JP4690148B2 - 有機薄膜製造方法および光cvd装置 - Google Patents
有機薄膜製造方法および光cvd装置 Download PDFInfo
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- JP4690148B2 JP4690148B2 JP2005253084A JP2005253084A JP4690148B2 JP 4690148 B2 JP4690148 B2 JP 4690148B2 JP 2005253084 A JP2005253084 A JP 2005253084A JP 2005253084 A JP2005253084 A JP 2005253084A JP 4690148 B2 JP4690148 B2 JP 4690148B2
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- photosensitizer
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- 238000004519 manufacturing process Methods 0.000 title claims description 10
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- 239000000758 substrate Substances 0.000 claims description 45
- 229920006254 polymer film Polymers 0.000 claims description 13
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- 239000000178 monomer Substances 0.000 description 33
- 239000007789 gas Substances 0.000 description 25
- 230000005284 excitation Effects 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 12
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- 229920002574 CR-39 Polymers 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000007086 side reaction Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 239000002861 polymer material Substances 0.000 description 4
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XFCMNSHQOZQILR-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOC(=O)C(C)=C XFCMNSHQOZQILR-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical group N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
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- 238000002835 absorbance Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- JKJWYKGYGWOAHT-UHFFFAOYSA-N bis(prop-2-enyl) carbonate Chemical compound C=CCOC(=O)OCC=C JKJWYKGYGWOAHT-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
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- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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- 238000002834 transmittance Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
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- Formation Of Insulating Films (AREA)
Description
図1は本発明に係る有機薄膜製造方法を説明するための有機薄膜製造装置(光CVD装置)1の概略構成図である。図示する有機薄膜製造装置1は、成膜室11が内部に形成された真空チャンバ12を備えている。成膜室11の底部には、基板Wを支持するステージ13が設置されている。ステージ13の内部には冷却水等の冷媒が循環する流路14が形成されており、これによりステージ13を所定の低温度に保持可能となっている。
図5は本発明の第2の実施の形態を示している。なお、図において上述の第1の実施の形態と対応する部分には同一の符号を付し、その詳細な説明は省略するものとする。
図6A,Bは本発明の第3の実施の形態を示している。なお、図において上述の第1の実施の形態と対応する部分については同一の符号を付し、その詳細な説明は省略するものとする。
11 成膜室
12 真空チャンバ
13 ステージ
15 光源
16 窓部材
17 排気管
18 原料有機分子導入ライン
19 光増感剤導入ライン
20 ガス供給管
21 原料モノマー
22 光増感剤
23 多孔板
W 基板
Claims (5)
- 真空チャンバ内に設置された基板上に有機薄膜を形成する有機薄膜製造方法であって、
前記真空チャンバ内に原料有機分子および光増感剤を導入する工程と、
前記真空チャンバへ導入される導入経路において前記光増感剤に光照射をすることで、前記基板に光照射をせずに前記光増感剤を活性化する工程と、
前記活性化した光増感剤を介して前記原料有機分子を重合させて前記基板上に高分子膜を堆積させる工程とを有することを特徴とする有機薄膜製造方法。 - 前記原料有機分子は、1分子中に1個又は2個以上の重合性の反応基をもつ有機分子であることを特徴とする請求項1に記載の有機薄膜製造方法。
- 前記光増感剤は、紫外線領域に光吸収性がある有機材料であることを特徴とする請求項1に記載の有機薄膜製造方法。
- 真空チャンバと、真空チャンバ内で基板を支持するステージと、前記真空チャンバ内へ原料有機分子を導入する原料有機分子導入系と、前記真空チャンバ内へ光増感剤を導入する光増感剤導入系と、前記光増感剤を活性化させる光を照射する光源とを備え、
前記光源は、前記光増感剤導入系に臨んで設置されており、前記基板に光照射することなく前記光増感剤を光照射により活性化することを特徴とする光CVD装置。 - 前記ステージは、前記基板を冷却する基板冷却機構を備えていることを特徴とする請求項4に記載の光CVD装置。
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JP2007063637A JP2007063637A (ja) | 2007-03-15 |
JP4690148B2 true JP4690148B2 (ja) | 2011-06-01 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2950080B1 (fr) * | 2009-09-17 | 2012-03-02 | Essilor Int | Procede et dispositif de depot chimique en phase gazeuse d'un film polymere sur un substrat |
JP5981115B2 (ja) * | 2011-09-20 | 2016-08-31 | 株式会社アルバック | 成膜装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57136932A (en) * | 1981-02-17 | 1982-08-24 | Seiko Epson Corp | Photochemical reaction device |
JPH0931115A (ja) * | 1995-07-13 | 1997-02-04 | Japan Atom Energy Res Inst | 光誘起蒸着重合法 |
JPH11186096A (ja) * | 1997-12-25 | 1999-07-09 | Matsushita Electric Ind Co Ltd | 有機薄膜コンデンサ |
JP2001521293A (ja) * | 1997-10-24 | 2001-11-06 | クエスター テクノロジー インコーポレイテッド | 輸送重合および化学気相成長法用新蒸着システムおよびプロセス |
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2005
- 2005-09-01 JP JP2005253084A patent/JP4690148B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57136932A (en) * | 1981-02-17 | 1982-08-24 | Seiko Epson Corp | Photochemical reaction device |
JPH0931115A (ja) * | 1995-07-13 | 1997-02-04 | Japan Atom Energy Res Inst | 光誘起蒸着重合法 |
JP2001521293A (ja) * | 1997-10-24 | 2001-11-06 | クエスター テクノロジー インコーポレイテッド | 輸送重合および化学気相成長法用新蒸着システムおよびプロセス |
JPH11186096A (ja) * | 1997-12-25 | 1999-07-09 | Matsushita Electric Ind Co Ltd | 有機薄膜コンデンサ |
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