JP4786282B2 - Evaporating material manufacturing method and evaporating material storage method - Google Patents
Evaporating material manufacturing method and evaporating material storage method Download PDFInfo
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Description
本発明は、例えばプラズマ表示装置（ＰＤＰ）の保護膜に用いられる蒸発材料に関し、特に、ＳｒＯとＣａＯとを主成分とするペレット状の蒸発材料に関する。 The present invention relates to an evaporation material used for a protective film of a plasma display device (PDP), for example, and more particularly to a pellet-like evaporation material mainly composed of SrO and CaO.
従来より、プラズマ表示装置を構成する誘電体層を保護するための保護膜としてＭｇＯ膜が用いられている。
そして、ＭｇＯ膜以外の保護膜についても研究が進められており、ＳｒＯやＣａＯ等からなる複合材料の保護膜へ応用も注目されている（例えば、特許文献１参照）。
Conventionally, an MgO film has been used as a protective film for protecting a dielectric layer constituting a plasma display device.
Research has also been conducted on protective films other than MgO films, and application to a protective film made of a composite material made of SrO, CaO, or the like is also drawing attention (see, for example, Patent Document 1).
近年、ＳｒＯとＣａＯを主成分とする保護膜が、ＭｇＯ膜に比べて放電電圧の低減と発光効率の向上とが期待できることから、新たな保護膜用材料として有望視されてきている。 In recent years, a protective film mainly composed of SrO and CaO has been regarded as promising as a new material for a protective film because it can be expected to reduce a discharge voltage and improve luminous efficiency as compared with an MgO film.
しかし、ＳｒＯは、反応活性に富む材料であり、ペレット状に成形後大気中において焼成を行うと、雰囲気中に含まれる水蒸気及び炭酸ガスと容易に反応し、ＳｒＣＯ3に変質するという性質がある。このため、ＳｒＯはペレット状の蒸発材料として製造することが困難であった。 However, SrO is a material rich in reaction activity, and when it is molded into pellets and baked in the atmosphere, it easily reacts with water vapor and carbon dioxide contained in the atmosphere and transforms into SrCO 3. . For this reason, it has been difficult to produce SrO as a pellet-shaped evaporation material.
そこで、ＳｒＯとＣａＯとを混合した粉末を蒸発材料として用いることが試みられているが、ＳｒＯとＣａＯとは蒸気圧が相違しＳｒＯに比べてＣａＯの方が蒸発し難いため蒸着膜に組成のずれが発生すること、また蒸着の際にスプラッシュが発生することから成膜レートを高くすることが困難であるという問題点があった。
本発明は、このような従来の技術の課題を解決するためになされたもので、その目的とするところは、ＳｒＯとＣａＯを主成分とするペレット状の蒸発材料の製造方法を提供することである。 The present invention has been made in order to solve such problems of the prior art, and the object of the present invention is to provide a method for producing a pellet-shaped evaporation material mainly composed of SrO and CaO. is there.
上記目的を達成するためになされた請求項１記載の発明は、ペレット状の蒸発材料を製造する方法であって、ＳｒＯとＣａＯを主成分とする混合粉末を加圧成型しペレット状の成型体とする工程と、前記成型体をＳｒＣＯ3の分解温度以上の温度で３０分間以上６０分間以下焼成して焼成体とする工程と、前記焼成体を冷却する工程とを有し、上記工程をそれぞれＨ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において行うものである。
請求項２記載の発明は、請求項１記載の方法によって得られた蒸発材料を、Ｈ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において保管する蒸発材料の保管方法である。
The invention according to claim 1, which has been made to achieve the above object, is a method for producing a pellet-shaped evaporation material, wherein a mixed powder mainly composed of SrO and CaO is pressure-molded to form a pellet-shaped molded body. A step of firing the molded body at a temperature equal to or higher than the decomposition temperature of SrCO 3 for 30 minutes to 60 minutes to form a fired body, and a step of cooling the fired body, It is performed in an atmosphere not containing H 2 O, CO 2 and CO.
The invention according to claim 2 is a method for storing an evaporating material, wherein the evaporating material obtained by the method according to claim 1 is stored in an atmosphere not containing H 2 O, CO 2 and CO.
本発明にあっては、ＳｒＯとＣａＯを主成分とする混合粉末をペレット状に加圧成型し、この成型体を焼成冷却して蒸発材料を製造する際、各工程をＨ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において行うことから、反応性に富むＳｒＯがＨ2Ｏ、ＣＯ2又はＣＯと反応してＳｒＣＯ3が生成されることを抑制することができる。 In the present invention, when a mixed powder containing SrO and CaO as main components is pressure-molded into a pellet and the molded body is fired and cooled to produce an evaporation material, each step is performed with H 2 O, CO 2. Since it is performed in an atmosphere not containing CO and CO, it can be suppressed that SrO rich in reactivity reacts with H 2 O, CO 2 or CO to produce SrCO 3 .
しかも、本発明においては、ＳｒＣＯ3の分解温度以上でペレットの焼成を行うことから、例えば原料の加工等の過程でＳｒＯが一部Ｈ2Ｏ、ＣＯ2又はＣＯと反応してＳｒＣＯ3が生成された場合であっても、このＳｒＣＯ3を分解して消失させることができる。 Moreover, in the present invention, since the pellets are baked at a temperature higher than the decomposition temperature of SrCO 3 , for example, SrO partially reacts with H 2 O, CO 2, or CO in the course of processing the raw material to produce SrCO 3. Even in such a case, this SrCO 3 can be decomposed and lost.
その結果、本発明によれば、ＳｒＯとＣａＯを主成分とする蒸発材料をペレット状に成型することができ、これにより、形成される蒸着膜と蒸発材料との間に組成のずれがなく、かつ、高い成膜レートにおいてもスプラッシュの発生のない蒸着膜の形成が可能になる。 As a result, according to the present invention, the evaporation material mainly composed of SrO and CaO can be formed into a pellet, and there is no compositional deviation between the vapor deposition film to be formed and the evaporation material. In addition, it is possible to form a deposited film without occurrence of splash even at a high film formation rate.
また、本発明の場合、ＳｒＯとＣａＯを主成分とする蒸発材料をＨ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において保管することから、蒸発材料中のＳｒＯとＣａＯとがＨ2Ｏ、ＣＯ2又はＣＯと反応してＳｒＣＯ3等に変質してしまうことがなく、蒸発材料を長期間安定して保存することができる。 In the case of the present invention, since the evaporation material mainly composed of SrO and CaO is stored in an atmosphere not containing H 2 O, CO 2 and CO, SrO and CaO in the evaporation material are H 2 O, The evaporated material can be stably stored for a long period of time without reacting with CO 2 or CO to be transformed into SrCO 3 or the like.
そして、本発明の蒸発材料によれば、特にＰＤＰの誘電体層用の保護膜として有用なＳｒＯとＣａＯを主成分とする蒸着膜を効率良く形成することが可能になる。 According to the evaporation material of the present invention, it is possible to efficiently form a vapor deposition film mainly composed of SrO and CaO, which is particularly useful as a protective film for a PDP dielectric layer.
本発明によれば、ＳｒＯとＣａＯを主成分とするペレット状の蒸発材料を得ることができるので、形成される蒸着膜と蒸発材料との間に組成のずれがなく、かつ、高い成膜レートにおいてもスプラッシュの発生のない蒸着膜の形成が可能になる。 According to the present invention, a pellet-shaped evaporation material mainly composed of SrO and CaO can be obtained. Therefore, there is no composition deviation between the deposited film and the evaporation material to be formed, and the film formation rate is high. In this case, it is possible to form a deposited film without splashing.
以下、本発明の好ましい実施の形態を図面を参照して詳細に説明する。
図１は、本発明に係る蒸発材料の製造方法の実施の形態の手順を説明する工程図である。
本実施の形態では、工程Ｓ１〜Ｓ４を、Ｈ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において行う。
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a process diagram illustrating the procedure of an embodiment of a method for producing an evaporation material according to the present invention.
In the present embodiment, steps S1 to S4 are performed in an atmosphere not containing H 2 O, CO 2 and CO.
本発明の場合、Ｈ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気としては、ＳｒＯ及びＣａＯの変質を極力抑える観点から、不活性ガスを満たした雰囲気を用いることが好ましい。
この場合、製造コストを低減する観点からは、窒素ガス（Ｎ2）を用いることが好ましい。
In the case of the present invention, the atmosphere containing no H 2 O, CO 2 and CO is preferably an atmosphere filled with an inert gas from the viewpoint of minimizing the deterioration of SrO and CaO.
In this case, it is preferable to use nitrogen gas (N 2 ) from the viewpoint of reducing the manufacturing cost.
本実施の形態においては、まず、工程Ｓ１において、ＳｒＯ粉末とＣａＯ粉末とを十分かつ均一に混合して混合粉末とする。
ここで、混合粉末におけるＳｒＯとＣａＯとの配合比は、特に限定されるものではないが、ＰＤＰ保護膜の耐スパッタ性を確保する観点からは、８：２〜１：９とすることが好ましい。
In the present embodiment, first, in step S1, SrO powder and CaO powder are mixed sufficiently and uniformly to obtain a mixed powder.
Here, the mixing ratio of SrO and CaO in the mixed powder is not particularly limited, but is preferably 8: 2 to 1: 9 from the viewpoint of ensuring the sputtering resistance of the PDP protective film. .
また、ＳｒＯ粒子の平均粒径は、特に限定されるものではないが、十分な密度の焼成体とする観点からは、１５〜１００μｍのものを用いることが好ましい。
さらに、ＣａＯ粒子の平均粒径は、特に限定されるものではないが、十分な密度の焼成体とする観点からは、１５〜１００μｍのものを用いることが好ましい。
さらにまた、本発明においては、ＳｒＯとＣａＯ以外に、膜特性の向上の観点から、ＢａＯ、ＭｇＯ等のその他の成分を添加することもできる。
Moreover, the average particle diameter of the SrO particles is not particularly limited, but from the viewpoint of obtaining a sintered body having a sufficient density, it is preferable to use those having a particle diameter of 15 to 100 μm.
Furthermore, although the average particle diameter of CaO particle | grains is not specifically limited, From a viewpoint of setting it as the sintered body of sufficient density, it is preferable to use a thing of 15-100 micrometers.
Furthermore, in the present invention, in addition to SrO and CaO, other components such as BaO and MgO can be added from the viewpoint of improving the film characteristics.
次に、工程Ｓ２において、工程Ｓ１において得られた混合粉末を加圧成型し、ペレット状の成型体とする。
ここで、加圧成型時に混合粉末に加える圧力は、特に限定されるものではないが、十分な形状の安定性と密度を有する成型体とするためには、１００〜５００kgf／cm2とすることが好ましい。
Next, in step S2, the mixed powder obtained in step S1 is pressure-molded to obtain a pellet-shaped molded body.
Here, the pressure applied to the mixed powder at the time of pressure molding is not particularly limited, but in order to obtain a molded body having sufficient shape stability and density, it should be 100 to 500 kgf / cm 2. Is preferred.
さらに、工程Ｓ３において、工程Ｓ２において得られたペレット状の成型体を焼成炉に導入し、ＳｒＣＯ3の分解温度（１１５５℃）以上の温度で加熱して焼成する。
ここで、焼成温度は、ペレットの密度を高くする観点から、ＳｒＯとＣａＯとの融点（ＳｒＯ：２４３０℃ ＣａＯ：２５７０℃）よりも低い温度であれば高ければ高いほどよい。
Further, in step S3, the pellet-shaped molded body obtained in step S2 is introduced into a firing furnace, and heated and fired at a temperature equal to or higher than the decomposition temperature of SrCO 3 (1155 ° C.).
Here, from the viewpoint of increasing the density of the pellets, the firing temperature is preferably higher as long as the temperature is lower than the melting point of SrO and CaO (SrO: 2430 ° C CaO: 2570 ° C).
本発明では、特に限定されるものではないが、十分な密度のペレットを作製するためには、１５００℃以上の温度で焼成することが好ましい。
また、焼成時間は特に限定されるものではないが、十分な密度のペレットを作製するためには、３０分以上とすることが好ましく、より好ましくは６０分である。なお、焼成時間を長くすると、高密度のペレットが得られる傾向がある。
In the present invention, although not particularly limited, firing at a temperature of 1500 ° C. or higher is preferable in order to produce a sufficiently dense pellet.
Moreover, although baking time is not specifically limited, In order to produce a pellet of sufficient density, it is preferable to set it as 30 minutes or more, More preferably, it is 60 minutes. In addition, when baking time is lengthened, there exists a tendency for a high-density pellet to be obtained.
その後、工程Ｓ４において、工程Ｓ３において得られたペレット状の焼成体を冷却する。この場合、焼成体を例えば焼成炉内において窒素ガスを用いて冷却する。これにより、ＳｒＯとＣａＯを主成分とするペレット状の蒸発材料を得る。
そして、上記工程によって得られたペレット状の蒸発材料は、Ｈ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中で保存する。
Thereafter, in step S4, the pellet-like fired body obtained in step S3 is cooled. In this case, the fired body is cooled using, for example, nitrogen gas in a firing furnace. As a result, a pellet-shaped evaporation material mainly containing SrO and CaO is obtained.
Then, pellets of the evaporation material obtained by the above process is stored in an atmosphere that does not contain H 2 O, CO 2 and CO.
以上述べたように本実施の形態においては、ＳｒＯとＣａＯを主成分とする混合粉末をペレット状に加圧成型し、この成型体を焼成冷却して蒸発材料を製造する際、各工程をＨ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において行うことから、反応性に富むＳｒＯがＨ2Ｏ、ＣＯ2又はＣＯと反応してＳｒＣＯ3が生成されることを抑制することができる。 As described above, in the present embodiment, when the mixed powder containing SrO and CaO as main components is pressure-molded into pellets, and this molded body is fired and cooled to produce the evaporation material, each step is performed as H. Since it is performed in an atmosphere not containing 2 O, CO 2 and CO, it can be suppressed that SrO rich in reactivity reacts with H 2 O, CO 2 or CO to produce SrCO 3 .
しかも、本実施の形態においては、ＳｒＣＯ3の分解温度以上でペレットの焼成を行うことから、例えば原料の加工等の過程でＳｒＯが一部Ｈ2Ｏ、ＣＯ2又はＣＯと反応してＳｒＣＯ3が生成された場合であっても、このＳｒＣＯ3を分解して消失させることができる。 Moreover, in this embodiment, SrCO 3 from performing the sintering of the pellets at a temperature higher than the decomposition temperature of SrCO 3, for example, SrO in the course of processing or the like of the raw material reacts with some H 2 O, CO 2 or CO Even when is produced, this SrCO 3 can be decomposed and lost.
そして、本実施の形態によれば、ＳｒＯとＣａＯを主成分とするペレット状の蒸発材料を得ることができ、その結果、形成される蒸着膜と蒸発材料との間に組成のずれがなく、かつ、高い成膜レートにおいてもスプラッシュの発生のない蒸着膜の形成が可能になる。 And according to this Embodiment, the pellet-shaped evaporation material which has SrO and CaO as a main component can be obtained, As a result, there is no shift in composition between the vapor deposition film formed and the evaporation material, In addition, it is possible to form a deposited film without occurrence of splash even at a high film formation rate.
また、本実施の形態の場合、ＳｒＯとＣａＯを主成分とする蒸発材料をＨ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において保管することにより、蒸発材料中のＳｒＯとＣａＯとがＨ2Ｏ、ＣＯ2又はＣＯと反応してＳｒＣＯ3等に変質してしまうことがなく、蒸発材料を長期間安定して保存することができる。 In the case of the present embodiment, by storing the evaporating material mainly composed of SrO and CaO in an atmosphere not containing H 2 O, CO 2 and CO, SrO and CaO in the evaporating material become H 2. The evaporated material can be stably stored for a long period of time without reacting with O, CO 2 or CO to be transformed into SrCO 3 or the like.
なお、本発明はＰＤＰの誘電体層用の保護膜のみならず、種々の蒸着膜形成に用いることができる。
ただし、ＰＤＰの誘電体層用の保護膜を形成する際に用いれば、放電電圧の低減と発光効率の向上が可能なＳｒＯとＣａＯを主成分とする保護膜を効率良く形成することができる。
In addition, this invention can be used not only for the protective film for the dielectric layer of PDP but for various vapor deposition film formation.
However, if it is used when forming a protective film for a PDP dielectric layer, it is possible to efficiently form a protective film mainly composed of SrO and CaO capable of reducing the discharge voltage and improving the light emission efficiency.
以下、本発明の実施例を比較例とともに説明する。 Examples of the present invention will be described below together with comparative examples.
（実施例）
＜蒸発材料の作成＞
純度９９．５％、粒径１００メッシュのＳｒＯ粉末と純度９９．９％、粒径３００メッシュのＣａＯ粉末とをＮ2ガス中において十分に均一になるように混合して、ＣａＯ濃度が３０mol％のＳｒＯとＣａＯとを主成分とする混合粉末を調製した。
(Example)
<Creation of evaporation material>
SrO powder having a purity of 99.5% and a particle size of 100 mesh and CaO powder having a purity of 99.9% and a particle size of 300 mesh are mixed so as to be sufficiently uniform in N 2 gas, and the CaO concentration is 30 mol%. A mixed powder composed mainly of SrO and CaO was prepared.
次に、このＳｒＯとＣａＯを主成分とする混合粉末をφ１０ｍｍ×１０ｍｍの金型に入れ、４００ｋｇｆ／ｃｍ2の圧力でプレスして、ペレットを作製した。
そして、このペレットを焼成炉に入れ、図２に示すような焼成パターンに基づき焼成した。
Next, this mixed powder containing SrO and CaO as main components was placed in a φ10 mm × 10 mm mold and pressed at a pressure of 400 kgf / cm 2 to produce pellets.
And this pellet was put into the baking furnace, and it baked based on the baking pattern as shown in FIG.
本実施例では、焼成炉内に１０Ｌ／分でＮ2ガスを導入しながら、焼成炉内の温度を９０分かけて１５００℃まで昇温し、焼成炉内にＮ2ガスを１０Ｌ／分で導入しながら、６０分間にわたって焼成炉内の温度を１５００℃に維持するように加熱した。 In this embodiment, while introducing N 2 gas at 10L / min in a sintering furnace, the temperature in the firing furnace was raised to 1500 ° C. over 90 minutes, the N 2 gas at 10L / min in a firing furnace While being introduced, heating was performed so that the temperature in the baking furnace was maintained at 1500 ° C. for 60 minutes.
加熱終了後、焼成炉内にＮ2ガスを２０Ｌ／分で導入しながらペレット状の焼成体を冷却した。これにより、ＳｒＯとＣａＯを主成分とするペレット状の蒸発材料を得た。 After the heating, the pellet-like fired body was cooled while introducing N 2 gas into the firing furnace at 20 L / min. As a result, a pellet-shaped evaporation material containing SrO and CaO as main components was obtained.
（比較例）
＜蒸発材料の作成＞
実施例と同一の配合比のＳｒＯ粉末とＣａＯ粉末を用い、Ｎ2ガス中において十分に均一になるように混合し、この混合粉末を焼成することなくそのまま蒸発材料とした。
(Comparative example)
<Creation of evaporation material>
SrO powder and CaO powder having the same blending ratio as in the examples were used and mixed so as to be sufficiently uniform in N 2 gas, and the mixed powder was directly used as an evaporation material without firing.
（分析方法）
＜蒸着膜の組成分析＞
得られた蒸発材料を蒸発源に収容し、表１に示すような条件、すなわち、蒸発源と基板との間の距離を３５０ｍｍ、到達圧力を２．０×１０-4Ｐａ、電子ビーム出力を１．２ｋＷ、蒸着中の圧力を３．０×１０-2Ｐａ、基板加熱温度を２５０℃、成膜レートを６０オングストローム／ｓという条件下で、電子ビーム蒸着法により基板上に蒸着膜を形成した（１オングストローム＝１０-10ｍ）。
(Analysis method)
<Composition analysis of deposited film>
The obtained evaporation material is accommodated in the evaporation source, and the conditions shown in Table 1, that is, the distance between the evaporation source and the substrate is 350 mm, the ultimate pressure is 2.0 × 10 −4 Pa, and the electron beam output is A deposited film is formed on the substrate by electron beam deposition under the conditions of 1.2 kW, the pressure during deposition is 3.0 × 10 −2 Pa, the substrate heating temperature is 250 ° C., and the deposition rate is 60 Å / s. (1 angstrom = 10 −10 m).
そして、蒸着膜の組成を分析し、その結果を表２にまとめた。 And the composition of the vapor deposition film was analyzed and the result was put together in Table 2.
表２によれば、実施例の蒸発材料を用いて蒸着膜を形成した場合には、蒸発材料中のＣａＯ濃度と蒸着膜中のＣａＯ濃度との間に大きな変化は見られない。
一方、比較例の蒸発材料を用いて蒸着膜を形成した場合には、蒸発材料中のＣａＯ濃度（３０．２mol％）が蒸着膜中においては１２．６mol％にまで減少している。
According to Table 2, when a vapor deposition film is formed using the evaporation material of the example, there is no significant change between the CaO concentration in the evaporation material and the CaO concentration in the vapor deposition film.
On the other hand, when a vapor deposition film is formed using the evaporation material of the comparative example, the CaO concentration (30.2 mol%) in the evaporation material is reduced to 12.6 mol% in the vapor deposition film.
これは、ＣａＯはＳｒＯより蒸気圧が低いため、ＣａＯを蒸発材料に用いた場合はＳｒＯが優先的に蒸発し蒸着膜中のＣａＯ濃度が相対的に低くなってしまったものと考えられる。
一方、実施例の蒸発材料を用いた場合は電子ビームが当たった部分全体が蒸発するため、蒸発材料とほぼ同じ組成の蒸着膜が得られたものと考えられる。
This is presumably because CaO has a lower vapor pressure than SrO, so when CaO is used as the evaporation material, SrO preferentially evaporates and the CaO concentration in the deposited film becomes relatively low.
On the other hand, when the evaporating material of the example is used, the entire portion irradiated with the electron beam evaporates. Therefore, it is considered that a vapor deposition film having almost the same composition as the evaporating material was obtained.
＜蒸着膜のスプラッシュの発生状況の分析＞
実施例及び比較例の蒸発材料を用い、成膜レートを２０オングストローム／ｓから２００オングストローム／ｓまで変化させながら、電子ビーム蒸着法によって基板上に蒸着膜を形成した。
そして、形成された蒸着膜中におけるスプラッシュの発生状況を分析した。その結果を表３にまとめた。
<Analysis of the occurrence of splash on the deposited film>
Using the evaporation materials of Examples and Comparative Examples, a deposition film was formed on the substrate by an electron beam deposition method while changing the deposition rate from 20 angstrom / s to 200 angstrom / s.
And the generation | occurrence | production state of the splash in the formed vapor deposition film was analyzed. The results are summarized in Table 3.
表３から明らかなように、比較例の蒸発材料を用いて形成した蒸着膜は、成膜レートが２０オングストローム／ｓのときに既にスプラッシュの発生が確認でき、成膜レートをさらに５０、１００、１５０、２００オングストローム／ｓと変化させた場合にもスプラッシュの発生が確認できた。 As is apparent from Table 3, the vapor deposition film formed using the evaporation material of the comparative example can already confirm the occurrence of splash when the film formation rate is 20 angstrom / s, and the film formation rate is further increased to 50, 100, The occurrence of splash was confirmed even when the pressure was changed to 150 and 200 angstrom / s.
一方、実施例の蒸発材料を用いて形成した蒸着膜は、成膜レートを２０、５０、１００、１５０、２００オングストローム／ｓと上昇させた場合であっても、スプラッシュの発生は確認されなかった。 On the other hand, in the deposited film formed using the evaporation material of the example, no occurrence of splash was confirmed even when the deposition rate was increased to 20, 50, 100, 150, 200 angstrom / s. .
以上の結果から明らかなように、本実施例のＳｒＯとＣａＯを主成分とするペレット状の蒸発材料を用いると、蒸発材料と蒸着膜との組成のずれを抑制することができるとともに、スプラッシュの発生のない蒸着膜を高い成膜レートで形成することができることがわかった。 As is clear from the above results, the use of the pelletized evaporation material mainly composed of SrO and CaO in this example can suppress the deviation of the composition between the evaporation material and the deposited film, and the splash. It was found that a vapor deposition film without generation can be formed at a high film formation rate.
Claims (2)
ＳｒＯとＣａＯを主成分とする混合粉末を加圧成型しペレット状の成型体とする工程と、
前記成型体をＳｒＣＯ3の分解温度以上の温度で３０分間以上６０分間以下焼成して焼成体とする工程と、
前記焼成体を冷却する工程とを有し、
上記工程をそれぞれＨ2Ｏ、ＣＯ2及びＣＯを含まない雰囲気中において行う蒸発材料の製造方法。 A method for producing a pellet-shaped evaporation material,
A step of pressure-molding a mixed powder mainly composed of SrO and CaO to form a pellet-shaped molded body,
A step of the fired body the molded body was fired following 60 minutes or 30 minutes at the decomposition temperature or more of SrCO 3,
Cooling the fired body,
A method for producing an evaporating material, wherein the above steps are performed in an atmosphere not containing H 2 O, CO 2 and CO, respectively.
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