JP5527426B2 - Linear motor - Google Patents

Description

  The disclosed embodiment relates to a linear motor.

  Conventionally, for example, a linear motor is used to perform table feed of an FA device such as a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, an electronic component mounting machine, or a machine tool with high accuracy. As an example of the linear motor, there is a linear motor described in Patent Document 1. In the linear motor disclosed in Patent Document 1, a permanent magnet is inserted in the center of a tooth in a configuration including an armature having a tooth, an armature winding, and a salient pole having a salient pole, or the tip of the tooth. A permanent magnet is disposed in

Special table 2009-509490

  However, the linear motor has insufficient thrust.

  One aspect of the embodiment aims to provide a linear motor capable of increasing thrust.

A linear motor according to an aspect of an embodiment includes an armature core having teeth, an armature having armature windings, and a salient pole having salient poles. The armature has a permanent magnet disposed on a gap surface facing the salient pole. When the tooth pitch is τ, the magnetic pole pitch of the permanent magnet is λp, the salient pole pitch is λt, and the natural numbers are k and n, the following equation is satisfied.
3k / λp + n / τ = 6k / λt

  According to one aspect of the embodiment, a linear motor capable of increasing the thrust of the linear motor can be provided.

FIG. 1 is a cross-sectional view of a linear motor showing a first embodiment. FIG. 2 is a cross-sectional view illustrating a method for assembling the mover according to the first embodiment. FIG. 3 is a cross-sectional view of the linear motor showing the second embodiment. FIG. 4 is a cross-sectional view of a linear motor showing the third embodiment. FIG. 5 is a sectional view of the mover of the linear motor showing the fourth embodiment. FIG. 6 is a cross-sectional view of the mover of the linear motor showing the fifth embodiment. FIG. 7 is an explanatory diagram of a method for assembling the mover according to the sixth embodiment. FIG. 8 is a cross-sectional view of a linear motor showing the seventh embodiment. FIG. 9 is a cross-sectional view of a linear motor showing the eighth embodiment.

  Hereinafter, some embodiments of a linear motor disclosed in the present application will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by these embodiment shown below. In addition, about the same structure in this invention, the duplicate description is abbreviate | omitted suitably by attaching | subjecting the same code | symbol.

<First Embodiment>
First, the configuration of the linear motor according to the first embodiment will be described with reference to FIG. FIG. 1 is a cross-sectional view of the linear motor according to the first embodiment.

  As shown in FIG. 1, the linear motor includes a mover 100 and a stator 200. The mover 100 and the stator 200 face each other with a gap (gap) G interposed therebetween. The mover 100 is guided and supported by a linear motion bearing (not shown) via the stator 200 and the gap G so that the mover 100 can move relative to the stator 200 in the left-right direction on the paper surface.

  The mover 100 includes an armature 110 and a plurality of permanent magnets 120 arranged on the gap G side facing the stator 200. The armature 110 includes an armature core 111, an armature winding 112, and a mold resin 113. In the armature core 111, comb-like teeth 114 are formed at equal intervals in a direction orthogonal to the longitudinal direction of the yoke portion (yoke). A slot 115 for accommodating the armature winding 112 is formed between the teeth 114. A three-phase armature winding 112 is concentratedly wound around the teeth 114. The entire armature core 111 and the armature winding 112 are integrally fixed by a mold resin 113. The armature core 111 is a soft magnetic material, and for example, a laminated silicon steel plate or an SMC core (a core formed by compression molding fine iron powder) is used.

  On the gap surface (surface on the gap G side) of the armature 110, a plurality of permanent magnets 120 magnetized in the direction of the arrow (N-pole → S-pole) are arranged side by side so as to be different from each other. . Here, the permanent magnet 120 is disposed not only at the tips of the teeth 114 but also at the tips of the openings of the slots 115 formed between the plurality of teeth 114.

  The stator 200 is configured as a salient pole piece 210. The salient pole 210 has a tooth-like salient pole 211 formed on the gap surface (the surface on the gap G side). The salient pole 210 is made of a soft magnetic material. As the soft magnetic material, for example, a laminated silicon steel plate, an SMC core, 3% Si iron, or an iron structural material is used.

  Here, when the pitch of the teeth 114 is τ, the pitch of the magnetic poles of the permanent magnet 120 is λp, the pitch of the salient pole 211 is λt, and the natural numbers are k and n, 3k / λp + n / τ = 6k / λt is satisfied. Each pitch is set.

  In the linear motor of the first embodiment, τ = 10 mm, λp = 7.5 mm, λt = 9 mm, k = 3, and n = 8. If these numerical values are substituted into the above equation, the left side = (3 × 3 / 7.5) + (8/10) = 2 and the right side = (6 × 3/9) = 2, which satisfies the above equation. The armature winding 112 is concentratedly wound on all nine teeth 114, and the armature 110 forms a winding magnetic flux of 8 poles per 9 teeth.

  In the linear motor configured as described above, the winding magnetic flux of the armature 110 is superimposed on the magnetic flux of the permanent magnet 120 to form a traveling magnetic field of 10 poles per 9 teeth. Thrust is generated between the traveling magnetic field and the ten salient poles 211 of the salient poles 210, and the mover 100 moves in the left-right direction with respect to the stator 200.

  Next, a method for assembling the linear motor according to the first embodiment will be described with reference to FIG. FIG. 2 is a cross-sectional view illustrating a method for assembling the mover according to the first embodiment.

  As shown in FIG. 2, the armature 100 is assembled in the procedure of first assembling the armature 110 and then attaching the permanent magnet 120 to the armature 110. In the armature 110, an armature winding 112 in which copper wires are concentrated and wound in advance at a high density is inserted into a tooth 114 having a wide opening of a slot 115, and then an armature core 111 and an armature winding are formed by a mold resin 113. The whole is molded to include the line 112. The gap surface of the armature 110 after molding is formed flat by the tip of the tooth 114 and the mold resin 113 filled in the tip of the opening of the slot 115.

  Thereafter, a plurality of permanent magnets 120 are bonded and attached to the gap surface of the armature 110. As shown in FIG. 2, a plurality of permanent magnets 120 may be integrated in advance and then attached to the gap surface of the armature 110, or the permanent magnets 120 may be attached to the gap surface of the armature 110 one by one. Since the permanent magnet 120 is adhered to the flat gap surface of the armature 110, the permanent magnet 120 can be firmly attached and can be arranged with high accuracy. Further, the permanent magnet 120 may be attached by fastening it to a part of the armature 110 with a bolt or the like using another member (not shown) used when integrating the plurality of permanent magnets 120 in advance. good.

  As described above, in the linear motor according to the present embodiment, the armature winding 112 concentrated and densely wound is housed in the slot 115, and the permanent magnet 120 is provided not only at the tip of the tooth 114 but also at the slot 115. It is also arranged at the tip of the opening. Therefore, in the linear motor according to the first embodiment, the number of turns of the armature winding 112 and the gap magnetic flux density due to the permanent magnet 120 increase, so that the thrust can be increased. Furthermore, since it is only necessary to arrange the permanent magnet 120 later on the flat gap surface of the armature 110 that has been previously assembled, the assembly can be greatly facilitated and an inexpensive linear motor can be provided. .

Second Embodiment
The linear motor according to the first embodiment has been described above. Next, a linear motor according to a second embodiment will be described with reference to FIG. FIG. 3 is a cross-sectional view of the linear motor according to the second embodiment.

  The linear motor according to the second embodiment is the same as the linear motor according to the first embodiment except for the pitch of the teeth 114, the pitch of the magnetic poles of the permanent magnet 120, and the pitch of the salient poles 211. Therefore, in the following, for convenience of explanation, repeated explanation will be omitted as appropriate, and description will be made centering on differences from the first embodiment.

  In the linear motor according to the second embodiment, when the pitch of the teeth 114 is τ, the pitch of the magnetic poles of the permanent magnet 120 is λp, the pitch of the salient poles 211 is λt, and the natural numbers are k and n, 3k / λp + n / τ Each pitch is set to satisfy = 6 k / λt. In the linear motor of the second embodiment, τ = 10 mm, λp = 6.667 mm, λt = 8.571 mm, k = 2, and n = 5. If these numerical values are substituted into the above equation, the left side = (3 × 2 / 6.667) + (5/10) = 1.4 and the right side = (6 × 2 / 8.571) = 1.4. Meet. The armature winding 112 is concentratedly wound every other tooth 114, and the armature 110 forms a winding magnetic flux of 5 poles per 6 teeth.

  In the linear motor configured as above, the winding magnetic flux of the armature 110 is superimposed on the magnetic flux of the permanent magnet 120 to form a traveling magnetic field of 7 poles per 6 teeth. Thrust is generated between the seven-pole traveling magnetic field and the seven salient poles 211 of the salient poles 210, and the mover 100 moves in the left-right direction with respect to the stator 200.

  As described above, in the linear motor according to the second embodiment, similarly to the first embodiment, the armature winding 112 concentrated and densely wound is housed in the slot 115 and the permanent magnet 120 is inserted into the teeth. It is arranged not only at the tip of 114 but also at the tip of the opening of slot 115. Therefore, in the linear motor according to the second embodiment, the number of turns of the armature winding 112 and the gap magnetic flux density due to the permanent magnet 120 increase, so that the thrust can be increased. Also, since the assembly method is performed in the same manner as in the first embodiment, the assembly can be facilitated.

<Third Embodiment>
The linear motor according to the second embodiment has been described above. Next, a linear motor according to a third embodiment will be described with reference to FIG. FIG. 4 is a cross-sectional view of the linear motor according to the third embodiment.

  The linear motor according to the third embodiment differs from the linear motor according to the first and second embodiments in that the pitch of the teeth 114, the pitch of the magnetic poles of the permanent magnet 120, and the pitch of the salient poles 211 are the same. Yes. Therefore, in the following, for convenience of explanation, overlapping explanation will be omitted as appropriate, and explanation will be made focusing on differences from the first and second embodiments.

  In the linear motor according to the third embodiment, when the pitch of the teeth 114 is τ, the pitch of the magnetic poles of the permanent magnet 120 is λp, the pitch of the salient poles 211 is λt, and the natural numbers are k and n, 3k / λp + n / τ Each pitch is set so as to satisfy = 6 k / λt. In the linear motor of the third embodiment, τ = 10 mm, λp = 10 mm, λt = 8.571 mm, k = 1, and n = 4. When these numerical values are substituted into the above equation, the left side = (3 × 1/10) + (4/10) = 0.7 and the right side = (6 × 1 / 8.571) = 0.7, which satisfies the above equation. . The armature winding 112 is concentratedly wound on all six teeth 114, and the armature 110 forms a winding magnetic flux of 8 poles per 6 teeth.

  In the linear motor configured as above, the winding magnetic flux of the armature 110 is superimposed on the magnetic flux of the permanent magnet 120 to form a traveling magnetic field of 7 poles per 6 teeth. Thrust is generated between the traveling magnetic field and the seven salient poles 211 of the salient poles 210, and the mover 100 moves in the horizontal direction of the paper with respect to the stator 200.

  As described above, in the linear motor according to the third embodiment, similarly to the first and second embodiments, the armature winding 112 concentrated and densely wound is housed in the slot 115 and the permanent magnet 120. Is arranged not only at the tip of the tooth 114 but also at the tip of the opening of the slot 115. Therefore, in the linear motor according to the third embodiment, the number of turns of the armature winding 112 and the gap magnetic flux density due to the permanent magnet 120 increase, so that the thrust can be increased. Also, since the assembly method is the same as in the first and second embodiments, the assembly can be facilitated.

<Fourth embodiment>
The linear motor according to the third embodiment has been described above. Next, a linear motor according to a fourth embodiment will be described with reference to FIG. FIG. 5 is a cross-sectional view of the mover of the linear motor according to the fourth embodiment.

  The linear motor according to the fourth embodiment is configured in the same manner except that the armature core 111 is different from the linear motor according to the first embodiment. Therefore, in the following, for convenience of explanation, overlapping explanation will be omitted as appropriate, and explanation will be made centering on differences from the first embodiment.

  In the linear motor according to the fourth embodiment, the armature 110 is configured using the armature divided core 131 divided for each tooth 114. The assembly of the armature 110 is performed by winding the armature windings 112 in a concentrated manner on the teeth 114 of the armature split core 131 alone, and then arranging all the armature split cores 131 to which the armature windings 112 have been placed. The whole is molded with the resin 113. Thereafter, the permanent magnet 120 is attached as in the first embodiment. Further, unlike the first embodiment, the tip of the tooth 114 is provided with a hook so as to narrow the tip of the opening of the slot 115.

  As described above, in the linear motor according to the fourth embodiment, the number of turns of the armature winding 112 is increased using the armature split core 131. Furthermore, in the linear motor according to the fourth embodiment, the tip of the opening of the slot 115 is narrowed by the flange of the tip of the tooth 114 so that the magnetic flux interlinked with the armature winding 112 is collected. Therefore, the thrust can be increased.

<Fifth Embodiment>
The linear motor according to the fourth embodiment has been described above. Next, a linear motor according to a fifth embodiment will be described with reference to FIG. FIG. 6 is a cross-sectional view of the mover of the linear motor according to the fifth embodiment.

  The linear motor according to the fifth embodiment is the same as the linear motor according to the first embodiment except that the magnetic poles of the permanent magnet 120 are the same. Therefore, in the following, for convenience of explanation, overlapping explanation will be omitted as appropriate, and explanation will be made centering on differences from the first embodiment.

  In the linear motor according to the fifth embodiment, two types of permanent magnets, that is, a main magnetic pole permanent magnet 121 and a sub magnetic pole permanent magnet 122 are used as the permanent magnet 120. In the main magnetic pole permanent magnet 121, the armature 110 is magnetized in a direction perpendicular to the gap surface facing the salient pole 211. The sub magnetic pole permanent magnet 122 is magnetized in the moving direction of the mover 100 orthogonal to the direction of the magnetic pole of the main magnetic pole permanent magnet 121. The main magnetic pole permanent magnet 121 and the sub magnetic pole permanent magnet 122 are alternately arranged to form a so-called Halbach array structure.

  As described above, the linear motor according to the fifth embodiment has a Halbach array structure using the main magnetic pole permanent magnet 121 and the sub magnetic pole permanent magnet 122 as the permanent magnet 120, so that the gap magnetic flux density by the permanent magnet 120 is increased. The thrust can be further increased.

<Sixth Embodiment>
The linear motor according to the fifth embodiment has been described above. Next, a linear motor according to a sixth embodiment will be described with reference to FIG. FIG. 7 is a cross-sectional view illustrating a method for assembling the mover according to the sixth embodiment.

  The linear motor according to the sixth embodiment is configured in the same manner except that the assembly method of the mover 100 is different from that of the linear motor according to the first embodiment. Therefore, in the following, for convenience of explanation, overlapping explanation will be omitted as appropriate, and explanation will be made centering on differences from the first embodiment.

  The assembly of the mover 100 of the linear motor according to the sixth embodiment is performed by the procedure of attaching the permanent magnet 120 to the tip of the tooth 114 and the tip of the opening of the slot 115 and then molding the whole with the mold resin 113.

  As described above, in the linear motor according to the sixth embodiment, since the armature 110 and the permanent magnet 120 are integrally molded with the mold resin 113, the permanent magnet 120 can be firmly fixed and assembled. Can be made much easier and an inexpensive linear motor can be provided.

<Seventh embodiment>
The linear motor according to the sixth embodiment has been described above. Next, a linear motor according to a seventh embodiment will be described with reference to FIG. FIG. 8 is a cross-sectional view of the linear motor according to the seventh embodiment.

  Unlike the linear motor according to the first embodiment, the linear motor according to the seventh embodiment is configured in the same manner as the linear motor according to the first embodiment except that the mover 100 is provided on both the left and right sides of the stator 200 '. Therefore, in the following, for convenience of explanation, overlapping explanation will be omitted as appropriate, and explanation will be made centering on differences from the first embodiment. Here, the vertical direction on the paper surface is the horizontal direction.

  In the linear motor according to the seventh embodiment, the two movers 100 are arranged facing left and right, and the movers 100 are connected (not shown) in the depth direction of the drawing. A stator 200 ′ having salient poles 210 ′ with gap surfaces provided on the left and right sides is disposed between the movers 100 (so-called magnetic flux penetrating structure). The configurations of the armature 110 and the permanent magnet 120 are the same as those in the first embodiment. The salient pole 210 'is configured by arranging salient poles 211 symmetrically.

  As described above, in the linear motor according to the seventh embodiment, since the mover 100 is disposed on both the left and right sides of the stator 200 ′, the magnetic attractive force generated between the mover 100 and the stator 200 ′. Can be offset. By canceling out the magnetic attractive force, the load on the linear motion bearing can be reduced, and the running life of the linear motion bearing can be increased. Therefore, even in a linear motor that cancels out the magnetic attractive force, the thrust can be increased, the assembly can be facilitated, and an inexpensive linear motor can be provided.

<Eighth Embodiment>
The linear motor according to the seventh embodiment has been described above. Next, a linear motor according to an eighth embodiment will be described with reference to FIG. FIG. 9 is a cross-sectional view of a linear motor according to the eighth embodiment. Here, the vertical direction on the paper surface is the horizontal direction.

  The linear motor according to the eighth embodiment is configured in the same manner as the linear motor according to the first embodiment, except that the stator 200 is provided on both the left and right sides of the mover 100 '. Therefore, in the following, for convenience of explanation, overlapping explanation will be omitted as appropriate, and explanation will be made centering on differences from the first embodiment.

  In the linear motor according to the eighth embodiment, the two stators 200 are arranged to face each other in the left-right direction, and the stators 200 are connected (not shown) in the depth direction of the drawing. A mover 100 ′ having an armature 110 ′ with gap surfaces provided on the left and right is disposed between the stators 200 (so-called magnetic flux penetrating structure). The configuration of the salient pole 210 of the stator 200 is the same as that of the first embodiment. On the other hand, in the armature 110 ′ of the mover 100 ′, the armature winding 112 is mounted on the armature core 111 ′ provided with the teeth 114 on the left and right, and the armature core 111 ′ and the armature winding 112 are connected to each other. It is integrated with the mold resin 113. Then, permanent magnets 120 are attached to the left and right gap surfaces of the armature 110 '.

  As described above, in the linear motor according to the eighth embodiment, since the stator 200 is disposed on both the left and right sides of the mover 100 ′, the magnetic attraction force generated between the mover 100 ′ and the stator 200. Can be offset. By canceling out the magnetic attractive force, the load on the linear motion bearing can be reduced, and the running life of the linear motion bearing can be increased. Therefore, even in a linear motor that cancels out the magnetic attractive force, the thrust can be increased, and an inexpensive linear motor that is easy to assemble can be provided.

  The first embodiment to the eighth embodiment have been described above, but further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. For example, the first embodiment to the eighth embodiment can be used in appropriate combination.

For example, in the above-described embodiment, the configuration in which the permanent magnets 120 are arranged without gaps has been described as an example. However, gaps can be opened to such an extent that the gap magnetic flux density is not significantly reduced.
In addition, it is possible to put a soft magnetic material in the gap between the permanent magnets 120 because the permanent magnet 120 does not change the magnetic poles.
In addition, the configuration in which the magnetization direction of the sub magnetic pole permanent magnet 122 is the moving direction of the mover 100 has been described as an example. However, the sub magnetic pole permanent magnet 122 is configured in two directions of the moving direction and the diagonal direction. It is also possible.
In addition, the configuration in which the opening end of the slot 115 is greatly opened or narrowed has been described as an example, but a configuration in which the tip of the tooth 114 is brought into contact with or connected to the tip without opening is also possible.
Moreover, although the armature core 111 shown in the first embodiment to the third embodiment is divided, the fourth embodiment has been described by using the example of the armature divided core 131 that is divided for each tooth. As a dividing method, it is possible to appropriately change the division for each part of the tooth and the yoke, the division only for the teeth without providing the yoke itself, or the connection of the armature division core 131 only at one place. It is.
In the first embodiment, k = 3 and n = 8 have been described as an example. However, if k = 3, it is possible to set n = 10 or take other values.
In the second embodiment, the case of k = 2 and n = 5 has been described as an example. However, if k = 2, it is possible to set n = 7 in particular or take other values.
In the third embodiment, the case where k = 1 and n = 4 has been described as an example. However, if k = 1, it is possible to set n = 2 in particular or take other values.
In this embodiment, an example of a linear motor in which the armature is a mover, the salient pole is a stator, and the armature moves relative to the salient pole is described. A reverse configuration in which a pole is a movable element may be used.

100, 100 'mover 110, 110' armature 111, 111 'armature core 131 armature split core 112 armature winding 113 mold resin 114 teeth 115 slot 120 permanent magnet 121 main magnetic pole permanent magnet 122 sub magnetic pole permanent magnet 200 , 200 'stator 210, 210' salient pole 211 salient pole

Claims (9)

An armature including an armature core having teeth and an armature winding;
A salient pole having a salient pole,
The armature has a permanent magnet arranged on a gap surface facing the salient pole,
A linear motor in which each pitch satisfies the following formula, where τ is the tooth pitch, λp is the magnetic pole pitch of the permanent magnet, λt is the salient pole pitch, and k and n are natural numbers.
3k / λp + n / τ = 6k / λt The armature is
2. The linear motor according to claim 1, wherein the permanent magnet is disposed on the gap surface including a tip of the teeth and a tip of an opening of a slot formed between the teeth. The armature is
The linear motor according to claim 1, wherein the permanent magnet is disposed on the gap surface formed flat by molding with a molding resin. The armature is
The linear motor according to claim 1, wherein the permanent magnet is integrated with the permanent magnet by molding with a mold resin in a state where the permanent magnet is disposed on the gap surface.   The said permanent magnet is comprised by the Halbach arrangement | sequence structure comprised from the main magnetic pole permanent magnet magnetized in the perpendicular | vertical direction, and the sub magnetic pole permanent magnet magnetized so that it may differ from the direction of the magnetic pole of the said main magnetic pole permanent magnet. Item 3. The linear motor according to item 1 or 2.   The linear motor according to claim 1, wherein the two natural numbers are k = 3, n = 8, or n = 10.   The linear motor according to claim 1, wherein the two natural numbers are k = 2, n = 5, or n = 7.   The linear motor according to claim 1, wherein the two natural numbers are k = 1, n = 2, or n = 4. One of the armature and the salient pole provided with the permanent magnet is a mover, and the other is a stator.
2. The mover according to claim 1, wherein the mover is disposed on one side of the stator, the mover is disposed on both left and right sides of the stator, or the stator is disposed on both left and right sides of the mover. Linear motor.

Images