JP4798778B2 - Apparatus and method for cleaning ultraviolet irradiation window - Google Patents
Apparatus and method for cleaning ultraviolet irradiation window Download PDFInfo
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- JP4798778B2 JP4798778B2 JP2006171162A JP2006171162A JP4798778B2 JP 4798778 B2 JP4798778 B2 JP 4798778B2 JP 2006171162 A JP2006171162 A JP 2006171162A JP 2006171162 A JP2006171162 A JP 2006171162A JP 4798778 B2 JP4798778 B2 JP 4798778B2
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- 238000004140 cleaning Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 title claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 29
- 239000001301 oxygen Substances 0.000 claims description 29
- 229910052760 oxygen Inorganic materials 0.000 claims description 29
- 239000007789 gas Substances 0.000 claims description 27
- 239000007921 spray Substances 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000002243 precursor Substances 0.000 claims description 5
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 50
- 239000000178 monomer Substances 0.000 description 23
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 15
- 239000000758 substrate Substances 0.000 description 14
- 238000007664 blowing Methods 0.000 description 13
- 238000000151 deposition Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002957 persistent organic pollutant Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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Description
本発明は、真空又は減圧下で有機膜を紫外線硬化するための紫外線照射窓の洗浄装置及び方法に関する。 The present invention relates to an ultraviolet irradiation window cleaning apparatus and method for ultraviolet curing an organic film under vacuum or reduced pressure.
有機ＥＬ（エレクトロルミネッセンス）素子は、基板上に電極膜やＲＧＢの有機発光層を形成し、これらの機能膜の上に保護膜として酸化膜等を成膜して製造される。さらに、電極膜や有機発光層の上に有機膜を形成して表面を平坦化した後に酸化膜を形成し、バリア性能を向上させることも行われている。
この場合、真空状態で有機膜のモノマーを基板上に蒸着した後、紫外線照射窓から紫外線を基板に照射してモノマーを硬化させるが、紫外線照射窓にモノマーが蒸着されるという問題がある。紫外線照射窓が汚染されると、ＵＶ強度が低下し、装置のメンテナンスサイクルを早めて稼働率を低下させる。
一方、有機ＥＬ素子の有機発光層を形成する際、有機成膜室や搬送室等に大気中の有機汚染物質が付着し、成膜される有機発光層の品質を劣化させる。そこで、有機成膜室や搬送室のオーバーホールや交換時に汚染物質をオゾンによって洗浄する技術が報告されている（特許文献１、２参照）。
An organic EL (electroluminescence) element is manufactured by forming an electrode film or RGB organic light emitting layer on a substrate and forming an oxide film or the like as a protective film on these functional films. Furthermore, an oxide film is formed after an organic film is formed on an electrode film or an organic light emitting layer to planarize the surface, thereby improving the barrier performance.
In this case, after the monomer of the organic film is deposited on the substrate in a vacuum state, the monomer is cured by irradiating the substrate with ultraviolet rays from the ultraviolet irradiation window. However, there is a problem that the monomer is deposited on the ultraviolet irradiation window. When the ultraviolet irradiation window is contaminated, the UV intensity is lowered, and the maintenance cycle of the apparatus is accelerated to lower the operating rate.
On the other hand, when forming the organic light emitting layer of the organic EL element, organic pollutants in the atmosphere adhere to the organic film forming chamber, the transfer chamber, and the like, thereby degrading the quality of the organic light emitting layer to be formed. Therefore, a technique for cleaning contaminants with ozone at the time of overhauling or replacing an organic film forming chamber or a transfer chamber has been reported (see Patent Documents 1 and 2).
しかしながら、上記した従来技術の場合、装置に付着した大気中の有機汚染物質を除去することはできるが、紫外線照射窓に付着した紫外線硬化性の有機物及びそのモノマーの除去が充分とはいえない。又、上記した従来技術の場合、オーバーホールの際に装置を大気開放するため、装置の真空を保持したまま洗浄を行うことができず、稼動効率の低下を招く。 However, in the case of the above-described prior art, although organic pollutants in the atmosphere adhering to the apparatus can be removed, it cannot be said that the removal of the ultraviolet curable organic substance and its monomer adhering to the ultraviolet irradiation window is sufficient. Further, in the case of the above-described prior art, since the apparatus is opened to the atmosphere at the time of overhaul, cleaning cannot be performed while maintaining the vacuum of the apparatus, resulting in a decrease in operating efficiency.
本発明は上記の課題を解決するためになされたものであり、真空装置に設置されて有機膜を紫外線硬化させるための紫外線照射窓の汚染を簡単かつ確実に洗浄できる装置及び方法の提供を目的とする。 The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an apparatus and a method that can be easily and reliably cleaned of contamination of an ultraviolet irradiation window that is installed in a vacuum apparatus to cure an organic film with ultraviolet rays. And
上記の目的を達成するために、本発明の紫外線照射窓の洗浄装置は、真空又は減圧下で有機膜を紫外線硬化するための紫外線照射窓の洗浄装置であって、前記紫外線照射窓の周縁の上側に配置される管状の吹付け部材と、前記吹付け部材に開口して前記紫外線照射窓の表面に酸素含有ガスを吹付ける吹出し口とを有し、前記吹出し口は前記吹付け部材から前記紫外線照射窓の表面に向かって前記ガスが集中するように位置し、前記ガスは前記紫外線硬化に用いる紫外線を照射しつつ吹き付けられることを特徴とする。
このような構成とすると、吹出し口から紫外線照射窓表面近傍に酸素含有ガスを吹付けることができる。そして、酸素は紫外線の照射によりオゾン化し、オゾンがさらに活性酸素に分解して紫外線照射窓に付着した有機物を除去する。従って、酸素含有ガスを真空装置全体に充満させる必要がなく、装置のオーバーホール時でなく通常の使用時（真空又は減圧下）に洗浄を行うことができ、設備の稼働効率が低下することがない。
In order to achieve the above object, an ultraviolet irradiation window cleaning device of the present invention is an ultraviolet irradiation window cleaning device for curing an organic film under vacuum or reduced pressure. A tubular blowing member disposed on the upper side, and a blowing port that opens to the blowing member and blows an oxygen-containing gas on the surface of the ultraviolet irradiation window, and the blowing port extends from the blowing member The gas is positioned so as to concentrate toward the surface of the ultraviolet irradiation window, and the gas is sprayed while irradiating the ultraviolet rays used for the ultraviolet curing .
In such a configuration, it is possible to spray the oxygen-containing gas in the vicinity ultraviolet irradiation window surface from air outlet. Then, oxygen is ozonized by irradiation with ultraviolet rays, and ozone is further decomposed into active oxygen to remove organic substances attached to the ultraviolet irradiation window. Therefore, the oxygen-containing gas need not be filled in the entire vacuum apparatus, normal use, not during overhaul of the apparatus can be cleaned in (vacuum or under reduced pressure), that operation efficiency of the equipment is reduced Absent.
本発明の紫外線照射窓の洗浄方法は、有機膜を紫外線硬化するための紫外線照射窓の表面に真空又は減圧下で酸素含有ガスを吹付け、この状態で前記紫外線照射窓から前記紫外線硬化に用いる紫外線を照射し、前記紫外線照射窓に付着した前記有機膜又はその前駆体を分解することを特徴とする。 In the method for cleaning an ultraviolet irradiation window of the present invention, an oxygen-containing gas is sprayed on the surface of the ultraviolet irradiation window for curing the organic film under ultraviolet or vacuum, and the ultraviolet irradiation window is used for the ultraviolet curing in this state. The organic film or its precursor adhering to the ultraviolet irradiation window is decomposed by irradiating with ultraviolet rays.
本発明によれば、真空装置に設置されて有機膜を紫外線硬化させるための紫外線照射窓の汚染を簡単かつ確実に洗浄できる。 ADVANTAGE OF THE INVENTION According to this invention, the contamination of the ultraviolet irradiation window for installing in a vacuum apparatus and carrying out the ultraviolet curing of the organic film can be wash | cleaned easily and reliably.
以下、本発明の実施形態について、図１〜図３を参照して説明する。
図１は、基板４に有機膜のモノマーを蒸着した後、紫外線硬化する工程を示す。図１（ａ）において、モノマーチャンバー（第１の真空装置）１０とＵＶチャンバー（第２の真空装置）２０が連通し、各チャンバー１０，２０の間はシャッター６によって分離されている。モノマーチャンバー１０には、有機膜のモノマー成分を蒸着するための蒸着源（モノマーノズル）２が設置され、ＵＶチャンバー２０にはＵＶ照射源８が設置されている。ＵＶ照射源８の上面にはＵＶ照射窓８ａが配置されていて、ここからＵＶ（紫外線）が上方に照射される。
そして、基板４がモノマーチャンバー１０のモノマーノズル２に対向して配置され、基板４の表面にモノマー層４ａが蒸着される。なお、基板４には所定の電極膜や有機発光層が予め形成されている。
次に、図１（ｂ）において、シャッター６が開かれ、基板４がモノマーチャンバー１０からＵＶチャンバー２０に搬送される。
次に、図１（ｃ）において、シャッター６が閉じられ、基板４がＵＶチャンバー２０のＵＶ照射窓８ａに対向して配置され、基板４のモノマー層４ａが紫外線硬化して有機硬化膜４ｂになる。なお、この後、図示しない別の成膜室に基板４が搬送され、有機硬化膜４ｂの表面にバリア膜（酸化膜や窒化膜等）が成膜され、有機ＥＬ素子が製造される。
Hereinafter, embodiments of the present invention will be described with reference to FIGS.
FIG. 1 shows a process of depositing an organic film monomer on a substrate 4 and then curing it with ultraviolet light. In FIG. 1A, a monomer chamber (first vacuum device) 10 and a UV chamber (second vacuum device) 20 communicate with each other, and the chambers 10 and 20 are separated by a shutter 6. The monomer chamber 10 is provided with a vapor deposition source (monomer nozzle) 2 for vapor-depositing monomer components of the organic film, and the UV chamber 20 is provided with a UV irradiation source 8. A UV irradiation window 8a is arranged on the upper surface of the UV irradiation source 8, and UV (ultraviolet rays) is irradiated upward from here.
Then, the substrate 4 is disposed so as to face the monomer nozzle 2 of the monomer chamber 10, and the monomer layer 4 a is deposited on the surface of the substrate 4. Note that a predetermined electrode film and an organic light emitting layer are formed on the substrate 4 in advance.
Next, in FIG. 1B, the shutter 6 is opened, and the substrate 4 is transferred from the monomer chamber 10 to the UV chamber 20.
Next, in FIG.1 (c), the shutter 6 is closed, the board | substrate 4 is arrange | positioned facing the UV irradiation window 8a of the UV chamber 20, and the monomer layer 4a of the board | substrate 4 is ultraviolet-cured, and becomes the organic cured film 4b. Become. Thereafter, the substrate 4 is transferred to another film forming chamber (not shown), and a barrier film (such as an oxide film or a nitride film) is formed on the surface of the organic cured film 4b, whereby an organic EL element is manufactured.
ここで、モノマーチャンバー１０とＵＶチャンバー２０との間をシャッター６で分離した場合でも、モノマー成分が拡散してＵＶ照射窓８ａが汚染される場合が多い。 Here, even when the space between the monomer chamber 10 and the UV chamber 20 is separated by the shutter 6, the monomer component is often diffused to contaminate the UV irradiation window 8a.
図２は、本発明の実施形態に係る紫外線照射窓の洗浄装置の構成を示す上面図である。この図において、ＵＶ照射源８の上面に枠８ｂが取り付けられ、枠８ｂの内側に矩形状のガラス製ＵＶ照射窓８ａが配置されている。そして、ＵＶ照射窓８ａの長辺側の周縁の上側にそれぞれパイプ状（円筒状）のアーム３０ａ、３０ｂが配置され、アーム３０ａ、３０ｂの終端部分はこれらと直角に延びるパイプ状のアーム接続部３０ｃに接続されている。アーム３０ａ、３０ｂの先端は封じられている。又、アーム接続部３０ｃの中心からアーム３０ａ、３０ｂの延びる方向と反対側にパイプ状の基部３０ｄが延び、アーム３０ａ、３０ｂ、アーム接続部３０ｃ、基部３０ｄが全体として吹付け部材３０を構成する。従って、吹付け部材３０は基部３０ｄからアーム３０ａ、３０ｂが二股分岐したコの字状をなしている。
アーム３０ａ、３０ｂの（後述する）それぞれ４箇所の位置には各アームの延びる方向に延びたスリット状の吹出し口３２が開口し、基部３０ｄ側から導入された酸素含有ガスが吹出し口３２から吹き出すようになっている。
FIG. 2 is a top view showing the configuration of the ultraviolet irradiation window cleaning apparatus according to the embodiment of the present invention. In this figure, a frame 8b is attached to the upper surface of the UV irradiation source 8, and a rectangular glass UV irradiation window 8a is disposed inside the frame 8b. Pipe-shaped (cylindrical) arms 30a and 30b are respectively arranged on the upper side of the long side of the UV irradiation window 8a, and the end portions of the arms 30a and 30b extend at right angles to these pipe-shaped arm connection portions. 30c. The tips of the arms 30a and 30b are sealed. Further, a pipe-like base portion 30d extends from the center of the arm connection portion 30c to the side opposite to the extending direction of the arms 30a and 30b, and the arms 30a and 30b, the arm connection portion 30c and the base portion 30d constitute the blowing member 30 as a whole. . Therefore, the blowing member 30 has a U-shape in which the arms 30a and 30b are bifurcated from the base 30d.
Slit-like blowing ports 32 extending in the extending direction of each arm are opened at four positions (described later) of the arms 30a and 30b, and oxygen-containing gas introduced from the base 30d side blows out from the blowing port 32. It is like that.
図３は、図２のIII-III線に沿う断面図である。この図において、吹出し口３２は、吹付け部材（アーム３０ａ、３０ｂ）からＵＶ照射窓８ａの表面に引いた垂線Ｎより内側（ＵＶ照射窓８ａ側）に所定角度（この例では４５度）をもって開口している。従って、図２の左右の吹出し口３２からそれぞれ斜め内側（ＵＶ照射窓８ａ側）に向かって４５度の角度で酸素含有ガスが吹出し、酸素含有ガスはＵＶ照射窓８ａ表面付近に集中（滞留）する。
次に、ＵＶ照射窓８ａを洗浄する方法について説明する。
3 is a cross-sectional view taken along line III-III in FIG. In this figure, the outlet 32 has a predetermined angle (45 degrees in this example) on the inner side (the UV irradiation window 8a side) from the perpendicular N drawn from the blowing member (arms 30a, 30b) to the surface of the UV irradiation window 8a. It is open. Accordingly, the oxygen-containing gas blows off at an angle of 45 degrees from the left and right outlets 32 in FIG. 2 toward the obliquely inner side (the UV irradiation window 8a side), and the oxygen-containing gas is concentrated (residual) near the surface of the UV irradiation window 8a. To do.
Next, a method for cleaning the UV irradiation window 8a will be described.
まず、真空装置（上記モノマーチャンバー１０やＵＶチャンバー２０）を通常の真空状態のまま、ＵＶ照射窓８ａに酸素含有ガスを吹付ける。そして、この状態でＵＶ照射窓８ａから紫外線を照射すると、ＵＶ照射窓８ａ近傍の酸素が酸化してオゾンを生成し、オゾンはさらに紫外線によって活性酸素を放出する。この活性酸素は、ＵＶ照射窓に付着した有機膜又はその前駆体（モノマー）を有効に分解する。さらに、紫外線は有機膜を構成する分子の共有結合エネルギーより高いエネルギーを有するため、有機膜又はその前駆体（モノマー）の分子の共有結合が紫外線によって切断、分解される。 First, an oxygen-containing gas is sprayed onto the UV irradiation window 8a while the vacuum apparatus (the monomer chamber 10 and the UV chamber 20) is kept in a normal vacuum state. When ultraviolet rays are irradiated from the UV irradiation window 8a in this state, oxygen in the vicinity of the UV irradiation window 8a is oxidized to generate ozone, and ozone further releases active oxygen by the ultraviolet rays. This active oxygen effectively decomposes the organic film or its precursor (monomer) attached to the UV irradiation window. Furthermore, since ultraviolet rays have energy higher than the covalent bond energy of the molecules constituting the organic film, the covalent bonds of the organic film or its precursor (monomer) molecules are broken and decomposed by the ultraviolet rays.
従って、紫外線によって共有結合が切断、分解された有機膜を活性酸素が攻撃してさらに分解するので、有機膜又はその前駆体（モノマー）の分解、洗浄効果が大きくなる。この効果は、単にオゾンを有機膜に吹付ける場合より大きい。 Accordingly, active oxygen attacks and further decomposes the organic film whose covalent bond is broken and decomposed by ultraviolet rays, so that the organic film or its precursor (monomer) is decomposed and cleaned more effectively. This effect is greater than when ozone is simply sprayed onto the organic film.
本発明においては、ＵＶ照射窓表面の有機物を除去すればよいため、ＵＶ照射窓近傍に酸素含有ガスを吹付ける。従って、酸素含有ガスを真空装置全体に充満させる必要がなく、装置のオーバーホール時でない通常の使用時（真空又は減圧下）に洗浄を行うことができ、設備の稼働効率を低下することがない。 In the present invention, since the organic matter on the surface of the UV irradiation window may be removed, an oxygen-containing gas is sprayed in the vicinity of the UV irradiation window. Therefore, the oxygen-containing gas need not be filled in the entire vacuum apparatus can be cleaned during normal use is not a time overhaul of the apparatus (vacuum or under reduced pressure), it is not reduced the operating efficiency of the equipment .
又、本発明においては、オゾンを紫外線で分解して生じた活性酸素を利用できるものであれば、酸素含有ガスでなく、純酸素ガスでもよい。但し、酸素含有ガスをＵＶ照射窓に吹付ける場合、紫外線照射によって酸素からオゾンを生成するので、別途オゾン発生装置を準備する必要がなく、装置が簡易となる利点を有する。
さらに、酸素含有ガスを吹付ける場合、紫外線が照射された部分（ＵＶ照射窓近傍）にのみオゾンが生成するので、真空装置全体にオゾンが拡散する割合がさらに低減し、装置内の蒸着材料や基板等がオゾンガスで変質することをより一層抑制することができる。
In the present invention, as long as ozone can utilize the active oxygen generated by decomposition by ultraviolet light, the oxygen-containing gas at a rather may be pure oxygen gas. However, when oxygen-containing gas is blown onto the UV irradiation window, ozone is generated from oxygen by ultraviolet irradiation, so there is no need to prepare a separate ozone generator, and the apparatus is simplified.
Further, when oxygen-containing gas is sprayed, ozone is generated only in the portion irradiated with ultraviolet rays (near the UV irradiation window), so that the rate of ozone diffusion throughout the vacuum device is further reduced, and the vapor deposition material in the device It can suppress further that a board | substrate etc. denature with ozone gas.
（紫外線照射窓の洗浄装置の他の実施形態）
図４は、本発明の洗浄装置の他の実施形態を示す構成図であり、図３に対応する断面図である。図３に係る吹付け部材３０と異なり、この実施形態における吹付け部材４０はＵＶ照射源８の上面に照射窓８ａを固定するための枠の一部を兼ねている。そのため、吹付け部材４０は照射窓８ａの周縁に接して配置されている。但し、吹付け部材４０の全体の形状は吹付け部材３０と同様に二股分岐したコの字状をなすため、図３の場合と同様にアーム４０ａ、４０ｂ、アーム接続部４０ｃ、基部４０ｄと称し説明を省略する。
(Another embodiment of cleaning apparatus for ultraviolet irradiation window)
FIG. 4 is a block diagram showing another embodiment of the cleaning apparatus of the present invention, and is a cross-sectional view corresponding to FIG. Unlike the spraying member 30 according to FIG. 3, the spraying member 40 in this embodiment also serves as a part of a frame for fixing the irradiation window 8 a on the upper surface of the UV irradiation source 8. Therefore, the blowing member 40 is disposed in contact with the periphery of the irradiation window 8a. However, since the entire shape of the blowing member 40 is a U-shape that is bifurcated in the same manner as the blowing member 30, it is referred to as the arms 40a and 40b, the arm connecting portion 40c, and the base portion 40d as in the case of FIG. Description is omitted.
図４において、アーム４０ａは角筒状をなし、内部空間Ｓを通ってガスが流れるようになっている。アーム４０ａの内側壁には複数のスリット状の吹出し口４２が開口し、基部４０ｄ側から導入された酸素含有ガスが吹出し口４２から吹き出すようになっている。吹出し口４２は、ＵＶ照射窓８ａの表面に平行な線Ｌより内側（ＵＶ照射窓８ａ表面側）に所定角度（この例では３０度程度）をもって開口している。従って、左右の吹出し口４２からそれぞれ斜め内側（ＵＶ照射窓８ａ側）に向かって所定角度で酸素含有ガスが吹出し、酸素含有ガスはＵＶ照射窓８ａ表面付近に集中（滞留）するようになっている。
なお、吹付け部材がＵＶ照射窓８ａ固定用の枠それ自体を兼ねる他、吹付け部材がＵＶ照射窓８ａ固定用の枠と別体であるが両者が密着固定されていてもよい。
In FIG. 4, the arm 40 a has a rectangular tube shape, and gas flows through the internal space S. A plurality of slit-like air outlets 42 are opened on the inner wall of the arm 40a, and oxygen-containing gas introduced from the base 40d side is blown out from the air outlet 42. The blow-out port 42 is opened with a predetermined angle (about 30 degrees in this example) on the inner side (surface side of the UV irradiation window 8a) from the line L parallel to the surface of the UV irradiation window 8a. Accordingly, the oxygen-containing gas blows at a predetermined angle from the left and right outlets 42 toward the obliquely inner side (the UV irradiation window 8a side), and the oxygen-containing gas concentrates (resides) near the surface of the UV irradiation window 8a. Yes.
In addition, the spraying member also serves as the frame for fixing the UV irradiation window 8a, and the spraying member is separate from the frame for fixing the UV irradiation window 8a.
本発明の洗浄装置において、吹付け部材から紫外線照射窓の表面に向かってガスが集中するように吹出し口が位置する場合としては、上記図３、図４の実施形態のように、吹出し口が紫外線照射窓の内側へ向かう態様が例示され、さらに好ましくは吹出し口が紫外線照射窓の上方から表面側へ下向きに開口する態様が例示される。いずれにせよ、紫外線照射窓の周縁から内側へ向かうガス流を形成するよう、吹出し口が吹付け部材の内側壁（紫外線照射窓の表面に対向する側）に開口していればよい。 In the cleaning apparatus of the present invention, when the gas outlet is positioned so that the gas is concentrated from the spray member toward the surface of the ultraviolet irradiation window, the air outlet is as shown in the embodiment of FIGS. The aspect which goes to the inner side of an ultraviolet irradiation window is illustrated, More preferably, the aspect which a blower outlet opens downward from the upper direction of an ultraviolet irradiation window to the surface side is illustrated. In any case, it is only necessary for the outlet to open on the inner wall of the spray member (the side facing the surface of the ultraviolet irradiation window) so as to form a gas flow inward from the periphery of the ultraviolet irradiation window.
<実験準備>
図１に示した工程により、有機膜を基板上に成膜する工程を所定回数繰返した後、使用したＵＶ照射源８を外部に取り出した。ＵＶ照射源８のＵＶ照射窓８ａの表面には有機膜（硬化後かモノマー膜かは不明）が付着していた。上記成膜工程で用いたモノマーの総使用量は37.72ｍＬであり、ＵＶ照射窓８ａは100×200ｍｍのガラス板を用いた。
ＵＶ照射源８からのＵＶ光の強度を測定するためのＵＶ照度計を準備した。このＵＶ照度計の受光部（ディテクタ）がＵＶ照射窓８ａの上を一定速度（750mm/min）で往復できるよう、受光部を治具に設置した。
<Preparation for experiment>
After repeating the process of forming the organic film on the substrate by a predetermined number of times by the process shown in FIG. 1, the used UV irradiation source 8 was taken out to the outside. On the surface of the UV irradiation window 8a of the UV irradiation source 8, an organic film (whether it is cured or a monomer film is unknown) was adhered. The total amount of monomers used in the film formation step was 37.72 mL, and a 100 × 200 mm glass plate was used as the UV irradiation window 8a.
A UV illuminometer for measuring the intensity of UV light from the UV irradiation source 8 was prepared. The light receiving part (detector) of this UV illuminometer was installed on a jig so that it could reciprocate on the UV irradiation window 8a at a constant speed (750 mm / min).
<洗浄方法>
ＵＶ照射源８のＵＶ波長のスペクトルを図５に示す。このＵＶ光源は水銀スペクトル再現型ランプであり、２４０ｎｍ以下の波長域を含むため、酸素を分解してオゾンを生成することができる。又、２４０ｎｍ以上の波長域では、ミリ秒レベルでオゾンを活性酸素に分解する。
このＵＶ照射源８からＵＶを上方に５分間照射し、ＵＶによって大気中の酸素から生成したオゾン及びその分解による活性酸素を用い、ＵＶ照射窓８ａを洗浄した。ＵＶ照射源８の出力の最大値を100％とした時、80％の出力でＵＶを照射した。
<Washing method>
The spectrum of the UV wavelength of the UV irradiation source 8 is shown in FIG. This UV light source is a mercury spectrum reproducible lamp and includes a wavelength region of 240 nm or less, so that it can decompose ozone and generate ozone. In the wavelength region of 240 nm or more, ozone is decomposed into active oxygen at the millisecond level.
The UV irradiation window 8 was irradiated with UV from the UV irradiation source 8 for 5 minutes, and the UV irradiation window 8a was cleaned using ozone generated from oxygen in the atmosphere by UV and active oxygen generated by decomposition thereof. When the maximum value of the output of the UV irradiation source 8 was 100%, UV was irradiated with an output of 80%.
<測定方法>
ＵＶ光強度の測定は、ＵＶ照射源８からＵＶ光を上方に照射しながら、上記治具を往復させ、治具の往路及び復路において受光部が受光したＵＶ光強度を平均した。
又、この測定は、ＵＶ照射源８の出力の最大値を100％とした時に、それぞれ30〜80％の出力において行った。
<Measurement method>
The measurement of the UV light intensity was performed by reciprocating the jig while irradiating the UV light upward from the UV irradiation source 8, and averaging the UV light intensity received by the light receiving unit in the forward path and the return path of the jig.
This measurement was performed at 30 to 80% of output when the maximum value of the output of the UV irradiation source 8 was 100%.
<実験結果>
図６に実験結果を示す。この図において、ＵＶ照射源８のＵＶ照射窓８ａが清浄であれば、ＵＶ照射源の出力に比例してＵＶ光強度が大きく増大する（比例関係）。洗浄前に比べ、洗浄後の場合、ＵＶ照射源の出力を大きくするとＵＶ光強度の上昇度合が大きくなり、ＵＶ照射によってＵＶ照射窓８ａが有効に洗浄されていることが判明した。
<Experimental result>
FIG. 6 shows the experimental results. In this figure, if the UV irradiation window 8a of the UV irradiation source 8 is clean, the UV light intensity greatly increases in proportion to the output of the UV irradiation source (proportional relationship). As compared with before cleaning, in the case after cleaning, when the output of the UV irradiation source is increased, the degree of increase in the UV light intensity is increased, and it has been found that the UV irradiation window 8a is effectively cleaned by the UV irradiation.
８ ＵＶ照射源８
８ａ 紫外線（ＵＶ）照射窓
３０、４０ 吹付け部材
３２、４２ 吹出し口
Ｎ 吹付け部材から紫外線照射窓の表面に引いた垂線
8 UV irradiation source 8
8a Ultraviolet (UV) irradiation window 30, 40 Spray member 32, 42 Outlet N Vertical line drawn from the spray member to the surface of the ultraviolet irradiation window
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| CN108015075A (en) * | 2017-03-02 | 2018-05-11 | 上海继伟制药设备有限公司 | Vessel-cleaning machine |
| CN114279176B (en) * | 2022-01-20 | 2023-06-30 | 温州金榜轻工机械有限公司 | Low-temperature drying system without destroying active ingredients of collagen peptide powder |
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