JP4677826B2 - Mounting device - Google Patents

Description

The present invention relates to a mounting apparatus for mounting an electronic component such as a semiconductor chip on a substrate.

  Conventionally, a flip chip bonding apparatus is used when an electronic component such as a semiconductor (bare chip) is mounted on a substrate. As shown in FIG. 8, the flip chip bonding apparatus 100 has a chip tray 102 on which an electronic component 101 such as a semiconductor is placed, a substrate stage 104 on which a substrate 103 is placed, and a substrate stage 104. A bonding head 105 that is disposed and mounts the electronic component 101 on the substrate stage 104, a component supply unit 106 that transfers the electronic component 101 on the chip tray 102 to the bonding head 105, and an electronic component 101 that is transferred to the bonding head 105. And a camera unit 107 provided with two cameras for detecting the position where the electronic component 101 is mounted. In the flip chip bonding apparatus 100, the electronic component 101 on the chip tray 102 is sucked and held by the component supply unit 106, and the held electronic component 101 is reversed (fliped) by the component supply unit 106. The inverted electronic component 101 is sucked and held by the bonding head 105, and the positions of the electronic component 101 and the substrate 103 are detected and aligned by the camera unit 107 and mounted.

  In such an apparatus, each member (chip tray 102, substrate stage 104, substrate stage 104, electronic component 101 at any position on chip tray 102 can be mounted at any position on substrate 103 on substrate stage 104. In order to move the bonding head 105, the component supply unit 106, and the camera unit 107) relative to each other, a drive unit is required, and the entire apparatus is therefore large.

  For example, even if only the component supply unit 106 is viewed, as shown in FIG. 9, the component supply unit 106 raises / lowers the holding unit 111 that holds the electronic component 101 by suction (in the direction of arrow z in FIG. 9). Ascending / descending actuator 112, intermediate stopping actuator 113 when ascending / descending, rotating actuator 114 for rotating holding part 111 (in the direction of arrow θ in FIG. 9), and holding part 111 moving forward / backward (arrow x in FIG. 9) A forward / backward actuator 115 for moving the direction). Further, the component supply unit 106 includes an ascending end confirmation sensor 116 and a descending end confirmation sensor 117 for confirming the position of the ascending / descending actuator 112, an intermediate stop confirmation sensor 118 for confirming the position of the intermediate stop actuator 113, and an intermediate position. The stop release confirmation sensor 119, the rotation end confirmation sensor 120 for confirming the position of the rotation actuator 114, the rotation return confirmation sensor 121, the forward confirmation sensor 122 for confirming the position of the forward / backward actuator 115, and the backward confirmation sensor 123 8. One confirmation sensor is provided.

  As described above, the component supply unit also has a plurality of actuators and sensors, and increases the number of components, which causes an increase in shape and cost. Further, since the operations of the plurality of actuators are controlled so as not to interfere with each other, the operation takes time.

JP 2000-150546 A

The present invention has been proposed in view of such a conventional situation, and an object thereof is to provide a mounting apparatus that is reduced in size and cost.

The mounting apparatus according to the present invention is a mounting apparatus for mounting an electronic component on a substrate placed on a stage, provided at a position facing the stage, and a bonding head for mounting the electronic component on the substrate. And a component supply means comprising an arm drive mechanism for supplying the electronic component to the bonding head, wherein the electronic component is mounted on the same stage as the stage on which the substrate is mounted. The mechanism drives a long arm having a component adsorbing portion for adsorbing and holding the electronic component, and a single drive shaft provided below the arm in the same direction in parallel with the arm, A drive unit that rotationally drives one drive shaft; first, second, and third disk-shaped cams provided on the one drive shaft; and the arm in the longitudinal direction of the arm. a housing that is drivably driven in a rotation direction (θ direction) that rotates with respect to a longitudinal direction (x direction) of the arm and the longitudinal direction (x direction) of the arm, and the housing according to the rotational position of the first disc-shaped cam The arm is moved in the vertical direction (z direction) perpendicular to the longitudinal direction (x direction) of the arm, and the arm is moved according to the rotational position of the second disk-shaped cam. A second link portion for driving in the rotational direction (θ direction), and a third link portion for driving the arm in the longitudinal direction (x direction) according to the rotational position of the third disc-shaped cam; The second link portion includes a link member that is not affected by the position of the arm in the vertical direction (z direction) and the position in the longitudinal direction (x direction), and the third link portion. Is the vertical direction of the arm (z Direction) and a link member that is not affected by the position in the rotational direction (θ direction), and the first link portion is provided at a lower portion of the housing and is in contact with the first disc-shaped cam. When the first cam follower is in contact with one region of the first disc-shaped cam, the housing is lifted in the vertical direction (z direction) through the first cam follower. The arm is moved to a position to move the arm to the raised position in the vertical direction (z direction), and the second link portion has a plane (yz direction) whose one end is perpendicular to the longitudinal direction (x direction) of the arm. A second link plate rotatably provided on the second link plate, a second cam follower provided on the second link plate and in contact with the second disc-shaped cam, and one end of the second link plate The second link provided on A follower, a second link pulley connected to the arm pulley provided in the arm via a belt, a pulley follower provided in the second link pulley, the second link follower, and the pulley follower. And a guide for guiding the connecting portion in a predetermined direction on the yz plane, and a region of the second disc-shaped cam and the second cam follower are in contact with each other The one end of the second link plate is rotated in one direction on the yz plane, and the connecting portion is connected via the second link follower in accordance with the rotation of the second link plate in one direction. Is moved in one direction in the y direction on the yz plane, and the second link pulley is rotated in one direction on the yz plane via the pulley follower in accordance with the one direction movement of the connecting portion. This second As the link pulley rotates in one direction, the arm on which the arm pulley connected to the second link pulley via the belt is rotated in one direction of the rotation direction (θ direction), and the component suction The third link portion is bent at a predetermined angle, and is in the vicinity of the bent portion on a plane (zx plane) in the longitudinal direction (x direction) and the vertical direction (z direction). A third link plate provided rotatably, a third cam follower provided at one end of the third link plate and in contact with the third disc-shaped cam, and the third link plate A third follower having a third follower provided at the other end and a ring provided at an end portion of the arm so as to sandwich the third follower between two members; Region of the cam and the third cam follower , The other end of the third link plate is rotated in one direction on the zx plane, and the rotation of the third link plate in one direction is performed via the third follower. The arm provided with a ring at the end is moved to the advance position in the longitudinal direction (x direction).

  In the present invention, the arm can be moved freely in the longitudinal direction, the rotational direction, and the vertical direction by the first, second, and third disk-shaped cams provided on one drive shaft. Each disk-like cam is connected to the arm by the first link portion, the second link portion, and the third link portion, respectively, and the arm drive position by the operation of any one of the link portions. Regardless of this, the remaining link portions can be operated.

Hereinafter, an arm drive mechanism used in a mounting apparatus according to the present invention will be described in detail with reference to the drawings.

  As shown in FIG. 1, the arm drive mechanism 20 is applied to a mounting apparatus 10 for mounting an electronic component such as a semiconductor. The mounting apparatus 10 is an apparatus that mounts an electronic component 2a such as a semiconductor on a predetermined portion of a substrate 3a. An xy stage 1, a frame 4a, and a component supply unit 5 having an arm driving mechanism 20 are mounted on a gantry 6. Installed. On the xy stage 1, a chip tray 2 for placing an electronic component 2 a, a substrate stage 3 for placing a substrate 3 a, and a chip recognition camera 7 for imaging an electronic component held by a bonding head 4 (described later). And are provided. The frame 4 a is provided with a bonding head 4 so as to face the xy stage 1, and the bonding head 4 is provided with a substrate recognition camera 8 that images the substrate 3 a placed on the substrate stage 3. It has been.

  The mounting apparatus 10 transfers the electronic component 2 a on the chip tray 2 to the bonding head 4 using the arm drive mechanism 20 provided in the component supply unit 5, and the electronic component held by the bonding head 4 is transferred onto the substrate stage 3. It is mounted at a predetermined location on the substrate 3a.

  Next, the arm drive mechanism 20 provided in the component supply unit 5 that delivers the electronic component 2a to the bonding head 4 as described above will be described.

  As shown in FIG. 2, the arm driving mechanism 20 is provided in the component supply unit 5, and rotates the long arm 17 in the longitudinal direction (x direction in FIG. 2) and the longitudinal direction. (Θ direction in FIG. 2), it is driven in the vertical direction (z direction in FIG. 2) perpendicular to the longitudinal direction. The arm drive mechanism 20 includes a drive shaft 13 for driving the arm 17, a drive motor 11 for rotating the drive shaft 13, a first disc cam 16 a provided on the drive shaft 13, and a second circle. A plate-shaped cam 16b, a third disk-shaped cam 16c (hereinafter collectively referred to as a disk-shaped cam 16), a housing 15 that holds the arm 17 so as to be drivable in the x direction and the θ direction, and a first A first link portion 30 that links the disc-shaped cam 16a and the arm 17, a second link portion 40 that links the second disc-shaped cam 16b and the arm 17, and a third disc-shaped cam 16c and the arm 17 are comprised from the 3rd link part 50 linked.

  Further, the component supply unit 5 sucks and holds the electronic component 2 a by the component suction unit 14 provided at the tip of the arm 17 of the arm drive mechanism 20, and is moved to a predetermined position by the arm drive mechanism 20. Is transferred to the bonding head 4.

  As shown in FIG. 2, the drive shaft 13 is provided at the lower part of the arm 17 in the z direction so as to be parallel to the arm 17, and a pulley 12 c attached to the drive shaft 13 and a pulley attached to the drive motor 11. The drive motor 11 is connected by connecting the belt 12b to the drive motor 11a. As described above, the drive shaft 13 is not limited to the one connected to the drive motor 11 by the two pulleys 12a, 12c and the belt 12b, but may be one in which the drive shaft 13 and the drive motor 11 are directly connected. Good.

  The arm 17 is formed of a long member, and is provided with a component suction portion 14 for sucking and holding an electronic component or the like at one end, and a ring 54 of a third link portion 50 described later at the other end. Is provided. The arm 17 has a housing 15 at a substantially central portion of the long member. The housing 15 allows the arm 17 to be driven in the longitudinal direction (x direction) and the rotation direction (θ direction).

  The first disc-shaped cam 16a is connected to the arm 17 via the first link portion 30, and drives the arm 17 in the up-down direction (z direction).

  As shown in FIG. 3, the first link portion 30 includes a cam follower 21 that comes into contact with the first disc-shaped cam 16 a and a guide 22. The cam follower 21 is provided in the lower part of the housing 15 in the z direction, is in contact with the uppermost part of the first disk-shaped cam 16a, and is rotatable so as not to be affected by the rotation of the first disk-shaped cam 16a. It is provided to become. The guide 22 is a member that restricts the housing 15 to operate only in the vertical direction (z direction).

  The second disk-shaped cam 16b is connected to the arm 17 via the second link portion 40, and drives the arm 17 in the rotational direction (θ direction).

As shown in FIGS. 2, 4, and 6, the second link portion 40 includes a link plate 32 having one end rotatably fixed on a plane (yz plane) perpendicular to the longitudinal direction of the arm 17, and a cam follower 31 provided on the link plate 32, the follower 33 provided at the other end of the link plate 32, pulleys 37a, 37c, a connecting portion 36 for connecting the follower 35 for rotating the arm 17 by the belt 37b, It is comprised from the guide 34 which guides the connection part 36 to a predetermined direction. The link plate 32 is a member that transmits the rotation operation of the second disc-shaped cam 16 b to the connecting portion 36 via the cam follower 31 and the follower 33. The connecting portion 36 is a member that connects the follower 33 and the follower 35 of the link plate 32. The connecting portion 36 is restricted by the guide 34 so as to operate only in the y direction. The follower 33 and the follower 35 are provided so as to be rotatable in the vertical direction so as to transmit only the motion in the y direction to the connecting portion 36 and transmit the motion in the vertical direction (z direction) to the connecting portion 36. ing. Further, the follower 35 is provided with a pulley 37a, is connected to a pulley 37c provided on the arm 17 via a belt 37b, and rotates the arm 17.

  The third disc-shaped cam 16c is connected to the arm 17 via the third link portion 50, and drives the arm 17 in the longitudinal direction (x direction).

  As shown in FIG. 2, the third link portion 50 is bent at a predetermined angle, and is a link plate fixed so as to be rotatable on a plane (xz plane) in the longitudinal direction and the vertical direction in the vicinity of the bent portion. 42, a cam follower 41 provided at one end of the link plate 42 and in contact with the third disc-shaped cam 16c, a follower 43 provided at the other end of the link plate 42, and a ring provided at the end of the arm 17 54. The link plate 42 is a member that transmits the rotation of the third disc-shaped cam 16 c to the ring 54 via the cam follower 41 and the follower 43.

  The ring 54 is formed so that the cross-sectional shape is substantially H-shaped, with a disk-shaped member having a smaller diameter sandwiched between two disk-shaped members. The ring 54 rotates according to the rotation operation of the arm 17, and transmits only the operation in the longitudinal direction (x direction) among the rotation operations of the link plate 42 to the arm 17. Further, the ring 54 has a follower 43 connected to a substantially H-shaped groove, and is connected to the third disc-shaped cam 16 c via the link plate 42.

  The cam follower 41 is rotatably provided so as not to be affected by the rotation operation of the third disc-shaped cam 16c. Further, the follower 43 is rotatably provided so as not to be affected by the rotating operation of the ring 54.

  Next, the operation state of each disk-like cam 16 will be described.

  As shown in FIG. 5A, the first disc-shaped cam 16a has four regions 16a1, 16a2, 16a3, and 16a4. Each region has a constant distance from the drive shaft 13 to which the first disc-like cam 16a is attached, and moves the arm 17 to a predetermined position in the vertical direction (z direction) according to each distance. . Since the first disc-shaped cam 16a moves the arm 17 to three states of an intermediate position, a lowered position, and an elevated position, the distance from the drive shaft 13 in each region is (the drive shaft 13 in the region 16a2). Distance from the drive shaft 13 in the region 16a1 = (distance from the drive shaft 13 in the region 16a3)> (distance from the drive shaft 13 in the region 16a4).

  The first disc-shaped cam 16 a moves the housing 15 up and down in accordance with the respective areas in contact with the cam follower 21. Specifically, when the first disc-shaped cam 16a is in contact with the cam follower 21 in the region 16a1 and the region 16a3, the housing 15 is moved to an intermediate position as shown in FIGS. 5 (B) and 5 (D). Let Further, when the first disc-shaped cam 16a contacts the cam follower 21 in the region 16a4, as shown in FIG. 5C, the housing 15 is moved to the lowered position. Further, when the first disc-shaped cam 16a is in contact with the cam follower 21 in the region 16a2, as shown in FIG. 5 (E), the housing 15 is moved to the raised position.

  As shown in FIG. 6A, the second disc-shaped cam 16b has two regions 16b1 and 16b2. Each region has a constant distance from the drive shaft 13 to which the second disc-shaped cam 16b is attached, and the arm 17 is moved to a predetermined position in the rotational direction (θ direction) according to each distance. . The second disk-shaped cam 16b moves the component suction portion 14 of the arm 17 in two states, downward and upward, so that the distance from the drive shaft 13 in each region is (in the region 16b2 Distance from drive shaft 13)> (distance from drive shaft 13 in region 16b1).

  The second disc-shaped cam 16 b rotates the arm 17 in accordance with each region in contact with the cam follower 31. Specifically, when the second disc-shaped cam 16b is in contact with the cam follower 31 in the region 16b1, as shown in FIG. 6B, the component suction portion 14 of the arm 17 is moved downward. Further, when the second disk-shaped cam 16b contacts the cam follower 31 in the region 16b2, as shown in FIG. 6C, the component suction portion 14 of the arm 17 is moved upward.

  As shown in FIG. 7A, the third disc-shaped cam 16c has two regions 16c1 and 16c2. Each region has a constant distance from the drive shaft 13 to which the third disc-like cam 16c is attached, and the arm 17 is moved to a predetermined position in the longitudinal direction (x direction) according to each distance. . The third disc-shaped cam 16c moves the arm 17 to two states, the forward position and the backward position, and the distance from the drive shaft 13 in each region is (the distance from the drive shaft 13 in the region 16c2). )> (Distance from the drive shaft 13 in the region 16c1).

  The third disc-shaped cam 16c moves the arm 17 in the longitudinal direction in accordance with each region in contact with the cam follower 41. Specifically, when the third disc-shaped cam 16c is in contact with the cam follower 41 in the region 16c1, as shown in FIG. 7B, the arm 17 is moved to the retracted position in the longitudinal direction. Further, when the third disc-shaped cam 16c comes into contact with the cam follower 41 in the region 16c2, as shown in FIG. 7C, the arm 17 is moved to the advance position in the longitudinal direction.

  The arm drive mechanism 20 having the above-described configuration is constituted by a first disc-like cam 16a, a second disc-like cam 16b, and a third disc-like cam 16c provided on one drive shaft 13. The arm 17 can be driven in the longitudinal direction (x direction), the direction rotating with respect to the longitudinal direction (θ direction), and the vertical direction (z direction). Each disk-like cam 16 is connected to the arm 17 by the first link part 30, the second link part 40, and the third link part 50, respectively. Regardless of the drive position of 17, the other link portions can be operated.

  Further, the arm driving mechanism 20 described above is used in a semiconductor mounting apparatus 10 as shown in FIG. 1, and the mounting apparatus 10 can be downsized. Further, since the mounting apparatus 10 is provided with the chip tray 2, the substrate stage 3 and the chip recognition camera 7 on the xy stage 1, the chip tray 2, the substrate stage 3 and the chip recognition camera 7 are moved on the xy plane. Since one drive source can be provided, further miniaturization can be achieved. Similarly, since the substrate recognition camera 8 is provided on the bonding head 4, the drive source of the substrate recognition camera 8 can be made the same as that of the bonding head 4, and the size can be reduced.

1 is a schematic perspective view of a mounting apparatus to which an arm driving mechanism according to an embodiment of the present invention is applied. It is a front view of the component supply part to which the arm drive mechanism which concerns on one Embodiment of this invention was applied. It is a figure for demonstrating a 1st link part. It is a figure for demonstrating a 2nd link part. It is a figure which shows the operation state of the arm in the rotation position of a 1st disk shaped cam. It is a figure which shows the operation state of the arm in the rotation position of a 2nd disk shaped cam. It is a figure which shows the operation state of the arm in the rotation position of a 3rd disk shaped cam. It is the figure which showed the conventional mounting apparatus. It is a figure for demonstrating the conventional arm drive mechanism.

Explanation of symbols

  1 XY stage, 2 chip tray, 2a electronic component, 3 substrate stage, 3a substrate, 4 bonding head, 4a frame, 5 component supply unit, 6 mount, 7 chip recognition camera, 8 substrate recognition camera, 11 drive motor, 12a, 12c Pulley, 12b Belt, 13 Drive shaft, 14 Parts adsorbing part, 15 Housing, 16 Disk-shaped cam, 16a First disk-shaped cam, 16b Second disk-shaped cam, 16c Third disk-shaped cam 17 arm, 20 arm drive mechanism, 21 cam follower, 22 guide, 30 first link part, 31 cam follower, 32 link plate, 33, 35 follower, 34 guide, 36 connecting part, 40 second link part, 50 3 link parts, 54 rings, 100 slip chip bonding equipment, 101 electronic components, 1 2 chip tray, 103 substrate, 104 a substrate stage, 105 bonding head, 106 transfer unit, 107 camera unit, 111 holder, 112 rise and fall actuator 113 intermediate stop actuator, 114 rotary actuator 115 forward and backward actuator

Claims (2)

In a mounting device that mounts electronic components on a substrate placed on a stage,
A bonding head provided at a position facing the stage, and mounting the electronic component on the substrate;
The bonding head includes component supply means including an arm drive mechanism for supplying the electronic component,
The electronic component is placed on the same stage as the stage on which the substrate is placed,
The arm drive mechanism is
Driving a long arm having a component adsorbing portion for adsorbing and holding the electronic component , and a single drive shaft provided below the arm and parallel to the arm in the same direction ;
A drive unit that rotationally drives the one drive shaft;
First, second and third disk-shaped cams provided on the one drive shaft;
A housing for drivingly driving the arm in a longitudinal direction (x direction) of the arm and a rotational direction (θ direction) rotating with respect to the longitudinal direction (x direction) of the arm;
A first link portion for driving the housing in a vertical direction (z direction) perpendicular to a longitudinal direction (x direction) of the arm according to a rotational position of the first disc-shaped cam;
A second link portion for driving the arm in the rotational direction (θ direction) according to the rotational position of the second disc-shaped cam;
A third link portion for driving the arm in the longitudinal direction (x direction) according to the rotational position of the third disc-shaped cam;
The second link portion has a link member that is not affected by the position in the vertical direction (z direction) and the position in the longitudinal direction (x direction) of the arm, and the third link portion is have a link member which is not affected by the position in the position and the direction of rotation (theta direction) of the arm of the vertical direction (z-direction),
The first link portion is provided at a lower portion of the housing, has a first cam follower that contacts the first disc-shaped cam, and includes a region of the first disc-shaped cam and the first When the cam follower is in contact, the housing is moved to the raised position in the vertical direction (z direction) via the first cam follower, the arm is moved to the raised position in the vertical direction (z direction),
The second link portion includes a second link plate having one end rotatably provided on a plane (yz direction) perpendicular to the longitudinal direction (x direction) of the arm, and the second link plate. A second cam follower provided in contact with the second disc-shaped cam, a second link follower provided at one end of the second link plate, an arm pulley and a belt provided in the arm. A connected second link pulley, a pulley follower provided in the second link pulley, a connecting portion for connecting the second link follower and the pulley follower, and the connecting portion on the yz plane. A guide that guides in a predetermined direction, and when one region of the second disc-shaped cam is in contact with the second cam follower, one end of the second link plate is placed on the yz plane. Rotate in one direction, As the link plate rotates in one direction, the connecting portion is moved in one direction in the y direction on the yz plane via the second link follower, and the connecting portion moves in one direction. The second link pulley is rotated in one direction on the yz plane via the pulley follower, and the second link pulley and the belt are rotated in one direction with the rotation of the second link pulley. Rotate the arm provided with the arm pulley connected via the one direction of the rotation direction (θ direction), the component suction portion is in an upward state,
The third link portion is bent at a predetermined angle, and is provided so as to be rotatable on a plane (zx plane) in the longitudinal direction (x direction) and the vertical direction (z direction) in the vicinity of the bent portion. A third link plate, a third cam follower provided at one end of the third link plate and in contact with the third disc-shaped cam, and a third cam follower provided at the other end of the third link plate. 3 followers and a ring provided at an end of the arm and formed to sandwich the third follower with two members, and one region of the third disc-shaped cam; When the third cam follower is in contact with the third cam plate, the other end of the third link plate is rotated in one direction on the zx plane, and the third link plate is rotated in one direction. Through the follower, the arm provided with a ring at the end is moved in the longitudinal direction ( Mounting device for moving the forward position in the direction). The stage further includes a first camera that detects a surface image of the bonding head,
The bonding head is mounting apparatus according to claim 1, wherein that having a second camera for detecting a surface image of the stage.

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