JP4671744B2 - Image pickup device storage package and image pickup apparatus - Google Patents

Image pickup device storage package and image pickup apparatus Download PDF

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JP4671744B2
JP4671744B2 JP2005119341A JP2005119341A JP4671744B2 JP 4671744 B2 JP4671744 B2 JP 4671744B2 JP 2005119341 A JP2005119341 A JP 2005119341A JP 2005119341 A JP2005119341 A JP 2005119341A JP 4671744 B2 JP4671744 B2 JP 4671744B2
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image pickup
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康 鳥原
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Kyocera Corp
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Description

本発明は、主にCCD、C−MOS等の撮像素子を収納するための、リード端子を具備するとともに枠体の上面に水晶ローパスフィルターが直付けされた撮像素子収納用パッケージに関するものである。   The present invention relates to an image sensor housing package that has lead terminals for housing an image sensor such as a CCD or C-MOS, and has a crystal low-pass filter directly attached to the upper surface of a frame.

近年、CCD、C−MOS等の撮像素子を一眼レフカメラ用の撮像装置として利用し、デジタルカメラ化するニーズが高まっている。さらにそのデジタルカメラでは従来の銀塩一眼レフ用の交換レンズを利用可能とするため、撮像装置を薄型化するとともに、撮像素子の画像品質を向上するために撮像素子を大型化して銀塩フィルムのサイズに近付けようとする要求が高まっている。   In recent years, there has been a growing need for using digital imaging cameras such as CCDs and C-MOSs as imaging devices for single-lens reflex cameras. Furthermore, in order to make it possible to use conventional interchangeable lenses for silver salt single-lens reflex cameras in the digital camera, the imaging device is thinned and the imaging device is enlarged to improve the image quality of the imaging device. There is a growing demand to get closer to size.

このような撮像装置薄型化に対しては、従来の撮像素子収納用パッケージ(以下、単にパッケージともいう)の上面に接着されていたカバーガラスを省略し光学ローパスフィルター機能のある水晶板を直付けする技術が実用化されつつある。
In order to reduce the thickness of such an image pickup device , the cover glass attached to the upper surface of a conventional image pickup device storage package (hereinafter also simply referred to as a package) is omitted, and a crystal plate having an optical low-pass filter function is directly used. This technology is being put into practical use.

また、撮像素子の大型化に対しては、高い信頼性を得るために撮像素子が収納されたパッケージの構造を最適化することが必須課題となっている。   In addition, in order to increase the size of the image sensor, it is an essential task to optimize the structure of the package in which the image sensor is stored in order to obtain high reliability.

従来カメラ等に用いるCCD、C−MOS等の撮像素子を収納するパッケージには上面の中央部に撮像素子の搭載部が形成された四角平板状のアルミナセラミックスからなる絶縁体の基板と、この基板の上面の外周部の対向する一対の辺部にそれぞれ取着された金属から成る複数のリード端子と、この複数のリード端子を介して基板の上面の外周部の全周にわたって樹脂または低融点ガラスで接合された、アルミナセラミックスからなる絶縁体の枠体と、この枠体の上面に樹脂で接着された光学ローパスフィルター機能のある水晶板とを具備しているパッケージが使用されていた。   A package for housing an image sensor such as a CCD or C-MOS used in a conventional camera or the like is an insulating substrate made of a square plate-like alumina ceramic in which an image sensor mounting portion is formed at the center of the upper surface, and this substrate. A plurality of lead terminals made of metal respectively attached to a pair of opposing side portions of the outer peripheral portion of the upper surface of the substrate, and a resin or low melting point glass over the entire periphery of the outer peripheral portion of the upper surface of the substrate via the plurality of lead terminals A package comprising an insulator frame made of alumina ceramic and a quartz plate having an optical low-pass filter function bonded to the upper surface of the frame with a resin has been used.

この従来のパッケージを用いた撮像装置の断面図および平面図をそれぞれ図3(a)および図3(b)に示す。図3において11はセラミックスから成る枠体、15は熱硬化性樹脂または低融点ガラスから成る接合材、13はセラミックスから成る基板、14は撮像素子、12はリード端子、17は光学ローパスフィルター機能を有する水晶板、16は水晶板17と枠体16とを接着させる樹脂を示す。   A cross-sectional view and a plan view of an imaging apparatus using this conventional package are shown in FIGS. 3 (a) and 3 (b), respectively. In FIG. 3, 11 is a frame made of ceramics, 15 is a bonding material made of thermosetting resin or low melting glass, 13 is a substrate made of ceramics, 14 is an image sensor, 12 is a lead terminal, and 17 is an optical low-pass filter function. The quartz plate 16 has a resin for bonding the quartz plate 17 and the frame body 16 together.

蓋として用いる水晶板17については光学的に復屈折の性質をもつ水晶を結晶方向に対して45度または0度の角度で切断することで作製される。この水晶板17を枠体11に樹脂16で接着することで最小の厚みで封着を行うことが可能になり撮像素子14を外気から遮断すると同時に水晶板17を撮像素子14に対して高精度に位置決め固定することが可能となり水晶板17のもつ復屈折の光学的ローパスフィルター機能によって撮像素子14に発生するモアレ効果を防止できる。
特開2000−114502号公報 特開2003−17607号公報
The quartz plate 17 used as a lid is manufactured by cutting a quartz crystal having an optically birefringent property at an angle of 45 degrees or 0 degrees with respect to the crystal direction. By attaching the quartz plate 17 to the frame 11 with the resin 16, it is possible to seal the quartz plate 17 with the minimum thickness. Therefore, the moire effect generated in the image sensor 14 can be prevented by the birefringent optical low-pass filter function of the crystal plate 17.
Japanese Unexamined Patent Publication No. 2000-114502 JP 2003-17607

しかしながら、従来のパッケージを用いた撮像装置では撮像素子が大型化になるにつれパッケージも大型になるため、水晶板17を熱硬化型のエポキシ樹脂で接着した後に、線熱膨張係数11×10−6/℃の水晶板17と線熱膨張係数6.5×10−6/℃枠体11の接合面に相互の線熱膨張の差で発生する内部応力により基板の湾曲量が増加し、その結果、撮像素子14も基板の湾曲に追従して基板との接合面と反対側の主面(撮像面)が凸状に湾曲し撮像素子の光学的な位置精度を劣化させるという問題があった。 However, in an imaging apparatus using a conventional package, the package becomes larger as the imaging element becomes larger. Therefore, after the crystal plate 17 is bonded with a thermosetting epoxy resin, the linear thermal expansion coefficient is 11 × 10 −6. The amount of bending of the substrate increases due to the internal stress generated by the difference in linear thermal expansion between the crystal plate 17 at / ° C. and the coefficient of linear thermal expansion 6.5 × 10 −6 / ° C. 11 and the frame 11. The element 14 also has a problem that the main surface (imaging surface) opposite to the bonding surface with the substrate is curved in a convex shape following the curvature of the substrate, thereby degrading the optical positional accuracy of the imaging device.

また水晶板17と枠体11の接合面に相互の線熱膨張の差で発生する内部応力が発生することにより熱ストレスや機械的ストレスで水晶板17と枠体11との接合界面が容易に剥離したり水晶板17が割れたりし、その結果パッケージ内の気密性が低下するという問題があった。   In addition, the internal stress generated by the difference in linear thermal expansion between the crystal plate 17 and the frame 11 is generated, so that the interface between the crystal plate 17 and the frame 11 is easily caused by thermal stress or mechanical stress. There is a problem in that peeling or crystal plate 17 breaks, resulting in a decrease in airtightness in the package.

本発明は、上記問題点に鑑みて完成されたものであり、その目的は、撮像素子の光学的な位置精度に優れるとともに気密信頼性の高い撮像素子収納用パッケージおよび撮像装置を提供することにある。   The present invention has been completed in view of the above problems, and an object of the present invention is to provide an image sensor housing package and an image pickup apparatus that are excellent in optical positional accuracy of the image sensor and have high airtight reliability. is there.

本発明の撮像素子収納用パッケージは、上面の中央部に撮像素子の搭載部が形成された四角平板状の絶縁体から成る基板と、該基板の上面の外周部に取着された金属から成る複数のリード端子と、該複数のリード端子を介して前記基板の上面の外周部の全周にわたって接合材を介して接合された枠体と、該枠体の上面に前記枠体の内側を塞ぐように接着された水晶板とを具備した撮像素子収納用パッケージにおいて、前記枠体および前記基板を線熱膨張係数が8×10−6乃至10×10−6/℃である絶縁体で構成し、前記枠体を前記基板の側面よりも外側に張り出させ、前記接合材を前記基板の側面から前記張り出した枠体の下面にかけて形成し、前記リード端子の下面と該下面側に位置する前記接合材の側面との交線を前記リード端子の上面と該上面側に位置する前記接合材の側面との交線よりも前記基板側に位置させたことを特徴とする。
The image pickup device storage package of the present invention comprises a substrate made of a rectangular flat plate-like insulator having an image pickup device mounting portion formed in the center of the upper surface, and a metal attached to the outer peripheral portion of the upper surface of the substrate. A plurality of lead terminals, a frame body joined via a joining material over the entire circumference of the outer peripheral portion of the upper surface of the substrate via the plurality of lead terminals, and the inside of the frame body is blocked by the upper surface of the frame body in adhered imaging element storage package and a quartz plate as the frame and linear thermal expansion coefficient of the substrate is composed of 8 × 10 -6 to 10 × 10 -6 / ℃ a is an insulator The frame body is projected outward from the side surface of the substrate, and the bonding material is formed from the side surface of the substrate to the lower surface of the projecting frame body, and is positioned on the lower surface of the lead terminal and the lower surface side. The line of intersection with the side surface of the bonding material and the upper surface of the lead terminal It is characterized in that it is positioned on the substrate side with respect to the line of intersection with the side surface of the bonding material positioned on the upper surface side .

本発明の撮像素子収納用パッケージにおいて好ましくは、前記枠体および前記基板をステアタイトセラミックスで形成したことを特徴とする。   In the image pickup device storage package of the present invention, preferably, the frame and the substrate are formed of steatite ceramics.

本発明の撮像素子収納用パッケージにおいて好ましくは、前記撮像素子を、平面視して長辺が20乃至37mm、短辺が13乃至24mmのシリコンとしたことを特徴とする。   In the image pickup device storage package of the present invention, preferably, the image pickup device is made of silicon having a long side of 20 to 37 mm and a short side of 13 to 24 mm in plan view.

本発明の撮像装置は、上記本発明の撮像素子収納用パッケージと、前記搭載部に搭載されるとともに前記複数のリード端子に電気的に接続された撮像素子とを具備していることを特徴とする。   An image pickup apparatus according to the present invention includes the image pickup element storage package according to the present invention, and an image pickup element mounted on the mounting portion and electrically connected to the plurality of lead terminals. To do.

本発明の撮像素子収納用パッケージは、撮像素子収納用パッケージにおいて、枠体および基板を線熱膨張係数が8×10−6乃至10×10−6/℃である絶縁体で構成したことから、基板および枠体の線熱膨張係数を水晶板の線熱膨張係数に近似させることができ、水晶板接着後の接合応力を非常に小さくすることが可能と成る結果、気密信頼性を非常に高くすることができるとともに、撮像素子に加わる応力を抑制して撮像素子の光学的な位置精度を非常に良好にすることができる。 In the image pickup device storage package according to the present invention, in the image pickup device storage package, the frame and the substrate are formed of an insulator having a linear thermal expansion coefficient of 8 × 10 −6 to 10 × 10 −6 / ° C. The linear thermal expansion coefficient of the substrate and the frame can be approximated to the linear thermal expansion coefficient of the quartz plate, and the bonding stress after bonding the quartz plate can be made extremely small, resulting in extremely high airtight reliability. In addition, the optical position accuracy of the image sensor can be made very good by suppressing the stress applied to the image sensor.

本発明の撮像素子収納用パッケージは、好ましくは枠体および基板をステアタイトセラミックスで形成したことから、樹脂接着剤との塗れなじみが良好で撮像素子を樹脂接着剤で強固に基板に接着することが可能になり撮像装置の信頼性を向上させる効果がある。   In the image pickup device storage package of the present invention, since the frame body and the substrate are preferably formed of steatite ceramics, the familiarity with the resin adhesive is good and the image pickup device is firmly bonded to the substrate with the resin adhesive. And the reliability of the imaging apparatus is improved.

本発明の撮像素子収納用パッケージは、好ましくは撮像素子を、平面視して長辺が20乃至37mm、短辺が13乃至24mmのシリコンとしたことから、撮像素子を大型化して銀塩フィルムのサイズに近付けて撮像素子の画像品質を向上させることができるとともに、このような大型の撮像素子を収納しても、撮像素子、基板、リード端子、枠体および水晶板との相互の線熱膨張差によって生じる内部応力をきわめて良好に抑制できることで撮像素子表面の平面度を向上させることが可能になり撮像素子の光学的な位置精度を向上させる効果がある。   The image pickup device storage package according to the present invention is preferably made of silicon having a long side of 20 to 37 mm and a short side of 13 to 24 mm in plan view. The image quality of the image sensor can be improved by approaching the size, and mutual linear thermal expansion between the image sensor, the substrate, the lead terminal, the frame, and the crystal plate even if such a large image sensor is accommodated. By suppressing the internal stress caused by the difference very well, it is possible to improve the flatness of the surface of the image sensor, and there is an effect of improving the optical positional accuracy of the image sensor.

本発明の撮像素子収納用パッケージは、枠体を基板の側面よりも外側に張り出させ、接合材を基板の側面から枠体の張り出した部位の下面にかけて形成し、リード端子の下面と接合材の側面との交線をリード端子の上面と接合材の側面との交線よりも基板側に位置させたことから、撮像素子、基板、リード端子、枠体および水晶板との相互の線熱膨張差によって生じる内部応力が撮像素子収納用パッケージのリード端子の取り付け部に集中することを有効に抑制でき、リード端子周辺から気密性が損なわれることがなく撮像素子収納パッケージの信頼性を向上させる効果がある。
The image pickup device storage package of the present invention has a frame projecting outward from the side surface of the substrate, and a bonding material is formed from the side surface of the substrate to the lower surface of the projecting portion of the frame, and the lower surface of the lead terminal and the bonding material Because the line of intersection with the side surface of the image sensor is positioned closer to the substrate side than the line of intersection between the upper surface of the lead terminal and the side surface of the bonding material, the mutual linear heat between the image sensor, the substrate, the lead terminal, the frame, and the quartz plate It is possible to effectively suppress the internal stress caused by the expansion difference from concentrating on the mounting portion of the lead terminal of the image sensor housing package, and to improve the reliability of the image sensor housing package without impairing airtightness from the periphery of the lead terminal. effective.

すなわち、基板の搭載部に撮像素子を搭載して接着させた後の冷却工程において、撮像素子と基板との線熱膨張差によって基板が搭載部を上にして凸状に反り、このとき特にリード端子の下側に位置する接合材を撮像素子側へ引張るような応力が生じる。このような引張り応力が加わりやすいリード端子の下面側において接合材との接合面を小さくしてリード端子の下面を接合材から開放することにより、引張り応力を有効に緩和することが可能となり、リード端子周辺から気密性が損なわれるのを有効に防止できる。   That is, in the cooling step after the image sensor is mounted and bonded to the mounting portion of the substrate, the substrate warps in a convex shape with the mounting portion facing upward due to the difference in linear thermal expansion between the image sensor and the substrate. A stress is generated that pulls the bonding material located on the lower side of the terminal toward the image sensor. By reducing the bonding surface with the bonding material on the lower surface side of the lead terminal where tensile stress is easily applied and releasing the lower surface of the lead terminal from the bonding material, it is possible to effectively relieve the tensile stress. It is possible to effectively prevent the airtightness from being lost around the terminals.

本発明の撮像装置は、上記本発明の撮像素子収納用パッケージと、搭載部に搭載されるとともに複数のリード端子に電気的に接続された撮像素子とを具備していることから、上記本発明の撮像素子収納用パッケージの作用効果を有する、光学的な位置精度に優れるともに気密信頼性の高い撮像装置を提供することが可能になる。   The image pickup apparatus of the present invention includes the image pickup element storage package of the present invention and the image pickup element mounted on the mounting portion and electrically connected to the plurality of lead terminals. It is possible to provide an image pickup apparatus that has the effect of the image pickup device storage package and that has excellent optical positional accuracy and high hermetic reliability.

次に本発明の撮像素子収納用パッケージおよび撮像装置を添付の図面に基づいて詳細に説明する。   Next, an image pickup device storage package and an image pickup apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

図1(a)は、本発明のパッケージを用いた撮像装置の参考例を示す断面図であり、図1(b)は図1(a)のパッケージを用いた撮像装置の水晶板をはずした状態での平面図である。
1 (a) is a sectional view showing a reference example of the imaging apparatus using the package of the present invention, FIG. 1 (b), croton a quartz plate of an imaging device using a package of FIGS. 1 (a) FIG.

図1において、1は枠体、2はリード端子、3は基板、4は撮像素子、5は接合材、7は光学ローパスフィルター機能を有する水晶板、6は水晶板7と枠体1とを接着する接着剤を示す。   In FIG. 1, 1 is a frame, 2 is a lead terminal, 3 is a substrate, 4 is an image sensor, 5 is a bonding material, 7 is a crystal plate having an optical low-pass filter function, and 6 is a crystal plate 7 and the frame 1. Indicates the adhesive to be bonded.

本発明のパッケージは、図1に示すように、上面の中央部に撮像素子4の搭載部が形成された四角平板状の絶縁体の基板3と、この基板3の上面の外周部に取着された金属から成る複数のリード端子2と、この複数のリード端子2を介して基板3の上面の外周部の全周にわたって接合材5で接合された絶縁体の枠体1とから主に形成されている。   As shown in FIG. 1, the package of the present invention has a rectangular plate-like insulator substrate 3 in which the mounting portion of the image sensor 4 is formed at the center of the upper surface, and is attached to the outer peripheral portion of the upper surface of the substrate 3. It is mainly formed from a plurality of lead terminals 2 made of a metal and an insulator frame 1 bonded by a bonding material 5 over the entire outer periphery of the upper surface of the substrate 3 via the plurality of lead terminals 2. Has been.

そして、このパッケージの搭載部に撮像素子4を搭載し、枠体1の上面に光学ローパスフィルター機能のある水晶板7を樹脂接着剤等からなる接着剤6で接着することにより本発明の撮像装置となる。   Then, the image pickup device 4 is mounted on the mounting portion of the package, and the crystal plate 7 having an optical low-pass filter function is bonded to the upper surface of the frame 1 with an adhesive 6 made of a resin adhesive or the like. It becomes.

枠体1および基板3は、線熱膨張係数が8×10−6乃至10×10−6/℃である絶縁体からなり、好ましくはステアタイトセラミックスから成る。このような枠体1および基板3は、例えば酸化マグネシウム,酸化珪素等の原料粉末に適当な有機バインダ,溶剤および可塑剤,分散剤を添加混合して泥漿物を作り、この泥漿物を従来周知のスプレードライ法を用いて顆粒化し、この顆粒を所定の形状のプレス金型によりプレス成形した後、約1500℃の高温で焼成することにより作製される。なお、この枠体1や基板3の表面を周知のラップ加工で平坦に研磨し20μm以下の平坦度に加工してもよい。 The frame 1 and the substrate 3 are made of an insulator having a linear thermal expansion coefficient of 8 × 10 −6 to 10 × 10 −6 / ° C., and preferably made of steatite ceramics. Such a frame 1 and the substrate 3 are made by mixing an appropriate organic binder, a solvent, a plasticizer, and a dispersant with raw material powders such as magnesium oxide and silicon oxide to make a mud, and this mud is conventionally known. The granules are granulated using the spray drying method, and the granules are press-molded with a press mold having a predetermined shape and then fired at a high temperature of about 1500 ° C. Note that the surface of the frame 1 or the substrate 3 may be flatly polished by a known lapping process and processed to a flatness of 20 μm or less.

リード端子2は、例えばFe−Ni−Co合金や42アロイ,銅(Cu),銅合金等の金属、または撮像素子4を電気的に接続するためのワイヤーボンディング(図示せず)が施される領域にアルミニウム箔が圧着されたFe−Ni−Co合金や42アロイ等の金属薄板から成る。   The lead terminal 2 is subjected to, for example, a metal such as Fe—Ni—Co alloy, 42 alloy, copper (Cu), copper alloy, or wire bonding (not shown) for electrically connecting the image sensor 4. It consists of a thin metal plate such as an Fe-Ni-Co alloy or 42 alloy with an aluminum foil bonded to the region.

リード端子2は、これらの金属から成る板材を、従来周知のスタンピング金型を用いた打ち抜き加工により、外周部に枠を有するとともにその枠の内周から内側に延出するようにリード端子2が展開された形状のリードフレームを形成後、この展開されたリード端子2を曲げ金型を用いた曲げ加工により、所望のL字状に曲げて形成されても良い。しかる後、Fe−Ni−Co合金や42アロイ,Cu,銅合金等の金属ではその表面にニッケルめっき層および金めっき層が電気めっきによって被着されてもよい。   The lead terminal 2 is formed by punching a plate material made of these metals by using a conventionally known stamping mold so that the lead terminal 2 has a frame on the outer peripheral portion and extends inward from the inner periphery of the frame. After forming the developed lead frame, the developed lead terminal 2 may be bent into a desired L-shape by bending using a bending die. Thereafter, a nickel plating layer and a gold plating layer may be applied to the surface of a metal such as an Fe—Ni—Co alloy, 42 alloy, Cu, or copper alloy by electroplating.

接合材5は例えば熱硬化性のエポキシ樹脂であり、例えばビスフェノールA型液状エポキシ樹脂,ビスフェノールF型液状エポキシ樹脂,フェノールノボラック型液状樹脂等から成る主剤に、球状の酸化珪素等から成る充填材,テトラヒドロメチル無水フタル酸等の酸無水物などを主とする硬化剤および着色剤としてカーボン紛末等を添加し遠心攪拌機等を用いて混合,混練してペースト状とする。次にこのペースト状の熱硬化性樹脂をスクリーン印刷法やディスペンス法等で枠体1や基板3の必要部分に塗布しトンネル式の雰囲気炉またはオーブン等で乾燥させた後、リード端子2を基板3と枠体1とで挟み込んだ状態でトンネル式の雰囲気炉またはオーブン等に通炉させ150℃で約90分間加熱することで接合材5を完全に硬化させ、基板3、枠体1およびリード端子2を強固に接着してパッケージを作製する。   The bonding material 5 is, for example, a thermosetting epoxy resin, for example, a main material made of bisphenol A type liquid epoxy resin, bisphenol F type liquid epoxy resin, phenol novolac type liquid resin, etc., and a filler made of spherical silicon oxide, etc. Add carbon powder as a curing agent mainly composed of acid anhydrides such as tetrahydromethylphthalic anhydride and the like, and mix and knead using a centrifugal stirrer to make a paste. Next, the paste-like thermosetting resin is applied to a necessary portion of the frame 1 or the substrate 3 by a screen printing method, a dispensing method or the like and dried in a tunnel type atmosphere furnace or oven, and then the lead terminal 2 is attached to the substrate. 3 and the frame 1 are sandwiched between a tunnel-type atmosphere furnace or oven and heated at 150 ° C. for about 90 minutes to completely cure the bonding material 5, and the substrate 3, frame 1 and lead The terminal 2 is firmly bonded to produce a package.

接合材5としては、この他にも例えばビスフェノールA型エポキシ樹脂やビスフェノールA変性エポキシ樹脂,ビスフェノールF型エポキシ樹脂,フェノールノボラック型エポキシ樹脂,クレゾールノボラック型エポキシ樹脂,特殊ノボラック型エポキシ樹脂,フェノール誘導体エポキシ樹脂,ビスフェノール骨格型エポキシ樹脂等のエポキシ樹脂にイミダゾール系やアミン系,リン系,ヒドラジン系,イミダゾールアダクト系,アミンアダクト系,カチオン重合系,ジシアンジアミド系等の硬化剤を添加したもの等を使用することができる。   Other bonding materials 5 include, for example, bisphenol A type epoxy resin, bisphenol A modified epoxy resin, bisphenol F type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, special novolac type epoxy resin, phenol derivative epoxy. Resin, epoxy resin such as bisphenol skeleton type epoxy resin, etc. with imidazole, amine, phosphorus, hydrazine, imidazole adduct, amine adduct, cationic polymerization, dicyandiamide, etc. added. be able to.

また接合材5は樹脂以外にも低融点ガラスを用いることができる。この場合、例えば、酸化鉛56〜66質量%、酸化硼素4〜14質量%、酸化珪素1〜6質量%および酸化亜鉛1〜11質量%を含むガラス成分に、フィラーとして酸化ジルコニウムシリカ系化合物を4〜15質量%添加したものが用いられ上記のガラス組成粉末に適当な有機溶剤,溶媒を添加混合して得たガラスペーストを、従来周知のスクリーン印刷法により枠体1の下面や基板3の上面に所定厚みに積層印刷塗布し、これを約430℃の温度で焼成することによって前述の基板3および枠体1に被着される。この後リード端子2を基板3と枠体1とで挟み込んだ状態でトンネル式の雰囲気炉またはオーブン等に通炉させ約470℃に加熱することで接合材5を溶融させ、基板3、枠体1およびリード端子2を強固に接着してパッケージを作製する。   In addition to the resin, the bonding material 5 can be a low melting point glass. In this case, for example, a zirconium oxide silica-based compound as a filler is added to a glass component containing 56 to 66% by mass of lead oxide, 4 to 14% by mass of boron oxide, 1 to 6% by mass of silicon oxide, and 1 to 11% by mass of zinc oxide. A glass paste obtained by adding 4 to 15% by mass and adding and mixing an appropriate organic solvent and solvent to the above glass composition powder is used for the lower surface of the frame 1 and the substrate 3 by a conventionally known screen printing method. Laminate printing is applied to the upper surface to a predetermined thickness, and this is baked at a temperature of about 430 ° C. to adhere to the substrate 3 and the frame 1 described above. After that, the lead terminal 2 is sandwiched between the substrate 3 and the frame 1 and passed through a tunnel type atmosphere furnace or oven and heated to about 470 ° C. to melt the bonding material 5. 1 and the lead terminal 2 are firmly bonded to produce a package.

撮像素子4はCCD(Charge Coupled Device)やC−MOS(Complementary Metal Oxide Semicondactor)等の画像センサーである。この撮像素子4は例えば銀エポキシの接着剤で基板3中央の撮像素子搭載部に接着された後、金線またはアルミニウム線を用いてワイヤーボンディングによりリード端子2に電気的に接続される。この場合好ましくは、基板3はステアタイトセラミックスから成るのがよい。ステアタイトセラミックスは銀エポキシの接着剤と塗れ性がよく強固な接合が得られる。   The imaging device 4 is an image sensor such as a charge coupled device (CCD) or a complementary metal oxide semiconductor (C-MOS). The image pickup element 4 is bonded to the image pickup element mounting portion in the center of the substrate 3 with, for example, a silver epoxy adhesive, and then electrically connected to the lead terminal 2 by wire bonding using a gold wire or an aluminum wire. In this case, the substrate 3 is preferably made of steatite ceramics. Steatite ceramics have good paintability with silver epoxy adhesive and provide a strong bond.

水晶板7は光学的に復屈折の性質をもつ水晶を結晶方向に対して方位角45度および0度の角度でスライシングの工法を用いて切断することで作製される。この結晶方位角が異なる2枚の水晶板を重ねることで、水晶板の複屈折の特性を利用して撮像素子4がとらえた映像に発生するモアレ現象を防止することができる。   The quartz plate 7 is manufactured by cutting a quartz crystal having an optically birefringent property by using a slicing method at angles of 45 degrees and 0 degrees with respect to the crystal direction. By superimposing two crystal plates having different crystal orientation angles, it is possible to prevent a moire phenomenon that occurs in an image captured by the image pickup device 4 using the birefringence characteristics of the crystal plates.

接着剤6は例えば紫外線硬化型のエポキシ樹脂で枠体1の上面にディスペンス法を用いて適量全周にわたって塗布される。この後に上記水晶板7のうち45度または0度の結晶方位角をもつ水晶板を載置し紫外線を照射することで接着剤6が硬化され封止が完了する。そしてその水晶板の上部にもう一方の方位角を持つ水晶板を載置すること(図示せず)で撮像素子収納用装置が完成される。   The adhesive 6 is, for example, an ultraviolet curable epoxy resin, and is applied to the upper surface of the frame 1 over the entire circumference using a dispensing method. After that, a quartz plate having a crystal orientation angle of 45 degrees or 0 degrees is placed on the quartz plate 7 and irradiated with ultraviolet rays, whereby the adhesive 6 is cured and sealing is completed. Then, by placing a quartz plate having the other azimuth angle on the quartz plate (not shown), the image sensor housing device is completed.

撮像素子4は好ましくは、平面視して長辺が20乃至37mm、短辺が13乃至24mmのシリコンとしたことから、撮像素子4を大型化して銀塩フィルムのサイズに近付けて撮像素子4の画像品質を向上させることができるとともに、このような大型の撮像素子4を収納しても、撮像素子4、基板3、リード端子2、枠体1および水晶板7との相互の線熱膨張差によって生じる内部応力をきわめて良好に抑制できることで撮像素子4表面の平面度を向上させることが可能になり撮像素子4の光学的な位置精度を向上させる効果がある。   The image pickup device 4 is preferably made of silicon having a long side of 20 to 37 mm and a short side of 13 to 24 mm in plan view. Therefore, the image pickup device 4 is enlarged and brought close to the size of the silver salt film. Image quality can be improved, and even if such a large image sensor 4 is housed, the linear thermal expansion difference between the image sensor 4, the substrate 3, the lead terminal 2, the frame body 1, and the crystal plate 7. It is possible to improve the flatness of the surface of the image pickup device 4 by suppressing the internal stress generated by the above very well, and there is an effect of improving the optical positional accuracy of the image pickup device 4.

た、図2に示すように枠体1を基板3の側面よりも外側に張り出させ、接合材5を基板3の側面から枠体1の張り出した部位の下面にかけて形成し、リード端子2の下面と接合材5の側面との交線をリード端子2の上面と接合材5の側面との交線よりも基板3側に位置させたことから、撮像素子4、基板3、リード端子2、枠体1および水晶板7との相互の線熱膨張差によって生じる内部応力が撮像素子収納用パッケージのリード端子2の取り付け部に集中することを有効に抑制でき、リード端子2周辺から気密性が損なわれることがなく撮像素子収納パッケージの信頼性を向上させる効果がある。
Also, as shown in FIG. 2, the frame 1 not overhang outside the side surface of the substrate 3, the bonding material 5 is formed over the lower surface of a portion projecting from a side surface of the substrate 3 of the frame 1, the lead terminal Since the intersection line between the lower surface of 2 and the side surface of the bonding material 5 is positioned closer to the substrate 3 than the intersection line between the upper surface of the lead terminal 2 and the side surface of the bonding material 5, the imaging device 4, the substrate 3, and the lead terminal 2. It is possible to effectively suppress the internal stress caused by the mutual linear thermal expansion difference between the frame body 1 and the crystal plate 7 from being concentrated on the mounting portion of the lead terminal 2 of the image sensor housing package. There is an effect of improving the reliability of the image pickup device storage package without impairing the performance.

すなわち、基板3の搭載部に撮像素子4を搭載して接着させた後の冷却工程において、撮像素子4と基板3との線熱膨張差によって基板3が搭載部を上にして凸状に反り、このとき特にリード端子2の下側に位置する接合材5を撮像素子4側へ引張るような応力が生じる。このような引張り応力が加わりやすいリード端子2の下面側において接合材5との接合面を小さくしてリード端子2の下面を接合材5から開放することにより、引張り応力を有効に緩和することが可能となり、リード端子2周辺から気密性が損なわれるのを有効に防止できる。   That is, in the cooling step after the image pickup device 4 is mounted and bonded to the mounting portion of the substrate 3, the substrate 3 warps in a convex shape with the mounting portion up due to a difference in linear thermal expansion between the image pickup device 4 and the substrate 3. At this time, in particular, a stress is generated that pulls the bonding material 5 positioned below the lead terminal 2 toward the image sensor 4. It is possible to effectively relieve the tensile stress by reducing the bonding surface with the bonding material 5 on the lower surface side of the lead terminal 2 to which such tensile stress is easily applied and releasing the lower surface of the lead terminal 2 from the bonding material 5. It becomes possible, and it can prevent effectively that airtightness is impaired from the lead terminal 2 periphery.

さらにまた、応力が集中しやすい基板3および接合材5の接合面の外周端と、枠体1および接合材5の接合面の外周端とを重ならせずにずらすことができ、枠体1および基板3に撮像素子4を接合したり水晶板7を接合したときに線熱膨張係数の差異によって発生する内部応力の集中を分散することが可能になり気密信頼性の高い撮像素子4の収納用パッケージおよび撮像装置を提供することが可能になる。   Furthermore, the outer peripheral edge of the bonding surface of the substrate 3 and the bonding material 5 where stress tends to concentrate can be shifted without overlapping the outer peripheral edge of the bonding surface of the frame 1 and the bonding material 5. In addition, it is possible to disperse the concentration of internal stress generated due to the difference in linear thermal expansion coefficient when the image pickup device 4 is bonded to the substrate 3 or the crystal plate 7 is bonded. Package and an imaging device can be provided.

本発明のパッケージの実施例を以下に説明する。   Examples of the package of the present invention are described below.

図1に示す本発明のパッケージを以下のように作製した。   The package of the present invention shown in FIG. 1 was produced as follows.

ステアタイトセラミックスから成る基板3を、酸化珪素、酸化マグネシウムの原料粉末に、有機バインダ,溶剤,可塑剤,分散剤を添加混合して泥漿物を作り、この泥漿物をスプレードライ法を用いて顆粒化し、この顆粒を所定形状のプレス金型によりプレス成形した後、約1300℃で焼成することによって製作した。   A substrate 3 made of steatite ceramics is mixed with raw material powders of silicon oxide and magnesium oxide by adding an organic binder, a solvent, a plasticizer, and a dispersant to make a slurry, and this slurry is granulated using a spray drying method. This granule was press-molded with a press mold having a predetermined shape and then fired at about 1300 ° C.

またステアタイトセラミックスからなる枠体1を酸化珪素、酸化マグネシウムの原料粉末に、有機バインダ,溶剤,可塑剤,分散剤を添加混合して泥漿物を作り、この泥漿物をスプレードライ法を用いて顆粒化し、この顆粒を所定形状のプレス金型によりプレス成形した後、約1300℃で焼成することによって製作した。焼成された枠体1はラップ研磨の工法で水晶板7が接着される接着面の平面度を平均8μm最大15μm以下に仕上げた。   The frame 1 made of steatite ceramics is mixed with raw material powders of silicon oxide and magnesium oxide, and an organic binder, solvent, plasticizer, and dispersing agent are added and mixed to make a slurry, and this slurry is spray-dried. The granules were granulated and the granules were press-molded with a press mold having a predetermined shape, and then fired at about 1300 ° C. The fired frame 1 was finished to an average flatness of 8 μm and a maximum of 15 μm or less on the bonding surface to which the crystal plate 7 was bonded by a lapping method.

なお、サンプル1としての基板3は縦46.6mm×横31.2mm×厚さ1.0mmの直方体形状とし、枠体1は縦46.6mm×横33.9mm×厚さ0.59mmの外形寸法、34.2mm×27.3mmの開口寸法とし、枠体1を基板3の側面から外側に張り出すようにした。   The substrate 3 as the sample 1 has a rectangular parallelepiped shape of 46.6 mm in length, 31.2 mm in width, and 1.0 mm in thickness, and the frame 1 has an external dimension of 46.6 mm in length, 33.9 mm in width, and 0.59 mm in thickness, 34.2 mm × 27.3. The opening size was set to mm, and the frame body 1 was projected outward from the side surface of the substrate 3.

またサンプル2としての基板3は縦46.6mm×横31.2mm×厚さ1.0mmの直方体形状とし、枠体1は縦46.6mm×横31.2mm×厚さ0.59mmの外形寸法、38.0mm×27.3mmの開口寸法とし、枠体1の外周と基板3の外周とが平面視で重なるようにした。   The substrate 3 as the sample 2 has a rectangular parallelepiped shape of 46.6 mm in length, 31.2 mm in width, and 1.0 mm in thickness, and the frame 1 has external dimensions of 46.6 mm in length, 31.2 mm in width, and 0.59 mm in thickness, 38.0 mm × 27.3 mm. The outer periphery of the frame 1 and the outer periphery of the substrate 3 overlap each other in plan view.

リード端子2は、中央に幅29mm厚み7μmのアルミニウムがクラッドされた0.25mmの42アロイの薄板を従来周知のスタンピング連続金型を用いて外周部に枠を有するとともにその枠の内周から内側に延出するように合計80本のリード端子2が展開された形状に打ち抜き加工した。   The lead terminal 2 has a 0.25 mm 42 alloy thin plate clad with aluminum 29 mm wide and 7 μm thick at the center and has a frame on the outer periphery using a conventionally known stamping continuous mold, and from the inner periphery to the inner side of the frame. A total of 80 lead terminals 2 were punched into a developed shape so as to extend.

接合材5として酸化鉛56〜66質量%、酸化硼素4〜14質量%、酸化珪素1〜6質量%および酸化亜鉛1〜11質量%を含むガラス成分に、フィラーとして酸化ジルコニウムシリカ系化合物を4〜15質量%添加したものを用い前記のガラス組成粉末に適当な有機溶剤,溶媒を添加混合して得たガラスペーストを、従来周知のスクリーン印刷法により枠体1の下面や基板3の上面に所定厚みに積層印刷塗布し、これを約430℃の温度で焼成することによって前述の基板3および枠体1に被着した。   As a bonding material 5, a glass component containing 56 to 66% by mass of lead oxide, 4 to 14% by mass of boron oxide, 1 to 6% by mass of silicon oxide and 1 to 11% by mass of zinc oxide, and 4 of zirconium oxide silica compound as a filler A glass paste obtained by adding and mixing an appropriate organic solvent and solvent to the glass composition powder using a material added with ˜15% by mass is applied to the lower surface of the frame 1 or the upper surface of the substrate 3 by a conventionally known screen printing method. Lamination printing was applied to a predetermined thickness, and this was baked at a temperature of about 430 ° C. to adhere to the substrate 3 and the frame 1 described above.

この後リード端子2を基板3と枠体1とで挟み込んだ状態でトンネル式の雰囲気炉またはオーブン等に通炉させ約470℃に加熱することで接合材5を溶融させ、基板3、枠体1およびリード端子2を強固に接着してパッケージを作製した。   After that, the lead terminal 2 is sandwiched between the substrate 3 and the frame 1 and passed through a tunnel type atmosphere furnace or oven and heated to about 470 ° C. to melt the bonding material 5. 1 and the lead terminal 2 were firmly bonded to produce a package.

また比較のために従来技術を用いたパッケージとして、枠体11および基板13をアルミナセラミックスで形成すること以外はサンプル1,2と同様の方法で作製した。なお比較用のサンプルは、基板13および枠体11の寸法がサンプル1と同じもの(枠体11が基板13の側面から外側に張り出したもの)をサンプル3とし、サンプル2と同じもの(枠体11の外周が基板13の外周とが平面視で重なるもの)をサンプル4とした。   For comparison, a package using the prior art was manufactured in the same manner as Samples 1 and 2 except that the frame 11 and the substrate 13 were formed of alumina ceramics. The sample for comparison is the same as sample 2 with the same dimensions of substrate 13 and frame 11 as sample 1 (frame 11 projecting outward from the side surface of substrate 13), and the same as sample 2 (frame body) Sample 4 in which the outer periphery of 11 overlaps the outer periphery of substrate 13 in plan view).

かくして作製された各々の撮像素子収納用パッケージの撮像素子搭載部に、撮像素子4として厚み0.4mm、表面の平面度1μm以下、外径寸法22.1mm×31.6mmのシリコン片を熱硬化性の銀エポキシ樹脂で接着した。   In each of the image sensor housing packages thus fabricated, a silicon piece having a thickness of 0.4 mm, a surface flatness of 1 μm or less, and an outer diameter of 22.1 mm × 31.6 mm is thermosetting silver. Bonded with epoxy resin.

その後水晶板7,17は結晶の方位角45度回転角0度に切り出した33.5mm×27.5mm×8mmのサイズの水晶板を用いた。また水晶板7,17の表面は光学的な欠陥を取り除く目的で研磨加工により平滑に仕上げ、ニュートンリング3本以内の平面度とした。また端面は欠け落ちを防止する目的で辺の稜線に0.2mmの面取り加工を施し、角部には1mmの面取りを施した。   Thereafter, the crystal plates 7 and 17 were crystal plates having a size of 33.5 mm × 27.5 mm × 8 mm cut out at a crystal orientation angle of 45 degrees and a rotation angle of 0 degrees. The surfaces of the quartz plates 7 and 17 were smoothed by polishing for the purpose of removing optical defects and had a flatness within 3 Newton rings. Further, the end face was chamfered with a 0.2 mm chamfer on the edge of the side to prevent chipping off, and the corner was chamfered with 1 mm.

上記手順で完成されたパッケージ形状の枠体1,11の上面にディスペンサー法を用いて紫外線硬化型のエポキシ樹脂を外周部に沿ってφ(直径)1.4mmのノズルから導出し環状に塗布した。その上に上記水晶板7,17を所定の位置に載置し、約10グラムの加重で水晶板7,17を水平に枠体1,11に押さえつけた後に水晶板7,17の上面から紫外線ランプを照射し接着剤6,16を完全硬化させることで封着を完了させ撮像装置とした。   An ultraviolet curable epoxy resin was led out from the nozzle of φ (diameter) 1.4 mm along the outer periphery using a dispenser method on the upper surfaces of the package-shaped frames 1 and 11 completed by the above procedure and applied in an annular shape. The quartz plates 7 and 17 are placed at predetermined positions thereon, and the quartz plates 7 and 17 are horizontally pressed against the frames 1 and 11 with a weight of about 10 grams, and then ultraviolet rays are emitted from the upper surfaces of the quartz plates 7 and 17. The imaging was completed by irradiating the lamp and completely curing the adhesives 6 and 16 to complete the sealing.

かくして得られた本発明のサンプル1,2および比較例としてのサンプル3,4にMILスタンダード規格883E、方法1010.6-55の温度サイクルの試験方法を適用し、-40度/125度の条件下で200サイクルおよび300サイクルのストレスを加え水晶板7,17の割れの発生の有無及びパッケージの気密性を比較確認した。またその結果を表1に示す。

Figure 0004671744
The temperature cycle test method of MIL Standard 883E, Method 1010.6-55 was applied to Samples 1 and 2 of the present invention and Samples 3 and 4 as comparative examples thus obtained, under the conditions of -40 degrees / 125 degrees. 200 cycles and 300 cycles of stress were applied, and the presence or absence of cracks in the quartz plates 7 and 17 and the hermeticity of the package were compared. The results are shown in Table 1.
Figure 0004671744

表1より、本発明の構成である枠体1および基板3の線熱膨張係数が8×10−6/℃乃至10×10−6/℃のステアタイトセラミックスから成るサンプル1,2は、温度サイクルが200サイクルでも不良が発生せず、水晶板7接着後の接合応力を最小にすることが可能である結果、気密信頼性を損なわずに撮像素子収納用パッケージに水晶板を直付けすることが可能になることが分かった。 From Table 1, samples 1 and 2 made of steatite ceramics having a linear thermal expansion coefficient of 8 × 10 −6 / ° C. to 10 × 10 −6 / ° C. of the frame 1 and the substrate 3 according to the present invention are Even if the cycle is 200 cycles, no defect occurs and the bonding stress after bonding the quartz plate 7 can be minimized. As a result, the quartz plate is directly attached to the image sensor housing package without impairing the airtight reliability. It turns out that is possible.

さらに、枠体1を基板3の側面から外側に張り出すようにしたサンプル1は温度サイクルが300サイクルでも不良が発生せず、さらに気密信頼性に優れるものであることがわかった。   Further, it was found that the sample 1 in which the frame body 1 is projected outward from the side surface of the substrate 3 does not cause a defect even when the temperature cycle is 300 cycles, and is excellent in hermetic reliability.

次に、上記サンプル1(枠体1および基板3がステアタイトセラミックスから成る)およびサンプル3(枠体11および基板13がアルミナセラミックスから成る)で用いたパッケージの搭載部に、表2に示すような種々の外径寸法の撮像素子としてのシリコン片を熱硬化性の銀エポキシ樹脂で接着することにより、サンプルとしての撮像装置を作製した(サンプル5〜14)。これを、上記温度サイクル試験に投入し、300サイクル後のシリコン片の平面度を非接触の3次元測定器で比較評価した。なお、評価指針として撮像素子表面のそり値の最大限度を20μmと設定した。その結果を表2に示す。

Figure 0004671744
Next, Table 2 shows the mounting portions of the packages used in Sample 1 (frame 1 and substrate 3 are made of steatite ceramics) and Sample 3 (frame 11 and substrate 13 are made of alumina ceramics). An image pickup device as a sample was manufactured by bonding silicon pieces as image pickup elements having various outer diameters with thermosetting silver epoxy resin (samples 5 to 14). This was put into the temperature cycle test, and the flatness of the silicon piece after 300 cycles was compared and evaluated with a non-contact three-dimensional measuring device. As an evaluation guideline, the maximum degree of warpage on the image sensor surface was set to 20 μm. The results are shown in Table 2.
Figure 0004671744

表2より、枠体11および基板13がアルミナセラミックスから成るサンプルは、シリコン片の外径寸法が31.6×22.1mm以上(サンプル7〜9)の場合、評価指針を超えることから、大型の撮像素子を搭載するのは困難であることがわかった。   From Table 2, the sample made of alumina ceramics for the frame 11 and the substrate 13 exceeds the evaluation guideline when the outer diameter of the silicon piece is 31.6 × 22.1 mm or more (samples 7 to 9). It turned out to be difficult to install.

一方、本発明の枠体1および基板3がステアタイトセラミックスから成るサンプルは、長辺が20乃至37mm、短辺が13乃至24mmのシリコン(サンプル11〜13)から成る大型の撮像素子を搭載しても撮像素子表面の平面度を良好に維持でき、光学的な位置精度を良好にすることができることがわかった。   On the other hand, the sample in which the frame 1 and the substrate 3 of the present invention are made of steatite ceramics is equipped with a large image sensor made of silicon (samples 11 to 13) having a long side of 20 to 37 mm and a short side of 13 to 24 mm. However, it was found that the flatness of the surface of the image sensor can be maintained satisfactorily and the optical positional accuracy can be improved.

(a)は本発明の撮像素子収納用パッケージを用いた撮像装置の参考例を示す断面図、(b)は(a)の撮像装置の平面図である。(A) is sectional drawing which shows the reference example of the imaging device using the package for image pick-up element accommodation of this invention, (b) is a top view of the imaging device of (a). 本発明の撮像素子収納用パッケージを用いた撮像装置の実施の形態の例を示す断面図である。It is sectional drawing which shows an example of embodiment of the imaging device using the package for image pick-up element accommodation of this invention. 従来の撮像素子収納用パッケージを用いた撮像装置の断面図、(b)は(a)の撮像装置の平面図である。Sectional drawing of the imaging device using the conventional package for image pick-up element accommodation, (b) is a top view of the imaging device of (a).

符号の説明Explanation of symbols

1:枠体
2:リード端子
3:基板
4:撮像素子
5:接合材
7:水晶板
1: Frame 2: Lead terminal 3: Substrate 4: Image sensor 5: Bonding material 7: Crystal plate

Claims (4)

上面の中央部に撮像素子の搭載部が形成された四角平板状の絶縁体から成る基板と、該基板の上面の外周部に取着された金属から成る複数のリード端子と、該複数のリード端子を介して前記基板の上面の外周部の全周にわたって接合材を介して接合された枠体と、該枠体の上面に前記枠体の内側を塞ぐように接着された水晶板とを具備した撮像素子収納用パッケージにおいて、前記枠体および前記基板を線熱膨張係数が8×10−6乃至10×10−6/℃である絶縁体で構成し、前記枠体を前記基板の側面よりも外側に張り出させ、前記接合材を前記基板の側面から前記張り出した枠体の下面にかけて形成し、前記リード端子の下面と該下面側に位置する前記接合材の側面との交線を前記リード端子の上面と該上面側に位置する前記接合材の側面との交線よりも前記基板側に位置させたことを特徴とする撮像素子収納用パッケージ。 A substrate made of a rectangular flat plate-like insulator having an image sensor mounting portion formed at the center of the upper surface, a plurality of lead terminals made of metal attached to the outer periphery of the upper surface of the substrate, and the plurality of leads A frame body bonded via a bonding material over the entire periphery of the outer peripheral portion of the upper surface of the substrate via a terminal, and a crystal plate bonded to the upper surface of the frame body so as to close the inside of the frame body an image sensor package for housing the linear thermal expansion coefficient of the frame body and the substrate is constituted by 8 × 10 -6 to 10 × 10 -6 / ℃ a is an insulator, the frame body from the side of the substrate The bonding material is formed from the side surface of the substrate to the lower surface of the protruding frame body, and the line of intersection between the lower surface of the lead terminal and the side surface of the bonding material located on the lower surface side is formed. The upper surface of the lead terminal and the bonding material located on the upper surface side An image pickup device storage package, wherein the image pickup device storage package is positioned closer to the substrate than the line of intersection with the side surface of the image pickup device. 前記枠体および前記基板をステアタイトセラミックスで形成したことを特徴とする請求項1記載の撮像素子収納用パッケージ。   2. The image sensor housing package according to claim 1, wherein the frame and the substrate are made of steatite ceramics. 前記撮像素子を、平面視して長辺が20乃至37mm、短辺が13乃至24mmのシリコンとしたことを特徴とする請求項1または請求項2記載の撮像素子収納用パッケージ。   3. The image sensor housing package according to claim 1, wherein the image sensor is made of silicon having a long side of 20 to 37 mm and a short side of 13 to 24 mm in plan view. 請求項1乃至請求項のいずれかに記載の撮像素子収納用パッケージと、前記搭載部に搭載されるとともに前記複数のリード端子に電気的に接続された撮像素子とを具備していることを特徴とする撮像装置。 An image sensor housing package according to any one of claims 1 to 3 , and an image sensor mounted on the mounting portion and electrically connected to the plurality of lead terminals. An imaging device that is characterized.
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JPS62224047A (en) * 1986-03-26 1987-10-02 Hitachi Ltd Solid-state image pickup device
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JP2004247513A (en) * 2003-02-13 2004-09-02 Kyocera Corp Image pickup element housing package, and image pickup device

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