JP4656582B2 - Rubber elastic member cleaning method and rubber elastic member cleaning device - Google Patents

Description

  The present invention relates to a rubber elastic member cleaning method and a rubber elastic member cleaning apparatus, and more particularly, the adhered matter attached to a rubber elastic member of a holding jig for sticking and holding an object to be adhered such as a small part is desired. The present invention relates to a rubber elastic member cleaning method and a rubber elastic member cleaning device that can be removed.

  Conventionally, in the production of silicon wafers, flexible printed circuit boards, thin plates such as glass plates for large screen display devices, and small electronic components such as ceramic capacitors and coil filters, the thin plates are easily damaged. The electronic parts are difficult to fix in place and easily fall down. Generally, these thin plate-like objects or electronic parts are fixed to a holding jig or the like, for example, a polishing process, a pattern forming process, a dicing process, etc. Etc. are carried out or transported between the manufacturing processes.

  As a holding jig that can hold thin plates or electronic parts by adhesion, for example, at least the surface part is formed of rubber elastic material with adhesiveness, and the adhesive force can hold small parts closely on the elastic material surface A small component holding jig (see Patent Document 1), a base portion having at least one convex body on an upper surface, and a peripheral wall portion surrounding the outer side of the convex body, A pressure-sensitive adhesive sheet member having a top portion of the convex body and a top portion and a lower surface of the peripheral wall portion and fixed to each other and having a pressure-sensitive adhesive portion on the upper surface, and a gap formed by the pressure-sensitive adhesive sheet member, the base portion, and the peripheral wall portion A component holder provided with a communicating air hole, wherein a weak adhesive portion or a non-adhesive portion having an adhesive force weaker than that of the adhesive portion is provided on an upper surface portion of the adhesive sheet member corresponding to a top portion of the convex body. Part is formed The portion of the pressure-sensitive adhesive sheet member elastically deforms to the lower surface side of the base portion by sucking the gas in the gap portion from the outside through the vent hole. And a component holder (see Patent Document 2).

  Such a holding jig or component holder is used or used in a manufacturing process or transport between manufacturing processes in a state where an object to be bonded such as a thin plate or a small part is adhered and held. If left unattended, impurities generated in the manufacturing process, unnecessary materials, dust present in the environment, suspended matter, etc. will adhere to the rubber elastic material or adhesive sheet member, and the object to be adhered will be as desired. It may become impossible to hold the adhesive.

  In such a case, the rubber elastic material of the holding jig or the adhesive sheet member of the component holder is usually washed. In order to clean the rubber elastic material of the holding jig or the pressure sensitive adhesive sheet member of the component holder, until now, for example, air was sprayed onto the rubber elastic material or the pressure sensitive adhesive sheet member and adhered to the rubber elastic material or the pressure sensitive adhesive sheet member. A method for removing impurities, unwanted materials, dust, suspended matters, etc. by wind pressure, or immersing the rubber elastic material or adhesive sheet member in the cleaning solution to wash away the adhering material adhering to the rubber elastic material or adhesive sheet member Methods have been adopted.

  However, these conventional cleaning methods have been unable to remove the adhered matter adhering to the rubber elastic material or the pressure-sensitive adhesive sheet member as desired.

Japanese Patent Publication No. 07-093247 JP 2005-327758 A

  The present invention relates to a method for cleaning a rubber elastic member capable of removing the adhering matter adhering to a rubber elastic member mounted on a holding jig for adhering and holding an object to be bonded, and cleaning of the rubber elastic member. An object is to provide an apparatus.

As means for solving the problems,
A first aspect of the present invention provides a method for cleaning an elastic rubber member that is attached to a holding jig that holds and adheres an object to be adhered, and has an adhesive property capable of adhering and holding the object to be adhered to at least a part of the surface. A method for cleaning a rubber elastic member, characterized in that the cleaning liquid is sprayed onto the surface with an impact load of 0.010 to 0.06 MPa with respect to
According to a second aspect of the present invention, the cleaning liquid is injected at an injection pressure of 0.7 to 7 MPa from an injection distance of 90 mm or less at an angle of 15 to 70 ° with respect to the surface . It is a cleaning method of the rubber elastic member described,
3. The method for cleaning a rubber elastic member according to claim 1, wherein the cleaning liquid is sprayed so as to pass through the surface at a passing speed of 2 to 25 mm / sec. ,
Claim 4 is the method for cleaning a rubber elastic member according to any one of claims 1 to 3, wherein the cleaning liquid is injected at an injection angle of 5 to 50 °.
Claim 5 is the method for cleaning a rubber elastic member according to any one of claims 1 to 4, wherein the rubber elastic member is formed by curing an adhesive silicone rubber composition.
Claim 6 is the method for cleaning a rubber elastic member according to any one of claims 1 to 5 , wherein the adhesive has an adhesive force of ^{2 to} 50 g / mm ² .
A seventh aspect of the present invention is a rubber elastic member cleaning device that is mounted on a holding jig for sticking and holding an adherend, and has an adhesive property capable of sticking and holding the adherend on at least a part of its surface. a fixing base for fixing the elastic member, and a jet nozzle for ejecting a cleaning liquid to the surface with a shock load 0.010~0.06MPa to the surface of the rubber elastic member fixed to the fixed base, The spray nozzle has a spray pressure of 0.7 to 7 MPa, and a plurality of the spray nozzles are arranged in parallel so as to have a spray distance of 90 mm or less at an angle of 15 to 70 ° with respect to the surface. A rubber elastic member cleaning device
An eighth aspect of the present invention is the rubber elastic member cleaning apparatus according to the seventh aspect , wherein the adhesiveness has an adhesive force of ^{2 to} 50 g / mm ² .

  According to the method for cleaning a rubber elastic member according to the present invention, the cleaning liquid is sprayed toward the rubber elastic member with an impact load of 0.010 to 0.06 MPa with respect to the rubber elastic member to which the attached matter has adhered. Deposits adhered to the surface of the rubber elastic member can be removed as desired. Therefore, according to the present invention, a method for cleaning a rubber elastic member capable of removing, as desired, adhering matter adhering to a rubber elastic member mounted on a holding jig for adhering and holding an adherend, and rubber An apparatus for cleaning an elastic member can be provided.

  The rubber elastic member cleaned by the rubber elastic member cleaning method according to the present invention is a rubber elastic member attached to a holding jig for sticking and holding an adherend. Details of the rubber elastic member will be described later. Since this rubber elastic member has adhesiveness capable of adhering and holding an object to be adhered, it is left unattended while using a holding jig equipped with a rubber elastic member or not used. During the use, impurities generated during use, unnecessary materials, dusts in the environment, adhering materials such as floating materials adhere, and as a result, the object to be adhered cannot be adhered and held as desired. . In addition, product waste generated in the manufacture of the rubber elastic member or the holding jig may adhere to the rubber elastic member, and the manufactured holding jig may not be used as it is. Therefore, it can be said that the rubber elastic member cleaned by the rubber elastic member cleaning method according to the present invention is a rubber elastic member having various deposits attached to the surface thereof.

  The cleaning liquid used in the method for cleaning a rubber elastic member according to the present invention is water or a mixed liquid of water and alcohol, and it is not necessary to dry the cleaning liquid after cleaning. Liquid is preferred. For example, methanol, ethanol, propanol, butanol or the like can be used as the alcohol, and methanol or propanol is advantageously used because it is inexpensive. The mixing ratio of water and alcohol in the mixed solution is not particularly limited as long as water is contained. If only alcohol is used as the cleaning liquid, the rubber elastic member after cleaning may be whitened, and the adhesive strength inherent to the rubber elastic member may be reduced. The mass ratio of water and alcohol in the mixed solution is preferably 25:75 to 75:25, and more preferably 40:60 to 60:40. In the present invention, the cleaning liquid only needs to be set at a temperature not lower than 10 ° C. and not higher than its boiling point, for example, and is preferably 15 to 60 ° C., particularly about room temperature, in terms of easy adjustment of the temperature of the cleaning liquid.

  In the method for cleaning a rubber elastic member according to the present invention (hereinafter sometimes referred to as the cleaning method according to the present invention), the cleaning liquid is sprayed toward the surface of the rubber elastic member.

  In the cleaning method according to the present invention, the cleaning liquid is sprayed toward the rubber elastic member with an impact load of 0.010 to 0.06 MPa (sometimes referred to as an impact force in the present invention) with respect to the rubber elastic member. The If the cleaning liquid is sprayed onto the rubber elastic member with an impact load of less than 0.010 MPa with respect to the rubber elastic member, the deposits attached to the rubber elastic member may not be effectively removed. If the rubber elastic member is sprayed with an impact load exceeding 0.06 MPa, the rubber elastic member may be damaged or cracked, and the rubber elastic member may be damaged. The cleaning liquid has a viscosity of 0.028 to 0.051 MPa with respect to the rubber elastic member in that it can more effectively remove deposits attached to the surface of the rubber elastic member while preventing damage to the rubber elastic member. It is preferable to spray toward the rubber elastic member with an impact load, and it is more preferable to spray toward the rubber elastic member with an impact load of 0.034 to 0.044 MPa.

  The impact load applied to the rubber elastic member is an impact sensor (for example, product name “PS-C”) attached to the back surface of the rubber elastic member when the cleaning liquid is sprayed onto the rubber elastic member. , “PS-D” can be measured using Kyowa Denki Co., Ltd.).

  In the cleaning method according to the present invention, the impact load on the rubber elastic member only needs to be within the above range, and the angle at which the cleaning liquid is sprayed, the spraying distance of the cleaning liquid, and the spraying so that the impact load of the cleaning liquid is within the above range. The angle, the injection nozzle diameter, the injection amount, and the like can be appropriately adjusted.

  For example, the cleaning liquid is preferably sprayed at an angle of 15 to 70 ° with respect to the surface of the rubber elastic member. When the cleaning liquid is sprayed at an angle smaller than 15 ° with respect to the surface of the rubber elastic member, the rubber elastic member is lifted or elastically deformed by the cleaning liquid, and the adhering matter adhering to the surface of the rubber elastic member is removed. On the other hand, if it is ejected at an angle larger than 70 °, deposits adhered to the surface of the rubber elastic member by the cleaning liquid may enter the rubber elastic member. It may be pushed in, and a deposit | attachment cannot be removed much more effectively. The cleaning liquid is jetted while being adjusted to an angle of 30 to 55 ° with respect to the surface of the rubber elastic member in that the adhered matter adhering to the surface of the rubber elastic member can be more effectively removed. More preferably, it is particularly preferable that the jet is adjusted to an angle of 40 to 50 °.

  Further, it is preferable that the cleaning liquid is sprayed with the spraying distance between the surface of the rubber elastic member and the cleaning liquid spray start position (usually the nozzle opening of the spray nozzle) being adjusted to 90 mm or less. If the cleaning liquid is sprayed at a spray distance longer than 90 mm, the impact load on the rubber elastic member may be reduced, and the adhered matter may not be removed more effectively. In addition, it is necessary to increase the injection pressure, which will be described later, and the cleaning efficiency may be sacrificed due to damage to the rubber elastic member, complication of the manufacturing equipment, increase in manufacturing cost, and the like. The cleaning liquid can be sprayed close to the rubber elastic member until the spray start position is not in contact with the rubber elastic member. The cleaning liquid is more preferably sprayed at a spraying distance of about 30 to 70 mm, and more preferably at a spraying distance of about 40 to 60 mm in that it is possible to more effectively remove deposits attached to the surface of the rubber elastic member. It is particularly preferred that it be injected.

  Furthermore, it is preferable that the cleaning liquid is sprayed at a pressure of 0.7 to 7 MPa. If the cleaning liquid is sprayed at a spray pressure smaller than 0.7 MPa, the impact load on the rubber elastic member may be reduced, and the deposits may not be more effectively removed, whereas it is larger than 7 MPa. When injected with the injection pressure, the rubber elastic member may be scratched or cracked on the surface to damage the rubber elastic member. The cleaning liquid is more preferably injected at an injection pressure of about 3 to 6 MPa, and more preferably at an injection pressure of about 4 to 5 MPa, in order to more effectively remove deposits attached to the surface of the rubber elastic member. It is particularly preferred that it be injected.

  In the cleaning method according to the present invention, the passing speed at which the cleaning liquid passes through the surface of the rubber elastic member is not particularly limited, but it ensures workability and more effectively removes the deposits attached to the surface of the rubber elastic member. In this case, the cleaning liquid is advantageously sprayed with the passage speed passing through the surface of the rubber elastic member adjusted to 2 to 25 mm / sec. Since the rubber elastic member has an adhesive force capable of adhering and holding the object to be adhered, if the passing speed of the cleaning liquid passing through the surface of the rubber elastic member is faster than 25 mm / sec, the deposit is effectively removed. However, it may be necessary to spray the cleaning liquid more than once. On the other hand, the speed at which the cleaning liquid passes through the surface of the rubber elastic member may be slower than 2 mm / sec. However, if it is too slow, the cleaning efficiency of the rubber elastic member is lowered and workability is inferior. In order to ensure workability and to more effectively remove deposits adhering to the surface of the rubber elastic member, it is more advantageous that the cleaning liquid is jetted with the passage speed adjusted to 3 to 20 mm / sec. In particular, it is particularly advantageous that the jet is adjusted to a passage speed of 3 to 15 mm / sec.

  In the cleaning method according to the present invention, the spray angle representing the spray region of the cleaning liquid sprayed from the spray port is not particularly limited, while ensuring the impact load on the rubber elastic member, without damaging the surface of the rubber elastic member, In order to remove adhering deposits more effectively, it is advantageous that the cleaning liquid is jetted by adjusting the jet angle to 5 to 50 °. If the cleaning liquid is injected at an injection angle smaller than 5 °, the surface of the rubber elastic member may be damaged. If the cleaning liquid is injected at an injection angle larger than 50 °, the rubber elasticity The impact load on the member is reduced, and the adhered matter may not be removed. In order to more effectively remove the adhered deposits without damaging the surface of the rubber elastic member, it is more advantageous that the cleaning liquid is jetted by adjusting the jet angle to 10 to 35 °. It is particularly advantageous that the jet is adjusted to an injection angle of 10 to 30 °.

  In the cleaning method according to the present invention, the aspect in which the cleaning liquid is sprayed in the width direction of the rubber elastic member is not particularly limited, but in order to more effectively remove the deposits attached to the surface of the rubber elastic member, the cleaning liquid is: It is advantageous to spray uniformly over the entire width direction of the rubber elastic member, and it is advantageous to spray at a predetermined interval (for example, repeatedly or in parallel) in the width direction of the rubber elastic member. is there. In addition, it may be injected at a predetermined interval (for example, in a serial state) in the length direction of the rubber elastic member. In the present invention, if the impact load applied to the rubber elastic member is adjusted within the above range, the deposits attached to the surface of the rubber elastic member can be effectively removed. If the cleaning liquid is jetted and the cleaning liquid is sprayed, the deposits can be sufficiently removed and the amount of the cleaning liquid used can be reduced. When a predetermined interval is provided in the width direction of the rubber elastic member and the cleaning liquid is ejected, the predetermined interval depends on, for example, the ejection angle, but is preferably 15 to 50 mm, and particularly preferably 20 to 40 mm. .

  In the cleaning method according to the present invention, the impact load on the rubber elastic member is adjusted within the above range, and the cleaning liquid is sprayed toward the surface of the rubber elastic member so that the adhered matter adhered to the surface of the rubber elastic member is removed. Remove. The surface of the rubber elastic member to which the cleaning liquid has been sprayed can be evaluated by observing the surface of the rubber elastic member visually or with a microscope or the like to evaluate the degree to which the deposits have been removed. Since the holding jig provided with the rubber elastic member is used in the manufacturing process of the adherend while securely holding the adherend as desired, it holds the adherend in an adhesive manner. It is desirable that the surface of the rubber elastic member is kept to the extent that deposits are slightly adhered when observed with a microscope or the like. According to the cleaning method of the present invention, the adhered matter adhering to the surface of the rubber elastic member is removed as desired to the extent that the adhered matter is slightly adhered when observed with a microscope. Can do. Further, in the cleaning method according to the present invention, the rubber elastic member is scratched or cracked, and the rubber elastic member can be removed as desired without damaging the rubber elastic member. Can be restored to the original adhesive strength immediately after production.

  Next, an example of a cleaning apparatus (hereinafter, simply referred to as a cleaning apparatus) that can carry out the cleaning method according to the present invention will be described with reference to the drawings.

  As shown in FIG. 1 and FIG. 2, the cleaning device 1 includes a fixing base 10 that fixes the rubber elastic member 31 of the holding jig 30 by fixing the holding jig 30 including the rubber elastic member 31. The injection nozzle 20 that injects the cleaning liquid onto the rubber elastic member 31 with an impact load of 0.010 to 0.06 MPa with respect to the rubber elastic member 31 fixed by the fixing base 10 is provided. More specifically, the cleaning device 1 fixes the rubber elastic member 31 of the holding jig 30 by fixing the holding jig 30 provided with the rubber elastic member 31 as shown in FIGS. The rubber elastic member so as to be a predetermined injection distance d at a predetermined angle θ (ie, 15 to 70 °) with respect to the fixing base 10 and the surface of the rubber elastic member 31 fixed by the fixing base 10. And an injection nozzle 20 for injecting a cleaning liquid set at a predetermined injection pressure (that is, 0.7 to 7 MPa). As shown in FIGS. 1 and 2, the cleaning device 1 is installed so as to surround the conveying means 11 having the fixed base 10 on the surface thereof, and the rubber elastic member 31. And an injection nozzle arrangement gate 21 for arranging the injection nozzle 20.

  As shown in FIGS. 1 and 2, the fixing base 10 only needs to fix the rubber elastic member 31 of the holding jig 30 by fixing the holding jig 30 to the surface thereof. The table 10 may be configured to fix the holding jig 30 by adhesion or magnetism, and an engaging portion (illustrated) that can be engaged with a normal fixing means, for example, the base 32 of the holding jig 30. The holding jig 30 may be fixed by engaging the base body 32 and the engaging portion. In the cleaning apparatus 1, the fixing base 10 is magnetized and is configured to fix the base 32 of the holding jig 30 with a magnetic force.

  As shown in FIGS. 1 and 2, the transport unit 11 includes a fixed base 10 on the surface thereof, and the fixed base 10 is moved at a predetermined transport speed, that is, at a speed that matches the passing speed of the cleaning liquid. And it is comprised so that it may convey in the arrow A direction in FIG. The transport unit 11 includes, for example, a driving unit (not shown) such as a motor and a driving force transmission unit (not shown) that transmits a driving force generated by the driving unit, such as a gear and a chain. The transport means 11 only needs to be able to transport the fixed base 10 at a predetermined transport speed, and examples thereof include a belt conveyor and a mesh type conveyor.

  As shown in FIGS. 1 and 2, the injection nozzle arrangement gate 21 surrounds the conveying means 11 and is installed so that the conveyance means 11 passes through the inside of the injection nozzle arrangement gate 21. The injection nozzle arrangement gate 21 includes two struts 22 extending vertically from both sides of the transport unit 11, and an upper part of the transport unit 11, and extends vertically to the traveling direction of the transport unit 11. It has a beam 23 for connecting the column 22. The column 22 of the injection nozzle arrangement gate 21 has a linear distance from an injection port of an injection nozzle 20 (described later) arranged on the beam 23 to the rubber elastic member 31 fixed to the fixed base 10. The height is adjusted to be 90 mm or less. Further, as shown in FIGS. 1 and 2, the jet nozzle 20 is attached to the beam 23 of the jet nozzle arrangement gate 21.

  As shown in FIGS. 1 and 2, the spray nozzle 20 is formed on the beam 23 of the spray nozzle arrangement gate 21 so that the cleaning liquid can be sprayed onto the rubber elastic member 31 at the predetermined angle θ. Three are arranged in parallel at a predetermined interval. Each spray nozzle 20 is connected to a transfer means 24 for transferring cleaning liquid stored in a cleaning liquid storage tank (not shown), for example, a pipe. The transfer means 24 applies the cleaning liquid to a predetermined pressure, that is, the injection pressure. A pressurizing means for pressing, for example, a compressor (not shown) or the like is interposed.

  The injection nozzle 20 only needs to be able to inject the cleaning liquid onto the rubber elastic member 31 with an impact load of 0.010 to 0.06 MPa with respect to the rubber elastic member 31, for example, a circular, elliptical, or slit-like injection port. An injection nozzle or a high-pressure injection nozzle having (not shown) may be used. The injection nozzle 20 has a nozzle diameter or the like set according to the injection pressure, injection amount, etc. of the cleaning liquid to be injected, and further has an injection angle (indicated by a in FIG. 2) of 5 to 50 °. It is good to have a mouth. A known spray nozzle can be used as the spray nozzle 20, for example, a spray nozzle having a flat spray pattern (trade names “MEG type Washjet high pressure spray nozzle series”, “WEG type Washjet high pressure spray nozzle series”). , “MEG-SSTC type Washjet high pressure spray nozzle series” and “IMEG type Washjet high pressure spray nozzle series”, both manufactured by Spraying Systems Japan Co., Ltd.).

  The cleaning device 1 configured as described above has the cleaning liquid applied to the rubber elastic member 31 with an impact load of 0.010 to 0.06 MPa, and at a predetermined angle θ so as to realize the impact load. It is possible to inject toward the rubber elastic member 31 from the predetermined injection distance d with a predetermined injection pressure.

  Next, a cleaning method according to the present invention using this cleaning device 1 will be described. In order to clean the rubber elastic member 31, first, a cleaning liquid is prepared and stored in a cleaning liquid storage tank (not shown). Next, the pressurizing means interposed in the transfer means 24 is operated to supply the cleaning liquid to the injection nozzle 20 via the transfer means 24 while pressurizing the cleaning liquid supplied to the injection nozzle to the injection pressure. On the other hand, the holding jig 30 provided with the rubber elastic member 31 with the adhering matter attached to the surface is fixed to the fixing base 10 provided on the surface of the conveying means 11.

  Next, the driving unit of the transport unit 11 is operated, and the transport unit 11 is operated at a predetermined transport speed. Then, the rubber elastic member 31 of the holding jig 30 is also transported at a predetermined transport speed in the direction of arrow A shown in FIGS. 1 and 2 through the fixed base 10 fixed to the surface of the transport means 11. The

  The cleaning liquid is ejected from the ejection nozzle 20 simultaneously with or before and after the operation of the driving unit in the transport unit 11. As described above, the spray nozzle 20 can spray the cleaning liquid onto the rubber elastic member 31 with an impact load of 0.010 to 0.06 MPa. The injection nozzle 20 is arranged on the beam 23 of the injection nozzle arrangement gate 21 so as to have a predetermined angle θ and a predetermined injection distance d so as to realize the impact load, and a predetermined injection pressure. Since the cleaning liquid is pressurized by the pressurizing unit, a predetermined angle with respect to the surface of the rubber elastic member 31 of the holding jig 30 that is transported at a predetermined transporting speed by the operation of the transporting unit 11. At θ, the cleaning liquid set at a predetermined injection pressure can be injected from a predetermined injection distance d. Therefore, the deposits adhered to the rubber elastic member 31 can be removed as desired, and the rubber elastic member is damaged or cracked, and the rubber elastic member 31 is not damaged without damaging the rubber elastic member. The force can be restored to the original adhesive strength immediately after production.

  In the cleaning method and the cleaning apparatus according to the present invention, the rubber elastic member to be cleaned is a rubber elastic member attached to the holding jig for sticking and holding the adherend as described above.

  The rubber elastic member may be a rubber elastic member having an adhesive property capable of sticking and holding an adherend, for example, a rubber elastic member including a strong adhesive portion having an adhesive property capable of sticking and holding an adherend. Alternatively, it may be a rubber elastic member composed of a weakly adhesive part having an adhesive strength that is weaker than that of the strong adhesive part and cannot adhere and hold the adherend itself. In addition to the adhesive part, it may be a rubber elastic member further having a weak adhesive part and / or a non-adhesive part that does not hold the object to be adhered. As a rubber elastic member having a strong adhesion part and a weak adhesion part or a non-adhesion part, for example, on the surface, either a strong adhesion part, a weak adhesion part or a non-adhesion part is the sea, and the sea island structure with the other as an island And a rubber elastic member having a strong adhesive portion and a weak adhesive portion or a non-adhesive portion alternately arranged on the surface. That is, in the present invention, the rubber elastic member may be a rubber elastic member having a strong adhesive portion on at least a part of its surface.

Here, the adhesive strength of the strong adhesive portion, to hold the adhesive and adherend may comprise, for example, often in the range of 2 to 50 g / mm ^2, the adhesive strength of the weak adhesive portion is 0.1 g / mm ² or more It should be less than 2 g / mm ² , and the adhesive strength of the non-adhesive part is less than 0.1 g / mm ² . Here, the adhesive strength of the strong adhesive portion, the weak adhesive portion, and the non-adhesive portion is determined as follows. First, a suction fixing device (for example, trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) or a vacuum suction chuck plate for horizontally fixing a rubber elastic member, and a cylinder with a diameter of 10 mm at the tip of the measurement unit. A load measuring device provided with a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) with a contact made of stainless steel (SUS304) made is prepared. Next, a rubber elastic member is fixed on the suction fixing device or vacuum suction chuck plate in the load measuring device, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Next, the contact attached to the load measuring device is lowered until it comes into contact with the measured part of the rubber elastic member at a speed of 20 mm / min, and then the contact is measured at a predetermined load on the measured part. Press vertically for 3 seconds against the part. Here, the predetermined load is set to 25 g / mm ² . Next, the contact is pulled away from the site to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, and the plurality of separation loads obtained are arithmetically averaged, and the average value obtained is taken as the adhesive force of the elastic member. This measurement method may be performed manually, for example, using a test stand (for example, trade name: VERTICAl MODEL MOTORIZED STAND series, manufactured by Imada Co., Ltd.) or the like. .

  The strong adhesion part in a rubber elastic member is formed with an adhesive composition. Examples of the adhesive composition include various elastomers such as silicone rubber, fluorine rubber, urethane elastomer, natural rubber, styrene-butadiene copolymer elastomer, and the like, silicone rubber excellent in strength and weather resistance, fluorine Rubber is good. Among these, it is particularly preferable to have a rubber hardness (JIS K 6253 [durometer A]) of about 5 to 60. If the rubber hardness is less than 5, the adhesive strength may become too strong, while if it exceeds 60, the adhesive strength may become too weak.

  The silicone rubber is formed of an adhesive silicone rubber composition containing, as essential components, a silicone raw rubber (a), an adhesive component (c), and a silica-based filler (e). This adhesive silicone rubber composition may be either an addition reaction curable type or a peroxide curable type. When the adhesive silicone rubber composition is an addition reaction curable type, the adhesive silicone rubber composition comprises a silicone raw rubber (a), a crosslinking component (b), an adhesive component (c), and a silicone raw rubber (a ) And the crosslinking component (b), a catalyst (d) that promotes a crosslinking reaction, and a silica-based filler (e) are contained. On the other hand, when the adhesive silicone rubber composition is a peroxide curable type, the adhesive composition comprises a silicone raw rubber (a), an adhesive component (c), a silica-based filler (e), and an organic material. Contains peroxide (f).

First, an addition reaction curable adhesive silicone rubber composition will be described. The silicone raw rubber (a) contained in the addition reaction curable adhesive composition contains a (R ₂ SiO _2/2 ) unit (R represents a hydrocarbon group) and has a substituent. The polysiloxane may be a long-chain polymer of polysiloxane which may be used. For example, a polyorganosiloxane having an alkenyl group which can be cross-linked by addition reaction can be used, and in particular, an alkenyl represented by the following formula (1): A group-containing polyorganosiloxane can be preferably used.

R ¹ _(3-a) X _a SiO— (R ¹ XSiO) _m — (R ¹ ₂ SiO) _n —SiR ¹ _(3-b) X _b (1)

In the formula (1), R ¹ is a monovalent hydrocarbon group having no aliphatic unsaturated bond, and may be the same or different, and X is an alkenyl-containing organic group. These may be the same or different. A is an integer of 0 to 3, b is an integer of 0 to 3, m is an integer of 0 or more, n is an integer of 100 or more, and a, b, and m are not 0 at the same time.

In the formula (1), R ¹ is preferably a hydrocarbon group having 1 to 10 carbon atoms, a linear or branched alkyl group such as a methyl group, an ethyl group, a propyl group or a butyl group, or a cycloalkyl such as a cyclohexyl group. Group, phenyl group, aryl group such as tolyl group and the like can be exemplified, and methyl group and phenyl group are particularly preferable. Moreover, as an alkenyl group containing organic group shown by X, a C2-C10 alkenyl group containing organic group is preferable, for example, carbon double bond containing hydrocarbons, such as a vinyl group, an allyl group, a hexenyl group, and an octenyl group Group, acryloylpropyl group, acryloylmethyl group, methacryloylpropyl group, (meth) acryloylalkyl group such as methacryloylmethyl group, cyclohexenylmethyl group, cyclohexenylethyl group, cyclohexenylpropyl group and other cycloalkenylalkyl groups, vinyloxypropyl Groups and the like.

  The silicone raw rubber (a) may have oily or clay-like properties, and its viscosity is preferably 50 mPa · s or more at 25 ° C., particularly preferably 100 mPa · s or more.

  The silicone raw rubber (a) may be used alone or in combination of two or more.

  The crosslinking component (b) contained in the addition reaction curable adhesive composition is a component capable of crosslinking reaction with the silicone raw rubber (a). For example, at least 2 H atoms bonded to Si atoms are contained in one molecule. One or more, preferably three or more SiH bond-containing polyorganosiloxane (hereinafter sometimes referred to as organohydrogenpolysiloxane) can be used.

  As this polyorganosiloxane, it can be used by appropriately selecting from linear, branched, and cyclic polyorganosiloxanes. For example, polyorganosiloxane represented by the following formula (2) or (3) Organosiloxane can be mentioned as a suitable example.

^{_{HcR 1 (3-c) SiO-}} (HR 1 SiO) x - (R 1 2 SiO) y -SiR 1 (3-d) H d (2) formula

In the formulas (2) and (3), R ¹ is the same monovalent hydrocarbon group as described above, and may be the same or different. C and d are integers of 0 to 3, x, y and s are integers of 0 or more, r is an integer of 1 or more, c, d and x are not 0 at the same time, and x + y ≧ 0 It is. Further, r + s ≧ 3, preferably 8 ≧ r + s ≧ 3.

  Among these organohydrogenpolysiloxanes, organohydrogenpolysiloxane having oily properties and a viscosity of 1 to 5000 mPa · s at 25 ° C. is preferable.

  The crosslinking component (b) may be used alone or in combination of two or more.

  The blending ratio of the crosslinking component (b) can be selected as appropriate. When the silicone raw rubber (a) contains an alkenyl group and the crosslinking component (b) contains a SiH bond, the silicone raw rubber (a) The molar ratio of SiH bonds in the crosslinking component (b) to the alkenyl group is preferably 0.5 to 20, and particularly preferably 1 to 15. When this molar ratio is less than 0.5, the crosslinking density after curing described later is low, and it may be difficult to maintain the shape of the adhesive layer. On the other hand, if the molar ratio exceeds 20, the adhesive strength of the resulting adhesive layer may be reduced.

The pressure-sensitive adhesive component (c) contained in the addition reaction curable pressure-sensitive adhesive composition is a component that is blended in order to improve the pressure-sensitive adhesive force. For example, polyorganosiloxane can be used, and in particular, R ² ₃ Those containing SiO _1/2 units and SiO ₂ units (wherein R ² is a monovalent hydrocarbon group having no aliphatic unsaturated bond) can be suitably used. Here, as R ² , those having 1 to 10 carbon atoms are preferable, linear or branched alkyl groups such as methyl group, ethyl group, propyl group, and butyl group, cycloalkyl groups such as cyclohexyl group, phenyl group, and tolyl. An aryl group such as a group can be exemplified, and a methyl group and a phenyl group are particularly preferable.

  In general, the pressure-sensitive adhesive component (c) preferably has a structure that does not cause or hardly causes a crosslinking reaction together with the silicone raw rubber (a) and the crosslinking component (b) in order to ensure a higher degree of adhesion.

When polyorganosiloxane is used as the adhesive component (c), it is preferable that the molar ratio of R ² ₃ SiO _1/2 unit / SiO ₂ unit is 0.6 to 1.7. If the molar ratio is less than 0.6, the adhesive layer may become too sticky, or may not be compatible with the silicone raw rubber (a), and may not be separated and develop adhesiveness. On the other hand, if the molar ratio exceeds 1.7, the adhesive strength of the adhesive layer may be reduced.

  In addition, this polyorganosiloxane may contain OH group couple | bonded with Si atom, and it is preferable that OH group content shall be 0-4.0 mol% in that case.

  When a polyorganosiloxane containing an OH group bonded to an Si atom is used, when the polyorganosiloxane represented by the following formula (4) is contained as the silicone raw rubber (a), the silicone raw rubber (a) and the crosslinking component (b ) May partially form a condensation reaction product.

(OH) R ¹ YSiO— (R ¹ XSiO) _p — (R ¹ ₂ SiO) _q —SiR ¹ ₂ (OH) (4) Formula

However, in the formula (4), R ¹ is a monovalent hydrocarbon group having no aliphatic unsaturated bond, and may be the same or different, and Y contains R ¹ or an alkenyl group Organic group. X is an alkenyl-containing organic group. P is an integer of 1 or more, and q is an integer of 100 or more. The monovalent hydrocarbon group and alkenyl group-containing organic group are the same as described above.

  In order to form a condensation reaction product of the silicone raw rubber (a) and the adhesive component (c), a mixture of the silicone raw rubber (a) and the adhesive component (c) dissolved in a solvent such as toluene is used as an alkaline catalyst. In the presence, the reaction may be performed at room temperature to reflux.

  The adhesive component (c) can be used alone or in combination of two or more.

  The adhesive component (c) is preferably used in a range of 20/80 to 80/20 as a mass ratio of the silicone raw rubber (a) / adhesive component (c), particularly 30/70 to 70/30. Is preferred. If the pressure-sensitive adhesive component (c) is less than this range, the tackiness tends to be insufficient. On the other hand, if the pressure-sensitive adhesive component (c) is large, the pressure-sensitive adhesive layer becomes hard and elastic, and the pressure-sensitive adhesive layer is difficult to deform. It may be difficult to hold an object sticky.

  The catalyst (d) contained in the addition reaction curable pressure-sensitive adhesive composition is mainly a catalyst that promotes a crosslinking reaction between the silicone raw rubber (a) and the crosslinking component (b), and is usually a hydrosilation catalyst. As long as it is used as a metal compound. Examples thereof include platinum compounds. Platinum compounds include chloroplatinic acid, alcohol solution of chloroplatinic acid, reaction product of chloroplatinic acid and alcohol, reaction product of chloroplatinic acid and olefin compound, reaction product of chloroplatinic acid and vinyl group-containing siloxane, etc. Is mentioned.

  The blending ratio of the catalyst (d) is preferably 1 to 5,000 ppm as a platinum component, particularly preferably 5 to 2,000 ppm with respect to the total mass of the silicone raw rubber (a) and the crosslinking component (b). Is preferred. If the blending ratio is less than 1 ppm, the curability may be lowered and the crosslink density may be lowered to reduce the adhesive strength of the adhesive layer. On the other hand, if it exceeds 5,000 ppm, the usable time of the treatment bath may be shortened. .

  The silica-based filler (e) contained in the addition reaction curable pressure-sensitive adhesive composition is added together with the above components to reinforce the mechanical strength of the pressure-sensitive adhesive layer and, in particular, the components constituting the pressure-sensitive adhesive layer. It is a component that contributes to reliable adhesion retention of small electronic components and the like by dispersing the adhesion component (c) that imparts properties to the adhesion layer.

In particular, the silica-based filler (e) preferably has a specific surface area of 100 m ² / g or more and 400 m ² / g or less. When the specific surface area is 100 m ² / g or more, the mechanical strength such as the tensile strength of the elastic member can be improved and the component imparting tackiness is difficult to be detached, resulting in fine shavings and residue. It becomes difficult. A product having a specific surface area exceeding 400 m ² / g is not practical because it requires labor for production and is expensive. Here, the specific surface area is a specific surface area measured by the BET adsorption method.

  Examples of the silica-based filler (e) include silica, quartz powder, diatomaceous earth, and the like, preferably silica. The silica may be, for example, silica synthesized by a dry method such as fumed silica or calcined silica, or may be silica synthesized by a wet method such as precipitated silica or silica gel. Among these, fumed silica and precipitated silica are preferable because the specific surface area can be easily adjusted within the above range. If necessary, the silica-based filler (e) may have a surface treated with a surface treating agent such as organopolysiloxane, organopolysilazane, chlorosilane, or alkoxysilane.

  A silica type filler (e) may be used individually by 1 type, or may mix and use 2 or more types.

  The mixing ratio of the silica-based filler (e) is preferably 1 to 30 parts by mass, and 5 to 20 parts by mass with respect to a total of 100 parts by mass of the silicone raw rubber (a) and the adhesive component (c). Is particularly preferred. When the blending ratio of the silica-based filler (e) is less than 1 part by mass, the strength of the elastic member is lowered, and it becomes difficult to obtain a sufficient effect, and a residue is likely to occur during use. is there. On the other hand, when the blending ratio exceeds 30 parts by mass, the adhesive force of the elastic member may be reduced.

  In addition to the silicone raw rubber (a) to the silica filler (e), an optional component can be appropriately added to the addition reaction curable pressure-sensitive adhesive composition. For example, a reaction control agent for suppressing a crosslinking reaction when mixing the components can be added as an optional component. Examples of the reaction control agent include 3-methyl-1-butyn-3-ol, 3-methyl-1-pentyn-3-ol, 3,5-dimethyl-1-hexyn-3-ol, and 1-ethynyl. Cyclohexanol, 3-methyl-3-trimethylsiloxy-1-butyne, 3-methyl-3-trimethylsiloxy-1-pentyne, 3,5-dimethyl-3-trimethylsiloxy-1-hexyne, 1-ethynyl-1- Trimethylsiloxycyclohexane, bis (2,2-dimethyl-3-butynoxy) dimethylsilane, 1,3,5,7-tetramethyl-1,3,5,7-tetravinylcyclotetrasiloxane, 1,1,3 Examples include 3-tetramethyl-1,3-divinyldisiloxane. When adding this reaction control agent, it is preferable that the mixture ratio shall be 0-5.0 mass part with respect to 100 mass parts in total of a silicone raw rubber (a) and an adhesion component (c), and is especially 0. It is preferable to set it as 0.05-2.0 mass parts. When the blending ratio of the reaction control agent exceeds 5.0 parts by mass, it may be difficult to cure at the time of curing the adhesive composition.

  In addition to this reaction control agent, it is possible to add optional components as appropriate, for example, non-reactive polyorganosiloxanes such as polydimethylsiloxane and polydimethyldiphenylsiloxane, and the viscosity at the time of placement. As solvents for lowering, aromatic solvents such as toluene and xylene, aliphatic solvents such as hexane, octane and isoparaffin, ketone solvents such as methyl ethyl ketone and methyl isobutyl ketone, ester solvents such as ethyl acetate and isobutyl acetate, Ether solvents such as diisopropyl ether and 1,4-dioxane, or mixed solvents, dyes, pigments and the like thereof can be used.

  Such an addition reaction curable pressure-sensitive adhesive composition may be produced as appropriate, or a commercially available product may be used. Examples of commercially available products include “X-40 series” such as trade names “KE1214” and “X-40-3098” manufactured by Shin-Etsu Chemical Co., Ltd., which are compositions not containing the silica filler (e). "X-34 series" compositions such as "X-34-632A / B" are available.

Next, the peroxide curable adhesive composition will be described. The silicone raw rubber silicone raw rubber (a) contained in the peroxide curable adhesive composition contains a (R ₂ SiO _2/2 ) unit (R represents a hydrocarbon group), and has a substituent. It may be a long-chain polymer of polysiloxane, which may have, for example, polydimethylsiloxane, a substituted product thereof, and the like. The properties, viscosity, and the like of the silicone raw rubber (a) are basically the same as those of the silicone raw rubber (a) contained in the addition reaction curable adhesive composition. A silicone raw rubber (a) may be used individually by 1 type, and may mix and use 2 or more types.

  The pressure-sensitive adhesive component (c) and the silica-based filler (e) contained in the peroxide-curable pressure-sensitive adhesive composition are the pressure-sensitive adhesive component (c) contained in the addition reaction-curable pressure-sensitive adhesive composition, respectively. And basically the same as the silica-based filler (e).

  The organic peroxide (f) contained in the peroxide curable adhesive composition mainly crosslinks the silicone raw rubbers (a) or the silicone raw rubber (a) and the adhesive component (c). Examples of the curing agent include diacyl peroxides such as benzoyl peroxide and dialkyl peroxides such as di-t-butyl peroxide. As the organic peroxide (f), diacyl peroxides are preferable, and benzoyl peroxide is particularly preferable.

  The blending ratio of the organic peroxide (f) is preferably 0.2 to 5.0 parts by mass, particularly 0.5 to 5.0 parts by mass with respect to the total mass of the silicone raw rubber (a) and the adhesive component (c). The amount is preferably 2.5 parts by mass. If the blending ratio is less than 0.2 parts by mass, the curability is lowered and the crosslink density is lowered, and the adhesive strength of the adhesive layer may be reduced. On the other hand, if it exceeds 5.0 parts by mass, the adhesive composition In some cases, the rubber elastic member formed by the method has a disadvantage that the hardness of the rubber elastic member is increased and the adhesive force is reduced.

  In addition to the silicone raw rubber (a), the pressure-sensitive adhesive component (c), the silica-based filler (e) and the organic peroxide (f), the peroxide-curing pressure-sensitive adhesive composition may optionally be arbitrarily selected. It is possible to add ingredients. As an arbitrary component, the component illustrated with the said addition reaction hardening type adhesive composition is mentioned.

  Such a peroxide curable pressure-sensitive adhesive composition may be produced as appropriate, or a commercially available product may be used. As a commercial item, the brand name "KR-101-10", "KR-120", "KR-130" by Shin-Etsu Chemical Co., Ltd. which is a composition which does not contain the said organic peroxide (f), for example. And “KR-140” are available.

  Further, the fluorinated rubber forming the strong adhesion part in the rubber elastic member is, for example, a vinylidene fluoride / hexafluoropropylene copolymer, a filler such as carbon, a crosslinking aid such as trial isocyanate, and a curing of peroxide. Fluorine-based rubber composition containing an agent and the like. As a fluorine-type rubber composition, brand name "DC-2050", "DC-2260", etc. can be obtained from Daikin Industries, Ltd., for example.

  The weak adhesive part or non-adhesive part in the rubber elastic member is obtained by converting all or part of the strong adhesive part into weak adhesive or non-adhesive, or by a weak adhesive composition or a non-adhesive composition, It is formed. As a weak adhesive composition or a non-adhesive composition, the composition containing a weak adhesive or non-adhesive silicone resin, a fluororesin, a urethane resin, etc. are mentioned, for example.

  When the rubber elastic member is a rubber elastic member consisting of a strong adhesive part or a rubber elastic member consisting of a weak adhesive part, the adhesive composition or the weak adhesive part adhesive composition is cured according to a conventional method, A rubber elastic member can be formed.

  On the other hand, when the rubber elastic member is a rubber elastic member having a strong adhesive part and a weak adhesive part or a non-adhesive part, the strong adhesive part and the weak adhesive part or the non-adhesive part are formed of different compositions. After forming with the same adhesive composition, the process shown to (1)-(4) mentioned later etc. may be given and formed, for example. When the strong adhesive part and the weak adhesive part or the non-adhesive part are formed of different compositions, the strong adhesive part is formed of a cured product of the adhesive composition, and the weak adhesive part or the non-adhesive part is weakly adhesive. It is formed with the hardened | cured material of an adhesive composition or a non-adhesive composition. When the strong adhesive part and the weak adhesive part or the non-adhesive part are integrally formed, for example, (1) a masking member is placed on the surface of a cured product obtained by curing the adhesive composition according to a conventional method, A process of controlling the amount of irradiation from the masking member to irradiate ultraviolet rays onto the part forming the adhesive part or non-adhesive part, (2) weakly adhesive composition or non-adhesive on the part forming the weak adhesive part or non-adhesive part (3) Treatment for roughening the surface of the portion forming the weakly-adhesive portion or the non-adhesive portion, (4) Sheet-like form using a weak-adhesive material or a non-adhesive material according to a conventional method The process etc. which are shape | molded and apply | coat an adhesive composition to the part which forms a strong adhesion part are performed.

  Since the rubber elastic member holds the object to be adhered in a pressure-sensitive manner, the surface thereof is usually smooth. However, depending on the object to be adhesively held, the surface thereof may be uneven.

  The thickness of the rubber elastic member is determined according to the object to be adhered to the surface, the use of the holding jig, and the like. For example, the thickness of the rubber elastic member is set to about 1.8 mm.

  This rubber elastic member is attached to the base body to serve as a holding jig. Various shapes are selected for the substrate depending on the object to be adhered. For example, when the holding jig adheres and holds small parts, which will be described later, as a base, for example, a polygon such as a square, a rectangle, a pentagon, a hexagon, a circle, an ellipse, an indeterminate shape, or a combination thereof On the other hand, when the holding jig adheres and holds a thin plate or the like to be described later, a base portion having at least one convex body on the upper surface, for example, is used. And a base having a peripheral wall portion that surrounds the outer periphery of the convex body and a vent hole, that is, the peripheral wall portion, and at least one convex body formed in the internal space surrounded by the peripheral wall portion, A base having an air hole communicating with the gap between the peripheral wall and the convex body is advantageously used.

  Examples of the material for forming the base include metals such as carbon steel, stainless steel, copper, magnesium, aluminum alloy, and nickel alloy, resins, ceramics, and the like. Among these, from the viewpoints of workability, operability, and heat resistance, metals or resins are preferable, and stainless steel and aluminum alloys are particularly preferable.

  The holding jig in which the rubber elastic member is mounted on at least one surface of the base body is configured to hold the object to be adhered to the rubber elastic member so that the object to be adhered can be adhesively held. Here, it is advantageous that the adherend to be adhered and held by the rubber elastic member is a thin plate, an electronic component that is easily damaged or damaged, a small one that is difficult to handle, and the like. Examples of the thin plate-like material include a silicon wafer, a flexible printed circuit board, a glass plate for a large screen display device, and the electronic components include, for example, a chip capacitor, a ceramic capacitor, a coil filter, a resistance element, a conductive circuit, Examples include capacitors, LSIs, inductors, and the like.

  In the cleaning method according to the present invention, the rubber elastic member 31 may be cleaned. However, as described in the example of the cleaning apparatus capable of carrying out the cleaning method according to the present invention, The rubber elastic member may be washed together with the holding jig.

  In the cleaning method according to the present invention, the rubber elastic member may be dried after the rubber elastic member is cleaned with water or a mixed solution of water and alcohol. For drying the rubber elastic member, a normal drying method such as a heat drying method, an air drying method, a vacuum drying method, or the like can be arbitrarily selected.

  In an example of a cleaning apparatus that can carry out the cleaning method according to the present invention, as shown in FIGS. 1 and 2, three spray nozzles 20 are arranged in parallel at predetermined intervals on the beam 23 of the spray nozzle arrangement gate 21. However, in the rubber elastic member cleaning apparatus according to the present invention, only one injection nozzle may be arranged on the beam of the injection nozzle arrangement gate, or two or four or more nozzles are arranged. May be. Also, in the rubber elastic member cleaning apparatus according to the present invention, the injection nozzle is an injection nozzle that is provided in a beam of the injection nozzle arrangement gate and has a slit-like opening across the width direction of the rubber elastic member, and the rubber elastic member The spray nozzle may spray the cleaning liquid uniformly in the width direction.

  In one example of the cleaning device, as shown in FIGS. 1 and 2, one injection nozzle arrangement gate 21 is arranged so as to surround the conveying means 11, but the rubber elastic member according to the present invention is arranged. In the cleaning apparatus, two or more spray nozzle arrangement gates surround the transport unit 11 with a predetermined interval in the transport direction of the transport unit 11 (the direction of the arrow A in FIGS. 1 and 2). That is, you may arrange | position in series along a conveyance direction.

  Further, in an example of the cleaning apparatus, as shown in FIGS. 1 and 2, the injection nozzle arrangement gate 21 is installed so as to surround the transport unit 11, and the transport direction of the transport unit 11 (in FIGS. 1 and 2). In the rubber elastic member cleaning apparatus according to the present invention, the injection nozzle arrangement gate is arranged on one side or both sides along the conveying means. The cleaning liquid may be ejected from a direction perpendicular to the transport direction of the transport means.

  Further, in an example of the cleaning device, as shown in FIGS. 1 and 2, the injection nozzle 20 is arranged in the injection nozzle arrangement gate 21, and the rubber elastic member 31 is conveyed by the conveying means 11, so that the rubber elastic member 31 is. In the rubber elastic member cleaning apparatus according to the present invention, the injection nozzle arrangement gate in which the injection nozzle is arranged is arranged along the fixed base at a predetermined speed. 1 and 2 may be configured to be movable in the direction opposite to the arrow A, and the rubber elastic member may be fixed to an immovable fixing base so that the injection nozzle moves relative to the rubber elastic member.

  Further, in one example of the cleaning device, as shown in FIGS. 1 and 2, the fixing base 10 is fixed to the surface of the conveying means 11, but in the cleaning device for the rubber elastic member according to the present invention, the fixing table 10 is fixed. The platform may be built in the conveying means, and may be, for example, an adhesive part or a magnetic fixing part provided integrally with a part of the conveying means.

  Further, in an example of the cleaning device, as shown in FIGS. 1 and 2, a dryer for drying the rubber elastic member downstream of the injection nozzle arrangement gate 21, for example, a heat dryer, an air dryer, a vacuum dryer, and the like. A machine or the like may be installed.

  Furthermore, in the example of the cleaning device, as shown in FIGS. 1 and 2, the rubber elastic member 31 is cleaned together with the holding jig 30, but in the rubber elastic member cleaning device according to the present invention, May be configured such that the rubber elastic member is removed from the holding jig and only the rubber elastic member is cleaned. In this case, when the back surface of the rubber elastic member has adhesiveness, the conveying means and the fixing base do not need to be specially configured to fix the rubber elastic member.

  On one surface of stainless steel cut out to 110 mm × 110 mm × 0.9 mm, 99% by mass of silicone rubber (trade name “KE1214”, manufactured by Shin-Etsu Chemical Co., Ltd.) and silica-based filler (e) (Tatsumori Co., Ltd.) (Product name “Crystallite”) 1 mass% addition reaction curable adhesive silicone rubber composition was laminated and press molded with a mold or the like. In this manner, a holding jig having a base and a sheet-like rubber elastic member having a thickness of 100 mm × 100 mm × 1.8 mm mounted on the surface of the base was produced.

  After 0.5 g of alumina powder was sprinkled almost uniformly on the surface of the rubber elastic member of the holding jig, the entire surface of the rubber elastic member was covered with a polyethylene terephthalate film, and a load was applied from above the film to make the alumina powder rubber elastic. The member was firmly adhered and held.

  Using this holding jig, under each condition shown in Table 1, a water / alcohol mixed solution (water / alcohol mixing ratio (mass ratio: 50:50)) is applied at predetermined intervals in the width direction of the rubber elastic member. Removal of alumina powder on the surface of the elastic rubber member after the injection from three or four injection nozzles (referred to as “the number of nozzles” in Table 1) arranged in parallel on the surface of the elastic rubber member The condition was evaluated. The nozzle was selected according to the injection angle. Specifically, when the injection angle is 15 °, the product name “B1 / 8 MEG-1505”, and when the injection angle is 25 °, the product name “B1 / 8 MEG-2505” In the case of 40 °, a trade name “B1 / 8 MEG-4005” (both manufactured by Spraying Systems Japan Co., Ltd.) was used.

  At this time, an impact sensor attached to the back surface of the holding jig near the end of the substrate where the rubber elastic member is not laminated (for example, both “PS-C” and “PS-D” are manufactured by Kyowa Denki Co., Ltd.) Was used to measure the impact load received by the substrate, and this measured value was taken as the impact load received by the rubber elastic member.

  The evaluation was carried out by observing 10 points of an arbitrary region (10 mm × 10 mm) on the surface of the rubber elastic member at a magnification of 10 times with a microscope, and alumina powder remained on the surface of the rubber elastic member in any region. The case where there was no alumina powder was set to “0”, and the same observation was made with a microscope. When a small amount (specifically, 5 or less) of alumina powder remained in any region of the rubber elastic member, “1” was set. When the alumina powder remains slightly (specifically, 6 to 10) in any region of the rubber elastic member, “2” is set, and any region of the rubber elastic member is visually checked. In this case, the number of alumina powders remaining in excess of 10 to 100 was regarded as “3”, and the case where the alumina powder remained in excess of 100 in any region of the rubber elastic member was visually evaluated as “3”. 4 " The purification was the case where alumina powder is hardly removed to "5".

Moreover, when the adhesive force of the rubber elastic member in Examples 1, 2 and 3 was measured by the method for measuring the adhesive force, all had an adhesive force of about 2.8 g / mm ² . The rubber elastic member formed by the composition containing the silicone rubber and the silica filler (e) usually has an adhesive strength of about 2.9 g / mm ^2, so that the alumina powder is attached. The rubber elastic member made was able to be recovered to its original adhesive force immediately after production by washing.

FIG. 1 is a schematic front view showing the front of an example of a cleaning apparatus capable of carrying out the cleaning method according to the present invention. FIG. 2 is a schematic top view showing the top surface of an example of a cleaning apparatus capable of carrying out the cleaning method according to the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 10 Fixing base 11 Conveyance means 20 Injection nozzle 21 Injection nozzle arrangement gate 22 Support | pillar 23 Beam 24 Transfer means 30 Holding jig 31 Rubber elastic member 32 Base

Claims (8)

A method for cleaning a rubber elastic member that is attached to a holding jig for sticking and holding an adherend, and has an adhesive property capable of sticking and holding the adherend on at least a part of its surface ,
A method for cleaning a rubber elastic member, characterized by spraying a cleaning liquid onto the surface with an impact load of 0.010 to 0.06 MPa on the surface . 2. The rubber elastic member according to claim 1, wherein the cleaning liquid is injected at an injection pressure of 0.7 to 7 MPa from an injection distance of 90 mm or less at an angle of 15 to 70 ° with respect to the surface . Cleaning method. The method for cleaning a rubber elastic member according to claim 1, wherein the cleaning liquid is sprayed so as to pass through the surface at a passing speed of 2 to 25 mm / sec.   The method for cleaning a rubber elastic member according to claim 1, wherein the cleaning liquid is sprayed at an spray angle of 5 to 50 °.   The method for cleaning a rubber elastic member according to any one of claims 1 to 4, wherein the rubber elastic member is formed by curing an adhesive silicone rubber composition. The method for cleaning a rubber elastic member according to claim 1 , wherein the adhesive has an adhesive force of ^{2 to} 50 g / mm ² . A cleaning device for a rubber elastic member, which is attached to a holding jig for sticking and holding an adherend, and has adhesiveness capable of sticking and holding the adherend on at least a part of a surface thereof ,
A fixing base for fixing the rubber elastic member;
The cleaning liquid impact load 0.010~0.06MPa to the surface of the rubber elastic member fixed to the fixed base and a jet nozzle for jetting to said surface,
The spray nozzle has a spray pressure of 0.7 to 7 MPa, and a plurality of the spray nozzles are arranged in parallel so as to have a spray distance of 90 mm or less at an angle of 15 to 70 ° with respect to the surface. Cleaning device for elastic rubber member. The apparatus for cleaning a rubber elastic member according to claim 7, wherein the adhesive has an adhesive force of ^{2 to} 50 g / mm ² .

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