JP4590940B2 - Surface coated cemented carbide cutting tool with excellent wear resistance due to hard coating layer - Google Patents

Description

  The present invention relates to a surface-coated cemented carbide cutting tool (hereinafter referred to as a coated cemented carbide tool) in which a hard coating layer exhibits excellent wear resistance, particularly when cutting steel or cast iron.

  In general, coated carbide tools are used for slow-away inserts that are detachably attached to the tip of a cutting tool for drilling and cutting of various materials such as steel and cast iron, and for flat cutting. There are drills, miniature drills, solid type end mills that are used for chamfering, grooving, shoulder processing, etc. where the cutting blade takes an intermittent cutting form, and the solid type with the above throwaway tip attached detachably A slow-away end mill tool that performs a cutting process in the same manner as an end mill is known.

Further, as a coated carbide tool, on the surface of a carbide substrate composed of tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet,
Composition formula: (Ti _{1- (X + Z)} Al _X Si _Z ) N (wherein, X is 0.45 to 0.70, Z is 0.01 to 0.15 in atomic ratio),
Coated carbide tool formed by vapor-depositing a hard coating layer composed of a composite nitride of Ti, Al, and Si (hereinafter referred to as (Ti, Al, Si) N) satisfying the above conditions with an average layer thickness of 1 to 15 μm The (Ti, Al, Si) N layer has high-temperature hardness and heat resistance due to Al as a constituent component, high-temperature strength due to Ti, and further improved heat resistance due to Si. In combination, it is also known to exhibit excellent cutting performance when continuous cutting and intermittent cutting of various steels and cast iron are used under high-speed cutting conditions.

Furthermore, the above-mentioned coated carbide tool is equipped with, for example, the above-mentioned carbide substrate in an arc ion plating apparatus which is one type of physical vapor deposition apparatus schematically shown in FIG.
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 300-500 ° C
DC bias voltage applied to the carbide substrate: −600 to −1000 V,
Cathode electrode: metal titanium (Ti),
Arc discharge current between the cathode electrode and the anode electrode: 60 to 100 A
Processing time: 1-10 minutes,
(Ti, Al, Si) N layer formation as a hard coating layer while maintaining the inside of the apparatus heated to a temperature of, for example, 500 ° C. with a heater in a state where the surface of the carbide substrate is subjected to a Ti bombard cleaning process under the conditions of For example, an arc discharge is generated between the Ti—Al—Si alloy having a predetermined composition mounted as a cathode electrode (evaporation source) and the anode electrode under the condition of current: 90 A, and at the same time, nitrogen as a reaction gas in the apparatus A gas is introduced to form a reaction atmosphere of, for example, 2 Pa. On the other hand, on the surface of the cemented carbide substrate, a bias voltage of, for example, −100 V is applied to the surface of the cemented carbide substrate. It is also known to be produced by vapor-depositing a hard coating layer consisting of layers.
Japanese Patent No. 2793773

  In recent years, there has been a strong demand for labor saving, energy saving, and cost reduction for cutting, and along with this, coated carbide tools tend to require a much longer life. In the tool, the progress of wear of the (Ti, Al, Si) N layer which is a hard coating layer is relatively fast, and as a result, the service life is reached in a relatively short time.

Therefore, the present inventors, from the above viewpoint, paying attention to the hard coating layer of the above conventional coated carbide tool, as a result of conducting research to improve this one-stage wear resistance,
(A) Using the arc ion plating apparatus shown in FIG. 4, instead of the above-described conventional Ti bombard cleaning treatment for the carbide substrate surface,
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 550 to 700 ° C.
DC bias voltage applied to the carbide substrate: -600 to -1000 V,
Cathode electrode: chromium metal (Cr),
Arc discharge current between the cathode electrode and the anode electrode: 60 to 100 A,
Processing time: 1-10 minutes,
Under the conditions described above, the above-described composition formula: (Ti _{1- (X + Z)} Al _x Si _Z ) When a (Ti, Al, Si) N layer satisfying N (wherein, X is 0.45 to 0.70 and Z is 0.01 to 0.15 in terms of atomic ratio) is formed as a result The (Ti, Al, Si) N layer should exhibit excellent wear resistance over a long period even when steel or cast iron is cut at high speed.

(B) The (Ti, Al, Si) N layer of (a) and the above-described conventional (Ti, Al, Si) N layer are schematically illustrated in FIG. 1 using a field emission scanning electron microscope. As described above, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and using an electron backscatter diffraction image apparatus, a predetermined region is spaced at an interval of 0.1 μm / step . The inclination angle formed by the normal line of the {100} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the surface polished surface, and is within the range of 0 to 45 degrees of the measurement inclination angle. When the measurement inclination angle is divided for each pitch of 0.25 degrees and the inclination angle number distribution graph is formed by counting the frequencies existing in each division, the conventional (Ti, Al, Si) N layer is As illustrated in FIG. 3, the distribution of measured inclination angles on the {100} plane is in the range of 0 to 45 degrees. In FIG. 2, the inclination angle number distribution graph of the (Ti, Al, Si) N layer in (a) is shown in FIG. A sharp maximum peak appears at a specific position, and this sharp maximum peak changes the arc discharge current between the cathode metal Cr and the anode electrode during the surface modification treatment in which the carbide substrate surface is bombarded with Cr. As a result, the position that appears in the tilt angle section of the horizontal axis of the graph changes.

(C) According to many test results, when the arc discharge current between the cathode electrode and the anode electrode is changed within the range of 60 to 100 A as described above, the sharp maximum peak is 8 to 20 of the inclination angle section. As shown in the slope angle distribution graph, which appears in the range of degrees and the total of the frequencies existing in the range of 8 to 20 degrees occupies a ratio of 45 to 65% of the whole degrees in the slope angle distribution graph. The coated carbide tool formed by forming the (Ti, Al, Si) N layer as a hard coating layer, which shows such an inclination angle number distribution graph, exhibits excellent wear resistance over a long period of time by high-speed cutting. To come to do.
The research results shown in (a) to (c) above were obtained.

The present invention has been made based on the above research results, and using an arc ion plating apparatus, the surface of a cemented carbide substrate made of a WC-based cemented carbide or TiCN-based cermet is treated with a Cr bombardment treatment ( In a state of surface modification treatment)
Compositional formula: (Ti _{1− (X + Z)} Al _X Si _Z ) N (wherein X is 0.45 to 0.70 and Z is 0.01 to 0.15 in atomic ratio), and The hard coating layer is composed of (Ti, Al, Si) N formed by physical vapor deposition with an average layer thickness of 1 to 15 μm ,
The (Ti, Al, Si) N constituting the hard coating layer is obtained by using a field emission scanning electron microscope and applying an electron beam to each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Irradiate and use the electron backscatter diffraction image apparatus, and the method of the {100} plane that is the crystal plane of the crystal grain with respect to the normal line of the surface-polished surface at a predetermined region at an interval of 0.1 μm / step Measure the tilt angle formed by the line, and divide the measured tilt angles within the range of 0 to 45 degrees out of the measured tilt angles by pitch of 0.25 degrees, and count the frequencies existing in each section In the inclination angle distribution graph, the highest peak is present in the inclination angle section within the range of 8 to 20 degrees, and the sum of the frequencies existing within the range of 8 to 20 degrees is the inclination angle number distribution graph. Tilt angle occupying 45-65% of total frequency It is characterized by a coated carbide tool showing a frequency distribution graph.

As described above, the Al component in the (Ti, Al, Si) N layer constituting the hard coating layer of the coated carbide tool of the present invention improves the high temperature hardness and heat resistance, while the Ti component has a high temperature. The Si component has the effect of further improving the heat resistance in the coexistence with Al, but the ratio of the Al value to the total amount of Ti and Si (atomic ratio, below) If the ratio is less than 0.45, the proportion of Ti is excessively increased, and excellent high-temperature hardness and heat resistance cannot be secured, and the progress of wear is rapidly promoted. If the X value indicating the ratio exceeds 0.70, the Ti ratio becomes relatively small, the high-temperature strength rapidly decreases, and chipping is likely to occur. It was set to -0.70.
Moreover, if the Z value indicating the proportion of Si is a proportion of the total amount of Ti and Al, and less than 0.01, the desired heat resistance improvement effect cannot be obtained, while if the Z value exceeds 0.15, Since the high-temperature strength is lowered, the Z value is determined to be 0.01 to 0.15.
Furthermore, if the average layer thickness is less than 1 μm, it is insufficient to exhibit its excellent wear resistance over a long period of time, whereas if the average layer thickness exceeds 15 μm, chipping is likely to occur. Therefore, the average layer thickness was determined to be 1 to 15 μm.

  In addition, as described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the (Ti, Al, Si) N layer is the same as that of the metal Cr during the substrate surface modification treatment in which the carbide substrate surface is Cr bombarded. It changes by changing the arc discharge current between the cathode electrode and the anode electrode. As a result of many tests, when the arc discharge current is 60 to 100 A, the maximum peak is in the range of 8 to 20 degrees. In addition to appearing in the angle section, an inclination angle number distribution graph is obtained in which the total number of frequencies existing in the range of 8 to 20 degrees occupies a proportion of 45 to 65% of the entire frequency in the inclination angle frequency distribution graph. Therefore, even if the arc discharge current is less than 60 A or more than 100 A, the maximum peak position of the measured inclination angle is 8 to 20 degrees. Deviates from the range, in this case are those unable to exert the desired excellent wear resistance.

  In the coated carbide tool of the present invention, particularly in high-speed cutting processing of steel, cast iron and the like, the hard coating layer exhibits much higher wear resistance and contributes to the extension of the service life.

  Next, the coated carbide tool of the present invention will be specifically described with reference to examples.

As raw material powders, WC powder, TiC powder, VC powder, TaC powder, NbC powder, Cr ₃ C ₂ powder, and Co powder, all having an average particle diameter of 1 to 3 μm, were prepared. And then wet-mixed with a ball mill for 72 hours, dried, and press-molded into a green compact at a pressure of 100 MPa. The green compact was vacuumed at 6 Pa at a temperature of 1400 ° C. for 1 hour. Sintered under the holding conditions, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03, and the carbide bases A1 to A10 made of WC-based cemented carbide having ISO / CNMG120408 chip shape Formed.

In addition, as raw material powders, all are TiCN (weight ratio TiC / TiN = 50/50) powder, Mo ₂ C powder, ZrC powder, NbC powder, TaC powder, WC powder having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 100 MPa. The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to obtain ISO standard / CNMG120408. The carbide substrates B1 to B6 made of TiCN base cermet having the following chip shape were formed.

Next, each of the above-mentioned carbide substrates A1 to A10 and B1 to B6 was ultrasonically cleaned in acetone and dried, and mounted on the arc ion plating apparatus shown in FIG. ), A Ti—Al—Si alloy having various component compositions and a metal Cr for carbide substrate surface modification treatment were mounted,
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 600 ° C.
DC bias voltage applied to the carbide substrate: -800V,
Cathode electrode: metal Cr,
Arc discharge current: a predetermined current in the range of 60-100A,
Processing time: 5 minutes
Under these conditions, arc discharge is generated between the metal Cr and the anode electrode of the cathode electrode, and the carbide substrate surface is reformed by Cr bombarding the surface of the carbide substrate. Nitrogen gas is introduced as a gas to form a reaction atmosphere of 2 Pa, a DC bias voltage of −100 V is applied to the cemented carbide substrate, and 100 A is provided between the cathode electrode Ti—Al—Si alloy and the anode electrode. The current coating is applied to generate arc discharge, and the (Ti, Al, Si) N layer having the target composition and target layer thickness shown in Table 3 is deposited on the surface of the cemented carbide substrate. The present invention surface-coated cemented carbide throwaway tips (hereinafter referred to as the present invention coated carbide tips) 1 to 16 as carbide tools were produced, respectively.

Further, for the purpose of comparison, using the arc ion plating apparatus of FIG. 5, the above-mentioned carbide substrate surface is replaced with the above-described carbide surface modification treatment by Cr bombardment treatment,
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 500 ° C
DC bias voltage applied to the carbide substrate: -800V,
Cathode electrode: Ti metal,
Arc discharge current: a predetermined current in the range of 60-100A,
Processing time: 5 minutes
The conventional coated carbide tool as shown in Table 4 is formed by vapor-depositing a (Ti, Al, Si) N layer under the same conditions except that the surface of the carbide substrate is subjected to a Ti bombard cleaning process under the conditions of Conventional surface-coated cemented carbide throwaway tips (hereinafter referred to as conventional coated cemented carbide tips) 1 to 16 were produced.

Next, with the present invention coated carbide tips 1-16 and conventional coated carbide tips 1-16, in a state where this is screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SNCM439 round bar,
Cutting speed: 350 m / min. ,
Cutting depth: 1.4mm,
Feed: 0.3 mm / rev. ,
Cutting time: 10 minutes,
Dry continuous high-speed cutting test of alloy steel under the conditions (cutting condition A) (normal cutting speed is 200 m / min.),
Work material: JIS · S45C lengthwise equal 4 round grooved round bars,
Cutting speed: 360 m / min. ,
Cutting depth: 1.0 mm,
Feed: 0.24 mm / rev. ,
Cutting time: 10 minutes,
Dry intermittent high-speed cutting test of carbon steel under the conditions (referred to as cutting condition B) (normal cutting speed is 200 m / min.),
Work material: JIS / FC300 round bar,
Cutting speed: 360 m / min. ,
Cutting depth: 1.2mm,
Feed: 0.25 mm / rev. ,
Cutting time: 10 minutes,
The dry continuous high-speed cutting test (normal cutting speed is 200 m / min.) Of cast iron under the above conditions (referred to as cutting condition C) was performed, and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 5.

As raw material powders, medium coarse WC powder having an average particle diameter of 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, NbC powder of 1.2 μm, ZrC of 1.2 μm Powder, 2.3 μm Cr ₃ C ₂ powder, 1.5 μm VC powder, 1.0 μm (Ti, W) C [50/50 by mass ratio] powder, and 1.8 μm Co Prepare powders, mix each of these raw material powders with the composition shown in Table 6, add wax, ball mill mix in acetone for 24 hours, dry under reduced pressure, and then press various pressures of a predetermined shape at a pressure of 100 MPa. The powder compact is press-molded, and these green compacts are heated to a predetermined temperature in the range of 1370 to 1470 ° C. at a heating rate of 7 ° C./min in a vacuum atmosphere of 6 Pa, and this temperature is maintained for 1 hour. After holding, sintering under furnace cooling conditions, the diameter is 8m , 13 mm, and 26 mm round bar sintered bodies for forming a cemented carbide substrate were formed, and the above three types of round bar sintered bodies were cut into the combinations shown in Table 6 by grinding. Carbide substrate (end mill) C- having a shape of a four-blade square with a blade portion diameter × length of 6 mm × 13 mm, 10 mm × 22 mm, and 20 mm × 45 mm, respectively, and a twist angle of 30 degrees. 1 to C-8 were produced.
Separately, by a field emission scanning electron microscope having the same composition as the above-mentioned carbide substrates (end mills) C-1 to C-8, and each having dimensions of plane: 12 mm × 12 mm, thickness: 6 mm. A test piece for preparing an inclination angle number distribution graph was prepared.

  Then, these carbide substrates (end mills) C-1 to C-8 and test pieces were ultrasonically cleaned in acetone and dried, and then loaded into the arc ion plating apparatus shown in FIG. By performing a carbide substrate surface modification treatment under the same conditions as in Example 1 above, and depositing a (Ti, Al, Si) N layer having the target composition and target layer thickness shown in Table 7, End mills made of the present invention surface coated cemented carbide alloy (hereinafter referred to as the present invention coated carbide end mill) 1 to 8 as invention coated carbide tools were produced, respectively.

  For the purpose of comparison, the surface of the above-mentioned carbide substrate is subjected to Ti bombard cleaning treatment in place of the above-described carbide substrate surface modification treatment by W bombardment treatment under the same conditions as in Example 1. (Al, Ti) N layer is deposited under the same conditions, as shown in Table 7 (the conventional surface-coated cemented carbide end mill (hereinafter referred to as the conventional coated carbide end mill as a conventional coated carbide tool). 1) to 8 were produced.

Next, of the present invention coated carbide end mills 1-8 and conventional coated carbide end mills 1-8, the present invention coated carbide end mills 1-3 and conventional coated carbide end mills 1-3 are as follows:
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / SKD61 plate material,
Cutting speed: 80 m / min. ,
Groove depth (cut): 0.22 mm,
Table feed: 320 mm / min,
The dry high-speed grooving test of the tool steel under the conditions (normal cutting speed is 45 m / min.), The coated carbide end mills 4 to 6 of the present invention and the conventional coated carbide end mills 4 to 6
Work material: Plane dimension: 100 mm × 250 mm, thickness: 50 mm JIS / S55C plate material,
Cutting speed: 180 m / min. ,
Groove depth (cut): 2.4 mm,
Table feed: 800mm / min,
The dry high-speed grooving test of carbon steel under the conditions (normal cutting speed is 100 m / min.), The coated carbide end mills 7 and 8 of the present invention and the conventional coated carbide end mills 7 and 8 are as follows:
Work material: Plane dimension: 100 mm × 250 mm, thickness: 50 mm JIS / SCM440 plate material,
Cutting speed: 200 m / min. ,
Groove depth (cut): 4.5 mm,
Table feed: 450mm / min,
The dry high-speed grooving test of alloy steel under the conditions (normal cutting speed is 100 m / min.) Is performed, and the flank wear width of the outer peripheral edge of the cutting edge is the service life in any grooving test. The cutting groove length up to 0.1 mm as a standard was measured. The measurement results are shown in Table 7, respectively.

The diameters produced in Example 2 above were 8 mm (for forming carbide substrates C-1 to C-3), 13 mm (for forming carbide substrates C-4 to C-6), and 26 mm (for carbide substrates C-). 7, for C-8 formation), from these three types of round bar sintered bodies, the diameter x length of the groove forming portion is 4 mm x 13 mm (by grinding), respectively. Carbide substrates D-1 to D-3), 8 mm × 22 mm (Carbide substrates D-4 to D-6), and 16 mm × 45 mm (Carbide substrates D-7 and D-8), and all Carbide substrates (drills) D-1 to D-8 having a two-blade shape with a twist angle of 30 degrees were produced.
Similarly, by using a field emission scanning electron microscope having the same composition as the above-mentioned carbide substrates (drills) D-1 to D-8 and having dimensions of plane: 12 mm × 12 mm and thickness: 6 mm. A specimen for preparing an inclination angle number distribution graph was also prepared.

  Next, the cutting edges of these carbide substrates (drills) D-1 to D-8 are honed, and ultrasonically washed in acetone together with the above test pieces, and then dried, as shown in FIG. The carbide substrate surface modification treatment was performed under the same conditions as in Example 1, and the target composition and target layer thickness (Ti, Al, Si) shown in Table 8 were charged. ) By drilling the N layer, drills made of the surface-coated cemented carbide of the present invention (hereinafter referred to as the present coated carbide drill) 1 to 8 as the coated carbide tool of the present invention were produced.

  For the purpose of comparison, the surface of the above-mentioned carbide substrate is subjected to Ti bombard cleaning treatment in place of the above-described carbide substrate surface modification treatment by W bombardment treatment under the same conditions as in Example 1. Is a conventional surface-coated cemented carbide drill (hereinafter referred to as a conventional coated carbide drill) as a conventional coated carbide tool as shown in Table 8 by depositing a (Ti, Al, Si) N layer under the same conditions. 1) to 8 were produced.

Next, of the present invention coated carbide drills 1-8 and conventional coated carbide drills 1-8, the present invention coated carbide drills 1-3 and conventional coated carbide drills 1-3,
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / SKD61 plate material,
Cutting speed: 60 m / min. ,
Feed: 0.1 mm / rev. ,
Hole depth: 8mm
With respect to the tool steel wet high-speed drilling cutting test under the conditions (normal cutting speed is 30 m / min.), The present invention coated carbide drills 4-6 and conventional coated carbide drills 4-6,
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / FC200 plate material,
Cutting speed: 110 m / min. ,
Feed: 0.24mm / rev,
Hole depth: 16mm
With regard to the cast iron wet high speed drilling cutting test under the conditions (normal cutting speed is 60 m / min.), The present coated carbide drills 7 and 8 and the conventional coated carbide drills 7 and 8,
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / SCM435 plate material,
Cutting speed: 80 m / min. ,
Feed: 0.18mm / rev,
Hole depth: 32mm
Wet high-speed drilling test (normal cutting speed is 40 m / min.) Of alloy steel under the above conditions, respectively, and any wet drilling test (using water-soluble cutting oil) escapes the tip cutting edge surface The number of drilling processes until the surface wear width reached 0.3 mm was measured. The measurement results are shown in Table 8.

As a result, the coated carbide tips 1 to 16 of the present invention, the coated carbide end mills 1 to 8 of the present invention, the coated carbide drills 1 to 8 of the present invention, and the conventionally coated carbide tools of the present invention. The composition of the (Ti, Al, Si) N layer of the conventional coated carbide tips 1 to 16, the conventional coated carbide end mills 1 to 8, and the conventional coated carbide drills 1 to 8 was measured using an Auger spectrometer. As a result, each showed substantially the same composition as the target composition.
Moreover, when the thickness of the (Ti, Al, Si) N layer of these coated carbide tools of the present invention and the conventional coated carbide tools was measured by a cross-section using a scanning electron microscope, both were substantially the target value. The same average layer thickness (average value of 5-point measurement) was shown.

Further, a gradient angle distribution graph was prepared for each of the (Ti, Al, Si) N layers of the above-described coated carbide tool of the present invention and the conventional coated carbide tool using a field emission scanning electron microscope.
That is, the tilt angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surface of the (Ti, Al, Si) N layer is a polished surface, and 70 is applied to the polished surface. An electron backscatter diffraction image apparatus is irradiated by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle of 15 degrees with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Using a 30 × 50 μm region at an interval of 0.1 μm / step, the inclination angle formed by the normal of the {100} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface polished surface Based on the measurement results, the measurement inclination angles within the range of 0 to 45 degrees out of the measurement inclination angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each division are tabulated. Created by.

In the gradient angle distribution graphs of various (Ti, Al, Si) N layers obtained as a result, the (Ti, Al, Si) N layers of the coated carbide tool of the present invention are shown in Tables 3, 7, and As shown in FIG. 8, each of the {100} planes shows a slope angle distribution graph in which the highest peak appears in the slope section where the measured slope angle distribution is in the range of 8 to 20 degrees. As shown in Table 4, Table 7, and Table 8, the (Ti, Al, Si) N layer of the carbide tool has a measured inclination angle distribution on the {100} plane within the range of 0 to 45 degrees. It shows an inclination angle distribution graph that is unbiased and has no highest peak.
In Table 3, Table 4, Table 7, and Table 8, the inclination angle number distribution graph of the (Ti, Al, Si) N layer of the above-described coated carbide tool of the present invention and the conventional coated carbide tool is 8 to The ratio of the inclination angle number existing in the inclination angle section within the range of 20 degrees to the inclination angle number of the entire graph is shown.
2 is an inclination angle number distribution graph of the (Ti, Al, Si) N layer of the coated carbide tip 1 of the present invention, and FIG. 3 is a (Ti, Al, Si) N layer of the conventional coated carbide tip 1. The inclination angle number distribution graphs are respectively shown.

  From the results shown in Tables 3-8, in the coated carbide tools of the present invention, the {100} plane of the (Ti, Al, Si) N layer constituting the hard coating layer is 8-20 in the inclination angle number distribution graph. In contrast to the highest peak in the tilt angle section within the range of degrees and excellent wear resistance, the hard coating is unbiased in the measured tilt angle distribution of the {100} plane within the range of 0 to 45 degrees. In conventional coated carbide tools composed of (Ti, Al, Si) N layers, which show a distribution graph of the tilt angle without the highest peak, the wear progresses relatively quickly and can be used in a relatively short time. It is clear that it reaches the end of its life.

  As described above, the coated carbide tool of the present invention exhibits excellent wear resistance even when continuous cutting and intermittent cutting of various steels and cast irons are performed under high-speed cutting conditions, and excellent cutting over a long period of time. Since it demonstrates its performance, it can respond satisfactorily to labor saving, energy saving, and cost reduction in cutting.

It is a schematic explanatory diagram showing the measurement range of the tilt angle with respect to the normal of the surface polished surface where the normal of the {100} plane which is the crystal plane of the crystal grains in the various (Ti, Al, Si) N layers constituting the hard coating layer is there. It is an inclination angle number distribution graph of the {100} plane of the (Ti, Al, Si) N layer constituting the hard coating layer of the coated carbide chip 1 of the present invention. It is a gradient angle number distribution graph of the {100} plane of the (Ti, Al, Si) N layer constituting the hard coating layer of the conventional coated carbide chip 1. It is a schematic explanatory drawing of the arc ion plating apparatus used for formation of the (Ti, Al, Si) N layer which comprises the hard coating layer of this invention coated carbide tool. It is a schematic explanatory drawing of the arc ion plating apparatus used for formation of the (Ti, Al, Si) N layer which comprises the hard coating layer of the conventional coated carbide tool.

Claims (1)

Using an arc ion plating device, the surface of the substrate made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet was subjected to Cr bombardment treatment (surface modification treatment) ,
Compositional formula: (Ti _{1− (X + Z)} Al _X Si _Z ) N (wherein X is 0.45 to 0.70 and Z is 0.01 to 0.15 in atomic ratio), and The hard coating layer is composed of a composite nitride layer of Ti, Al and Si formed by physical vapor deposition with an average layer thickness of 1 to 15 μm ,
The composite nitride layer of Ti, Al, and Si that constitutes the hard coating layer described above uses a field emission scanning electron microscope, and each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface has electrons. A {100} plane which is a crystal plane of the crystal grain with respect to the normal line of the surface polished surface at an interval of 0.1 μm / step using an electron backscatter diffraction image apparatus The inclination angle formed by the normal line is measured, and among the measurement inclination angles, the measurement inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, and the frequency existing in each division In the inclination angle distribution graph obtained by summing up, the highest peak exists in the inclination angle section within the range of 8 to 20 degrees, and the total of the frequencies existing within the range of 8 to 20 degrees is the inclination angle number. Occupies 45-65% of the total frequency in the distribution graph Showing an inclination angle number distribution graph,
A coated cemented carbide cutting tool with a hard coating layer featuring excellent wear resistance.

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