JP4711182B2 - Linear motor armature and linear motor - Google Patents

Description

The present invention relates to a linear motor armature and a linear motor suitable for applications requiring ultra-precise positioning and high thrust, such as a stepper drive device related to semiconductor manufacturing and a table feed device of a machine tool.

Conventionally, a linear motor suitable for applications requiring ultra-precise positioning and high thrust, such as a semiconductor manufacturing-related stepper driving device and a machine tool table feeding device, is as shown in FIG. Patent Document 2).
FIG. 7 is a perspective view showing the entire configuration of a conventional linear motor, which is common to the present invention described later.
In FIG. 7, 1 is a linear motor, 2 is a stator, 3 is a field yoke, 4 is a permanent magnet, 5 is a mover, and 6 is a base.
The linear motor 1 includes a stator 2 and a mover 5. Of these, one stator 2 constitutes a field composed of a flat field yoke 3 and a plurality of permanent magnets 4 arranged on the field yoke 3 so as to have different polarities alternately. The other armature 5 is disposed opposite to the permanent magnet 4 via a magnetic gap, and constitutes an armature composed of a base 6 and an armature winding described later.
8 is a front sectional view showing a conventional linear motor along the line AA in FIG. 7, FIG. 9 is a side view of the armature constituting the mover in FIG. 7 as viewed from the direction C, and FIG. FIG. 11 is a detailed cross-sectional view taken along line B-B of FIG.
8 to 11, 6a is a recess, 7 is an armature winding, 7a and 7b are molded coils, 8 is a wiring board, 9 is a mold resin, and 10 is a center block.
The armature winding 7 has a configuration in which formed coils 7a and 7b formed by forming a plurality of concentrated coil groups into a flat plate shape are arranged in two rows and aligned. The molded coils 7a and 7b and the armature exterior are electrically connected by the wiring board 8, and are fixed to both surfaces along the longitudinal direction. Then, one end of the armature winding 7 aligned on the connection board 8 is fixed to the recess 6 a of the base 6.
In such a configuration, when positioning the formed coils 7 a and 7 b, a plurality of formed coils 7 a and 7 b are fitted around the center block 10 provided in advance on the connection board 8, and soldered between the connection boards 8. We carry out by doing. Then, the connected wiring board 8 is fitted into the recess 6a of the base 6 and the outer periphery of the base 6 and the wiring board 8 is filled and fixed with a mold resin 9 in order to fix the wiring board 8 and protect the insulation. In the example shown in the figure, the armature is composed of one connection board 8, 12 center blocks 10, six formed coils 7a, and six formed coils 7b. At this time, the formed coil 7a and the formed coil 7b are formed. The coil 7b is arranged with a position shifted by an amount of δ = α × n for the purpose of reducing thrust ripple.
However, α is a shift amount of the coil position, which corresponds to a phase difference of a basic electrical angle of 60 °, and is expressed by α = A / 4 when the coil pitch is A (mm). N is a natural number.
A three-phase alternating current corresponding to the electrical relative position is caused to flow through the forming coil 7a and the forming coil 7b to the armature thus configured, thereby acting on a magnetic field created by a permanent magnet (not shown) and Thrust is generated in a field yoke (not shown).
JP 2001-231246 A JP 2004-88844 A

However, when the amount of the mold resin relative to the size of the linear motor armature, that is, the weight ratio (density) of the mold resin per unit volume of the armature is relatively large, the conventional technology has a unique characteristic of the linear motor armature itself. There was a problem that the frequency could not be increased. For this reason, it is very difficult to perform stable high-speed positioning control by oscillating during actual operation.
The present invention has been made in view of such problems, and employs a plurality of non-metallic columns and connecting bars having a high longitudinal elastic modulus / density ratio, and a plurality of non-ferrous metals having the same cross-sectional shape. It is an object of the present invention to provide a linear motor armature and a linear motor that can perform stable high-speed positioning control by adopting a column and a connecting bar that have a high natural frequency of the linear motor armature itself.

In order to solve the above-mentioned problem, the invention according to claim 1 relates to a linear motor armature, wherein a plurality of coil groups formed in a flat plate shape on both sides of a connection board are arranged in two rows and aligned. Armature windings and a base for fixing one end of the armature windings aligned on the wiring board, and between the formed coils in each row of the armature windings In addition, a plurality of struts made of a non-metallic material or a non-ferrous metal material having the same cross-sectional shape are provided, and the struts are arranged at a pitch P expressed by the following formula.
P = A × N + α × n
Where A is the coil pitch, N is the number of coils entering between the columns in the same row and is a natural number excluding 0, and α is the basic shift amount of the coil position of each armature winding row, for reducing thrust ripple The electrical angle is 60 ° (α = A / 4), and n is a natural number.
According to a second aspect of the present invention, in the linear motor armature according to the first aspect, one end of the plurality of support columns is fixed to the base, and a connection bar for connecting the support columns to the other end is provided and fixed. It is characterized by that.
According to a third aspect of the present invention, there is provided the linear motor armature according to the first or second aspect, a field yoke disposed opposite to both sides of the armature via a magnetic gap, and alternately on the field yoke. And a plurality of permanent magnets arranged side by side with different polarities so that either one of the field and the armature serves as a stator and the other serves as a mover. It features a linear motor.

According to the first and second aspects of the present invention, by using a support column and a connection bar formed of a material having a high longitudinal elastic modulus / density ratio, the connection board portion is used for positioning and fixing, ensuring insulation and protecting. The amount of the mold resin can be made relatively smaller than that of the conventional linear motor armature to increase the natural frequency of the linear motor armature itself.
As a result, stable high-speed positioning control can be performed.
In particular, when non-ferrous metal columns are used, problems such as eddy current loss occur compared to non-metallic columns. However, by making the column cross-sectional shape the same, eddy current loss is reduced. I can do it.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows a linear motor armature according to a first embodiment of the present invention, wherein (a) corresponds to a front sectional view taken along line AA in FIG. 7, and (b) is a side view of (a). 2 is a plan sectional view taken along line BB of the armature of FIG. 1B, and FIG. 3 is a detailed view of a portion D of FIG. In addition, about the same component as this invention, the same code | symbol is attached | subjected and the description is abbreviate | omitted, and only a different point is demonstrated.

The present invention is different from the prior art as follows.
That is, a plurality of columns 11a, 11b, and 11c made of a non-metallic material are provided between the formed coils 7a and 7b in each row of the armature windings 7, and the columns are arranged at a pitch P expressed by the following formula. This is the point that I tried to do.
P = A × N + α × n
Where A is the coil pitch, N is the number of coils entering between the columns in the same row and is a natural number excluding 0, and α is the basic shift amount of the coil position of each armature winding row, for reducing thrust ripple The electrical angle is 60 ° (α = A / 4), and n is a natural number.
In addition, the connection board 8 for electrically connecting the formed coils 7a and 7b is divided into two parts in the axial direction, and is provided so that the support is disposed between one side surface of the two connection boards 8 and both the boards. Yes. Here, FIG. 1B shows a state in which the two connection boards 8 are partitioned by the support 11b. In this case, the coil pitch B of the adjacent coils is represented by B = A + α × n.
In addition, one end of the plurality of columns 11a, 11b, and 11c is fixed to the base 6 and a connection bar 12 for connecting the column to the other end is provided and fixed.
The plurality of support pillars 11a, 11b, and 11c are preferably made of ceramics having a mechanical characteristic in which the ratio of the longitudinal elastic modulus to the design density is 30 (GPa / (g / cm ³ )) or more. The cross-sectional shape is not necessarily constant.

Next, assembly of the linear motor will be described.
In this embodiment, it is composed of two connection boards 8, twelve center blocks 10, six molded coils 7a, and six molded coils 7b. A plurality of wiring boards 8 are prepared, and a plurality of formed coils 7a and 7b formed in a flat plate shape are fitted around a center block 10 provided in advance on the wiring board 8, and each coil and the wiring board 8 are soldered. After that, the columns 11a, the columns 11b, and the columns 11c, which are made of metal members, are arranged in the axial direction of the two connection substrates 8 that are connected to each other and between one side surface of the two connection substrates 8 and the two substrates. In this way, the wiring board 8 and the columns 11 a, 11 b, 11 c are fitted into the recess 6 a of the base 6. Then, the connecting bar 12 is fixed to the tips of the columns 11a, 11b, and 11c, and the mold resin 9 is filled between the outer periphery of the base 6 and the wiring board 8 and fixed.

Next, the operation will be described.
The linear motor armature configured in this way acts on a magnetic field generated by a permanent magnet (not shown) by causing a three-phase alternating current corresponding to the electrical relative position to flow through the molded coil 7a and the molded coil 7b, and thereby the armature. On the other hand, a thrust is generated in a field yoke (not shown).
Since the first embodiment of the present invention has the above-described configuration, it is used for the purpose of positioning and fixing the wiring board portion, ensuring insulation, and protecting by adopting columns and connecting bars made of a material having a high longitudinal elastic modulus / density ratio. The amount of mold resin that is used is relatively smaller than the conventional size of the linear motor armature, and the natural frequency of the linear motor armature itself can be increased, resulting in stable high-speed positioning control. Can be done.

Next, a second embodiment of the present invention will be described.
4 is a side view of the linear motor armature according to the second embodiment of the present invention as seen from the direction of arrow C in FIG. 7, and FIG. 5 is a cross-sectional view along the line BB of the armature in FIG. FIG. 6 and FIG. 6 show detailed views of part D in FIG.
The second embodiment is different from the first embodiment as follows.
That is, a plurality of struts 11a, struts 11b, and struts 11c having the same cross-sectional shape made of a non-ferrous metal material (for example, an aluminum alloy) are provided between the forming coils 7a and 7b in each row of the armature windings 8. It is.
Note that the pitch P of the columns disposed between the formed coils and the other end of the column are fixed by the connecting bar are the same. Since the assembly method and operation are the same as those in the first embodiment, description thereof is omitted.

  Since the second embodiment of the present invention has the above-described configuration, there is no problem such as eddy current loss when the support is made of non-metal, but there is a problem such as eddy current loss when the support is made of non-ferrous metal. By making the cross-sectional shapes of the columns the same, eddy current loss can be reduced.

1 is a linear motor armature showing a first embodiment of the present invention, wherein (a) corresponds to a front sectional view taken along the line AA in FIG. 7, and (b) corresponds to a side view of (a). thing, FIG. 1B is a cross-sectional plan view taken along line BB of the armature in FIG. FIG. 3 shows a detailed view of part D in FIG. 2. A linear motor armature showing a second embodiment of the present invention, a side view seen from the direction C of the arrow in FIG. FIG. 4 is a cross-sectional plan view taken along line BB of the armature of FIG. FIG. 5 shows a detailed view of part D of FIG. The perspective view which shows the whole linear motor common structure with the past and this invention, Front sectional view showing a conventional linear motor along line AA in FIG. The side view which looked at the armature which comprises the needle | mover of FIG. 7 from the arrow C direction, FIG. 9 is a cross-sectional plan view taken along line BB of the armature of FIG. Detailed view of part D in FIG. 10

1 linear motor,
2 Stator,
3 Field yoke,
4 Permanent magnet,
5 Mover,
6 base,
7 Armature winding,
7a, 7b molded coil,
8 Connection board,
9 Mold resin,
10 Center block,
11a, 11b, 11c struts,
12 connecting bar,
P Pitch pitch (P = A × N + α × n),
A coil pitch,
N Number of coils (natural number) placed between each support,
α Basic displacement of the coil position (α = A / 4)

Claims (3)

  An armature winding formed by arranging a plurality of coil groups formed in a flat plate shape on both sides of the wiring board and arranged in two rows, and one end of the armature winding aligned on the wiring board are fixed. Armature composed of a base and
  A plurality of columns made of a non-metallic material or a non-ferrous metal material having the same cross-sectional shape are provided between the formed coils in each row of the armature windings, and the columns are arranged at a pitch P represented by the following formula: A linear motor armature characterized by the above.
      P = A × N + α × n
Where A is the coil pitch, N is the number of coils entering between the columns in the same row and is a natural number excluding 0, and α is the basic shift amount of the coil position of each armature winding row, to reduce thrust ripple. The electrical angle is 60 ° (α = A / 4), and n is a natural number. 2. The linear motor armature according to claim 1, wherein one end of each of the plurality of support columns is fixed to the base and a connection bar for connecting the support columns to the other end is provided and fixed.   The linear motor armature according to claim 1 or 2,
  A field yoke comprising opposing field yokes arranged on both sides of the armature via magnetic air gaps, and a plurality of permanent magnets arranged alternately on the field yoke so as to have different polarities; ,
  A linear motor characterized in that either one of the field magnet or the armature travels relatively as a stator and the other as a mover.

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