JP4645551B2 - Vibrating piece, vibrator, oscillator and mobile phone device - Google Patents

Description

The present invention relates to a vibrating piece made of, for example, crystal, a vibrator having the vibrating piece, a transmitter including the vibrator, and a mobile phone device.

Conventionally, for example, a tuning-fork type crystal vibrating piece, which is a vibrating piece, is configured as shown in FIG.

That is, the tuning fork type crystal vibrating piece 10 has a base portion 11 and two arm portions 12 and 13 formed so as to protrude from the base portion 11. And these two arms 12 and 13
Are provided with a groove 12a and a groove 13a.

The grooves 12a and 13a are also provided on the back surfaces of the arm portions 12 and 13 that are not shown in FIG.

For this reason, as shown in FIG. 12 which is AA 'sectional drawing of FIG. 11, the arm parts 12 and 13 are formed in the substantially H shape in cross-sectional shape.

Such a substantially H-shaped tuning-fork type crystal vibrating piece 10 has a low vibration loss of the arm portions 12 and 13 and a CI value (crystal impedance or equivalent series resistance) even if the size of the vibrating piece is significantly reduced compared to the conventional size. It has the characteristic that it can be kept low.

For this reason, the substantially H-shaped tuning-fork type crystal vibrating piece 10 is suitable for a vibrator that is required to have high-precision performance even if it is particularly small. As such a vibrator, for example, the resonance frequency is 32.76.
There are 8 kH small-sized vibrators and the like, and the use of the substantially H-shaped tuning-fork type crystal vibrating piece 10 as a vibrating piece of such a vibrator has been studied. And this resonance frequency is 32.768k.
The small vibrator of H or the like is finally used by being incorporated in a precision instrument such as a watch.

By the way, the substantially H-shaped tuning-fork type quartz vibrating piece 10 as described above is configured such that the arms 12 and 13 vibrate when a current is applied from the outside. Specifically, a groove electrode is formed in the grooves 12a and 13a shown in FIGS. 11 and 12, and the arm portion 1 in which these grooves 12a and 13a are not provided.
Side electrodes are formed on both side surfaces 12b and 13b, which are surfaces 2 and 13, respectively. When a current is applied, an electric field is generated between the groove electrode and the side electrode, and the arm portions 12 and 13 vibrate.

By the way, the groove electrode and the side electrode are applied with an electric current from the outside as described above. Specifically, the base electrode provided on the base 11 of the tuning fork type crystal vibrating piece 10 from the outside. The current is supplied to the groove electrode and the side surface electrode via.

For this reason, the connection electrode which connects a base electrode, a groove electrode, and a side electrode is needed. Of these connection electrodes, the groove electrode connection electrode for connecting the base electrode and the groove electrode is disposed on the base surface 11c in FIG. In addition, the side electrode connection electrode that connects the base electrode and the side electrode is disposed on the base surface 11c and the arm surface 12c, for example.

However, since the groove 12a and the groove electrode are formed on the arm surface 12c, the side electrode connection electrode disposed on the arm surface 12c is a portion where the groove 12a is not formed (FIG. 1).
Therefore, the side electrode connection electrodes are disposed in this region.

However, as described above, the substantially H-shaped tuning-fork type crystal vibrating piece 10 has a resonance frequency of 32.
Since it is mounted on a 768 kH small vibrator or the like, it is particularly required to reduce the size, and accordingly, the width of the arms 12 and 13 in the horizontal direction in FIG.
In the figure of a, the width in the horizontal direction is reduced to, for example, about 0.07 mm.

Therefore, the width W in the figure of the region (shaded portion in FIG. 11) on the arm surface 12c where the side electrode connection electrode for connecting the base electrode and the side electrode is arranged is, for example, .0.
It is limited to about 015 mm.

By the way, the width of the side electrode connection electrode to be arranged on the arm surface 12c needs to be about 0.01 mm at the smallest. Theoretically, the distance between the side electrode connection electrode and the groove electrode or the groove electrode connection electrode is only 0.01 mm, and considering the error in the actual manufacturing process, the side electrode connection electrode and the groove electrode or groove There is a high possibility of contact with the electrode connection electrode and other short-circuits, resulting in a defect of the resonator element.

In addition, when manufacturing the electrodes so as to prevent contact between the electrodes, there is a problem that the manufacturing cost is remarkably increased.

Therefore, in view of the above points, the present invention provides a resonator element, a vibrator, an oscillator, and a mobile phone device that can prevent a defect from occurring in an electrode with a simple configuration without increasing the manufacturing cost. The purpose is to provide.

To achieve the above object, the vibrating piece of the present invention includes a base which base electrode portion are formed, at least one vibration thin rods are formed projecting from the base, surface and back surface of the vibration thin rods A groove portion having a groove electrode portion formed on at least one of the vibration thin rod and the vibration thin rod formed on a side surface of the vibration thin rod on which the groove portion is not formed.
A side surface electrode portion are, the formed on one surface and a back surface of at least said vibrating wand, the connection electrode section connected to the base electrode portion, a vibrating piece having a short side direction of the groove Has a first width and a second width narrower than the first width, the second width being closer to the base than the first width, In the region having the second width of the vibration thin rod , a connection electrode arrangement portion is formed between the groove and the side surface, and the connection electrode arrangement portion is formed on the side surface of the vibration thin rod. The side electrode part is connected to the connection electrode part.

Further, in the resonator element according to the aspect of the invention, the first width in the short direction of the groove is about 0.07 mm, and the second width in the short direction of the groove is about 0.06 mm. , and the wherein the surface and at least the one lateral direction of the width of the rear surface of the vibration thin rods which the groove is formed is formed to be about 0.1 mm.

The vibration piece of the present invention, further, the groove is formed in the surface and the rear surface of the vibration thin rod, forming a cross section substantially H-shaped portion where the groove of the vibration thin rods are formed It is characterized by Tei Rukoto.

The vibrating piece according to the present invention is further characterized in that the vibrating piece is formed of a tuning fork type quartz vibrating piece.

Further, the resonator element according to the invention is characterized in that a portion of the groove portion having the second width is close to the base portion .

Transducer of the present invention includes a base which base electrode portion are formed, wherein at least one of the vibration thin rods are formed to protrude from the base, the formed on at least one surface and the rear surface of the vibration thin rods a groove having a groove electrode portions are, the vibrating said and side electrode portions formed on the side surface of the vibration thin rods that are not grooves formed in the thin rod, at least on the one surface and the rear surface of the vibration thin rods A connecting electrode portion formed and connected to the base electrode portion, wherein the vibrating piece is a vibrator housed in a package, the width of the groove in the short direction Has a first width and a second width that is narrower than the first width, the second width being closer to the base than the first width, and in regions where there is the second bar width, between the side surface and the groove Connecting the electrode arrangement portion is formed in the connection electrode positioning portion, the side surface electrode portion formed on a side surface of the vibration thin rods, characterized in that it is connected to the connection electrode section.

In the vibrator according to the aspect of the invention, the first width in the short direction of the groove of the vibrating piece may be about 0.07 mm, and the second width of the groove may be about 0.06 mm. , wherein the surface and at least the one lateral direction of the width of the rear surface of the vibration thin rods which the groove is formed is formed to be about 0.1 mm.

Transducer of the present invention, further, wherein the groove of the vibrator element is formed on the surface and the back surface of the vibration thin rods, the cross section is substantially H-shaped portion where the groove portion of the vibration thin rods are formed characterized Tei Rukoto formed on.

The vibrator according to the present invention is further characterized in that the vibrating piece is formed of a tuning-fork type quartz vibrating piece.

The vibrator according to the present invention is further characterized in that a portion of the groove portion having the second width is close to the base portion .

The vibrator according to the present invention is further characterized in that the package is formed in a box shape.

The vibrator according to the present invention is further characterized in that the package is formed in a cylinder type.

Oscillator of the present invention is formed a base base electrode portion are formed, at least one vibration thin rods are formed to protrude from the base portion, at least one of the front and back surfaces of the vibration thin rods a groove having a groove electrode portion, forming the a side surface electrode portion to which the groove of the vibration thin rods is formed on the side surface of the vibration thin rods that are not formed, on at least the surface and the back surface of the vibration thin rods And a connection electrode portion connected to the base electrode portion, and the vibration piece and the integrated circuit are an oscillator housed in a package, and are arranged in a short direction of the groove. The width includes a first width and a second width that is narrower than the first width, and the second width is closer to the base than the first width, and the vibration In the region having the second width of the thin rod, the groove and the Connecting the electrode arrangement portion between the surface are formed, in the connection electrode positioning portion, and wherein the side surface electrode portion formed on a side surface of the vibration thin rods is connected to the connecting electrode portions To do.

The cellular telephone apparatus of the invention, a base base electrode portion are formed, at least one vibration thin rods are formed to protrude from said base, said formed on at least one surface and the rear surface of the vibration thin rods a groove having a groove electrode portions are, the a side surface electrode portion to which the groove of the vibration thin rods is formed on the side surface of the vibration thin rods that are not formed, at least the one of the front and back surfaces of the vibration thin rods are formed, the connection electrode section connected to the base electrode portion, a vibrating piece having a a vibrator which the vibrating reed is accommodated in a package, connecting the transducer to the control unit The width of the groove in the short-side direction has a first width and a second width that is narrower than the first width, and the second width is , Located closer to the base than the first width, and In regions where there is the second width of the thin rod, the connection electrode positioning portion is formed between the side surface and the grooves, in the connection electrode positioning portion, said side being formed on a side surface of the vibration thin rods The electrode part is connected to the connection electrode part.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic perspective view showing a substantially H-shaped tuning-fork type crystal vibrating piece 100 which is not provided with an electrode according to the first embodiment of the present invention.

The substantially H-shaped tuning fork type crystal resonator 100 is formed by cutting a single crystal of quartz and processing it into a tuning fork type, for example. At this time, it is cut out from a single crystal of crystal so that the X axis shown in FIG. 1 is an electric axis, the Y axis is a mechanical axis, and the Z axis is an optical axis.

Thus, by arranging the electric shaft in the X-axis direction in FIG. 1, a substantially H-shaped tuning-fork type crystal vibrating piece 100 suitable for all electronic equipment such as a mobile phone device that requires high accuracy is obtained.

Further, when cutting from a single crystal of quartz, in the orthogonal coordinate system composed of the X-axis, Y-axis, and Z-axis described above, the XY plane composed of the X-axis and the Y-axis is about 1 degree counterclockwise around the X axis. A substantially H-shaped tuning-fork type crystal vibrating piece 100 is formed as a so-called quartz Z-plate tilted by 5 to 5 degrees.

The substantially H-shaped tuning-fork type crystal vibrating piece 100 includes a base portion 130 and arm portions 120 and 130 which are, for example, two vibrating thin rods formed so as to protrude from the base portion 140 in the Y-axis direction in the drawing.
And have.

Further, as shown in FIG. 1, groove portions 120a and 130a are formed on the surfaces 120c and 130c of the two arm portions 120 and 130, respectively. In addition, this groove has two arms 12.
It is similarly formed on the back surfaces of 0 and 130 (not shown).

Therefore, as shown in FIG. 4, the arm portions 120 and 130 are provided with the groove portions 120 a and the like in the vertical direction in the drawing, so that the cross-sectional shape thereof is formed in an approximately H shape. Since this cross-sectional shape is substantially H-shaped, it is referred to as a substantially H-shaped tuning-fork type crystal vibrating piece 100.

The substantially H-shaped tuning fork type quartz vibrating piece 100 is provided with electrodes as shown in FIG. That is, as shown in FIG. 2, a base electrode 140d is formed on the base 140, and the arm 120,
Groove electrodes 120d and 130d are formed in the groove portions 120a and 130a, respectively.

Further, both side surfaces 120b, 120b, 130b, and 130 of the arm portions 120 and 130, respectively.
Side electrodes 120e and 130e are formed on b.

Further, as shown in FIG. 2, the side electrode 120e on one side of the arm portion 120 (the arm portion 1 in the figure).
20) and a side electrode connection electrode 141 for connecting the substrate electrode 140 d. Specifically, the side electrode connection electrode 141 includes a base surface 140c and an arm 1.
20 is provided on the front surface 120c, and its end is connected to the one side electrode 120e.

Further, as shown in FIG. 2, two groove electrode connection electrodes 142 for connecting the groove electrodes 120d, 130d and the substrate electrode 140d are formed in the drawing. Specifically, it is disposed on the base surface 140c, and its end is connected to the groove electrodes 120d and 130d.

Such a base electrode 140d, side electrode connection electrode 141, groove electrode connection electrode 142,
FIG. 3 shows a detailed configuration of the side electrode 130e and the groove electrode 130d.

As shown in a circled portion of FIG. 3, one arm portion 1 of a substantially H-shaped tuning fork type crystal vibrating piece 100.
The shape of the 20 groove portions 120 a is different from the shape of the groove portion 130 a of the other arm portion 130.

That is, the width of the portion of the groove 120a adjacent to the base 140 is formed to be narrower than the portion of the other groove 120a, and the side electrode connection electrode 141 connected to the side electrode 120e inside the arm 120 is formed in this portion. Is formed.

By the way, the substantially H-type tuning fork type crystal resonator 100 has a resonance frequency of 32.768 kH, for example.
Nevertheless, it is significantly smaller than the conventional 32.768 kH tuning fork type crystal resonator.

That is, as shown in FIG. 4, the length in the Y-axis direction of the substantially H-shaped tuning fork crystal resonator 00 is about 2.2 mm, for example. The width in the X-axis direction is about 0.56 mm.

This dimension is 3.6 mm (Y-axis direction), which is a general dimension of a conventional tuning-fork type crystal vibrating piece
, 0.69 mm (X-axis direction).

Further, the length of the arm portion 120 shown in FIG. 4 in the Y-axis direction is, for example, about 1.6 mm, and the width of each arm portion 120, 130 in the X-axis direction is, for example, about 0.1 mm. .

The size of the arm portion 120 is significantly smaller than the conventional general arm portion dimensions of 2.4 mm (Y-axis direction) and 0.23 mm (X-axis direction).

As described above, the arm portions 120 and 130 which are remarkably smaller than the conventional tuning-fork type crystal vibrating piece.
As described above, the groove portions 120a and 130a are formed in the groove portions 120a and 13a.
0a is, for example, about 1 in the Y-axis direction on the surfaces 120c and 130c of the arm portions 120 and 130.
. The length is about 3 mm. As shown in FIG. 4, the width of the groove 130a in the X-axis direction is, for example, about 0.07 mm, and the depth in the Z-axis direction is, for example, about 0.02 to 0.045 mm.

FIG. 5 shows the dimension of the circled portion in FIG. 3 of the substantially H-shaped tuning-fork type crystal vibrating piece 100 formed in the above dimensions.

That is, the width of a portion (C portion in the drawing) adjacent to the base portion 140 of the groove portion 120a is formed to be about 0.06 mm, for example, and the width of the other groove portion 120a is about 0.07 m.
It is formed narrower by 0.01 mm than m.

The groove electrode 120d provided in the groove 120a is also arranged with the same dimensions.

On the other hand, the side electrode connection electrode 141 is disposed with respect to the side electrode 120e formed on the inner side surface 120b of the arm portion 120. Specifically, the left end portion of the surface 120c of the arm portion 120 in the figure, which is a region where the groove portion 120a is not provided in the surface 120c of the arm portion 120 and is a position where no short circuit such as contact with the groove portion 120a occurs. Placed in.

The side electrode connection electrode 141 arranged in this way is arranged with a width of about 0.01 mm at the left end of the surface 120c of the arm 120, and is connected to the side electrode connection electrode 141 formed on the base surface 140c. ing.

Incidentally, as shown in FIG. 5, the groove electrode connection electrode 142 is also connected to the groove electrode 120d, and is arranged at a certain distance from the side electrode connection electrode 141, so that the base electrode 140d shown in FIG. Connected with.

In addition, another groove electrode connection electrode 142 is connected to the groove electrode 130 d formed in the groove portion 130 a of the arm portion 130. As shown in FIG. 2, the other groove electrode connection electrode 142 joins the side electrode connection electrode 141 and is connected to the base electrode 140d.

The arrangement of the electrodes shown in FIGS. 2 and 5 shows only the surface side of the substantially H-shaped tuning-fork type quartz vibrating piece 100, but the same electrodes are arranged symmetrically on the back side as well. .

As described above, the width of the portion C of the groove portion 120a of the arm portion 120 is about 0.07.
In the figure, between the left end portion and the groove portion 120a in the figure, the surface 120c of the arm portion 120 extends from about 0.015 mm to about 0.025 mm. Become. Therefore, this widened portion (the portion indicated by D in the figure) becomes a connection electrode placement portion for placing the side electrode connection electrode 142 for connection to the side electrode 120e on the side surface 120d on the inner side of the arm portion 120. .

That is, when the portion of the connection electrode arrangement portion D is not provided, the surface 12 of the arm portion 120.
The distance between the side electrode connection electrode 141 formed at 0c and the groove electrode 120d and the groove electrode connection electrode 142 connected to the groove electrode 120d is only about 0.015 mm, and there is a manufacturing error. In addition, contact or other short-circuiting may occur between the side electrode connection electrode 141 and the groove electrode 120d, which may cause a defect of the substantially H-shaped tuning-fork type crystal vibrating piece 100.

However, in the substantially H-shaped tuning-fork type crystal vibrating piece 100 according to the present embodiment, the connection electrode arrangement portion indicated by D in FIG. 5 described above is formed. There is no contact or other short circuit between the connection electrode 141 and the groove electrode 120d, and the cause of the failure of the substantially H-shaped tuning-fork type crystal vibrating piece 100 can be eliminated.

The connection electrode arrangement portion can be formed only by narrowing the width of the groove portion 120a of the arm portion 120. Therefore, there is no need to provide a special configuration on the substantially H-shaped tuning fork type crystal vibrating piece 100. No increase in manufacturing costs.

By the way, the electrodes such as the groove electrode 120d and the side electrode 120e arranged in this way are specifically composed of a plurality of layers, for example, two layers, Cr as an underlayer and an upper layer from Au. In this case, Ni or Ti may be used instead of Cr.

Moreover, it may consist of one layer, and in this case, for example, an Al layer is used. In addition to this, an electrode whose surface is anodized with an Al electrode or a single layer of a Cr electrode and an electrode on which SiO ₂ or the like is formed as a protective film on the Cr layer can be used.

Furthermore, the thickness of the electrode is, for example, 100 が for the lower layer Cr and 1000 が for the upper layer Au.

Next, FIG. 6 shows a cross section of the arm portion 120 of the substantially H-shaped tuning fork type crystal resonator 100 as described above. As shown in FIG. 6, the arm 120 is provided with a groove 120a in the vertical direction in the figure, so that its cross-sectional shape is substantially H-shaped. The two groove portions 120a are respectively provided with groove electrodes 120d. Further, side electrodes 120e are also provided on both side surfaces 120b of the arm portion 120, respectively.

The substantially H-shaped tuning-fork type crystal vibrating piece 100 according to the present embodiment is configured as described above, and the operation thereof will be described below.

First, a current is supplied from a power source (not shown) outside the substantially H-shaped tuning fork type crystal vibrating piece 100 to the base 140.
To the base electrode 140d. Then, this current is supplied to the side electrode 120e and the groove electrode 120d through the side electrode connection electrode 141 and the groove electrode connection electrode 142, respectively.

At this time, since the connection electrode arrangement portion indicated by D in FIG. 5 is formed between the side electrode connection electrode 141 and the groove electrode 120d and the like, even if there is a manufacturing error, the side surface There is no contact or other short circuit between the electrode connection electrode 142 and the groove electrode 120d.

When the current is applied to the groove electrode 120d and the side electrode 120e in this way, an electric field is generated between the groove electrode 120d and the side electrode 120e shown in FIG. 6, and the electric field is deeply distributed inside the crystal, which is a piezoelectric body. Will do.

Due to the distribution of the electric field, the arm portions 120 and 130 which are piezoelectric bodies vibrate, and the tuning fork type vibrating piece 1
00 will vibrate.

The resonance frequency at this time is, for example, 32.768 kH. As described above, the substantially H-shaped tuning-fork type crystal vibrating piece 100 according to the present embodiment has a cross-sectional shape of the arm portions 120 and 130 of approximately H. Since it is formed in a mold, the performance is improved in spite of being significantly smaller than the conventional 32.768 kHz tuning fork type crystal resonator.

(Second Embodiment)
FIG. 7 shows a ceramic package tuning fork type vibrator 2 which is a vibrator according to the second embodiment.
FIG.

This ceramic package tuning fork type resonator 200 uses the substantially H-shaped tuning fork type crystal vibrating piece 100 of the first embodiment described above. Therefore, the substantially H-shaped tuning-fork type quartz vibrating piece 100
About the structure of this, an effect | action, etc., the same code | symbol is attached | subjected and the description is abbreviate | omitted.

FIG. 7 is a schematic cross-sectional view showing the configuration of the ceramic package tuning fork resonator 200. As shown in FIG. 7, the ceramic package tuning fork type vibrator 200 has a box-shaped package 210 having a space inside thereof. The package 210 has a base portion 211 at the bottom thereof. The base portion 211 is formed of ceramics such as alumina, for example.

A sealing portion 212 is provided on the base portion 211, and the sealing portion 212 is formed from the same material as the lid 213. A lid 213 is placed on the sealing portion 212, and the base portion 211, the sealing portion 212, and the lid 213 form a hollow box.

A package-side electrode 214 is provided on the base portion 211 of the package 210 thus formed. On the package-side electrode 214, an end of a substantially H-shaped tuning-fork type crystal vibrating piece 100 on which an electrode 140 is formed via a conductive adhesive or the like is fixed.

The substantially H-shaped tuning-fork type crystal vibrating piece 100 vibrates when a constant current is applied from the package-side electrode 214. At this time, as shown in FIG. 5, the substantially H-shaped tuning-fork type crystal vibrating piece 100 has a connection electrode arrangement portion indicated by D in FIG. 5 between the side electrode connection electrode 141 and the groove electrode 120d. Therefore, even if there is a manufacturing error, no contact or other short circuit occurs between the side electrode connection electrode 142 and the groove electrode 120d. Therefore, the ceramic package tuning fork type resonator 200 can sufficiently exhibit the performance of the substantially H-shaped tuning fork type crystal vibrating piece 100. Further, the ceramic package tuning fork resonator 200 can be manufactured without increasing the manufacturing cost.

(Third embodiment)
FIG. 8 is a diagram showing a digital mobile phone 300 which is a mobile phone device according to the third embodiment.

This digital cellular phone 300 uses the ceramic package tuning fork resonator 200 and the substantially H-shaped tuning fork crystal vibrating piece 100 of the third embodiment described above. Therefore, the configurations, operations, and the like of the ceramic package tuning fork vibrator 200 and the substantially H-shaped tuning fork crystal vibrating piece 100 are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 8 is a schematic diagram showing a circuit block of the digital mobile phone 300. As shown in FIG. 8, when the digital mobile phone 300 transmits, when the user inputs his / her voice to the microphone, the signal passes through the pulse width modulation / coding block and the modulator / demodulator block. It is transmitted from the antenna via the transmitter and antenna switch.

On the other hand, a signal transmitted from another person's telephone is received by an antenna, and is input to a modulator / demodulator block from a receiver through an antenna switch, a reception filter, and the like. The modulated or demodulated signal is output as a voice to a speaker through a pulse width modulation / coding block.

Among these, a controller is provided to control the antenna switch, the modulator / demodulator block, and the like.

In addition to the above, this controller also controls the LCD, which is a display unit, keys that are input units such as numbers, and also RAMs, ROMs, etc. The above ceramic package tuning fork vibrator 2 with high accuracy so that
00 will be used.

That is, the substantially H-shaped tuning fork type crystal vibrating piece 100 accommodated in the ceramic package tuning fork vibrator 200 includes, as shown in FIG. 5, between the side electrode connection electrode 141 and the groove electrode 120d, etc. Since the connection electrode arrangement portion indicated by D in FIG. 5 is formed, even if there is a manufacturing error, contact or other short circuit occurs between the side electrode connection electrode 142 and the groove electrode 120d. There is no. Therefore, the digital mobile phone 300 having the ceramic package tuning fork type resonator 200 that can sufficiently exhibit the performance of the substantially H-type tuning fork type crystal vibrating piece 100 is obtained. Further, the digital mobile phone 300 can be manufactured without increasing the manufacturing cost.

(Fourth embodiment)
FIG. 9 is a diagram showing a tuning fork crystal oscillator 400 which is an oscillator according to the fourth embodiment.

The digital tuning fork crystal oscillator 400 has the same configuration in many parts as the ceramic package tuning fork resonator 200 of the third embodiment. Therefore, the configurations, operations, and the like of the ceramic package tuning fork vibrator 200 and the substantially H-shaped tuning fork crystal vibrating piece 100 are denoted by the same reference numerals, and the description thereof is omitted.

The tuning fork crystal oscillator 400 shown in FIG. 9 is the same as the ceramic package tuning fork vibrator 2 shown in FIG.
An integrated circuit 410 is arranged below the base portion 211 below the approximately H-shaped tuning-fork type crystal vibrating piece 100 of 00 as shown in FIG.

That is, in the tuning fork crystal oscillator 400, when the substantially H-shaped tuning fork crystal vibrating piece 100 disposed inside vibrates, the vibration is input to the integrated circuit 410, and then a predetermined frequency signal is extracted. Will function as an oscillator.

That is, the substantially H-shaped tuning fork type crystal vibrating piece 100 housed in the tuning fork crystal oscillator 400 has a gap between the side electrode connection electrode 141 and the groove electrode 120d as shown in FIG.
Since the connection electrode arrangement portion indicated by D is formed in FIG. 5, even if there is a manufacturing error, no contact or other short circuit occurs between the side electrode connection electrode 142 and the groove electrode 120d. . Therefore, the tuning fork crystal oscillator 400 can sufficiently exhibit the performance of the substantially H-shaped tuning fork type crystal vibrating piece 100. Further, the tuning fork type crystal oscillator 400 can be obtained without increasing the manufacturing cost.
Can be manufactured.

(Fifth embodiment)
FIG. 10 is a diagram showing a cylinder-type tuning fork vibrator 500 which is a vibrator according to the fifth embodiment.

This cylinder type tuning fork vibrator 500 uses the substantially H-shaped tuning fork type crystal vibrating piece 100 of the first embodiment described above. Accordingly, the configuration, operation, and the like of the substantially H-shaped tuning fork type crystal vibrating piece 100 are denoted by the same reference numerals and the description thereof is omitted.

  FIG. 10 is a schematic diagram showing the configuration of a cylinder type tuning fork vibrator 500.

As shown in FIG. 10, the cylinder type tuning fork vibrator 500 has a metal cap 530 for accommodating the substantially H-shaped tuning fork type crystal vibrating piece 100 therein. The cap 530 is press-fitted into the stem 520 so that the inside thereof is maintained in a vacuum state.

In addition, two leads 510 for holding the substantially H-shaped tuning-fork type crystal vibrating piece 100 housed in the cap 530 are disposed.

When an electric current is applied to the cylinder type tuning fork vibrator 500 from the outside, the arm portion 120 of the substantially H-shaped tuning fork type crystal vibrating piece 100 vibrates and functions as a vibrator.

At this time, as shown in FIG. 5, the substantially H-shaped tuning-fork type crystal vibrating piece 100 has a connection electrode arrangement portion indicated by D in FIG. 5 between the side electrode connection electrode 141 and the groove electrode 120d. Therefore, even if there is a manufacturing error, the side electrode connection electrode 142 and the groove electrode 120d are formed.
There will be no contact or other short circuit between them. Therefore, the cylinder-type tuning fork vibrator 500 can sufficiently exhibit the performance of the substantially H-shaped tuning fork type crystal vibrating piece 100. Further, the cylinder type tuning fork vibrator 500 can be manufactured without increasing the manufacturing cost.

Further, in each of the above-described embodiments, the 32.738 kHz tuning fork type crystal resonator has been described as an example. However, it is apparent that the tuning fork type quartz resonator of 15 kHz to 155 kHz can be applied.

The substantially H-shaped tuning fork type crystal vibrating piece 100 according to the above-described embodiment is not limited to the above example, but other electronic devices, portable information terminals, televisions, video devices, so-called radio cassettes,
It is obvious that it can also be used for a clock built-in device such as a personal computer and a clock.

Furthermore, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the claims. And the structure of the said embodiment can abbreviate | omit a part, or can be changed into the other arbitrary combinations which are not mentioned above.

According to the present invention, it is possible to provide a resonator element, a vibrator, an oscillator, and a mobile phone device that can prevent the electrode from being defective with a simple configuration without increasing the manufacturing cost.

1 is a schematic perspective view showing a substantially H-shaped tuning-fork type crystal vibrating piece before electrode formation according to a first embodiment of the present invention. FIG. 2 is a schematic perspective view showing a state where electrodes are formed on the substantially H-shaped tuning fork type crystal vibrating piece of FIG. 1. It is the schematic perspective view which showed the detail of arrangement | positioning of the electrode of FIG. It is the schematic which shows the dimension of the substantially H type tuning fork type crystal vibrating piece shown in FIG. It is a schematic enlarged view which shows the part enclosed with the circle of FIG. It is a schematic sectional drawing of the arm part of the substantially H type tuning fork type crystal vibrating piece of FIG. It is a schematic sectional drawing which shows the structure of a ceramic package tuning fork type vibrator. It is the schematic which shows the circuit block of a digital mobile telephone. It is a schematic sectional drawing which shows the structure of a tuning fork crystal oscillator. It is the schematic which shows the structure of a cylinder type tuning fork vibrator. It is the schematic which shows the structure of the conventional tuning fork type crystal vibrating piece. It is AA 'sectional drawing of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Quartz-shaped tuning-fork type crystal vibrating piece, 120, 130 ... Arm part, 120a, 130a ... Groove part, 120b, 130b ... Side surface, 120c, 130c ... Surface, 120d, 130d ... Groove electrode, 120e, 130e ... Side electrode , 140 ... base, 140 c ... base surface, 140 d ... base electrode, 141 ... side electrode connection electrode, 142 ... groove electrode connection electrode, C ... part close to the base of the groove part, D ... connection electrode placement part, 200: Ceramic package tuning fork vibrator, 21
DESCRIPTION OF SYMBOLS 0 ... Package, 211 ... Base part, 212 ... Sealing part, 213 ... Cover body, 214 ... Package side electrode, 300 ... Digital mobile phone, 400 ... Tuning fork crystal oscillator, 410 ... Integrated circuit, 5
00 ... Cylinder type tuning fork vibrator, 510 ... Lead, 520 ... Stem, 530 ... Cap.

Claims (14)

A base on which a base electrode is formed;
At least one vibrating bar formed to protrude from the base;
A groove having a surface and a groove electrode portion formed on at least one of the rear surface of the vibration thin rods,
A side electrode portion formed on a side surface of the vibration thin rod in which the groove portion of the vibration thin rod is not formed;
The vibration at least said front and back surfaces of the rods are formed on one, a vibrating piece having a connection electrode section connected to the base electrode portion,
The width in the short direction of the groove has a first width and a second width narrower than the first width,
The second width is closer to the base than the first width;
In the region having the second width of the vibration thin rod , a connection electrode arrangement portion is formed between the groove and the side surface,
In the connection electrode arrangement part, the side electrode part formed on the side surface of the vibration thin rod is connected to the connection electrode part. The first width in the transverse direction of the groove is about 0.07 mm, the second width of the lateral direction of the groove is about 0.06 mm, the said groove is formed vibrating element according to claim 1, characterized in that said surface and at least the one lateral direction of the width of the rear surface of the vibration thin rods are formed to be about 0.1 mm. Claim 1, wherein the groove is the formed on the surface and the rear surface of the vibration thin rods, the cross-section of a portion the grooves of the vibrating thin rods is formed, characterized in Tei Rukoto is formed in a substantially H-shaped Alternatively, the resonator element according to claim 2.   The vibrating piece according to any one of claims 1 to 3, wherein the vibrating piece is formed of a tuning-fork type quartz vibrating piece.   5. The resonator element according to claim 1, wherein a portion having the second width of the groove portion is close to the base portion. A base on which a base electrode is formed;
At least one vibrating bar formed to protrude from the base;
A groove having a surface and a groove electrode portion formed on at least one of the rear surface of the vibration thin rods,
A side electrode portion formed on a side surface of the vibration thin rod in which the groove portion of the vibration thin rod is not formed;
The vibration at least said front and back surfaces of the rods are formed on one, a vibrating piece having a connection electrode section connected to the base electrode portion,
The vibrator element is a vibrator housed in a package,
The width in the short direction of the groove has a first width and a second width narrower than the first width,
The second width is closer to the base than the first width;
In the region having the second width of the vibration thin rod , a connection electrode arrangement portion is formed between the groove and the side surface,
In the connection electrode arrangement portion, the vibrator is characterized in that the side electrode portion formed on the side surface of the vibration thin rod is connected to the connection electrode portion. Wherein the first width in the transverse direction of the groove of the vibrating piece is about 0.07 mm, the second width of the groove is about 0.06 mm, wherein the groove is formed vibrator according to claim 6, characterized in that said surface and at least the one lateral direction of the width of the rear surface of the vibration thin rods are formed to be about 0.1 mm. The groove of the resonator element is formed on the surface and the back surface of the vibration thin rods, the cross-section of a portion the grooves of the vibrating thin rods are formed is formed in a substantially H-shaped and wherein Tei Rukoto The vibrator according to claim 6 or 7.   The vibrator according to claim 6, wherein the vibrating piece is formed of a tuning-fork type quartz vibrating piece.   10. The resonator element according to claim 6, wherein a portion of the groove portion having the second width is close to the base portion.   The vibrator according to any one of claims 6 to 10, wherein the package is formed in a box shape.   The vibrator according to any one of claims 6 to 10, wherein the package is formed in a cylinder type. A base on which a base electrode is formed;
At least one vibrating bar formed to protrude from the base;
A groove having a surface and a groove electrode portion formed on at least one of the rear surface of the vibration thin rods,
A side electrode portion formed on a side surface of the vibration thin rod in which the groove portion of the vibration thin rod is not formed;
The vibration at least said front and back surfaces of the rods are formed on one, a vibrating piece having a connection electrode section connected to the base electrode portion,
The resonator element and the integrated circuit are an oscillator housed in a package,
The width in the short direction of the groove has a first width and a second width narrower than the first width,
The second width is closer to the base than the first width;
In the region having the second width of the vibration thin rod , a connection electrode arrangement portion is formed between the groove and the side surface,
In the connection electrode arrangement portion, the side electrode portion formed on the side surface of the vibration thin rod is connected to the connection electrode portion. A base on which a base electrode is formed;
At least one vibrating bar formed to protrude from the base;
A groove having a surface and a groove electrode portion formed on at least one of the rear surface of the vibration thin rods,
A side electrode portion formed on a side surface of the vibration thin rod in which the groove portion of the vibration thin rod is not formed;
The vibration at least said front and back surfaces of the rods are formed on one, a vibrating piece having a connection electrode section connected to the base electrode portion,
The vibrator is a vibrator housed in a package,
A mobile telephone device is used to connect the transducer to the control unit,
The width in the short direction of the groove has a first width and a second width narrower than the first width,
The second width is closer to the base than the first width;
In the region having the second width of the vibration thin rod , a connection electrode arrangement portion is formed between the groove and the side surface,
In the connection electrode arrangement portion, the side electrode portion formed on a side surface of the vibrating thin rod is connected to the connection electrode portion.

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