JP4688422B2 - Resin molding equipment - Google Patents

Resin molding equipment Download PDF

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JP4688422B2
JP4688422B2 JP2004051952A JP2004051952A JP4688422B2 JP 4688422 B2 JP4688422 B2 JP 4688422B2 JP 2004051952 A JP2004051952 A JP 2004051952A JP 2004051952 A JP2004051952 A JP 2004051952A JP 4688422 B2 JP4688422 B2 JP 4688422B2
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substrate
resin
molding
molded
resin material
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JP2005238652A (en
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武彦 奥村
守 中村
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Towa Corp
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Description

本発明は、被成形品および樹脂材料を樹脂成形用金型に供給して樹脂成形し、さらに、樹脂成形された成形品を前記金型から取り出す際に使用される樹脂成形装置の改良に関するものである。 The present invention supplies a the molded article and a resin material in the resin mold and the resin molded further improvement of the resin molding apparatus used when you eject the resin molded moldings from the mold It is about.

従来から、被成形品および該被成形品を樹脂成形する樹脂材料を供給する成形材料供給部と、成形材料を樹脂成形用金型にて樹脂成形する成形部と、前記金型にて樹脂成形された成形品を取り出す成形品取出部と、樹脂成形装置全体を制御する制御部とを含む樹脂成形装置が広く利用されており、装置の自動制御化の傾向は、近年、より一層高まってきているが、操作(オペレート)、保守・管理(メンテナンス)する作業は行われている。   Conventionally, a molding material supply unit that supplies a molded product and a resin material that resin-molds the molded product, a molding unit that molds the molding material with a resin molding mold, and resin molding with the mold In recent years, a resin molding apparatus including a molded product take-out part for taking out a molded product and a control unit for controlling the entire resin molding apparatus is widely used, and the tendency of automatic control of the apparatus has been further increased in recent years. However, operations (operation), maintenance and management (maintenance) are being performed.

そこで、第一の装置例として、金型(モールドユニット)を複数個着脱自在に装設する成形部(連結部)の両側に、成形材料供給部(インロード部)と成形品取出部(アウトロード部)とが離間(独立)状態で配置され、且つ、制御部(制御機構)は当該供給部内に組み込んだ状態で設けて構成された装置が知られている。成形材料(被成形品・樹脂材料)および成形品の移送経路は、搬送手段(供給取出機構)によって、略直線的に且つ略一方の方向へのみ供給・取出(搬出入)するように構成される。被成形品および成形品を装置内外へ供給・取出する作業は、平面視して様々な異なる側から取出・供給するように構成される。そして、第一の装置は、平面視して長方形に構成されると共に、成形部を当該長辺方向へ複数個着脱自在にすることができるように構成される(例えば、特許文献1参照。)。
第二の装置例として、第一の装置と同様に、金型(上型・下型)を装着する成形部(プレス部)の両側に、成形材料供給部(インローダ部)と成形品取出部(アンローダ部)とが離間状態で配置されたものであって、さらに、成形部の金型に粘着フィルム或いはリリースフィルムを供給するように構成された装置が知られている。そして、第二の装置においては、第一の装置と同様に、搬送手段によって、被成形品および成形品略直線的に且つ略一方の方向へのみ供給・取出されるように構成される。また、被成形品および成形品を装置内外へ供給・取出する作業は、第一の装置とは異なり、平面視して特定の側において行われるように構成されている。しかし、樹脂材料を装置内へ供給する作業は、被成形品および成形品を装置内外へ供給・取出する作業とは平面視して異なる側から行われるように構成される。また、当該フィルムの送出・巻取方向は、被成形品および成形品の送出・取出方向に対して直交するように配置されている。そして、第二の装置は、平面視して長方形ではなく、略正方形に構成されたものである(例えば、特許文献2参照。)。
特開平11−307561号公報(第3〜4頁、図1) 特開2001−170962号公報(第4頁、図2)
Therefore, as a first device example, on both sides of a molding part (connecting part) where a plurality of molds (mold units) are detachably mounted, a molding material supply part (inload part) and a molded product take-out part (out) disposed loaded portion) and is in a spaced apart (separate) state, and the control unit (control mechanism) is that have been unit constituted by providing a state incorporated in the supply portion is known. The transfer path of the molding material (molded product / resin material) and the molded product is configured to be supplied and taken out (carrying in / out) in a substantially straight line and only in one direction by the conveying means (feeding and taking out mechanism). The The operation of supplying and taking out the molded product and the molded product into and out of the apparatus is configured to be taken out and supplied from various different sides in plan view . The first device is configured in a rectangular shape in plan view, and is configured so that a plurality of molded parts can be attached and detached in the long side direction (see, for example, Patent Document 1). .
As a second device example, as with the first device, a molding material supply unit (inloader unit) and a molded product takeout unit are provided on both sides of a molding unit (press unit) to which a mold (upper mold / lower mold) is attached. be one (unloader section) and are arranged in a separated state, further, an apparatus configured to provide an adhesive film or the release film in a mold of a molding unit that is known. In the second apparatus, similarly to the first apparatus , the article to be molded and the molded article are substantially linearly supplied and taken out only in one direction by the conveying means . Further, unlike the first apparatus , the operation of supplying and taking out the molded article and the molded article into and out of the apparatus is configured to be performed on a specific side in plan view . However, the operation of supplying the resin material into the apparatus is configured to be performed from a different side as viewed in plan from the operation of supplying and taking out the molded product and the molded product into and out of the apparatus . In addition, the film feeding and winding directions are arranged so as to be orthogonal to the molding and molding product feeding and unloading directions . And the 2nd apparatus is comprised by the substantially square instead of the rectangle by planar view (for example, refer patent document 2).
Japanese Patent Laid-Open No. 11-307561 (pages 3 to 4, FIG. 1) Japanese Patent Laid-Open No. 2001-170962 (page 4, FIG. 2)

しかしながら、成形材料(被成形品・樹脂材料)および成形品を、装置内外へ供給・取出する作業を実施する際に、従来の第一、第二の装置によれば、作業上(操作上・メンテナンス上)の問題が発生すると考えられる。
第一の装置の場合、複数個の成形部を連結すると、成形材料供給部への成形材料の供給作業および成形品取出部への成形品の取出作業が、当該供給部と取出部とが離間(独立)状態になることに加えて、さらに、平面視して様々な異なる側から作業を行う必要が生じるので、作業効率が格段に低下することが考えられる。
第二の装置の場合、第一の装置と比較すれば、成形材料供給部と成形品取出部との離間状態は緩和されるが、当該供給部における被成形品と樹脂材料とは、平面視して異なるから供給することになるので、平面視して略正方形ではあるが、作業効率の向上に満足のいくものでないと考えられる。さらに、成形部に金型を、例えば、一個から二個に増設するような場合、当該フィルムの送出・巻取方向直交する方向に沿って並んだ状態に成形部を連結する構成となるので、必然的に、第二の装置の平面からみた略正方形から長方形の形状に変更されて、作業性(操作性・メンテナンス性)の低下が懸念される。
本発明は、従来の第一・第二の装置で解決することが困難であった、成形材料供給部と成形品取出部とが離間(独立)状態で且つ平面視して異なるから成形材料および成形品の供給・取出を行うことに起因する作業効率が低下する問題を効率良く解決することができる、樹脂成形装置を提供することを目的とする。
However, according to the conventional first and second devices, when performing operations to supply and take out molding materials (molded products / resin materials) and molded products into and out of the device, The problem of maintenance) is considered to occur.
In the case of the first apparatus, when a plurality of molding parts are connected, the supply of the molding material to the molding material supply part and the removal of the molded product to the molding product extraction part are separated from each other by the supply part and the extraction part. In addition to being in the (independent) state, it is necessary to perform work from various different sides in plan view, and it is conceivable that the work efficiency is significantly reduced.
In the case of the second device, compared with the first device, the separation state between the molding material supply unit and the molded product take-out unit is alleviated, but the molded product and the resin material in the supply unit are in plan view. Therefore, it is supplied from a different side, so that it is substantially square in plan view , but is not satisfactory in improving the working efficiency. Furthermore, the mold forming unit, for example, if such Boost from one to two, since the configuration of connecting the molded part in a state aligned along a direction perpendicular to the sending-winding direction of the film Naturally, the shape is changed from a substantially square shape to a rectangular shape as seen from the plane of the second device, and there is a concern that workability (operability / maintenance property) may deteriorate.
The present invention is difficult to solve with the conventional first and second apparatuses, and the molding material supply part and the molding product take-out part are separated (independent) and from different sides in plan view. It is another object of the present invention to provide a resin molding apparatus that can efficiently solve the problem of reduced work efficiency caused by supplying and taking out molded products.

そこで、前記技術的課題を解決するために本発明に係る樹脂成形装置(X・Y)は、被成形品である成形前基板(1)を供給する基板材料供給部(AS)と、成形前基板(1)を樹脂成形するための樹脂材料(5)を供給する樹脂材料供給部(AR)と、樹脂成形用金型(8(8a・8b))を使用して成形前基板(1)を樹脂成形する成形部(B)と、樹脂成形された成形品である成形済基板(7)を取り出す成形品取出部(C)と、樹脂成形装置(X・Y)全体を制御する制御部(D)、樹脂成形用金型(8(8a・8b))に成形前基板(1)と樹脂材料(5)とを搬入し、且つ、樹脂成形用金型(8(8a・8b))から成形済基板(7)を搬出する搬送手段(17)とを備える樹脂成形装置(X・Y)であって、基板材料供給部(AS)および成形品取出部(C)の少なくとも一方と搬送手段(17)の待機位置(M)と樹脂材料供給部(AR)とは樹脂成形装置(X・Y)を平面視した場合における特定の側(F)において直線に沿って略一列に並び、基板材料供給部(AS)と成形品取出部(C)との少なくとも一方は待機位置(M)を挟んで樹脂材料供給部(AR)に対向して配置され、基板材料供給部(AS)と成形品取出部(C)樹脂材料供給部(AR)とが一体化された供給取出部(E)有し、供給取出部(E)と成形部(B)と制御部(D)が平面視して略正方形に配置されるとともに着脱自在に構成され、搬送手段(17)が供給取出部(E)と成形部(B)との間において搬送する方向は直線に対して略直交しており、成形前基板(1)の供給と樹脂材料(5)の供給と成形済基板(7)の取出とは特定の側(F)において行われることを特徴とする。 In order to solve the technical problem, the resin molding apparatus (XY) according to the present invention includes a substrate material supply unit (AS) that supplies a pre-molding substrate (1) that is a molded product , and a pre- molding device. A pre-molding substrate (1) using a resin material supply part (AR) for supplying a resin material (5) for resin-molding the substrate (1) and a resin molding die (8 (8a, 8b)) the a forming unit for resin molding (B), product removal section for taking out a molded finished substrate is a molded article molded (7) (C), and control unit for controlling the entire resin molding apparatus (X · Y) (D) and the resin-molding die (8 (8a, 8b)), the pre-molding substrate (1) and the resin material (5) are carried into the resin-molding die (8 (8a, 8b)). ) from a conveying means for unloading the molded pre substrate (7) (17) resin molding apparatus and a (X · Y), a substrate material supply section AS) and at least one of the molded product take-out part (C), the standby position (M) of the conveying means (17), and the resin material supply part (AR) are specified when the resin molding apparatus (XY) is viewed in plan view. The side (F) is arranged in a line along a straight line, and at least one of the substrate material supply part (AS) and the molded product take-out part (C) is sandwiched between the standby position (M) and the resin material supply part (AR). oppositely disposed, the substrate material supply section (aS) and product removal unit (C) a resin material supply unit (AR) and supplying extraction unit is integrated has an (E), supply extraction unit ( E) , the forming part (B), and the control part (D) are arranged in a substantially square shape in plan view and are configured to be detachable, and the conveying means (17) is provided with the supply take-out part (E) and the forming part (B). ) Is substantially orthogonal to the straight line, and the pre-molding substrate (1) is provided. And characterized in that it is carried out in particular side (F) of the supply of the resin material (5) and removal of the molded pre substrate (7).

また、前記技術的課題を解決するため本発明に係る樹脂成形装置X・Yは、前述した樹脂成形装置(X・Y)において、基板材料供給部(AS)と成形品取出部(C)とは、鉛直方向に並んで昇降自在に配置され、又は、水平方向に並んで配置されていることを特徴とする。 In order to solve the technical problem, the resin molding apparatus ( X • Y ) according to the present invention includes a substrate material supply unit (AS) and a molded product extraction unit (X • Y) in the resin molding apparatus (X • Y) described above. C) is characterized by being vertically arranged side by side or vertically arranged, or arranged side by side in the horizontal direction .

本発明は、被成形品である成形前基板(1)および樹脂材料(5)を樹脂成形用金型(8(8a・8b))に供給して樹脂成形し、さらに、樹脂成形された成形品である成形済基板(7)金型(8(8a・8b))から取り出す工程において、次の構成を有する樹脂成形装置(X・Y)を使用する。基板材料供給部(AS)および成形品取出部(C)の少なくとも一方と搬送手段(17)の待機位置(M)と樹脂材料供給部(AR)とは、樹脂成形装置(X・Y)を平面視した場合における特定の側(F)において直線に沿って略一列に並んでいる。また、基板材料供給部(AS)と成形品取出部(C)との少なくとも一方は、搬送手段(17)の待機位置(M)を挟んで樹脂材料供給部(AR)に対向して配置されている。これらにより、樹脂成形装置(X・Y)を平面視した場合における特定の側(F)から、成形前基板(1)及び樹脂材料(5)の供給と成形済基板(7)の取出とを行うことができる。従って、樹脂成形装置(X・Y)を使用して樹脂成形の作業をする際の作業効率の向上をはかることができる。また、供給取出部(E)と成形部(B)と制御部(D)とが平面視して略正方形に配置されると共に着脱自在に構成されている。これにより、成形部(B)を増設した場合においても搬送手段(17)による搬送系路の長さの増加が抑制される。従って、樹脂成形装置(X・Y)における作業性が向上する。 In the present invention , a pre-molding substrate (1) and a resin material (5) , which are molded products , are supplied to a resin molding die (8 (8a, 8b)) to perform resin molding, and further molded by resin molding. in step be Eject the molded substrate is goods (7) from the mold (8 (8a · 8b)), using a resin molding apparatus having the following configuration (X · Y). At least one of the substrate material supply part (AS) and the molded product take-out part (C), the standby position (M) of the conveying means (17), and the resin material supply part (AR) are provided with a resin molding apparatus (XY). They are arranged in a line along a straight line on a specific side (F) in plan view. Further, at least one of the substrate material supply unit (AS) and the molded product take-out unit (C) is arranged to face the resin material supply unit (AR) with the standby position (M) of the conveying means (17) interposed therebetween. ing. Thus, the supply of the pre-molding substrate (1) and the resin material (5) and the removal of the molded substrate (7) from the specific side (F) when the resin molding apparatus (XY) is viewed in plan. It can be carried out. Therefore, it is possible to improve the work efficiency when the resin molding operation is performed using the resin molding apparatus (XY) . Further, the supply take-out part (E), the molding part (B), and the control part (D) are arranged in a substantially square shape in plan view and are detachable. Thereby, even when a shaping | molding part (B) is expanded, the increase in the length of the conveyance system path by a conveyance means (17) is suppressed. Therefore, workability in the resin molding apparatus (X / Y) is improved.

成形前基板(1)を供給する基板材料供給部(AS)と、樹脂材料(5)を供給する樹脂材料供給部(AR)と、樹脂成形用金型(8(8a・8b)を使用して成形前基板(1)を樹脂成形する成形部(B)と、成形済基板(7)を取り出す成形品取出部(C)と、樹脂成形装置(X・Y)全体を制御する制御部(D)、樹脂成形用金型(8(8a・8b))に成形前基板(1)と樹脂材料(5)とを搬入し、且つ、樹脂成形用金型(8(8a・8b))から成形済基板(7)を搬出する搬送手段(17)とを備える樹脂成形装置(X・Y)であって、基板材料供給部(AS)および成形品取出部(C)の少なくとも一方と搬送手段(17)の待機位置(M)と樹脂材料供給部(AR)とは樹脂成形装置(X・Y)を平面視した場合における特定の側(F)において直線に沿って略一列に並んでおり、且つ、基板材料供給部(AS)と成形品取出部(C)との少なくとも一方は搬送手段(17)の待機位置(M)を挟んで樹脂材料供給部(AR)に対向して配置され、基板材料供給部(AS)と成形品取出部(C)と樹脂材料供給部(AR)とが一体化された供給取出部(E)を有し、供給取出部(E)と成形部(B)と制御部(D)とが平面視して略正方形に配置されるとともに着脱自在に構成されている。また、成形前基板(1)の供給と樹脂材料(5)の供給と成形済基板(7)の取出とは、特定の側(F)において行われる。 A substrate material supply unit (AS) for supplying the substrate (1) before molding , a resin material supply unit (AR) for supplying the resin material (5), and a mold for resin molding (8 (8a and 8b)) are used. forming part of the resin molding the substrate (1) before forming Te (B) and, product removal section for taking out a molded pre substrate (7) (C), and control unit for controlling the entire resin molding apparatus (X · Y) ( D) and a resin molding die (8 (8a, 8b)), and a pre-molding substrate (1) and a resin material (5) are carried into the resin molding die (8 (8a, 8b)). A resin molding apparatus (XY) including a conveying means (17) for unloading the molded substrate (7) from the substrate, and conveying with at least one of the substrate material supply unit (AS) and the molded product extraction unit (C). The standby position (M) of the means (17) and the resin material supply part (AR) are determined when the resin molding apparatus (XY) is viewed in plan view. The specific side (F) is arranged in a line along a straight line, and at least one of the substrate material supply part (AS) and the molded product take-out part (C) is a standby position (M ) And the resin material supply unit (AR), and the substrate material supply unit (AS), the molded product extraction unit (C), and the resin material supply unit (AR) are integrated. (E), the supply extraction part (E), the molding part (B), and the control part (D) are arranged in a substantially square shape in plan view and are detachable. The supply of the substrate (1), the supply of the resin material (5), and the removal of the molded substrate (7) are performed on a specific side (F).

以下、図1および図2に基づいて、実施例を説明する。
図1および図2は、本発明に係る各樹脂成形装置で用いられる樹脂成形用金型、図1では一個、図2では二個、配置構成された樹脂成形装置をそれぞれ示す平面図である。
Hereinafter, an embodiment will be described with reference to FIGS. 1 and 2.
1 and 2, a resin mold used in each resin molding apparatus according to the present invention, is a plan view showing one in Fig. 1, two in FIG. 2, the arrangement is a resin molding apparatus, respectively .

被成形品としては、例えば、図1および図2に示すように、成形前基板1を用いる。成形前基板1は、円形状或いは多角形状である任意の形状で形成する所要複数枚の基板2(短冊状のリードフレームを含む)と、該基板2上に複数列で所要複数個マトリクス状に装着された或いは単数列で装着された半導体チップ3(以下、チップ3と示す。)と、基板2とチップ3とを電気的に接続する所要複数本のワイヤ4とで構成されている。そして、少なくともチップ2を含む部分において、樹脂材料5が加熱溶融化されることによって形成された溶融樹脂によって樹脂成形する。ここで、チップ2が装着された一方の面に一括して単数個或いは所要複数個の樹脂成形体6(硬化樹脂)を形成する。そして、成形完了後には、樹脂成形体6(硬化樹脂)が形成された成形済基板7(成形品)が完成する。なお、対象とする成形前基板として、ワイヤボンディングされたチップ3でなくワイヤ4の無いチップ3装着されたフリップチップ基板1、或いは、ウェーハ基板1等を適用することも可能である。 As an object to be molded article, for example, as shown in FIGS. 1 and 2, using a pre-molding substrate 1. The pre-molding substrate 1 includes a plurality of required substrates 2 (including strip-shaped lead frames) formed in an arbitrary shape that is circular or polygonal, and a plurality of columns on the substrate 2 in a required matrix. The semiconductor chip 3 is mounted or is mounted in a single row (hereinafter, referred to as chip 3), and a plurality of required wires 4 that electrically connect the substrate 2 and the chip 3 to each other . Then, at least in a portion including the chip 2 , resin molding is performed with a molten resin formed by heating and melting the resin material 5 . Here, on one side of the chip 2 is attached to form a collectively single several or required plurality of molded resin 6 (curable resin). Then, after the molding is completed , the molded substrate 7 (molded product) on which the resin molded body 6 (cured resin) is formed is completed. As the target pre-molding substrate 1, it is also possible to apply a flip chip substrate 1 on which a chip 3 without a wire 4 is mounted instead of a wire bonded chip 3 or a wafer substrate 1.

樹脂成形装置X・Yにおける金型8(8a・8b)は、成形材料である成形前基板1樹脂材料5とを用いて樹脂成形して成形品である成形済基板7を成形させる重要な部位である。金型8(8a・8b)は、例えば、二枚以上の所要複数型の構成を備えた樹脂成形用(トランスファー成形用、或いは、トランスファーレス成形用)の金型8(8a・8b)によって構成されている。樹脂成形装置Xでは金型8として一個、樹脂成形装置Yでは金型8aと金型8bとして二個、図1・図2で示されている。なお、本実施例では、金型8(8a・8b)における所要複数型を一個単位としてそれぞれ示すこととする。 Mold 8 in the resin molding apparatus X · Y (8a · 8b) is important for molding the molded pre substrate 7 is a molded article molded by using the substrate 1 and the resin material 5 before molding a molding material It is a part . Mold 8 (8a · 8b), for example, constituted by a resin molding having a structure of two or more of the required multiple types (for transfer molding, or transfer for press forming) mold 8 (8a · 8b) Has been . One resin mold 8 is shown in the resin molding apparatus X, and two molds 8a and 8b are shown in the resin molding apparatus Y, as shown in FIGS. In this embodiment, the required plural molds in the mold 8 (8a, 8b) are respectively shown as one unit.

樹脂成形装置X・Yは、図1および図2に示すように、成形前基板1供給する基板材料供給部ASと、樹脂材料5を供給する樹脂材料供給部ARと、樹脂材料5と成形前基板1とを使用して金型8(8a・8b)によって樹脂成形する成形部Bと、金型8(8a・8b)によって樹脂成形された成形済基板7を取り出す成形品取出部Cと、樹脂成形装置X・Y全体を制御する制御部Dとを含んでいる。そして、樹脂成形装置X・Yは、平面視して略正方形に構成されている。さらに、樹脂成形装置X・Yを作業する際の作業効率の向上をはかることができるように、樹脂成形装置X・Yにおいては基板材料供給部ASと樹脂材料供給部ARと成形品取出部Cとが一体化されて供給取出部Eが構成されている。そして、供給取出部Eと成形部Bと制御部Dとは、平面視して略正方形になるように配置され且つ着脱自在に構成されている。また、供給取出部Eにおける特定の側Fから、成形前基板1と樹脂材料5との供給および成形済基板7の取り出しを行うことができるように構成されている。ここで、本出願書類において「特定の側F」とは、装置X・Yを平面視した場合における特定の側Fを意味し、図1、2においては装置X・Yにおける左側を示す。
従って、樹脂成形装置Xでは、図1に示すように、供給取出部E、成形部B、制御部D左右方向に並列状態で配置されている。また、樹脂成形装置Yでは、図2に示すように、左右方向に並列した状態にある供給取出部Eと成形部Bとの上方に制御部D配置されている。加えて樹脂成形装置X・Yにおける作業効率を十分に配慮して、供給取出部Eと成形部Bと制御部Dとが、平面視して略正方形となるように着脱自在に設けられ、且つ、図例の略水平方向に任意に回転して適宜に配置変更することができるように構成されている。なお、供給取出部Eと成形部Bと制御部Dとにおける後述する各機構等においても同様に、着脱自在に設けられ、且つ、図例の略水平方向に任意に回転して適宜に配置変更することができるように構成されている。
As shown in FIGS. 1 and 2, the resin molding apparatuses X and Y include a substrate material supply unit AS that supplies the substrate 1 before molding, a resin material supply unit AR that supplies the resin material 5 , a resin material 5 and molding. a molding unit B for resin molding by a mold 8 (8a · 8b) using the front substrate 1, and a product removal unit C to remove the molded pre substrate 7 which is molded by the mold 8 (8a · 8b) and a control unit D which controls the entire resin molding apparatus X · Y are Nde free. The resin molding apparatuses X and Y are configured in a substantially square shape in plan view . Moreover, as it is possible to improve the work efficiency when working the resin molding apparatus X · Y, in the resin molding apparatus X · Y, the substrate material supply unit AS resin material supply unit AR and product removal section C and is integrated with the supply lead-out portion E is constructed. The supply and control unit D and the take-out portion E forming portion B, that are arranged and removably configured to be substantially square in plan view. Further, it is configured such that the supply of the pre-molding substrate 1 and the resin material 5 and the removal of the molded substrate 7 can be performed from a specific side F in the supply / extraction unit E. Here, “specific side F” in the present application document means a specific side F when the devices X and Y are viewed in plan, and FIGS. 1 and 2 indicate the left side of the devices X and Y.
Accordingly, the resin molding apparatus X, as shown in FIG. 1, the supply extraction unit E, the molding unit B, the control unit D are arranged in a parallel state in the lateral direction. Moreover, in the resin molding apparatus Y, as shown in FIG. 2, the control part D is arrange | positioned above the supply extraction part E and the shaping | molding part B in the state parallel to the left-right direction . In addition , with sufficient consideration of the work efficiency in the resin molding apparatus X, Y , the supply extraction part E, the molding part B, and the control part D are detachably provided so as to be substantially square in plan view , And it is comprised so that it can rotate arbitrarily in the substantially horizontal direction of the example of a figure, and can change arrangement | positioning suitably. Similarly, each of the mechanisms to be described later in the supply take-out part E, the forming part B, and the control part D is also detachably provided and arbitrarily rotated in the substantially horizontal direction in the figure to appropriately change the arrangement. It is configured to be able to.

基板材料供給部ASに含まれるインマガジン9には、成形前基板1収納される。さらに、樹脂成形装置X・Yの特定の側Fにおける矢印Gによって示された方向に沿って成形前基板1を樹脂成形装置X・Y外から供給できるインマガジンカセット11(以下、インカセット11と示す。)少なくとも備えられている。また、樹脂材料供給部ARに含まれる樹脂材料供給機構10には、樹脂材料5を収納するレジンストッカー12備えられている。そして、特定の側Fにおける矢印Hの方向に沿って、樹脂成形装置X・Y外からレジンストッカー12に樹脂材料5を供給できるように構成されている。
成形品取出部Cに含まれるアウトマガジン13には、成形済基板7収納される。さらに、特定の側Fにおける矢印Iの方向に沿って、成形済基板8を樹脂成形装置X・Y外へ取り出すことができるアウトマガジンカセット14(以下、アウトカセット14と示す。)が備えられている
The free Murrell in the magazine 9 to the substrate material supply unit AS, pre-molding substrate 1 are housed. Furthermore, an in-magazine cassette 11 (hereinafter referred to as in-cassette 11) that can supply the pre-molding substrate 1 from outside the resin molding apparatus X / Y along the direction indicated by the arrow G on the specific side F of the resin molding apparatus X / Y. shown.) is provided at least. The resin material supply mechanism 10 included in the resin material supply unit AR is provided with a resin stocker 12 that stores the resin material 5 . And it is comprised so that the resin material 5 can be supplied to the resin stocker 12 from the resin molding apparatus XY along the direction of the arrow H in the specific side F. FIG.
The free Murrell out magazine 13 for product removal station C, a molded finished board 7 is housed. Further, along the direction of arrow I in particular side F, the molding pre substrate 8 out magazine cassette 14 which can Succoth Eject outside the resin molding apparatus X · Y (hereinafter, referred to as out-cassette 14.) Is Is provided .

インマガジン9とアウトマガジン13とは、鉛直方向に並んで配置されている。図1,2においては、鉛直配置された状態のインカセット11とアウトカセット14とを、各別に或いは一体化させて、鉛直方向に昇降自在に駆動自在に構成されたマガジン機構15(インマガジン9・アウトマガジン13)として示している。この場合のマガジン機構15の配置構成としては、インマガジン9を上段にしてアウトマガジン13を下段に配置してもよく、或いは、逆の配置構成でもよい。マガジン機構15を鉛直方向に配置する構成によって、マガジン機構15自体や樹脂成形装置X・Y全体をコンパクトにすることができる。また、成形前基板1および成形済基板7を樹脂成形装置X・Yの特定の側Fにおける矢印G・矢印Iの方向にそれぞれ沿って容易に供給・取出することができる。そして、インカセット11とアウトカセット14とは、収納するものはそれぞれ成形前基板1と成形済基板7とである。成形前基板1と成形済基板7とは基板2を基にして形成されているので、インカセット11とアウトカセット14との基本的な構成要素は、同様に設けられている。このような図1および図2に示す配置構成は、鉛直方向に並列して配置することが好ましいが、成形前基板1と成形済基板7とにそれぞれ対応して図の左右或いは上下方向並列して配置してもよい。また、インカセット11とアウトカセット14とは、所要複数枚の成形前基板1と成形済基板7とが損傷することがないように離間状態で載置されるスリット型の形状で構成されている。また、インカセット11とアウトカセット14とに収納される成形前基板1と成形済基板7とは、金型8(8a・8b)を使用した樹脂成形方法に対応して、樹脂成形体6の部分を上方或いは下方に向けた状態で載置するように構成されている。なお、インカセット11とアウトカセット14とは、対象とする成形前基板1と成形済基板7とが、ワイヤ4の無いチップ3装着されたフリップチップ基板やウェーハ基板等である場合においては、例えば、成形前基板1又は成形済基板7それぞれ直接積層するスタック型の形状構成であってもよい。 The in magazine 9 and the out magazine 13 are arranged side by side in the vertical direction . 1 and 2, a magazine mechanism 15 ( in-magazine 9) configured so that the in-cassette 11 and the out-cassette 14 in a vertically arranged state are separately or integrated and can be moved up and down in the vertical direction. -Shown as out magazine 13). As an arrangement configuration of the magazine mechanism 15 in this case, the in magazine 9 may be arranged in the upper stage and the out magazine 13 may be arranged in the lower stage , or the arrangement arrangement may be reversed . With the configuration in which the magazine mechanism 15 is arranged in the vertical direction , the magazine mechanism 15 itself and the entire resin molding apparatus XY can be made compact . Further, the pre-molded substrate 1 and the molded substrate 7 can be easily supplied and taken out along the directions of the arrows G and I on the specific side F of the resin molding apparatus X and Y , respectively . Then, the in-cassette 11 and out the cassette 14, which houses are respectively pre-molding substrate 1 The molded substrate 7 Doo. Since the pre-molding substrate 1 and the molding pre substrate 7 is formed based on the substrate 2, the basic components of an in-cassette 11 and out the cassette 14 is provided as well. Arrangement shown in this FIG. 1 and FIG. 2, it is preferable to place in parallel in the vertical direction, parallel to the lateral or vertical direction in the figure correspond to the pre-molding substrate 1 and the molding pre substrate 7 May be arranged . The in -cassette 11 and the out-cassette 14 are configured in the shape of a slit that is placed in a separated state so that the required plurality of pre-molding substrates 1 and molded substrates 7 are not damaged. . The pre-molded substrate 1 and the molded substrate 7 accommodated in the in-cassette 11 and the out-cassette 14 correspond to the resin molding method using the mold 8 (8a, 8b) . It is configured to be placed with the portion facing upward or downward. The in-cassette 11 and the out-cassette 14 include the case where the target pre-molding substrate 1 and the molded substrate 7 are flip chip substrates or wafer substrates to which the chips 3 without wires 4 are mounted, for example, the pre-molding substrate 1 or the molded substrate 7 may be shaped configuration of stacked directly laminated respectively.

樹脂材料供給機構10は、例えば、顆粒状樹脂からなる樹脂材料5をレジンストッカー12に収納して所要量に調整できるように、例えば、レジンストッカー12からホッパー(図示なし)を経て、計量フィーダ(図示なし)内に樹脂材料5が投入されるように構成されている。計量フィーダは、予め設定された所要量を基準にして樹脂材料5を計量する機能と、樹脂材料5を切り出してレジントレイ等の収容治具(図示なし)に供給する機能とを少なくとも有する。そして、樹脂材料5を計量する際に、制御手段を使用して、後述する基板検査機構16で検査されたチップ3の数量や不良位置等のチップ3の装着状況のデータをもとにして所要量の樹脂材料5を演算して、計量・切出するように構成されている。
そして収容治具内に所要量の樹脂材料5が均一に収容されセットされた状態で、矢印Jの方向に沿って、樹脂材料供給機構10から後述する搬送手段17へ、所要量の樹脂材料5を収容治具ごと受け渡す。そのために、例えば、樹脂材料供給機構10にはレジンキャリア(図示なし)設けられている。さらに、樹脂材料5の使用効率を極限まで上げるために、樹脂成形毎に、成形前基板1上のチップ3の装着状況を確認して、それをもとに、樹脂材料5を計量するように構成されている。このような樹脂材料供給機構10の機能に対応して顆粒状樹脂以外の樹脂材料5として、例えば、粉末状樹脂・液状樹脂・破砕状樹脂、或いは、粉末よりも粒径が大きく顆粒よりも粒径の小さい微粒状樹脂等の適宜な樹脂材料5が使用可能である。なお、ワイヤ4の無い成形前基板1の場合においては、例えば、所要量のタブレット状の樹脂材料5を使用してもよい。
For example , the resin material supply mechanism 10 can store the resin material 5 made of granular resin in the resin stocker 12 and adjust it to a required amount , for example, from the resin stocker 12 via a hopper (not shown), The resin material 5 is configured to be put into the inside (not shown) . Measuring feeder has a function of measuring the resin material 5 with respect to the predetermined requirements and a function of supplying cut resin material 5 Resin trays accommodating jig in (not shown) at least. Then, when the metering of the resin material 5, by using the control means, based on data of the installation status of the chip 3, such as quantities and defective position of the chip 3 was tested in a substrate inspection mechanism 16 to be described later A required amount of the resin material 5 is calculated and weighed and cut out.
Then, in a state where the resin material 5 the required amount has been set is uniformly received in the receiving jig, in the direction of arrow J, the transfer means 17 to be described later of a resin material supply mechanism 10, the required amount of the resin material 5 is transferred together with the receiving jig . Therefore, for example, resin carrier resin material supply mechanism 10 (not shown) is provided. Further, in order to increase the use efficiency of the resin material 5 to the maximum , the mounting state of the chip 3 on the pre-molding substrate 1 is confirmed every time the resin is molded, and the resin material 5 is weighed based thereon. It is configured. Corresponding to the function of the resin material supply mechanism 10, as the resin material 5 other than the granular resin , for example, a powder resin, a liquid resin, a crushed resin, or a particle size larger than that of the powder is larger than that of the granule. An appropriate resin material 5 such as a fine particle resin having a small particle diameter can be used . In the case of the pre-molding substrate 1 without the wires 4, for example, a required amount of the tablet-like resin material 5 may be used .

成形部Bに含まれるプレス機構18(18a・18b)とフィルム供給機構19(19a・19b)とにおいて、プレス機構18(18a・18b)には、所要複数型の金型8(8a・8b)搭載されている。また、金型8(8a・8b)を各別に或いは一体化して鉛直方向へ移動させて型締め・型開き動作を実施する、例えば、任意の水・油・気体等の作動流体を使用するプレスや電動プレスが設けられている。フィルム供給機構19(19a・19b)、少なくとも一個以上の金型8(8a・8b)に形成される樹脂成形用のキャビティ(図示なし)の成形金型面を被覆するフィルム20(20a・20b)を送出ローラ21(21a・21b)と巻取ローラ22(22a・22b)との間で張設して金型8(8a・8b)に供給することができるように構成されている。そして、プレス機構18(18a・18b)とフィルム供給機構19(19a・19b)とを組合せた構成としている。樹脂成形装置Xでは、プレス機構18とフィルム供給機構19として一組図1に示されている。樹脂成形装置Yでは、プレス機構18a・18bとフィルム供給機構19a・19bとして二組図2に示されている。なお、後述での説明を明解なものとするために、一部符号a・bという記述を省くこととする。
従って、成形部Bにおけるプレス機構18とフィルム供給機構19とを増減するような場合には、従来のような並列状態で長方形となる配置構成にするのではなく、成形部Bの所要の範囲内で所要複数組のプレス機構18とフィルム供給機構19とを適宜に配置することによって樹脂成形装置X・Y略正方形にすることができる
In the press mechanism 18 (18a / 18b) and the film supply mechanism 19 (19a / 19b) included in the forming part B, the press mechanism 18 (18a / 18b) includes a required plurality of molds 8 (8a / 8b). Is installed . Also, the mold 8 (8a, 8b) is moved separately or integrally and moved in the vertical direction to perform the mold clamping / opening operation, for example, a press using any working fluid such as water, oil , gas, etc. And an electric press . The film supply mechanism 19 (19a, 19b) is a film 20 (20a, 20b) that covers a molding die surface of a resin molding cavity (not shown) formed in at least one mold 8 (8a, 8b). ) Is stretched between the feeding roller 21 (21a and 21b) and the winding roller 22 (22a and 22b) and can be supplied to the mold 8 (8a and 8b). And it is set as the structure which combined the press mechanism 18 (18a * 18b) and the film supply mechanism 19 (19a * 19b) . In the resin molding apparatus X, a set as a press mechanism 18 and the film supply mechanism 19 is shown in Figure 1. In the resin molding apparatus Y, the two sets as a press mechanism 18a · 18b and the film feed mechanism 19a · 19b is shown in FIG. In order to clarify the explanation below, the description of partial codes a and b will be omitted.
Accordingly, when the number of the press mechanism 18 and the film supply mechanism 19 in the molding part B is increased or decreased, the arrangement structure is not a rectangular arrangement in a conventional parallel state, but within the required range of the molding part B. a required plurality of sets of press mechanisms 18 and the film supply mechanism 19 by placing appropriate, can be a resin molding apparatus X · Y in substantially square in.

フィルム供給機構19におけるフィルム20の供給経路については、樹脂成形装置Xでは、図1に示すように、矢印Kの方向に沿って図の下側から上側へ、樹脂成形前のフィルム20を送出ローラ21から金型8内に送り出す。また、樹脂成形後のフィルム20を金型8の外に送り出して、巻取ローラ22に巻き取る。また、送出ローラ21と巻取ローラ22とを使用して、フィルム20を緊張させたり弛緩させたりすることができる
一方、樹脂成形装置Yでは、図2に示すように、矢印La・Lbの方向にそれぞれ沿って図の右側から左側へ、樹脂成形前のフィルム20a・20bを送出ローラ21a・21bから金型8a・8b内に送り出す。また、樹脂成形後のフィルム20a・20b金型8a・8bの外に送り出して、巻取ローラ22a・22bに巻き取る。また、送出ローラ21a・21bと巻取ローラ22a・22bとを使用して、フィルム20a・20b緊張させたり弛緩させたりすることができる
なお、樹脂成形装置X・Yのフィルム20の送出・巻取の方向は、図例に限定されるものでなく、適宜の方向に任意に変更して実施することができる。また、樹脂成形時に、フィルム20を金型8に供給する配置構成について説明した。これに限らず、フィルム20を用いずに樹脂成形を行うのであれば、フィルム供給機構19(フィルム20・送出ローラ21・巻取ローラ22)を樹脂成形装置X・Yから取外した構成でもよい。
As for the supply path of the film 20 in the film supply mechanism 19, in the resin molding apparatus X, as shown in FIG. 1, the film 20 before resin molding is sent out from the lower side to the upper side along the direction of the arrow K. 21 is sent into the mold 8 . Further, the resin-molded film 20 is sent out of the mold 8 and wound around the winding roller 22 . In addition, the film 20 can be tensioned or relaxed using the feeding roller 21 and the winding roller 22 .
On the other hand, in the resin molding apparatus Y, as shown in FIG. 2, the films 20a and 20b before resin molding are transferred from the delivery rollers 21a and 21b to the mold 8a from the right side to the left side of the drawing along the directions of arrows La and Lb, respectively. ・ Send into 8b . Further, the films 20a and 20b after the resin molding are sent out of the molds 8a and 8b and wound around the winding rollers 22a and 22b. In addition, the films 20a and 20b can be tensioned or relaxed by using the feeding rollers 21a and 21b and the winding rollers 22a and 22b .
In addition, the direction of sending / winding the film 20 of the resin molding apparatus X / Y is not limited to the illustrated example, and can be arbitrarily changed to an appropriate direction. In addition , the arrangement configuration in which the film 20 is supplied to the mold 8 during resin molding has been described . However, the present invention is not limited to this, and if resin molding is performed without using the film 20, the film supply mechanism 19 (the film 20, the feeding roller 21, and the take - up roller 22) may be removed from the resin molding apparatus XY.

供給取出部Eと成形部Bとの間において移動できるようにして設けられた搬送手段17、成形材料である成形前基板1および樹脂材料5の供給と、成形品である成形済基板7の取出とを行う。そのために、樹脂成形装置X(図1)においては、搬送手段17は、樹脂材料供給機構10とマガジン機構15との間に設けられた待機位置から金型8内の所定の搬入位置Nまで、矢印P1方向に進入する。また、樹脂成形装置Y(図2)においては、搬送手段17は、二組のプレス機構18a・19aとプレス機構18b・19bとの間における所定の位置である搬入位置Oまで、矢印P1方向に進入する。そして、搬送手段17は、成形部B内の搬入位置N・Oから待機位置Mまで、矢印P2方向退出する。これらの動作を行う搬送手段17は、往復動(進入・退出)機能を兼ね備えた、例えば、メカチャック搬送機構やロボットアーム搬送機構等によって少なくとも構成されている。
搬送手段17の搬送経路において、搬送手段17は次のように動作する。まず、樹脂成形装置X(図1)においては、搬送手段17には、矢印Q方向に沿って成形前基板1供給セットされ、且つ、矢印J方向に沿って樹脂材料5が供給セットされる。次に、搬送手段17は、待機位置Mから金型8内の所定位置Nまで、矢印P1方向に進入する。次に、搬送手段17は、金型8内における所定の位置に、成形前基板1および樹脂材料5を各別に且つ略同時に供給し、その後に待機位置Mに戻る。次に、樹脂成形が完了した後に、搬送手段17は、矢印P1の方向に進入して、金型8によって樹脂成形された成形済基板7を受け取る。次に、搬送手段17は、成形済基板7を受け取った状態で、待機位置Mまで矢印P2方向に退出する。次に、搬送手段17は、待機位置Mまで戻った後に、矢印R方向に沿って成形済基板7をアウトマガジン13受け渡す
一方、樹脂成形装置Y(図2)において搬送手段17は次のように動作する。まず、搬送手段17には、矢印Q方向から成形前基板1供給セットされ、且つ、矢印J方向から樹脂材料5供給セットされる。次に、搬送手段17は、待機位置Mから搬入位置Oまで、矢印P1方向に進入する。次に、搬送手段17は、搬入位置Oにおいて矢印Sa・Sbの方向にそれぞれ進退可能に設けられたスライド機構(図示なし)を使用して、矢印Sa方向における一方の金型8a内、成形前基板1および樹脂材料5を各別に且つ略同時に供給する。次に、樹脂成形が完了した後に、搬送手段17は、搬送手段17のスライド機構が矢印Sa方向に移動して金型8a内進入して、金型8aで樹脂成形された成形済基板7を受け取る。次に、搬送手段17は、スライド機構を矢印Ta方向に沿って移動させて搬送手段17の搬入位置Oに戻す。次に、搬送手段17は、搬入位置Oから待機位置Mまで、矢印P2方向に退出する。次に、搬送手段17は、待機位置Mまで戻った後に、矢印R方向に沿って成形済基板7をアウトマガジン13受け渡すなお、樹脂成形装置Y(図2)における他方の金型8bへの成形前基板1および樹脂材料5の供給と、他方の金型8bから成形済基板7の取出とについても、一方の金型8aに対する場合と同様に、搬送手段17を使用して実施することができる。
このことから、成形部を並列状態に配置する従来の装置に比較して、本発明に係る樹脂成形装置X・Yは次の特徴を有する。従来の搬送手段では、略直線的に且つ略一方の方向へのみ成形前基板1および樹脂材料5の供給と成形済基板7の取出とを行う。これによって非常に長い搬送経路を必要とするので、作業性の低下が懸念されていた。一方、樹脂成形装置X・Yによれば、搬送手段17によって、成形部B内のプレス機構18とフィルム供給機構19が、例えば、一組から二組に増加する場合でも、当該搬送手段17の搬送経路を、図の矢印P1・P2方向に往復動する経路としてほぼ変化させる必要がない。したがって、樹脂成形装置X・Yによれば、プレス機構18とフィルム供給機構19とが一組から二組に増加する場合においても、短い搬送経路が得られる。
従って、樹脂成形装置X・Yは次の効果を奏する。第一に、格段に設置スペースを省略化できて、コンパクトな装置レイアウトを実現できる。第二に、一個の搬送手段17を使用して成形前基板1および樹脂材料5の供給と成形済基板7の取出とを行うことにより、搬送手段17が少なくとも二つの機能を兼ね備えているので、部品点数を削減できる。したがって、大幅なコストダウンが実現される。第三に、短い搬送経路を生かし作業性(操作性・メンテナンス性)の向上を図ることができる。
Conveying means arranged so as to be movable Oite between the supply lead-out portion E and the molding unit B 17 includes a supply of pre-molding substrate 1 and the resin material 5 is a molding material, molding pre substrate is a molded article 7 is taken out . For this purpose, in the resin molding apparatus X (FIG. 1), the conveying means 17 has a predetermined loading position N in the mold 8 from a standby position M provided between the resin material supply mechanism 10 and the magazine mechanism 15. Until it enters the direction of arrow P1 . Further, in the resin molding apparatus Y (FIG. 2) , the conveying means 17 moves in the direction of the arrow P1 up to the carry-in position O which is a predetermined position between the two sets of press mechanisms 18a and 19a and the press mechanisms 18b and 19b. Enter . The conveying means 17, from the loading position N · O of the forming section B to the standby position M, exiting in the direction of arrow P2. The conveying means 17 that performs these operations is configured at least by , for example, a mechanical chuck conveying mechanism, a robot arm conveying mechanism, or the like that has a reciprocating (entrance / retreat) function.
Oite the conveying path of the conveying means 17, transfer means 17 operates as follows. First, in the resin molding apparatus X (FIG. 1), the pre-molding substrate 1 is supplied and set to the conveying means 17 along the direction of the arrow Q, and the resin material 5 is supplied and set along the direction of the arrow J. Ru is. Next, the conveying means 17 enters from the standby position M to a predetermined position N in the mold 8 in the direction of the arrow P1 . Next, the conveying means 17 supplies the pre-molding substrate 1 and the resin material 5 to predetermined positions in the mold 8 separately and substantially simultaneously , and then returns to the standby position M. Next, after the resin molding is completed, the conveying means 17 enters in the direction of the arrow P <b> 1 and receives the molded substrate 7 that is resin-molded by the mold 8 . Next, the conveying means 17 withdraws in the direction of the arrow P2 to the standby position M in a state where the molded substrate 7 is received . Next, the conveyance means 17, after returning to the standby position M, in the direction of arrow R passes The molded substrate 7 out magazine 13.
On the other hand, in the resin molding apparatus Y (FIG. 2) , the conveying means 17 operates as follows. First, the conveying means 17, pre-molding substrate 1 is supplied set the direction of the arrow Q, and, the resin material 5 in the direction of arrow J Ru is supplied and set. Next, the transport unit 17 enters from the standby position M to the carry-in position O in the direction of the arrow P1 . Next, the conveyance means 17, using each retractably provided a slide mechanism in the direction of arrow Sa · Sb in loading position O (not shown), in one mold 8a in the direction of arrow Sa, The pre-molding substrate 1 and the resin material 5 are supplied separately and substantially simultaneously . Next, after the resin molding is complete, transfer means 17, enters into the mold 8a slide mechanism of the conveying means 17 is moved in the direction of arrow Sa, The molded substrate which is molded in a mold 8a 7 is received. Next, the transport unit 17 moves the slide mechanism along the direction of the arrow Ta and returns it to the carry-in position O of the transport unit 17 . Next, the conveying means 17 moves out from the carry-in position O to the standby position M in the direction of the arrow P2 . Next, the conveyance means 17, after returning to the standby position M, in the direction of arrow R passes The molded substrate 7 out magazine 13. In addition, in the resin molding apparatus Y (FIG. 2), the supply of the pre-molding substrate 1 and the resin material 5 to the other mold 8b and the removal of the molded substrate 7 from the other mold 8b are also performed. As in the case of the mold 8a, the conveyance means 17 can be used .
From this , compared with the conventional apparatus which arrange | positions a shaping | molding part in a parallel state, the resin molding apparatus XY which concerns on this invention has the following characteristics. In the conventional conveyance means, the pre-molding substrate 1 and the resin material 5 are supplied and the molded substrate 7 is taken out substantially linearly and substantially in only one direction . As a result, a very long transport path is required, and there has been a concern that workability may be reduced . On the other hand, according to the resin molding apparatus X · Y, by the conveying means 17, and the press mechanism 18 and the film supply mechanism 19 of the molding unit B is, for example, even if the increase in two sets of a set, the conveying means 17 It is not necessary to substantially change the conveyance path as a path that reciprocates in the directions of the arrows P1 and P2 in the figure . Therefore, according to the resin molding apparatuses X and Y, a short conveyance path can be obtained even when the press mechanism 18 and the film supply mechanism 19 are increased from one set to two sets.
Therefore, the resin molding apparatuses X and Y have the following effects. First, the installation space can be greatly reduced, and a compact device layout can be realized . Secondly, by carrying out the supply of the pre-molding substrate 1 and the resin material 5 and taking out the molded substrate 7 using a single conveying means 17 , the conveying means 17 has at least two functions. The number of parts can be reduced . Therefore, a significant cost reduction is realized. Third, it is possible to improve workability (operability / maintenance) by utilizing a short transport path .

搬送手段17とマガジン機構15との間には、搬送手段17とは別に移送手段が設けられている。移送手段は、インマガジン9に収納された成形前基板1、および/または、アウトマガジン13に収納される成形済基板7をグリップ(狭持)する。そして、その状態で、移送手段は、成形前基板1をインマガジン9から搬送手段17へ矢印Q方向に移送する。また、移送手段は、成形済基板7を搬送手段17からアウトマガジン13へ矢印R方向に移送する。移送手段は、例えば、基板フィード機構(図示なし)で少なくとも構成されている。
また、基板フィード機構を使用して矢印Q・R方向に成形前基板1および成形済基板7を移送する間に、チップ3装着状態や硬化した樹脂成形体6を鉛直方向の下部から検査する基板検査機構16が設けられている。この場合、成形前基板1および成形済基板7を、例えば、基板検査機構16に備えたCCDカメラ(図示なし)等の適宜な検査手段で検査する。このことにより、成形前基板1においては、例えば、基板2の表裏(一方の面と他方の面)判別、或いは、装着されたチップ3の数量や不良(欠損)位置等のチップ3装着(実装)状況を把握することができる。つまり、このような検査工程を実施した後に、基板フィード機構によってグリップされた成形前基板1を搬送手段17に受け渡すように構成されている。そして、樹脂材料供給機構10の動作と基板フィード機構の動作とが連動することができるようにも構成されている。
Between the transport means 17 and the magazine mechanism 15, separately from the transfer means is provided with transport means 17. The transfer means grips (holds) the pre-molded substrate 1 stored in the in magazine 9 and / or the molded substrate 7 stored in the out magazine 13. Then, in this state, transfer means to transfer in the direction of arrow Q the pre-molding substrate 1 from in the magazine 9 to the transfer means 17. Also, transfer means to transfer in the direction of the arrow R of The molded substrate 7 from the conveying means 17 to the out-magazine 13. The transfer means is configured at least by a substrate feed mechanism (not shown), for example.
Further, while the pre-molded substrate 1 and the molded substrate 7 are transferred in the directions of arrows Q and R using the substrate feed mechanism , the mounted state of the chip 3 and the cured resin molded body 6 are inspected from the lower part in the vertical direction. substrate inspection mechanism 16 is provided. In this case, the pre-molding substrate 1 and the molded substrate 7 are inspected by appropriate inspection means such as a CCD camera (not shown) provided in the substrate inspection mechanism 16, for example . Thus, in the pre-molding substrate 1, for example, discrimination of the front and back of the substrate 2 (one surface and the other surface), or loaded quantity or bad (defective) of the chip 3 mounted chips 3 such as the position (Implementation) The situation can be grasped. That is, after performing such an inspection process, the pre-molding substrate 1 gripped by the substrate feed mechanism is delivered to the transport means 17. The operation of the resin material supply mechanism 10 and the operation of the substrate feed mechanism can be interlocked.

その他の樹脂成形装置X・Yの構成要素としては、作業(特に、メンテナンス)スペースUが設けられている。具体的には、樹脂成形装置X(図1)においては、金型8における送出ローラ21側に、作業スペースUが設けられている。また、樹脂成形装置Y(図2)においては、二個の金型8a・8bの間における二個の送出ローラ21a・21bの側に、作業スペースUが設けられている。これらの作業スペースUは、樹脂材料5を用いて成形前基板1を樹脂成形して成形済基板7を完成させる重要な部位である成形部B内において、操作(オペレート)、保守・管理(メンテナンス)の作業を行う機会が多くなることに伴って設けられている。この作業スペースUは、特に、樹脂成形装置X・Y内を保守・管理(メンテナンス)するような場合に、樹脂成形装置X・Yの動作を停止させて作業する際の作業性にも考慮された配置構成とされている。 A working (particularly maintenance) space U is provided as a component of the other resin molding apparatuses X and Y. Specifically, in the resin molding apparatus X (FIG. 1), on the side of the delivery roller 21 in the mold 8, the working space U is provided. In the resin molding apparatus Y (FIG. 2) , a work space U is provided on the side of the two delivery rollers 21a and 21b between the two molds 8a and 8b . These working spaces U are operated (operated), maintained and managed (maintenance) in the molding part B, which is an important part for completing the molded substrate 7 by molding the pre-molded substrate 1 using the resin material 5. ) Is provided along with an increased opportunity to perform the work. The working space U, particularly when the resin molding apparatus X · in Y such that maintenance and management (maintenance), is also taken into account workability when working the operation of resin molding apparatus X · Y is stopped It is set as the arrangement configuration.

さらに、図示していないが、前述した各部、各機構等の他にも、成形前基板1を予備加熱(プレヒータ)する基板プレヒータ機構(図示なし)を設けてもよい。基板プレヒータ機構によって、成形前基板1をインマガジン9から搬送手段17へ矢印Q方向に移送する間において成形前基板1を予備加熱することができる。また、基板プレヒータ機構によって、搬送手段17に供給セットされた成形前基板1を金型8(8a・8b)内に供給する際に、待機位置Mから搬入位置N・Oまで移送する間において成形前基板1を予備加熱することができる。
加えて、成形部Bにおいては、金型8の少なくともキャビティの部分を外気遮断状態にして真空引きする適宜な真空引き機構(図示なし)を設けてもよい。この場合、真空引き機構においては、例えば、真空引き用と基板吸着用およびフィルム吸着用との二個の真空ポンプ(図示なし)を用いるような構成としてもよい。さらに、供給取出部Eを鉛直方向に二段式の配置構成にして、上段に樹脂材料供給機構10とマガジン機構15と搬送手段17を配置し、下段に所要複数個の真空ポンプを配置するようにして、これらを適宜に配置構成してもよい。必要に応じて、例えば、真空タンクのような減圧源(図示なし)を単独で設置する構成、或いは減圧源を真空ポンプと併設する構成でもよい。このような真空ポンプを鉛直方向二段の下段側に配置構成すること加えて、樹脂材料供給機構10における樹脂材料5の粉塵対策として、例えば、ダストコレクター(図示なし)を併設する構成を採用してもよい。
Further, although not shown, a substrate preheater mechanism (not shown) for preheating (preheater) the pre-molding substrate 1 may be provided in addition to the above-described parts and mechanisms . By the substrate preheater mechanism, a pre-molding substrate 1 can be preheated during the transport in the direction of arrow Q the pre-molding substrate 1 from in the magazine 9 to the transfer means 17. Further, when the pre-molding substrate 1 supplied and set to the conveying means 17 is fed into the mold 8 (8a, 8b) by the substrate pre-heater mechanism , the molding is performed during the transfer from the standby position M to the loading position N / O. The front substrate 1 can be preheated.
In addition , the molding part B may be provided with an appropriate evacuation mechanism (not shown) for evacuating the mold 8 with at least the cavity portion in an outside air blocking state. In this case, the vacuuming mechanism may be configured to use, for example, two vacuum pumps (not shown) for vacuuming, substrate suction, and film suction . Furthermore, in the arrangement of two-stage supply extraction unit E in the vertical direction, the resin material supply mechanism 10 and magazine mechanism 15 and transport means 17 is disposed in the upper, placing the required plurality of vacuum pumps in the lower part Thus, these may be appropriately arranged and configured. If necessary, for example, a configuration in which a reduced pressure source (not shown) such as a vacuum tank is installed alone, or a configuration in which the reduced pressure source is provided with a vacuum pump may be used. In addition to the arrangement of such a vacuum pump in the lower side in the vertical direction of the two-stage, as dust countermeasure of the resin material 5 in the resin material supply mechanism 10, for example, the structure which houses the dust collector (not shown) It may be adopted .

樹脂成形装置X・Yにおける制御部Dは、前述したような様々な各部、各機構等を対象にして、これらを単独で各別に設定して制御することができる。また、制御部Dは、前述した各部、各機構間を連動させて、樹脂成形装置X・Y全体を対象にして制御することができる。また、制御部Dが有する制御機構23着脱自在に設けられ、且つ、図例の略水平方向に任意に回転して適宜に配置変更することができるように構成されている。これらのことにより、前述した各部、各機構間を経て成形前基板1が樹脂成形されて形成された成形済基板7を、最終的に、供給取出部Eのマガジン機構15のアウトマガジン13に収納する一連の工程を、連続的に、或いは、断続的に、稼動・停止できるように、樹脂成形装置X・Yを制御することができるControl unit D in the resin molding apparatus X · Y can be different each part as described above, each mechanism or the like to the subject, controlled by setting the respective another of them alone. The control unit D has each of the aforementioned parts, in conjunction between the mechanisms can be controlled by the entire resin molding apparatus X · Y to a subject. Further, the control mechanism 23 is detachably attached to the control unit D has, and is configured to be able to place appropriately changed by rotating arbitrarily in a substantially horizontal direction in the illustrated example. As a result, the molded substrate 7 formed by resin- molding the pre-molded substrate 1 through the aforementioned parts and mechanisms is finally stored in the out magazine 13 of the magazine mechanism 15 of the supply take-out unit E. The resin molding apparatuses X and Y can be controlled so that a series of processes can be operated and stopped continuously or intermittently.

ここで、樹脂成形装置X・Yを使用して行う一連の工程は、次の通りである。樹脂成形装置においては、図1に示すように、まず、成形前基板1をインマガジン9から搬送手段17へ矢印Qの方向に沿って移送すると共に、所要量の樹脂材料5を樹脂材料供給機構10から搬送手段17へ矢印Jの方向に沿って移送する。次に、搬送手段17に各別に成形前基板1と樹脂材料5とを受け渡す。次に、搬送手段17が待機位置Mから金型8内の所定位置Nへ矢印P1の方向に沿って進入する。次に、成形前基板1および所要量の樹脂材料5を、各別に且つ略同時的に、金型8に供給する。次に、成形前基板1および樹脂材料5を供給し終わった搬送手段17が、金型8内の所定位置Nから矢印P2の方向に沿って退出して、待機位置Mにおいて待機する。次に、成形完成後の成形済基板7を取り出すために、搬送手段17が、金型8内の所定位置Nへ矢印P1の方向に沿って進入して成形済基板7を受け取る。次に、成形済基板7を受け取った搬送手段17が、金型8内の所定位置Nから待機位置Mへ矢印P2の方向に沿って退出する。次に、基板フィード機構(図示なし)によって、搬送手段17からアウトマガジン13へ矢印Rの方向に沿って成形済基板7を移送して、アウトマガジン13に成形済基板7を収納する
一方、樹脂成形装置においては、図2に示すように、まず、成形前基板1をインマガジン9から搬送手段17へ矢印Qの方向に沿って移送すると共に、所要量の樹脂材料5を樹脂材料供給機構10から搬送手段17へ矢印Jの方向に沿って移送する。次に、搬送手段17に各別に成形前基板1と樹脂材料5とを受け渡す。次に、搬送手段17が待機位置Mから成形部B内の搬入位置Oへ矢印P1の方向に沿って進入する。次に、搬送手段17のスライド機構によって、成形前基板1および所要量の樹脂材料5を、一方の金型8aへ矢印Saの方向に沿って各別に供給する。
次に、第一の場合として、金型8aに成形前基板1および樹脂材料5を供給し終わったスライド機構格納された搬送手段17が搬入位置Oに位置しており、他方の金型8bに成形前基板1および樹脂材料5が供給されていない場合について考える。この場合には、搬送手段17は、搬入位置Oから待機位置Mまで矢印P2の方向に沿って戻って、他方の金型8bに供給されるべき成形前基板1および樹脂材料5を受け取る。そして、搬送手段17は、一方の金型8aに対する場合と同様に、他方の金型8bに成形前基板1および樹脂材料5を矢印Sbの方向に沿って供給する。
そして、第二の場合として、金型8aに成形前基板1および樹脂材料5を供給し終わったスライド機構が格納された搬送手段17が搬入位置Oに位置しており、他方の金型8bに成形前基板1および樹脂材料5が既に供給されている場合について考える。この場合には、他方の金型8b内で既に成形済基板7が完成している、又は、短時間後に成形済基板7が完成することになる。そこで、搬送手段17が、スライド機構を使用して金型8bから成形済基板7を取り出して、矢印Tbの方向に成形済基板7を移送する。次に、成形済基板7を受け取った搬送手段17が、搬入位置Oから待機位置Mまで矢印P2の方向に沿って退出する
次に、基板フィード機構(図示なし)によって、搬送手段17からアウトマガジン13へ矢印Rの方向に沿って成形済基板7を移送して、アウトマガジン13に成形済基板7を収納する
Here, a series of processes performed using the resin molding apparatuses X and Y are as follows. In the resin molding apparatus X , as shown in FIG. 1, first, the substrate 1 before molding is transferred from the in-magazine 9 to the conveying means 17 along the direction of the arrow Q, and a required amount of the resin material 5 is supplied to the resin material 5. It is transferred from the mechanism 10 to the conveying means 17 along the direction of arrow J. Next, the pre-molding substrate 1 and the resin material 5 are delivered to the conveying means 17 separately . Next, the transport means 17 enters the predetermined position N in the mold 8 from the standby position M along the direction of the arrow P1 . Next, the pre-molding substrate 1 and the required amount of the resin material 5 are supplied to the mold 8 separately and substantially simultaneously. Next, the conveying means 17 that has finished supplying the pre-molding substrate 1 and the resin material 5 exits from the predetermined position N in the mold 8 along the direction of the arrow P2 , and waits at the standby position M. Next, in order to take out the molded substrate 7 after completion of molding, the conveying means 17 enters the predetermined position N in the mold 8 along the direction of the arrow P1 and receives the molded substrate 7 . Next, the conveying means 17 that has received the molded substrate 7 moves out from the predetermined position N in the mold 8 to the standby position M along the direction of the arrow P2 . Next, the molded substrate 7 is transferred from the conveying means 17 to the out magazine 13 along the direction of the arrow R by the substrate feed mechanism (not shown), and the molded substrate 7 is stored in the out magazine 13 .
On the other hand, in the resin molding apparatus Y , as shown in FIG. 2, first, the substrate 1 before molding is transferred from the in-magazine 9 to the conveying means 17 along the direction of the arrow Q, and a required amount of the resin material 5 is transferred to the resin. transferring in the direction of arrow J from the material supply mechanism 10 to the transport means 17. Next, the pre-molding substrate 1 and the resin material 5 are delivered to the conveying means 17 separately . Next, the conveying means 17 enters from the standby position M to the carry-in position O in the molding part B along the direction of the arrow P1 . Next, the pre-molding substrate 1 and the required amount of the resin material 5 are separately supplied to the one mold 8a along the direction of the arrow Sa by the slide mechanism of the conveying means 17 .
Next, as a first case, the conveyance means 17 storing the slide mechanism that has finished supplying the pre-molding substrate 1 and the resin material 5 to the mold 8a is located at the carry-in position O, and the other mold 8b. Consider the case where the pre-molding substrate 1 and the resin material 5 are not supplied . In this case, the transport means 17, back from the loading position O along the direction of the arrow P2 to the standby position M, Ru receive the substrate 1 and the resin material 5 prior to molding to be supplied to the other mold 8b. Then, the transport means 17, as in the case against the one mold 8a, supplies along the substrate 1 and the resin material 5 prior to molding in the direction of arrow Sb in other mold 8b.
In the second case, the conveying means 17 storing the slide mechanism that has finished supplying the pre-molding substrate 1 and the resin material 5 to the mold 8a is located at the carry-in position O, and the other mold 8b Consider the case where the pre-molding substrate 1 and the resin material 5 have already been supplied. In this case, the molded substrate 7 is already completed in the other mold 8b, or the molded substrate 7 is completed after a short time. Therefore, the transport means 17 takes out the molded substrate 7 from the mold 8b using the slide mechanism, and transfers the molded substrate 7 in the direction of the arrow Tb . Next, the conveying means 17 that has received the molded substrate 7 moves out from the loading position O to the standby position M along the direction of the arrow P2 .
Next, the molded substrate 7 is transferred from the conveying means 17 to the out magazine 13 along the direction of the arrow R by the substrate feed mechanism (not shown), and the molded substrate 7 is stored in the out magazine 13 .

なお、樹脂成形装置X・Yは、図1および図2に示すような配置構成でなくても、次の構成を有していればよい。それは、第一に、平面視して略正方形であって、基板材料供給部ASと樹脂材料供給部ARと成形品取出部Cとが一体化した供給取出部Eを構成していることである。第二に、供給取出部Eにおける成形前基板1および樹脂材料5の供給成形済基板7の取出平面視した場合に特定の側Fで行われるような構成である。それらの構成を有していれば、前述した各部、各機構等を取捨選択して適宜に配置変更すればよい。 In addition, the resin molding apparatuses X and Y may have the following configurations even if they are not arranged as shown in FIGS. 1 and 2 . It is primarily is that a substantially square in plan view, constitute a supply extraction unit E in which the substrate material supply unit AS resin material supply unit AR and product removal unit C are integrated . Secondly, a structure as occurring in a particular side F when withdrawal Metropolitan and supply The molded substrate 7 of the pre-molding substrate 1 and the resin material 5 in the feed extraction portion E is viewed in plan. Have their configuration lever, each of the aforementioned parts may be Re change positioned appropriately to sift through mechanisms like.

以上のことから、本発明に係る樹脂成形装置X・Yは、平面視して略正方形の形状を有している。また、基板材料供給部ASと樹脂材料供給部ARと成形品取出部Cとが一体化した供給取出部Eを構成している。また、供給取出部Eにおける成形前基板1および樹脂材料5の供給と成形済基板7の取出とが平面視した場合に特定の側Fで行われる。これらにより、従来の装置で解決困難であった、基板材料供給部ASおよび樹脂材料供給部ARと成形品取出部Cとが離間(独立)した状態で且つ平面視した場合に異なるから成形前基板1および樹脂材料5の供給と成形済基板7の取出とを行うことによる作業効率の低下という問題を効率良く防止することができる。加えて、一個の搬送手段17によって、成形前基板1および樹脂材料5の供給と成形済基板7の取出とを行う。これらにより、部品点数の削減による大幅なコストダウンと、短い搬送経路を生かした作業性(操作性・メンテナンス性)の向上とを図ることができる From the above, the resin molding apparatus X · Y according to the present invention is to have a shape of substantially square in plan view. In addition, the substrate material supply unit AS, the resin material supply unit AR, and the molded product extraction unit C constitute a supply extraction unit E. In addition, the supply of the pre-molding substrate 1 and the resin material 5 and the removal of the molded substrate 7 in the supply take-out part E are performed on a specific side F when viewed in plan. As a result, the substrate material supply part AS and the resin material supply part AR and the molded product take-out part C, which are difficult to solve with the conventional apparatus, are separated (independent) and before molding from different sides when viewed in plan. the problem of reduction of work efficiency due to performing extraction Metropolitan and supply the molded substrate 7 of the substrate 1 and the resin material 5 can be efficiently prevented. In addition, the supply of the pre-molding substrate 1 and the resin material 5 and the removal of the molded substrate 7 are performed by a single conveying means 17. As a result, the cost can be greatly reduced by reducing the number of parts, and the workability (operability and maintainability) can be improved by taking advantage of the short transport path.

図1は、樹脂成形用金型が一個配置構成された樹脂成形装置を示す平面図である。FIG. 1 is a plan view showing a resin molding apparatus in which one resin molding die is arranged and configured. 図2は、樹脂成形用金型が二個配置構成された樹脂成形装置を示す平面図である。FIG. 2 is a plan view showing a resin molding apparatus in which two resin molding dies are arranged and configured.

成形前基板
2 基板
チップ
4 ワイヤ
5 樹脂材料
6 樹脂成形体
成形済基板
(8a・8b) 金型(樹脂成形用金型
9 インマガジン
10 樹脂材料供給機構
11 インカセット
12 レジンストッカー
13 アウトマガジン
14 アウトカセット
15 マガジン機構
16 基板検査機構
17 搬送手段
18(18a・18b) プレス機構
19(19a・19b) フィルム供給機構
20(20a・20b) フィルム
21(21a・21b) 送出ローラ
22(22a・22b) 巻取ローラ
23 制御機構
AR 樹脂材料供給部
AS 基板材料供給部
B 成形部
C 成形品取出部
D 制御部
供給取出部
特定の側
待機位置
N・O 搬入位置
U 作業スペース
X・Y 樹脂成形装置
1 Pre-molding substrate 2 Substrate 3 Chip 4 Wire 5 Resin material 6 Resin molded body 7 Molded substrate 8 (8a, 8b) Mold ( mold for resin molding )
9 in magazine 10 resin material supply mechanism 11 in cassette 12 resin stocker 13 out magazine 14 out cassette
15 magazine mechanism 16 substrate inspection mechanism 17 transport means 18 (18a / 18b) press mechanism 19 (19a / 19b) film supply mechanism 20 (20a / 20b) film 21 (21a / 21b) delivery roller 22 (22a / 22b) take-up Roller 23 control mechanism
AR resin material supply section
AS substrate material supply part B Molding part C Molded product take-out part D Control part
E Supply extraction department
F Specific side M Standby position N / O Loading position U Work space X / Y Resin molding machine

Claims (2)

被成形品である成形前基板を供給する基板材料供給部と、前記成形前基板を樹脂成形するための樹脂材料を供給する樹脂材料供給部と、樹脂成形用金型を使用して前記成形前基板を樹脂成形する成形部と、樹脂成形された成形品である成形済基板を取り出す成形品取出部と、樹脂成形装置全体を制御する制御部と、前記樹脂成形用金型に前記成形前基板と前記樹脂材料とを搬入し、且つ、前記樹脂成形用金型から前記成形済基板を搬出する搬送手段とを備える前記樹脂成形装置であって、
前記基板材料供給部および前記成形品取出部の少なくとも一方と前記搬送手段の待機位置と前記樹脂材料供給部とは前記樹脂成形装置を平面視した場合における特定の側において直線に沿って略一列に並び、
前記基板材料供給部と前記成形品取出部との少なくとも一方は前記待機位置を挟んで前記樹脂材料供給部に対向して配置され、
前記基板材料供給部と前記成形品取出部と前記樹脂材料供給部とが一体化された供給取出部を有し
前記供給取出部と前記成形部と前記制御部とが平面視して略正方形に配置されるとともに着脱自在に構成され、
前記搬送手段が前記供給取出部と前記成形部との間において搬送する方向は前記直線に対して略直交しており、
前記成形前基板の供給と前記樹脂材料の供給と前記成形済基板の取出とは前記特定の側において行われることを特徴とする樹脂成形装置。
A substrate material supply unit that supplies a pre-molding substrate, which is a molded product , a resin material supply unit that supplies a resin material for resin molding the pre-molding substrate, and a pre-molding using a resin molding die A molded part for resin-molding the substrate , a molded product take-out part for taking out a molded substrate that is a molded product of the resin, a control unit for controlling the entire resin molding apparatus, and the pre-molded substrate in the resin molding die And the resin molding apparatus, and a conveying means for carrying out the molded substrate from the resin molding die ,
At least one of the substrate material supply unit and the molded product take-out unit, the standby position of the transfer means, and the resin material supply unit are substantially aligned along a straight line on a specific side when the resin molding apparatus is viewed in plan view. Lined up,
At least one of the substrate material supply part and the molded product take-out part is disposed to face the resin material supply part across the standby position,
Has the supply take-out portion where the substrate material supply section and the product removal section and the resin material supply unit is integrated,
The supply lead-out portion and the molding portion and the control unit is detachably configured with being arranged in substantially square in plan view,
The direction in which the conveying means conveys between the supply extraction part and the molding part is substantially orthogonal to the straight line,
2. The resin molding apparatus according to claim 1 , wherein the supply of the pre-molding substrate, the supply of the resin material, and the removal of the molded substrate are performed on the specific side .
請求項1に記載された樹脂成形装置において、
前記基板材料供給部と前記成形品取出部とは、鉛直方向に並んで昇降自在に配置され、又は、水平方向に並んで配置されていることを特徴とする樹脂成形装置。
In the resin molding apparatus described in claim 1,
The resin molding apparatus, wherein the substrate material supply unit and the molded product take-out unit are arranged so as to be movable up and down in the vertical direction, or arranged in the horizontal direction .
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