JP4768468B2 - Elemental analysis method and apparatus, and analytical sample preparation method - Google Patents

Description

  The present invention relates to an elemental analysis method and apparatus for detecting and quantifying elements contained in a sample by irradiating a sample with laser light and measuring fluorescence emitted from plasma generated at that time, and an analytical sample preparation method About.

  In general, techniques for detecting and quantifying various elements contained in a sample are applied in many fields. For example, analyzing and quantifying elements contained in soil and wastewater is important for preventing environmental pollution. In order to prevent this environmental pollution, in addition to the management of harmful heavy metals in the soil, in recent years, the management of livestock manure, compost, etc. and the management of nitrogen, phosphorus, etc. in processing have become important. ing.

In the component analysis of compost, which has become important as a countermeasure against environmental pollution, the total carbon / total nitrogen analyzer is mainly used for the analysis of nitrogen and carbon, and the ICP (Inductively Coupled Plasma) emission analyzer is mainly used for other elements. ing. Here, the total carbon / total nitrogen analyzer separates gas (CO ₂ , NO ₂ ) generated by completely burning a solid or liquid sample and measures its concentration. The ICP emission spectrometer analyzes the sample with an acid, then sprays the aqueous solution into argon (Ar) plasma to make it into plasma, and splits the emission of atoms and ions from the plasma to determine the types of elements contained in the sample. The amount is quantified.

  However, expertise is required to handle the above devices. In addition, pretreatment using harmful chemicals such as nitric acid and perchloric acid is required for the preparation of analysis samples, and furthermore, toxic gas is generated during analysis, and additional equipment such as a draft exhaust system is also required. Become.

Therefore, as a substitute for the elemental analysis technique, laser induced breakdown spectroscopy (LIBS), which is a new technique using laser light, has attracted attention. This method is a technique for measuring the species and amount of an element in a sample by directly irradiating an analysis sample with pulsed laser light to form plasma, and analyzing fluorescence specific to the element emitted from the plasma. This elemental analysis technique eliminates the need for pretreatment of the sample, which is necessary in conventional analysis methods, and enables rapid and simple elemental analysis (see, for example, Patent Document 1 and Patent Document 2).
JP 2000-121558 A JP 2004-205266 A

  In the analysis method based on the laser induced breakdown spectroscopy, as described above, fluorescence emitted from an element is a measurement object. Although this method is simple, the intensity of laser induced breakdown varies greatly depending on the form or (outer shape) of the solid sample. For example, due to differences in physical and chemical characteristics such as sample color, particle size, density or specific heat, the characteristics or intensity of the plasma generated by laser-induced breakdown, especially the plasma temperature and plasma density, vary. . For this reason, the variation of the fluorescence intensity of the plasma produced | generated by this is large, and there existed a problem in measurement accuracy and its reproducibility. And it is difficult to directly measure the analysis target substance in a powder form or a clay form such as soil, using the above analysis method.

Here, the fluorescence generation process in LIBS will be described, and the cause of the variation / variation in the fluorescence intensity will be described more specifically. The fluorescence intensity I _qp when the sample surface evaporates and becomes plasma by irradiation with pulsed laser light and fluorescence is generated from this plasma is described by the following equation when it is assumed that the target system is in a local thermal equilibrium state. The

I _qp = hν _qp A _qp × n _q (1)
n _q = n × Q _q (2)
Q _{q
= (2J q +1) exp (} -E q / kT) / Σ (2J i +1) exp (-E i / kT)
... (3)
(Here, Σ indicates the integration of atoms (or ions) from i = 1 to all states.)
n = N × C (4)
It can be expressed as. In the above equation, I _qp is the emission intensity (J / s) of the state transition from the level q → p, h is the Planck constant (J / s), k is the Boltzmann constant (J / K), and T is the plasma temperature ( K), ν _qp is the frequency (s ⁻¹ ) of the transition from level q to p, and A _qp is the A coefficient (s ⁻¹ ) of the transition from level q to p. N _q is the number of atoms in the level q of the target element in the evaporated sample, n is the total number of atoms of the target element in the evaporated sample, E _q and E _i are the energy of the level q or i ( J), J _q , and J _i are the total angular momentum of the atom at level q or i. N represents the total number of atoms of all elements in the evaporated sample, and C represents the concentration of the target element in the evaporated sample.

  For this reason, in order to quantify the concentration C of the specific element to be contained with high accuracy from the luminescence intensity of samples having different forms or external properties of solid samples, the total number of atoms N and the plasma temperature T are different depending on the samples. It is required that there is no. However, when plasma is generated by irradiating a sample with laser light, the form or external shape of the solid sample, specifically, the color of the sample affects the amount of laser light absorbed, and the particle size, density, specific heat, etc. Affects the total number of atoms N and the plasma temperature T. These are major factors that determine the accuracy in quantifying the element concentration C in the sample by this method. Therefore, how to stabilize the generation of the plasma and reduce the variation in the fluorescence intensity of the plasma regardless of the shape or external shape of the solid sample, and how to correct the variation, the form or the external shape of the solid sample. This is a major issue in eliminating the influence of properties.

  The present invention has been made in response to the above-described problems. In the LIBS method, high-precision elemental analysis with high reproducibility can be performed without being affected by the form or shape of solid analysis target substances. It is an object of the present invention to provide an elemental analysis method and apparatus, and an analytical sample preparation method.

In order to achieve the above object, an elemental analysis method according to the present invention irradiates a target substance to be analyzed with pulsed laser light, and measures the wavelength and intensity of fluorescence emitted from the plasma generated by the irradiation. In the elemental analysis method for determining the element constituting the analysis target substance and the content thereof, a sample in which boron as a plasma stabilizing substance that stabilizes the generation of the plasma is mixed with the analysis target substance to be elementally analyzed. Used, the intensity of the fluorescence emitted from the plasma generated by irradiating the sample with pulsed laser light is measured, and the element constituting the substance to be analyzed and the content thereof are obtained.

The elemental analysis apparatus according to the present invention is a mixture of an analysis target material to be subjected to elemental analysis, a reference material containing a specific element with a known concentration, and boron as a plasma stabilizing material that stabilizes the generation of plasma. An analysis cell that holds a sample, a laser oscillator that generates pulsed laser light, an optical system that focuses and irradiates the pulsed laser light onto the sample, and a plasma that is emitted from plasma generated by receiving the pulsed laser light First fluorescence detection means for detecting the fluorescence, and the intensity of a plurality of different emission lines emitted from the reference material measured by the first fluorescence detection means, or emitted from boron as the plasma stabilizing material. The temperature of the plasma is calculated based on the intensities of a plurality of different light emission lines, and is emitted from the analyte based on the plasma temperature. The fluorescence intensity corrections, has a structure having an arithmetic processing means for obtaining elemental and its contents constituting the analyte.

And the sample preparation method concerning this invention comprises the said sample by irradiating the sample which should be elemental-analyzed with a pulsed laser beam, and measuring the wavelength and intensity | strength of the fluorescence emitted from the plasma which generate | occur | produces by the said irradiation A method for preparing an analysis sample for laser-induced breakdown spectroscopy to determine an element and its content, the analysis target substance for elemental analysis, a reference substance containing a specific element with a known concentration, and plasma stabilization that stabilizes the generation of the plasma Boron as a chemical substance is prepared and compressed and solidified by press working to prepare the sample.

  ADVANTAGE OF THE INVENTION According to this invention, the elemental analysis method and apparatus which can perform a highly accurate elemental analysis with high reproducibility in a LIBS method, and an analytical sample preparation method can be provided.

  Several preferred embodiments of the present invention will be described below with reference to the drawings. Here, the same or similar parts are denoted by common reference numerals.

[First Embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing an example of an elemental analyzer according to the present embodiment. As shown in FIG. 1, the elemental analysis apparatus of this embodiment includes an analysis cell 1, a laser oscillator 2, a spectrometer 3, a fluorescence detector 4, a reference fluorescence detector 5, a timing controller 6 and processing as main components. A control device 7 is provided.

  The analysis cell 1 has a laser beam introduction window 8 and an internal observation window 9, and a vacuum pump 10 and a pressure gauge 11 are connected and placed on the cell moving mechanism 12. A sample stage 13 is provided in the analysis cell 1, and the sample 1a is placed thereon.

  The laser oscillator 2 emits pulsed laser light 15 by the power supplied from the laser power source 14. Here, as the laser oscillator 2, a YAG laser oscillator having a wavelength of 1064 nm is suitable. As the other laser, a carbon dioxide gas laser having a wavelength of 10.6 μm, a semiconductor laser, an excimer laser, or the like can be used. Here, it is preferable that the fundamental wavelength of the laser light is 1 μm or more, which is not less than visible light, considering propagation in the air.

  From the timing controller 6, a laser control signal 6 a that defines the timing for oscillating the pulse laser beam 15 for laser-induced breakdown is output from the laser oscillator 2. In addition, a detection control signal 6b that defines a fluorescence measurement gate is output to the fluorescence detector 4 with a certain delay, and only the fluorescence generated in a predetermined time zone is measured.

  The sample 1 a is placed on the sample stage 13 in the sealable analysis cell 1. The analysis cell 1 is evacuated by a vacuum pump 10. The entire analysis cell 1 is provided on a cell moving mechanism 12. Then, the laser irradiation position on the sample 1a can be moved to a place where the laser irradiation is not always received, and a different position on the sample 1 can be irradiated with the laser to analyze the contained element at that position. As the cell moving mechanism 12, a normal XY stage can be applied. In this case, a plurality of samples can be arranged in parallel and a plurality of samples can be measured simultaneously. Of course, for example, a rotary stage may be applied in addition to the XY stage.

  As an optical system, a vent mirror 16, a scraper mirror 17 with holes, condenser lenses 18a and 18b, a separation mirror 19, a first optical filter 20, and a second optical filter 21 are installed. Here, the first optical filter 20 can be replaced at any time by the filter replacement mechanism 22. The pulsed laser light 15 for laser-induced breakdown is transmitted through the condensing lens 18 a after being passed through the hole of the scraper mirror 17 and irradiated onto the sample 1 a in the analysis cell 1.

  This laser irradiation causes laser induced breakdown. The fluorescence 24 generated from the plasma 23 generated by this breakdown is converted into a parallel beam by the condenser lens 18a, then reflected by the scraper mirror 17 and collected by the condenser lens 18b. Then, the light passes through the separation mirror 19 and the first optical filter 20 and is guided to the spectrometer 3. The fluorescence separated by the spectroscope 3 is further guided to the fluorescence detector 4 and converted into an electric signal. Then, the electric signal is integrated by a boxcar integrator (not shown) for a predetermined number of pulsed laser beams 15 and recorded in the processing control device 7.

  Here, the first optical filter 20 is exchanged as needed by the filter exchange mechanism 22 because the fluorescence wavelength band varies depending on the analysis element. The first optical filter 20 preferably has a function of cutting the reference fluorescence 25 and the pulsed laser light 15.

  The reference fluorescence 25 generated simultaneously from the plasma 23 passes through the condenser lens 18a, the scraper mirror 17, and the condenser lens 18b, the optical path is bent by the separation mirror 19, and passes through the second optical filter 21 to be the reference. Guided to the fluorescence detector 5. The reference fluorescence 25 is converted into an electrical signal here, and the electrical signal is similarly integrated by a boxcar integrator (not shown) and recorded in the processing control device 7. The reference fluorescence 25 from the plasma 23 is generated by a reference material added to the sample 1a as will be described later, and is a fluorescence having a predetermined wavelength emitted from the reference material.

  Here, the second optical filter 21 is an optical filter that transmits only the reference fluorescence 25, and for example, an interference filter is suitable. Further, the surface of the separation mirror 19 is coated with a film having a different refractive index so as to transmit the fluorescence 24 and reflect the reference fluorescence 25. Alternatively, a wavelength splitter that completely reflects the reference fluorescence 25 and separates it from the fluorescence 24 may be provided.

  The spectroscope 3 is preferable for the measurement of the fluorescence 24. However, if it is sufficient to measure only a specific wavelength of fluorescence emitted from a specific element, measurement using a detector provided with an interference filter, such as a photomultiplier tube, is possible. In the case of fluorescence measurement using the spectroscope 3, the influence of the reflected light of the second or higher order due to the grating may not be ignored. Therefore, it is preferable to install a cut filter or interference filter for short wavelength light so that the filter can be switched according to the measurement wavelength of the predetermined element. In addition, when the content of the element in the sample 1a is large, the fluorescence intensity in the fluorescence detector 4 may be too strong. In such a case, the fluorescence introduced into the spectroscope 3 can be adjusted to an appropriate intensity by switching to the neutral density filter.

  The occurrence of laser induced breakdown in the analysis cell 1 is monitored by the internal observation camera 26 through the internal observation window 9.

  Further, as described above, the analysis cell 1 is connected to the vacuum pump 10 and can be evacuated. Further, it can be replaced with a rare gas such as He gas. That is, the pressure of the rare gas is adjusted from the gas cylinder 27 by the pressure adjustment valve 28 and is introduced into the analysis cell 1 through the gas introduction valve 29. The inside of the analysis cell 1 is exhausted by the vacuum pump 10 via the electromagnetic valve 30. Control of the gas pressure in the analysis cell 1 is performed by opening and closing an electromagnetic valve 30 connected to the vacuum pump 10 based on a pressure signal from the pressure gauge 11. For example, He gas replacement is performed a preset number of times, and when a predetermined pressure is reached, He gas introduction or evacuation is stopped, and the gas pressure is automatically adjusted to a constant value. In this way, a gas replacement means for making the inside of the analysis cell 1 an atmosphere of He gas is configured.

  Thus, by evacuating the analysis cell 1 with the vacuum pump 10, the generation of the plasma 23 due to the irradiation of the laser beam 15 can be stabilized. A vacuum level of about 1 Pa that can be evacuated by a rotary pump is sufficient. In addition, by evacuation and replacement with a rare gas, it is possible to measure a sample that requires determination of the nitrogen content, which cannot be measured due to the influence of nitrogen in the air. Furthermore, by reducing the pressure in the analysis cell 1, the temperature of the plasma 23 can be lowered, and the background light intensity is reduced by the plasma 23, so that low background measurement is possible.

  In the elemental analyzer, for example, in the case of YAG laser light having a pulse width of about 10 ns and a pulse width of 5 ns, the output is 2 MW in a pulsed manner. When the sample 1a is focused and irradiated with such pulsed laser light 15, so-called laser-induced breakdown occurs, and the sample 1a in the irradiated region is ionized to generate plasma 23.

  The recombination of the plasma 23 caused by this laser light irradiation begins with the end of the irradiation of the pulse laser light 15, and the constituent elements of the irradiated sample 1a become atoms in an excited state for several μs to several tens of μs. And when this excited state atom transits to the lower level, it emits fluorescence 24 proportional to the number of atoms. Further, when the known element of the reference material added to the sample 1a simultaneously becomes an atom in an excited state and similarly transitions to its lower level, the reference fluorescence 25 proportional to the number of atoms of the specific element in the reference material is emitted. .

  As described above, the electrical signal obtained by photoelectrically converting the fluorescence 24 by the fluorescence detector 4 is calibrated by a predetermined method using the electrical signal obtained by photoelectrically converting the reference fluorescence 25 by the reference fluorescence detector 5. For example, the electrical signal amount of the fluorescence 24 is corrected for normalization by arithmetic processing such as division in the processing control device 7 which is arithmetic processing means based on the electrical signal amount of the reference fluorescence 25. Alternatively, the electric signal of the reference fluorescence 25, which will be described later in the elemental analysis method, is used for comparison and correction with a standard sample containing an element having a known concentration.

  In this way, even if it is a powder-like or clay-like substance to be analyzed such as soil, high analysis accuracy can be obtained by the LIBS method without being affected by the shape. In addition, the reproducibility and stability are very high.

  In the elemental analysis apparatus, when the sample 1a is irradiated with the pulse laser beam 15, the elements present on the surface are instantaneously vaporized and a part thereof is turned into plasma. When this laser-induced breakdown phenomenon continues, the sample surface is slightly removed. As a result, when the surface irregularity changes, the generation state of the generated plasma 23 also changes. Therefore, in order to measure the elements constituting the sample 1a on average using the cell moving mechanism 12 that externally drives the analysis cell 1 that holds the sample 1a, it is necessary to sequentially change the laser light irradiation point.

  When the target element for detection exists in a sample in a non-uniform manner, the sample can be moved and averaged for detection as it is moved continuously as in this embodiment. In addition, although the magnitude | size of the condensing point of a laser beam is several micrometers-several tens of micrometers, the recessed part of an order of 100 micrometers is formed by laser irradiation depending on a sample. Therefore, the moving speed of the sample is 100 μm / pulse or more.

  Next, an embodiment of the elemental analysis method of the present invention will be described with reference to FIGS. FIG. 2 is an enlarged schematic cross-sectional view of the sample 1a in the elemental analysis of the present embodiment, and FIG. 3 shows a sample region irradiated with a laser for showing the elemental analysis method of the present embodiment in comparison with the conventional case. It is sectional drawing. And FIG. 4 is a graph of the elemental analysis result for demonstrating the effect in this embodiment.

  As schematically shown in FIG. 2, the (analysis) sample 1a is prepared by adding the reference substance 32 uniformly at a predetermined ratio to the analysis target substance 31 as will be described in detail later. . In FIG. 2, the substances to be analyzed 31 pulverized to a substantially constant particle size are firmly fixed to each other by a binder 33 as a solidification aid. In the elemental analysis method of the present embodiment, a reference material 32 that serves as an evaluation criterion for the amount of plasma emission is added in advance to the sample 1a, and the reference material 32 in the reference material 32 is compared with the fluorescence intensity of the element of the analysis target material. The main feature is that correction is made with the fluorescence intensity from a specific element.

  The fluorescence intensity of each element generated when the pulse laser beam 15 is irradiated to a sample having a different external property is affected by the intensity of the generated plasma light even if the element content in the sample 1a is the same. . This fluctuation of the plasma light intensity is related to the fluctuation of the laser-induced breakdown described above. The breakdown amount varies greatly depending on the form or outer shape of the sample 1a, for example, the roughness of the surface and the color thereof. This is because the amount of laser energy absorbed varies depending on the surface state of the substance.

  Therefore, in the elemental analysis method according to the present embodiment, as shown in FIG. 2, the reference substance 32 is quantitatively added to the analysis target substance 31 in order to correct the influence due to the fluctuation of the laser-induced breakdown amount. The prepared sample 1a is used. Then, the sample 1 a is subjected to laser-induced breakdown, and the analysis target substance 31 and the reference substance 32 are converted into plasma to generate plasma 23. Then, the fluorescence from the element contained in the analysis target substance 31 is measured, and at the same time, the fluorescence having the wavelength specific to the element of the reference substance 32 is monitored.

  For example, as shown in FIG. 3A, when the sample 1 a is irradiated with the pulsed laser light 15, laser-induced breakdown occurs in the breakdown region 34 and plasma 23 is generated. Here, when the quantitative reference substance 32 shown in FIG. 2 is uniformly added to the sample 1a, the ratio of the laser-induced breakdown between the analysis target substance 31 and the reference substance 32 becomes constant at a predetermined value. In the plasma 23 generated by the breakdown and the laser light energy, the element of the analysis target substance 31 and the element of the reference substance 32 are included at a certain ratio. This ratio does not depend on the amount of laser-induced breakdown described above.

  Therefore, as described above, the reference fluorescence 25 having a wavelength unique to the element of the reference substance 32 is monitored, and the intensity of the fluorescence 24 from the analysis target substance 31 is normalized and corrected based on the intensity of the reference fluorescence 25.

  By performing the above correction, high reproducibility and high stability can be obtained in the elemental analysis of the analysis target substance 31 in the LIBS technique. In addition, highly accurate elemental analysis is possible. Since the above-mentioned standardization correction method using the reference substance 32 and the reference fluorescence 25 does not depend on the amount of laser-induced breakdown, it is not affected by the form or the external shape of the sample 1a. And it becomes very effective in the elemental analysis of the powdery sample like soil.

  On the other hand, in the conventional LIBS method, as shown in FIG. 3B, when the sample 111a is irradiated with the pulse laser beam 115, only the fluorescence 124 specific to the element contained in the analysis target substance is emitted from the generated plasma 123. Here, the sample 111a is composed only of the substance to be analyzed, and its external shape varies depending on the sampling of the sample. Further, the range of the breakdown region 134 also varies depending on each pulse in the pulse laser beam irradiation. For this reason, the plasma intensity in the generated plasma 123 varies greatly, and the variation in the intensity of the fluorescence 124 increases. And the measurement accuracy of elemental analysis and its reproducibility become very bad. As described above, when the substance to be analyzed is in the form of powder such as soil or clay, direct measurement by the LIBS technique is difficult.

  Next, the elemental analysis method in the above embodiment will be described more specifically.

(Reference material)
The reference material is preferably a material containing lithium (Li) or sodium (Na) as a specific element. Such a substance may be a simple substance of Li or Na or a compound thereof. Here, as the Li compound, for example, lithium carbonate (LiCO ₃ ) is preferable in terms of safety and price, and as the Na compound, for example, sodium chloride (NaCl) is preferable. Such Li or Na has a simple fluorescence spectrum structure by LIBS and a small number of fluorescence spectrum lines. In addition, since the emission intensity at a specific wavelength is strong, the detection sensitivity by the LIBS method is extremely high in all elements compared to other elements. For this reason, the addition amount may be a very small amount with respect to the substance to be analyzed, for example, about 0.1% by mass is sufficient.

  If the amount can be reduced in this way, the influence of the addition of the reference substance can be ignored in the LIBS method. The amount of laser-induced breakdown of the sample that has been converted to plasma by pulse laser irradiation can be evaluated by monitoring the fluorescence having a wavelength specific to the Li or Na element. Further, if the plasma intensity is measured for each sample, it is possible to correct the variation in the breakdown amount of the plasmaized sample due to the difference in the properties of each sample.

(About standard fluorescence)
In the plasma generated by laser induced breakdown by adding the above-mentioned reference material to the analysis target material, the fluorescence generated by the reference material has a fluorescence spectrum specific to the element of the reference material. In the elemental analysis method according to the present embodiment, it is preferable to use fluorescence having a predetermined wavelength (specific emission line) as the reference fluorescence in the fluorescence spectrum. Here, a fluorescence wavelength whose absorption is small in propagation in the air is suitable.

  When the reference substance is a simple substance or compound of Li, the fluorescence wavelength used for the correction is preferably 670.777 nm or 670.791 nm. The wavelength in the emission spectrum from the Li atom and having the highest fluorescence intensity when the LIBS method is used is 670.776 nm or 670.791 nm. And when using the said wavelength, as the 2nd optical filter 21 installed in the front surface of the reference | standard fluorescence detector 5 of the elemental analyzer demonstrated in FIG. 1, for example, a center transmission wavelength of about 671 nm and 2-10 nm are used. It is preferable to use an interference filter having a certain transmission width.

  When the reference substance is a simple substance or compound of Na, the wavelength of fluorescence used for the correction is preferably 588.995 nm or 589.592 nm. These fluorescence wavelengths are wavelengths in the emission spectrum from Li atoms, and are the wavelengths with the highest fluorescence intensity when the LIBS method is used. As the second optical filter 21, an interference filter having a central transmission wavelength of about 589 nm and a transmission width of about 2 to 10 nm may be used.

(About nitrogen analysis)
Next, a method for analyzing nitrogen in the sample 1a will be described. When elemental analysis is performed on the sample 1a by the LIBS method in an air atmosphere, it is difficult to determine the nitrogen content in the sample. Therefore, in this elemental analysis of nitrogen, the atmosphere of the sample 1a is replaced with helium (He) gas in order to avoid the influence of nitrogen in the air.

Normally, plasma characteristics such as plasma density, plasma temperature, and plasma attenuation of the plasma generated by irradiation with pulsed laser light greatly vary depending on atmospheric conditions (gas type and pressure). Therefore, as a replacement gas with a small change, a gas such as Ar gas or carbon dioxide gas (CO ₂ ) can be considered. However, with such a gas, the light emission from these gas components interferes with the fluorescence from the nitrogen of the substance to be analyzed, making it difficult to measure nitrogen. On the other hand, the He gas has a small change in the plasma characteristics, and light emission from He does not interfere with the nitrogen emission line. For this reason, in nitrogen analysis by the LIBS technique, He gas is particularly suitable as the atmospheric gas.

  In the replacement of the He gas, the He gas pressure in the atmosphere of the sample 1a is set to 1 Torr to atmospheric pressure. As described above, the plasma characteristics of the plasma generated by the irradiation with the pulsed laser light change depending on the gas pressure. When the atmosphere is He gas, the nitrogen component in the sample 1a can be detected by setting the pressure to 1 Torr (about 133 Pa) to atmospheric pressure. When the amount of He gas in the atmosphere decreases and the He gas pressure becomes less than 1 Torr, the plasma characteristics become unstable. On the other hand, if the He gas pressure exceeds the atmospheric pressure, the container for placing the sample 1a, such as the analysis cell 1, has poor resistance to pressure reduction and pressurization and is not practical.

  In the nitrogen analysis in the sample 1a by the LIBS method of the above embodiment, it is preferable to use a light emission line with a wavelength of 746.86 nm from the plasma. Detection of the nitrogen component in the sample 1a is performed by the conventional technique. (1) The emission of nitrogen in the visible region wavelength is weak. (2) It is necessary to avoid the influence of nitrogen in the air. (3) Sample 1a It was difficult due to conditions such as the fact that the emission wavelength of the element inside was not in the vicinity. In the nitrogen analysis method of the present embodiment, the above conditions can be satisfied, and the analysis of nitrogen in the sample 1a becomes extremely easy.

(About analysis results)
Next, an example of soil analysis results using the elemental analysis method in the above embodiment will be described with reference to FIG. Here, the element analysis apparatus having the configuration shown in FIG. 1 was used, and the element analysis method was performed as described above. In this elemental analysis, a standard sample with a known element content was prepared and used for quantifying the elements in the analytical sample. The reference material (lithium carbonate) was also quantified and added to this standard sample, and the fluorescence spectrum intensity from the element contained in the standard sample was used as a reference for quantification by the LIBS technique.

  And similarly, the fluorescence spectrum intensity | strength from the content element of the analytical sample which added the reference material (lithium carbonate) to soil was measured. The content of the element contained in the analysis sample was calculated and quantified based on the fluorescence spectrum intensity from the element contained in the standard sample. Here, since the surface conditions of the standard sample and the analysis sample are different, even if the ratio of the reference material added is the same in the standard sample and the analysis sample, the intensity of the reference fireflies emitted from them is different. . Therefore, the reference fluorescence intensity from the analysis sample was normalized based on the reference firefly intensity from the reference material of the standard sample, and the content of elements contained in the analysis sample was compared and corrected.

  FIG. 4 shows the elemental concentrations of carbon (C), nitrogen (N), phosphorus (P), potassium (K), magnesium (Mg), calcium (Ca), and sodium (Na) in the analysis sample. Here, the shaded bar graph is the result of normalization correction by the reference material described in the above embodiment. The white bar graph is the result of not performing the above correction.

  As is apparent from FIG. 4, the element concentration in the soil is increased by 20% to 30% by the correction, and the analysis accuracy is improved as compared with the case without correction. Here, the addition amount of the reference substance is 0.1% by mass, and errors in measurement of each element can be ignored. It was also confirmed that the reproducibility of the analysis results was extremely high.

  Next, the analytical sample preparation method of this embodiment will be described with reference to FIGS. FIG. 5 is a flowchart showing a procedure for preparing an analysis sample according to the present embodiment, and FIG. 6 is a process flowchart showing a specific example of the procedure for preparing a sample.

  In this analytical sample preparation method, for example, when the substance to be analyzed is in the form of powder, this is used as a solidified analytical sample. As a solidification technique, a solidification aid (binder) that assists in solidification of the sample is mixed. Here, the outer shape of the solidified analysis sample is preferably a rectangular parallelepiped with a smooth surface. This preparation method is particularly effective when the substance to be analyzed is a powder having a non-constant particle size such as soil.

  As shown in FIG. 5, in the analysis sample preparation procedure, first, an analysis target substance, a reference substance, and a binder are prepared. In step S1, the substance to be analyzed is sieved to select a powder having a particle size equal to or smaller than a predetermined size. In step S2, the reference substance is weighed, and in step S3, the binder is weighed. In step S4, these predetermined amounts are mixed and mixed.

  Next, in step S5, the blended material is pulverized by, for example, a pulverizing mill and mixed uniformly. In this way, a substantially uniform powder is produced. In step S6, the homogenized powder is pressed to produce an analysis sample having a smooth surface, for example, a rectangular parallelepiped.

  A specific description will be given with reference to a process diagram showing an example of a procedure for preparing an analysis sample in FIG. For example, the soil subjected to analysis is sampled (step (1)). Then, in order to separate gravel or plant roots mixed in the soil, the sampled soil is sieved using a sieve having a predetermined mesh (step (2)). Here, the soil is sorted into powder having a certain particle size or less.

  Next, a binder, a reference substance, and a sample of the sieved soil are prepared (step (3)). The material of this binder includes (1) an element contained in the analysis target substance or an element that does not significantly affect the analysis even if it is contained, and (2) the emission line from the binder element A material that satisfies the condition of no or low interference is preferable. For example, the binder is selected from materials such as methyl cellulose, polyvinyl butyral, and polyvinyl alcohol. In addition, even when the element of the analysis target substance is contained in the binder, it can be applied by correcting the analysis result.

  Depending on the substance to be analyzed, natural materials such as dextrin, starch, gum arabic, casein alginate, polyacrylate, carboxylate, synthetic resin phenol resin, epoxy resin, furan resin, urethane resin, polypropylene, etc. Can be used as a binder.

  Next, the blended mixture is made into a uniform powder with a particle size of 10 μm to 100 μm or less by a pulverizing mill (step (4)). As for the clay-like substance, there is no problem as long as the particle size is in the above range. However, when particles having a particle size of 100 μm or more are present, it is necessary to pulverize them with a mill or the like.

  Then, the mixed sample of the homogenized powder is weighed (step (5)), a press frame in which a spacer bottom plate is inserted in advance at the bottom is prepared (step (6)), and a certain amount of mixing is performed in the press frame. A sample is loaded (step (7)). Further, a spacer upper plate is placed on the loaded mixed sample, and a press piece is placed thereon (step (8)). And it presses with the pressure of 10 Mpa-100 Mpa from the press piece (process (9)). After this, the analysis sample with the spacer plate attached to the bottom and top surfaces is removed from the press frame (step (10)), the spacer plate is removed (step (11)), and the analysis sample is completed (step). (12)).

  The spacer bottom plate and spacer top plate are preferably thin copper plates. And the thickness of a copper plate has the very suitable range of 0.1 mm-0.2 mm. By covering the surface with such a spacer plate, the finished analysis sample has a desirable external shape in irradiation with pulsed laser light in the LIBS technique. That is, the surface of the analysis sample is flattened and further smoothed.

  Further, by using the spacer plate in press molding, it is possible to prevent the sample from being chipped when the analysis sample is removed from the press frame after pressing. And after press, cleaning of a press frame becomes very simple. Here, when the thickness of the copper plate becomes less than 0.1 mm, the press plate is damaged by the mixed sample loaded in the press molding, or the flatness of the finished analysis sample is not possible because the mixed sample cannot be uniformly loaded. It becomes insufficient. When the thickness of the copper plate exceeds 0.2 mm, the analysis sample is chipped when the completed analysis sample is removed from the press frame.

  As described above, an analysis sample in which the analysis target substance and the reference substance are integrated together and solidified is created. And since the surface of the analysis sample becomes flat / smooth, the reproducibility of the plasma intensity generated by the irradiation of the pulse laser beam is improved and becomes stable. In addition, the plasma intensity by the LIBS technique at each pulse and every place on the surface of the analysis sample is stabilized.

  In the first embodiment, as described above, in the laser-induced breakdown spectroscopy analysis of an analysis sample, the analysis accuracy of the element, the reproducibility and stability of the element analysis, regardless of the solid form or external shape of the sample Is greatly improved.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described with reference to the drawings. The feature of this embodiment is to improve the analysis accuracy by stably generating fluorescence emitted from the analysis sample when the target element is quantified from the analysis sample. That is, in the present embodiment, a solid amount of the substance to be analyzed is different in form or property by mixing a predetermined amount of the plasma stabilizing substance in advance into the analysis sample to be evaporated / plasmaized by irradiating the laser beam and press solidifying it. A plasma having similar properties can be generated even in the sample.

  The sample used in this embodiment is finally pressed and solidified into a plate shape, but in addition to the sample to be analyzed, a plasma stabilizing substance is added to make the generated plasma for each sample the same, and these are pressed. Add a binder to solidify. These mixing ratios depend on the difference in properties of the sample to be analyzed, but stable plasma can be generated by mixing the sample, plasma stabilizing substance, and binder at an appropriate ratio. A sample can be formed. In particular, the mixing ratio of the sample and the plasma stabilizing substance can be increased or decreased according to the magnitude of the difference in properties, thereby reducing the difference in plasma characteristics due to the difference in properties.

  The application conditions of this plasma stabilizing substance are: (1) it is composed of elements not contained in the sample to be analyzed, and (2) interference with the measurement of elements not contained in the sample to be analyzed. It consists of an element that does not emit a wavelength. In addition, here, since the analysis object is pulverized and press-solidified for measurement, it is also necessary that fine pulverization that is advantageous in press-solidification is possible. By using a sample solidified by adding this plasma stabilizing substance, quantitative analysis of contained elements can be performed with high accuracy by the elemental analyzer as shown in FIG. 1 described in the first embodiment. .

  Since the elemental analysis apparatus and its operation in the second embodiment are basically the same as those shown in FIG. 1 in the first embodiment, detailed description thereof is omitted. However, as described in the elemental analysis method described later, the configuration of the elemental analysis apparatus that does not include the reference fluorescence detector 5 and the second optical filter 21 in FIG. 1 described in the first embodiment may be used.

  Next, the elemental analysis method in the present embodiment will be described with reference to FIG. Here, FIG. 7 and FIG. 8 are diagrams showing the sample 1a in the present embodiment.

  It is preferable to use boron (B) powder as a plasma stabilizing substance for the sample 1a to be measured. The physical and chemical characteristics of boron are black, chemically stable, and can be finely powdered. In particular, mixing with samples of different colors makes the sample black and reduces the difference in the amount of absorption of laser light. Further, it has a very high melting point of 2100 ° C. and a boiling point of 2600 ° C., and even when irradiated with laser, the amount of evaporation of boron itself is small. Furthermore, because the Mohs hardness is very high at 9.3, especially when the object of analysis is in the form of powder, it is finely pulverized and mixed with the sample in advance when it is pressed and solidified, thereby assisting fine grinding. It also becomes a material. The most important feature is that the atomic structure of the boron atom is simple, so that there are very few emission spectral lines. For this reason, boron is extremely suitable as a mixed material for a sample not to be analyzed.

  As shown in FIG. 7B, the blending ratio of the plasma stabilizing substance depends on the difference in the properties of the sample to be analyzed. In any case, as shown in FIG. 7A, it is preferable to mix the analysis target substance in the range of 5 to 95%, the plasma stabilizing substance in the range of 0 to 75%, and the binder in the range of 10 to 30%. By mixing the plasma stabilizing substance in this way, a sample capable of generating stable plasma can be formed. In particular, with respect to the mixing ratio of the plasma stabilizing substance, the difference in plasma characteristics due to the difference in properties can be reduced by increasing or decreasing the proportion in accordance with the size of the difference in properties.

  The more the proportion of the plasma stabilizing substance mixed in the sample, the more the characteristics of the laser-produced plasma will be governed by the mixed substance, so the influence of the properties of the analyte will be less, and the evaporation / plasmaization amount and plasma temperature will be constant. , Analysis accuracy is improved. On the other hand, as the mixing ratio of the plasma stabilizing substance to the sample 1a increases, the amount of the analysis target substance contained in the press-solidified sample 1a decreases, so that the analysis target substance that receives the laser beam irradiation decreases, and the sample 1a The influence of the uneven distribution of the substance to be analyzed increases. In addition, the detection sensitivity decreases due to a substantial decrease in concentration. For this reason, although it is necessary to optimize the said mixing ratio according to the characteristic of the sample made into an analysis object, the effect is acquired by optimizing in the range of the said ratio.

  Using the sample 1a in which the substance to be analyzed, the plasma stabilizing substance, and the binder are mixed, the laser induced breakdown is performed in the same manner as described in the first embodiment. And the intensity | strength of the fluorescence from the element of a to-be-analyzed substance is measured by the spectrometer 3 and the fluorescence detector 4 of FIG. Further, the element of the analysis target substance is quantified by comparing with the fluorescence intensity from the standard sample. Here, it is preferable to mix a plasma stabilizing substance in the standard sample.

  Further, the amount of the plasma stabilizing substance mixed is about the same as that of the substance to be analyzed while the amount of the reference substance added in the first embodiment is about 0.1% by mass, for example. For this reason, if the plasma temperature during laser irradiation is constant, the fluorescence intensity from the plasma stabilizing substance is proportional to the evaporation amount of the sample 1a. For this reason, even if the evaporation / plasmaization amount varies from sample to sample due to a large difference in physical properties of the sample 1a, the same standard as in the first embodiment is used. It can be used as a substance to monitor and correct the standard wavelength fluorescence specific to the plasma stabilizing substance. In this case, the intensity of fluorescence from, for example, boron, which is a specific element of the plasma stabilizing substance, is measured by the spectroscope 3 and the fluorescence detector 4 and is used as reference fluorescence. The same effect as shown in FIG. 4 can be obtained. In this case, the specific wavelength from the plasma stabilizing substance may be measured through the reference fluorescence detector 5.

  Here, as the specific wavelength for correcting the emission intensity when boron is used as the plasma stabilizing substance, the emission intensity of 206.6 nm, 209.0 nm or 249.7 nm, which is far ultraviolet light, is used. The wavelength in the emission spectrum from the boron atom and the strongest fluorescence intensity when using the LIBS technique is 206.6 nm, 209.0 nm or 249.7 nm. When applying this wavelength, for example, the second optical filter 21 installed on the front surface of the reference fluorescence detector 5 has a center transmission wavelength as the specific wavelength and a transmission width of about 2 to 10 nm. Use.

  Thus, by mixing the plasma stabilizing substance with the substance to be analyzed, the variation in the fluorescence intensity of the generated plasma is reduced, and the measurement accuracy and its reproducibility are greatly improved. Furthermore, by using the above-mentioned plasma stabilizing substance as a reference substance, and using it for correcting the standardization of fluorescence from the analyte, as described in the first embodiment, the quantification of elemental analysis in the analyte is further enhanced. It becomes accuracy.

  Furthermore, in this embodiment, the fluorescence intensity due to a plurality of state transitions from the plasma stabilizing substance is measured, the plasma temperature is derived from the intensity ratio, and this is used to correct the fluorescence intensity. In this method, first, the plasma temperature is calculated using the fluorescence relative intensity method. Here, the relative intensity method is a method for obtaining a plasma temperature using a ratio of a plurality of fluorescence intensities having different wavelengths, and the plasma temperature T can be calculated by the following equation.

T =
(E _m −E _k ) / k {ln (A _ml g _m v _m / A _kj g _k v _k ) + ln (I _k / I _m )}
... (5)
Here, E _m and E _k are the excitation energy levels at the time of transition, I _m is the intensity of the fluorescence spectrum of the frequency ν _m emitted with the transition from the energy level m to the level i, and I _k. Is the intensity of the fluorescence spectrum of the frequency ν _k emitted with the transition from the energy level k to the level j, A _ml is the A coefficient of the transition from the level m → i, and A _kj is the level k → The A coefficient of transition to j, g _m and g _k are the g coefficients of the energy levels m and k. All parameters except for the fluorescence intensities I _k and I _m are known in terms of physical quantities unique to the atoms, and the generated plasma temperature T for each sample 1a is evaluated by measuring the fluorescence intensity ratio I _k / I _m Can do.

The correction coefficient Ri with respect to the temperature T ^* obtained by averaging the temperatures _Ti for each analytical sample (i) evaluated in this way is expressed by the equation (6), where E is the energy level of the fluorescence transition source. Is done. Then, the measured fluorescence intensity I _i is corrected to I ^* by the equation (7).

Ri = exp (−E / kT ^* ) / exp (−E / kT _i ) (6)
I ^* = I _i × Ri (7)
Specifically, when boron is used as the plasma stabilizing substance, emission wavelengths of 209.0 nm and 249.7 nm, which are emission lines from atoms, can be used as the two fluorescence wavelengths.

  Further, in the present embodiment, a small amount of the reference material described in the first embodiment is added, and a plurality of fluorescences from the reference material are used for the evaluation of the plasma temperature T in the same manner as described above. Also good. The amount of addition is increased or decreased according to the emission intensity of the plasma stabilizing substance. However, in the case of an alkali metal such as Li or Na having a high emission intensity, the addition of about 0.1% by mass results in sufficient fluorescence. Can emit light. The method for evaluating the plasma temperature and the method for correcting the fluorescence intensity of each element are exactly the same as when a plasma stabilizing substance is mixed for the purpose of keeping the plasma temperature constant.

  In this case, the mixing ratio of the analysis target substance, the plasma stabilizing substance, the reference substance, and the binder depends on the difference in the properties of the sample to be analyzed as shown in FIG. In any case, mixing is performed so that the analysis target substance is 5 to 95% by mass, the plasma stabilizing substance is 0 to 75% by mass, the reference substance is ~ 0.1% by mass, and the binder is 10 to 30% by mass. It is preferable to do.

  In the case of the reference material, for example, Li is used as a material having a low transition level energy and a high sensitivity to the influence of the plasma temperature, and emission intensity of 610.4 nm and 670.8 nm are used as wavelengths for evaluating the plasma temperature. Is used. Here, the method for evaluating the plasma temperature and the method for correcting the fluorescence intensity of each element are exactly the same as in the case of mixing boron, for example, to keep the plasma temperature constant.

  Next, the analytical sample preparation method in this embodiment is demonstrated. The sample 1a in the second embodiment is basically prepared according to the processing steps of the analytical sample preparation method described with reference to FIG. Here, in step S4 shown in FIG. 5, the plasma stabilizing substance and the binder are prepared as shown in FIG. 7A together with the analysis target substance that is the sampled soil. Here, as shown in FIG. 7B, for example, the blending ratio is determined depending on the difference in properties of the sampled sample (soil) to be analyzed.

  Alternatively, in step S4 shown in FIG. 5, a plasma stabilizing substance, a reference substance, and a binder are prepared together with the analysis target substance, which is sampled soil, as shown in FIG. Here, as shown in FIG. 8B, for example, the blending ratio is determined depending on the difference in properties of the sampled sample (soil) to be analyzed.

  In the analytical sample preparation method of the present embodiment, when the sample 1a is press-solidified, it is preferable that the particle diameter of the plasma stabilizing substance is 100 μm or less. In the elemental analyzer, the beam diameter when the laser beam is focused on the sample is several hundreds of μm (typically 300 μm). Here, when the beam diameter is increased, the area of the sample that is irradiated with the laser light is increased, so that the influence of uneven distribution of elements in the sample can be reduced. On the other hand, it is necessary to increase the intensity of the laser beam for plasmification, and the sample surface once irradiated with the laser can be recessed, so that when it is re-irradiated, the laser beam absorption varies. And the stability of plasmatization falls. Therefore, it is necessary to increase the surface area of the sample so that the laser irradiation regions do not overlap.

  For this reason, it is necessary to reduce the influence of uneven distribution on the sample in the laser irradiation area as much as possible for the sample to be measured, and it is desirable to make the particle size as fine as possible in the pulverization process at the time of sample preparation. About the influence of the particle size of such a sample, it becomes almost negligible when the particle size becomes 100 μm or less.

  The second embodiment stabilizes the generation of plasma by mixing a predetermined amount of a plasma stabilizing substance in advance into an analysis sample that is irradiated with laser light to evaporate / plasmaize and press solidify it. And the plasma of the same property can be produced also in the sample from which the form or property of solid analysis object substance differs. Further, by correcting the fluorescence intensity from the plasma through the correction of the plasma temperature or the normalization of the amount of plasma, the quantitative accuracy of the analytical element is improved. In this way, in the laser-induced breakdown spectroscopy analysis of an analysis sample, the analysis accuracy of the element, the reproducibility and stability of the element analysis are greatly improved regardless of the solid form or external shape of the sample.

[Third Embodiment]
Hereinafter, a third embodiment of the present invention will be described with reference to the drawings. The feature of this embodiment is that the standard sample described in part of the first embodiment and the second embodiment is effectively used. The elemental analysis apparatus in this case is the same as that in the above-described embodiment described with reference to FIG.

  In the elemental analysis method according to the present embodiment, as shown in FIG. 9, at least two kinds of standard samples quantified for the purpose of quantification in a sample are prepared, and this and an analysis target sample (unknown sample) with an unknown concentration are prepared. Are measured simultaneously and the fluorescence intensity of the specific element from the plurality of standard samples and the unknown sample is compared, whereby the concentration of the unknown element in the sample is quantified. Here, it is assumed that the fluorescence intensity at each element peak wavelength (vertical axis in FIG. 9) and the sample concentration (horizontal axis in FIG. 9) have a linear relationship, and this straight line passes through the origin (proportional relationship). I don't assume that.

  As described in the first embodiment, a normal XY stage can be applied to the cell moving mechanism 12 of the elemental analyzer. Therefore, a plurality of samples are arranged in parallel on the sample fixing plate 35 placed on the sample stage 13 that moves in the XY directions by the cell moving mechanism 12 as shown in FIG. Then, along the direction of the arrow in the figure, for example, a plurality of samples of sample 1, sample 2, and sample 3 are simultaneously measured.

  Here, sample 2 is an unknown sample, and sample 1 and sample 3 are standard samples. The known concentration of the element to be analyzed contained in sample 1 is C1, and the known concentration of the element to be analyzed contained in sample 3 is C3, where C1 ≠ C3. In the measurement by the elemental analyzer, the fluorescence intensity of the specific wavelength from the element by the laser light irradiation of the sample 1 is P1, and the fluorescence intensity of the specific wavelength from the element by the laser light irradiation of the sample 3 is P3. Also, let P2 be the fluorescence intensity of a specific wavelength from the above-mentioned element due to laser light irradiation of sample 2, which is an unknown sample. If it does in this way, unknown concentration Cx of the above-mentioned element contained in sample 2 will be obtained by a formula (8). FIG. 9 shows the relationship between the fluorescence intensity and the element concentration.

Cx = {(C3-C1) / (P3-P1)} * (P2-P1) + C1 (8)
Sample 1 and sample 3, which are the standard samples, and sample 2, which is an analysis target sample having an unknown concentration, contain the reference material or plasma stabilizing material described in the first embodiment or the second embodiment. In this case, the same effect as described in the above embodiment is produced, which is extremely suitable. As described above, highly accurate quantification of the analytical element in the unknown sample is facilitated.

  As described above, in the description of FIG. 9 and Expression (8), data of two standard samples are used on the assumption that the fluorescence intensity at each element peak wavelength and the sample concentration are in a linear relationship. If it is further assumed that this straight line passes through the origin (proportional relationship), this straight line can be determined only from the data of one standard sample, and the concentration of the unknown sample can be obtained.

  It is also possible to increase the reliability by increasing the number of standard samples and performing statistical processing.

  Next, another modification will be described. As described above, in order to quantify an element at an unknown concentration in a sample to be analyzed, a calibration curve showing the correlation between the fluorescence intensity and the element concentration is generally created from the fluorescence intensity from the standard sample, and this is then The element concentration in the sample is quantified from the fluorescence intensity from the sample to be analyzed. However, when the material of the sample to be analyzed is unknown or different from the material of the standard sample, the amount of evaporation of the sample and the plasma temperature due to laser light irradiation may differ greatly. In some cases, even if various fluorescent intensity corrections as described in the first embodiment or the second embodiment are performed, the error is large.

  In such a case, as shown in FIG. 11, a sample prepared by adding a fixed amount (concentration ε) of an element for quantification to the unknown sample is prepared separately from the unknown sample. And the unknown element concentration in a sample is quantified by comparing the fluorescence intensity of the specific element from each sample. By this method, the concentration of a specific element in an unknown sample can be accurately quantified even for a sample whose material is unknown or even when the material is different from that of a standard sample. However, in this case, it is assumed that the fluorescence intensity at each element peak wavelength (vertical axis in FIG. 11) and the sample concentration (horizontal axis in FIG. 11) are in a proportional relationship.

  Here, sample 1 is an unknown sample, and sample 2 is a sample obtained by adding a certain amount (concentration ε) of an element to be analyzed to sample 1. Then, in the measurement by the element analyzer, the fluorescence intensity of the specific wavelength from the element by the laser light irradiation of the sample 2 is P2. Also, let P1 be the fluorescence intensity of a specific wavelength from the above-described element by laser light irradiation of sample 1, which is an analysis target sample of unknown concentration.

  When the unknown concentration Cx of the element contained in the sample 1 is assumed, the element concentration of the sample 2 to be analyzed is Cx + ε. If it does in this way, unknown concentration Cx of the above-mentioned element contained in sample 1 will be obtained by a formula (9). FIG. 11 shows the relationship between the fluorescence intensity and the element concentration.

Cx = ε × P1 / (P2−P1) (9)
Sample 1 and sample 2 contain the reference material or plasma stabilizing material described in the first embodiment or the second embodiment. In this case, the same effect as described in the above embodiment is produced, which is extremely suitable.

  In the above modification, one kind of sample is prepared by adding a certain amount (concentration ε) of an element for quantification to an unknown sample. Also in this case, it is possible to increase the number of samples by changing the addition amount of the element, and to improve the reliability by performing statistical processing.

  In the third embodiment, as described above, in the laser-induced breakdown spectroscopic analysis of an analysis sample, the analysis element can be quantified with extremely high accuracy regardless of the solid form or external shape of the sample. .

  The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention. For example, in the configuration diagram of the elemental analyzer according to the first embodiment, the first fluorescence detection unit may have the function of the second fluorescence detection unit without disposing the separation mirror 19. In this case, the spectroscope 3 splits a specific light emission line of the reference fluorescence, and the split light emission line is photoelectrically converted by the fluorescence detector 4 to become an electric signal amount of the reference fluorescence.

  Moreover, in 2nd Embodiment, you may have a structure where the area | region used as the optical path of the fluorescence 24 and the reference | standard fluorescence 25 can be pressure-reduced. Alternatively, the optical path may be structured to be transmitted by an optical fiber. With such a structure, the absorption of fluorescence becomes small during propagation in the air, and the fluorescence in the short wavelength band can be easily used in the spectroscopic analysis by the LIBS technique.

  The analysis target substance is not limited to soil, and any form of solid substance can be used.

The block diagram which shows an example of the elemental analyzer of embodiment of this invention. Sectional drawing of the analysis sample for showing the elemental analysis method of the 1st Embodiment of this invention. Sectional drawing of the sample area | region irradiated with the laser which shows the elemental analysis method of the 1st Embodiment of this invention. The graph of the elemental analysis result for demonstrating the effect in the 1st Embodiment of this invention. The flowchart which shows the procedure of the sample preparation in the 1st Embodiment of this invention. FIG. 5 is a process chart showing an example of a sample preparation procedure in the first embodiment of the present invention. It is explanatory drawing of the sample used for the elemental analysis method of the 2nd Embodiment of this invention, Comprising: (a) is a perspective view of a preparation substance, (b) is a table | surface which shows those preparation ratios. It is explanatory drawing of another sample used for the elemental analysis method of the 2nd Embodiment of this invention, Comprising: (a) is a perspective view of a preparation substance, (b) is a table | surface which shows those preparation ratios. The graph of the relationship between the fluorescence intensity and element concentration for showing the elemental analysis method of the 3rd Embodiment of this invention. The top view which shows the some sample arrange | positioned in parallel in the simultaneous measurement of a some sample. The graph of the relationship between the fluorescence intensity and element concentration for showing the elemental analysis method of the modification of the 3rd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Analysis cell, 1a ... (analysis) sample, 2 ... Laser oscillator, 3 ... Spectroscope, 4 ... Fluorescence detector, 5 ... Reference | standard fluorescence detector, 6 ... Timing controller, 6a ... Laser control signal, 6b ... Detection control Signals: 7 ... Processing control device, 8 ... Laser light introduction window, 9 ... Internal observation window, 10 ... Vacuum pump, 11 ... Pressure gauge, 12 ... Cell moving mechanism, 13 ... Sample stage, 14 ... Laser power supply, 15 ... Pulse laser beam, 16 ... bent mirror, 17 ... scraper mirror, 18a, 18b ... condensing lens, 19 ... separation mirror, 20 ... first optical filter, 21 ... second optical filter, 22 ... filter exchange mechanism, 23 ... Plasma, 24 ... Fluorescence, 25 ... Reference fluorescence, 26 ... Internal observation camera, 27 ... Gas cylinder, 28 ... Pressure adjustment valve, 29 ... Gas introduction valve, 30 ... Solenoid valve, 31 ... Analyte, 32 ... Base Material, 33 ... binder, 34 ... breakdown region, 35 ... sample fixing dish

Claims (14)

By irradiating the target substance to be analyzed with pulsed laser light and measuring the wavelength and intensity of the fluorescence emitted from the plasma generated by the irradiation, the elements constituting the target substance and the content thereof are determined. In elemental analysis methods,
The intensity of fluorescence emitted from the plasma generated by irradiating the sample with pulsed laser light using a sample in which boron as a plasma stabilizing material for stabilizing the generation of the plasma is mixed with the analyte to be analyzed An elemental analysis method characterized in that the element constituting the substance to be analyzed and the content thereof are determined by measuring 2. The elemental analysis method according to claim 1, wherein the sample substance to be analyzed and the reference substance are solidified by a binder in the sample. 3. The elemental analysis method according to claim 1, wherein boron as the plasma stabilizing substance has a particle size not exceeding 100 μm . The elemental analysis method according to any one of claims 1 to 3, wherein the sample is placed in a helium atmosphere and irradiated with the pulsed laser light . Boron as the plasma stabilizing substance is mixed with the analysis target substance at a predetermined ratio, and among the fluorescence emitted from the plasma generated by irradiating the sample with pulsed laser light, boron as the plasma stabilizing substance 5. The element constituting the substance to be analyzed and the content thereof are determined by correcting the intensity of the fluorescence based on the intensity of a specific light emission line emitted from the element. Elemental analysis method according to item. Of the fluorescence emitted from the plasma generated by irradiating the sample with pulsed laser light, the plasma temperature is calculated based on the intensity of the emission lines of two different wavelengths emitted from boron as the plasma stabilizing substance, by correcting the fluorescence intensity emitted from the analyte based on the plasma temperature, any one of claims 1 to 4, wherein the determination of the elements and the content thereof constituting the analyte Elemental analysis method described in 1. A reference material containing a specific element with a known concentration is added to the sample, and the fluorescence emitted from the plasma generated by irradiating the sample to which the reference material is added with pulsed laser light is emitted from the reference material. The plasma temperature is calculated based on the intensity of a plurality of different emission lines, and the fluorescence intensity emitted from the analyte is corrected based on the plasma temperature, and the elements constituting the analyte and the content thereof elemental analysis method according to any one of claims 1 to 4, wherein the seeking. By irradiating a standard sample containing an element to be analyzed of the substance to be analyzed in a certain amount with the pulsed laser light and comparing it with the fluorescence intensity emitted from the plasma generated by the irradiation, The elemental analysis method according to any one of claims 1 to 7 , wherein the content of the substance to be analyzed is quantified . By adding a certain amount of an element to be analyzed of the analyte to be analyzed to the sample, irradiating the added sample with the pulsed laser light, and comparing with the fluorescence intensity emitted from the plasma generated by the irradiation elemental analysis method according to any one of claims 1 to 7, characterized in quantifying the amount of the analyte in a sample wherein the addition are not even. An analysis cell for holding a sample in which an analysis target substance to be elementally analyzed, a reference substance containing a specific element of a known concentration, and boron as a plasma stabilizing substance that stabilizes the generation of plasma,
A laser oscillator that generates pulsed laser light;
An optical system for condensing and irradiating the sample with the pulsed laser beam;
First fluorescence detection means for detecting fluorescence emitted from plasma generated by the sample receiving the pulsed laser beam;
Based on the intensities of different light emission lines emitted from the reference material measured by the first fluorescence detection means or the intensities of different light emission lines emitted from boron as the plasma stabilizing material, An arithmetic processing means for calculating a temperature, correcting the fluorescence intensity emitted from the analysis target substance based on the plasma temperature, and obtaining an element constituting the analysis target substance and its content;
An elemental analysis apparatus characterized by comprising: The elemental analysis apparatus according to claim 10, further comprising a gas replacement unit that brings the inside of the analysis cell into an atmosphere of helium gas . Laser-induced breakdown for determining the elements and their contents in the sample by irradiating the sample to be analyzed with pulsed laser light and measuring the wavelength and intensity of the fluorescence emitted from the plasma generated by the irradiation An analytical sample preparation method for spectroscopic measurement,
Preparation of the sample by preparing an analysis target substance for elemental analysis, a reference substance containing a specific element of a known concentration, and boron as a plasma stabilizing substance for stabilizing the generation of the plasma, and compressing and solidifying by pressing. Analytical sample preparation method characterized. The sample is prepared by pulverizing and mixing the substance to be analyzed, the reference substance, boron as the plasma stabilizing substance, and a binder into a powder form and compressing and solidifying by pressing. Item 13. The analytical sample preparation method according to Item 12 . In the press working, the analysis target substance, the reference substance, boron as the plasma stabilizing substance, and a mixture of the binder are compressed and solidified by being sandwiched between 0.1 mm to 0.2 mm thick copper plates. The analytical sample preparation method according to claim 12 or 13.

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