JP4638713B2 - Coil for sensor and magnetic sensor using the same - Google Patents

Description

  The present invention relates to a sensor coil for measuring drive torque, surface stress, and the like accompanying rotation of a detection object, and a torque sensor using a magnetostriction effect.

  As shown in FIG. 10, when a torque T indicated by an arrow 101 is applied to a shaft body 100 having a diameter D made of a shaft material that is a ferromagnetic material and has a magnetostrictive effect, an expression (1 ) Is generated.

σ = 16T / (πD ³ ) (1)
As a result, uniaxial magnetic anisotropy due to strain stress is induced (billy effect). In this case, if the magnetostriction constant λ is positive, the axis of easy magnetization is parallel to the positive direction of σ (+ σ in FIG. 10), and the magnitude of magnetic anisotropy is given by equation (2). It is done. Conversely, if the magnetostriction constant λ is negative, the easy axis of magnetization is parallel to the negative direction of σ (−σ in FIG. 10).

K _σ = 3λσ (2)
It is already known that the magnitude of the torque T can be measured in a non-contact manner by detecting the magnetic anisotropy induced in the surface layer portion of the shaft body 100 by applying the torque T. (See Non-Patent Documents 1 and 2).

  Further, there is a magnetic head in which the method described in Non-Patent Document 2 is further improved so that the magnitude of the torque T can be measured with a planar detection coil. For example, a torque detection coil composed of a pair of 8-shaped coils has already been reported (see Non-Patent Document 3).

  For example, as shown in FIG. 11, a magnetic head (sensor coil) 111 described in Non-Patent Document 3 includes two coils 112 and 113 each having an 8-shape and a rectangular outer edge shape. The other coil 113 is rotated by 90 ° with respect to 112 and arranged so as to be superposed on the shaft body 110 in a non-contact state. The coils 112 and 113 are constituted by windings, and each has an intersection at the center. Therefore, the entire magnetic head 111 has two intersecting portions.

R.A.Beth, W.W.Meeks, `` Rev. Sci. Instrum. '', 1954, Vol. 25, p. 603 O. Dahle, `` ASEA Journal '', 1960, Vol. 33, No. 3, p. 23 I. Sasada, M. Akinaga, High sensitivity magnetic head for a shaft torque sensor, `` Journal of Applied Physics '', 2002, vol. 91, p. .7792-7794

  By the way, since the coil 111 for sensors of the nonpatent literature 3 is a winding type thing in which the coils 112 and 113 are comprised by winding, while aiming at realization (achievement) of higher magnetic coupling (coupling by magnetic flux), it aims. In order to balance the coupling of the primary coil 112 and the secondary coil 113, there was a design limit. Further, since the coils 112 and 113 are formed by wire winding, there is a problem that productivity is not good.

  An object of the present invention, which was created in view of the above circumstances, is to provide a coil for a sensor with high magnetic coupling and good productivity, and a magnetic sensor using the same.

In order to achieve the above object, the sensor coil according to the present invention has printed coil patterns on both sides of a flexible substrate, and each printed coil pattern is mainly composed of two spiral pattern portions having end points. A coil pattern and a connection pattern independent of the main coil pattern, the two spiral pattern portions are symmetrical, and the main coil pattern is formed on one surface of the substrate. In contrast, the two spiral patterns according to the main coil pattern formed on one surface of the substrate are arranged with the main coil pattern formed on the other surface of the substrate rotated by 90 °. the end points of the section, electrically contact with the connection pattern disposed between the other surface to the formed the two spiral pattern portion of the substrate One in which the.

The sensor coil according to the present invention has printed coil patterns on both sides of a flexible substrate, and each of the printed coil patterns includes a plurality of main coil patterns composed of two spiral pattern portions having end points. And a plurality of connection patterns independent of the main coil pattern, and the two spiral pattern portions are symmetrical, and the plurality of main coil patterns are formed on the substrate. The main coil formed on the other surface of the substrate corresponding to the one main coil pattern with respect to one main coil pattern among the plurality of main coil patterns formed on one surface the pattern is arranged in a state of rotate 90 °, according to each of the plurality of primary coil pattern formed on one surface of the substrate The end points of the serial two spiral pattern portion is obtained by electrically connecting the above plurality of connection patterns disposed between the other surface to the formed the two spiral pattern portion of the substrate.

It is preferred that the two spiral pattern portion is arranged point symmetrically. Further, it is preferable that the two spiral pattern portion is disposed symmetrically.

The spiral pattern unit may have a substantially isosceles triangular outer edge, and it is preferable that the main coil pattern to suit each spiral pattern portion has a substantially diamond-shaped outer edge.

  On the other hand, the magnetic sensor according to the present invention is provided with the above-described sensor coil close to, or in close contact with, a sensing object to be sensed.

Here, the coil above the sensor, the surface is not a detection object side of the sensing target (surface not facing the detection object) may be disposed a magnetic yoke. The magnetic yoke may be a single layer of magnetic thin plates or a laminate of magnetic thin plates stacked in multiple layers.
The magnetic thin plate may be a magnetic ribbon.
The thickness of the magnetic ribbon may be 5 to 100 μm.
The magnetic ribbon may be an amorphous magnetic ribbon.

  According to the present invention, it is possible to obtain an excellent effect that a sensor coil having high magnetic coupling can be obtained.

  In the sensor coil 111 shown in FIG. 11, each of the coils 112 and 113 has an intersection at the center thereof, so that the entire sensor coil 111 has two intersections. Therefore, conventionally, it has been considered that a sensor coil cannot be produced using a double-sided conductor substrate.

  The present invention is characterized by using a double-sided conductor substrate and forming a primary coil and a secondary coil on both sides of the substrate, respectively.

(First embodiment)
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a preferred embodiment of the invention will be described with reference to the accompanying drawings.

  FIG. 1 is a front view of a sensor coil according to a preferred embodiment of the present invention, and FIG. 2 is a plan view of the sensor coil of FIG. 2A is a view taken in the direction of arrow 2a in FIG. 1, and FIG. 2B is a view taken in the direction of arrow 2b-2b in FIG.

  As shown in FIG. 1, the sensor coil 10 according to the present embodiment has printed coil patterns 12 and 13 on both surfaces of a substrate 11, respectively.

  As shown in FIG. 2A, the printed coil pattern 12 does not intersect the main coil pattern 22 composed of two pattern portions 21a and 21b having end points and the main coil pattern 22, and is connected independently. And a pattern 23. One end of the pattern portion 21a is an end point 21c, and the other end is a terminal 28a. One end of the pattern portion 21b is an end point 21d, and the other end is a terminal 28b. Measuring means (not shown) is connected to each terminal 28a, 28b.

  Further, as shown in FIG. 2B, the printed coil pattern 13 does not intersect the main coil pattern 25 composed of two pattern portions 24a and 24b having end points, and the main coil pattern 25 is independent. The connection pattern 26 is provided. One end of the pattern portion 24a is an end point 24c, and the other end is a terminal 29a. One end of the pattern portion 24b is an end point 24d, and the other end is a terminal 29b. Measuring means (not shown) is connected to each terminal 29a, 29b.

  Each of the pattern portions 21a, 21b and 24a, 24b is a spiral pattern having a substantially isosceles triangular outer edge, and the main coil patterns 22 and 25, which are a combination of the pattern portions 21a, 21b and 24a, 24b, are substantially It has a diamond-shaped outer edge. The printed coil patterns 12 and 13 have a point-symmetric structure with the midpoints of the connection patterns 23 and 26 as symmetric points, respectively, and the symmetry of the entire pattern, that is, the balance is maintained.

  On the other hand, as shown in FIG. 3A, in the printed coil pattern 12 formed on one surface of the substrate 11, the end points 21c and 21d of the main coil pattern 22 are discontinuous. However, the connection pattern 26 is provided on the other surface of the substrate 11 so as to connect the end points 21c and 21d (in FIG. 3B, the end point 26a of the connection pattern 26 is located at the same position as the end points 21c and 21d. , 26b). The end points 21c, 21d and 26a, 26b are formed with via holes (through holes), and the end points 21c, 21d and 26a, 26b are electrically connected via the via holes. Therefore, the printed coil pattern 12 is electrically connected via the connection pattern 26 arranged with the substrate 11 interposed therebetween.

  Further, as shown in FIG. 3B, the printed coil pattern 13 formed on the other surface of the substrate 11 is discontinuous between the end points 24c and 24d of the main coil pattern 25. However, the connection pattern 23 is provided on one surface of the substrate 11 so as to connect the end points 24c and 24d (in FIG. 3A, the end point 23a of the connection pattern 23 is located at the same position as the end points 24c and 24d. , 23b). Via points (through holes) are formed at the end points 24c, 24d and 23a, 23b, and the end points 24c, 24d and 23a, 23b are electrically connected via the via holes. Therefore, the printed coil pattern 13 is electrically connected via the connection pattern 23 arranged with the substrate 11 interposed therebetween.

  Here, the substrate 11 is preferably a flexible substrate, and the constituent material is not particularly limited as long as it has sufficient flexibility. For example, all resin thin films conventionally used as printed circuit boards are applicable, and specific examples include polyimide, polyester, and epoxy.

  The thickness of the flexible substrate 11 is not uniformly limited because the flexibility differs depending on the constituent material, but is preferably 100 to 500 μm.

  The constituent material of each of the printed coil patterns 12 and 13 is not particularly limited, and any material conventionally used as a constituent material of the printed circuit pattern can be applied, and examples thereof include pure copper and copper alloy. .

  The thickness of each of the printed coil patterns 12 and 13 is not particularly limited. However, when the pattern width is about 40 to 500 μm, the thickness that allows an excitation current of about 0.05 to 1 A to flow, for example, 10 to The thickness is 50 μm, preferably 15 to 40 μm, more preferably 18 to 35 μm. Here, the printed coil patterns 12 and 13 do not necessarily have the same thickness, and one coil pattern may be formed thin. In this case, it is preferable that the thinner coil pattern has a fine line and space (pattern width and interval between adjacent patterns are reduced) and the number of turns of the coil is increased.

  The number of turns of the pattern portions 21a and 21b in the printed coil pattern 12 and the pattern portions 24a and 24b in the printed coil pattern 13 is not particularly limited, and is appropriately selected according to the intended sensing sensitivity. The method for forming the printed coil patterns 12 and 13 is not particularly limited, and all methods conventionally used for forming printed circuits can be applied.

  As shown in FIG. 4, the sensor coil 10 according to the present embodiment having the above-described configuration is provided to face the sensing object to be sensed, for example, the circumferential surface of the torque transmission shaft body 41, thereby providing a torque sensor. 40 is obtained.

  As a constituent material of the torque transmission shaft body 41, ferromagnetic stainless steel (for example, martensitic stainless steel, specifically SUS403 (JIS standard product)), maraging steel, JIS structural steel containing a relatively large amount of Ni ( For example, nickel-chromium-molybdenum steel (SNCM material), nickel steel, iron-nickel steel, iron-cobalt steel, or the like), nickel material, or the like can be given. In particular, a non-heat treated material of SUS403 having good magnetostriction characteristics is preferable.

  Further, as shown in FIG. 5, a ferromagnetic magnetic yoke 51 is arranged close to and away from a surface (side surface of the non-torque transmission shaft body (right side surface in FIG. 5)) of the sensor coil 10 that is not on the detection object side. Alternatively, the torque sensor 50 may be used. A more preferred torque sensor 50 is one in which the sensor coil 10 and the magnetic yoke 51 are in close contact.

  Examples of the magnetic yoke 51 include a magnetic thin plate made of a high-permeability magnetic material, preferably a magnetic ribbon, and for example, a magnetic thin plate such as ferrite, permalloy, microcrystalline magnetic material, or amorphous magnetic material, preferably a magnetic ribbon. Can be used. In particular, an amorphous magnetic ribbon having a non-magnetostrictive composition is preferable. The magnetic yoke 51 may be either a single layer of magnetic thin plates (or magnetic thin strips) or a laminated body in which magnetic thin plates are stacked in multiple layers.

  Here, when the magnetic yoke 51 is provided (torque sensor 50 shown in FIG. 5) and the magnetic yoke 51 is not provided (torque sensor 40 shown in FIG. 4) under the same excitation condition, torque is compared. As compared with the torque sensor 40, the torque detection sensitivity of the sensor 50 is greatly improved. The sensor coil 10, which is a flexible printed coil, is smoother with less undulations on the coil surface than a conventional winding type sensor coil. For this reason, the sensor coil 10 can be provided with the magnetic yoke 51 more closely attached as compared with the conventional winding type sensor coil, and as a result, the change in permeability due to the magnetostriction effect can be detected with higher sensitivity. can do. Thus, it is considered that the torque detection sensitivity can be greatly improved.

  Further, by providing the magnetic yoke 51 on the side surface of the non-torque transmission shaft body of the sensor coil 10, electromagnetic interference from other electronic / electrical devices with respect to the sensor coil 10 can be reduced.

  Next, the effect | action of the coil 10 for sensors which concerns on this Embodiment is demonstrated based on an accompanying drawing.

  For example, as shown in FIG. 5, the sensor coil 10 faces the peripheral surface of the torque transmission shaft body 41 and is arranged in a non-contact state. In order to explain the operation principle of the sensor coil 10, the printed coil pattern (primary coil) 12 shown in FIG. 3A and the printed coil pattern (secondary coil) 13 shown in FIG. , Think about each part.

  When magnetic anisotropy is not induced in the torque transmission shaft body 41 (when no torque is applied), no induced voltage is generated on the secondary coil 13 side even if an alternating current is applied to the primary coil 12. . When the direction of the current of the primary coil 12 is an arrow A12 and the direction of the current of the secondary coil 13 is an arrow A13, the 90 ° intersection (the main coil pattern 22 and the connection pattern in the center of the sensor coil 10). 26, the intersection of the main coil pattern 25 and the connection pattern 23), the magnetic flux generated by the primary coil 12 is parallel to the vertical part of the secondary coil 13, and thus is not linked. Mutual induction (mutual inductance) is zero. On the upper right and lower left sides, the current directions of the two coils 12, 13 are opposite to each other, and on the remaining upper left and lower right sides, the current directions of the two coils 12, 13 are the same. is there. Mutual induction generates a voltage in a direction that prevents changes in magnetic flux. Therefore, if the polarity of the mutual induction at the upper right and the lower left is positive, and the polarity of the mutual induction at the upper left and the lower right is negative, the strength of the positive and negative mutual induction on each side is symmetrical to the shape. The induced voltage is not generated. Thus, if magnetic anisotropy is not induced in the torque transmission shaft body 41 to be measured, the mutual induction between the primary coil 12 and the secondary coil 13 is zero in principle.

However, when the torque T is applied in the direction of the arrow 45 shown in FIG. 4 and the uniaxial magnetic anisotropy indicated by K _σ (= 3λσ; σ = 16T / (πD ³ )) is induced, the direction is parallel to that direction. The magnetic flux easily passes in the direction, and the magnetic flux hardly passes in the direction perpendicular to the direction. Therefore, the mutual induction becomes stronger at the upper right part and the lower left part having a positive polarity, and conversely, the mutual induction becomes weaker at the upper left part and the lower right part having a negative polarity. On the other hand, even at the 90 ° intersection at the center of the sensor coil 10, a horizontal component is generated in the magnetic flux when the magnetic flux is slightly tilted in the direction of magnetic anisotropy. As a result, a linkage occurs in the vertical portion of the secondary coil 13, and this polarity is positive.

  From the above, when magnetic anisotropy is induced, an induced voltage is generated with high sensitivity. Further, when the magnetic anisotropy occurs in a direction different by 90 °, the above sign is completely reversed, and the phase of the induced voltage is shifted by 180 ° (positive / negative reversal). From these facts, if the induced voltage is rectified by a synchronous rectifier, the direction and magnitude of the torque T can be measured.

  In the sensor coil 10 according to the present embodiment, an accurate pattern can be easily obtained by forming the primary coil 12 and the secondary coil 13 with printed coils. In the sensor coil 10 according to the present embodiment, both the primary coil 12 and the secondary coil 13 function as an excitation coil and a detection coil. That is, one may be an excitation coil, the other is a detection coil, or one is a detection coil, and the other is an excitation coil. Thereby, the symmetry as the sensor coil 10, that is, the balance of mutual induction between the primary coil 12 and the secondary coil 13 can be kept good, and the sensor coil 10 can be manufactured at low cost and productivity. Can be manufactured well. As described above, the sensor coil 10 according to the present embodiment can obtain high magnetic coupling.

  Here, the primary coil 12 and the secondary coil 13 do not have to be completely the same, and the primary coil 12 and the secondary coil 13 have line symmetry, are substantially the same size, and are primary. If the secondary coil 13 is disposed in a state where it is rotated by 90 ° with respect to the coil 12, the number of turns, the size, the thickness, and the like of the primary coil 12 and the secondary coil 13 may be different.

  A uniaxial magnetic anisotropy is induced in the torque transmission shaft body 41 by applying a driving torque T to the magnetic head type torque sensor 40 manufactured using the sensor coil 10 according to the present embodiment. The magnetic permeability difference in the ± 45 ° direction generated on the peripheral surface of the torque transmission shaft body 41 is measured with high sensitivity and high accuracy by the sensor coil 10 in a non-contact state. Thus, the generated induced voltage is detected with high accuracy, and the direction and the magnitude of the driving torque T can be measured if the induced voltage is rectified by a synchronous rectifier.

  Here, the torque transmission shaft body 41 is made of martensitic stainless steel (for example, SUS403) having a high strength and having an adverse effect of good magnetostriction, thereby ensuring mechanical strength and durability. No heat treatment (induction hardening) is required, and the manufacturing process is simplified. Therefore, the torque transmission shaft body 41 can be manufactured at a low manufacturing cost. Further, since quenching is not required, the coercive force of the torque transmission shaft body 41 does not increase, and the torque detection sensitivity does not decrease. Depending on the constituent material of the torque transmission shaft body 41, the torque transmission shaft body 41 may be heat-treated as necessary. For example, when an SNCM material is used as the torque transmission shaft body 41, spiral magnetic characteristics fluctuate in the manufacturing process of the rod material. Therefore, in this case, it is preferable to heat-treat the rod material at a temperature of about 900 ° C. in advance.

  Further, by configuring the torque transmission shaft body 41 with a raw material (unheat-treated material) having a small coercive force, it is not necessary to take a large excitation magnetomotive force of the sensor coil (magnetic head) 10. 300 mA is sufficient. Further, by configuring the torque transmission shaft body 41 with raw materials having a small coercive force, it is not always necessary to provide the magnetic yoke 51 shown in FIG. 5 on the side surface of the non-torque transmission shaft body of the sensor coil 10. As a result, the torque sensor 40 can be reduced in weight and size, and the manufacturing cost of the torque sensor 40 can be reduced.

  By applying the torque sensor 40 using the sensor coil 10 according to the present embodiment to an automobile, it becomes possible to perform power steering torque control, engine torque control, motion control, or the like with high accuracy. . Further, by applying the torque sensor 40 using the sensor coil 10 according to the present embodiment to a turbine engine, it is possible to control and monitor the turbine operation with high accuracy.

  In addition, the sensor coil 10 according to the present embodiment is not limited to the application to a torque sensor, but a nondestructive inspection sensor that detects a scratch on an object through magnetic anisotropy, The present invention can be applied to a foreign matter detection sensor that detects a foreign matter contained in the sensor with high sensitivity. In particular, since the sensor coil 10 according to the present embodiment is flexible, even if the detection surface of the object is a three-dimensional curved surface, it can be detected satisfactorily.

  Next, another embodiment of the present invention will be described with reference to the accompanying drawings.

(Second Embodiment)
A plan view of one surface of a sensor coil according to another preferred embodiment of the present invention is shown in FIG. 6, and a plan view of the other surface is shown in FIG. In addition, the same code | symbol is attached | subjected to the member similar to Fig.2 (a) and FIG.2 (b), and description is abbreviate | omitted about these members.

  The sensor coil 10 according to the previous embodiment includes one printed coil pattern 12 and 13 on each side of the flexible substrate 11, and is configured by one coil.

  On the other hand, as shown in FIGS. 6 and 7, the sensor coil according to the present embodiment has a plurality of printed coil patterns 12, 13, that is, printed coil patterns 12, on both surfaces of the flexible substrate 11. A group (three printed coil patterns 12a, 12b, 12c (primary coil) in FIG. 6) and a group of printed coil patterns 13 (three printed coil patterns 13a, 13b, 13c (secondary coil in FIG. 7) )), And is composed of three coils.

  In the group of printed coil patterns 12, the pattern portion 21b in the printed coil pattern 12a and the pattern portion 21a in the printed coil pattern 12b, the pattern portion 21b in the printed coil pattern 12b, and the pattern portion 21a in the printed coil pattern 12c are connected and connected in series. The In the group of printed coil patterns 12, the other ends of the pattern portion 21a in the printed coil pattern 12a and the pattern portion 21b in the printed coil pattern 12c are connected to terminals 28a and 28b, respectively.

  In the group of printed coil patterns 13, a pattern portion 24b in the printed coil pattern 13a and a pattern portion 24a in the printed coil pattern 13b, and a pattern portion 24b in the printed coil pattern 13b and a pattern portion 24a in the printed coil pattern 13c are connected and connected in series. The In the group of printed coil patterns 13, the other ends of the pattern portion 24a in the printed coil pattern 13a and the pattern portion 24b in the printed coil pattern 13c are connected to terminals 29a and 29b, respectively.

  Here, the number of coils is not limited to three, but may be two, or four or more.

  Since each coil of the sensor coil 60 according to the present embodiment is formed using a printed circuit forming technique, each coil is homogeneous and can be easily formed. For this reason, the sensor coil 60 according to the present embodiment has a uniform detection capability of each coil, and even if the sensing object to be sensed has a large area, its magnetic anisotropy can be accurately determined. Can be detected.

  In addition, depending on the substance, “magnetic fluctuation” of local magnetic properties and local internal stress exist, so that the magnetic anisotropy is not always uniform. In such a case, the magnetic anisotropy due to the applied external force can be estimated from the average value thereof. This is because the influence of “fluctuation” can be removed by taking the average (averaging). For example, as shown in FIG. 6 and FIG. 7, by connecting a plurality of coils in series, each magnetic anisotropy induced in the torque transmission shaft opposite to each coil can be detected in addition. Can do. A clear proportional coefficient specific to the sensor is determined from the obtained added value (addition induced voltage), and force (torque) is obtained based on this proportional coefficient. Further, the obtained added value (added induced voltage) may be divided by the number of coils to obtain an average induced voltage per coil, and a force (torque) may be obtained based on the average induced voltage. .

  As described above, the sensor coil 60 reduces the influence of magnetic anisotropy induced on the peripheral surface of the torque transmission shaft body even if the magnetic anisotropy is non-uniform (non-uniform) in the peripheral surface direction. The average magnetic anisotropy can be detected. As a result, it is possible to mitigate the adverse effects caused by the unnecessary output that depends only on the offset of the torque sensor or the shaft rotation due to the local non-uniformity of the torque transmission shaft body.

  As a modification of the sensor coil 60, a plurality of coils may be functioned as individual coils without being connected in series. For example, each printed coil pattern 12 of the group of printed coil patterns 12 (primary coil) is connected in series, and each printed coil pattern 13 of the group of printed coil patterns 13 (secondary coil) is individually independent. There may be. Alternatively, each printed coil pattern 12 of the group of printed coil patterns 12 (primary coil) and each printed coil pattern 13 of the group of printed coil patterns 13 (secondary coil) may be individually independent. Good.

  With such a configuration, the sensor coils 60 are arrayed, and the magnetic anisotropy of each location of the detection object having a large area can be detected. This sensor coil can be used, for example, for detecting a flaw on the conductor surface or inside the conductor, or detecting a conductor foreign substance contained in an object that is less likely to conduct electricity than metal. This is because cracks and vacancies in the conductor change the distribution of eddy currents flowing in the conductor and distort the AC magnetic flux distribution outside the conductor, resulting in ferromagnetic materials (such as nails) and non-magnetic conductors present in food This is because these foreign substances distort the alternating magnetic flux distribution, so that they act like a kind of magnetic anisotropy. In addition, since the sensor coil is made of a homogeneous material, it can be used for detecting a portion having a different property from other objects in a detection object where uniform magnetic anisotropy should be induced. . That is, this sensor coil can be used as a quality control detection sensor for a detected object.

  Also in the torque sensor manufactured using the sensor coil 60 according to the present embodiment, the same effects as the torque sensor manufactured using the sensor coil 10 according to the first embodiment can be obtained.

(Third embodiment)
8A and 8B are plan views of a sensor coil according to another preferred embodiment of the present invention, and FIG. 9 shows a current flow in the sensor coil of FIG. FIG. 8A is a plan view of one surface, and FIG. 8B is a perspective plan view of the other surface viewed from one surface. In addition, the same code | symbol is attached | subjected to the member similar to Fig.2 (a) and FIG.2 (b), and description is abbreviate | omitted about these members.

  In the sensor coil 10 according to the first embodiment shown in FIGS. 3A and 3B, the current input from the terminal 28a of the primary coil (printed coil pattern 12) 12 is the same as the primary coil. The current output from the terminal 28 b of the coil 12 and input from the terminal 29 a of the secondary coil (printed coil pattern 13) 13 was also output from the terminal 29 b of the secondary coil 13.

  On the other hand, the sensor coil 80 according to the present embodiment has printed coil patterns 82 and 83 on both surfaces of the flexible substrate 11, respectively.

  As shown in FIG. 8A, the printed coil pattern 82 has a main coil pattern 92 composed of two pattern portions 91a and 91b having end points, and the main coil pattern 92 does not cross the main coil pattern 92 and is connected independently. Pattern 93. One end of the pattern portion 91a is an end point 91c, and the other end is a terminal 98b. One end of the pattern portion 91b is an end point 91d, and the other end is a terminal 98b. The connection pattern 93 has end points 93a and 93b on one end side, and the other end serves as a terminal 98a. Measuring means (not shown) is connected to each terminal 98a, 98b.

  Further, as shown in FIG. 8B, the printed coil pattern 83 does not intersect the main coil pattern 95 composed of two pattern portions 94a and 94b having end points, and the main coil pattern 95 is independent. The connection pattern 96 is provided. One end of the pattern portion 94a is an end point 94c, and the other end is a terminal 99a. One end of the pattern portion 94b is an end point 94d, and the other end is a terminal 99a. The connection pattern 96 has end points 96a and 96b on one end side, and the other end serves as a terminal 99a. Measuring means (not shown) is connected to each terminal 99a, 99b.

  Each of the pattern portions 91a, 91b and 94a, 94b is a spiral pattern having a substantially isosceles triangular outer edge, and the main coil patterns 92 and 95 including the pattern portions 91a, 91b and 94a, 94b are substantially the same. It has a diamond-shaped outer edge. The printed coil patterns 82 and 83 have a line-symmetric structure with the connection patterns 93 and 96 as symmetry axes, respectively, and the symmetry of the entire pattern, that is, the balance is maintained.

  On the other hand, in the printed coil pattern 82 formed on one surface of the flexible substrate 11, the end points 91c and 91d of the main coil pattern 92 are discontinuous. However, a connection pattern 96 is provided on the other surface of the flexible substrate 11 so as to connect the end points 91c and 91d (in FIG. 8B, the end points of the connection pattern 96 are located at the same positions as the end points 91c and 91d. 96a and 96b are provided). Via holes (through holes) are formed at the end points 91c, 91d and 96a, 96b, and the end points 91c, 91d and 96a, 96b are electrically connected via the via holes. Therefore, the printed coil pattern 82 is electrically connected via the connection pattern 96 arranged with the flexible substrate 11 interposed therebetween.

  Further, in the printed coil pattern 83 formed on the other surface of the flexible substrate 11, the end points 94c and 94d of the main coil pattern 95 are discontinuous. However, a connection pattern 93 is provided on one surface of the flexible substrate 11 so as to connect the end points 94c and 94d (in FIG. 8A, the end points of the connection pattern 93 are located at the same positions as the end points 94c and 94d. 93a and 93b). Via holes (through holes) are formed in the end points 94c, 94d and 93a, 93b, and the end points 94c, 94d, 93a, 93b are electrically connected via the via holes. Therefore, the printed coil pattern 83 is electrically connected via the connection pattern 93 arranged with the flexible substrate 11 interposed therebetween.

  In the sensor coil 80 according to the present embodiment, currents A91 and A92 are input from terminals 99a and 99b of a printed coil pattern (secondary coil) 83, respectively, as shown in FIG. After flowing through the secondary coil 83, the current A91 is output from the terminal 98a via the connection pattern 93. The current A92 flows through the connection pattern 96 and then is output from the terminal 98b via the primary coil 82.

  Here, in the coil for sensor, the magnetic anisotropy that can be detected efficiently is that the opposite sides of the primary coil and the secondary coil have the same current flow direction in the coil central part. This is the case where the current flow direction in the same direction is the same, and the current flow direction in the remaining opposing sides is the reverse direction.

  In the sensor coil 80 according to the present embodiment shown in FIG. 9, the flow direction of the current A92 in the coil central portion of the primary coil 82 is from the left to the right, in certain opposing sides (upper left side and lower right side). The flow direction of the current A92 is from the upper right to the lower left direction, and the flow direction of the current A92 in the remaining opposing sides (upper right side and lower left side) is from the lower right to the upper left direction. Further, the flow direction of the current A91 in the coil central portion of the secondary coil 83 is from the bottom to the top, and the flow direction of the current A91 in the opposite side portions (the upper left side and the lower right side) is from the upper right to the lower left direction. The flow direction of the current A91 in the sides (upper right side and lower left side) is from upper left to lower right. That is, in the sensor coil 80, the primary coil 82 and the secondary coil 83 have the same current flow direction in the coil center portion, the current flow direction in a certain opposite side portion, and the same direction. The direction of current flow in the remaining opposing sides is the reverse direction. Therefore, the sensor coil 80 can detect the magnetic anisotropy more efficiently than the sensor coil 10 according to the first embodiment.

  Also in the torque sensor manufactured using the sensor coil 80 according to the present embodiment, the same effects as the torque sensor manufactured using the sensor coil 10 according to the first embodiment can be obtained.

  As described above, the present invention is not limited to the above-described embodiment, and it goes without saying that various other things are assumed.

1 is a front view of a sensor coil according to a preferred embodiment of the present invention. It is a top view of the coil for sensors of FIG. 2A is a view taken in the direction of arrow 2a in FIG. 1, and FIG. 2B is a view taken in the direction of arrow 2b-2b in FIG. It is a top view which shows the flow of the electric current in the coil for sensors of FIG. FIG. 3A shows the flow of current in the printed coil pattern 12, and FIG. 3B shows the flow of current in the printed coil pattern 13. 1 is a perspective external view of a torque sensor using a sensor coil according to a preferred embodiment of the present invention. It is a cross-sectional view which shows the modification of FIG. It is a top view of one side of the coil for sensors concerning other suitable one embodiment of the present invention. It is a see-through | perspective plan view of the other surface seen from one surface of the coil for sensors concerning other suitable one embodiment of the present invention. It is a top view of the coil for sensors concerning another suitable embodiment of the present invention. FIG. 8A is a plan view of one surface, and FIG. 8B is a perspective plan view of the other surface viewed from one surface. It is a top view which shows the flow of the electric current in the coil for sensors of FIG. It is a perspective external view of the conventional torque transmission shaft body. It is a perspective external view of the torque sensor using the conventional coil for sensors.

Explanation of symbols

10 Coil for sensor 11 Flexible substrate (substrate)
12, 13 Print coil pattern 21a, 21b and 24a, 24b Pattern part 21c, 21d and 24c, 24d End point 22, 25 Main coil pattern 23, 26 Connection pattern 23a, 23b and 26a, 26b End point

Claims (11)

Each side of the flexible substrate has a printed coil pattern, and each printed coil pattern includes a main coil pattern composed of two spiral pattern portions having end points, and a connection pattern independent of the main coil pattern, With
The two spiral pattern parts are symmetrical,
The main coil pattern is arranged in a state in which the main coil pattern formed on the other surface of the substrate is rotated by 90 ° with respect to the main coil pattern formed on one surface of the substrate,
The connection in which end points of the two spiral pattern portions related to the main coil pattern formed on one surface of the substrate are arranged between the two spiral pattern portions formed on the other surface of the substrate A sensor coil characterized by being electrically connected in a pattern. Each side of the flexible substrate has a printed coil pattern, and each printed coil pattern has a plurality of main coil patterns composed of two spiral pattern portions having end points, the same number as the main coil patterns, and A plurality of connection patterns independent of the main coil pattern,
The two spiral pattern parts are symmetrical,
The plurality of main coil patterns may be formed on one of the plurality of main coil patterns formed on one surface of the substrate with respect to the substrate corresponding to the one main coil pattern. Place the main coil pattern formed on the other surface in a state rotated 90 degrees,
The end points of the two spiral pattern portion according to each one surface to the formed plurality of the main coil pattern of the substrate, during forming the other surface was the two spiral pattern portion of the substrate A sensor coil, wherein the sensor coils are electrically connected by the plurality of connection patterns arranged . Sensor coil according to claim 1 or 2 the two spiral pattern portions are arranged in point symmetry. Sensor coil according to claim 1 or 2 the two spiral pattern portions are arranged in line symmetry. The spiral pattern unit may have a substantially isosceles triangular outer edge, and the coil sensor according to claims 1 to 4 or the main coil pattern to suit each swirl pattern portion has a substantially rhombic shape of the outer edge . A magnetic sensor comprising the sensor coil according to any one of claims 1 to 5 in proximity to or away from a sensing object to be sensed. The magnetic sensor according to claim 6 , wherein a magnetic yoke is disposed on a surface of the sensor coil that is not on the sensing object side to be sensed. 8. The magnetic sensor according to claim 7 , wherein the magnetic yoke is a single layer of magnetic thin plates or a laminated body in which magnetic thin plates are stacked in multiple layers. The magnetic sensor according to claim 8 , wherein the magnetic thin plate is a magnetic ribbon. The magnetic sensor according to claim 9 , wherein the thickness of the magnetic ribbon is 5 to 100 μm. The magnetic sensor according to claim 9 or 10 , wherein the magnetic ribbon is an amorphous magnetic ribbon.

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