JP4813071B2 - マクロ画像表示システム及びマクロ画像表示方法 - Google Patents
マクロ画像表示システム及びマクロ画像表示方法 Download PDFInfo
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- JP4813071B2 JP4813071B2 JP2005082929A JP2005082929A JP4813071B2 JP 4813071 B2 JP4813071 B2 JP 4813071B2 JP 2005082929 A JP2005082929 A JP 2005082929A JP 2005082929 A JP2005082929 A JP 2005082929A JP 4813071 B2 JP4813071 B2 JP 4813071B2
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- 238000000034 method Methods 0.000 title claims description 33
- 230000007547 defect Effects 0.000 claims description 247
- 239000000758 substrate Substances 0.000 claims description 81
- 238000007689 inspection Methods 0.000 claims description 79
- 238000004519 manufacturing process Methods 0.000 claims description 51
- 238000012545 processing Methods 0.000 claims description 34
- 230000000007 visual effect Effects 0.000 claims description 30
- 238000007726 management method Methods 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 18
- 238000004364 calculation method Methods 0.000 claims description 17
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- 230000002950 deficient Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000013500 data storage Methods 0.000 description 7
- 238000005286 illumination Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000011179 visual inspection Methods 0.000 description 5
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Images
Landscapes
- Image Processing (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005082929A JP4813071B2 (ja) | 2005-03-23 | 2005-03-23 | マクロ画像表示システム及びマクロ画像表示方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005082929A JP4813071B2 (ja) | 2005-03-23 | 2005-03-23 | マクロ画像表示システム及びマクロ画像表示方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006266766A JP2006266766A (ja) | 2006-10-05 |
| JP2006266766A5 JP2006266766A5 (https=) | 2008-05-08 |
| JP4813071B2 true JP4813071B2 (ja) | 2011-11-09 |
Family
ID=37202914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005082929A Expired - Fee Related JP4813071B2 (ja) | 2005-03-23 | 2005-03-23 | マクロ画像表示システム及びマクロ画像表示方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4813071B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007103696A (ja) * | 2005-10-05 | 2007-04-19 | Olympus Corp | 基板の欠陥検査システム及び基板の欠陥検出方法 |
| JP5407506B2 (ja) * | 2009-04-09 | 2014-02-05 | 凸版印刷株式会社 | 目視検査システム |
| EP3279862A4 (en) * | 2015-03-31 | 2018-12-12 | Nec Corporation | Biological pattern information processing device, biological pattern information processing method and program |
| CN109540904A (zh) * | 2018-12-12 | 2019-03-29 | 华侨大学 | 一种衬底表面宏观缺陷检测及分类系统 |
| WO2021250736A1 (ja) * | 2020-06-08 | 2021-12-16 | 日本電気株式会社 | エアバッグ検査装置、エアバッグ検査システム、エアバッグ検査方法および記録媒体 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09306957A (ja) * | 1996-05-20 | 1997-11-28 | Mitsubishi Electric Corp | 異物検出方法 |
| JPH1145919A (ja) * | 1997-07-24 | 1999-02-16 | Hitachi Ltd | 半導体基板の製造方法 |
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2005
- 2005-03-23 JP JP2005082929A patent/JP4813071B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006266766A (ja) | 2006-10-05 |
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