JP4685673B2 - Waste water treatment method and waste water treatment system - Google Patents

Description

  The present invention relates to a wastewater treatment method and a wastewater treatment system, for example, a wastewater treatment method and a wastewater treatment system in a semiconductor factory or a liquid crystal factory.

  An organic fluorine compound is an example of a component contained in wastewater, but is a chemically stable substance. Since this organic fluorine compound has excellent properties particularly from the viewpoint of heat resistance and chemical resistance, it is used for applications such as surfactants.

  However, since this organic fluorine compound is a chemically stable substance, it is difficult to decompose microorganisms. For example, perfluorooctasulfonic acid (PFOS) and perfluorooctanoic acid (PFOA), which are examples of the above-mentioned organic fluorine compounds, are concerned about the impact on the ecosystem because degradation does not proceed in the ecosystem.

  That is, since the above-mentioned perfluorooctasulfonic acid (PFOS) and perfluorooctanoic acid (PFOA) are chemically stable, a high temperature of about 1000 ° C. or higher is required for thermal decomposition. In addition, the perfluorooctasulfonic acid and perfluorooctanoic acid are extremely difficult to decompose by treatment with conventional microorganisms or photocatalysts.

  By the way, as a conventional technique, a method and an apparatus for using nanobubbles are described in Patent Document 1 (Japanese Patent Laid-Open No. 2004-121962). This prior art utilizes characteristics such as surface active action and bactericidal action due to the phenomenon that nanobubbles have reduced buoyancy, increased surface area, increased surface activity, generation of local high-pressure field, and realization of electrostatic polarization. . More specifically, in this prior art, by interlinking them, various objects can be washed with high functionality and low environmental load by the adsorption function of dirt components, the high-speed cleaning function of the object surface, and the sterilization function. It is said that the polluted water can be purified.

  As another conventional technique, a method for generating nanobubbles is described in Patent Document 2 (Japanese Patent Laid-Open No. 2003-334548). In this prior art, in a liquid, (i) a step of decomposing and gasifying part of the liquid, (ii) a step of applying ultrasonic waves in the liquid, or (iii) decomposing and gasifying a part of the liquid It is comprised from the process and the process of applying an ultrasonic wave.

  Furthermore, as another conventional technique, a waste liquid treatment apparatus using ozone microbubbles is described in Patent Document 3 (Japanese Patent Laid-Open No. 2004-321959). In this prior art, ozone gas generated from the ozone generator and waste liquid extracted from the lower part of the treatment tank are supplied to the microbubble generator via a pressure pump. Moreover, in this prior art, the produced | generated ozone microbubble is ventilated in the waste liquid in a processing tank from the opening part of a gas blowing pipe.

However, in the conventional wastewater treatment equipment using the above-described microbubbles and nanobubbles, wastewater containing a compound such as an organic fluorine-based compound that is a chemically stable substance cannot be efficiently decomposed at low cost. .
JP 2004-121962 A Japanese Patent Laid-Open No. 2003-334548 JP 2004-321959 A

  Therefore, an object of the present invention is to provide a wastewater treatment method and a wastewater treatment system capable of efficiently decomposing organic substances (for example, organic fluorine-based compounds).

In order to solve the above problems, the wastewater treatment method of the present invention introduces wastewater into a treated water tank, decomposes organic matter contained in the wastewater with microorganisms activated by micro-nano bubbles, and gasifies in the treated water tank. And a process of
E Bei a step of treatment with washing water containing micro-nano bubbles in the resulting gas above the gasification is introduced into the exhaust gas treatment device,
The waste water is waste water containing an organic fluorine compound,
Furthermore, the step of adsorbing the organic fluorine compound contained in the waste water with activated carbon,
Activating microorganisms propagated on the activated carbon with micro-nano bubbles to microbially decompose the organic fluorine compound;
It is characterized in Rukoto to have a.

  According to the wastewater treatment method of the present invention, in the treated water tank, microorganisms activated by micro-nano bubbles decompose organic substances (for example, organic fluorine compounds) contained in the wastewater. The exhaust gas generated by the decomposition of the organic matter is introduced into an exhaust gas treatment device and treated with washing water containing micro / nano bubbles. In particular, it has been proved by experiments that cleaning water containing micro-nano bubbles is effective in absorbing components in the exhaust gas, so that the exhaust gas from the treated water tank can be reliably treated.

In the wastewater treatment method of the present invention, the wastewater is wastewater containing an organic fluorine compound.

According to the wastewater treatment method of the present invention , the organic fluorine compound contained in the wastewater is decomposed by microorganisms activated by micro-nano bubbles, and the exhaust gas resulting from the organic fluorine compound generated by the decomposition is introduced into the exhaust gas treatment apparatus. And treated with washing water containing micro-nano bubbles.

Further, in the wastewater treatment method of the present invention , the step of adsorbing the organic fluorine compound contained in the wastewater with activated carbon, the step of activating the microorganisms propagated on the activated carbon with micro-nano bubbles to microbially decompose the organic fluorine compound, Have

According to the wastewater treatment method of the present invention , an organic fluorine compound is adsorbed by activated carbon, and the organic fluorine compound is decomposed by microorganisms propagated on activated carbon and activated by micro-nano bubbles. As a result, it has been experimentally found that the organic fluorine compound can be decomposed, and the organic fluorine compound can be efficiently decomposed. Since micro-nano bubbles are super fine air, they easily get into the small pores of activated carbon.

Moreover, in the waste water treatment method of one reference example , when the to-be-processed water generate | occur | produced with the said waste gas processing apparatus turns into a waste liquid, the process of discharging this waste liquid to a contractor's collection piping is provided.

According to the wastewater treatment method of this reference example , the waste liquid (for example, concentrated waste liquid) generated in the exhaust gas treatment device is discharged to the contractor's take-off pipe for disposal by the trader, so the wastewater is treated at the wastewater treatment facility. The need to do this can be eliminated. In addition, since it takes a relatively long time for the water to be treated generated from the exhaust gas treatment device to concentrate and become a relatively concentrated waste liquid, the amount of wastewater generated can be suppressed, and a wastewater treatment method with a low environmental impact can be achieved. Become.

Moreover, in the waste water treatment method of one reference example , the organic fluorine compound contained in the waste water is perfluorooctasulfonic acid, perfluorooctanoic acid, or a mixture of perfluorooctasulfonic acid and perfluorooctanoic acid. .

According to the wastewater treatment method of this reference example , perfluorooctasulfonic acid (PFOS) and perfluorooctanoic acid (PFOA), which are problematic from the viewpoint of environmental pollution all over the world, can be microbially decomposed as an organic fluorine-based compound. .

Further, in the wastewater treatment system of the present invention , by treating the wastewater with microorganisms activated with micro-nano bubbles while introducing the wastewater, a treated water tank that decomposes and gasifies the organic matter contained in the wastewater,
E Bei an exhaust gas treatment apparatus for treating the gas together with the gas produced by gasification in the process water tank is introduced in the wash water containing micro-nano bubbles,
The waste water is waste water containing an organic fluorine compound,
In addition, a treatment agent containing fluorine ions generated in the exhaust gas treatment device is introduced, and a calcium agent addition treatment unit is provided for adding calcium agent to the treatment water to form calcium fluoride for treatment. The

According to the wastewater treatment system of the present invention , in the treated water tank, microorganisms activated by micro-nano bubbles decompose organic substances (for example, organic compounds such as organic fluorine compounds) contained in the wastewater. The exhaust gas generated by the decomposition of the organic matter is introduced into an exhaust gas treatment device and treated with washing water containing micro / nano bubbles. In particular, it has been proved by experiments that cleaning water containing micro-nano bubbles is effective in absorbing components in the exhaust gas, so that the exhaust gas can be reliably treated.

In the wastewater treatment system of the present invention, the wastewater is wastewater containing an organic fluorine compound.

According to the wastewater treatment system of the present invention , the organic fluorine compound contained in the wastewater is decomposed by microorganisms activated by micro-nano bubbles, and the exhaust gas resulting from the organic fluorine compound generated by the decomposition is introduced into the exhaust gas treatment device. And treated with washing water containing micro-nano bubbles.

Moreover, in the wastewater treatment system of one reference example , the treated water tank includes a micro / nano bubble generator, charcoal contained in a plurality of mesh bags, and a mesh tube installed between the mesh bags. .

According to the wastewater treatment system of this reference example , the micro / nano bubble generator installed in the treated water tank generates micro / nano bubbles in the waste water, and the microbes activated by the micro / nano bubbles are stored in a plurality of net bags (for example, Breeds on activated carbon). Then, the organic matter adsorbed by the charcoal (for example, an organic compound such as an organic fluorine compound) can be decomposed in a relatively short time by microorganisms activated.

  In addition, since a mesh pipe is installed between the mesh bag charcoal and the mesh bag charcoal, it is possible to always ensure a circulating water flow through the mesh pipe, so that the water to be treated and charcoal (for example, activated carbon) can be secured. The contact efficiency can be maintained for a long time.

Moreover, in the wastewater treatment system of one reference example , the exhaust gas treatment apparatus has an upper watering part for sprinkling cleaning water containing micro-nano bubbles in the gas, and a micro-nano bubble generator, and is sprinkled with the upper watering part. The washing water is dropped and introduced, and the lower water tank part introduces the washing water containing the micro / nano bubbles generated by the micro / nano bubble generator into the upper watering part.

According to the wastewater treatment system of this reference example , in the upper watering portion of the exhaust gas treatment device, the cleaning material containing micro-nano bubbles is sprinkled into the exhaust gas generated by the decomposition of the organic matter, so that the organic matter (e.g., organic fluorine) Decomposition products of organic compounds such as compounds can be efficiently absorbed in washing water.

  Further, in the lower water tank part of the exhaust gas treatment apparatus, the cleaning water sprinkled in the upper watering part is dropped and introduced into the upper watering part. Wash water can be circulated between the water sprinkling part and the lower water tank part.

Moreover, in the waste water treatment system of one reference example , the said treated water tank has a corrosion-resistant lid | cover which covers an upper part.

According to the wastewater treatment system of this reference example, since the corrosion-resistant lid is installed on the upper part of the treated water tank, it is possible to prevent the generated exhaust gas from being diffused into the atmosphere.

Moreover, the waste water treatment system of one reference example includes an exhaust duct and an exhaust fan for introducing gas into the exhaust gas treatment apparatus from the upper space of the treated water tank.

In the wastewater treatment system of this reference example , almost all the exhaust gas generated in the treated water tank can be reliably introduced into the exhaust gas treatment device by the exhaust duct and the exhaust fan.

Further, in the wastewater treatment system of the present invention , treated water containing fluorine ions generated in the exhaust gas treatment apparatus is introduced and a calcium agent is added to the treated water to form calcium fluoride. A calcium agent addition processing unit is provided.

In the wastewater treatment system of the present invention , the calcium agent addition treatment unit is introduced with treated water containing fluorine ions from the exhaust gas treatment device, and reacts the fluorine ions in the treated water with calcium to precipitate calcium fluoride. Can be processed as a product.

Moreover, the waste water treatment system of the present invention includes a chelate resin tower into which water to be treated containing fluorine ions generated in the exhaust gas treatment apparatus is introduced.

According to the wastewater treatment system of the present invention , fluorine ions and fluorine compounds after decomposition of the organic fluorine compound contained in the water to be treated can be treated with the chelate resin in the chelate resin tower.

Moreover, in the wastewater treatment system of one reference example , the charcoal accommodated in the net bag of the treatment water tank is at least one of charcoal, activated carbon, and synthetic charcoal.

According to the wastewater treatment system of this reference example , any one of charcoal, activated carbon, synthetic coal, or a combination thereof, depending on the wastewater treatment conditions, for example, conditions such as the type and concentration of organic matter contained in the wastewater. It only has to be selected.

Moreover, in the wastewater treatment system of one reference example , the charcoal accommodated in the mesh bag of the treatment water tank is activated carbon.

According to the wastewater treatment system of this reference example, the charcoal contained in the treated water tank is activated carbon having the largest amount of adsorption to the organic fluorine compound, and therefore the maximum is obtained by microorganisms activated by the micro-nano bubbles on the organic fluorine compound adsorbed on the activated carbon. It becomes possible to perform decomposition processing with efficiency.

Moreover, in the wastewater treatment system of one reference example , the charcoal accommodated in the mesh bag of the treatment water tank is coconut shell activated carbon.

According to the wastewater treatment system of this reference example , since the charcoal contained in the net bag is coconut shell activated carbon, procurement is easy.

Moreover, in the wastewater treatment system of one reference example , the treated water tank includes a micro / nano bubble generator and an air diffuser, and generates a water flow in the treated water tank with the micro / nano bubbles generated by the micro / nano bubble generator. A water flow is generated in the treated water tank by bubbles discharged from the air diffuser, and both water flows are merged.

According to the wastewater treatment system of this reference example , the water flow is configured by mixing both the water flow from the macro / nano bubble generator and the water flow caused by the bubble generated from the diffuser, so the stirring capacity in the treated water tank is improved. And the removal rate of the organic fluorine compound is increased.

Moreover, in the wastewater treatment system of one reference example , the exhaust gas treatment apparatus has a filler installed in the lower water tank, and the filler is a polyvinylidene chloride filler or charcoal contained in a net bag. .

According to the wastewater treatment system of this reference example , microorganisms propagate on the polyvinylidene chloride filler installed as a filler in the lower water tank part of the exhaust gas treatment apparatus or the charcoal contained in the net bag, and the exhaust gas treatment The microbial concentration of the decomposition product of the organic fluorine compound can be further promoted by increasing the microbial concentration in the lower water tank of the apparatus.

In one embodiment , the polyvinylidene chloride filler is a string-type polyvinylidene chloride filler or a ring-type polyvinylidene chloride filler.

According to the wastewater treatment system of this reference example , microorganisms are propagated at a high concentration in the string-type polyvinylidene chloride filler or ring-type polyvinylidene chloride filler installed in the lower water tank of the exhaust gas treatment device, and the organic fluorine compound The microbial treatment efficiency of the degradation product can be improved.

  According to the wastewater treatment method of the present invention, in a treated water tank, microorganisms activated by micro-nano bubbles decompose organic substances (for example, organic compounds such as organic fluorine compounds) contained in the wastewater. The exhaust gas generated by the decomposition of the organic matter is introduced into an exhaust gas treatment device and treated with washing water containing micro / nano bubbles. In particular, it has been proved by experiments that cleaning water containing micro-nano bubbles is effective in absorbing components in the exhaust gas, so that the exhaust gas from the treated water tank can be reliably treated.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

(First embodiment)
FIG. 1 schematically shows a first embodiment of the wastewater treatment apparatus of the present invention. The first embodiment includes a treated water tank 1 and an exhaust gas treatment device 15.

  The treated water tank 1 is introduced with wastewater containing an organic fluorine compound to be treated. The treated water tank 1 has a water tank upper part 11 and a water tank lower part 12 forming an upper space part. In the water tank lower part 12 of the treated water tank 1, a plurality of net bags 2 containing activated carbon 3 are installed at the approximate center in the vertical direction and on one side in the horizontal direction. Further, a net-like tube 4 extending in the vertical direction is provided with an appropriate interval between the rows of the net bags 2 adjacent to the left and right. The mesh bag 2 and the mesh tube 4 containing the activated carbon 3 are placed on the porous plate 5 fixed to the lower part of the water tank 12, and the side plate 55 extending upward from the end of the porous plate 5 and the side walls of the lower part of the water tank 12. It is arranged between. Since the waste water as the water to be treated easily flows through the mesh tube 4, the contact between the activated carbon 3 in the adjacent mesh bag 2 and the waste water as the water to be treated can be improved.

  The perforated plate 5 is simply a plate having a plurality of holes and is generally made of plastic. However, the material of the perforated plate 5 is not particularly limited as long as it does not corrode with drainage. . The activated carbon 3 is commercially available from coconut shell activated carbon and coal activated carbon, but either may be selected. Further, the mesh tube 4 is devised so that the circulating water flow in the treated water tank 1 is in contact with all the activated carbons 3, and a material made of plastic or vinyl chloride is commercially available.

  Further, in order to activate the microorganisms that propagate in the treated water tank 1, a micro / nano bubble generator 7 and related devices (air suction pipe 9, circulation pump 10) and the like are installed in the treated water tank 1. In other words, the circulating pump 10 supplies the water to be treated in the water tank 1 to the micro / nano bubble generator 7 as a necessary amount as circulating water, and the necessary amount of air is adjusted by the air suction pipe 9 and the valve 8 to make the micro / nano bubble. It is supplied to the generator 7. Thereby, the micro / nano bubble generator 7 generates optimal micro / nano bubbles.

  The micro / nano bubble generator 7 generates a water flow 6 by fine bubbles (micro / nano bubbles) to be discharged. This water flow 6 becomes a circulating water flow in the treated water tank 1 and agitates the tank 1. The micro / nano bubble generator 7 generates a micro / nano bubble flow to increase the contact efficiency between the organic fluorine compound-containing waste water as the water to be treated and the activated carbon 3 on which microorganisms have propagated. However, in the treated water tank 1, if the amount of circulating water is insufficient only with the micro / nano bubble flow, an air diffuser (not shown) is installed in the water tank 1, and the bubbles discharged from the air diffuser rise. In some cases, the amount of circulating water is ensured by the upward flow generated during this process.

  In this 1st Embodiment, when the organic fluorine compound containing waste water as to-be-processed water is introduce | transduced into the treated water tank 1, and it operates by generating a micro nano bubble with the micro nano bubble generator 7, it will be active to activated carbon 3 with progress of time. Germified microorganisms breed. The activated carbon 3 has an ability to adsorb an organic fluorine compound. Since activated microorganisms have propagated on the activated carbon 3 that has adsorbed the organic fluorine compound, the microorganisms activated by the micro-nano bubbles decompose the organic fluorine compound that has been adsorbed by the activated carbon 3.

  In particular, an organic fluorine compound which has been said to be difficult to decompose by microorganisms is first adsorbed on the activated carbon 3 and then decomposed by activated microorganisms. In this way, in the treated water tank 1, organic substances such as organic fluorine compounds are decomposed. That is, in the activated carbon 3 installed in the treated water tank 1, adsorption and decomposition of the organic fluorine compound contained in the waste water are repeated in a short time. Therefore, the activated carbon 3 is always regenerated.

  Further, in the treated water tank 1, treated water in which the organic fluorine compound is decomposed is introduced into the pit 40, and is transferred to a predetermined place as treated water by a pit pump 41 installed in the pit 40.

  On the other hand, in the treated water tank 1, it was confirmed by experiments that a gas containing fluorine (hereinafter referred to as fluorine gas) is generated when the organic fluorine compound contained in the waste water is decomposed. Therefore, the treated water tank lid 39 is installed in the upper tank 11 of the treated water tank 1, and the treated water tank lid 39 covers the upper tank 11. The treated water tank lid 39 is made of a corrosion resistant material.

  Then, the fluorine gas generated in the treated water tank 1 is introduced from the upper part 11 of the water tank covered with the treated water tank cover 39 into the exhaust gas treatment device 15 via the exhaust duct 13 by the exhaust fan 14.

  As shown in FIG. 1, the exhaust gas treatment device 15 includes an upper watering part 16 and a lower water tank part 17. The fluorine gas flowing into the exhaust gas treatment device 15 from the treated water tank 1 is processed by the exhaust gas treatment device 15 and discharged from the uppermost exhaust outlet 42 of the exhaust gas treatment device 15. In this exhaust gas treatment device 15, the washing water in the lower water tank unit 17 is transferred to the upper watering unit 16 via the washing water pipe 19 by the watering pump 26, and sprinkled from the watering nozzle 18 to the plastic filler 20. .

  As shown in FIG. 1, the upper water sprinkling unit 16 of the exhaust gas treatment device 15 includes a porous plate 21 and a plastic filler 20 placed on the porous plate 21. As this plastic filler 20, what was called the brand name Terralet was employ | adopted as an example. A watering nozzle 18 is installed at a predetermined distance above the plastic filler 20 in the upper watering part 16 of the exhaust gas treatment device 15.

On the other hand, a micro / nano bubble generator 23 is installed in the lower water tank portion 17 of the exhaust gas treatment device 15. The micro / nano bubble generator 23 is connected to a circulation pump 27 by piping, and the circulation pump 27 supplies the washing water in the lower water tank unit 17 to the micro / nano bubble generator 23 in a necessary pressure state. By supplying cleaning water to the micro / nano bubble generator 23 at a necessary pressure, micro / nano bubbles are efficiently generated. In addition, the said required pressure means 1.5 kg / cm < ² > or more, for example. The micro / nano bubble generator 23 needs air to generate micro / nano bubbles, but a necessary amount of air is secured from the valve 24 and the air suction pipe 25.

  In this way, in the exhaust gas treatment device 15, since the micro / nano bubble generator 23 is installed in the lower water tank unit 17 to generate the micro / nano bubbles, at the same time, the washing water in the lower water tank unit contains the micro / nano bubbles, The water flow 22 caused by the micro / nano bubbles is caused to stir the washing water in the lower water tank section 17. And the watering pump 26 is sending the washing water containing the micro nano bubble in the lower water tank part 17 to the watering nozzle 18 of the upper watering part 16 via the washing water piping 19. As a result, the cleaning water containing micro-nano bubbles is sprinkled from the sprinkling nozzle 18 to the plastic filler 20, and the fluorine gas component (fluorine) introduced from the exhaust duct 13 is washed and adsorbed. It passes through the plate 21 and falls into the lower water tank part 17.

  Here, it was confirmed by experiments that the washing water containing micro-nano bubbles has a higher removal rate of fluorine in the fluorine gas derived from the organic fluorine compound than the washing water not containing micro-nano bubbles. The reason is considered that the washing water containing the micro-nano bubbles increases the washing effect on the dirt component in the gas.

  Thus, in the exhaust gas treatment device 15, the fluorine in the fluorine gas is dissolved in the washing water, and the washing water becomes a fluorine-containing waste water, which is introduced into the chelate resin tower 56 in the next step, and the fluorine contained in this waste water is treated. It becomes.

  As the micro / nano bubble generator 23, for example, a commercially available one can be adopted, but the manufacturer is not limited, but here, as a specific example, Nano Planet Research Laboratories and Auratec Co., Ltd. The thing was adopted. As other products of the micro / nano bubble generator 23, for example, a micro bubble water production apparatus manufactured by Seika Sangyo Co., Ltd. or a micro bubble water production apparatus produced by Resource Development Co., Ltd. can be adopted. It ’s fine.

  Here, three types of bubbles will be described.

  (i) Normal bubbles (bubbles) rise in the water and eventually disappear on the surface by popping bread.

  (ii) Microbubbles are fine bubbles having a diameter of 10 (μm) to several tens (μm) or less, shrink in water, and eventually disappear (completely dissolve).

  (iii) Nanobubbles are said to be bubbles that are smaller than microbubbles (100 to 200 nm with a diameter of 1 (μm) or less) and can exist in water forever. Micro-nano bubbles can be described as bubbles in which micro-bubbles and nano-bubbles are mixed.

  In the above embodiment, the wastewater introduced into the treated water tank 1 contains an organic fluorine compound as an organic compound, but the wastewater contains another organic compound or organic substance such as a volatile organic compound other than the organic fluorine compound. It may be. Moreover, in the said embodiment, although activated carbon 3 was installed in the treated water tank 1, you may install charcoal other than activated carbon 3 in the treated water tank 1. FIG.

(Second embodiment)
Next, FIG. 2 shows a second embodiment of the waste water treatment apparatus of the present invention. The second embodiment is different from the first embodiment described above only in that a calcium agent addition coagulating sedimentation facility as a calcium agent addition processing unit is provided instead of the chelate resin tower 56 of FIG. Therefore, in the second embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  In the second embodiment, fluorine contained in the cleaning water of the exhaust gas treatment device 15 is treated economically and rationally. That is, in this 2nd Embodiment, the fluorine-containing waste_water | drain from the waste gas processing apparatus 15 is processed with the calcium agent addition coagulation sedimentation equipment 57 as a calcium agent addition process part. That is, in this calcium agent-added coagulating sedimentation facility 57, a calcium agent is added to the fluorine-containing wastewater introduced from the exhaust gas treatment device 15, and the fluorine ions in the fluorine-containing wastewater are reacted with calcium to produce calcium fluoride. As a precipitate. According to the calcium agent-added coagulating sedimentation facility 57, the running cost is raised as an economic merit for wastewater treatment.

  That is, the chelate resin tower 56 employed in the first embodiment described above requires a resin regeneration operation and has a phenomenon that the resin deteriorates, and is processed by the calcium agent-added coagulating sedimentation facility 57 employed in the second embodiment. Compared to the wastewater treatment system, the running cost is high. However, when the fluorine concentration in the water to be treated is low, a chelate resin tower may be adopted.

( First reference example )
Next, FIG. 3 shows a first reference example of the waste water treatment apparatus of the present invention. The first reference example is that the chelate resin tower 56 of FIG. 1 is not included, and the point that the contractor taking-in pipe 60 is provided near the bottom of the lower water tank portion 17 of the exhaust gas treatment device 15. Different from one embodiment.

In this first reference example , microorganisms are generated and propagated in the plastic filler 20 in the lower water tank part 17 and the water sprinkling part 16 of the exhaust gas treatment device 15, and the organic components in the washing water are decomposed by the microorganisms. This is suitable when there is no need to drain from the lower water tank section 17. That is, in the first embodiment described above, water to be treated containing fluorine is constantly generated in the lower water tank portion 17 of the exhaust gas treatment device 15, whereas in the first reference example , fluorine is discharged from the lower water tank portion 17. This corresponds to the case where wastewater as treated water containing no water is generated or there is very little wastewater.

However, in the lower water tank portion 17 of the exhaust gas treatment device 15 of the first reference example , when the function of the cleaning water is extremely lowered, the valve 43 attached to the supplier take-off pipe 60 is opened and the waste water is supplied to the supplier. The product can be discharged from the take-up pipe 60 and used as a supplier take-up process.

( Third embodiment)
Next, FIG. 4 shows a third embodiment of the waste water treatment apparatus of the present invention. This 3rd Embodiment differs from the above-mentioned 1st Embodiment only in the point provided with the treated water tank 1U instead of the treated water tank 1 of FIG. Therefore, in the third embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and detailed description thereof is omitted, and the parts different from those in the first embodiment will be mainly described.

As shown in FIG. 4, the treated water tank 1U provided in the third embodiment has a water tank lower part 12U instead of the water tank lower part 12 of FIG. This aquarium lower portion 12U is different from the aquarium lower portion 12 of FIG. 1 in that an aeration tube 30 is installed on the substantially vertical center and one side in the left-right direction. As shown in FIG. 4, the air diffuser 30 is connected to a blower 28 installed outside the water tank by an air pipe 29.

In this 3rd Embodiment, the to-be-processed water in the water tank lower part 12U is stirred by the water flow 6 by the micro nano bubble generated from the micro nano bubble generator 7. FIG. This is the same as in the first embodiment described above.

  By the way, stirring may be insufficient only with the water flow 6 by the micro / nano bubbles of the micro / nano bubble generator 7. In that case, the water tank lower part 12 can be stirred with the air discharged from the air diffuser 30 by operating the blower 28 connected to the air diffuser 30.

Thereby, in this 3rd Embodiment, since both the water flow 6 from the macro-nano bubble generator 7 and the water flow resulting from the bubble which generate | occur | produces from the diffuser pipe 30 are mixed, the water flow is comprised, Therefore The stirring in the treated water tank 1 is carried out. The capacity can be improved, and the removal rate of organic fluorine compounds from waste water can be increased.

( Second reference example )
Next, FIG. 5 shows a second reference example of the waste water treatment apparatus of the present invention. This second reference example differs from the first embodiment described above in that it does not have the chelate resin tower 56 of FIG. 1 and has an exhaust gas treatment device 15V instead of the exhaust gas treatment device 15. Therefore, in the second reference example , the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment are described.

As shown in FIG. 5, in this second reference example , the lower water tank portion 17V of the exhaust gas treatment device 15V is filled with a string-type polyvinylidene chloride filler 32 and a string-type polyvinylidene chloride filler as fillers. A fixing bracket 31 for fixing the material 32 is provided.

  As an example, when the organic fluorine compound contained in the wastewater generated in the semiconductor factory is microbially decomposed, primary microbial decomposition and secondary treatment of the generated gas are required. The generated gas is expected to be an organic metabolite of an organic fluorine compound.

Therefore, in this second reference example , in the lower water tank portion 17V of the exhaust gas treatment device 15V, in order to more efficiently microbially decompose organic metabolites of the organic fluorine compound, the lower water tank portion 17V is used as a filler. A string-type polyvinylidene chloride filler 32 was installed. Microorganisms are cultured and propagated at a high concentration in the string-like polyvinylidene chloride filler 32, so that organic metabolites of the organic fluorine compound can be treated with microorganisms more efficiently. Therefore, according to the second reference example , the microbial treatment of the decomposition product of the organic fluorine compound can be further promoted.

In the second reference example , the treated water treated in the lower water tank portion 17V of the exhaust gas treatment device 15V is introduced into a treatment facility (not shown) in the next process.

( Third reference example )
Next, FIG. 6 shows a third reference example of the waste water treatment apparatus of the present invention. This third reference example differs from the first embodiment described above in that it does not have the chelate resin tower 56 of FIG. 1 and has an exhaust gas treatment device 15W instead of the exhaust gas treatment device 15. Therefore, in the third reference example , the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment are described.

As shown in FIG. 6, in the third reference example , the lower water tank portion 17W of the exhaust gas treatment device 15W includes a ring-type polyvinylidene chloride filler 33 and a ring-type polyvinylidene chloride filler 33 as fillers in the tank. The net | network 34 for accommodating is installed.

  As an example, when the organic fluorine compound contained in the wastewater generated in the semiconductor factory is microbially decomposed, primary microbial decomposition and secondary treatment of the generated gas are required. The generated gas is expected to be an organic metabolite of an organic fluorine compound.

Therefore, in this third reference example , in the lower water tank portion 17W of the exhaust gas treatment device 15W, in order to more efficiently microbially decompose organic metabolites of the organic fluorine compound, the lower water tank 17V is used as a filler. A ring-type polyvinylidene chloride filler 33 was installed. Microorganisms are cultured and propagated in this ring-type polyvinylidene chloride filler 33 at a high concentration, and the organic metabolite of the organic fluorine compound is more effectively subjected to the microorganism treatment. Therefore, according to the third reference example , the microbial treatment of the decomposition product of the organic fluorine compound can be further promoted.

In the third reference example , the treated water treated in the lower water tank portion 17W of the exhaust gas treatment device 15W is introduced into a treatment facility (not shown) in the next step.

( Fourth reference example )
Next, FIG. 7 shows a fourth reference example of the waste water treatment apparatus of the present invention. The fourth reference example differs from the first embodiment described above in that it does not have the chelate resin tower 56 of FIG. 1 and has an exhaust gas treatment device 15X instead of the exhaust gas treatment device 15. Therefore, in the fourth reference example , the same portions as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and portions different from those in the first embodiment are described.

As shown in FIG. 7, in this fourth reference example , the lower water tank portion 17X of the exhaust gas treatment device 15X has a plurality of net bags 35 each containing activated carbon 36 as a filler in the tank, substantially in the center in the vertical direction and left and right. It is installed on one side of the direction. In addition, a net-like tube 38 extending in the vertical direction is provided with an appropriate space between the rows of the net bags 35 adjacent to the left and right. The mesh bag 35 and the mesh tube 38 containing the activated carbon 36 are placed on a porous plate 37A fixed to the lower water tank portion 17X, and a porous plate 3B serving as a side plate extending upward from the end of the porous plate 37A. It arrange | positions between the side walls of the lower water tank part 17X.

  In this lower water tank portion 17X, the cleaning water to be treated easily flows in the mesh tube 38, so that the contact between the activated carbon 36 in the adjacent mesh bag 35 and the cleaning water to be treated is improved. it can.

  As an example, when the organic fluorine compound contained in the wastewater generated in the semiconductor factory is microbially decomposed, primary microbial decomposition and secondary treatment of the generated gas are required. The generated gas is expected to be an organic metabolite of an organic fluorine compound.

Therefore, in the fourth reference example , in the lower water tank unit 17X of the exhaust gas treatment device 15X, in order to more efficiently microbially decompose the organic metabolite of the organic fluorine compound, Activated carbon 36 and mesh tube 38 contained in mesh bag 35 were installed. Microorganisms are cultured and propagated at a high concentration in the activated carbon 36 contained in the mesh bag 35 as the filler, and the organic metabolite of the organic fluorine compound is more effectively subjected to the microorganism treatment. Therefore, according to the fourth reference example , the microbial treatment of the decomposition product of the organic fluorine compound can be further promoted.

In the fourth reference example , the treated water treated in the lower water tank portion 17X of the exhaust gas treatment device 15X is introduced into a treatment facility (not shown) in the next process.

( Fourth embodiment)
Next, FIG. 8 shows a fourth embodiment of the waste water treatment apparatus of the present invention. The fourth embodiment differs from the first embodiment only in that an exhaust communication pipe 66 that connects the exhaust outlet 42 of the exhaust gas treatment device 15 to the water tank upper part 11 that is the upper space part of the treated water tank 1 is provided. . Therefore, in the fourth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment are described.

In the fourth embodiment, the exhaust gas from the exhaust outlet 42 of the exhaust gas treatment device 15 is again tackled into the upper part 11 of the water tank through the exhaust communication pipe 66. Therefore, the exhaust gas is repeatedly processed by the exhaust gas processing device 15 via the exhaust duct 13 and the exhaust fan 4. Therefore, the exhaust gas treatment performance can be improved. Therefore, the fourth embodiment is effective when the exhaust gas treatment for the exhaust gas component derived from the organic fluorine compound is insufficient by the one-time treatment in the exhaust gas treatment device 15. In addition, the wastewater treatment system of the fourth embodiment is suitable for a case where the amount of generated exhaust gas is relatively small because the exhaust gas generated is a closed system.

(Experimental example)
An experimental device corresponding to the wastewater treatment system of FIG. 1 was produced. The capacity of the treatment water tank 1 in this experimental apparatus was about 4 m ^3, and the capacity of the exhaust gas treatment apparatus 15 was about 2 m ³ . In this experimental apparatus, industrial water was introduced into the treated water tank 1 for one month and a test operation was performed. After this test operation, the concentration of PFOS (perfluorooctane sulfonic acid) in the waste water at the waste water inlet to the treated water tank 1 and the PFOS (perfluoro octane sulfone powder) in the waste water at the waste water outlet of the lower water tank 17 of the exhaust gas treatment device 15 When the concentration was measured and the removal rate of PFOS was measured, it was 85%.

It is a figure which shows typically 1st Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 2nd Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically the 1st reference example of the waste water treatment equipment of this invention. It is a figure which shows typically 3rd Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically the 2nd reference example of the waste water treatment equipment of this invention. It is a figure which shows typically the 3rd reference example of the waste water treatment equipment of this invention. It is a figure which shows typically the 4th reference example of the waste water treatment equipment of this invention. It is a figure which shows typically 4th Embodiment of the waste water treatment equipment of this invention.

DESCRIPTION OF SYMBOLS 1 Treated water tank 2 Net bag 3 Activated carbon 4 Mesh pipe 5 Porous plate 6 Water flow 7 Micro nano bubble generator 8 Valve 9 Air suction pipe 10 Circulation pump 11 Water tank upper part 12 Water tank lower part 13 Exhaust duct 14 Exhaust fan 15, 15V, 15W, 15X Exhaust gas Treatment device 16 Upper water sprinkling part 17, 17V, 17W, 17X Lower water tank part 18 Sprinkling nozzle 19 Washing water piping 20 Plastic filler 21 Porous plate 22 Water flow 23 Micro-nano bubble generator 24 Valve 25 Air suction pipe 26 Sprinkling pump 27 Circulation pump 28 Blower 29 Air piping 30 Aeration pipe 31 Fixing fitting 32 String-type polyvinylidene chloride filler 33 Ring-type polyvinylidene chloride filler 34 Net 35 Net bag 36 Activated carbon 37 Perforated plate 38 Net pipe 39 Treatment water tank lid 40 Pit 41 Pit pump 4 2 Exhaust outlet 43 Valve 56 Chelate resin tower 57 Calcium agent addition coagulation sedimentation equipment 60 Pipe for taking out of contractor 66 Exhaust communication pipe

Claims (3)

Introducing the waste water into the treated water tank, decomposing the organic matter contained in the waste water with microorganisms activated by micro-nano bubbles, and gasifying in the treated water tank;
Introducing the gas generated by the gasification into an exhaust gas treatment device and treating it with washing water containing micro-nano bubbles;
With
The waste water is waste water containing an organic fluorine compound,
Furthermore, the step of adsorbing the organic fluorine compound contained in the waste water with activated carbon,
And a step of microbial decomposition of the organic fluorine compound by activating microorganisms propagated on the activated carbon with micro-nano bubbles. A treated water tank that decomposes and gasifies organic matter contained in the waste water by treating the waste water with microorganisms activated with micro-nano bubbles while the waste water is introduced, and
An exhaust gas treatment device for introducing a gas generated by gasification in the treatment water tank and treating the gas with washing water containing micro-nano bubbles;
The waste water is waste water containing an organic fluorine compound,
In addition, a treatment agent containing fluorine ions generated in the exhaust gas treatment apparatus is introduced, and a calcium agent addition treatment unit is provided for adding calcium agent to the treatment water to form calcium fluoride for treatment. A wastewater treatment system characterized by that. A treated water tank that decomposes and gasifies organic matter contained in the waste water by treating the waste water with microorganisms activated with micro-nano bubbles while the waste water is introduced, and
An exhaust gas treatment device for introducing a gas generated by gasification in the treatment water tank and treating the gas with washing water containing micro-nano bubbles;
The waste water is waste water containing an organic fluorine compound,
Furthermore, a wastewater treatment system comprising a chelate resin tower into which treated water containing fluorine ions generated in the exhaust gas treatment apparatus is introduced.

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