JP4693971B2 - Clean unit for transport - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a clean unit that provides a simple clean space and a transfer clean unit for transferring products such as semiconductor wafers and wiring boards using the clean unit in a clean room in a dust-free state.
[0002]
[Prior art]
As a conventional clean unit for a clean space, a clean unit formed by an upper frame on which a blower with a built-in filter is placed and a pedestal pipe that supports the filter is incorporated in Japanese Utility Model Publication No. 63-196031. It is disclosed.
However, a frame body that has been previously cast or welded in a cross-girder shape has been used on the ceiling of the upper frame of the clean unit in order to mount the blower. In the said frame, there existed a problem that the place which mounts an air blower and the magnitude | size of an air blower were limited, and there was no flexibility.
Further, as a clean unit for transporting an object to be processed using a clean unit that provides a simple clean space in a sterile or dust-free state, the present applicant is disclosed in Japanese Patent Laid-Open No. 4-214141. A clean booth is provided with a bottom plate and a handle so that it can be transported, a rectangular parallelepiped angle is placed on the bottom plate, and a fan filter unit composed of an air supply port, a fan, a filter, and an outlet is placed on the angle Thus, air is not discharged from the entire bottom surface of the unit, but is discharged to the side only from the outlet of the side plate.
However, the clean unit for unloading has no danger of air exhausted during transport returning to the unit or contaminated air that has been rolled up during the transfer, so that the object to be treated in the unit is not contaminated. Although it is suitable for high-temperature cultures that do not like the adhesion of semiconductors, if clean air is continuously supplied, products such as semiconductor wafers and wiring boards that do not have any problem even if contaminated dust returns or gets caught are transported. In this case, since the air discharge port is specified, there is a problem that the air in the unit stagnate and cannot be discharged quickly.
[0003]
[Problems to be solved by the invention]
For this reason, in the present invention, even with the same machine frame, there is provided a flexible unit that can fix air cleaning devices of various sizes, and a simple transport clean unit with less air stagnation in the clean space. The purpose is to provide.
[0004]
[Means for Solving the Problems]
The present invention has been made in view of the above points, and the transport clean unit of the present invention, as described in claim 1, surrounds the outer periphery of a machine frame composed of a column and a ceiling frame with a curtain material, A clean unit in which the interior is defined as a clean space and an air purifier is provided on the ceiling frame, the first unit having concave connection portions at both ends between a pair of opposing sides of the ceiling frame. Are fixed at a predetermined interval, and further, a second beam member having concave connecting portions at both ends is fixed at a predetermined interval between the first beam members, and is provided on the bottom surface of the air purifier. The air purifier is fixed to the first girder via a U-shaped connecting member, a bottom plate is provided on the machine frame, a caster is provided on the bottom of the machine frame or the bottom plate, and the air purifier A power source for operating the air is provided on the bottom plate, and the air Characterized in that it is intended to convey a product in a state of operating the purification unit.
It conveying clean unit for according to claim 2, in the transport clean unit for according to claim 1, wherein the air cleaning device, the air supply port, a fan, a fan filter unit comprising a filter and outlet It is characterized by.
Conveying clean unit for according to claim 3, in the transport clean unit for according to claim 1 or 2, as the machine frame, with a trolley with grab bars portion in the longitudinal direction of the traveling direction, by the handrail characterized in that so as to constitute the roof frame and the struts of the machine frame.
The transport clean unit according to claim 4 surrounds the outer periphery of the machine frame composed of a support column and a ceiling frame with a curtain material, defines the interior as a clean space, and supplies clean air into the clean space. A clean unit provided with an air purifying device for fixing a first girder having concave connecting portions at both ends between a pair of opposing sides of the ceiling frame at a predetermined interval; A U-shape provided on the bottom surface of the air blowing part comprising a filter and a blow-out port of the air purifier, wherein a second girder having concave connecting portions at both ends is fixed at a predetermined interval between the first girder members. The air purifier is fixed to the first girder via a connecting member, and an air supply unit including an air supply port and a fan is provided in the clean space, and the air blowing unit and the air supply unit the door is connected by a conduit, a bottom plate provided in the machine frame, wherein A caster is provided at the bottom of the frame or the bottom plate, a power source for operating the air purifier is provided on the bottom plate, and the product is conveyed while the air purifier is in operation. .
The clean unit for transport according to claim 5 is the clean unit for transport according to claim 4, wherein the machine frame is a carriage having a handrail portion in the front-rear direction of the traveling direction, and the machine frame is configured by the handrail portion. wherein the posts and the like constituting the roof frame.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
The transport clean unit of the present invention may be any one provided with a U-shaped or U-shaped concave portion in a part of the pipe member so that the girder can be fixed at an arbitrary position of the ceiling frame. Then, the U-shaped or U-shaped concave portion of the pipe member constituting the girder is fixed at an arbitrary position on the ceiling frame, and the air purifier is suspended above the girder or on the girder. Fix it by lowering it.
In addition, the air blowing part constituted by the filter and the blowing part of the air cleaning device of the clean unit and the air feeding part constituted by the air inlet and the fan of the air cleaning device are separated, and only the air blowing part is provided as a girder. It is provided via a material and connected to the air supply part in the clean space via a conduit.
Further, if a bottom plate is provided on the machine frame and the casters are connected, the casters are directly connected to the support columns, or the machine frame is placed on a commercially available cart, a clean unit for conveyance is obtained.
[0006]
【Example】
The transport clean unit of the present invention will be described below with reference to the drawings.
As shown in FIG. 1, a clean unit 1 constituting a transport clean unit according to the present invention has joint pipes 3 and 3 horizontally placed between U-shaped frames 2 and 2 each having a support, and the joint pipe 3 , 3, another joint pipe 4, 4 is horizontally mounted to form a machine frame 10 having a girder 5 on the ceiling, covered with a vinyl curtain 6 from above, and an opening 7 is formed in the ceiling of the vinyl curtain 6. The air purifier 8 was placed thereon, and the caster 9 for allowing the clean unit 1 to be transported was provided at the bottom of the U-shaped frames 2 and 2.
[0007]
In this embodiment, in order to make it possible to fix the girder 5 to the ceiling frame, joint pipes 3 and 3 having U-shaped connecting portions 3b and 3b at both ends are connected to the horizontal portions of the U-shaped frames 2 and 2, respectively. In the meantime, the air purifier 8 was fixed at a predetermined interval so that it could be placed. Similarly, joint pipes 4 and 4 having U-shaped connecting portions 4b and 4b at both ends are fixed between the joint pipes 3 and 3 at a predetermined interval. And the fixed part of the joint pipe 3 and the U-shaped frame 2 and the fixed part of the joint pipe 3 and the joint pipe 4 were fixed by welding, respectively.
The vinyl curtain 6 used was composed of a ceiling portion 6a having an opening 7 and side peripheral portions 6b, 6c, 6d, and 6e. However, the vinyl curtain 6 surrounds the side peripheral portion of the machine casing 10 from the air cleaning device. The air is not particularly limited as long as the air can be sent to the clean space inside the machine casing 10. The vinyl curtain 6 is fixed with adhesive tape or the like at the boundaries between the side peripheral portions 6b and 6c, 6c and 6d, 6d and 6e, and 6e and 6b.
[0008]
The air cleaning device 8 includes an air supply port 8a, a fan 8b, a filter 8c, a blowout port 8d, and a U-shaped connecting member 8e. The air cleaning device 8 is placed on the girder 5 via a vinyl curtain 6 and is also an air cleaning device. The opening of the ceiling part 6a of the vinyl curtain 6 was covered with the bottom surface of 8, and the inside of the vinyl curtain 6 was sealed to become a clean space. At this time, the U-shaped connecting portion 8e provided on the bottom surface of the air cleaning device 8 is placed at a position where it does not overlap the joint pipe 4 through the vinyl curtain 6 so that the air cleaning device 8 does not fall off. Fixed to.
In this embodiment, the power source is not particularly shown, but an external power source near the place of use is used.
[0009]
Next, a transport clean unit according to another embodiment of the present invention will be described.
As shown in FIGS. 2 and 3, the transport clean unit 11 includes joint pipes 13 and 13 horizontally mounted between handles 12a and 12a provided in the front-rear direction of the traveling direction of the commercial carriage 12, and further, the joint pipe Another joint pipe 14, 14 is horizontally mounted between each other 13, 13 to form a machine frame 20 having a girder 15 on the ceiling, covered with a vinyl curtain 16 from above, and an opening in the ceiling of the vinyl curtain 16. 17 and an air purifier 18 was placed above it to make the inside of the vinyl curtain 16 a clean space.
Also in this embodiment, in order to make it possible to fix the girder 15 to the ceiling frame in the same manner as in the previous embodiment, the joint pipes 13 and 13 having U-shaped connecting portions 13b and 13b at both ends are connected to the joint pipes 14 and 14, respectively. The air cleaning device 8 was fixed at a predetermined interval so that it could be placed between the fourteen. Similarly, joint pipes 14 and 14 having U-shaped connecting portions 14b and 14b at both ends are fixed between the joint pipes 13 and 13 at a predetermined interval.
The air cleaning device 18 was fixed by U-shaped connecting portions 18e and 18e through the girder 15 and the vinyl curtain 16.
The vinyl curtain 16 was also fixed with adhesive tape or the like at the boundaries between the side peripheral portions 16b and 16c, 16c and 16d, 16d and 16e, and 16e and 16b, as in the previous example.
In addition, since the battery power source 40 of the air purifier 18 is provided on the carriage 12, the clean unit can be moved freely without being influenced by the external power source.
[0010]
Next, a transport clean unit according to another embodiment of the present invention will be described.
As shown in FIGS. 4 and 5, the air cleaning device 28 of the transport clean unit 21 includes an air supply portion 28A including an air supply port 28a and a fan 28b, an air bag 28B including a filter 28c and an outlet 28d, and these It was comprised from the conduit | pipe 28f which connects. In the transport clean unit, the joint pipes 23, 23 are placed horizontally between the handles 22 a, 22 a provided in the front-rear direction of the commercial carriage 22, and another joint pipe is provided between the joint pipes 23, 23. 24 and 24 are horizontally mounted to form a machine frame 30 having a girder 25 on the ceiling, covered with a vinyl curtain 26 from above, an opening 27 is provided on the ceiling of the vinyl curtain 16, and an air bag is provided above it. 28B was placed. The airbag 28B is disclosed in Japanese Patent Application No. 11-56103 filed earlier by the applicant.
[0011]
Also in this embodiment, the joint pipes 23 and 23 having the U-shaped connecting portions 23b and 23b at both ends are predetermined so that the airbag 28B can be placed between the joint pipes 24 and 24, similarly to the above-described embodiment. Fixed at intervals. Similarly, joint pipes 24 and 24 having U-shaped connecting portions 24b and 24b at both ends are fixed between the joint pipes 23 and 23 at a predetermined interval.
[0012]
In this embodiment, the air purifier 28 is combined with a magic tape (registered trademark) 31 provided on the four circumferences of the ceiling opening 27 of the vinyl curtain 26 and a magic tape 32 provided on the four circumferences of the lower surface of the airbag 28B. It was fixed above 25.
[0013]
As for the vinyl curtain 26, the boundary between the side peripheral portions 26b and 26c, 26c and 26d, 26d and 26e, and 26e and 26b is fixed with an adhesive tape or the like, as in the above embodiment.
The battery power source 40 of the air purifier 28 is mounted on the carriage so that the clean unit can be moved freely without being influenced by an external power source.
[0014]
According to the transport clean unit 21, when the product 50 is transported on the air, the air purifier 28 is operated to suck the external air from the air supply port 28a of the air purifier 28 by the fan 28b, and the filter 28c. The cleaned air is blown from the outlet 28d to the inside of the transport clean unit 21, and the air is discharged from between the periphery of the bottom plate and the vinyl curtain 26 to the outside. According to such an air cleaning device 28, it was possible to prevent clean air from being constantly supplied to the product 50 and being contaminated with dust or the like.
Furthermore, in this embodiment, the air blowing part 28B is reduced in weight, and the load on the handle 22a and the joint pipes 23 and 24 is reduced. In the present embodiment, since the air supply unit 28A is provided in the clean space of the vinyl curtain 26, the air in the clean space can be reused and circulated, thereby saving energy and improving the filter life. Furthermore, the fan noise from the air supply unit 28A could be slightly suppressed by the vinyl curtain.
[0015]
【The invention's effect】
According to the transport clean unit of the present invention, the fixable girder can be fixed at an arbitrary position of the ceiling frame, so that the air purifying device that can be fixed by the pre-molded or welded well-shaped frame is limited. There is no end.
For products such as semiconductor wafers and circuit boards, clean air is always supplied from above and can be discharged quickly from the entire bottom, even if contaminated dust returns or gets caught, and air stays in the unit. The product will not be contaminated without occurring.
[Brief description of the drawings]
FIG. 1 is an overall perspective view of an embodiment of a transport clean unit of the present invention and an exploded view thereof. FIG. 2 is an explanatory view of a side surface showing a use state of an embodiment of a transport clean unit of the present invention. 3A is an exploded view of the side of the transport clean unit of the present invention in FIG. 2, and FIG. 4B is an exploded view from the front of the transport clean unit. FIG. FIG. 5A is an exploded view of the side of the transport clean unit of the present invention in FIG. 4, and FIG. 5B is an exploded view from the front.
DESCRIPTION OF SYMBOLS 1 Clean unit 2 U-shaped frame 3 Joint pipe 4 Joint pipe 5 Girder material 6 Vinyl curtain 7 Ceiling opening 8 Air cleaner 9 Caster 10 Machine frame 11 Transport clean unit 12 Bogie 13 Joint pipe 14 Joint pipe 15 Girder material 16 Vinyl curtain 17 Ceiling opening 18 Air purifier 19 Caster 20 Machine frame 21 Transport clean unit 22 Carriage 23 Joint pipe 24 Joint pipe 25 Girder 26 Vinyl curtain 27 Ceiling opening 28 Air purifier 29 Caster 30 Machine frame 31 Magic tape 32 Velcro 40 Battery Power 50 Products

Claims (5)

A clean unit in which an outer periphery of a machine frame composed of a support column and a ceiling frame is surrounded by a curtain material, and the interior of the machine frame is defined as a clean space and an air purifier is provided on the ceiling frame. A first girder having concave connecting portions at both ends is fixed at a predetermined interval between a pair of opposing sides, and a second girder having concave connecting portions at both ends is attached to the first girder. Fixing between the girders at a predetermined interval, and fixing the air purifier to the first girders via a U-shaped connecting member provided on the bottom surface of the air purifier, and attaching a bottom plate to the machine frame A caster is provided on the bottom of the machine frame or the bottom plate, a power source for operating the air cleaning device is provided on the bottom plate, and the product is conveyed in a state where the air cleaning device is operated. A clean unit for transport characterized by The clean unit for conveyance according to claim 1, wherein the air cleaning device is a fan filter unit including an air supply port, a fan, a filter, and an air outlet. As the machine frame, with a trolley with grab bars portion in the longitudinal direction of the traveling direction, characterized in that so as to constitute the roof frame and the struts of the machine frame by the handrail according to claim 1 or 2 Clean unit for transport described in 1. A clean unit that includes a curtain material surrounding the outer periphery of the machine frame consisting of a column and a ceiling frame, and has an air purifier that supplies clean air into the clean space while defining the interior as a clean space. A first girder having concave connecting portions at both ends between a pair of opposite sides of the ceiling frame is fixed at a predetermined interval, and a second connecting member having concave connecting portions at both ends. The air purifier is fixed via a U-shaped connecting member provided on a bottom surface of an air blowing portion composed of a filter and a blower outlet of the air purifier, the girders being fixed at a predetermined interval between the first girders. An air supply portion configured by an air supply port and a fan is provided in the clean space, the air supply portion is connected to the air blowing portion and the air supply portion by a conduit, and a bottom plate is connected to the machine frame. And casters on the bottom of the machine frame or the bottom plate Conveying clean unit, wherein the power for operating the air cleaning device provided on the bottom plate is intended to convey a product in a state of operating the air cleaning apparatus. As the machine frame, with a trolley with grab bars portion in the longitudinal direction of the traveling direction, according to claim 4, characterized in that so as to constitute the roof frame and the struts of the machine frame by the handrail Clean unit for transport .

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