JP4664868B2 - Troubleshooting system for semiconductor manufacturing equipment - Google Patents

Description

  The present invention relates to a semiconductor manufacturing apparatus in which a plurality of process systems are configured by a plurality of process modules, and a substrate to be processed is distributedly processed in each process system, and in particular, integrated control when a failure occurs in any of the process systems The present invention relates to a failure handling system in which substrate processing is continued in a remaining process system by a controller.

  A semiconductor manufacturing apparatus that performs processing such as etching, ashing, and film formation on a substrate to be processed such as a silicon wafer, a module that accommodates the substrate for carrying in and out, a module that carries the substrate, A module is known in which modules for processing are connected via a gate valve, and the above processing and substrate transfer are automatically and continuously performed.

FIG. 1 shows a configuration example of a single wafer cluster type semiconductor manufacturing apparatus as an example of such a semiconductor manufacturing apparatus.
The semiconductor manufacturing apparatus includes four process modules PM1 to PM4, two cassette modules CM1 and CM2, and a transport module TM. The transport module TM includes process modules PM1 to PM4 and a cassette module CM1, Each CM 2 is configured to be hermetically connected via a gate valve (not shown).

Each of the process modules PM1 to PM4 is a module that performs a predetermined process on the wafer to be processed. In this example, the process modules PM1 to PM4 are divided into two systems to distribute the wafers.
That is, the process modules PM1 and PM4 and the process modules PM2 and PM3 execute the same wafer processing, and a process system including the process modules PM1 and PM2 and a process system including the process modules PM4 and PM3 are used. A series of processes are performed on the wafer.

The cassette modules CM1 and CM2 are modules for storing a plurality of (for example, 10) wafers. In this example, the cassette module CM1 is set as a loading module (load module) for storing unprocessed wafers. The module CM2 is set as a carry-out module (unload module) that accommodates a wafer processed in the process system.
Further, the transport module TM accommodates a robot arm R for carrying a wafer, between the cassette module CM1 and the process modules PM1 and PM4, between the process modules PM1 and PM2, and between PM4 and PM3, and in the process. Wafers are transferred between the modules PM2 and PM3 and the cassette module CM2. During the wafer transfer, the gate valve that closes the opening between the modules is opened and closed.

  The operations by the process modules PM1 to PM4, the cassette modules CM1 and CM2, and the transport module TM are directly controlled by the controllers PC1 to PC4, CC1, CC2, and TC attached to the respective modules. As shown in FIG. 2, these controllers PC1 to PC4, CC1, CC2, and TC are connected to the integrated control controller GC via a network N such as a LAN, and the controllers PC1 to PC4, CC1, CC2, The integrated control controller GC controls the modules PM1 to PM4, CM1, CM2, and TM by the TC.

The integrated control controller GC is provided with a wafer transfer table T having the contents as shown in FIG. 3, and the integrated control controller GC performs control in accordance with the contents of the table T, so that the wafer has two process systems PM1 and PM2. It is distributed and conveyed to PM4 and PM3, and process processing is performed in each system.
In the example shown in FIG. 3, the wafers accommodated in the cassette module CM1 are divided into odd-numbered and even-numbered wafers, and the odd-numbered wafers are paths composed of the modules CM1, PM1, PM2, and CM2. The first wafer is distributed and processed through a path including the modules CM1, PM4, PM3, and CM2.

That is, as shown in FIG. 4, the first wafer is transferred from the cassette module CM1 to the process module PM1 for processing, further transferred to the process module PM2, processed, and then transferred to the cassette module CM2. The Further, the second wafer is transferred from the cassette module CM1 to the process module PM4 with a slight waiting time for the transfer processing by one robot arm R, and further processed. After being transported to PM3 and processed, it is transported to cassette module CM2.
The third and fourth and subsequent wafers are processed in the same manner after the processing for the previous wafer is completed.

Here, in semiconductor manufacturing, for example, various faults may occur such as process conditions in the process module fluctuate due to external factors, processing errors occur in the controller of each module, and the like.
In response to the occurrence of such a failure, in the conventional semiconductor manufacturing apparatus described above, even if the failure location is a part of the process system, the integrated control controller interrupts all processing operations. Therefore, even when there are few unprocessed wafers, the processing of these wafers is not continued, resulting in a situation where the wafer processing is significantly delayed.

  The present invention has been made in view of the above-described conventional circumstances. When a failure occurs in a part of the process system, the substrate (wafer) processing is continued in the remaining normal process system to improve the production efficiency as a whole. An object of the present invention is to provide a failure handling system for a semiconductor manufacturing apparatus.

  In order to achieve the above object, a failure handling system for a semiconductor manufacturing apparatus according to the present invention includes a carry-in module that accommodates a plurality of substrates to be processed, a process module that performs a predetermined process on the substrate, and a substrate that has been processed In a semiconductor manufacturing apparatus in which a carry-out module that accommodates a substrate is connected via a transport module that conveys a substrate between the modules, a plurality of the process modules are provided, and a substrate from the carry-in module is connected to each process module by the transport module. The integrated control controller that distributes and distributes the substrates, distributes the substrate in multiple process systems, and controls each module in an integrated manner, detects a failure that occurred in one of the process systems, and controls each module. Continue processing the substrate in the remaining process system, excluding the faulty system. And wherein the Rukoto.

In the present invention, when a failure occurs in any one of the process systems in a state where the substrate is distributed and processed in a plurality of process systems, the integrated control controller detects the occurrence of the failure. Then, the integrated controller transfers the substrate scheduled to be processed in the process system in which the failure has occurred to the remaining normal process system, and continues processing of these substrates.
Therefore, although the processing is delayed by the amount of the process system in which the failure has occurred, by continuing the substrate processing, it is possible to improve the production efficiency as a whole compared to the case where all the processing is interrupted.

  As described above, according to the failure handling system according to the present invention, in a semiconductor manufacturing apparatus that processes a substrate in a distributed manner in a plurality of process systems, when a failure occurs in any of the process systems, the integrated control controller Since the processing is continued by transferring the substrate scheduled to be processed in the process system in which the failure occurred to the remaining normal process system, it is possible to perform the predetermined processing of the substrate scheduled for processing with a minimum delay. Therefore, the efficiency of semiconductor manufacturing can be increased as compared with the conventional case.

A semiconductor manufacturing apparatus failure handling system according to an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the present invention is applied to the semiconductor manufacturing apparatus shown in FIG. 1 and FIG. 2, and the same reference numerals are given to the parts already described, and redundant description is omitted.
In a state where both the process system composed of the process modules PM1 and PM2 and the process system composed of the process modules PM4 and PM3 are operating normally without any failure, the integrated control controller GC is also used in this embodiment. In accordance with the contents of the table shown in FIG. 3, the controllers PC1 to PC4, CC1, CC2, and TC are controlled in an integrated manner. As shown in FIG. Distributed processing.

The integrated control controller GC of this embodiment has means for detecting an error in each of the process module controllers PC1 to PC4 and each of the process modules PC1 to PC4 upon receiving an error signal from each of the process module controllers PC1 to PC4. This failure detection is always performed during system operation.
Further, the integrated controller GC of this embodiment has means for rewriting the contents of the wafer transfer table T. When the occurrence of a failure is detected, the contents of the table T are rewritten by this rewriting means, and the process in which the failure has occurred. A degenerate operation is performed in which a wafer to be processed in the system is transferred to the remaining normal process system and the processing is continued. In the present embodiment, the operator can select whether or not to perform the reduced operation by operating the operation panel of the integrated control controller GC, and only when the instruction is given, the integrated control The controller GC performs the degenerate operation.

Next, the operation of the system of the present embodiment when a failure occurs in the process module controllers PC1 to PC4 and the process modules PC1 to PC4 constituting each process system will be described with reference to FIGS.
First, when the system is started, the integrated controller GC starts monitoring error signals from the process module controllers PC1 to PC4 (step SS1), and either the process module controller PC1 to PC4 or the process modules PC1 to PC4 When a failure occurs and the integrated control controller GC receives an error signal from the process module controllers PC1 to PC4 related to the failure, it is determined whether or not an instruction to perform the degenerate operation is given (step S2).

As a result, when the execution of the degenerate operation is not instructed, the processing of all process systems is interrupted as in the conventional case (step S3). In this embodiment, the operation panel of the integrated control controller GC can be operated to select and instruct only the normal process system to operate as it is without performing the degenerate operation. This instruction is given. In this case, the normal process system continues to process only the wafer to be processed according to the table T shown in FIG. 3 (step S3).
On the other hand, as a result of the above determination, if the instruction to perform the degenerate operation is given, the process system in which the failure has occurred processes the odd number of wafers based on the error signal and the table contents of FIG. The integrated controller GC determines whether there is any (step S4).

  As a result, when a failure occurs in the system that processes odd-numbered wafers (that is, the system of PM1 and PM2), the schedule related to the odd-numbered wafers in the wafer transfer table T is rewritten (step S5). If a failure has occurred in the system that processes even-numbered wafers (that is, the PM4 and PM3 systems), the schedule for the even-numbered wafers in the wafer transfer table T is rewritten (step S6).

  This rewriting process is performed by the rewriting means of the integrated controller GC. For example, as indicated by a cross in FIG. 3 and FIG. 5, a failure occurs during the process processing of the first (odd number) wafer. In this case, as shown by * in FIG. 6, the schedule relating to the odd-numbered sheets after the wafer on the wafer transfer table T is rewritten. That is, the third, fifth, seventh, and ninth wafers are scheduled to be processed by the process system including the process modules PM1 and PM2 in normal processing (see FIG. 3). When the failure occurs in this process system, the process system is rewritten so that it is processed in a normal process system including the process modules PM4 and PM3.

  After the table T is rewritten in this way, the integrated controller GC performs control according to the contents of the table T (step S7). As a result, as shown in FIG. 5, the subsequent (third and subsequent wafers) are processed in a normal process system including the process modules PM4 and PM3. Therefore, the processing is continued even for the wafer scheduled to be processed in the process system in which the failure has occurred, and predetermined processing such as thin film formation is performed on the wafer.

  In the processing by this degeneration operation, since the overlap of wafer conveyance is reduced by reducing the process system, the integrated controller GC adjusts the waiting time for the third and subsequent wafers as shown in FIG. Then, control is performed so that what has been processed in two paths is processed in one path. For this reason, even if a failure occurs in the process system, all wafers can be processed without stopping the apparatus.

In the above embodiment, the integrated controller GC detects the occurrence of a failure by an error signal from the controllers PC1 to PC4, but directly monitors each of the controllers PC1 to PC4 and each of the process modules PC1 to PC4, A failure occurrence may be detected.
Further, in the semiconductor manufacturing apparatus of the above embodiment, the carry-in and carry-out cassette modules CM1 and CM2 are provided, respectively, but it is also possible to use both the carry-in and carry-out with one cassette module.

In the present invention, the semiconductor manufacturing apparatus may have two or more process systems, and each process system may be composed of one or more process modules.
The present invention can also be applied to semiconductor manufacturing apparatuses other than the cluster type. In short, the present invention is applied to any semiconductor manufacturing apparatus that performs distributed processing of substrates to be processed in two or more process systems. can do.

It is a top view which shows the structural example of the semiconductor manufacturing apparatus based on one Example of this invention. It is a block diagram which shows the control system which concerns on one Example of this invention. It is explanatory drawing which shows the content at the time of the normal of a wafer conveyance table. It is a time chart of the process at the time of normal of a semiconductor manufacturing apparatus. It is a time chart of the process at the time of the failure generation of a semiconductor manufacturing apparatus. It is explanatory drawing which shows the content at the time of the failure generation of a wafer conveyance table. It is a flowchart of the coping process at the time of the failure generation of a semiconductor manufacturing apparatus.

Explanation of symbols

PM1, PM2, PM3, PM4 process modules,
CM1, CM2 cassette module,
TM transport module,
GC integrated controller,
PC1, PC2, PC3, PC4 Process module controller,
CC1, CC2 cassette module controller,
TC transport module controller,

Claims (3)

Transport for transporting a substrate between the modules, a carry-in module that accommodates a plurality of substrates to be processed, a plurality of process modules that perform predetermined processing on the substrate, and a carry-out module that accommodates processed substrates Connected through modules,
Semiconductor manufacturing having an integrated control controller that transports a substrate from the carry-in module distributed to each process module via the transport module, distributes the substrate in a plurality of process systems, and controls each module in an integrated manner In the device
The integrated controller performs a degenerate operation in which substrate processing is continued in a normal process system excluding a process system including the process module including the process module in which the fault has occurred and a detection unit that detects the occurrence of a fault in each module. Selection means for instructing whether or not to select, and rewriting means for rewriting the schedule so that the substrate to be processed in the failed process system is processed in a normal process system ,
When a failure occurs in any one of the modules, it is determined whether or not an instruction to perform the degeneration operation is given. If there is no instruction for the degeneration operation , all process systems are operated according to the operation of the operation panel of the integrated controller . If processing is interrupted or processing of only the substrate to be processed in the normal process system is continued, and the instruction for degenerate operation is given, a process system including a process module in which a failure has occurred is determined, and the fault Rewrite the schedule so that the substrate that is scheduled to be processed in the process system where the error occurred is processed in the normal process system,
When a substrate to be processed in a process system in which a failure has occurred is transferred to a normal process system and processing is continued, the transfer waiting time to the process module is adjusted for each substrate, and each normal substrate is processed only by the normal process system. Control to process with,
A semiconductor manufacturing apparatus. Transport for transporting a substrate between the modules, a carry-in module that accommodates a plurality of substrates to be processed, a plurality of process modules that perform predetermined processing on the substrate, and a carry-out module that accommodates processed substrates Connected through modules, transports the substrate from the carry-in module to each process module via the transport module, distributes the substrate in a plurality of process systems, and controls each module in an integrated manner In a failure processing method in a semiconductor manufacturing apparatus having an integrated controller,
The integrated controller performs a degenerate operation in which substrate processing is continued in a normal process system excluding a process system including the process module including the process module in which the fault has occurred and a detection unit that detects the occurrence of a fault in each module. Selection means for instructing whether or not to select, and rewriting means for rewriting the schedule so that the substrate to be processed in the failed process system is processed in a normal process system,
When a failure occurs in any one of the modules, it is determined whether or not an instruction to perform the degeneration operation is given. If there is no instruction for the degeneration operation, all process systems are operated according to the operation of the operation panel of the integrated controller. If processing is interrupted or processing of only the substrate to be processed in the normal process system is continued, and the instruction for degenerate operation is given, a process system including a process module in which a failure has occurred is determined, and the fault Rewrite the schedule so that the substrate that is scheduled to be processed in the process system where the error occurred is processed in the normal process system,
When a substrate to be processed in a process system in which a failure has occurred is transferred to a normal process system and processing is continued, the transfer waiting time to the process module is adjusted for each substrate, and each normal substrate is processed only by the normal process system. Control to process with,
A failure processing method in a semiconductor manufacturing apparatus. Transport for transporting a substrate between the modules, a carry-in module that accommodates a plurality of substrates to be processed, a plurality of process modules that perform predetermined processing on the substrate, and a carry-out module that accommodates processed substrates Connected through modules, transports the substrate from the carry-in module to each process module via the transport module, distributes the substrate in a plurality of process systems, and controls each module in an integrated manner In a semiconductor manufacturing method using a semiconductor manufacturing apparatus having an integrated controller,
The integrated controller performs a degenerate operation in which substrate processing is continued in a normal process system excluding a process system including the process module including the process module in which the fault has occurred and a detection unit that detects the occurrence of a fault in each module. Selection means for instructing whether or not to select, and rewriting means for rewriting the schedule so that the substrate to be processed in the failed process system is processed in a normal process system,
When a failure occurs in any one of the modules, it is determined whether or not an instruction to perform the degeneration operation is given. If there is no instruction for the degeneration operation, all process systems are operated according to the operation of the operation panel of the integrated controller. If processing is interrupted or processing of only the substrate to be processed in the normal process system is continued, and the instruction for degenerate operation is given, a process system including a process module in which a failure has occurred is determined, and the fault Rewrite the schedule so that the substrate that is scheduled to be processed in the process system where the error occurred is processed in the normal process system,
When a substrate to be processed in a process system in which a failure has occurred is transferred to a normal process system and processing is continued, the transfer waiting time to the process module is adjusted for each substrate, and each normal substrate is processed only by the normal process system. Control to process with,
A method of manufacturing a semiconductor.

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