JP4762162B2 - 感光性組成物除去液 - Google Patents

感光性組成物除去液 Download PDF

Info

Publication number
JP4762162B2
JP4762162B2 JP2007012437A JP2007012437A JP4762162B2 JP 4762162 B2 JP4762162 B2 JP 4762162B2 JP 2007012437 A JP2007012437 A JP 2007012437A JP 2007012437 A JP2007012437 A JP 2007012437A JP 4762162 B2 JP4762162 B2 JP 4762162B2
Authority
JP
Japan
Prior art keywords
photosensitive composition
mass
terpene hydrocarbon
composition
removing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007012437A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007219513A5 (https=
JP2007219513A (ja
Inventor
睦 船井
昌人 金田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP2007012437A priority Critical patent/JP4762162B2/ja
Publication of JP2007219513A publication Critical patent/JP2007219513A/ja
Publication of JP2007219513A5 publication Critical patent/JP2007219513A5/ja
Application granted granted Critical
Publication of JP4762162B2 publication Critical patent/JP4762162B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Filters (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP2007012437A 2006-01-23 2007-01-23 感光性組成物除去液 Active JP4762162B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007012437A JP4762162B2 (ja) 2006-01-23 2007-01-23 感光性組成物除去液

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006013920 2006-01-23
JP2006013920 2006-01-23
JP2007012437A JP4762162B2 (ja) 2006-01-23 2007-01-23 感光性組成物除去液

Publications (3)

Publication Number Publication Date
JP2007219513A JP2007219513A (ja) 2007-08-30
JP2007219513A5 JP2007219513A5 (https=) 2009-11-19
JP4762162B2 true JP4762162B2 (ja) 2011-08-31

Family

ID=38496804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007012437A Active JP4762162B2 (ja) 2006-01-23 2007-01-23 感光性組成物除去液

Country Status (1)

Country Link
JP (1) JP4762162B2 (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3693143B2 (ja) * 1997-12-26 2005-09-07 株式会社ジャパンエナジー ウエハ洗浄用組成物及びそれを用いた洗浄方法
JP5552214B2 (ja) * 2008-03-11 2014-07-16 キヤノン株式会社 焦点検出装置

Also Published As

Publication number Publication date
JP2007219513A (ja) 2007-08-30

Similar Documents

Publication Publication Date Title
JP4776731B2 (ja) 感光性組成物除去液
KR100944401B1 (ko) 감광성 조성물 제거액
TW201642053A (zh) 抗蝕劑除去液、抗蝕劑除去方法、再生半導體基板的製造方法
JP4596894B2 (ja) 感光性組成物除去液
JP4698435B2 (ja) 感光性組成物除去液
JP4762162B2 (ja) 感光性組成物除去液
CN101223483B (zh) 用于光敏性组合物的清除溶液
JP4698515B2 (ja) 感光性組成物除去液
JP4812453B2 (ja) 感光性組成物除去液
JP2010070724A (ja) 硬化性組成物除去液
US20090208887A1 (en) Removing solution for photosensitive composition

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091001

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091001

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101207

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110210

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110510

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110607

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140617

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4762162

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S801 Written request for registration of abandonment of right

Free format text: JAPANESE INTERMEDIATE CODE: R311801

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S801 Written request for registration of abandonment of right

Free format text: JAPANESE INTERMEDIATE CODE: R311801

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S801 Written request for registration of abandonment of right

Free format text: JAPANESE INTERMEDIATE CODE: R311801

ABAN Cancellation due to abandonment
R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350