JP4789580B2 - アンテナおよびその作製方法並びに当該アンテナを備えた半導体装置およびその作製方法 - Google Patents

アンテナおよびその作製方法並びに当該アンテナを備えた半導体装置およびその作製方法 Download PDF

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Publication number
JP4789580B2
JP4789580B2 JP2005302707A JP2005302707A JP4789580B2 JP 4789580 B2 JP4789580 B2 JP 4789580B2 JP 2005302707 A JP2005302707 A JP 2005302707A JP 2005302707 A JP2005302707 A JP 2005302707A JP 4789580 B2 JP4789580 B2 JP 4789580B2
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film
antenna
conductor
conductor sheet
recess
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JP2005302707A
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Japanese (ja)
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JP2006146890A5 (enExample
JP2006146890A (ja
Inventor
恭介 伊藤
純矢 丸山
卓也 鶴目
舜平 山崎
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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JP2005302707A 2004-10-19 2005-10-18 アンテナおよびその作製方法並びに当該アンテナを備えた半導体装置およびその作製方法 Expired - Fee Related JP4789580B2 (ja)

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JP2005302707A JP4789580B2 (ja) 2004-10-19 2005-10-18 アンテナおよびその作製方法並びに当該アンテナを備えた半導体装置およびその作製方法

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JP2004304856 2004-10-19
JP2004304856 2004-10-19
JP2005302707A JP4789580B2 (ja) 2004-10-19 2005-10-18 アンテナおよびその作製方法並びに当該アンテナを備えた半導体装置およびその作製方法

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JP2006146890A JP2006146890A (ja) 2006-06-08
JP2006146890A5 JP2006146890A5 (enExample) 2008-10-16
JP4789580B2 true JP4789580B2 (ja) 2011-10-12

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JP2005302707A Expired - Fee Related JP4789580B2 (ja) 2004-10-19 2005-10-18 アンテナおよびその作製方法並びに当該アンテナを備えた半導体装置およびその作製方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008236705A (ja) * 2006-08-09 2008-10-02 Daido Steel Co Ltd 超広帯域通信用アンテナ
JP5702675B2 (ja) * 2010-06-18 2015-04-15 株式会社半導体エネルギー研究所 半導体装置の作製方法
CN116231292B (zh) * 2023-01-13 2025-10-21 深圳市志凌伟业光电有限公司 一种毫米波天线薄膜

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4154629B2 (ja) * 1998-10-08 2008-09-24 日立化成工業株式会社 非接触式icカード
US6870516B2 (en) * 2001-02-16 2005-03-22 Integral Technologies, Inc. Low cost antennas using conductive plastics or conductive composites

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JP2006146890A (ja) 2006-06-08

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