JP4710498B2 - High frequency power supply conductor - Google Patents

Description

  The present invention relates to a high-frequency power supply conductor for supplying a high-frequency current in an induction heating apparatus or the like, and particularly when a load is in a vacuum container and a high-frequency power source is on the atmosphere side, such as a vacuum induction heating furnace. The present invention relates to a high-frequency power supply conductor that is hermetically inserted.

  Conventionally, Patent Document 1 discloses a vacuum induction melting furnace that melts a metal material by induction heating in a vacuum. This is because a metal material is housed in a crucible in a vacuum vessel, and a high-frequency current is passed through a high-frequency power supply conductor in which the vacuum vessel is hermetically inserted into an induction heating coil provided around the crucible. A metal material is dissolved by induction heating. The high-frequency power supply conductor and the induction heating coil are hollow and tubular, and are cooled by passing cooling water through them.

Other prior art document information includes Patent Documents 2 to 4.
JP 2867429 A JP-A-6-29086 JP-A-11-257867 Japanese Patent Laid-Open No. 2004-108725

  In the above-described conventional high-frequency power supply conductor, since a high-frequency current flows, the current is collected on the surface by the skin effect of the high-frequency current. However, since the cross-section of the high-frequency power supply conductor is circular, the ratio of the surface area to the cross-sectional area is small, and the cross-sectional area increases when trying to obtain a sufficient surface area for high-frequency current flow, and the high-frequency power supply conductor is large. It became heavy. In addition, a high-frequency power supply conductor for energizing a large current (several thousands to 10,000 amperes) also has a large water flow rate for cooling of about 100 L / min, and the area of the cooling water passage is also large. Became big and heavy. For this reason, it has become difficult to handle the operation of attaching the high-frequency power supply conductor to the vacuum vessel.

  The present invention has been made to solve the above-described problems, and is intended to obtain a high-frequency power supply conductor that is light and small in size, easy to handle, easy to manufacture, has good dimensional accuracy, and hardly causes water leakage. Objective.

  The high-frequency power supply conductor according to claim 1 of the present invention has one end inserted into the hole of the vacuum vessel, an induction heating coil connected to the one end, a high-frequency power source connected to the other end, and a vacuum vessel on the outer periphery. In the high-frequency power supply conductor in which the first flange portion that engages with the outer wall is joined and the first flange portion is attached to the vacuum vessel via the first sealing member, A groove is formed and the cross section is formed in a rectangular shape, and a lid member joined to the main body so as to cover the water flow groove of the cooling water passage of the main body.

  According to a second aspect of the present invention, there is provided a high-frequency power supply conductor in which a water passage groove of a cooling water passage formed in the main body is formed to meander in a rectangular shape in cross section.

  The high-frequency power supply conductor according to claim 3 has one end inserted into the hole of the vacuum vessel, an induction heating coil connected to the one end, a high-frequency power source connected to the other end, and an outer wall of the vacuum vessel on the outer periphery. In the high-frequency power supply conductor in which the first flange portion to be engaged is joined and the first flange portion is attached to the vacuum vessel via the first sealing member, a vacuum is formed on the outer surface of the first flange portion. The side portion and the atmosphere side portion are divided, and a cooling water passage is formed by drilling a hole from each divided end portion, and a second flange portion is joined to the outer periphery of the division end portion of the atmosphere side portion, The second flange portion is attached to the first flange portion so that the cooling water passage formed in the divided portion is connected via the second sealing member.

  As described above, according to the first aspect of the present invention, the cross section is rectangular and the main body portion in which the water flow groove of the cooling water passage is formed is joined so as to cover the water flow groove of the main body portion. A high-frequency power supply conductor is formed from the lid member, the energized portion is rectangular, the ratio of the surface area to the cross-sectional area is increased, and the cross-sectional area does not increase even if a sufficient flow area of high-frequency current is taken, The high-frequency power supply conductor is small and lightweight, and can be easily attached to a vacuum vessel and handled easily.

  According to the second aspect of the present invention, the water flow groove of the cooling water passage is meandering with a rectangular cross section, so that the cooling water passage area can be increased and the cooling effect can be enhanced. Since the water flow groove has a rectangular cross section, current flows through the surface of the high frequency power supply conductor due to the high frequency skin effect, so that the current flow area relative to the cross-sectional area can be increased. Can be reduced in size and size.

  According to the third aspect of the present invention, since the high-frequency power supply conductor is divided into the vacuum side and the atmosphere side, the length is reduced to about half, the processing of the cooling water passage is facilitated, and the size and weight are reduced. It becomes easy to attach to the head, and handling becomes easy. In addition, since the joining work is only mounting of the flange portion, the dimensional accuracy is improved, the manufacturing is facilitated, and water leakage is less likely to occur.

Best Embodiment 1
The best mode for carrying out the present invention will be described below with reference to the drawings. 1A to 1C are a front view and a side view of a conductor for high-frequency power feeding according to Embodiment 1 of the present invention, and a vertical side view of line BB in FIG. 1A, and FIG. It is principal part sectional drawing of the vacuum induction heating apparatus by. In the figure, 1 is a vacuum vessel, 2 is an insulating plate attached to the outer wall of the vacuum vessel 1, and 3 is a pair of high-frequency power supply conductors, one end of which is inserted into the hole 1a of the vacuum vessel 1 and the hole 2a of the insulating plate 2. And an induction heating coil 4 as a load is connected to one end thereof, and the induction heating coil 4 is disposed, for example, on a peripheral wall of a crucible containing a metal material. The induction heating coil 4 is hollow, and cooling water flows through it. A high frequency power source 5 is connected to the other end of the high frequency power supply conductor 3.

  3a is a main body portion of the high-frequency power supply conductor 3 having a rectangular cross section, and a water passage groove 3b of a cooling water passage having a rectangular cross section is formed to meander so that the main body portion 3a covers the water passage groove 3b. The lid member 3c is brazed. The lid member 3c is provided with an inlet 3d and an outlet 3e for the cooling water. Actually, in the vacuum vessel 1, the inlet 3d, the outlet 3e, and the induction heating coil 4 are connected so that cooling water flows. A plurality of attachment holes 3f for attaching the induction heating coil 4 are provided at one end of the high-frequency power supply conductor 3, and a plurality of attachment holes 3g for attaching the high-frequency power source 5 to the other end of the high-frequency power supply conductor 3. Is provided.

  A first flange portion 6 that engages with the outer wall of the insulating plate 2 is brazed to the outer periphery of the high-frequency power supply conductor 3, and an elliptical O-ring groove 6 a is formed on the insulating plate 2 side of the flange portion 6. The first O-ring 7 is fitted in the O-ring groove 6a, and a number of mounting holes 6b are provided in the flange portion 6, and bolts inserted through the mounting holes 6b are screwed to the insulating plate 2. Thus, the high-frequency power supply conductor 3 is attached to the insulating plate 2 in an airtight manner. Note that the high-frequency power supply conductor 3 may be directly and airtightly attached to the outer wall of the vacuum vessel 1 without providing the insulating plate 2.

  In the first embodiment, the cooling water flows, for example, from the inflow hole 3d of one of the high-frequency power supply conductors 3 outside the vacuum vessel 1 and meanders in the water passage groove 3b, and then the outflow hole 3e in the vacuum vessel 1 And then actually flows through the induction heating coil 4 and then flows into the inflow hole 3d of the other high-frequency power supply conductor 3 in the vacuum vessel 1 and flows through the other high-frequency power supply conductor 3. 3b meanders and flows through the outflow hole 3e outside the vacuum vessel 1.

  In the first embodiment, since the main body 3a is formed in a rectangular cross section, the ratio of the surface area to the cross sectional area is increased, and the cross sectional area does not increase even if a sufficient flow area for high-frequency current is provided. It is lightweight and can be easily attached to the vacuum vessel 1 and handled easily. Further, since the water flow groove 3b is meandering with a rectangular cross section, the passage area of the cooling water can be increased and taken longer, and the cooling effect can be improved. In addition, although the main-body part 3a and the cover member 3c and the high frequency electric power feeding conductor 3 and the first flange part 6 are brazed, other joining means may be used.

Embodiment 2
3A to 3C are a front view, a side view, and a vertical side view of the AA line in FIG. 3A of the high frequency power supply conductor according to the second embodiment, and FIG. 4 is a vacuum induction according to the second embodiment. It is principal part sectional drawing of a heating apparatus. In the figure, 8 is a pair of high-frequency power supply conductors, one end of which is inserted into the hole 1a of the vacuum vessel 1 and the hole 2a of the insulating plate 2, and one end of which is connected to an induction heating coil 4 as a load. Is connected to a high frequency power source 5. A first flange portion 6 that engages with the outer wall of the insulating plate 2 is brazed to the outer periphery of the high-frequency power supply conductor 8, and an elliptical first O-ring groove is formed on the insulating plate 2 side of the flange portion 6. 6a is formed, a first O-ring 7 is fitted in the O-ring groove 6a, and a number of mounting holes 6b are provided in the flange portion 6, and bolts inserted through the mounting holes 6b are screwed into the insulating plate 2. The high frequency power supply conductor 8 is attached to the insulating plate 2 in an airtight manner.

  Further, each high frequency power supply conductor 8 is divided into a vacuum side portion 8a and an atmospheric side portion 8b on the outer surface of the first flange portion 6, and a cooling water passage 9 is formed by drilling a hole from each divided end portion. A cooling water inlet 9 a and an outlet 9 b communicating with the cooling water passage 9 are also provided. Further, the second flange portion 10 is brazed to the outer periphery of the split end portion of the atmosphere side portion 8b of the high frequency power supply conductor 8, and the end of the cooling water passage 9 at the split end portion of the atmosphere side portion 8b is O. A ring groove 9c is provided, and the second O-ring 11 is fitted into the O-ring groove 9c. The second flange portion 10 is provided with a large number of mounting holes 10a. And the 2nd flange part 10 is attached to the 1st flange part 6 with a volt | bolt. Of course, when attaching the 1st flange part 6 to the insulating board 2, you may attach the 2nd flange part 10 together. When the flange portions 6 and 10 are attached, water leaks between the end of the cooling water passage 9 of the vacuum side portion 8a and the end of the cooling water passage 9 of the atmosphere side portion 8b via the second O-ring 11. Do not connect.

  An attachment hole 8 c for attaching the induction heating coil 4 is provided at one end of the high-frequency power supply conductor 8, and an attachment hole 8 d for attaching the high-frequency power source 5 is provided at the other end of the high-frequency power supply conductor 8. Further, the high-frequency power supply conductor 8 may be directly and airtightly attached to the outer wall of the vacuum vessel 1 without providing the insulating plate 2.

  Also in the second embodiment, the cooling water flows from the inflow hole 9a of one high-frequency power supply conductor 8 outside the vacuum vessel 1 and flows through the cooling water passage 9, and then the outflow hole 9b in the vacuum vessel 1. After that, after actually flowing through the induction heating coil 4, it flows from the inflow hole 9 a of the other high frequency power supply conductor 8 in the vacuum vessel 1, and the cooling water passage of the other high frequency power supply conductor 8. After flowing through the inside 9, it flows out from the outflow hole 9 b outside the vacuum vessel 1.

  In the second embodiment, since the high-frequency power supply conductor 8 is divided into the vacuum side portion 8a and the atmosphere side portion 8b, the length is half that of the conventional one, and the processing of the cooling water passage 9 is facilitated. Further, the high-frequency power supply conductor 8 is halved in weight and size, and can be attached to the vacuum vessel 1 side by attaching the vacuum side portion 8a and then attaching the atmosphere side portion 8b. Therefore, handling becomes easy. In addition, the flange portions 6 and 10 need to be brazed, but the brazing between the main body portion 3a and the lid member 3c is not necessary as in the first embodiment, and the manufacture becomes easy and the brazed portion is reduced. Therefore, expansion / contraction, deformation, and warping of the material due to heat are reduced, dimensional accuracy is improved, and water leakage is less likely to occur. In addition, brazing of the flange parts 6 and 10 may use another joining means, and any joining means can be used to reduce the number of joints.

They are the front view of the high frequency electric power feeding conductor by Embodiment 1 of this invention, a side view, and the BB line vertical side view of Fig.1 (a). It is principal part sectional drawing of the vacuum induction heating apparatus by Embodiment 1 best. It is the front view of the high frequency electric power feeding conductor by Embodiment 2, the side view, and the AA line vertical side view of Fig.3 (a). It is principal part sectional drawing of the vacuum induction heating apparatus by Embodiment 2. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Vacuum vessel 1a, 2a ... Hole 2 ... Insulating plate 3, 8 ... High frequency electric power feeding conductor 3a ... Main-body part 3b ... Water flow groove 3c ... Lid member 4 ... Induction heating coil 5 ... High frequency power supply 6,10 ... Flange part 7 11 ... O-ring 9 ... Cooling water passage

Claims (3)

  One end is inserted into the hole of the vacuum vessel, an induction heating coil is connected to the one end, a high frequency power source is connected to the other end, and a first flange portion that engages with the outer wall of the vacuum vessel is joined to the outer periphery. In addition, in the high-frequency power supply conductor in which the first flange portion is attached to the vacuum vessel via the first sealing member, the water passage groove of the cooling water passage is formed, and the cross section is formed in a rectangular shape And a lid member joined to the main body so as to cover the water flow groove of the cooling water passage of the main body.   The high-frequency power supply conductor according to claim 1, wherein the water flow groove of the cooling water passage formed in the main body is formed to meander with a rectangular cross section. One end is inserted into the hole of the vacuum vessel, an induction heating coil is connected to the one end, a high frequency power source is connected to the other end, and a first flange portion that engages with the outer wall of the vacuum vessel is joined to the outer periphery. And the first flange portion is divided into a vacuum side portion and an atmosphere side portion on the outer surface of the first flange portion in the high frequency power supply conductor attached to the vacuum vessel via the first sealing member, A cooling water passage is formed from each divided end portion by drilling, and a second flange portion is joined to the outer periphery of the divided end portion of the atmosphere side portion, and the cooling water passage formed in each divided portion is the first. A high-frequency power supply conductor, wherein a second flange portion is attached to the first flange portion so as to be connected via two sealing members.

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