desired etching pid can be easily obtained, and the productivity can be increased.

  Moreover, the sintered body of valve metal powders, such as a tantalum, is used as the valve metal porous sheet body 1 because the electrostatic capacitance obtained becomes large.

  Furthermore, the extraction electrode 6 for one side of the sintered body of aluminum foil or valve metal powder does not require a metal layer as another extraction electrode 6, has fewer components, improves production efficiency, and is cost effective. This is because it becomes advantageous.

  Further, by using a functional polymer such as polypyrrole or polythiophene as the solid electrolyte layer 4, a sheet capacitor having a low impedance can be obtained, and the high frequency response can be further improved. However, as a fully established technique, there is a method of forming manganese dioxide, and by making it a method that can control the thickness freely without being dense, further productivity and reliability can be improved.

(Embodiment 2)
Hereinafter, a sheet capacitor according to Embodiment 2 of the present invention will be described with reference to the drawings.

  FIG. 10 is a perspective view of a sheet capacitor according to Embodiment 2 of the present invention, and FIG. 11 is a sectional view thereof. Here, in FIG. 10 and FIG. 11, the same components as those in FIG. 1 and FIG.

  In the figure, reference numeral 1 denotes a valve metal porous sheet body 1 whose one surface is made porous. A dielectric oxide film 3, a solid electrolyte layer 4 and a cathode electrode layer 5 are laminated in this order on the porous surface of the valve metal porous sheet body 1.

  Reference numeral 11 denotes a first extraction electrode provided on the non-porous surface of the valve metal porous sheet body 1 with a width larger than the entire width of the valve metal porous sheet body 1, and the extraction electrode 11 is made of an aluminum foil. In this case, the non-porous surface may be used as it is, or it may be configured by forming another metal layer such as gold, copper or nickel on the non-porous surface, or the valve metal powder In the case of a sintered body, the surface of the sintered body on which no dielectric oxide film is formed may be used as it is, or another metal layer such as gold, copper or nickel is formed by a method such as sputtering or vapor deposition. You may do it.

  Reference numeral 12 denotes a first laminating direction side protective layer on the upper surface of the first extraction electrode 11 and the side surface in the laminating direction of the valve metal porous sheet body 1, the dielectric oxide film 3, the solid electrolyte layer 4 and the cathode electrode layer 5. Are provided with an epoxy resin or the like. On the surface in contact with the first stacking direction side protective layer 12, the second extraction electrode 13 electrically connected to the first extraction electrode 11 is sputtered or vapor deposited with another metal layer such as gold, copper or nickel. It is formed by a method such as

  A protective layer 14 is formed so as to cover the exposed portions of the first extraction electrode 11 and the second extraction electrode 13, thereby completing the sheet capacitor. At this time, the protective layer 14, the cathode electrode layer 5, the first stacking direction side protective layer 12, and the second extraction electrode 13 are flush with each other.

  In the present embodiment, the first extraction electrode 11 and the second extraction electrode 13 are provided. However, the first extraction electrode 11 and the second extraction electrode 13 may be formed simultaneously, and at least the valve What is necessary is just to be electrically connected with the metal porous sheet | seat body 1, and one end be comprised flush with the cathode electrode layer 5. FIG.

  In the sheet capacitor configured as described above, the electrodes to be extracted are the cathode electrode layer 5 and the second extraction electrode 13, that is, only one side of the sheet capacitor is directly mounted, so that other electronic circuits or electronic components are directly mounted. Therefore, the lead conductive pattern is not required, and the high frequency response is improved and the size can be reduced.

(Embodiment 3)
Hereinafter, a sheet capacitor according to Embodiment 3 of the present invention will be described with reference to the drawings.

  12 is a perspective view of a sheet capacitor according to Embodiment 3 of the present invention, and FIG. 13 is a cross-sectional view thereof. Here, in FIG. 12 and FIG. 13, the same components as those in FIG. 1 and FIG. 2 of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the figure, 1 is a valve metal porous sheet body in which one surface is made porous. A dielectric oxide film 3, a solid electrolyte layer 4 and a cathode electrode layer 5 are laminated in this order on the porous surface of the valve metal porous sheet body 1.

  21 is an extraction electrode, which is provided on one side surface of the valve metal porous sheet 1 and forms another metal layer such as gold, copper or nickel by a method such as sputtering or vapor deposition. 22 is a first protective layer, at least a non-porous surface of the valve metal porous sheet body 1 and a side surface opposite to the valve metal porous sheet body 1 having the extraction electrode 21, and a dielectric oxide film. 3 and the exposed surface of the solid electrolyte layer 4 are formed. Reference numeral 23 denotes a first extraction electrode, which is provided so as to be electrically connected to the cathode electrode layer 5 on at least the surface of the first protective layer 22 opposite to the surface in contact with the valve metal porous sheet body 1, that is, the side surface. Another metal layer such as gold, copper or nickel is formed by a method such as sputtering or vapor deposition. A second protective layer 24 is formed so as to cover at least the exposed surface of the cathode electrode layer 5. Reference numeral 25 denotes a second extraction electrode which is provided so as to cover the exposed surface of the extraction electrode 21 and completes a sheet capacitor by forming another metal layer such as gold, copper or nickel by a method such as sputtering or vapor deposition. Product.

  In the sheet capacitor configured as described above, the electrodes to be taken out are the first take-out electrode 23 and the second take-out electrode 25. That is, because of the side surface of the sheet capacitor, another electronic circuit or electronic component or the like is directly connected to this side surface. Since it can be directly mounted, the lead conductive pattern is not required, and the high frequency response is improved and the size can be reduced.

  Furthermore, since it has an extraction electrode similar to a surface-mounted electronic component such as a square chip resistor or a multilayer ceramic capacitor that is normally distributed in the market as a general-purpose product, an electronic component mounting machine can be used.

DESCRIPTION OF SYMBOLS 1 Valve metal porous sheet body 2 Resist layer 3 Dielectric oxide film 4 Solid electrolyte layer 5 Cathode electrode layer 6 Extraction electrode 11 1st extraction electrode 12 1st lamination direction side protective layer 13 2nd extraction electrode 14 Protective layer 21 Extraction electrode 22 1st protective layer 23 1st extraction electrode 24 2nd protection layer 25 2nd extraction electrode

Claims (1)

A dielectric oxide film is provided on the porous surface of the valve metal porous sheet formed by making one surface porous,
A solid electrolyte layer is provided on the top surface of the dielectric oxide film,
A cathode layer is provided on the upper surface of the solid electrolyte layer,
Provide a protective layer in the stacking direction of the valve metal porous sheet body, dielectric oxide film, solid electrolyte layer and cathode layer,
A method of manufacturing a sheet capacitor in which these valve metal porous sheet, dielectric oxide film, solid electrolyte layer, cathode layer, and protective layer are formed and then embedded in a mounting substrate.

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