JP4566669B2 - Bubble jet device - Google Patents

Description

  The present invention relates to a bubble ejection device that ejects minute bubbles into a liquid.

Conventionally, various apparatuses for generating minute bubbles in a liquid have been proposed. One of such devices decomposes a part of a liquid (eg, water) (eg, electrolysis or photolysis) to generate a gas (eg, oxygen) and irradiates the gas with ultrasonic waves. By doing so, minute bubbles are generated. (For example, see Patent Document 1.)
JP 2003-334548 (Claim 1, paragraph 0018, FIG. 1)

  However, since the environment in which bubbles are generated (for example, the temperature and pressure of the liquid) changes, it is difficult to always apply ultrasonic vibration appropriately, and there is a problem that microbubbles cannot be stably generated. In addition, there is a problem that a device for decomposing the liquid is necessary and the types of bubbles (gas) that can be generated by decomposing the liquid are limited. Accordingly, an object of the present invention is to provide a bubble jetting device that can stably generate microbubbles of various gases.

In order to achieve the above object, the bubble jet device of the present invention is:
A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which the same gas is supplied by the same plate body and the same wall;
A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
Drive signal generating means for generating the drive signal;
Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
With
The plate is vibrated by the piezoelectric / electrostrictive element, so that the gas is injected into the liquid in the liquid tank as fine bubbles from the gas injection hole.

  According to this, the pressure of the gas in the gas supply space is adjusted by the pressure adjusting means, and a gas-liquid interface is formed in the vicinity of the gas injection port. Further, the plate body in which the gas injection port is formed is vibrated by the operation of the piezoelectric / electrostrictive element. Therefore, since this apparatus can vibrate the gas-liquid interface reliably, it is possible to stably eject microbubbles. In addition, a close-packed wave is generated in the liquid due to the vibration of the plate, and the injected microbubbles can be further broken down by the close-packed wave. Therefore, the apparatus can simultaneously generate fine bubbles (for example, bubbles having a diameter on the order of μm) and ultrafine bubbles (for example, bubbles having a diameter on the order of nm).

in this case,
The injection unit is arranged such that at least a part of the outer surface of the wall is exposed to the outside air,
The piezoelectric / electrostrictive element is preferably fixed to a part of the outer surface of the wall exposed in the outside air.

  According to this, even when the liquid enters the gas injection hole and the gas supply space, the piezoelectric / electrostrictive element does not contact the liquid. As a result, since there is no need to consider deterioration of the piezoelectric / electrostrictive element due to the interaction between the piezoelectric / electrostrictive element and the liquid, bubbles can be generated for more types of liquids and durability can be improved. An excellent bubble jetting device is provided.

Further, the jetting portion, the plate member has been configured so as to be supported by the tank via an elastically deformable member.

  According to this, since the displacement (amplitude) of the vibration of the plate can be increased, the power consumption by the piezoelectric / electrostrictive element can be reduced.

  In this case, it is preferable that the piezoelectric / electrostrictive element is fixed at a position where the elastically deformable member or part vibrates.

  According to this, since the plate can be vibrated more efficiently, the power consumption can be further reduced.

Further, the pressure adjusting means of any of the above-described bubble injection devices is
It is preferable that the pressure of the gas is adjusted based on the pressure of the liquid in the liquid tank in the vicinity of the gas injection port of the plate body.

  According to this, the gas-liquid interface can be more reliably formed at an appropriate position in the vicinity of the gas injection port, so that microbubbles can be generated more stably.

  Further, the plate of the ejection unit can be constituted by the piezoelectric / electrostrictive element. That is, a gas injection hole may be formed in the piezoelectric / electrostrictive element itself, and the gas injection hole may be exposed in the liquid.

  According to this, since the plate body and the piezoelectric / electrostrictive element are constituted by one member, the number of parts can be reduced.

  On the other hand, the plate of the injection unit can be made of ceramics. In this case, the plate body and the piezoelectric / electrostrictive element can be formed by integral firing.

  Since ceramics are not corroded by, for example, acid, a bubble jet device that can be used for more types of liquids and gases is provided.

  On the other hand, the plate of the injection unit can be made of metal.

  Since metal has a characteristic that it can be easily processed, for example, the injection direction of bubbles can be freely set by making the injection surface on which the gas injection port is formed a curved surface or the like. As a result, the direction of bubbles injected from one gas injection hole and the other direction so that the bubbles injected from one gas injection hole move away from the bubbles injected from the other gas injection holes as the gas advances in the liquid. Since the injection direction of the bubbles injected from the gas injection holes can be set, it is possible to provide a bubble injection device that reduces the possibility that the injected bubbles are recombined in the liquid.

  In any one of the above-described bubble injection devices, it is preferable that a lyophilic layer having good wettability with the liquid is formed on at least the surface of the plate around the gas injection port.

  According to this, when a plate body vibrates, while becoming easy for a liquid to enter into a gas injection hole, a bubble becomes easy to leave | separate from the circumference | surroundings of a gas injection port. As a result, smaller bubbles can be ejected.

  The piezoelectric / electrostrictive element is preferably an element in which layered piezoelectric / electrostrictive element portions and layered electrodes are alternately stacked in multiple layers.

  Such a piezoelectric / electrostrictive element can generate a large driving force (a force for deforming the plate), and therefore can vibrate the plate more reliably.

  Furthermore, it is preferable that a plurality of grooves extending in the gas injection direction are formed on the side wall surface of the through hole of the plate body constituting the gas injection hole.

  According to this, a fine uneven part can be formed in the gas-liquid interface (meniscus) of the bubble immediately before jetting. As a result, since the bubbles are separated as bubbles having the size of the formed uneven portion, finer bubbles can be generated.

Also, in any of the above bubble jetting devices,
The drive signal generating means includes
It is preferable that the drive signal is generated so as to perform an ejection operation in which the plate body is displaced in the opposite direction after being displaced toward the liquid.

  According to this, when the plate body is displaced toward the liquid, the gas-liquid interface once enters the gas injection hole, and when the plate body is displaced in the opposite direction, the gas-liquid interface forms the gas injection hole. It moves along the side wall of the plate body and swells in the liquid. At this time, the movement of the gas in the vicinity of the side wall of the plate forming the gas injection hole is restricted by the side wall. On the other hand, the gas present at the center of the gas injection hole easily moves toward the liquid. As a result, microbubbles are formed in the liquid due to the gas present at the center of the gas injection hole. Therefore, one micro bubble can be reliably ejected by one ejection operation.

In this case, the drive signal generating means is configured to generate the drive signal so as to intermittently perform the ejection operation .

  According to this, since it is possible to increase the distance between the bubbles ejected in time from one gas ejection port, these bubbles recombine in the liquid and become large bubbles. Can be avoided.

Also,
The drive signal generating means includes
It is preferable that the drive signal is generated so that the piezoelectric / electrostrictive element performs compression and extension a plurality of times to intermittently perform an injection operation in which one bubble is injected from one of the gas injection holes. is there.

  According to this, a small constriction portion is generated at the gas-liquid interface in the gas injection hole by a single compression / extension operation of the piezoelectric / electrostrictive element, and the constriction portion is generated by the subsequent compression / extension operation of the piezoelectric / electrostrictive element. Becomes larger (narrower). As a result, a part of the gas is detached from the grown constricted portion, and microbubbles are generated. Thus, since the said structure generates a bubble by growing a constriction part, the bubble which has a diameter considerably smaller than the diameter of a gas injection hole can be generated. Further, since the bubbles generated in this way are small, the rising speed in the liquid is small. Therefore, as described above, by intermittently performing the ejection operation, the distance between the microbubbles ejected in time from one gas ejection hole is increased so that these bubbles are in the liquid. It is possible to avoid joining.

Further, the drive signal generating means includes
It is preferable that the drive signal is generated so that the plate body performs a minute vibration having a cycle shorter and smaller in amplitude than the vibration in the ejection operation and superimposed on the vibration in the ejection operation.

  According to this, bubbles generated by the jetting operation can be further finely divided by minute vibration. Further, since the liquid existing in the vicinity of the plate body surface can be minutely vibrated by the surface of the plate body, the liquid can easily enter the gas injection hole. Further, the bubbles can be easily separated from the gas injection holes by the minute vibration of the plate. As a result, more fine bubbles can be ejected.

The drive signal generating means includes
It is preferable that the drive signal for changing the amplitude of the plate body in the ejection operation is generated based on the pressure of the liquid in the liquid tank in the vicinity of the gas ejection port of the plate body.

  According to this, since the position of the gas-liquid interface can be appropriately moved with respect to the gas injection port, even if the liquid pressure changes, the microbubbles can be reliably injected.

Hereinafter, each embodiment of a bubble jetting device according to the present invention will be described with reference to the drawings.
<First Embodiment>
As shown in FIG. 1, which is a longitudinal sectional view, the bubble ejection device 10 according to an embodiment of the present invention is disposed at the bottom of a liquid tank ES that stores a liquid (here, water) W. It is a device that generates minute bubbles inside. The bubble injection device 10 includes an injection unit 11, a piezoelectric / electrostrictive element 12, a pressure adjustment unit 13, a pressure detection unit 14, and an electric control device 15.

The injection unit 11 includes a plate body (injection plate) 11a and a wall 11b.
The plate body 11a is a thin plate made of ceramics and is disposed so as to form a part of the bottom of the liquid tank ES. As shown in FIG. 2, which is a cross-sectional view of the liquid tank ES cut along a plane along line 1-1 in FIG. 1, the shape of the plate body 11 a in plan view is in the X-axis and Y-axis directions orthogonal to each other. A rectangle with sides along. The plate body 11a has through holes functioning as the gas injection holes 11a1 at a plurality of locations (here, four locations). One end of the gas injection hole 11a1 constitutes a gas injection hole 11a2. The gas injection port 11a2 is disposed so as to be exposed in the liquid W in the liquid tank ES.

As shown in FIG. 1, the wall 11b includes a side wall 11b1 and an opposing wall 11b2. The side wall 11b1 is erected from the periphery of the plate body 11a. The opposing wall 11b2 is connected to the side wall 11b1 and faces the plate 11a. Thereby, the plate 11a and the wall 11b (side wall 11b1 and opposing wall 11b2) form a substantially rectangular parallelepiped gas supply space 11c. A gas supply hole H is formed in the central portion of the facing wall 11b2. The gas supply hole H is connected to the pipe P. The gas (here, oxygen O ₂ ) GS to be injected is supplied to the gas supply space 11c through the pipe P and the gas supply hole H. It can be said that the injection unit 11 configured in this way is arranged so that at least a part of the outer surface of the wall (side wall 11b1 and opposing wall 11b2) is exposed to the outside air.

  The piezoelectric / electrostrictive element (here, a piezoelectric element having a polarization direction) 12 functions as an actuator for vibrating the plate body 11a. The piezoelectric / electrostrictive element 12 is plate-shaped, and its shape in plan view is substantially rectangular as shown in FIG. The piezoelectric / electrostrictive element 12 is fixed to the plate 11a by being integrally fired with the plate 11a on the surface of the plate 11a on the gas supply space 11c side. The piezoelectric / electrostrictive element 12 has through holes 12a at a plurality of locations (here, four locations). The central axis of the through hole 12a coincides with the central axis of the gas injection hole 11a1 of the plate body 11a. The diameter of the through hole 12a is larger than the diameter of the gas injection hole 11a1. Thereby, the gas GS in the gas supply space 11c is supplied to the gas injection hole 11a1 through the through hole 12a.

  A piezoelectric element drive voltage signal (also simply referred to as “drive signal”) is supplied from an electric control device 15 to an electrode (not shown) of the piezoelectric / electrostrictive element 12 via a lead wire (not shown). The piezoelectric / electrostrictive element 12 contracts or expands in response to the piezoelectric element drive voltage signal, and displaces the plate body 11a in the direction toward the liquid W (the positive direction of the Z axis perpendicular to the X axis and the Y axis). At the same time, the plate 11a is displaced in the opposite direction (the negative direction of the Z axis).

  The pressure adjusting means 13 is a well-known adjustable pressure variable pressure regulator. The pressure adjusting unit 13 is supplied with a pressurized gas GS from a gas supply unit (not shown) (for example, a cylinder and a pump or a high-pressure cylinder). The pressure adjusting means 13 changes the passage sectional area of the pipe P based on an instruction signal from the electric control device 15 so that the pressure of the gas GS in the gas supply space 11c becomes the target pressure.

  The pressure detection means 14 is a pressure sensor. The pressure detection means 14 is disposed at the bottom of the liquid tank ES, detects the pressure Pw of the liquid W at the bottom of the liquid tank ES, and sends a signal corresponding to the detected pressure Pw to the electric control device 15. ing. Since the same liquid pressure is applied to the pressure detection unit 14 and the gas injection port 11a2, the pressure detection unit 14 detects the pressure Pw of the liquid near the gas injection port 11a2.

  The electric control device 15 includes a known microcomputer. Based on the pressure Pw of the liquid W obtained from the pressure detection means 14, the electric control device 15 sends an instruction signal to the pressure adjustment means 13 so that the gas pressure in the gas supply space 11c becomes a predetermined target pressure. It is supposed to be. The predetermined target pressure is a pressure at which a gas-liquid interface between the gas GS and the liquid W to be injected in the vicinity of the gas injection port 11a2 is formed. The electric control device 15 constitutes drive signal generating means for sending a piezoelectric element drive voltage signal to an electrode (not shown) of the piezoelectric / electrostrictive element 12.

  Next, the operation of the bubble ejection device configured as described above will be described. As shown in the time chart of FIG. 3, the electric control device 15 maintains the piezoelectric element drive voltage signal at 0 (zero) V before time t1. At this time, the gas-liquid interface (the boundary surface between the gas GS and the liquid W) M exists in the vicinity of the gas injection port 11a2 of the plate 11a as shown in FIG.

  Next, at time t1, the electric control device 15 increases the piezoelectric element drive voltage signal from 0V toward the positive voltage V1 until time t2. As a result, the piezoelectric / electrostrictive element 12 contracts in a direction along the plane of the plate body 11a, so that the plate body 11a swells in the liquid (in the positive Z-axis direction). That is, as shown in FIG. 3, the plate 11a is displaced toward the liquid. As a result, as shown in FIG. 4B, the gas-liquid interface M enters the gas injection hole 11a1.

  At time t2, the electric control device 15 decreases the piezoelectric element drive voltage signal toward the negative voltage (−V1) until time t3. As a result, the piezoelectric / electrostrictive element 12 extends in the direction along the plane of the plate body 11a, so that the plate body 11a is in the opposite direction (Z-axis negative direction, that is, from the liquid W). Displace in the direction of moving away). As a result, as shown in FIG. 4C, the gas-liquid interface M swells greatly into the liquid from the gas injection holes 11a1, and is ejected as fine bubbles.

  Thereafter, at time t3, the electric control device 15 increases the piezoelectric element drive voltage signal toward 0 V until time t4. As a result, the piezoelectric / electrostrictive element 12 returns to the initial state before time t1, and the displacement of the plate 11a also returns to the initial state before time t1. After time t4, the electric control device 15 maintains the piezoelectric element drive voltage signal at 0V. The operation at the times t1 to t4 (piezoelectric driving cycle Ts) is a single injection operation.

  Thereafter, at time t5 when the intermittent drive cycle Tint has elapsed from time t1, the electric control device 15 again generates the same piezoelectric element drive voltage signal as from time t1 to t4, and performs the next one ejection operation as a piezoelectric. / The electrostrictive element 12 and the plate 11a are executed. As a result, the micro bubbles FG are ejected one by one from the gas ejection port 11a2 every intermittent drive cycle Tint.

  As a result, the distance between two bubbles ejected from the one gas ejection port 11a2 (one gas ejection hole 11a1) in succession in time can be increased. It is possible to avoid joining and forming large bubbles.

  As described above, in the bubble injection device 10 according to the first embodiment, the pressure adjusting means 13 adjusts the pressure of the gas GS in the gas supply space 11c, and the gas-liquid interface M is formed in the vicinity of the gas injection port 11a2. It is formed. Further, the plate body 11 a in which the gas injection port 11 a 2 is formed is vibrated by the operation of the piezoelectric / electrostrictive element 12.

  Therefore, since this apparatus 10 can vibrate the gas-liquid interface M reliably, it can inject the micro bubble FG stably. In addition, a dense wave is generated in the liquid W due to the vibration of the plate 11a, and the injected microbubbles FG can be further divided by the dense wave. Therefore, the apparatus 10 can simultaneously generate fine bubbles (for example, bubbles having a diameter on the order of μm) and ultrafine bubbles (for example, bubbles having a diameter on the order of nm).

  Further, the bubble jet device 10 detects the pressure Pw of the liquid W in the liquid tank ES in the vicinity of the gas jet port 11a2 of the plate 11a, and the pressure of the gas GS in the gas supply space 11c based on the detected pressure Pw. Configured to adjust. Therefore, for example, even when the pressure of the liquid W in the vicinity of the gas injection port 11a2 changes due to a change in the amount of the liquid W in the liquid tank ES, the gas-liquid interface is located at an appropriate position in the vicinity of the gas injection port 11a2. M can be formed more reliably. As a result, the bubble ejection device 10 can generate microbubbles more stably.

  Further, in the bubble ejection device 10, a drive voltage signal is supplied to the piezoelectric / electrostrictive element 12 so as to perform an ejection operation in which the plate 11 a is displaced toward the liquid W and then displaced in the opposite direction.

  Thereby, when the plate body 11a is displaced toward the liquid W, the gas-liquid interface M once enters the gas injection hole 11a1, and then the gas-liquid interface M of the plate body 11a forming the gas injection hole 11a1. It moves along the side wall and swells in the liquid W. At this time, the movement of the gas GS near the side wall of the plate body forming the gas injection hole 11a1 is restricted by the side wall. On the other hand, the gas GS present at the center of the gas injection hole 11a1 easily moves toward the liquid W. As a result, a micro bubble FG is formed in the liquid W by the gas GS present in the center of the gas injection hole 11a1. Therefore, one micro bubble can be reliably ejected by one ejection operation.

  Further, the plate body 11a of the injection unit 11 is made of ceramics, and the plate body 11a and the piezoelectric / electrostrictive element 12 are formed by integral firing. Ceramics are not corroded by acid or the like, for example. Therefore, the bubble ejection device 10 is a bubble ejection device that can be used for more types of liquids and gases.

Second Embodiment
Next, a bubble injection device 20 according to a second embodiment of the present invention will be described with reference to FIGS. This bubble ejecting apparatus 20 is different from the bubble ejecting apparatus 10 of the first embodiment only in that the piezoelectric / electrostrictive element 12 of the first embodiment is replaced with a piezoelectric / electrostrictive element 21. Therefore, this difference will be mainly described below. 5 and 6, the same members as those included in the bubble ejection device 10 are denoted by the same reference numerals, and detailed description thereof is omitted.

  A piezoelectric / electrostrictive element (here, a piezoelectric element having a polarization direction) 21 functions as an actuator for vibrating the plate in response to a piezoelectric element drive voltage signal. The piezoelectric / electrostrictive element 21 has a plate shape, and is fixed to the outer surface of the opposing wall 11b2 of the ejection unit 11 (the surface on the opposite side of the gas supply space 11c). That is, the piezoelectric / electrostrictive element 21 is fixed to a part of the outer surface of the wall (opposing wall 11b2) exposed to the outside air. When the piezoelectric element driving voltage signal is applied to the electrode of the piezoelectric / electrostrictive element 21 from the electric control device, the piezoelectric / electrostrictive element 21 deforms the opposing wall 11b2, and thereby the plate body 11a is moved to the bubble jetting device 10. Displace the same as in the case of.

  The shape of the piezoelectric / electrostrictive element 21 in a plan view is substantially rectangular as shown in FIG. 6 in which the bubble ejecting device 20 is cut along a plane along line 2-2 in FIG. A through hole 21 a is formed in the center of the piezoelectric / electrostrictive element 21. The central axis of the through hole 21a coincides with the central axis of the pipe P. Further, the diameter of the through hole 21a is larger than the outer diameter of the pipe P.

  The bubble injection device 20 configured as described above can reliably inject microbubbles as with the bubble injection device 10. Furthermore, according to the bubble ejection device 20, even when the liquid W enters the gas ejection hole 11a1 and the gas supply space 11c, the piezoelectric / electrostrictive element 21 does not contact the liquid W. As a result, it is not necessary to consider the deterioration of the piezoelectric / electrostrictive element 21 due to the interaction between the piezoelectric / electrostrictive element 21 and the liquid W. Therefore, the bubble ejecting device 20 is capable of generating bubbles with respect to more types of liquids and has excellent durability.

<Third Embodiment>
Next, a bubble injection device 30 according to a third embodiment of the present invention will be described with reference to FIGS. In the bubble injection device 30, the injection unit 31 is supported via a member 33a (or elastically deformable portion 33a1) that is elastically deformable with respect to the liquid tank ES, and vibrates the elastic member or elastic portion. The point is that the piezoelectric / electrostrictive element 32 is fixed to the bubble injection device 10 of the first embodiment. Therefore, this difference will be mainly described below. 7 and 8, the same members as the constituent members included in the bubble ejection device 10 are denoted by the same reference numerals, and detailed description thereof is omitted.

  The bubble ejection device 30 is disposed at the bottom of the liquid tank ES, and includes an ejection unit 31, a piezoelectric / electrostrictive element 32, and a support unit 33. Further, the bubble injection device 30 includes a pressure adjustment means 13, a pressure detection means 14, and an electric control device 15, similarly to the bubble injection device 10.

  The injection unit 31 includes a plate body (injection plate) 31a, a side wall 31b, and an opposing wall 31c.

  The plate body 31a is disposed so as to form a part of the bottom of the liquid tank ES. As shown in FIG. 8 which is a cross-sectional view of the liquid tank ES and the bubble jetting device 30 cut along a plane along line 3-3 in FIG. A rectangle with sides along the direction.

  A plurality of (four in this case) through-holes functioning as the gas injection holes 31a1 are formed in the plate body 31a, similarly to the plate body 11a. One end of the gas injection hole 31a1 constitutes a gas injection hole 31a2. The gas injection port 31a2 is disposed so as to be exposed in the liquid W in the liquid tank ES.

  The side wall 31b is erected from the peripheral portion of the plate body 31a. The opposing wall 31c is connected to the side wall 31b and faces the plate body 31a. Thereby, the plate 31a, the side wall 31b, and the opposing wall 31c form a substantially rectangular parallelepiped gas supply space. A gas supply hole H is formed in the central portion of the facing wall 31c. The gas supply hole H is connected to the pipe P. The gas GS to be injected is supplied to the gas supply space through the pipe P and the gas supply hole H.

The support part 33 includes a support plate 33a and an outer peripheral wall 33b.
The support plate 33a is a plate body, and its outer shape is rectangular in plan view, and has a substantially square hole in the center. The inner peripheral portion of the support plate 33a is connected to the outer peripheral portion of the plate body 31a (via the side wall 31b). The upper surface of the support plate 33a exists on the same plane as the upper surface of the plate body 31a, and is disposed so as to form a part of the bottom of the liquid tank ES. The thickness of the support plate 33a is smaller than other portions at the connection portion with the outer peripheral portion of the plate body 31a. The portion having a small thickness is a thin portion 33a1 that can be elastically deformed. The outer peripheral portion (side wall 31b) of the support plate 33a is connected to the outer peripheral wall 33b. The outer peripheral wall 33b is erected from the outer periphery of the support plate 33a. The outer peripheral portion of the outer peripheral wall 33b is fixed to the bottom wall of the liquid tank ES.

  With the above configuration, the plate 31a is supported by the liquid tank ES via the support plate 33a that is an elastically deformable member (or the thin portion 33a1 that is an elastically deformable portion).

  The piezoelectric / electrostrictive element (here, a piezoelectric element having a polarization direction) 32 functions as an actuator for vibrating the plate 31a. The piezoelectric / electrostrictive element 32 has a plate shape. The outer shape of the piezoelectric / electrostrictive element 32 in plan view is a substantially rectangular shape that is slightly smaller than the inner periphery of the outer peripheral wall 33b, as shown in FIG. The piezoelectric / electrostrictive element 32 has a shape having a through hole slightly larger than the outer shape of the thin portion 33a1 of the support plate 33a at the center. The piezoelectric / electrostrictive element 32 is fixed to a surface of the support plate 33a excluding the thin portion 33a1 on the side where the liquid W does not exist.

  A piezoelectric element driving voltage signal is supplied from an electric control device 15 to an electrode (not shown) of the piezoelectric / electrostrictive element 32 via a lead wire (not shown). The piezoelectric / electrostrictive element 32 contracts or expands in response to the piezoelectric element drive voltage signal, and deforms the thin portion 33a1 of the support plate 33a. Is displaced in the opposite direction.

  The bubble injection device 30 configured as described above can reliably inject micro bubbles as with the bubble injection device 10. Furthermore, according to the bubble jetting device 30, since the plate body (jetting plate) 31a of the jetting unit 31 is supported by the liquid tank ES via the elastically deformable member or part (supporting plate 33a), piezoelectric / electrical Even if the power consumption of the strain element 32 is reduced, the displacement (amplitude) of vibration of the plate 31a can be increased.

  The piezoelectric / electrostrictive element 32 is fixed to a support plate 33a that is an elastically deformable member. Accordingly, since the piezoelectric / electrostrictive element 32 can vibrate the plate body 31a more efficiently, the power consumption of the bubble ejection device 30 can be further reduced.

<Fourth embodiment>
Next, a bubble jetting device 40 according to a fourth embodiment of the present invention will be described with reference to FIG. The bubble ejecting device 40 is different from the bubble ejecting device 10 only in that the plate 11a of the bubble ejecting device 10 and the piezoelectric / electrostrictive element 12 are integrated. That is, in the bubble jetting device 40, a plate body having a gas jetting hole 41a functioning as a jetting plate is constituted by the piezoelectric / electrostrictive element 41, and a gas jetting port 41b which is one end of the gas jetting hole 41a is a liquid W. It is exposed inside.

  According to this, since the plate body and the piezoelectric / electrostrictive element are constituted by one member (piezoelectric / electrostrictive element 41), the number of parts can be reduced.

<Fifth Embodiment>
Next, a bubble jet device 50 according to a fifth embodiment of the present invention will be described with reference to FIG. The bubble ejecting device 50 includes a plate 51 that replaces the plate 11 a of the bubble ejecting device 10. The plate body 51 includes a plurality of gas injection holes 51a similar to the gas injection holes 11a1. The lyophilic liquid has good wettability with the liquid W on the surface of the plate body 51 (on the surface exposed to the liquid W) around the gas injection port 51b formed at one end of the gas injection hole 51a. A layer 52 is formed.

  According to this, when the plate body 51 vibrates, the liquid W easily enters the gas injection hole 51a and the bubbles easily separate from the periphery of the gas injection port 51b. As a result, smaller bubbles can be jetted. In the bubble injection device 50, the lyophilic layer 52 is formed on the entire surface of the plate body 51. However, the lyophilic layer 52 only needs to be formed so as to surround at least the gas injection port 51b.

<Sixth Embodiment>
Incidentally, as shown in FIG. 11, the piezoelectric / electrostrictive element 12 of the bubble ejection device 10 is actually formed with a pair of opposed upper electrode 12U and lower electrode 12L on the upper and lower surfaces of the element. The element contracts and expands when a piezoelectric element driving voltage signal is applied between them. On the other hand, the bubble injection device 60 according to the sixth embodiment of the present invention is an apparatus that employs a piezoelectric / electrostrictive element 62 instead of the piezoelectric / electrostrictive element 12 as shown in FIG. is there.

  The piezoelectric / electrostrictive element 62 is a “stacked piezoelectric actuator” in which layered piezoelectric / electrostrictive element portions 62 s and layered electrodes 62 m are alternately stacked in multiple layers. The laminated piezoelectric / electrostrictive element 62 can generate a large driving force (a force for deforming the plate body 11a). Therefore, the plate 11a can be vibrated more reliably.

<Modified example of gas injection hole>
Next, a modified example of each gas injection hole formed in each plate described above will be described with reference to FIGS. The gas injection hole 11a1 ′ according to this modification has a plurality of grooves in the peripheral portion as shown in FIG. 13 which is a cross section cut by a plane orthogonal to the central axis (gas injection direction, Z-axis positive direction). mz. That is, in this modification, a plurality of grooves mz extending in the gas injection direction are formed on the side wall surface of the through hole of the plate 11a constituting the gas injection hole 11a1 ′.

  According to this, as shown in FIG. 14, a fine uneven part can be formed in the gas-liquid interface M (meniscus) of the bubble just before being injected. As a result, since the bubbles FG are separated as bubbles having the size of the formed uneven portion, finer bubbles can be generated.

<First Modification of Piezoelectric / Electrostrictive Element Driving Method>
Next, a first modification of the above-described piezoelectric / electrostrictive element driving method (piezoelectric element driving voltage signal) will be described with reference to FIG. The following piezoelectric / electrostrictive element driving method can be applied to each of the above-described embodiments, but here, for convenience, the first embodiment will be described as an example.

  In the first modification, the electric control device 15 decreases the piezoelectric element drive voltage signal from the reference voltage V0 (for example, 0V) toward the negative voltage −V2 between time t1 and time t2, The element drive voltage signal is increased from the voltage −V2 toward the reference voltage V0 between time t2 and time t3. Thereby, the piezoelectric / electrostrictive element 12 performs compression and expansion operations only once. From time t1 to time t3 is the piezoelectric driving cycle Ts.

  Then, at time t4 when the intermittent drive cycle Tint that is sufficiently longer than the piezoelectric drive time Ts has elapsed, the electric control device 15 performs the piezoelectric element between time t1 and time t3 between time t6 and time t6. The drive voltage signal is changed.

  According to the first modification, the piezoelectric / electrostrictive element 12 performs a piezoelectric operation consisting of one compression operation and one extension operation once every time the intermittent drive cycle Tint elapses. Accordingly, the plate body 11a first moves in the direction away from the liquid W (Z-axis negative direction). At this time, the gas-liquid interface existing in the vicinity of the gas injection hole 11a1 swells into the liquid W, and microbubbles are formed. Further, since the bubbles generated in this way are small, the rising speed in the liquid is small. On the other hand, in the first modified example, the distance between the microbubbles ejected before and after the time from one gas ejection hole 11a1 can be increased by performing the ejection operation intermittently (every period Tint). Therefore, it can be avoided that these bubbles are combined in the liquid W.

<Second Modification of Piezoelectric / Electrostrictive Element Driving Method>
Next, a second modification of the above-described piezoelectric / electrostrictive element driving method (piezoelectric element driving voltage signal) will be described with reference to FIG.

  In the second modification, a piezoelectric element driving voltage signal for generating a compression / expansion operation of the piezoelectric / electrostrictive element 12 is continuously supplied to the piezoelectric / electrostrictive element 12 a plurality of times every intermittent driving cycle Tint. is there. In the second modification, the piezoelectric element drive voltage signal is increased from the reference voltage V0 by the voltage V2 immediately after time t1 to time t2, and then immediately decreased to the reference voltage V0, and the piezoelectric element drive voltage signal is continuously repeated. It occurs (twice in the example of FIG. 16). In other words, from time t1 to time t2 is one piezoelectric drive cycle Ts, in the second modification, a plurality of cycles (n · Ts, where n is an integer of 2 or more) are continuously performed in one injection operation. Repeat the piezoelectric drive.

  According to the second modified example, the piezoelectric / electrostrictive element 12 continuously performs a plurality of one piezoelectric operations including one compression operation and one expansion operation every time the intermittent drive cycle Tint elapses. Do it once. Accordingly, a small constriction is generated at the gas-liquid interface in the gas injection hole 11a1 by a single compression and expansion operation of the piezoelectric / electrostrictive element 12, and the constriction is generated by the subsequent compression / extension operation of the piezoelectric / electrostrictive element 12. Gradually increases, and as a result, a part of the gas is detached from the grown constricted portion to form microbubbles. Therefore, the second modification can generate bubbles having a diameter that is considerably smaller than the diameter of the gas injection hole 11a1. In the second modified example, the injection operation is performed intermittently (every cycle Tint). Therefore, it is possible to avoid the bubbles from being combined in the liquid.

<Third Modification of Piezoelectric / Electrostrictive Element Driving Method>
Next, a third modification of the above-described piezoelectric / electrostrictive element driving method (piezoelectric element driving voltage signal) will be described with reference to FIG.

  The electric control device 15 of the third modification increases from the reference voltage V0 by the predetermined voltage V3, then decreases from the reference voltage V0 to a voltage that is smaller by the predetermined voltage V3, and then returns to the reference voltage V0. A piezoelectric element driving voltage signal is generated by superimposing a minutely oscillating voltage signal (minute voltage signal) at times t1 to t2 and t3 to t4 in FIG. In this case, when the reference injection signal changes greatly every intermittent drive cycle Tint, one injection operation is performed, and bubbles are injected. The minute voltage signal is a signal having an amplitude that is extremely smaller than the amplitude of the reference injection signal and changing with a period (high frequency) that is extremely shorter than the period of the reference injection signal. The minute voltage signal is always generated regardless of the injection operation.

  By this drive voltage signal, the plate body 11a including the gas injection holes performs a micro vibration having a shorter cycle and a smaller amplitude than the vibration in the injection operation, superimposed on the vibration in the injection operation.

  According to this, bubbles generated by the jetting operation can be further finely divided by minute vibration. Furthermore, since the liquid W existing in the vicinity of the surface of the plate 11a can be minutely vibrated by the surface of the plate 11a, the liquid W can easily enter the gas injection hole 11a1. Furthermore, the bubbles can be easily separated from the gas injection holes 11a1 by the minute vibrations of the plate 11a. As a result, more fine bubbles can be ejected.

<Fourth Modification of Piezoelectric / Electrostrictive Element Driving Method>
In the fourth modified example of the piezoelectric / electrostrictive element driving method (piezoelectric element driving voltage signal), the pressure sensor 14 detects the amplitude of each piezoelectric element driving voltage signal (basic injection signal in the third modified example) described above. This is a method of changing the amplitude of the plate 11a in the ejection operation by changing the pressure based on the pressure Pw of the liquid W at the bottom of the liquid tank ES to be performed (and hence the liquid pressure in the vicinity of the gas ejection port 11a2). In this case, for example, the amplitude of the plate 11a may be increased as the pressure Pw is increased.

  According to this, since the position of the gas-liquid interface can be appropriately moved with respect to the gas injection port 11a2, even if the liquid pressure Pw changes, it is possible to reliably inject microbubbles.

  As described above, according to the bubble ejection device according to each embodiment of the present invention, the plate body provided with the gas ejection holes is vibrated, so that microbubbles can be reliably generated. In addition, this invention is not limited to said each embodiment, A various modification can be employ | adopted within the scope of the present invention.

  For example, although the plate body (injection plate) of each of the above embodiments is made of ceramics, it can be made of metal.

  Since metal has a characteristic that it can be easily processed, for example, by making the injection surface of the plate 11a on which the gas injection port 11a2 is formed a curved surface or the like, the injection direction of the bubbles (the central axis of the gas injection hole) (Axial direction) can be set freely. As a result, the bubbles injected from one gas injection hole 11a1 are separated from the bubbles injected from the other gas injection holes 11a1 as the bubbles injected from one gas injection hole 11a1 travel in the liquid. The direction and the injection direction of the bubbles injected from the other gas injection holes 11a1 can be set. As a result, it is possible to provide a bubble injection device that reduces the possibility that the injected bubbles recombine in the liquid.

It is a longitudinal cross-sectional view of the bubble injection apparatus which concerns on 1st Embodiment of this invention. It is sectional drawing which cut | disconnected the liquid tank in the plane along the 1-1 line | wire of FIG. It is the time chart which showed the displacement of the board of the bubble injection apparatus shown in FIG. 1, and the piezoelectric element drive voltage signal. 4A shows the gas-liquid interface when the plate shown in FIG. 1 is not displaced, and FIG. 4B shows the gas-liquid when the plate shown in FIG. 1 is displaced toward the liquid. FIG. 4C is a diagram showing the state of the gas-liquid interface when the plate shown in FIG. 1 is displaced away from the liquid. It is a longitudinal cross-sectional view of the bubble injection apparatus which concerns on 2nd Embodiment of this invention. It is sectional drawing which cut | disconnected the bubble injection apparatus in the plane along the 2-2 line of FIG. It is a longitudinal cross-sectional view of the bubble injection apparatus which concerns on 3rd Embodiment of this invention. It is sectional drawing which cut | disconnected the bubble injection apparatus in the plane along the 3-3 line of FIG. It is a fragmentary longitudinal cross-sectional view of the bubble injection apparatus which concerns on 4th Embodiment of this invention. It is a fragmentary longitudinal cross-sectional view of the bubble injection apparatus which concerns on 5th Embodiment of this invention. It is a fragmentary longitudinal cross-sectional view of the bubble injection apparatus shown in FIG. It is a fragmentary longitudinal cross-sectional view of the bubble injection apparatus which concerns on 6th Embodiment of this invention. It is sectional drawing of the gas injection hole which shows the modification of a gas injection hole. It is the figure which showed the mode at the time of a bubble being injected from the gas injection hole shown in FIG. It is the time chart which showed the 1st modification of the drive method (piezoelectric element drive voltage signal) of a piezoelectric / electrostrictive element. It is the time chart which showed the 2nd modification of the drive method (piezoelectric element drive voltage signal) of a piezoelectric / electrostrictive element. It is the time chart which showed the 3rd modification of the drive method (piezoelectric element drive voltage signal) of a piezoelectric / electrostrictive element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Bubble injection apparatus, 11 ... Injection part, 11a ... Plate body, 11a1 ... Gas injection hole, 11a2 ... Gas injection port, 11b ... Wall, 11b1 ... Side wall, 11b2 ... Opposite wall, 11c ... Gas supply space, 12 ... Piezoelectric / Electrostrictive element, 12a ... through hole, 13 ... pressure adjusting means, 14 ... pressure sensor (pressure detecting means), 15 ... electric control device, 20 ... bubble injection device, 21 ... piezoelectric / electrostrictive element, 21a ... through hole , 30 ... Bubble injection device, 31 ... Injection part, 31a ... Plate body, 31a1 ... Gas injection hole, 31a2 ... Gas injection port, 31b ... Side wall, 31c ... Opposite wall, 32 ... Piezoelectric / electrostrictive element, 33 ... Support part 33a ... support plate (support member), 33a1 ... thin wall portion, 33b ... outer peripheral wall, 40 ... bubble injection device, 41 ... piezoelectric / electrostrictive element, 41a ... gas injection hole, 41b ... gas injection port, 50 ... bubble injection Device 51 ... Plate body 5 a ... gas injection hole, 51b ... gas injection port, 52 ... lyophilic layer, 60 ... bubble injection device, 62 ... electrostrictive element, 62m ... electrode, 62s ... electrostrictive element part, ES ... liquid tank, FG ... microbubbles GS ... gas, M ... gas-liquid interface, W ... liquid, H ... gas supply hole, mz ... groove.

Claims (17)

A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body an injection unit to form a gas supply space Riki body by the same plate body and the walls are provided,
A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
Drive signal generating means for generating the drive signal;
Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
With
In the bubble ejecting apparatus that ejects the gas as fine bubbles from the gas ejection hole into the liquid in the liquid tank by vibrating the plate body by the piezoelectric / electrostrictive element ,
The injection unit is
A bubble jetting device configured to be supported by the liquid tank via a member or a portion that is elastically deformable. A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
Drive signal generating means for generating the drive signal;
Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
With
In the bubble ejecting apparatus that ejects the gas as fine bubbles from the gas ejection hole into the liquid in the liquid tank by vibrating the plate body by the piezoelectric / electrostrictive element,
The injection unit is
Arranged such that at least a part of the outer surface of the wall is exposed to the outside air,
The piezoelectric / electrostrictive element is
It is fixed to a part of the outer surface of the wall exposed in the outside air ,
The injection unit is
A bubble jetting device configured to be supported by the liquid tank via a member or a portion that is elastically deformable.   In the bubble jetting device according to claim 1 or 2,
  The piezoelectric / electrostrictive element is
  A bubble jetting device fixed at a position to vibrate the elastically deformable member or part.   It is a bubble jetting device according to any one of claims 1 to 3,
  The pressure adjusting means is
  A bubble jetting device configured to adjust the pressure of the gas based on the pressure of the liquid in the liquid tank in the vicinity of the gas jetting port of the plate body.   In the bubble jetting device according to any one of claims 1 to 4,
  A bubble jetting device in which the plate of the jetting unit is made of ceramics.   In the bubble jetting device according to any one of claims 1 to 4,
  A bubble jetting device in which the plate of the jetting unit is made of metal.   The bubble jetting device according to any one of claims 1 to 6,
  A bubble jet device in which a lyophilic layer having good wettability with the liquid is formed on at least the surface of the plate around the gas jet port.   In the bubble jetting device according to any one of claims 1 to 7,
  The piezoelectric / electrostrictive element is
  A bubble jetting device which is an element in which layered piezoelectric / electrostrictive element portions and layered electrodes are alternately stacked in multiple layers.   In the bubble jetting device according to any one of claims 1 to 8,
  A bubble ejecting device in which a plurality of grooves extending in a gas ejecting direction are formed on a side wall surface of a through-hole of the plate body constituting the gas ejecting hole.   A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
  A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
  Drive signal generating means for generating the drive signal;
  Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
  With
  In the bubble jetting device that jets the gas into the liquid in the liquid tank as fine bubbles from the gas jetting hole by vibrating the plate body by the piezoelectric / electrostrictive element,
  A bubble ejecting device in which a plurality of grooves extending in a gas ejecting direction are formed on a side wall surface of a through-hole of the plate body constituting the gas ejecting hole.   A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
  A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
  Drive signal generating means for generating the drive signal;
  Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
  With
  In the bubble jetting device that jets the gas into the liquid in the liquid tank as fine bubbles from the gas jetting hole by vibrating the plate body by the piezoelectric / electrostrictive element,
  The injection unit is
  Arranged so that at least a part of the outer surface of the wall is exposed to the outside air,
  The piezoelectric / electrostrictive element is
  Fixed to a part of the outer surface of the wall exposed in the outside air;
  A bubble ejecting device in which a plurality of grooves extending in a gas ejecting direction are formed on a side wall surface of a through-hole of the plate body constituting the gas ejecting hole.   In the bubble jetting device according to any one of claims 1 to 11,
  The drive signal generating means includes
  A bubble ejecting device that generates the drive signal so as to perform an ejection operation in which the plate body is displaced in the opposite direction after being displaced toward the liquid.   A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
  A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
  Drive signal generating means for generating the drive signal;
  Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
  With
  In the bubble jetting device that jets the gas into the liquid in the liquid tank as fine bubbles from the gas jetting hole by vibrating the plate body by the piezoelectric / electrostrictive element,
  The drive signal generating means includes
  A bubble ejecting device that generates the drive signal so as to intermittently perform an ejecting operation of displacing in the opposite direction after the plate body is displaced toward the liquid.   In the bubble jetting device according to any one of claims 1 to 11,
  The drive signal generating means includes
  A bubble ejecting device that generates the drive signal so as to intermittently perform an ejection operation in which one bubble is ejected from one of the gas ejection holes by the piezoelectric / electrostrictive element performing compression and expansion a plurality of times. A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
Drive signal generating means for generating the drive signal;
Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
With
In the bubble ejecting apparatus that ejects the gas as fine bubbles from the gas ejection hole into the liquid in the liquid tank by vibrating the plate body by the piezoelectric / electrostrictive element,
The drive signal generating means includes
A bubble ejecting device that generates the drive signal so as to intermittently perform an ejection operation in which one bubble is ejected from one of the gas ejection holes by the piezoelectric / electrostrictive element performing compression and expansion a plurality of times. A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
Drive signal generating means for generating the drive signal;
Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
With
In the bubble ejecting apparatus that ejects the gas as fine bubbles from the gas ejection hole into the liquid in the liquid tank by vibrating the plate body by the piezoelectric / electrostrictive element,
The drive signal generating means includes
The drive signal is generated so as to perform an ejection operation that is displaced in the opposite direction after the plate body is displaced toward the liquid,
Further, the drive signal generating means includes
A bubble jetting apparatus that generates the drive signal so that the plate body performs a micro-vibration having a shorter period and smaller amplitude than the vibration in the ejection operation and superimposing the vibration on the vibration in the ejection operation. A plate having one end provided with a through-hole as a gas injection hole constituting the gas injection port, and at least the gas injection port being exposed to the liquid in the liquid tank, and a wall continuous to the plate body An injection part that forms a gas supply space to which gas is supplied by the same plate body and the same wall;
A piezoelectric / electrostrictive element that vibrates the plate in response to a drive signal;
Drive signal generating means for generating the drive signal;
Pressure adjusting means for adjusting the gas pressure in the gas supply space so that a gas-liquid interface between the gas and the liquid is formed in the vicinity of the gas injection port;
With
In the bubble ejecting apparatus that ejects the gas as fine bubbles from the gas ejection hole into the liquid in the liquid tank by vibrating the plate body by the piezoelectric / electrostrictive element,
The drive signal generating means includes
The plate body is configured to generate the drive signal so as to perform an ejection operation that is displaced in the opposite direction after being displaced toward the liquid,
Further, the drive signal generating means includes
A bubble jetting device configured to generate a drive signal for changing the amplitude of the plate in the jetting operation based on the pressure of the liquid in the liquid tank in the vicinity of the gas jetting port of the plate.

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