JP4638787B2 - Article lamination processing method and apparatus - Google Patents

Description

  The present invention relates to an article processing method and apparatus. More specifically, the present invention relates to a laminating method and apparatus usefully used for pressurizing and heating an article, and more specifically, for example, a polarizing plate and a glass substrate constituting a liquid crystal display device, Relates to a method and an apparatus for laminating articles which function extremely effectively when a member such as an alignment film or a color filter is assembled and subjected to pressure defoaming. The present invention relates to a pressure-sensitive defoaming treatment means for pressure defoaming treatment while supplying and laminating a desired article, for example, a work piece in a state where a polarizing plate is attached to a glass substrate, in a single-wafer type. And a method and apparatus for laminating articles that can be used particularly effectively.

  Up to now, for example, a pressure defoaming apparatus used when pressure defoaming processing is performed on a work piece in a state where a polarizing plate is attached to a glass substrate, the work piece is transferred from one end to the apparatus. After being introduced and treated inside, it had a hollow tunnel shape that was sent out from the other end. Further, both ends of the apparatus are sealed with sealed doors, and the sealed doors are opened and closed only when a workpiece is taken in and out of the apparatus. As is well known, generally, such pressure defoaming treatment is performed, for example, at a high temperature and pressure hermetically maintained at a constant temperature of about 0.5 MPa (5 kg / cm 2) and a temperature of about 50 ° C. This is performed by retaining the workpiece in the container for 15 to 30 minutes. Such a known in-line pressure degassing apparatus is generally called a tunnel type apparatus. Similarly, there is also known a hollow pressure treatment container having a sealing door only on one side and covering the other side with a sealing wall so that a workpiece can be taken in and out only from the sealing door on the one side. Yes.

  In a known tunnel-type pressure defoaming apparatus, in order to improve work efficiency in the apparatus, a workpiece formed by attaching a polarizing plate to a glass substrate is usually preliminarily provided outside the apparatus. For example, about 20 to 50 sheets are stacked in a cassette form with a predetermined gap, supplied into the tunnel apparatus from the inlet of the apparatus in units of cassettes, and stayed in the tunnel for a predetermined time. After pressure depressurization treatment at 5 MPa, it was taken out as a treated product from the outlet of the apparatus.

  However, in such a work mode, every time the inlet and outlet of the apparatus are opened in order to move the workpiece into and out of the apparatus, the temperature and pressure in the apparatus are released into the atmosphere, and the temperature and pressure in the apparatus are released. Can easily drop to room temperature (room temperature) and atmospheric pressure (normal pressure). For this reason, when it is going to perform a pressure defoaming process to a to-be-processed object within an apparatus, you have to raise the temperature and pressure in an apparatus from normal temperature and a normal pressure to desired temperature and pressure again. And when the pressure defoaming processing of the workpieces loaded in the cassette shape is completed, the outlet door of the device is opened to take them out from the device, and the inlet door is opened to introduce the next cassette into the device, Again, the processing temperature and processing pressure in the apparatus rapidly drop to normal temperature and pressure. Therefore, every time the pressure defoaming process is performed, the temperature and pressure in the apparatus must be increased from the normal temperature and normal pressure state to a desired value, for example, 50 ° C. and 0.5 MPa, and pressure loss and thermal energy loss. There was a problem that there were very many. Recently, since a large amount of workpieces are pressurized and defoamed at once, the volume of the tunnel device is further increased so that the number of work pieces loaded in a cassette shape can be increased and supplied at once. Some are. In such a device, the weight of the cassette itself is excessive, the workability required for moving the cassette is deteriorated, and the opening time of the door is prolonged, so that the energy loss from inside the device is further increased. For this reason, there is a problem that the time for raising the temperature and pressure in the tunnel device whose volume is increased to a predetermined value becomes longer, and as a result, the time required for the pressure defoaming process becomes longer as a whole. Furthermore, in order to shorten the opening time of the door, a method of feeding the workpieces loaded in a cassette shape in a batch system has been tried, but the current amount of energy loss has hardly changed. It is.

  In order to solve such problems, the present applicant has previously disclosed a novel article pressure treatment apparatus. This apparatus is located in the middle part of the apparatus and has an article pressurization processing chamber having a sealed structure, a first chamber installed on the inlet side of the processing chamber, and an outlet side of the processing chamber. A second chamber, an introduction means for introducing the workpiece into the first chamber, and an unloading means for unloading the workpiece that has undergone a predetermined process from the second chamber. The first chamber and the second chamber are sealed and cut off from the processing chamber by the first sealing door and the second sealing door, respectively, so that they can be connected to the inlet end of the first chamber close to the introducing means and the unloading means. The exit end of the adjacent second chamber is sealed off from the atmosphere by the introduction door and the carry-out door, respectively, and the processing chamber and the first chamber, and further, the processing chamber and the second chamber are mutually connected by a conduit. Each of these conduits is provided with a pressure regulating valve. As a result, this article pressurization processing apparatus introduces the workpiece into the processing chamber, and even if the first chamber or the second chamber is opened and closed when the workpiece is unloaded from the processing chamber, the atmosphere such as the temperature and pressure inside the processing chamber Can be prevented from leaking to the outside, energy loss can be significantly prevented, and processing time can be significantly saved.

JP 2004-358377 A

  However, in this article pressure treatment apparatus, since the article to be treated is moved in a state where it is mounted on the tray, it is necessary to return the tray to the initial position after unloading the treated article from the apparatus. In the pressurized defoaming chamber, it is necessary to move the article to be processed mounted on the tray in the vertical direction and sequentially move from the first chamber to the second chamber. Therefore, a tray return mechanism and a mechanism for moving the tray in the vertical direction and the traveling direction are necessary, and there is a problem that the price of the entire apparatus becomes somewhat expensive.

  Furthermore, in this article pressurizing apparatus, for example, when trying to process a glass substrate having a length of 1000 mm or more, there is a problem that the central portion of the glass plate is bent and appropriate processing cannot be performed. In addition, since the time during which an article is supplied, that is, the tact time, is fast compared to the processing capability of pressurizing and defoaming a desired article, it is necessary to slow down the supply time of the article. There was a problem of getting worse.

  In the present invention, in order to solve the above-mentioned problem, a method of pressure-heating and defoaming treatment in a state where a plurality of workpieces are stacked on each other, the introduction of the workpiece 12 from upstream is introduced. The workpiece 12 is stacked on the stacking portion 16 every tact time, and the workpiece 12 stacked on the stacking portion 16 and the new workpiece 12 introduced from the upstream are alternately received and a predetermined number of workpieces are processed. Laminating the object on the pre-pressurized and heated part 18, and sequentially transferring the workpieces laminated on the pre-pressurized and heated part 18 to the laminating means 52 of the part 20 where pressure heating and defoaming processing is performed. The workpiece laminated on the laminating means of the place 20 where the pressure heating defoaming process is performed is transferred to another laminating means within the same place, and then the part 20 where the pressure heating defoaming process is performed. Transfer and stack the workpiece to the decompression unit 22, decompression unit Then, the workpieces are sequentially sent out to the downstream apparatus, and when the workpieces stacked on the stacking unit 16 are transferred to the place where the pre-pressurization heating is performed, the stacking operation to the stacking unit 16 is performed. In order to embody the article lamination processing method for carrying out a desired treatment by laminating articles by repeating the steps of sequentially transferring the workpiece to the lamination means of the decompression unit via the adjacent lamination means As an apparatus of the above, an apparatus that performs pressure heating and defoaming processing in a state in which a plurality of workpieces are stacked on each other, and receives the workpiece 12 from the introduction section 14 every tact time and stacks the stacking sections 16. And the workpiece 12 stacked on the stacking section 16 and the workpiece 12 from the introduction section 14 are alternately received, the pre-pressurizing and heating section 18 for laminating them, and the workpiece supplied from the pre-pressurizing and heating section 18. Apply pressure to workpiece The pressure heating and defoaming unit 20 for performing the defoaming process, the decompression unit 22 for laminating the processed workpieces, and the unloading unit 24 for unloading the processed workpieces from the decompression unit 22 are laminated. The part 16 and the pre-pressurizing and heating part 18 are partitioned by a wall 19, and the pre-pressurizing and heating part 18, the pressurizing and heating defoaming part 20, and the pressurizing and heating defoaming part and the decompression part 22 are partitioned by a wall 21. The decompression section 22 and the carry-out section 24 are partitioned by a wall 23, and these walls 19, 21, 23 are provided with passage sections 63, 65, 65 closed by doors 62, 64, 66, 68. A pressure-heating defoaming apparatus in which 67 and 69 are formed is provided. Further, according to the present invention, each of the stacking means 32, 50, 52, 54, 56, and 58 advances a plurality of stacker means arranged at intervals in the advancing direction of the work piece and the work piece. Each of these stacker means has an opening extending in a direction perpendicular to the direction of travel of the workpiece, and an upper edge of the roller means. Provides a device in which the linear level LL formed by is positioned slightly above the workpiece receiving surface formed by the opening. Furthermore, in the pressure heating defoaming treatment apparatus of the present invention, the laminating means 32 of the laminating section 16 operates corresponding to one tact time, and the laminating means 50 of the section 18 for pre-pressurizing and heating the same. The laminating means 52, 54, 56 in the part 20 for performing the pressure heating defoaming process and the laminating means 58 in the decompression part 22 operate corresponding to 0.5 tact time. Thereby, the above-mentioned subject is solved completely.

In this apparatus, two panel processes are performed in the first chamber, the second chamber, and the third chamber during one tact time in which one panel is introduced from the introduction unit 14 into the apparatus. As a result, there is no panel congestion. Further, the price of the entire apparatus can be reduced by eliminating the tray return mechanism and the mechanism for moving the tray up and down and in the traveling direction. Furthermore, the present invention improves the pressure defoaming capacity by improving the article lamination method, thus guaranteeing the processing capacity adapted to the article supply time. Moreover, in the present invention, any long panel can be maintained in a flat state with high accuracy during the processing operation, so that the processing of large panels to be provided in the future will be performed in the future. It can be achieved very easily. Further, since the vertical position of the panel is switched every time the panel is transferred to the stacking means and stacked, the panel processing having a uniform quality is possible without being affected by the influence or conditions of the second chamber, that is, the processing chamber. In the present invention, the panel is transferred from the stacking means 32 to the stacking means 50 in the first chamber 18, or when the panel is transferred from the stacking means 56 in the second chamber 20 to the stacking means 58 in the third chamber 22. In addition, since any one of the doors 62 and 64 and the doors 66 and 68 is always closed, the atmosphere of the second chamber 20 that performs the pressure heating and defoaming process does not leak to the outside, and there is no waste of pressure and temperature. It is.

  The present invention will be described below. The present invention can be effectively used in various article lamination pressure heat treatment apparatuses. Here, a specific example applied to a pressure defoaming apparatus (autoclave apparatus) for polarizing plates will be described as an example. In FIG. 1, reference numeral 10 denotes an article lamination processing apparatus usefully used as an apparatus for performing defoaming treatment by heating with pressure while laminating polarizing plates. The entire apparatus 10 is preferably disposed in a clean room (not shown), and generally, a known forming apparatus (formerly known for forming a workpiece with a polarizing plate attached to a glass substrate, for example) (Not shown), an introduction part 14 for introducing a workpiece, that is, a panel 12, into the apparatus 10 by a single wafer method, a lamination part 16 for temporarily laminating and holding a predetermined number of workpieces 12, and a lamination A pre-pressurizing and heating unit 18 comprising a first chamber for simultaneously receiving the workpiece 12 stacked on the unit 16 and the workpiece 12 introduced from the introduction unit 14 in a stacked state and subjecting them to preliminary pressurizing and heating treatment. And a pressure heating defoaming section 20 comprising a second chamber for defoaming while substantially heating under pressure while reworking the workpiece 12 preliminarily treated in the prepressurization heating section 18. And downstream position of the pressure heating defoaming section 20 There is a decompression section 22 consisting of a third chamber for returning to normal pressure while laminating the processed workpiece 12 that has been degassed, and the processed workpiece 12 is transferred from the apparatus 10 to the next process. And an unloading section 24 for unloading by the method.

  The introduction unit 14 has introduction means 30 for introducing a workpiece, that is, a panel 12 formed by a known forming apparatus (not shown) into the apparatus 10. The introduction means 30 is composed of, for example, four roller means that are separated from each other in the traveling direction of the workpiece 12 and can stop the workpiece at a predetermined position. In order to ensure that the workpiece is moved in a flat state when the dimension in the direction of movement is large, a larger number of roller means can be arranged away from the direction of movement of the workpiece 12. . Further, each of these roller means is constituted by four thin rollers spaced apart from each other in a direction orthogonal to the traveling direction of the workpiece (see, for example, FIG. 10). This is to reduce the frictional resistance when feeding the workpiece and to reduce damage to the workpiece as much as possible. However, the present invention is not limited to this, and when the width direction of the workpiece 12 is large, in order to ensure that the workpiece is moved in a flat state, more roller means are provided in the direction of movement of the workpiece. Can be separated from each other in a direction perpendicular to the. Furthermore, if necessary, it can be constituted by a long roller extending in the entire width direction of the workpiece 12. The introduction means 30 may be a belt conveyor other than a roller. The same applies to the roller means 34 described later, the roller means used in each of the stacking means 50, 52, 54, 56, and 58 and the unloading means 60 of the unloading unit 24.

  The stacking unit 16 has a function of temporarily stacking and holding a predetermined number of unprocessed workpieces 12 introduced from the introducing unit 14 through the introducing means 30 by a single wafer method. For this reason, the lamination part 16 has a lamination means 32 for laminating the workpiece 12 fed by the introduction means 30. The stacking means 32 receives the workpiece 12 fed by the introducing means 30 and has a roller means 34 having a function of stopping the workpiece 12 at a predetermined position, and the workpiece 12 stopped at the predetermined position sequentially in the longitudinal direction. And stacker means 36 for moving and stacking.

  The stacking means 32 will be described in more detail with reference to FIGS. Since the roller means 34 constituting the laminating means 32 has already been described, the stacker means 36 will be particularly described below. As shown in the drawing, the stacker means 36 hangs at a predetermined interval so as to be orthogonal to the top plate 38 and the traveling direction indicated by the arrow 31 (see FIG. 1) of the workpiece 12 from the top plate 38. And a plurality of vertical frame bodies 40. Each vertical frame 40 has the same size and shape, and the workpiece 12 enters the vertical frame while moving in the advancing direction and can be stacked by stopping at a predetermined position. A plurality (five in the illustrated example) of openings 42 are arranged at equal intervals in the vertical direction. As shown in FIG. 10, the width dimensions of these openings 42 are somewhat larger than the width dimension of the workpiece 12, and each opening 42 supports the lower surface of the workpiece in a floating manner. Provides functionality. In the example shown in FIG. 9, the vertical frame 40 has two end vertical frames that support the front end and the rear end of the workpiece, and one intermediate vertical frame that supports the intermediate portion of the workpiece. Although it is configured by three vertical frame bodies composed of a body, it is not limited to this, as described above. For example, when the length of the workpiece 12, that is, the length in the traveling direction exceeds 1000 mm, the number of intermediate vertical frames can be further increased to 2, 3, or 5, for example. I can do it. As a result, for example, the support interval of a large object having a length of 1000 mm can be set to about 330 mm, 250 mm, or 160 mm, respectively. It is possible to hold it. If the support interval in the length direction is desired to be 100 mm, the number of intermediate vertical frames may be nine. Further, as described above, each of these roller means for supporting the workpiece is constituted by four thin rollers separated from each other in a direction orthogonal to the traveling direction of the workpiece. (See, for example, FIG. 10) However, this number can be increased if the width of the workpiece increases. That is, for example, when the width dimension of the workpiece is 237 mm, when four thin rollers are used, the support interval of the width dimension is about 75 mm, and when five thin rollers are used, it is about 55 mm. It becomes. In addition, the stacker means 36 can also be made into an integral structure by integrally forming the top plate 38 and the vertical frame body 40 with a synthetic resin material or the like.

  Next, the pre-pressurizing and heating unit 18 will be described. The pre-pressurizing and heating unit 18 providing the first chamber includes the workpiece 12 fed from the stacking unit 16 and the workpiece 12 fed directly from the introduction means 30 of the introduction unit 14. It has the function of alternately receiving and laminating and preliminarily pressurizing and heating them. The first chamber 18 is preferably surrounded by a heat-resistant sealing wall 19 and can be operated as a preliminary heating chamber and a pressure chamber as necessary. For this purpose, a known heating means 46A is disposed inside the first chamber 18, and further a pressure adjusting means 48A for supplying a high-pressure fluid from the outside to adjust the pressure inside the chamber is connected. Inside the first chamber 18, the same laminating means 50 as described in detail with respect to the laminating means 32 of the laminating portion 16 is disposed. That is, the laminating means 50 includes roller means 50A and stacker means 50B. Here, since the laminating means 50 has substantially the same configuration as the laminating means 32 described above, detailed description of the laminating means 50 is omitted. However, the difference between the stacking means 50 in the first chamber 18 and the stacking means 32 in the stacking portion 16 is the vertical length of the vertical frame constituting the stacker means 50B of the stacking means 50. That is, the vertical length of the vertical frame disposed in the first chamber 18 is twice the vertical length of the vertical frame disposed in the stacked portion 16, and therefore, FIG. 9 and FIG. 10. In this example, if each of the vertical frames 40 of the stacked unit 16 has, for example, five openings 42a to 42e, the number of the vertical frames of the pre-pressurizing and heating unit 18 is ten times each. It has the opening part. Therefore, the pre-pressurizing and heating section, that is, the first chamber 18 is at least twice as long as the length and width in the traveling direction so that the workpiece 12 can be completely accommodated, and the number of workpieces stacked in the stacking section 16. And a height dimension that can accommodate the workpiece. For this reason, the first chamber 18 must be capable of providing a vertical movement dimension that is at least twice as large as the vertical dimension of the stacker means in the stacked portion 16.

  Next, the 2nd chamber 20 which provides the pressurization heating deaeration part is described. The second chamber 20 has a function of sequentially receiving and stacking and holding the workpieces 12 fed from the first chamber 18 and subjecting them to pressure heating and defoaming treatment. The pressure heating and defoaming chamber 20 is surrounded by a heat-resistant sealing wall 21 and is maintained at a predetermined pressure and temperature so that the inside of the pressure heating and defoaming chamber 20 can always properly perform the pressure heating and defoaming treatment. The defoaming process can be performed while heating and pressurizing the workpiece. For this reason, a known heating means 46B is disposed inside the second chamber 20, and a pressure adjusting means 48B for supplying a high-pressure fluid from the outside to adjust the pressure inside the chamber is connected. In the second chamber 20, a plurality of laminating means 52, 54, and 56 composed of roller means and stacker means, as described in detail with respect to the laminating portion 16, are disposed. Each of the laminating means 52, 54, 56 comprising the roller means and the stacker means has substantially the same configuration as the laminating means 50 of the pre-pressurizing and heating unit 18 described above. Therefore, detailed description of the stacking means 52, 54, and 56 is omitted here. In the illustrated example, the second chamber 20 includes three sets of heating means 46B, but it is obvious that the present invention is not limited to this. Obviously, a plurality of pressure adjusting means 48B can be provided. As will be apparent to those skilled in the art, when it is desired to increase the defoaming time, the stacking means can be further added to four or five, and if the desired defoaming time is satisfied, the stacking can be performed. It is possible to increase the stacking height by using one or two means. The addition of these laminating means can be easily achieved by forming the second chamber 20 long, and the height adjustment of the laminating means can be easily achieved by increasing the length of the vertical frame of the stacker means. This is just a design matter.

  Next, the third chamber 22 providing a decompression unit will be described. The third chamber 22 is a region where preparations are carried out to carry out the processed workpiece subjected to the pressure heating and defoaming treatment in the second chamber 20 from the pressure heating and defoaming portion 20 to the subsequent working area at normal temperature and pressure. It is. The third chamber 22 has a configuration substantially similar to that of the above-described laminated portion 16. That is, the third chamber 22 is surrounded by a heat-resistant sealing wall 23, and a known heating means 46C is disposed inside the third chamber 22 as necessary. The pressure adjusting means 48C for adjusting the pressure is arranged so that it can operate as a heating chamber and a pressure chamber. Inside the third chamber 22, the same laminating means 58 composed of roller means and stacker means is disposed as described with respect to the first chamber 18. The structure of the laminating means 58 comprising the roller means and the stacker means is substantially the same as that of the laminating means 50 described above. Therefore, detailed description of the stacking means 58 is omitted here. The decompression section, that is, the third chamber 22 needs to have a length direction, a width dimension, and a height dimension in the advancing direction so that the batch 12 of workpieces 12 subjected to defoaming treatment can be completely stacked and accommodated. is there.

  Next, the carry-out unit 24 will be described. The unloading unit 24 feeds the processed workpieces stacked and held in the decompression unit 22 to the known assembling apparatus that follows the processed workpieces one by one from the decompression unit 22 in a rearward manner. Carry out the work. The carry-out section 24 has a carry-out means 60 that is substantially the same as the introduction means 30 of the introduction section 14 described above.

  In the present invention, as is apparent in the figure, the introduction means 30 of the introduction section 14, the roller means 34 of the lamination section 16, the roller means or conveyance means of each lamination means 50 to 58, and the unloading means 60 of the unloading section 24. Are preferably arranged at the same common level. Further, the heat-resistant sealing walls 19, 21, and 23 constituting the first chamber 18, the second chamber 20, and the third chamber 22 can be independently configured, or integrally configured as illustrated. You can also do it. The heat-resistant sealing walls 19, 21, and 23 are provided with passage portions 63, 65, 67, and 69 (see FIGS. 3, 4, 7, and 8), respectively. 22, the stacked portion 16, and the carry-out portion 24 communicate with each other. In addition, doors 62, 64, 66, and 68 that can be freely opened and closed are provided in these passage portions. These doors are sealed doors that can be closed in a sealed state at all times. By opening the door 62, the workpiece 12 can be introduced into the pre-pressurizing and heating unit 18. By opening the workpiece 12, the workpiece 12 can be transferred from the pre-pressurizing and heating unit 18 to the pressurizing and heating defoaming unit 20, and by further opening the door 66, the defoamed workpiece 12 is defoamed. It is possible to transfer from the unit 20 to the decompression unit 22, and by opening the door 68, the processed workpiece 12 can be unloaded from the decompression unit 22 to the unloading unit 24 in the normal temperature and normal pressure region.

  Further, it is desirable that the roller means for transporting the workpiece 12 is subjected to a treatment on the surface so as not to damage the workpiece. Note that stopping the workpiece at a predetermined position can be easily achieved by using sensor means. In addition, a supporting projection having a hemispherical shape made of resin is fixedly disposed on the lower surface of each opening provided in each vertical frame body that provides the function of floatingly supporting the workpiece 12 from the lower surface. I can do it. This is because the workpiece can be point-supported by the support protrusion, and deformation of the workpiece and adhesion of scratches can be prevented.

  The operation of the present invention will be described below. In the following specific example, for example, a workpiece panel in which a polarizing plate is attached to a glass substrate, a panel having a length of about 422 mm and a width of about 237 mm (a panel corresponding to 19 inches), a length of 1042 mm and a width A panel having a size of about 585 mm (a panel corresponding to 47 inches) is maintained at a pressure of 0.5 MPa (5 kg / cm 2) at a temperature of about 50 ° C. to 80 ° C. for about 30 minutes, and the liquid crystal after ODF The premise is to perform the work to erase the bubbles inside. The tact time is 20 seconds for a panel corresponding to 19 inches and 35 seconds for a panel corresponding to 47 inches, and the direction of transport of the panel is the short side in the river width direction. However, these are examples, and the present invention is not limited to these. The workpiece 12 that is a panel created in the preceding step is periodically introduced into the introduction unit 14 via the introduction means 30 every 20 seconds or 35 seconds. Further, in the illustrated example, in order to simplify the drawing, the number of the openings 42 formed in the stacker unit 36 constituting the stacking unit 32 of the stacking unit 16 is five (42a) as shown in FIG. 42b, 42c, 42d, and 42e), and the number of openings of the stacker means 50, 52, 54, 56, and 58 disposed in the first chamber 18, the second chamber 20, and the third chamber 22 Although it is shown as ten, as will be described later in an actual apparatus, it is considered that the number of these openings is four to five times as many.

  In the initial operation, the panel, that is, the workpiece 12 introduced into the introduction portion 14 via the introduction means 30 is then preliminarily moved in advance by the roller means 34 of the stacking portion 16 as shown in FIGS. It is introduced into the uppermost opening 42a provided in the vertical frame 40 constituting the stacker means 36 of the stacking section 16 that has been waiting, and stops at a predetermined stop position. After that, before a predetermined tact time (for example, 20 seconds) for supplying the next panel, that is, the workpiece, elapses, the stacker means 36 of the stacked portion 16 is moved by the size of one opening within 10 seconds, for example. The stacker means 36 is made to stand by at a position where the second opening 42b from the top comes to the level position of the roller means 34. After 20 seconds from the first introduction time, the next panel is introduced from the introduction portion 14, and this panel is introduced by the roller means 34 into the second opening 42b from the top of the stacker means 36, and similarly, it is stopped and laminated there. . Subsequently, the stacker means 34 is sequentially moved upward by the size of one opening portion in the same manner, so that the opening of the vertical frame 40 constituting the stacker means 36 in the stacked portion 16 corresponds to the tact time. When there are five parts 42, all the openings 42a to 42e are filled with the workpiece panel (see FIG. 2). As apparent from FIGS. 9 and 10, a straight line connecting the upper surfaces of the rollers 34 when the panel 12 is introduced into the opening 42 of the vertical frame 40, that is, a level position where the panel 12 is transferred (see FIG. 9). 9 (shown by line LL in FIG. 9) is slightly above the lower edge position of each opening 42 provided in the vertical frame body 40, that is, the position where the panel is supported in a floating manner. As a result, when the workpiece or panel is transferred by the roller means in the advancing direction 31, the panel does not collide with the lower edge of the opening, it is transferred safely, and the stacker means is only the size of one opening. The panel can be safely lifted upward by the lower edge of the opening as it floats and supports the panel from below. The standby position where the stacker means waits to receive the panel into the opening is such that when the panel is supplied to the opening, the panel is received into the opening without colliding with the lower edge of the opening. The position slightly above the lower edge of the section corresponds to this level position.

  As shown in FIG. 2, as soon as the stacker means of the stacking section 16 is full, i.e. before the next panel is supplied, it has been closed so far and adjusted to the desired processing pressure and processing temperature. The door 62 (see FIG. 2) on the inlet side of the pre-pressurizing and heating unit 18 which is a possible first chamber is opened to form a passage portion 63 in the wall 19 between the laminated portion 16 and the first chamber 18 ( (See FIG. 3). However, also at this time, the door 64 of the second chamber 20 is closed, so that the high-temperature and high-pressure atmosphere of the second chamber 20 does not leak from the second chamber 20. The dimension of the channel | path part 63 should just be a dimension of the grade which one workpiece can pass reliably from the lamination | stacking part 16 to the pre-pressurization heating part 18 via there. Also in the passage portions 65, 67, and 69 described below, the dimensions of these passage portions are required to have such a size that the panel can surely pass through from the upstream to the downstream. is there. In the figure, when the passage portion is painted black, the passage portion is closed by a door, and when the passage portion is shown in white, the passage portion door is open.

  In this state, the panel 12 laminated to the lowermost opening 42e (FIG. 9) of the stacker means 36 of the lamination part 16 is transferred through the passage part 63, and as shown in FIGS. Transfer to the top opening of the stacker means 50B in the chamber 18 and rest at the appropriate position in the opening. Next, the stacker means 50B in the first chamber 18 is moved slightly upward to ensure that the panel is lifted and supported at the opening (FIGS. 13 and 14), and the stacker means 50B is raised slightly, The stacker means 50B is made to stand by at a position that is elevated by a distance corresponding to one opening from the position of the uppermost opening, that is, at a standby position where the second opening from the top can receive the panel. At this time, the panel laminated in the lowermost opening 42e (FIG. 9) of the stacker means of the laminated portion 16 has already been transferred to the first chamber 18 and is in a void state. In this state, a panel arrival from the introduction unit 14 is awaited. When the tact time is satisfied and the next panel is introduced from the introduction portion 14, the panel passes through the lowermost opening 42e of the stacker means 36 of the laminated portion 16 which is now in a void state, and further passes through the wall. 19 passes through the passage portion 63, and is accommodated in the second stage opening from the top of the stacker means 50B in the first chamber 18, and stops there (FIGS. 15 and 16).

  Next, before reaching the next tact time, the stacker means of the first chamber 18 is further raised one stage, and the third opening from the top is set in the standby state at the standby position. In this state, the stacker means 36 of the stacking section 16 is lowered one step downward, the second opening 42d from the bottom is placed against the passage section 63, the roller means 34 of the stacking section 16 is activated, and the stacker section 36 is The second panel is fed into the third opening from the top of the stacker means in the first chamber 18 and received there. Immediately after that, the stacker means in the first chamber is further raised and a tact time is awaited. Thereafter, the stacking means 50B of the first chamber 18 is alternately received by alternately receiving the panels stacked on the stacker means of the stacking section 16 and the panels directly introduced from the introducing section 14 by using the task time in the same procedure. The entire opening is filled with a panel (see FIG. 3). When the entire opening of the stacker means is filled with the panel, the door 62 of the passage portion 63 is closed. Thereafter, the heating means 46A and the pressure adjusting means 48A in the first chamber 18 are activated to raise the temperature and pressure in the first chamber 18 to about 50 ° C. and 0.5 MPa. At this time, the stacker means 36 of the laminated portion 16 has returned to the initial position, that is, the lowest position as shown in FIG.

  The heating means 46A can be functioned in advance. In that case, only the pressure adjusting means 48A is activated after the door 62 is closed. As a result, the temperature and pressure of the first chamber 18 become the same as the temperature and pressure of the second chamber 20, and the defoaming operation is started in the first chamber 18. Here, the heating means 46B and the pressure adjusting means 48B in the second chamber are activated in advance, and a normal high-temperature and high-pressure defoaming work environment, for example, 50 ° C. and 0.5 MPa pressure is maintained.

  In this state, the door 64 of the second chamber 20 is opened to form the passage portion 65 (FIG. 4). The opening of the door 64 that partitions the first chamber 18 and the second chamber 20 can be easily achieved because the pressures in both the chambers 18 and 20 are substantially the same. Here, in the same manner as described above, defoaming is performed from the lowermost opening of the laminating means 50 of the first chamber 18 to the uppermost opening of the laminating means 52 of the second chamber, that is, the pressure heating degassing part 20. A panel in the middle of processing is fed through the passage portion 65. In the same manner as described above, the stacking means 50 in the first chamber 18 is lowered step by step and the stacking means 52 in the second chamber 20 is raised step by step while the work piece (panel) is sequentially pre-pressurized and heated. Transfer from the first chamber 18 to the second chamber 20. In this transfer operation, it is necessary to transfer two panels within the task time (20 seconds) when the workpiece 12 is sent to the introduction unit 14, that is, one panel in 0.5 tact time. . This is because the panels introduced from the introduction unit 14 smoothly process those panels without causing a jam. This operation can be easily achieved by adjusting the rotational speed of the conveying means such as the roller means. During this time, the panel sent from the introduction unit 14 starts to be stacked and held in accordance with the task time in the same manner as described above with respect to the stacking means 32 of the stacking unit 16. As a result, when the panel is completely transferred from the stacking means 50 in the first chamber 18 to the stacking means 52 in the second chamber 20, the stacking means 50 is in the lowermost position and the stacking means 52 is in the uppermost position. In addition, since a new panel 12 to be processed every tact time is supplied from the introduction unit 14 to the stacking unit 32 of the stacking unit 16, the panels are mounted in all the openings. Yes (see FIG. 4). When all the panels are transferred from the first chamber 18 to the stacking means 52 in the second chamber 20, the passage portion 65 is closed. The pressure heating defoaming process for the panel is continued in the second chamber 20. On the other hand, in the first chamber 18, the pressure adjusting means 48A is operated to return the pressure in the first chamber 18 to normal pressure.

  Until the next tact time starts, as described in FIGS. 2 and 3, the door 62 of the first chamber 18 is opened to open the passage portion 63, and the stacking means 32 is opened via the passage portion 63. The panel is transferred to the laminating means 50 from the lowermost opening. Thereafter, as described above, the panel is received into all the openings of the laminating means 50 in the first chamber 18 while alternately receiving the panel from the introducing portion 14 and the panel from the laminating means 32. In the meantime, the panels stacked on the stacking means 52 of the second chamber 20 and subjected to the defoaming process are sequentially transferred to the stacking means 54 of the second chamber 20. The transfer method is the same as the transfer method described above. Since this transfer is performed in the second chamber 20, the defoaming process is continued during this transfer. FIG. 5 shows the position of the stacking means 32, 50, 52, and 54 at this time.

  From this state, in the same manner as described above, the door 62 of the first chamber 18 is closed, the temperature and pressure of the first chamber 18 are increased to the defoamable state, and then the door 64 of the second chamber 20 is opened. Thus, the panel is moved from the first chamber to the second chamber. During this time, in the second chamber 20, the panel is transferred from the laminating means 54 to the laminating means 56, and further, the next panel is laminated on the laminating means 32. This state is shown in FIG.

  Thereafter, the door 66 is opened, and the panel subjected to the defoaming process in the second chamber 20 is transferred from the passage portion 67 to the stacking means 58 in the third chamber 22. What should be noted here is that the third chamber 22 is adjusted in advance to an atmosphere similar to the high temperature and high pressure state of the second chamber. Thereby, opening of the door 66 is easily achieved. Since the door 68 is closed even when the door 66 is opened, the defoaming atmosphere of the second chamber 20 does not leak outside. At the same time, in the second chamber 20, the panel is transferred from the laminating means 52 to the laminating means 54, and a new panel is further laminated on the laminating means 50 in the first chamber 18. This state is shown in FIG.

  Thereafter, as shown in FIG. 8, the door 66 of the third chamber 22 is closed. Next, the pressure in the third chamber 22 is returned to normal pressure via the pressure adjusting means 48C. Thereafter, the door 68 is opened to form the passage portion 69. Thus, the processed panels are sequentially carried out from the third chamber 22 through the passage portion 69 from the lowermost opening of the stacking means 58 to the downstream assembly apparatus (not shown) by the carry-out means 60. After the carry-out is completed, the door 68 is closed, and the pressure adjusting means 48C is activated to return the third chamber 22 to the defoamable state. Thereafter, the same operation is sequentially repeated.

Thus, in the present invention, one panel is stacked on the stacking means 32 every tact time, whereas the stacking means 50, 52, 54, 56, 58 in the first to third chambers are stacked. Moves two panels at the same tact time. Therefore, if the defoaming processing time is 30 minutes, that is, 1800 seconds, the actual processing operation starts from the stage where all the panels are laminated to the first chamber and ends until all the panels are transferred to the third chamber. Therefore, considering that the time during which the panel is substantially present in the second chamber is 1800 seconds, the actual number of openings of the stacking means 50 to 58 is N, the tact time is T, If the number of stacking means in the two chambers is S, one panel movement is performed during T / 2, so the time for one panel to exist in the second chamber should be 1800 seconds. The equation of (T / 2) × N × S = 1800 seconds holds. Here, if T is 20 and S is 3, 10 × N × 3 = 1800, so N = 60. However, in actuality, in the example shown in the figure, the panel processing starts from the time when the panels are stacked and arranged in the first chamber and continues until the time when the loading into the third chamber is completed. Therefore, S = 5 may be set. Practically possible. In this case, N = 36. These are software matters related to the opening and closing time of the door. Therefore, if N = 60, the number of openings formed in the stacker means constituting the stacked portion 16 is 30, and if N = 36, the number of openings is 18.

In the illustrated example, it is described that the panel transfer to the next stacker means is started after all the openings formed in the stacker means of each stacking means are filled. The panel to be laminated to the lowermost opening can be transferred directly to the uppermost opening of the next stacker means and laminated there. For example, the panel to be laminated to the lowermost opening of the laminating means 54 in the second chamber 20 is directly fed to the uppermost opening of the laminating means 56 adjacent to the panel.

  The present invention functions extremely effectively when, for example, a polarizing plate and a glass substrate constituting a liquid crystal display device, as well as an alignment film and a member such as a color filter are assembled and subjected to pressure defoaming treatment. In particular, the present invention relates to a method and apparatus for laminating articles, and in particular, a method of pressure-heating defoaming treatment in a state in which a plurality of workpieces are laminated with each other, wherein the workpiece 12 is introduced from upstream, and the introduced workpiece 12 is stacked on the stacking section 16 every tact time, and the workpiece 12 stacked on the stacking section 16 and the new workpiece 12 introduced from the upstream are alternately received to reserve a predetermined number of workpieces. Laminating to the part 18 to be pressurized and heated, transferring the workpieces laminated to the part 18 to be pre-pressurized and heated to the laminating means 52 of the part 20 for sequentially performing pressure heating and defoaming treatment, Perform degassing with pressure heating The work piece laminated on the laminating means in the part 20 is transferred to another laminating means in the same part, and then the work piece is transferred from the part 20 where the pressure heating defoaming process is performed to the decompression part 22 to be laminated. When the workpieces stacked on the stacking unit 16 are transferred to the part where the pre-pressurization heating is performed, the workpieces are sequentially sent from the decompression unit to the downstream device. Article stacking processing for performing desired processing by stacking articles by repeating the steps of performing a stacking operation and then sequentially transferring the workpiece to the stacking unit of the decompression section through the adjacent stacking unit, and the same Is a device for pressurizing and heating and defoaming in a state where a plurality of workpieces are laminated with each other, and accepts the workpiece 12 from the introduction unit 14 every tact time and stacks them. Laminated portion 16 and laminated portion 6 to which the workpiece 12 and the workpiece 12 from the introduction portion 14 are alternately received, and the pre-pressurizing / heating unit 18 for laminating them, and the workpiece supplied from the pre-pressurizing / heating unit 18 are added to the workpiece. A pressure heating and defoaming unit 20 for performing pressure heating and defoaming processing, a decompression unit 22 for laminating processed workpieces, and an unloading unit 24 for unloading processed workpieces from the decompression unit 22 The laminated portion 16 and the pre-pressurizing and heating unit 18 are partitioned by a wall 19, and the pre-pressurizing and heating unit 18, the pressurizing and heating defoaming unit 20, and the pressurizing and heating defoaming unit and the decompression unit 22 are formed of the wall 21. The decompression section 22 and the carry-out section 24 are partitioned by a wall 23, and a passage section 63 that is closed by doors 62, 64, 66, 68 on these walls 19, 21, 23, About pressurization heating deaeration processing device in which 65, 67, and 69 are formed Disclose.

It is a figure which shows the whole apparatus of this invention, and is a figure which shows the state in which the panel which is a workpiece is introduce | transduced from an introduction part to a lamination | stacking part. It is a figure which shows the state which the lamination | stacking part has laminated | stacked the panel. It is a figure which shows the state by which the panel was completely laminated | stacked on the lamination | stacking means of the 1st chamber by accepting the panel supplied from the lamination | stacking part, and the panel from an introduction part by turns. It is a figure which shows the state which the panel laminated | stacked on the 1st chamber was completely transferred to the first lamination | stacking means of a 2nd chamber, and the batch of the next panel to be processed was laminated | stacked on the lamination | stacking part. The panel stacked on the first stacking means of the second chamber is completely transferred to the intermediate stacking means of the second chamber, and the panel from the stacking section and the panel from the introduction section are alternately received, It is a figure which shows the state by which the panel was completely laminated | stacked on the lamination means. The panel laminated on the intermediate lamination means in the second chamber is completely transferred to the last lamination means in the second chamber, and the panel laminated in the first chamber is completely transferred to the first lamination means in the second chamber. FIG. The panel stacked in the last stacking means in the second chamber is completely transferred to the stacking means in the third chamber, and the panel stacked in the first stacking means in the second chamber is completely transferred to the intermediate stacking means in the second chamber. It is a figure which shows the state by which it transferred to 1st and the 1st chamber is simultaneously filled with the panel. The panel in the third chamber, which has been processed, is sent to the downstream apparatus, and the panel laminated to the intermediate stacking means in the second chamber is completely transferred to the last stacking means in the second chamber, and at the same time, in the first chamber. It is a figure which shows the state by which the panel was transferred to the 1st lamination | stacking means of the 2nd chamber, and the next panel was laminated | stacked on the lamination | stacking part. It is a figure which shows the stacker means of a laminated part, and is a side view which shows a state when the first panel is supplied to the stacker means. FIG. 10 is a front view of FIG. 9. It is a figure which shows the stacker means of a lamination | stacking means, and is a side view which shows a state when the first panel is supplied to the stacker means of a lamination | stacking means. It is a front view of FIG. It is a figure which shows the state which has steadily supported the panel supplied to the stacker means by moving the stacker means somewhat upward. FIG. 14 is a front view of FIG. 13. It is a figure which shows the stacker means of a lamination | stacking means, and is a figure which shows a state when a 2nd panel is supplied to the stacker means of a lamination | stacking means. FIG. 16 is a front view of FIG. 15. It is a figure which shows the stacker means of a lamination | stacking means, and is a figure which shows the state with which all the opening parts were satisfy | filled with the panel. It is a front view of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10: Article lamination processing apparatus 12: Workpiece, panel 14: Introduction part 16: Lamination part 18: Pre-pressurization heating part, 1st chamber 19: Heat-resistant sealing wall 20: Pressurization heating deaeration part, 2nd chamber 21 : Heat-resistant sealing wall 22: decompression section, third chamber 23: heat-resistant sealing wall 24: carry-out section 30: introduction means 31: arrow 32: stacking means 34: roller means 36: stacker means 38: top plate 40: vertical frame 42 : Opening 46: Heating means 48: Pressure adjusting means 50: Laminating means 52: Laminating means 54: Laminating means 56: Laminating means 58: Laminating means 60: Unloading means 62: Door 63: Passage part 64: Door 65: Passage part 66: Door 67: Passage part 68: Door 69: Passage part

Claims (6)

In this method, a plurality of workpieces are stacked under pressure and heat, and the workpiece 12 is introduced from the upstream side. The workpiece 12 stacked on the stacking portion 16 and the new workpiece 12 introduced from the upstream are alternately received, and a predetermined number of workpieces are stacked on the portion 18 for pre-pressurizing and heating. That is, the workpieces stacked in the pre-pressurized and heated part 18 are sequentially transferred to the stacking means 52 of the part 20 where the pressure and heat defoaming process is performed, and the part 20 that performs the pressure and heat defoaming process. Transferring the workpiece laminated on the laminating means to another laminating means in the same part, and then transferring the workpiece from the part 20 where pressure heating and defoaming processing is performed to the decompression part 22 and laminating. Sending workpieces sequentially from the decompression unit to downstream equipment; When the workpieces stacked on the layer part 16 are transferred to the part to be pre-pressurized and heated, the stacking operation is performed on the stacking part 16 and then the workpieces are depressurized sequentially through the adjacent stacking means. The method of carrying out a pressure heating defoaming process in the state which laminated | stacked several workpieces mutually by repeating the process of transferring to the lamination | stacking means of a part. 2. The method of pressurizing and heating and defoaming according to claim 1, wherein the pressurizing and heating and defoaming treatment of the article is started at a portion where pre-pressurizing and heating is performed and is completed at a decompression portion. 2. The method of pressurizing and heating and defoaming according to claim 1, wherein, in the step of laminating the workpiece on each laminating means, the position of the workpiece is changed up and down. A device that performs pressure heating and defoaming processing in a state where a plurality of workpieces are stacked on each other, and receives a workpiece 12 from the introduction section 14 every tact time, and stacks the stacking section 16 and the stacking section. 16, the workpiece 12 laminated on the workpiece 16 and the workpiece 12 from the introduction portion 14 are alternately received, the pre-pressurizing and heating unit 18 for laminating them, and the workpiece supplied from the pre-pressurizing and heating unit 18 are added to the workpiece. A pressure heating and defoaming unit 20 for performing pressure heating and defoaming processing, a decompression unit 22 for laminating processed workpieces, and an unloading unit 24 for unloading processed workpieces from the decompression unit 22 The laminated portion 16 and the pre-pressurizing and heating unit 18 are partitioned by a wall 19, and the pre-pressurizing and heating unit 18, the pressurizing and heating defoaming unit 20, and the pressurizing and heating defoaming unit and the decompression unit 22 are formed of the wall 21. The decompression section 22 and the carry-out section 24 are separated by a wall 23. Pressurized heating, characterized in that the walls 19, 21 and 23 are formed with passage portions 63, 65, 67 and 69 closed by doors 62, 64, 66 and 68, respectively. Defoaming device. Each of the stacking means 32, 50, 52, 54, 56, 58 has a plurality of stacker means arranged at intervals in the moving direction of the workpiece, and roller means for conveying the workpiece in the moving direction Furthermore, each of these stacker means is laminated with an opening extending in a direction orthogonal to the traveling direction of the workpiece, and a linear level L− formed by the upper edge of the roller means. The pressure heating defoaming apparatus according to claim 4, wherein L is positioned slightly above the workpiece receiving surface formed by the opening. The laminating means 32 of the laminating section 16 operates corresponding to one tact time, and the laminating means 50 of the section 18 for pre-pressurizing and heating the laminating means 32 and the laminating means 52 of the section 20 for performing pressure heating defoaming processing. , 54 and 56, and the laminating means 58 of the decompression unit 22 operate in correspondence with 0.5 tact time.

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