JP4583984B2 - Vacuum device - Google Patents

Description

  The present invention relates to a vacuum apparatus having a configuration such as a scanning electron microscope (SEM).

  Development of a microscope (vacuum device) that measures the electrical properties of a sample by bringing a metal probe (probe) into contact with the surface of the sample placed in the sample chamber (vacuum chamber) of a scanning electron microscope (SEM). ing. In such a microscope, for example, a prober equipped with a probe is provided on a moving base arranged in a sample chamber, the probe tip of the prober is brought into contact with the sample surface, and the current flowing on the sample is measured by the probe. Is being measured through.

  In FIG. 1, the schematic block diagram of the principal part of the said microscope in the prior art is shown. In the figure, reference numeral 1 denotes a sample chamber (vacuum chamber). The sample chamber 1 has a sample 10 to be measured disposed therein and is evacuated by a vacuum exhaust system (not shown). Furthermore, a lens barrel (not shown) having an electron optical system is provided in the upper part of the vacuum chamber 1. The sample chamber 1 is provided with a detector (not shown) for detecting information from the sample 10.

  Thereby, the sample 10 in the sample chamber 1 is scanned with an electron beam by the electron optical system, and sample information such as secondary electrons generated in response to the scanning of the electron beam can be detected by the detector. Typical sample information acquired in this way is an SEM image of the sample surface.

  In addition, a sample exchange chamber (vacuum preparatory chamber) 2 is connected to the sample chamber 1 via an on-off valve 3. The sample exchange chamber 2 is a space for exchanging the sample 10 disposed in the sample chamber 1, and is evacuated by a vacuum exhaust system (not shown).

  The moving base 4 moves between the sample exchange chamber 2 and the sample chamber 1. A prober 5 is placed on the moving base 4. The prober 5 includes a probe (not shown), a socket 6 electrically connected to the probe, a sample stage 11 and the like. A sample 10 is placed on the sample stage 11.

  The sample chamber 1 is provided with a plug 7 for fitting into a socket 6 provided in the prober 5 for electrical connection. The plug 7 is supported by one end of the support bar 9. The support bar 9 is movably held on the side wall of the sample chamber 1 by the guide portion 8. A knob 9 a is attached to the other end of the support bar 9.

  A wiring cable 13 is connected to the plug 7. The wiring cable 13 is connected to a measurement unit (not shown) disposed outside the sample chamber 1 via a feedthrough 12 provided on the side wall of the sample chamber 1. Therefore, when the socket 6 and the plug 7 are fitted, the probe provided in the prober 5 is electrically connected to the measurement unit via the wiring cable 13. Thereby, the electrical property etc. of the sample 10 can be measured by the measuring unit via the probe.

  In the microscope apparatus having the above configuration, when the sample 10 is placed on the sample stage 11 provided in the prober 5, the moving base 4 is moved to the sample exchange chamber 2. Thereby, the prober 5 placed on the moving base 4 is arranged in the sample exchange chamber 2. In this state, the upper cover (not shown) of the sample exchange chamber 2 is opened, and the sample 10 is placed on the sample stage 11 of the prober 5 by manual operation by the operator.

  Thereafter, the upper lid is closed and the sample exchange chamber 2 is evacuated. When the degree of vacuum in the sample chamber 1 that is constantly evacuated and the degree of vacuum in the sample exchange chamber 2 become approximately the same, the on-off valve 3 is opened and the moving base 4 is moved in the direction of arrow B in the figure. And the moving base 4 is moved into the sample chamber 1 through the on-off valve 3.

  As a result, the prober 5 and the sample 10 placed on the moving base 4 also move into the sample chamber 1. After the prober 5 moves into the sample chamber 1, the on-off valve 3 is closed.

  Thereafter, the operator operates the support bar 9. That is, the operator manually operates the support bar 9 via a knob 9 a attached to the other end of the support bar 9. Specifically, the operator moves the knob 9 in the direction of arrow A in the drawing. As a result, the plug 7 attached to one end of the support bar 9 also moves in the direction of the arrow A, and the plug 7 engages with the socket 6. As a result, the socket 6 and the plug 7 are electrically connected, and the probe provided in the prober 5 and the wiring cable 13 are connected via the socket 6 and the plug 7.

  In this state, the surface of the sample 10 is scanned with an electron beam, whereby an SEM image of the sample surface is acquired. Further, based on the SEM image, when the probe of the prober 5 comes into contact with a predetermined portion of the sample surface, the measurement unit can measure the electrical characteristics and the like of the sample 10 through the probe.

  There is also a sample exchange chamber provided with a second gate valve for closing the opening of the sample chamber after the sample stage is moved from the sample exchange chamber to the sample chamber (see, for example, Patent Document 1).

JP 2004-95477 A

  In the microscope apparatus having the above-described configuration, the socket 6 and the plug 7 are fitted after the prober 5 is transported into the sample chamber 1, whereby the electrical connection between the probe and the measurement unit is performed via the wiring cable 13. Connecting. Therefore, when the number of the wiring cables 13 is increased, the number of pins of the plug / socket pair is also increased, which may make it difficult to connect each other.

  In order to prevent the use of separate plug / socket pairs for the voltage application cable for applying voltage to the probe and the detection cable for detecting the current, etc. When individual plug / socket pairs are used for individual detection cables, it takes much time to fit and connect all the plug / socket pairs, which is not efficient.

  Furthermore, as described above, an apparatus using a plug / socket pair provided in the sample chamber 1 requires a space for arranging the plug / socket pair in the sample chamber 1. Space saving cannot be achieved.

  The present invention has been made in view of such a point, and by connecting a cable storage chamber for storing a wiring cable to a sample chamber (vacuum preliminary chamber), one end of the wiring cable is arranged. It is an object of the present invention to provide a vacuum apparatus that can be connected in advance to a moving body such as a prober and the like, and does not require the use of the plug / socket pair.

  A vacuum apparatus according to the present invention includes a vacuum chamber and a vacuum preliminary chamber connected to the vacuum chamber via an on-off valve, and the movable body to which one end of the wiring cable is connected is located between the vacuum chamber and the vacuum preliminary chamber. In the vacuum device that moves the cable, the cable storage chamber for storing the wiring cable is connected to the vacuum preliminary chamber, and the wiring cable is bridged by a pair of chains that mesh with the fixed sprocket pair and the moving sprocket pair. It is supported by a plurality of cable support members.

  In the present invention, a cable storage chamber for storing a wiring cable having one end connected to a moving body that moves between the vacuum chamber and the vacuum preliminary chamber is connected to the vacuum preliminary chamber.

  Therefore, the wiring cable corresponding to the length corresponding to the moving amount of the moving body between the vacuum chamber and the vacuum preparatory chamber can be stored in the cable storage chamber, so that one end of the wiring cable is preliminarily attached to the moving body. Can be connected.

  Accordingly, there is no need to provide a plug / socket pair to be fitted in the vacuum chamber in the vacuum chamber, and there is no problem caused by using the plug / socket pair.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a schematic configuration diagram of a main part of the vacuum apparatus (microscope) in the present invention. In the figure, 21 is a sample chamber (vacuum chamber). The sample chamber 21 has a sample 58 to be measured disposed therein, and is evacuated by a vacuum exhaust system (not shown). In FIG. 2, the sample 58 is not located in the sample chamber 21.

  A lens barrel 20 having an electron optical system is provided on the upper portion of the sample chamber 21. In addition, a detector (not shown) for detecting information from the sample 58 is provided inside the sample chamber 21.

  Thereby, when the sample 58 is arranged in the sample chamber 21, the electron beam is scanned on the sample 58 by the electron optical system provided in the lens barrel 20. The sample information such as secondary electrons can be detected by the detector in accordance with the scanning of the electron beam. The sample information acquired in this way is, for example, an SEM image of the sample surface.

  A support stage 38 is provided in the sample chamber 21. The support stage 38 is held by a stage holding unit 39 fixed to the side wall of the sample chamber 21.

  Further, a sample exchange chamber (vacuum preparatory chamber) 26 is connected to the sample chamber 21 via an open / close valve 37. The sample exchange chamber 26 is a space for exchanging the sample 58 disposed in the sample chamber 21, and is evacuated by a vacuum exhaust system (not shown).

  In FIG. 2, a prober 23 and a connector support portion 22 are disposed in the sample exchange chamber 26. The prober 23 and the connector support portion 22 constitute a moving body 24.

  Here, the detailed structure of the moving body 24 is shown in FIG. As shown in the figure, the moving body 24 includes a connector support portion 22 and a prober 23. The moving body 24 is placed on the moving base 25. The connector support portion 22 is for supporting the connector 35.

  The prober 23 includes a base 51, a sample stage 57 disposed on the base 51, and a plurality of probe mechanisms 59. A sample 58 is placed on the upper surface of the sample stage 57.

  The probe mechanism 59 includes an X direction moving mechanism 52, a Y direction moving mechanism 53, and a Z direction moving mechanism 54. On the Z-direction moving mechanism 54, a probe support portion 55 having a probe (probe) 56 at the tip is disposed. Here, the XY plane by the X direction and the Y direction is a horizontal plane, and the X direction is a vertical direction.

  As a result, the probe mechanism 59 includes the X-direction moving mechanism 52, the Y-direction moving mechanism 53, the Z-direction moving mechanism 54, the probe support portion 55, and the probe 56. Each of the moving mechanisms 52 to 54 is driven by a piezoelectric element (not shown) provided individually.

  Here, the probe support portion 55 is appropriately moved in the X direction, the Y direction, and the Z direction by driving the moving mechanisms 52 to 54 by the piezo elements. The probe 56 supported by the probe support portion 55 also moves as the probe support portion 55 moves. When measuring the electrical characteristics of the sample 58 placed on the sample stage 57, the probe 56 is moved so that its tip contacts the sample 58, and the electrical characteristics are measured via the probe 56 in this state. . In the example of FIG. 3, two probe mechanisms 59 are illustrated on the base 51.

  One end side of the wiring 36 is connected to the probe 56 in each probe mechanism 59. Further, the other end of the wiring 36 is connected to one end 35 a of the connector 35. One end 29 a of the wiring cable 29 is connected to the other end 35 b of the connector 35. Here, the one end portion 25 a and the other end portion 25 b are detachably connected to a connector main body 35 c constituting the connector 35. Thereby, the one end 29 of the wiring cable 29 is detachably connected to the moving body 24 via the connector 35. Although not shown, the connection form of the power supply wiring for operating the piezo element is the same, and one end of the wiring is connected to the corresponding piezo element.

  As shown in FIGS. 2 and 3, the moving body 24 composed of the prober 23 and the connector support portion 22 is placed on the moving base 25. The moving base 25 is driven by driving means (not shown). The sample exchange chamber 26 and the sample chamber 21 are moved via an open / close valve 37. Here, a protruding portion 25 b is formed at the base end portion 25 c of the moving base 25. The protruding portion 25b contacts the side surface of the connector support portion 22, and details thereof will be described later.

  As shown in FIG. 2, a cable storage chamber 27 is connected to the lower portion of the sample exchange chamber 26. The cable storage chamber 27 and the sample exchange chamber 26 communicate with each other, and the cable storage chamber 27 is for storing the wiring cable 29.

  Here, a fixed sprocket pair (two fixed sprockets) 31 is provided at the boundary between the sample exchange chamber 26 and the cable storage chamber 27. The fixed sprocket pair 31 is rotatable about a fixed shaft 31c, and the position of the fixed shaft 31c is fixed.

  In the cable storage chamber 27, a pair of moving sprockets (two moving sprockets) 32 is provided. The moving sprocket pair 32 is rotatable about a moving shaft 32c, and the moving shaft 32c is movable in the cable storage chamber 27 in the vertical direction. In FIG. 2, one fixed sprocket 31 a configuring the fixed sprocket pair 31 is illustrated, and one moving sprocket 32 a configuring the moving sprocket pair 32 is illustrated.

  Here, the tip of the constant load spring 28 is attached to the moving shaft 32c. The base end portion of the constant load spring 28 is fixed to the bottom surface 27 a in the cable storage chamber 27. Thereby, a fixed elastic force is applied downward to the moving sprocket pair 32 by the constant load spring 28 via the moving shaft 32c.

  A pair of long chains 30 is fitted to the fixed sprocket pair 31 and the moving sprocket pair 32. One end 30 a of the chain 30 is connected to a connector support 40 that constitutes the moving body 24. The intermediate portion of the chain 30 is bridged to the fixed sprocket pair 31 and the moving sprocket pair 32, and the other end portion 30b of the chain 30 is attached to the fixed shaft 30c.

  Further, the wiring cable 29 in which one end 29 a is connected to the other end 35 b of the connector 35 is arranged between its pair of chains 30, and the middle part (the middle part of the wiring cable 29) is a pair of chains 30. It is adapted to be along the longitudinal direction. The other end 29 b of the wiring cable 29 is connected to the external cable 34 through a feedthrough provided on the side wall of the cable housing portion 27. The external cable 34 is connected to a measuring device (not shown).

  With this configuration, the probe 56 of the prober 23 is electrically connected to the measurement apparatus via the wiring 36, the wiring cable 29, and the external wiring 34. Also, each piezo element provided in the prober 23 is connected to a driving power supply device (not shown) with the same configuration. That is, each piezo element is electrically connected to the drive power supply device via the wiring 36, the wiring cable 29, and the external wiring 34.

  Here, a perspective view of a part of the apparatus including the connector support 40, the pair of chains 30 connected to the connector support 40, and the moving base 25 when placed in the sample exchange chamber 26 is shown. As shown in FIG. As shown in the figure, one end portion 30 a of the pair of chains 30 is connected to a connector support portion (only a part is shown) 40. Further, the pair of chains 30 are fitted to the fixed sprocket pair 31 as described above.

  A plurality of cable support members 41 are bridged and arranged in the pair of chains 30 so as to be orthogonal to the longitudinal direction of the chains 30. These cable support members 41 are composed of a long support plate 41 a attached on a pair of chains 30 and a cable holder 41 b attached to the lower surface of the support plate 41.

  The longitudinal direction of the support plate 41 a is orthogonal to the longitudinal direction of the pair of chains 30. The cable holder 41b is also formed in a long shape, and bent portions 41c are provided at both ends thereof. The bent portion 41c is fixed to the lower surface of the support plate 41a. Thereby, the wiring cable 29 is arrange | positioned in the space 41d formed by the intermediate part upper surface of the cable holder 41b, and the lower surface of the support plate 41a facing the said intermediate part upper surface. The distribution cable 29 is supported by the cable support member 41 by being held by the cable holder 41b. The wiring cable 29 passes through the opening 40a formed in the connector support portion 40, and one end 29a of the wiring cable 29 is connected to the other end 35b of the connector 35 as described above.

  Further, rollers 43 are attached to both ends of each cable support member 41 via support rods 43a. Each roller 43 is fitted into a recess 44 a of a long rail 44. Thereby, the position of each cable support member 41 and a pair of chain 30 is controlled. In addition, although the rail 44 is arrange | positioned at both sides so that the cable support member 41 may be pinched | interposed, in the example of FIG. 4, the one rail 44 is illustrated.

  As described above, the protruding portion 25b is formed on the base end portion 25c of the moving base 25. In the present embodiment, two protrusions 25b are formed. The protruding portion 25 b comes into contact with the side surface of the connector support portion 40. Further, a cutout portion 25d is formed at the tip portion 25a of the moving base 25. In FIG. 4, the prober 23 placed on the moving base 25 is not shown.

  Here, the fitting state of the roller 43 and the rail 44 is shown in FIG. As shown in the figure, a roller 43 is disposed at the end of the cable support member 41 via a support bar 43 a, and this roller 43 is fitted in a recess 44 a of a rail 44.

  A slide rail 45 is attached to the upper surface of the rail 44. The slide rail 45 includes an angle rail 46 that holds the rail 44, a bearing portion 47 that is fixed to the angle rail 46, and a fixed rail 49. The bearing portion 47 includes a plurality of metal balls 48, and each metal ball 48 contacts the inner surface of the fixed rail 49.

  The moving base 25 and the moving operation of the moving body 24 placed on the moving base 25 in the vacuum apparatus having such a configuration will be described below with reference to FIGS.

  In FIG. 2, with the open / close valve 37 closed, the sample exchange chamber 26 and the cable storage chamber 27 connected to the sample exchange chamber 26 are set to normal pressure, a door (not shown) provided in the sample exchange chamber 26 is opened, and the object to be measured is measured. The sample 58 to be obtained is placed on the sample stage 57 of the prober 23. At this time, the inside of the sample chamber 21 is evacuated to a predetermined degree of vacuum.

  Next, the door is closed, and the sample exchange chamber 26 and the cable storage chamber 27 are evacuated. Then, when the degree of vacuum in the sample exchange chamber 26 and the cable storage chamber 27 becomes approximately the same as the degree of vacuum in the sample chamber 21, the on-off valve 37 is opened. Thereby, the sample exchange chamber 26 and the sample chamber 21 are communicated.

  Thereafter, the moving base 25 is moved by driving means (not shown). That is, the moving base 25 is moved from the sample exchange chamber 26 into the sample chamber 21. At this time, the moving body 24 including the connector support portion 22 and the prober 23 is placed on the moving base 25. Therefore, as the moving base 25 moves, the moving body 24 placed on the moving base 25 also moves from the sample exchange chamber 26 into the sample chamber 21. At this time, since the protruding portion 25b of the moving base 25 is in contact with the side surface of the connector support portion 22, the connector support portion 22 moves while being pushed by the protruding portion 25b.

As the moving body 24 moves, the pair of chains 30 connected to the connector support portion 22 are pulled and moved in the direction of the sample chamber 21. Thereby, the fixed sprocket pair 31 and the movable sprocket pair 32 fitted to the pair of chains 30 rotate around the fixed shaft 31c and the moving shaft 32c, respectively.

  At this time, the position of the fixed sprocket pair 31 is fixed, but the moving sprocket pair 32 rises in the cable storage chamber 27 as the pair of chains 30 moves. Even when the moving sprocket pair 32 is raised, a constant elastic force is applied downward to the moving sprocket pair 32 by the constant load spring 28 via the moving shaft 32a. Therefore, a constant tension is always applied to the pair of chains 30 downward.

  Here, FIG. 6 shows a state after the movement base 25 and the moving body 24 are moved into the sample chamber 21. As shown in the figure, the moving base 25 and the moving body 24 are arranged in the sample chamber 21. Further, in the cable storage chamber 27, the moving sprocket pair 32 rises with the movement. Even in this state, a constant elastic force is applied downward to the moving sprocket pair 32 by the constant load spring 28 via the moving shaft 32a. Therefore, a constant tension is always applied to the pair of chains 30 downward. The wiring cable 29 has a length equal to or longer than the distance corresponding to the movement amount in the movement.

  In addition, the moving base 25 moves forward in the sample chamber 21 while a notch 25 d formed at the distal end portion 25 a of the moving base 25 avoids the support stage 38. As a result, the prober 23 placed on the moving base 25 is supported by the support stage 38 in the sample chamber 21.

  In this manner, an SEM image of the sample 58 placed on the sample stage 57 of the prober 23 can be acquired in a state where the prober 23 constituting the moving body 24 is disposed in the sample chamber 21. Further, by moving the probe 56 of the prober 23 and bringing it into contact with the surface of the sample 58, the electrical characteristics of the sample 58 can be measured by the measuring device via the probe 56.

  The moving base 25 is pulled back into the sample exchange chamber 26 from the state shown in FIG. 6, and an SEM image of the sample 58 is obtained or electrical characteristics are obtained with the prober 23 supported only by the support stage 38 as shown in FIG. May be measured. Here, in the state of FIG. 7, the connector support portion 22 is held by a holding mechanism (not shown).

  Thus, in the present invention, the cable storage chamber for storing the wiring cable having one end connected to the moving body moving between the vacuum chamber and the vacuum preliminary chamber is connected to the vacuum preliminary chamber.

  Therefore, the wiring cable corresponding to the length corresponding to the moving amount of the moving body between the vacuum chamber and the vacuum preparatory chamber can be stored in the cable storage chamber, so that one end of the wiring cable is preliminarily attached to the moving body. Can be connected.

  Accordingly, there is no need to provide a plug / socket pair to be fitted in the vacuum chamber in the vacuum chamber, and there is no problem caused by using the plug / socket pair.

It is a schematic block diagram of the principal part of the vacuum apparatus (microscope apparatus) in a prior art. It is a schematic block diagram of the principal part of the vacuum apparatus in this invention. It is the schematic which shows the structure of the moving body in this invention. It is a one part perspective view in the sample exchange chamber of this apparatus. It is a figure which shows the fitting state of a roller and a rail. It is a figure which shows the state which the movement base and the mobile body moved to the sample chamber. It is a figure which shows the state which pulled back the movement base in the sample exchange chamber after the moving body moved into the sample chamber.

Explanation of symbols

DESCRIPTION OF SYMBOLS 21 ... Sample chamber (vacuum chamber), 24 ... Moving body, 26 ... Sample exchange chamber (vacuum preparatory chamber), 27 ... Cable storage chamber, 29 ... Wiring cable, 29a ... One end, 37 ... Open / close valve

Claims (7)

In a vacuum apparatus comprising a vacuum chamber and a vacuum preliminary chamber connected to the vacuum chamber via an on-off valve, and a moving body to which one end of the wiring cable is connected moves between the vacuum chamber and the vacuum preliminary chamber. A cable storage chamber for storing the distribution cable is connected to the vacuum preparatory chamber, and the distribution cable is supported by a plurality of cable support members bridged by a pair of chains that mesh with the fixed sprocket pair and the movable sprocket pair. The vacuum apparatus characterized by being made. 2. The vacuum apparatus according to claim 1, wherein the cable storage chamber is connected to a lower portion of the vacuum preliminary chamber. 2. The vacuum apparatus according to claim 1, wherein an elastic force is applied downward to the pair of moving sprockets, whereby a tension is applied downward to the pair of chains. 4. The vacuum apparatus according to claim 3, wherein the elastic force applied to the moving sprocket pair is an elastic force generated by a constant load spring. The vacuum apparatus according to claim 1, wherein one end of the wiring cable is detachably connected to the moving body via a connector. 6. The vacuum apparatus according to claim 1, wherein a prober is placed on the movable body, and a prober probe and a wiring cable are electrically connected. The vacuum apparatus according to any one of claims 1 to 6, wherein a lens barrel having an electron optical system is attached to the vacuum chamber, thereby providing a configuration of a scanning electron microscope.

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