JP4817337B2 - Tuning fork type vibration component characteristic inspection device, characteristic inspection method - Google Patents

Description

  The present invention relates to a characteristic inspection apparatus for a tuning fork type vibration component having a tuning fork structure, and a characteristic inspection method thereof.

Conventionally, as a tuning fork type vibration component, there are a crystal resonator having a tuning fork structure, an angular velocity sensor, a yaw rate sensor, and the like. Since these tuning fork type vibration parts mechanically vibrate the tuning fork structure part, it is possible to generate a clock signal having a relatively low frequency with low power consumption. The tuning fork type vibration component is used for detecting acceleration and angular velocity by utilizing this mechanical vibration. As a result, tuning-fork type vibration components are widely used for hand shake detection of watches, portable terminals, and video cameras.

In order to confirm whether or not this tuning-fork type vibration component performs proper oscillation before mounting, all the characteristics of the frequency and CI (Crystal Impedanse) must be inspected.
Japanese Patent Laid-Open No. 2005-3588

  However, the tuning fork type vibration component requires about 0.5 to 1 second for the tuning fork structure part to vibrate stably after starting to oscillate after being connected to the oscillation circuit. In order to do this, time is required for 0.5 seconds or more per part.

  Therefore, although not known at the time of this application, for example, a tray on which a large number of tuning fork type vibration components can be mounted together is prepared, and all these components are simultaneously oscillated to perform a characteristic inspection and an inspection efficiency. It is conceivable to improve. However, in such a characteristic inspection apparatus, a large number of tuning fork type vibration parts are laid on the tray, so that there is a problem that the inspection result becomes unstable due to resonance and resonance of vibration.

  Further, a probe corresponding to each tuning fork type vibration component needs to be prepared on this tray, and a large number of oscillation circuits must be arranged adjacent to these. As a result, there is a problem that as the tuning fork type vibration parts are integrated on the tray, the device configuration and wiring become extremely complicated. Furthermore, when there is a tuning-fork type vibration component that fails, it is necessary to eject only the component from the tray using a robot arm or the like, resulting in a problem that the apparatus configuration becomes complicated.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a characteristic inspection apparatus capable of inspecting a large number of tuning fork type vibration components at high speed and having good maintainability.

  The above object can be achieved by the following means based on the earnest research of the present inventors.

  That is, the present invention that achieves the above object is a characteristic inspection device for inspecting the vibration characteristics of a tuning fork-type vibration component having a mechanically oscillating vibrator having a tuning fork structure, which rotates the rotary table and the rotary table. A plurality of drive motors, a plurality of circumferentially spaced holding units arranged on the rotary table, holding the tuning fork type vibration component, and provided on the rotary table corresponding to each of the holding units, the holding unit And an oscillation circuit that oscillates the tuning fork type vibration component held in the housing.

  In the above invention, the characteristic inspection apparatus that achieves the above object includes an A / D converter that is provided on the rotary table and converts an inspection signal output from the tuning fork type vibration component into a digital signal. .

  The characteristic inspection apparatus that achieves the above object is characterized in that, in the above invention, an oscillation controller is provided on the rotary table and instructs oscillation to the plurality of oscillation circuits in order.

  In the above invention, the characteristic inspection device that achieves the above object is characterized in that the oscillation controller has a first drive level with respect to the oscillation circuit when the holding unit moves within a first angle range together with the rotary table. And instructing the oscillation circuit to oscillate at a second drive level when the holding unit moves within a second angle range after the first angle range. Features.

  In the characteristic inspection apparatus that achieves the above object, in the above invention, the oscillation controller is characterized in that the second angle range is set smaller than the first angle range.

In the characteristic inspection apparatus that achieves the above object, in the above invention, the oscillation controller instructs the oscillation circuit to oscillate at a low drive level when the holding unit moves within the first angle range. When the holding unit is moved within the second angle range together with the rotary table, the oscillation circuit is instructed to oscillate at a high drive level.

  The characteristic inspection apparatus that achieves the above object is characterized in that, in the above invention, the rotary table includes a slip ring that transmits a digital signal output from the A / D converter.

  In the characteristic inspection apparatus that achieves the above object, in the above invention, the rotary table includes a communication device that wirelessly transmits a digital signal output from the A / D converter.

  In the characteristic inspection apparatus that achieves the above object, in the above invention, the holding unit can contact a case in which the tuning fork type vibration component is inserted and a terminal of the tuning fork type vibration component that is disposed in the case. A conductive contact and an urging device that pushes out the tuning fork type vibration component inserted into the case to the outside.

  The characteristic inspection apparatus that achieves the above object is characterized in that, in the above invention, the holding unit has a contact moving mechanism for projecting and retracting the conductive contact with respect to the terminal of the tuning fork type vibration component.

  The invention that achieves the above object is a characteristic inspection method for inspecting the vibration characteristics of a tuning fork type vibration component having a mechanically oscillating tuning fork structure vibrator, and a plurality of them are arranged on the rotary table at intervals in the circumferential direction. A supply step for supplying the tuning fork type vibration component to the holding unit, an oscillation step for causing the tuning fork type vibration component to oscillate by an oscillation circuit while the holding unit is rotating together with the rotary table, and the rotary table. And an A / D conversion step for converting an inspection signal of the tuning fork type vibration component in a stable oscillation state into a digital signal by an A / D converter provided in the tuning fork type vibration component. Inspection method.

  According to the characteristic inspection method for achieving the above object, in the above invention, the oscillating step further includes the tuning fork type vibration component as a first component when the holding unit is moved within a first angle range together with the rotary table. And oscillating the tuning fork type vibration component at a second drive level when the holding unit is moved within a second angle range after the first angle range. To do.

  According to the present invention, since the vibration of the tuning fork type vibration component can be stabilized by using the rotation time of the rotary table, it is possible to achieve both high-accuracy characteristic inspection and high inspection efficiency.

  Hereinafter, a characteristic inspection apparatus and a characteristic inspection method for a tuning-fork type vibration component according to an example of an embodiment of the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows an overall configuration of a characteristic inspection system 100 according to the present embodiment. The characteristic inspection system 100 includes a parts feeder 110, a characteristic inspection apparatus 1, and a carry-out apparatus 120.

The parts feeder 110 conveys and supplies the tuning fork type crystal resonators 300 in a line along the rail 112. A turntable 114 and a pusher 116 are provided at the final end of the rail 112. The turntable 116 rotates the tuning fork crystal unit 300 by +90 degrees or -90 degrees based on the direction identification result of the tuning fork type crystal unit 300 by a direction identification camera (not shown). After completing the rotation, the pusher 116 pushes the tuning fork type crystal resonator 300 to the characteristic inspection apparatus 1 side.

The carry-out device 120 includes a transfer table 122 and a drive motor 124 that rotates the transfer table 122. The height of the upper surface of the transfer table 122 is equal to the height of the upper surface of the rotary table 10 of the characteristic inspection measure 1 described later, and the tuning fork type crystal resonator 300 pushed out from the rotary table 10 can be received as it is. The upper surface of the conveying table 122 of the unloading device 120, suction Nozzle is formed with a plurality in the circumferential direction, to suck and hold the tuning-fork quartz resonator 300 received. In this state, the tuning table fork type crystal resonator 300 is supplied to the downstream stroke (not shown) by rotating the transfer table 122. As the downstream process, for example, an appearance inspection device, a taping unit, or the like can be considered.

  The characteristic inspection apparatus 1 includes a rotary table 10 rotated by a drive motor housed in a base 5 and a total of 12 holding units 20 arranged on the rotary table 10 at an angular interval of 30 degrees in the circumferential direction. A total of twelve oscillation circuits 30 provided on the turntable 10 corresponding to each holding unit 20, a control unit 40 provided on the turntable 10, and outside the turntable 10 (base 5). An external computer 80 is provided. Further, four collection pockets 60 are arranged in the vicinity of the outer edge of the turntable 10.

  As shown in an enlarged view in FIG. 2, the holding unit 20 provided on the rotary table 10 includes a cylindrical case 21 into which the tuning fork type crystal resonator 300 is inserted, and a conductive contact disposed in the case 21. 22 and a discharge solenoid (biasing device) 23 for pushing the tuning fork type crystal resonator 300 inserted in the case 21 out of the case 21. The cylindrical case 21 is arranged such that its longitudinal direction is along the radial direction of the turntable 10. The opening 21 </ b> A of the case 21 is located on the outer side in the radial direction, that is, on the periphery of the turntable 10. Accordingly, the tuning fork type crystal resonator 300 is inserted into the case 21 through the opening 21A. The discharge solenoid 23 is disposed on the opposite side of the case 21 from the opening 21A, and the piston 23A of the discharge solenoid 23 moves in the case 21 toward the opening 21A. As a result, the tuning fork type crystal resonator 300 is pushed out from the case 21.

  A through hole 10 </ b> A is formed on the upper surface of the turntable 10. The through hole 10 </ b> A is configured to open inside the case 21. The conductive contact 22 is accommodated in the through-hole 10 </ b> A. As a result, the conductive contact 22 can be brought into contact with a terminal 300 </ b> A formed on the bottom surface of the tuning fork type crystal resonator 300. Furthermore, the holding unit 20 includes a contact moving solenoid (contact moving mechanism) 25 that is fixedly arranged on the back side of the turntable 10. The piston 25 </ b> A of the contact moving solenoid 25 reciprocates in the thickness direction (vertical direction) of the rotary table 10. Accordingly, the conductive contact 22 fixed to the piston 25A projects and retracts toward the terminal 300A side of the tuning fork type crystal resonator 300 in conjunction with the movement of the piston 25A.

  When the tuning fork type crystal resonator 300 is inserted into the case 21 or discharged from the case 21, the conductive contact 22 is retracted from the case 21. On the other hand, when the tuning fork type crystal resonator 300 is accommodated in the case 21, the piston 25 </ b> A immediately rises to cause the conductive contact 22 to protrude into the case 21. By this conductive contact 22, the tuning fork type crystal resonator 300 is pushed upward and pressed against the ceiling 21 </ b> B of the case 21. As a result, the conductive contact 22 can be pressed against the terminal 300A with a predetermined pressure, and the holding state of the tuning fork type crystal resonator 300 can be stabilized.

  FIG. 3 shows the internal configuration of the control unit 40 and the external computer 80 in the characteristic inspection apparatus 1. The control unit 40 arranged on the rotary table 10 includes a solenoid controller 41, an oscillation controller 42, a first multiplexer 43, a second multiplexer 44, an A / D converter 45, and a frequency buffer 46.

The solenoid controller 41 controls the discharge solenoid 23 and the contact moving solenoid 25 of the holding unit 20. The oscillation controller 42 controls ON / OFF of the oscillation of the tuning fork type crystal resonator 300 by the oscillation circuit 30 and the drive level during oscillation with high accuracy. The first multiplexer 43 transmits the series equivalent resistance (CI: crystal impedance) value of the tuning fork type crystal resonator 300 output via the plurality of oscillation circuits 30 to the A / D converter 45. The second multiplexer 44 transmits the frequency value of the tuning fork type crystal resonator 300 output via the oscillation circuit 30 to the frequency buffer 46. The A / D converter 45 converts the analog CI value transmitted from the first multiplexer 43 into a digital signal. The frequency buffer 46 accumulates the frequency values transmitted from the second multiplexer 44 and collectively outputs them.

  The external computer 80 includes a frequency controller 81 and a pass / fail determination processing unit 82. The frequency controller 81 receives the analog frequency signal transmitted from the frequency buffer 46, digitally converts it, and outputs it. Specifically, the analog frequency signal is converted into a digital signal of a short-range digital communication bus specification. The pass / fail determination processing unit 82 receives the digital frequency signal output from the frequency controller 81 and the digital CI value output from the A / D converter 45, and performs pass / fail determination on the output characteristics of the tuning fork crystal resonator 300. Do. The pass / fail judgment result is transmitted to the solenoid controller 41 of the control unit 40. If the result is acceptable, the tuning fork type crystal resonator 300 is discharged to the carry-out device 120 side. On the other hand, if it fails, it is discharged into a specific collection pocket 60 according to the level.

  Note that a slip ring 90 provided on the rotary table 10 is used for signal transmission between the control unit 40 and the external computer 80. When a signal is transmitted through the slip ring 90, noise is generally easily generated in the signal. However, in the present embodiment, the analog frequency signal transmitted via the slip ring 90 is not easily affected by noise. Also, analog CI values that are susceptible to noise are digitally converted in advance on the rotary table 10 and then transmitted to the outside via the slip ring 90, so that they are less susceptible to noise. Further, since the control signal of the solenoid controller 41 is digitized, it is not easily affected by noise.

  Next, a characteristic inspection process by the characteristic inspection apparatus 1 will be described.

  As shown in FIG. 4, simultaneously with the tuning fork type crystal resonator 300 being placed on the rotary table 10, the solenoid controller 41 instructs the contact moving solenoid 25 to raise the contact 22. At the same time, the oscillation controller 42 instructs the oscillation circuit 30 to oscillate the tuning fork type crystal resonator 300. That is, the control unit 40 oscillates the tuning fork type crystal resonator 300 simultaneously with the insertion into the holding unit 20.

In more detail, while the tuning fork type crystal resonator 300 and the holding unit 20 are moving within the first angle range A of 120 degrees from the start of oscillation, the oscillation controller 42 adjusts the tuning fork type crystal resonator with a low drive level. Oscillate 300. As a characteristic of the tuning fork type crystal resonator 300, it takes about 0.5 seconds from the start of oscillation until the vibration of the tuning fork structure is stabilized. Therefore, a relatively large first angle range A allows time to stabilize the frequency. Secure. Just before the end of the first angle range A, the CI value and the frequency are measured via the first and second multiplexers 43 and 44, and the low drive level characteristic inspection is ended. While the tuning fork type crystal resonator 300 and the holding unit 20 are moving within the second angle range B of 60 degrees following the first angle range A, the oscillation controller 42 is adjusted to the tuning fork type crystal vibration by the high drive level. The child 300 is oscillated. Since the tuning fork type crystal resonator 300 has already oscillated stably in the first angle range A, the tuning fork type crystal resonator 300 can be stably oscillated in a relatively short time by continuously switching to the high drive level. Can do. Accordingly, the second angle range B can be made smaller than the first angle range A by about half or less and about one third. Just before the end of the second angle range B, the CI value and the frequency are measured via the first and second multiplexers 43 and 44, and the characteristic inspection of the high drive level is ended.

  During the third angle range C of 30 degrees from the end of the second angle range B to the discharge position of the tuning fork crystal resonator 300, the pass / fail determination processing unit 82 performs pass / fail determination of the frequency and the CI value. When the characteristics of the tuning fork type crystal resonator 300 satisfy the standard, the solenoid controller 41 instructs the discharge solenoid 23 to discharge the tuning fork type crystal resonator 300 to the carry-out device 120. On the other hand, when the determination result does not satisfy the standard, the tuning fork type crystal resonator 300 is discharged to the specific collection pocket 60 according to the reject level after passing the discharge position to the carry-out device 120.

FIG. 5 shows a flowchart showing a method for inspecting the characteristics of the tuning fork type crystal resonator 300 described above. In this characteristic inspection method, the tuning fork type crystal resonator 300 is supplied to the rotary table 10 in step S500, and oscillation at a low drive level in the first angle range A is executed in step S510. When the oscillation is stabilized, the characteristics of the tuning fork type crystal resonator 300 at the low drive level are inspected (S 520 ), and subsequently , the oscillation with the high drive level in the second angle range B is executed (S 530). ). When the oscillation is stabilized, a characteristic inspection of the tuning fork type crystal resonator 300 at a high drive level is performed at step 540, and a pass / fail determination is made based on the inspection results at step 520 and step 540 (S550). As a result, if the result is acceptable, the tuning fork type crystal resonator 300 is carried out to the carry-out device 120 side (step S560). On the other hand, if the result is unacceptable, the tuning fork type crystal resonator 300 is collected in the accommodation pocket 60 (S570). . In this way, all the tuning fork type crystal resonators 300 are subjected to characteristic inspection while being sequentially rotated by the rotary table 10.

  As described above, in the characteristic inspection apparatus 1 of the present embodiment, the plurality of holding units 20 are arranged in the circumferential direction at intervals of 30 degrees on the rotary table 10, and the tuning fork type crystal resonator 300 is held by the holding unit 20. The oscillation / characteristic inspection is performed using the rotation time. As a result, even if a large number of tuning fork type crystal resonators 300 are successively carried into the rotary table 10, the tuning fork type crystal resonators 300 are arranged in a radially expanded manner, so that the tuning fork type crystal resonator 300 is prevented from approaching. And resonating with each other. As a result, it is possible to improve both the inspection accuracy of the tuning fork type crystal resonator 300 and the high-speed characteristic inspection reasonably.

Furthermore, this characteristic inspection apparatus 1 has the control unit 40 mounted on the rotary table 10, so that the oscillation control of the tuning fork type crystal resonator 300, the measurement of CI value and frequency output characteristics, etc. can be performed within the rotary table 10. Completely implemented. For example, an analog signal (CI value here) output from the tuning fork type crystal resonator 300 is digitally converted by the A / D converter 45 on the turntable 10. Similarly, the oscillation control for the oscillation circuit 30 is performed by the oscillation controller 42 on the turntable 10. As a result, various types of information are organized in the turntable 10, so that it is possible to simplify the wiring structure such as the slip ring 90 when sending the inspection result to the outside of the turntable 10, and the influence of noise is reduced. It is possible to reduce.

When determining the characteristics of the tuning fork type crystal resonator 300, there is a tuning fork type crystal resonator 300 in which the frequency and the CI value become unstable in accordance with the change of the drive level. In the characteristic inspection apparatus 1, the characteristic inspection is performed at the first drive level ( low drive level) when the tuning fork type crystal resonator 300 is moving within the first angle range A, and this is followed by the first When moving within the two angle range B, the characteristic inspection is performed at the second drive level (high drive level). Thereby, the characteristic inspection by two or more types of drive levels is attained by one transfer in the turntable 10, and a more accurate characteristic inspection is implement | achieved. In particular, by continuously performing the characteristic inspection in this way, the second angle range B can be reduced, and the efficiency of the characteristic inspection is achieved. The tuning fork type crystal resonator 300 is characterized by a certain amount of time until it shifts from non-oscillation to stable oscillation. However, when the drive level is changed thereafter, the tuning fork type crystal resonator 300 is stabilized in a short time.

  Further, the characteristic inspection apparatus 1 performs the characteristic inspection by accommodating the tuning fork type crystal resonator 300 in the cylindrical case 21 and pushing up the conductive contact 22 from below. As a result, the tuning fork crystal resonator 300 can be inspected for characteristics in a stable posture while being sandwiched between the ceiling 21B of the case 21 and the conductive contact 22. Further, since the case 21 serves as a cylindrical guide, the tuning fork type crystal resonator 300 can be smoothly housed and discharged, so that the inspection efficiency can be improved.

  As mentioned above, in this embodiment, although the case where the holding unit 20 grade | etc., Is arrange | positioned on the turntable 10 was illustrated, this invention is not limited to this. For example, a holding unit is disposed on the lower surface side of the turntable 10, and the tuning fork type crystal resonator 300 can be held from above and rotated by a chuck mechanism or a suction mechanism. In the present embodiment, the frequency value and the CI value measured by the rotary table 10 are shown only when they are transmitted to the external computer 80 via the slip ring 90, but the present invention is not limited to this. For example, all inspection results can be digitized and transmitted to the external computer 80 by wireless communication or the like. In this case, a wireless communication device is mounted on the turntable 10.

Furthermore, in the present embodiment, the frequency controller 81 for counting the analog frequency signal is mounted on the external computer 80 side, and the analog frequency signal transmitted from the frequency buffer 46 is digitally converted. Is not limited to this. For example, the frequency controller 81 may be mounted on the turntable 10 side to digitally convert the analog frequency signal. In this way, since all data including the CI value is digitized in the turntable 10, the influence of noise when transmitting information to the outside of the turntable 10 via a slip ring or the like is further reduced. Can do.

  Further, in the present embodiment, the tuning fork type crystal resonator 300 is exemplified as the tuning fork type vibration component. However, the present invention is not limited to this, and components such as a yaw rate sensor and an angular velocity sensor that use mechanical vibration of the tuning fork structure are exemplified. It is also possible to apply.

  Furthermore, in this embodiment, the case where a solenoid is used as a drive mechanism in the holding unit 20 or the like is illustrated, but it goes without saying that the present invention is not limited to this, and an air cylinder or other drive mechanism can be used.

  It should be noted that the characteristic inspection apparatus and characteristic inspection method of the present invention are not limited to the above-described embodiments, and it goes without saying that various changes can be made without departing from the scope of the present invention.

  The present invention can be applied to various scenes where the characteristic inspection of a tuning fork type vibration component is performed.

The perspective view which shows the whole structure of the characteristic inspection system using the characteristic inspection apparatus which concerns on embodiment of this invention. Enlarged partial sectional view for explaining the structure of the holding unit in the same characteristic inspection apparatus Block diagram showing the control configuration of the characteristic inspection apparatus State diagram for explaining the characteristic inspection process in the characteristic inspection apparatus Flow chart explaining characteristic inspection method by the characteristic inspection apparatus

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Characteristic inspection apparatus 5 Base 10 Rotary table 20 Holding unit 30 Oscillation circuit 40 Control unit

Claims (12)

A characteristic inspection device for inspecting vibration characteristics of a tuning fork type vibration component having a vibrator having a tuning fork structure that oscillates mechanically,
A rotating table,
A drive motor for rotating the rotary table;
A plurality of units arranged at intervals in the circumferential direction on the rotary table, a holding unit for holding the tuning fork type vibration component,
An oscillation circuit provided in the rotary table corresponding to each of the holding units, and oscillating the tuning fork type vibration component held by the holding unit;
A characteristic inspection device for a tuning-fork type vibration component, comprising:   The characteristic inspection device for a tuning fork type vibration component according to claim 1, further comprising an A / D converter provided on the rotary table and converting an inspection signal output from the tuning fork type vibration component into a digital signal.   The tuning fork type vibration component characteristic inspection device according to claim 1 or 2, further comprising an oscillation controller provided on the rotary table and instructing oscillation to the plurality of oscillation circuits in order.   The oscillation controller instructs the oscillation circuit to oscillate at a first drive level when the holding unit moves within the first angle range together with the rotary table, and the holding unit 4. The characteristic of a tuning fork type vibration component according to claim 3, wherein the oscillation circuit is instructed to oscillate at a second drive level when moving within a second angle range after the angle range. Inspection device.   5. The tuning-fork type vibration component characteristic inspection apparatus according to claim 4, wherein the oscillation controller has the second angle range set to be smaller than the first angle range. The oscillation controller instructs the oscillation circuit to oscillate at a low drive level when the holding unit is moving within the first angle range, and the holding unit is within the second angle range together with the rotary table. 6. The tuning-fork type vibration component characteristic inspection apparatus according to claim 3, wherein the oscillation circuit is instructed to oscillate at a high drive level when moving.   7. The tuning-fork type vibration component characteristic inspection apparatus according to claim 1, wherein the rotary table includes a slip ring that transmits a digital signal output from the A / D converter. .   The said rotary table is equipped with the communication apparatus which carries out the radio transmission of the digital signal output from the said A / D converter, The characteristic inspection of the tuning fork type vibration component of any one of Claim 1 thru | or 7 characterized by the above-mentioned. apparatus. The holding unit is
A case in which the tuning fork type vibration component is inserted;
A conductive contact disposed in the case and capable of contacting a terminal of the tuning-fork type vibration component;
A biasing device that pushes out the tuning-fork type vibration component inserted into the case;
The apparatus for inspecting characteristics of a tuning-fork type vibration component according to any one of claims 1 to 8, characterized by comprising:   10. The characteristic inspection apparatus for a tuning fork type vibration component according to claim 9, wherein the holding unit has a contact moving mechanism for projecting and retracting the conductive contact with respect to a terminal of the tuning fork type vibration component. A characteristic inspection method for inspecting vibration characteristics of a tuning fork type vibration component having a vibrator having a tuning fork structure that oscillates mechanically,
A supply step of supplying the tuning fork type vibration component to a plurality of holding units arranged at intervals in the circumferential direction on the rotary table;
An oscillation step of causing the tuning fork type vibration component to oscillate by an oscillation circuit while the holding unit is rotating together with the rotary table;
An A / D conversion step of converting an inspection signal of the tuning-fork type vibration component in a stable oscillation state into a digital signal by an A / D converter provided in the rotary table;
A method for inspecting characteristics of a tuning-fork type vibration component, comprising: The oscillating step further oscillates the tuning fork type vibration component at the first drive level when the holding unit is moved within the first angle range together with the rotary table, and the holding unit 12. The characteristic inspection of a tuning fork type vibration component according to claim 11, wherein the tuning fork type vibration component is oscillated at a second drive level when moving within a second angle range after the angle range. Method.

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