JP4692462B2 - Sliding structure and film forming method - Google Patents

Description

  The present invention relates to a sliding structure and a film forming method.

  Conventionally, as a coating technique for suppressing wear generated between members that are in contact with each other due to vibration, solid lubricants such as molybdenum disulfide, PTFE (polytetrafluoroethylene resin), graphite, or soft metal plating such as gold or silver, or Hard coatings such as TiN, CrN, WC (tungsten carbide), and DLC (diamond-like carbon) are used.

  For example, in the following Patent Document 1, a dynamic pressure of gas is generated between an inner peripheral surface of a tilting pad supported by a bearing housing so as to be freely tilted and an outer peripheral surface of a rotating shaft that rotates at high speed to support the rotating shaft. In such a dynamic pressure gas bearing, the inner peripheral surface of the tilting pad and the outer periphery of the rotary shaft opposed to the tilting pad are intended to suppress the occurrence of wear and burnout due to contact between the tilting pad and the rotary shaft. A technique is disclosed in which a ceramic coating is applied to each surface and a solid lubricating film is formed on each ceramic coating surface.

In addition, for example, in Patent Document 2 below, in an internal combustion engine or the like, an object is to provide a hard carbon film sliding member that exhibits extremely excellent wear resistance and low friction characteristics in the presence of lubricating oil. In a base material made of a material, an elastic layer obtained by adding an additive particle such as a rubber or a resin or a solid lubricant to an area that slides with a counterpart material through a lubricating oil is used as an intermediate layer. A technique for forming a hard carbon film such as DLC on the surface is disclosed.
JP 7-317752 A JP 2004-347053 A

 Any of the above-described methods using a solid lubricant, soft metal plating, hard coating, and the like has a lifetime and requires a coating technique with higher durability. In addition, friction caused by vibration is often a complex frictional form with repeated impacts and micro-slip in a non-lubricating oil environment, and the coating technology described above tends to cause cracks and peeling on the sliding surface. There is a problem that is short.

The present invention has been made in view of the above-described circumstances, and in a sliding structure including at least a pair of sliding members having sliding surfaces that come into contact with each other, repeated impacts and microslip generated on the sliding surfaces are provided. The purpose is to improve the wear resistance and life against the accompanying friction.

  In order to achieve the above object, according to the present invention, as a first solving means related to a sliding structure, there is provided a sliding structure including at least a pair of sliding members having sliding surfaces in contact with each other. A DLC (diamond-like carbon) -based film is formed on the sliding surface of the sliding member, and a molybdenum disulfide-based film is formed on the sliding surface of the other sliding member.

  Further, in the present invention, as a second solving means relating to the sliding structure, in the first solving means, an intermediate for improving adhesion between the DLC-based film and the base material of the one sliding member. A layer is formed, and an intermediate layer for improving adhesion is formed between the molybdenum disulfide-based film and the base material of the other sliding member.

  In the present invention, as a third solving means relating to the sliding structure, in the first or second solving means, the DLC-based film is a DLC film containing Cr (chromium), and the disulfide The molybdenum-based film is a fired film containing molybdenum disulfide.

 Further, in the present invention, as the fourth solving means relating to the sliding structure, in the third solving means, the one sliding member is provided between the DLC film containing Cr and the base material, It has a Cr or CrN layer and a Cr or CrN gradient layer as an intermediate layer.

 Further, in the present invention, as a fifth solving means relating to the sliding structure, in the third or fourth solving means, the second sliding member may include the second sliding member when the base material is an iron-based alloy. Between the fired film containing molybdenum sulfide and the base material, a Ni—Al (nickel-aluminum) sprayed layer and a Cu—Ni—In (copper-nickel-indium) sprayed layer are provided as intermediate layers. .

 According to the present invention, as a sixth solving means relating to the sliding structure, in the third or fourth solving means, when the other sliding member is a titanium alloy, the disulfide A Ni-Tl-B (nickel-thallium-boron) plating layer is provided as an intermediate layer between the fired film containing molybdenum and the base material.

Furthermore, in the present invention, as a means for solving the film forming method, in the sliding structure including at least a pair of sliding members having sliding surfaces that are in contact with each other, the film forming method used for the sliding surface A DLC (diamond-like carbon) -based film is formed on the sliding surface of one sliding member, and a molybdenum disulfide-based film is formed on the sliding surface of the other sliding member.

 According to the present invention, in a sliding structure comprising at least a pair of sliding members having sliding surfaces that contact each other, a DLC-based film is formed on the sliding surface of one sliding member, and the other sliding member By applying a coating combination that forms a molybdenum disulfide-based coating on the sliding surface, it is possible to improve the wear resistance and the life against friction with repeated impacts and micro-slip that occur on the sliding surface. It is.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1A is a schematic configuration diagram of a sliding structure ST according to an embodiment of the present invention. In the present embodiment, a gas turbine engine turbine will be described as an example of the sliding structure ST. That is, this sliding structure ST is composed of at least a pair of sliding members (turbine blade 10 and turbine disk 20) having sliding surfaces 30 that come into contact with each other.

  In the turbine blade 10, a tab tail 10 a is provided at the lower portion of the blade. The tab tail 10 a is press-fitted into a dovetail slot 20 a provided in the turbine disk 20, so that the turbine blade 10 is attached to the turbine disk 20. Yes. A certain size margin is secured in the gap between the tab tail 10a and the dovetail slot 20a in consideration of thermal expansion of the tab tail 10a. When the turbine rotates in such a state, the tab tail 10a and the dovetail slot 20a come into contact with each other on the sliding surface 30, and friction with repeated impacts and minute slips is generated on the sliding surface 30.

  In this embodiment, a DLC (diamond-like carbon) -based film is formed on the sliding surface of one sliding member, that is, the sliding surface 30 of the tab tail 10a of the turbine blade 10, and the sliding surface of the other sliding member, That is, a molybdenum disulfide-based film is formed on the sliding surface 30 of the dovetail slot 20a in the turbine disk 20.

Hereinafter, specific examples of the DLC-based film and the molybdenum disulfide-based film will be described. FIG. 1B shows an example of the layer structure of the DLC-based film formed on the sliding surface 30 of the tab tail 10 a in the turbine blade 10. As shown in FIG. 1B, a Cr (chromium) layer L ₁₁ is formed on the surface of the base material L ₁₀ (that is, the tab tail 10a), and a Cr inclined layer L ₁₂ is formed on the Cr layer L _11. ing. A DLC layer L ₁₃ containing Cr is formed on the Cr gradient layer L ₁₂ as a DLC-based film. These Cr layer _{L 11} and Cr graded layer _{L 12} is an intermediate layer for improving the adhesion between the Cr-containing DLC layer _{L 13} and the base material _{L 10.} Note that the total thickness of the Cr layer L ₁₁ , the Cr gradient layer L _12, and the Cr-containing DLC layer L ₁₃ is preferably about 3 μm.

FIG. 1C shows an example of a layer structure of a molybdenum disulfide-based film formed on the sliding surface 30 of the dovetail slot 20a in the turbine disk 20. As shown in FIG. As shown in FIG. 1 (c), the surface of the base _{L 20} (i.e. the tab tail slot 20a), Ni-Al (nickel - aluminum) sprayed layer _{L 21} is formed, the Ni-Al sprayed layer _{L 21} Cu-Ni-in (copper - nickel - indium) above sprayed layer _{L 22} is formed. As the Cu-Ni-In flame-sprayed layer _{L 22} molybdenum disulfide coating on molybdenum disulfide baking film _{L 23} is formed. These Ni-Al sprayed layer _{L 21} and Cu-Ni-In flame-sprayed layer _{L 22} is an intermediate layer for improving the adhesion between the molybdenum disulfide baking film _{L 23} and the base material _{L 20.} Such an intermediate layer has a particularly excellent adhesion properties when the base material L ₂₀ is an iron-based alloy (e.g., A286 etc.). The thickness of the intermediate layer is preferably about 0.2 to 0.5 mm, also, the thickness of the molybdenum disulfide baking film _{L 23} is 0.005～0.015Mm is preferred.

As described above, a DLC-based film is formed on the sliding surface of one sliding member (the sliding surface 30 of the tab tail 10a in the turbine blade 10), and the sliding surface of the other sliding member (the dovetail in the turbine disk 20). By adopting a combination of forming a molybdenum disulfide-based film on the sliding surface 30) of the slot 20a, it is possible to improve the wear resistance and the life against friction caused by repeated impacts and micro-slip that occur on the sliding surface 30. Is possible.

  Next, the results of a fine wear test (line contact), a fine wear test (surface contact), and an impact wear test, which are the basis for the effects of the present embodiment described above, will be described.

[Fine wear test (Line contact)]
First, the results of a fine wear test in line contact will be described. FIG. 2A is a schematic diagram showing a fine wear test method in line contact. As shown in FIG. 2A, the movable-side test piece 41 is arranged such that the extending direction of the cylindrical-shaped movable-side test piece 41 is parallel to the upper surface 40a of the disk-shaped fixed-side test piece 40. Place. By applying a load to the movable side test piece 41 from above, the movable side test piece 41 and the fixed side test piece 40 are brought into line contact, and the movable side test piece 41 is further displaced in the extending direction (small slip). ), The wear state of both test pieces at the line contact portion (sliding surface) was investigated. In addition, A286 which is an iron-based alloy was used as the fixed-side test piece 40, and Ti6242 which was a titanium alloy was used as the movable-side test piece 41.

Moreover, as shown in FIG.2 (b), the combination of the coating or surface treatment which is applied to the surface of the fixed side test piece 40 and the movable side test piece 41 includes 19 cases "A" to "S", and each combination. The wear state of both specimens at the line contact portion in the case was investigated. In FIG. 2B, “Cr-containing DLC” means that, as in FIG. 1B, an Cr layer and a Cr gradient layer are formed as an intermediate layer on the base material, and Cr is contained in the outermost layer. A DLC layer is formed. In addition, “MoS ₂ fired film 1” is formed by forming a Ni—Al sprayed layer and a Cu—Ni—In sprayed layer as intermediate layers on a base material (fixed side test piece 40), as in FIG. Then, a fired film containing molybdenum disulfide is formed on the outermost layer.

In addition, as shown in FIG. 3A, “MoS ₂ fired film 2” is a Ni—Tl—B (nickel-thallium-boron) plating layer as an intermediate layer on a base material (movable side test piece 41). And a molybdenum disulfide fired film is formed on the outermost layer. Such an intermediate layer has particularly excellent adhesion performance when the base material is a titanium alloy (Ti6242 or the like). “DLC” is obtained by forming a SiC (silicon carbide) layer on a base material and forming a DLC layer on the outermost layer as shown in FIG. Further, “WC / C (BLINIT C)” means that a Cr layer is formed on a base material and a WC (tungsten carbide) layer is formed on the Cr layer, as shown in FIG. A multiplexed layer of a WC layer and a DLC layer is formed on the WC layer.

In the combination shown in FIG. 2B, in the case “R”, the fixed-side test piece 40 was coated with “MoS ₂ fired film 1”, and the movable-side test piece 41 was coated with “Cr-containing DLC”. Is. In the case “S”, the fixed side test piece 40 is coated with “WC / C (BLINIT C)”, and the movable side test piece 41 is coated with “MoS ₂ fired film 2”. That is, these cases “R” and “S” are formed by forming a DLC-based film on one sliding member and forming a molybdenum disulfide-based film on the other sliding member.

 Such a fine wear test in line contact was performed under the test conditions shown in FIG. That is, the load (maximum contact surface pressure) applied to the movable test piece 41 is 80 N (114.3 MPa), the frequency of the minute displacement of the movable test piece 41 is 116 Hz, the amplitude of the minute displacement is 0.1 mm, and the temperature is 160 ± 10 °. C.

FIG. 4A shows the test results relating to the life of the fine wear test in line contact. As shown in FIG. 4A, it can be seen that the combination of cases “C”, “Q”, “R”, and “S” has a long life on the sliding surface. In the case “C”, the fixed-side test piece 40 is coated with “MoS ₂ fired film 2”, and the movable-side test piece 41 is a combination of no treatment (no coating and no surface treatment). In the case “Q”, the fixed side test piece 40 is coated with “WC / C (BLINIT C)”, and the movable side test piece 41 is a combination of no treatment (no coating and no surface treatment).

 FIG. 4 (b) shows a case where the load is increased to 150 N for the cases “C” and “R” among the combinations of the above cases “C”, “Q”, “R”, and “S”. It is a test result regarding the lifetime when it is performed. As shown in FIG. 4B, the combination of the case “R”, that is, the one in which the DLC-based film is formed on one sliding member and the molybdenum disulfide-based film is formed on the other sliding member is the sliding surface. As can be seen from FIG.

 FIG.4 (c) is a measurement result of the abrasion loss in the sliding surface in each combination. As shown in FIG. 4C, it can be seen that the combination of cases “R” and “S” has a small amount of wear. In other combinations, for example, cases “G”, “H”, “I”, and “J” also have a small amount of wear, but these combinations have a short life as shown in FIG. . Also, the combination of the case “Q” has a small amount of wear, but as shown in FIG. 5C, when one sliding member (test piece) is not treated, a DLC-based film is applied to one sliding member. Since the life is short compared with the combination in which the other sliding member is formed with the molybdenum disulfide-based film, the combinations that can achieve both high wear resistance and long life are the cases “R” and “S”. It can be seen that it is.

[Fine wear test (surface contact)]
Next, the results of a fine wear test with surface contact will be described. Fig.5 (a) is a schematic diagram which shows the fine abrasion test method in a surface contact. As shown in FIG. 5 (a), a disk-shaped movable side test piece 42 is used in the fine movement wear test in the surface contact. A plurality of contact portions 42b having a predetermined contact area are provided on the lower surface 42a of the movable side test piece 42, and both the test pieces are in a state where these contact portions 42b are in surface contact with the upper surface 40a of the fixed side test piece 40. Place. And the abrasion state of both the test pieces in a surface contact part (sliding surface) was investigated by rotating the movable test piece 42 minutely, applying a load with respect to the movable side test piece 42 from the upper direction. In addition, the material of the fixed side test piece 40 and the movable side test piece 42 is the same as that of the fine movement abrasion test in the said line contact.

 Such a fine wear test in surface contact was performed under the test conditions shown in FIG. That is, the load (maximum contact surface pressure) applied to the movable test piece 42 is 40 MPa, the minute rotation frequency of the movable test piece 42 is 20 Hz, the minute rotation amplitude is 0.126 mm, and the temperature is room temperature (room temperature).

  FIG. 5C shows a measurement result of a wear index indicating the degree of wear on the sliding surface in the combination of cases “B”, “Q”, and “R”. As shown in FIG. 5C, the case “R”, that is, the combination in which the DLC-based film is formed on one sliding member and the molybdenum disulfide-based film is formed on the other sliding member is a surface contact. It can be seen that the film has high wear resistance even with respect to fine friction. On the other hand, it can be seen that the combination of the case “Q” having high wear resistance with respect to fine friction in line contact has low wear resistance with respect to fine friction in surface contact.

  From the results of the fine wear test in line contact and surface contact as described above, a DLC-based film is formed on one sliding member as in the case “R”, and a molybdenum disulfide-based film is formed on the other sliding member. It can be seen that, by adopting the formed combination, it is possible to achieve both high wear resistance and long life regardless of the contact form.

[Impact wear test]
Next, the results of the impact wear test will be described. FIG. 6A is a schematic diagram showing an impact wear test method. As shown in FIG. 6 (a), on the same central axis, a sliding side test piece 43 that rotates around the central axis and a striking side test piece 44 that is displaced along the central axis are arranged and contacted. On the surface (sliding surface) 45, the knocking side test piece 44 collides with the sliding side test piece 43 to repeatedly give an impact, and the sliding side test piece 43 is rotated to generate sliding friction on the contact surface 45. . That is, sliding friction with repeated impact occurs on the contact surface 45. The impact wear test was performed under the test conditions shown in FIG.

  Further, in this impact wear test, a combination of cases “A”, “B”, “C”, “I”, “J”, “Q”, and “R” was tested. These combinations are the same as the combinations in which the sliding side test piece 43 is regarded as the fixed side test piece 40 and the striking side test piece 44 is regarded as the movable side test piece 41.

  FIG. 7A shows the measurement results regarding the relationship between the number of impact cycles (horizontal axis) and the rotational torque (vertical axis). When the lubrication performance of the coating layer deteriorates, the rotational torque increases. Therefore, the lifetime of the coating layer can be measured by searching for an increase point of the rotational torque. As shown in FIG. 7A, it can be seen that the combination of the case “B” has a very short life because the rotational torque increases in several thousand cycles. Further, the combination of the case “C” increases the rotational torque in about 40,000 cycles on the average, and the combination of the case “R” has the rotational torque almost unchanged even after 80,000 cycles, and does not vary greatly. Therefore, it can be seen that the combination of the case “R” has a very long life against sliding friction with repeated impacts.

  FIG. 7B shows the result of measuring the life in the same way for each case combination. As shown in FIG. 7B, it can be seen that the combination of cases “J”, “Q”, and “R” has a long life of 80,000 cycles or more against friction with repeated impacts. FIG.7 (c) is the result of having measured the abrasion amount by the combination of each case. As shown in FIG. 7C, it can be seen that the combination of cases “J”, “Q”, and “R” has a small amount of wear, that is, high wear resistance against sliding friction with repeated impact. .

  The combination of cases “J” and “Q” certainly has high wear resistance and long life against sliding friction with repeated impact, but as shown in FIG. "" Has a short life against fine friction caused by line contact, and as shown in FIG. 5C, the combination of case "Q" has low wear resistance against fine friction caused by surface contact. Therefore, from the results of the fine contact wear test and impact wear test in the above-mentioned line contact and surface contact, even if friction with repeated impact and microslip occurs on the sliding surface, excellent wear resistance and long life are achieved. It can be seen that the compatible coating combination is the case “R”, that is, a combination in which a DLC-based film is formed on one sliding member and a molybdenum disulfide-based film is formed on the other sliding member. Furthermore, the inventor of the present application has confirmed that the combination of the case “R” exhibits excellent wear resistance and long life even in an impact wear test under a high temperature condition of 381 ° C.

Based on the test results as described above, according to the sliding structure ST in the present embodiment, the DLC-based coating (Cr is applied to the sliding surface of one sliding member (the sliding surface 30 of the tab tail 10a in the turbine blade 10). DLC), and a molybdenum disulfide-based film (MoS ₂ fired film 1) is formed on the sliding surface of the other sliding member (the sliding surface 30 of the dovetail slot 20a in the turbine disk 20). By doing so, it is possible to improve wear resistance and life against friction (including high temperature conditions) with repeated impacts and minute slips that occur on the sliding surface 30.

In the above embodiment, the MoS ₂ fired film 1 having the intermediate layer as shown in FIG. 1C is formed on the sliding surface 30 of the dovetail slot 20a in the turbine disk 20, but the material of the turbine disk 20 is In the case of a titanium alloy, the MoS ₂ fired film 2 having the intermediate layer shown in FIG. Alternatively, a molybdenum disulfide-based film may be formed on the turbine blade 10 side, and a DLC-based film may be formed on the turbine disk 20 side. Furthermore, not only the combination of the case “R” but also the combination of the case “S” may be adopted.

  Further, the DLC-based film is preferably one containing amorphous hydrogenated carbon or a metal element such as Cr, or one having an intermediate layer as shown in FIG. 1B, rather than pure amorphous carbon. . By these methods, the adhesion between the base material and the DLC film on the outermost layer can be further improved, which can contribute to the improvement of wear resistance and life. On the other hand, the molybdenum disulfide-based film may be a fired film or a sputtering film containing molybdenum disulfide, or a surface treatment in which molybdenum disulfide powder is impregnated into the outermost layer by a shot peening method.

Furthermore, in the said embodiment, although the turbine blade 10 and the turbine disk 20 in the turbine of a gas turbine engine were illustrated and demonstrated as the sliding structure ST, it is not limited to this, At least one pair which has a sliding surface which mutually contacts. The present invention can be applied to any sliding structure including the above-described sliding members and capable of generating friction with repeated impact and microslip on the sliding surface. In addition, it is not always necessary to be accompanied by repeated impacts. As is apparent from the above-described fine wear test, the present invention can be applied to even a sliding structure in which only fine friction (minute sliding friction) occurs. Abrasion resistance and long life can be realized.

  For example, as an embodiment other than a gas turbine engine, the present invention can be applied to a contact portion 52 between a shaft 50 and a duct 51 which are parts of a jet engine as shown in FIG. Both the shaft 50 and the duct 51 rotate at the same rotation speed around the rotation axis, but are not mechanically joined at the contact portion 52, and therefore, the irregular vibration of the duct 51 at the contact portion 52. Friction with repetitive impacts and micro-slip due to. That is, the shaft 50 and the duct 51 correspond to “at least a pair of sliding members having sliding surfaces that come into contact with each other”, and are components that constitute a sliding structure. Accordingly, by forming a DLC-based film on the sliding surface of one sliding member and forming a molybdenum disulfide-based film on the sliding surface of the other sliding member, wear resistance on the sliding surface of the contact portion 52 is achieved. And life can be improved. Specifically, if a Cr-containing DLC film having an intermediate layer as shown in FIG. 1B is formed on the shaft 50 and the material of the duct 51 is an iron-based alloy, it is shown in FIG. A molybdenum disulfide fired film having such a thermal spraying intermediate layer is formed.

It is a composition schematic diagram of sliding structure ST in one embodiment of the present invention. It is explanatory drawing of the fine movement abrasion test in the line contact in one Embodiment of this invention. It is explanatory drawing about the layer structure of the film | membrane used in the fine movement abrasion test in one Embodiment of this invention. It is a test result of the fine abrasion test in the line contact in one Embodiment of this invention. It is explanatory drawing of the fine movement abrasion test in the surface contact in one Embodiment of this invention. It is explanatory drawing of the impact wear test in one Embodiment of this invention. It is a test result of the impact wear test in one embodiment of the present invention. It is another Example of this invention.

Explanation of symbols

ST ... slide structure, 10 ... turbine blade, 10a ... Tabuteiru, 20 ... turbine disk, 20a ... dovetail slot, 30 ... sliding _{surface, L} 10, L _{20 ...} base _{material, L 11} ... Cr _{layer, L 12} ... Cr gradient layer, L ₁₃ ... Cr-containing DLC layer, L ₂₁ ... Ni-Al sprayed layer, L ₂₂ ... Cu-Ni-In sprayed layer, L ₂₃ ... Molybdenum disulfide fired film

Claims (4)

A sliding structure comprising at least a pair of sliding members having sliding surfaces in contact with each other,
An intermediate for forming a DLC (diamond-like carbon) film containing Cr (chromium) on the sliding surface of one sliding member and improving adhesion between the DLC film and the base material of the one sliding member Forming a layer,
Forming a fired film containing molybdenum disulfide on the sliding surface of the other sliding member and forming an intermediate layer for enhancing adhesion between the fired film and the base material of the other sliding member;
The one sliding member has a Cr or CrN layer and a Cr or CrN gradient layer as the intermediate layer between the DLC film containing Cr and a base material,
When the base material is an iron-based alloy, the other sliding member has a Ni—Al (nickel-aluminum) sprayed layer as the intermediate layer between the fired film containing molybdenum disulfide and the base material. And a Cu-Ni-In (copper-nickel-indium) sprayed layer . A sliding structure comprising at least a pair of sliding members having sliding surfaces in contact with each other,
An intermediate for forming a DLC (diamond-like carbon) film containing Cr (chromium) on the sliding surface of one sliding member and improving adhesion between the DLC film and the base material of the one sliding member Forming a layer,
Forming a fired film containing molybdenum disulfide on the sliding surface of the other sliding member and forming an intermediate layer for enhancing adhesion between the fired film and the base material of the other sliding member;
The one sliding member has a Cr or CrN layer and a Cr or CrN gradient layer as the intermediate layer between the DLC film containing Cr and a base material,
When the base material is a titanium alloy, the other sliding member has Ni-Tl-B (nickel-thallium-boron) as the intermediate layer between the fired film containing molybdenum disulfide and the base material. A sliding structure having a plating layer . In a sliding structure comprising at least a pair of sliding members having sliding surfaces that contact each other, a film forming method used for the sliding surfaces,
An intermediate for forming a DLC (diamond-like carbon) film containing Cr (chromium) on the sliding surface of one sliding member and improving adhesion between the DLC film and the base material of the one sliding member Forming a layer,
Forming a fired film containing molybdenum disulfide on the sliding surface of the other sliding member and forming an intermediate layer for enhancing adhesion between the fired film and the base material of the other sliding member;
For the one sliding member, a Cr or CrN layer and a Cr or CrN gradient layer are formed as the intermediate layer between the DLC film containing Cr and a base material,
For the other sliding member, when the base material is an iron-based alloy, a Ni—Al (nickel-aluminum) sprayed layer as the intermediate layer between the fired film containing molybdenum disulfide and the base material. and Cu-Ni-In (copper - nickel - indium) film forming method and forming a sprayed layer. In a sliding structure comprising at least a pair of sliding members having sliding surfaces that contact each other, a film forming method used for the sliding surfaces,
An intermediate for forming a DLC (diamond-like carbon) film containing Cr (chromium) on the sliding surface of one sliding member and improving adhesion between the DLC film and the base material of the one sliding member Forming a layer,
Forming a fired film containing molybdenum disulfide on the sliding surface of the other sliding member and forming an intermediate layer for enhancing adhesion between the fired film and the base material of the other sliding member;
For the one sliding member, a Cr or CrN layer and a Cr or CrN gradient layer are formed as the intermediate layer between the DLC film containing Cr and a base material,
For the other sliding member, when the base material is a titanium alloy, Ni—Tl—B (nickel-thallium-boron) is used as the intermediate layer between the fired film containing molybdenum disulfide and the base material. A method of forming a film, comprising forming a plating layer .

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