JPH04308124A - Substrate conveying device and orthogonal conveyance chamber module using it - Google Patents

Abstract

PURPOSE:To provide a conveying device conveying a substrate while continuously passing through a gate valve in the environment separated from the atmosphere by a bulkhead 22 (a) and a conveyance chamber module using it. CONSTITUTION:Magnetic field generators 24 (a, b) performing independent conveyance actions are arranged on the outside of a bulkhead 22 (a). A substrate conveying body constituted of a conveying base 27 mounted with a substrate 34 and magnetic substances 25 (a, b) is arranged in the bulkhead 22 (a). The substrate conveying body is towed by the magnetic binding force between the magnetic field generators 25 (a, b) and the magnetic substances 25 (a, b). When the substrate conveying body passes through a gate valve 32, a rail 33 is suspended, then the substrate conveying body is delivered between the magnetic field generator 24 (a) and a magnetic field generator 24 (d).

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention applies to workpieces such as semiconductor substrates, magnetic or optical disk recording media, in environments isolated from the outside air, particularly in environments where contamination by impurity gases is extremely low, such as ultra-high vacuum. It is suitable for continuous conveyance even when there are connection elements such as flanges or bellows, or blocking elements such as gate valves in the conveyance path, and it is suitable for extending the conveyance path in continuous processing equipment with a large number of process chambers. The present invention relates to a substrate transfer device suitable for application to a transfer system that can be changed or modified, and an orthogonal transfer chamber module using the same.

0002

2. Description of the Related Art Conventionally, methods for transporting a substrate through a blocking element such as a gate valve include: 1. Method using a magnetic coupling type transfer arm 2. A method in which a conveyor with a rack attached is guided by a rail and sent out by a pinion (for example, Patent Publication No. 1983-2)
4632 Publication) 3. Method using a two-joint arm robot (for example, Patent Publication No. 42142/1983, Japanese Patent Publication No. 63-252)
No. 439) is known. Each method will be described below using figures.

FIG. 1 is a schematic diagram of a method using a magnetic coupling type transfer arm. As shown in the same figure, this system uses a magnetic coupling between a permanent magnet 2 linearly driven outside the partition wall 1 and a magnetic body (or permanent magnet) 3 inside the partition wall 1, and a transfer arm 4 fixed thereto. The fork 5 is driven to cause the substrate 6 to pass through the gate valve 7 and into another vacuum chamber 8.
This is a method of transporting the

[0004] FIG. 2 is a schematic diagram of a method in which a transport body with a rack attached thereto is guided by a rail and sent out by a pinion. As shown in the figure, in this method, a transport body 10 with a rack 9 attached thereto is guided by rails 11, and is sent out by a plurality of pinions 13 arranged at regular intervals along the transport route and driven from outside the partition wall 12. It's a method. When this carrier passes through the gate valve 14, it rides on the rails 15 of other vacuum chambers.

FIG. 3 is a schematic diagram of a method using a two-jointed arm robot. As shown in the figure, this system uses the expansion and contraction of a two-joint arm robot 17 installed in the transfer chamber 16 as it rotates to create a plurality of vacuum chambers 18 connected to the periphery of the transfer chamber 16 or an intermediate space for transferring substrates. In this method, the substrate 21 is transported to the chamber 19 through a gate valve 20.

[0006]

PROBLEMS TO BE SOLVED BY THE INVENTION Below, the problems to be solved by the present invention will be described with respect to each of the above three conventional techniques.

In prior art 1, when the transport distance becomes long, a transport arm with a length equivalent to the transport distance is required, resulting in an increase in installation space and instability in positioning due to deflection of the transport arm. Furthermore, as shown in Figure 1, when a substrate has to be transported through two or more gate valves, it is not possible to shut off the process chambers in the process of passing through, so there is a problem in that each vacuum chamber cannot be isolated from the environment. Can be mentioned.

[0008] In prior art 2, since a plurality of pinions are meshed with one rack, the conveyor cannot be sent out smoothly unless the rotational phases of each pinion match completely, so the reliability of the mechanism is ensured. It is difficult to Further, such a drive mechanism using gears has a problem in that it generates a large amount of particles within the process chamber, causing contamination of the substrate.

Conventional technology 3 has the advantage that a single transfer device (two-jointed arm robot) can transfer substrates to a large number of process chambers; Cross-contamination with other process components may occur. Further, the transport distance from the center of the transport chamber to the substrate holder of another process chamber is limited to a certain length. This becomes a major structural constraint when attempting to connect process chambers of various sizes and structures around one transfer chamber. Furthermore, if the size of the process chambers to be connected is large or if the number of process chambers to be connected is increased, the peripheral length of the transfer chamber must be increased, so the transfer chamber becomes larger accordingly. This poses a problem in that when the transfer chamber is considered as a buffer chamber for transferring substrates between process chambers having different gas components or pressure states, the exhaust efficiency of the transfer chamber decreases and the throughput of substrate processing also decreases.

Therefore, an object of the present invention is to provide a highly reliable substrate transfer device with fewer sliding parts where particles are generated, and a substrate transfer device with a plurality of connecting elements such as flanges or bellows, and shutoff elements such as gate valves in the transfer path. An object of the present invention is to realize a transport method that can transport a substrate while smoothly passing the board in any case.

Another object of the present invention is to be able to flexibly respond to extensions and changes of the conveyance route while satisfying the above objects.
It is an object of the present invention to realize a transfer chamber module and a transfer system using the same, which do not limit the size or number of process chambers to be connected and have less mutual contamination between process chambers.

0012

[Means for Solving the Problems] The means according to the present invention for achieving the above objects are as follows: 1. A plurality of magnetic field generators and a magnetic field generator driving means for conveying the magnetic field generators are disposed outside the partition wall made of a non-magnetic material, and a guide rail extending along the conveyance direction is fixed inside the partition wall; Alternatively, a transfer base that has multiple substrate holders and slides along a guide rail using ball bearings, and a plurality of magnetic bodies fixed to the transfer base through partition walls at positions where magnetic circuits can be formed with each magnetic field generator. A set of substrate transport apparatuses were constructed in which the substrate transport bodies were disposed, and the substrate transport bodies were pulled by the magnetic coupling force between the magnetic field generator and the magnetic material through the partition wall to transport the substrate. Furthermore, a plurality of the above-mentioned substrate transfer devices are arranged along the transfer path via flanges and gate valves, and a plurality of magnetic bodies placed at positions where a magnetic circuit can be formed are fixed to both ends of the transfer body in the front and rear directions of the transfer direction. at least 2
The distance between the magnetic bodies in the conveyance direction is longer than the length of the flange or gate valve in the conveyance direction, and the magnetic field generating bodies are provided with independent conveyance and delivery operations.
A transport method is performed in which a transport body is transferred between substrate transport devices.

[0013] In a particularly preferred embodiment, all the components are made of materials that are heat resistant to temperatures of 250° C. or higher, and low gas release materials are used for the partition walls and the components inside the partition walls.

2. The above-mentioned substrate transfer device and a magnetic coupling type substrate transfer device for transferring the substrate to the process chamber are orthogonally combined to form a set of transfer devices, and gates, which are blocking elements of partition walls, are installed in each transfer path. It is housed in a transfer chamber with a valve and constitutes an orthogonal transfer chamber module equipped with an independent vacuum pump.

The transport distance of the above-mentioned orthogonal transport chamber modules is adjusted depending on the process chambers to be connected, and the transport system is constructed by connecting each module linearly or in parallel.

[0016]

[Effect] 1. By the action of the above means 1, the mechanism inside the partition wall can be made extremely simple, so the number of sliding parts where particles are generated is reduced and the reliability of the mechanism part is increased. Even when there are connecting elements such as , or blocking elements such as gate valves, the substrate can be transported while passing smoothly.

2. By the action of the above means 2, it is possible to connect one process chamber and a number of separate and independent orthogonal transfer chamber modules corresponding to it, so there is no restriction on the size or number of process chambers to be connected, and the transfer path can be extended. It is possible to build a transport system that can flexibly respond to changes in the system. In addition, since the process chambers are connected via at least two transfer chambers that can isolate the environment, mutual contamination between process chambers due to process components is reduced, and efficient pressure control during substrate transfer is achieved. Conversion is also possible.

[0018]

[Embodiments] Hereinafter, embodiments of the present invention will be explained with reference to the drawings.

FIGS. 4 to 8 and 9 show an embodiment of the substrate transport apparatus according to the present invention.

FIGS. 4 to 8 are side views of a portion where two sets of substrate transfer devices are connected via a flange and a gate valve, and the substrate transfer body passes through the gate valve from the first substrate transfer device. This figure shows a series of processes from the time the substrate is transferred to the second substrate transfer device. For supplementary purposes, FIG. 9 is a sectional view taken along the dashed line AA' in FIG. 4.

First, the structure of a set of substrate transport devices and the transport method will be explained with reference to FIG. In FIG. 4, magnetic field generators 24 (a) and 24 (b) using electromagnets are installed outside the partition wall 22 (a) made of non-magnetic material, and magnetic field generators 24 (
The magnetic field generator driving means 23(a) having a mechanical means for providing independent conveying motion to the flange 31(a) and 24(b)
a). On the other hand, a guide rail 29(a) extending along the conveyance direction inside the partition wall 22(a)
) is fixed by the fixing member 30 and placed on the transport base 27.
Or a plurality of substrate holders 35 are fixed to hold the substrate 34, and the transfer base 27 is mounted on the ball bearing 2.
8 to be able to slide along the guide rail 29(a). The magnetic bodies 25(a) and 25(b) are connected to the partition wall 22(
a) and the magnetic field generators 24(a), 24 through a slight gap.
(b) and at a height where a magnetic circuit can be formed, and the magnetic body 2
The distance between 5(a) and 25(b) is the same as that of flanges 31(a), 3
1(b), the gate valve 32, and the magnetic field generator 24(b),
It is fixed to the conveyance base 27 by fixing members 26(a) and 26(b) at a position longer than the sum of the lengths of 24(c) in the conveying direction.

Conveying the partition wall 22(a) in a continuous section is performed by changing the distance between the magnetic field generators 24(a) and 24(b) to the magnetic material 25(a).
Move it while keeping the same distance as a) and 25(b). In this way, the magnetic coupling force through the partition wall 22(a) pulls the substrate transport body made up of the transport base 27 and elements integrated with the transport base 27, and transports the substrate 35 mounted thereon. . The above is an explanation of the configuration and the transport method of one set of substrate transport devices.

[0023] Here, as a particularly preferable embodiment, all the constituent elements are made of materials having heat resistance of 250°C or higher,
And partition walls 22(a), 22(b) and partition wall 22(a)
, 22(b) using low outgassing materials for the internal components. Furthermore, depending on the type of substrate 35 and the type of manufacturing process, the environment isolated from the atmosphere by the partition walls 22(a) and 22(b) may be kept in a vacuum state or inert gas such as nitrogen gas or argon gas. gas, high purity water,
It may also be filled with a liquid such as liquid nitrogen or liquid helium. The same applies to the examples shown below.

Next, referring to FIGS. 4 to 8, a method for transferring a substrate transfer body between two sets of substrate transfer devices connected with a gate valve in between will be explained in order.

1. In FIG. 4, the magnetic field generator 24(a)
, 24(b), a current is passed through the electromagnet and a magnetic field is generated,
The substrate carrier is being transported toward the gate valve 32 by the magnetic coupling force with the magnetic bodies 25(a) and 25(b). Here, the gate valve 32 is closed, and the flip-up guide rail 33 that serves as a bridge between the guide rails 29(a) and 29(b) is also raised. In addition, in the substrate transport device at the front in the transport direction, the magnetic field generator 24(c) is near the contact with the flange 31(b), and the magnetic field generator 24(d) is near the contact with the flange 31(b).
It is waiting near the contact with c), and the electromagnet's current is stopped and no magnetic field is generated.

2. In FIG. 5, when the substrate carrier approaches the end of the guide rail 29(a) to a certain extent, the gate valve 32 is opened, and then the flip-up guide rail 3
3 is lowered and the guide rails 29(a) and 29(b) are connected. The board carrier rides on the guide rail 33,
The magnetic field generator 24(b) at the front in the conveyance direction has a flange 31 (
a) Stops near contact with the electromagnet, stops the current of the electromagnet, and releases the magnetic field. On the other hand, the magnetic field generator 24(a) continues to move and further transports the substrate by itself.

3. In FIG. 6, the magnetic field generator 24(a)
stops in the vicinity of contact with the magnetic field generator 24(b), stops the current in the electromagnet, and releases the magnetic field. On the other hand, at this time, the magnetic body 25
(b) has advanced to a position where it can be magnetically coupled with the magnetic field generator 24(d), and a current is passed through the electromagnet of the magnetic field generator 24(d) to generate a magnetic field. After that, the magnetic field generator 24(d)
independently pulls the substrate transport body into the second substrate transport device.

4. In FIG. 7, the magnetic field generator 24(d)
further advances to move the substrate transport body, and the magnetic body 25 (
When a) has advanced to a position where it can be magnetically coupled with the magnetic field generator 24(c), the magnetic field generator 24(c) also causes a current to flow through the electromagnet to generate a magnetic field, and the magnetic field generator 24(c) is placed at a certain distance from the magnetic field generator 24(d). Keep it and move on.

5. In FIG. 8, the magnetic field generator 24(c)
24(d) passes through the guide rail 33 and completely rides on the guide rail 29(b), the guide rail 33 is flipped up, the gate valve 32 is closed, and the substrate carrier is pulled by the guide rail 29(b). Complete the delivery.

[0030] In the conveying method explained above, the first
If there is no need to shut off the environment inside the partition wall of the second substrate transport device, the gate valve 32 is opened and the guide rail 33 is lowered, and the magnetic field generator continuously transfers the substrate transport body. It turns out.

Next, the configuration of an orthogonal transfer chamber module constructed by combining the substrate transfer device and the substrate transfer device described above and a method for transferring a substrate to a process chamber will be explained with reference to FIGS. 10 and 11.

FIG. 10 is a plan view of an embodiment of the orthogonal transfer chamber module according to the present invention, and FIG. 11 is a plan view taken along the dashed line B in FIG.
-B' section is a sectional view.

In FIG. 10, a transfer chamber bulkhead 36 made of a non-magnetic material with connection flanges welded to both ends is provided with connection ports 37 and 38 to the substrate transfer device and the process chamber 42. A connecting flange is also welded to the terminal. A substrate transfer device consisting of the same components as those explained in FIG. 4 is installed outside and inside the transfer chamber partition wall 36. Further, the transfer chamber partition wall 36 is provided with gate valves 39 at both ends for environmental isolation from other adjacent transfer chamber partition walls. Here, FIG. 4 can also be considered as a sectional view taken along the dashed line CC', which is a region extending to another adjacent transfer chamber partition via the gate valve in FIG. On the other hand, the substrate transfer device is connected to the connection port 37 via the gate valve 41 and the fork evacuation chamber 45 in a direction perpendicular to the transfer direction of the substrate transfer device, and transfers the substrate 46 between the substrate transfer device and the process chamber 42. Plays the role of transport. The orthogonal transfer chamber module constitutes one module including the substrate transfer device, the substrate transfer device, and a plurality of gate valves configured as described above. Here, substrate 4
6, depending on the type of manufacturing process, the transfer chamber partition 3
If the internal environment of 6 is a vacuum, an independent vacuum evacuation pump is provided, and if the internal environment is an inert gas or liquid, a supply port and a discharge port are provided.

In FIG. 11, the substrate transfer device includes a cylindrical partition tube 43 made of a non-magnetic material, and a permanent magnet 4 disposed outside the cylindrical partition tube 43 and having a driving means along the cylindrical partition tube 43.
4, and a cylindrical partition pipe 43 disposed inside the cylindrical partition pipe 43.
Ball bearing 52 as sliding means along the inner surface of
, a magnetic body 51 magnetically coupled to the permanent magnet 44 via the cylindrical bulkhead tube 43, and a fork 5 on which the board 46 is mounted.
3, and a cylindrical bulkhead tube 43 that connects the magnetic body 51 and the fork.
A linear motion introduction mechanism consisting of a rod 50 extending along the rod 50 and a ball bearing are used as means for slidingly guiding the rod 50, and by introducing vertical motion from outside the cylindrical bulkhead tube, the rod 50 and the fork 53 are moved vertically. It is composed of an up-and-down mechanism 49 that provides

Hereinafter, the substrate 4 is transferred by the above-mentioned substrate transfer device.
6 from the substrate transfer device to the process chamber 42 will be explained.

1. With the vertical mechanism 49 lowered, the permanent magnet 44 is advanced to allow the fork 53 to enter a position lower than the board 46.

2. After raising the vertical mechanism 49 and transferring the substrate 46 from the substrate transport body 47 to the fork 53, the gate valve 40 is opened and the permanent magnet 44 is advanced to be transported to the inside of the process chamber 42 directly above the substrate holder. .

3. After lowering the vertical mechanism 49 and placing the substrate 46 on the substrate holder inside the process chamber 42, the permanent magnet 44 is retracted, and when the fork 53 passes through the gate valve 40, the gate valve 40 is closed. .

4. The permanent magnet 44 further retracts and stops when the fork 53 enters the fork retraction chamber 45. This is to avoid interference between the substrate carrier 47 and the fork 53, which move orthogonally.

FIG. 12 shows an example in which the orthogonal transfer chamber module with the configuration and transfer method described above is applied.
Types of processes include a linear conveyance system in which orthogonal conveyance chamber modules according to the present invention are connected in a straight line as shown in FIG. 13, and a parallel conveyance system in which orthogonal conveyance chamber modules according to the present invention are connected in parallel as shown in FIG. Various forms can be considered depending on the scale.

[0041]

[Effects of the Invention] As explained in the above embodiments, 1. The substrate transfer device according to the present invention is suitable for transferring substrates in an environment isolated from the atmosphere, especially in an ultra-high vacuum, and is suitable for semiconductor processes where substrate contamination by particles and impurity gases generated from sliding parts of the mechanism is a serious problem. Through application, product yield can be improved. Further, even if there is a connecting element such as a flange or bellows or a blocking element such as a gate valve in the transport path, the substrate can be transported while passing smoothly.

2. Since the orthogonal transfer chamber module according to the present invention can connect one process chamber and a large number of separate and independent orthogonal transfer chamber modules corresponding to it, there is no restriction on the size or number of process chambers to be connected, and the transfer path can be extended. It is possible to build a transport system that can flexibly respond to changes in the system. In addition, since the process chambers are connected via at least two transfer chambers that can isolate the environment, mutual contamination between process chambers due to process components is reduced, and efficient pressure control during substrate transfer is achieved. Conversion is also possible.

3. Further, the linear or parallel transfer system constructed by the orthogonal transfer chamber module according to the present invention allows substrate transfer between multiple process chambers in any combination. Further, a plurality of substrate carriers can be installed within the transfer path, and the material and transfer range of the substrate carrier can be selected depending on the environment within each orthogonal transfer chamber module. Furthermore, the number of substrates to be mounted on the substrate carrier can be selected depending on the throughput of the process chamber.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a known example of a transport method using a magnetic coupling type transport arm.

FIG. 2 is a diagram showing a known example of a transport method in which a transport body with a rack attached thereto is guided by a rail and sent out by a pinion.

FIG. 3 is a diagram showing a known example of a transport method using a two-joint arm robot.

FIG. 4 is a side view of one embodiment of the substrate transport apparatus according to the present invention, showing a state in which the substrate transport body is approaching a gate valve.

FIG. 5 is a side view of the embodiment shown in FIG. 4, showing a state immediately before the substrate carrier passes through the gate valve.

FIG. 6 is a side view of the embodiment shown in FIG. 4, showing a state in which the substrate carrier is passing through a gate valve.

FIG. 7 is a side view of the embodiment shown in FIG. 4, showing the state immediately after the substrate carrier passes through the gate valve.

FIG. 8 is a side view of the embodiment shown in FIG. 4, showing a state in which the substrate carrier is moving away from the gate valve.

FIG. 9 is a cross-sectional view of the embodiment shown in FIG. 4;

FIG. 10 is a plan view of one embodiment of an orthogonal transfer chamber module according to the present invention.

FIG. 11 is a sectional view of the embodiment shown in FIG. 10;

FIG. 12 is a plan view of one embodiment of a linear transport system using orthogonal transport chamber modules according to the present invention.

FIG. 13 is a plan view of one embodiment of a parallel line transfer system using orthogonal transfer chamber modules according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1... Partition wall, 2... Permanent magnet, 3... Magnetic body, 4... Transport arm, 5... Fork, 6... Board, 7... Gate valve, 8... Vacuum chamber, 9... Rack, 10... Transport body, 11... Rail, 12
...Bulkhead, 13...Pinion, 14...Gate valve, 15...
Rail, 16... Transfer room, 17... Arm robot, 18...
Vacuum chamber, 19... Intermediate chamber, 20... Gate valve, 21... Substrate, 22(a), (b)... Partition wall, 23(a), (b)...
Magnetic field generator driving means, 24 (a), (b), (c), (
d)...Magnetic field generator, 25(a), (b)...Magnetic material, 26
(a), (b)...Fixing member, 27...Transportation base, 28...
Ball bearing, 29(a), (b)...Guide rail, 30...Fixing member, 31(a), (b)...Flange, 3
2... Gate valve, 33... Guide rail, 34... Board,
35... Substrate holder, 36... Transfer chamber partition, 37, 38... Connection port, 39, 40, 41... Gate valve, 42... Process chamber, 43... Cylindrical partition tube, 44... Permanent magnet, 45
...Fork evacuation chamber, 46... Board, 47... Board carrier, 4
8... Magnetic field generator driving means, 49... Vertical mechanism, 50... Rod, 51... Magnetic body, 52... Ball bearing, 53... Fork.

Claims (10)

[Claims] Claims: 1. A substrate transport device that uses magnetic force applied from the outside air to tow and transport a substrate carrying body on which a substrate is mounted in an environment isolated from the outside air by a partition wall made of a non-magnetic material. A plurality of magnetic field generators and a magnetic field generator driving means for imparting motion along the conveyance direction to the magnetic field generators are disposed outside, and are fixed to the partition wall and extend along the conveyance direction inside the partition wall. A guide rail, a transfer base having a plurality of ball bearings sliding along a track surface of the guide rail, and one or more substrate holders are connected to the magnetic field generator and a magnetic circuit through the partition wall and a gap inside the partition wall, respectively. A substrate transport body is arranged, which is made up of a plurality of fixed magnetic bodies arranged at positions where they can be formed, and a set of substrates is transported by the magnetic field generator, the magnetic field generator driving means, the guide rail, and the substrate transport body. The device is configured such that the magnetic field generator driving means gives independent transport operations to the magnetic field generators in the transport direction, so that the substrate transporter can be moved between the plurality of substrate transport devices arranged along the transport route. A substrate transfer device characterized by having means for delivering and receiving. 2. The substrate transport device according to claim 1, wherein the plurality of magnetic bodies arranged at positions where the magnetic circuit can be formed include at least two magnetic bodies fixed at both front and rear ends of the transport body in the transport direction. , the interval in the conveying direction of the magnetic body is arranged longer than the length of the connecting element and the blocking element in the conveying direction, and the magnetic field generating body is provided with an independent conveying operation in the conveying direction. A substrate transport device, characterized in that the substrate transport body is transferred between a plurality of the substrate transport devices via a connecting element and a blocking element. 3. A cylindrical bulkhead tube made of a non-magnetic material, a permanent magnet disposed outside the cylindrical bulkhead tube and having driving means along the cylindrical bulkhead tube, and a permanent magnet disposed inside the cylindrical bulkhead tube and attached to the cylindrical bulkhead tube. a fork on which a substrate is mounted, a magnetic body having a sliding means along the axis and magnetically coupled via the permanent magnet and the cylindrical bulkhead tube, and a cylindrical bulkhead coupling the magnetic body and the fork. In a linear motion introducing device consisting of one rod extending along a pipe, a ball bearing is used as means for slidingly guiding the rod, and by introducing vertical motion from outside the cylindrical bulkhead pipe, the ball bearing and A substrate transfer device having a function of transferring the substrate by vertically moving the rod and the fork. 4. The substrate transfer device and the substrate transfer device are arranged so that their transfer directions are perpendicular to each other to form a set of transfer devices, and the partition wall and the cylindrical partition tube are connected to each other through a blocking element. The connection element and the blocking element of the partition wall are provided at both ends of the substrate transfer device in the transfer direction, and the substrate processing container is connected to the substrate processing container on the extension of the substrate transfer device in the transfer direction. means for orthogonally branching a transfer path for transferring the substrate between the substrate transfer body of the substrate transfer device and the substrate processing container by the substrate transfer device, comprising a connection port, a connection element, and a blocking element; An orthogonal transfer chamber module comprising means for continuously extending the substrate transfer path by transferring the substrate transfer body between other adjacent substrate transfer devices. 5. The orthogonal transfer chamber module according to claim 4, wherein the partition wall and external and internal components of the partition wall have a heat resistance of 250° C. or higher, and the structure of the partition wall and the inside of the partition wall is The elements are constructed of low outgassing materials,
The orthogonal transfer chamber module is further provided with an independent vacuum pump for evacuating the inside of the partition wall, and the environment isolated from the atmosphere by the partition wall is an ultra-high vacuum. 6. The orthogonal transfer chamber module according to claim 4, wherein the environment isolated from the atmosphere by the partition wall is an inert gas. 7. The orthogonal transfer chamber module according to claim 4, wherein the environment isolated from the atmosphere by the partition wall is filled with liquid. 8. The orthogonal transfer chamber module according to claim 4, wherein the connecting element is a flange or a bellows, and the blocking element is a gate valve. 9. One or more of the substrate carriers are connected to the connection elements of the orthogonal transfer chamber modules or the blocking elements on the linear transfer path formed by connecting a plurality of the orthogonal transfer chamber modules according to claim 4. The substrate is continuously transported while passing through the substrate, and the substrate is transferred between the substrate transport body and the substrate processing container connected to the orthogonal transport chamber module by using the substrate transfer device to connect the connecting element or block the substrate. A linear conveyance system that is characterized by conveying elements while passing them through. 10. A plurality of linear conveyance systems according to claim 9 are arranged in parallel in a plurality of rows, adjacent linear conveyance systems are connected by a partition wall, and the substrate conveyance apparatus or the substrate transfer apparatus is used for conveyance. A parallel conveyance system characterized by connecting routes.