JP4782929B2 - 薄膜共振器フィルタとその構成方法 - Google Patents
薄膜共振器フィルタとその構成方法 Download PDFInfo
- Publication number
- JP4782929B2 JP4782929B2 JP2001026681A JP2001026681A JP4782929B2 JP 4782929 B2 JP4782929 B2 JP 4782929B2 JP 2001026681 A JP2001026681 A JP 2001026681A JP 2001026681 A JP2001026681 A JP 2001026681A JP 4782929 B2 JP4782929 B2 JP 4782929B2
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- 239000010409 thin film Substances 0.000 title claims description 26
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0428—Modification of the thickness of an element of an electrode
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/497860 | 2000-02-04 | ||
| US09/497,860 US6377136B1 (en) | 2000-02-04 | 2000-02-04 | Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001251102A JP2001251102A (ja) | 2001-09-14 |
| JP2001251102A5 JP2001251102A5 (enExample) | 2008-03-21 |
| JP4782929B2 true JP4782929B2 (ja) | 2011-09-28 |
Family
ID=23978601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001026681A Expired - Fee Related JP4782929B2 (ja) | 2000-02-04 | 2001-02-02 | 薄膜共振器フィルタとその構成方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6377136B1 (enExample) |
| EP (1) | EP1126603A3 (enExample) |
| JP (1) | JP4782929B2 (enExample) |
| KR (1) | KR100752733B1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0012437D0 (en) * | 2000-05-24 | 2000-07-12 | Univ Cranfield | Improvements to filters |
| GB0012439D0 (en) * | 2000-05-24 | 2000-07-12 | Univ Cranfield | Improvements to filters |
| GB0014630D0 (en) * | 2000-06-16 | 2000-08-09 | Koninkl Philips Electronics Nv | Bulk accoustic wave filter |
| DE10058339A1 (de) * | 2000-11-24 | 2002-06-06 | Infineon Technologies Ag | Bulk-Acoustic-Wave-Filter |
| JP2003229743A (ja) * | 2001-11-29 | 2003-08-15 | Murata Mfg Co Ltd | 圧電フィルタ、通信装置および圧電フィルタの製造方法 |
| US6635519B2 (en) * | 2002-01-10 | 2003-10-21 | Agere Systems, Inc. | Structurally supported thin film resonator and method of fabrication |
| US7014112B2 (en) * | 2003-04-29 | 2006-03-21 | Hewlett-Packard Development Company, L.P. | Electronic identification label and interrogator for use therewith |
| US7598827B2 (en) * | 2006-06-19 | 2009-10-06 | Maxim Integrated Products | Harmonic termination of power amplifiers using BAW filter output matching circuits |
| US7586389B2 (en) * | 2006-06-19 | 2009-09-08 | Maxim Integrated Products, Inc. | Impedance transformation and filter using bulk acoustic wave technology |
| DE102013100286B3 (de) * | 2013-01-11 | 2014-06-05 | Epcos Ag | Breitbandiges Filter in Abzweigtechnik |
| US9325294B2 (en) * | 2013-03-15 | 2016-04-26 | Resonant Inc. | Microwave acoustic wave filters |
| CN111525906B (zh) * | 2020-03-30 | 2021-11-16 | 北京邮电大学 | 基于薄膜ipd技术的n77与n79带通滤波器芯片 |
Family Cites Families (66)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS58137317A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
| US4502932A (en) | 1983-10-13 | 1985-03-05 | The United States Of America As Represented By The United States Department Of Energy | Acoustic resonator and method of making same |
| US4556812A (en) | 1983-10-13 | 1985-12-03 | The United States Of America As Represented By The United States Department Of Energy | Acoustic resonator with Al electrodes on an AlN layer and using a GaAs substrate |
| JPS60189307A (ja) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | 圧電薄膜共振器およびその製造方法 |
| US4719383A (en) | 1985-05-20 | 1988-01-12 | The United States Of America As Represented By The United States Department Of Energy | Piezoelectric shear wave resonator and method of making same |
| JPS6421525A (en) * | 1987-07-16 | 1989-01-24 | Nec Corp | Magnetic disk control device |
| JPH0522986Y2 (enExample) * | 1987-07-22 | 1993-06-14 | ||
| US4837533A (en) * | 1987-07-22 | 1989-06-06 | Toko Kabushiki Kaisha | Ladder-type ceramic filter |
| JPH0513061Y2 (enExample) * | 1987-07-27 | 1993-04-06 | ||
| JPH0618314B2 (ja) | 1987-10-09 | 1994-03-09 | 株式会社村田製作所 | 集積型共振子の製造方法 |
| US4988957A (en) | 1989-05-26 | 1991-01-29 | Iowa State University Research Foundation, Inc. | Electronically-tuned thin-film resonator/filter controlled oscillator |
| US5075641A (en) | 1990-12-04 | 1991-12-24 | Iowa State University Research Foundation, Inc. | High frequency oscillator comprising cointegrated thin film resonator and active device |
| US5231327A (en) | 1990-12-14 | 1993-07-27 | Tfr Technologies, Inc. | Optimized piezoelectric resonator-based networks |
| EP0498198B1 (en) | 1991-02-04 | 1995-11-22 | Motorola, Inc. | Hermetic device package for microelectronic frequency selection components |
| US5263259A (en) | 1991-05-14 | 1993-11-23 | Fausto Cimador | Design apparatus |
| JPH0522073A (ja) * | 1991-07-10 | 1993-01-29 | Ngk Spark Plug Co Ltd | 梯子型電気濾波器 |
| EP0546696A1 (en) | 1991-12-13 | 1993-06-16 | Hewlett-Packard Company | Process for lithography on piezoelectric films |
| US5232571A (en) | 1991-12-23 | 1993-08-03 | Iowa State University Research Foundation, Inc. | Aluminum nitride deposition using an AlN/Al sputter cycle technique |
| US5348617A (en) | 1991-12-23 | 1994-09-20 | Iowa State University Research Foundation, Inc. | Selective etching process |
| US5294898A (en) | 1992-01-29 | 1994-03-15 | Motorola, Inc. | Wide bandwidth bandpass filter comprising parallel connected piezoelectric resonators |
| US5166646A (en) | 1992-02-07 | 1992-11-24 | Motorola, Inc. | Integrated tunable resonators for use in oscillators and filters |
| US5283458A (en) | 1992-03-30 | 1994-02-01 | Trw Inc. | Temperature stable semiconductor bulk acoustic resonator |
| US5367308A (en) | 1992-05-29 | 1994-11-22 | Iowa State University Research Foundation, Inc. | Thin film resonating device |
| US5373268A (en) | 1993-02-01 | 1994-12-13 | Motorola, Inc. | Thin film resonator having stacked acoustic reflecting impedance matching layers and method |
| US5334960A (en) | 1993-02-16 | 1994-08-02 | Motorola, Inc. | Conjugately matched acoustic wave transducers and method |
| US5434827A (en) | 1993-06-15 | 1995-07-18 | Hewlett-Packard Company | Matching layer for front acoustic impedance matching of clinical ultrasonic tranducers |
| US5381385A (en) | 1993-08-04 | 1995-01-10 | Hewlett-Packard Company | Electrical interconnect for multilayer transducer elements of a two-dimensional transducer array |
| US5446306A (en) | 1993-12-13 | 1995-08-29 | Trw Inc. | Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR) |
| US5587620A (en) | 1993-12-21 | 1996-12-24 | Hewlett-Packard Company | Tunable thin film acoustic resonators and method for making the same |
| US5572173A (en) * | 1994-02-15 | 1996-11-05 | Ngk Spark Plug Co., Ltd. | Ladder type filter with adjustable resonator positioning member |
| US5552655A (en) | 1994-05-04 | 1996-09-03 | Trw Inc. | Low frequency mechanical resonator |
| US5864261A (en) | 1994-05-23 | 1999-01-26 | Iowa State University Research Foundation | Multiple layer acoustical structures for thin-film resonator based circuits and systems |
| JPH08148968A (ja) * | 1994-11-24 | 1996-06-07 | Mitsubishi Electric Corp | 薄膜圧電素子 |
| US5630949A (en) | 1995-06-01 | 1997-05-20 | Tfr Technologies, Inc. | Method and apparatus for fabricating a piezoelectric resonator to a resonant frequency |
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| US5873154A (en) | 1996-10-17 | 1999-02-23 | Nokia Mobile Phones Limited | Method for fabricating a resonator having an acoustic mirror |
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| US6087198A (en) | 1998-02-12 | 2000-07-11 | Texas Instruments Incorporated | Low cost packaging for thin-film resonators and thin-film resonator-based filters |
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| US5894647A (en) | 1997-06-30 | 1999-04-20 | Tfr Technologies, Inc. | Method for fabricating piezoelectric resonators and product |
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| US5883575A (en) | 1997-08-12 | 1999-03-16 | Hewlett-Packard Company | RF-tags utilizing thin film bulk wave acoustic resonators |
| US6081171A (en) * | 1998-04-08 | 2000-06-27 | Nokia Mobile Phones Limited | Monolithic filters utilizing thin film bulk acoustic wave devices and minimum passive components for controlling the shape and width of a passband response |
| FI108583B (fi) | 1998-06-02 | 2002-02-15 | Nokia Corp | Resonaattorirakenteita |
| US6060818A (en) | 1998-06-02 | 2000-05-09 | Hewlett-Packard Company | SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters |
| US6150703A (en) | 1998-06-29 | 2000-11-21 | Trw Inc. | Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials |
| US5942958A (en) * | 1998-07-27 | 1999-08-24 | Tfr Technologies, Inc. | Symmetrical piezoelectric resonator filter |
| US6185589B1 (en) | 1998-07-31 | 2001-02-06 | Hewlett-Packard Company | Automatic banner resizing for variable-width web pages using variable width cells of HTML table |
| US6201457B1 (en) * | 1998-11-18 | 2001-03-13 | Cts Corporation | Notch filter incorporating saw devices and a delay line |
| US6215375B1 (en) | 1999-03-30 | 2001-04-10 | Agilent Technologies, Inc. | Bulk acoustic wave resonator with improved lateral mode suppression |
| JP4327942B2 (ja) | 1999-05-20 | 2009-09-09 | Tdk株式会社 | 薄膜圧電素子 |
-
2000
- 2000-02-04 US US09/497,860 patent/US6377136B1/en not_active Expired - Lifetime
-
2001
- 2001-01-22 EP EP01300508A patent/EP1126603A3/en not_active Ceased
- 2001-02-02 JP JP2001026681A patent/JP4782929B2/ja not_active Expired - Fee Related
- 2001-02-02 KR KR1020010005025A patent/KR100752733B1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US6377136B1 (en) | 2002-04-23 |
| EP1126603A3 (en) | 2005-09-07 |
| KR100752733B1 (ko) | 2007-08-28 |
| JP2001251102A (ja) | 2001-09-14 |
| EP1126603A2 (en) | 2001-08-22 |
| KR20010078275A (ko) | 2001-08-20 |
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