JP4598237B2 - Electrostatic atomization ionization apparatus and method, and charged particle transport ionization apparatus and method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ionization apparatus and method for removing static electricity generated mainly in a clean room.
[0002]
[Prior art]
Conventionally, the generation of static electricity has been a problem in clean rooms for manufacturing semiconductors, liquid crystal displays (hereinafter referred to as LCDs) and the like.
Among these, in a clean room for manufacturing semiconductors, the low humidity environment, the plastic container carrying the wafer and the semiconductor elements are easily charged, and the like cause static electricity. This static electricity causes dust to adhere to the surface of the wafer and destroys ICs and semiconductor elements on the wafer, resulting in a decrease in product yield.
[0003]
In a clean room for LCDs, static electricity due to frictional charging is generated when a glass substrate for LCDs comes into contact with a different material or the like in a processing step. In particular, the glass substrate used in the LCD has a large area and high insulation, and is remarkably charged by contact and peeling. Therefore, electrostatic breakdown due to a large amount of static electricity affects the yield of products.
[0004]
Therefore, conventionally, as an apparatus for removing static electricity in a production environment such as a clean room, an ionization apparatus that neutralizes the charge of a charged body with ions is known. This ionizer generates a corona discharge by applying a positive or negative high voltage to a positive or negative electrode, respectively. Then, the air around the tip of the electrode is ionized into positive and negative, and the ions are conveyed by an air flow to neutralize the charge on the charged body with ions of opposite polarity.
[0005]
[Problems to be solved by the invention]
However, in the ionization apparatus using the corona discharge as described above, air is ionized with the electrode exposed in the vicinity of the static elimination object in order to prevent the consumption of ions or to facilitate the generation of ions. To do. Therefore, oxygen in the air is ozonized and the surface of the silicon wafer is oxidized, such as the problem of ozone generation, and electromagnetic waves generated from the discharge electrode during discharge, causing malfunction of precision instruments and computers, etc. There was a problem of generation of electromagnetic noise from the discharge electrode. Also, the problem of dust generation from the electrode, such as the electrode material scattered from the electrode worn by the corona discharge, or the trace gas component in the air is particulated by the corona discharge and deposited on the electrode and re-scattered. was there.
[0006]
On the other hand, since manufacturing apparatuses such as semiconductors and LCDs have been downsized year by year, it has become difficult for conventional ionization apparatuses to secure a sufficient installation space at an optimal location in the manufacturing apparatus. Yes. In other words, in order to perform effective static elimination with an ionizer, an appropriate size space was required between the electrode for generating ions and the static elimination object. It is difficult to secure a sufficient installation space at such an optimal place for the ionization apparatus.
[0007]
Further, for example, in the LCD manufacturing process, as described above, the glass substrate is remarkably charged by contact and peeling. However, since the processing speed of the production apparatus is high, the glass substrate is often stored in a cassette without being completely neutralized. In such a cassette, since the interval between the plurality of glass substrates accommodated is narrow, when a conventional ionization apparatus is used, the flow of ionized air does not enter and it is difficult to eliminate the glass substrate. It was. Accordingly, there is an increasing demand for countermeasures against static electricity in such a narrow space.
[0008]
In order to solve the above problems, air or non-reactive gas (N ₂ Etc.), a part of the gas is ionized by using an ionization source such as a soft X-ray generator to generate unipolar ions or bipolar ions, and the generated ions are transported together with the remaining gas through a tube to eliminate static electricity. It has been studied to neutralize an object.
[0009]
However, when ions are transported through the tube in this way, the diffusion rate of ions is fast, so that some of the ions adhere to the inner wall of the tube during transport, and positive and negative ions recombine. As a result, the electric charge may be consumed. In this case, since the electric charge is consumed according to the length of the tube, there is a limit to the ion transport distance.
[0010]
In order to reduce such charge consumption, air or non-reactive gas is further humidified or cooled in the chamber to make the water vapor in the gas supersaturated. It is studied that each ion is attached to a minute mist to form coarse charged particles and transport the coarse charged particles. Thus, by using coarse charged particles, the diffusion rate of ions (in the case of micronized electrons) can be reduced. Therefore, when unipolar charged particles are transported independently by individual tubes, charge consumption due to the adhesion of ions to the inner wall of the tube can be reduced, and bipolar charged particles can be simultaneously conveyed by a common tube. In the case of transport, charge consumption due to recombination of positive and negative ions in the tube can be reduced.
[0011]
However, in the case where coarse charged particles are transported by a tube as described above, an auxiliary facility such as a device that becomes an ionization source such as a soft X-ray generator and a device that humidifies or cools air or a non-reactive gas. However, there is a problem that the cost increases, and the system becomes complicated with the installation of the incidental facilities.
[0012]
The present invention has been proposed to solve the problems of the prior art as described above, and its purpose is to generate ozone, generate electromagnetic noise from the discharge electrode, and generate dust from the electrode. It is an object of the present invention to provide an ionization apparatus and method capable of improving static elimination performance without causing a problem and contributing to cost reduction and system simplification.
Another object of the present invention has the advantages as described above, and further, by transporting charged particles, it is possible to eliminate static electricity even in a narrow space and to increase the transport distance of charged particles. It is to provide a possible charged particle transport ionization apparatus and method.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, the present invention generates charged particles and neutralizes the electrostatic charge on the charged body by the generated charged particles. Used for clean space In ionization apparatus and ionization method, utilizing electrostatic atomization phenomenon Said It is characterized by generating charged mist (coarse charged particles) from a liquid. Here, the electrostatic atomization phenomenon is from the nozzle Said As the liquid erupts Said By charging the liquid, Said When the charge of the liquid exceeds a certain charge limit, i.e. Said When the surface tension of the liquid exceeds the balanced state, Said The liquid is a phenomenon that breaks up into fine positive or negative charged mists. Such an electrostatic atomization phenomenon is conventionally used in a coating technique or the like. For example, a widely known electrostatic coating method generates a spray-like paint charged by electrostatic atomization by applying a positive DC high voltage to the object to be coated and a minus to the spraying device. It is a method (electrostatic spraying) of scattering and adhering to the paint. In this way, the present inventors have focused on the electrostatic atomization phenomenon that has been conventionally used in coating technology and the like, and the groundbreaking idea of newly applying this electrostatic atomization phenomenon to static electricity removal technology. As a result, the present invention has been created.
[0014]
The invention according to claim 1 is an electrostatic atomizing ionizer having a charging mist generating means. Here, the charging mist generating means is Made of pure water A nozzle that ejects liquid and ejects from this nozzle Said Charging means for charging the liquid, Said Using electrostatic atomization phenomenon by ejecting and charging liquid Said A means for generating charged mist from a liquid. In addition, the charging means can pass through this nozzle by applying a high voltage directly Said Using nozzle charging means for charging liquid and induction electrode Said Any one of induction charging means for inductively charging a liquid.
[0015]
Invention of Claim 5 grasped invention of Claim 1 from a viewpoint of a method, and from a nozzle Made of pure water As the liquid erupts Said By charging the liquid and using the electrostatic atomization phenomenon Said An ionization method characterized by generating charged mist from a liquid. Furthermore, it ejects from the nozzle Said To charge the liquid through this nozzle by applying a high voltage directly to the nozzle Said Using nozzle charging method to charge liquid and induction electrode Said Any charging method of induction charging that inductively charges a liquid is used.
[0016]
According to the inventions of claims 1 and 5 as described above, the following operation is obtained. That is, from the nozzle Made of pure water As the liquid erupts Said By charging the liquid, Said When the charge of the liquid exceeds a certain charge limit, i.e. Said When the surface tension of the liquid exceeds the balanced state, Said The liquid breaks up into positive or negative fine charged mist (electrostatic atomization phenomenon). The electrostatic charge on the charged body, which is the object to be removed, can be neutralized by the charged mist generated in this way or by ions generated when the charged mist is vaporized.
[0017]
Further, in order to charge the liquid ejected from the nozzle, the liquid is charged through the nozzle by directly applying a high voltage to the nozzle, or the liquid is induced and charged using an induction electrode. Therefore, there is no problem as in an ionizer using corona discharge. That is, problems such as generation of ozone, generation of electromagnetic noise from the discharge electrode, and generation of dust from the electrode do not occur.
[0018]
Furthermore, since it can be realized only by relatively inexpensive means such as a nozzle, a DC high-voltage power supply, and an induction electrode, the cost can be reduced and the system can be simplified.
In addition, the positive and negative charged mist generated by the electrostatic atomization phenomenon is much larger in diameter than the positive and negative ions, and its diffusion rate can be lowered than the ions, so even when the charged mist is transported, Charge consumption can be reduced, and the transport distance of charged particles can be increased.
[0022]
Claim 2 The invention described in claim 1 In the electrostatic atomization type ionization apparatus, the charged mist generating means is configured to spray the generated charged mist directly on the charged body. Claim 6 The invention described in claim 2 The invention from the viewpoint of the method, and claims 5 In the ionization method, the generated charged mist is directly sprayed on the charged body.
[0023]
Claims as above 2 and 6 According to the invention, since the generated charging mist is directly sprayed on the charged body, the generated charging mist is effectively used or the charging mist is vaporized without consuming the charge of the generated charging mist. By effectively using the ions generated by this, the electrostatic charge on the charged body that is the removal target can be efficiently neutralized. In addition, since it is not necessary to transport the generated charging mist or to perform any processing, the cost can be further reduced and the system can be simplified.
[0024]
Claim 3 In the invention described in, monopolar charged particle generating means for independently generating monopolar charged particles having positive and negative charges in individual chambers, and the generated positive and negative monopolar charged particles are independently generated by individual tubes. A unipolar charged particle transport ionization apparatus comprising a transporting means for transporting, wherein the unipolar charged particle generating means comprises: Or 2 It is comprised using the electrostatic atomization type ionization apparatus selected from the electrostatic atomization type ionization apparatus as described in above.
[0025]
Claim 7 The invention described in claim 3 The present invention has been grasped from the viewpoint of the method, and charged particles having positive and negative charges are independently generated in individual chambers, and the generated positive and negative charged particles are independently conveyed by individual tubes. In the charged particle transport ionization method, claim 5 or 6 The charged particles are generated using an ionization method selected from the ionization methods described in 1).
[0026]
Claim 4 The invention described in 1) includes bipolar charged particle generating means for simultaneously generating bipolar charged particles having positive and negative charges in a common chamber; and conveying means for simultaneously transferring the generated positive and negative bipolar charged particles by a common tube. Further, in the bipolar charged particle transport ionization apparatus, the bipolar charged particle generating means is the claim 1. Or 2 It is comprised using the electrostatic atomization type ionization apparatus selected from the electrostatic atomization type ionization apparatus as described in above.
[0027]
Claim 8 The invention described in claim 4 Bipolar charged particle transport ionization in which charged particles having positive and negative charges are simultaneously generated in a common chamber and the generated positive and negative charged particles are simultaneously transported by a common tube. In the method, the claim 5 or 6 The charged particles are generated using an ionization method selected from the ionization methods described in 1).
[0028]
Claims having the above-described configuration 3, 4, 7, 8 According to the invention, the following operation is obtained. First, static electricity can be removed even in a narrow space by conveying the generated charged mist. Then, by transporting the charged mist coarser than the ions, the diffusion speed thereof can be lowered than that of the ions, so that the charge consumption in the charged mist can be reduced.
[0029]
That is, the claim 3,7 As described above, when the monopolar charged particles are independently transported by individual tubes, charge consumption due to the adhesion of ions to the inner wall of the tube can be reduced. Claims 4,8 As described above, when bipolar charged particles are simultaneously transported by a common tube, it is possible to reduce charge consumption due to recombination of positive and negative ions in the tube. Therefore, the transport distance of charged particles can be increased.
[0030]
Furthermore, there is no need for expensive incidental equipment such as a device that becomes an ionization source such as a soft X-ray generator, a device that humidifies or cools air or non-reactive gas, a nozzle, a DC high-voltage power supply, an induction electrode, etc. Since the charged mist can be generated only by a relatively inexpensive means, the cost can be reduced and the system can be simplified.
[0031]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments to which the electrostatic atomization ionization apparatus and method according to the present invention are applied will be specifically described below with reference to the drawings.
[0032]
[First Embodiment]
FIG. 1 is a schematic diagram showing a configuration of an ionization apparatus according to a first embodiment of the present invention. The ionization apparatus shown in FIG. 1 has positive and negative charging mist generating nozzles 1a and 1b for ejecting a liquid such as pure water, and positive and negative DC voltages for directly applying positive and negative DC high voltages to the charging mist generating nozzles 1a and 1b. DC high-voltage power supplies 2a and 2b are provided. Here, the positive and negative charging mist generating nozzles 1a and 1b and the positive and negative DC high voltage power supplies 2a and 2b are connected by high voltage cables 3a and 3b, respectively. Reference numeral 4 in the figure denotes a supply pipe for supplying a liquid such as pure water to the positive and negative charging mist generating nozzles 1a and 1b.
[0033]
That is, the positive and negative charging mist generating nozzles 1a and 1b are supplied with a liquid such as pure water from the supply pipe 4, and are jetted by being directly applied with a DC high voltage from the positive and negative DC high voltage power supplies 2a and 2b. Positive and negative charged mists (coarse charged particles) 11a and 11b are generated from the liquid. The positive and negative charging mist generating nozzles 1a and 1b are arranged directly above the charged body 5 that is a charge removal object, and the generated positive and negative charging mists 11a and 11b are directed toward the charging body 5 by downflow. It is designed to be transported.
[0034]
According to the ion device of FIG. 1 having the above-described configuration, the positive and negative electrostatic charges 6a and 6b on the charged body 5 can be neutralized and the charged body 5 can be neutralized as follows.
First, liquid such as pure water is supplied to the positive and negative charging mist generating nozzles 1a and 1b through the supply pipe 4, and positive and negative DC high voltages are supplied to the positive and negative charging mist generating nozzles 1a and 1b by the positive and negative DC high voltage power supplies 2a and 2b. Is directly applied to eject liquid from the positive and negative charging mist generating nozzles 1a and 1b and to charge the liquid.
[0035]
In this state, when the charge of liquid such as pure water ejected from the positive and negative charging mist generating nozzles 1a and 1b exceeds a certain charge limit, that is, the state where the repulsive force due to the same polarity charge and the surface tension of the liquid are balanced. At that point, the liquid splits into positive or negative fine charged mist (electrostatic atomization phenomenon). The positive and negative charging mists 11a and 11b generated in this way are conveyed onto the charging body 5 just below the positive and negative charging mist generating nozzles 1a and 1b by a down flow (vertical one-way flow) in a clean room or the like.
As a result, the positive and negative electrostatic charges 6a and 6b on the charged body 5 to be removed are neutralized by the positive and negative charged mists 11a and 11b or by ions generated by vaporization of the charged mists 11a and 11b. The charged body 5 can be neutralized.
[0036]
Further, in order to charge the liquid ejected from the positive and negative charging mist generating nozzles 1a and 1b, a positive and negative DC high voltage is directly applied to the positive and negative charging mist generating nozzles 1a and 1b by the positive and negative DC high voltage power supplies 2a and 2b. Therefore, there is no problem that exists in the conventional ionization apparatus using corona discharge. That is, problems such as generation of ozone, generation of electromagnetic noise from the discharge electrode, and generation of dust from the electrode do not occur.
Furthermore, since it can be realized only by relatively inexpensive means such as positive and negative charging mist generating nozzles 1a and 1b and positive and negative DC high voltage power supplies 2a and 2b, the cost can be reduced and the system can be simplified.
[0037]
In addition, the positive and negative charging mists 11a and 11b generated by the electrostatic atomization phenomenon as described above are much larger in diameter than the positive and negative ions, and can reduce the diffusion rate thereof. Even when the mists 11a and 11b are transported, charge consumption can be reduced and the transport distance of charged particles can be increased. This point will be specifically described below with reference to FIG. In addition, FIG. 2 is a graph which shows the electrical mobility with respect to the magnitude | size of a charged particle.
[0038]
First, the diameter of air ions is about 1 nm for positive ions, and negative ions are about 20 to 30% smaller than positive ions. The electrical mobility of these positive and negative ions is 1.26 × 10 6 respectively. ^-Four m ² / Vs, 1.56 × 10 ^-Four m ² / Vs. On the other hand, if the diameter of the charging mist is about 0.1 μm, the electric mobility is 10 as shown in FIG. ^-Four cm ² / Vs (10 ^-8 m ² / Vs). As a result, the exhaustion due to recombination of the positive and negative charged mists 11a and 11b generated from the ionizer of FIG. 1 is drastically reduced and the initial charged particle concentration is maintained. ) Or the like.
[0039]
[Second Embodiment]
FIG. 3 is a schematic diagram showing a configuration of an ionization apparatus according to a second embodiment of the present invention. The ionization apparatus shown in FIG. 3 is the same as the ionization apparatus shown in FIG. 1, except that induction electrodes 21a and 21b are arranged in the vicinity of the positive and negative charging mist generation nozzles 1a and 1b, and the induction electrode 21a on the positive charging mist generation nozzle 1a side. The negative DC high voltage power source 2b is connected, and the positive DC high voltage power source 2a is connected to the induction electrode 21b on the negative charging mist generating nozzle 1b side. The other parts are configured in the same manner as the ionization apparatus of FIG.
[0040]
According to the ion device of FIG. 3 having such a configuration, the electrostatic charge 6a, 6b on the charged body 5 can be neutralized and the charged body 5 can be neutralized as follows.
First, liquid such as pure water is supplied to the positive and negative charging mist generating nozzles 1a and 1b through the supply pipe 4, and a negative DC high voltage is applied to the induction electrode 21a on the positive charging mist generating nozzle 1a side by the DC high-voltage power supply 2b. In addition, a positive DC high voltage is applied to the induction electrode 21b on the negative charging mist generating nozzle 1b side by the DC high voltage power source 2a. Thereby, the liquid is ejected from the positive and negative charging mist generating nozzles 1a and 1b, and the ejected liquid is induction-charged.
[0041]
Accordingly, as in the ionization apparatus of FIG. 1, the liquid such as pure water ejected from the positive and negative charged mist generating nozzles 1a and 1b generates and generates positive and negative charged mists 11a and 11b due to the electrostatic atomization phenomenon. The positive and negative charging mists 11a and 11b are conveyed onto the charging body 5 directly below the positive and negative charging mist generating nozzles 1a and 1b by downflow (vertical one-way flow) in a clean room or the like.
As a result, the positive and negative electrostatic charges 6a and 6b on the charged body 5 to be removed are neutralized by the positive and negative charged mists 11a and 11b or by ions generated by vaporization of the charged mists 11a and 11b. The charged body 5 can be neutralized.
[0042]
Further, in order to charge the liquid ejected from the positive and negative charging mist generating nozzles 1a and 1b, positive and negative DC high voltages are applied to the positive and negative induction electrodes 21a and 21b from the positive and negative DC high voltage power supplies 2a and 2b to induce the liquid. Since charging is performed, there is no problem as it exists in the conventional ionization apparatus using corona discharge. That is, problems such as generation of ozone, generation of electromagnetic noise from the discharge electrode, and generation of dust from the electrode do not occur.
Furthermore, since it can be realized only by relatively inexpensive means such as the positive and negative charging mist generating nozzles 1a and 1b, the positive and negative DC high voltage power supplies 2a and 2b, and the positive and negative induction electrodes 21a and 21b, the cost can be reduced. Can simplify the system.
[0043]
[Third Embodiment]
FIG. 4 is a schematic diagram showing the configuration of the nozzle tip, in particular, in the ionization apparatus according to the third embodiment of the present invention. The charging mist generating nozzle shown in FIG. 4 is a two-fluid nozzle 31. The two-fluid nozzle 31 is a nozzle having a central fluid passage 32 and a surrounding fluid passage 33, and a liquid such as pure water is supplied to the central fluid passage 32.
At the same time, compressed air is supplied to the surrounding fluid passage 33.
[0044]
An annular induction electrode 34 is disposed at the tip of the two-fluid nozzle 31, and this annular induction electrode 34 is connected to the positive DC high-voltage power source 2a. In FIG. 4, only the two-fluid nozzle 31 that generates the negative charging mist 11b by the connection of the annular induction electrode 34 and the positive DC high-voltage power source 2a is shown. A two-fluid nozzle 31 having a similar configuration is connected to a negative DC high-voltage power supply 2b (not shown) to generate a positive charging mist.
[0045]
According to the ionization apparatus of FIG. 4 having such a configuration, by using a two-fluid nozzle 31 to eject a liquid such as pure water together with compressed air, a fine charged mist can be efficiently produced using the pressure of the compressed air. Can be generated well.
[0046]
[Fourth Embodiment]
FIG. 5 is a schematic diagram showing a configuration of an ionization apparatus according to a fourth embodiment of the present invention. The ionization apparatus shown in FIG. 5 is one form of a monopolar charged particle transport ionization apparatus that uses the ionization apparatus of FIG. 1 as a monopolar charged particle generator. The ionization apparatus includes a gas supply unit 41, a monopolar charged particle generation unit 42, a transport unit 43, a reheating unit 44, and a mixing unit 45. Below, the structure of each part 41-45 is demonstrated sequentially.
[0047]
The gas supply unit 41 is air in a clean room or the like or N ₂ A non-reactive gas such as a gas is supplied as an ion carrier gas. Each of positive and negative supply pipes 51a and 51b branched from a common supply pipe 51 includes a valve 52, a flow meter 53, and a membrane filter. 54 is connected to form positive and negative supply lines 41 a and 41 b that reach the positive and negative charged particle generation chambers 55 a and 55 b of the unipolar charged particle generator 42.
[0048]
The unipolar charged particle generation unit 42 is configured by incorporating the ionization apparatus of FIG. 1 into the above-described positive and negative individual charged particle generation chambers 55a and 55b, and the positive and negative charged mist 11a in these chambers 55a and 55b. , 11b are generated independently. Below, the structure of such a monopolar charged particle generation part 42 is demonstrated in detail.
[0049]
First, a positively charged mist generating nozzle 1a is disposed in the positively charged particle generating chamber 55a. The positively charged mist generating nozzle 1a is supplied with a liquid such as pure water from a supply pipe 4 and is directly applied with a DC high voltage from a DC high voltage power source 2a disposed outside via a high voltage cable 3a. Thus, the positively charged mist 11a is generated from the jetted liquid. Further, the positively charged mist 11 a generated by the positively charged mist generating nozzle 1 a is sent to the transport unit 43 by the gas supplied from the supply line 41 a of the gas supply unit 41.
[0050]
Similarly, a negatively charged mist generating nozzle 1b is disposed in the negatively charged particle generating chamber 55b. The negatively charged mist generating nozzle 1b is supplied with a liquid such as pure water from the supply pipe 4, and is directly applied with a DC high voltage from a DC high voltage power supply 2b arranged outside via a high voltage cable 3b. Thus, the negatively charged mist 11b is generated from the jetted liquid. Further, the negatively charged mist 11 b generated by the negatively charged mist generating nozzle 1 b is sent to the transport unit 43 by the gas supplied from the supply line 41 b of the gas supply unit 41.
[0051]
The transport unit 43 is a part that transports the positive and negative charged mists 11a and 11b generated in the positive and negative charged particle generation chambers 55a and 55b independently by positive and negative individual transport tubes 56a and 56b.
The reheating unit 44 is located in front of the outlets of the transfer tubes 56a and 56b of the transfer unit 43, and heats the insides of the transfer tubes 56a and 56b by the electric heaters 57a and 57b, thereby causing the positive and negative charging mists 11a and 11b to be heated. It is a part which vaporizes and takes out positive and negative ions 12a and 12b.
[0052]
The mixing unit 45 is arranged continuously with the reheating unit 44, is conveyed by the conveyance tube 56 a, is transported by the positive ion 12 a taken out by the reheating unit 44, and is conveyed by the conveyance tube 56 b, and is recirculated by the reheating unit 44. This is a part where the extracted negative ions 12b are mixed. That is, positive and negative ions 12a and 12b are mixed in the vicinity of the outlets of the transfer tubes 56a and 56b, and supplied to the charged body 5 arranged in the vicinity of the outlets.
[0053]
According to the unipolar charged particle transport ion device of FIG. 5 having the above-described configuration, the positive and negative electrostatic charges 6a and 6b on the charged body 5 can be neutralized and the charged body 5 can be neutralized as follows. it can.
First, liquid such as pure water is supplied from the supply pipe 4 to the positive and negative charged mist generating nozzles 1a and 1b disposed in the positive and negative charged particle generating chambers 55a and 55b, and the DC high voltage power supplies 2a and 2b are used to generate a DC high voltage. By directly applying a voltage, positive and negative charging mists 11a and 11b are generated from the jetted liquid. The generated positive and negative charging mists 11a and 11b are supplied from the positive and negative charged particle generation chambers 55a and 55b to the transport unit 43 by the gas supplied from the supply lines 41a and 41b of the gas supply unit 41.
[0054]
In this way, the positive and negative charging mists 11a and 11b supplied to the transport unit 43 are transported to the reheating unit 44 by the positive and negative individual transport tubes 56a and 56b. Then, by being heated by the electric heaters 57a and 57b in the reheating unit 44, the positive and negative charging mists 11a and 11b are vaporized, and the positive and negative ions 12a and 12b are taken out. That is, positive ions 12a are taken out in the transport tube 56a, and negative ions 12b are taken out in the transport tube 56b. These positive and negative ions 12a and 12b are mixed in the subsequent mixing unit 45 and then supplied to the charged body 5 to neutralize the positive and negative electrostatic charges 6a and 6b on the charged body 5, respectively.
[0055]
As described above, the unipolar charged particle transport ionizer of FIG. 5 using the ionizer of FIG. 1 for the unipolar charged particle generator 42 has the same operations and effects as the ionizer of FIG. It is obtained. That is, problems such as generation of ozone, generation of electromagnetic noise from the discharge electrode, and generation of dust from the electrode, which existed in a conventional ionization apparatus using corona discharge, do not occur.
[0056]
In addition, the unipolar charged particle transport ionization apparatus of FIG. 5 is configured to transfer the positive and negative charged mists 11a and 11b generated in the positive and negative charged particle generation chambers 55a and 55b of the unipolar charged particle generator 42 to the transport tube. It is the structure which conveys to the charging body 5 vicinity by 56a, 56b. Therefore, for example, static elimination can be performed even in a narrow space such as a gap between a plurality of glass substrates housed in a cassette.
[0057]
In this case, as described above, the diameters of the positive and negative charged mists (coarse charged particles) 11a and 11b transferred by the transfer tubes 56a and 56b are much larger than the positive and negative ions (micro charged particles) 12a and 12b. Since the diffusion rate of ions can be lowered than that of ions, even when the positive and negative charged mists 11a and 11b are independently transferred by the transfer tubes 56a and 56b, the consumption of charges due to the adhesion of ions to the inner wall of the tube is reduced. be able to. Therefore, the transport distance of charged particles can be increased.
[0058]
Furthermore, the monopolar charged particle generator 42 does not require expensive incidental equipment such as an ionization source such as a soft X-ray generator, an apparatus for humidifying or cooling air or a non-reactive gas, or the like. Since the charging mists 11a and 11b can be generated only by relatively inexpensive means such as the positive and negative charging mist generating nozzles 1a and 1b and the positive and negative DC high-voltage power supplies 2a and 2b, the cost can be reduced. Can be simplified.
[0059]
[Fifth Embodiment]
FIG. 6 is a schematic diagram showing a configuration of an ionization apparatus according to a fifth embodiment of the present invention. The ionization apparatus shown in FIG. 6 is one form of a bipolar charged particle transport ionization apparatus that uses the ionization apparatus of FIG. 1 as a bipolar charged particle generator. The ionization apparatus of FIG. 6 includes a gas supply unit 61, a bipolar charged particle generation unit 62, a transport unit 63, and a reheating unit 64.
[0060]
The bipolar charged particle transport ionizer of FIG. 6 is a modification of the monopolar charged particle transport ionizer of FIG. 5, and instead of the monopolar charged particle generator 42, positive and negative charged mists 11a and 11b are replaced with a single. The bipolar charged particle generation unit 62 that is generated in the charged particle generation chamber 55 is provided, and accordingly, the gas supply unit 61, the transport unit 63, and the reheating unit 64 are not separated into positive and negative, The single configuration is common to both positive and negative, and the mixing unit is unnecessary. Below, the structure of each part 61-64 is demonstrated sequentially.
[0061]
In the gas supply unit 61, a valve 52, a flow meter 53, and a membrane filter 54 are connected to a single supply pipe 51, thereby forming a single supply line.
The bipolar charged particle generation unit 62 is configured by incorporating the ionization apparatus of FIG. 1 into the single charged particle generation chamber 55 described above, and generates positive and negative charged mists 11 a and 11 b simultaneously in the chamber 55. It has become. Hereinafter, the configuration of the bipolar charged particle generator 62 will be described in detail.
[0062]
That is, in the charged particle generation chamber 55, positive and negative charging mist generation nozzles 1a and 1b are arranged. The positive and negative charging mist generating nozzles 1a and 1b are supplied with a liquid such as pure water from the supply pipe 4, and are connected to positive and negative DC high voltage power supplies 2a and 2b via high voltage cables 3a and 3b. By directly applying a DC high voltage, positive and negative charging mists 11a and 11b are generated from the ejected liquid. Further, the positive and negative charging mists 11 a and 11 b generated by the positive and negative charging mist generating nozzles 1 a and 1 b are sent to the transport unit 63 by the gas supplied from the gas supply unit 61.
[0063]
The transport unit 63 is configured to simultaneously transport the positive and negative charged mists 11 a and 11 b generated in the single charged particle generation chamber 55 through a single transport tube 56.
The reheating unit 64 is positioned in front of the outlet of the transfer tube 56 of the transfer unit 63, and heats the inside of the transfer tube 56 with the electric heater 57 to vaporize the positive and negative charged mists 11 a and 11 b, thereby generating positive and negative ions. 12a and 12b are taken out.
[0064]
According to the bipolar charged particle transport ion device of FIG. 6 having the above-described configuration, the positive and negative electrostatic charges 6a and 6b on the charged body 5 can be neutralized and the charged body 5 can be neutralized as follows. .
First, liquid such as pure water is supplied from the supply pipe 4 to the positive and negative charged mist generating nozzles 1a and 1b disposed in the single charged particle generating chamber 55, and a DC high voltage is supplied by the DC high voltage power supplies 2a and 2b. Is directly applied to generate positive and negative charging mists 11a and 11b from the jetted liquid. The generated positive and negative charged mists 11 a and 11 b are supplied from the single charged particle generation chamber 55 to the transport unit 63 by the gas supplied from the gas supply unit 61.
[0065]
The positive and negative charging mists 11 a and 11 b supplied to the transport unit 63 in this way are transported to the reheating unit 64 by the single transport tube 56. Then, by being heated by the electric heater 57 in the reheating unit 64, the positive and negative charging mists 11a and 11b are vaporized, and the positive and negative ions 12a and 12b are taken out. These positive and negative ions 12a and 12b are supplied to the charged body 5 by the transport tube 56, and neutralize the positive and negative electrostatic charges 6a and 6b on the charged body 5, respectively.
[0066]
As described above, according to the bipolar charged particle transport ionization apparatus of FIG. 6 using the ionization apparatus of FIG. 1 for the bipolar charged particle generator 62, the same operation and effect as the ionization apparatus of FIG. 1 can be obtained. Is. That is, problems such as generation of ozone, generation of electromagnetic noise from the discharge electrode, and generation of dust from the electrode, which existed in a conventional ionization apparatus using corona discharge, do not occur.
[0067]
In addition, the bipolar charged particle transport ionization apparatus of FIG. 6 uses positive and negative charged mists 11a and 11b generated in the single charged particle generation chamber 55 of the bipolar charged particle generator 62 as a single transport tube. In this configuration, the toner is conveyed to the vicinity of the charged body 5 by 56. Therefore, similarly to the unipolar charged particle transport ionization apparatus of FIG. 5, for example, static elimination can be performed in a narrow space such as a gap between a plurality of glass substrates accommodated in a cassette.
[0068]
In this case, as described above, the diameters of the positive and negative charging mists 11a and 11b transported by the transport tube 56 are much larger than those of the positive and negative ions 12a and 12b, and the diffusion speed thereof can be lowered than that of the ions. Therefore, even when the positive and negative charged mists 11a and 11b are simultaneously transported by the single transport tube 56, charge consumption due to recombination of positive and negative ions in the tube can be reduced. Therefore, similarly to the unipolar charged particle transport ionization apparatus of FIG. 5, the transport distance of charged particles can be increased.
[0069]
Furthermore, the bipolar charged particle generator 62 does not require expensive incidental equipment such as an ionization source such as a soft X-ray generator, an apparatus for humidifying air or a non-reactive gas, or an apparatus for cooling. Since the charging mists 11a and 11b can be generated only by relatively inexpensive means such as the positive and negative charging mist generating nozzles 1a and 1b and the positive and negative DC high-voltage power supplies 2a and 2b, the cost can be reduced and the system can be simplified. Can be
[0070]
[Other embodiments]
Note that the present invention is not limited to the above-described embodiment, and various other modifications can be implemented within the scope of the present invention.
For example, in the charged particle transport ionization apparatus shown in FIGS. 5 and 6, the charged mists 11 a and 11 b can be directly sprayed on the charged body 5. In this case, the reheating parts 44 and 64 are not required, and an additional facility such as an electric heater is not required. Therefore, the cost can be further reduced and the system can be further simplified.
[0071]
It is also possible to incorporate the ionization apparatus using the induction electrode of FIG. 2 instead of the ionization apparatus of FIG. 1 into the unipolar or bipolar charged particle generator of the charged particle transport ionization apparatus of FIG. 5 or FIG. . In this case, the same effect as that obtained when the ionization apparatus of FIG. 1 is incorporated can be obtained.
Further, in the ionization apparatus of FIG. 1 or FIG. 2 or the charged particle transport ionization apparatus of FIG. 5 or FIG. 6, a two-fluid nozzle as shown in FIG. It is also possible to eject gas and liquid simultaneously. In this connection, it is also possible to eject pressurized liquid from a normal nozzle instead of a two-fluid nozzle. In either case, fine charged mist can be efficiently generated using pressure.
[0072]
In addition, as described above, the present invention is suitable as a static elimination technique for removing static electricity generated in a clean room for manufacturing semiconductors, LCDs and the like, but is not limited thereto, and has a high static elimination performance. The present invention can be similarly applied to various required technical fields, and similarly excellent effects can be obtained.
[0073]
【The invention's effect】
As described above, according to the present invention, by generating a charged mist from a liquid using an electrostatic atomization phenomenon, generation of ozone, generation of electromagnetic noise from a discharge electrode, dust generation from an electrode, Thus, it is possible to provide an electrostatic atomization ionization apparatus and method that can improve the static elimination performance and contribute to cost reduction and simplification of the system without causing such problems.
In addition to the above advantages, static electricity can be removed even in a narrow space by generating a monopolar or bipolar charged mist using the electrostatic atomization phenomenon and transporting it with a tube. A charged particle transport ionization apparatus and method that can increase the transport distance of charged particles can be provided.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing an ionization apparatus according to a first embodiment to which the present invention is applied.
FIG. 2 is a graph showing electric mobility with respect to the size of charged particles.
FIG. 3 is a schematic diagram showing an ionization apparatus according to a second embodiment to which the present invention is applied.
FIG. 4 is a schematic diagram showing an ionization apparatus according to a third embodiment to which the present invention is applied.
FIG. 5 is a schematic view showing a unipolar charged particle transport ionization apparatus according to a fourth embodiment to which the present invention is applied.
FIG. 6 is a schematic diagram showing a bipolar charged particle transport ionization apparatus according to a fifth embodiment to which the present invention is applied.
[Explanation of symbols]
1a, 1b ... Charging mist generating nozzle
2a, 2b ... DC high voltage power supply
3a, 3b ... high voltage cable
4 ... Supply pipe
5. Charged body
6a, 6b ... Static charge
11a, 11b ... Charging mist
12a, 12b ... ions
21a, 21b ... induction electrode
31 ... Two-fluid nozzle
32, 33 ... Fluid passage
34 ... annular induction electrode
41, 61 ... Gas supply section
41a, 41b ... supply line
42 ... Unipolar charged particle generator
43, 63 ... conveying section
44, 64 ... reheat section
45 ... Mixing part
51, 51a, 51b ... supply pipe
52 ... Valve
53 ... Flow meter
54 ... Membrane filter
55, 55a, 55b ... charged particle generation chamber
56, 56a, 56b ... Conveying tube
57, 57a, 57b ... Electric heater
62: Bipolar charged particle generator

Claims (8)

In an ionization apparatus used in a clean space that generates charged particles and neutralizes the electrostatic charge on the charged body by the generated charged particles.
A nozzle for ejecting a liquid composed of pure water ;
And a charging means for charging the fluid from the nozzle,
By charging the liquid with ejecting the liquid from the nozzle, when it exceeds the charged certain limit charge of the liquid, i.e., beyond the state of the surface tension of the liquid and the repulsive force by the same polarity charges are balanced Once the liquid has a charging mist generation means for generating charging mist from the liquid by using an electrostatic atomization phenomenon which splits into positive or negative fine charging mist,
Said charging means, induction charging means for inducing charging the liquid with a nozzle charging means, and the induction electrode charging the liquid by a high voltage directly applied to the nozzle is any means An electrostatic atomizing ionizer characterized by its characteristics.   2. The electrostatic atomizing ionization apparatus according to claim 1, wherein the charging mist generating means is configured to directly spray the generated charging mist to the charged body. Positive and negative monopolar charged particle generating means for independently generating monopolar charged particles having positive and negative charges in individual chambers, and conveying means for independently conveying the generated positive and negative monopolar charged particles by individual tubes In a unipolar charged particle transport ionizer equipped with
The monopolar charged particle generating means is configured by using an electrostatic atomizing ionizer selected from the electrostatic atomizing ionizer according to claim 1 or 2. Polarized particle transport ionizer. Bipolar charged particle transport system comprising bipolar charged particle generating means for simultaneously generating bipolar charged particles having positive and negative charges in a common chamber, and transport means for simultaneously transporting the generated positive and negative bipolar charged particles through a common tube In the ionizer,
The bipolar charged particle generating means is configured using an electrostatic atomizing ionizer selected from the electrostatic atomizing ionizer according to claim 1 or 2. Particle transport ionizer. In the ionization method of generating charged particles and neutralizing the electrostatic charge on the charged body by the generated charged particles,
By charging the liquid with jetting liquid consisting of pure water from the nozzle, when it exceeds the charged certain limit charge of the liquid, i.e., a state in which the surface tension of the liquid and the repulsive force by the same polarity charges are balanced when the past was, it said liquid charging mist is generated from the liquid by using an electrostatic atomization phenomenon which splits into positive or negative fine charging mist,
To charge the fluid from the nozzle, the induction charging method for inducing charging the liquid with a nozzle charging method, and the induction electrode for charging the liquid by a high voltage directly applied to the nozzle, any An electrostatic atomization type ionization method using any of the charging methods.   6. The electrostatic atomization type ionization method according to claim 5, wherein the generated charged mist is directly sprayed on the charged body. In the unipolar charged particle transport ionization method in which charged particles having positive and negative charges are independently generated in individual chambers, and the generated positive and negative charged particles are independently transported by individual tubes,
Unipolar charged particle transport ionization, wherein the charged particles are generated using an electrostatic atomization ionization method selected from the electrostatic atomization ionization method according to claim 5 or 6. Method. In the bipolar charged particle transport ionization method in which charged particles having positive and negative charges are simultaneously generated in a common chamber and the generated positive and negative charged particles are simultaneously transported by a common tube.
A bipolar charged particle transport ionization method, wherein the charged particles are generated using an electrostatic atomization ionization method selected from the electrostatic atomization ionization method according to claim 5 or 6. .

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