JP4683664B2 - Color filter manufacturing method, panel manufacturing apparatus and method, liquid crystal display panel manufacturing method, and apparatus including liquid crystal display panel - Google Patents

Description

  The present invention relates to a technique for forming or drawing a predetermined pattern using a liquid discharge head (for example, an ink jet head).

  In general, a liquid crystal display device is mounted on a personal computer, a word processor, a pachinko game machine, an automobile navigation system, a small television, and the like, and the demand is increasing in recent years. However, liquid crystal display devices are expensive and demands for cost reduction of liquid crystal display devices are increasing year by year. In particular, among the components of the liquid crystal display device, the cost ratio of the color filter is high, and the demand for cost reduction of the color filter is increasing.

  The color filter used in the liquid crystal display device is configured by arranging colored filter elements such as red (R), green (G), and blue (B) on a transparent substrate, and around each of these filter elements. Is provided with a black matrix (BM) for blocking light in order to increase the display contrast of the liquid crystal display device. As for BM, there is a resin BM using a black resin in recent years from one using a Cr metal thin film.

  On the colored layer including the filter element, an overcoat layer (protective layer) having a thickness of 0.5 to 2 μm made of an acrylic resin or an epoxy resin is formed to improve smoothness. A transparent electrode (ITO) film is formed on the substrate.

  Various methods have been conventionally known for coloring filter elements of color filters, and these include dyeing methods, pigment dispersion methods, electrodeposition methods, and printing methods.

  The dyeing method is a process in which a water-soluble polymer material, which is a dyeing material, is applied onto a glass substrate, patterned into a predetermined shape using photolithography, and then immersed in a dyeing solution for coloring. This is a method of repeatedly obtaining a color filter for each color of B.

  In the pigment dispersion method, a layer in which a colorant pigment is dispersed in a photosensitive resin material is formed on a transparent substrate by a spin coater or the like, and the patterning process is performed once for each of R, G, and B colors. In this method, R, G, and B color filters are obtained by repeating a total of three times.

  The electrodeposition method is a method in which a transparent electrode is patterned on a transparent substrate and immersed in an electrodeposition coating solution such as a pigment, resin, electrolyte, etc. and colored for each color of R, G, and B to obtain a color filter. is there.

  The printing method is a method of obtaining a color filter by repeating a process of coloring a thermosetting resin in which a pigment-based color material is dispersed by offset printing for each of R, G, and B colors.

  The common point in the above color filter manufacturing method is that it is necessary to repeat the same process in order to color the three colors of R, G, and B, which is costly. In addition, there is a problem that the manufacturing yield decreases due to an increase in the number of processes.

  In order to compensate for these disadvantages, Japanese Patent Laid-Open No. 59-75205 (Patent Document 1), Japanese Patent Laid-Open No. 63-235901 (Patent Document 2), Japanese Patent Laid-Open No. 1-2217320 (Patent Document 3), etc. A method for manufacturing a color filter using an inkjet method is disclosed. The ink jet system is a method of forming a filter element by spraying a coloring material containing R, G, and B color materials onto a transparent substrate using an ink jet and coloring and drying and fixing. Since the three colors R, G and B necessary for the color filter can be formed simultaneously, the manufacturing process can be simplified and the cost can be reduced. Further, since the number of steps is small compared to the dyeing method, the pigment dispersion method, the electrodeposition method, the printing method, etc., the production yield can be improved.

  By the way, in a color filter used in a general liquid crystal display device or the like, the shape of a black matrix opening (that is, a pixel) for partitioning each pixel is a rectangle, whereas the shape of an ink droplet ejected from an inkjet head Is substantially circular, it is difficult to eject a necessary amount of ink in one pixel at a time and to spread the ink uniformly over the entire opening of the black matrix. For this reason, a plurality of ink droplets are ejected and colored with respect to one pixel on the substrate while the inkjet head is main-scanned relative to the substrate.

  In addition, it is possible to manufacture a high-quality color filter in which unevenness is reduced as the variation in the amount of ink filled in each pixel is smaller.

  However, the amount of ink ejected from the inkjet head is different between the nozzles constituting the head or the ejection-related structure, drive mechanism, and drive characteristics, even if ejection drive is performed under the same ejection drive conditions. The amount may vary. In this case, even if the same number of ink is ejected to each pixel, the ink filling amount of each pixel varies due to different nozzles used, and this variation in the ink filling amount is caused by unevenness between pixels. Thus, the quality and yield of the color filter are reduced.

  In order to solve this density unevenness problem, the following two methods (bit correction and shading correction) have been conventionally employed. Here, the case of an inkjet head that ejects ink by thermal energy will be described.

  First, as described in Japanese Patent Laid-Open No. 9-281324 (Patent Document 4), the difference in ink discharge amount between each nozzle of the inkjet head IJH having a plurality of ink discharge nozzles shown in FIGS. A correction method (hereinafter referred to as bit correction) will be described.

  First, as shown in FIG. 11, for example, nozzles 1, 2, and 3, which are three nozzles of the inkjet head IJH, are ejected onto a predetermined substrate, and the ink ejected from each nozzle is ejected onto the substrate P. The size of the ink dot to be formed is measured, and the amount of ink discharged from each nozzle is measured. At this time, the heat pulse applied to the heater of each nozzle is set to a constant width, and the width of the preheat pulse is changed. As a result, a curve indicating the relationship between the preheat pulse width and the ink discharge amount as shown in FIG. 12 is obtained. Here, for example, if it is desired to unify all the ink discharge amounts from the respective nozzles to 20 ng, from the curve shown in FIG. 12, the width of the preheat pulse applied to the nozzle 1 is 1.0 μs, the nozzle 2 is 0.5 μs, and the nozzle 3 Then, it can be seen that it is 0.75 μs. Therefore, by adding preheat pulses of these widths to the heaters of the nozzles, the ink discharge amounts from the nozzles can be all set to 20 ng as shown in FIG. Correcting the ink discharge amount from each nozzle in this way is called bit correction.

Next, FIG. 14 and FIG. 15 are diagrams showing a method (hereinafter referred to as shading correction) for correcting density unevenness in the scanning direction of the inkjet head by adjusting the ink discharge density from each ink discharge nozzle. . For example, as shown in FIG. 14, it is assumed that the ink discharge amount of the nozzle 1 is −10% and the ink discharge amount of the nozzle 2 is + 20% when the ink discharge amount of the nozzle 3 of the inkjet head is used as a reference. At this time, as shown in FIG. 15, while scanning the inkjet head IJH, a heat pulse is applied to the heater of the nozzle 1 once every nine times of the reference clock, and the heater of the nozzle 2 is applied to the reference clock 12 times. A heat pulse is applied once, and a heat pulse is applied to the heater of the nozzle 3 once every 10 reference clocks. By doing this, the number of ink ejections in the scanning direction can be changed for each nozzle, and the ink density in the scanning direction in the pixels of the color filter can be made constant as shown in FIG. Unevenness can be prevented. Correcting the ink discharge density in the scanning direction in this way is called shading correction.
JP 59-75205 A JP-A 63-235901 JP-A-1-217320 JP-A-9-281324 JP-A-8-179110.

  The above two methods are known as methods for reducing density unevenness. Conventionally, for example, colors in which each color as described in JP-A-8-179110 (Patent Document 5) is colored in a stripe shape. In the filter, the discharge pitch for one pixel row is adjusted by adjusting the discharge pitch for one pixel row as a unit by the shading correction method which is the latter of the above two methods. In this striped color filter, a color mixture prevention wall is provided between the color pixel columns so that the predetermined color ink discharged to one pixel column does not flow into the adjacent pixel columns of different colors.

  However, a color mixing prevention wall is provided between the color pixel columns as described above, and the color filter is not provided in a stripe shape, and no color mixing prevention wall is provided between the pixel columns, so that the partition between the pixels is BM (black matrix). In the case of a color filter having only one pixel row, if ink is ejected in a line with one pixel column as a unit, the ink ejected on the water-repellent BM flows into the adjacent pixel region. It becomes very difficult to manage the discharge amount in the pixel.

  That is, it is difficult to control the amount of ink applied to the pixel to a predetermined amount by a method of adjusting the discharge interval such as the shading correction.

  In addition, the pixel area tends to be reduced due to the high definition of the color filter pixels, and it becomes increasingly difficult to control the ink filling amount in the pixels.

  For this reason, of the two methods for reducing density unevenness, a new approach to improving the unevenness of color filters by the former method (bit correction) for equalizing the discharge amount is an important issue.

In other words, in the embodiment in which the ink filling amount is adjusted by using one pixel as one unit instead of one pixel row as one unit, the ink filling amount in each pixel is made uniform by using the bit correction. Since it is considered effective to perform the above, it is desired that the ink filling amount can be made uniform by this bit correction with a simple configuration as much as possible.
As a first problem for manufacturing such a high-quality color filter, there is a uniform liquid filling amount in a predetermined region (pixel) by bit correction.

  By the way, the amount of ink ejected from one nozzle is affected by whether or not ink is ejected from adjacent nozzles at the same time, depending on whether or not the adjacent nozzles are ejected at the same time. Discharge amount is different. In this specification, this phenomenon is called adjacent nozzle crosstalk. In order to make the ink discharge amount uniform and eliminate the unevenness between the pixels, it is preferable to consider the discharge fluctuation due to the adjacent nozzle crosstalk.

  FIG. 35 shows an example of the measurement result of the adjacent nozzle crosstalk, which was the motivation for the present invention.

  In FIG. 35, control is performed such that the ejection timing is advanced or delayed, or ink is ejected or not ejected from the nozzles, with respect to a plurality of nozzles (80ch in this case) of the inkjet head. It shows how the quantity varies. In particular, the influence of the discharge amount variation due to the adjacent nozzle crosstalk described above is shown. Specifically, in FIG. 35, focusing on the discharge amount of the Nth nozzle (ch12) among all the nozzles Z (80ch), the discharge amount of this target nozzle is measured. In this discharge amount measurement, the voltage, current, and pulse waveform for driving the target nozzle (ch12) are kept constant in all measurements. In this way, FIG. 35 shows the discharge timing of the peripheral nozzles changed with respect to the discharge of the nozzle of interest (ch12).

  In FIG. 35, (a) shows the ejection amount of ch12 when ink is ejected simultaneously from all nozzles (80ch), and this is represented by 100 on the right bar graph.

  (B) is the discharge amount of ch12 when ink is discharged from half of the nozzles (40ch) selected from all the nozzles (80ch). In this nozzle selection, ink is simultaneously ejected from ch11 and ch13 which are adjacent nozzles of ch12. In this case, it becomes 1% smaller than the discharge amount of (a).

  (C) is the ejection amount of the ch12 nozzle when ink is ejected from 40 ch of the 80 ch selected differently from (b). In this nozzle selection, ink is not ejected from ch11 and ch13 which are adjacent nozzles of ch12. In this case, it becomes 5% smaller than the discharge amount of (a).

  (D) is the discharge amount of the ch12 nozzle when discharging the 40 ch of the same selection as in (c) out of 80 ch. In this nozzle selection, ink is not ejected from ch11 and ch13 which are adjacent nozzles of ch12. Here, the remaining nozzles (39ch) other than the target nozzle (ch12) eject ink with a delay of 10 μsec from the target nozzle (ch12). In this case, it is 7% smaller than the discharge amount of (a) and 2% smaller than the discharge amount of (c).

  (E) is an ejection amount when ink is ejected solely from ch 12 out of 80 ch. In this nozzle selection, it becomes 12% smaller than the discharge amount of (a). In other words, in the case of 80 ch simultaneous discharge in (a), the discharge amount is increased by 12% compared to the single ch discharge in (e).

  (F) is the ejection amount of the ch12 nozzle when ink is ejected from 40 ch of 80 ch selected differently from (d). In this nozzle selection, ink is ejected from ch11 and ch13 which are adjacent nozzles of ch12. Here, the remaining nozzles (39ch) other than the target nozzle (ch12) discharge with a delay of 10 μsec from the target nozzle (ch12). In this case, it becomes 7% smaller than the discharge amount of (e).

  In (g), ink is ejected from all nozzles (80 ch), but all the nozzles (the remaining 79 ch) other than the target nozzle (ch12) eject ink with a delay of 10 μsec from the target nozzle (ch12). In this case, it becomes 9% smaller than the discharge amount of (e).

  The occurrence mechanism of the above phenomenon can be explained as inter-nozzle crosstalk due to the propagation of ink pressure waves from the ink liquid chamber 114 to the respective liquid passages 110. That is, in the case of 80 ch simultaneous discharge (a), as compared with the case of single discharge (e) by the target nozzle, the pressure wave of the discharge from the nozzles other than the target nozzle (ch12) (all 79 ch) is the target nozzle (ch12). (A) increases the discharge.

  Since (b) and (c) are 40 ch simultaneous discharge, the discharge amount does not increase as much as 80 ch simultaneous discharge. Further, in (b), since the ink is ejected from the adjacent nozzle as compared with (c), the ejection amount is increased by the difference. That is, whether or not ink is simultaneously ejected from adjacent nozzles has the greatest influence on the ejection of the target nozzle (ch12).

  Next, comparing (a), (e), and (g), it can be seen that the ejection amount of the target nozzle (ch12) changes when the ejection timing of the nozzles other than the target nozzle (ch12) is changed. Compared to (e), when other nozzles are ejected simultaneously with the target nozzle as shown in (a), the discharge amount of the target nozzle increases. However, compared to (e), other nozzles are moved to ch12 as shown in (g). If the discharge is performed with a slight delay, the discharge amount of the nozzle of interest decreases. This is because the interference phase of the pressure waves from the other nozzles is reversed and the discharge pressure of the nozzle of interest is canceled out.

  Similarly, comparing (b), (e), and (f), it can be seen that the discharge amount of the target nozzle changes when the discharge timing of other nozzles other than the target nozzle is changed.

  In addition, when (b), (e), and (f) are compared, the number of remaining nozzles other than the target nozzle (ch12) is smaller than when (a), (e), and (g) are compared. It can be said that the change in the discharge amount of the target nozzle (ch12) with respect to the difference in discharge timing of the remaining nozzles is small by a small amount.

  Further, the variation in the discharge amount of the target nozzle (ch12) with respect to the difference in the discharge timing of the nozzles other than the target nozzle has the largest influence of the adjacent nozzle adjacent to the target nozzle. However, when (c) and (d) are compared, 3 It can be said that even a nozzle or a nozzle further away has an influence.

As described above, the presence / absence of ejection from other nozzles other than the nozzle of interest and the ejection timing affect the ink ejection amount of the nozzle of interest, but this influence has not been considered conventionally. In other words, when there is a change in the number of used nozzles, a combination of used nozzles, or a change in the discharge timing for each nozzle, the discharge amount for each nozzle changes. Since density unevenness may occur, it is desirable to consider the discharge amount variation due to the adjacent nozzle crosstalk when manufacturing a high-quality color filter.
In addition, even if the discharge amount of each nozzle is made uniform by bit correction before pattern formation or pattern drawing, the discharge amount fluctuation due to the adjacent nozzle crosstalk may occur. It is desirable to do.
As described above, as a second problem for manufacturing a further high-quality color filter, the liquid filling amount in a predetermined region (pixel) is made uniform in consideration of the discharge amount variation due to the adjacent nozzle crosstalk. Is mentioned.
Up to this point, the manufacturing object has been described as a color filter. However, the first and second problems do not occur only in the manufacture of the color filter, and the liquid application amount to a predetermined region on the substrate is a predetermined amount. If it is necessary to control to the same, the same occurs. For example, a similar problem occurs when an EL display element is manufactured by applying a predetermined amount of EL (electroluminescence) material liquid to a predetermined region on a substrate by a liquid discharge head (inkjet head). Further, an electron obtained by applying a predetermined amount of a conductive thin film material liquid (a liquid containing a metal element) to a predetermined region on a substrate by a liquid discharge head (inkjet head) and forming a conductive thin film on the substrate. Similar problems occur when manufacturing a light emitting element or a display panel including a plurality of such elements.

  Accordingly, the present invention has been made in view of the above-described problems, and an object thereof is to make it possible to equalize the liquid discharge amount from each nozzle of a liquid discharge head (for example, an ink jet head) with a simple configuration. It is to be.

  Another object of the present invention is to make it possible to vary the liquid discharge amount independently for each nozzle with a simple configuration.

  Another object of the present invention is to make it possible to easily control the amount of liquid applied to a predetermined area (for example, pixel) on the substrate to a predetermined amount, and to uniformize the amount of liquid applied to the predetermined area (pixel). It is to be. Thus, the liquid filling amount for each predetermined region (pixel) is made uniform, a display device panel such as a high-quality color filter or EL display element in which each pixel satisfies the required characteristics, an electron-emitting device, A display panel including an electron-emitting device is manufactured.

The present invention for achieving the above-described object is a panel manufacturing method for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid. Determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in correspondence with the size of the substrate and the resolution of pixels formed by discharging liquid onto the substrate; Correcting the liquid discharge amount of each nozzle so that the discharge amount of the liquid discharged from each nozzle is constant using a discharge amount varying means capable of independently changing the liquid discharge amount of each nozzle; and A step of discharging liquid from the liquid discharge head according to the corrected liquid discharge amount, and compensating for the change in the liquid discharge amount caused by the combination of nozzles and the number of nozzles determined in the determination step. As to, as well as correcting the liquid discharge amount of each nozzle with said variable discharge means, in the step of discharging the liquid onto the substrate from said liquid discharge head, the liquid discharge operation to one of said substrates Combination of nozzles used, number of nozzles used for liquid discharge operation to one substrate, liquid discharge timing from nozzles, relative movement direction of the liquid discharge head and the substrate, and the liquid If it is determined to change the relative movement speed between the discharge head and the substrate there is a change in at least one, so as to correct the change of the liquid discharge amount caused by the change, using the variable discharge means The liquid discharge amount of each nozzle is corrected.

The present invention also provides a panel manufacturing method for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid, the size of the substrate being A determination step for determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in accordance with the resolution of pixels formed by discharging liquid onto the substrate, and discharging from each nozzle A step of measuring a liquid landing position, a step of determining a liquid discharge timing of each nozzle based on the measurement result of the landing position, and a discharge amount variable means capable of independently changing the liquid discharge amount of each nozzle And correcting the liquid discharge amount of each nozzle so that the discharge amount of the liquid discharged from each nozzle is constant according to the determined discharge timing, and the corrected liquid discharge amount Therefore, the liquid discharge head is used to discharge the liquid, and the discharge amount variable means is used so as to correct the change in the liquid discharge amount caused by the combination of the nozzle determined in the determination step and the number of nozzles. In the step of correcting the liquid discharge amount of each nozzle and discharging the liquid from the liquid discharge head onto the substrate, a combination of nozzles used for the liquid discharge operation to one of the substrates The number of nozzles used for the liquid discharge operation to the substrate, the liquid discharge timing from the nozzle determined in the step of determining the liquid discharge timing of each nozzle, the relative movement direction of the liquid discharge head and the substrate and, if there is a change in at least one to determine the change in the relative movement speed between the liquid ejection head and the substrate, to the change So as to correct the change of the liquid discharge amount caused Te, and correcting the liquid discharge amount of each nozzle with said variable discharge means.

The present invention also relates to a color filter manufacturing method for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink, the size of the substrate and the substrate. In accordance with the resolution of the pixels formed by ejecting ink , a determination step for determining the combination of nozzles and the number of nozzles used for ejecting ink onto a single substrate, and the ink ejection amount of each nozzle independently The step of correcting the ink discharge amount of each nozzle so that the discharge amount of ink discharged from each nozzle is constant using the variable discharge amount varying means, and the inkjet according to the corrected ink discharge amount and a step of discharging the ink from the head, the ink ejection caused by the number of combinations and nozzles of the nozzle determined in the determination step So as to correct the change in the amount, as well as correcting the ink discharge amount of each nozzle with said variable discharge means, in the step of discharging the ink onto the substrate from the inkjet head, the one to the substrate Combination of nozzles used for ink ejection operation, number of nozzles used for ink ejection operation to one substrate, ejection timing of ink from nozzles, relative movement direction of the inkjet head and the substrate, and , if there is a change in at least one to determine the change in the relative movement speed of the substrate and the ink jet head, so as to correct a change in ink discharge amount caused by the change, the variable discharge means And correcting the ink discharge amount of each nozzle.

The present invention also relates to a color filter manufacturing method for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink, the size of the substrate and the substrate. in correspondence with the resolution of the pixels formed by ejecting ink, a determination step of determining a number of combinations and nozzles of the nozzle used in the ink ejection to one of the substrates, the landing of ink ejected from the nozzles Using a step of measuring the position, a step of determining the ink discharge timing of each nozzle based on the measurement result of the landing position, and a discharge amount variable means capable of independently changing the ink discharge amount of each nozzle, Correcting the ink discharge amount of each nozzle so that the discharge amount of ink discharged from each nozzle is constant according to the determined discharge timing The and a step of discharging the ink from the corrected the ink-jet head according to ink discharge amount, so as to correct the change in the ink discharge amount caused by the number of combinations and nozzles of the nozzle determined in the determining step, In the step of correcting the ink discharge amount of each nozzle using the discharge amount varying means and discharging the ink from the inkjet head onto the substrate, the nozzle used for the ink discharge operation to one substrate is used. In combination, the number of nozzles used for the ink discharge operation to one substrate, the ink discharge timing determined from the step of determining the ink discharge timing of each nozzle, the inkjet head and the substrate relative movement direction between, and the relative movement between the substrate and the ink jet head If there is a change in at least one to determine the change of speeds, so as to correct the change in the ink discharge amount caused by the change, correcting the ink discharge amount of each nozzle with said variable discharge means It is characterized by doing.

  The method for manufacturing a liquid crystal display panel according to the present invention includes a step of preparing a color filter manufactured by the above method and a step of encapsulating a liquid crystal compound between the color filter and a counter substrate. Features.

  According to the present invention, there is provided a method of manufacturing a device including a liquid crystal display panel, the step of preparing a liquid crystal display panel manufactured by the above method, and a signal for supplying a signal to the liquid crystal display panel. And a step of connecting to the supply means.

The present invention also provides a panel manufacturing apparatus for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid, the size of the substrate being Determining means for determining a combination of nozzles and the number of nozzles to be used for discharging liquid onto a single substrate in accordance with the resolution of pixels formed by discharging liquid onto the substrate; and the amount of liquid discharged from each nozzle A discharge amount varying means capable of independently changing the discharge amount variable means for correcting the liquid discharge amount of each nozzle so that the discharge amount of the liquid discharged from each nozzle is constant, so as to correct the change of the liquid discharge amount caused by the number of combinations and nozzles of the nozzle determined by the determining means, together with the variable discharge means for correcting the liquid discharge amount of each nozzle, wherein When the from the body discharge head for discharging liquid onto the substrate, the combination of nozzles used in the liquid ejection operation to one of the substrates, the number of nozzles used in the liquid ejection operation to one of said substrate, the ejection timing of liquid from the nozzle, the relative moving direction of the liquid ejection head and the substrate, and, to determine the change in the relative movement speed of the substrate and the liquid ejection head when there is a change in at least one , so as to correct the change of the liquid discharge amount caused by the change, the variable discharge means and corrects a liquid discharge amount of each nozzle.

The present invention also provides a panel manufacturing apparatus for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid, the size of the substrate being Determining means for determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in accordance with the resolution of pixels formed by discharging liquid onto the substrate, and discharging from each nozzle Using the means for determining the liquid discharge timing of each nozzle based on the measurement result of the liquid landing position and the discharge amount varying means capable of independently changing the liquid discharge amount of each nozzle, the determined discharge timing And a discharge amount varying means for correcting the liquid discharge amount of each nozzle so that the discharge amount of the liquid discharged from each nozzle is constant according to the set of nozzles determined by the determination means As to correct the change of the liquid discharge amount caused by combined and the number of nozzles, together with the variable discharge means for correcting the liquid discharge amount of each nozzle, when discharging liquid onto the substrate from the liquid ejection head And a means for determining a combination of nozzles used for a liquid discharge operation onto one substrate, a number of nozzles used for a liquid discharge operation onto one substrate, and a liquid discharge timing of each nozzle. changes in the ejection timing of liquid from the nozzle to be determined, the relative moving direction of the liquid ejection head and the substrate, and, in at least one to determine the change in the relative movement speed of the substrate and the liquid discharge head If there were, so as to correct the change of the liquid discharge amount caused by the change, the variable discharge means corrects the liquid ejection amount of each nozzle And wherein the Rukoto.

The present invention also provides a color filter manufacturing apparatus for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink, the size of the substrate and the substrate. In accordance with the resolution of the pixels formed by ejecting ink , a determining means for determining the combination of nozzles and the number of nozzles used for ejecting ink onto one substrate, and the ink ejection amount of each nozzle independently The changeable discharge amount changing means, the discharge amount changing means for correcting the ink discharge amount of each nozzle so that the discharge amount of ink discharged from each nozzle is constant, and the determination so as to correct the change in the ink discharge amount caused by the number of combinations and nozzles of the nozzle determined in means, said variable discharge means ink of each nozzle Is corrected to output, in case of discharging the ink onto the substrate from the inkjet head, the combination of nozzles used in the ink discharge operation for one of the substrate, the ink ejection operation to one of said substrates the number of nozzles used, the ejection timing of the ink from the nozzles, the ink jet head and the relative movement direction of the substrate, and, in at least one to determine the change in the relative movement speed of the substrate and the ink jet head If there is a change, so as to correct the change in the ink discharge amount caused by the change, the variable discharge means and corrects the ink discharge amount of each nozzle.

The present invention also provides a color filter manufacturing apparatus for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink, the size of the substrate and the substrate. in correspondence with the resolution of the pixels formed by ejecting ink, and determining means for determining the number of combinations and nozzles of the nozzle used in the ink ejection to one of the substrates, the landing of ink ejected from the nozzles Means for determining the ink discharge timing of each nozzle based on the measurement result of the position, and discharge amount variable means capable of independently changing the ink discharge amount of each nozzle, wherein each nozzle according to the determined discharge timing A discharge amount variable means for correcting the ink discharge amount of each nozzle so that the discharge amount of ink discharged from the nozzle is constant, So as to correct the change in the ink discharge amount caused by the combination and the number of nozzles of the nozzle determined in decision means, together with the variable discharge means corrects the ink discharge amount of each nozzle, on the substrate from the inkjet head to the case of discharging the ink, the combination of nozzles used in the ink discharge operation for one of the substrates, the number of nozzles used in the ink discharge operation to one of said substrate, said ink of each nozzle ejection timing of ink from the nozzles is determined by means for determining the ejection timing, the ink-jet head and the relative movement direction of the substrate, and, at least to determine the change in the relative movement speed of the substrate and the ink jet head If there is a change in one complement the change in the ink discharge amount caused by the change As for the variable discharge means and corrects the ink discharge amount of each nozzle.

  Further, the discharge amount varying means described above changes the liquid discharge amount by changing at least one of the voltage value and pulse width of the drive pulse supplied to each nozzle.

  According to the above configuration, since the discharge amount variable means is connected to each of the plurality of nozzles so that the discharge amount can be changed independently for each nozzle, the discharge amount between the nozzles can be easily made uniform, thereby It is possible to uniformly control the liquid filling amount in a predetermined region (for example, pixel).

  In addition, the discharge voltage from each nozzle is controlled with high accuracy because the drive conditions such as the drive voltage value and pulse width given to each nozzle are controlled in consideration of the discharge / non-discharge status of adjacent nozzles and the number of nozzles used. To match the desired amount.

Furthermore, since the amount of liquid applied to a predetermined area (for example, pixel) on the substrate can be simply controlled to a predetermined amount, a high-quality color filter or EL in which the amount of liquid applied to the predetermined area (pixel) is uniformized. A panel for a display device such as a display element, an electron-emitting device, and a display panel including the electron-emitting device can be manufactured.
In the present invention, an ink jet head is used as the liquid discharge head, but liquids other than ink may be discharged depending on the object to be manufactured. For example, if the object to be manufactured is a color filter, ink is discharged. If the object to be manufactured is an EL element, an EL material liquid is discharged. If the object to be manufactured is an electron emitting element, a conductive thin film material liquid is discharged. Is discharged. As described above, the liquid discharge head defined in this specification includes a head that discharges liquid other than ink. However, since the ink jet method is adopted as the discharge format, in this specification, the liquid to be discharged is not ink. In some cases, the liquid discharge head may be referred to as an inkjet head.

  According to the present invention, it is possible to equalize the liquid discharge amount from each nozzle of the liquid discharge head. Further, the liquid discharge amount can be varied independently for each nozzle.

  In addition, since the liquid application amount to a predetermined area (for example, pixel) on the substrate can be easily controlled to a predetermined amount, the liquid application amount to the predetermined area (pixel) is made uniform, and a high-quality color filter or EL A panel for a display device such as a display element, an electron-emitting device, and a display panel including the element can be manufactured.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings. In the following embodiments, discharge amount correction at the time of manufacturing a panel for a display device such as a color filter or an EL element, or a display panel including an electron-emitting device or the element will be described. However, the present invention is not limited to the discharge amount correction. The present invention may be applied to a case where the liquid discharge amount from each nozzle is required to be uniform with high accuracy and a simple configuration. For example, the ink is applied to a medium such as plain paper or an OHP sheet. The present invention can also be applied to discharge amount correction in a consumer printer that prints discharged images.

  The display device panel defined in the present invention refers to, for example, an EL element (electroluminescence element, electroluminescence material) having a light emitting part formed of a color filter having a colored part or a self-emitting material, an electroconductive thin film part. It is a panel used for a display device including a display panel including a plurality of electron-emitting devices having the above.

  Further, the color filter defined in the present invention includes a colored portion and a base, and can obtain output light whose characteristics are changed with respect to input light. As a specific example, there is a liquid crystal display device that obtains light of three primary colors of R, G, B or C, M, Y from the backlight light by transmitting the backlight light. The term “substrate” as used herein includes substrates such as glass and plastic, and also includes shapes other than plate shapes.

(First embodiment)
FIG. 1 is a schematic diagram showing a configuration of an embodiment of a color filter manufacturing apparatus.

  In FIG. 1, 51 is an apparatus base, 52 is an XYθ stage disposed on the base 51, 53 is a color filter substrate set on the XYθ stage 52, 54 is a color filter formed on the color filter substrate 53, 55 Are R (red), G (green), and B (blue) inkjet heads that color the color filter 54, 58 is a controller that controls the overall operation of the color filter manufacturing apparatus 90, and 59 is a display section of the controller. However, a teaching pendant (personal computer) 60 is a keyboard which is an operation unit of the teaching pendant 59.

  FIG. 2 is a configuration diagram of the control controller of the color filter manufacturing apparatus 90. 59 is a teaching pendant that is an input / output means of the controller 58, 62 is a display unit that displays information such as the manufacturing progress and the presence or absence of head abnormality, and 60 is an operation unit that instructs the operation of the color filter manufacturing apparatus 90, etc. (Keyboard).

  58 is a controller for controlling the overall operation of the color filter manufacturing apparatus 90, 65 is an interface for transferring data to and from the teaching pendant 59, 66 is a CPU for controlling the color filter manufacturing apparatus 90, and 67 is for operating the CPU 66. ROM for storing a control program for storing, 68 for storing production information and the like, 70 for discharge control unit for controlling ink discharge (liquid discharge operation, ink discharge operation) into each pixel of the color filter, Reference numeral 71 denotes a stage control unit that controls the operation of the XYθ stage 52 of the color filter manufacturing apparatus 90, and 90 denotes a color filter manufacturing apparatus that is connected to the controller 58 and operates in accordance with the instructions.

  FIG. 3 is a diagram showing a general structure of the inkjet head IJH.

  In the apparatus of FIG. 1, three inkjet heads 55 are provided corresponding to the three colors R, G, and B. Since these three heads have the same structure, FIG. Shows a representative structure of one of these three heads.

  In FIG. 3, the ink jet head IJH is roughly composed of a heater board 104 which is a substrate on which a plurality of heaters 102 for heating ink is formed, and a top plate 106 placed on the heater board 104. . A plurality of discharge ports 108 are formed in the top plate 106, and a tunnel-like liquid path 110 communicating with the discharge ports 108 is formed behind the discharge ports 108. Each liquid path 110 is isolated from an adjacent liquid path by a partition wall 112. Each liquid path 110 is commonly connected to one ink liquid chamber 114 at the rear thereof, and ink is supplied to the ink liquid chamber 114 via an ink supply port 116, and the ink is supplied from the ink liquid chamber 114. The liquid is supplied to each liquid passage 110.

  The heater board 104 and the top plate 106 are aligned so that each heater 102 comes to a position corresponding to each liquid passage 110 and assembled in a state as shown in FIG. Although only two heaters 102 are shown in FIG. 3, the heaters 102 are arranged one by one corresponding to each liquid passage 110. When a predetermined drive pulse is supplied to the heater 102 in the assembled state as shown in FIG. 3, the ink on the heater 102 boils to form bubbles. The ink is ejected from the ejection port 108 by the volume expansion of the bubbles, and the ink is ejected. Therefore, the volume of ink ejected from the ejection port can be controlled by controlling the drive pulse applied to the heater 102 and adjusting the size of the bubbles. The parameters to be controlled include power supplied to the heater.

  FIG. 4 is a diagram for explaining a method of controlling the ink discharge amount by changing the electric power applied to the heater in this way.

  In this embodiment, two types of low voltage pulses are applied to the heater 102 in order to adjust the ink discharge amount. As shown in FIG. 4, the two types of pulses are a preheat pulse and a main heat pulse (hereinafter simply referred to as a heat pulse). The preheat pulse is a pulse for warming the ink to a predetermined temperature before actually ejecting the ink, and is set to a value shorter than the minimum pulse width t5 necessary for ejecting the ink. Therefore, ink is not ejected by this preheat pulse. The reason why the preheat pulse is applied to the heater 102 is to keep the initial temperature of the ink up to a constant temperature so that the amount of ink discharged when a constant heat pulse is applied later is always constant. Conversely, by adjusting the length of the preheat pulse, the ink temperature can be adjusted in advance, and even when the same heat pulse is applied, the ink discharge amount can be varied. In addition, by warming the ink prior to the application of the heat pulse, it has a function of improving the responsiveness by advancing the time rise of the ink ejection when the heat pulse is applied.

  On the other hand, the heat pulse is a pulse for actually ejecting ink, and is set longer than the minimum pulse width t5 necessary for ejecting the ink. Since the energy generated by the heater 102 is proportional to the width (application time) of the heat pulse, it is possible to adjust variations in the characteristics of the heater 102 by adjusting the width of the heat pulse.

  The ink discharge amount can also be adjusted by adjusting the interval between the preheat pulse and the heat diffusion state by the preheat pulse.

  As can be seen from the above description, the ink discharge amount can be adjusted by adjusting the application time of the preheat pulse and the heat pulse, or by adjusting the application interval of the preheat pulse and the heat pulse. is there. Therefore, by adjusting the application time of the preheat pulse and the heat pulse and the application interval between the preheat pulse and the heat pulse as necessary, the ink ejection amount and the response to the applied ink ejection pulse can be freely adjusted. It becomes possible. In particular, when coloring a color filter, it is desirable that the color density (color density) between each filter element or within one filter element is substantially uniform in order to suppress the occurrence of color unevenness. In some cases, the ink discharge amount is controlled to be the same. If the amount of ink discharged from each nozzle is the same, the amount of ink applied to each filter element is also the same, so that the color density between the filter elements can be made substantially the same. In addition, unevenness in one filter element can be reduced. Therefore, when it is desired to adjust the ink discharge amount for each nozzle to the same value, the above-described ink discharge amount control may be performed.

  Next, FIG. 5 is a diagram showing a manufacturing process of a color filter. A manufacturing process of the color filter 54 will be described with reference to FIG.

  FIG. 5A shows a glass substrate 1 provided with a black matrix 2 that constitutes a light transmitting portion 9 and a light shielding portion 10. First, on the substrate 1 on which the black matrix 2 is formed, the ink itself is rich in ink receptivity. However, under certain conditions (for example, light irradiation or light irradiation and heating), the ink receptivity decreases, A resin composition having a property of curing under a certain condition is applied, and prebaking is performed as necessary to form the resin composition layer 3 (FIG. 5B). The resin composition layer 3 can be formed by any coating method such as spin coating, roll coating, bar coating, spray coating, and dip coating, and is not particularly limited.

  Next, the resin layer on the light transmitting portion 9 is subjected to pattern exposure in advance using the photomask 4 to partially reduce the ink receptivity of the resin layer (FIG. 5 (c)), and the resin composition layer In FIG. 5, an ink receiving portion 6 and a portion 5 having a reduced ink receiving property are formed (FIG. 5D). In addition, when the inkjet head discharges (drives and discharges) ink while relatively scanning the substrate several times, the inkjet head is fixed and the substrate is moved to perform relative scanning, and the substrate is fixed. Any of the cases where relative scanning is performed by moving the inkjet head is possible.

  Thereafter, R (red), G (green), and B (blue) inks are ejected onto the resin composition layer 3 by an ink jet method and colored at one time (FIG. 5 (e)), and the ink is dried as necessary. I do. Examples of the ink jet system include a system using thermal energy or a system using mechanical energy, and any system can be suitably used. The ink to be used is not particularly limited as long as it can be used for inkjet, and the ink colorant is required for each pixel of R, G, B from various dyes or pigments. The one suitable for the transmitted spectrum is selected as appropriate. The ink ejected from the ink jet head may be in the form of droplets at the time of adhering to the resin composition part layer 3, but it is preferable that the ink is adhered in a columnar form without being separated into droplets from the ink jet head. .

  Next, the colored resin composition layer 3 is cured by light irradiation or light irradiation and heat treatment to form a protective layer 8 as required (FIG. 5 (f)). In order to cure the resin composition layer 3, conditions different from the conditions in the previous ink repellent treatment, such as increasing the exposure amount in light irradiation, stricter heating conditions, or combining light irradiation and heat treatment The method of doing etc. can be adopted.

  6 and 7 are cross-sectional views showing a basic configuration of a color liquid crystal display device 30 incorporating the color filter.

  A color liquid crystal display device is generally formed by combining a color filter substrate 1 and a counter substrate 21 and encapsulating a liquid crystal compound 18. A TFT (Thin Film Transistor) (not shown) and transparent pixel electrodes 20 are formed in a matrix inside one substrate 21 of the liquid crystal display device. In addition, a color filter 54 in which RGB color materials are arranged at a position facing the pixel electrode is disposed inside the other substrate 1, and a transparent counter electrode (common electrode) 16 is disposed on the surface. It is formed. The black matrix 2 is normally formed on the color filter substrate 1 side (see FIG. 6), but is formed on the opposite TFT substrate side in a BM (black matrix) on-array type liquid crystal panel (liquid crystal display panel) ( (See Figure 7.) Further, an alignment film 19 is formed in the images of both substrates, and liquid crystal molecules can be aligned in a certain direction by rubbing the alignment film 19. Further, polarizing plates 11 and 12 are adhered to the outside of each glass substrate, and the liquid crystal compound 18 is filled in a gap (about 2 to 5 μm) between these glass substrates. In addition, a combination of a fluorescent lamp (not shown) and a scattering plate (not shown) is generally used as the backlight, and the liquid crystal compound is displayed by functioning as an optical shutter that changes the transmittance of the backlight light. I do.

  An example in which such a liquid crystal display device is applied to an information processing device will be described with reference to FIGS.

  FIG. 8 is a block diagram showing a schematic configuration when the above liquid crystal display device is applied to an information processing apparatus (signal supply unit) having functions as a word processor, personal computer, facsimile apparatus, and copying apparatus.

  In the figure, reference numeral 1801 denotes a control unit that controls the entire apparatus, which includes a CPU such as a microprocessor and various I / O ports, and outputs control signals and data signals to each unit, and control signals and data signals from each unit. To control. A display unit 18002 displays various menus, document information, image data read by the image reader 1807, and the like on the display screen. Reference numeral 1803 denotes a transparent pressure-sensitive touch panel provided on the display unit 1802. By pressing the surface with a finger or the like, item input, coordinate position input, or the like on the display unit 1802 can be performed.

  Reference numeral 1804 denotes an FM (Frequency Modulation) sound source unit that stores music information created by a music editor or the like as digital data in a memory unit 1810 or an external storage device 1812, and performs FM modulation by reading out from the memory or the like. is there. An electric signal from the FM sound source unit 1804 is converted into an audible sound by the speaker unit 1805. A printer unit 1806 is used as an output terminal of a word processor, a personal computer, a facsimile machine, and a copying machine.

  Reference numeral 1807 denotes an image reader unit that photoelectrically reads and inputs document data. The image reader unit 1807 is provided in the document transport path, and reads various documents in addition to facsimile documents and copy documents.

  Reference numeral 1808 denotes a facsimile transmission / reception unit for facsimile transmission of document data read by the image reader unit 1807 and reception and copying of a transmitted facsimile signal, which has an interface function with the outside. Reference numeral 1809 denotes a telephone unit having various telephone functions such as a normal telephone function and an answering machine function.

  Reference numeral 1810 denotes a memory unit including a system program, a manager program, other application programs, a ROM that stores character fonts, a dictionary, and the like, an application program loaded from an external storage device 1812, document information, and a video RAM. .

  Reference numeral 1811 denotes a keyboard unit for inputting document information and various commands.

  Reference numeral 1812 denotes an external storage device using a floppy disk, a hard disk, or the like as a storage medium. The external storage device 1812 stores document information, music or voice information, a user application program, and the like.

  FIG. 9 is a schematic overview of the information processing apparatus shown in FIG.

    In the figure, reference numeral 1901 denotes a flat panel display using the liquid crystal display device, which displays various menus, graphic information and document information. On the display 1901, coordinate input and item designation input can be performed by pressing the surface of the touch panel 1803 with a finger or the like. Reference numeral 1902 denotes a handset used when the apparatus functions as a telephone. The keyboard 1903 is detachably connected to the main body via a cord, and can perform various document functions and various data input. The keyboard 1903 is provided with various function keys 1904 and the like. Reference numeral 1905 denotes a slot for inserting a floppy disk into the external storage device 1812.

  Reference numeral 1906 denotes a paper placement unit on which a document read by the image reader unit 1807 is placed. The read document is discharged from the rear of the apparatus. When receiving a facsimile, the ink jet printer 1907 prints it.

  When the information processing apparatus functions as a personal computer or a word processor, various types of information input from the keyboard unit 1811 are processed by the control unit 1801 according to a predetermined program and output to the printer unit 1806 as an image.

  When functioning as a receiver of a facsimile apparatus, facsimile information input from a FAX transmission / reception unit 1808 via a communication line is received by a control unit 1801 according to a predetermined program, and is output to a printer unit 1806 as a received image.

  In the case of functioning as a copying apparatus, a document is read by the image reader unit 1807, and the read document data is output as a copy image to the printer unit 1806 via the control unit 1801. When functioning as a receiver of a facsimile machine, the document data read by the image reader unit 1807 is transmitted by the control unit 1801 according to a predetermined program, and then transmitted to the communication line via the FAX transmission / reception unit 1808. .

  Note that the above-described information processing apparatus may be an integrated type in which an ink jet printer is built in the main body as shown in FIG. 10, and in this case, it becomes possible to further improve portability.

  In the figure, parts having the same functions as those in FIG.

  FIG. 18 shows the configuration of the discharge amount control circuit of this embodiment. In FIG. 18, all the nozzles are connected to a head nozzle drive circuit (voltage changing means including a DA converter and an amplifier circuit), and all the nozzles are nozzles whose discharge amount can be changed.

  In FIG. 18, the drawing control unit 311 supplies the image serial data 319 to the image data serial / parallel conversion circuit 322, the data latch signal 318 to the image data latch output circuit 321, and the drive timing to the drive signal pattern generation circuit 320. The signal 317 is supplied. The drawing control unit 311 gives a command for setting control voltage to the head nozzle drive circuit 304. The ejection amount control is performed based on various signals from the drawing control unit 311. Specifically, first, the image serial data 319 for selecting ejection / non-ejection of each nozzle (ch) is converted into parallel data by the image data serial / parallel conversion circuit 322. The converted data is latched by the data latch signal 318 in the image data latch circuit 321. Each nozzle is selected based on the latch data. Thereafter, a drive timing signal 317 from the drive signal pattern generation circuit 320 is supplied to the nozzle drive circuit 304. Based on this drive timing signal, a drive signal is output from the nozzle drive circuit 304 to the ejection drive element 309 of the selected nozzle. Is supplied.

  Note that the ejection drive element corresponds to a heater in a bubble jet (registered trademark) type head. Further, in the piezo type head, it corresponds to a piezoelectric element used for the ejection driving side wall of the ink chamber of the nozzle.

  In the discharge amount control circuit, the discharge amount is controlled by controlling the voltage of the drive signal supplied to the nozzle. This voltage control is performed by the head nozzle drive circuit 304, and the head nozzle drive circuit 304 includes a voltage control circuit 313, a signal reference voltage circuit 314, an output voltage amplification circuit 315, and an output charge / discharge circuit 316. The voltage control circuit 313 and the signal reference voltage circuit 314 receive a command for the set control voltage value from the drawing control unit 311 and set the drawing control voltage for each nozzle. Specifically, the signal reference voltage circuit 314 sets the center value of the drive voltage, and the signal voltage control circuit 313 sets the correction voltage for the center value of the drive voltage of each nozzle. That is, the signal voltage control circuit 313 corrects the drive voltage and changes the voltage value.

  The output voltage amplifier circuit 315 supplies a drive voltage to the output charge / discharge circuit 316 based on the corrected voltage value.

  As described above, the corrected drive signal is output from the output charge / discharge circuit 316 to each nozzle, and the discharge amount from the nozzle is controlled. Note that the head nozzle drive circuit 304 that performs voltage control is for changing the voltage value of the drive signal, and thus can also be referred to as a transformer circuit.

  FIG. 19 shows a case where the voltage value of the drive signal applied to each nozzle (nozzles 1 to 3) is corrected, and FIG. 20 shows a drawing state before and after correcting the drive voltage. The state before correction of the arbitrary nozzle 1 (reference numeral 324), nozzle 2 (reference numeral 325), and nozzle 3 (reference numeral 326) in FIG. 19 corresponds to “before correction” in FIG. ), The nozzle 2 has a target discharge amount, the nozzle 1 has a discharge amount smaller than the target discharge amount, and the nozzle 3 has a discharge amount larger than the target discharge amount.

  For this reason, the voltage of the drive signal to be supplied to each nozzle is a value corrected to be higher by Δv1 than the drive voltage V2 of the nozzle 2 (reference numeral 325) for the nozzle 1 (reference numeral 324, nozzle at the end). The driving voltage (V2 + Δv1) is supplied, and the driving voltage (V2-Δv2) corrected to be lower by Δv2 than the driving voltage V2 of the nozzle 2 (reference numeral 325) is supplied to the nozzle 3 (reference numeral 326). .

  The discharge amount state that has been voltage-corrected as described above corresponds to “after correction” in FIG.

  Next, FIG. 21 shows a discharge amount correction sequence for making the discharge amount from each nozzle coincide with the target value.

  In controlling the discharge amount of each nozzle, first, a variable characteristic indicating the relationship between the discharge amount of each nozzle and a variable condition (here, drive voltage) is obtained.

  This variable characteristic is obtained according to the procedures (1) to (3) in FIG. First, as described in (1), ink is ejected with a plurality of different drive voltage values obtained by changing the drive voltage value within a range usable at the time of drawing. That is, a plurality of ink dots corresponding to different drive voltage values are drawn. For example, a voltage value with a small discharge amount and a voltage value with a large discharge amount are set to at least two or more points, and drawing is performed on the glass substrate under the condition of a drive signal having the same pulse width used for drawing. The ink dots are drawn individually for all the nozzles.

  Next, as described in (2), the transmitted light amount of the ink dots drawn on the glass substrate is measured, and each ink discharge amount is obtained based on the measurement result.

  Next, as described in (3), the discharge amount when the voltage is varied from the difference between the two points of the point Vd2 where the discharge amount is large and the point Vd1 where the discharge amount is small and the difference between the voltage values V2 and V1 at that time. The amount of change (here called correction sensitivity K) is calculated. The relationship between the voltage value and the corresponding ink discharge amount is as shown in FIG. 22, and the correction sensitivity K corresponds to the slope of the straight line shown. Here, for each nozzle, the ejection amount when the drive signal voltage is 18 v, 20 v, and 24 v is measured.

  Next, as described in (4), the discharge amounts of all the nozzles under the driving conditions used in actual drawing are measured, and the average discharge amount Vdx of all the nozzles is calculated. Based on the difference between the discharge amount VdnN of each nozzle and the average discharge amount Vdx and the correction sensitivity K, the correction amount VdnNY is calculated for each nozzle. The correction amount VdnNY thus determined is set in the signal voltage control circuit 313 shown in FIG. After the setting, ink is ejected, and the correction processing of items (4) and (5) in FIG. 21 is performed until the drawing result is corrected to the target ejection amount.

Next, FIG. 23 shows the relationship between the absorbance variation (discharge amount variation) before execution of the correction sequence shown in FIG. 21 and the absorbance variation (discharge amount variation) after execution of the correction sequence. . The ejection amount variation data before correction is data indicating variation in the ejection amount when the drive voltage is all set to 19v, and the variation amounts to + 4%. On the other hand, as described in FIG. 21, the average discharge amount of all nozzles is calculated, and the correction amount of each nozzle is calculated from the difference between the average discharge amount and the discharge amount of each nozzle and the correction sensitivity K, When correction is performed using the correction amount, the discharge amount variation after the correction is suppressed to within ± 1%.
In the present embodiment, the discharge amount can be varied by 1% by setting the signal setting voltage to a setting resolution of about 100 mV, and the discharge amount can be controlled by about 0.5% by further reducing the setting resolution. Is possible.

  As described above, the ink discharge amount from each nozzle is corrected. The case where this discharge amount correction is used when drawing a color filter will be described. FIG. 16 is a diagram showing an arrangement pattern of pixels of the color filter, and FIG. 17 is a diagram showing a drawing state after the ejection amount correction is performed. Here, the amount of ink filled in each pixel is made uniform by individually controlling the amount of ejection from each nozzle so that the amount of ink ejected from each nozzle matches the target value. Specifically, as shown in FIG. 17, the drive voltage is corrected so that the ink discharge amount from each nozzle is the same, thereby making the discharge amount per droplet discharged from each nozzle uniform, The ink filling amount in the pixel is made equal. According to this configuration, since the ink filling amount in the pixel can be made the same, a high-quality color fill without density unevenness can be manufactured.

  Further, when an undischarge nozzle that cannot discharge ink occurs among the used nozzles, as shown in the two pixels on the right side of FIG. 17, the ink discharge amount per droplet is increased to generate an undischarge nozzle. By compensating for the decrease in the ink discharge amount accompanying this, the ink discharge amount into the pixel is corrected to the target amount (ink amount that should be discharged into one pixel). Specifically, in FIG. 17, five nozzles are opposed to one pixel, and one drop of ink is ejected from each of these five nozzles to complete ink filling into one pixel (left side 3 in the figure). Pixel reference). However, when one of the five nozzles becomes a discharge failure nozzle, one pixel is formed with four drops of ink from the four nozzles (see the second pixel from the right). If an ink discharge amount that is the same as the normal case in which five drops of ink are discharged is set, naturally, the ink filling amount into the pixel is reduced. Therefore, the ink discharge amount per drop is increased so that the target amount can be achieved even with four drops of ink. In this example, the amount of ink discharged per drop may be increased by a factor of 5/4 compared to the normal case where 5 drops are discharged per pixel. Similarly, in the case where two nozzles out of five nozzles corresponding to one pixel become non-discharge nozzles to form one pixel with three drops of ink (see the first pixel from the right side), the normal case In contrast, the amount of ink discharged per drop may be 5/3 times, and the amount of ink discharged into the pixel may be matched with the target amount. In addition, even when an undischarge nozzle is generated in this way and the ink discharge amount is increased, the drive voltage of each nozzle is set so that the ink amount per droplet discharged from each nozzle is made uniform. .

  Unlike the color filter shown in FIG. 17, the present invention can be similarly applied by manufacturing a color filter in which pixel rows are arranged perpendicular to the scanning direction of the head.

  Here, the effect of discharge amount correction at the time of actual color filter drawing will be described.

  FIG. 24 shows the discharge amount variation of each nozzle when it is not corrected. This is an example of the discharge amount distribution in any one head. As shown in the figure, in the state before correction, the discharge amount variation between the nozzles is large.

  On the other hand, FIG. 25 shows the discharge amount variation after correction when the discharge amount correction is performed for the nozzles used for drawing based on the discharge amount correction method. As shown in the figure, the discharge amount variation after correction can be suppressed to ± 1% or less for the nozzles used for drawing, and a high-quality color filter with less unevenness can be manufactured by drawing under these conditions.

In the above embodiment, the voltage control means that can change the voltage value of the drive signal is used as the discharge amount varying means for making the ink discharge amount variable, and this voltage control means is made to correspond to each nozzle. The ejection amount variable by each nozzle is realized by changing the set voltage of the drive signal. However, the ejection amount varying means is not limited to the voltage control means. For example, the discharge amount may be adjusted by changing the pulse width of the drive signal while keeping the voltage constant. In this embodiment, a drive pulse control means that can set the pulse width of the drive signal to be changeable is used as the discharge amount varying means, and this drive pulse control means is provided corresponding to each nozzle.
Furthermore, it is possible to perform the discharge amount control under a variable condition in which the drive voltage of the drive signal and the pulse width are arbitrarily combined independently for each nozzle.

  As described above, according to the first embodiment, the discharge amount variable means for each of the plurality of nozzles (specifically, the voltage control means capable of changing the drive voltage value of the drive pulse supplied to each of the plurality of nozzles. ), And the discharge amount can be changed independently for each nozzle, making it possible to easily equalize the discharge amount between the nozzles and thereby uniformly control the ink filling amount in the pixels. It becomes. This eliminates the need to adjust the ink discharge interval as in shading correction. In the case of shading correction, the ink filling amount in one pixel is corrected by adjusting the ink ejection interval (ink ejection number), but the ink filling amount in one pixel is targeted only by adjusting the ink ejection number. It may not be possible to match the value with high accuracy. However, in this first embodiment, the ink discharge amount per droplet can be changed by adjusting the drive voltage and drive pulse of each nozzle, so that the ink filling amount in one pixel matches the target value with high accuracy. It becomes possible. Therefore, it is possible to manufacture a high-quality color filter with less variation in the ink filling amount between pixels compared to the case of manufacturing and manufacturing a color filter by shading correction.

(Modification of the first embodiment)
In this modified example, a discharge amount correction method when manufacturing a plurality of color filters having different sizes from one glass substrate will be described.

  FIG. 26 is a diagram showing a case where a plurality of color filters having different pixel sizes (a color filter having a pixel A and a color filter having a pixel B) are manufactured from one glass substrate.

  When ink is ejected to pixels having different sizes as described above, it is necessary to change the ink ejection amount from the nozzles according to the size of the pixels. In the case of FIG. Since the nine nozzles eject ink to both the pixel A and the pixel B, the ejection amount must be changed when ink is ejected to each pixel. Here, no. It has been described that only the 9 nozzles perform drawing on both pixels. In the nozzles other than the nine nozzles, drawing is performed on both pixels. Further, if the types of color filters to be manufactured are different, naturally, the nozzles that perform drawing on a plurality of types of pixels also differ. In order to cope with various forms, a configuration in which the discharge amount is variable independently for all nozzles is required. In this modification, the ink discharge amount from each nozzle is individually controlled for each nozzle, but the discharge amounts of all the nozzles are not uniformized. However, when drawing is performed on pixels of the same size, control is performed so that the same discharge amount is obtained. That is, the ejection amount control is executed so that ink is ejected to the pixel A with the ejection amount A and ink is ejected to the pixel B with the ejection amount B. In this way, the point of equalizing the ink discharge amount for pixels of the same size is the same as in the first embodiment.

  FIG. 27 is a diagram illustrating a case where the scanning direction of the inkjet head is set to the longitudinal direction of the pixel. In this case as well, no. Since the nozzle No. 5 draws both the pixel A and the pixel B, it is necessary to change the ink discharge amount per droplet. In this case, it is necessary to change not only the ink discharge amount but also the number of scans. That is, the pixel A is scanned four times, while the pixel B is scanned twice.

  FIG. 28 also shows a case where both the number of drawing times and the discharge amount must be changed for each nozzle.

  As described above, according to this modification, the discharge amount varying means is configured to correspond to each nozzle so that the discharge amount can be changed independently for each nozzle. Even when ink is ejected, ink can be ejected with an ejection amount corresponding to the size of the pixel, so that any pixel can be filled with a target amount of ink. Accordingly, a plurality of types of color filters having different pixel sizes can be obtained from a single substrate by a simple method. That is, it is possible to realize multiple chamfering of a plurality of types of color filters having different pixel sizes by a simple method.

(Second Embodiment)
As described above, the ink discharge amount from each nozzle is affected by the discharge / non-discharge state of adjacent nozzles and the number of used nozzles. Therefore, the second embodiment is characterized in that driving conditions such as a driving voltage value and a pulse width given to each nozzle are controlled in consideration of these effects. Other configurations (for example, the discharge amount control circuit shown in FIG. 18 and the like) are the same as those in the first embodiment, and a description thereof will be omitted. That is, also in the second embodiment, the ejection amount variable means is provided corresponding to each nozzle so that the ink ejection amount can be changed independently for each nozzle.

  FIG. 29 shows a drawing flowchart of color filter drawing representing the features of the present embodiment. In FIG. 29, “replacement” means that the size, resolution, shape, size, and the like of the filter 54 to be created are switched (step S501). If any of these conditions changes, the combination of nozzles used changes. In accordance with this, the image data for each nozzle to draw is changed (step S502).

  By the way, when the combination of nozzles to be used changes, as described in the problem column, for the nozzles that change the use / non-use conditions of adjacent nozzles, even if the ink is ejected under the same electrically driven conditions, The discharge amount changes due to the influence of adjacent nozzle crosstalk. Therefore, in consideration of the influence of adjacent nozzle crosstalk, a discharge amount control value corresponding to the influence is set (step S503). Specifically, when the nozzle use condition as shown in FIG. 35B is changed to the nozzle use condition as shown in FIG. 35C, adjacent nozzles (ch11, 13) adjacent to the target nozzle (ch12). The use / non-use conditions of this change, and accordingly, it is affected by adjacent crosstalk. In this case, the discharge amount of the nozzle of interest decreases. Therefore, a condition (discharge amount control value) necessary to compensate for this decrease is set. Therefore, the discharge amount control value may be any condition value that can correct the change in the discharge amount due to the influence of the adjacent crosstalk. This discharge amount control value is obtained in advance.

  After the ejection amount control value is set as described above, filter drawing is performed (step S504). As long as the adjacent nozzle crosstalk condition is not changed, filter drawing can be performed repeatedly over and over using the same discharge amount control value (Yes in step S505).

  On the other hand, if any of the size, resolution, shape, size, etc. of the filter 54 to be created is switched, the influence of adjacent nozzle crosstalk will occur even if the same inkjet head discharges electrically under the same driving conditions. Since the discharge amount changes, the discharge amount control value corresponding to the discharge amount is set again (Yes in step S506).

  According to the above configuration, even if the use condition of the nozzle is changed, it is almost not affected by the adjacent nozzle crosstalk, so the discharge amount of the nozzle does not change, and the ink on each pixel of the color filter does not change. The discharge amount is also kept constant.

  In addition, when drawing ink discharge to one pixel of the filter by multiple discharges using a single nozzle or a plurality of nozzles, in order to keep the discharge amount on a specific pixel of the filter constant However, it is not always necessary to keep the discharge amount of each nozzle constant. That is, it is only necessary to adjust the ink discharge amount at the time of any of the plurality of discharges so that the total discharge amount by a plurality of discharges for a specific pixel becomes the target amount.

  FIG. 30 is a drawing flowchart showing another embodiment. FIG. 30 shows the correspondence when the condition of the number of used nozzles is switched. For example, assume that there is an ink jet head in which 160 nozzles are arranged in a line. When drawing a color filter using this head, drawing is performed using all 160 nozzles. However, due to the relationship between the size of the color filter and the number of nozzles, the drawing width at the time of drawing for the last scanning area. In some cases, the nozzle becomes smaller and a surplus nozzle is not used. In this case, only at the time of the last scanning drawing, for example, drawing is performed using only 100 nozzles out of 160 nozzles.

  In case of drawing with the number of used nozzles P (160) and the case of drawing with the number of used nozzles Q (100), in the case of Q, the first to 100th nozzles are used, and 101 The 160th to 160th are not used. Here, focusing on the 100th nozzle, in the case of P, since ink is ejected from both adjacent nozzles almost simultaneously, the ejection amount from the 100th nozzle is large. On the other hand, in the case of Q, although the 99th nozzle discharges ink almost simultaneously, the 101st nozzle is not used, so the discharge amount of the 100th nozzle (target nozzle) is smaller than in the case of P. Become.

  Therefore, in the case of P and the case of Q, it is necessary to reset the discharge amount control value set for each nozzle as shown in FIG. This control value is preliminarily drawn by trial drawing under the respective conditions of P and Q, and the discharge amount is measured (step S511, step S513), and the control value is calculated from the result (step S512, step S514). That is, for the 100th nozzle, the discharge amount of the target nozzle can be kept constant by switching to a correction value that increases the discharge amount only when drawing the last scanning region. In steps 511 to S514, data is created for a plurality of combinations of P and Q values.

  In step S514 and subsequent steps, in step S515, the image data is changed according to the color filter to be manufactured, and in step S516, the discharge amount control value of each nozzle is set based on the data obtained in steps S512 and 514. In step S517, the color filter is drawn. In step S518 and step S519, it is determined whether to perform color filter drawing with the same number of nozzles as used so far, or to change the nozzles and draw with other numbers of nozzles. If the drawing is continued, the discharge amount control value is not changed. If the drawing is performed with another number of nozzles, the discharge amount control value is changed, and the process returns to step S515.

  As described above, by appropriately switching the discharge amount control value in accordance with the change in the number of used nozzles, even if the influence degree of the adjacent nozzle crosstalk is changed, it is not necessary to cause the change in the discharge amount. The amount of ink discharged onto the pixel is kept constant.

  FIG. 31 is a drawing flowchart showing still another embodiment. FIG. 31 shows the correspondence when the combination of nozzles used is switched for each drawing pass. Specifically, a case is considered in which the nozzles to be used are different in the first pass in which the head passes through the substrate for the first drawing and the second pass in which the head passes through the substrate for the second time to draw.

  Here, attention is focused on a single nozzle A that is used for both the first pass and the second pass. The condition whether or not the nozzle adjacent to the nozzle A (target nozzle) is being used may differ between the first pass and the second pass. That is, the nozzle adjacent to nozzle A is used in the first pass, and the nozzle adjacent to nozzle A is not used in the second pass, or vice versa. If so, the discharge amount of the nozzle A differs between the first pass and the second pass due to the influence of the adjacent nozzle crosstalk described in FIG.

  Therefore, the discharge amount control value of the nozzle A is set to a different value in each of the first pass and the second pass so that the discharge amount of the nozzle A is equal to a predetermined desired value in the first pass and the second pass. Set. Such a change in the discharge amount control value is performed for all the nozzles in which the adjacent nozzle crosstalk changes in the first pass and the second pass.

  That is, as shown in FIG. 31, the discharge amount control value is appropriately changed and set for each pass according to the adjacent nozzle discharge condition of each nozzle, so that the discharge amount of each nozzle in the first pass and the second pass. And the nozzle discharge amount can be made uniform.

  By such a method, even when the combination of nozzles used is changed for each drawing pass, the discharge amount of each nozzle is kept constant, and the discharge amount to the filter pixels is also kept constant.

  Specifically, filter drawing is started in step S521 of FIG. 31, and when one scan is completed, the position of the inkjet head is shifted in the sub-scanning direction in step S522. At this time, if the pattern for the first pass is acceptable (Yes in step S523), the image pattern for the first pass is read in step S525, and the optimal first for each nozzle used in the first pass in step S526. In step S527, a color filter is drawn. On the other hand, if it is determined in step S523 or step S524 that the pattern is for the second pass, the image pattern for the second pass is read in step S528, and for each nozzle used in the second pass in step S529. The optimum second discharge amount control value is set for each, and the color filter is drawn in step S530.

  According to this configuration, when the nozzles used are different between the passes, the discharge amount control value is appropriately changed between the passes. In the nozzle A), the discharge amount does not change.

  FIG. 32 is a drawing flowchart showing still another embodiment. FIG. 32 shows the correspondence when drawing without using the nozzle B because one nozzle B of the inkjet head becomes defective.

  There are several methods for drawing a color filter without using the nozzle B. Here, the discharge amount for each nozzle is made constant for all the nozzles, and the pixel that the nozzle B should originally draw is set to another nozzle ( Consider a case where nozzles A and C, which are adjacent nozzles on both sides of the discharge failure nozzle B, are complemented (combined).

  When the nozzle B is not used, the discharge amount (discharge state) of the adjacent nozzle A and nozzle C is reduced as compared with the case where the nozzle B is used due to the principle of the adjacent nozzle crosstalk in FIG.

  Therefore, as shown in FIG. 32, after the defective nozzle B is specified and the defective nozzle B is treated as undischarged (not used), trial drawing is performed again (step S531), and the discharge amounts of the adjacent nozzle A and adjacent nozzle C are uniform. The correction correction coefficient is obtained again (step S532), the discharge amount uniformization correction coefficient is reset (step S533), and the filter drawing is restarted (step S534). At this time, the discharge amount control values of the nozzle A and the nozzle C are set so that the discharge amounts of the nozzle A and the nozzle C become the same desired values as the other nozzles. When drawing in step S534, a drawing abnormality is continuously detected (step S535). If a drawing abnormality is detected (step S536 Yes), a defective nozzle is specified in step S538, The defective nozzle specified in S539 is treated as non-ejection, and the process returns to step S531. If no drawing abnormality is detected in step S536, the process proceeds to step S537, and steps S531 to S537 are repeated until the production of the number of filters for the scheduled lot is completed.

  32, even when the filter drawing is performed without using the nozzle B because the nozzle B becomes defective, the discharge amounts of the adjacent nozzle A and the adjacent nozzle C are kept constant, and are applied to the pixels of the filter. The discharge amount is kept constant.

  FIG. 33 is a drawing flowchart showing still another embodiment. FIG. 33 shows the correspondence when the landing position for each nozzle is corrected by slightly shifting the discharge timing (liquid discharge timing, discharge time) of each nozzle back and forth.

  Due to variations in manufacturing accuracy of the ink jet head, even if all nozzles are driven simultaneously, the landing positions for each nozzle may vary. In this case, it is necessary to correct the landing position for each nozzle by shifting (determining) the driving timing for each nozzle little by little. Here, such a case is assumed.

  Even if the same nozzle B is used, if the drive timing of the nozzle A and nozzle C adjacent to the nozzle B is shifted back and forth, the influence of the adjacent crosstalk as described in FIG. Discharge amount will change. In order to compensate for this error amount, the discharge amount of nozzle B is measured in advance under conditions where the drive timings of nozzle A and nozzle C are shifted back and forth, and the discharge amount control value of nozzle B is obtained from the measured value. At this time, the discharge amount control value of the nozzle B is set so that the discharge amount of the nozzle B becomes the same desired value as the other nozzles.

  Even when drawing is performed using the same ink jet head, the moving speed (scanning speed) of the ink jet head at the time of drawing changes if the shape, size, and material of the filter are different. Along with this, the discharge timing for compensating the landing position also changes. Then, the degree of influence of adjacent crosstalk changes and the discharge amount also changes. If the moving speed is slow, the deviation of the drive timing of adjacent nozzles becomes large, and in this case, the discharge amount generally decreases. Since the amount of decrease is determined when the moving speed (relative moving speed) of the ink jet head is determined, it is possible to determine a discharge amount control value so that the discharge amount of each nozzle becomes a constant desired value.

  With the method of FIG. 33, even when the moving speed of the ink jet head changes and the amount of discharge timing shift for correcting the landing position changes accordingly, the discharge amount of each nozzle is kept constant, The discharge amount to the pixels of the filter is kept constant.

  Specifically, first test drawing is performed (step S541), the landing position of each nozzle is measured (step S542), and the landing position is corrected based on the measurement result (step S543). Then, the second trial drawing is performed (step S544), the discharge amount of each nozzle is measured (step S545), and the discharge amount control value of each nozzle is set (step S546). Then, the filter is drawn (step S547), and if the filter is continuously drawn under the conditions (Yes in step S548), the filter drawing is repeated. If the filter is drawn under other conditions (Yes in step S549), the process returns to step S541 and the same operation is repeated.

  FIG. 34 is a drawing flowchart showing still another embodiment. In FIG. 34, when the landing position of each nozzle is corrected by slightly shifting the ejection timing of each nozzle back and forth, the ink jet head movement is further drawn on the filter in each of the forward path and the backward path (relative movement direction). Indicates correspondence.

  As in the case of FIG. 33, even if all the nozzles are driven simultaneously due to variations in the manufacturing accuracy of the inkjet head, the landing position for each nozzle may vary, so the ejection timing for each nozzle is slightly shifted back and forth, The landing position for each nozzle is corrected.

  In order to shorten the drawing time of filter drawing, it is desired to draw both in the forward and backward directions of the reciprocating movement of the inkjet head. In this case, the ejection timing shift amount for correcting the landing position of a certain nozzle B is positive and negative. That is, for example, in the forward drawing for the correction of the landing position of the nozzle B, if the nozzle B is driven to advance by 1 μsec relative to the nozzle A and the nozzle C, the nozzle B is moved to the nozzle A and the nozzle in the return drawing. The nozzle C must be driven with a delay of 1 μsec. For the nozzle B, the discharge amount of the nozzle B differs depending on whether the driving of the adjacent nozzle A and the nozzle C is 1 μsec earlier or slower, and generally the discharge amount is smaller when the nozzle B is delayed by 1 μsec.

  In FIG. 34, the trial drawing for the forward movement of the inkjet head and the trial drawing for the return are performed in advance, and the discharge amount control value for each nozzle in each case is obtained (steps S551 to S557). Then, at the time of forward drawing (step S559 Yes), the discharge amount control value for forward direction drawing is set (step S562 to step S563), and at the time of return drawing (step S561 Yes), the discharge amount control value for return direction drawing. Is set (steps S565 to S566). As described above, the influence of the crosstalk between the forward and return adjacent nozzles can be compensated. For the same nozzle, the discharge amount at the forward drawing and the discharge amount at the return drawing become equal.

  In the method shown in FIG. 34, the ejection timing of each nozzle is slightly shifted back and forth to correct the landing position for each nozzle. The discharge amount of the nozzle is kept constant, and the discharge amount to the pixel of the filter is kept constant.

  As described above, according to the second embodiment, the discharge amount control value (drive voltage value) is changed in accordance with the change of the discharge condition in consideration of the influence of the adjacent nozzle crosstalk accompanying the change of the discharge condition of the nozzle. And the pulse width and the like are appropriately changed, so that it is hardly affected by the adjacent nozzle crosstalk, and the discharge amount of each nozzle is not changed. In particular, when controlling the discharge amount of the target nozzle, the change in the discharge conditions of the adjacent nozzles adjacent to the target nozzle (adjacent nozzles are driven simultaneously, driven at nearby times, or not driven) Since the discharge amount control value of the target nozzle is appropriately switched, the discharge amount of each nozzle can always be kept uniform, and a uniform image can be drawn.

  Further, when a color filter is manufactured by this method, a high-quality color filter without unevenness can be stably manufactured with a high yield, and it is possible to efficiently cope with a change in product specifications.

(Other embodiments)
The present invention is not limited to the above-described embodiment, and various applications are possible.

  For example, the colored portion constituting the color filter is not limited to being formed on the glass substrate, and the colored portion may be formed on the pixel electrode to function as a color filter. In order to form a colored portion on the pixel electrode, an ink receiving layer is formed on the pixel electrode, and ink is applied to the receiving layer, and coloring is performed using a resin ink mixed with a color material on the pixel electrode. There are cases of direct hits.

  Further, the present invention is not limited to the manufacture of the color filter described above, and can be applied to the manufacture of an EL (electroluminescence) display element, for example. The EL display element has a configuration in which a thin film containing a fluorescent inorganic and organic compound is sandwiched between a cathode and an anode, and excitons are obtained by injecting electrons and holes into the thin film and recombining them. Is generated by utilizing the emission of fluorescence or phosphorescence when the exciton is deactivated. Of the fluorescent materials used for such EL display elements, the materials exhibiting red, green and blue emission colors are produced by the manufacturing apparatus of the present invention (including the liquid discharge head and the discharge control circuit shown in FIG. A self-luminous full-color EL display element can be manufactured by patterning on an element substrate such as a TFT by an ink jet method using a manufacturing apparatus including a liquid application apparatus capable of executing a flow such as 29 to 34. The present invention includes such an EL display element, a method of manufacturing the display element, a manufacturing apparatus thereof, and the like.

  The manufacturing apparatus of the present invention is for performing surface treatment processes such as plasma treatment, UV treatment, and coupling treatment on the surface of the resin resist, the pixel electrode, and the lower layer so that the EL material is easily attached. You may have a means.

  The EL display device manufactured by using the manufacturing method of the present invention can be used in the field of low information such as segment display and still image display with simultaneous light emission on the entire surface, and can also be used as a light source having a point, line, or surface shape. be able to. Further, by using an active element such as a TFT as well as a passively driven display element for driving, it is possible to obtain a full color display element with high brightness and excellent responsiveness.

  Below, an example of the organic EL element manufactured by this invention is shown. FIG. 37 shows a cross-sectional view of the laminated structure of the organic EL element. The organic EL element shown in FIG. 37 includes a transparent substrate 3001, a partition wall (partition member) 3002, a light emitting layer (light emitting unit) 3003, a transparent electrode 3004, and a metal layer 3006. Reference numeral 3007 denotes a portion composed of a transparent substrate 3001 and a transparent electrode 3004, which is called a drive substrate.

  The transparent substrate 3001 is not particularly limited as long as it has necessary characteristics such as transparency and mechanical strength as an EL display element. For example, a light transmissive substrate such as a glass substrate or a plastic substrate is used. Applicable.

  The partition wall (partition member) 3002 has a function of isolating the pixels from each other so that the material is not mixed between adjacent pixels when the material to be the light emitting layer 3003 is applied from the liquid application head. . That is, the partition wall 3002 functions as a mixing prevention wall. Further, by providing the partition wall 3002 on the transparent substrate 3001, at least one recess (pixel region) is formed on the substrate. Note that there is no problem even if the partition wall 3002 has a multilayer structure having different affinity for the material.

  The light emitting layer 3003 is formed by using a known organic semiconductor material such as polyphenylene vinylene (PPV) that emits light when an electric current is passed, and is stacked with a thickness sufficient to obtain a sufficient amount of light, for example, about 0.05 μm to 0.2 μm. Configured. The light emitting layer 3003 is formed by filling a recess surrounded by the partition wall 3002 with a thin film material liquid (self-luminous material) by an inkjet method and performing heat treatment.

  The transparent electrode 3004 is made of a conductive and light transmissive material such as ITO. The transparent electrode 3004 is provided independently for each pixel region in order to emit light in pixel units.

  The metal layer 3006 is formed by laminating a conductive metal material, for example, aluminum lithium (Al—Li), about 0.1 μm to 1.0 μm. The metal layer 3006 is formed so as to act as a common electrode facing the transparent electrode 3004.

  The driving substrate 3007 includes thin film transistors (TFTs), wiring films, insulating films and the like (not shown) stacked in multiple layers, and is configured to be able to apply a voltage between the metal layer 3006 and each transparent electrode 3004 in units of pixels. The drive substrate 3007 is manufactured by a known thin film process.

  In the organic EL element having the layer structure as described above, in a pixel region where a voltage is applied between the transparent electrode 3004 and the metal layer 3006, a current flows through the light emitting layer 3003, causing an electroluminescence phenomenon, and the transparent electrode 3004. In addition, light is emitted through the transparent substrate 3001.

  Here, a manufacturing process of the organic EL element will be described.

  FIG. 38 shows an example of the manufacturing process of the organic EL element. Hereafter, each process (a)-(d) is demonstrated along FIG.

Step (a)
First, a glass substrate is used as the transparent substrate 3001, and a thin film transistor (TFT), a wiring film, an insulating film, etc. (not shown) are laminated in multiple layers, and a transparent electrode 3004 is formed so that a voltage can be applied to the pixel region. .

Step (b)
Next, a partition 3002 is formed at a position corresponding to each pixel. The partition wall 3002 only needs to function as a mixing prevention wall for preventing the EL material liquid from being mixed between adjacent pixels when the EL material liquid to be the light emitting layer is applied by an inkjet method. Here, the resist is added with a black material and is formed by a photolithography method. However, the present invention is not limited to this, and various materials, colors, formation methods, and the like can be used.

Step (c)
Next, the EL material is filled in a recess surrounded by the partition wall 3002 by an inkjet method, and then heat treatment is performed, whereby the light-emitting layer 3003 is formed.

Step (d)
Further, a metal layer 3006 is formed over the light emitting layer 3003.
Through such steps (a) to (d), a full-color EL element can be formed (prepared) by a simple process. In particular, when forming a color organic EL element, it is necessary to form a light emitting layer having different light emission colors such as red, green, and blue. Therefore, an ink jet method capable of discharging a desired EL material to an arbitrary position is used. It is effective to use.

  In the present invention, a solid portion is formed by filling a liquid material into a recess surrounded by a partition wall. If a color filter, a colored portion corresponds to the solid portion, and if an EL element, a light emitting portion. Corresponds to the solid part. The solid part including the coloring part and the light emitting part is a part (display part) used for displaying information, and is also a part for visually recognizing a color.

  In addition, since the coloring portion of the color filter and the light emitting portion of the EL element are also portions that generate color (color is emitted), they can also be referred to as coloring portions. For example, in the case of a color filter, the light from the backlight passes through the colored portion to emit RGB light, and in the case of the EL element, the light emitting portion emits light by itself to emit RGB light.

  In addition, since the ink and the self-luminous material are materials for forming the coloring portion, it can be said that the coloring material is generated. Further, since the ink and the self-luminous material are liquids, they can be collectively referred to as liquid materials. A head having a plurality of nozzles for discharging these liquids is defined as a liquid discharge head or an ink jet head.

  Further, the present invention is not limited to the manufacture of the above-described color filter and EL display element. For example, an electron-emitting device in which a conductive thin film is formed on a substrate, or an electron source using the electron-emitting device. It can also be applied to the manufacture of substrates, electron sources, display panels, and the like.

  Here, a method for manufacturing an electron-emitting device, an electron source substrate using the device, an electron source, and a display panel, which are other application examples of the present invention, will be described. Note that these electron-emitting devices, the electron source substrate using the electron-emitting devices, the electron source, and the display panel are used for, for example, television display.

  An electron-emitting device (for example, a surface-conduction electron-emitting device) used for an electron source substrate, an electron source, a display panel, or the like applies a current parallel to the film surface to a small-area conductive thin film formed on the substrate. This is a phenomenon in which electron emission is caused by flowing. Specifically, a crack is generated in a part of the conductive thin film, and a voltage is applied to the conductive thin film to flow an electric current so that electrons are emitted from the crack (hereinafter referred to as an electron emission portion). . A configuration example of such a surface conduction electron-emitting device is shown in FIG.

  FIG. 39 is manufactured using the manufacturing apparatus of the present invention (manufacturing apparatus including the liquid discharge head and the discharge control circuit of FIG. 18 and including the liquid applying apparatus capable of executing the flow of FIGS. 21 and 29 to 34). FIG. 40 is a schematic view showing an example of a possible electron-emitting device (surface conduction electron-emitting device), and FIG. 40 is a diagram showing an example of a process for manufacturing this surface-conduction electron-emitting device.

39 and 40, 5001 is a substrate, 5002 and 5003 are element electrodes, 5004 is a conductive thin film, 5005 is an electron emission portion, 5007 is the liquid discharge head and the discharge control circuit of FIG. 18, and FIG. 29 to 34 and the like, a liquid application device capable of executing the flow, 5024 is a droplet of the conductive thin film material liquid discharged from the liquid application device, and 5025 is a conductive thin film before energization forming.
In this example, first, device electrodes 5002 and 5003 are formed on a substrate 5001 with a certain distance L1 (FIG. 40A). Next, a conductive thin film material liquid (specifically, a liquid containing a metal element) 5024 which is a liquid material for forming the conductive thin film 5004 is discharged from a liquid discharge head (inkjet head) 5007 (FIG. 40 ( b)), a conductive thin film 5004 is formed in contact with the device electrodes 5002 and 5003 (FIG. 40C). Next, for example, by a forming process described later, a crack is generated in the conductive thin film to form an electron emission portion 5005 (FIG. 40D).

  By using such a liquid application method, minute droplets of the metal element-containing liquid can be selectively formed only at a desired position (predetermined region). There is no waste. In addition, a vacuum process requiring an expensive apparatus and patterning by photolithography including a large number of steps are unnecessary, and the production cost can be reduced.

  As a specific example of the liquid applying device 5007, any device can be used as long as it can discharge an arbitrary liquid droplet. In particular, the control can be performed in the range of about several tens to several tens of ng. An ink jet apparatus that can easily discharge a minute amount of droplets of about 10 ng to several tens of ng is preferable. A method for producing a surface conduction electron-emitting device using an ink jet type liquid application apparatus is described in JP-A-11-354015.

The conductive thin film 5004 is particularly preferably a fine particle film composed of fine particles in order to obtain good electron emission characteristics. The film thickness is determined by the step coverage to the device electrodes 5002 and 5003, the resistance value between the device electrodes 5002 and 5003, and Although it is appropriately set depending on energization forming conditions and the like described later, it is preferably several to several thousands, and particularly preferably 10 to 500. The sheet resistance value is 10 ³ to 10 ⁷ Ω / □.

The material constituting the conductive thin film 5004 is Pd, Pt, Ru, Ag, Au, Ti, In, Cu, Cr, Fe, Zn, Sn, Ta, W, Pb, or other metals, PdO, SnO ₂ , In _2. Oxides such as O ₃ , PbO, Sb ₂ O ₃ , borides such as HfB ₂ , ZrB ₂ , LaB ₆ , CeB ₆ , YB ₄ , GdB ₄ , carbides such as TiC, ZrC, HfC, TaC, SiC, WC And nitrides such as TiN, ZrN, and HfN, semiconductors such as Si and Ge, and carbon.

  The fine particle film described here is a film in which a plurality of fine particles are aggregated, and the fine structure is not only in a state where the fine particles are individually dispersed and arranged, but also in a state where the fine particles are adjacent to each other or overlap (including island shapes). It refers to a membrane, and the particle size of the fine particles is from several to several thousand, preferably from 10 to 200.

  Examples of the liquid on which the droplet 5024 is based include those obtained by dissolving the constituent material of the conductive thin film described above in water, a solvent, or the like, or an organic metal solution.

As the substrate 5001, quartz glass, glass with a low impurity content such as Na, blue plate glass, a glass substrate on which SiO ₂ is formed, and a ceramic substrate such as alumina are used.

As a material for the device electrodes 5002 and 5003, a general conductive material is used. For example, a metal or alloy such as Ni, Cr, Au, Mo, W, Pt, Ti, Al, Cu, Pd, and Pd, Appropriately selected from printed conductors composed of metals such as Ag, Au, RuO ₂ , Pd—Ag, or metal oxides and glass, transparent conductors such as In ₂ O ₃ —SnO ₂ , and semiconductor materials such as polysilicon. Is done.

  The electron emission portion 5005 is a high-resistance crack formed in a part of the conductive thin film 5004 and is formed by energization forming or the like. The crack may have conductive fine particles having a particle diameter of several to several hundreds. The conductive fine particles contain at least a part of elements of the material constituting the conductive thin film 5004. Further, the electron emission portion 5005 and the conductive thin film 5004 in the vicinity thereof may contain carbon and a carbon compound.

  The electron emission portion 5005 is formed by performing an energization process called energization forming of an element in which the conductive thin film 5004 and the element electrodes 5002 and 5003 are formed. In the energization forming, as described in JP-A-2-56822, energization is performed between the element electrodes 5002 and 5003 from a power source (not shown), and the conductive thin film 5004 is locally destroyed, deformed, or altered, A site whose structure has been changed is formed. This region where the structure is locally changed is referred to as an electron emission portion 5. The voltage waveform of the energization forming is particularly preferably a pulse shape, and there are a case where a voltage pulse having a constant pulse peak value is applied continuously and a case where a voltage pulse is applied while increasing the pulse peak value.

  When a voltage pulse is applied while increasing the pulse peak value, the pulse peak value (peak voltage during energization forming) is increased by, for example, about 0.1 V step and applied in an appropriate vacuum atmosphere.

In this case, the energization forming process is performed by measuring the element current at a voltage at which the conductive thin film 5004 is not locally broken or deformed, for example, at a voltage of about 0.1 V, and obtaining a resistance value, for example, a resistance of 1 MΩ or more. The energization forming ends when indicated.
Next, it is desirable to perform a process called an activation process on the element for which energization forming has been completed. The activation step is, for example, a process of repeatedly applying a voltage pulse having a constant pulse peak value at a degree of vacuum of about 10 ⁻⁴ to 10 ⁻⁵ Torr and the same as the energization forming. In this process, carbon and carbon compounds derived from materials are deposited on a conductive thin film, and the device current If and the emission current Ie are remarkably changed. The activation process ends when, for example, the emission current Ie is saturated while measuring the device current If and the emission current Ie.

  Here, carbon and carbon compound are graphite (refers to both single crystal and polycrystalline) and amorphous carbon (refers to a mixture of amorphous carbon and polycrystalline graphite), and the film thickness is 500 mm. The following is preferable, and more preferably 300 mm or less.

  The electron-emitting device fabricated in this way is preferably operated and driven in an atmosphere having a higher degree of vacuum than the degree of vacuum in the energization forming process and the activation process. In addition, it is desirable to drive the operation after heating at 80 ° C. to 150 ° C. in an atmosphere with a higher degree of vacuum.

The degree of vacuum higher than that of the energization forming process and the activation treatment is, for example, a degree of vacuum of about 10 ⁻⁶ Torr or more, more preferably an ultra-high vacuum system, and carbon and carbon compounds are newly made conductive. The degree of vacuum hardly deposits on the thin film. By doing so, the device current If and the emission current Ie can be stabilized.

A planar surface conduction electron-emitting device can be manufactured as described above.
FIG. 41 shows an external view of a manufacturing apparatus including a liquid ejection apparatus for manufacturing a surface conduction electron-emitting device. 41, reference numeral 5101 denotes a housing for storing the control device, 5102 denotes a monitor of a personal computer stored in the housing, 5103 denotes a personal computer keyboard or operation panel, 5104 denotes a stage on which the substrate 5106 is mounted, and 5105 denotes the substrate 5106. A liquid ejection head (inkjet head) for ejecting liquid 5106 is a substrate on which a surface conduction electron-emitting device is formed, and 5107 can apply droplets to any position on the substrate 5106. An XY stage that freely moves in both vertical and horizontal directions, 5108 is a surface plate that holds the entire liquid ejection apparatus, and 5109 is an alignment camera for aligning the ejection positions of droplets on the substrate 5107. The manufacturing apparatus configured in this way basically operates in the same manner as the color filter manufacturing apparatus described with reference to FIG. The method described in JP-A-11-354015 can be applied to the substrate alignment method, conductive thin film formation method, and forming method.

  Next, a display panel is formed by arranging a plurality of surface conduction electron-emitting devices manufactured as described above on a substrate. FIG. 42 is a view showing a display panel 5091 including a plurality of such surface conduction electron-emitting devices 5094. In FIG. The plurality of surface conduction electron-emitting devices provided in the display panel are arranged in a matrix, for example, in a matrix of m rows and n columns. Then, based on the image signal (for example, NTSC television signal), the surface conduction electron-emitting device in the display panel is driven to perform television display. For manufacturing the display panel, the method described in JP-A-11-354015 can be applied.

  And the shape of the electroconductive thin film of all the electron-emitting elements contained in a display panel can be made constant by performing the said discharge amount equalization control of this invention. Therefore, if the electron-emitting device of the display panel is manufactured according to the present invention, the conductive thin film constituting the electron-emitting device can be uniformly arranged, so that it is possible to realize a display panel with high image quality.

It is the schematic which shows the structure of one Embodiment of the manufacturing apparatus of a color filter. It is a figure which shows the structure of the control part which controls operation | movement of the manufacturing apparatus of a color filter. It is a figure which shows the structure of the inkjet head used for the manufacturing apparatus of a color filter. It is the figure which showed the voltage waveform applied to the heater of an inkjet head. It is the figure which showed the manufacturing process of a color filter. It is sectional drawing which shows the basic composition of the color liquid crystal display device incorporating the color filter of embodiment. It is sectional drawing which shows the other example of the basic composition of the liquid crystal display device incorporating the color filter of embodiment. It is the figure which showed the information processing apparatus in which a liquid crystal display device is used. It is the figure which showed the information processing apparatus in which a liquid crystal display device is used. It is the figure which showed the information processing apparatus in which a liquid crystal display device is used. It is explanatory drawing explaining the conventional method of reducing the density nonuniformity of each pixel of a color filter. It is explanatory drawing explaining the conventional method of reducing the density nonuniformity of each pixel of a color filter. It is explanatory drawing explaining the conventional method of reducing the density nonuniformity of each pixel of a color filter. It is explanatory drawing explaining the other conventional method of reducing the density nonuniformity of each pixel of a color filter. It is explanatory drawing explaining the other conventional method of reducing the density nonuniformity of each pixel of a color filter. It is the figure which showed the structure of the pixel arrangement | sequence of a color filter. An example of the color filter drawing method of the first embodiment will be described. It is a figure explaining a discharge control circuit configuration. It is a figure explaining the outline at the time of the voltage variation of a drive signal. It is a figure explaining the discharge state before and after discharge amount correction. It is a figure explaining a discharge amount correction sequence. It is the figure which showed the relationship between discharge amount and a drive signal voltage. It is the figure which showed the state before and after implementing discharge amount correction | amendment between nozzles. It is a figure which shows the state of the discharge amount of the head discharge state at the time of uncorrected at the time of color filter drawing. It is a figure explaining the state of the discharge amount at the time of correction | amendment of the use nozzle of a head at the time of color filter drawing. It is a figure which shows the state which manufactures the several color filter from which the magnitude | size of a pixel differs from one glass substrate. It is a figure which shows the state which manufactures the several color filter from which the magnitude | size of a pixel differs from one glass substrate. It is a figure which shows the state which manufactures the several color filter from which the magnitude | size of a pixel differs from one glass substrate. It is a flowchart which shows the Example of the control method of a drawing apparatus. It is a flowchart which shows the other Example of the control method of a drawing apparatus. It is a flowchart which shows the further another Example of the control method of a drawing apparatus. It is a flowchart which shows the further another Example of the control method of a drawing apparatus. It is a flowchart which shows the further another Example of the control method of a drawing apparatus. It is a flowchart which shows the further another Example of the control method of a drawing apparatus. It is a figure which shows the example of a measurement of the adjacent nozzle crosstalk amount of an inkjet head. It is a figure explaining a discharge amount correction sequence. It is a figure which shows an example of a structure of EL element. It is a figure which shows an example of the manufacturing process of EL element. It is a figure which shows the structural example of a surface conduction type electron-emitting device. It is a figure which shows an example of the process of manufacturing a surface conduction electron-emitting device. 1 is an external view of a manufacturing apparatus including a liquid discharge apparatus for manufacturing a surface conduction electron-emitting device. It is a figure which shows an example of the display panel containing a some electron emission element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light transmissive substrate 2 Black matrix 3 Resin composition layer 4 Photomask 5 Non-colored part 8 Protective layer 52 XYθ stage 53 Glass substrate 54 Color filter 55 Colored head 58 Controller 59 Teaching pendant 60 Keyboard 300 Color filter substrate 301 Pixel region 303 Inkjet head 304 Head drive circuit 309 Drive element (bubble jet type heater or piezo type piezoelectric element element)
311 Drawing control control unit 312 Nozzle drive output circuit 313 Voltage control circuit 314 Signal reference voltage 315 Output voltage amplification circuit 316 Output charge / discharge circuit 317 Drive timing signal 318 Data latch signal 319 Image serial data 320 Drive signal pattern generation output circuit 321 Image data Latch output circuit 322 Image data serial / parallel conversion circuit 324 to 329 Driving signal voltage at the time of ejection amount correction
330 to 335 Discharge amount correction sequence 336 Unused nozzle 337 Drawing used nozzle

Claims (16)

A panel manufacturing method for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid,
A determination step of determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in correspondence with the size of the substrate and the resolution of pixels formed by discharging liquid onto the substrate;
Correcting the liquid discharge amount of each nozzle so that the discharge amount of the liquid discharged from each nozzle is constant, using a discharge amount varying means capable of independently changing the liquid discharge amount of each nozzle;
Discharging liquid from the liquid discharge head according to the corrected liquid discharge amount,
While correcting the liquid discharge amount of each nozzle using the discharge amount variable means so as to correct the change in the liquid discharge amount caused by the combination of nozzles and the number of nozzles determined in the determination step,
In the step of discharging liquid from the liquid discharge head onto the substrate, a combination of nozzles used for the liquid discharge operation to one substrate, the number of nozzles used for the liquid discharge operation to one substrate , the ejection timing of liquid from the nozzle, the relative moving direction of the liquid ejection head and the substrate, and, there is a change in at least one to determine the change in the relative movement speed between the liquid ejection head and the substrate If, to compensate for changes in the liquid discharge amount caused by the change, the panel manufacturing method, characterized by correcting the liquid discharge amount of each nozzle with said variable discharge means. A panel manufacturing method for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid,
A determination step of determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in correspondence with the size of the substrate and the resolution of pixels formed by discharging liquid onto the substrate;
Measuring the landing position of the liquid ejected from each nozzle;
Determining a liquid discharge timing of each nozzle based on the measurement result of the landing position;
Using a discharge amount varying means capable of independently changing the liquid discharge amount of each nozzle, the liquid discharge amount of each nozzle is constant so that the liquid discharge amount discharged from each nozzle is constant according to the determined discharge timing. A process of correcting
Discharging liquid from the liquid discharge head according to the corrected liquid discharge amount,
While correcting the liquid discharge amount of each nozzle using the discharge amount variable means so as to correct the change in the liquid discharge amount caused by the combination of nozzles and the number of nozzles determined in the determination step,
In the step of discharging liquid from the liquid discharge head onto the substrate, a combination of nozzles used for the liquid discharge operation to one substrate, the number of nozzles used for the liquid discharge operation to one substrate , the ejection timing of the liquid from the nozzles is determined in the step of determining the ejection timing of each nozzle liquid relative movement direction of the liquid ejection head and the substrate, and, relative to the substrate and the liquid discharge head If there is a change in at least one to determine the change of the moving speed, so as to correct the change of the liquid discharge amount caused by the change, the liquid discharge amount of each nozzle with said variable discharge means A method for manufacturing a panel, comprising: correcting. The liquid is ink;
The panel according to claim 1, wherein the panel includes a color filter manufactured by discharging the ink from the liquid discharge head to a pixel region partitioned by a black matrix on the substrate. Manufacturing method. The liquid is an electroluminescent material;
The panel manufacturing method according to claim 1, wherein the panel includes an electroluminescent element manufactured by discharging the electroluminescent material from the liquid discharge head to a pixel region on the substrate. . The liquid is a conductive thin film material;
The panel manufacturing method according to claim 1, wherein the panel includes an electron-emitting device manufactured by discharging the conductive thin film material onto the substrate from the liquid discharge head. The liquid is a conductive thin film material;
The panel manufacturing method according to claim 1, wherein the panel includes a plurality of electron-emitting devices manufactured by discharging the conductive thin film material from the liquid discharge head onto the substrate. .   2. The discharge amount varying means is configured to change the liquid discharge amount by changing at least one of a voltage value and a pulse width of a drive pulse supplied to each nozzle. The manufacturing method of the panel of any one of thru | or 6. A color filter manufacturing method for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink,
In correspondence with the resolution of the pixels formed by ejecting ink to a size and substrate of the substrate, a determination step of determining a number of combinations and nozzles of the nozzle used in the ink ejection to one of the substrate,
A step of correcting the ink discharge amount of each nozzle so that the discharge amount of ink discharged from each nozzle is constant, using a discharge amount varying means capable of independently changing the ink discharge amount of each nozzle;
And ejecting ink from the inkjet head according to the corrected ink ejection amount,
While correcting the ink discharge amount of each nozzle using the discharge amount varying means so as to correct the change in the ink discharge amount caused by the combination of nozzles determined in the determination step and the number of nozzles,
In the step of ejecting ink from the inkjet head onto the substrate, a combination of nozzles used for the ink ejection operation to one substrate, the number of nozzles used for the ink ejection operation to one substrate, ejection timing of ink from the nozzles, the ink jet head and the relative movement direction of the substrate, and, when there is a change in at least one to determine the change in the relative movement speed of the substrate and the ink jet head, the A method of manufacturing a color filter, wherein the ink discharge amount of each nozzle is corrected using the discharge amount variable means so as to correct a change in the ink discharge amount caused by the change. A color filter manufacturing method for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink,
In correspondence with the resolution of the pixels formed by ejecting ink to a size and substrate of the substrate, a determination step of determining a number of combinations and nozzles of the nozzle used in the ink ejection to one of the substrate,
Measuring the landing position of ink ejected from each nozzle;
Determining ink ejection timing of each nozzle based on the measurement result of the landing position;
Ink discharge amount of each nozzle is set so that the discharge amount of ink discharged from each nozzle is constant according to the determined discharge timing by using a discharge amount varying means capable of independently changing the ink discharge amount of each nozzle. A process of correcting
And ejecting ink from the inkjet head according to the corrected ink ejection amount,
While correcting the ink discharge amount of each nozzle using the discharge amount varying means so as to correct the change in the ink discharge amount caused by the combination of nozzles determined in the determination step and the number of nozzles,
In the step of ejecting ink from the inkjet head onto the substrate, a combination of nozzles used for the ink ejection operation to one substrate, the number of nozzles used for the ink ejection operation to one substrate, the ejection timing of ink from the nozzles is determined in the step of determining the ejection timing of ink of each nozzle, the ink jet head and the relative movement direction of the substrate, and, with the ink jet head relative movement speed of the substrate If there is a change in at least one to determine the changes, so as to correct a change in ink discharge amount caused by the change, correcting the ink discharge amount of each nozzle with said variable discharge means A method for producing a color filter characterized by the above. Preparing a color filter manufactured by the method according to claim 8 or 9,
Encapsulating a liquid crystal compound between the color filter and the counter substrate;
A method for producing a liquid crystal display panel, comprising: Preparing a liquid crystal display panel manufactured by the method according to claim 10;
Connecting the liquid crystal display panel to signal supply means for supplying a signal to the liquid crystal display panel;
A method for manufacturing a device including a liquid crystal display panel. 9. The ink discharge amount changing unit is configured to change the ink discharge amount by changing at least one of a voltage value and a pulse width of a drive pulse supplied to each nozzle. Or the manufacturing method of the color filter of 9. A panel manufacturing apparatus for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid,
Determining means for determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in correspondence with the size of the substrate and the resolution of pixels formed by discharging liquid onto the substrate;
Discharge amount varying means capable of independently changing the liquid discharge amount of each nozzle, the discharge amount for correcting the liquid discharge amount of each nozzle so that the discharge amount of the liquid discharged from each nozzle is constant Variable means,
The discharge amount varying means corrects the liquid discharge amount of each nozzle so as to correct the change in the liquid discharge amount caused by the combination of nozzles determined by the determining means and the number of nozzles,
When ejecting liquid from the liquid ejection head onto the substrate, a combination of nozzles used for the liquid ejection operation to one substrate, the number of nozzles used for the liquid ejection operation to one substrate , the ejection timing of liquid from the nozzle, the relative moving direction of the liquid ejection head and the substrate, and, there is a change in at least one to determine the change in the relative movement speed between the liquid ejection head and the substrate If, to compensate for changes in the liquid discharge amount caused by the change, the variable discharge means manufacturing apparatus of a panel, characterized in that to correct the liquid discharge amount of each nozzle. A panel manufacturing apparatus for manufacturing a panel for a display device by discharging liquid onto a substrate from a liquid discharge head having a plurality of nozzles for discharging liquid,
Determining means for determining a combination of nozzles and the number of nozzles used for discharging liquid onto a single substrate in correspondence with the size of the substrate and the resolution of pixels formed by discharging liquid onto the substrate;
Means for determining the liquid discharge timing of each nozzle based on the measurement result of the landing position of the liquid discharged from each nozzle;
Using a discharge amount varying means capable of independently changing the liquid discharge amount of each nozzle, the liquid discharge amount of each nozzle is constant so that the liquid discharge amount discharged from each nozzle is constant according to the determined discharge timing. A discharge amount varying means for correcting
The discharge amount varying means corrects the liquid discharge amount of each nozzle so as to correct the change in the liquid discharge amount caused by the combination of nozzles determined by the determining means and the number of nozzles,
When ejecting liquid from the liquid ejection head onto the substrate, a combination of nozzles used for the liquid ejection operation to one substrate, the number of nozzles used for the liquid ejection operation to one substrate , the ejection timing of the liquid from the nozzles is determined by means for determining the ejection timing of each nozzle liquid relative movement direction of the liquid ejection head and the substrate, and, relative to the substrate and the liquid discharge head If there is a change in at least one to determine the change of the moving speed, so as to correct the change of the liquid discharge amount caused by the change, the variable discharge means for correcting the liquid discharge amount of each nozzle A panel manufacturing apparatus. A color filter manufacturing apparatus for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink,
In correspondence with the resolution of the pixels formed by ejecting ink to a size and substrate of the substrate, and determining means for determining the number of combinations and nozzles of the nozzle used in the ink ejection to one of the substrate,
Discharge amount variable means capable of independently changing the ink discharge amount of each nozzle, the discharge amount for correcting the ink discharge amount of each nozzle so that the discharge amount of ink discharged from each nozzle is constant Variable means,
The discharge amount varying means corrects the ink discharge amount of each nozzle so as to correct the change in the ink discharge amount caused by the combination of nozzles determined by the determining means and the number of nozzles,
When ejecting ink from the inkjet head onto the substrate, a combination of nozzles used for the ink ejection operation on one substrate, the number of nozzles used for the ink ejection operation on one substrate, ejection timing of ink from the nozzles, the ink jet head and the relative movement direction of the substrate, and, when there is a change in at least one to determine the change in the relative movement speed of the substrate and the ink jet head, the The apparatus for manufacturing a color filter according to claim 1, wherein the discharge amount varying means corrects the ink discharge amount of each nozzle so as to correct a change in the ink discharge amount caused by the change. A color filter manufacturing apparatus for manufacturing a color filter by discharging ink onto a substrate from an inkjet head having a plurality of nozzles for discharging ink,
In correspondence with the resolution of the pixels formed by ejecting ink to a size and substrate of the substrate, and determining means for determining the number of combinations and nozzles of the nozzle used in the ink ejection to one of the substrate,
Means for determining the ink ejection timing of each nozzle based on the measurement result of the landing position of the ink ejected from each nozzle;
A discharge amount varying means capable of independently changing the ink discharge amount of each nozzle, wherein the ink discharge amount of each nozzle is constant so that the discharge amount of ink discharged from each nozzle is constant according to the determined discharge timing. A discharge amount varying means for correcting
The discharge amount varying means corrects the ink discharge amount of each nozzle so as to correct the change in the ink discharge amount caused by the combination of nozzles determined by the determining means and the number of nozzles,
When ejecting ink from the inkjet head onto the substrate, a combination of nozzles used for the ink ejection operation on one substrate, the number of nozzles used for the ink ejection operation on one substrate, the ejection timing of ink from the nozzles is determined by means for determining the ejection timing of ink of each nozzle, the ink jet head and the relative movement direction of the substrate, and, with the ink jet head relative movement speed of the substrate If there is a change in at least one to determine the changes, so as to correct a change in ink discharge amount caused by the change, the variable discharge means, characterized in that to correct the ink ejection amount of each nozzle A color filter manufacturing apparatus.

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