JP2007245119A - Waste water treatment method and system therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a waste water treatment method and system therefor capable of effectively decomposing organic substances (for example, organic fluorine compounds etc.). <P>SOLUTION: In this waste water treatment system, microorganisms activated by micro-nano bubbles decompose the organic substances (for example, the organic fluorine compounds etc.) contained in the waste water in a treatment tank 1. Waste gas produced in the decomposition process of the organic substances is introduced into a waste gas treatment device 15 and treated by washing water containing the micro-nano bubbles. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a wastewater treatment method and a wastewater treatment system, for example, a wastewater treatment method and a wastewater treatment system in a semiconductor factory or a liquid crystal factory.

  An organic fluorine compound is an example of a component contained in wastewater, but is a chemically stable substance. Since this organic fluorine compound has excellent properties particularly from the viewpoint of heat resistance and chemical resistance, it is used for applications such as surfactants.

  However, since this organic fluorine compound is a chemically stable substance, it is difficult to decompose microorganisms. For example, perfluorooctasulfonic acid (PFOS) and perfluorooctanoic acid (PFOA), which are examples of the above-mentioned organic fluorine compounds, are concerned about the impact on the ecosystem because degradation does not proceed in the ecosystem.

  That is, since the above-mentioned perfluorooctasulfonic acid (PFOS) and perfluorooctanoic acid (PFOA) are chemically stable, a high temperature of about 1000 ° C. or higher is required for thermal decomposition. In addition, the perfluorooctasulfonic acid and perfluorooctanoic acid are extremely difficult to decompose by treatment with conventional microorganisms or photocatalysts.

  By the way, as a conventional technique, a method and an apparatus for using nanobubbles are described in Patent Document 1 (Japanese Patent Laid-Open No. 2004-121962). This prior art utilizes characteristics such as surface active action and bactericidal action due to the phenomenon that nanobubbles have reduced buoyancy, increased surface area, increased surface activity, generation of local high-pressure field, and realization of electrostatic polarization. . More specifically, in this prior art, by interlinking them, various objects can be washed with high functionality and low environmental load by the adsorption function of dirt components, the high-speed cleaning function of the object surface, and the sterilization function. It is said that the polluted water can be purified.

  As another conventional technique, a method for generating nanobubbles is described in Patent Document 2 (Japanese Patent Laid-Open No. 2003-334548). In this prior art, in a liquid, (i) a step of decomposing and gasifying part of the liquid, (ii) a step of applying ultrasonic waves in the liquid, or (iii) decomposing and gasifying a part of the liquid It is comprised from the process and the process of applying an ultrasonic wave.

  Furthermore, as another conventional technique, a waste liquid treatment apparatus using ozone microbubbles is described in Patent Document 3 (Japanese Patent Laid-Open No. 2004-321959). In this prior art, ozone gas generated from the ozone generator and waste liquid extracted from the lower part of the treatment tank are supplied to the microbubble generator via a pressure pump. Moreover, in this prior art, the produced | generated ozone microbubble is ventilated in the waste liquid in a processing tank from the opening part of a gas blowing pipe.

However, in the conventional wastewater treatment equipment using the above-described microbubbles and nanobubbles, wastewater containing a compound such as an organic fluorine-based compound that is a chemically stable substance cannot be efficiently decomposed at low cost. .
JP 2004-121962 A Japanese Patent Laid-Open No. 2003-334548 JP 2004-321959 A

  Therefore, an object of the present invention is to provide a wastewater treatment method and a wastewater treatment system capable of efficiently decomposing organic substances (for example, organic fluorine-based compounds).

In order to solve the above problems, the wastewater treatment method of the present invention introduces wastewater into a treated water tank, decomposes organic matter contained in the wastewater with microorganisms activated by micro-nano bubbles, and gasifies in the treated water tank. And a process of
And a step of introducing the gas generated by the gasification into an exhaust gas treatment apparatus and treating it with washing water containing micro-nano bubbles.

  According to the wastewater treatment method of the present invention, in the treated water tank, microorganisms activated by micro-nano bubbles decompose organic substances (for example, organic fluorine compounds) contained in the wastewater. The exhaust gas generated by the decomposition of the organic matter is introduced into an exhaust gas treatment device and treated with washing water containing micro / nano bubbles. In particular, it has been proved by experiments that cleaning water containing micro-nano bubbles is effective in absorbing components in the exhaust gas, so that the exhaust gas from the treated water tank can be reliably treated.

  Moreover, in the waste water treatment method of one embodiment, the waste water is waste water containing an organic fluorine compound.

  According to the wastewater treatment method of this embodiment, the organic fluorine compound contained in the wastewater is decomposed by microorganisms activated by micro-nano bubbles, and the exhaust gas resulting from the organic fluorine compound generated by this decomposition is introduced into the exhaust gas treatment device. Then, it is treated with washing water containing micro / nano bubbles.

  Further, in the wastewater treatment method of one embodiment, the step of adsorbing the organic fluorine compound contained in the wastewater with activated carbon, and the step of microbial decomposition of the organic fluorine compound by activating microorganisms propagated on the activated carbon with micro-nano bubbles And have.

  According to the wastewater treatment method of this embodiment, the organic fluorine compound is adsorbed by activated carbon, and the organic fluorine compound is decomposed by microorganisms propagated on activated carbon and activated by micro-nano bubbles. As a result, it has been experimentally found that the organic fluorine compound can be decomposed, and the organic fluorine compound can be efficiently decomposed. Since micro-nano bubbles are super fine air, they easily get into the small pores of activated carbon.

  Moreover, in the waste water treatment method of one embodiment, when the water to be treated generated in the exhaust gas treatment apparatus becomes a waste liquid, the waste water treatment method includes a step of discharging the waste liquid to a contractor pipe.

  According to the wastewater treatment method of this embodiment, waste liquid generated in the exhaust gas treatment device (for example, concentrated waste liquid) is discharged to a contractor's take-off pipe and is taken as a trader's take-off disposal. The need to do this can be eliminated. In addition, since it takes a relatively long time for the water to be treated generated from the exhaust gas treatment device to concentrate and become a relatively concentrated waste liquid, the amount of wastewater generated can be suppressed, and a wastewater treatment method with a low environmental impact can be achieved. Become.

  In one embodiment of the wastewater treatment method, the organic fluorine compound contained in the wastewater is perfluorooctasulfonic acid, perfluorooctanoic acid, or a mixture of perfluorooctasulfonic acid and perfluorooctanoic acid. .

  According to the wastewater treatment method of this embodiment, perfluorooctasulfonic acid (PFOS) and perfluorooctanoic acid (PFOA), which are problematic from the viewpoint of environmental pollution all over the world, can be microbially decomposed as organofluorine compounds. .

Moreover, in the wastewater treatment system of one embodiment, the wastewater is introduced, and the wastewater is treated with microorganisms activated by micro-nano bubbles, so that the organic matter contained in the wastewater is microbially decomposed and gasified, ,
A gas generated by gasification in the treatment water tank is introduced, and an exhaust gas treatment apparatus for treating the gas with washing water containing micro-nano bubbles is provided.

  According to the wastewater treatment system of this embodiment, in the treated water tank, microorganisms activated by micro-nano bubbles decompose organic substances (for example, organic compounds such as organic fluorine compounds) contained in the wastewater. The exhaust gas generated by the decomposition of the organic matter is introduced into an exhaust gas treatment device and treated with washing water containing micro / nano bubbles. In particular, it has been proved by experiments that cleaning water containing micro-nano bubbles is effective in absorbing components in the exhaust gas, so that the exhaust gas can be reliably treated.

  Moreover, in the waste water treatment system of one embodiment, the waste water is waste water containing an organic fluorine compound.

  According to the wastewater treatment system of this embodiment, the organic fluorine compound contained in the wastewater is decomposed by microorganisms activated by micro-nano bubbles, and the exhaust gas resulting from the organic fluorine compound generated by this decomposition is introduced into the exhaust gas treatment device. Then, it is treated with washing water containing micro / nano bubbles.

  Moreover, in the wastewater treatment system of one embodiment, the treatment water tank includes a micro / nano bubble generator, charcoal contained in a plurality of mesh bags, and a mesh tube installed between the mesh bags and the mesh bags. .

  According to the wastewater treatment system of this embodiment, the micro / nano bubble generator installed in the treatment water tank generates micro / nano bubbles in the waste water, and the microbes activated by the micro / nano bubbles are stored in a plurality of net bags (for example, Breeds on activated carbon). Then, the organic matter adsorbed by the charcoal (for example, an organic compound such as an organic fluorine compound) can be decomposed in a relatively short time by microorganisms activated.

  In addition, since a mesh pipe is installed between the mesh bag charcoal and the mesh bag charcoal, it is possible to always ensure a circulating water flow through the mesh pipe, so that the water to be treated and charcoal (for example, activated carbon) can be secured. The contact efficiency can be maintained for a long time.

  Further, in the wastewater treatment system of one embodiment, the exhaust gas treatment apparatus has an upper watering part for sprinkling cleaning water containing micro-nano bubbles in the gas, and a micro-nano bubble generator and water is sprinkled by the upper watering part. The washing water is dropped and introduced, and the lower water tank part introduces the washing water containing the micro / nano bubbles generated by the micro / nano bubble generator into the upper watering part.

  According to the wastewater treatment system of this embodiment, in the upper watering part of the exhaust gas treatment device, the cleaning material containing micro-nano bubbles is sprinkled into the exhaust gas generated by the decomposition of the organic matter, so that the organic matter (for example, organic fluorine) as the exhaust gas component Decomposition products of organic compounds such as compounds can be efficiently absorbed in washing water.

  Further, in the lower water tank part of the exhaust gas treatment apparatus, the cleaning water sprinkled in the upper watering part is dropped and introduced into the upper watering part. Wash water can be circulated between the water sprinkling part and the lower water tank part.

  Moreover, in the waste water treatment system of one Embodiment, the said treated water tank has a corrosion-resistant lid | cover which covers an upper part.

  According to the wastewater treatment system of this embodiment, since the corrosion-resistant lid is installed at the upper part of the treated water tank, the generated exhaust gas can be prevented from being diffused into the atmosphere.

  In one embodiment, the waste water treatment system includes an exhaust duct and an exhaust fan for introducing gas into the exhaust gas treatment apparatus from the upper space of the treated water tank.

  In the wastewater treatment system of this embodiment, almost all of the exhaust gas generated in the treated water tank can be reliably introduced into the exhaust gas treatment device by the exhaust duct and the exhaust fan.

  Further, in the wastewater treatment system of one embodiment, treated water containing fluorine ions generated in the exhaust gas treatment device is introduced and a calcium agent is added to the treated water to form calcium fluoride. A calcium agent addition processing unit for processing is provided.

  In the wastewater treatment system of this embodiment, the calcium agent addition treatment unit is introduced with water to be treated containing fluorine ions from the exhaust gas treatment device, and reacts the fluorine ions in the water to be treated with calcium to form calcium fluoride. Can be treated as a precipitate.

  Moreover, the wastewater treatment system of one embodiment includes a chelate resin tower into which water to be treated containing fluorine ions generated in the exhaust gas treatment apparatus is introduced.

  According to the wastewater treatment system of this embodiment, fluorine ions and fluorine compounds after decomposition of the organic fluorine compound contained in the water to be treated can be treated with the chelate resin in the chelate resin tower.

  Moreover, in the waste water treatment system of one embodiment, the charcoal accommodated in the mesh bag of the treatment water tank is at least one of charcoal, activated carbon, and synthetic charcoal.

  According to the wastewater treatment system of this embodiment, according to wastewater treatment conditions, for example, conditions such as the type and concentration of organic matter contained in the wastewater, any one of charcoal, activated carbon, synthetic coal, or a combination thereof is used. It only has to be selected.

  Moreover, in the waste water treatment system of one Embodiment, the charcoal accommodated in the said net bag which the said treated water tank has is activated carbon.

  According to the wastewater treatment system of this embodiment, the charcoal included in the treated water tank is activated carbon having the largest adsorption amount for the organic fluorine compound, and therefore the maximum is obtained by the microorganism activated by the micro / nano bubbles of the organic fluorine compound adsorbed on the activated carbon. It becomes possible to perform decomposition processing with efficiency.

  Moreover, in the waste water treatment system of one Embodiment, the charcoal accommodated in the said net bag which the said treated water tank has is coconut husk activated carbon.

  According to the wastewater treatment system of this embodiment, since the charcoal accommodated in the net bag is coconut shell activated carbon, procurement is easy.

  Moreover, in the waste water treatment system of one embodiment, the treated water tank includes a micro / nano bubble generator and an air diffuser, and generates a water flow in the treated water tank with the micro / nano bubbles generated by the micro / nano bubble generator. A water flow is generated in the treated water tank by bubbles discharged from the air diffuser, and both water flows are merged.

  According to the wastewater treatment system of this embodiment, since the water flow is configured by mixing both the water flow from the macro-nano bubble generator and the water flow caused by the bubble generated from the diffuser, the stirring capacity in the treated water tank is improved. And the removal rate of the organic fluorine compound is increased.

  Moreover, in the wastewater treatment system of one embodiment, the exhaust gas treatment apparatus is provided with a filler in the lower water tank portion, and the filler is a polyvinylidene chloride filler or charcoal contained in a net bag. .

  According to the wastewater treatment system of this embodiment, microorganisms propagate on the polyvinylidene chloride filler installed as a filler in the lower water tank part of the exhaust gas treatment apparatus or the charcoal contained in the net bag, and the exhaust gas treatment The microbial concentration of the decomposition product of the organic fluorine compound can be further promoted by increasing the microbial concentration in the lower water tank of the apparatus.

  In one embodiment of the waste water treatment system, the polyvinylidene chloride filler is a string-type polyvinylidene chloride filler or a ring-type polyvinylidene chloride filler.

  According to the wastewater treatment system of this embodiment, microorganisms are propagated at a high concentration in the string-type polyvinylidene chloride filler or ring-type polyvinylidene chloride filler installed in the lower water tank of the exhaust gas treatment apparatus, and the organic fluorine compound The microbial treatment efficiency of the degradation product can be improved.

  According to the wastewater treatment method of the present invention, in a treated water tank, microorganisms activated by micro-nano bubbles decompose organic substances (for example, organic compounds such as organic fluorine compounds) contained in the wastewater. The exhaust gas generated by the decomposition of the organic matter is introduced into an exhaust gas treatment device and treated with washing water containing micro / nano bubbles. In particular, it has been proved by experiments that cleaning water containing micro-nano bubbles is effective in absorbing components in the exhaust gas, so that the exhaust gas from the treated water tank can be reliably treated.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

(First embodiment)
FIG. 1 schematically shows a first embodiment of the wastewater treatment apparatus of the present invention. The first embodiment includes a treated water tank 1 and an exhaust gas treatment device 15.

  The treated water tank 1 is introduced with wastewater containing an organic fluorine compound to be treated. The treated water tank 1 has a water tank upper part 11 and a water tank lower part 12 forming an upper space part. In the water tank lower part 12 of the treated water tank 1, a plurality of net bags 2 containing activated carbon 3 are installed at the approximate center in the vertical direction and on one side in the horizontal direction. Further, a net-like tube 4 extending in the vertical direction is provided with an appropriate interval between the rows of the net bags 2 adjacent to the left and right. The mesh bag 2 and the mesh tube 4 containing the activated carbon 3 are placed on a porous plate 5 fixed to the water tank lower part 12, and side walls 55 extending upward from the end of the porous plate 5 and the side walls of the water tank lower part 12. It is arranged between. Since the waste water as the water to be treated easily flows through the mesh tube 4, the contact between the activated carbon 3 in the adjacent mesh bag 2 and the waste water as the water to be treated can be improved.

  The perforated plate 5 is simply a plate having a plurality of holes, and is generally made of plastic. However, the material of the perforated plate 5 is not particularly limited as long as it does not corrode with drainage. . The activated carbon 3 is commercially available from coconut shell activated carbon and coal activated carbon, but either may be selected. The mesh tube 4 is devised so that the circulating water flow in the treated water tank 1 is in contact with all the activated carbons 3, and a material made of plastic or vinyl chloride is commercially available.

  Further, in order to activate the microorganisms that propagate in the treated water tank 1, a micro / nano bubble generator 7 and related devices (air suction pipe 9, circulation pump 10) and the like are installed in the treated water tank 1. In other words, the circulating pump 10 supplies the water to be treated in the water tank 1 to the micro / nano bubble generator 7 as a necessary amount as circulating water, and the necessary amount of air is adjusted by the air suction pipe 9 and the valve 8 to make the micro / nano bubble. It is supplied to the generator 7. Thereby, the micro / nano bubble generator 7 generates optimal micro / nano bubbles.

  The micro / nano bubble generator 7 generates a water flow 6 by fine bubbles (micro / nano bubbles) to be discharged. This water flow 6 becomes a circulating water flow in the treated water tank 1 and agitates the tank 1. The micro / nano bubble generator 7 generates a micro / nano bubble flow to increase the contact efficiency between the organic fluorine compound-containing waste water as the water to be treated and the activated carbon 3 on which microorganisms have propagated. However, in the treated water tank 1, if the amount of circulating water is insufficient only with the micro / nano bubble flow, an air diffuser (not shown) is installed in the water tank 1, and the bubbles discharged from the air diffuser rise. In some cases, the amount of circulating water is ensured by the upward flow generated during this process.

  In this 1st Embodiment, when the organic fluorine compound containing waste water as to-be-processed water is introduce | transduced into the treated water tank 1, and it operates by generating a micro nano bubble with the micro nano bubble generator 7, it will be active to activated carbon 3 with progress of time. Germified microorganisms breed. The activated carbon 3 has an ability to adsorb an organic fluorine compound. Since activated microorganisms have propagated on the activated carbon 3 that has adsorbed the organic fluorine compound, the microorganisms activated by the micro-nano bubbles decompose the organic fluorine compound that has been adsorbed by the activated carbon 3.

  In particular, an organic fluorine compound which has been said to be difficult to decompose by microorganisms is first adsorbed on the activated carbon 3 and then decomposed by activated microorganisms. In this way, in the treated water tank 1, organic substances such as organic fluorine compounds are decomposed. That is, in the activated carbon 3 installed in the treated water tank 1, adsorption and decomposition of the organic fluorine compound contained in the waste water are repeated in a short time. Therefore, the activated carbon 3 is always regenerated.

  Further, in the treated water tank 1, treated water in which the organic fluorine compound is decomposed is introduced into the pit 40, and is transferred to a predetermined place as treated water by a pit pump 41 installed in the pit 40.

  On the other hand, in the treated water tank 1, it was confirmed by experiments that a gas containing fluorine (hereinafter referred to as fluorine gas) is generated when the organic fluorine compound contained in the waste water is decomposed. Therefore, the treated water tank lid 39 is installed in the upper tank 11 of the treated water tank 1, and the treated water tank lid 39 covers the upper tank 11. The treated water tank lid 39 is made of a corrosion resistant material.

  Then, the fluorine gas generated in the treated water tank 1 is introduced from the upper part 11 of the water tank covered with the treated water tank cover 39 into the exhaust gas treatment device 15 via the exhaust duct 13 by the exhaust fan 14.

  As shown in FIG. 1, the exhaust gas treatment device 15 includes an upper watering part 16 and a lower water tank part 17. The fluorine gas flowing into the exhaust gas treatment device 15 from the treated water tank 1 is processed by the exhaust gas treatment device 15 and discharged from the uppermost exhaust outlet 42 of the exhaust gas treatment device 15. In this exhaust gas treatment device 15, the washing water in the lower water tank unit 17 is transferred to the upper watering unit 16 via the washing water pipe 19 by the watering pump 26, and sprinkled from the watering nozzle 18 to the plastic filler 20. .

  As shown in FIG. 1, the upper water sprinkling unit 16 of the exhaust gas treatment device 15 includes a porous plate 21 and a plastic filler 20 placed on the porous plate 21. As this plastic filler 20, what was called the brand name Terralet was employ | adopted as an example. A watering nozzle 18 is installed at a predetermined distance above the plastic filler 20 in the upper watering part 16 of the exhaust gas treatment device 15.

On the other hand, a micro / nano bubble generator 23 is installed in the lower water tank portion 17 of the exhaust gas treatment device 15. The micro / nano bubble generator 23 is connected to a circulation pump 27 by piping, and the circulation pump 27 supplies the washing water in the lower water tank unit 17 to the micro / nano bubble generator 23 in a necessary pressure state. By supplying cleaning water to the micro / nano bubble generator 23 at a necessary pressure, micro / nano bubbles are efficiently generated. In addition, the said required pressure means 1.5 kg / cm < ² > or more, for example. The micro / nano bubble generator 23 needs air to generate micro / nano bubbles, but a necessary amount of air is secured from the valve 24 and the air suction pipe 25.

  In this way, in the exhaust gas treatment device 15, since the micro / nano bubble generator 23 is installed in the lower water tank unit 17 to generate the micro / nano bubbles, at the same time, the washing water in the lower water tank unit contains the micro / nano bubbles, The water flow 22 caused by the micro / nano bubbles is caused to stir the washing water in the lower water tank section 17. And the watering pump 26 is sending the washing water containing the micro nano bubble in the lower water tank part 17 to the watering nozzle 18 of the upper watering part 16 via the washing water piping 19. As a result, the cleaning water containing micro-nano bubbles is sprinkled from the sprinkling nozzle 18 to the plastic filler 20, and the fluorine gas component (fluorine) introduced from the exhaust duct 13 is washed and adsorbed. It passes through the plate 21 and falls into the lower water tank part 17.

  Here, it was confirmed by experiments that the washing water containing micro-nano bubbles has a higher removal rate of fluorine in the fluorine gas derived from the organic fluorine compound than the washing water not containing micro-nano bubbles. The reason is considered that the washing water containing the micro-nano bubbles increases the washing effect on the dirt component in the gas.

  Thus, in the exhaust gas treatment device 15, the fluorine in the fluorine gas is dissolved in the washing water, and the washing water becomes a fluorine-containing waste water, which is introduced into the chelate resin tower 56 in the next step, and the fluorine contained in this waste water is treated. It becomes.

  As the micro / nano bubble generator 23, for example, a commercially available one can be adopted, but the manufacturer is not limited, but here, as a specific example, Nano Planet Research Laboratories and Auratec Co., Ltd. The thing was adopted. As other products of the micro / nano bubble generator 23, for example, a micro bubble water production apparatus manufactured by Seika Sangyo Co., Ltd. or a micro bubble water production apparatus produced by Resource Development Co., Ltd. can be adopted. It ’s fine.

  Here, three types of bubbles will be described.

  (i) Normal bubbles (bubbles) rise in the water and eventually disappear on the surface by popping bread.

  (ii) Microbubbles are fine bubbles having a diameter of 10 (μm) to several tens (μm) or less, shrink in water, and eventually disappear (completely dissolve).

  (iii) Nanobubbles are said to be bubbles that are smaller than microbubbles (100 to 200 nm with a diameter of 1 (μm) or less) and can exist in water forever. Micro-nano bubbles can be described as bubbles in which micro-bubbles and nano-bubbles are mixed.

  In the above embodiment, the wastewater introduced into the treated water tank 1 contains an organic fluorine compound as an organic compound, but the wastewater contains another organic compound or organic substance such as a volatile organic compound other than the organic fluorine compound. It may be. Moreover, in the said embodiment, although activated carbon 3 was installed in the treated water tank 1, you may install charcoal other than activated carbon 3 in the treated water tank 1. FIG.

(Second embodiment)
Next, FIG. 2 shows a second embodiment of the waste water treatment apparatus of the present invention. The second embodiment is different from the first embodiment described above only in that a calcium agent addition coagulating sedimentation facility as a calcium agent addition processing unit is provided instead of the chelate resin tower 56 of FIG. Therefore, in the second embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  In the second embodiment, fluorine contained in the cleaning water of the exhaust gas treatment device 15 is treated economically and rationally. That is, in this 2nd Embodiment, the fluorine-containing waste_water | drain from the waste gas processing apparatus 15 is processed with the calcium agent addition coagulation sedimentation equipment 57 as a calcium agent addition process part. That is, in this calcium agent-added coagulating sedimentation facility 57, a calcium agent is added to the fluorine-containing wastewater introduced from the exhaust gas treatment device 15, and the fluorine ions in the fluorine-containing wastewater are reacted with calcium, thereby calcium fluoride. As a precipitate. According to this calcium agent-added coagulating sedimentation facility 57, the running cost is raised as an economic merit for wastewater treatment.

  That is, the chelate resin tower 56 employed in the first embodiment described above requires a resin regeneration operation and has a phenomenon that the resin deteriorates, and is processed by the calcium agent-added coagulating sedimentation facility 57 employed in the second embodiment. Compared to the wastewater treatment system, the running cost is high. However, when the fluorine concentration in the water to be treated is low, a chelate resin tower may be adopted.

(Third embodiment)
Next, FIG. 3 shows a third embodiment of the waste water treatment apparatus of the present invention. In the third embodiment, the point that the chelate resin tower 56 of FIG. 1 is not provided, and the point that the contractor taking-in pipe 60 is provided in the vicinity of the bottom of the lower water tank part 17 of the exhaust gas treatment device 15, Different from one embodiment.

  In the third embodiment, microorganisms are generated and propagated in the plastic filler 20 in the lower water tank part 17 and the water sprinkling part 16 of the exhaust gas treatment device 15, and the organic components in the washing water are decomposed by the microorganisms. This is suitable when there is no need to drain from the lower water tank section 17. That is, in the first embodiment described above, water to be treated containing fluorine is constantly generated in the lower water tank portion 17 of the exhaust gas treatment device 15, whereas in the third embodiment, fluorine is discharged from the lower water tank portion 17. This corresponds to a case where wastewater as treated water containing no water is generated or there is very little wastewater.

  However, in the lower water tank part 17 of the exhaust gas treatment device 15 of the third embodiment, when the function of the washing water is extremely lowered, the valve 43 attached to the supplier take-off pipe 60 is opened and the waste water is supplied to the supplier. The product can be discharged from the take-up pipe 60 and used as a supplier take-up process.

(Fourth embodiment)
Next, FIG. 4 shows a fourth embodiment of the waste water treatment apparatus of the present invention. This 4th Embodiment differs from the above-mentioned 1st Embodiment only in the point provided with the treated water tank 1U instead of the treated water tank 1 of FIG. Therefore, in the fourth embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted, and portions different from those in the first embodiment are mainly described.

  As shown in FIG. 4, the treated water tank 1U provided in the fourth embodiment has a water tank lower part 12U instead of the water tank lower part 12 of FIG. This aquarium lower portion 12U is different from the aquarium lower portion 12 of FIG. 1 in that an aeration tube 30 is installed on the substantially vertical center and one side in the left-right direction. As shown in FIG. 4, the air diffuser 30 is connected to a blower 28 installed outside the water tank by an air pipe 29.

  In this 4th Embodiment, the to-be-processed water in the water tank lower part 12U is stirred by the water flow 6 by the micro nano bubble generated from the micro nano bubble generator 7. FIG. This is the same as in the first embodiment described above.

  By the way, stirring may be insufficient only with the water flow 6 by the micro / nano bubbles of the micro / nano bubble generator 7. In that case, the water tank lower part 12 can be stirred with the air discharged from the air diffuser 30 by operating the blower 28 connected to the air diffuser 30.

  Thereby, in this 4th Embodiment, since the water flow 6 from the macro nano bubble generator 7 and the water flow resulting from the bubble which generate | occur | produces from the diffuser tube 30 are mixed and the water flow is comprised, the stirring in the treated water tank 1 is carried out. The capacity can be improved, and the removal rate of organic fluorine compounds from waste water can be increased.

(Fifth embodiment)
Next, FIG. 5 shows a fifth embodiment of the waste water treatment apparatus of the present invention. The fifth embodiment differs from the first embodiment described above in that it does not have the chelate resin tower 56 of FIG. 1 and in that it has an exhaust gas treatment device 15V instead of the exhaust gas treatment device 15. Therefore, in the fifth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment will be described.

  As shown in FIG. 5, in this fifth embodiment, the lower water tank portion 17V of the exhaust gas treatment device 15V is filled with a string-like polyvinylidene chloride filler 32 and a string-like polyvinylidene chloride filler as fillers. A fixing bracket 31 for fixing the material 32 is provided.

  As an example, when the organic fluorine compound contained in the wastewater generated in the semiconductor factory is microbially decomposed, primary microbial decomposition and secondary treatment of the generated gas are required. The generated gas is expected to be an organic metabolite of an organic fluorine compound.

  Therefore, in the fifth embodiment, in the lower water tank part 17V of the exhaust gas treatment device 15V, in order to more efficiently microbially decompose organic metabolites of the organic fluorine compound, the lower water tank part 17V is used as a filler. A string-type polyvinylidene chloride filler 32 was installed. Microorganisms are cultured and propagated at a high concentration in the string-like polyvinylidene chloride filler 32, so that organic metabolites of the organic fluorine compound can be treated with microorganisms more efficiently. Therefore, according to the fifth embodiment, the microbial treatment of the decomposition product of the organic fluorine compound can be further promoted.

  In the fifth embodiment, the treated water treated in the lower water tank portion 17V of the exhaust gas treatment device 15V is introduced into a treatment facility (not shown) in the next step.

(Sixth embodiment)
Next, FIG. 6 shows a sixth embodiment of the waste water treatment apparatus of the present invention. The sixth embodiment differs from the first embodiment described above in that it does not have the chelate resin tower 56 of FIG. 1 and has an exhaust gas treatment device 15W instead of the exhaust gas treatment device 15. Therefore, in the sixth embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  As shown in FIG. 6, in the sixth embodiment, the lower water tank portion 17W of the exhaust gas treatment device 15W includes a ring-type polyvinylidene chloride filler 33 and a ring-type polyvinylidene chloride filler 33 as fillers in the tank. The net | network 34 for accommodating is installed.

  As an example, when the organic fluorine compound contained in the wastewater generated in the semiconductor factory is microbially decomposed, primary microbial decomposition and secondary treatment of the generated gas are required. The generated gas is expected to be an organic metabolite of an organic fluorine compound.

  Therefore, in the sixth embodiment, in the lower water tank portion 17W of the exhaust gas treatment device 15W, in order to more efficiently microbially decompose organic metabolites of the organic fluorine compound, the lower water tank 17V is used as a filler. A ring-type polyvinylidene chloride filler 33 was installed. In this ring-type polyvinylidene chloride filler 33, microorganisms are cultured and propagated at a high concentration, and the organic metabolite of the organic fluorine compound is treated with microorganisms more efficiently. Therefore, according to the sixth embodiment, the microbial treatment of the decomposition product of the organic fluorine compound can be further promoted.

  In the sixth embodiment, the treated water treated in the lower water tank portion 17W of the exhaust gas treatment device 15W is introduced into a treatment facility (not shown) in the next step.

(Seventh embodiment)
Next, FIG. 7 shows a seventh embodiment of the waste water treatment apparatus of the present invention. The seventh embodiment differs from the first embodiment described above in that it does not have the chelate resin tower 56 of FIG. 1 and in that it has an exhaust gas treatment device 15X instead of the exhaust gas treatment device 15. Therefore, in the seventh embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and portions different from those in the first embodiment are described.

  As shown in FIG. 7, in the seventh embodiment, the lower water tank section 17X of the exhaust gas treatment device 15X has a plurality of net bags 35 each containing activated carbon 36 as a filler in the tank. It is installed on one side of the direction. In addition, a net-like tube 38 extending in the vertical direction is provided with an appropriate space between the rows of the net bags 35 adjacent to the left and right. The mesh bag 35 and the mesh tube 38 containing the activated carbon 36 are placed on a porous plate 37A fixed to the lower water tank portion 17X, and a porous plate 3B serving as a side plate extending upward from the end of the porous plate 37A. It arrange | positions between the side walls of the lower water tank part 17X.

  In this lower water tank portion 17X, the cleaning water to be treated easily flows in the mesh tube 38, so that the contact between the activated carbon 36 in the adjacent mesh bag 35 and the cleaning water to be treated is improved. it can.

  As an example, when the organic fluorine compound contained in the wastewater generated in the semiconductor factory is microbially decomposed, primary microbial decomposition and secondary treatment of the generated gas are required. The generated gas is expected to be an organic metabolite of an organic fluorine compound.

  Therefore, in the seventh embodiment, in the lower water tank portion 17X of the exhaust gas treatment device 15X, in order to more efficiently microbially decompose the organic metabolite of the organic fluorine compound, Activated carbon 36 and mesh tube 38 contained in mesh bag 35 were installed. Microorganisms are cultured and propagated at a high concentration in the activated carbon 36 contained in the net bag 35 as the filler, and the organic metabolite of the organic fluorine compound is more efficiently subjected to the microorganism treatment. Therefore, according to the seventh embodiment, the microbial treatment of the decomposition product of the organic fluorine compound can be further promoted.

  In the seventh embodiment, the treated water treated in the lower water tank section 17X of the exhaust gas treatment device 15X is introduced into a treatment facility (not shown) in the next process.

(Eighth embodiment)
Next, FIG. 8 shows an eighth embodiment of the waste water treatment apparatus of the present invention. The eighth embodiment differs from the first embodiment only in that an exhaust communication pipe 66 that connects the exhaust outlet 42 of the exhaust gas treatment device 15 to the water tank upper part 11 that is the upper space part of the treated water tank 1 is provided. . Therefore, in the eighth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted, and parts different from those in the first embodiment will be described.

  In the eighth embodiment, the exhaust gas from the exhaust outlet 42 of the exhaust gas treatment device 15 is again tackled into the upper part 11 of the water tank through the exhaust communication pipe 66. Therefore, the exhaust gas is repeatedly processed by the exhaust gas processing device 15 via the exhaust duct 13 and the exhaust fan 4. Therefore, the exhaust gas treatment performance can be improved. Accordingly, the eighth embodiment is effective when the exhaust gas treatment for the exhaust gas component derived from the organic fluorine compound is insufficient by the one-time treatment in the exhaust gas treatment device 15. Further, the waste water treatment system of the eighth embodiment is suitable for a case where the amount of generated exhaust gas is relatively small because the exhaust gas generated is a closed system.

(Experimental example)
An experimental device corresponding to the wastewater treatment system of FIG. 1 was produced. The capacity of the treatment water tank 1 in this experimental apparatus was about 4 m ^3, and the capacity of the exhaust gas treatment apparatus 15 was about 2 m ³ . In this experimental apparatus, industrial water was introduced into the treated water tank 1 for one month and a test operation was performed. After this trial run, the concentration of PFOS (perfluorooctane sulfonic acid) in the waste water at the waste water inlet to the treated water tank 1 and the PFOS (perfluoro octane sulfone powder) in the waste water at the waste water outlet of the lower water tank 17 of the exhaust gas treatment device 15 When the concentration was measured and the removal rate of PFOS was measured, it was 85%.

It is a figure which shows typically 1st Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 2nd Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 3rd Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 4th Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 5th Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 6th Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 7th Embodiment of the waste water treatment equipment of this invention. It is a figure which shows typically 8th Embodiment of the waste water treatment equipment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Treated water tank 2 Net bag 3 Activated carbon 4 Mesh pipe 5 Porous plate 6 Water flow 7 Micro nano bubble generator 8 Valve 9 Air suction pipe 10 Circulation pump 11 Water tank upper part 12 Water tank lower part 13 Exhaust duct 14 Exhaust fan 15, 15V, 15W, 15X Exhaust gas Treatment device 16 Upper water sprinkling part 17, 17V, 17W, 17X Lower water tank part 18 Sprinkling nozzle 19 Washing water piping 20 Plastic filler 21 Porous plate 22 Water flow 23 Micro-nano bubble generator 24 Valve 25 Air suction pipe 26 Sprinkling pump 27 Circulation pump 28 Blower 29 Air piping 30 Aeration pipe 31 Fixing fitting 32 String type polyvinylidene chloride filler 33 Ring type polyvinylidene chloride filler 34 Net 35 Net bag 36 Activated carbon 37 Perforated plate 38 Net pipe 39 Treatment water tank lid 40 Pit 41 Pit pump 4 2 Exhaust outlet 43 Valve 56 Chelate resin tower 57 Calcium agent addition coagulation sedimentation equipment 60 Pipe for taking out of contractor 66 Exhaust communication pipe

Claims (19)

Introducing the waste water into the treated water tank, decomposing the organic matter contained in the waste water with microorganisms activated by micro-nano bubbles, and gasifying in the treated water tank;
A wastewater treatment method comprising: introducing the gas generated by the gasification into an exhaust gas treatment apparatus and treating the gas with cleaning water containing micro-nano bubbles. The waste water treatment method according to claim 1,
A wastewater treatment method, wherein the wastewater is wastewater containing an organic fluorine compound. The waste water treatment method according to claim 2,
Adsorbing the organic fluorine compound contained in the waste water with activated carbon;
And a step of microbial decomposition of the organic fluorine compound by activating microorganisms propagated on the activated carbon with micro-nano bubbles. The waste water treatment method according to claim 2,
A wastewater treatment method comprising: a step of discharging the waste liquid to a contractor's pipe when the water to be treated generated in the exhaust gas treatment apparatus becomes waste liquid. The waste water treatment method according to claim 2,
The organic fluorine compound contained in the waste water is
A wastewater treatment method characterized by being perfluorooctasulfonic acid, perfluorooctanoic acid, or a mixture of perfluorooctasulfonic acid and perfluorooctanoic acid. A treated water tank that decomposes and gasifies organic matter contained in the waste water by treating the waste water with microorganisms activated with micro-nano bubbles while the waste water is introduced, and
A wastewater treatment system comprising: an exhaust gas treatment apparatus that introduces gas generated by gasification in the treatment water tank and treats the gas with washing water containing micro-nano bubbles. The wastewater treatment system according to claim 6,
The waste water treatment system according to claim 1, wherein the waste water is a waste water containing an organic fluorine compound. The wastewater treatment system according to claim 6,
The treated water tank is
A micro-nano bubble generator,
Charcoal contained in a plurality of mesh bags;
A drainage treatment system comprising the mesh bag and a mesh tube installed between the mesh bags. The wastewater treatment system according to claim 6,
The exhaust gas treatment apparatus is
An upper watering part for spraying cleaning water containing micro-nano bubbles in the gas;
A washing tank sprayed by the upper watering unit and having a micro / nano bubble generator is dropped and introduced, and a washing tank containing micro / nano bubbles generated by the micro / nano bubble generator is introduced into the upper watering part. A wastewater treatment system comprising: The wastewater treatment system according to claim 6,
The waste water treatment system, wherein the treatment water tank has a corrosion-resistant lid that covers an upper portion. The wastewater treatment system according to claim 6,
A wastewater treatment system comprising an exhaust duct and an exhaust fan for introducing gas into the exhaust gas treatment apparatus from an upper space portion of the treatment water tank. The waste water treatment system according to claim 7,
A treatment agent containing fluorine ions generated in the exhaust gas treatment apparatus is introduced, and a calcium agent is added to the treatment water to form a calcium fluoride to form a calcium fluoride treatment unit. A featured wastewater treatment system. The waste water treatment system according to claim 7,
A wastewater treatment system comprising a chelate resin tower into which water to be treated containing fluorine ions generated in the exhaust gas treatment apparatus is introduced. The waste water treatment system according to claim 8,
The wastewater treatment system, wherein the charcoal contained in the mesh bag of the treated water tank is at least one of charcoal, activated carbon, and synthetic charcoal. The waste water treatment system according to claim 8,
The wastewater treatment system, wherein the charcoal contained in the mesh bag of the treatment water tank is activated carbon. The waste water treatment system according to claim 8,
The wastewater treatment system, wherein the charcoal contained in the mesh bag of the treatment water tank is coconut shell activated carbon. The wastewater treatment system according to claim 6,
The treated water tank is
Having a micro-nano bubble generator and a diffuser,
Drainage characterized in that the micro / nano bubble generated by the micro / nano bubble generator generates a water flow in the treatment water tank and the bubble discharged from the diffuser tube generates a water flow in the treatment water tank and combines the two water flows. Processing system. The wastewater treatment system according to claim 9,
The exhaust gas treatment apparatus is
Filler is installed in the lower tank part,
The waste water treatment system, wherein the filler is a polyvinylidene chloride filler or charcoal contained in a net bag. The wastewater treatment system according to claim 18,
The waste water treatment system, wherein the polyvinylidene chloride filler is a string-type polyvinylidene chloride filler or a ring-type polyvinylidene chloride filler.

Images