JP4762214B2 - Display device substrate, manufacturing method thereof, and display device - Google Patents

Description

The present invention relates to a display device substrate, a manufacturing method thereof, and a display device. More specifically, the present invention relates to a display device substrate that can be applied to a liquid crystal display device or the like, a manufacturing method thereof, and a display device having the same.

Currently, liquid crystal display devices have features such as small size, thinness, low power consumption, and light weight, and are widely used in various electronic devices. In particular, an active matrix type liquid crystal display device (liquid crystal display panel) having a switching element as an active element can provide display characteristics equivalent to a CRT (Cathode Ray Tube), so that an OA device such as a personal computer, a television, etc. It is widely applied to AV equipment and mobile phones. In such a liquid crystal display device, in recent years, the improvement in quality such as an increase in size, a higher definition, and a higher effective pixel area ratio (a higher aperture ratio) has been progressing rapidly. For this reason, the display device substrate used in a display device such as a liquid crystal display device is also required to have higher performance, and is being improved in terms of design, manufacturing technology, and the like.

As the display device substrate, an active matrix substrate is widely used in liquid crystal display devices and the like. As a manufacturing technique of an active matrix substrate, a technique of forming pixel electrodes and source lines (signal lines) on the same plane on the substrate is known. In this technique, high definition and high aperture ratio are achieved. In some cases, in order to increase the effective pixel area, the distance between the pixel and the source line has been shortened, the source line has been thinned, and the like. However, if the distance between the pixel and the source line is shortened, a short circuit failure is likely to occur, and if the source line is thinned, a disconnection failure is likely to occur. In other words, in the active matrix manufacturing technique in which the pixel electrode and the source line are formed on the same plane on the substrate, there is room for improvement in that the yield decreases due to the occurrence of a short circuit failure or the like. .

Therefore, in order to prevent such short-circuit failure and disconnection failure and to improve the yield reduction, for example, a transmission type liquid crystal having the characteristics shown in the following (a) to (c), for example, regarding a method for manufacturing an active matrix substrate A method for manufacturing a display device has been proposed (see, for example, Patent Document 1).
(A) After forming a switching element (active element) and a source wiring (source line), a (transparent) interlayer insulating film is disposed.
(B) The switching element and the (transparent) pixel electrode are brought into contact with each other through a contact hole.
(C) A pixel electrode is formed on the interlayer insulating film, whereby the source wiring and the pixel electrode are separated from the same plane.

The liquid crystal display device is manufactured by bonding a color filter substrate so as to face the active matrix substrate manufactured as described above, and injecting liquid crystal between the substrates. As the color filter substrate, for example, R (red), G (green), and B (blue) color regions are provided so as to coincide with the pixel region on the active matrix substrate side, and a black matrix (light-shielding film) is provided. ) Is a substrate provided in a portion other than each pixel region.

FIG. 13 is a schematic plan view showing one pixel in a conventional active matrix substrate (thin film transistor array substrate) and a part of a pixel located adjacent to the pixel. As shown in FIG. 13, in one pixel of the active matrix substrate 130, a gate line (scanning line) 101 and a source line (signal line) 102 are arranged so as to cross each other. In the intersecting portion, a thin film transistor (hereinafter also referred to as TFT) 114 as a switching element and a pixel electrode 103 are arranged. The TFT 114 is formed from a gate electrode 104 connected to the gate line 101, a source electrode 105 connected to the source line 102, a drain electrode 106 connected to the pixel electrode 103, and an island-like (island-like) semiconductor layer 125. Is done. A drain extraction electrode 106 ′ is connected to the pixel electrode 103 through a contact hole 109. Further, the drain extraction electrode 106 ′ is opposed to the auxiliary capacitance line 107 with the gate insulating film 111 interposed therebetween, and forms an auxiliary capacitance.

Next, a method for manufacturing an active matrix substrate, particularly a thin film transistor array substrate, will be briefly described with reference to FIGS. 14 is a cross-sectional view taken along line HH ′ of the thin film transistor array substrate shown in FIG. 13, and FIG. 15 is a cross-sectional view taken along line II ′ of the thin film transistor array substrate shown in FIG. is there. 16 is a schematic plan view of a gate line external lead terminal, and FIG. 17 is a schematic plan view of a source line external lead terminal.

When manufacturing a thin film transistor array substrate, first, a gate line (scanning line) 101, a gate electrode 104, and an auxiliary capacitance line 107 are formed on a substrate 110 made of a transparent insulating substrate such as glass. Simultaneously formed by photolithography and etching.
Next, a gate insulating film 111, an active semiconductor layer 112, a low-resistance semiconductor layer 113 made of n-type amorphous silicon or the like is formed thereon, and is formed in an island shape (island shape) 125 by photolithography and etching. .
Next, the source line 102, the source electrode 105, the drain electrode 106, and the drain extraction electrode 106 ′ are simultaneously formed by film formation, photolithography, and etching, and the low-resistance semiconductor layer 113 is continuously formed on the source / drain. Perform drain isolation etching.

Next, a lower interlayer insulating film 120 made of SiNx or the like is formed so as to cover the entire surface, and then an upper organic interlayer insulating film 115 made of photosensitive acrylic resin or the like is formed on the contact hole 109 pattern and gate line by photolithography. An external lead terminal contact pattern (X in FIG. 16) and a source line external lead terminal contact pattern (Y in FIG. 17) are formed.
Next, in order to form the contact hole 109, the gate line external lead terminal 200, and the source line external lead terminal 300, the lower interlayer insulating film 120 and the gate insulating film 111 are continuously formed using the upper organic interlayer insulating film 115 as a mask. And etch.

Next, the pixel electrode 103, the uppermost layer electrode 201 of the gate line external lead terminal 200, and the outermost of the source line external lead terminal 300 are covered so as to cover the contact hole 109, the gate line external lead terminal 200, and the source line external lead terminal 300. Upper layer electrode 301 is formed. Note that the contact hole 109 connects the drain electrode 106 of the TFT 114 and the pixel electrode 103 via the drain extraction electrode 106 ′.

With such a manufacturing method, in the active matrix substrate, the source line 102 and the pixel electrode 103 can be separated with the interlayer insulating films 115 and 120 interposed therebetween. The separation of the source line 102 and the pixel electrode 103 can prevent a decrease in yield due to a short circuit between the pixel electrode 103 and the source line 102, and the pixel electrode 103 and the source line 102 are overlapped as shown in FIG. Therefore, the aperture ratio of a liquid crystal display device or the like can be improved.

However, in the above method for manufacturing a substrate for a display device, when a film defect occurs in the upper organic interlayer insulating film, the lower interlayer insulating film and the gate insulating film are etched at the film defect portion and formed on the upper organic interlayer insulating film. Since the pixel electrode is short-circuited, there is a room for improvement in that the display defect is caused, the quality of the display device is lowered, and the yield is lowered.

With respect to conventional display device substrates, a technique has been proposed in which the gate insulating layer has a two-layer structure including an oxide insulating layer obtained by oxidizing a metal film and a gate insulating film (see, for example, Patent Document 2). ). However, even if the gate insulating layer is made multi-layered by this technique, the short-circuit defect due to the defect of the interlayer insulating film is prevented when the insulating film existing below the uppermost layer is removed by etching using the uppermost interlayer insulating film as a mask. The effect cannot be obtained. In addition, this technology is a countermeasure technique for film defects in the gate insulating film, and exists between the gate electrode, the source line, etc., and the pixel electrode in the display device substrate in which the pixel electrode is formed on the interlayer insulating film. This is not a countermeasure technique for pixel defects caused by electrical leaks due to defects in the insulating film.
JP-A-9-152625 (page 1-3) JP-A-3-153217 (first and third pages)

The present invention has been made in view of the above situation, and in particular, when manufacturing a substrate for a display device having a high definition and a high aperture ratio, a short circuit between a pixel electrode and a wiring such as a scanning line or a signal line is prevented. An object of the present invention is to provide a display device substrate capable of obtaining a display device with high display quality at a high yield, a manufacturing method thereof, and a display device using the same.

The inventors of the present invention have made various studies on a display device substrate that can obtain a display device with high definition and high aperture ratio and high display quality with high yield. In the conventional substrate configuration, the scanning line ( A gate bus line), a signal line (source bus line), etc. and a pixel electrode in a region where the pixel electrode overlaps in a plane (a region overlapping when viewed from the direction perpendicular to the substrate surface) and is located below the pixel electrode (upper layer) In such a case, when the etching is performed using the (upper layer) interlayer insulating film as a mask, the gate insulating film or the like in that portion is etched, and the scanning line, the signal line ( Since the wiring such as the source bus line is exposed, the exposed wiring and the pixel electrode come into contact with each other by the film formation and patterning of the pixel electrode, and a leak defect occurs. It was focused on the fact that Mau. That is, when such a leak between the wiring and the pixel electrode occurs, the written pixel potential cannot be maintained, resulting in a point defect in the display device. Therefore, as a protective film against etching, a protective layer is provided above the wiring such as the scanning line and the signal line (source bus line), thereby preventing contact between the pixel electrode and the wiring, and leak defects caused by these short circuits. Found that can be prevented. For example, by arranging a pattern of a semiconductor layer that constitutes a switching element in a region where a scanning line and a pixel electrode overlap in a plane, even if the interlayer insulating film is peeled off, this semiconductor layer pattern becomes an etching protective film, and substrate manufacturing Without increasing the number of steps, electrical leakage between the pixel electrode and the scan line can be prevented, and a display device such as a high-definition, high aperture ratio liquid crystal display device can be provided with a high yield. As a result, the inventors have arrived at the present invention by conceiving that the above problems can be solved brilliantly.

That is, the present invention is a display device substrate including a scanning line, a signal line, and a switching element on an insulating substrate, and further including an interlayer insulating film and a pixel electrode. The switching element includes the scanning line, the signal line, and the signal line. A gate electrode connected to the scanning line, a source electrode connected to the signal line, and a drain electrode connected to the pixel electrode; The display device substrate has a contact hole for connecting the drain electrode of the switching element and the pixel electrode, and the display device substrate is a display device substrate in which a protective layer is provided above the scanning lines and / or signal lines. .
The present invention is also a substrate for a display device that includes a scanning line, a signal line, an auxiliary capacitance line, and a switching element on an insulating substrate, and further includes an interlayer insulating film and a pixel electrode. A gate electrode connected to the scanning line; a source electrode connected to the signal line; and a drain electrode connected to the pixel electrode; The film has a contact hole for connecting the drain electrode of the switching element and the pixel electrode, and the display device substrate is an upper layer of at least one wiring selected from the group consisting of a scanning line, a signal line, and an auxiliary capacitance wiring It is also a display device substrate provided with a protective layer.
The present invention is described in detail below.

The substrate for a display device of the present invention includes (A) a structure including a scanning line, a signal line, and a switching element on an insulating substrate, and further including an interlayer insulating film and a pixel electrode, or (B) on the insulating substrate. And a scanning line, a signal line, an auxiliary capacitance line, and a switching element, and further includes an interlayer insulating film and a pixel electrode. In the configuration of (A), it has a laminated structure including (1) an insulating substrate, (2) a scanning line, a signal line and a switching element, (3) an interlayer insulating film, (4) a pixel electrode in this order. Specifically, the signal line and the scanning line are provided on the insulating substrate, and each of the intersections where the signal line and the scanning line intersect each other includes a switching element and a pixel electrode. It is preferable that an interlayer insulating film is provided on the switching element and a pixel electrode is provided on the interlayer insulating film. In the configuration of (B) above, (1) an insulating substrate, (2) a scanning line, a signal line, an auxiliary capacitance wiring and a switching element, (3) an interlayer insulating film, (4) a pixel electrode, etc. in this order. It preferably has a structure.

The switching element is provided at an intersection where the scanning line and the signal line intersect, and includes a gate electrode connected to the scanning line, a source electrode connected to the signal line, and a drain electrode connected to the pixel electrode. Have. Normally, a gate insulating film is formed between the scanning line (gate electrode) and the signal line (source electrode) or drain electrode. The interlayer insulating film has a contact hole that connects the drain electrode of the switching element and the pixel electrode.
The display device substrate according to the present invention has such a configuration, so that the driving of the switching element is controlled by the current (gate signal) flowing through the scanning line, and the signal line is connected when the switching element is in the ON state. The drive control of the pixel electrode can be performed by a flowing current (data signal), and a short circuit between the pixel electrode and the signal line is prevented by an interlayer insulating film.

In the present invention, in the configuration of (A), a protective layer is provided above the scanning lines and / or signal lines. In the configuration of (B), the protective layer is selected from the group consisting of scanning lines, signal lines, and auxiliary capacitance wirings. A protective layer is provided above the at least one wiring. That is, in the present invention, a protective layer is provided at least above any one of the scanning line, the signal line, and the auxiliary capacitance wiring. As a result, when etching is performed to form contact holes in the interlayer insulating film, the protective layer functions as a protective film against etching, so that a film defect occurs in a part of the pattern of the interlayer insulating film serving as an etching mask. Even in this case, it is possible to prevent the wiring such as the scanning line from being exposed after the etching. As a result, the contact between the pixel electrode on the interlayer insulating film and the wiring such as the scanning line is prevented and a short circuit is prevented, so that it is possible to prevent the occurrence of pixel defects, particularly high definition and high aperture. When producing a display device substrate with a high rate, the display quality and yield can be improved.

The protective layer is not particularly limited in material, thickness, or the like as long as it can provide an effect of preventing exposure of wiring such as scanning lines when the interlayer insulating film is etched. The protective layer may be composed of the same material as other adjacent layers such as an interlayer insulating film and a gate insulating film as long as the lower layer portion can be protected during etching. In addition, if the cross-sectional shape is integrated with the other layer adjacent to the protective layer and it is difficult to determine the boundary of the layer, the difference in the planar shape between the protective layer and the other adjacent layer, that is, Identify the protective layer by checking the difference in thickness between the integrated part (protective layer + other adjacent layers) and the non-integrated part (only the protective layer or other adjacent layers) Can do.
In the present invention, the phrase “an upper layer is provided with a protective layer” may mean that a protective layer is provided on an upper layer of a wiring such as a scanning line so as to be in contact with the wiring such as a scanning line. Further, a protective layer may be provided on a plurality of upper layers of wiring such as scanning lines without being in contact with the wiring such as scanning lines. For example, as a form in which the protective layer is provided without being in contact with the scanning line, a form in which the protective layer is provided over the gate insulating film, a form in which the protective layer is provided in the interlayer insulating film, and the like can be given.

Next, each component other than the protective layer constituting the display device substrate of the present invention will be described.
As the insulating substrate, a substrate made of a transparent insulator such as glass is preferably used.
The material of the scanning line, the signal line, and the auxiliary capacitance wiring is not particularly limited as long as a desired wiring resistance can be obtained. Tantalum (Ta), titanium (Ti), chromium (Cr), aluminum (Al ), Alloys of these metals, and laminated films of Ti / Al / Ti and the like obtained by laminating them. The width, thickness, pattern shape, and the like of the scanning line, the signal line, and the auxiliary capacitance wiring are not particularly limited.
The switching element is not particularly limited as long as it has a gate electrode, a source electrode, and a drain electrode, and is an amorphous silicon thin film transistor, a microcrystal silicon thin film transistor, a polysilicon thin film transistor, or a CGS (Continuous Grain Silicon Silicon) thin film transistor. Etc. In general, the gate electrode is formed integrally with the scanning line, and the source electrode and the drain electrode are formed integrally with the signal line.

The material of the interlayer insulating film is not particularly limited as long as a desired dielectric constant, transmittance, etching selection ratio, and the like can be obtained. Silicon nitride (SiNx), photosensitive transparent resin, silicon oxide (SiO ₂ ), and the like Is mentioned. Examples of the photosensitive transparent resin that can be used for the interlayer insulating film include acrylic resins, epoxy resins, polyurethane resins, and polyimide resins. The interlayer insulating film may be composed of one layer or may be composed of two or more layers, and the thickness and the like are not particularly limited.
The contact hole formed in the interlayer insulating film is not particularly limited as long as the drain electrode of the switching element and the pixel electrode can be connected, and the shape, size, number, arrangement, and the like are not particularly limited. In the contact hole, a conductive film is usually formed to electrically connect the drain electrode of the switching element and the pixel electrode.

As a material for the pixel electrode, a transparent conductive material such as ITO (Indium Tin Oxide) or IZO (Indium Zinc Oxide) is preferably used, and a display used for a reflective liquid crystal display device or the like. If it is a board | substrate for apparatuses, metals, such as aluminum and silver, are also used suitably.
The configuration of the substrate for a display device of the present invention is not particularly limited as long as such a component is formed as essential, and other components may or may not be included. is not.

A preferred embodiment of the display device substrate of the present invention will be described in detail below.
The protective layer is preferably provided below the interlayer insulating film. As a result, when etching is performed to form contact holes in the interlayer insulating film, the protective layer can function as a protective film against etching, and the protective layer is formed in the interlayer insulating film. In comparison, a protective layer can be easily formed.
In the present invention, the “lower layer of the interlayer insulating film” may be a lower layer of the interlayer insulating film or a lower layer of a plurality of layers. Specifically, the scanning line is formed on the gate insulating film. The protective film may be provided, or the scanning line protective layer may be provided on the upper layer of the scanning line so as to be in contact with the scanning line.

The protective layer is preferably composed of a semiconductor, and preferably has substantially the same composition as the semiconductor layer constituting the switching element. In these cases, since the protective layer can be formed at the same time when the semiconductor layer constituting the switching element is formed, a protective layer forming step is added to the manufacturing process of the conventional display device substrate. Therefore, the display device substrate of the present invention can be manufactured, and the manufacturing process can be shortened. As the semiconductor, those constituting the semiconductor layer of the switching element are suitable, and specific examples include those mainly composed of amorphous silicon.
Note that “substantially the same composition” is preferably evaluated to be substantially the same composition, but the formation of the semiconductor layer and the protective layer forming the switching element are formed by CVD (chemical Any range may be used as long as it can be performed simultaneously using a vapor deposition method or the like.

The protective layer is preferably separated from a semiconductor layer constituting the switching element. As a result, even if a protective layer (semiconductor layer) provided above the scanning line and a signal line adjacent to the switching element and connected to the switching element leak, these are connected to the switching element. Since electrical leakage from the drain electrode can be prevented, pixel defects can be prevented from occurring.

The protective layer is preferably made of silicon nitride (SiNx), silicon dioxide (SiO ₂ ), or resin. According to these, when etching is performed for forming contact holes in the interlayer insulating film, the protective layer can function sufficiently effectively as a protective film against etching, and the protective layer can be easily formed. be able to. The resin is preferably a photosensitive transparent resin because patterning is easy. Examples of the photosensitive transparent resin that can be used for the protective layer include acrylic resins, epoxy resins, polyurethane resins, and polyimide resins. When a material other than the photosensitive resin is used for forming the protective layer, after the film formation, after applying a liquid photosensitive resin, patterning is performed by a method such as photolithography (exposure and development) or dry etching. Can do.

The protective layer preferably has substantially the same composition as the source electrode and / or the drain electrode constituting the switching element. In this case, since the protective layer can be formed at the same time when the source electrode and the drain electrode constituting the switching element are formed, the protective layer forming step is separate from the conventional manufacturing process of the display device substrate. Without the addition, the display device substrate of the present invention can be manufactured, and the manufacturing process can be shortened.
Note that “substantially the same composition” is preferably evaluated to be substantially the same composition, but the formation of the source electrode and drain electrode constituting the switching element and the formation of the protective layer Any range that can be performed simultaneously is acceptable.

The protective layer is preferably disposed in a portion where at least the scanning line and the pixel electrode overlap when viewed from the direction perpendicular to the surface of the insulating substrate. As a result, exposure of the scanning line due to etching can be sufficiently prevented, and the effect of the present invention for preventing a short circuit between the pixel electrode and the scanning line can be sufficiently achieved. More preferably, the protective layer is disposed only in a substantially overlapping portion between the scanning line and the pixel electrode when viewed from the direction perpendicular to the surface of the insulating substrate. In this embodiment, the effect of the present invention for preventing a short circuit between the pixel electrode and the scanning line can be sufficiently achieved, and an increase in the load capacity of the scanning line can be minimized, for example, on the scanning line. As compared with the case where a protective layer is provided so as to completely cover, an increase in the load capacity of the scanning line can be reduced.
The above “when viewed from the direction perpendicular to the surface of the insulating substrate” means, in other words, “when the orthographic projection of the target object is seen on the surface of the insulating substrate”. More specifically, it means “when a group of perpendicular feet dropped on the surface of the insulating substrate from each point of the target object is seen”. Therefore, in this case, it means that the orthogonal projection of the scanning line on the surface of the insulating substrate, the orthogonal projection of the protective layer, and the orthogonal projection of the pixel electrode overlap. The “substantially overlapping portion between the scanning line and the pixel electrode” is preferably a portion that is substantially evaluated as an overlapping portion between the scanning line and the pixel electrode. If the effect which suppresses increase to the minimum can be acquired, the peripheral part may be included.

The protective layer is preferably arranged so as to overlap with the scanning line and not overlap with the signal line when viewed from the direction perpendicular to the surface of the insulating substrate. Thereby, when the protective film is made of a semiconductor, the occurrence of leakage between the scanning line and the signal line can be prevented.

The interlayer insulating film is preferably composed of at least two insulating films, and the uppermost insulating film is preferably an organic film. As a result, it is possible to perform etching using the uppermost organic film constituting the interlayer insulating film as a mask. When a separate mask is formed on the interlayer insulating film and removed after etching, the entire interlayer insulating film is masked. As compared with the case where etching is performed, the manufacturing efficiency of the substrate can be improved.
The organic film is not particularly limited as long as it has a desired dielectric constant, transmittance, etching selectivity, and the like, and is appropriately selected according to etching conditions. Examples thereof include photosensitive transparent resins such as epoxy resins, polyurethane resins, and polyimide resins.

The present invention is also a manufacturing method for forming a substrate for a display device according to the present invention having a protective layer having a composition substantially the same as that of a semiconductor layer constituting a switching element. It is also a method for manufacturing a substrate for a display device, which includes a step of simultaneously forming a layer and a semiconductor layer constituting a switching element. The present invention further relates to a manufacturing method for forming a display device substrate of the present invention having a protective layer having a composition substantially the same as that of a source electrode and / or a drain electrode constituting a switching element, the method comprising: The manufacturing method is also a method for manufacturing a substrate for a display device, which includes a step of simultaneously forming a protective layer and a source electrode and / or a drain electrode constituting a switching element. As a result, the display device substrate of the present invention can be manufactured without adding a protective layer forming step to the conventional display device substrate manufacturing process, and the manufacturing process can be shortened. Can do.

The present invention further relates to a manufacturing method for forming a substrate for a display device according to the present invention comprising an interlayer insulating film composed of at least two insulating films, and the uppermost insulating film being an organic film, wherein the display device A method for manufacturing a substrate for a display includes a step of performing etching using an uppermost organic film constituting an interlayer insulating film as a mask, and simultaneously forming contact holes, external lead terminals for scanning lines, and external lead terminals for signal lines It is also a manufacturing method of the substrate for the use. Thereby, the manufacturing efficiency of the substrate can be improved as compared with the case where a mask is separately formed on the interlayer insulating film and removed after etching, or the etching is performed using the entire interlayer insulating film as a mask. In addition, in the contact hole forming step, the formation efficiency of the substrate can also be improved by forming the external lead terminal of the scanning line and the external lead terminal of the signal line together.
Since the contact hole in the uppermost organic film portion is formed in advance when the organic film is formed, the contact hole other than the uppermost organic film portion is formed by etching in the formation process of the contact hole or the like. It becomes.

The present invention is also a display device including the display device substrate according to the present invention or the display device substrate manufactured by the display device substrate manufacturing method according to the present invention. The display device is not particularly limited as long as the display can be controlled by supplying an electric signal to a scanning line, a signal line, or the like of the display device substrate. Examples of such a display device include a liquid crystal display device, an organic electroluminescence (EL) display device, and the like, among which a liquid crystal display device is preferable. In such a display device, a short circuit between a pixel electrode and a wiring such as a scanning line is prevented, and the occurrence of pixel defects is effectively prevented. Less favorable display quality can be obtained and the yield can be improved.

According to the display device substrate of the present invention, the pixel electrode is provided on a plane different from the plane on which the scanning line, the signal line, and the switching element are formed, and a protective layer is provided on the wiring such as the scanning line. Thus, the occurrence of pixel defects due to a short circuit between the pixel electrode on the interlayer insulating film and a wiring such as a scanning line is prevented. When such a display device substrate is used for a display device, particularly in a high-definition and high aperture ratio display device, good display quality with few pixel defects can be obtained, and an effect of improving yield can be obtained. be able to.

Hereinafter, the present invention will be described in more detail with reference to embodiments, but the present invention is not limited only to these embodiments.

(Embodiment 1)
Embodiment 1 which is one embodiment of the present invention will be described below with reference to FIGS. In this embodiment, an active matrix substrate for a liquid crystal display device will be described as a specific example of the display device substrate.
FIG. 1 is a schematic cross-sectional view showing an example of a cross-sectional configuration of the liquid crystal display device of the present invention.
As shown in FIG. 1, the liquid crystal display device 40 includes an active matrix substrate (display device substrate) 30 and a counter substrate 33 having a color filter 34, a light shielding film 35, and the like. Is sandwiched. The liquid crystal layer 32 is sandwiched between an alignment film (not shown) of the counter substrate 33 and an alignment film (not shown) of the active matrix substrate 30.

FIG. 2 is a schematic plan view showing one pixel in the active matrix substrate 30 of the present invention. 3 is a cross-sectional view taken along line AA ′ of the display device substrate shown in FIG. 2, and FIG. 4 is a cross-sectional view taken along line BB ′ of the display device substrate shown in FIG. FIG.
As shown in FIG. 2, in the active matrix substrate 30, a gate line (scanning line) 1, a source line (signal line) 2, and a pixel electrode 3 are stacked on an insulating substrate 10. The gate line 1 and the source line 2 are arranged so as to cross each other. A switching element (TFT) 14 and a pixel electrode 3 are provided at each intersection where they intersect. The insulating substrate 10 is located on the rearmost surface of FIG. 2 and is disposed at the position described in the cross-sectional views of FIGS. 3 and 4. A gate electrode 4 of the switching element 14 is formed on the gate line 1, and a source electrode 5 of the switching element 14 is formed on the source line 2. The pixel electrode 3 is connected via the drain electrode 6 of the switching element 14 and the drain extraction electrode 6 ′. The drain extraction electrode 6 'faces the auxiliary capacitance bus line 7 with the gate insulating film 11 interposed therebetween, thereby forming an auxiliary capacitance.

As shown in FIG. 4, in the active matrix substrate 30, a protective film (protective layer) 8 is provided on the gate insulating film 11 so as to cover the surface of the gate line 1. As shown in FIG. 2, the active matrix substrate 30 includes a gate line 1, a protective film 8 that covers the surface of the gate line 1, and a pixel when viewed from a direction perpendicular to the surface of the insulating substrate 10. It has a region where the electrode 3 overlaps. That is, the orthogonal projection of the gate line 1 on the surface of the insulating substrate 10, the orthogonal projection of the protective film 8 on the surface of the insulating substrate 10, and the orthogonal projection of the pixel electrode 3 on the surface of the insulating substrate 10 overlap. Has an area.

Next, current and voltage control in the liquid crystal display device 40 will be briefly described.
In the liquid crystal display device 40, a voltage is applied to the gate electrode 4 when the gate line 1 is selected. The current flowing between the source electrode 5 and the drain electrode 6 is controlled by the voltage applied to the gate electrode 4. Based on the signal transmitted from the source line 2, current flows from the source electrode 5 to the drain electrode 6 and from the drain electrode 6 to the pixel electrode 3 through the drain extraction electrode 6 ′. , Is configured to perform a predetermined display. The auxiliary capacitance bus line 7 is auxiliary installed in order to maintain a predetermined display on the pixel electrode 3.

Next, an example of a method for manufacturing the active matrix substrate 30 according to the present embodiment will be described with reference to FIGS.
When manufacturing the active matrix substrate 30 according to the present embodiment, first, a laminated film made of Ti / Al / Ti is formed on the insulating substrate 10 made of a transparent insulator such as glass by sputtering, The gate line 1, the gate electrode 4, and the auxiliary capacitance line 7 are simultaneously formed by performing photolithography, dry etching, and resist peeling. Next, a gate insulating film 11 made of a SiNx (silicon nitride) film having a thickness of about 4000 mm is formed on the surface thereof using a mixed gas of SiH ₄ gas, NH ₃ gas, and N ₂ gas, and having a thickness of about 1500 mm. The active semiconductor layer 12 made of amorphous silicon is mixed with SiH ₄ gas and H ₂ gas, and the n-type low-resistance semiconductor layer 13 doped with phosphorus having a thickness of about 500 mm is formed with SiH ₄ gas, PH ₃ gas, and H. Using a mixed gas with _two gases, a film is continuously formed by CVD, and photolithography, dry etching, and resist peeling are performed to form an island shape (island shape) 25. Subsequently, a laminated film made of Ti / Al / Ti is formed by sputtering, photolithography is performed, and dry etching is performed to simultaneously form the source line 2, the source electrode 5, the drain electrode 6 and the drain extraction electrode 6 ′. . Further, the n-type low-resistance semiconductor layer 13 is continuously etched by source / drain separation, and the resist is peeled off. In this way, a thin film transistor (TFT) 14 is formed.

Next, a lower interlayer insulating film 20 made of SiNx having a thickness of about 3000 mm is formed by CVD using a mixed gas of SiH ₄ gas, NH ₃ gas, and N ₂ gas so as to cover the entire surface of the substrate. Subsequently, SiNx having a thickness of about 4000 mm was formed by CVD using a mixed gas of SiH ₄ gas, NH ₃ gas, and N ₂ gas, and photolithography and a mixed gas of CF ₄ gas and O ₂ gas were used. A protective film 8 is formed by dry etching.
Thereafter, an upper organic layer insulating film 15 made of a positive photosensitive acrylic resin having a thickness of about 3 μm is formed on the contact hole 9, gate line external lead terminal contact pattern (X in FIG. 16), source line external lead terminal contact by photolithography. It forms so that it may have a pattern for use (Y of FIG. 17).

Next, in order to form the contact hole 9, the gate line external lead terminal 200, and the source line external lead terminal 300, the lower interlayer insulating film 20 and the gate insulating film 11 are formed of CF ₄ gas using the upper organic layer insulating film 15 as a mask. Etching is continuously performed by dry etching using a mixed gas of oxygen and O ₂ gas.
Thereafter, a transparent electrode is formed by sputtering so as to cover the entire surface of the substrate including the contact hole 9. Next, the pixel electrode 3 is obtained by patterning the transparent electrode formed by photolithography and wet etching and removing the resist.

In this embodiment, Ti / Al / Ti is used as the material of the gate line 1 and the source line 2, but there is no particular limitation as long as it is a metal that can obtain a desired line resistance. Metals such as Ta), titanium (Ti), chromium (Cr), and aluminum (Al), and alloys of these metals may be used. Further, as the material of the gate line 1 and the source line 2, it is also possible to use a film having a laminated structure such as TaN / Ta / TaN. Furthermore, as a material for the source line 2, in addition to a general metal film, for example, a transparent conductive film such as ITO can also be used.

In the present embodiment, an amorphous silicon thin film transistor is used as the switching element 14, but, for example, a microcrystal silicon thin film transistor, a polysilicon thin film transistor, a CGS thin film transistor, or the like can also be used.
In the present embodiment, ITO is used as the pixel electrode 3, but a transparent electrode such as IZO can also be used. In the case of a reflective liquid crystal display device, the pixel electrode 3 may be any electrode material that reflects external light, and may be a metal such as Al or Ag.

In the present embodiment, a positive acrylic photosensitive transparent resin is used as the upper interlayer insulating film 15, but the desired dielectric constant, transmittance, and the lower interlayer insulating film 15 and the gate insulating film 11 The material is not particularly limited as long as the etching selectivity can be obtained. For example, a negative photosensitive resin, a SiO ₂ (silicon oxide) film, or the like can be used.
In this embodiment, the SiNx film formed by the CVD method is used as the lower interlayer insulating film 20, but a positive type or negative type photosensitive transparent resin or the like may be used. Similarly, for the protective film 8, a photosensitive transparent resin, a SiO ₂ film, or the like can be used in addition to the SiNx film. Examples of the photosensitive transparent resin that can be used for the lower interlayer insulating film 20 and the protective film 8 include acrylic resins, epoxy resins, polyurethane resins, and polyimide resins.

Next, with reference to FIG. 4, a description will be given of an operational effect in the present embodiment in which the gate line 1 and the pixel electrode 3 do not leak when there is a film defect in the upper organic layer insulating film 15. FIG. 11 is a schematic plan view showing a state where an upper interlayer insulating film is peeled off and a pixel electrode and a gate line are leaked at a leak portion 800 in a conventional active matrix substrate. FIG. 12 is a schematic cross-sectional view showing a cross section of the leak portion 800 cut along the line GG ′ in FIG.
In the conventional active matrix substrate 130, foreign matter or the like caught when the upper interlayer insulating film 115 is formed by coating, or peeling of the upper interlayer insulating film 115 due to insufficient adhesion at the time of coating film formation (at the leak portion 800). When this occurs, the lower interlayer insulating film 120 and the gate insulating film 111 are etched at a location where the upper interlayer insulating film 115 is missing, as is apparent from the above manufacturing process. Therefore, as shown in FIG. 12, the pixel electrode 103 and the gate line 101 come into contact with each other, and an electric leak causes a pixel defect, which causes a reduction in display quality and yield.
However, in the present invention, since the protective film 8 is separately formed on the gate line 1 with an insulating material or the like, the gate line 1 can be protected from etching when etching using the upper interlayer insulating film 15 as a mask. The protective film 8 remains between the pixel electrode 3 and the gate line 1 and has an effect of suppressing pixel defects. Specifically, in the step of etching the lower interlayer insulating film 20 made of SiNx having a thickness of about 3000 mm and the gate insulating film 11 made of SiNx having a thickness of about 4000 mm, using the upper interlayer insulating film 15 as a mask, Although SiNx having a total thickness of about 7000 mm is etched, SiNx is added as a protective film 8 to a thickness of about 4000 mm, so that in the portion where the protective film 8 is formed, the film thickness of the SiNx film (total about 11000 mm). ) Can be sufficiently secured, so that the contact between the gate line 1 and the pixel electrode 3 can be sufficiently suppressed.

(Embodiment 2)
The second embodiment, which is another embodiment of the present invention, will be described below with reference to FIGS. For convenience of explanation, members having the same functions as those shown in the drawings relating to the first embodiment are denoted by the same reference numerals and description thereof is omitted.
In the second embodiment, the protective layer is formed at the same time as the semiconductor layer forming the switching element (TFT), and then separated from the semiconductor layer of the switching element and does not overlap with the source line. The active matrix substrate (display device substrate) of Embodiment 2 provided with such a protective layer (hereinafter also referred to as a protective semiconductor layer) will be described with reference to FIGS.
FIG. 5 is a schematic plan view showing one pixel in the active matrix substrate 30 of the present invention. 6 is a cross-sectional view taken along line CC ′ of the display device substrate shown in FIG. 5, and FIG. 7 is a cross-sectional view taken along line DD ′ of the display device substrate shown in FIG. FIG.

First, an example of a method for manufacturing the active matrix substrate 30 according to the present embodiment will be described.
When the active matrix substrate 30 according to this embodiment is manufactured, first, the gate line 1, the gate electrode 4, and the auxiliary capacitance line 7 are the same on the insulating substrate 10 made of a transparent insulator such as glass. It is formed in a process. Next, a gate insulating film 11 made of SiNx having a thickness of about 4000 mm is used on the surface thereof using a mixed gas of SiH ₄ gas, NH ₃ gas and N ₂ gas, and an active semiconductor made of amorphous silicon having a thickness of about 1500 mm. The layer 12 uses a mixed gas of SiH ₄ gas and H ₂ gas, and further, the n-type low resistance semiconductor layer 13 doped with phosphorus having a thickness of about 500 mm is formed as a mixed gas of SiH ₄ gas, PH ₃ gas and H ₂ gas. Then, the film is continuously formed by CVD, and formed into an island 25 by photolithography, dry etching, and resist stripping. At this time, the protective semiconductor layer 26 is formed at the same time. Further, the source line 2, the source electrode 5, the drain electrode 6 and the drain extraction electrode 6 ′ are simultaneously formed by film formation, photolithography, and dry etching. Further, the n-type low resistance semiconductor layer 13 is continuously etched by source / drain separation, and the resist is peeled off. In this way, a thin film transistor (TFT) 14 is formed.

Next, a lower interlayer insulating film 20 made of SiNx having a thickness of about 3000 mm is formed by CVD using a mixed gas of SiH ₄ gas, NH ₃ gas, and N ₂ gas so as to cover the entire surface of the substrate. Thereafter, an upper organic layer insulating film 15 made of a positive photosensitive acrylic resin having a thickness of about 3 μm is formed on the contact hole 9, gate line external lead terminal contact pattern (X in FIG. 16), source line external lead terminal contact by photolithography. It forms so that it may have a pattern for use (Y of FIG. 17).

Next, in order to form the contact hole 9, the gate line external lead terminal 200, and the source line external lead terminal 300, the lower interlayer insulating film 20 and the gate insulating film 11 are formed of CF ₄ gas using the upper organic layer insulating film 15 as a mask. Etching is continuously performed by dry etching using a mixed gas of oxygen and O ₂ gas.
Thereafter, a transparent electrode is formed by sputtering so as to cover the entire surface of the substrate including the contact hole 9. Next, the pixel electrode 3 is obtained by patterning the transparent electrode formed by photolithography and wet etching and removing the resist.

Next, with reference to FIG. 7, a description will be given of an operation and effect in the present embodiment in which the gate line 1 and the pixel electrode 3 do not leak when there is a film defect in the upper organic layer insulating film 15.
In the conventional active matrix substrate, when the upper interlayer insulating film is peeled off due to a foreign matter caught when the upper interlayer insulating film is formed by coating, or due to insufficient adhesion at the time of coating film forming, it is clear from the above manufacturing process. As described above, the lower interlayer insulating film and the gate insulating film are etched at the location where the upper interlayer insulating film is missing. Therefore, as shown in FIG. 12, the pixel electrode 103 and the gate line 101 come into contact with each other, and an electrical leak occurs, resulting in a pixel defect, which causes a reduction in display quality and yield.
However, in the present invention, since the protective semiconductor layer 26 is separately formed on the gate line 1, the gate line 1 can be protected from etching when etching using the upper interlayer insulating film 15 as a mask. The protective semiconductor layer 26 remains between the gate line 1 and the effect of suppressing pixel defects. Specifically, in the step of etching the lower interlayer insulating film 20 made of SiNx having a thickness of about 3000 mm and the gate insulating film 11 made of SiNx having a thickness of about 4000 mm, using the upper interlayer insulating film 15 as a mask, Although SiNx having a total thickness of about 7000 mm is etched, when the protective semiconductor layer 26 has a thickness of about 1500 mm and SiNx is etched by a mixed gas of CF ₄ gas and O ₂ gas, Since the etching selectivity with respect to the protective semiconductor layer 26 is about 1:10, the remaining film of the gate insulating film 11 can be sufficiently secured, and the contact between the gate line 1 and the pixel electrode 3 is sufficiently suppressed. can do.

In this embodiment, since the protective semiconductor layer 26 is formed at the same time as the semiconductor layer forming the switching element (TFT) 14, the process can be shortened compared to the first embodiment.
Furthermore, in the present embodiment, the protective semiconductor layer 26 and the semiconductor layer forming the switching element (TFT) 14 are separated from each other and do not overlap with the source line 2. ) Even when the protective semiconductor layer 26 provided on 1 and the source line (signal line) 2 adjacent to the switching element 14 and connected to the switching element 14 leak, these are connected to the switching element 14. Since it is possible to prevent electrical leakage from the drain electrode 6 that is present, pixel defects can be prevented.

(Embodiment 3)
Embodiment 3 which is another embodiment of the present invention will be described below with reference to FIGS. For convenience of explanation, members having the same functions as those shown in the drawings relating to the first and second embodiments are denoted by the same reference numerals and description thereof is omitted.
In Embodiment 3, in addition to the configuration of Embodiment 2, when the protective semiconductor layer is viewed from the direction perpendicular to the surface of the insulating substrate, the gate line (scanning line) and the pixel electrode overlap each other. It is characterized by being arranged at least. An active matrix substrate 30 according to the third embodiment provided with such a protective semiconductor layer will be described with reference to FIGS.
FIG. 8 is a schematic plan view showing one pixel in the active matrix substrate 30 of the present invention. 9 is a cross-sectional view taken along line EE ′ of the display device substrate shown in FIG. 8, and FIG. 10 is a cross-sectional view taken along line FF ′ of the display device substrate shown in FIG. FIG.

First, an example of a method for manufacturing the active matrix substrate 30 according to the present embodiment will be described.
When the active matrix substrate 30 according to this embodiment is manufactured, first, the gate line 1, the gate electrode 4, and the auxiliary capacitance line 7 are the same on the insulating substrate 10 made of a transparent insulator such as glass. It is formed in a process. Next, a gate insulating film 11 made of SiNx having a thickness of about 4000 mm is used on the surface thereof using a mixed gas of SiH ₄ gas, NH ₃ gas and N ₂ gas, and an active semiconductor made of amorphous silicon having a thickness of about 1500 mm. The layer 12 uses a mixed gas of SiH ₄ gas and H ₂ gas, and further, the n-type low resistance semiconductor layer 13 doped with phosphorus having a thickness of about 500 mm is formed as a mixed gas of SiH ₄ gas, PH ₃ gas and H ₂ gas. Then, the film is continuously formed by CVD, and formed into an island 25 by photolithography, dry etching, and resist stripping. At this time, the protective semiconductor layer 26 is formed at the same time. Further, the source line 2, the source electrode 5, the drain electrode 6 and the drain extraction electrode 6 ′ are simultaneously formed by film formation, photolithography, and dry etching. Further, the n-type low resistance semiconductor layer 13 is continuously etched by source / drain separation, and the resist is peeled off. In this way, a thin film transistor (TFT) 14 is formed.

Next, a lower interlayer insulating film 20 made of SiNx having a thickness of about 3000 mm is formed by CVD using a mixed gas of SiH ₄ gas, NH ₃ gas, and N ₂ gas so as to cover the entire surface of the substrate. Thereafter, an upper organic layer insulating film 15 made of a positive photosensitive acrylic resin having a thickness of about 3 μm is formed on the contact hole 9, gate line external lead terminal contact pattern (X in FIG. 16), source line external lead terminal contact by photolithography. It forms so that it may have a pattern for use (Y of FIG. 17).

Next, in order to form the contact hole 9, the gate line external lead terminal 200, and the source line external lead terminal 300, the lower interlayer insulating film 20 and the gate insulating film 11 are formed of CF ₄ gas using the upper organic layer insulating film 15 as a mask. Etching is continuously performed by dry etching using a mixed gas of oxygen and O ₂ gas.
Thereafter, a transparent electrode is formed by sputtering so as to cover the entire surface of the substrate including the contact hole 9. Next, the pixel electrode 3 is obtained by patterning the transparent electrode formed by photolithography and wet etching and removing the resist.

Next, with reference to FIG. 10, the effect in this embodiment that the gate line 1 and the pixel electrode 3 do not leak when there is a film defect in the upper organic insulating film 15 will be described.
In the conventional active matrix substrate, when the upper interlayer insulating film is peeled off due to a foreign matter caught when the upper interlayer insulating film is formed by coating, or due to insufficient adhesion at the time of coating film forming, it is clear from the above manufacturing process. As described above, the lower interlayer insulating film and the gate insulating film are etched at the location where the upper interlayer insulating film is missing. Therefore, as shown in FIG. 12, the pixel electrode 103 and the gate line 101 come into contact with each other, and an electrical leak occurs, resulting in a pixel defect, which causes a reduction in display quality and yield.
However, in the present invention, since the protective semiconductor layer 26 is separately formed on the gate line 1, the gate line 1 can be protected from etching when etching using the upper interlayer insulating film 15 as a mask. The protective semiconductor layer 26 remains between the gate line 1 and the effect of suppressing pixel defects. Specifically, in the step of etching the lower interlayer insulating film 20 made of SiNx having a thickness of about 3000 mm and the gate insulating film 11 made of SiNx having a thickness of about 4000 mm, using the upper interlayer insulating film 15 as a mask, Although SiNx having a total thickness of about 7000 mm is etched, when the protective semiconductor layer 26 has a thickness of about 1500 mm and SiNx is etched by a mixed gas of CF ₄ gas and O ₂ gas, Since the etching selectivity with respect to the protective semiconductor layer 26 is about 1:10, the remaining film of the gate insulating film 11 can be sufficiently secured, and the contact between the gate line 1 and the pixel electrode 3 is sufficiently suppressed. can do.

In addition to the configuration of the second embodiment, the active matrix substrate (display device substrate) 30 of the present embodiment has a gate line (scanning line) when viewed from the direction perpendicular to the surface of the insulating substrate 10. At least the protective semiconductor layer 26 is disposed in the portion where the pixel electrode 3 and the pixel electrode 3 overlap. According to such a configuration, an increase in the load capacitance of the gate line 1 can be minimized. The increase in the load capacity of the gate line 1 can be suppressed as compared with the case where the protective semiconductor layer 26 is provided so as to completely cover the gate line 1.
In the first to third embodiments, the protective film 8 (protective semiconductor layer 26) is provided only on the gate line 1, but in the present invention, the protective film (similarly to the auxiliary capacitor line 7) ( By providing the protective semiconductor layer, an effect of preventing leakage between the auxiliary capacitance line 7 and the pixel electrode 3 can be obtained.

1 is a schematic cross-sectional view showing an example of a cross-sectional configuration of a liquid crystal display device of the present invention (Embodiment 1). 1 is a schematic plan view showing one pixel in an active matrix substrate (a substrate for a display device) according to the present invention (Embodiment 1). FIG. 3 is a cross-sectional view taken along line A-A ′ of the display device substrate illustrated in FIG. 2. FIG. 3 is a cross-sectional view taken along line B-B ′ of the display device substrate shown in FIG. 2. FIG. 6 is a schematic plan view showing one pixel in an active matrix substrate (display device substrate) of the present invention (Embodiment 2). It is arrow sectional drawing in the C-C 'line | wire of the display apparatus substrate shown in FIG. It is arrow sectional drawing in the D-D 'line | wire of the board | substrate for display apparatuses shown in FIG. FIG. 6 is a schematic plan view showing one pixel in an active matrix substrate (display device substrate) of the present invention (Embodiment 3). FIG. 9 is a cross-sectional view taken along line E-E ′ of the display device substrate shown in FIG. 8. FIG. 9 is a cross-sectional view taken along line F-F ′ of the display device substrate shown in FIG. 8. FIG. 11 is a schematic plan view showing a state in which an upper interlayer insulating film is peeled off and a pixel electrode and a gate line leak at a leak location 800 in a conventional active matrix substrate. It is a cross-sectional schematic diagram which shows the cross section of the leak location 800 cut | disconnected by the G-G 'line | wire in FIG. It is a plane schematic diagram which shows one pixel in the conventional active matrix substrate (thin-film transistor array substrate), and a part of pixel located adjacent to the pixel. It is arrow sectional drawing in the H-H 'line | wire of the board | substrate for display apparatuses shown in FIG. It is arrow sectional drawing in the I-I 'line | wire of the board | substrate for display apparatuses shown in FIG. It is a plane schematic diagram of the gate line external lead terminal of the display device substrate. It is a plane schematic diagram of the source line external lead terminal of the display device substrate.

Explanation of symbols

1: Gate line (scanning line)
2: Source line (signal line)
3: pixel electrode 4: gate electrode 5: source electrode 6: drain electrode 6 ′: drain extraction electrode 7: auxiliary capacitance line 8: protective film 9: contact hole 10: insulating substrate 11: gate insulating film 12: active semiconductor layer 13: Low resistance semiconductor layer 14: Thin film transistor (switching element)
15: Upper interlayer insulating film 20: Lower interlayer insulating film 25: Island-like semiconductor layer pattern 26: Protective semiconductor layer 30: Active matrix substrate (substrate for display device)
32: Liquid crystal layer 34: Color filter 35: Light shielding film 40: Liquid crystal display device 101: Gate line (scanning line)
102: Source line (signal line)
103: pixel electrode 104: gate electrode 105: source electrode 106: drain electrode 106 ′: drain extraction electrode 107: auxiliary capacitance line 109: contact hole 110: substrate 111: gate insulating film 112: active semiconductor layer 113: low resistance semiconductor layer 114: Thin film transistor (switching element)
115: Upper organic interlayer insulating film 120: Lower interlayer insulating film 125: Island-like semiconductor layer pattern 130: Active matrix substrate (display device substrate)
200: Gate line external extraction terminal 201: Uppermost layer electrode of gate line external extraction terminal 300: Source line external extraction terminal 301: Uppermost layer electrode of source line external extraction terminal

Claims (29)

A scanning line, a signal line, an auxiliary capacitance wiring, and a switching element are provided on an insulating substrate, an interlayer insulating film and a pixel electrode are further provided, and an interlayer insulating film is provided on the scanning line, the signal line, and the switching element. A substrate for a display device in which a pixel electrode is provided on an insulating film ,
The switching element is provided at an intersection where the scanning line and the signal line intersect, and includes a gate electrode connected to the scanning line, a source electrode connected to the signal line, and a drain electrode connected to the pixel electrode. Have
The interlayer insulating film has a contact hole for connecting the drain electrode of the switching element and the pixel electrode,
The display device substrate has a protective layer in a region in the substrate surface that is different from the region where the contact hole is arranged above the scanning line ,
The protective layer is for protecting against etching, is made of an insulating material , is provided in the lower layer of the interlayer insulating film or in the interlayer insulating film, and when viewed from the direction perpendicular to the surface of the insulating substrate And a display device substrate, wherein the display device substrate is disposed along at least a part of a portion where the scanning line and the pixel electrode overlap with each other so as not to follow the signal line . The display device substrate according to claim 1, wherein the protective layer has no contact hole. The protective layer, the display device substrate according to claim 1 or 2 scan lines is characterized in that to prevent the exposed through the contact hole. The protective layer, the display device substrate according to any one of claims 1 to 3, characterized in that those composed of silicon nitride. The protective layer, the display device substrate according to any one of claims 1 to 3, characterized in that those composed of silicon dioxide. The protective layer, the display device substrate according to any one of claims 1 to 3, characterized in that one which is made of a resin. The protective layer, the display device substrate according to any one of claims 1 to 6, characterized in that provided on the lower interlayer insulating film. The protective layer, the display device substrate according to any one of claims 1 to 6, characterized in that formed in the interlayer insulating film. The display device substrate has, on the gate insulating film, a display device substrate according to any one of claims 1 to 6, wherein the protective layer of the scanning lines are those provided. Substrate wherein the display device, the more upper layer of the scanning line, according to any one of claims 1 to 6, wherein the protective layer of the scan line so as to be in contact with the scanning line is one that was provided Substrate for display device. The display device substrate is provided with a protective layer made of a resin on an upper layer of a scanning line ,
The protective layer, the display device substrate according to any one of claims 1 to 3, 6, characterized in that it has a structure to protect individually the scanning lines one by one. The protective layer, when viewed from the direction perpendicular to the surface of the insulating substrate, any of claims 1 to 6 which overlap the scanning lines, and characterized in that it is arranged so as not to overlap with the signal line A substrate for a display device according to claim 1. The interlayer insulating film is made of an insulating film of at least two layers, and the display device substrate according to any one of claims 1 to 12, the uppermost insulating film is characterized in that an organic film. The protective layer, the display device substrate according to any one of claims 1 to 6, characterized in that it is positioned substantially directly above the scan line. 2. The display device substrate according to claim 1, wherein an auxiliary capacitance is formed by laminating an auxiliary capacitance line, a gate insulating film, and an electrode connected to a drain electrode of a switching element. 14. The display device substrate according to any one of 14 above. 16. The display device substrate according to claim 15, wherein the electrode connected to the drain electrode is a drain extraction electrode. The switching device, a display device substrate according to any one of claims 1 to 16, characterized in that a thin film transistor of inverted staggered structure. A manufacturing method for forming a substrate for a display device according to claim 13 ,
In the method for manufacturing a substrate for a display device, a step of simultaneously forming a scanning line, a gate electrode, and a storage capacitor line, a step of forming a gate insulating film, and a semiconductor layer constituting a switching element are formed on an insulating substrate. Process, signal line, source electrode and drain electrode are formed at the same time, switching element is formed, lower interlayer insulating film is formed, protective film is formed, and the uppermost organic film constituting the interlayer insulating film Forming a contact hole, an external lead terminal for a scanning line, and an external lead terminal for a signal line at the same time by etching using the uppermost organic film constituting the interlayer insulating film as a mask , and a pixel electrode. A method for manufacturing a substrate for a display device , comprising the steps of forming in this order . Display device characterized by comprising a display device for board according to any one of claims 1 to 17. A scanning line, a signal line, an auxiliary capacitance wiring, and a switching element are provided on an insulating substrate, an interlayer insulating film and a pixel electrode are further provided, and an interlayer insulating film is provided on the scanning line, the signal line, and the switching element. A substrate for a display device in which a pixel electrode is provided on an insulating film ,
The switching element is provided at an intersection where the scanning line and the signal line intersect, and includes a gate electrode connected to the scanning line, a source electrode connected to the signal line, and a drain electrode connected to the pixel electrode. Have
The interlayer insulating film has a contact hole for connecting the drain electrode of the switching element and the pixel electrode,
The display device substrate is provided with a protective layer above the scanning line ,
The protective layer is for protecting against etching, is made of a semiconductor , is provided in the lower layer of the interlayer insulating film or in the interlayer insulating film, and when viewed from the direction perpendicular to the surface of the insulating substrate. And a display device substrate, wherein the display device substrate is disposed along at least a part of a portion where the scanning line and the pixel electrode overlap with each other so as not to follow the signal line . 21. The display device substrate according to claim 20 , wherein the protective layer is provided under the interlayer insulating film. The protective layer, the display device substrate according to claim 20 or 21, characterized in that a substantially same composition as the semiconductor layer constituting the switching element. The display device substrate according to any one of claims 20 to 22 , wherein the protective layer is separated from a semiconductor layer constituting a switching element. The protective layer, when viewed from the direction perpendicular to the surface of the insulating substrate, in any one of claims 20-23, characterized in that disposed in a portion of at least the scanning line and the pixel electrode overlap The board | substrate for display apparatuses of description. The protective layer, when viewed from the direction perpendicular to the surface of the insulating substrate, any of claim 20 to 24 overlap with the scanning line, and characterized in that it is arranged so as not to overlap with the signal line A substrate for a display device according to claim 1. The display device substrate according to any one of claims 20 to 25 , wherein the interlayer insulating film includes at least two insulating films, and the uppermost insulating film is an organic film. A manufacturing method for forming a substrate for a display device according to claim 22 ,
The method for manufacturing a substrate for a display device includes a step of forming a scanning line, a gate electrode and an auxiliary capacitance wiring on an insulating substrate in the same step, a step of forming a gate insulating film, a protective layer, and a switching element. A step of simultaneously forming a semiconductor layer to be formed, a step of simultaneously forming a signal line, a source electrode and a drain electrode, a step of forming a switching element, a step of forming an interlayer insulating film, and a step of forming a contact hole in the interlayer insulating film And the manufacturing method of the board | substrate for display apparatuses characterized by having the process of forming a pixel electrode in this order . A manufacturing method for forming a display device substrate according to claim 26 , comprising:
The method for manufacturing a substrate for a display device includes a step of forming a scanning line, a gate electrode and an auxiliary capacitance wiring on an insulating substrate in the same step, a step of forming a gate insulating film, a protective layer, and a switching element. Forming a semiconductor layer, forming a signal line, a source electrode and a drain electrode at the same time, forming a switching element, forming a lower interlayer insulating film, and forming an uppermost organic layer constituting the interlayer insulating film Forming a film, etching using the uppermost organic film constituting the interlayer insulating film as a mask , and simultaneously forming a contact hole, an external lead terminal of a scanning line, and an external lead terminal of a signal line ; and a pixel electrode The manufacturing method of the board | substrate for display apparatuses characterized by having the process of forming in this order . Display device characterized by comprising a display device for board according to any one of claims 20-26.

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