JP4777624B2 - エレクトロウェッティング作動を有する光学ビームスプリッタ - Google Patents
エレクトロウェッティング作動を有する光学ビームスプリッタ Download PDFInfo
- Publication number
- JP4777624B2 JP4777624B2 JP2004230148A JP2004230148A JP4777624B2 JP 4777624 B2 JP4777624 B2 JP 4777624B2 JP 2004230148 A JP2004230148 A JP 2004230148A JP 2004230148 A JP2004230148 A JP 2004230148A JP 4777624 B2 JP4777624 B2 JP 4777624B2
- Authority
- JP
- Japan
- Prior art keywords
- droplet
- electrodes
- beam splitter
- voltage
- enclosure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 33
- 239000007788 liquid Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 12
- 229920000742 Cotton Polymers 0.000 claims 3
- 230000007704 transition Effects 0.000 description 12
- 230000001902 propagating effect Effects 0.000 description 7
- 239000012530 fluid Substances 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/12—Beam splitting or combining systems operating by refraction only
- G02B27/123—The splitting element being a lens or a system of lenses, including arrays and surfaces with refractive power
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/637837 | 2003-08-08 | ||
| US10/637,837 US6847493B1 (en) | 2003-08-08 | 2003-08-08 | Optical beamsplitter with electro-wetting actuation |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005062864A JP2005062864A (ja) | 2005-03-10 |
| JP2005062864A5 JP2005062864A5 (enExample) | 2007-07-05 |
| JP4777624B2 true JP4777624B2 (ja) | 2011-09-21 |
Family
ID=34063432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004230148A Expired - Fee Related JP4777624B2 (ja) | 2003-08-08 | 2004-08-06 | エレクトロウェッティング作動を有する光学ビームスプリッタ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6847493B1 (enExample) |
| JP (1) | JP4777624B2 (enExample) |
| CN (1) | CN100363760C (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7106519B2 (en) * | 2003-07-31 | 2006-09-12 | Lucent Technologies Inc. | Tunable micro-lens arrays |
| US7132614B2 (en) * | 2004-11-24 | 2006-11-07 | Agilent Technologies, Inc. | Liquid metal switch employing electrowetting for actuation and architectures for implementing same |
| US7030328B1 (en) * | 2004-12-22 | 2006-04-18 | Agilent Technologies, Inc. | Liquid metal switch employing micro-electromechanical system (MEMS) structures for actuation |
| EP1856571B1 (en) * | 2005-02-28 | 2009-12-30 | Koninklijke Philips Electronics N.V. | Display device |
| US7053323B1 (en) * | 2005-05-04 | 2006-05-30 | Agilent Technologies, Inc. | Liquid metal switch employing an electrically isolated control element |
| US8721161B2 (en) | 2005-09-15 | 2014-05-13 | Alcatel Lucent | Fluid oscillations on structured surfaces |
| US8734003B2 (en) | 2005-09-15 | 2014-05-27 | Alcatel Lucent | Micro-chemical mixing |
| WO2007034377A2 (en) * | 2005-09-19 | 2007-03-29 | Koninklijke Philips Electronics N.V. | Composite layer having improved adhesion, and fluid focus lens incorporating same |
| US7474470B2 (en) * | 2005-12-14 | 2009-01-06 | Honeywell International Inc. | Devices and methods for redirecting light |
| JP4786357B2 (ja) | 2006-02-01 | 2011-10-05 | 富士フイルム株式会社 | 光学素子、光学ユニット、および撮像装置 |
| US7382544B2 (en) * | 2006-02-10 | 2008-06-03 | Honeywell International Inc. | Devices and related methods for light distribution |
| KR101272895B1 (ko) | 2006-06-30 | 2013-06-11 | 엘지디스플레이 주식회사 | 일렉트로 웨팅 디스플레이 소자 |
| JP4984875B2 (ja) * | 2006-07-10 | 2012-07-25 | ソニー株式会社 | レンズアレイ |
| JP4901870B2 (ja) * | 2006-08-01 | 2012-03-21 | パナソニック株式会社 | カメラ装置、液体レンズ及び撮像方法 |
| US20080088551A1 (en) * | 2006-10-12 | 2008-04-17 | Honeywell International Inc. | Microfluidic prism |
| US7791813B2 (en) * | 2006-10-12 | 2010-09-07 | Honeywell International Inc. | Microfluidic imaging array |
| US7862183B2 (en) * | 2007-10-16 | 2011-01-04 | Alcatel-Lucent Usa Inc. | Speckle reduction using a tunable liquid lens |
| US20090195882A1 (en) * | 2008-02-05 | 2009-08-06 | Bolle Cristian A | Mechanical lenses |
| JP2010054864A (ja) * | 2008-08-28 | 2010-03-11 | Sony Corp | 液体レンズ素子及び照明装置 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1239141A (enExample) * | 1969-03-07 | 1971-07-14 | ||
| US4030813A (en) * | 1974-12-20 | 1977-06-21 | Matsushita Electric Industrial Co., Ltd. | Control element having liquid layer attainable to geometrically uneven state in response to electrical signal |
| US4118270A (en) * | 1976-02-18 | 1978-10-03 | Harris Corporation | Micro lens formation at optical fiber ends |
| US4137060A (en) * | 1977-07-18 | 1979-01-30 | Robert Bosch Gmbh | Method of forming a lens at the end of a light guide |
| US4338352A (en) * | 1981-02-23 | 1982-07-06 | Mcdonnell Douglas Corporation | Process for producing guided wave lens on optical fibers |
| US4653847A (en) * | 1981-02-23 | 1987-03-31 | Motorola, Inc. | Fiber optics semiconductor package |
| FR2502345B1 (enExample) * | 1981-03-17 | 1985-01-04 | Thomson Csf | |
| NL8204961A (nl) * | 1982-12-23 | 1984-07-16 | Philips Nv | Monomode optische transmissievezel met een taps eindgedeelte en werkwijze voor het vervaardigen daarvan. |
| FR2548431B1 (fr) * | 1983-06-30 | 1985-10-25 | Thomson Csf | Dispositif a commande electrique de deplacement de fluide |
| CA1243105A (en) * | 1984-07-09 | 1988-10-11 | Giok D. Khoe | Electro-optical device comprising a laser diode, an input transmission fibre and an output transmission fibre |
| GB8421105D0 (en) * | 1984-08-20 | 1984-09-26 | British Telecomm | Microlens |
| US4948214A (en) * | 1989-07-10 | 1990-08-14 | Eastman Kodak Company | Step-index light guide and gradient index microlens device for LED imaging |
| US5518863A (en) * | 1992-01-31 | 1996-05-21 | Institut National D'optique | Method of changing the optical invariant of multifiber fiber-optic elements |
| DE4310291A1 (de) * | 1993-03-30 | 1994-10-06 | Sel Alcatel Ag | Optischer Koppler |
| US5486337A (en) * | 1994-02-18 | 1996-01-23 | General Atomics | Device for electrostatic manipulation of droplets |
| US6014259A (en) * | 1995-06-07 | 2000-01-11 | Wohlstadter; Jacob N. | Three dimensional imaging system |
| US5757345A (en) * | 1996-05-06 | 1998-05-26 | Xerox Corportion | Electrocapillary color display sheet |
| US5659330A (en) * | 1996-05-31 | 1997-08-19 | Xerox Corporation | Electrocapillary color display sheet |
| FR2769375B1 (fr) * | 1997-10-08 | 2001-01-19 | Univ Joseph Fourier | Lentille a focale variable |
| JP2000356750A (ja) * | 1999-06-16 | 2000-12-26 | Canon Inc | 表示素子および表示装置 |
| US6449081B1 (en) * | 1999-06-16 | 2002-09-10 | Canon Kabushiki Kaisha | Optical element and optical device having it |
| US6538823B2 (en) * | 2001-06-19 | 2003-03-25 | Lucent Technologies Inc. | Tunable liquid microlens |
| US6665127B2 (en) * | 2002-04-30 | 2003-12-16 | Lucent Technologies Inc. | Method and apparatus for aligning a photo-tunable microlens |
| US6545815B2 (en) * | 2001-09-13 | 2003-04-08 | Lucent Technologies Inc. | Tunable liquid microlens with lubrication assisted electrowetting |
| US6545816B1 (en) * | 2001-10-19 | 2003-04-08 | Lucent Technologies Inc. | Photo-tunable liquid microlens |
| US6674940B2 (en) * | 2001-10-29 | 2004-01-06 | Lucent Technologies Inc. | Microlens |
| JP2003215478A (ja) * | 2002-01-18 | 2003-07-30 | Univ Tokyo | 画像表示装置 |
| US6778328B1 (en) * | 2003-03-28 | 2004-08-17 | Lucent Technologies Inc. | Tunable field of view liquid microlens |
-
2003
- 2003-08-08 US US10/637,837 patent/US6847493B1/en not_active Expired - Lifetime
-
2004
- 2004-08-06 CN CNB2004100563224A patent/CN100363760C/zh not_active Expired - Fee Related
- 2004-08-06 JP JP2004230148A patent/JP4777624B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN100363760C (zh) | 2008-01-23 |
| JP2005062864A (ja) | 2005-03-10 |
| US6847493B1 (en) | 2005-01-25 |
| US20050030637A1 (en) | 2005-02-10 |
| CN1580827A (zh) | 2005-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4777624B2 (ja) | エレクトロウェッティング作動を有する光学ビームスプリッタ | |
| US6778328B1 (en) | Tunable field of view liquid microlens | |
| US20220003842A1 (en) | Lidar Module With Monolithic Array | |
| EP1271218B1 (en) | Tunable liquid microlens | |
| US6965480B2 (en) | Method and apparatus for calibrating a tunable microlens | |
| EP1293807B1 (en) | Tunable liquid microlens with lubrication assisted electrowetting | |
| US6665127B2 (en) | Method and apparatus for aligning a photo-tunable microlens | |
| US6163643A (en) | Micro-mechanical variable optical attenuator | |
| US11340399B2 (en) | In-plane MEMS optical switch | |
| US11307483B2 (en) | MEMS optical switch with dual cantilever couplers | |
| US20120056081A1 (en) | Light-Tracking Optical Device and Application to Light Concentration | |
| US11360270B2 (en) | MEMS optical switch with stop control | |
| KR20230022147A (ko) | 광학 장치 | |
| JP2008512715A (ja) | 反射型エレクトロウェッティングレンズ | |
| US11300852B2 (en) | MEMS optical switch with a cantilever coupler | |
| US20110229132A1 (en) | Wavelength selective switch | |
| CN113885126A (zh) | 用于光耦合的mems开关 | |
| US6470107B2 (en) | Fluidic all-optical switch | |
| US8072688B2 (en) | Method for calibrating a photo-tunable microlens | |
| CN115128794B (zh) | 匀光元件 | |
| CN120315164A (zh) | 光流控透镜 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070522 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070522 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100204 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100210 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20100510 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20100513 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100609 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20100609 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110209 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110509 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110512 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110520 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110608 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110630 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4777624 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140708 Year of fee payment: 3 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |