JP4671374B2 - Object transfer device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an object conveying apparatus that conveys an object without contact.
[0002]
[Prior art]
Conventionally, as a non-contact conveyance device using a high-temperature superconducting bulk body, a device in which a bulk body moving body moves on a track on which permanent magnets are arranged has been proposed.
[0003]
[Problems to be solved by the invention]
However, in the above-described conventional non-contact conveyance device, an expensive permanent magnet is required corresponding to the distance of the track, which is not economical.
Further, in order to make the movement of the carrier smooth, it is necessary to ensure the uniformity of the magnetic field in the longitudinal direction of the track.
[0004]
The present invention eliminates the above-mentioned problems, and the number of permanent magnets is sufficient for the number of transport members, which is not related to the distance of the track, and can be constructed very easily at low cost. An object of the present invention is to provide an object transporting device capable of
[0005]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides
[1] In the object conveying apparatus, a tubular pipe (1) made of a non-magnetic material, and the wire (3) which is disposed in the tubular pipe (1) and is operable by a driving pulley (4). the primary permanent magnet (2), in the liquid nitrogen container (6) is cooled to below the critical temperature is in the superconducting state with liquid nitrogen, the pinning effect, a constant and the primary permanent magnet (2) distance secondary HTS bulk body that suspended outside the pipe (1) of the tubular What coercive (5) and, the secondary-side high-temperature superconducting bulk body (5) liquid nitrogen container having (6) And a container (8) on which a transport object (10) is placed .
[0006]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic view of an object conveying apparatus showing a first embodiment of the present invention.
In this figure, 1 is a tubular pipe made of a non-magnetic material, 2 is a permanent magnet as a primary magnet, 3 is a wire for moving the permanent magnet 2 , and 4 is a drive pulley for driving the wire 3. is there.
[0007]
Reference numeral 5 denotes a high-temperature superconducting bulk body that is cooled to a critical temperature or lower by liquid nitrogen in a liquid nitrogen container to be described later, 6 is a liquid nitrogen container, and 7 is a liquid sealed in the liquid nitrogen container 6 . Nitrogen, 8 is a container for placing an object (for example, a semiconductor wafer) 10 to be transported, and 9 is a string for suspending the container 8 .
Thus, the high-temperature superconducting bulk body 5 as the secondary magnet is configured together with the permanent magnet 2 that is the primary magnet, and one set of transport units A is configured.
[0008]
Therefore, a permanent magnet 2 as a primary side magnet is disposed in a tubular pipe 1 made of a non-magnetic material, and this permanent magnet 2 can be moved via a wire 3 by driving a drive pulley 4. .
On the other hand, a primary high-temperature superconducting bulk body 5 as a secondary side magnet is combined outside the tubular pipe 1 so as to face the permanent magnet 2 as a primary side magnet, and the primary in the tubular pipe 1 is combined. By moving the permanent magnet 2 as the side magnet, the high-temperature superconducting bulk body 5 as the secondary magnet and the moving object including the secondary magnet can be moved along the tubular pipe 1 in a follow-up manner. .
[0009]
Further, instead of driving the permanent magnet 2 by the drive mechanism via the wire 3, the permanent magnet 2 may be moved by flowing a fluid through the tubular pipe 1.
The object 10 can be transported by suspending a container 8 on the liquid nitrogen container 6 as a moving object and mounting an object (for example, a semiconductor wafer) 10 to be transported there.
[0010]
Thus, by combining the high-temperature superconducting bulk body 5 as the secondary side magnet so as to face the permanent magnet 2 as the primary side magnet, the primary side magnet and the secondary side can be obtained by the pinning effect of the magnetic flux. A certain distance (gap) can be secured between the magnets, and the object 10 can be transported without any contact between the secondary magnet and the tubular pipe 1.
[0011]
An example of a magnetic levitation device itself having a pinning effect is disclosed in Japanese Patent Application Laid-Open No. 7-213082.
Next, a second embodiment of the present invention will be described.
FIG. 2 is a schematic view of an object conveying apparatus showing a second embodiment of the present invention.
In this embodiment, a plurality of one set of transport units A shown in the first embodiment are arranged. That is, a plurality of transport units A ₁ , A ₂ , A ₃ ... Are arranged. That is, here, a plurality of (for example, three) permanent magnets 2 ₁ , 2 ₂ , 2 ₃ ... Are arranged in a long tubular pipe 21 and secondary parts corresponding thereto are arranged. The high-temperature superconducting bulk bodies 5 ₁ , 5 ₂ , 5 ₃ ... Are set as side magnets, and a plurality of objects 10 ₁ , 10 ₂ , 10 ₃ .
[0012]
In FIG. 2, 6 ₁ , 6 ₂ , 6 ₃ ... Are liquid nitrogen containers, 7 ₁ , 7 ₂ , 7 ₃ ... Are liquid nitrogen sealed in the liquid nitrogen containers, 8 ₁ , 8 ₂ , 8 ₃ . Is a container on which transported objects (for example, semiconductor wafers) 10 ₁ , 10 ₂ , 10 ₃ ... Are placed, and 9 ₁ , 9 ₂ , 9 ₃ . 22 is a drive pulley, and 23 is a wire.
As described above, according to the second embodiment, a desired number of transfer devices can be easily constructed.
[0013]
Next, a third embodiment of the present invention will be described.
FIG. 3 is a schematic diagram of an object conveying apparatus according to a third embodiment of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
In this embodiment, arranging the transport equipment comprising a tubular pipe shown in the first embodiment by connecting a plurality. That is, the transport device I, the transport device II, and the transport device III are arranged in series to construct a transport device group corresponding to a plurality of processing steps of the transport object 10.
[0014]
As described above, according to the third embodiment, it is possible to easily construct a transport system for transported objects corresponding to a plurality of processing steps.
Next, a first reference example of the present invention will be described.
FIG. 4 is a schematic view of an object conveying apparatus showing a first reference example of the present invention.
In this figure, 31 is a tubular pipe made of non-magnetic material, 32 is a high-temperature superconducting bulk body as a primary magnet disposed in the tubular pipe, 33 is a liquid nitrogen container, and 34 is its liquid nitrogen. Liquid nitrogen enclosed in a container.
[0015]
Also, 35 is a permanent magnet as a secondary magnet, 36 is a container suspended by the permanent magnet, 37 is a string for hanging the container, and 38 is a transport object (for example, a semiconductor wafer) placed on the container. These are provided in the clean room 30.
In this reference example, a high-temperature superconducting bulk body 32 as a primary magnet is disposed in a tubular pipe 31 made of a nonmagnetic material, and a liquid nitrogen container 33 including the high-temperature superconducting bulk body 32 is connected to the tubular pipe 31. The liquid nitrogen container 33 can be configured to be moved by flowing a fluid through the liquid.
[0016]
In addition, you may make it drive with a drive mechanism via a wire like 1st Example irrespective of a fluid.
On the other hand, the outer pipe 31 of the tubular, so as to face the high-temperature superconducting bulk body 32 as the primary magnet, so as to combine the permanent magnet 35 as the secondary side magnets, primary pipe 31 of the tubular By moving the high temperature superconducting bulk body 32 as the side magnet, the moving object including the permanent magnet 35 as the secondary side magnet can be moved along the tubular pipe 31 in a follow-up manner.
[0017]
A string 37 is hooked on the permanent magnet 35 and a container 36 is caught. An object (for example, a semiconductor wafer) 38 to be transported is mounted in the container 36 and transported.
Thus, by combining the permanent magnet 35 as the secondary side magnet so as to face the high temperature superconducting bulk body 32 as the primary side magnet, the primary side magnet and the secondary side can be obtained by the pinning effect of the magnetic flux. A certain distance (gap) can be secured between the magnets, and the object can be transported without any contact between the secondary magnet and the tubular pipe.
[0018]
Thus, according to the first reference example, in particular, a permanent magnet is sufficient as a secondary side magnet for transporting an object, and the structure is simple, and the assembly of the transport device is easy.
Also in this reference example, the second embodiment and the third embodiment can be easily applied.
Furthermore, if the tubular pipe and airtight structure, drive of the guide pipe, and also eliminates the dust generated by such between the primary-side magnet and the pipe inner wall is mixed in the pipe outside of the space. That is, it is suitable as a transfer device in the clean room 30.
[0019]
Next, a second reference example of the present invention will be described.
FIG. 5 is a schematic view of an object conveying apparatus showing a second reference example of the present invention.
In this reference example, a loop-shaped guide pipe 41 made of a flexible material is arranged, a primary magnet 42 is arranged in the guide pipe 41, and a secondary corresponding to the primary magnet 42. A conveying object 44 is set on the side magnet 43 and gas is filled from the gas filling port 45 to drive the primary side magnet 42, or a winding reel 47 and a feeding reel 48 are arranged, The primary side magnet 42 may be driven. Reference numeral 46 denotes a gas discharge port.
[0020]
As described above, according to the second reference example, it is possible to freely construct a transport route.
Further, if such a method is adopted, it is possible to easily cope with an increase in the length of the transport device and an increase in the number of transport bodies.
Next, a third reference example of the present invention will be described.
[0021]
FIG. 6 is a schematic diagram of an object conveying apparatus showing a third reference example of the present invention, and FIG. 7 is a plan view of the object conveying apparatus.
In these figures, 51 is a driveable primary side magnet, 53 is a long race track coil (or two conductors), which is disposed below the primary side magnet 51, and direct current flows in different directions. Has a reciprocal conductive path. 55 is a DC power source for supplying power to the long racetrack coil 53, and 57 is a high-temperature superconducting bulk body (secondary magnet) driven by the primary magnet 51. G is a gap.
[0022]
Thus, the point that high-temperature superconducting bulk body 57 following the movement of the primary magnet 51 is driven in a non-contact support state by electromagnetic force, wherein is the same as the reference example, according to this reference example The long race track coil 53 acts as a magnetic rail (details will be described later), and can support and guide the high-temperature superconducting bulk body 57. The high-temperature superconducting bulk body 57 is provided with an object mounting device, which is not shown here.
[0023]
Next, a fourth reference example of the present invention will be described.
FIG. 8 is a schematic perspective view of an object conveying apparatus showing a fourth reference example of the present invention, FIG. 9 is a schematic diagram of the object conveying apparatus, FIG. 10 is an explanatory diagram of the principle of levitation of the object conveying body, and FIG. It is a partial top view of a conveying apparatus.
In these drawings, reference numeral 61 denotes a long race track coil having a reciprocal conductive path in which a direct current flows in different directions. 63 is a DC power source for supplying direct current to the long racetrack coil 61 , and 65 is a magnetized high-temperature superconducting bulk body.
[0024]
Further, a device 66 (lifting and hanging mechanism) for driving the coil 61 up and down is disposed at the end of the long racetrack coil 61, and the coil 61 is tilted to drive the high-temperature superconducting bulk body 65. be able to. In addition, as this drive mechanism, you may make it provide the primary side magnet shown in the said reference example, and to move this. Alternatively, the high temperature superconducting bulk body 65 may be provided with a propulsion drive mechanism such as a small propeller.
[0025]
In this reference example, as shown in FIGS. 10 and 11, an electromagnetic force acts on the high-temperature superconducting bulk body 65 having the trapping magnetic field Hc by the energizing current of the long race track coil 61. This electromagnetic force acts as a force for suspending the high-temperature superconducting bulk body 65 and a guide force for the track.
The high temperature superconducting bulk body 65 can be driven by the drive mechanism described above.
[0026]
For example, as shown in FIG. 9, the racetrack coil 61 composed of a high temperature superconducting bismuth wire, when the 60000AT magnetomotive force and the distance L ₁ and 150 mm, opening the gap L ₂ (about 100 mm) thereunder It was found that the high-temperature superconducting bulk body (disk type with a diameter of 46 mm and a thickness of 15 mm) 65 can be suspended. The weight of the floating body at this time was about 300 g including the liquid nitrogen container. Of these, the net weight of the bulk body is 150 g.
[0027]
As described above, according to the fourth reference example, the floating of the bulk body is stable in the vertical direction, the horizontal direction, and the pitching direction, and freely moves (without friction) in the longitudinal direction of the coil. Can do.
The high-temperature superconducting bulk body 65 is provided with an object mounting device, which is not shown here.
[0028]
Next, a fifth reference example of the present invention will be described.
FIG. 12 is a configuration diagram of an object conveying apparatus showing a fifth reference example of the present invention, FIG. 12 (a) is a plan view of the object conveying apparatus, and FIG. 12 (b) is an overall schematic diagram of the object conveying apparatus. is there.
In this reference example, the object transport device using the racetrack coil of the fourth reference example is connected in cascade to extend the track.
[0029]
In FIG. 12, 71 is a first race track coil, 72 is a second race track coil, 73 is a third race track coil, 74 is a fourth race track coil, and 75 is a fifth race track coil. , beginning 73 of the first racetrack coil 71 of the end portion 71B and the leading end 72 a of the second racetrack coil 72, the second end portion 72B and the third racetrack coil 72 of the racetrack coil 73 a , the third end portion 73B and the leading end 74 a of the fourth racetrack coil 74 of the racetrack coil 73, a fourth end portion 74B of the racetrack coil 74 and the fifth racetrack coil 75 of the start end 75A, Places overlapping sections, each of which overlaps the trajectory. Reference numeral 70 denotes a magnetized high-temperature superconducting bulk body.
[0030]
Further, as the drive mechanism for the high-temperature superconducting bulk body, the same drive mechanism as shown in the fourth reference example can be used.
The DC power sources 81 to 85 are connected to the racetrack coils 71 to 75, respectively. Each DC power supply 81-85 is provided with each switch 76-80, and each switch 76-80 is opened and closed in response to the movement of the high temperature superconducting bulk body 70 by a control signal from the control device 86. For example, the switch 76 of the DC power supply 81 is turned on, and the high-temperature superconducting bulk body 70 conveyed by the race track coil 71 is connected to the end portion 71B of the first race track coil 71 and the start end portion 72A of the second race track coil 72. , The switch 76 is turned off, the switch 77 is turned on, and the support guide for the high-temperature superconducting bulk body 70 is pulled by the second race track coil 72.
[0031]
Thus, according to the eighth embodiment, a plurality of race track coils are connected in cascade, and the power of the race track coils is switched in the overlap section, so that the track can be lengthened. it can.
Next, a sixth reference example of the present invention will be described.
FIG. 13 is a configuration diagram of an object conveying apparatus showing a sixth reference example of the present invention.
[0032]
In this figure, 91 is a support column, 93 is a double circular coil having a reciprocal conductive path which is suspended from the top of the support column 91 around the support column 91 and DC current flows in different directions, and 95 is a support A suspension member for suspending the double circular coil 93 from the top of the column 91, and a DC current feeding path is also provided. Reference numeral 97 denotes a DC power source, which forms a reciprocal conductive path in which a DC current flows in a different direction to the double circular coil 93 via a conductive path 96 and a suspension member 95 to which a power feeding path is attached. To. Further, the support column 91 can be inclined so that the axis of the double circular coil 93 is inclined. Reference numeral 99 denotes a secondary magnet (high-temperature superconducting bulk body), which is provided below the double circular coil 93 and is guided by the double circular coil 93 according to the inclination of the axis of the double circular coil 93. Driven. The secondary magnet 99 is provided with an object mounting device, which is not shown here.
[0033]
Thus, according to the sixth reference example, by tilting the axis of the double circular coil 93, the secondary side magnet (high-temperature superconducting bulk body) 99 suspended between the double circular coils 93 revolves. Can be made.
In addition, this invention is not limited to the said Example, A various deformation | transformation is possible based on the meaning of this invention, and these are not excluded from the scope of the present invention.
[0034]
【The invention's effect】
As described above in detail, according to the present invention, the following effects can be obtained.
(A) The number of permanent magnets is only as many as the number of transport bodies, and the object transport apparatus which is not related to the distance of the track and which is extremely easy to lengthen can be constructed at low cost.
[0035]
(B) A desired number of transfer devices can be easily constructed.
(C) A conveyance system for a conveyance object corresponding to a plurality of processing steps can be constructed.
(D) The structure of the secondary side magnet for transporting the object is simple with only a permanent magnet, and the assembly of the transport device is easy.
[0036]
(E) A conveyance route can be freely constructed, and it is possible to easily cope with an increase in the length of the conveyance device and an increase in the number of conveyance bodies.
(F) The secondary side magnet can be guided and supported (suspended) by the long racetrack coil.
(G) If a primary magnet for driving is combined with the long racetrack coil of (F) above, the bulk body can be driven even with a weak force.
[0037]
(H) Since a plurality of racetrack coils are connected in cascade and the power supply of the racetrack coils is switched in the overlap section, the track can be extended.
(I) It is possible to transport a transported object that enables a revolving motion by tilting the axis of the double circular coil.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of an object conveying apparatus showing a first embodiment of the present invention.
FIG. 2 is a schematic view of an object conveying apparatus showing a second embodiment of the present invention.
FIG. 3 is a schematic view of an object conveying apparatus showing a third embodiment of the present invention.
FIG. 4 is a schematic diagram of an object conveying apparatus showing a first reference example of the present invention.
FIG. 5 is a schematic diagram of an object conveying apparatus showing a second reference example of the present invention.
FIG. 6 is a schematic diagram of an object conveying apparatus showing a third reference example of the present invention.
FIG. 7 is a plan view of an object conveying apparatus showing a third reference example of the present invention.
FIG. 8 is a schematic perspective view of an object conveying apparatus showing a fourth reference example of the present invention.
FIG. 9 is a schematic diagram of an object conveying apparatus showing a fourth reference example of the present invention.
FIG. 10 is an explanatory diagram of a levitation principle of an object carrier according to a fourth reference example of the present invention.
FIG. 11 is a partial plan view of an object conveying apparatus showing a fourth reference example of the present invention.
FIG. 12 is a partial plan view of an object conveying apparatus showing a fifth reference example of the invention.
FIG. 13 is a configuration diagram of an object conveying apparatus showing a sixth reference example of the present invention.
[Explanation of symbols]
1,31 tubular pipe (non-magnetic material)
2, 2 ₁ , 2 ₂ , 2 ₃ , 35 Permanent magnet ₃ , 23 Wire 4, 22 Drive pulley 5, 5 ₁ , 5 ₂ , 5 ₃ , 32 High temperature superconducting bulk body 6, 6 ₁ , 6 ₂ , 6 ₃ , 33 Liquid nitrogen container 7, 7 ₁ , 7 ₂ , 7 ₃ , 34 Liquid nitrogen 8, 8 ₁ , 8 ₂ , 8 ₃ , 36 Container 9, 9 ₁ , 9 ₂ , 9 ₃ , 37 String for hanging the container 10, 10 ₁ , 10 ₂ , 10 ₃ , 38, 44 Conveyed object (semiconductor wafer)
21 Long tubular pipe
30 Clean room 41 Loop-shaped guide pipe 42, 51 Primary side magnet 43, 99 Secondary side magnet 45 Gas filling port 46 Gas exhaust port 47 Reel reel 48 Feed reel 53, 61 Long race track coil 55, 63, 97 DC power supply 57,65 High-temperature superconducting bulk material (secondary magnet)
66 Device 70 for Driving Up and Down 70 Magnetized High Temperature Superconducting Bulk Body 71 First Race Track Coil 71B End of First Race Track Coil (Overlap Section)
72 Second race track coil 72A Second race track coil start end (overlap section)
72B End of second race track coil (overlap section)
73 Third Race Track Coil 73A Third Race Track Coil Start End (Overlap Section)
73B End of third race track coil (overlap section)
74 Fourth Race Track Coil 74A Start End (Overlap Section) of Fourth Race Track Coil
74B Terminal portion of the fourth race track coil (overlap section)
75 Fifth Race Track Coil 75A Starting End of Fifth Race Track Coil (Overlap Section)
76 to 80 switch 81 to 85 DC power supply 86 control device 91 support pillar 93 double circular coil 95 suspension member 96 conductive path

Claims (1)

(A) a tubular pipe made of a non-magnetic material;
(B) disposed within the tubular pipe, a primary permanent magnet is fixed to the operable wire by a drive pulley,
The liquid nitrogen in (c) a liquid nitrogen container is in the superconducting state by cooling below the critical temperature, the pinning effect, hanging a certain distance between the primary-side permanent magnet to the outside of the tubular pipe I coercive and the secondary side high-temperature superconducting bulk that lowered,
(D) An object conveying apparatus comprising: a container that is suspended by a string hung on a liquid nitrogen container having the secondary high-temperature superconducting bulk body and on which a conveyed object is placed .

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