JP2002055220A - Panel for display device, method and device for manufacturing panel for display device, liquid crystal display device having panel for display device, method for manufacturing the liquid crystal display device, device equipped with the liquid crystal display device and method for manufacturing the device, substrate having a plurality of recesses, method and device for manufacturing the substrate, color filter, method and device for manufacturing the color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a panel (color filter, EL element or the like) for a display device by which mixing of a plurality of material can be deceased or suppressed in first recesses to form the display part. SOLUTION: The panel for a display device is manufactured by using a substrate having a first recesses to form the display part and second recesses to form the nondisplay part, with the depth of the second recesses smaller than the depth of the first recesses, and by filling the first recesses of the substrate with the material. In the manufacture of the panel, the material is preliminarily discharged to the second recesses just before the material is discharged to the first recesses.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for manufacturing a panel for a display device such as a color filter or an EL element by an ink-jet method.

[0002]

2. Description of the Related Art In recent years, the development of personal computers,
In particular, with the development of portable personal computers, the demand for liquid crystal displays, especially color liquid crystal displays, has continued to increase. However, for further widespread use, it is necessary to reduce the cost of liquid crystal displays, and in particular, there is an increasing demand for cost reduction of color filters having high specific gravity. Conventionally, various methods have been tried to satisfy the above requirements while satisfying the required characteristics of the color filter, but a method that satisfies all the required characteristics has not yet been established. The respective methods will be described below.

The first method is a pigment dispersion method. According to this method, a photosensitive resin layer in which a pigment is dispersed is formed on a substrate, and a monochromatic pattern is obtained by patterning the photosensitive resin layer. Further, by repeating this step three times, R,
The color filter layers of G and B are formed.

[0004] The second method is a dyeing method. The staining method is
A water-soluble polymer material, which is a material for dyeing, is applied on a glass substrate, and is patterned into a desired shape by photolithography. The obtained pattern is immersed in a dye bath to obtain a colored pattern. This is repeated three times to obtain R, G, B color filter layers.

As a third method, there is an electrodeposition method. In this method, a transparent electrode is patterned on a substrate, and immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, and the like to electrodeposit a first color. This process is repeated three times to separately apply R, G, and B, and then the resin is thermally cured to form a color layer.

As a fourth method, there is a printing method. In this method, a pigment is dispersed in a thermosetting resin, R, G, and B are separately applied by repeating printing three times, and then the resin is thermoset to form a colored layer.
In any of the above methods, a protective layer is generally formed on the colored layer.

The common features of these methods are R,
In order to color the three colors G and B, the same process needs to be repeated three times, which increases the cost. There is also a problem that the yield decreases as the number of steps increases. Further, in the electrodeposition method, since the pattern shape that can be formed is limited, it is difficult to apply the current technology to a TFT type color liquid crystal display. Further, in the printing method, it is difficult to form a fine pitch pattern due to poor resolution and smoothness.

To compensate for these drawbacks, Japanese Patent Application Laid-Open No.
No. 5205, JP-A-63-235901, JP-A-63-294503, or
Japanese Patent No. 217320 discloses a method of manufacturing a color filter using an ink jet method.

FIG. 27 shows a method of manufacturing (coloring) a color filter using the ink jet method. The great advantage of the ink jet method is that the three color heads 55 (red (RED), green (G
REEN) and blue (BLUE) ink can be used to color the colored region (pixel region) on the substrate 1 at a time. In FIG. 27, each head is tilted in order to match the nozzle pitch to be used with the pixel pitch of the color filter. The pixel area is colored by using the nozzles of the head every five nozzles.

[0010]

However, in the case of the ink jet system, if the ink ejection is stopped for a certain period of time (for example, about one minute), water and a solvent, which are volatile components in the ink, evaporate and the ink becomes high in viscosity. It is difficult to stabilize the ink ejection state. In particular, if the time from the suspension of ink ejection to the restart of ink ejection becomes longer, phenomena such as the direction of ink ejection, too much ink ejection, and too little ink ejection occur. The ink ejection operation tends to be more unstable. This phenomenon is particularly likely to occur when a color filter is manufactured by discharging resin-containing ink. Further, when the ink ejection is restarted, the first ink ejection after the restart is particularly unstable, and the ejection tends to be disordered. The first ink, in particular, has poor landing accuracy and tends to increase the ejection amount.

In the case where ink is landed in a concave portion patterned with high definition, such as a color filter, if the ejection direction of the first ink is disturbed, the ink enters adjacent pixels of different colors to cause color mixture. In some cases, a desired color density cannot be obtained due to a change in the ink discharge amount, and density unevenness occurs between pixels.

In order to avoid such a problem, in the ordinary ink jet system, a predetermined area outside the substrate is ejected before ink is ejected to an area (recess) which functions as a display area for displaying information. The preliminary ejection operation is performed at the position. However, in recent years, the color reproduction range of the color filter has been expanded in order to approach the color reproduction range of the NTSC standard or the PAL standard. High viscosity. As a result, the time until the change in the ejection characteristics of the first ink when the ejection is restarted is becoming shorter, and in many cases, the preliminary ejection operation outside the substrate alone is not sufficient.

In order to solve the problem of such an ink jet system, Japanese Patent Application Laid-Open Nos. 9-101410, 10-73712, 10-73709, and the like disclose a method in which a region other than a display area on a substrate is exposed. Area (frame)
Perform a preliminary ejection operation (FIG. 28). Specifically, as shown in FIGS. 29 and 30, the display area is colored by starting the discharge of the ink from the frame portion. In this manner, by performing preliminary ejection to the frame portion before coloring the display area, the ink ejection state at the time of coloring the display area can be stabilized.

In Japanese Patent Application Laid-Open No. 10-186123, preliminary ejection is performed on a substrate. Specifically, in Japanese Patent Application Laid-Open No. 10-186123, before the ink is ejected to the first pixel in the display area, the ink is preliminarily ejected directly on the light shielding portion (BM) which is a peripheral area of the display area. . Accordingly, when the ink is ejected to the first pixel, the ejection state is already stable, and the ink can be ejected to an accurate position.

However, the ink remaining on the light-shielding portion (ink directly adhering to the light-shielding portion) may cause a problem of smoothness of the color filter and a problem of poor coating at the time of forming the protective film. . Further, when removing the remaining ink, the throughput is reduced due to the removal step. Further, in Japanese Patent Application Laid-Open No. H10-186123, ink is preliminarily ejected on a light-shielding portion having ink repellency. In this case, the pre-ejected ink moves freely on the light-shielding portion and color mixing occurs. In some cases. In addition, such a phenomenon can similarly occur in the case of manufacturing an EL element formed by applying a self-luminous material (EL luminescent material) in a concave portion surrounded by a partition provided on a substrate. is there. In the case of an EL element,
It is not a mixture of colors but a mixture of self-luminous materials. Further, the above phenomenon can also occur when a display device panel including a color filter and an EL element, which is formed by discharging a display material into a concave portion on a substrate, is manufactured.

In addition to the above problem, it is desired that the frame portion of the color filter has a sufficient light shielding property.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problem, and stabilizes a state of applying a display material (for example, ink) to a display area and mixes different materials in a pixel area. It is an object of the present invention to provide a manufacturing method and a manufacturing apparatus of a panel for a display device, which can make it difficult to occur.

Another object of the present invention is to provide a display device panel having good flatness, a method for manufacturing a display device panel capable of manufacturing the display device panel, and an apparatus for manufacturing the same.

Another object of the present invention is to provide a liquid crystal display device having the above display device panel, a method of manufacturing the liquid crystal display device, a device having the liquid crystal display device, and a method of manufacturing the device. .

Another object of the present invention is to provide a substrate having a plurality of recesses and constituting a display device panel, and a method of manufacturing the substrate.

Further, according to the present invention, it is possible to stabilize the ejection state when ejecting ink to the display area, reduce the color mixture between pixels of different colors, and provide a sufficient light-shielding property at the frame portion. It is an object of the present invention to provide a color filter, a color filter manufacturing method and a manufacturing apparatus capable of manufacturing the color filter.

Another object of the present invention is to provide a color filter having good flatness, a method and an apparatus for manufacturing a color filter capable of manufacturing the color filter.

[0023]

In order to achieve the above object, the present invention provides a substrate having a plurality of concave portions surrounded by a partition portion, wherein a material to be used for display is applied from a material applying head to the concave portion. Forming a display section by forming a first concave portion for forming a display section used for display and a non-display section not used for display. Preparing a substrate having both a second concave portion and a second concave portion for applying the material from a material application head to the second concave portion on the substrate; A step of forming the display section by applying the material from the material applying head, wherein the height of the partition section surrounding the first concave section and the height of the partition section surrounding the second concave section are substantially equal to each other. The same, Distance from the surface formed by the top to the bottom of the second recess of the partition portion surrounding the recess of,
The distance from the surface formed by the top of the partition surrounding the plurality of recesses to the bottom surface of the first recess is shorter.

According to the present invention, a display device is provided by forming a display portion by applying a material to be used for display from a material application head into the recess of a substrate having a plurality of recesses surrounded by partition portions. Having a first concave portion for forming a display portion used for display and a second concave portion for forming a non-display portion not used for display Moving means for relatively moving the material applying head; and moving the material relative to the second concave portion on the substrate while relatively moving the substrate and the material applying head by the moving means. The material applying head so that the display section is formed by applying the material from the material applying head to the first concave portion on the substrate after applying the material from the applying head. Control means for controlling the moving means, the height of the partition surrounding the first recess and the height of the partition surrounding the second recess are substantially the same; The distance from the surface formed by the top of the surrounding partition to the bottom of the second recess is greater than the distance from the surface formed by the top of the partition surrounding the plurality of recesses to the bottom of the first recess. Is also short.

Further, the present invention is a panel for a display device, which is manufactured by the manufacturing method according to any one of claims 1 to 35.

Further, the present invention is a display device panel having a display section in which a material to be used for display is filled in the concave section of a substrate having a plurality of concave sections surrounded by a partition section, A display portion used for performing display, wherein the first concave portion on the substrate is filled with the material, and a display portion not used for display, and the second concave portion on the substrate is filled with the material. And the height of the partition surrounding the first recess is substantially the same as the height of the partition surrounding the second recess, and is formed by the top of the partition surrounding the plurality of recesses. The distance from the surface to be formed to the bottom surface of the second recess is shorter than the distance from the surface formed by the tops of the partition portions surrounding the plurality of recesses to the bottom surface of the first recess. Things. Further, the present invention provides a liquid crystal display device using a display device panel having a display portion in which a material to be used for display is filled in the concave portion of a substrate having a plurality of concave portions surrounded by partition portions. A display device panel according to any one of claims 59 to 66, and light amount changing means for changing a light amount.

According to the present invention, there is provided a liquid crystal using a display device panel having a display portion in which a material to be used for display is filled in a substrate having a plurality of concave portions surrounded by partition portions. A method for manufacturing a display device, wherein the step of preparing the display device panel according to any one of claims 59 to 66 is integrated with the display device panel and a light amount varying unit that varies a light amount. And a step.

Further, according to the present invention, there is provided a liquid crystal using a display device panel having a display portion in which a material to be used for display is filled in a substrate having a plurality of concave portions surrounded by partition portions. A liquid crystal display device according to claim 72, comprising: a display device; and an image signal supply unit configured to supply an image signal to the liquid crystal display device.
It is characterized by having.

Further, the present invention provides a liquid crystal using a display device panel having a display portion in which a material to be used for display is filled in a substrate having a plurality of concave portions surrounded by partition portions. A device provided with a display device, comprising: a step of preparing a liquid crystal display device according to claim 72; an image signal supply unit for supplying an image signal to the liquid crystal display device; and the prepared liquid crystal display device. And a connecting step.

According to the present invention, there is provided a substrate for forming a display device panel having a plurality of concave portions surrounded by partition portions, the first concave portion being used for displaying, and And a second recess not used.
The height of the partition surrounding the recess and the height of the partition surrounding the second recess are substantially the same, and the height of the partition surrounding the plurality of recesses is changed from the surface formed by the top of the second recess to the bottom of the second recess. A distance from the surface formed by the top of the partition surrounding the plurality of recesses to a bottom surface of the first recess.

Further, the present invention is a method of manufacturing a substrate for forming a display device panel having a plurality of concave portions surrounded by a partition portion, wherein a material of the partition portion is coated on the substrate. And patterning the applied material of the partition portion to form a first concave portion used for displaying and a second concave portion not used for displaying, and The height of the partition surrounding the first recess is substantially the same as the height of the partition surrounding the second recess. The distance to the bottom surface is shorter than the distance from the surface formed by the top of the partition surrounding the plurality of recesses to the bottom surface of the first recess.

Further, the present invention is an apparatus for manufacturing a substrate for forming a panel for a display device having a plurality of concave portions surrounded by a partition portion, wherein a material for the partition portion is coated on the substrate. Forming means for patterning the applied material of the partition portion to form a first concave portion used for displaying and a second concave portion not used for displaying. And the height of the partition surrounding the first recess is substantially the same as the height of the partition surrounding the second recess, and the height of the partition surrounding the plurality of recesses is The distance to the bottom surface of the second concave portion is shorter than the distance from the surface formed by the tops of the partition portions surrounding the plurality of concave portions to the bottom surface of the first concave portion.

[0033] The present invention also provides a color printer by applying ink from an inkjet head to a colored portion in a substrate having a plurality of concave portions surrounded by a partition portion having a property of blocking light. A method for manufacturing a filter, comprising: a substrate having both a first concave portion for forming a colored portion used for display and a second concave portion for forming a non-display portion not used for display. A step of preparing, and after applying ink from the inkjet head to the second recess on the substrate, applying the ink from the inkjet head to the first recess on the substrate to form the colored portion Forming a bottom surface of the second concave portion having a light-shielding property.

According to the present invention, a color portion is formed by applying ink from an ink jet head to the inside of the concave portion of a substrate having a plurality of concave portions surrounded by a partition portion having a property of shielding light. An apparatus for manufacturing a filter, the substrate having both a first concave portion for forming a colored portion used for display and a second concave portion for forming a non-display portion not used for display, Moving means for relatively moving the ink jet head, and moving the ink from the ink jet head to the second recess on the substrate while relatively moving the substrate and the ink jet head by the moving means. Forming the colored portion by applying ink from the inkjet head to the first concave portion on the substrate after the application; Sea urchin, and control means for controlling said moving means and said ink-jet head, the bottom surface of the second recess is characterized in that it has a light shielding property.

According to the present invention, there is provided a color having a colored portion in which a material to be used for display is filled in the concave portion of a substrate having a plurality of concave portions surrounded by a partition portion having a property of shielding light. A filter which is used for performing display and is provided with a colored portion in which a first concave portion on the substrate is filled with the ink; And a non-display portion filled with ink, wherein a bottom surface of the second concave portion has a light-shielding property.

<Operation> In addition to the first concave portion (pixel region) used for display, a concave portion (second concave portion) is provided in a frame portion, and a display material (for example, ink) is reserved in the second concave portion. By discharging, it is possible to stabilize the discharge state when the display material is discharged to the first recess. In addition, since the pre-discharged display material is held in the depression (second concave portion), the display material does not move freely on the frame, and as a result, the first concave portion (pixel region) Mixing of different materials in (mixing colors for ink)
Can be suppressed.

Further, since the bottom surface of the dent (second concave portion) formed in the frame portion is formed by the partition portion, this bottom portion has a light-shielding property, so that the second concave portion also serves as the frame portion. Can work well.

[0038]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

The display device panel (display element) defined in the present invention has a display portion used for display. More specifically, a display device panel includes a color filter including a colored portion or an EL element including a light-emitting portion formed of a self-luminous material, and is a panel used for a display device. It is. In the case of a color filter, a colored portion corresponds to the display portion, and in the case of an EL element, a light-emitting portion corresponds to the display portion.

The color filter defined in the present invention is provided with a colored portion and a base, and is capable of obtaining output light whose characteristics are changed with respect to input light. As a specific example, there is a liquid crystal display device in which light of three primary colors of R, G, B or C, M, Y is obtained from the backlight by transmitting the backlight. Here, the base includes a substrate such as glass or plastic, and also includes a shape other than a plate.

[First Embodiment] In this embodiment, a case where a color filter is manufactured as an example of a display device panel will be described.

FIG. 1 is a schematic diagram showing the configuration of an embodiment of a color filter manufacturing apparatus. In FIG. 1, reference numeral 51 denotes an apparatus mount; 52, an XYθ stage disposed on the mount 51; 53, a color filter substrate set on the XYθ stage 52; 54, a color filter formed on the color filter substrate 53; Denotes an R (red), G (green), and B (blue) ink jet head for coloring the color filter 54, and 56 monitors the coloring state of the color filter (white spots, mixed colors, density unevenness, etc. of the pixels). 58, a controller for controlling the overall operation of the color filter manufacturing apparatus 90; 59, a teaching pendant (personal computer) as a display section of the controller; 60, a keyboard as an operation section of the 59;
Reference numeral 62 denotes a display screen for displaying information.

The head unit having each of the R (red), G (green), and B (blue) ink jet heads is detachably mounted on a support portion of the color filter manufacturing apparatus 90 and rotates in a horizontal plane. It is mounted so that the angle can be adjusted. In addition, on the extension of the XYθ stage 52, a recovery unit for recovering a nozzle discharge failure by sucking ink from the ink discharge nozzles of the inkjet heads 55 (R), 55 (G), 55 (B) of each color. (Not shown) may be arranged. The recovery unit has a cap portion for capping the nozzle.

FIG. 2 is a configuration diagram of a control controller of the color filter manufacturing apparatus 90. Reference numeral 59 denotes a personal computer as an input / output means of the controller 58; 62, a display screen for displaying information such as the progress of manufacturing and the presence / absence of a head abnormality; Keyboard).

Reference numeral 58 denotes a controller for controlling the overall operation of the color filter manufacturing apparatus 90; 65, an interface for transferring data between the personal computer 59 and the controller 58; 66, a CPU for controlling the color filter manufacturing apparatus 90; The ROM 68 stores a control program for operating the CPU 66, and the RA 68 stores abnormality information, information necessary for performing the preliminary ejection operation, and the like.
M and 70 are discharge control units for controlling the ink discharge operation into the recesses on the color filter substrate, 71 is a stage control unit for controlling the operation of the XYθ stage 52 of the color filter manufacturing apparatus 90, and 90 is connected to the controller 58; This shows a color filter manufacturing apparatus that operates according to the instruction.

Next, a discharge amount control system of the ink jet head applied in this embodiment will be described with reference to FIG. In the present embodiment, a head (bubble jet (registered trademark) type head) that generates thermal energy to be applied to the ink by a thermal energy generator (for example, a heater) and discharges the ink using the thermal energy,
A head (piezo-type head) including a piezo element (piezo element) that is displaced by application of electric energy and ejects ink by a pressure change accompanying the displacement.
For example, various ink jet heads can be used.

FIG. 3 shows a configuration of a discharge amount control circuit of the ink jet head. Each nozzle (1ch to N
Serial data 319 for selecting the presence / absence of ink ejection of ch) is sent from the drawing control unit 311 to the drawing data serial / parallel conversion circuit 322. Then, in the drawing data serial / parallel conversion circuit 322, the transmitted serial data 319 is converted into parallel data. The converted parallel data is output to a data latch signal 318 by a drawing data latch output circuit 321.
Is latched based on Thereafter, an ejection drive signal is output from the ejection drive signal output circuit 320 based on the latched data and the drive timing signal 317. The ejection drive signal output here is used for each nozzle (1ch to Nc).
The output is sent to the output charging / discharging circuit 316 of the nozzle driving circuit 304 corresponding to h), and then is supplied to the ejection driving element 309 of the desired nozzle. In the case of a bubble jet type head, a heater corresponds to an ejection driving element, and in the case of a piezo type head, a piezoelectric element corresponds to an ejection driving element.

The nozzle drive circuit 314 is a circuit for controlling the ink discharge amount, and includes a signal voltage control circuit 313, an output voltage amplifier circuit 315, and an output charge / discharge circuit 316. Then, the ink ejection amount is controlled by adjusting the voltage value of the drive signal. Specifically, the signal voltage control circuit 313 receives the information of the voltage setting value from the drawing control unit 311 and sets the driving voltage value to be applied to the ejection driving element in the signal voltage control circuit 313. The output voltage amplification circuit 315 supplies a drive voltage to the output charge / discharge circuit 316 based on the set drive voltage value. And
A drive voltage is supplied from the output charge / discharge circuit 316 to the ejection drive element, and ink is ejected from the nozzles.

As described above, in the present embodiment, a nozzle drive circuit is provided for each nozzle, and the drive voltage value is set for each nozzle by the nozzle drive circuit, so that the ink is independently supplied for each nozzle. The discharge amount can be set variably. FIG. 4 is a diagram showing an example of a drive signal applied to the ejection drive element of the nozzle.
Ink ejection is performed by applying a drive signal as shown in FIG. 4 to the ejection drive element. Although the description has been made above that the ink ejection amount of each nozzle is adjusted by changing the voltage value of the drive signal, the present embodiment is not limited to this. The drive voltage value may be fixed, and the pulse width of the drive signal may be independently changed for each nozzle to adjust the ink ejection amount of each nozzle. Further, changing the drive voltage value and changing the pulse width may be arbitrarily combined, and the ink ejection amount may be controlled under the conditions of this combination. By controlling the amount of ink discharged as described above, the amount of ink discharged from each nozzle can be made substantially the same.

FIG. 5 is a diagram showing a process of manufacturing a color filter. Hereinafter, the color filter 54 will be described with reference to FIG.
Will be described. In the present embodiment, a glass substrate is used as the base. However, a glass substrate is used as long as it has necessary characteristics such as transparency (light transmission) and mechanical strength as a color filter. is not. For example, a plastic substrate may be used.

FIG. 5A shows a substrate having a plurality of concave portions 32 surrounded by a partition portion 2a (for example, a black matrix) having ink repellency. The plurality of concave portions 32 include a first concave portion 32a formed in the display region 35 and a second concave portion 32b formed in the peripheral region (frame portion) 37.
It is composed of As described later, the first concave portion 32a
Is a portion where a colored portion is to be formed for display, while the second concave portion is not used for display and is a portion where preliminary ejection is to be performed. Note that the bottom surface of the pixel region (first concave portion) to which ink is applied is preferably hydrophilic. In the present embodiment, the bottom surface of the first concave portion is a glass substrate and thus has hydrophilicity. Also,
Hereinafter, the black matrix may be referred to as a BM.

The partition 2a (partition) in the present embodiment
Is a member provided to form a concave portion for receiving the ink 14 and to prevent color mixture of inks of different colors between the adjacent concave portions 32. Such a partition is 2a
Can be formed by patterning a photosensitive resin, for example, but the partition 2a can also be used as a black matrix or a black stripe. In that case, a black resin composition may be patterned. The partition 12 may be formed directly on the light-transmitting substrate 1, but may be formed on a substrate on which a layer having another function is formed as necessary, for example, on an active matrix substrate on which a TFT array is formed. Is also good. In any case, the surface on the substrate may be subjected to some surface treatment in order to enhance the diffusibility of the curable ink.

After preparing the substrate 1 having the plurality of concave portions 32 as shown in FIG. 5A, an ink discharging operation for discharging the ink 14 from the ink jet head 55 is started (FIG.
(B)).

Ink 14 applicable in this embodiment
Contains at least a coloring material component and a curing component which is cured by energy application. Here, the application of energy means, for example, performing light irradiation, performing heat treatment, or performing both light irradiation and heat treatment. The ink 14 applicable in the present invention is cured by light irradiation or heat treatment, or a combination thereof,
It can also be called a curable ink. As the curable ink, both liquid ink and solid ink can be used.
As the curing component, a commercially available resin or curing agent can be used, and specifically, an acrylic resin, an epoxy resin, a melamine resin, or the like is suitably used.

As the coloring material, any of dyes and pigments can be used. Dyes include direct dyes, acid dyes,
Reactive dyes, disperse dyes, oil-soluble dyes and the like,
It is not limited to these. These dyes and pigments are preferably used in the ink in the range of 0.1 to 20% by weight. As a compound (curing component) that is cured by applying energy, for example, as a thermosetting compound,
A combination of a known resin and a crosslinking agent can be used. Specifically, melamine resin, hydroxyl or carboxyl group-containing polymer and melamine, hydroxyl or carboxyl group-containing polymer and polyfunctional epoxy compound, hydroxyl or carboxyl group-containing polymer and cellulose reaction type compound, epoxy resin and resol type resin, epoxy Examples include resins and amines, epoxy resins and carboxylic acids or acid anhydrides, and epoxy compounds. As the photocurable compound, a known photocurable material, for example, a commercially available negative resist is suitably used. The above-mentioned compounds may be cured not only by heat or light but also in combination.

Various solvents can be used as the ink used in the present invention. In particular, a mixed solvent of water and a water-soluble organic solvent is preferably used from the viewpoint of dischargeability when used in an ink jet method. As the water, it is preferable to use ion-exchanged water (deionized water). Optional solvent components that can be used in the present invention include, for example, methyl alcohol, ethyl alcohol, n-propyl alcohol, isopropyl alcohol, n-butyl alcohol,
C1-C4 alkyl alcohols such as sec-butyl alcohol and tert-butyl alcohol; amides such as dimethylformamide and dimethylacetamide; ketone or keto alcohols such as acetone and diacetone alcohol; ethers such as tetrahydrofuran and dioxane Polyalkylene glycols such as polyethylene glycol and polypropylene glycol; alkylene groups such as ethylene glycol, propylene glycol, butylene glycol, triethylene glycol, 1,2,6-hexanetriol, thiodiglycol, hexylene glycol and diethylene glycol; Alkylene glycols containing 2 to 6 carbon atoms; glycerin; ethylene glycol monomethyl (or ethyl) ether, diethylene glycol Lower alkyl ethers of polyhydric alcohols such as tri (or ethyl) ether and triethylene glycol monomethyl (or ethyl) ether; N-methyl-2-pyrrolidone, 2-pyrrolidone, 1,3-dimethyl-2-imidazoricinone And aromatic hydrocarbons such as benzene, toluene and xylene; aliphatic hydrocarbons such as hexane, octane and heptane; propylene carbonate. Among the above organic solvents, polyhydric alcohols such as diethylene glycol and lower alkyl ethers of polyhydric alcohols such as triethylene glycol monomethyl (or ethyl) ether are preferable. In order to stably dissolve or disperse the above-mentioned heat or photo-curable compound, ethylene glycol monomethyl (or ethyl)
Ether, diethylene glycol methyl (or ethyl)
Lower alkyl ethers of polyhydric alcohols such as ether and triethylene glycol monomethyl (or ethyl) ether; N-methyl-2-pyrrolidone and 2-pyrrolidone are preferably used. Further, in order to obtain the stability of ink ejection, it is effective to add ethyl alcohol, isopropyl alcohol, or lower alkyl ethers of polyhydric alcohol. This is presumed to be because the addition of these solvents makes it possible to more stably foam the ink on the thin film resistor in the thermal energy type inkjet head. The ink used in the present invention may contain a surfactant, an antifoaming agent, a preservative, and the like in order to have desired properties in addition to the above components, if necessary. Etc. can also be added. For example, as the surfactant, any one that does not adversely affect the storage stability of the ink can be suitably used, and fatty acid salts,
Higher alcohol sulfates, liquid fatty oil sulfates, anionic surfactants such as alkyl allyl sulfonates, polyoxyethylene alkyl ethers,
There are nonionic surfactants such as polyoxyethylene alkyl esters, polyoxyethylene sorbitan alkyl esters, acetylene alcohol, and acetylene glycol, and one or more of these can be appropriately selected and used. Further, in order to maintain the storage stability of the ink, p
Examples of the pH adjuster used when H adjustment is necessary include ammonia, or diethanolamine,
Examples include various organic amines such as triethanolamine, inorganic alkali agents such as hydroxides of alkali metals such as sodium hydroxide, lithium hydroxide and potassium hydroxide, and organic acids and inorganic acids. Further, among the above-mentioned light or thermosetting compounds, a solvent other than water or a water-soluble organic solvent may be used as long as it can be stably ejected even if it is not dissolved in water or a water-soluble organic solvent. In particular, when a curable compound of a type polymerizable by light is used, a solventless type in which a coloring material is dissolved in a monomer can be used.

Thereafter, the inks of R (red), G (green), and B (blue) are applied to the recess 3 using the ink jet head 55.
Discharge into 2. At this time, the ink is preliminarily ejected to the second concave portion 32b, and then the ink is ejected to the first concave portion 32a to form a colored portion in the first concave portion (FIG. 5).
(C)). Note that the ink ejected from the inkjet head may be in the form of drops at the time of attachment to the glass substrate, but it is preferable that the ink be attached not in the form of drops but in a continuously connected state (column shape). In this manner, it is preferable that the ink is attached to the substrate before the ink is separated on the nozzle side, that is, the ejected ink is attached in a columnar shape, because the landing accuracy can be improved and the color mixture can be reduced.

Thereafter, a drying process is performed as necessary, and the ink is cured by light irradiation, heat treatment, or a combination thereof to form a colored portion (pixel portion) 3 (FIG. 5).
(D)). In FIG. 5D, the height (film thickness) of the colored portion 3 is lower than the height of the partition portion 2a, but is not limited thereto. The height of the partition 2a may be substantially the same. From the viewpoint of flattening the surface of the colored portion, the thickness of the colored portion 3 (the length from the bottom surface 172 to the surface 174 of the colored portion 3) is determined by the height of the partition 2a (from the bottom 178 to the top of the partition 2a). Is preferably 20 to 80% of the above (length). Further, in order to make the surface of the colored portion flatter, 40 to 60%
It is preferable that

Thereafter, if necessary, a protective film (protective portion) 8
Is formed (FIG. 5E). As the protective layer 8, a resin composition that is cured by light irradiation or light irradiation and heat treatment is preferably used, has transparency as a color filter, and is subsequently processed, for example, an ITO film forming process.
Any material that can withstand the alignment film forming process or the like can be used. Further, in the present invention, the protective film 8 may not be provided.

FIGS. 6 and 7 are sectional views showing the basic structure of a color liquid crystal display device 30 incorporating a color filter according to the present invention. 11 is a polarizing plate, 1 is a substrate such as glass, 2a is a partition, 3 is a colored portion, 8 is a protective layer, 16 is a common electrode, 17 is an alignment film, 18 is a liquid crystal compound, 19 is an alignment film, and 20 is a pixel electrode. , 22 are polarizing plates, and 23 is backlight light. Numeral 54 denotes the above color filter, and numeral 24 denotes a counter substrate.

The color liquid crystal display device (color liquid crystal display) according to the present invention is formed by combining the color filter substrate 1 according to the present invention with the counter substrate 21 and enclosing the liquid crystal compound 18. A TFT (Thin Film Transistor) (not shown) and a transparent pixel electrode 20 are formed in a matrix inside one substrate 21 of the liquid crystal display device. Further, inside the other substrate 1, a color filter 54 is provided so that RGB color materials are arranged at positions facing the pixel electrodes, and a transparent counter electrode (common electrode) 16 is formed on the entire surface. Is done. Black matrix 2
Are usually formed on the color filter substrate 1 side (see FIG. 6), but are formed on the opposite TFT substrate side in a BM (black matrix) on-array type liquid crystal panel (see FIG. 7). Further, an alignment film 19 is formed in the planes of both substrates, and the rubbing treatment can align the liquid crystal molecules in a certain direction. Polarizing plates 11 and 22 are provided outside the respective glass substrates.
Is adhered, and the liquid crystal compound 18 fills the gap (about 2 to 5 μm) between these glass substrates. In addition, a combination of a fluorescent lamp (not shown) and a scattering plate (not shown) is generally used as the backlight, and the display is performed by making the liquid crystal compound function as an optical shutter that changes the transmittance of the backlight light. I do. Note that the liquid crystal compound has a function of varying the amount of light emitted to the color filter, and thus can be said to be a light amount varying unit.

FIG. 8 is a block diagram showing a schematic configuration when the above-mentioned liquid crystal display device is applied to an information processing device having functions as a word processor, a personal computer, a facsimile device, and a copying device.

In the figure, reference numeral 1801 denotes a control unit (image signal supply means) for controlling the entire apparatus, which includes a CPU such as a microprocessor and various I / O ports, and outputs control signals and data signals to each unit. The control is performed by inputting a control signal or a data signal from each unit. Reference numeral 1802 denotes a display unit, on which various menus, document information, image data read by the image reader 1807, and the like are displayed. Reference numeral 1803 denotes a transparent pressure-sensitive touch panel provided on the display unit 1802, and the surface of the display unit 1802 is pressed by a finger or the like.
02, an item input, a coordinate position input, and the like can be performed.

Reference numeral 1804 denotes an FM (Frequency Modulation) sound source unit which stores music information created by a music editor or the like as digital data in the memory unit 1810 or the external storage device 1812, and reads out the FM information from the memory or the like to read the FM information.
The modulation is performed. The electric signal from the FM sound source unit 1804 is converted into an audible sound by the speaker unit 1805.
The printer unit 1806 is used as an output terminal of a word processor, a personal computer, a facsimile machine, and a copying machine.

Reference numeral 1807 denotes an image reader unit for reading and inputting original data photoelectrically, which is provided in the original transport path and reads various originals such as facsimile originals and copy originals.

Reference numeral 1808 denotes facsimile transmission of original data read by the image reader unit 1807, and facsimile (F) for receiving and decoding the transmitted facsimile signal.
AX), and has an external interface function. Reference numeral 1809 denotes a telephone unit having various telephone functions such as a normal telephone function and an answering machine function.

A ROM 1810 stores a system program, a manager program, other application programs, a character font, a dictionary, and the like, an application program and document information loaded from an external storage device 1812, and a memory including a video RAM and the like. Department.

Reference numeral 1811 denotes a keyboard for inputting document information and various commands.

Reference numeral 1812 denotes an external storage device using a floppy (registered trademark) disk or a hard disk as a storage medium. The external storage device 1812 stores document information, music or voice information, user application programs, and the like.

FIG. 9 is a schematic overview of the information processing apparatus shown in FIG.

In the figure, reference numeral 1901 denotes a flat panel display using the above-mentioned liquid crystal display device, which displays various menus, graphic information, document information and the like. By pressing the surface of the touch panel 1803 with a finger or the like on the display 1901, coordinate input and item designation input can be performed. A handset 1902 is used when the device functions as a telephone. Keyboard 190
3 is detachably connected to the main body via a cord,
Various document functions and various data inputs can be performed. The keyboard 1903 has various function keys 1904.
Etc. are provided. 1905 is an external storage device 1812
This is the slot for the floppy disk.

Reference numeral 1906 denotes a paper placing portion on which a document to be read by the image reader portion 1807 is placed, and the read document is discharged from the rear of the apparatus. In the case of facsimile reception or the like, printing is performed by the inkjet printer 1907.

When the information processing apparatus functions as a personal computer or a word processor, various information input from the keyboard unit 1811 is processed by the control unit 1801 according to a predetermined program, and the
The image is output to an image 806.

When functioning as a receiver of a facsimile apparatus, facsimile information input from a facsimile transmission / reception unit 1808 via a communication line is received and processed by a control unit 1801 according to a predetermined program.
Is output as a received image.

When functioning as a copying apparatus, an original is read by an image reader 1807, and the read original data is sent to a printer 18 via a controller 1801.
06 is output as a copy image. When functioning as a facsimile receiver, the image reader unit 1
The original data read by 807 is transmitted to control unit 180.
After transmission processing according to a predetermined program by 1
The data is transmitted to the communication line via the FAX transmitting / receiving unit 1808.

The information processing apparatus described above may be of an integrated type having a built-in ink jet printer as shown in FIG. 10. In this case, the portability can be further improved. In the figure, parts having the same functions as those in FIG. 9 are denoted by the corresponding reference numerals. A device having a display device as described above first prepares a color filter according to the present invention, and then fills a liquid crystal compound between the prepared color filter and a counter substrate to produce a display device,
Finally, it is manufactured by connecting an image signal supply means to the display device.

Next, the pre-discharge operation for the substrate and the pre-discharge recess (second
Will be described. The present embodiment is characterized in that a depression (recess) is provided in a light-shielding portion (frame portion) in a region around the display region, and preliminary discharge is performed in the depression. It is also characterized in that the bottom surface of the recess has a light shielding property. This will be described in detail with reference to FIGS. The portion where the preliminary ejection has been performed is a non-display portion.

FIG. 11 is a view showing the substrate 1 having a plurality of concave portions 32 surrounded by the partition 2a (for example, BM), and shows a state before coloring. Note that FIG.
FIG. 11A is a top view of the substrate as viewed from above, and FIG.
FIG. 12 is a sectional view taken along line AA of FIG. FIG. 12 shows a state in which ink is ejected onto the substrate of FIG. 11, and shows a state in which coloring is being performed. FIG.
FIG. 12A is a top view of the substrate viewed from above, and FIG.
FIG. 13 is a cross-sectional view taken along a line AA in FIG. FIG. 13 shows a state after coloring, and shows a state where the color filter is completed. 11A and 12A, the bottom of the second recess 32 is indicated by 2c, and the bottom 2c is formed by the partition 2a. As described above, both 2a and 2c indicate the same member, but here, for the sake of simplicity, the same members (partitions) are given different symbols (2a and 2c).

In FIG. 11, reference numeral 1 denotes a glass substrate, and 2a denotes a partition (partition) for forming the concave portion 32. 3
Reference numeral 2 denotes a concave portion surrounded by the partition portion 2a, and includes a first concave portion 32a and a second concave portion 32b. The first concave portion 32a is used for display, and the display portion (colored portion)
The second concave portion 32b is not used for display but is a portion for forming a non-display portion. The first concave portion 32a functions as a region representing a color, and each of the first concave portions is formed with a colored portion of RGB.
The second recess 32b functions as a preliminary ejection area. At the bottom of the second concave portion, a partition (BM) having a thickness that can function as a light shielding portion is formed. Therefore, the depth of the second recess is smaller than the depth of the first recess. Incidentally, such a second concave portion forming method will be described later. Reference numeral 35 denotes a display area having a plurality of display units used for display. Reference numeral 37 denotes a peripheral region (frame portion) which is a peripheral region of the display region 35, and a light shielding portion is formed in this peripheral region. The second recess formed in the peripheral region 37 is a non-display portion that is not used for display.

Normally, in an ink jet head, when the ink is continuously discharged, the discharge amount of the ink from each nozzle is stable. However, once the ejection of the ink is suspended, the ejection amount of the ink when the ejection is restarted due to the effect of the ink drying and thickening in the nozzle may be unstable, or the ejection direction may be disturbed. is there. Specifically, when the ink ejection is paused for several minutes, the ink ejection is not stabilized from the first few shots to dozens of shots when the ejection is restarted thereafter, and depending on the type of ink, it is only stopped for several tens of seconds. However, the ejection of ink may not be stable. If the ink ejection state is not stable when coloring the first recess 32a, color mixing occurs in the first recess, resulting in a defective color filter.

Therefore, in the present embodiment, FIG.
As shown in FIG. 2B, before the ink is ejected into the first recess 32a, the ink is ejected toward the second recess formed in the light shielding portion around the display area 35.
Note that the ink ejection operation to the second concave portion is not a formation of a colored portion, but is a preliminary ejection operation simply performed to stabilize an ink ejection state. . By performing the preliminary ejection to the second recess as described above, the ink in the nozzle is refreshed, so that the ejection state when the ink is ejected to the first recess 32a can be stabilized. . Since the second concave portion is not used for display and serves as the non-display portion 39, there is no problem even if ink of a plurality of colors is preliminarily ejected and mixed in the second concave portion. In addition, it is preferable that the above-described preliminary ejection operation for the second recess is performed until the ink ejection state is stabilized. In addition, the number of times of the preliminary ejection operation and the length of time for executing the preliminary ejection operation may be appropriately determined according to the type of ink to be used, the ejection aperture, the ejection method, and the like. For example, when using highly viscous ink or when performing ink discharge in a system where the discharge state deteriorates immediately, the number of preliminary discharge operations may be increased,
What is necessary is just to lengthen the length of time for performing the preliminary ejection operation,
On the other hand, when ink with low viscosity is used or when ink is ejected in a system in which the ejection state is not significantly deteriorated, the number of times of the preliminary ejection operation is reduced or the length of time for performing the preliminary ejection operation is reduced. Should be shortened.

In the present embodiment, the size of the preliminary ejection area is preferably designed to be able to eliminate the ejection instability that occurs at the start of the ejection of the ink jet.
For this purpose, it is preferable that the size is large enough to accept the total discharge amount until the discharge amount becomes stable. Further, it is preferable that the size is large enough to accept the displacement amount of the ink landing position due to the disturbance of the ejection direction. However, these are influenced by many conditions such as the performance of the inkjet head to be used, the distance between the inkjet head and the substrate, the idle time during which no ejection is performed, the temperature and humidity environment of the clean room, and the characteristics of the ink to be used. It is preferable to experimentally determine the size according to the use conditions, production conditions, and the like.
In addition, the color filter tends to narrow the frame portion in order to expand its display area year by year, and in consideration of this, it is preferable to form the preliminary discharge area as small as possible.

The non-display portion 39 formed by the preliminary ejection of a plurality of colors of ink into the second concave portion (preliminary ejection region) 32b is not a portion for displaying RGB colors but information. It is not a display part. Further, the non-display portion 39 is a portion corresponding to a frame of the color filter.
Since M is provided, the portion is not visible on the display panel (screen) of the liquid crystal display device. Therefore, the non-display portion 39 may have any color. In addition, since the non-display portion is a portion that cannot be seen by the user, there is no need to intentionally mix the RGB inks to form the black non-display portion.

Further, in this embodiment, the optical density of the bottom 2c of the second concave portion is set to have an optical density required for the light shielding portion. If the optical density at the bottom is low, the backlight may wrap around from this portion, which is not preferable from the viewpoint of user visibility. That is, the bottom of the second recess is
It is preferable to have a sufficient light-shielding function.

The present embodiment is characterized in that the preliminary ejection area is formed in a concave shape. If the ink is preliminarily ejected on the light-shielding portion around the display area as in the above-mentioned Japanese Patent Application Laid-Open No. 10-186123, the pre-ejected ink 151 moves freely on the light-shielding portion and causes color mixing. (FIG. 14). In FIG. 14, the R pre-discharge ink 151 enters the G colored portion and the B colored portion, and color mixing occurs. On the other hand, in the present embodiment, as shown in FIG. 12, since the pre-discharged ink fills the recesses, the pre-discharged ink does not move freely on the light shielding portion.

Further, if the preliminary ejection is performed on the light-shielding portion around the display area, the smoothness becomes insufficient. This will be described below with reference to FIG.
FIG. 15 is a cross-sectional view of a liquid crystal display device formed by filling the liquid crystal compound 18 between the color filter 54 and the opposing substrate 24. Is attached. Further, a protective layer for flattening the surface and protecting the colored portion is formed on the light shielding portion and the colored portion.

As shown in FIG. 15, when the pre-discharged ink 151 adheres to the surrounding light-shielding portion, the pre-discharged ink portion rises as compared with the surface of the coloring portion 3 or the top 164 of the BM. If the protective layer is formed in such a state, the protective layer on the preliminary ejection ink 151 rises as compared with other portions, and the surface of the protective layer is hardly flattened. (FIG. 15
A portion 160 having poor flatness is generated as shown in FIG. If the surface of the protective layer is not flattened, it becomes difficult to hold the color filter and the counter substrate in parallel. As described above, it is preferable that the surface of the protective layer of the color filter has smoothness. However, if the preliminary ejection ink adheres to the light-shielding portion as described above, the surface smoothness is reduced. It will be insufficient.

On the other hand, in the present embodiment, as shown in FIG. 12, since the ink is preliminarily ejected into the concave portion provided in the light-shielding portion in the peripheral region, the preliminary ejection is performed in comparison with the surface of the coloring portion 3 and the top 164 of the BM. The ink does not swell. As a result, when the protective layer is formed, the surface of the protective layer is easily flattened, and the color filter and the counter substrate are easily held in parallel. Further, by adjusting the amount of ink to be preliminarily ejected to the concave portion, it is possible to further planarize the ink. By performing the preliminary ejection in the concave portion, the surface of the color filter has smoothness.

After the preliminary discharge operation is performed as described above, ink is discharged to each of the first concave portions to form each colored portion. FIG. 13 shows the color filter thus colored. In FIG. 13, the colored portions 3 of RGB are shown.
Are formed in a stripe shape. In addition, a non-display portion is formed by ink of three colors of RGB preliminarily ejected into the second concave portion. Note that the colored portion is a portion for allowing the user to visually recognize the color and is also a portion for displaying information, and thus can be referred to as a display portion.

Next, a method for manufacturing a substrate having both the first concave portion and the second concave portion will be described. In the present embodiment, the first concave portion and the second concave portion are formed by patterning the material of the partition portion applied on the substrate. Hereinafter, a forming process in the case where both the first concave portion and the second concave portion are formed by patterning by photolithography will be described with reference to FIGS.

Step (a) A non-alkali glass substrate (trade name # 1737) manufactured by Corning and having a thickness of 0.7 mm was prepared as a substrate, and I
After the formation of the TO transparent electrode, the material of the partition is applied. Here, a black photosensitive resin composition 421 was used as a material of the partition portion, and this was applied on a substrate. Specifically, the prepared glass substrate is subjected to alkaline ultrasonic cleaning using a 2% aqueous sodium hydroxide solution, and then subjected to UV ozone treatment, and then a carbon black-containing resist material is formed to a thickness of 1 μm using a die coater. Was applied as follows. As the resist material usable here, a positive photosensitive resin having a property of being solubilized by irradiation with a light beam is preferable. As a positive photosensitive resin, for example,
A compound containing a compound containing an inorganic salt or an organic salt of a diazo compound or a compound containing quinonediazite, etc. mixed with a suitable polymer binder (for example, a novolak resin), or a compound obtained by bonding a compound containing a quinonediazide to a suitable polymer binder (For example, naphthoquinone-1,2-diazide-5-sulfonic acid ester of phenol novolak resin) and the like.

Various methods such as a spin coater, a die coater, and a dip coat can be used as a coating method. The thickness of the coating film is a thickness required from cell characteristics, and is preferably about 1 μm. As the substrate, a glass substrate having transparency as in the present embodiment is often used, but a plastic film or a plastic sheet can also be used. If necessary, a thin film for improving the adhesion may be formed on the transparent substrate in advance to improve the adhesion between the transparent substrate and the black matrix or between the transparent substrate and the ink.

In the above description, a black photosensitive resin composition is used as a material of the partition portion, but a black non-photosensitive resin composition may be used. In addition, when the ink is applied by an inkjet method, it is preferable to improve the water repellency of the partition portion. For this reason, it is preferable to use a resin having a group which is easily decomposed in a subsequent step such as a methyl group in a side chain of the resin. . Such a material is usually a material that requires a heat treatment to form a black matrix also serving as a partition (partition). During this heat treatment, a water-repellent agent, unreacted substances (for example, a photoinitiator or a monomer component), and a silane coupling agent added to improve the adhesion to the substrate from the black matrix material also serving as a partition. -Since the organic solvent or the like as the solvent evaporates, the water repellency of the region (pixel region, concave portion) between the black matrices also serving as the partitioning portion increases, and the wettability of the ink deteriorates.

The black photosensitive resin composition contains a black pigment or dye and a photosensitive material, and may further contain a non-photosensitive resin if necessary. When the composition is applied to a substrate, it is dispersed in a solvent composed of a low-boiling organic solvent and a high-boiling organic solvent. As the black pigment, carbon black, black organic face, or the like can be used. Further, as the photosensitive material, UV resist, DEEP-U
It can be appropriately selected and used from a V resist and an ultraviolet curable resin. As a UV resist,
A positive resist such as a novolak resin-diazonaphthoquinone resist can be used. Also, DEEP-
Examples of the UV resist include positive resists such as radiation-decomposable polymer resists such as polymethyl methacrylate, polystyrene sulfone, polyhexafluorobutyl methacrylate, polymethyl isopropenyl ketone, and brominated poly 1-trimethylsilylpropyne; Dissolution inhibitor-based positive resists such as nitrobenzyl esters can be mentioned. The UV-curable resin includes one or more photopolymerization initiators selected from benzophenone and its substituted derivatives, benzoin and its substituted derivatives, acetophenone and its substituted derivatives, and oxime compounds such as benzyl. And about 2 to 10% by weight of polyester acrylate, epoxy acrylate and urethane acrylate. Further, in order to enhance the water repellency of the black matrix also serving as the partition, a water repellent may be added to the black matrix also serving as the partition.

Step (b) The applied black photosensitive resin layer is temporarily cured by using a heating device such as a hot plate, and then exposed to light having a wavelength matching the sensitivity of the photosensitive resin composition. Exposure is performed using an apparatus and an exposure mask having a predetermined pattern. Here, a DEEP-UV exposure apparatus is used, and the first
Using a predetermined pattern mask for forming the concave portion of
Exposure was performed at an exposure amount of 300 mJ / cm ² . The temporary curing was performed at 80 ° C. for 180 seconds.

This step (b) is an exposure step performed to form the first concave portion, and the exposure is performed at an exposure amount necessary for forming the first concave portion. In addition, the exposure amount required for forming the first concave portion is 100 mJ / cm ^{2 to} 500 mJ /
cm ² , preferably 200 mJ / cm ^{2 to} 400 mJ / c
m ² .

Step (c) After the exposure in the step (b), a part of the frame portion is
In order to make the concave part, a predetermined pattern as shown in FIG.
Is disposed, and then the step (b) is performed.
Conditions where the amount of light has a lower transmittance than the irradiation conditions
(50mJ / cm ^TwoExposure (dummy exposure)
Do. That is, when forming the second concave portion, the first concave portion is formed.
Exposure with a smaller exposure than when forming the part
Because Exposure with such a small amount of exposure
More concave part where the photosensitive resin layer remains at the bottom
And this becomes the second concave portion. Thus, the second concave
Since the bottom of the portion is a black photosensitive resin layer (BM),
The two concave portions can have a light shielding property.

This step (c) is an exposure step performed to form the second concave portion, and the exposure amount when forming the second concave portion is larger than the exposure amount when forming the first concave portion. Reduce. The exposure amount necessary for the formation of the second ^{recess, 10mJ / cm 2 ~100mJ / cm} 2, preferably ^{30mJ / cm 2 ~70mJ / cm 2} .

Step (d) After the exposure in the steps (b) and (c), a developing step of immersing in a developing solution and removing the exposed portion of the resin layer is performed. As a result, the unexposed portion remains as a black matrix pattern also serving as a partition. That is, as shown in (d), the first concave portion (pixel region) having a light-transmitting bottom portion.
Thus, a second concave portion (preliminary discharge region) having a light shielding property at the bottom is formed. Thereafter, rinsing is performed to wash away the developer. Here, development was performed using a developing solution of an aqueous inorganic alkali solution using a spin developing machine, followed by rinsing with pure water to completely remove the developing solution.

Step (e) A heat-drying treatment (post-baking) is performed in order to fully cure the black matrix also serving as a partition portion, thereby forming a black matrix pattern. Here, the main curing is
Almost evaporates the solvent component in the black matrix,
This refers to the process of firmly adhering the black matrix to the substrate surface. The main curing was performed at 220 ° C. for one hour.

Step (f) Thereafter, a surface modification treatment for modifying the surface (glass surface) of the region (pixel region, concave portion) surrounded by the black matrix is performed. It is to be noted that performing this surface modification treatment is not essential, but is preferable. This surface modification treatment is preferably performed immediately before ink application.

In the above description, a photosensitive resin composition containing a black pigment or dye and a photosensitive material has been described as an example, but a non-photosensitive resin containing a black pigment or dye and a non-photosensitive resin has been described. Compositions can also be used. This black non-photosensitive resin composition is dispersed in an appropriate solvent when applied to a substrate. Usable non-photosensitive resins include:
For example, polyimide, acrylic acid monomer, urethane acrylate and the like can be mentioned. In this case, the step of forming a black matrix pattern that also serves as a partition portion includes:
As in the case of using the above-mentioned photosensitive resin composition, after forming a coating film of about 1 μm of a black non-photosensitive resin composition on a substrate, using a photoresist as a mask, the black matrix material is etched. Thus, a pattern can be formed. Alternatively, a pattern may be formed by lift-off using a photoresist.

By performing the steps (a) to (f) as described above, the first recess formed in the display area and having a light-transmitting bottom and the frame is formed, and the bottom is formed of a light-shielding material. The manufacture of the substrate having both the second concave portions having the above structure is completed. Further, as described above, by making the exposure amount when forming the first concave portion different from the exposure amount when forming the second concave portion, the first concave portion and the second concave portion having different depths are formed. Can be formed. In the present embodiment, the exposure amount when forming the second concave portion is made smaller than the exposure amount when forming the first concave portion, so that the second concave portion having a depth smaller than the depth of the first concave portion. Is formed. Here, the depth of the first recess refers to the partition (B) surrounding the plurality of recesses.
M) is the distance from the surface formed by the top to the bottom of the first recess, and the depth of the second recess is
The distance from the surface formed by the top of the partition (BM) surrounding the plurality of recesses to the bottom surface of the second recess.

Next, while the substrate and the ink jet head are relatively moved, ink is ejected and colored toward the substrate provided with the partition portion, as shown in FIGS.
This will be described with reference to FIG. FIG. 17 is a flowchart showing the color filter coloring process. FIGS. 18 and 19 show the preliminary discharge region (second concave portion) 32b and the display region region 35.
FIG. 3 is a diagram showing a positional relationship of FIG. In the present embodiment,
While the stage on which the substrate is placed and the inkjet head are relatively scanned once or a plurality of times, ink is ejected into the first concave portion to form each colored portion. At this time, before the coloring of the concave portion located at the end of the first concave portion of the display region is started, the ink is appropriately discharged to the second concave portion (preliminary discharge region).

First, in step S1 of FIG. 17, the color filter substrate 53 is set on the XYθ stage 52 of the color filter manufacturing apparatus 90, and positioning is performed. In this embodiment, a color filter substrate as shown in FIGS. 18 and 19 is used. That is, it is a substrate that can take many color filters from one color filter substrate. In FIGS. 18 and 19, the size of the substrate is 36.
This shows a case of 0 mm × 460 mm, and if a 10-inch size color filter is used, four color filters 54 a, 54 b, 54 c, and 54 d can be formed therein. In the present embodiment, the display area 35 including the preliminary discharge area (second concave section) 32b and the first concave section (display section) that functions as a color filter.
And a substrate having both of them.

Next, in step S2, the color filter substrate 53 and the ink jet head 120 are relatively moved, and the preliminary discharge area 32b (32b
-(A)) The inkjet head 55 is positioned directly above. This relative movement may be performed by moving the XYθ stage 52 or may be performed by moving the inkjet head.

Next, in step S3, the preliminary ejection area 32b (32b-
(A) Ink is ejected (preliminary ejection step).
In addition, the positional relationship between the display section functioning as a color filter and the preliminary ejection area outside the display area having the display section may be formed only on one side of the display area 35 as shown in FIG. 19 may be formed on both sides of the display area 35 as shown in FIG. In any case, in the present embodiment, immediately before coloring the first concave portion, the preliminary discharge is performed on a region (preliminary discharge region 32b) on the color filter substrate that does not function as a color filter. This is for shortening the time from when the preliminary ejection is performed to when the first concave portion is colored. Instability of ink ejection caused by a reduction in the time from the preliminary ejection to the coloring of the first concave portion, resulting in an increase in the time from the suspension of the ink ejection to the resumption of the ejection. Can be reduced, and the ink ejection state can be stabilized at all times when the first concave portion is colored.

After performing the preliminary ejection operation in step S3, in step S4, while relatively moving the color filter substrate 53 and the ink jet head 55, the ink is ejected from the ink jet head to the substrate to form a plurality of ink jet heads. The first recess is colored. This step S4
Then, the relative movement between the substrate and the head is performed once. That is, the substrate is relatively scanned with respect to the head from the position 32b- (A) to the position Y2 in FIG.
Thereafter, the process proceeds to step S5. In step S5,
It is determined whether the head and the substrate have been moved relative to each other a predetermined number of times. If it is determined that the color filter substrate has been moved a predetermined number of times, the process proceeds to step S6, and the coloring of the color filter substrate ends. On the other hand, if it has not been moved the predetermined number of times in step S5, the process returns to step S2,
The steps after step S2 are repeated. That is, this time, since the head is located at Y2, the head and the substrate are relatively scanned in the direction of Y1, so that the head is directly above the preliminary ejection area 32b (32b- (B)). The preliminary ejection is performed on the preliminary ejection region 32b (32b- (B)), and thereafter, the first concave portion is colored.
As can be seen from the above, in the odd relative scans such as the first, third, etc., 32b- (A) or 32b-
While the preliminary ejection is performed for the preliminary ejection region of (C), in the second, fourth, etc., even-numbered relative scans, 3
Preliminary ejection is performed for the preliminary ejection region 2b- (B) or 32b- (D). Since the preliminary ejection is performed each time the scanning is performed once, the ejection stability does not decrease due to the pause between the scans. In the odd-numbered relative scan, the head is moved Y1 with respect to the substrate.
The head moves in the direction from Y2 to Y1 relative to the substrate in the even-numbered relative scan, while the head moves in the direction from Y2 to Y2.

Note that the timing and position at which the preliminary ejection is performed in step S3 are not limited to the above-described timing and position. In step S3, FIG.
Although it has been described that the preliminary ejection operation is performed at the position shown in FIG. 8, in this embodiment, the preliminary ejection may be performed at the position shown in FIG. That is, preliminary ejection may be performed on both sides of the display area 35 as shown in FIG. In this case, the following steps are sequentially performed during one scan. A step of performing preliminary discharge to the preliminary discharge area 32b- (A), a step of performing ink discharge to the first concave portion of the color filter 54a, and a step of performing preliminary discharge to the preliminary discharge area 32b-
(E) Preliminary ejection step, preliminary ejection area 32b
(F) Pre-discharge step, color filter 54b
The step of ejecting ink to the first concave portion and the step of carrying out preliminary ejection to the preliminary ejection region 32b- (B). By performing preliminary ejection on both sides as shown in FIG. 19, the ink ejection state can be further stabilized.

By performing the preliminary ejection operation in this manner, even if the ejection amount is unstable or the ejection direction is unstable at the start of ink ejection, the ejection state is stabilized when coloring the display area. Therefore, a color filter having no color mixture and having a uniform color density can be manufactured.

FIG. 20 shows the second concave portion (preliminary discharge region) 3
FIG. 5 is a diagram illustrating a relationship between an interval L1 between landing positions of a plurality of inks ejected to a second recess and an interval L2 between landing positions of a plurality of inks ejected to a first recess. In FIG. 20, there is a relationship of L1 = L2, and both when discharging ink to the preliminary discharge region and when discharging ink to the display region,
It is only necessary to eject ink at the same ejection interval (ejection timing), and ink ejection control is simple. Note that this discharge condition is referred to as a first discharge condition.

On the other hand, as shown in FIG. 21, the distance L1 between the landing positions of the plurality of inks ejected to the second recess (preliminary ejection area) 32b and the distance between the plurality of inks ejected to the first recess It is also conceivable to perform the ejection operation under the ink ejection condition (second ejection condition) such that the relationship with the interval L2 between the landing positions satisfies L1 <L2. That is, if the ink is ejected under the ink ejection condition that satisfies the relationship of L1 <L2, the ink can be ejected at a high density to the preliminary ejection area,
A large amount of ink can be ejected to the preliminary ejection area. This ejection method is very effective when, for example, high-viscosity ink is ejected and a large amount of ink needs to be ejected in advance. In addition, the narrower the interval between the landing inks in the preliminary ejection area, the more the number of landing inks per unit length can be increased, so that the preliminary ejection area can be reduced. In other words, tentatively, 10 inks are generated at 10 μm intervals,
It is assumed that the ejection has been performed on a preliminary ejection region having a length of X μm. Here, if the interval is changed to 5 μm, the length of the preliminary ejection area is X / 2 μm. By thus narrowing the interval between the landing positions of the ink in the preliminary ejection region, the preliminary ejection region can be reduced, and the area of the frame portion can be reduced. As described above, the display area of the color filter tends to increase year by year, and therefore, it is very effective to reduce the frame portion. The interval between the ink landing positions can be narrowed by shortening the interval between the ink ejection timings (ink ejection interval). As described above, by shortening the interval between the ink ejections in the preliminary ejection region or by narrowing the interval between the landing positions of the ink, the preliminary ejection region can be reduced. In addition, even when a large amount of ink needs to be preliminarily ejected, it can be dealt with by shortening the ink ejection interval or narrowing the interval between the ink landing positions. Performing the ink ejection under the above-described ejection conditions as shown in FIG. 21 can reduce the frame portion and can preliminarily eject a large amount of ink. Is the way.

Further, as shown in FIG. 22, the ink discharge amount M1 per discharge when discharging to the second concave portion (preliminary discharge region) 32b and the ink discharge amount M1 when discharging to the first concave portion are reduced.
It is conceivable to perform the ejection operation under the ink ejection condition (third ejection condition) such that the relationship with the ink ejection amount M2 per time satisfies M1> M2. That is, if the ink is ejected under the ink ejection condition that satisfies the relationship of M1> M2, a large amount of ink can be ejected to the preliminary ejection area. In this ejection method, for example, the viscosity of the ink is high,
This is very effective when a large amount of ink needs to be preliminarily ejected. In addition, in order to make the optical density of the preliminary ejection region an optical density required for the light-shielding portion (optical density close to the optical density of the light-shielding portion), it is necessary to increase the amount of ink to be ejected into the preliminary ejection region. It is also effective in certain cases. On the other hand, when the viscosity of the ink is low and clogging does not easily occur, the ink discharge amount M1 when discharging to the second concave portion 32b and the ink discharging amount when discharging to the first concave portion 32b It is also conceivable to perform an ejection operation under ink ejection conditions such that the relationship with M2 satisfies M1 <M2.

It is also conceivable to make the number N1 of inks ejected to the second recess 32b different from the number N2 of ink ejected to the first recess 32b. For example, if clogging is likely to occur, the ejection operation may be performed under ink ejection conditions (fourth ejection condition) such that N2 <N1. On the other hand, if clogging is unlikely, N1
The ejection operation may be performed under the ink ejection condition that satisfies <N2.

Further, if ink is ejected under an ejection condition (fifth ejection condition) obtained by combining the second ejection condition, the third ejection condition, and the fourth ejection condition, the second to fourth ejection conditions are obtained. It is possible to further reduce the preliminary ejection area as compared to the case where the ejection condition is executed alone.

As described above, the amount of ink to be filled in the preliminary discharge area can be adjusted by changing the interval between the ink landing positions in the preliminary discharge area, the number of ink discharges, the amount of ink discharge by one discharge operation, and the like. As a result, the preliminary ejection area can be flattened, which can contribute to the flattening of the color filter. For example, when increasing the amount of ink to be filled in the preliminary ejection area, it is necessary to reduce the interval between ink landing positions, increase the amount of ink ejection, increase the number of ink ejections, or combine them. On the other hand, when the amount of ink to be filled in the preliminary ejection area is reduced, the interval between the ink landing positions is increased, the amount of ink ejection is reduced, the number of ink ejections is reduced, or These may be combined or executed.

As described above, the ink discharge conditions (ink discharge pattern) such as the ink landing position, the ink discharge amount, the ink discharge number, and the ink discharge timing are different between the first concave portion and the second concave portion. It is possible to reduce the size of the preliminary ejection area and flatten the color filter. FIG.
FIGS. 0 to 22 show a state in which landing dots of the respective inks remain in order to image the coloring operation. However, in reality, these ink dots are mixed in the second concave portion (preliminary ejection area). Color (mixed), and black throughout.

FIG. 23 is a diagram for explaining the color filter coloring operation and the preliminary discharge operation. In FIG.
Since the nozzle pitch of the inkjet head 55 does not match the pixel pitch of the color filter, the head 55
Is inclined to perform coloring. Here, every fourth nozzle is always used, and the other nozzles are not used. That is, the nozzles indicated by black circles are used nozzles 271 used in the coloring operation, and the nozzles indicated by white circles are unused nozzles (reserved nozzles) 275 not used in the coloring operation.

As described above, when there is the used nozzle 271 and the unused nozzle 275, the preliminary ejection operation may be performed only by the used nozzle 271 or the preliminary ejection operation may be performed by both the used nozzle 271 and the unused nozzle 275. May be performed. When the preliminary ejection operation is performed only with the use nozzle 271, there is an advantage that the amount of ink used is small. On the other hand, the use nozzle 271 and the non-use nozzle 275
When the preliminary ejection operation is performed in both of the above cases, the amount of ink to be filled in the preliminary ejection region increases, and accordingly, the optical density increases, and black with higher density can be obtained.

When an abnormality such as non-discharge occurs in the used nozzle 271, coloring may be performed by the spare nozzle 275 by shifting the used nozzle one by one. Even in such a case, if the ink is also preliminarily ejected from the spare nozzle 275 as described above, all the nozzles are ready for the main ejection immediately, so the nozzle to be used is suddenly switched. A normal coloring operation can be performed.

In the present embodiment, the case where the inside of the second recess (preliminary ejection area) is not partitioned at all is shown, but the inside of the second recess may be partitioned into a plurality.

As described above, according to the present embodiment, the preliminary discharge operation is performed on the second concave portion immediately before the coloring of the first concave portion. The ejection state is stable, and color mixing in the display area can be reduced or suppressed. In addition, by providing the bottom of the second concave portion with a light-shielding property, it is not necessary to mix the ink ejected into the second concave portion and blacken this portion.

[Second Embodiment] In the present embodiment, FIG.
As shown in FIG. 4, in the relative scanning direction between the head and the substrate, a color pattern is formed such that adjacent pixels have different colors. Is omitted.

Even in the case shown in FIG. 24, the ink is preliminarily ejected into the second concave portion before coloring the first concave portion. In FIG. 24, the RG discharged to the preliminary discharge area
Although the landing positions of the B ink are different, the present invention is not limited to this, and the RGB ink may be preliminarily ejected to the same position. In the case where a colored pattern as shown in FIG. 24 is formed, if the RGB inks are pre-discharged at the same position, the pre-discharge area can be further reduced as compared with the first embodiment. .

[Third Embodiment] In the present embodiment, the second
The ink ejected to the concave portion is intentionally mixed in color to form a black non-display portion. The other parts are the same as those in the first embodiment or the second embodiment, and thus the description is omitted.

As described above, the bottom of the second recess is the BM, and the thickness of the BM is set to a predetermined thickness.
However, the thickness of the BM at the bottom of the second concave portion may be formed smaller than the set value due to a manufacturing error or the like. In such a case, sufficient light-shielding properties may not be obtained. If the light-shielding property of this portion is not sufficient, the backlight may wrap around from this portion, which is not preferable from the viewpoint of the user's visibility. Therefore, in the present embodiment, a plurality of color inks are mixed in the second concave portion to form a non-display portion having a black color and an optical density required as a light shielding portion. More specifically, three color inks of RGB are ejected into the second concave portion and mixed to make black. Here, RGB inks are mixed, and the optical density of the non-display portion 39 is changed to another B.
The optical density is set to be substantially the same as the optical density of the M portion. Note that R
It is not limited to mixing the three color inks of GB,
Any two colors of RGB may be mixed. This is because, even if two colors of ink are mixed, the color becomes a black type enough to sufficiently function as a frame of the color filter. Further, a non-display portion may be formed by further applying ink of a color different from the RGB ink to the inside of the second concave portion. As the inks of the different colors,
A black ink or an ink that is a complementary color of a subtractive color mixture of a plurality of pre-discharged inks (RGB) is preferably used. Further light-shielding performance can be ensured.

Incidentally, in order to increase the optical density of the non-display portion formed in the second concave portion, it is conceivable to discharge RGB inks at the same position or at a position where they are in contact with each other. By doing so, the RGB inks mix with each other,
It will be black. Also, without considering the ink ejection position, the RGB inks are mixed with each other,
It is conceivable to make the bottom of the second concave portion hydrophilic, that is, to perform a process of increasing the surface energy of the bottom surface of the second concave portion after the formation of the second concave portion. By doing so, the mixing of the inks occurs without permission, and black is exhibited.

As described above, according to the present embodiment, even when the light shielding property at the bottom of the second concave portion is insufficient, the non-display portion in the second concave portion is formed in black to increase the optical density. Thus, the light-shielding property required to function as a frame portion can be obtained.

[Fourth Embodiment] This embodiment has a plurality of recesses composed of a first recess and a second recess, and is formed from a surface formed by the top of a partition surrounding the plurality of recesses. A panel for a display device is formed using a substrate whose distance to the bottom surface of the second recess is shorter than the distance from the surface formed by the tops of the partition portions surrounding the plurality of recesses to the bottom surface of the first recess. It is characterized by being manufactured. That is, the second
It is sufficient that the depth of the concave portion is smaller than the depth of the first concave portion, and it is not necessary that the bottom portion and the partition portion of the second concave portion have sufficient light shielding properties. In the present embodiment, the color of the partition may be black, transparent, or another color. Further, as the material of the partition portion, the materials (the photosensitive resin composition and the non-photosensitive resin composition) described in the first embodiment can be used. However, this embodiment does not include a black pigment or dye, which is the same as the first embodiment to the first embodiment.
This is different from the third embodiment.

As in the first embodiment, also in the present embodiment, the exposure amount when forming the first concave portion and the exposure amount when forming the second concave portion are made different from each other. A first recess and a second recess having different sizes are formed. Specifically, the exposure amount when forming the second concave portion is smaller than the exposure amount when forming the first concave portion, whereby the depth of the second concave portion is reduced. It is shallower than the depth. The bottom of the second recess is a partition, and the bottom of the first recess is a substrate. Further, since a partition portion is provided at the bottom of the second concave portion and is configured to be shallower than the first concave portion, the amount of material that can be applied is smaller than that of the first concave portion.

Using a substrate having the first and second concave portions formed in this way, a material used for display is preliminarily applied to the second concave portion, and then the material is added. A display portion is formed in the first concave portion by applying to the first concave portion, and a panel for a display device is manufactured.

As described above, according to this embodiment, since the material is preliminarily applied to the second concave portion immediately before the material is applied to the first concave portion, the material is applied to the first concave portion. In this case, the state of material application from the nozzles is stable, and the mixing of materials in the display region can be suppressed.

The present embodiment has a particularly remarkable effect in the case where the clogging of the nozzle hardly occurs and the amount of material to be preliminarily applied to the second concave portion is small. That is, in order to flatten the display panel,
It is preferable that not only the display portion formed in the first recess be flattened, but also the non-display portion formed in the second recess be flattened. In order to flatten the non-display portion, it is necessary to apply a predetermined amount of material in the second concave portion. Here, suppose that the exposure amount when forming the second concave portion is the same as the exposure amount when forming the first concave portion, and the depth of the second concave portion is the same as the depth of the first concave portion. Suppose there was. Then, when a predetermined amount of material is applied, the volume of the second concave portion is large, so that additional material needs to be applied, which is a waste of material. On the other hand, in the present embodiment, since the volume of the second concave portion is small, the amount of the material to be added is small and the waste of the material is scarce.

[Other Embodiments] The present invention is applicable to modifications or variations of the above embodiments without departing from the gist of the invention.

For example, in recent years, there has been a panel provided with a color filter on the TFT array side, but the color filter defined in this specification is an object to be colored colored with a coloring material, and is located on the TFT array side. Both are included, regardless of whether or not.

In the above embodiment, the case where the R, G, and B color materials are used has been described. However, the color material is not limited to this. For example, C (cyan), M (magenta), A Y (yellow) color material can also be used. In particular, in the case of a reflective color filter, it is effective to use CMY color materials.

In the above embodiment, one ink jet head is provided for each color. However, the present invention is not limited to this, and a plurality of ink jet heads may be used for each color. . For example, a color filter may be manufactured using two R heads, two G heads, and two B heads. When a plurality of ink jet heads are used for each color as described above, the colorable area can be increased at a time, so that the coloring time can be reduced.

Further, the present invention is not limited to the above-described embodiment, and can be applied with various modifications within the scope of the present invention.

The present invention can be applied to, for example, a method and an apparatus for manufacturing an EL (electroluminescence) display element. EL display element
A thin film containing a fluorescent inorganic and organic compound is sandwiched between a cathode and an anode. Electrons and holes are injected into the thin film and recombined to generate excitons. An element that emits light using emission of fluorescence or phosphorescence when excitons are deactivated. Among the fluorescent materials used for such EL display elements, materials that emit red, green, and blue light are emitted using the manufacturing apparatus of the present invention.
By patterning an element substrate such as a TFT by an inkjet method, a self-luminous full-color EL display element can be manufactured. The present invention also includes such an EL display element, a method for manufacturing the display element, an apparatus for manufacturing the same, and the like.

The manufacturing apparatus of the present invention performs a surface treatment step such as a plasma treatment, a UV treatment, and a coupling treatment on the surface of the resin resist, the pixel electrode, and the lower layer so that the EL material is easily attached. May be provided.

The EL display device manufactured by using the manufacturing method of the present invention can be used in low information fields such as segment display and still image display with simultaneous simultaneous light emission, and can be used as a light source having a point, line, or surface shape. Can also be used. In addition to passive drive display elements, TFT
By using such active elements for driving, a full-color display element having high luminance and excellent responsiveness can be obtained.

Hereinafter, the organic EL manufactured by the present invention will be described.
1 shows an example of an element. FIG. 25 shows a cross-sectional view of the laminated structure of the organic EL element. The organic EL element illustrated in FIG. 25 includes a transparent substrate 3001, a partition (partition) 3002, a light emitting layer (light emitting unit) 3003, a transparent electrode 3004, and a metal layer 3006.
It has. Reference numeral 3007 denotes a portion composed of the transparent substrate 3001 and the transparent electrode 3004;
This is called a drive board.

The transparent substrate 3001 is not particularly limited as long as it has necessary characteristics such as transparency and mechanical strength as an EL display element. For example, a transparent substrate such as a glass substrate or a plastic substrate may be used. Substrate is applicable.

The partition (partition) 3002 has a function of separating pixels from each other so that the material does not mix between adjacent pixels when the material for forming the light emitting layer 3003 is applied from the liquid applying head. Things. That is, the partition wall 3002 functions as a mixing prevention wall. By providing the partition wall 3002 on the transparent substrate 3001, a plurality of concave portions (pixel regions) are formed on the substrate. Note that there is no problem even if the partition wall 3002 has a multilayer structure having different affinity for the material.

The light-emitting layer 3003 is made of a material which emits light when an electric current is passed, for example, polyphenylene vinylene (PP
A known organic semiconductor material such as V) is used, and is formed by laminating a thickness capable of obtaining a sufficient light amount, for example, about 0.05 μm to 0.2 μm. The light-emitting layer 3003 is formed by filling a concave portion surrounded by the partition wall 3002 with a thin film material liquid (self-luminous material) by an inkjet method and performing heat treatment.

The transparent electrode 3004 is made of a conductive and light transmissive material, for example, ITO or the like. The transparent electrode 3004 is provided independently for each pixel region in order to emit light in pixel units.

The metal layer 3006 is made of a conductive metal material, for example, aluminum lithium (Al-Li).
It is formed by laminating about 1 μm and 1.0 μm. Metal layer 3
006 is formed to function as a common electrode facing the transparent electrode 3004.

The drive substrate 3007 is formed by laminating a thin film transistor (TFT), a wiring film, an insulating film and the like (not shown) in multiple layers, and includes a metal layer 3006 and each transparent electrode 300.
It is configured so that a voltage can be applied between the four pixels in pixel units. The driving substrate 3007 is manufactured by a known thin film process.

In the organic EL device having the above-described layer structure, in a pixel region where a voltage is applied between the transparent electrode 3004 and the metal layer 3006, a current flows through the light emitting layer 3003, and an electroluminescence phenomenon occurs. Light is emitted through the transparent electrode 3004 and the transparent substrate 3001.

Here, the manufacturing process of the organic EL device will be described.

FIG. 26 shows an example of the manufacturing process of the organic EL device. Hereinafter, each of the steps (a) to (d) will be described with reference to FIG.

Step (a) First, a glass substrate is used as the transparent substrate 3001, and a thin film transistor (TFT), a wiring film, an insulating film, and the like (not shown) are laminated in multiple layers, and a transparent electrode 3004 is formed to form a pixel region. Make it possible to apply voltage.

Step (b) Next, the partition wall 3002 is formed at a position between the pixels. The partition wall 3002 is provided between adjacent pixels when an EL material liquid to be a light emitting layer is applied by an inkjet method.
Any material may be used as long as it functions as a mixing prevention wall for preventing the material liquids from mixing. Here, it is formed by a photolithography method using a resist to which a black material is added, but the present invention is not limited to this, and various materials, colors, forming methods, and the like can be used.

Step (c) Next, the EL material is applied to the partition walls 300 by the ink jet method.
The light-emitting layer 3003 is formed by filling a concave portion surrounded by 2 and then performing heat treatment.

Step (d) Further, a metal layer 3006 is formed on the light emitting layer 3003.

By going through the steps (a) to (d), a full-color EL element can be formed by simple steps. In particular, when a color organic EL element is formed, it is necessary to form a light-emitting layer having a different emission color such as red, green, or blue. It is effective to use.

In the present invention, the display portion is formed by filling a material used for display in the concave portion surrounded by the partition portion. In the case of a color filter, the coloring portion is formed in the display portion. In the case of an EL element, the light emitting section corresponds to the display section. The display section including the coloring section and the light emitting section,
This part is used for displaying information, and is also a part for visually recognizing colors.

The colored portion of the color filter and the light-emitting portion of the EL element are also portions that generate color (color is emitted), and thus can be referred to as a colored portion. For example, in the case of a color filter, light from a backlight passes through the colored portion to emit RGB light, and in the case of an EL element, the light emitting portion emits light by emitting light by itself.

Further, since the ink and the self-luminous material are materials for forming the color-forming portion, they can also be referred to as materials that generate color. Further, since the ink and the self-luminous material are liquids, they can be generally referred to as liquid materials.
Further, the ink and the self-luminous material are also materials for forming a display portion used for display.

In the above description, it has been described that, when a color filter is manufactured, occurrence of color mixture in a pixel region (first concave portion) can be suppressed.
On the other hand, in the case of manufacturing an EL element, the pixel region (first concave portion)
In this case, it is possible to make it difficult for a plurality of self-luminous materials to be mixed.

As described above, the present invention is used for a panel having a plurality of display portions formed by filling a plurality of recesses surrounded by partition portions with a material, for example, a color display device including a color filter, an EL element, and the like. The present invention can be applied to the production of a panel (display element). The display device panel is not limited to the color filter and the EL display element, but is a panel formed by filling a concave portion provided on a substrate with a liquid material. This includes all panels available for the device.

The present invention includes a means (for example, an electrothermal converter or a laser beam) for generating thermal energy as energy used for discharging ink, particularly in an ink jet recording system. The printing apparatus of the type that causes a change in the state of the ink has been described.
High definition can be achieved.

The typical configuration and principle are described, for example, in US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method can be applied to both the so-called on-demand type and continuous type. In particular, in the case of the on-demand type, liquid (ink)
By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding the film boiling to the electrothermal transducer arranged corresponding to the sheet or the liquid path holding the Since thermal energy is generated in the electrothermal transducer and film boiling occurs on the heat-acting surface of the recording head, bubbles in the liquid (ink) corresponding to this drive signal on a one-to-one basis can be formed. It is valid. By discharging the liquid (ink) through the discharge opening by the growth and contraction of the bubble, at least one droplet is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of the liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable.

As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

As the configuration of the recording head, in addition to the combination of a discharge port, a liquid path, and an electrothermal transducer (a linear liquid flow path or a right-angled liquid flow path) as disclosed in the above-mentioned respective specifications, A configuration using U.S. Pat. No. 4,558,333 or U.S. Pat. No. 4,459,600, which discloses a configuration in which a heat acting surface is arranged in a bent region, is also included in the present invention. In addition, for multiple electrothermal transducers,
JP-A-59-123670 which discloses a configuration in which a common slot is used as a discharge portion of an electrothermal transducer, and JP-A-59-123670 which discloses a configuration in which an opening for absorbing a pressure wave of thermal energy corresponds to a discharge portion. A configuration based on 138461 may be adopted.

Further, as a full-line type recording head having a length corresponding to the width of the maximum recording medium that can be recorded by the recording apparatus, the length is determined by combining a plurality of recording heads as disclosed in the above specification. This may be either a configuration satisfying the above requirements or a configuration as a single recording head formed integrally.

In addition, an exchangeable chip-type recording head which can be electrically connected to the apparatus main body or supplied with ink from the apparatus main body by being attached to the apparatus main body, or integrated with the recording head itself. Alternatively, a cartridge type recording head provided with an ink tank may be used.

It is preferable to add recovery means for the recording head, preliminary auxiliary means, and the like provided as components of the recording apparatus of the present invention since the effects of the present invention can be further stabilized. . Specific examples include pressurizing or sucking means for the recording head, preheating means using an electrothermal transducer or another heating element or a combination thereof, and a preparatory means for performing ejection different from recording. Performing the ejection mode is also effective for performing stable printing.

In the embodiment of the present invention described above,
Although the ink is described as a liquid, an ink that solidifies at or below room temperature, or a material that softens or liquefies at room temperature may be used. Good.

In addition, in order to positively prevent temperature rise due to thermal energy as energy for changing the state of the ink from a solid state to a liquid state, the temperature is positively prevented.
Alternatively, in order to prevent evaporation of the ink, an ink which solidifies in a standing state and liquefies by heating may be used. In any case, the application of heat energy causes the ink to be liquefied by application of the heat energy according to the recording signal and the liquid ink to be ejected, or to start to solidify when reaching the recording medium. The present invention is also applicable to a case where an ink having a property of liquefying for the first time is used. In such a case, as described in JP-A-54-56847 or JP-A-60-71260, the ink is held in a liquid state or a solid state in a concave portion or a through hole of a porous sheet. It is good also as a form which opposes an electrothermal transducer. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0171]

As described above, according to the present invention, it is possible to make it difficult for a plurality of materials to mix in the first concave portion for forming the display portion, and to improve the yield. it can.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of an embodiment of a color filter manufacturing apparatus.

FIG. 2 is a diagram illustrating a configuration of a control unit that controls the operation of the color filter manufacturing apparatus.

FIG. 3 is a diagram illustrating an example of a configuration of a discharge amount control circuit of the inkjet head.

FIG. 4 is a diagram illustrating an example of a drive signal applied to a discharge drive element of a nozzle.

FIG. 5 is a diagram illustrating an example of a manufacturing process of a color filter.

FIG. 6 is a cross-sectional view illustrating an example of a basic configuration of a color liquid crystal display device incorporating a color filter according to an embodiment.

FIG. 7 is a cross-sectional view illustrating an example of a basic configuration of a color liquid crystal display device incorporating a color filter according to an embodiment.

FIG. 8 is a block diagram illustrating a schematic configuration when a liquid crystal display device is applied to an information processing device.

FIG. 9 is a diagram illustrating an information processing apparatus in which a liquid crystal display device is used.

FIG. 10 is a diagram illustrating an information processing device in which a liquid crystal display device is used.

FIG. 11 is a diagram showing a substrate used in the first embodiment.

FIG. 12 is a diagram illustrating a state where ink is ejected to the substrate of FIG. 11;

FIG. 13 is a diagram showing a color filter manufactured in the first embodiment.

FIG. 14 is a diagram illustrating a state in which ink preliminarily ejected onto the light-shielding portion freely moves on the light-shielding portion to cause color mixture.

FIG. 15 is a sectional view of a liquid crystal display device formed by filling a liquid crystal compound 18 between a color filter 54 and a counter substrate 24.

FIG. 16 is a view showing a step of forming a first concave portion and a second concave portion.

FIG. 17 is a flowchart illustrating a coloring process of a color filter.

FIG. 18 is a diagram showing a positional relationship between a preliminary ejection area and a display area.

FIG. 19 is a diagram showing a positional relationship between a preliminary ejection area and a display area.

FIG. 20 is a diagram showing a relationship between an interval L1 between landing positions of a plurality of inks ejected to a second recess (preliminary ejection area) and an interval L2 between landing positions of a plurality of inks ejected to the first recess. It is.

FIG. 21 is a diagram illustrating a relationship between an interval L1 between landing positions of a plurality of inks ejected to a second recess (preliminary ejection area) and an interval L2 between landing positions of a plurality of inks ejected to a first recess. It is.

FIG. 22 is a diagram illustrating a relationship between an ink discharge amount M1 when discharging to a second concave portion (preliminary discharge region) 32b and an ink discharging amount M2 when discharging to a first concave portion.

FIG. 23 is a diagram illustrating a coloring operation and a preliminary ejection operation of a color filter.

FIG. 24 is a diagram showing a relationship between a direction of relative scanning between a head and a substrate and a coloring pattern of a color filter.

FIG. 25 is a diagram illustrating an example of a configuration of an EL element.

FIG. 26 is a diagram illustrating an example of the manufacturing process of the EL element.

FIG. 27 is a diagram for explaining that a color filter is colored using an inkjet head.

FIG. 28 is a diagram for describing preliminary ejection of ink to a frame portion outside a display area on a substrate.

FIG. 29 is a diagram illustrating preliminary ejection of ink to a frame portion outside a display area on a substrate.

FIG. 30 is a diagram showing preliminary ejection of ink to a frame portion outside a display area on a substrate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Black matrix 2a Partition part 2c Bottom part of 2nd recessed part 3 Colored part (display part) 8 Protective layer 11 Polarizer 16 Common electrode 17 Alignment film 18 Liquid crystal compound 19 Alignment film 20 Pixel electrode 21 Glass substrate 22 Polarizer 24 Counter substrate 23 Backlight 30 Liquid crystal display device 32 Concave portion 32a First concave portion 32b Second concave portion (preliminary discharge region) 35 Display region 37 Peripheral region 39 Non-display portion 51 Device mount 52 XYθ stage 53 Color filter substrate 54 Color filter 55 Inkjet head 56 TV camera 58 Control controller 59 Teaching pendant (PC) 60 Keyboard 102 Heater 104 Heater board 106 Top plate 108 Discharge port 110 Liquid path 112 Partition wall 114 Liquid chamber 116 Ink supply port 150 Spacer 1 Reference Signs List 1 Pre-discharged ink 160 Part with poor flatness 163 Contact between pre-discharged ink and light-shielding part 164 Top of BM 172 Bottom of colored part 174 Surface of colored part 176 Bottom of partition 178 Top of partition 271 Used nozzle 275 Reserve Nozzle (unused nozzle) 304 Nozzle drive circuit 309 Drive element 311 Drawing control unit

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H048 BA02 BA11 BA25 BA28 BA29 BA39 BA60 BA64 BB14 BB15 BB22 BB37 BB44 2H091 FA02Y FA08X FA08Z FA35Y FA41Z FB03 FC12 FD04 GA01 LA15 LA18 5C094 AA42 BA27 BA43 CA19 ED02 ED02 Patent application title: DISPLAY PANEL, DISPLAY PANEL MANUFACTURING METHOD AND MANUFACTURING APPARATUS, LIQUID CRYSTAL DISPLAY DEVICE HAVING DISPLAY PANEL, AND MANUFACTURING METHOD OF LIQUID CRYSTAL DISPLAY DEVICE Method of manufacturing, substrate having a plurality of recesses, method and apparatus for manufacturing the substrate, color filter, method and apparatus for manufacturing the color filter

Claims (83)

[Claims] A panel for a display device is formed by applying a material to be used for display from a material applying head to form a display portion in the concave portion of a substrate having a plurality of concave portions surrounded by partition portions. A method for manufacturing, comprising preparing a substrate having both a first concave portion for forming a display portion used for display and a second concave portion for forming a non-display portion not used for display. And after applying the material from the material application head to the second recess on the substrate, applying the material from the material application head to the first recess on the substrate. Forming a portion, wherein the height of the partition surrounding the first recess and the height of the partition surrounding the second recess are substantially the same, and the top of the partition surrounding the plurality of recesses Formed surface Wherein the distance from the bottom to the bottom of the second recess is shorter than the distance from the surface formed by the top of the partition surrounding the plurality of recesses to the bottom of the first recess. Panel manufacturing method. 2. The method according to claim 1, wherein a bottom surface of the second recess has a light shielding property. 3. The method according to claim 1, wherein the partition has a property of blocking light or a property of absorbing light. 4. The display device according to claim 1, wherein a bottom surface of the second concave portion is the partition portion, and a bottom surface of the first concave portion is the substrate. Panel manufacturing method. 5. The method for manufacturing a display device panel according to claim 1, wherein a material of the partition portion is a resin composition. 6. The method for manufacturing a display device panel according to claim 5, wherein the resin composition contains a material having a light absorbing property or a light blocking property. 7. The method of manufacturing a display device panel according to claim 6, wherein the light absorbing or light shielding material is a black dye and / or a black pigment. 8. The method according to claim 1, wherein the partition is a black matrix. 9. The method for manufacturing a display device panel according to claim 1, wherein a top of the partition has a property of repelling the material. 10. The method for manufacturing a display device panel according to claim 9, wherein a top portion of the partition portion has water repellency. 11. The first concave portion and the second concave portion formed by patterning a material of the partition portion applied on the substrate by a photolithography process. The method for manufacturing a display device panel according to any one of the above. 12. The photolithography step includes an exposure step of exposing a material of the partition portion applied on the substrate, and in the exposing step, an exposure for forming the first concave portion is performed. The method according to claim 11, wherein an amount of light and an amount of light for forming the second concave portion are different from each other. 13. The display according to claim 12, wherein in the exposing step, an exposure amount when forming the second concave portion is smaller than an exposure amount when forming the first concave portion. A method for manufacturing a device panel. 14. After forming the second recess, the second recess is formed.
14. The method according to claim 1, further comprising a step of performing a process of increasing a surface energy of a bottom surface of the concave portion.
The method for manufacturing a display device panel according to any one of the above. 15. The method according to claim 1, wherein the substrate has a light transmitting property. 16. The method for manufacturing a display device panel according to claim 1, wherein the substrate is a glass substrate or a plastic substrate. 17. An application amount of the material when applying the material to the first recess is different from an application amount of the material when applying the material to the second recess. The method for manufacturing a display device panel according to claim 1, wherein: 18. The method according to claim 1, further comprising a step of performing a heat treatment for applying heat to the substrate and / or an energy beam irradiation treatment for irradiating the substrate with energy rays after the display section forming step. The method for manufacturing a display device panel according to any one of the above. 19. The method according to claim 1, further comprising a step of performing a decompression process after the display section forming step.
9. The method for manufacturing a display device panel according to any one of items 8. 20. The method of manufacturing a display device panel according to claim 1, wherein the material is ink. 21. The method according to claim 20, wherein the ink contains a resin. 22. The method according to claim 20, wherein the ink is ink of a plurality of different colors. 23. The method according to claim 22, wherein the plurality of different color inks are red ink, blue ink, and green ink. 24. The method according to claim 22, wherein the plurality of different colors of ink are cyan ink, magenta ink, and yellow ink. 25. The display device panel according to claim 20, wherein the display portion formed in the first concave portion is a colored portion formed by the ink. Production method. 26. The method according to claim 25, wherein the colored portion comprises a red colored portion, a blue colored portion, and a green colored portion. 27. The method according to claim 25, wherein the colored portion comprises a cyan colored portion, a magenta colored portion, and a yellow colored portion. 28. The method of manufacturing a display device panel according to claim 1, wherein the display device panel is a color filter. 29. The method for manufacturing a display device panel according to claim 1, wherein the material is a self-luminous material that emits light when a voltage is applied. 30. The method according to claim 29, wherein the self-luminous material is an EL material. 31. The method according to claim 30, wherein the display section formed in the first concave portion is a light emitting layer formed of the EL material. 32. The display according to claim 31, wherein the light emitting layer includes a light emitting layer for emitting red light, a light emitting layer for emitting blue light, and a light emitting layer for emitting green light. A method for manufacturing a device panel. 33. The method according to claim 29, wherein the display element is an EL element. 34. A head for ejecting a material by using thermal energy, wherein the material applying head includes a thermal energy generator for generating thermal energy to be applied to the material. Item 34. The method for manufacturing a display device panel according to any one of Items 1 to 33. 35. The material applying head according to claim 1, wherein the material applying head includes a piezo element which is displaced when electric energy is applied and discharges the material by a pressure change accompanying the displacement. Of manufacturing a display device panel. 36. A panel for a display device by forming a display portion by applying a material to be used for display from a material application head to the inside of the recess having a plurality of recesses surrounded by partition portions. An apparatus for manufacturing, comprising: a substrate having both a first concave portion for forming a display portion used for display and a second concave portion for forming a non-display portion not used for display; Moving means for relatively moving the applying head; and moving the substrate and the material applying head relative to each other by the moving means while moving the substrate from the material applying head to the second recess on the substrate. The material applying head and the moving hand are formed so as to form the display section by applying the material from the material applying head to the first concave portion on the substrate after applying the material. Control means for controlling the height of the partition surrounding the first recess and the height of the partition surrounding the second recess, and the partition surrounding the plurality of recesses. The distance from the surface formed by the top of the second recess to the bottom of the second recess is shorter than the distance from the surface formed by the top of the partition surrounding the plurality of recesses to the bottom of the first recess. An apparatus for manufacturing a panel for a display device, comprising: 37. The apparatus for manufacturing a display device panel according to claim 36, wherein a bottom surface of the second recess has a light shielding property. 38. The apparatus according to claim 36, wherein the partition has a property of blocking light or a property of absorbing light. 39. The display device according to claim 36, wherein a bottom surface of the second recess is the partition portion, and a bottom surface of the first recess is the substrate. Panel manufacturing equipment. 40. The apparatus for manufacturing a display device panel according to claim 36, wherein a material of the partition portion is a black resin composition. 41. The apparatus for manufacturing a display device panel according to claim 36, wherein the partition portion is a black matrix. 42. The apparatus for manufacturing a display device panel according to claim 36, wherein a top portion of the partition portion has water repellency. 43. The apparatus according to claim 36, wherein the material is ink. 44. The apparatus according to claim 43, wherein the ink contains a resin. 45. The apparatus for manufacturing a panel for a display device according to claim 42, wherein the ink is ink of a plurality of different colors. 46. The apparatus according to claim 45, wherein the plurality of different colors of ink are red ink, blue ink, and green ink. 47. The apparatus according to claim 45, wherein the plurality of different color inks are cyan ink, magenta ink, and yellow ink. 48. The display device panel according to claim 43, wherein the display portion formed in the first concave portion is a colored portion formed by the ink. manufacturing device. 49. The display panel manufacturing apparatus according to claim 48, wherein the colored portion includes a red colored portion, a blue colored portion, and a green colored portion. 50. The apparatus for manufacturing a display device panel according to claim 48, wherein the colored portion comprises a cyan colored portion, a magenta colored portion, and a yellow colored portion. 51. The apparatus for manufacturing a display device panel according to claim 36, wherein said display device panel is a color filter. 52. The apparatus for manufacturing a display device panel according to claim 36, wherein the material is a self-luminous material that emits light when a voltage is applied. 53. The apparatus according to claim 52, wherein the self-luminous material is an EL material. 54. The apparatus according to claim 53, wherein the display section formed in the first recess is a light emitting layer formed of the EL material. 55. The display according to claim 54, wherein the light emitting layer comprises a light emitting layer for emitting red light, a light emitting layer for emitting blue light, and a light emitting layer for emitting green light. Equipment for manufacturing panel for equipment. 56. The apparatus for manufacturing a panel for a display device according to claim 36, wherein the display element is an EL element. 57. A head for ejecting a material by using thermal energy, wherein the material applying head includes a thermal energy generator for generating thermal energy to be applied to the material. Item 61. A display device manufacturing apparatus according to any one of Items 36 to 56. 58. The material applying head according to claim 36, wherein the material applying head includes a piezo element which is displaced when electric energy is applied, and discharges the material by a pressure change accompanying the displacement. Display panel manufacturing equipment. 59. A panel for a display device, which is manufactured by the manufacturing method according to claim 1. Description: 60. A display device panel having a display portion in which a material to be used for display is filled in the concave portion of a substrate having a plurality of concave portions surrounded by partition portions. And a display unit in which a first concave portion on the substrate is filled with the material, and a non-display portion not used for display and in which a second concave portion on the substrate is filled with the material. The height of the partition surrounding the first recess is substantially the same as the height of the partition surrounding the second recess, and the height of the partition surrounding the plurality of recesses is defined by a surface formed by the tops of the partition surrounding the plurality of recesses. A display device panel, wherein a distance to a bottom surface of the second concave portion is shorter than a distance from a surface formed by a top portion of the partition portion surrounding the plurality of concave portions to a bottom surface of the first concave portion. . 61. The display device panel according to claim 61, wherein the material is ink. 62. The display device panel according to claim 60, wherein the ink is ink of a plurality of different colors. 63. The display device panel according to claim 62, wherein the plurality of different color inks are red ink, blue ink, and green ink. 64. The display device panel according to claim 62, wherein the plurality of different colors of ink are cyan ink, magenta ink, and yellow ink. 65. The display device panel according to claim 60, wherein the display portion formed in the first concave portion is a colored portion formed by the ink. 66. The display device panel according to claim 60, wherein the display device panel is a color filter. 67. The display panel according to claim 60, wherein the material is a self-luminous material that emits light when a voltage is applied. 68. The display panel according to claim 67, wherein the self-luminous material is an EL material. 69. The display device panel according to claim 68, wherein the display section formed in the first concave portion is a light emitting layer formed of the EL material. 70. The display according to claim 69, wherein the light emitting layer comprises a light emitting layer for emitting red light, a light emitting layer for emitting blue light, and a light emitting layer for emitting green light. Equipment for manufacturing panel for equipment. 71. The display device panel according to claim 67, wherein the display element is an EL element. 72. A liquid crystal display device using a display device panel having a display portion in which a material to be used for display is filled in a concave portion of a substrate having a plurality of concave portions surrounded by partition portions. A liquid crystal display device comprising: the display device panel according to any one of claims 59 to 66; and light amount varying means for varying a light amount. 73. A liquid crystal display device using a display device panel having a display portion in which a material to be used for display is filled in a concave portion of a substrate having a plurality of concave portions surrounded by partition portions. A method for preparing a display device panel according to any one of claims 59 to 66, and a process for integrating the display device panel and a light amount varying means for varying a light amount. A method for manufacturing a liquid crystal display device, comprising: 74. A liquid crystal display device using a display device panel having a display portion in which a material to be used for display is filled in the concave portion of a substrate having a plurality of concave portions surrounded by partition portions. A liquid crystal display device comprising: the liquid crystal display device according to claim 72; and an image signal supply unit configured to supply an image signal to the liquid crystal display device. apparatus. 75. A liquid crystal display device using a display device panel having a display portion in which a material to be used for display is filled in the concave portion of a substrate having a plurality of concave portions surrounded by partition portions. A step of preparing the liquid crystal display device according to claim 72, and a step of connecting an image signal supply unit for supplying an image signal to the liquid crystal display device and the prepared liquid crystal display device. And a method for manufacturing a device provided with a liquid crystal display device. 76. A substrate for forming a display device panel having a plurality of concave portions surrounded by partition portions, wherein the first concave portions are used for displaying, and the first concave portions are not used for displaying. And the height of the partition surrounding the first recess is substantially the same as the height of the partition surrounding the second recess, and is formed by the top of the partition surrounding the plurality of recesses. Wherein the distance from the surface to the bottom surface of the second recess is shorter than the distance from the surface formed by the tops of the partitions surrounding the plurality of recesses to the bottom surface of the first recess. A substrate having a plurality of recesses. 77. The substrate according to claim 76, wherein the display device panel is a color filter. 78. The substrate according to claim 76, wherein the display device panel is an EL element. 79. A method for manufacturing a substrate for forming a display device panel having a plurality of concave portions surrounded by a partition portion, comprising: applying a material of the partition portion on the substrate; Patterning the applied material of the partition,
Forming a first concave portion used for displaying and a second concave portion not used for displaying, the height of a partition surrounding the first concave portion and the partition surrounding the second concave portion. The height of the portion is substantially the same, and the distance from the surface formed by the top of the partition surrounding the plurality of recesses to the bottom surface of the second recess is formed by the top of the partition surrounding the plurality of recesses. A method of manufacturing a substrate having a plurality of recesses, wherein the distance is shorter than a distance from a surface to be formed to a bottom surface of the first recess. 80. An apparatus for manufacturing a substrate for forming a display device panel, comprising a plurality of concave portions surrounded by partition portions, wherein a coating material for coating a material of the partition portion on the substrate is provided. Means, patterning the applied material of the partition portion,
Forming means for forming a first concave portion used for displaying and a second concave portion not used for displaying, wherein a height of a partition surrounding the first concave portion and the second concave portion are provided. The height of the partition that surrounds the plurality of recesses is substantially the same as the height of the partition that surrounds the plurality of recesses, and the distance from the surface formed by the top of the partition that surrounds the plurality of recesses to the bottom surface of the second recess. An apparatus for manufacturing a substrate having a plurality of concave portions, wherein the distance is shorter than a distance from a surface formed by a top portion to a bottom surface of the first concave portion. 81. A substrate provided with a plurality of concave portions surrounded by a partition portion having a property of shielding light, wherein:
A method of manufacturing a color filter by applying ink from an inkjet head to form a colored portion, comprising: a first concave portion for forming a colored portion used for display; and a non-display portion not used for display. Preparing a substrate having both a second concave portion for forming a portion, and applying ink from the inkjet head to the second concave portion on the substrate; Forming a colored portion by applying ink from the inkjet head to the concave portion, wherein the bottom surface of the second concave portion has a light-shielding property. 82. A substrate provided with a plurality of concave portions surrounded by a partition portion having a property of shielding light, wherein:
An apparatus for manufacturing a color filter by applying ink from an ink jet head to form a colored portion, wherein a first concave portion for forming a colored portion used for display and a non-display portion not used for display A substrate having both a second concave portion for forming a substrate, a moving unit for relatively moving the inkjet head, and the substrate and the inkjet head being relatively moved by the moving unit, The method of applying the ink from the inkjet head to the first recess on the substrate after applying the ink from the inkjet head to the second recess on the substrate to form the colored portion, A control unit for controlling the inkjet head and the moving unit, wherein a bottom surface of the second concave portion has a light shielding property; Manufacturing apparatus of a color filter, characterized in that it comprises. 83. A substrate having a plurality of recesses surrounded by a partition having a property of shielding light,
A color filter having a colored portion filled with a material to be used for display, wherein the colored portion is used for performing display, and a first concave portion on the substrate is filled with the ink. A color filter, comprising: a non-display portion that is not used for display and is formed by filling the second concave portion on the substrate with the ink;