JP4626190B2 - Electronic component transfer method and transfer device - Google Patents

Electronic component transfer method and transfer device Download PDF

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JP4626190B2
JP4626190B2 JP2004165321A JP2004165321A JP4626190B2 JP 4626190 B2 JP4626190 B2 JP 4626190B2 JP 2004165321 A JP2004165321 A JP 2004165321A JP 2004165321 A JP2004165321 A JP 2004165321A JP 4626190 B2 JP4626190 B2 JP 4626190B2
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holding jig
adhesive layer
electronic component
thickness
adhesive
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JP2005347508A (en
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明 溝井
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Murata Manufacturing Co Ltd
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本発明はチップコンデンサやチップ抵抗のようなチップ型電子部品を保持治具間で移し替える方法および装置に関するものである。
より詳しくは、チップ型電子部品の両端面に外部電極を形成する場合などにおいて、粘着層を備えた保持治具間で電子部品を移し替える方法および装置に関するものである。
The present invention relates to a method and apparatus for transferring a chip-type electronic component such as a chip capacitor or a chip resistor between holding jigs.
More specifically, the present invention relates to a method and apparatus for transferring an electronic component between holding jigs provided with an adhesive layer in the case where external electrodes are formed on both end faces of a chip-type electronic component.

従来、チップ型電子部品の両端面に外部電極を形成するには、電子部品の一方端面を保持治具で保持して、他方端面を外部電極ペーストに浸漬して塗布するという方法を採用している。そして、一方端面に塗布した外部電極ペーストを乾燥させ、次に外部電極ペーストを塗布した端面を別の保持治具で保持して他方端面にも同様に外部電極ペーストを塗布している。 Conventionally, in order to form external electrodes on both end surfaces of a chip-type electronic component, a method is adopted in which one end surface of the electronic component is held by a holding jig and the other end surface is dipped in an external electrode paste and applied. Yes. Then, the external electrode paste applied to one end face is dried, then the end face to which the external electrode paste is applied is held by another holding jig, and the external electrode paste is similarly applied to the other end face.

このような外部電極の形成に用いる保持治具として、特許文献1に記載のような硬質板上にシリコーンゴムなどの粘着層を形成し、粘着層に電子部品の端面を粘着保持するものが使われている。電子部品の両端面に外部電極を形成するには、電子部品の端面の持ち替えを行う必要があるが、そのためには1回目の塗布時に保持していた第1保持治具の粘着力より強い粘着力を有する第2保持治具に電子部品を押し付け、電子部品を第1保持治具から第2保持治具へ移し替えなければならない。
特開平4−291712号公報
As a holding jig used for forming such an external electrode, an adhesive layer such as silicone rubber is formed on a hard plate as described in Patent Document 1, and an end face of an electronic component is adhered and held on the adhesive layer. It has been broken. In order to form external electrodes on both end faces of the electronic component, it is necessary to change the end face of the electronic component. For this purpose, the adhesion is stronger than the adhesive force of the first holding jig held at the first application. The electronic component must be pressed against the second holding jig having a force, and the electronic component must be transferred from the first holding jig to the second holding jig.
JP-A-4-291712

従来では、第1保持治具と第2保持治具の粘着力に差をつけるには、粘着層の材質を変えるしか方法がなかった。しかし、粘着層を構成する材料自体の粘着力バラツキにより、粘着力差が不安定であり、移し替えミスが発生しやすいという問題があった。
第1保持治具と第2保持治具の粘着力差を大きくできない原因は、外部電極の形成方法にもある。例えば、第1保持治具に保持された電子部品の一方端面に外部電極ペーストを塗布した後、乾燥工程が実施されるが、乾燥時の熱によってシリコーンゴムよりなる粘着層の粘着力が増加するという現象が生じる。そのため、第1保持治具と第2保持治具の粘着力差が小さくなり、一層移し替えミスが発生しやすい。
また、粘着層の粘着力は押し付け回数によっても変化するという性質がある。第1保持治具から第2保持治具へ電子部品を移し替えする際、電子部品は既に第1保持治具の粘着層に対して押し付けられた後であるから、第1保持治具の押し付け回数は2回目となる。これに対して、第2保持治具は1回目であるから、粘着力を高く設定すべき第2保持治具の方が第1保持治具に比べて押し付け回数が少なく、その結果、粘着力差を出しにくい。
Conventionally, the only way to make a difference in the adhesive force between the first holding jig and the second holding jig is to change the material of the adhesive layer. However, due to variations in the adhesive strength of the material constituting the adhesive layer, there is a problem that the difference in adhesive strength is unstable and transfer errors are likely to occur.
The reason why the difference in adhesive force between the first holding jig and the second holding jig cannot be increased is also the method of forming the external electrode. For example, after applying the external electrode paste to one end surface of the electronic component held by the first holding jig, a drying process is performed, but the adhesive force of the adhesive layer made of silicone rubber increases due to heat during drying. The phenomenon that occurs. Therefore, the difference in adhesive force between the first holding jig and the second holding jig is reduced, and a transfer error is more likely to occur.
Further, the adhesive strength of the adhesive layer has a property of changing depending on the number of pressings. When the electronic component is transferred from the first holding jig to the second holding jig, the electronic component is already pressed against the adhesive layer of the first holding jig. This is the second time. On the other hand, since the second holding jig is the first time, the second holding jig whose adhesive force should be set higher has a smaller number of times of pressing than the first holding jig. Difficult to make a difference.

そこで、本発明の目的は、簡単な構成で第1保持治具と第2保持治具の間で安定した粘着力差を発生させ、第1保持治具から第2保持治具への移し替えミスの発生を防止できる電子部品の移し替え方法および移し替え装置を提供することにある。 Therefore, an object of the present invention is to generate a stable adhesive force difference between the first holding jig and the second holding jig with a simple configuration, and to transfer from the first holding jig to the second holding jig. An object of the present invention is to provide an electronic component transfer method and transfer device that can prevent occurrence of mistakes.

上記目的を達成するため、請求項1にかかる発明は、硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える方法において、上記第1保持治具の粘着層と第2保持治具の粘着層は同一材料よりなり、上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え方法を提供する。 In order to achieve the above object, the invention according to claim 1 uses a first holding jig in which an adhesive layer is formed on a hard plate and a second holding jig in which an adhesive layer is formed on a hard plate. With the first end surface of the chip-type electronic component being adhesively held on the adhesive layer of the 1 holding jig, the adhesive layer of the second holding jig is pressed against the second end surface facing the first end surface of the electronic component, By pulling the 2 holding jig away from the first holding jig in the direction perpendicular to the adhesive surface of the adhesive layer, the electronic component is moved from the first holding jig to the second holding jig by the difference in adhesive force of the adhesive layer. The adhesive layer of the first holding jig and the adhesive layer of the second holding jig are made of the same material, and the thickness of the adhesive layer of the first holding jig and the adhesive layer of the second holding jig Are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is that of the adhesive layer of the first holding jig. Provides a sorting method of the electronic component, characterized in that Mino is 1/2 or less.

請求項2にかかる発明は、硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える方法において、上記第2保持治具の粘着層は第1保持治具の粘着層に比べて粘着性が強い材料よりなり、上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え方法を提供する。 The invention according to claim 2 uses the first holding jig in which the adhesive layer is formed on the hard plate and the second holding jig in which the adhesive layer is formed on the hard plate, and the adhesive layer of the first holding jig. The adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component in a state where the first end face of the chip-type electronic component is adhesively held thereon, and the second holding jig is moved to the first end face. In the method of transferring the electronic component from the first holding jig to the second holding jig due to the difference in the adhesive force of the adhesive layer by pulling it away from the holding jig in a direction perpendicular to the adhesive surface of the adhesive layer, The adhesive layer of the second holding jig is made of a material having higher adhesiveness than the adhesive layer of the first holding jig, and the thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig. Are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is 1 / th of the thickness of the adhesive layer of the first holding jig. It provides a sorting method of the electronic component, wherein the or less.

請求項3にかかる発明は、硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える装置において、上記第1保持治具の粘着層と第2保持治具の粘着層は同一材料よりなり、上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え装置を提供する。 The invention according to claim 3 uses the first holding jig in which the adhesive layer is formed on the hard plate and the second holding jig in which the adhesive layer is formed on the hard plate, and the adhesive layer of the first holding jig. The adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component in a state where the first end face of the chip-type electronic component is adhesively held thereon, and the second holding jig is moved to the first end face. In the apparatus for transferring the electronic component from the first holding jig to the second holding jig due to a difference in the adhesive force of the adhesive layer by pulling away from the holding jig in a direction perpendicular to the adhesive surface of the adhesive layer, The adhesive layer of the first holding jig and the adhesive layer of the second holding jig are made of the same material, and the thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig are both 2 mm or less. There, and the thickness of the adhesive layer of the second holding jig is 1/2 or less of the thickness of the adhesive layer of the first holding jig this Providing sorter electronic component characterized by.

請求項4にかかる発明は、硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える装置において、上記第2保持治具の粘着層は第1保持治具の粘着層に比べて粘着性が強い材料よりなり、上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え装置を提供する。 The invention according to claim 4 uses the first holding jig in which the adhesive layer is formed on the hard plate and the second holding jig in which the adhesive layer is formed on the hard plate, and the adhesive layer of the first holding jig. The adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component in a state where the first end face of the chip-type electronic component is adhesively held thereon, and the second holding jig is moved to the first end face. In the apparatus for transferring the electronic component from the first holding jig to the second holding jig due to a difference in the adhesive force of the adhesive layer by pulling away from the holding jig in a direction perpendicular to the adhesive surface of the adhesive layer, The adhesive layer of the second holding jig is made of a material having higher adhesiveness than the adhesive layer of the first holding jig, and the thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig. Are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is 1 / th of the thickness of the adhesive layer of the first holding jig. Providing sorter of electronic components, characterized in that at most.

本発明者は、硬質板上に形成した粘着層の厚みを変えることによって、チップ型電子部品に対する粘着力が変化すること、特に粘着層の厚みを薄くすると粘着力が増加することを発見した。通常、粘着層の厚みを厚くすれば、それだけ電子部品との接触面積が増大して粘着力が増加するように予想されるが、実際には粘着層の厚みを薄くした方が粘着力が増加する。その理由は、一定の力で電子部品の端面を粘着層に押しつけた時、粘着層が厚いと、粘着層自体が弾性体であるため、その弾性変形により押し付け力が拡散し、粘着力を決定する粘着界面での密着力が弱まるからであると推定される。粘着層を薄くすると、弾性変形量が小さくなり、押し付け力の拡散が小さくなるため、同じ押し付け力を与えた場合、粘着界面の密着力が増すと考えられる。
請求項1では、粘着層の材質は同じでも、その厚みを変えることにより、粘着層を構成する材料の粘着力バラツキに関係なく、第1保持治具と第2保持治具との間に安定した粘着力差を確保することができる。その結果、移し替えミスの発生を抑制できる。
The present inventor has found that the adhesive force on the chip-type electronic component changes by changing the thickness of the adhesive layer formed on the hard plate, and in particular, the adhesive force increases when the thickness of the adhesive layer is reduced. Normally, increasing the thickness of the adhesive layer is expected to increase the contact area with the electronic component and increase the adhesive force, but in reality the adhesive force increases with the thinner adhesive layer. To do. The reason is that when the end face of the electronic component is pressed against the adhesive layer with a certain force, if the adhesive layer is thick, the adhesive layer itself is an elastic body. This is presumably because the adhesive strength at the adhesive interface is weakened. When the pressure-sensitive adhesive layer is thinned, the amount of elastic deformation is reduced and the diffusion of the pressing force is reduced. Therefore, it is considered that the adhesion force at the adhesive interface increases when the same pressing force is applied.
In claim 1, even if the material of the adhesive layer is the same, by changing the thickness, the adhesive layer is stable between the first holding jig and the second holding jig regardless of variations in the adhesive strength of the material constituting the adhesive layer. It is possible to ensure a difference in adhesive strength. As a result, occurrence of transfer mistakes can be suppressed.

請求項2は、粘着層の厚みを変えると同時に、粘着層自体の材質を変えることにより、第1保持治具と第2保持治具との間に大きな粘着力差を安定して確保できるようにしたものである。
ここで、第2保持治具の粘着層は第1保持治具の粘着層に比べて粘着性が強い材料よりなり、第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みに比べて薄く形成されている。
According to the second aspect of the present invention, it is possible to stably secure a large difference in adhesive force between the first holding jig and the second holding jig by changing the thickness of the adhesive layer and changing the material of the adhesive layer itself. It is a thing.
Here, the adhesive layer of the second holding jig is made of a material having higher adhesiveness than the adhesive layer of the first holding jig, and the thickness of the adhesive layer of the second holding jig is the adhesive layer of the first holding jig. It is formed thinner than the thickness.

請求項3に記載の移し替え装置は請求項1に記載の移し替え方法を実施する装置であり、請求項4に記載の移し替え装置は請求項2に記載の移し替え方法を実施する装置である。
いずれも請求項1または2と同様の作用効果を発揮できる。
The transfer device according to claim 3 is a device that performs the transfer method according to claim 1, and the transfer device according to claim 4 is a device that performs the transfer method according to claim 2. is there.
In either case, the same effects as those of the first or second aspect can be exhibited.

請求項5のように、第1保持治具および第2保持治具の硬質板の主面から粘着層の表面までの距離がほぼ等しくなるように、少なくとも第2保持治具の硬質板の主面上に所定高さの台座を設け、この台座上に粘着層を形成するのがよい。
第1,第2保持治具を外部電極の塗布作業に用いた場合、保持治具の硬質板をチャック装置で保持して外部電極ペーストが塗布された槽に電子部品の端面を浸漬させる必要がある。このとき、電子部品の両端面に塗布される外部電極ペーストの塗布量を一定にするため、浸漬深さを一定にする必要がある。第1保持治具で保持して一方端面に塗布するときと、第2保持治具で保持して他方端面を塗布するときとで、保持治具の塗布層の底面からの距離を一定にする方が、浸漬深さを一定にする上で好ましい。
請求項5では、第2保持治具の硬質板の主面上に所定高さの台座を設け、この台座上に粘着層を形成することで、硬質板の主面から粘着層の表面までの距離がほぼ等しく設定される。そのため、第1保持治具と第2保持治具とで塗布層の底面からの距離を一定にすれば、浸漬深さを一定にでき、電子部品の両端面に塗布される外部電極ペーストの塗布量を一定にできる。
なお、台座の形成領域は粘着層の形成領域より大きくてもよいし、電子部品を粘着する領域より大きければ、粘着層の形成領域より小さくてもよい。台座は、硬質板に一体に形成してもよいし、硬質板上に別部材を固定してもよい。台座の材料は、粘着層に比べて硬度の高い材料であればよく、金属材料、樹脂材料さらには弾性材料でもよい。
また、台座は少なくとも第2保持治具に形成されるが、第1保持治具にも同様に形成してもよい。この場合は、第1保持治具と第2保持治具とで台座の高さが異なる。
As in claim 5, at least the main plate of the hard plate of the second holding jig so that the distance from the main surface of the hard plate of the first holding jig and the second holding jig to the surface of the adhesive layer is substantially equal. It is preferable to provide a pedestal having a predetermined height on the surface and form an adhesive layer on the pedestal.
When the first and second holding jigs are used for the external electrode application work, it is necessary to hold the hard plate of the holding jig with the chuck device and immerse the end face of the electronic component in the tank to which the external electrode paste has been applied. is there. At this time, in order to make the application amount of the external electrode paste applied to both end faces of the electronic component constant, it is necessary to make the immersion depth constant. The distance from the bottom surface of the coating layer of the holding jig is constant between when holding with the first holding jig and applying to the one end face, and holding with the second holding jig and applying the other end face. This is preferable for making the immersion depth constant.
In Claim 5, from the main surface of a hard board to the surface of an adhesion layer by providing the base of predetermined height on the main surface of the hard board of a 2nd holding jig, and forming an adhesion layer on this base. The distances are set approximately equal. Therefore, if the distance from the bottom surface of the coating layer is made constant between the first holding jig and the second holding jig, the immersion depth can be made constant, and the external electrode paste applied to both end faces of the electronic component can be applied. The amount can be constant.
The pedestal formation region may be larger than the adhesion layer formation region, or may be smaller than the adhesion layer formation region as long as it is larger than the region where the electronic component is adhered. The pedestal may be formed integrally with the hard plate, or another member may be fixed on the hard plate. The material of the pedestal may be a material having a higher hardness than the adhesive layer, and may be a metal material, a resin material, or an elastic material.
The pedestal is formed at least on the second holding jig, but may be formed on the first holding jig in the same manner. In this case, the height of the base differs between the first holding jig and the second holding jig.

請求項6のように、台座を粘着層の形成領域とほぼ等しい領域に形成するのがよい。
粘着層は、硬質板の主面に凹型の注型金型を接触させ、注型金型の内部空間に粘着材料を注型し、硬化させることで形成できる。その場合、請求項5のように硬質板の主面に台座を形成しておくことで、粘着層の厚みを容易に変えることができる。
台座と粘着層の形成領域を同じに設定すれば、粘着層を形成するための注型金型として、第1保持治具と第2保持治具とで同じものを使用でき、製造コストを低減できる。
As in claim 6, the pedestal is preferably formed in a region substantially equal to the region where the adhesive layer is formed.
The adhesive layer can be formed by bringing a concave casting mold into contact with the main surface of the hard plate, casting an adhesive material in the interior space of the casting mold, and curing it. In that case, the thickness of the adhesive layer can be easily changed by forming a pedestal on the main surface of the hard plate as in claim 5.
If the formation area of the pedestal and the adhesive layer is set to be the same, the same mold can be used for the first holding jig and the second holding jig as the casting mold for forming the adhesive layer, thereby reducing the manufacturing cost. it can.

本発明では、第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みを共に2mm以下とし、かつ第2保持治具の粘着層の厚みを第1保持治具の粘着層の厚みの1/2以下としている
本発明者が粘着層の厚みを変えてその粘着力を測定したところ、上記の条件とした場合に、第2保持治具の粘着層の粘着力は第1保持治具の粘着層の粘着力の約1.5倍となり、大きな粘着力差を得ることができた。
In the present invention, the thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is the adhesive of the first holding jig. It is set to 1/2 or less of the thickness of the layer.
When the inventor changed the thickness of the pressure-sensitive adhesive layer and measured the pressure-sensitive adhesive strength, the pressure-sensitive adhesive force of the pressure-sensitive adhesive layer of the second holding jig was the same as that of the pressure-sensitive adhesive layer of the first holding jig. Thus, a large difference in adhesive strength was obtained.

以上のように、請求項1によれば、粘着層の材質は同じでも、その厚みを変えることにより、粘着層を構成する材料の粘着力バラツキに関係なく、第1保持治具と第2保持治具との間に安定した粘着力差を確保することができる。その結果、第1保持治具から第2保持治具への電子部品の移し替えミスの発生を抑制できる。 As described above, according to the first aspect, even if the material of the adhesive layer is the same, by changing the thickness, the first holding jig and the second holding jig can be used regardless of the adhesive force variation of the material constituting the adhesive layer. A stable adhesive force difference can be ensured between the jig and the jig. As a result, it is possible to suppress occurrence of an error in transferring the electronic component from the first holding jig to the second holding jig.

請求項2によれば、粘着層の厚みを変えると同時に、粘着層自体の材質を変えたので、第1保持治具と第2保持治具との間に大きな粘着力差を安定して確保できる。そのため、第1保持治具から第2保持治具への電子部品の移し替えミスの発生をさらに抑制できる。 According to the second aspect, since the material of the adhesive layer itself is changed at the same time when the thickness of the adhesive layer is changed, a large adhesive force difference is stably secured between the first holding jig and the second holding jig. it can. Therefore, it is possible to further suppress the occurrence of an error in transferring the electronic component from the first holding jig to the second holding jig.

以下に、本発明の実施の形態を、実施例を参照して説明する。 Embodiments of the present invention will be described below with reference to examples.

図1は本発明にかかる電子部品Pの移し替え装置の第1実施例を示す。
この移し替え装置は、第1保持治具1と第2保持治具2とで構成されている。第1保持治具1は、硬質板11の上に一定厚みの粘着層12を形成したものである。硬質板11の材質としては、ステンレスなどの金属や、エポキシ系やアクリル系などの硬質樹脂、さらにはセラミック材料などで構成されている。粘着層12は例えばシリコーンゴムのような表面に粘着性を持つ粘弾性体で構成されており、その表面に電子部品Pの端面を粘着保持することができる。
FIG. 1 shows a first embodiment of an electronic component P transfer device according to the present invention.
This transfer device includes a first holding jig 1 and a second holding jig 2. The first holding jig 1 is formed by forming an adhesive layer 12 having a certain thickness on a hard plate 11. The material of the hard plate 11 is made of metal such as stainless steel, hard resin such as epoxy or acrylic, and further ceramic material. The adhesive layer 12 is made of a viscoelastic material having adhesiveness on the surface, such as silicone rubber, and can hold the end face of the electronic component P on the surface.

第2保持治具2も第1保持治具1と同様に、硬質板21の上に一定厚みの粘着層22を形成したものであり、硬質板21および粘着層22の材質は第1保持治具1の硬質板11および粘着層12と同様である。粘着層22は粘着層12に比べて薄肉に形成されており、粘着層12,22の厚みはともに2mm以下で、粘着層22の厚みd2は粘着層12の厚みd1の1/2以下とするのが望ましい。ここでは、粘着層12の厚みd1を1.6mmとし、粘着層22の厚みd2を0.8mmとした。
上記のように第2保持治具2の粘着層22は、第1保持治具1の粘着層12と同一材料であるが、薄肉に形成されているため、粘着層22の粘着力を粘着層12より強くすることができる。
Similarly to the first holding jig 1, the second holding jig 2 is formed by forming an adhesive layer 22 having a certain thickness on the hard plate 21, and the material of the hard plate 21 and the adhesive layer 22 is the first holding jig. The same as the hard plate 11 and the adhesive layer 12 of the tool 1. The pressure-sensitive adhesive layer 22 is formed thinner than the pressure-sensitive adhesive layer 12, the thickness of each of the pressure-sensitive adhesive layers 12 and 22 is 2 mm or less, and the thickness d2 of the pressure-sensitive adhesive layer 22 is ½ or less of the thickness d1 of the pressure-sensitive adhesive layer 12. Is desirable. Here, the thickness d1 of the adhesive layer 12 was 1.6 mm, and the thickness d2 of the adhesive layer 22 was 0.8 mm.
As described above, the adhesive layer 22 of the second holding jig 2 is made of the same material as the adhesive layer 12 of the first holding jig 1, but is formed to be thin, so that the adhesive force of the adhesive layer 22 is increased. Can be stronger than 12.

ここで、同一材料(シリコーンゴム)で厚みの異なる2種類の粘着層12,22の粘着力を測定した。図2は測定に用いた装置を示す。
図2において、30は保持治具1,2を載置した基台、31は基台30に立設された支柱、32は支柱31に昇降可能に設けられた昇降台、33は昇降台32に直動ベアリング34を介して上下動自在に設けられたロッド、35はロッド33の途中に設けられたロードセル、36はロッド33の下端部に設けられた測定端子である。測定条件は以下の通りである。
測定端子:直径φ7mmの円柱形状
押し付け圧力:1750gf
押し付け時間:7秒
引き上げ速度:3mm/秒
粘着層12,22の粘着力は、上記条件で測定端子36を粘着層に押しつけた後、測定端子36を引き上げた時の測定端子36が粘着層に引っ張られる力をロードセル35で測定したものである。
Here, the adhesive force of two types of adhesive layers 12 and 22 made of the same material (silicone rubber) and having different thicknesses was measured. FIG. 2 shows the apparatus used for the measurement.
In FIG. 2, reference numeral 30 denotes a base on which the holding jigs 1 and 2 are placed, 31 denotes a support column erected on the base 30, 32 denotes an elevator base that can be raised and lowered on the support pillar 31, and 33 denotes an elevator base 32. Further, a rod 35 is provided so as to be movable up and down via a linear motion bearing 34, 35 is a load cell provided in the middle of the rod 33, and 36 is a measurement terminal provided at the lower end of the rod 33. The measurement conditions are as follows.
Measurement terminal: Cylindrical pressing pressure of φ7mm diameter: 1750gf
Pressing time: 7 seconds Pulling speed: 3 mm / second The adhesive strength of the adhesive layers 12 and 22 is that the measuring terminal 36 is pulled up to the adhesive layer when the measuring terminal 36 is pulled up after pressing the measuring terminal 36 against the adhesive layer under the above conditions. The pulling force is measured by the load cell 35.

表1は、上記条件で粘着層12,22の粘着力を測定した結果を示す。
表1から明らかなように、厚みの薄い粘着層22は厚みの厚い粘着層12に対して1.5倍以上の粘着力を有することがわかる。

Figure 0004626190
Table 1 shows the results of measuring the adhesive strength of the adhesive layers 12 and 22 under the above conditions.
As is clear from Table 1, it can be seen that the thin adhesive layer 22 has an adhesive force of 1.5 times or more that of the thick adhesive layer 12.
Figure 0004626190

図3は上記保持治具1,2を用いたチップ型電子部品Pの移し替え方法の一例を示す。
(a)のように第1保持治具1の粘着層12の上に電子部品Pの一方端面P1を粘着保持しておき、第1保持治具1の上方に粘着層22を下向きにして第2保持治具2を配置する。次に、(b)のように電子部品Pの端面P1と対向する他方端面P2に第2保持治具2の粘着層22を押し付ける。この時の押し付け力は、電子部品Pが両方の粘着面12,22に対して多少沈み込む程度とするのがよい。次に、(c)のように第2保持治具2を第1保持治具1から引き離すと、薄い粘着層22と電子部品Pの他方端面P2との粘着力の方が厚い粘着層12と電子部品Pの一方端面P1との粘着力より大きいので、その粘着力差によって電子部品Pは第1保持治具1から第2保持治具2へと移し替えられる。
表1に示したように、同一の押し付け圧力が作用した場合、粘着層22は粘着層12の約1.5倍の粘着力を持つので、電子部品Pは第1保持治具1から第2保持治具2へと確実に移し替えられ、移し替えミスの発生が少ない。
FIG. 3 shows an example of a method for transferring the chip-type electronic component P using the holding jigs 1 and 2.
As shown in (a), the first end surface P1 of the electronic component P is adhesively held on the adhesive layer 12 of the first holding jig 1, and the adhesive layer 22 faces downward above the first holding jig 1. 2 The holding jig 2 is arranged. Next, the adhesive layer 22 of the second holding jig 2 is pressed against the other end surface P2 facing the end surface P1 of the electronic component P as shown in FIG. The pressing force at this time is preferably set such that the electronic component P sinks somewhat with respect to both the adhesive surfaces 12 and 22. Next, when the second holding jig 2 is pulled away from the first holding jig 1 as shown in (c), the adhesive layer 12 having a thicker adhesive force between the thin adhesive layer 22 and the other end surface P2 of the electronic component P Since the adhesive strength with the one end surface P1 of the electronic component P is larger, the electronic component P is transferred from the first holding jig 1 to the second holding jig 2 due to the adhesive force difference.
As shown in Table 1, when the same pressing pressure is applied, the adhesive layer 22 has an adhesive force about 1.5 times that of the adhesive layer 12, so that the electronic component P is moved from the first holding jig 1 to the second. Transfer to the holding jig 2 is ensured, and transfer errors are less likely to occur.

電子部品Pの端面P1,P2に外部電極を形成する場合には、第1保持治具1の粘着層12の上に電子部品Pを粘着保持した状態で電極ペーストの塗布、乾燥工程が実施されるが、乾燥時の熱によって第1保持治具1の粘着層12の粘着力が増加し、第2保持治具2の粘着層22との粘着力差が減少する。また、図3の(b)の段階で第1保持治具1の押し付け回数は2回目であるのに対し、第2保持治具2の押し付け回数は1回目であるため、第1保持治具1と第2保持治具2との粘着力差が小さくなる。しかしながら、上記のように粘着層22は粘着層12の1.5倍以上の粘着力を有するので、上記のような粘着力差の減少や粘着力バラツキがあっても十分な粘着力差を確保でき、電子部品Pを第1保持治具1から第2保持治具2へと確実に移し替えることができる。 When the external electrodes are formed on the end faces P1 and P2 of the electronic component P, the electrode paste is applied and dried while the electronic component P is adhesively held on the adhesive layer 12 of the first holding jig 1. However, the adhesive force of the adhesive layer 12 of the first holding jig 1 increases due to heat during drying, and the difference in adhesive force with the adhesive layer 22 of the second holding jig 2 decreases. Further, since the number of times of pressing the first holding jig 1 is the second time in the stage of FIG. 3B, the number of pressing times of the second holding jig 2 is the first time. The adhesive force difference between 1 and the second holding jig 2 is reduced. However, as described above, the adhesive layer 22 has an adhesive force that is 1.5 times or more that of the adhesive layer 12, so that a sufficient adhesive force difference is ensured even if there is a decrease in the adhesive force difference or an adhesive force variation as described above. The electronic component P can be reliably transferred from the first holding jig 1 to the second holding jig 2.

図4は第1保持治具1と第2保持治具2の第2実施例を示す。
第1保持治具1は第1実施例と同様であるが、第2保持治具2は、硬質板21の上に粘着層22の形成領域と等しい大きさの台座23が形成されており、粘着層22はこの台座23の上に形成されている。そして、硬質板21の主面から粘着層22の表面までの高さH2は、第1保持治具1の硬質板11の主面から粘着層12の表面までの高さH1と等しく設定されている。
この場合も、第1保持治具1の粘着層12の厚みd1に比べて、第2保持治具2の粘着層22の厚みd2が薄いので、その粘着力は粘着層12より大きい。
FIG. 4 shows a second embodiment of the first holding jig 1 and the second holding jig 2.
The first holding jig 1 is the same as that of the first embodiment, but the second holding jig 2 has a base 23 having a size equal to the formation area of the adhesive layer 22 on the hard plate 21. The adhesive layer 22 is formed on the pedestal 23. The height H2 from the main surface of the hard plate 21 to the surface of the adhesive layer 22 is set equal to the height H1 from the main surface of the hard plate 11 of the first holding jig 1 to the surface of the adhesive layer 12. Yes.
Also in this case, since the thickness d2 of the adhesive layer 22 of the second holding jig 2 is thinner than the thickness d1 of the adhesive layer 12 of the first holding jig 1, the adhesive force thereof is larger than that of the adhesive layer 12.

第2実施例の保持治具1,2の粘着層12,22は、図5に示す方法で製造できる。
(a)は第1保持治具1の製造方法を示し、硬質板11の上に凹状の注型金型40を配置し、注入口41から注型金型40の内部空間42に粘着材料を注入した後、この粘着材料を硬化させることにより、硬質板11上に粘着層12を形成できる。
(b)は第2保持治具2の製造方法を示す。硬質板21には台座23が形成されているので、第1保持治具1の製造に用いた同じ注型金型40を台座23に嵌合させ、注入口41から注型金型40の内部空間42に粘着材料を注入した後、この粘着材料を硬化させることにより、台座23上に粘着層22を形成できる。
このように、硬質板21に台座23を設けることにより、1つの注型金型40で厚みの異なる粘着層12,22を形成することができ、製造コストを低減できる。
The adhesive layers 12 and 22 of the holding jigs 1 and 2 of the second embodiment can be manufactured by the method shown in FIG.
(A) shows the manufacturing method of the 1st holding jig 1, arrange | positions the concave casting metal mold | die 40 on the hard board 11, and sticks adhesive material from the inlet 41 to the internal space 42 of the casting metal mold | die 40. FIG. After the injection, the adhesive layer 12 can be formed on the hard plate 11 by curing the adhesive material.
(B) shows the manufacturing method of the 2nd holding jig 2. FIG. Since the pedestal 23 is formed on the hard plate 21, the same casting mold 40 used for manufacturing the first holding jig 1 is fitted into the pedestal 23, and the inside of the casting mold 40 is injected from the inlet 41. After the adhesive material is injected into the space 42, the adhesive layer 22 can be formed on the pedestal 23 by curing the adhesive material.
Thus, by providing the base 23 on the hard plate 21, the adhesive layers 12 and 22 having different thicknesses can be formed with one casting mold 40, and the manufacturing cost can be reduced.

図6は外部電極を形成するために、第2実施例の保持治具で保持した電子部品の端面を電極ペースト51が塗布された塗布槽50に浸漬した状態を示す。 (a)は第1保持治具1を用いた場合、(b)は第2保持治具を用いた場合である。
図6から明らかなように、2種類の保持治具1,2の硬質板11,21の主面から粘着層12,22の表面までの高さH1,H2が等しいので、硬質板11,21から塗布槽50の底面までの距離Sを一定にすれば、電子部品Pの端面の電極ペースト51への浸漬深さを一定にできる。つまり、電子部品Pの両端面に形成される外部電極の塗布量を容易に同一とすることができる。
FIG. 6 shows a state in which the end face of the electronic component held by the holding jig of the second embodiment is immersed in the coating tank 50 coated with the electrode paste 51 in order to form the external electrode. (A) is a case where the first holding jig 1 is used, and (b) is a case where the second holding jig is used.
As is apparent from FIG. 6, since the heights H1 and H2 from the main surfaces of the hard plates 11 and 21 of the two types of holding jigs 1 and 2 to the surfaces of the adhesive layers 12 and 22 are equal, If the distance S from the coating tank 50 to the bottom surface of the coating tank 50 is made constant, the immersion depth of the end face of the electronic component P in the electrode paste 51 can be made constant. That is, the application amount of the external electrode formed on both end faces of the electronic component P can be easily made the same.

図7は保持治具の第3実施例を示す。
第1実施例では、第1,第2の保持治具として硬質板上に粘着層を直接形成したものを使用し、第2実施例では第2保持治具のみの硬質板上に台座を形成したものを使用したが、図7に示すように、両方の保持治具1,2の硬質板上に、厚みの異なる台座13,23を設けることも可能である。
この場合には、硬質板11,21の主面から粘着層12,22の表面までの高さH1,H2を、粘着層12,13の厚みd1,d2に関係なく任意に設定することが可能である。なお、硬質板11,21の主面から粘着層12,22の表面までの高さH1,H2を等しくするのが望ましい。
FIG. 7 shows a third embodiment of the holding jig.
In the first embodiment, the first and second holding jigs are formed by directly forming an adhesive layer on a hard plate. In the second embodiment, a pedestal is formed on the hard plate having only the second holding jig. However, as shown in FIG. 7, pedestals 13 and 23 having different thicknesses can be provided on the hard plates of both holding jigs 1 and 2.
In this case, the heights H1 and H2 from the main surfaces of the hard plates 11 and 21 to the surfaces of the adhesive layers 12 and 22 can be arbitrarily set regardless of the thicknesses d1 and d2 of the adhesive layers 12 and 13. It is. It is desirable to make the heights H1 and H2 from the main surfaces of the hard plates 11 and 21 to the surfaces of the adhesive layers 12 and 22 equal.

上記第1〜第3実施例では、第1,第2の保持治具の粘着層を同一材料で形成したが、異なる材料で形成してもよい。特に、第2保持治具2の粘着層22を第1保持治具1の粘着層12より粘着力の強い材料で形成すれば、両粘着層12,22の厚みの違いによる効果と相俟って、粘着力差をさらに拡大することができ、移し替えミスをさらに低減できる。
粘着力の異なる材料としては、シリコーンゴム、ブチルゴム、ウレタンゴムなどの組成そのものが異なる場合のほか、粘着材料に含まれる添加剤の量が異なる場合や、粘着材料の硬化条件が異なる場合などがある。
In the first to third embodiments, the adhesive layers of the first and second holding jigs are formed of the same material, but may be formed of different materials. In particular, if the adhesive layer 22 of the second holding jig 2 is made of a material having a higher adhesive strength than the adhesive layer 12 of the first holding jig 1, this is combined with the effect of the difference in thickness between the adhesive layers 12 and 22. Thus, the difference in adhesive strength can be further increased, and transfer errors can be further reduced.
As materials with different adhesive strength, there are cases where the composition itself of silicone rubber, butyl rubber, urethane rubber, etc. is different, the amount of additives contained in the adhesive material is different, and the curing conditions of the adhesive material are different. .

また、硬質板上に台座を設ける場合、台座の広さは粘着層と同じにする必要はなく、粘着層より広い面積に形成することもできるし、粘着層より狭い面積とすることもできる。但し、台座を粘着層より狭い面積とする場合、台座の面積は少なくとも電子部品を粘着保持する領域より広くする必要がある。
本発明にかかる保持治具は、電子部品の端面への外部電極の形成だけでなく、他の用途にも用いることができることは勿論である。
Moreover, when providing a base on a hard board, it is not necessary to make the width of a base the same as an adhesive layer, and it can also form in an area wider than an adhesive layer, and can also be made into an area narrower than an adhesive layer. However, when the pedestal has a smaller area than the adhesive layer, the area of the pedestal needs to be larger than at least the region where the electronic component is adhesively held.
Of course, the holding jig according to the present invention can be used not only for the formation of the external electrode on the end face of the electronic component but also for other uses.

本発明にかかる移し替え装置に用いられる保持治具の第1実施例の側面図である。It is a side view of 1st Example of the holding jig used for the transfer apparatus concerning this invention. 粘着力の測定装置の一例を示す側面図である。It is a side view which shows an example of the measuring apparatus of adhesive force. 図1に示す保持治具を用いて電子部品の移し替えを行う方法を示す工程図である。It is process drawing which shows the method of transferring an electronic component using the holding jig shown in FIG. 保持治具の第2実施例の側面図である。It is a side view of 2nd Example of a holding jig. 第2実施例の保持治具の粘着層の形成方法を示す断面図である。It is sectional drawing which shows the formation method of the adhesion layer of the holding jig of 2nd Example. 第2実施例の保持治具を用いて外部電極ペーストを塗布する方法を示す図である。It is a figure which shows the method of apply | coating an external electrode paste using the holding jig of 2nd Example. 保持治具の第3実施例の側面図である。It is a side view of 3rd Example of a holding jig.

符号の説明Explanation of symbols

1 第1保持治具
11 硬質板
12 粘着層
2 第2保持治具
21 硬質板
22 粘着層
23 台座
P 電子部品
P1,P2 端面
DESCRIPTION OF SYMBOLS 1 1st holding jig 11 Hard board 12 Adhesive layer 2 2nd holding jig 21 Hard board 22 Adhesive layer 23 Base P Electronic component P1, P2 End surface

Claims (6)

硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える方法において、
上記第1保持治具の粘着層と第2保持治具の粘着層は同一材料よりなり、
上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え方法。
Using a first holding jig in which an adhesive layer is formed on a hard plate and a second holding jig in which an adhesive layer is formed on a hard plate, the first of the chip-type electronic component is placed on the adhesive layer of the first holding jig. With the one end face being adhesively held, the adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component, and the second holding jig is moved from the first holding jig to the adhesive layer. In the method of transferring the electronic component from the first holding jig to the second holding jig due to the difference in the adhesive force of the adhesive layer by pulling away in the direction perpendicular to the adhesive surface ,
The adhesive layer of the first holding jig and the adhesive layer of the second holding jig are made of the same material,
The thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is the thickness of the adhesive layer of the first holding jig. A method for transferring an electronic component, characterized in that it is ½ or less of the thickness .
硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える方法において、
上記第2保持治具の粘着層は第1保持治具の粘着層に比べて粘着性が強い材料よりなり、
上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え方法。
Using a first holding jig in which an adhesive layer is formed on a hard plate and a second holding jig in which an adhesive layer is formed on a hard plate, the first of the chip-type electronic component is placed on the adhesive layer of the first holding jig. With the one end face being adhesively held, the adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component, and the second holding jig is moved from the first holding jig to the adhesive layer. In the method of transferring the electronic component from the first holding jig to the second holding jig due to the difference in the adhesive force of the adhesive layer by pulling away in the direction perpendicular to the adhesive surface ,
The adhesive layer of the second holding jig is made of a material having higher adhesiveness than the adhesive layer of the first holding jig,
The thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is the thickness of the adhesive layer of the first holding jig. A method for transferring an electronic component, characterized in that it is ½ or less of the thickness .
硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える装置において、
上記第1保持治具の粘着層と第2保持治具の粘着層は同一材料よりなり、
上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え装置。
Using a first holding jig in which an adhesive layer is formed on a hard plate and a second holding jig in which an adhesive layer is formed on a hard plate, the first of the chip-type electronic component is placed on the adhesive layer of the first holding jig. With the one end face being adhesively held, the adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component, and the second holding jig is moved from the first holding jig to the adhesive layer. In the apparatus for transferring the electronic component from the first holding jig to the second holding jig due to the difference in the adhesive force of the adhesive layer by pulling away in the direction perpendicular to the adhesive surface ,
The adhesive layer of the first holding jig and the adhesive layer of the second holding jig are made of the same material,
The thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is the thickness of the adhesive layer of the first holding jig. An electronic component transfer device characterized by having a thickness of ½ or less .
硬質板上に粘着層を形成した第1保持治具と、硬質板上に粘着層を形成した第2保持治具とを用い、第1保持治具の粘着層上にチップ型電子部品の第1端面を粘着保持した状態で、上記電子部品の第1端面と対向する第2端面に第2保持治具の粘着層を押し付け、第2保持治具を第1保持治具から上記粘着層の粘着面に対して垂直方向に引き離すことにより、上記粘着層の粘着力の差によって電子部品を第1保持治具から第2保持治具へ移し替える装置において、
上記第2保持治具の粘着層は第1保持治具の粘着層に比べて粘着性が強い材料よりなり、
上記第1保持治具の粘着層の厚みと第2保持治具の粘着層の厚みは共に2mm以下であり、かつ第2保持治具の粘着層の厚みは第1保持治具の粘着層の厚みの1/2以下であることを特徴とする電子部品の移し替え装置。
Using a first holding jig in which an adhesive layer is formed on a hard plate and a second holding jig in which an adhesive layer is formed on a hard plate, the first of the chip-type electronic component is placed on the adhesive layer of the first holding jig. With the one end face being adhesively held, the adhesive layer of the second holding jig is pressed against the second end face facing the first end face of the electronic component, and the second holding jig is moved from the first holding jig to the adhesive layer. In the apparatus for transferring the electronic component from the first holding jig to the second holding jig due to the difference in the adhesive force of the adhesive layer by pulling away in the direction perpendicular to the adhesive surface ,
The adhesive layer of the second holding jig is made of a material having higher adhesiveness than the adhesive layer of the first holding jig,
The thickness of the adhesive layer of the first holding jig and the thickness of the adhesive layer of the second holding jig are both 2 mm or less, and the thickness of the adhesive layer of the second holding jig is the thickness of the adhesive layer of the first holding jig. An electronic component transfer device characterized by having a thickness of ½ or less .
上記第1保持治具および第2保持治具の硬質板の主面から粘着層の表面までの距離がほぼ等しくなるように、少なくとも第2保持治具の硬質板の主面上には所定高さの台座が設けられ、この台座上に粘着層が形成されていることを特徴とする請求項3または4に記載の電子部品の移し替え装置。   At least a predetermined height is provided on the main surface of the hard plate of the second holding jig so that the distance from the main surface of the hard plate of the first holding jig and the second holding jig to the surface of the adhesive layer is substantially equal. 5. The electronic component transfer device according to claim 3, wherein a pedestal is provided, and an adhesive layer is formed on the pedestal. 上記台座は上記粘着層の形成領域とほぼ等しい領域に形成されていることを特徴とする請求項5に記載の電子部品の移し替え装置。   6. The electronic component transfer device according to claim 5, wherein the pedestal is formed in an area substantially equal to an area where the adhesive layer is formed.
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