WO2022190570A1 - Bubble generation device and bubble generation system - Google Patents

Bubble generation device and bubble generation system Download PDF

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Publication number
WO2022190570A1
WO2022190570A1 PCT/JP2021/047549 JP2021047549W WO2022190570A1 WO 2022190570 A1 WO2022190570 A1 WO 2022190570A1 JP 2021047549 W JP2021047549 W JP 2021047549W WO 2022190570 A1 WO2022190570 A1 WO 2022190570A1
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Prior art keywords
bubble generator
air bubble
spring portion
liquid
cylindrical body
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PCT/JP2021/047549
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French (fr)
Japanese (ja)
Inventor
克己 藤本
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株式会社村田製作所
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Publication of WO2022190570A1 publication Critical patent/WO2022190570A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00—Technologies for wastewater treatment
    • Y02W10/10—Biological treatment of water, waste water, or sewage

Definitions

  • the present disclosure relates to an air bubble generator and an air bubble generation system.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2006-87984
  • the bubble generator described in Patent Document 1 uses a piezoelectric element to generate fine bubbles.
  • the vertical vibration at the central portion of the vibration plate that vibrates in bending is used to tear off the bubbles generated in the pores formed in the vibration plate by vibration to make them finer. Therefore, one surface of the diaphragm with pores formed therein is always exposed to liquid such as water, while the other surface needs to be provided with a space for introducing gas for generating air bubbles.
  • a piezoelectric element is arranged directly below the diaphragm. In this case, there is a possibility that the liquid seeps through the pores of the vibration plate, corrodes the piezoelectric element, and chemically and electrically degrades the piezoelectric element.
  • An object of the present disclosure is to provide an air bubble generator and an air bubble generation system that prevent chemical and electrical deterioration of piezoelectric elements caused by liquid seeping out from the pores of the diaphragm.
  • a bubble generator is a bubble generator that is attached to a liquid tank and generates fine bubbles in the liquid in the liquid tank.
  • the air bubble generator includes a diaphragm provided at a position where a plurality of openings are formed, one surface is in contact with liquid and the other surface is in contact with gas, and a first cylindrical body supporting the diaphragm at one end. a plate-shaped spring supporting the other end of the first cylindrical body; and a second cylindrical body supporting the spring at one end at a position outside the position supporting the first cylindrical body. and a piezoelectric element that vibrates the spring portion.
  • the spring part has at least one communicating part that allows gas to flow from the side surface into the first tubular body on the other side of the diaphragm.
  • a bubble generation system includes the above-described bubble generation device and a liquid tank.
  • the piezoelectric element it is possible to prevent the piezoelectric element from chemically and electrically deteriorating due to liquid exuding from the pores of the diaphragm.
  • FIG. 1 is a schematic diagram of an air bubble generation system in which an air bubble generator according to an embodiment is used;
  • FIG. 1 is a perspective cross-sectional view of an air bubble generator according to an embodiment;
  • FIG. 1 is a cross-sectional view of an air bubble generator according to an embodiment;
  • FIG. It is a perspective view of a spring portion according to the present embodiment. It is a figure for demonstrating the vibration of the diaphragm of the air-bubble generator which concerns on this Embodiment.
  • It is a perspective sectional view of the air-bubble generator which concerns on the modified example 1 of this Embodiment.
  • It is a perspective sectional view of the air-bubble generator which concerns on the modified example 2 of this Embodiment.
  • FIG. 11 is a perspective view of a spring portion according to Modification 3 of the embodiment;
  • FIG. 1 is a schematic diagram of an air bubble generation system 100 in which an air bubble generator 1 according to this embodiment is used.
  • the air bubble generator 1 shown in FIG. 1 is provided at the bottom of a liquid tank 10 that stores liquid such as water, gasoline, light oil, etc., and is used as an air bubble generation system 100 that generates fine air bubbles 200 in the liquid in the liquid tank 10. Used.
  • the air bubble generating system 100 can be applied to various systems such as a water purification device, a wastewater treatment device, a fish tank, and a fuel injection device.
  • the liquid introduced into the liquid tank 10 differs depending on the system to be applied. Water is used in the case of a water purification device, but liquid fuel is used in the case of a fuel injection device.
  • the liquid tank 10 only needs to be able to temporarily store the liquid, and includes a tube into which the liquid is introduced and the liquid constantly flows through the tube.
  • the air bubble generator 1 includes a diaphragm 2, a cylindrical body 3, and a piezoelectric element 4.
  • the air bubble generator 1 is provided at the bottom of a liquid tank 10, and vibrates a vibration plate 2 protruding from the bottom of the liquid tank 10 to the liquid side by a piezoelectric element 4, thereby generating a plurality of pores ( The minute air bubbles 200 are generated from the opening).
  • the air bubble generator 1 is connected to the inner wall surface of the liquid tank 10 by the first holding plate 5 and the second holding plate 6 .
  • the diaphragm 2 is made of, for example, a resin plate, a metal plate, a Si or SOI (Silicon On Insulator) substrate, a porous ceramic plate, a glass plate, or the like.
  • the vibration plate 2 When the vibration plate 2 is made of a glass plate, it may be made of a glass plate that transmits ultraviolet light and deep ultraviolet light with wavelengths of 200 nm to 380 nm, for example.
  • a light source that emits ultraviolet light is provided from the other side of the diaphragm 2 to the liquid in the liquid tank 10, and sterilization by ozone generation and ultraviolet light irradiation. It can also be used as a sterilization by.
  • the vibration plate 2 has a plurality of pores, one surface is in contact with the liquid (eg water) of the liquid tank 10, and the other surface is in contact with gas (eg air).
  • the liquid and the air are separated by the diaphragm 2, and the gas is fed in the direction of the arrow shown in FIG.
  • the air bubble generator 1 generates fine air bubbles 200 by tearing off the gas sent through a plurality of pores by vibration of the diaphragm 2 .
  • the surface tension of the liquid prevents the gas from entering the liquid side, while the buoyancy of the gas acts to cut off the surface tension. become.
  • the diameter of the air bubble 200 is determined by this balance, and the vibration of the diaphragm 2 produces the effect of peeling the air bubble 200 from the wall surface of the pore, as if the surface tension were reduced.
  • the gas is torn off due to the vibration of the diaphragm 2, and the diameter of the fine particles is reduced to about 1/10 compared to when the vibration of the diaphragm 2 is not applied. bubbles 200 can be generated.
  • a plurality of pores are formed in a 5 mm x 5 mm area provided in the central portion of the diaphragm 2 with a diameter of 14 mm.
  • the pore diameter is 1 ⁇ m and the pore interval is 0.25 mm, 441 pores can be formed in an area of 5 mm ⁇ 5 mm.
  • FIG. 2 is a perspective cross-sectional view of the air bubble generator 1 according to this embodiment.
  • FIG. 3 is a cross-sectional view of the air bubble generator according to this embodiment.
  • FIG. 4 is a perspective view of the spring portion 32 according to this embodiment.
  • the tubular body 3 shown in FIG. 1 includes a first tubular body 31, a spring portion 32, a second tubular body 33, a flange portion 34, a third tubular body 35 and a weight portion 36 as shown in FIG. I'm in.
  • the end of the diaphragm 2 is held by the end of the cylindrical first tubular body 31 .
  • Diaphragm 2 is supported by first tubular body 31 at a position where the penetrating direction of the plurality of pores formed in diaphragm 2 is parallel to the vibration direction of first tubular body 31 .
  • the first cylindrical body 31 is supported by the spring portion 32 at the end opposite to the diaphragm 2 side.
  • the spring portion 32 is an elastically deformable plate-like member, supports the bottom surface of the first cylindrical body 31, and extends outward from the supported position.
  • the spring portion 32 has a circular shape with a depressed center.
  • the spring part 32 is supported by the second tubular body 33 at a position outside the position where the first tubular body 31 is supported.
  • the second cylindrical body 33 has a cylindrical shape.
  • the second cylindrical body 33 supports the spring portion 32 with one end.
  • the other end of the second tubular body 33 is supported by a third tubular body 35 via a flange portion 34 .
  • the third tubular body 35 has a cylindrical shape.
  • the third tubular body 35 supports the second tubular body 33 with one end.
  • the other end of the third cylindrical body 35 has a cylindrical weight portion 36 on the outside.
  • the shape, position and mass of the weight portion 36 satisfy the conditions that enable driving in which the outer end portion of the spring portion 32 or the outer surface of the second cylindrical body 33 becomes a vibration node.
  • the shape, position and mass of the weight 36 are determined by performing a simulation including other configurations of the air bubble generator 1 so as to satisfy the conditions.
  • the air bubble generator 1 may not have the weight 36 as long as it can be driven such that the outer end of the spring 32 or the outer surface of the second cylindrical body 33 becomes a vibration node. .
  • a circular piezoelectric element 4 is provided on the lower surface of the spring portion 32 so as to match the shape of the spring portion 32 and cover the entire inner diameter of the second cylindrical body 33 .
  • the piezoelectric element 4 vibrates in the penetrating direction of the first cylindrical body 31 (vertical direction in the drawing).
  • the spring portion 32 is vibrated in the penetrating direction of the first cylindrical body 31, and the first cylindrical body 31 is substantially uniformly displaced in the vertical direction.
  • the shape, position and mass of the weight 36 are determined by performing a simulation including other configurations of the air bubble generator 1 so as to satisfy the conditions.
  • the air bubble generator 1 does not have to have the weight 36 as long as the vibration plate 2 can be driven to vertically vibrate in parallel.
  • the first tubular body 31, the spring part 32, the second tubular body 33, the flange part 34, the third tubular body 35, and the weight part 36 are integrally formed.
  • the first tubular body 31, the spring portion 32, the second tubular body 33, the flange portion 34, the third tubular body 35, and the weight portion 36 are made of, for example, metal such as stainless steel or synthetic resin. Preferably, a highly rigid metal such as stainless steel is desirable.
  • the first tubular body 31, the spring portion 32, the second tubular body 33, the flange portion 34, the third tubular body 35, and the weight portion 36 may be formed as separate members or may be formed as separate members. You may A method for joining the diaphragm 2 and the first cylindrical body 31 is not particularly limited. Diaphragm 2 and first cylindrical body 31 may be joined by adhesive, welding, fitting, press-fitting, or the like.
  • the air bubble generator 1 is connected to the bottom side of the liquid tank 10 by the first holding plate 5 at the outer end of the spring portion 32, and the second tubular body 33 is connected to the side surface of the liquid tank 10. It is joined to the bottom side of the liquid tank 10 by means of a second retaining plate 6 on its outer side.
  • the outer end portion of the spring portion 32 or the outer surface of the second cylindrical body 33 is substantially non-vibrating even if the diaphragm 2 is vibrated by the piezoelectric element 4 as will be described later. Therefore, it is possible to substantially vibrate only the vibration plate 2 without transmitting the vibration of the piezoelectric element 4 to the liquid tank 10 .
  • the air bubble generator 1 is connected to the inner wall surface of the liquid tank 10 via the first retaining plate 5 and the second retaining plate 6 .
  • the first holding plate 5 is connected to the outer end of the spring portion 32 and the flange portion of the inner wall surface of the liquid tank 10 .
  • the second holding plate 6 is connected to a flange portion 33 a provided on the outer surface of the second cylindrical body 33 and a flange portion of the inner wall surface of the liquid tank 10 .
  • a space 10b is formed in a region sandwiched between the first holding plate 5 and the second holding plate 6.
  • a flange portion may be provided at the outer end portion of the spring portion 32, or the configuration may be such that the flange portion 33a on the outer surface of the second tubular body 33 is removed.
  • the spring part 32 is provided with a recess 32b in the center.
  • a communicating portion 32a is provided toward the outside of the spring portion 32 so as to be connected from the side surface of the recessed portion 32b.
  • the air that has flowed in from the vertical hole 10a of the liquid tank 10 flows through the space 10b, passes through the communicating portion 32a, and passes through the recessed portion 32b to the first cylindrical body 31 and the diaphragm 2. flow.
  • the piezoelectric element 4 vibrates by being polarized in the thickness direction, for example.
  • the piezoelectric element 4 is made of lead zirconate titanate piezoelectric ceramics.
  • other piezoelectric ceramics such as (K,Na)NbO3 may be used.
  • a piezoelectric single crystal such as LiTaO3 may be used.
  • the structure of the diaphragm 2 in contact with the liquid is, for example, a glass plate. and can be completely separated. By completely separating the space into which the gas is introduced from the liquid, it is possible to prevent the electrical wiring of the piezoelectric element 4 from being immersed in the liquid. Further, in the bubble generator 1, even when a light source that emits ultraviolet light is provided for the liquid in the liquid tank 10, the light source can be provided in the space into which the gas is introduced. It can also prevent drowning.
  • the bubble generator 1 since air flows into the first cylindrical body 31 from the side surface of the spring portion 32 having a bottom through the communication portion 32a, the liquid does not come into contact with the piezoelectric element 4 provided on the lower surface of the spring portion 32. There is no As a result, the bubble generator 1 can prevent the piezoelectric element 4 from chemically and electrically deteriorating due to the liquid seeping out from the pores of the diaphragm 2 .
  • FIG. 5 is a diagram for explaining the vibration of diaphragm 2 of air bubble generator 1 according to the present embodiment.
  • FIG. 5 shows a cross-sectional view of the air bubble generator 1 showing the displacement resulting from a simulation of vibration of the diaphragm 2 .
  • the dashed line indicates the reference position of the air bubble generator 1 before starting vibration, and the solid line indicates the position of the air bubble generator 1 after displacement.
  • the vibration of the piezoelectric element 4 is not substantially transmitted to the liquid reservoir 10 and the diaphragm 2 can be moved. It can vibrate.
  • the side surface of the spring portion 32 is provided with an opening communicating with the communicating portion 32a. Since the node is formed at the outer end of the spring portion 32, the node is formed at the opening leading to the communicating portion 32a. As a result, the gas can be effectively introduced from the opening leading to the communicating portion 32a which is not displaced even by the vibration of the piezoelectric element 4. As shown in FIG.
  • the spring portion 32 is displaced downward and then upward.
  • the entire first tubular body 31 is displaced upward, and as a result, it is held by the first tubular body 31.
  • the entire diaphragm 2 is displaced upward.
  • the air bubble generating device 1 by vibrating the piezoelectric element 4 as described above, the diaphragm 2 itself is substantially not deformed, and the entire diaphragm 2 is substantially uniformly displaced in the vertical direction. . Therefore, in the air bubble generator 1 , by driving the diaphragm 2 in a planar manner using the vertical resonance of the spring portion 32 , the same shear stress is applied at any position of the diaphragm 2 , and the plurality of fine lines of the diaphragm 2 are subjected to the same shear stress. The gas sent through the holes is torn off by the shear stress to generate uniform bubbles.
  • the bubble generator 1 is attached to the liquid tank 10 and generates fine bubbles in the liquid in the liquid tank 10 .
  • the air bubble generator 1 includes a diaphragm 2 , a first tubular body 31 , a spring portion 32 , a second tubular body 33 , and a piezoelectric element 4 .
  • Diaphragm 2 is provided at a position where a plurality of openings are formed and one surface is in contact with liquid and the other surface is in contact with gas.
  • the first tubular body 31 supports the diaphragm 2 at one end.
  • the spring portion 32 is a plate-like body and supports the other end of the first tubular body 31 .
  • the second tubular body 33 supports the spring portion 32 at a position outside the position where the first tubular body 31 is supported.
  • the piezoelectric element 4 vibrates the spring portion 32 .
  • the spring portion 32 has a communicating portion 32a that allows gas to flow into the first cylindrical body 31 on the other side of the diaphragm 2 from the side surface.
  • the bubble generator 1 can prevent the piezoelectric element 4 from chemically and electrically deteriorating due to the liquid seeping out from the pores of the diaphragm 2 .
  • the bubble generator 1 is held by the first holding plate 5 of the liquid tank 10 .
  • the air bubble generating device 1 is arranged such that the opening of the communicating portion 32a on the side surface of the spring portion 32 is located outside the liquid container side of the liquid tank 10, and the end portion of the first holding plate 5 and the side surface of the spring portion 32 are connected to each other. and are combined.
  • the bubble generator 1 can vibrate the vibration plate 2 without substantially transmitting the vibration of the piezoelectric element 4 to the liquid tank 10 because the outer end of the spring portion 32 serves as a node.
  • the bubble generator 1 is further held by the second holding plate 6 of the liquid tank 10 .
  • the air bubble generator 1 is positioned such that the opening of the communicating portion 32 a on the side surface of the spring portion 32 is sandwiched between the first holding plate 5 and the second holding plate 6 .
  • air bubble generator 1 air flows from the space 10b, which is the area sandwiched between the first holding plate 5 and the second holding plate 6, through the communicating portion 32a and into the first tubular body 31. It is possible to prevent the piezoelectric element 4 from chemically and electrically deteriorating due to the liquid exuding from the pores of the vibration plate 2 .
  • the piezoelectric element 4 is provided on the surface of the spring portion 32 that is supported by the second tubular body 33 . Thereby, the bubble generator 1 can vibrate the spring portion 32 effectively.
  • FIG. 6 is a perspective cross-sectional view of an air bubble generator 1a according to Modification 1 of the present embodiment.
  • the same components as those of the air bubble generator 1 shown in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
  • the pipe 7 is arranged to face the liquid tank 10 through the communicating portion 32a of the spring portion 32.
  • the bubble generator 1a is held by the first holding plate 5, and the second holding plate 6 is not provided.
  • the air from the outside of the liquid tank 10 flows into the inside of the first cylindrical body 31 through the pipes 7 extending in all directions. Therefore, in the air bubble generator 1a, unlike the air bubble generator 1 of the first embodiment, the second holding plate 6 for forming the gas flow path can be eliminated.
  • the pipe 7 may extend in at least one direction, may extend in two directions, three directions, or may extend in five or more directions.
  • the pipe 7 may extend from an opening in the side surface of the spring portion 32 instead of passing through the communicating portion 32a.
  • the air bubble generator 1a includes a pipe 7 that is connected to an opening of a communicating portion 32a on the side surface of the spring portion 32 and allows gas to flow into the communicating portion 32a.
  • the air passing through the pipe 7 flows into the first tubular body 31 in the air bubble generator 1 a , so that the piezoelectric element 4 is chemically and electrically affected by the liquid seeping out from the pores of the vibration plate 2 . Deterioration can be prevented.
  • FIG. 7 is a perspective cross-sectional view of an air bubble generator 1b according to Modification 2 of the present embodiment.
  • the same components as those of the air bubble generator 1a shown in Modification 1 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
  • the air bubble generating device 1 a is provided with pipes 7 extending in all directions for introducing air from the outside of the liquid tank 10 into the inside of the first cylindrical body 31 .
  • the pipe 7 is arranged closer to the vibration plate 2 than the first holding plate 5, and thus is positioned in the liquid.
  • a lid portion 8 is provided on the lower surface side of the spring portion 32 to prevent liquid from entering from the first cylindrical body side.
  • the piezoelectric element 4 is provided in the circumferential direction at the end of the weight portion 36 opposite to the second cylindrical body 33 .
  • the bubble generator 1 b is held by the first holding plate 5 of the liquid tank 10 .
  • the end portion of the first holding plate 5 and the side surface of the second cylindrical body 33 are connected at a position where the opening of the communication portion 32a on the side surface of the spring portion 32 is inside the liquid tank 10.
  • the air bubble generator 1b includes a pipe 7 connected to an opening of a communicating portion 32a on the side surface of the spring portion 32 and allowing gas to flow into the communicating portion 32a.
  • air passing through the pipe 7 flows into the first tubular body 31 even when the opening of the communicating portion 32a is inside the liquid tank 10, so that the air bubble generating device 1b is closed to the pores of the diaphragm 2. It is possible to prevent chemical and electrical deterioration of the piezoelectric element 4 due to the liquid exuded from.
  • FIG. 8 is a perspective view of a spring portion 38 according to Modification 3 of the present embodiment.
  • the spring part 38 is provided with a recess 38b in the center.
  • a communication portion 38a through which gas flows is provided in a stepwise manner toward the side surface of the spring portion 38 so as to be connected from the side surface of the recess portion 38b.
  • the communicating portion 38 a can allow a large amount of air to flow in from the side surface of the liquid tank 10 .
  • the piezoelectric element 4 may be coated with a chemical-resistant and water-resistant coating that matches the liquid in the liquid tank 10 .
  • 1, 1a, 1b bubble generator 2 diaphragm, 3 cylindrical body, 4 piezoelectric element, 5 first holding plate, 6 second holding plate, 7 piping, 8 lid, 10 liquid tank, 10a vertical hole, 10b space , 20 controller, 31 first cylindrical body, 32 spring part, 32a communicating part, 32b recessed part, 33 second cylindrical body, 33a flange part, 34 flange part, 35 third cylindrical body, 36 weight part, 100 air bubble Generation system, 200 bubbles.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)

Abstract

This bubble generation device (1) is provided with a vibrating plate (2), a first cylindrical body (31), a spring part (32), a second cylindrical body (33), and a piezoelectric element (4). The vibrating plate (2) has a plurality of opening parts formed therein, and is provided in a position so that one surface is in contact with a liquid and another surface is in contact with a gas. The first cylindrical body (31) holds the vibrating plate (2) at one end. The spring part (32) is plate-shaped and supports the other end of the first cylindrical body (31). The second cylindrical body (33) supports, at one end, a position of the spring part (32) which is outwards of the position where the first cylindrical body (31) is supported. The piezoelectric element (4) vibrates the spring part (32). The spring part (32) has a communication part (32a) for allowing gas to flow from a side surface into the first cylindrical body (31) on the other surface side of the vibrating plate (2).

Description

気泡発生装置、および気泡発生システムBubble generator and bubble generation system
　本開示は、気泡発生装置、および気泡発生システムに関する。 The present disclosure relates to an air bubble generator and an air bubble generation system.
　近年、微細な気泡を使って水質浄化、排水処理、魚の養殖などが行なわれており、微細な気泡が様々な分野で利用されている。そのため、微細な気泡を発生する気泡発生装置として特開２００６－８７９８４号公報（特許文献１）に記載されているような気泡発生装置が開発されている。 In recent years, fine air bubbles have been used in water purification, wastewater treatment, fish farming, etc., and are used in various fields. Therefore, as a bubble generator for generating fine bubbles, a bubble generator as described in Japanese Patent Application Laid-Open No. 2006-87984 (Patent Document 1) has been developed.
　特許文献１に記載の気泡発生装置では、圧電素子を利用して微細な気泡を発生させている。この気泡発生装置では、屈曲振動する振動板の中央部での上下振動を利用して、振動板に形成した細孔で発生した気泡を振動で引きちぎり微細化している。そのため、細孔を形成した振動板の一方の面は、常に水などの液体にさらされているが、他方の面は、気泡を発生させるための気体を導入する空間を設ける必要がある。 The bubble generator described in Patent Document 1 uses a piezoelectric element to generate fine bubbles. In this bubble generator, the vertical vibration at the central portion of the vibration plate that vibrates in bending is used to tear off the bubbles generated in the pores formed in the vibration plate by vibration to make them finer. Therefore, one surface of the diaphragm with pores formed therein is always exposed to liquid such as water, while the other surface needs to be provided with a space for introducing gas for generating air bubbles.
特開２００６－８７９８４号公報JP 2006-87984 A
　特許文献１に記載の気泡発生装置では、振動板の直下に圧電素子が配置されている。この場合、液体が振動板の細孔を通じて滲み出すことにより圧電素子側に浸食し圧電素子が化学的、電気的に劣化する可能性があった。 In the air bubble generator described in Patent Document 1, a piezoelectric element is arranged directly below the diaphragm. In this case, there is a possibility that the liquid seeps through the pores of the vibration plate, corrodes the piezoelectric element, and chemically and electrically degrades the piezoelectric element.
　本開示の目的は、振動板の細孔から滲み出した液体による圧電素子の化学的、電気的な劣化を防止する気泡発生装置、および気泡発生システムを提供することである。 An object of the present disclosure is to provide an air bubble generator and an air bubble generation system that prevent chemical and electrical deterioration of piezoelectric elements caused by liquid seeping out from the pores of the diaphragm.
　本開示の一形態に係る気泡発生装置は、液体槽に取り付け、液体槽の液体中に微細な気泡を発生させる気泡発生装置である。気泡発生装置は、複数の開口部が形成され、一方の面が液体と接し、他方の面が気体と接する位置に設けられる振動板と、一方の端で振動板を支持する第１筒状体と、第１筒状体の他方の端を支持する板状のバネ部と、第１筒状体を支持する位置より外側にある位置においてバネ部を一方の端で支持する第２筒状体と、バネ部を振動させる圧電素子と、を備える。バネ部は、側面から振動板の他方の面側の第１筒状体内に気体を流入させる少なくとも１つの連通部を有する。 A bubble generator according to one aspect of the present disclosure is a bubble generator that is attached to a liquid tank and generates fine bubbles in the liquid in the liquid tank. The air bubble generator includes a diaphragm provided at a position where a plurality of openings are formed, one surface is in contact with liquid and the other surface is in contact with gas, and a first cylindrical body supporting the diaphragm at one end. a plate-shaped spring supporting the other end of the first cylindrical body; and a second cylindrical body supporting the spring at one end at a position outside the position supporting the first cylindrical body. and a piezoelectric element that vibrates the spring portion. The spring part has at least one communicating part that allows gas to flow from the side surface into the first tubular body on the other side of the diaphragm.
　本開示の別の一形態に係る気泡発生システムは、前述の気泡発生装置と、液体槽と、を備える。 A bubble generation system according to another aspect of the present disclosure includes the above-described bubble generation device and a liquid tank.
　本開示によれば、振動板の細孔から滲み出した液体による圧電素子の化学的、電気的な劣化を防止することができる。 According to the present disclosure, it is possible to prevent the piezoelectric element from chemically and electrically deteriorating due to liquid exuding from the pores of the diaphragm.
本実施の形態に係る気泡発生装置が用いられる気泡発生システムの概略図である。1 is a schematic diagram of an air bubble generation system in which an air bubble generator according to an embodiment is used; FIG. 本実施の形態に係る気泡発生装置の斜視断面図である。1 is a perspective cross-sectional view of an air bubble generator according to an embodiment; FIG. 本実施の形態に係る気泡発生装置の断面図である。1 is a cross-sectional view of an air bubble generator according to an embodiment; FIG. 本実施の形態に係るバネ部の斜視図である。It is a perspective view of a spring portion according to the present embodiment. 本実施の形態に係る気泡発生装置の振動板の振動を説明するための図である。It is a figure for demonstrating the vibration of the diaphragm of the air-bubble generator which concerns on this Embodiment. 本実施の形態の変形例１に係る気泡発生装置の斜視断面図である。It is a perspective sectional view of the air-bubble generator which concerns on the modified example 1 of this Embodiment. 本実施の形態の変形例２に係る気泡発生装置の斜視断面図である。It is a perspective sectional view of the air-bubble generator which concerns on the modified example 2 of this Embodiment. 本実施の形態の変形例３に係るバネ部の斜視図である。FIG. 11 is a perspective view of a spring portion according to Modification 3 of the embodiment;
　（実施の形態）
　以下に、本実施の形態に係る気泡発生装置、および気泡発生システムについて、図面を参照しながら詳細に説明する。なお、図中の同一または相当部分については、同一符号を付してその説明は繰り返さない。 (Embodiment)
Below, the bubble generation device and the bubble generation system according to the present embodiment will be described in detail with reference to the drawings. The same or corresponding parts in the drawings are given the same reference numerals, and the description thereof will not be repeated.
　図１は、本実施の形態に係る気泡発生装置１が用いられる気泡発生システム１００の概略図である。図１に示す気泡発生装置１は、例えば、水，ガソリン，軽油などの液体を貯留する液体槽１０の底部に設けられ、液体槽１０の液体に微細な気泡２００を発生させる気泡発生システム１００に用いられる。なお、気泡発生システム１００は、例えば、水質浄化装置、排水処理装置、魚の養殖用水槽、燃料噴射装置などの様々なシステムに適用することができる。 FIG. 1 is a schematic diagram of an air bubble generation system 100 in which an air bubble generator 1 according to this embodiment is used. The air bubble generator 1 shown in FIG. 1 is provided at the bottom of a liquid tank 10 that stores liquid such as water, gasoline, light oil, etc., and is used as an air bubble generation system 100 that generates fine air bubbles 200 in the liquid in the liquid tank 10. Used. The air bubble generating system 100 can be applied to various systems such as a water purification device, a wastewater treatment device, a fish tank, and a fuel injection device.
　液体槽１０は、適用するシステムにより導入される液体が異なり、水質浄化装置であれば水であるが、燃料噴射装置であれば液体燃料になる。液体槽１０は、液体を一時的に貯留することができればよく、液体が導入される管において当該管の中を常に液体が流れるようなものも含む。 The liquid introduced into the liquid tank 10 differs depending on the system to be applied. Water is used in the case of a water purification device, but liquid fuel is used in the case of a fuel injection device. The liquid tank 10 only needs to be able to temporarily store the liquid, and includes a tube into which the liquid is introduced and the liquid constantly flows through the tube.
　気泡発生装置１は、振動板２と、筒状体３と、圧電素子４とを備えている。気泡発生装置１は、液体槽１０の底部に設けられ、液体槽１０の底部から液体側に突き出た振動板２を圧電素子４により振動させることにより、振動板２に形成した複数の細孔（開口部）から微細な気泡２００を発生させている。気泡発生装置１は、第１保持板５および第２保持板６により液体槽１０の内壁面と結合している。 The air bubble generator 1 includes a diaphragm 2, a cylindrical body 3, and a piezoelectric element 4. The air bubble generator 1 is provided at the bottom of a liquid tank 10, and vibrates a vibration plate 2 protruding from the bottom of the liquid tank 10 to the liquid side by a piezoelectric element 4, thereby generating a plurality of pores ( The minute air bubbles 200 are generated from the opening). The air bubble generator 1 is connected to the inner wall surface of the liquid tank 10 by the first holding plate 5 and the second holding plate 6 .
　振動板２は、例えば、樹脂板、金属板、ＳｉもしくはＳＯＩ（Silicon　On　Insulator）基板、多孔質のセラミック板、ガラス板などで形成されている。振動板２をガラス板により形成する場合、例えば、波長が２００ｎｍ～３８０ｎｍの紫外光および深紫外光を透過させるガラス板により形成してもよい。紫外光および深紫外光を透過させるガラス板により形成することで、振動板２の他方の面側から液体槽１０の液体に対して紫外光を発する光源を設け、オゾン生成による殺菌と紫外光照射による殺菌とを兼用させることができる。 The diaphragm 2 is made of, for example, a resin plate, a metal plate, a Si or SOI (Silicon On Insulator) substrate, a porous ceramic plate, a glass plate, or the like. When the vibration plate 2 is made of a glass plate, it may be made of a glass plate that transmits ultraviolet light and deep ultraviolet light with wavelengths of 200 nm to 380 nm, for example. By forming a glass plate that transmits ultraviolet light and deep ultraviolet light, a light source that emits ultraviolet light is provided from the other side of the diaphragm 2 to the liquid in the liquid tank 10, and sterilization by ozone generation and ultraviolet light irradiation. It can also be used as a sterilization by.
　振動板２は、複数の細孔が形成され、一方の面が液体槽１０の液体（例えば、水）と接し、他方の面が気体（例えば、空気）と接している。気泡発生装置１では、振動板２により液体と空気とを分離し、液体槽１０に設けられた縦穴１０ａを通じて図１に示す矢印方向から気体が送り込まれる。気泡発生装置１は、複数の細孔を通って送り込まれた気体を、振動板２の振動により引きちぎることで微細な気泡２００を発生させている。 The vibration plate 2 has a plurality of pores, one surface is in contact with the liquid (eg water) of the liquid tank 10, and the other surface is in contact with gas (eg air). In the air bubble generator 1, the liquid and the air are separated by the diaphragm 2, and the gas is fed in the direction of the arrow shown in FIG. The air bubble generator 1 generates fine air bubbles 200 by tearing off the gas sent through a plurality of pores by vibration of the diaphragm 2 .
　さらに詳しく説明すると、複数の細孔から気体が出ようとする際、液体の表面張力によって液体側へ気体が侵入するのを阻害される一方、気体の浮力によりその表面張力を断ち切る力が働くことになる。このバランスにより気泡２００の径が決まることになるが、振動板２の振動により細孔の壁面からの引きはがし効果が生じ、あたかも表面張力が小さくなったかのような状態となる。その結果、複数の細孔から気体が出ようとする初期の段階で、振動板２の振動により気体が引きちぎられ、振動板２の振動を加えない場合に比べて１／１０程度の径の微細な気泡２００を発生させることができる。 In more detail, when gas tries to escape from multiple pores, the surface tension of the liquid prevents the gas from entering the liquid side, while the buoyancy of the gas acts to cut off the surface tension. become. The diameter of the air bubble 200 is determined by this balance, and the vibration of the diaphragm 2 produces the effect of peeling the air bubble 200 from the wall surface of the pore, as if the surface tension were reduced. As a result, at the initial stage when the gas is about to come out from the plurality of pores, the gas is torn off due to the vibration of the diaphragm 2, and the diameter of the fine particles is reduced to about 1/10 compared to when the vibration of the diaphragm 2 is not applied. bubbles 200 can be generated.
　図示していないが、たとえば、直径１４ｍｍの振動板２の中央部に設けた５ｍｍ×５ｍｍの領域に複数の細孔が形成されている。細孔の孔径を１μｍ、細孔の間隔を０．２５ｍｍにした場合、５ｍｍ×５ｍｍの領域に４４１個の細孔を形成することができる。 Although not shown, for example, a plurality of pores are formed in a 5 mm x 5 mm area provided in the central portion of the diaphragm 2 with a diameter of 14 mm. When the pore diameter is 1 μm and the pore interval is 0.25 mm, 441 pores can be formed in an area of 5 mm×5 mm.
　気泡発生装置１では、筒状体３を介して圧電素子４により振動板２を振動させている。図２は、本実施の形態に係る気泡発生装置１の斜視断面図である。図３は、本実施の形態に係る気泡発生装置の断面図である。図４は、本実施の形態に係るバネ部３２の斜視図である。図１に示す筒状体３は、図３に示すように第１筒状体３１、バネ部３２、第２筒状体３３、つば部３４、第３筒状体３５および錘部３６を含んでいる。 In the air bubble generator 1 , the vibration plate 2 is vibrated by the piezoelectric element 4 through the cylindrical body 3 . FIG. 2 is a perspective cross-sectional view of the air bubble generator 1 according to this embodiment. FIG. 3 is a cross-sectional view of the air bubble generator according to this embodiment. FIG. 4 is a perspective view of the spring portion 32 according to this embodiment. The tubular body 3 shown in FIG. 1 includes a first tubular body 31, a spring portion 32, a second tubular body 33, a flange portion 34, a third tubular body 35 and a weight portion 36 as shown in FIG. I'm in.
　振動板２の端部は、円筒状の第１筒状体３１の端部により保持されている。振動板２に形成された複数の細孔の貫通方向が、第１筒状体３１の振動方向に対して平行となる位置において、振動板２が第１筒状体３１に支持されている。第１筒状体３１は、振動板２側とは反対側の端部がバネ部３２に支持されている。バネ部３２は、弾性変形可能な板状の部材であり、円筒状の第１筒状体３１の底面を支持し、支持した位置から外側に向かって延伸している。バネ部３２は、中央が窪んだ円状の形態である。 The end of the diaphragm 2 is held by the end of the cylindrical first tubular body 31 . Diaphragm 2 is supported by first tubular body 31 at a position where the penetrating direction of the plurality of pores formed in diaphragm 2 is parallel to the vibration direction of first tubular body 31 . The first cylindrical body 31 is supported by the spring portion 32 at the end opposite to the diaphragm 2 side. The spring portion 32 is an elastically deformable plate-like member, supports the bottom surface of the first cylindrical body 31, and extends outward from the supported position. The spring portion 32 has a circular shape with a depressed center.
　バネ部３２は、第１筒状体３１を支持する位置の外側にある位置において第２筒状体３３により支持されている。第２筒状体３３は、円筒状の形態である。第２筒状体３３は、一方の端によりバネ部３２を支持する。第２筒状体３３の他方の端は、つば部３４を介して第３筒状体３５により支持されている。第３筒状体３５は、円筒状の形態である。第３筒状体３５は、一方の端により第２筒状体３３を支持する。第３筒状体３５の他方の端には、外側に円筒状の錘部３６を有している。 The spring part 32 is supported by the second tubular body 33 at a position outside the position where the first tubular body 31 is supported. The second cylindrical body 33 has a cylindrical shape. The second cylindrical body 33 supports the spring portion 32 with one end. The other end of the second tubular body 33 is supported by a third tubular body 35 via a flange portion 34 . The third tubular body 35 has a cylindrical shape. The third tubular body 35 supports the second tubular body 33 with one end. The other end of the third cylindrical body 35 has a cylindrical weight portion 36 on the outside.
　なお、錘部３６の形状、位置および質量は、バネ部３２の外側の端部または第２筒状体３３の外側面が振動のノードとなる駆動が可能となる条件を満たしている。錘部３６の形状、位置および質量は、気泡発生装置１の他の構成を含めてシミュレーションを行い、当該条件を満たすように決定する。もちろん、気泡発生装置１は、バネ部３２の外側の端部または第２筒状体３３の外側面が振動のノードとなる駆動が可能であれば、錘部３６を有していなくてもよい。 The shape, position and mass of the weight portion 36 satisfy the conditions that enable driving in which the outer end portion of the spring portion 32 or the outer surface of the second cylindrical body 33 becomes a vibration node. The shape, position and mass of the weight 36 are determined by performing a simulation including other configurations of the air bubble generator 1 so as to satisfy the conditions. Of course, the air bubble generator 1 may not have the weight 36 as long as it can be driven such that the outer end of the spring 32 or the outer surface of the second cylindrical body 33 becomes a vibration node. .
　バネ部３２の下面には、バネ部３２の形状に合わせて第２筒状体３３の内径の全面を覆う円状の圧電素子４が設けられている。圧電素子４は、第１筒状体３１の貫通方向（図中、上下方向）に振動する。圧電素子４が第１筒状体３１の貫通方向に振動することにより、バネ部３２を第１筒状体３１の貫通方向に振動させて第１筒状体３１が略均一に上下方向に変位させる。なお、錘部３６の形状、位置および質量は、圧電素子４を駆動させた場合に、振動板２が平行に上下振動する駆動が可能となる条件を満たしていることがさらに望ましい。錘部３６の形状、位置および質量は、気泡発生装置１の他の構成を含めてシミュレーションを行い、当該条件を満たすように決定する。もちろん、気泡発生装置１は、振動板２が平行に上下振動する駆動が可能であれば、錘部３６を有していなくてもよい。 A circular piezoelectric element 4 is provided on the lower surface of the spring portion 32 so as to match the shape of the spring portion 32 and cover the entire inner diameter of the second cylindrical body 33 . The piezoelectric element 4 vibrates in the penetrating direction of the first cylindrical body 31 (vertical direction in the drawing). By vibrating the piezoelectric element 4 in the penetrating direction of the first cylindrical body 31, the spring portion 32 is vibrated in the penetrating direction of the first cylindrical body 31, and the first cylindrical body 31 is substantially uniformly displaced in the vertical direction. Let Further, it is more desirable that the shape, position and mass of the weight 36 satisfy the conditions that when the piezoelectric element 4 is driven, the vibration plate 2 can be vertically vibrated in parallel. The shape, position and mass of the weight 36 are determined by performing a simulation including other configurations of the air bubble generator 1 so as to satisfy the conditions. Of course, the air bubble generator 1 does not have to have the weight 36 as long as the vibration plate 2 can be driven to vertically vibrate in parallel.
　第１筒状体３１、バネ部３２、第２筒状体３３、つば部３４、第３筒状体３５、および錘部３６は、一体的に形成される。第１筒状体３１、バネ部３２、第２筒状体３３、つば部３４、第３筒状体３５、および錘部３６は、たとえば、ステンレスなどの金属や合成樹脂からなる。好ましくは、ステンレスなどの剛性の高い金属が望ましい。なお、第１筒状体３１、バネ部３２、第２筒状体３３、つば部３４、第３筒状体３５、および錘部３６を別体として形成してもよいし、別部材として形成してもよい。振動板２と第１筒状体３１との接合方法は、特に問わない。振動板２と第１筒状体３１とを、接着剤、溶着、嵌合、圧入、などで接合してもよい。 The first tubular body 31, the spring part 32, the second tubular body 33, the flange part 34, the third tubular body 35, and the weight part 36 are integrally formed. The first tubular body 31, the spring portion 32, the second tubular body 33, the flange portion 34, the third tubular body 35, and the weight portion 36 are made of, for example, metal such as stainless steel or synthetic resin. Preferably, a highly rigid metal such as stainless steel is desirable. Note that the first tubular body 31, the spring portion 32, the second tubular body 33, the flange portion 34, the third tubular body 35, and the weight portion 36 may be formed as separate members or may be formed as separate members. You may A method for joining the diaphragm 2 and the first cylindrical body 31 is not particularly limited. Diaphragm 2 and first cylindrical body 31 may be joined by adhesive, welding, fitting, press-fitting, or the like.
　気泡発生装置１は、図１から図３に示すように、バネ部３２の外側の端部において第１保持板５により液体槽１０の底部の側面と結合するとともに、第２筒状体３３の外側面において第２保持板６により液体槽１０の底部の側面と結合している。バネ部３２の外側の端部または第２筒状体３３の外側面は、後述するように圧電素子４により振動板２を振動させても、ほぼ無振動である。そのため、圧電素子４の振動を液体槽１０に伝えずに、実質的に振動板２のみを振動させることが可能である。 As shown in FIGS. 1 to 3, the air bubble generator 1 is connected to the bottom side of the liquid tank 10 by the first holding plate 5 at the outer end of the spring portion 32, and the second tubular body 33 is connected to the side surface of the liquid tank 10. It is joined to the bottom side of the liquid tank 10 by means of a second retaining plate 6 on its outer side. The outer end portion of the spring portion 32 or the outer surface of the second cylindrical body 33 is substantially non-vibrating even if the diaphragm 2 is vibrated by the piezoelectric element 4 as will be described later. Therefore, it is possible to substantially vibrate only the vibration plate 2 without transmitting the vibration of the piezoelectric element 4 to the liquid tank 10 .
　気泡発生装置１は、第１保持板５および第２保持板６を介して液体槽１０の内壁面と結合している。第１保持板５は、バネ部３２の外側の端部と液体槽１０の内壁面のつば部とで結合している。第２保持板６は、第２筒状体３３の外側面に設けられたフランジ部３３ａと液体槽１０の内壁面のつば部とで結合している。第１保持板５と第２保持板６とで挟まれる領域には、空間１０ｂが形成されている。なお、バネ部３２の外側の端部にフランジ部を設けてもよく、第２筒状体３３の外側面のフランジ部３３ａを除去した構成であってもよい。 The air bubble generator 1 is connected to the inner wall surface of the liquid tank 10 via the first retaining plate 5 and the second retaining plate 6 . The first holding plate 5 is connected to the outer end of the spring portion 32 and the flange portion of the inner wall surface of the liquid tank 10 . The second holding plate 6 is connected to a flange portion 33 a provided on the outer surface of the second cylindrical body 33 and a flange portion of the inner wall surface of the liquid tank 10 . A space 10b is formed in a region sandwiched between the first holding plate 5 and the second holding plate 6. As shown in FIG. A flange portion may be provided at the outer end portion of the spring portion 32, or the configuration may be such that the flange portion 33a on the outer surface of the second tubular body 33 is removed.
　図４に示すように、バネ部３２は、中央に凹部３２ｂが設けられている。凹部３２ｂの側面から繋がるようにバネ部３２の外側に向けて連通部３２ａが設けられている。図１から図４に示すように、液体槽１０の縦穴１０ａから流入した空気は、空間１０ｂを流れた後、連通部３２ａを通過し、凹部３２ｂから第１筒状体３１、振動板２へ流れる。 As shown in FIG. 4, the spring part 32 is provided with a recess 32b in the center. A communicating portion 32a is provided toward the outside of the spring portion 32 so as to be connected from the side surface of the recessed portion 32b. As shown in FIGS. 1 to 4, the air that has flowed in from the vertical hole 10a of the liquid tank 10 flows through the space 10b, passes through the communicating portion 32a, and passes through the recessed portion 32b to the first cylindrical body 31 and the diaphragm 2. flow.
　圧電素子４は、例えば、厚み方向において分極することで振動する。圧電素子４は、チタン酸ジルコン酸鉛系圧電セラミックスからなる。もっとも、（Ｋ，Ｎａ）ＮｂＯ３などの他の圧電セラミックスが用いられてもよい。さらに、ＬｉＴａＯ３などの圧電単結晶が用いられてもよい。 The piezoelectric element 4 vibrates by being polarized in the thickness direction, for example. The piezoelectric element 4 is made of lead zirconate titanate piezoelectric ceramics. However, other piezoelectric ceramics such as (K,Na)NbO3 may be used. Furthermore, a piezoelectric single crystal such as LiTaO3 may be used.
　気泡発生装置１では、液体に接する振動板２の構造を例えばガラス板とし、筒状体３を介して圧電素子４により振動板２を振動させる構成にすることで、気体を導入する空間と液体とを完全分離することができる。気体を導入する空間と液体とを完全分離することで、圧電素子４の電気配線等が液体に浸かることを防止できる。また、気泡発生装置１では、液体槽１０の液体に対して紫外光を発する光源を設ける場合でも、気体を導入する空間に当該光源を設けることができるので、当該光源の電気配線等が液体に浸かることも防止できる。 In the air bubble generating device 1, the structure of the diaphragm 2 in contact with the liquid is, for example, a glass plate. and can be completely separated. By completely separating the space into which the gas is introduced from the liquid, it is possible to prevent the electrical wiring of the piezoelectric element 4 from being immersed in the liquid. Further, in the bubble generator 1, even when a light source that emits ultraviolet light is provided for the liquid in the liquid tank 10, the light source can be provided in the space into which the gas is introduced. It can also prevent drowning.
　気泡発生装置１では、底部を有するバネ部３２の側面から連通部３２ａを通じて第１筒状体３１内に空気が流入するため、バネ部３２の下面に設けられた圧電素子４に液体が触れることがない。これにより、気泡発生装置１は、振動板２の細孔から滲み出した液体による圧電素子４の化学的、電気的な劣化を防止することができる。 In the air bubble generator 1, since air flows into the first cylindrical body 31 from the side surface of the spring portion 32 having a bottom through the communication portion 32a, the liquid does not come into contact with the piezoelectric element 4 provided on the lower surface of the spring portion 32. There is no As a result, the bubble generator 1 can prevent the piezoelectric element 4 from chemically and electrically deteriorating due to the liquid seeping out from the pores of the diaphragm 2 .
　次に、気泡発生装置１での振動板２の振動について詳しく説明する。図５は、本実施の形態に係る気泡発生装置１の振動板２の振動を説明するための図である。図５には、気泡発生装置１の断面図に、振動板２の振動についてシミュレーションした結果の変位が示されている。図５では、振動を開始する前の気泡発生装置１の基準位置を破線で示し、変位後の気泡発生装置１の位置を実線で示す。 　Next, the vibration of the diaphragm 2 in the air bubble generator 1 will be described in detail. FIG. 5 is a diagram for explaining the vibration of diaphragm 2 of air bubble generator 1 according to the present embodiment. FIG. 5 shows a cross-sectional view of the air bubble generator 1 showing the displacement resulting from a simulation of vibration of the diaphragm 2 . In FIG. 5, the dashed line indicates the reference position of the air bubble generator 1 before starting vibration, and the solid line indicates the position of the air bubble generator 1 after displacement.
　コントローラ２０（図１参照）からの駆動信号に基づいて、圧電素子４を第１筒状体３１の貫通方向に振動させると、例えば、図５に示すようにバネ部３２が下方に変位する。第１筒状体３１を支持しているバネ部３２の位置が下側に沈み込むことにより、第１筒状体３１の全体が下方に変位する結果、第１筒状体３１に保持されている振動板２の全体が下方に変位する。このとき、ノード（圧電素子４の振動によっても変位しない部分）は、バネ部３２の外側の端部または第２筒状体３３の外側面に形成される。そのため、バネ部３２の外側の端部または第２筒状体３３の外側面において液体槽１０と結合することにより、圧電素子４の振動を実質的に液体槽１０に伝えずに振動板２を振動させることができる。 When the piezoelectric element 4 is vibrated in the penetrating direction of the first cylindrical body 31 based on the drive signal from the controller 20 (see FIG. 1), the spring portion 32 is displaced downward as shown in FIG. 5, for example. When the position of the spring portion 32 supporting the first tubular body 31 sinks downward, the first tubular body 31 as a whole is displaced downward. The entire vibrating plate 2 is displaced downward. At this time, a node (a portion that is not displaced by vibration of the piezoelectric element 4) is formed on the outer end of the spring portion 32 or the outer surface of the second cylindrical body 33. FIG. Therefore, by coupling the liquid reservoir 10 to the outer end of the spring portion 32 or the outer surface of the second cylindrical body 33 , the vibration of the piezoelectric element 4 is not substantially transmitted to the liquid reservoir 10 and the diaphragm 2 can be moved. It can vibrate.
　ここで、バネ部３２の側面には、連通部３２ａに通じる開口が設けられている。ノードは、バネ部３２の外側の端部に形成されるため、連通部３２ａに通じる開口にノードが形成されることになる。これにより、圧電素子４の振動によっても変位しない連通部３２ａに通じる開口から効果的に気体を流入させることができる。 Here, the side surface of the spring portion 32 is provided with an opening communicating with the communicating portion 32a. Since the node is formed at the outer end of the spring portion 32, the node is formed at the opening leading to the communicating portion 32a. As a result, the gas can be effectively introduced from the opening leading to the communicating portion 32a which is not displaced even by the vibration of the piezoelectric element 4. As shown in FIG.
　図示していないが、圧電素子４を振動させ続けることにより、バネ部３２が下方に変位した後、バネ部３２が上方に変位する。第１筒状体３１を支持しているバネ部３２の位置が上側にせり上がることにより、第１筒状体３１の全体が上方に変位する結果、第１筒状体３１に保持されている振動板２の全体が上方に変位する。 Although not shown, by continuing to vibrate the piezoelectric element 4, the spring portion 32 is displaced downward and then upward. When the position of the spring portion 32 supporting the first tubular body 31 rises upward, the entire first tubular body 31 is displaced upward, and as a result, it is held by the first tubular body 31. The entire diaphragm 2 is displaced upward.
　本実施の形態に係る気泡発生装置１では、上述したように圧電素子４を振動させることにより、振動板２自体がほぼ変形することなく、振動板２の全体が略均一に上下方向に変位する。そのため、気泡発生装置１では、バネ部３２の上下共振を利用して振動板２を平面的に駆動することにより、振動板２のどの位置においても同じせん断応力となり、振動板２の複数の細孔を通って送り込まれた気体を当該せん断応力により引きちぎり均等な気泡を発生させる。 In the air bubble generating device 1 according to the present embodiment, by vibrating the piezoelectric element 4 as described above, the diaphragm 2 itself is substantially not deformed, and the entire diaphragm 2 is substantially uniformly displaced in the vertical direction. . Therefore, in the air bubble generator 1 , by driving the diaphragm 2 in a planar manner using the vertical resonance of the spring portion 32 , the same shear stress is applied at any position of the diaphragm 2 , and the plurality of fine lines of the diaphragm 2 are subjected to the same shear stress. The gas sent through the holes is torn off by the shear stress to generate uniform bubbles.
　（まとめ）
　以上のように、本実施の形態に係る気泡発生装置１は、液体槽１０に取り付け、液体槽１０の液体中に微細な気泡を発生させる。気泡発生装置１は、振動板２と、第１筒状体３１と、バネ部３２と第２筒状体３３と、圧電素子４と、を備える。振動板２は、複数の開口部が形成され、一方の面が液体と接し、他方の面が気体と接する位置に設けられる。第１筒状体３１は、一方の端で振動板２を支持する。バネ部３２は、板状体であり、第１筒状体３１の他方の端を支持する。第２筒状体３３は、第１筒状体３１を支持する位置より外側にある位置においてバネ部３２を一方の端で支持する。圧電素子４は、バネ部３２を振動させる。バネ部３２は、側面から振動板２の他方の面側の第１筒状体３１内に気体を流入させる連通部３２ａを有する。 (summary)
As described above, the bubble generator 1 according to the present embodiment is attached to the liquid tank 10 and generates fine bubbles in the liquid in the liquid tank 10 . The air bubble generator 1 includes a diaphragm 2 , a first tubular body 31 , a spring portion 32 , a second tubular body 33 , and a piezoelectric element 4 . Diaphragm 2 is provided at a position where a plurality of openings are formed and one surface is in contact with liquid and the other surface is in contact with gas. The first tubular body 31 supports the diaphragm 2 at one end. The spring portion 32 is a plate-like body and supports the other end of the first tubular body 31 . One end of the second tubular body 33 supports the spring portion 32 at a position outside the position where the first tubular body 31 is supported. The piezoelectric element 4 vibrates the spring portion 32 . The spring portion 32 has a communicating portion 32a that allows gas to flow into the first cylindrical body 31 on the other side of the diaphragm 2 from the side surface.
　これにより、気泡発生装置１は、バネ部３２の側面から連通部３２ａを通じて第１筒状体３１内に空気が流入するため、圧電素子４に液体が触れることがない。よって、気泡発生装置１は、振動板２の細孔から滲み出した液体による圧電素子４の化学的、電気的な劣化を防止することができる。 As a result, air flows into the first cylindrical body 31 from the side surface of the spring portion 32 through the communicating portion 32a in the air bubble generating device 1, so that the piezoelectric element 4 is not touched by the liquid. Therefore, the bubble generator 1 can prevent the piezoelectric element 4 from chemically and electrically deteriorating due to the liquid seeping out from the pores of the diaphragm 2 .
　気泡発生装置１は、液体槽１０の第１保持板５で保持される。気泡発生装置１は、バネ部３２の側面にある連通部３２ａの開口が液体槽１０の液体を入れる側に対して外側となる位置で、第１保持板５の端部とバネ部３２の側面とが結合する。これにより、気泡発生装置１は、バネ部３２の外側の端部がノードとなるため、圧電素子４の振動を実質的に液体槽１０に伝えずに振動板２を振動させることができる。 The bubble generator 1 is held by the first holding plate 5 of the liquid tank 10 . The air bubble generating device 1 is arranged such that the opening of the communicating portion 32a on the side surface of the spring portion 32 is located outside the liquid container side of the liquid tank 10, and the end portion of the first holding plate 5 and the side surface of the spring portion 32 are connected to each other. and are combined. As a result, the bubble generator 1 can vibrate the vibration plate 2 without substantially transmitting the vibration of the piezoelectric element 4 to the liquid tank 10 because the outer end of the spring portion 32 serves as a node.
　気泡発生装置１は、液体槽１０の第２保持板６でさらに保持される。気泡発生装置１は、バネ部３２の側面にある連通部３２ａの開口が、第１保持板５と第２保持板６との間に挟まれた位置にある。これにより、気泡発生装置１は、第１保持板５と第２保持板６とで挟まれる領域である空間１０ｂから連通部３２ａを通過し空気が第１筒状体３１内へ流入するため、振動板２の細孔から滲み出した液体による圧電素子４の化学的、電気的な劣化を防止することができる。 The bubble generator 1 is further held by the second holding plate 6 of the liquid tank 10 . The air bubble generator 1 is positioned such that the opening of the communicating portion 32 a on the side surface of the spring portion 32 is sandwiched between the first holding plate 5 and the second holding plate 6 . As a result, in the air bubble generator 1, air flows from the space 10b, which is the area sandwiched between the first holding plate 5 and the second holding plate 6, through the communicating portion 32a and into the first tubular body 31. It is possible to prevent the piezoelectric element 4 from chemically and electrically deteriorating due to the liquid exuding from the pores of the vibration plate 2 .
　圧電素子４は、第２筒状体３３に支持される側のバネ部３２の面に設けられている。これにより、気泡発生装置１は、バネ部３２を効果的に振動させることができる。 The piezoelectric element 4 is provided on the surface of the spring portion 32 that is supported by the second tubular body 33 . Thereby, the bubble generator 1 can vibrate the spring portion 32 effectively.
　（変形例１）
　前述の実施の形態に係る気泡発生装置１では、バネ部３２の連通部３２ａ内を通じて液体槽１０へ向けて配管７が配置されるようにし、第２保持板６を設けない構成としてもよい。筒状体３は、つば部３４と第３筒状体３５とを設けない構成であってもよい。図６は、本実施の形態の変形例１に係る気泡発生装置１ａの斜視断面図である。なお、図６に示す気泡発生装置１ａのうち、図１から図３に示す気泡発生装置１と同じ構成については同じ符号を付して詳しい説明は繰り返さない。 (Modification 1)
In the air bubble generator 1 according to the above-described embodiment, the pipe 7 may be arranged toward the liquid tank 10 through the communicating portion 32a of the spring portion 32, and the second holding plate 6 may not be provided. The tubular body 3 may have a configuration in which the flange portion 34 and the third tubular body 35 are not provided. FIG. 6 is a perspective cross-sectional view of an air bubble generator 1a according to Modification 1 of the present embodiment. In the air bubble generator 1a shown in FIG. 6, the same components as those of the air bubble generator 1 shown in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
　気泡発生装置１ａは、バネ部３２の連通部３２ａ内を通じて液体槽１０へ向けて配管７が配置される。気泡発生装置１ａは、第１保持板５によって保持され、第２保持板６が設けられていない。気泡発生装置１ａでは、液体槽１０の外部からの空気が第１筒状体３１の内側へ流入する四方に延びる配管７を通じて流入する。このため、気泡発生装置１ａでは、実施の形態１の気泡発生装置１のように気体の流路を形成するための第２保持板６を無くすことができる。 In the air bubble generator 1a, the pipe 7 is arranged to face the liquid tank 10 through the communicating portion 32a of the spring portion 32. The bubble generator 1a is held by the first holding plate 5, and the second holding plate 6 is not provided. In the air bubble generator 1a, the air from the outside of the liquid tank 10 flows into the inside of the first cylindrical body 31 through the pipes 7 extending in all directions. Therefore, in the air bubble generator 1a, unlike the air bubble generator 1 of the first embodiment, the second holding plate 6 for forming the gas flow path can be eliminated.
　なお、図６において四方の配管７のうち一方向については図示されていない。配管７は、少なくとも一方向に延びていればよく、二方向、三方向であってもよく、五方向以上に延びるように設けてもよい。配管７は、連通部３２ａ内を通じるのではなく、バネ部３２の側面の開口から延びるようにしてもよい。 In addition, in FIG. 6, one direction of the four pipes 7 is not shown. The pipe 7 may extend in at least one direction, may extend in two directions, three directions, or may extend in five or more directions. The pipe 7 may extend from an opening in the side surface of the spring portion 32 instead of passing through the communicating portion 32a.
　気泡発生装置１ａは、バネ部３２の側面にある連通部３２ａの開口に接続され、連通部３２ａに気体を流入させる配管７を備えている。これにより、気泡発生装置１ａは、配管７を通過した空気が第１筒状体３１内へ流入するため、振動板２の細孔から滲み出した液体による圧電素子４の化学的、電気的な劣化を防止することができる。 The air bubble generator 1a includes a pipe 7 that is connected to an opening of a communicating portion 32a on the side surface of the spring portion 32 and allows gas to flow into the communicating portion 32a. As a result, the air passing through the pipe 7 flows into the first tubular body 31 in the air bubble generator 1 a , so that the piezoelectric element 4 is chemically and electrically affected by the liquid seeping out from the pores of the vibration plate 2 . Deterioration can be prevented.
　（変形例２）
　変形例２では、変形例１とは異なり筒状体３の構造が異なるようにしてもよい。具体的には、変形例２の気泡発生装置１ｂは、バネ部３２Ｘを中空円状としてもよい。中空円状のバネ部３２Ｘの下面には、圧電素子４の替わりに蓋部８を設けるようにすればよい。圧電素子４は、錘部３６において第２筒状体３３とは反対側の端部に設けられるようにすればよい。図７は、本実施の形態の変形例２に係る気泡発生装置１ｂの斜視断面図である。なお、図７に示す気泡発生装置１ｂのうち、変形例１に示す気泡発生装置１ａと同じ構成については同じ符号を付して詳しい説明は繰り返さない。 (Modification 2)
In modified example 2, unlike modified example 1, the structure of the cylindrical body 3 may be different. Specifically, in the air bubble generator 1b of Modification 2, the spring portion 32X may be hollow circular. Instead of the piezoelectric element 4, the lid portion 8 may be provided on the lower surface of the hollow circular spring portion 32X. The piezoelectric element 4 may be provided at the end of the weight portion 36 opposite to the second cylindrical body 33 . FIG. 7 is a perspective cross-sectional view of an air bubble generator 1b according to Modification 2 of the present embodiment. In the air bubble generator 1b shown in FIG. 7, the same components as those of the air bubble generator 1a shown in Modification 1 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
　気泡発生装置１ｂは、第２筒状体３３の外側面と液体槽１０の内壁面とが第１保持板５により結合されている。気泡発生装置１ａは、液体槽１０の外部からの空気を第１筒状体３１の内側へ流入する四方に延びる配管７が設けられている。図７に示すように、配管７は、第１保持板５よりも振動板２側に配置されるため液体中に位置することになる。バネ部３２の下面側には第１筒状体側から液体が進入しないように蓋部８が設けられている。圧電素子４は、錘部３６において第２筒状体３３とは反対側の端部の周方向に設けられている。 In the air bubble generator 1b, the outer surface of the second cylindrical body 33 and the inner wall surface of the liquid tank 10 are connected by the first holding plate 5. The air bubble generating device 1 a is provided with pipes 7 extending in all directions for introducing air from the outside of the liquid tank 10 into the inside of the first cylindrical body 31 . As shown in FIG. 7, the pipe 7 is arranged closer to the vibration plate 2 than the first holding plate 5, and thus is positioned in the liquid. A lid portion 8 is provided on the lower surface side of the spring portion 32 to prevent liquid from entering from the first cylindrical body side. The piezoelectric element 4 is provided in the circumferential direction at the end of the weight portion 36 opposite to the second cylindrical body 33 .
　気泡発生装置１ｂは、液体槽１０の第１保持板５で保持されている。気泡発生装置１ｂは、バネ部３２の側面にある連通部３２ａの開口が液体槽１０の内側となる位置で、第１保持板５の端部と第２筒状体３３の側面とが結合している。気泡発生装置１ｂは、バネ部３２の側面にある連通部３２ａの開口に接続され、連通部３２ａに気体を流入させる配管７を備える。これにより、気泡発生装置１ｂは、連通部３２ａの開口が液体槽１０の内側となる位置においても配管７を通過した空気が第１筒状体３１内へ流入するため、振動板２の細孔から滲み出した液体による圧電素子４の化学的、電気的な劣化を防止することができる。 The bubble generator 1 b is held by the first holding plate 5 of the liquid tank 10 . In the air bubble generator 1b, the end portion of the first holding plate 5 and the side surface of the second cylindrical body 33 are connected at a position where the opening of the communication portion 32a on the side surface of the spring portion 32 is inside the liquid tank 10. ing. The air bubble generator 1b includes a pipe 7 connected to an opening of a communicating portion 32a on the side surface of the spring portion 32 and allowing gas to flow into the communicating portion 32a. As a result, air passing through the pipe 7 flows into the first tubular body 31 even when the opening of the communicating portion 32a is inside the liquid tank 10, so that the air bubble generating device 1b is closed to the pores of the diaphragm 2. It is possible to prevent chemical and electrical deterioration of the piezoelectric element 4 due to the liquid exuded from.
　（変形例３）
　前述の実施の形態に係る気泡発生装置１では、バネ部３２に設けられる連通部３２ａの形状が水平方向に延びる穴であったが、これに限定されない。図８は、本実施の形態の変形例３に係るバネ部３８の斜視図である。 (Modification 3)
In the air bubble generator 1 according to the above-described embodiment, the shape of the communicating portion 32a provided in the spring portion 32 is a hole extending in the horizontal direction, but it is not limited to this. FIG. 8 is a perspective view of a spring portion 38 according to Modification 3 of the present embodiment.
　図８に示すように、バネ部３８は、中央に凹部３８ｂが設けられている。凹部３８ｂの側面から繋がるようにバネ部３８の側面に向けて階段状に気体が流通する連通部３８ａが設けられている。このようにすれば、連通部３８ａは、液体槽１０の側面から多くの空気を流入させることができる。 As shown in FIG. 8, the spring part 38 is provided with a recess 38b in the center. A communication portion 38a through which gas flows is provided in a stepwise manner toward the side surface of the spring portion 38 so as to be connected from the side surface of the recess portion 38b. By doing so, the communicating portion 38 a can allow a large amount of air to flow in from the side surface of the liquid tank 10 .
　（その他の変形例）
　前述の実施の形態に係る気泡発生装置１では、圧電素子４に液体槽１０の液体に合わせ、耐薬品、耐水のコーティングを施してもよい。 (Other modifications)
In the air bubble generator 1 according to the above-described embodiment, the piezoelectric element 4 may be coated with a chemical-resistant and water-resistant coating that matches the liquid in the liquid tank 10 .
　今回開示された実施の形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本開示の範囲は、上記した実施の形態の説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 The embodiments disclosed this time should be considered illustrative in all respects and not restrictive. The scope of the present disclosure is indicated by the scope of the claims rather than the description of the above-described embodiments, and is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.
　１，１ａ，１ｂ　気泡発生装置、２　振動板、３　筒状体、４　圧電素子、５　第１保持板、６　第２保持板、７　配管、８　蓋部、１０　液体槽、１０ａ　縦穴、１０ｂ　空間、２０　コントローラ、３１　第１筒状体、３２　バネ部、３２ａ　連通部、３２ｂ　凹部、３３　第２筒状体、３３ａ　フランジ部、３４　つば部、３５　第３筒状体、３６　錘部、１００　気泡発生システム、２００　気泡。 1, 1a, 1b bubble generator, 2 diaphragm, 3 cylindrical body, 4 piezoelectric element, 5 first holding plate, 6 second holding plate, 7 piping, 8 lid, 10 liquid tank, 10a vertical hole, 10b space , 20 controller, 31 first cylindrical body, 32 spring part, 32a communicating part, 32b recessed part, 33 second cylindrical body, 33a flange part, 34 flange part, 35 third cylindrical body, 36 weight part, 100 air bubble Generation system, 200 bubbles.

Claims (7)

  1. 　液体槽に取り付け、前記液体槽の液体中に微細な気泡を発生させる気泡発生装置であって、
    　複数の開口部が形成され、一方の面が液体と接し、他方の面が気体と接する位置に設けられる振動板と、
    　一方の端で前記振動板を支持する第１筒状体と、
    　前記第１筒状体の他方の端を支持する板状のバネ部と、
    　前記第１筒状体を支持する位置より外側にある位置において前記バネ部を一方の端で支持する第２筒状体と、
    　前記バネ部を振動させる圧電素子と、を備え、
    　前記バネ部は、側面から前記振動板の前記他方の面側の前記第１筒状体内に気体を流入させる少なくとも１つの連通部を有する、気泡発生装置。     A bubble generator attached to a liquid tank and generating fine bubbles in the liquid in the liquid tank,
    a diaphragm provided at a position where a plurality of openings are formed and one surface is in contact with the liquid and the other surface is in contact with the gas;
    a first tubular body supporting the diaphragm at one end;
    a plate-like spring portion that supports the other end of the first tubular body;
    a second tubular body that supports the spring portion at one end at a position outside the position that supports the first tubular body;
    and a piezoelectric element that vibrates the spring portion,
    The air bubble generating device, wherein the spring portion has at least one communication portion for allowing gas to flow into the first tubular body on the other surface side of the diaphragm from a side surface.
  2. 　前記気泡発生装置が、前記液体槽の第１の保持板で保持され、
    　前記バネ部の側面にある前記連通部の開口が前記液体槽の液体を入れる側に対して外側となる位置で、前記第１の保持板の端部と前記バネ部の側面とが結合する、請求項１に記載の気泡発生装置。     The bubble generator is held by a first holding plate of the liquid tank,
    The end of the first holding plate and the side surface of the spring unit are coupled at a position where the opening of the communicating portion on the side surface of the spring portion is outside the liquid reservoir side of the liquid tank, The bubble generator according to claim 1.
  3. 　前記気泡発生装置が、前記液体槽の第２の保持板でさらに保持され、
    　前記バネ部の側面にある前記連通部の開口が、前記第１の保持板と前記第２の保持板との間に挟まれた位置にある、請求項２に記載の気泡発生装置。     the bubble generator is further held by a second holding plate of the liquid bath;
    3. The air bubble generating device according to claim 2, wherein the opening of the communicating portion on the side surface of the spring portion is located between the first holding plate and the second holding plate.
  4. 　前記バネ部の側面にある前記連通部の開口に接続され、前記連通部に気体を流入させる配管をさらに備える、請求項２または請求項３に記載の気泡発生装置。 The air bubble generating device according to claim 2 or 3, further comprising a pipe connected to an opening of said communication part on a side surface of said spring part and allowing gas to flow into said communication part.
  5. 　前記気泡発生装置が、前記液体槽の第１の保持板で保持され、
    　前記バネ部の側面にある前記連通部の開口が前記液体槽の内側となる位置で、前記第１の保持板の端部と前記第２筒状体の側面とが結合し、
    　前記バネ部の側面にある前記連通部の開口に接続され、前記連通部に気体を流入させる配管をさらに備える、請求項１に記載の気泡発生装置。     The bubble generator is held by a first holding plate of the liquid tank,
    the end of the first holding plate and the side surface of the second cylindrical body are coupled at a position where the opening of the communicating portion on the side surface of the spring portion is inside the liquid tank;
    2. The air bubble generator according to claim 1, further comprising a pipe connected to an opening of said communicating portion on a side surface of said spring portion and allowing gas to flow into said communicating portion.
  6. 　前記圧電素子は、前記第２筒状体に支持される側の前記バネ部の面に設けられている、請求項１から請求項５のいずれか１項に記載の気泡発生装置。 The air bubble generator according to any one of claims 1 to 5, wherein the piezoelectric element is provided on the surface of the spring portion that is supported by the second cylindrical body.
  7. 　請求項１～請求項６のいずれか１項に記載の気泡発生装置と、
    　前記液体槽と、を備える、気泡発生システム。     The air bubble generator according to any one of claims 1 to 6,
    and the liquid bath.
PCT/JP2021/047549 2021-03-09 2021-12-22 Bubble generation device and bubble generation system WO2022190570A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023228589A1 (en) * 2022-05-25 2023-11-30 株式会社村田製作所 Bubble generator and bubble generating system

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001197594A (en) * 1999-10-28 2001-07-19 Murata Mfg Co Ltd Ultrasonic wave vibrator
JP2004097851A (en) * 2002-09-04 2004-04-02 Murata Mfg Co Ltd Ultrasonic vibration apparatus
JP2006087984A (en) * 2004-09-21 2006-04-06 Ngk Insulators Ltd Apparatus for jetting air bubble
WO2018207395A1 (en) * 2017-05-12 2018-11-15 株式会社村田製作所 Vibration device
WO2020189270A1 (en) * 2019-03-19 2020-09-24 株式会社村田製作所 Air bubble generation device
WO2020189272A1 (en) * 2019-03-20 2020-09-24 株式会社村田製作所 Bubble generation device
WO2020189271A1 (en) * 2019-03-19 2020-09-24 株式会社村田製作所 Bubble generation device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001197594A (en) * 1999-10-28 2001-07-19 Murata Mfg Co Ltd Ultrasonic wave vibrator
JP2004097851A (en) * 2002-09-04 2004-04-02 Murata Mfg Co Ltd Ultrasonic vibration apparatus
JP2006087984A (en) * 2004-09-21 2006-04-06 Ngk Insulators Ltd Apparatus for jetting air bubble
WO2018207395A1 (en) * 2017-05-12 2018-11-15 株式会社村田製作所 Vibration device
WO2020189270A1 (en) * 2019-03-19 2020-09-24 株式会社村田製作所 Air bubble generation device
WO2020189271A1 (en) * 2019-03-19 2020-09-24 株式会社村田製作所 Bubble generation device
WO2020189272A1 (en) * 2019-03-20 2020-09-24 株式会社村田製作所 Bubble generation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023228589A1 (en) * 2022-05-25 2023-11-30 株式会社村田製作所 Bubble generator and bubble generating system

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