JP4784700B2 - Piezoelectric wafer - Google Patents

Description

  The present invention relates to an improvement in the structure of a piezoelectric wafer used in mass production of piezoelectric vibration elements by batch processing.

A surface-mount type piezoelectric device having a structure in which a piezoelectric vibration element is hermetically sealed in a package, such as a crystal resonator, is used as a reference frequency generation source in communication devices such as mobile phones and pagers, and electronic devices such as computers. It is used as a filter.
Due to the demand for downsizing and high performance of the electronic devices, the piezoelectric vibration elements constituting the used piezoelectric devices are also required to be downsized and high frequency. As a result, the piezoelectric vibration element is required to be miniaturized such that the vertical and horizontal dimensions are about several millimeters and the thickness of the vibration part is about several tens of micrometers. Piezoelectric vibration elements have a structure in which excitation electrodes and lead electrodes are formed on the main surface of a piezoelectric substrate. When ultra-small piezoelectric vibration elements are manufactured by individual processing, the yield and efficiency deteriorate. As a result, productivity is significantly reduced. Therefore, conventionally, batch processing using a large-area piezoelectric wafer is performed. In batch processing, the piezoelectric wafer is thinned to the target thickness by lapping and polishing, and then multiple chip patterns are formed on the piezoelectric wafer by photolithography technology transfer, etching, etc., and batch processing is performed in wafer units. After completion, the work of dividing into small pieces of piezoelectric chips is performed.
By the way, in the case of mass-producing a piezoelectric vibration element whose vibration part is thinned to about several tens of μm by batch processing using a piezoelectric wafer, conventionally, the thickness of the piezoelectric wafer is entirely covered by mechanical polishing such as lapping and polishing. It was necessary to pre-process evenly to the target thickness dimension. Further, when the demand for higher frequency is further increased, it is necessary to further reduce the overall thickness of the piezoelectric wafer by mechanical polishing. Further, in order to increase the mass productivity and reduce the cost, it is necessary to increase the size of the piezoelectric wafer and increase the mass productivity from one piezoelectric wafer.

FIG. 8 is an explanatory diagram when a quartz wafer is processed by a photolithography process. The quartz wafer 100 is covered with a protective film 101 except for the substantially annular portion 102 indicated by hatching, and the quartz wafer 100 is crystallized. The whole wafer is immersed in an etching solution for a predetermined time and is shaken while the quartz material corresponding to the hatched portion 102 is removed to form a through slit (etching without outline). The through slit formed in the hatched portion 102 serves as a boundary that defines between adjacent crystal substrate chips 103.
Next, the protective film 101 is peeled off, and a metal film to be an excitation electrode and a lead electrode is attached on the quartz substrate chip 103 surrounded by the penetrating hatched portion 102. Then, it divides | segments into the crystal | crystallization board | substrate chip piece by folding along the hatching part 102 which penetrated.
However, if the piezoelectric wafer is further reduced in thickness and increased in area, the strength of the piezoelectric wafer is inevitably reduced, so that the piezoelectric wafer is easily damaged during handling in the photolithography process, and the yield is reduced. In particular, the wafer is likely to be damaged when the piezoelectric wafer is moved while being held by tweezers or when the etching solution adhering to the piezoelectric wafer is swung in the solution for etching or cleaning.
As described above, since a large piezoelectric wafer has many inconveniences in handling, a piezoelectric wafer having a small area, which is inferior in mass productivity, has to be used in order to give priority to the manufacturing yield.
In JP-A-2004-119718, a ring-shaped frame is provided along the outer peripheral edge of one surface of a thin wafer in order to maintain a thin wafer in a stable shape in each step during processing and prevent cracking, chipping and warping. A method of manufacturing a thin semiconductor chip that is attached and reinforced is disclosed.
However, in this prior art, after processing the wafer to a desired thickness, it is necessary to attach the ring-shaped frame on one side of the thin wafer with accurate positioning, which increases the number of operations, Productivity decreases significantly.

JP 2004-119718 A

The present invention has been made in view of the above, and a piezoelectric wafer having a large area whose mechanical strength is reduced by being thinned to a thickness of several tens of μm by mechanical polishing, and a subsequent photolithography process. Accordingly, an object of the present invention is to provide a structure of a piezoelectric wafer capable of solving the problem that the yield is reduced due to damage of the piezoelectric wafer by handling when processing into a plurality of piezoelectric chip pieces.
In other words, according to the present invention, the piezoelectric wafer with reduced mechanical strength is not damaged by handling, while causing a large area to ensure sufficient mass productivity without causing a reduction in mass productivity by reducing the area. Can be prevented.

  In the first embodiment of the present invention, a plurality of piezoelectric vibration elements, a connection body in which the plurality of piezoelectric vibration elements are connected, and an outer edge of the connection body are thicker than the connection body. And a frame body portion.
  A second embodiment according to the present invention is a piezoelectric wafer according to the first embodiment that includes a beam formed so as to partition the coupling body, and both ends of the beam are connected to an inner wall of the frame body portion. is there.
  In a third embodiment according to the present invention, the frame body portion includes a configuration in which the plurality of piezoelectric vibration elements and the coupling body are surrounded, and the shape of the inner periphery of the frame body portion is a circle or a rectangle. The piezoelectric wafer according to any one of the first and second embodiments, in which corners of the rectangle have a curved shape.
  Application Example 1 A piezoelectric wafer according to this application example includes a thin plate region and a thick frame body portion integrated with an outer peripheral edge portion of the thin plate region.
  Application Example 2 A piezoelectric wafer according to this application example is a structure of the piezoelectric wafer used when forming a plurality of piezoelectric vibration elements on the piezoelectric wafer by processing by a photolithography process, and the plurality of piezoelectric wafers. A thin plate region that forms the vibration element, and a thick frame body unit integrated with the outer peripheral edge of the thin plate region.
  [Application Example 3] In the application example 1 or 2, the piezoelectric wafer according to this application example has a circular shape, an elliptical shape, an oval shape, or an R-shaped portion as a whole of the inner wall surface of the outer frame portion. It is composed only of straight portions.

  According to the piezoelectric wafer of the present invention, since the thin wafer region and the thick frame body portion integrated with the outer peripheral edge of the thin plate region are provided, the thickness is several tens of μm by mechanical polishing. Due to the handling when a large-area piezoelectric wafer whose mechanical strength has been reduced by thinning until it is processed into multiple piezoelectric chip pieces by a subsequent photolithography process, the piezoelectric wafer is damaged and the yield is reduced. It is possible to solve the conventional problem of performing.

(A) And (b) is a perspective view which shows the structure of the crystal wafer as an example of the piezoelectric wafer which concerns on one Embodiment of this invention, and AA sectional drawing. (A) thru | or (c) is a figure explaining the process sequence of the piezoelectric wafer of this invention. (A) thru | or (d) are principal part (thin board | substrate area | region) expanded sectional views which show the process sequence of the crystal wafer by a photolithography process. (A) And (b) is a top view which shows the structure of other embodiment of the piezoelectric wafer of this invention, and BB sectional drawing. (A) And (b) is a top view which shows the structure of other embodiment of the piezoelectric wafer of this invention, respectively. (A) And (b) is a top view which shows the structure of the piezoelectric wafer which concerns on other embodiment of this invention, respectively. (A) And (b) is a top view which shows the structure of the piezoelectric wafer which concerns on other embodiment of this invention, respectively. Explanatory drawing of the processing method of the piezoelectric wafer of a prior art example. (A) And (b) is explanatory drawing which shows the procedure which apply | coats a resist to the piezoelectric wafer of this invention by spin coating, and its fault.

Hereinafter, the present invention will be described in detail with reference to embodiments shown in the drawings.
1A and 1B are a perspective view and a cross-sectional view taken along line AA of a crystal wafer as an example of a piezoelectric wafer according to an embodiment of the present invention, and FIGS. () Is a diagram illustrating a processing procedure of the piezoelectric wafer of the present invention.
A crystal wafer (piezoelectric wafer) 1 according to the present invention includes a thin plate region 2 for forming a coupled body of crystal resonator elements (piezoelectric resonator elements) and a thick frame body integrated with an outer peripheral edge of the thin plate region 2. The structure provided with the part 3 is characteristic. The crystal resonator element includes a crystal substrate, an excitation electrode, and a lead electrode formed on the crystal substrate surface.
When the quartz wafer 1 is manufactured, first, a flat and thick quartz crystal plate 10 as indicated by a dotted line in FIG. 2A is formed into a predetermined thickness (for example, 50 μm) by mechanical polishing such as lapping or polishing. ) The thickness of the quartz plate 10 at this stage is sufficiently thicker than the final target thickness (for example, 30 μm) and kept in a state where the mechanical strength is strong.
Next, in FIG. 2B, in the state where the crystal plate upper surface outer peripheral portion corresponding to the width dimension of the frame body portion 3 in FIG. 1 and the entire lower surface of the crystal plate are masked by the metal films 11a and 11b, the crystal plate is used as an etching solution. By immersing and oscillating, the upper surface of the quartz substrate that is not concealed by the annular metal film 11a on the upper surface side and the entire metal film 11b on the bottom surface side is processed into a concave shape as shown in FIG. The thickness of the bottom plate 13 is set to a target value of 30 μm. Thereafter, the quartz wafer 1 is completed by removing the metal films 11a and 11b after washing the etching solution adhering by immersing and swinging the quartz plate in the washing solution.
When the quartz plate 10 is mechanically polished, the quartz plate 10 may be finished to a thickness corresponding to the thickness of the frame body portion 3, and it is not necessary to finish by polishing to a thickness corresponding to the thin plate region 2 as in the prior art. This facilitates processing in the mechanical polishing process.
Furthermore, since the mechanical strength of the quartz wafer 1 is reinforced by the thick frame body portion 3 integrated with the outer peripheral edge of the thin plate region 2, the quartz wafer 1 can be applied to the quartz vibrating element pieces by the subsequent photolithography process. It is possible to prevent the thin plate region 2 from being deformed or damaged by holding or moving by tweezers in the processing step, or swinging in the etching solution or cleaning solution. Accordingly, it is possible to increase the strength in response to the enlargement of the quartz wafer and the further thinning of the thin plate region, and to prevent breakage in handling during the photolithography process.

FIGS. 3A to 3D are enlarged cross-sectional views of the main part (thin plate region) showing the processing procedure of the crystal wafer by the photolithography process. Both the front and back surfaces of the thin plate region 2 are conventionally processed by the photolithography process. Of the metal film 20 ((a)), patterning of the photoresist 21 on the metal film 20 excluding the outer portion 2a, exposure, development, and selective removal by etching of the metal film 20 ((b)). ), Outline-etching etching ((c)), photoresist stripping, and removal by metal film etching ((d)) are sequentially performed to form crystal vibrating element pieces.
In the patterning process of the photoresist 21 shown in FIG. 3B, the process of spraying the photoresist on the crystal wafer surface while rotating the crystal wafer 1 while being fixed on the rotary table of the spin coater as in the prior art. Can be adopted. When performing exposure using a mask for photoresist, exposure is performed in exactly the same manner as before except that the gap between the thin plate region surface and the mask is set in consideration of the thickness of the frame 3. it can. It has been confirmed that the various etching processes are completely different from etching performed on a conventional flat crystal wafer.
In the above embodiment, the outer bottom surface of the thin plate region 2 is positioned on the same plane as the bottom surface of the frame body portion 3 by etching one surface of a rectangular crystal plate. For example, as shown in FIG. You may comprise so that the outer periphery of the thin area | region 2 may be hold | maintained integrally by the height direction intermediate part of the frame part 3, and a longitudinal cross-sectional shape may become an H shape. In this case, etching is performed in a state where the outer peripheral edges of the front and back surfaces of the crystal plate 10 are masked by the annular metal film 11a shown in FIG. Form.

Next, FIG. 5 (a) is a modified embodiment of the present invention. In this crystal wafer 1, the outer peripheral edge of the thin plate region 2 is thickened by forming the outer peripheral contour into a circle and forming the thin plate region 2 inside thereof. It is configured to be reinforced by the meat frame 3. Also in this embodiment, the thin plate region 2 may be at the same level as the bottom surface of the thick portion 3, or the vertical cross-sectional shape may be H-shaped.
Further, FIG. 5B is an example in which the mechanical strength is further increased by providing a narrow beam 25 so as to penetrate the center of the circular crystal wafer 1 of FIG. 5A.
In any of the above examples, the thickness ratio between the thin plate region 2 and the frame body part 3, the presence / absence of the beams 25, the thickness, the number, etc., take into account the size of the crystal wafer and the thickness of the thin plate region. The conditions may be selected so that sufficient wafer strength can be secured.
Next, in the crystal wafer (piezoelectric wafer) in each of the embodiments described above, since there are 90 °, acute or obtuse corners on the inner surface of the frame, handling or etching in the photolithography process is performed. By repeatedly swinging in the liquid or the cleaning liquid, stress is concentrated around the corner portion, and the thin plate region 2 is likely to be damaged such as a crack starting from the corner portion.
Alternatively, as shown in the photoresist coating process by the spin coater 30 in FIGS. 9A and 9B, while the crystal wafer 1 is held on the rotary table 32 that is rotationally driven by the motor 31, the rotary table 32 is rotated. When the photoresist 36 is applied from the nozzle 35 toward the concave portion 12 of the crystal wafer 1, the photoresist 35 easily accumulates along the inner wall of the frame body portion 3 due to centrifugal force, and a large amount particularly in the corners. Photoresist accumulates. The thickened portion due to the large amount of the photoresist 35 is not smoothly exposed and developed as compared with the central portion having a uniform thickness, and the photolithography process is not performed as intended. For this reason, it becomes impossible to form the outline-extracted portion 2a as shown in FIG.

In order to solve such a problem, in another embodiment of the present invention, a corner portion is not formed on the inner wall side of the outer frame portion 3. In other words, the contour shape of the outer peripheral edge of the thin plate region 2 is configured only from the R shape and / or the linear shape.
That is, FIG. 6A is an example in which the entire inner wall surface of the outer frame portion 3 of the crystal wafer 1 having a rectangular outer shape is a circle (or an ellipse or an ellipse), and FIG. 6B is an outer frame. The corner portion is chamfered in an R shape while the overall shape of the inner wall surface of the portion 3 is substantially rectangular.
FIG. 7A shows an example in which the overall shape of the inner wall surface of the outer frame portion 3 of the crystal wafer 1 having a circular outer shape is a circle (or an ellipse or an ellipse), and FIG. While the overall shape of the inner wall surface of the portion 3 is two substantially rectangular shapes, the corners of each rectangular inner wall are configured to be chamfered in an R shape.
As described above, in the present embodiment, the planar shape of the inner wall surface is formed of an R shape or a straight line so that corners are not formed on the inner wall surface of the outer frame portion 3, so that it can be handled during handling or in liquid. There is no place where the stress is concentrated when swinging, so that the quartz wafer is hardly damaged.
Further, when applying the photoresist in the recess 12 while rotating the quartz wafer 1 by the spin coater 30, there is no corner on the inner wall surface of the outer frame portion 3, so that the resist application along the inner wall of the outer frame portion is performed. Unevenness and resist pooling are less likely to occur, and the outer shape removal process by the exposure / development process can be accurately performed due to variations in the thickness of the photoresist.
In the above embodiment, quartz is exemplified as the piezoelectric crystal material. However, this is only an example, and the present invention can be applied to piezoelectric wafers made of any piezoelectric crystal material.

  DESCRIPTION OF SYMBOLS 1 Crystal wafer (piezoelectric wafer), 2 Thin plate area | region, 2a Outer shape part, 3 Frame body part, 10 Crystal board, 11a, 11b Metal film, 12 Recessed part, 20 Metal film, 25 Beam, 30 Spin coater, 31 Motor, 32 Table

Claims (3)

  A plurality of piezoelectric vibration elements;
  A connected body in which the plurality of piezoelectric vibration elements are connected;
  A piezoelectric wafer comprising: a frame body portion integrated with an outer edge of the connection body and having a thickness greater than that of the connection body.   2. The piezoelectric wafer according to claim 1, further comprising a beam formed so as to partition the coupling body, wherein both ends of the beam are connected to an inner wall of the frame body portion.   The frame portion includes a configuration surrounding the plurality of piezoelectric vibration elements and the coupling body,
  3. The piezoelectric wafer according to claim 1, wherein a shape of an inner periphery of the frame body is a circle or a rectangle, and corners of the rectangle have a curved shape.

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